JP5486995B2 - On-off valve - Google Patents

Description

  The present invention relates to an on-off valve that opens and closes a liquid flow path, and in particular, closes the flow path by bringing a valve body into contact with a valve seat that has an open flow path, while opening the flow path by moving the valve body away from the valve seat. Relates to the open / close valve.

  There is a poppet type as an on-off valve for opening and closing a flow path for guiding liquid. The poppet-type opening / closing valve has a valve body housing case, that is, a valve body housing block in which a communication chamber for communicating the first and second ports for guiding the liquid is formed, and the valve body is opened by the first port. The valve seat, that is, the valve seat, is contacted to block communication between both ports, and the valve body is moved away from the valve seat to connect both ports. When the first port is the inflow side, when the valve body is separated from the valve seat, the liquid flowing into the communication chamber from the first port is discharged to the outside from the second port. On the other hand, when the second port is the inflow side, the liquid flowing into the communication chamber from the second port is discharged to the outside from the first port when the valve body is separated from the valve seat. .

  The poppet type open / close valve moves the valve body toward and away from the valve seat surface by reciprocating the valve body with respect to the valve seat surface that opens the first port into the communication chamber, usually in a perpendicular direction. The port is opened and closed. In order to reciprocate the valve body in a direction perpendicular to the valve seat surface, the valve body is connected to a drive shaft such as a piston rod of a pneumatic cylinder, and the liquid in the communication chamber is connected to the drive shaft and the valve body storage case. The drive shaft is provided with a sealing material such as an O-ring so as not to leak from the sliding portion therebetween.

  In semiconductor production lines, various chemical production lines, etc., as described in Patent Documents 1 and 2, in order to control the supply of chemicals and pure water to the production apparatuses provided in these lines. Poppet type open / close valves are used. As an on-off valve for controlling the supply of chemical solution or pure water, a diaphragm is provided on the drive shaft in order to seal between the drive shaft of the valve body and the valve body storage case. By using the diaphragm, it is possible to prevent the chemical liquid from entering the sliding gap between the outer peripheral portion of the drive shaft and the valve body storage case.

  When a plurality of communication chambers are formed in the valve body storage case, and the first port communicating with each of the communication chambers is connected to a common flow path formed in the valve body storage case, it is described in Patent Documents 3 and 4. As described above, the on-off valve has a manifold structure in which a plurality of on-off valves are assembled. In the manifold-structured on-off valve, when different types of chemical solutions are supplied from the second port to the respective on-off valves, the chemical solution mixed from the common flow path can be supplied to the manufacturing apparatus. it can.

JP 2003-214547 A JP 2008-101757 A JP 2007-24307 A JP 2008-89085 A

  In the on-off valve that controls the supply of liquid, the liquid remaining inside the on-off valve is periodically washed with a cleaning liquid. In order to perform the cleaning operation efficiently in a short time, it is preferable to eliminate the generation of the liquid reservoir and to ensure that the cleaning liquid flows around the communication chamber and the valve body. However, if the valve seat surface is provided in a direction perpendicular to the reciprocating direction of the valve body as in the prior art, the cleaning liquid supplied into the communication chamber largely changes the posture in the direction perpendicular to the valve seat portion. Therefore, the residual liquid in that portion cannot be removed quickly. Therefore, since it takes time to remove the residual liquid, it is necessary to set the cleaning time longer.

  When the type of chemical solution supplied to the manufacturing equipment is changed using the same on-off valve, a new chemical solution is used unless the cleaning process for the previous chemical solution remaining in the on-off valve is completed. Since the manufacturing apparatus cannot be operated, in order to operate the manufacturing apparatus efficiently, it is necessary to quickly wash the previous chemical solution.

  In addition, the on-off valve provided between the liquid supply source and the liquid discharge part of the manufacturing apparatus preferably reduces the pressure loss inside the on-off valve. By doing so, the pressure loss of the liquid inside the on-off valve increases.

  An object of the present invention is to reduce the pressure loss of the liquid without causing the flow of the liquid inside the on-off valve to meander.

  Another object of the present invention is to enable efficient cleaning of the liquid remaining in the flow path of the on-off valve in a short time.

The on-off valve of the present invention is an on-off valve that switches between a first port and a second port for guiding the liquid between a communication state and a shut-off state, and the first port and the second port are connected to each other. A valve body housing block formed with a conical surface-shaped portion that forms a communication chamber to be communicated; and the conical surface disposed in the communication chamber so as to reciprocate in the axial direction coaxially with a central axis of the conical surface-shaped portion. The first port and the second port are separated from the conical valve seat surface while contacting the conical valve seat surface provided in the shape portion to block communication between the first port and the second port. A valve body that communicates with the port, a drive unit that is attached to the valve body housing block, reciprocates the valve body in the axial direction, and is mounted between the valve body and the valve body housing block, Seal for sealing between the valve body and the open end of the communication chamber Has a timber, and a cross-sectional shape of the first port and circular, and said by positioned inside the apex of the conical surface-shaped portion, than the conical valve seat surface of the conical surface-shaped portion The apex portion is provided with the first port connected to the conical valve seat surface via an arc surface or a conical surface, and the conical surface-shaped portion has a portion on the larger diameter side than the conical valve seat surface. A second port is provided, and the first port and the second port are open in the conical surface shape portion.

The solenoid valve according to the present invention is an on-off valve that switches between a first port and a second port for guiding a liquid between a communication state and a shut-off state, wherein the first port and the second port are connected to each other. A valve body housing block formed with a conical surface-shaped portion that forms a communication chamber to be communicated; and the conical surface disposed in the communication chamber so as to reciprocate in the axial direction coaxially with a central axis of the conical surface-shaped portion. The first port and the second port are separated from the conical valve seat surface while contacting the conical valve seat surface provided in the shape portion to block communication between the first port and the second port. A valve body that communicates with the port, a drive unit that is attached to the valve body housing block, reciprocates the valve body in the axial direction, and is mounted between the valve body and the valve body housing block, Seal for sealing between the valve body and the open end of the communication chamber It has a timber, and the cross-sectional shape of the first port, and a triangle having said 1 2 sides match the ridge of the conical valve seat surface and along the front end surface of the valve body side, and said conical The first port is provided at the apex portion of the conical surface portion of the conical surface-shaped portion , and is located on the inner side of the apex of the surface-shaped portion, and the conical valve seat surface of the conical surface-shaped portion. The second port is provided in a larger diameter side portion, and the first port and the second port are open to the conical surface shape portion.

The electromagnetic valve of the present invention is a diaphragm in which the seal member is integrally provided between an annular portion fixed to the valve body housing block and the valve body, and elastically deforms as the valve body moves in the axial direction. It is characterized by being. The on-off valve of the present invention is characterized in that the second port opens in a tangential direction to the inner peripheral surface of the conical surface-shaped portion . In the on-off valve of the present invention, a plurality of communication chambers are formed in the valve element housing block at intervals in the longitudinal direction thereof in parallel with each other, and the first ports opened to the respective conical surface-shaped portions are provided as the first ports. Forming the valve body housing block in a straight line along the longitudinal direction and forming a second port communicating with each of the communication chambers in the valve body housing block in a direction perpendicular to the first port. Features. The on-off valve of the present invention is a fluid pressure cylinder in which the driving means is reciprocated in the axial direction by fluid pressure and has a piston connected to the valve body.

  In the on-off valve of the present invention, the valve body accommodating hole forming the communication chamber for communicating the first port and the second port has a conical surface shape, and the first port is opened to the communication chamber to open the valve body. Since the valve seat that contacts is a conical valve seat surface, the liquid flowing between the first port and the second port via the communication chamber meanders in the flow path or greatly changes its posture. It will flow in the communication room without doing it. Thereby, the flow resistance of liquids, such as a chemical | medical solution which flows through the inside of an on-off valve, can be reduced, and pressure loss can be reduced. In addition, when cleaning the chemical by flowing a cleaning liquid into the opening / closing valve, the flow path of the opening / closing valve can be efficiently cleaned in a short time. Further, when the valve body is brought into contact with the conical valve seat surface so as to block communication between the first port and the second port, the valve body when the valve body comes into contact with the conical valve seat surface, Since the centering action is received from the conical valve seat surface so that the central axis thereof coincides with the central axis of the conical valve seat surface, the flow of the liquid is surely blocked when the valve body is closed.

  When the second port is opened in the communication chamber in a tangential direction with respect to the inner peripheral surface, the liquid flows so as to swirl around the valve body in the communication chamber, so that occurrence of a liquid pool in the communication chamber is suppressed. be able to. If the cross-sectional shape of the first port is a triangle, the flow resistance of the chemical solution in the flow path can be further reduced, and the cleaning efficiency with the cleaning solution can be further increased.

It is sectional drawing which shows the on-off valve which is one embodiment of this invention. FIG. 2 is a sectional view taken along line 2-2 in FIG. It is a top view of FIG. FIG. 4 is a sectional view taken along line 4-4 in FIG. It is sectional drawing which shows the part similar to FIG. 4 in the state which the on-off valve opened. It is a perspective view which shows a part of valve body accommodation block shown by FIGS. It is sectional drawing which shows the part similar to FIG. 2 in the on-off valve which is other embodiment of this invention. It is sectional drawing which shows the part similar to FIG. 5 in the on-off valve which is other embodiment of this invention. It is sectional drawing which shows the on-off valve which is other embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 to 3 show an on-off valve having a manifold structure, and this on-off valve has a valve body housing block 10 formed of a rod-like block having a square cross section. The valve body housing block 10 is formed with five valve body housing holes 13 at intervals in the longitudinal direction. Each valve body accommodation hole 13 is formed in the valve body accommodation block 10 in parallel with each other, and is opened on the upper surface of the valve body accommodation block 10 in FIG.

  The valve body housing block 10 is formed with a first port 11 in a straight line along the longitudinal direction of the valve body housing block 10 as a flow path for guiding the liquid. The first port 11 is communicated with the bottom of each valve element accommodation hole 13 and is a common port that communicates with each of the five valve element accommodation holes 13. As shown in FIG. 2, the five second ports 12 are positioned above the first ports 11 so as to correspond to the five valve body accommodation holes 13, respectively. It is formed in a direction perpendicular to the port 11. The first port 11 and each second port 12 have a circular cross-sectional shape.

  As shown in FIG. 1, a joint portion 14 communicating with the first port 11 protrudes from one end portion of the valve body housing block 10, and a hose (not shown) for guiding liquid is connected to the joint portion 14. It has come to be. Five joint portions 15 communicating with the respective second ports 12 protrude from the side surface of the valve body housing block 10, and a hose (not shown) for guiding the liquid is connected to each joint portion 15. It has become.

  As shown in FIG. 4, a cylindrical valve body 16 having a circular cross section is disposed in each valve body accommodation hole 13, and the central axis O of the valve body 16 is the valve body accommodation. It is coaxial with the central axis of the hole 13. By opening and closing the valve body 16 in a straight line, the open / close valve is a two-port valve that opens and closes in a state where the first port 11 and the second port 12 communicate with each other and a state where the communication is blocked. It is a form provided. In order to reciprocate each valve body 16 in the axial direction, as shown in FIG. 4, a cylinder block 18 is attached to the opening end face of each valve body accommodation hole 13 via a spacer 17. A piston 20 is incorporated in the cylinder block 18 so as to be capable of reciprocating in the axial direction, and a piston rod 21 provided on the piston 20 passes through a partition wall 22 provided on the cylinder block 18 and is connected to the valve body 16. Has been. The partition wall 22 is integrally provided with a sleeve 23 for guiding the piston rod 21.

  A cover 24 is attached to the cylinder block 18, and the inside of the cylinder block 18 is partitioned by a piston 20 into a spring chamber 25 on the cover 24 side and a pressure chamber 26 on the partition wall 22 side. A support plate 27 is attached to the valve body housing block 10 so as to face the cover 24. As shown in FIG. 3, the valve body housing block 10, the spacer 17, and the cylinder block 18 pass through these and the cover 24, and the screw 24 that is screwed to the support plate 27, thereby the cover 24 and the support plate 27. It is assembled so that it can be pinched by. As shown in FIG. 2, the cylinder block 18 has a mounting hole 28 a through which the screw member 28 passes.

  A spring member 29 made of a compression coil spring is mounted in the spring chamber 25 in order to apply thrust in the direction toward the valve element housing hole 13 to the piston 20, that is, in the downward direction in FIG. 4. A pressure port 31 communicating with the pressure chamber 26 is formed in the cylinder block 18, and when compressed air is supplied to the pressure chamber 26 from the outside via the pressure port 31, the piston 20 has a direction away from the valve body accommodation hole 13. That is, thrust is applied in the upward direction in FIG. When the piston 20 moves to a position where it abuts against a stopper surface 24a provided on the cover 24, the upward movement is restricted by the stopper surface 24a. When the piston 20 moves upward, a breathing port 32 is provided in the cylinder block 18 in order to discharge the air in the spring chamber 25 to the outside.

  The cylinder block 18 in which the piston 20 is incorporated, the cover 24, and the like constitute a fluid pressure cylinder 30 as drive means for reciprocating the valve body 16 in the axial direction. Since the fluid pressure cylinder 30 blocks communication between the first port 11 and the second port 12 by spring force when compressed air is not supplied to the pressure chamber 26, the valve body 16 driven by the fluid pressure cylinder 30. Is a normally closed on-off valve. Instead of the compressed air supplied to the pressure chamber 26 of the fluid pressure cylinder 30, the piston 20 may be driven by another fluid such as hydraulic pressure. The fluid pressure cylinder 30 shown in the figure is a single-acting type in which the piston 20 is driven downward by a spring force, but the spring chamber 25 is pressurized without incorporating the spring member 29 into the spring chamber 25. When compressed air is supplied from the breathing port 32 as a chamber, the fluid pressure cylinder 30 becomes a double-acting type.

  As shown in FIGS. 4 to 6, the valve body accommodation hole 13 has a conical surface-shaped portion 34 whose apex is the bottom side, and a cylindrical surface-shaped portion 35 that is continuous with the maximum inner diameter portion. A communication chamber 36 that allows the first port 11 and the second port 12 to communicate with each other is formed by the valve body accommodation hole 13. A stepped portion 37 facing the spacer 17 in the radial direction is formed at the opening end of the valve body accommodating hole 13. The valve body 16 is integrally provided with an annular portion 38 that is disposed on the step portion 37 and is sandwiched between the spacer 17 and the valve body housing block 10 via a diaphragm 39. The diaphragm 39 is mounted between the valve body 16 and the valve body housing block 10 and constitutes a seal member for sealing between the valve body 16 and the open end of the communication chamber 36. The diaphragm 39 is elastically deformed following the axial movement of the valve body 16. The cylinder block 18 is formed with a breathing hole 41 for communicating the space 40 formed between the partition wall 22 and the diaphragm 39 to the outside, and the volume of the space 40 changes as the valve body 16 moves in the axial direction. When this occurs, the air in the space 40 is supplied and discharged through the breathing hole 41.

  The valve body 16 including the annular portion 38 and the diaphragm 39 integrated with each other is formed of a resin such as a fluororesin, and the valve body housing block 10 is also formed of the same resin. Since these members are made of a corrosion-resistant fluororesin, the valve body housing block 10 and the valve body 16 can be prevented from being corroded by the chemical liquid even when the chemical liquid is allowed to flow through the on-off valve. However, depending on the type of the chemical solution, the valve body housing block 10 may be formed of another material such as an aluminum alloy. The spacer 17, the cylinder block 18, the cover 24, and the support plate 27 are each formed of a metal material such as an aluminum alloy.

As shown in FIGS. 4 and 5, the small-diameter side portion of the conical surface-shaped portion 34 is a conical valve seat surface 34 a that contacts the valve body 16, and the conical surface-shaped portion 34 has a conical valve seat surface 34 a. Is provided. The first port 11 is formed at a portion inside the apex of the conical surface-shaped portion 34 forming the communication chamber 36, that is, at the bottom of the conical surface-shaped portion 34 of the valve body housing hole 13, and apex from the conical valve seat surface 34 a. The portion communicates with the communication chamber 36. On the other hand, the second port 12 communicates with the communication chamber 36 at a portion of the conical surface-shaped portion 34 that is larger in diameter than the conical valve seat surface 34a. A circular arc surface 34b is provided in a portion of the conical surface shaped portion 34 closer to the first port 11 than the conical valve seat surface 34a, and the conical valve seat surface 34a is connected to the first port 11 via the circular arc surface 34b. It is smoothly connected to the inner peripheral surface. However, the circular arc surface 34b may be a conical surface similar to the conical valve seat surface 34a.

  A contact surface 16a that contacts the conical valve seat surface 34a is formed at the tip of the valve body 16, and the contact surface 16a is a conical surface corresponding to the conical valve seat surface 34a. The conical surface-shaped portion 34 has the same inclination angle as a whole including the conical valve seat surface 34a. However, the conical valve seat surface 34a, the apex side portion and the large diameter side portion of the conical valve seat surface 34a, and The inclination angles may be different.

When discharging the compressed air in the pressure chamber 26 from the pressure port 31, the valve body 16 by the spring force exerted on the piston 20 contact surface 16a moves forward until it contacts the conical valve seat surface 34a. When the contact surface 16a comes into contact with the conical valve seat surface 34a, as shown in FIG. 4, the first port 11 is closed, and the communication between the first port 11 and the second port 12 is blocked. When the valve body 16 comes into contact with the conical valve seat surface 34a, the central axis O of the valve body 16 is coaxial with the central axis of the valve body housing hole 13, and the contact surface 16a of the valve body 16 is also a conical surface. Therefore, the valve body 16 is subjected to the aligning action in the direction in which the central axis O coincides with the center of the valve body accommodating hole 13, and the entire contact surface 16a is surely brought into contact with the conical valve seat surface 34a. Thereby, the communication between the first port 11 and the second port 12 is reliably blocked.

  On the other hand, when compressed air is supplied into the pressure chamber 26, as shown in FIG. 5, the piston 20 moves backward against the spring force and comes into contact with the stopper surface 24a, and the valve body 16 is conical valve seat surface 34a. Will leave. As a result, the first port 11 and the second port 12 are in communication with each other via the communication chamber 36.

  As shown in FIG. 3, in the on-off valve of this manifold structure, the second port 12 is a primary side port for supplying a chemical to the on-off valve, and the first port 11 is a secondary side port for discharging the chemical, Different types of chemical solutions can be supplied from the respective second ports 12. For example, when separate chemical solutions indicated by reference signs A1 to A5 in FIG. 3 are supplied from the respective second ports 12, a mixed chemical solution B in which five types of chemical solutions are mixed from the first port 11 is supplied. Can be discharged outside. Since the valve body housing block 10 of the on-off valve shown in the figure has five second ports 12, a maximum of five types of chemical solutions can be mixed and discharged from the first port 11. When changing the mixing ratio of the chemical solution supplied from each second port 12, the time during which each valve body 16 is opened and the second port 12 and the first port 11 are in communication with each other, The ratio of the time when the valve body 16 is closed and the port is shut off is changed. Thereby, the quantity of the chemical | medical solution which flows in into the 1st port 11 per unit time can change, and a mixing ratio can be changed.

  Further, the chemical solution can be supplied from any one of the second ports 12 to the common first port 11 every predetermined time. For example, in FIG. 3, the chemical solutions indicated by reference signs A <b> 4 and A <b> 5 are discharged after the mixed chemical solution B in which three kinds of chemical solutions are mixed so as to supply the chemical solutions indicated by reference signs A <b> 1 to A <b> 3 to the second port 12. Can be supplied to the second port 12 to discharge the mixed chemical solution B in which two types of chemical solutions are mixed. The number of the second ports 12 provided in the valve body housing block 10 is not limited to five shown in the figure, and can be set to an arbitrary number corresponding to the use form of the on-off valve.

When the type of the chemical solution supplied from each second port 12 is changed, or when the mixing ratio of the chemical solution discharged from the first port 11 or the type of the chemical solution is changed, it remains in the on-off valve. Will be washed. In order to clean the chemical liquid, pure water is supplied as a cleaning liquid from each second port 12 in a state where the valve body 16 is separated from the conical valve seat surface 34a as shown in FIG. When the cleaning liquid is supplied from the second port 12, the cleaning liquid that has flowed into the communication chamber 36 flows between the straight outer peripheral surface of the valve body 16 and the cylindrical surface-shaped portion 35 that is parallel to the valve body 16. At the same time, it flows between the outer peripheral surface of the valve body 16 and the conical surface shaped portion 34 to wash this portion. Next, the cleaning liquid flows through the gap between the conical surface shaped portion 34 of the valve body accommodation hole 13 and the valve body 16 along the inner surface of the conical surface shaped portion 34 toward the first port 11, and the valve body A portion formed by the 16 flat front end surfaces and the conical surface shaped portion 34 is washed and discharged to the first port 11.

  Since the communication chamber 36 is formed by the conical surface-shaped valve body accommodation hole 13, the cleaning liquid that has flowed into the communication chamber 36 is directed straight toward the first port 11 without changing its posture. Become. As a result, the cleaning liquid flows without meandering the flow path in the on-off valve or changing the posture greatly, so that the chemical liquid remaining in the on-off valve can be quickly removed in a short time. Since the common first port 11 communicating with all the communication chambers 36 has the same cross-sectional shape as a whole, the residual liquid can be reliably removed. In this way, since the liquid flowing through the flow path in the on-off valve can be guided without meandering or greatly changing the posture, the chemical liquid is supplied from the respective second ports 12, Even when discharging to one port 11, the flow resistance of the chemical solution can be reduced, and the pressure loss of the chemical solution can be reduced.

  The on-off valve of the manifold structure described above is configured to discharge the chemical solution to the first port 11 with the second port 12 as the primary side, but to the second port 12 with the first port 11 as the primary side. It can also be used to discharge chemicals. In that case, one type of chemical solution can be supplied from the second port 12 simultaneously or every predetermined time to different manufacturing apparatuses. Even in such a usage form, the flow resistance of the chemical solution in the flow path can be reduced, so that the pressure loss of the chemical solution can be reduced.

  FIG. 7 is a cross-sectional view showing an on-off valve according to another embodiment of the present invention, and FIG. 7 shows the same portion as FIG.

  In the on-off valve shown in FIG. 7, the second port 12 in the above-described on-off valve is formed so as to intersect the central axis of the valve body housing hole 13, whereas the second port 12 is a valve body. It is displaced from the central axis of the housing hole 13 and is tangential to the conical surface shaped portion 34 of the valve body housing hole 13. As described above, when the second port 12 is displaced and communicated with the communication chamber 36, the chemical solution supplied from the second port 12 into the communication chamber 36 is within the communication chamber 36. And the valve body accommodating hole 13 so as to swivel in a cylindrical space. When a swirling flow of the chemical solution is generated in the communication chamber 36, the chemical solution supplied from the second port 12 is prevented from partially remaining in the communication chamber 36. Also, when cleaning the chemical solution, since the swirling flow of the cleaning solution is generated in the communication chamber 36, the cleaning time can be made shorter than that shown in FIG.

  FIG. 8 is a cross-sectional view showing an on-off valve according to another embodiment of the present invention, and FIG. 8 shows the same part as FIG.

  In the on-off valve shown in FIG. 8, the cross-sectional shape of the first port 11 is a triangle. The two opposite sides 11a and 11b of the three sides forming the triangular cross section coincide with the ridge line of the conical surface-shaped portion 34, that is, the ridge line of the conical valve seat surface 34a, and the other one side 11 c is along the tip surface of the valve body 16. In addition, the other side 11c along the distal end surface of the valve body 16 is on the distal end surface of the valve body 16 when the valve body 16 contacts the conical valve seat surface 34a and the communication between both the ports 11 and 12 is blocked. The valve body housing block 10 is formed so as to substantially coincide. Thus, when the cross-sectional shape of the first port 11 is a triangle, as is clear from a comparison between FIG. 8 and FIG. 5, when the valve body 16 is separated from the conical valve seat surface 34a, the front end surface of the valve body 16 The length of the conical surface-shaped portion 34 from the first port 11 to the first port 11 is shortened, so that the flow resistance of the chemical solution can be further reduced and the cleaning efficiency by the cleaning solution can be further increased.

  FIG. 9 is a sectional view showing an on-off valve according to another embodiment of the present invention. The on-off valve shown in FIG. 9 is a single product in which one valve body accommodation hole 13 is formed in the valve body housing block 10, whereas the above-described on-off valve has a manifold structure.

  As shown in FIG. 9, a joint portion 14 that communicates with the first port 11 and a joint portion 15 that communicates with the second port 12 are provided on the opposite side surfaces of the valve element housing block 10. Both joint parts 14 and 15 are provided on the same center line. As shown in FIG. 9, the diaphragm 39 provided integrally with the valve body 16 is provided on the distal end side of the valve body 16 as compared with the diaphragm 39 described above, and the valve body accommodation hole 13 is formed by the cylinder described above. It does not have the surface-shaped part 35, and the valve body accommodation hole 13 is formed only by the conical surface-shaped part 34. Therefore, the dimension between the opening of the second port 12 and the diaphragm 39 is shortened, and the volume of the communication chamber 36 is smaller as apparent from the comparison with FIG. Thereby, the length dimension of the axial direction of the valve body accommodation block 10 can be shortened, Furthermore, the residual liquid of a chemical | medical solution can be decreased, and the chemical | medical solution washing | cleaning time using a washing | cleaning liquid can be shortened more.

  The second port 12 has a portion 12 a concentric with the joint portion 15 and a portion 12 b bent from this portion toward the communication chamber 36, and the joint portion 15 is in the axial direction of the valve body housing block 10. It is provided in the center. Thereby, even if the stepped portion 37 is brought close to the opening of the second port 12, the strength of the joint portion 15 is ensured.

  The on-off valve shown in FIG. 9 is a single product, and in this on-off valve, the joint portion 14 communicating with the first port 11 and the joint portion 15 communicating with the second port 12 are formed in a straight line position. However, similarly to the on-off valve described above, the two ports 11 and 12 may be formed in the valve body housing block 10 in a direction perpendicular to each other, and the joint portions 14 and 15 may be provided in the direction perpendicular to each other. . The first port 11 of the on-off valve shown in FIG. 9 communicates with a triangular section formed at the bottom of the valve body accommodating hole 13, but communicates as shown in FIG. 4 and FIG. The portion may be circular in cross section. In the on-off valve shown in FIGS. 1 to 6, the valve body accommodating hole 13 has a conical surface-shaped portion 34 and a cylindrical surface-shaped portion 35, but like the on-off valve shown in FIG. The body accommodation hole 13 may be formed only by the conical surface shaped portion 34. In that case, the diaphragm 39 is provided on the distal end side of the valve body 16, and the on-off valve has a form in which the axial dimension of the valve body housing block 10 is shortened. In the on-off valve shown in FIG. 9 as well, as with the on-off valve in the other embodiments, both the first port 11 and the second port 12 may be primary ports for supplying a chemical solution. Further, when cleaning the chemical remaining in the flow path of the on-off valve, the cleaning liquid may be supplied from the first port 11 and discharged from the second port 12. Even in this case, the cleaning process can be performed in a short time.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, as a driving means for linearly reciprocating the valve body 16, an electromagnet or the like may be used in place of the fluid pressure cylinder 30 that is operated by air pressure or hydraulic pressure. Further, depending on the type of liquid supplied to the on-off valve, an annular groove is formed on the outer periphery of the valve body 16 without providing the diaphragm 39 and the annular portion 38 integrally with the valve body 16, and an O-ring or the like is formed in the annular groove. It is also possible to seal the gap between the valve body 16 and the valve body housing block 10 by attaching a sealing material.

DESCRIPTION OF SYMBOLS 10 Valve body accommodation block 11 1st port 12 2nd port 13 Valve body accommodation holes 14 and 15 Joint part 16 Valve body 18 Cylinder block 20 Piston 21 Piston rod 25 Spring chamber 26 Pressure chamber 29 Spring member 30 Fluid pressure cylinder ( Driving means)
34 conical surface shaped portion 34a conical valve seat surface 34b arc surface 35 cylindrical surface shaped portion 36 communication chamber 38 annular portion 39 diaphragm (seal member)

Claims (6)

An on-off valve that switches a first port and a second port for guiding the liquid between a communication state and a shut-off state,
A valve body housing block formed with a conical surface-shaped portion that forms a communication chamber for communicating the first port and the second port;
The first port and the first port are arranged in the communication chamber so as to be reciprocally movable in the axial direction coaxially with the central axis of the conical surface-shaped portion and in contact with a conical valve seat surface provided in the conical surface-shaped portion. A valve body that blocks communication with the second port, while communicating with the first port and the second port away from the conical valve seat surface;
A drive means attached to the valve body housing block and reciprocating the valve body in an axial direction;
Is mounted between the valve body accommodating block and said valve body having a seal member for sealing between the open end of the valve body and the communication chamber,
The cross-sectional shape of the first port and circular, and said by positioned inside the apex of the conical surface-shaped portion, the apex portion than the conical valve seat surface of the conical surface-shaped portion, said conical valve The first port is connected to the seating surface via an arc surface or a conical surface ;
The second port is provided in a larger diameter side portion than the conical valve seat surface in the conical surface shape portion,
The on-off valve characterized in that the first port and the second port are open in the conical surface-shaped portion. An on-off valve that switches a first port and a second port for guiding the liquid between a communication state and a shut-off state,
A valve body housing block formed with a conical surface-shaped portion that forms a communication chamber for communicating the first port and the second port;
The first port and the first port are arranged in the communication chamber so as to be reciprocally movable in the axial direction coaxially with the central axis of the conical surface-shaped portion and in contact with a conical valve seat surface provided in the conical surface-shaped portion. A valve body that blocks communication with the second port, while communicating with the first port and the second port away from the conical valve seat surface;
A drive means attached to the valve body housing block and reciprocating the valve body in an axial direction;
Is mounted between the valve body accommodating block and said valve body having a seal member for sealing between the open end of the valve body and the communication chamber,
The cross-sectional shape of the first port is a triangle having two sides coinciding with the ridgeline of the conical valve seat surface and one side along the tip surface of the valve body, and more than the apex of the conical surface shape portion. Positioned on the inside, the first port is provided at the apex portion of the conical surface shaped portion than the conical valve seat surface,
The second port is provided in a larger diameter side portion than the conical valve seat surface in the conical surface shape portion,
Off valve wherein the first port and the second port, characterized in that opening into the conical surface shape section. 3. The on-off valve according to claim 1, wherein the seal member is provided integrally between an annular portion fixed to the valve body housing block and the valve body, and is elastic as the valve body moves in the axial direction. An on-off valve characterized by being a deformable diaphragm. The on-off valve according to any one of claims 1 to 3, wherein the second port opens in a tangential direction to the inner peripheral surface of the conical surface-shaped portion . The on-off valve according to any one of claims 1 to 4, wherein a plurality of communication chambers are formed in the valve element housing block in parallel with each other at intervals in the longitudinal direction thereof, and each of the conical surface-shaped portions. The first port that opens to the valve body housing block is formed in a straight line along the longitudinal direction, and the second port that communicates with each of the communication chambers is perpendicular to the first port. An on-off valve formed on the valve body housing block.   6. The on-off valve according to claim 1, wherein the driving means is a fluid pressure cylinder having a piston that reciprocates in the axial direction by fluid pressure and is connected to the valve body. Open / close valve.

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