JP5474891B2 - Light source device and exposure apparatus using the same - Google Patents

Description

  The present invention relates to a light source device that generates extreme ultra violet (EUV) light by irradiating a target with a laser beam. Furthermore, the present invention relates to an exposure apparatus using such a light source device.

  With the miniaturization of semiconductor processes, the miniaturization of optical lithography is rapidly progressing, and in the next generation, fine processing of 100 to 70 nm and further fine processing of 50 nm or less are required. For example, in order to meet the demand for fine processing of 50 nm or less, development of an exposure apparatus combining an EUV light source having a wavelength of about 13 nm and a reduced projection reflection optical system (catoptric system) is expected.

EUV lithography is a type of optical lithography, and uses extreme ultraviolet light with a wavelength of 10 nm, and forms a mask image of a pattern of a semiconductor circuit on a resist coated on a semiconductor wafer in a reduction projection reflection optical system. Perform circuit formation. In an exposure apparatus used for EUV lithography, it is assumed that the throughput is 80 sheets / hour and the resist sensitivity is 5 mJ / cm ^2. An EUV light source of about ˜1000 W is required.

  As the EUV light source, an LPP (laser produced plasma) light source using plasma generated by irradiating a target with a laser beam, a DPP (discharge produced plasma) light source using plasma generated by discharge, and orbital radiation light There are three types of SR (syncrotron radiation) light sources used. Among these, since the LPP light source can considerably increase the plasma density, extremely high brightness close to that of black body radiation can be obtained, and light emission only in a necessary wavelength band is possible by selecting a target material, which is almost isotropic. Since it is a point light source with a typical angular distribution, there is no structure such as an electrode around the light source, and it is possible to secure a very large collection solid angle of 2πsterad. It is considered to be a powerful light source for required EUV lithography.

  In a LPP light source, when a solid material is used as a target for irradiating a laser beam to generate plasma, heat generated by laser beam irradiation is transmitted to the periphery of the laser beam irradiation region when the laser beam irradiation region is turned into plasma. In the periphery, the solid material melts. The molten solid material is released in a large amount as particle soot (debris) having a diameter of several μm or more, damages the condensing mirror, and reduces its reflectance. On the other hand, when gas is used as the target, debris is reduced, but the conversion efficiency from the power supplied to the laser oscillator to the power of the EUV light is reduced.

  By the way, since the LPP light source is a point light source or an aggregate thereof, it is necessary to collect light emitted from the LPP light source with a condensing mirror and output light usable for EUV lithography. Here, there is a principle that etendue is always constant in the light flux transmission of point light source light. Etendue is an amount defined by the product of the area of a light beam and the spread angle (solid angle). If the etendue on the light source side (the product of the light source area and the divergent solid angle) is larger than the etendue of the illumination area (the product of the area of the illumination area and the solid angle of the illumination light), the ratio of the light flux that cannot be taken into the illumination area Therefore, it is necessary to keep the etendue on the light source side smaller than the etendue of the illumination area. Since EUV light is divergent light, the size of the plasma that serves as the light source must be made sufficiently small in order to keep the etendue small. For example, in order to collect light from the light source in the range of the solid angle π, the diameter of the plasma needs to be about 0.5 mm or less.

Conventionally, development has been carried out using a 1.5 W class LD-pumped YAG laser in order to generate plasma in an LPP light source. This YAG laser has a pulse duration of several ns and the wavelength of the laser beam used is in the 1 μm band. On the other hand, the plasma generation process exceeding tens of thousands of degrees progresses on the scale of ps ( ^10-12 seconds). If the density of the plasma at the initial time point when the laser beam is irradiated is small, the laser beam will not pass through the molecules and atoms in the target sufficiently after that and pass through. On the other hand, when the plasma density is too high, the plasma on the side irradiated with the laser beam is blocked, and a sufficient volume of plasma cannot be generated. Therefore, there is an optimum range for the density of the target gas.

  In the case of using a YAG laser, it is necessary to interact the laser beam with a target gas having a considerably high density in order to efficiently absorb the laser beam. Therefore, it is necessary to irradiate a laser beam to a gas having a high density near the nozzle outlet. However, a YAG laser with high output generally has poor condensing performance because there are many modes in the transverse mode, and the lateral mode further increases because the nonuniformity of the glass medium increases due to heat generated during operation. There was also a problem that the irradiation efficiency to the target was lowered as a result.

  Therefore, an object of the present invention is to provide a light source device that has a small etendue, can take out a high output, and is less damaged by debris. It is another object of the present invention to provide an exposure apparatus that can realize fine photolithography by using such a light source device.

  In order to solve the above-described problem, a light source device according to one aspect of the present invention is a light source device that generates extreme ultraviolet light by irradiating a target with a pulsed laser beam, and that supplies a target material. And a laser unit that generates plasma by irradiating the target with a pulsed laser beam, and a condensing optical system that collects extreme ultraviolet light emitted from the plasma. An oscillation stage that generates at a repetition frequency of; an adaptive optical element that makes the pulse laser beam a low-order transverse mode; and at least one amplification stage that contains carbon dioxide gas as a medium and amplifies the pulse laser beam. The stage and the at least one amplification stage are connected in series by a master oscillator power amplifier (MOPA) scheme, Restorative optical element, characterized in that arranged in the pulsed laser beam on the optical path.

  An exposure apparatus according to one aspect of the present invention includes a light source device according to the present invention, an illumination optical system that illuminates the mask using extreme ultraviolet light generated by the light source device, and an extreme reflected from the mask. A projection optical system that exposes an object using ultraviolet light.

  According to the present invention configured as described above, the laser unit includes an oscillation stage that generates a pulse laser beam at a predetermined repetition frequency, an adaptive optical element that changes the pulse laser beam to a low-order transverse mode, and dioxide as a medium. By including at least one amplification stage that contains the carbon gas and amplifies the pulse laser beam, it is possible to maintain the generation of the pulse laser beam in the low-order transverse mode, so that the etendue is small and the output is high. A light source device that can be taken out and is less damaged by debris can be provided. Furthermore, it is possible to provide an exposure apparatus that realizes fine photolithography using such a light source device.

It is sectional drawing which shows the structure of the light source device which concerns on one Embodiment of this invention. It is a figure which shows the 1st specific example of the drive laser used in one Embodiment of this invention. It is a figure which shows the 2nd specific example of the drive laser used in one Embodiment of this invention. It is a figure which shows the 3rd specific example of the drive laser used in one Embodiment of this invention. It is a figure which shows the structure of the exposure apparatus which concerns on one Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the same reference number is attached | subjected about the same component, and these description is abbreviate | omitted.
FIG. 1 shows a configuration of a light source device according to an embodiment of the present invention. The light source device includes, as a laser unit, a driving laser 101 that generates a laser beam and an optical system that focuses the laser beam generated by the driving laser 101. In the present embodiment, this optical system is constituted by the condenser lens 102. As the condensing lens 102, a plano-convex lens or a cylindrical lens is used.

  In addition, the light source device includes a target supply unit 108 that supplies a target substance that is irradiated with a laser beam, and a nozzle 103 that ejects the substance supplied from the target supply unit 108 as a target supply unit. Yes. The laser unit generates plasma by irradiating the target supplied from the target supply unit with a laser beam.

  Further, the light source device emits from the periphery of the laser beam irradiation region and the reflecting mirror 105 that constitutes a condensing optical system that condenses and emits extreme ultra violet (EUV) light emitted from the plasma. And a debris shield 106 that removes particle soot (debris) having a diameter of several μm or more and allows only EUV light to pass therethrough. As the reflecting mirror 105, a parabolic mirror, a spherical mirror, or a spherical mirror having a plurality of curvatures can be used. In the present invention, EUV light has a wavelength of 5 nm to 50 nm.

In the present invention, any of gas, liquid, and solid can be used as a target. However, a substance that is in a gas state at the time of laser beam irradiation or immediately after the laser beam irradiation is desirable. Specifically, a substance in a gas state at normal temperature (20 ° C.) corresponds to, for example, xenon (Xe), a mixture containing xenon as a main component, argon (Ar), krypton (Kr), or low pressure state In this case, water (H ₂ O) or alcohol, which is a gas, can be used. Since the extreme ultraviolet light generating section needs to be in a vacuum state, even if water is supplied at room temperature, it becomes a gas after exiting the nozzle.

  When the target substance is in a gas state from the beginning, the gas may be supplied in a gas state by applying pressure to the gas and releasing it from the opening of the nozzle 103. Alternatively, this gas may be supplied as a jet (jet) of an aggregate (cluster ion) of charged atoms or molecules formed by aggregation of a plurality of atoms or molecules with positive ions or negative ions as nuclei. .

  In this embodiment, xenon (Xe) is used as a target. In that case, the generated EUV light has a wavelength of about 10 nm to about 15 nm. When the target supply device 108 applies pressure to the xenon gas, the xenon gas is jetted upward from the opening of the nozzle 103. The nozzle 103 has a slit-like opening or has a plurality of openings arranged in a straight line. Accordingly, the ejected xenon gas flows vertically while having a wide width in the longitudinal direction of the opening, and forms a column of xenon gas.

  The laser beam generated from the driving laser 101 is condensed by the cylindrical condenser lens 102, becomes a laser beam having a substantially line-shaped cross-sectional shape, and is irradiated toward the xenon gas column. A cigar-shaped plasma 104 having a length of several mm to several cm is generated at a position where the irradiated laser beam intersects the xenon gas.

  The EUV light emitted from the plasma is condensed by the reflecting mirror 105 constituting the condensing optical system to become parallel light 107. The optical axis of the condensing optical system is preferably orthogonal to the longitudinal axis of the plasma 104. The parallel light 107 passes through the debris shield 106 installed to remove the debris, and then supplied to the exposure unit.

  The driving laser 101 includes an oscillation stage laser having a low-order transverse mode (also referred to as “oscillation stage” in the present application) and at least one amplification for amplifying a low-order transverse mode laser beam generated by the oscillation stage laser. A stage laser (also referred to herein as an “amplification stage”). Hereinafter, a specific example of the driving laser 101 will be described in detail.

  FIG. 2 shows a first specific example of the driving laser used in this embodiment. In the first specific example, a YAG laser 21 in an oscillation stage and three YAG lasers 22 to 24 in an amplification stage are connected in series to form a MOPA (master oscillator power amplifier) type laser. Although an example of a MOPA type laser is shown here, an injection locking system (ILS) laser may be used. The MOPA method is a method in which reflection mirrors are not arranged on both the rear side and the front side of the amplification stage laser, and no laser resonator is formed in the amplification stage laser. On the other hand, the injection lock system is a system in which reflection mirrors are arranged on both the rear side and the front side of the amplification stage laser, and a laser resonator is also formed in the amplification stage laser. Regardless of which method is used, if a low-order transverse mode laser beam is emitted from the oscillation stage laser, the laser beam amplified and emitted by the amplification stage laser can also maintain the low-order transverse mode. It is possible to increase the light collecting property. In the case where a plurality of laser devices are connected in series in the drive laser as described above, it is preferable that the laser medium be of the same type.

  In the YAG laser 21 in the oscillation stage, a single mode and a transverse mode are achieved using an optical element such as an SBS (stimulated Brillouin scattering) element or an adaptive optical element. The oscillation stage YAG laser 21 generates a laser beam having a wavelength in the vicinity of 1 μm. Since the oscillation stage laser may have a low output, high-frequency repetitive oscillation up to about 10 kHz and stabilization of the beam mode can be achieved relatively easily.

  On the other hand, the amplification stage YAG lasers 22, 23 and 24 are high-power lasers. The low-power pulse light incident on the amplification stage YAG laser 22 from the oscillation stage YAG laser 21 proceeds in the high-power YAG lasers 22, 23, and 24 in order and is amplified. As a result, the necessary energy is obtained, and a laser beam with high condensing performance and high energy is output from the high-power YAG laser 24.

  The size of the EUV light source needs to satisfy the etendue constraints. If it is larger than that, the ratio of the luminous flux that can be used for exposure decreases, and the efficiency becomes low. Therefore, in order to use as a driving laser for an EUV light source, the diameter of the laser beam must be sufficiently small. In the present invention, since a laser having a low-order transverse mode is used as the oscillation stage laser, the diameter of the laser beam can be made sufficiently small.

  FIG. 3 shows a second specific example of the driving laser used in this embodiment. In the second specific example, three carbon dioxide lasers are connected in series to form a MOPA laser. Here, a MOPA type laser is exemplified, but an injection lock type laser may be used.

As shown in FIG. 3, a pulse CO ₂ laser 31 having an output of 10 W is arranged in the oscillation stage, and two CW (continuous wave) -CO ₂ lasers 32 and 33 are arranged in the amplification stage. The pulsed CO ₂ laser 31 in the oscillation stage can generate pulsed light at a high repetition frequency (for example, 100 kHz). In this example, the pulsed CO ₂ laser 31 of the oscillation stage operates in the transverse mode and the single mode, and generates a laser beam having a wavelength of about 10 μm.

The amplification stage CW-CO ₂ laser 32 includes eight carbon dioxide lasers 1 to 8, and the amplification stage CW-CO ₂ laser 33 also includes eight carbon dioxide lasers 9 to 16. In FIG. 3, the state of the laser beam passing through these carbon dioxide lasers is indicated by arrows. The low-power pulsed light incident from the oscillation stage pulse CO ₂ laser 31 to the amplification stage CW-CO ₂ laser 32 travels through the carbon dioxide lasers 1 to 16 and is amplified, and has high condensing performance and high energy. A laser beam is output from the CW-CO ₂ laser 33 in the amplification stage. In this embodiment, a 10 W laser beam emitted from the pulsed CO ₂ laser 31 at the oscillation stage is amplified to 40 kW and emitted from the CW-CO ₂ laser 33 at the amplification stage.

Since the CW-CO ₂ laser performs a continuous excitation operation, the repetition frequency of the laser beam is governed by the performance of the oscillation stage laser. This is advantageous when EUV light is output at a high repetition frequency such as 2 kHz, 4 kHz, 6 kHz, or the like. However, the energy density of the output laser beam cannot be increased. Note that if the CW-CO ₂ lasers 32 and 33 in the amplification stage are modulated in synchronization with the pulse CO ₂ laser 31 in the oscillation stage, useless excitation energy can be saved and the system efficiency can be improved. .

In the light source device shown in FIG. 1, when a CO ₂ laser is used as a driving laser, EUV light can be generated by irradiating a low-density gas state target with a laser beam having a long wavelength. For this reason, the distance from the opening of the nozzle 103 to the plasma 104 can be made considerably long, the damage to the nozzle due to plasma and the problem of heating can be reduced, the generation of debris can be suppressed, and the life of the reflector can be extended. it can. Further, since the gap between the nozzle opening and the position where the plasma is generated can be separated, the design related to the arrangement of the condensing optical system for extracting the EUV light becomes easy.

FIG. 4 shows a third specific example of the driving laser used in this embodiment. In the third specific example, the CW-CO ₂ laser of the amplification stage in the second specific example is replaced with a TEA (transversely excited atmospheric) -CO ₂ laser that is a pulsed laser. The TEA laser is a coherent light source that performs an electric discharge crossing the optical axis and has a wide wavelength range from infrared to ultraviolet in order to obtain an inversion distribution and gain in a mixed gas having a pressure reaching several atmospheres.

As shown in FIG. 4, a pulse CO ₂ laser 41 is arranged at the oscillation stage, and two TEA-CO ₂ lasers 42 and 43 are arranged at the amplification stage. In this case, since the repetition frequency of oscillation is governed by the performance of the TEA-CO ₂ laser, it is difficult to increase the repetition frequency, but the peak value of the energy of the output laser beam can be increased.

  Next, an exposure apparatus according to an embodiment of the present invention will be described. FIG. 5 shows the arrangement of an exposure apparatus according to an embodiment of the present invention. This exposure apparatus uses the light source device described above as a light source, and since there is little debris in the light source, adverse effects on the optical system can be reduced.

  As illustrated in FIG. 5, the exposure apparatus includes a light source device 100 that generates EUV light, and a reticle (mask) that reflects EUV light generated by the light source device 100 using a plurality of mirrors and is attached to a reticle stage 300. ) And an optical projection system 401 that exposes an object using EUV light reflected from the mask. The projection optical system 401 constitutes an exposure unit 400 together with a wafer stage 402 for setting a wafer and a wafer alignment sensor 403 for detecting the position of the wafer 500. The entire exposure apparatus is installed in a vacuum system maintained at a low pressure by a vacuum pump or the like.

Next, the operation of the exposure apparatus according to this embodiment will be described.
The light source device 100 outputs high-energy EUV light having a sufficiently small etendue. Therefore, the ratio of the luminous flux that can be used for exposure is high and the efficiency is good. The illumination optical system 200 reflects the EUV light output from the light source device 100 by the condensing mirrors 201, 202, and 203 to illuminate the reticle stage 300. As described above, the illumination optical system 200 is entirely composed of a reflection system, and the total reflectance is about 0.65.

  A mask on which a desired pattern is formed is attached to the lower side of the reticle stage 300 in the drawing, and this mask reflects EUV light incident from the illumination optical system 200 according to the formed pattern. The projection optical system 401 provided in the exposure device 400 projects the resist by projecting the EUV light reflected by the mask onto the resist applied to the wafer 500 on the wafer stage 402. Thereby, the pattern on the mask can be reduced and transferred to the resist on the wafer. The reticle stage 300 and the wafer stage 402 are movable perpendicular to the optical axis, and the entire mask pattern is exposed by moving the reticle stage 300 and the wafer stage 402.

  As described above, according to the present invention, since a highly condensing laser beam generated by an oscillation stage laser having a low-order transverse mode is amplified by an amplification stage laser and irradiated to a target, the etendue is small, It is possible to provide a light source device that can extract high output and is less damaged by debris. Furthermore, an exposure apparatus that realizes fine optical lithography can be provided by using this light source device.

  DESCRIPTION OF SYMBOLS 1-16 ... Carbon dioxide laser, 21, 31, 41 ... Oscillation stage laser, 22-24, 32, 33, 42, 43 ... Amplification stage laser, 100 ... Light source device, 101 ... Driving laser, 102 ... Condensing lens, DESCRIPTION OF SYMBOLS 103 ... Nozzle, 104 ... Plasma, 105 ... Reflective mirror, 106 ... Debris shield, 107 ... EUV parallel light, 108 ... Target supply apparatus, 200 ... Illumination optical system, 201, 202, 203 ... Condensing mirror, 300 ... Reticle Stage 400 ... Exposure device 401 ... Projection optical system 402 ... Wafer stage 403 ... Wafer alignment sensor 500 ... Wafer

Claims (12)

A light source device that generates extreme ultraviolet light by irradiating a target with a pulsed laser beam,
A target supply unit for supplying the target substance;
A laser unit that generates plasma by irradiating the target with a pulsed laser beam;
A condensing optical system that condenses extreme ultraviolet light emitted from the plasma,
The laser unit is
An oscillation stage for generating the pulsed laser beam at a predetermined repetition rate;
An adaptive optical element that makes the pulsed laser beam a low-order transverse mode;
Carbon dioxide gas as a medium, and at least one amplification stage for amplifying the pulsed laser beam,
The oscillation stage and the at least one amplification stage are connected in series by a MOPA (master oscillator power amplifier) method,
The adaptive optical element is disposed on an optical path of the pulse laser beam.   The light source device according to claim 1, wherein the at least one amplification stage includes an amplification stage that amplifies the pulsed laser beam by a continuous excitation operation.   The light source device according to claim 1, wherein the at least one amplification stage includes an amplification stage that amplifies the pulsed laser beam by an excitation operation that modulates the pulsed laser beam in synchronization with the oscillation stage. It said target comprises an ion source device according to any one of claims 1 or 3. A light source device according to any one of claims 1-4, further comprising a debris shield to pass extreme ultraviolet light to remove the debris. The light source device according to claim 5 , wherein the debris shield is disposed on an optical path of extreme ultraviolet light collected by the condensing optical system. The oscillator stage comprises a carbon dioxide laser for generating a pulsed laser beam of transverse single-mode, the light source device according to any one of claims 1-6. The light source device according to any one of claims 1 to 7 ,
An illumination optical system that illuminates the mask using extreme ultraviolet light generated by the light source device;
A projection optical system that exposes an object using extreme ultraviolet light reflected from the mask; and
An exposure apparatus comprising: A light source device that generates extreme ultraviolet light by irradiating a target with a pulsed laser beam,
A target supply unit for supplying the target substance;
A laser unit that generates plasma by irradiating the target with a pulsed laser beam;
A condensing optical system that condenses extreme ultraviolet light emitted from the plasma,
The laser unit is
An oscillation stage for generating the pulsed laser beam at a predetermined repetition rate;
Carbon dioxide gas as a medium, and at least one amplification stage for amplifying the pulsed laser beam,
The oscillation stage and the at least one amplification stage are connected in series by a MOPA (master oscillator power amplifier) method,
Each of the at least one amplification stage includes a plurality of laser amplifiers, and the pulse laser beam sequentially passes through the plurality of laser amplifiers in each amplification stage and is output from the amplification stage. A light source device. Each of the at least one amplification stage includes eight laser amplifiers, and each of the amplification stages is configured such that the pulsed laser beam sequentially passes through the eight laser amplifiers and is output from the amplification stage. The light source device according to claim 9. A first amplification stage and a second amplification stage as the at least one amplification stage;
Each of the first amplification stage and the second amplification stage includes eight laser amplifiers, and the pulse laser beam sequentially passes through the eight laser amplifiers included in the first amplification stage. The output from the first amplifying stage, and then sequentially passing through the eight laser amplifiers included in the second amplifying stage and output from the second amplifying stage. The light source device described. Each of the at least one amplification stage is a first laser amplifier disposed in a first optical path, and a second optical path through which the pulsed laser beam that has passed through the first optical path passes. The light source device according to claim 9, further comprising: a second laser amplifier disposed in the second optical path perpendicular to the first optical path.

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