JP5553065B2 - Substrate transfer hand and substrate transfer robot - Google Patents

Description

  The disclosed embodiment relates to a substrate transfer hand and a substrate transfer robot.

  2. Description of the Related Art Conventionally, there has been known a substrate transport robot including a hand for transporting a thin plate workpiece such as a semiconductor wafer (hereinafter referred to as “substrate”).

  For example, Patent Document 1 proposes a substrate transport hand that transports a substrate by gripping the peripheral edge of the substrate by a pair of arms provided on the hand.

JP 2001-274232 A

  However, the above-described conventional substrate transfer hand can transfer substrates one by one.

  For this reason, in order to simultaneously transport a plurality of substrates by a conventional substrate transport robot, it is necessary to provide a plurality of hands. As a result, the conventional substrate transfer hand and substrate transfer robot have a problem of high manufacturing cost and weight.

  One aspect of the embodiments has been made in view of the above, and provides a substrate transfer hand and a substrate transfer robot capable of simultaneously reducing a manufacturing cost and reducing the weight and simultaneously transferring a plurality of substrates. For the purpose.

A substrate carrying hand according to an aspect of the embodiment includes a first placement unit and a second placement unit. The first placement unit is provided on an upper surface side of the hand main body unit, and includes a plurality of support units that support the substrate on a placement surface having a predetermined height, and the second placement unit includes the hand A plurality of support portions which are provided on the upper surface side of the main body portion and support the substrate on the placement surface above the height of the placement surface of the first placement portion, one or more of the support portions being It can be evacuated. The substrate transfer hand places the first substrate on the first placement portion in a state where the retractable support portion of the second placement portion is retracted, and further retracts the substrate. The second substrate is placed on the second placement portion in a state where the retracting of the possible support portion is released.

  According to one aspect of the embodiment, the manufacturing cost can be reduced and the weight can be reduced, and a plurality of substrates can be simultaneously conveyed.

FIG. 1 is a schematic perspective view of the substrate transfer robot according to the first embodiment. FIG. 2 is a schematic perspective view of the substrate carrying hand according to the first embodiment. FIG. 3A is a side view (part 1) of the hand main body according to the first embodiment. FIG. 3B is a side view (part 2) of the hand main body according to the first embodiment. FIG. 4A is a side view 3 of the hand main body according to the first embodiment. FIG. 4B is a first top view of the hand body portion according to the first embodiment. FIG. 5A is a side view part 4 of the hand main body according to the first embodiment. FIG. 5B is a second top view of the hand main body according to the first embodiment. FIG. 6A is a first side view of the hand main body portion according to the second embodiment. FIG. 6B is a side view (part 2) of the hand main body according to the second embodiment. FIG. 6C is a side view (No. 3) of the hand main body according to the second embodiment. FIG. 7A is a side view of the hand main body according to the third embodiment. FIG. 7B is a top view of the hand main body according to the third embodiment.

  Hereinafter, embodiments of a substrate transport hand and a substrate transport robot disclosed in the present application will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by embodiment shown below.

(First embodiment)
First, the substrate transfer robot 1 according to the first embodiment will be described with reference to FIG. FIG. 1 is a schematic perspective view of a substrate transfer robot 1 according to the first embodiment. In the following description, the coordinate axes as shown in the lower right of the figure will be used as appropriate, and in the figure, some shapes are simplified for ease of explanation.

  As shown in FIG. 1, the substrate transfer robot 1 according to the first embodiment is an articulated robot, and includes a base 2, a support 3, joints 4, 6, 8, arms 5, 7, and a substrate A transport hand 10.

  Further, a control device 200 is connected to the substrate transport robot 1, and operations such as activation and stop of the substrate transport robot 1 are controlled by the control device 200, and the substrate is transported by the substrate transport hand 10.

  Further, by creating a program for operating the substrate transport robot 1 by the control device 200 (hereinafter referred to as “teaching”), and reproducing the teaching data taught, the substrate transport robot 1 Perform operations such as transport. Here, the substrate refers to a thin plate workpiece such as a semiconductor wafer or a glass substrate.

  The support column 3 is provided so as to be slidable in the vertical direction (Z-axis direction) from the base 2. Thereby, the substrate transport hand 10 moves up and down in the vertical direction (Z-axis direction).

  The arm 5 is connected to the distal end portion of the support column 3 via the joint portion 4. Thereby, the arm 5 is rotatably supported by the tip end portion of the support column 3 around the joint axis O <b> 1 of the joint portion 4. The arm 7 is connected to the distal end portion of the arm 5 via the joint portion 6. As a result, the arm 7 is rotatably supported by the distal end portion of the arm 5 around the joint axis O2 of the joint portion 6.

  The two substrate transfer hands 10 are connected to the distal end portion of the arm 7 through the joint portion 8 at the base end portion. As a result, the two substrate transfer hands 10 are rotatably supported at the tip of the arm 7 around the joint axis O3 of the joint 8. Note that the base ends of the two substrate carrying hands 10 are covered with a cover 10a.

  In the substrate transfer robot 1, the arm 5 and the arm 7 rotate by driving an actuator or a motor (not shown) built in the substrate transfer robot 1. Thereby, the substrate transport hand 10 moves linearly in the horizontal direction (X-axis direction and Y-axis direction).

  In the conventional substrate transfer robot, only one substrate can be transferred by one substrate transfer hand. Therefore, a substrate transfer robot having two substrate transfer hands as described above can transfer only two substrates.

  Thus, in order to simultaneously transport a plurality of substrates, it is necessary to provide as many substrate transporting hands as the number of substrates to be transported. For this reason, the conventional substrate transfer hand and the substrate transfer robot require a manufacturing cost and a heavy weight for providing the substrate transfer hands for the number of substrates to be transferred simultaneously. Therefore, the substrate transfer robot 1 according to the first embodiment has a configuration in which two substrates can be transferred by one substrate transfer hand 10.

  Specifically, the substrate transport hand 10 includes a placement unit (hereinafter referred to as a “first placement unit”) for placing a predetermined substrate on a placement surface having a predetermined height. Further, the substrate transport hand 10 is a mounting unit (hereinafter referred to as “second mounting unit”) on which another substrate is mounted on a mounting surface higher than the mounting surface height of the first mounting unit. Is described).

  First, the substrate transport robot 1 places the substrate on the first placement unit in a state where the retractable support unit provided in the second placement unit is retracted. Further, the substrate transport robot 1 places another substrate on the second placement portion in a state where the retractable support portion is released.

  By doing in this way, in the substrate transfer hand 10 and the substrate transfer robot 1 according to the first embodiment, reduction in manufacturing cost and weight reduction for providing the substrate transfer hands for the number of substrates to be transferred simultaneously are achieved. At the same time, a plurality of substrates can be transported simultaneously.

  Next, details of the substrate carrying hand 10 according to the first embodiment will be described with reference to FIG. FIG. 2 is a schematic perspective view of the substrate carrying hand 10 according to the first embodiment. FIG. 2 shows the substrate carrying hand 10 in a state where the cover 10 a provided at the base end is removed in order to explain the configuration of the base end of the substrate carrying hand 10.

  As shown in FIG. 2, the two substrate transport hands 10 are arranged so as to overlap in the vertical direction. Since the upper and lower two substrate transfer hands 10 have the same configuration, only one of the substrate transfer hands 10 will be described here.

  The substrate transfer hand 10 includes a hand main body 11, a distal end side support 12, a first proximal end support 13, a second proximal end support 14, a mounting portion 15, a connecting portion 16, and the like. Air cylinders 17 and 19 and pressing portions 18a and 18b are provided.

  The pair of distal end side support portions 12 are fixed to the respective distal ends of the hand main body portion 11 whose front ends are opened in a V shape, and support the substrate on the distal end side (the positive direction of the X axis) of the hand main body portion 11. Moreover, the front end side support part 12 is formed with two stages of placement surfaces having different heights. In the following description, the higher placement surface is referred to as the upper placement surface, and the lower placement surface is referred to as the lower placement surface.

  The pair of first base end side support portions 13 are respectively fixed to the base end side (the negative direction of the X axis) of the upper surface of the hand main body portion 11, and are arranged on the base end side (the negative direction of the X axis) of the hand main body portion 11. Support.

  Further, the first base end side support portion 13 is formed with a placement surface having a height corresponding to the lower placement surface of the distal end side support portion 12. The substrate is placed in a substantially horizontal state on the lower stage placement surface of the distal end side support portion 12 and the placement surface of the first base end side support portion 13.

  The pair of second base end side support portions 14 is provided in the vicinity of the first base end side support portion 13 on the base end side (the negative direction of the X axis) on the upper surface of the hand main body portion 11, and linearly moves in the X axis direction. Is possible. Further, the second base end side support portion 14 supports the substrate on the base end side (the negative direction of the X axis) of the hand main body portion 11.

  The second base end support portion 14 is formed with a placement surface having a height corresponding to the upper placement surface of the distal end side support portion 12. The substrate is placed in a substantially horizontal state on the upper stage placement surface of the distal end side support portion 12 and the placement surface of the second base end side support portion 14. Details of the shapes of the distal end side support portion 12, the first proximal end side support portion 13 and the second proximal end side support portion 14 will be described later with reference to FIGS. 3A and 3B.

  The pair of attachment portions 15 are respectively connected to the second proximal end support portion 14 and arranged in parallel to each other. The pair of attachment portions 15 are connected to each other via a connection portion 16 formed in a substantially U shape on the base end side (the negative direction of the X axis) of the upper surface of the hand main body portion 11.

  The connecting portion 16 can be linearly moved in the X-axis direction by an air cylinder 17 connected to the connecting portion 16. When the connecting portion 16 moves linearly in the X-axis direction, each attachment portion 15 and each second base-end support portion 14 connected to the attachment portion 15 moves linearly in the X-axis direction.

  The pressing part 18a can be linearly moved in the X-axis direction by an air cylinder 19 connected to the pressing part 18a. The pressing portion 18a moves linearly, thereby pressing the peripheral edge portion of the substrate supported by the distal end side support portion 12 and the first proximal end support portion 13 to thereby move the distal end side (of the X axis of the hand main body portion 11). Press the substrate in the positive direction.

  The pressing part 18b can be linearly moved in the X-axis direction by an air cylinder 19 connected to the pressing part 18b. The pressing portion 18b moves linearly, thereby pressing the peripheral portion of the substrate supported by the distal end side support portion 12 and the second proximal end support portion 14 to thereby move the distal end side (of the X axis of the hand main body portion 11). Press the substrate in the positive direction.

  Next, details of the distal end side support portion 12, the first proximal end support portion 13, and the second proximal end support portion 14 will be described with reference to FIGS. 3A and 3B. FIGS. 3A and 3B are side views 1 and 2 of the hand main body 11 according to the first embodiment.

  First, as shown in FIG. 3A, a step is formed on the distal end side support portion 12 on the distal end side (positive direction of the X axis) of the hand main body portion 11, and a lower stage mounting surface 12a and a wall surface 12b are formed on the lower stage. The upper stage mounting surface 12c and the wall surface 12d are formed in the upper stage.

  The first base side support portion 13 on the base end side (the negative direction of the X axis) of the hand main body portion 11 is formed with a first placement surface 13a and a wall surface 13b, and the second base end side support portion 14 is formed. The second mounting surface 14a and the wall surface 14b are formed.

  The first placement surface 13a has a height corresponding to the lower placement surface 12a, and the second placement surface 14a has a height corresponding to the upper placement surface 12c. The height relationship between the lower stage mounting surface 12a and the upper stage mounting surface 12c will be described later with reference to FIG. 5A.

  The lower placement surface 12a and the first placement surface 13a are inclined so as to gradually become lower toward the center of the substrate 100a to be placed so as to be in line contact with the substrate 100a placed substantially horizontally. ing.

  Similarly, the upper placement surface 12c and the second placement surface 14a gradually become lower toward the center of the substrate 100b to be placed so as to be in line contact with the substrate 100b placed substantially horizontally. (See FIG. 3B).

  Thus, the 1st mounting part which mounts the board | substrate 100a shall include the lower stage mounting surface 12a, the wall surface 12b, the 1st mounting surface 13a, and the wall surface 13b. Moreover, the 2nd mounting part which mounts the board | substrate 100b shall contain the upper stage mounting surface 12c, the wall surface 12d, the 2nd mounting surface 14a, and the wall surface 14b.

  In the substrate transport hand 10 having the above-described configuration, the substrate 100a is mounted in a substantially horizontal state on the lower stage mounting surface 12a and the first mounting surface 13a with the second proximal end support portion 14 retracted. Put.

  Specifically, the substrate transfer robot 1 retracts the second base end support portion 14 by the air cylinder 17 so as to be positioned on the negative side of the X axis with respect to the first base end support portion 13. Thereby, the substrate transport robot 1 can prevent the second base end side support portion 14 from coming into contact with the substrate 100a.

  Then, the substrate transfer robot 1 moves the substrate transfer hand 10 to a substrate storage container (not shown) in which the substrate 100a is stored. The substrate storage container is a housing that stores the substrate 100a.

  For example, the substrate storage container may be a cassette compatible with SEMI (Semiconductor Equipment and Materials International) standard FOUP (Front Opening Unified Pod).

  In addition to the substrate storage container, the substrate 100a may be stored in another device such as an aligner device that detects and aligns (aligns) the direction of the substrate. Here, the case where the substrate transfer robot 1 places the substrate 100a stored in the cassette is shown.

  Further, the substrate transfer robot 1 moves the substrate transfer hand 10 so as to be positioned below the substrate 100a in the cassette, and further moves the substrate transfer robot 10 upward, thereby moving the substrate transfer robot 10 to the lower mounting surface 12a and the first mounting surface 13a. The substrate 100a is placed.

  Then, the board | substrate 100a is pressed to the front end side (X-axis positive direction) of the hand main-body part 11 with the press part 18a, and the board | substrate 100a is pressed against the wall surface 12b. Thereby, the substrate transport hand 10 can stably transport the placed substrate 100a and can suppress the upper surface of the hand main body 11 and the surface of the substrate 100a from coming into contact with each other.

  Subsequently, as shown in FIG. 3B, the substrate carrying hand 10 releases the second base end side support portion 14 so that the substrate 100b is placed substantially horizontally on the upper placement surface 12c and the second placement surface 14a. Place in the correct state.

  Specifically, the substrate transfer robot 1 moves the second base end side support portion 14 by the air cylinder 17 so as to be positioned closer to the positive direction side of the X axis than the first base end side support portion 13 (arrow in the figure). direction).

  Then, the substrate transfer robot 1 moves the substrate transfer hand 10 so as to be positioned below the substrate 100b in the cassette, and further moves it upward to move the upper transfer surface 12c and the second placement surface 14a. The substrate 100b is placed.

  Then, the board | substrate 100b is pressed to the front end side (positive direction of an X-axis) of the hand main-body part 11 with the press part 18b, and the board | substrate 100b is pressed against the wall surface 12d. Thereby, the board | substrate conveyance hand 10 can convey the mounted board | substrate 100b stably.

  Here, when the substrate 100a is placed, the substrate 100a is pressed by the pressing portion 18a, and when the substrate 100b is placed, the substrate 100b is pressed by the pressing portion 18b.

  However, the present invention is not limited to this. For example, after the two substrates 100a and 100b are placed, the substrate 100a and the substrate 100b may be simultaneously pressed by the pressing portion 18a and the pressing portion 18b. Thereby, the substrate transfer robot 1 can shorten the time required for placement. Further, in this case, the pressing portion 18a and the pressing portion 18b which are separate bodies may be integrated, whereby the board carrying hand 10 can reduce the number of components.

  Thus, in the substrate transfer robot 1 according to the first embodiment, two substrates 100 a and 100 b can be placed simultaneously by one substrate transfer hand 10.

  Next, details of the operation of the substrate carrying hand 10 will be described with reference to FIGS. 4A, 4B, 5A, and 5B. 4A is a third side view of the hand main body 11 according to the first embodiment, and FIG. 4B is a first top view 1 of the hand main body 11 according to the first embodiment. 5A is a fourth side view of the hand main body 11 according to the first embodiment. FIG. 5B is a second upper view of the hand main body 11 according to the first embodiment.

  First, as shown in FIGS. 4A and 4B, the substrate transport robot 1 is in a state where the substrate 100a is placed on the lower placement surface 12a and the first placement surface 13a. Furthermore, it is assumed that the second base end support portion 14 is in a state in which retraction is released, that is, a state in which the second base end support portion 14 is moved to be positioned on the positive side of the X axis with respect to the first base end support portion 13.

  The substrate 100b in the cassette is supported from the lower surface of the substrate 100b by the four substrate support members 101. From this state, the substrate transfer robot 1 moves the substrate transfer hand 10 so as to enter below the substrate 100b in the cassette (in the direction of the arrow in the figure).

  As shown in FIGS. 5A and 5B, the substrate transfer robot 1 moves the substrate transfer hand 10 upward (Z-axis normal) from the state where the substrate transfer hand 10 is moved to be positioned below the substrate 100b in the cassette. Direction).

  Accordingly, the substrate transfer robot 1 places the substrate 100b on the upper placement surface 12c and the second placement surface 14a, and the substrate 100b and the substrate support member 101 are not in contact with each other.

  Then, the substrate transfer robot 1 moves in the direction in which the substrate transfer hand 10 is retracted from the cassette (the negative direction of the X axis). Thereafter, the substrate transport robot 1 transports the two substrates 100a and 100b placed simultaneously to a predetermined place.

  The height relationship between the lower stage mounting surface 12a and the upper stage mounting surface 12c is set as follows. As shown in FIG. 5A, the substrate support member 101 is not in contact with both the substrate 100a and the substrate 100b positioned above and below.

  In order to retract the substrate transfer hand 10 from the cassette without the substrate support member 101 coming into contact with the substrates 100a and 100b in this state, there is a gap between the substrate support member 101 and the substrates 100a and 100b. Necessary.

  The clearances 102 between the substrate 100a and the substrate 100b are calculated on the basis of the thickness (DEP) of the substrate support member 101, where the clearance margins are Bup and Blow, respectively, and the thickness of the substrate support member 101 is DEP. (1).

  Clearance 102 = DEP + Bup + Blow (1)

  The tip side support portion 12 is formed so that the difference in height between the lower stage mounting surface 12a and the upper stage mounting surface 12c is equal to or greater than the sum of the clearance 102 and the thickness of the substrate 100a.

  Thus, the thinner the substrate support member 101 is, the thinner the substrate carrying hand 10 can be formed. Note that the upper and lower margin values (Bup, Blow) may include the amount of deflection in consideration of the case where the substrates 100a, 100b bend in the vertical direction.

  As described above, the substrate transfer robot 1 can place and transfer two substrates 100 a and 100 b simultaneously with one substrate transfer hand 10. The substrate transfer robot 1 operates as follows when the substrates 100a and 100b transferred simultaneously are placed on the cassette.

  First, the substrate transfer robot 1 places the substrate 100b placed on the upper placement surface 12c and the second placement surface 14a on the cassette. Thereafter, the substrate transport robot 1 places the substrate 100a placed on the lower placement surface 12a and the first placement surface 13a on the cassette in a state where the second base side support portion 14 is retracted.

  As described above, the substrate transfer robot 1 can transfer two substrates 100a and 100b simultaneously by one substrate transfer hand 10, and can place the two substrates 100a and 100b transferred simultaneously on a cassette or the like. it can.

  Here, the substrate carrying hand 10 is retracted from the cassette without the substrate support member 101 coming into contact with the substrates 100a and 100b. However, the present invention is not limited to this. For example, the substrate support member 101 of the cassette may be movable.

  In this case, the substrate transport robot 1 places the substrate 100b on the upper placement surface 12c and the second placement surface 14a, and as shown in FIG. 5B, the substrate support member 101 moves in the Y-axis direction (arrow direction). Move to and evacuate.

  Thereafter, the substrate transfer robot 1 moves in the direction in which the substrate transfer hand 10 is retracted from the cassette (the negative direction of the X axis). In this case, the amount of movement for retraction needs to avoid the substrate support member 101. Therefore, the substrate supporting member 101 may be less than the case where the substrate supporting member 101 is fixed.

  Therefore, when the substrate support member 101 is movable, the substrate transfer robot 1 can transfer the substrate in a short time because the movement amount of the substrate transfer hand 10 is small.

  The lower mounting surface 12a, the upper mounting surface 12c, the first mounting surface 13a, and the second mounting surface 14a are inclined so as to gradually become lower toward the center of the substrates 100a and 100b. It was decided to provide. However, it is not limited to this, For example, it is good also as forming in flat form, without providing an inclination in each mounting surface.

  As described above, in the first embodiment, the substrate carrying hand includes the first placement portion on which the placement surface having a predetermined height is formed, and the placement formed on the first placement portion. And a second placement portion having a placement surface formed above the height of the placement surface. Then, the substrate transport robot according to the first embodiment places the substrate on the first placement portion in a state where the retractable support portion provided in the second placement portion is retracted. Furthermore, the substrate transfer robot according to the first embodiment places another substrate on the second placement unit in a state where the retractable support unit is released.

  By doing so, the substrate transfer hand and the substrate transfer robot according to the first embodiment can reduce the manufacturing cost and reduce the weight and simultaneously transfer a plurality of substrates.

(Second Embodiment)
Next, a substrate transfer hand and a substrate transfer robot according to a second embodiment will be described with reference to FIGS. 6A to 6C. 6A to 6C are side views 1 to 3 of the hand main body 111 according to the second embodiment.

  The substrate transport hand according to the second embodiment is different from the substrate transport hand 10 and the substrate transport robot 1 of the first embodiment in that a suction hole is provided on the mounting surface on which the substrate is mounted. Since the configuration of the substrate transfer robot is the same as that in FIG. 1, the description of the configuration of the substrate transfer robot is omitted here.

  Further, since the configuration of the substrate transporting hand excluding the first placement portion for placing the substrate 100a and the second placement portion for placing the substrate 100b is the same as that of FIG. The description of the configuration of the transport hand will be omitted.

  As shown in FIG. 6A, the front end side support portion 112 on the front end side (the positive direction of the X axis) of the hand main body portion 111 is formed with a step, and the lower stage includes a lower stage mounting surface 112a and a suction hole 112b. In the upper stage, an upper stage mounting surface 112c and a suction hole 112d are formed. The lower stage mounting surface 112a and the upper stage mounting surface 112c are formed in a flat plate shape.

  One end of each of the suction hole 112b and the suction hole 112d is exposed to the lower stage mounting surface 112a and the upper stage mounting surface 112c. The suction hole 112b and the suction hole 112d are provided so as to planarly overlap the substrate 100a placed on the lower placement surface 112a and the substrate 100b placed on the upper placement surface 112c, respectively.

  The suction hole 112b and the suction hole 112d are each connected to a suction part (not shown) at the other end, and the substrate 100a and the substrate 100b are moved toward the lower stage mounting surface 112a and the upper stage mounting surface 112c by negative pressure. Suction.

  Subsequently, as shown in FIG. 6B, the first base end side support portion 113 on the base end side (the negative direction of the X axis) of the hand main body portion 111 is formed with a first placement surface 113a and a suction hole 113b. ing. Further, the second base end side support portion 114 on the base end side (the negative direction of the X axis) of the hand main body portion 111 is formed with a second placement surface 114a and a suction hole 114b.

  The first placement surface 113a is a placement surface having a height corresponding to the lower placement surface 112a of the distal end side support portion 112, and is formed in a flat plate shape. The second placement surface 114a is a placement surface having a height corresponding to the upper placement surface 112c of the distal end side support portion 112, and is formed in a flat plate shape.

  One end of each of the suction hole 113b and the suction hole 114b is exposed to the first placement surface 113a and the second placement surface 114a. The suction hole 113b and the suction hole 114b are provided so as to planarly overlap the substrate 100a placed on the first placement surface 113a and the substrate placed on the second placement surface 114a, respectively.

  The suction hole 113b and the suction hole 114b are each connected at their other end to a suction part (not shown), and the substrate 100a and the substrate 100b are brought into contact with the first placement surface 113a and the second placement surface 114a by negative pressure. Aspirate to the side.

  As in the first embodiment, the substrate transporting hand having the above-described configuration, as shown in FIG. 6B, has the lower stage mounting surface 112a and the first mounting surface with the second base end support portion 114 retracted. The substrate 100a is placed on the placement surface 113a in a substantially horizontal state.

  When the substrate transport hand places the substrate 100a, the substrate 100a is sucked by the negative pressure to the lower placement surface 112a side and the first placement surface 113a side, and placed in a state where movement is restricted. Thereby, the substrate transport hand can stably transport the placed substrate 100a.

  Furthermore, as shown in FIG. 6C, the substrate transport hand releases the second base end support portion 114, and the substrate 100b is in a substantially horizontal state on the upper placement surface 112c and the second placement surface 114a. Place in.

  Also here, the substrate 100b is sucked to the upper placement surface 112c side and the second placement surface 114a side by the negative pressure, and is placed in a state where movement is restricted. Thereby, the substrate transport hand can stably transport the placed substrate 100b.

  As described above, in the second embodiment, a suction hole is provided in the placement surface on which the substrate is placed, and the substrate placed by negative pressure is sucked toward the placement surface. By doing so, the substrate carrying hand and the substrate carrying robot according to the second embodiment can stably carry the placed substrate.

(Third embodiment)
Next, a substrate transfer hand and a substrate transfer robot according to a third embodiment will be described with reference to FIGS. 7A and 7B. FIG. 7A is a side view of the hand main body according to the third embodiment, and FIG. 7B is a top view of the hand main body according to the third embodiment.

  The substrate transfer hand according to the third embodiment is different from the substrate transfer hand and the substrate transfer robot of the first and second embodiments in that three substrates are transferred simultaneously by one substrate transfer hand.

  Since the configuration of the substrate transfer robot is the same as that in FIG. 1, the description of the configuration of the substrate transfer robot is omitted here. Further, since the configuration of the substrate transporting hand excluding the first placement portion for placing the substrate 100a and the second placement portion for placing the substrate 100b is the same as that of FIG. The description of the configuration of the transport hand will be omitted.

  As shown in FIGS. 7A and 7B, the substrate carrying hand includes a hand main body 211, a distal end side support 212, a first proximal end support 213, a second proximal end support 214, 3 base end side support parts 215, the attaching part 216, and the attaching part 217 are provided.

  The tip side support portion 212 on the tip side (the positive direction of the X axis) of the hand main body portion 211 is formed with three placement surfaces having different heights. In the following, the placement surface having the highest height is referred to as the upper placement surface, the placement surface having the second highest height is referred to as the middle placement surface, and the placement height is the lowest. The surface is referred to as the lower mounting surface.

  The pair of first base end side support portions 213 are respectively fixed to the base end side (X-axis negative direction) of the upper surface of the hand main body portion 211, and are arranged on the base end side (X-axis negative direction) of the hand main body portion 211. Support.

  Further, the first base end side support portion 213 is provided with a placement surface having a height corresponding to the lower placement surface of the distal end side support portion 212. The substrate 100a is placed in a substantially horizontal state on the lower stage placement surface of the distal end side support portion 212 and the placement surface of the first proximal end support portion 213.

  The pair of second base end support portions 214 is provided in the vicinity of the first base end support portion 213 on the base end side (the negative direction of the X axis) of the upper surface of the hand main body portion 211, and linearly moves in the X axis direction. Is possible. Further, the second base end side support portion 214 supports the substrate on the base end side (negative direction of the X axis) of the hand main body portion 211.

  The second base end side support portion 214 is formed with a placement surface having a height corresponding to the middle stage placement surface of the distal end side support portion 212. The substrate 100 b is placed in a substantially horizontal state on the middle stage placement surface of the distal end side support portion 212 and the placement surface of the second proximal end support portion 214.

  The pair of third base end side support portions 215 are provided in the vicinity of the second base end side support portion 214 on the base end side (the negative direction of the X axis) on the upper surface of the hand main body portion 211, and linearly move in the X axis direction. Is possible. Further, the third base end side support portion 215 supports the substrate on the base end side (the negative direction of the X axis) of the hand main body portion 211.

  The third base end side support portion 215 is provided with a placement surface having a height corresponding to the upper stage placement surface of the distal end side support portion 212. The substrate 100c is placed in a substantially horizontal state on the upper placement surface of the distal end side support portion 212 and the placement surface of the third proximal end support portion 215.

  The pair of attachment portions 216 can move linearly in the X-axis direction via a connecting portion connected to the attachment portion 216 by an air cylinder. Thereby, the 2nd base end side support part 214 connected with the attaching part 216 moves linearly to a X-axis direction.

  The pair of mounting portions 217 can move directly in the X-axis direction via a connecting portion connected to the mounting portion 217 by an air cylinder. Thereby, the 3rd base end side support part 215 connected with the attaching part 217 moves linearly to a X-axis direction. Note that the second base-end support portion 214 connected to the attachment portion 216 and the third base-end support portion 215 connected to the attachment portion 217 move independently and linearly.

  The substrate transporting hand having the above-described configuration is such that the first base side support portion 214 and the third base end side support portion 215 are retracted, and the lower stage mounting surface of the front end side support portion 212 and the first base surface are set. The substrate 100a is placed on the placement surface of the base end side support portion 213 in a substantially horizontal state.

  Subsequently, as in the first embodiment, the substrate carrying hand releases the second base end side support portion 214 from the retracted position, and the middle stage mounting surface and the second base end side support portion of the front end side support portion 212. The substrate 100b is mounted on the mounting surface 214 in a substantially horizontal state.

  Specifically, the substrate transport hand places the substrate 100b by moving the second base end side support portion 214 so as to be positioned closer to the positive direction side of the X axis than the first base end side support portion 213.

  Further, as in the first embodiment, the substrate carrying hand releases the retraction of the third proximal end support portion 215, and the upper stage mounting surface of the distal end side support portion 212 and the third proximal end support portion 215. The substrate 100c is mounted on the mounting surface in a substantially horizontal state.

  Specifically, the substrate transport hand places the substrate 100 c by moving the third base end side support portion 215 so as to be positioned closer to the positive direction side of the X axis than the second base end side support portion 214.

  As described above, in the third embodiment, the substrate carrying hand includes three placement portions on which placement surfaces having different heights are formed. Then, the substrate transport robot according to the third embodiment places the substrate on the lower placement portion in a state where the retractable support portion provided in the upper placement portion is retracted. Furthermore, the substrate transfer robot according to the third embodiment is placed on the substrate placed on the substrate in a state where the retractable support unit located on the substrate is released. Another substrate was placed on the part. Then, the substrate transport robot according to the third embodiment places the substrate on the placement unit further upward by repeating the above processing.

  By doing so, the substrate transfer hand and the substrate transfer robot according to the third embodiment can reduce the manufacturing cost and simultaneously transfer a plurality of substrates.

  Here, the tip side support portion is formed with a plurality of mounting surfaces having different heights, but is not limited to this. For example, the tip side support portion is a separate body. It may be constituted by a plurality of support parts. And the mounting surface of each support part is formed so that height may mutually differ, and each may be fixed to the front-end | tip of a hand main-body part.

  Moreover, although it decided to press the peripheral part of the board | substrate mounted by the press part with which a board | substrate conveyance hand is equipped, it is not limited to this, For example, as a structure without a press part in a board | substrate conveyance hand, Good.

  Thereby, since the board | substrate conveyance hand does not move on each mounting surface provided with a board | substrate bottom face in a front end side support part, it can suppress that a board | substrate is scratched and can reduce a number of parts.

  Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

DESCRIPTION OF SYMBOLS 1 Substrate transfer robot 2 Base 3 Support | pillar 4, 6, 8 Joint part 5, 7 Arm 10 Substrate transfer hand 11 Hand main body part 12 Front end side support part 12a Lower stage mounting surface 12b Wall surface 12c Upper stage mounting surface 12d Wall surface 13 First 1st base side support part 13a 1st mounting surface 13b wall surface 14 2nd base end side support part 14a 2nd mounting surface 14b wall surface 15 attachment part 16 connection part 17 air cylinder 18a pressing part 18b pressing part 19 air cylinder 100a board | substrate 100b Substrate 100c Substrate 101 Substrate support member 102 Clearance 200 Control device

Claims (5)

A first placement portion that is provided on the upper surface side of the hand body portion and includes a plurality of support portions that support the substrate on a placement surface of a predetermined height;
A plurality of support portions that are provided on the upper surface side of the hand main body portion and support the substrate on a placement surface that is higher than the height of the placement surface of the first placement portion; A plurality of second mounting parts that are retractable,
In a state where the retractable support portion of the second placement portion is retracted, the first substrate is placed on the first placement portion, and further, the retract of the retractable support portion is released. In this state, the second substrate is placed on the second placement portion.   The difference between the height of the placement surface of the first placement portion and the height of the placement surface of the second placement portion is the thickness of the substrate support member provided in the substrate storage portion for storing the substrate, The substrate carrying hand according to claim 1, wherein the substrate carrying hand is a sum of a thickness of the substrate placed on the first placement portion and a predetermined margin. And a pressing portion that presses the peripheral edge of the substrate placed on the first placement portion and the peripheral edge of the substrate placed on the second placement portion to the distal end side. The substrate carrying hand according to claim 1 or 2. One or both of the first placement portion and the second placement portion are:
The substrate transport hand according to claim 1, further comprising a suction hole for sucking the substrate, wherein the substrate is sucked by the suction hole. A substrate transport robot comprising the substrate transport hand according to claim 1.

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