JP5472590B2 - Organic semiconductor material and organic thin film transistor using the same - Google Patents
Organic semiconductor material and organic thin film transistor using the same Download PDFInfo
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- JP5472590B2 JP5472590B2 JP2009164783A JP2009164783A JP5472590B2 JP 5472590 B2 JP5472590 B2 JP 5472590B2 JP 2009164783 A JP2009164783 A JP 2009164783A JP 2009164783 A JP2009164783 A JP 2009164783A JP 5472590 B2 JP5472590 B2 JP 5472590B2
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- Prior art keywords
- organic
- thin film
- organic semiconductor
- film transistor
- semiconductor material
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Images
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- Junction Field-Effect Transistors (AREA)
- Thin Film Transistor (AREA)
Description
本発明は、新規な構成単位を有する有機半導体材料を提供するものであり、更に、簡便な液体成膜プロセスを実施するために必要な溶解性に優れた有機エレクトロニクス材料およびこれを用いた有機薄膜トランジスタに関する。 The present invention provides an organic semiconductor material having a novel structural unit, and further, an organic electronic material having excellent solubility necessary for carrying out a simple liquid film forming process, and an organic thin film transistor using the same About.
近年、有機半導体材料を利用した有機電子デバイスに関する研究開発が盛んである。
有機半導体材料は、印刷法、スピンコート法等のウェットプロセスによる簡便な方法で、容易に薄膜形成が可能であり、従来の無機半導体材料を利用した薄膜トランジスタと比較し、製造プロセス温度を低温化できるという利点がある。
これにより、一般に耐熱性の低いプラスチック基板上への形成が可能となり、ディスプレイ等のエレクトロニクスデバイスの軽量化や低コスト化が実現できるとともに、プラスチック基板のフレキシビリティーを活かした用途等、多様な展開が期待できる。
In recent years, research and development on organic electronic devices using organic semiconductor materials has been active.
Organic semiconductor materials can be easily formed into thin films by a simple process using a wet process such as a printing method, spin coating method, etc., and the manufacturing process temperature can be lowered as compared with a thin film transistor using a conventional inorganic semiconductor material. There is an advantage.
This enables formation on plastic substrates with generally low heat resistance, which can realize weight reduction and cost reduction of electronic devices such as displays, and various developments such as applications that take advantage of the flexibility of plastic substrates. Can be expected.
これまでに、有機半導体材料として、分子が平面構造を有するため、密なパッキング形態をとることが可能であり、比較的高い半導体特性が得られることから、チオフェン分子を主骨格とした検討が数多く行なわれている。
例えば、高分子系材料としては、有機溶剤への溶解性および分子が配向する駆動力の付与を目的として、アルキル基を導入したポリ(3−アルキルチオフェン)が提案されている(非特許文献1参照)。
この有機半導体材料は、低いながらも溶解性を有するため、真空蒸着工程を経ず、塗布や印刷で薄膜化が可能である。しかし、このポリ(3−アルキルチオフェン)は酸化されやすく、これを活性層として利用した有機薄膜トランジスタは大気中での動作が不安定であった。
これに対して、酸化安定性を改善したポリチオフェン類も提案されている(特許文献1および特許文献2参照)。
しかしながら、これらを含め全般的に高分子系の有機半導体材料は、精製方法に制約を受け、高純度の材料を得るのに非常に手間がかかったり、分子量や分子量分布が存在するために、品質の安定性に欠けるという根本的な問題を抱えている。
So far, as organic semiconductor materials, molecules have a planar structure, so it is possible to take a dense packing form, and relatively high semiconductor characteristics can be obtained, so there are many studies using thiophene molecules as the main skeleton. It is done.
For example, as a polymer material, poly (3-alkylthiophene) into which an alkyl group is introduced has been proposed for the purpose of providing solubility in an organic solvent and driving force for orienting molecules (Non-patent Document 1). reference).
Since this organic semiconductor material has low solubility, it can be thinned by coating or printing without going through a vacuum deposition process. However, this poly (3-alkylthiophene) is easily oxidized, and the organic thin film transistor using this as an active layer has unstable operation in the atmosphere.
In contrast, polythiophenes with improved oxidation stability have also been proposed (see
However, in general, high-molecular-weight organic semiconductor materials, including these, are limited in purification methods, and it is very time-consuming to obtain high-purity materials, and there are molecular weights and molecular weight distributions. Has the fundamental problem of lack of stability.
一方、チオフェン骨格を主とした有機半導体材料は、前記高分子系の欠点を克服するべく、オリゴチオフェン類の検討も多く行なわれている(例えば、非特許文献2参照)。
このオリゴチオフェンを有機半導体層として利用した有機薄膜トランジスタは、比較的高移動度であることが報告されているが、これらの材料はアルキル基等により置換されていないため、汎用溶媒に対しきわめて溶解性が低く、それを有機薄膜トランジスタにおける活性層として薄膜化する際には、真空蒸着工程を経る必要がある。ゆえに、前述したような塗布や印刷などの簡便なプロセスで薄膜を形成できるという有機半導体材料への期待に応えるものではない。
On the other hand, in order to overcome the drawbacks of the polymer system, many organic thiophene skeletons have been studied for oligothiophenes (see, for example, Non-Patent Document 2).
Organic thin-film transistors using oligothiophene as an organic semiconductor layer have been reported to have relatively high mobility, but these materials are not substituted with alkyl groups, so they are extremely soluble in general-purpose solvents. However, when it is thinned as an active layer in an organic thin film transistor, it is necessary to go through a vacuum deposition process. Therefore, it does not meet the expectation for an organic semiconductor material that a thin film can be formed by a simple process such as coating and printing as described above.
また、α位または、β位にアルキル基を導入したオリゴチオフェン類も提案されているが(例えば、非特許文献3および非特許文献4参照)、本発明者らが検討した結果、室温における汎用溶剤に対する溶解性は決して満足できるものではないことが明らかとなった。
また、溶解度を考慮した分子の設計指針に基づくオリゴチオフェン類も提案されているが(非特許文献5参照)、成膜により得られた薄膜は連続性を有しておらず、デバイス作製に適した分子構造とはいい難い。
溶解性および成膜性を向上させることは、デバイス作製の観点からも重要であり、更なる材料開発が望まれている。
In addition, oligothiophenes in which an alkyl group is introduced at the α-position or β-position have been proposed (see, for example, Non-Patent Document 3 and Non-Patent Document 4). It became clear that the solubility in solvents was never satisfactory.
Oligothiophenes based on molecular design guidelines that take solubility into account have also been proposed (see Non-Patent Document 5), but the thin films obtained by film formation do not have continuity and are suitable for device fabrication. The molecular structure is difficult.
Improving solubility and film formability is important from the viewpoint of device fabrication, and further material development is desired.
本発明は、上記従来の技術を鑑みてなされたものであり、汎用溶媒に対する溶解性が非常に高く、湿式成膜が可能な低コストプロセスに適応可能であり、さらに、容易に均質性の高い薄膜を得ることが可能な有機エレクトロニクス用材料として有用なオリゴチオフェン類からなる有機半導体材料およびこれを用いた有機薄膜トランジスタを提供することを目的とする。 The present invention has been made in view of the above-described conventional technology, has very high solubility in general-purpose solvents, can be applied to a low-cost process capable of wet film formation, and easily has high homogeneity. An object is to provide an organic semiconductor material composed of oligothiophenes useful as a material for organic electronics capable of obtaining a thin film, and an organic thin film transistor using the same.
上記問題を鑑みて、本発明者らは鋭意検討した結果、均質性の高い薄膜を得るためには、汎用溶剤に対する溶解度を維持すること、さらに、塗布後の薄膜の結晶化速度の制御が重要であると考え、特定の構成単位を含有するオリゴチオフェン類からなる有機半導体材料およびこれを用いた有機薄膜トランジスタにより上記課題が解決されることを見出し、本発明に至った。
即ち、本発明は以下の(1)から(4)で示される。
(1)「下記一般式(I)で表わされることを特徴とする有機半導体材料。
In view of the above problems, as a result of intensive investigations, the present inventors have found that in order to obtain a highly homogeneous thin film, it is important to maintain solubility in a general-purpose solvent and to control the crystallization rate of the thin film after coating. Therefore, the present inventors have found that the above problems can be solved by an organic semiconductor material composed of oligothiophenes containing a specific structural unit and an organic thin film transistor using the same.
That is, this invention is shown by the following (1) to (4).
(1) “An organic semiconductor material represented by the following general formula (I):
(2)「少なくとも前記第(1)項記載の有機半導体材料と少なくとも1種類の有機溶媒を含むことからなる液体組成物」、
(3)「支持体上に形成され少なくとも前記第(1)項記載の有機半導体材料を含むことを特徴とする有機膜」、
(4)「有機半導体層と、この有機半導体層を通じて電流を流すための対をなす電極を設けてなる構造体と、第三の電極とからなる有機半導体薄膜トランジスタにおいて、有機半導体層が前記第(3)項の有機膜であることを特徴とする有機薄膜トランジスタ」。
(2) “a liquid composition comprising at least the organic semiconductor material according to item (1) and at least one organic solvent”,
(3) "An organic film formed on a support and containing at least the organic semiconductor material according to item (1)",
(4) “In an organic semiconductor thin film transistor comprising an organic semiconductor layer, a structure having a pair of electrodes for passing a current through the organic semiconductor layer, and a third electrode, the organic semiconductor layer is the first ( An organic thin film transistor characterized by being an organic film according to item 3).
本発明の有機半導体材料は、種々の有機溶媒に可溶であり、低コストな湿式成膜が可能で、かつ、均質性の高い薄膜が得られることから、薄膜トランジスタの活性層用材料として有用である。 The organic semiconductor material of the present invention is useful as a material for an active layer of a thin film transistor because it is soluble in various organic solvents, enables low-cost wet film formation, and provides a thin film with high homogeneity. is there.
下記の一般式(I)で示される本発明の有機半導体材料は、有機薄膜トランジスタ用の電荷輸送性材料などの有機エレクトロニクス用素材として有用である。 The organic semiconductor material of the present invention represented by the following general formula (I) is useful as a material for organic electronics such as a charge transporting material for organic thin film transistors.
アルキル基として具体的には、メチル基、エチル基、n−プロピル基、i−プロピル基、t−ブチル基、s−ブチル基、n−ブチル基、i−ブチル基、ペンチル基、ヘキシル基、ヘプチル基、オクチル基、ノニル基、デシル基、ドデシル基、3,7−ジメチルオクチル基、2−エチルヘキシル基、トリフルオロメチル基、2−シアノエチル基、ベンジル基、4−クロロベンジル基、4−メチルベンジル基、シクロペンチル基、シクロヘキシル基等を一例として挙げることができる。
上記の一例に挙げたように分岐鎖を導入してもよいが、結晶のパッキングに悪影響を及ぼす恐れもあるため、より好ましくは直鎖の導入が好ましい。
Specific examples of the alkyl group include methyl group, ethyl group, n-propyl group, i-propyl group, t-butyl group, s-butyl group, n-butyl group, i-butyl group, pentyl group, hexyl group, Heptyl group, octyl group, nonyl group, decyl group, dodecyl group, 3,7-dimethyloctyl group, 2-ethylhexyl group, trifluoromethyl group, 2-cyanoethyl group, benzyl group, 4-chlorobenzyl group, 4-methyl A benzyl group, a cyclopentyl group, a cyclohexyl group, etc. can be mentioned as an example.
As mentioned in the above example, a branched chain may be introduced, but since it may adversely affect the packing of crystals, the introduction of a straight chain is more preferable.
以下に本発明の有機半導体材料の製造方法について説明する。
本発明の一般式(I)で示される化合物の製造方法としては、ハロゲン化物Ar1−XとGrignard試薬Ar2−MgXからAr1−Ar2構造を形成するGrignard反応による方法、パラジウム触媒を用いAr1−Xの構造を有する有機ハロゲン化物と(R2O)2B−Ar2の構造を有するホウ素化合物をクロスカップリングさせてAr1−Ar2構造を形成するSuzukiカップリング反応による方法、有機ハロゲン化合物Ar1−Xと有機すず化合物Ar2−SnR3とのクロスカップリングによりAr1―Ar2を形成するStilleカップリング反応による方法、Kumadaカップリング反応、Negishiカップリング反応による方法、Hiyamaカップリング反応による方法、Sonogashira反応による方法、Heck反応による方法、Wittig反応による方法、などに代表わされる種々のカップリング反応を用いて行なう、公知の方法が例示される。
これらのうち、Grignard反応による方法、Suzukiカップリング反応またはStilleカップリング反応を用いる方法が、中間体の誘導体化が容易であるのと、反応性、収率の観点から特に好ましい。
Below, the manufacturing method of the organic-semiconductor material of this invention is demonstrated.
As a method for producing the compound represented by the general formula (I) of the present invention, a method using a Grignard reaction in which an Ar 1 -Ar 2 structure is formed from a halide Ar 1 -X and a Grignard reagent Ar 2 -MgX, a palladium catalyst is used. A method by Suzuki coupling reaction in which an organic halide having a structure of Ar 1 -X and a boron compound having a structure of (R 2 O) 2 B—Ar 2 are cross-coupled to form an Ar 1 -Ar 2 structure, Method by Stille coupling reaction in which Ar 1 -Ar 2 is formed by cross-coupling of organohalogen compound Ar 1 -X and organotin compound Ar 2 -SnR 3 , Kumada coupling reaction, method by Negishi coupling reaction, Hiyama Coupling reaction method, So Examples of the known method include various coupling reactions represented by a nogashira reaction method, a Heck reaction method, a Wittig reaction method, and the like.
Of these, the Grignard reaction method, the Suzuki coupling reaction or the Stille coupling reaction method is particularly preferable from the viewpoints of reactivity and yield that the intermediate can be easily derivatized.
Grignard反応の場合には、テトラヒドロフラン、ジエチルエーテル、ジメトキシエタンなどのエーテル系溶媒中でチオフェンのハロゲン化物と金属Mgとを反応させてGrignard試薬溶液とし、これと別に用意したモノマー溶液とを混合し、ニッケルまたはパラジウム触媒を過剰反応に注意しながら添加した後に昇温して還流させながら反応させる方法が例示される。
Grignard試薬はモノマーに対して当量以上、好ましくは1〜1.5当量、より好ましくは1〜1.2当量用いる。これら以外の方法で合成する場合も、公知の方法に従って反応させることができる。
Suzukiカップリング反応の場合には、チオフェンのハロゲン化物と、チオフェンのボロン酸またはボロン酸エステルを、パラジウム触媒および塩基の存在下で反応させる方法が例示される。
Stilleカップリング反応の場合には、チオフェンのハロゲン化物とチオフェンのトリアルキルスズ体を、パラジウム触媒の存在下で反応させる方法が例示される。
In the case of the Grignard reaction, a halide reagent of thiophene and metal Mg are reacted in an ether solvent such as tetrahydrofuran, diethyl ether, dimethoxyethane or the like to form a Grignard reagent solution, and a monomer solution prepared separately is mixed. An example is a method in which a nickel or palladium catalyst is added while paying attention to excess reaction, and then the reaction is carried out while refluxing at elevated temperature.
The Grignard reagent is used in an equivalent amount or more, preferably 1 to 1.5 equivalents, more preferably 1 to 1.2 equivalents, relative to the monomer. When synthesizing by a method other than these, the reaction can be carried out according to a known method.
In the case of the Suzuki coupling reaction, a method of reacting a thiophene halide with a boronic acid or boronic acid ester of thiophene in the presence of a palladium catalyst and a base is exemplified.
In the case of the Stille coupling reaction, a method of reacting a thiophene halide with a thiophene trialkyltin in the presence of a palladium catalyst is exemplified.
上記に挙げた合成方法により得られることが可能な本発明の有機半導体材料の一例を以下に示すが、これらに限定されるものではない。 An example of the organic semiconductor material of the present invention that can be obtained by the synthesis methods listed above is shown below, but is not limited thereto.
以上のようにして得られた有機半導体材料は、反応に使用した触媒、無機塩、未反応原料、副生成物等の不純物を除去して使用される。
精製操作は再結晶、各種クロマトグラフィー法、昇華精製、再沈澱、抽出、ソックスレー抽出、限外濾過、透析等をはじめとする従来公知の方法を使用できる。
不純物の混入は半導体特性に悪影響を及ぼすため、可能な限り高純度にすることが望ましい。
溶解性に優れた本発明の材料は、これら精製方法の制約が少なくなり、結果的に半導体特性にも好影響を与える。
The organic semiconductor material obtained as described above is used after removing impurities such as catalysts, inorganic salts, unreacted raw materials, and by-products used in the reaction.
For the purification operation, conventionally known methods such as recrystallization, various chromatographic methods, sublimation purification, reprecipitation, extraction, Soxhlet extraction, ultrafiltration, dialysis and the like can be used.
Since contamination with impurities adversely affects the semiconductor characteristics, it is desirable to make the purity as high as possible.
The material of the present invention having excellent solubility has less restrictions on these purification methods, and as a result, has a positive effect on semiconductor characteristics.
上記製造方法により得られた本発明の有機半導体材料は、有機溶媒に溶解させることにより液体組成物を調製することが可能である。
使用できる有機溶媒としては、例えば、ジクロロメタン、クロロホルム、四塩化炭素、テトラヒドロフラン、ジオキサン、シクロヘキサノン、アセトン、メチルエチルケトン、酢酸エチル、酢酸プロピル、n−ヘキサン、シクロヘキサン、n−オクタン、n−デカン、n−ドデカン、ジメチルホルムアミド、ベンゼン、トルエン、クメン、o−キシレン、m−キシレン、p−キシレン、p−シメン、メシチレン、アニソール、2−メチルアニソール、3−メチルアニソール、4−メチルアニソール、2,5−ジメチルアニソール、3,5−ジメトキシトルエン、2,4−ジメチルアニソール、フェネトール、安息香酸メチル、安息香酸エチル、安息香酸プロピル、安息香酸ブチル、1,5−ジメチルテトラリン、n−プロピルベンゼン、n−ブチルベンゼン、n−ペンチルベンゼン、1,3,5−トリエチルベンゼン、1,3−ジメトキシベンゼン、ピリジン、ニトロベンゼン、アニリン、N−メチルアニリン、N,N−ジエチルアニリン、ベンゾニトリル、N−メチルピロリドン、ジメチルスルホキシド、2−フルオロトルエン、3−フルオロトルエン、2,5−ジフルオロトルエン、2−フルオロアニソール、3−フルオロアニソール、4−フルオロアニソール、4−フルオロ−3−メチルアニソール、3−トリフルオロメチルアニソール、ブロモベンゼン、クロロベンゼン、o−ジクロロベンゼン、トリクロロベンゼン等などが挙げられるが、使用がこれらに限定されることはない。
調製された液体組成物における本発明の有機半導体材料の濃度としては、0.01〜20重量%であることが好ましく、さらには0.1〜10重量%であることが好ましい。
使用する有機溶媒は1種類でもよいが、所望の均質性の高い薄膜を得るため、複数の種類の溶媒を混合して用いてもよい。
A liquid composition can be prepared by dissolving the organic semiconductor material of the present invention obtained by the above production method in an organic solvent.
Examples of the organic solvent that can be used include dichloromethane, chloroform, carbon tetrachloride, tetrahydrofuran, dioxane, cyclohexanone, acetone, methyl ethyl ketone, ethyl acetate, propyl acetate, n-hexane, cyclohexane, n-octane, n-decane, and n-dodecane. , Dimethylformamide, benzene, toluene, cumene, o-xylene, m-xylene, p-xylene, p-cymene, mesitylene, anisole, 2-methylanisole, 3-methylanisole, 4-methylanisole, 2,5-dimethyl Anisole, 3,5-dimethoxytoluene, 2,4-dimethylanisole, phenetol, methyl benzoate, ethyl benzoate, propyl benzoate, butyl benzoate, 1,5-dimethyltetralin, n-propylbenzene, n- Tylbenzene, n-pentylbenzene, 1,3,5-triethylbenzene, 1,3-dimethoxybenzene, pyridine, nitrobenzene, aniline, N-methylaniline, N, N-diethylaniline, benzonitrile, N-methylpyrrolidone, dimethyl Sulfoxide, 2-fluorotoluene, 3-fluorotoluene, 2,5-difluorotoluene, 2-fluoroanisole, 3-fluoroanisole, 4-fluoroanisole, 4-fluoro-3-methylanisole, 3-trifluoromethylanisole, Examples include bromobenzene, chlorobenzene, o-dichlorobenzene, trichlorobenzene and the like, but the use is not limited thereto.
The concentration of the organic semiconductor material of the present invention in the prepared liquid composition is preferably 0.01 to 20% by weight, and more preferably 0.1 to 10% by weight.
One kind of organic solvent may be used, but a plurality of kinds of solvents may be mixed and used in order to obtain a desired thin film with high homogeneity.
本発明の有機膜は、上記のようにして調製された有機半導体材料を含む液体組成物を支持体上に塗布することによって薄膜を形成することができる。
一例を挙げると、スピンコート法、キャスト法、ディップ法、インクジェット法、ドクターブレード法、スクリーン印刷法、オフセット印刷法、凸版印刷法、マイクロコンタクトプリント法、ワイヤーバーコート法、スプレーコート法、ディスペンス法等の公知の湿式成膜方法により薄膜を作製することが可能である。また、キャスト法などによっては平板状結晶や厚膜状態の形態をとることも可能である。
これらの薄膜、厚膜、或いは結晶は、光電変換素子、薄膜トランジスタ素子、発光素子など種々の機能素子の電荷輸送性部材として機能する。
また、本発明の有機半導体材料は、真空蒸着法などのドライプロセスによっても成膜は可能である。
The organic film of the present invention can be formed into a thin film by applying a liquid composition containing the organic semiconductor material prepared as described above onto a support.
For example, spin coating method, casting method, dipping method, ink jet method, doctor blade method, screen printing method, offset printing method, letterpress printing method, micro contact printing method, wire bar coating method, spray coating method, dispensing method It is possible to produce a thin film by a known wet film formation method such as. Further, depending on the casting method or the like, it may be in the form of a flat crystal or a thick film state.
These thin films, thick films, or crystals function as charge transporting members for various functional elements such as photoelectric conversion elements, thin film transistors, and light emitting elements.
The organic semiconductor material of the present invention can also be formed by a dry process such as a vacuum deposition method.
次に、本発明の有機薄膜トランジスタについて、図1に概略構造図を示して説明する。
有機薄膜トランジスタを構成する有機半導体層(1)は、本発明の一般式(I)で示される化合物を主成分としている。
Next, the organic thin film transistor of the present invention will be described with reference to a schematic structural diagram in FIG.
The organic semiconductor layer (1) constituting the organic thin film transistor is mainly composed of the compound represented by the general formula (I) of the present invention.
有機薄膜トランジスタは、有機半導体層(1)を介して分離形成された第1の電極(ソース電極)(2)、第2の電極(ドレイン電極)(3)を有しており、これらと対向する第3の電極(ゲート電極)(4)を有している。なお、ゲート電極(4)と有機半導体層(1)との間には、絶縁膜(5)が設けられていてもよい。
有機薄膜トランジスタは、ゲート電極(4)への電圧印加により、ソース電極(2)とドレイン電極(3)の間の有機半導体層(1)内を流れる電流がコントロールされるようになされている。
The organic thin film transistor has a first electrode (source electrode) (2) and a second electrode (drain electrode) (3) which are separated and formed through an organic semiconductor layer (1), and is opposed to these. A third electrode (gate electrode) (4) is provided. An insulating film (5) may be provided between the gate electrode (4) and the organic semiconductor layer (1).
In the organic thin film transistor, a current flowing in the organic semiconductor layer (1) between the source electrode (2) and the drain electrode (3) is controlled by applying a voltage to the gate electrode (4).
本発明の有機薄膜トランジスタは、所定の支持体上に形成される。
支持体としては、従来公知の基板材料が適用でき、例えば、ガラス、シリコン、プラスチック等が挙げられる。なお導電性基板を用いることによりゲート電極(4)を兼用することができる。
The organic thin film transistor of the present invention is formed on a predetermined support.
A conventionally known substrate material can be applied as the support, and examples thereof include glass, silicon, and plastic. By using a conductive substrate, the gate electrode (4) can also be used.
また、ゲート電極(4)と導電性基板とが積層された構成としてもよいが、本発明の有機薄膜トランジスタをデバイスに応用する場合、フレキシビリティー、軽量化、安価、耐衝撃性等の実用面の特性を良好なものとするために、支持体としては、プラスチックシートを用いることが好ましく、一般的に平滑な面を有する基板が好ましく用いられる。
プラスチックシートとしては、例えば、ポリエチレンテレフタレート、ポリエチレンナフタレート、ポリエーテルスルホン、ポリエーテルイミド、ポリエーテルエーテルケトン、ポリフェニレンスルフィド、ポリアリレート、ポリイミド、ポリカーボネート、セルローストリアセテート、セルロースアセテートプロピオネート等のフィルムが挙げられる。
In addition, the gate electrode (4) and the conductive substrate may be laminated, but when the organic thin film transistor of the present invention is applied to a device, practical aspects such as flexibility, weight reduction, low cost, impact resistance, etc. In order to improve the above characteristics, it is preferable to use a plastic sheet as the support, and in general, a substrate having a smooth surface is preferably used.
Examples of the plastic sheet include polyethylene terephthalate, polyethylene naphthalate, polyethersulfone, polyetherimide, polyetheretherketone, polyphenylene sulfide, polyarylate, polyimide, polycarbonate, cellulose triacetate, cellulose acetate propionate, and the like. It is done.
本発明の有機膜および有機薄膜トランジスタにおいて、有機半導体層の膜厚としては、特に制限はないが、均一な薄膜(即ち、有機半導体層のキャリア輸送特性に悪影響を及ぼすギャップやホールがない)が形成されるような厚みに選択される。
有機半導体薄膜の厚みは、一般に1μm以下、特に5〜200nmが好ましい。
In the organic film and the organic thin film transistor of the present invention, the thickness of the organic semiconductor layer is not particularly limited, but a uniform thin film (that is, there is no gap or hole that adversely affects the carrier transport property of the organic semiconductor layer) is formed. Thickness is selected.
The thickness of the organic semiconductor thin film is generally 1 μm or less, particularly preferably 5 to 200 nm.
次に、図1の有機薄膜トランジスタにおける、上記有機半導体層以外の構成要素について説明する。
有機半導体層(1)は、第1の電極(ソース電極)、第2の電極(ドレイン電極)、および必要に応じて絶縁膜(5)に接して形成されている。
Next, components other than the organic semiconductor layer in the organic thin film transistor of FIG. 1 will be described.
The organic semiconductor layer (1) is formed in contact with the first electrode (source electrode), the second electrode (drain electrode), and, if necessary, the insulating film (5).
絶縁膜(5)について説明する。
有機薄膜トランジスタを構成する絶縁膜は、種々の絶縁膜材料を用いて形成されている。
例えば、酸化ケイ素、窒化ケイ素、酸化アルミニウム、窒化アルミニウム、酸化チタン、酸化タンタル、酸化スズ、酸化バナジウム、チタン酸バリウムストロンチウム、ジルコウム酸化チタン酸バリウム、ジルコニウム酸チタン酸鉛、チタン酸鉛ランタン、チタン酸ストロンチウム、チタン酸バリウム、フッ化バリウムマグネシウム、タンタル酸ニオブ酸ビスマス、トリオキサイドイットリウム等の無機系絶縁材料が挙げられる。
また、例えば、ポリイミド、ポリビニルアルコール、ポリビニルフェノール、ポリエステル、ポリエチレン、ポリフェニレンスルフィド、ポリスチレン、ポリメタクリル酸エステル、無置換またはハロゲン原子置換ポリパラキシリレン、ポリアクリロニトリル、シアノエチルプルラン等の高分子化合物も用いることができる。
更には、上記絶縁材料を2種以上合わせて用いてもよい。これらのうち、特に材料は限定されないが、誘電率が高く導電率が低いものが好ましい。
絶縁膜(5)の形成方法としては、例えば、CVD法、プラズマCVD法、プラズマ重合法、蒸着法のドライプロセスや、スプレーコート法、スピンコート法、ディップコート法、インクジェット法、キャスト法、ブレードコート法、バーコート法等の塗布によるウェットプロセスが挙げられる。
The insulating film (5) will be described.
The insulating film constituting the organic thin film transistor is formed using various insulating film materials.
For example, silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, titanium oxide, tantalum oxide, tin oxide, vanadium oxide, barium strontium titanate, zirconium barium titanate, lead zirconate titanate, lead lanthanum titanate, titanate Examples thereof include inorganic insulating materials such as strontium, barium titanate, barium magnesium fluoride, bismuth tantalate niobate, and yttrium trioxide.
Also, for example, polymer compounds such as polyimide, polyvinyl alcohol, polyvinylphenol, polyester, polyethylene, polyphenylene sulfide, polystyrene, polymethacrylic acid ester, unsubstituted or halogen atom-substituted polyparaxylylene, polyacrylonitrile, cyanoethyl pullulan, etc. may be used. Can do.
Furthermore, two or more of the above insulating materials may be used in combination. Among these, materials are not particularly limited, but those having a high dielectric constant and a low electrical conductivity are preferable.
As a method for forming the insulating film (5), for example, a dry process such as a CVD method, a plasma CVD method, a plasma polymerization method, a vapor deposition method, a spray coating method, a spin coating method, a dip coating method, an ink jet method, a casting method, a blade Examples thereof include wet processes by coating such as a coating method and a bar coating method.
次に、有機半導体層(1)と絶縁膜(5)との界面修飾について説明する。
有機薄膜トランジスタにおいて、絶縁膜(5)と有機半導体層(1)との接着性を向上させ、かつ駆動電圧の低減、リーク電流の低減等を図ることを目的として、有機半導体層(1)と絶縁膜(5)との間には、所定の有機薄膜を設けるようにしてもよい。
この有機薄膜は、有機半導体層に対し化学的影響を与えなければ特に限定されるものではないが、例えば、有機分子膜や高分子薄膜が利用できる。
有機分子膜としては、例えばオクタデシルトリクロロシランやヘキサメチルジシラザン等を始めとしたカップリング剤が挙げられる。
高分子薄膜としては、上述の高分子絶縁膜材料を利用することができ、これらが絶縁膜の一種として機能していてもよい。
また、この有機薄膜をラビング等により、異方性処理を施していてもよく、成膜された本発明の有機半導体材料が該異方性処理により配向し規則性を持つことにより、アモルファス状態よりも高いトランジスタ素子の性能を引き出すことができる。
Next, interface modification between the organic semiconductor layer (1) and the insulating film (5) will be described.
The organic thin film transistor is insulated from the organic semiconductor layer (1) for the purpose of improving the adhesion between the insulating film (5) and the organic semiconductor layer (1) and reducing the driving voltage and the leakage current. A predetermined organic thin film may be provided between the film (5).
The organic thin film is not particularly limited as long as it does not chemically affect the organic semiconductor layer. For example, an organic molecular film or a polymer thin film can be used.
Examples of the organic molecular film include coupling agents such as octadecyltrichlorosilane and hexamethyldisilazane.
As the polymer thin film, the above-described polymer insulating film materials can be used, and these may function as a kind of insulating film.
Further, this organic thin film may be subjected to an anisotropic treatment by rubbing or the like, and the formed organic semiconductor material of the present invention is oriented by the anisotropic treatment and has regularity, so that High transistor performance can be obtained.
アニールは、基板等の材質に依存するが、室温から300℃の間が好ましい。さらに好ましくは50℃から300℃が好ましい。50℃以下であると一般的な有機溶媒が除去できない。また、300℃以上では有機物は熱分解する恐れがある。
アニール雰囲気は、酸素雰囲気、窒素雰囲気、アルゴン雰囲気、又は空気で行なうのもよいし、有機溶媒雰囲気、例えば該有機半導体材料が溶解できる溶媒にさらすことで、該有機半導体材料の分子運動を促進し、好ましい有機膜を得ることができる。アニールの時間は材料の凝集速度に応じて適宜設定できる。
The annealing depends on the material of the substrate or the like, but is preferably between room temperature and 300 ° C. More preferably, it is 50 to 300 ° C. When the temperature is 50 ° C. or lower, a general organic solvent cannot be removed. Further, at 300 ° C. or higher, the organic matter may be thermally decomposed.
The annealing atmosphere may be performed in an oxygen atmosphere, a nitrogen atmosphere, an argon atmosphere, or air, or by exposing to an organic solvent atmosphere, for example, a solvent in which the organic semiconductor material can be dissolved, to promote molecular motion of the organic semiconductor material. A preferable organic film can be obtained. The annealing time can be appropriately set according to the aggregation rate of the material.
次に、有機薄膜トランジスタを構成する電極について説明する。
本発明の有機薄膜トランジスタは、有機半導体層を介して互いに分離した対の第1の電極(ソース電極)と第2の電極(ドレイン電極)と、電圧を印加することにより、前記第1の電極と前記第2の電極との間の有機半導体層内を流れる電流をコントロールする機能を具備する第3の電極(ゲート電極)を具備している。
有機薄膜トランジスタはスイッチング素子であるため、第3の電極(ゲート電極)による電圧の印加状態により、第1の電極(ソース電極)と第2の電極(ドレイン電極)間に流れる電流量が大きく変調できることが重要である。これはトランジスタの駆動状態で大きな電流が流れ、非駆動状態では、電流が流れないことを意味する。
Next, the electrode which comprises an organic thin-film transistor is demonstrated.
The organic thin film transistor of the present invention includes a pair of a first electrode (source electrode) and a second electrode (drain electrode) separated from each other via an organic semiconductor layer, and a voltage applied to the first thin film transistor. A third electrode (gate electrode) having a function of controlling a current flowing in the organic semiconductor layer between the second electrode and the second electrode is provided.
Since the organic thin film transistor is a switching element, the amount of current flowing between the first electrode (source electrode) and the second electrode (drain electrode) can be greatly modulated by the voltage application state of the third electrode (gate electrode). is important. This means that a large current flows when the transistor is driven, and no current flows when the transistor is not driven.
ゲート電極、ソース電極としては、導電性材料であれば特に限定されるものではなく、例えば、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチモン、鉛、タンタル、インジウム、アルミニウム、亜鉛、マグネシウム等、およびこれらの合金やインジウム・錫酸化物等の導電性金属酸化物、あるいはドーピング等で導電率を向上させた無機および有機半導体、例えば、シリコン単結晶、ポリシリコン、アモルファスシリコン、ゲルマニウム、グラファイト、ポリアセチレン、ポリパラフェニレン、ポリチオフェン、ポリピロール、ポリアニリン、ポリチエニレンビニレン、ポリパラフェニレンビニレン、ポリエチレンジオキシチオフェンとポリスチレンスルホン酸の錯体等が適用できる。
ソース電極、およびドレイン電極は、半導体層との接触面において、電気抵抗が少ないものとすることが望ましい。
The gate electrode and the source electrode are not particularly limited as long as they are conductive materials. For example, platinum, gold, silver, nickel, chromium, copper, iron, tin, antimony, lead, tantalum, indium, aluminum, Zinc, magnesium, etc., and their alloys, conductive metal oxides such as indium / tin oxide, or inorganic and organic semiconductors whose conductivity has been improved by doping, such as silicon single crystal, polysilicon, amorphous silicon, Germanium, graphite, polyacetylene, polyparaphenylene, polythiophene, polypyrrole, polyaniline, polythienylene vinylene, polyparaphenylene vinylene, a complex of polyethylene dioxythiophene and polystyrene sulfonic acid, and the like can be applied.
It is desirable that the source electrode and the drain electrode have a small electric resistance at the contact surface with the semiconductor layer.
上記電極の形成方法としては、例えば、上記電極形成用材料を原料として、蒸着やスパッタリング等の方法を用いて形成した導電性薄膜を、公知のフォトリソグラフ法やリフトオフ法を適用することによって、電極形状とする方法が挙げられる。
また、アルミニウムや銅等の金属箔上に熱転写、インクジェット等によるレジストを用いてエッチングする方法も適用できる。
また、導電性ポリマーの溶液あるいは分散液、導電性微粒子分散液を直接インクジェットによりパターニングしてもよいし、塗工膜からリソグラフィーやレーザーアブレーション等により形成してもよい。
さらには、導電性ポリマーや導電性微粒子を含むインク、導電性ペースト等を凸版、凹版、平版、スクリーン印刷等の印刷法でパターニングする方法も適用できる。
As a method for forming the electrode, for example, by applying a known photolithography method or a lift-off method to a conductive thin film formed by using a method such as vapor deposition or sputtering using the electrode forming material as a raw material, The method of making it into a shape is mentioned.
Further, a method of etching on a metal foil such as aluminum or copper by using a resist by thermal transfer, ink jet, or the like can be applied.
Alternatively, a conductive polymer solution or dispersion, or a conductive fine particle dispersion may be directly patterned by inkjet, or may be formed from the coating film by lithography, laser ablation, or the like.
Furthermore, a method of patterning an ink containing a conductive polymer or conductive fine particles, a conductive paste, or the like by a printing method such as relief printing, intaglio printing, planographic printing, or screen printing can also be applied.
本発明の有機薄膜トランジスタは、必要に応じて各電極からの引出し電極を設けてもよい。
また、本発明の有機トランジスタは、大気中でも安定に駆動するものであるが、機械的破壊からの保護、水分やガスからの保護、またはデバイスの集積の都合上の保護等のため必要に応じて保護層を設けることもできる。
The organic thin film transistor of the present invention may be provided with an extraction electrode from each electrode as necessary.
In addition, the organic transistor of the present invention is stably driven even in the atmosphere, but it is necessary for protection from mechanical destruction, protection from moisture and gas, or protection for the convenience of device integration. A protective layer can also be provided.
上述した本発明の有機薄膜トランジスタは、液晶、エレクトロルミネッセンス、エレクトロクロミック、電気泳動等の、従来公知の各種表示画像素子を駆動するための素子として好適に利用でき、これらの集積化により、いわゆる「電子ペーパー」と呼ばれるディスプレイを製造することが可能である。また、ICタグ等のデバイスとして、本発明の有機薄膜トランジスタを集積化したICを利用することが可能である。 The organic thin film transistor of the present invention described above can be suitably used as an element for driving various conventionally known display image elements such as liquid crystal, electroluminescence, electrochromic, electrophoresis, and so on. It is possible to produce a display called “paper”. Further, an IC in which the organic thin film transistor of the present invention is integrated can be used as a device such as an IC tag.
[中間体の合成1]
<ジドデシル−クウォータチオフェンの合成>
(特開2006−8679号公報記載の合成例を参考に合成)
[Synthesis of Intermediate 1]
<Synthesis of didodecyl-quaterthiophene>
(Synthesis with reference to synthesis example described in JP-A-2006-8679)
アルゴンガス置換した500mlフラスコに、5,5′−ジブロモ−2,2′−ビチオフェン 7.84g(24.19mmol)、[1,2−ビス(ジフェニルホスフィノ)エタン]ジクロロニッケル(II) 0.481g(0.911mmol)、乾燥THF 105mlを加え、この溶液に、上記で調製した3−n−ドデシルチオフェンのグリニャール試薬をシリンジを用いて滴下ろうとに移して滴下し、滴下が終わった後、24時間還流を行なった。 In a 500 ml flask purged with argon gas, 7.84 g (24.19 mmol) of 5,5′-dibromo-2,2′-bithiophene, [1,2-bis (diphenylphosphino) ethane] dichloronickel (II) 481 g (0.911 mmol) and 105 ml of dry THF were added, and to this solution, the Grignard reagent of 3-n-dodecylthiophene prepared above was transferred to a dropping funnel using a syringe and dropped. Reflux for a period of time.
その後、THFを留去した後、トルエンを加えてから、塩酸水溶液を加えクエンチした。
この溶液を分液ろうとに移し、水洗および飽和食塩水洗浄した後、有機層を無水硫酸マグネシウムで脱水した。乾燥剤を濾別した後、溶媒を減圧留去した。
この粗生成物を、シリカゲルカラムクロマトグラフィー(ヘキサン/トルエン=95/5)により精製した後、エタノール/トルエンにて再結晶することにより、黄色針状晶のジドデシル−クウォータチオフェンを得た。
収量11.4g、収率71%。融点は58.0−59.0℃であった。
Thereafter, THF was distilled off, and then toluene was added, followed by quenching with an aqueous hydrochloric acid solution.
This solution was transferred to a separatory funnel, washed with water and saturated brine, and then the organic layer was dehydrated with anhydrous magnesium sulfate. After the desiccant was filtered off, the solvent was distilled off under reduced pressure.
The crude product was purified by silica gel column chromatography (hexane / toluene = 95/5) and then recrystallized from ethanol / toluene to obtain didedecyl-quaterthiophene as yellow needles.
Yield 11.4 g, 71% yield. The melting point was 58.0-59.0 ° C.
[中間体の合成2]
<ジドデシル−クウォータチオフェンのジブロモ体の合成>
[Synthesis of Intermediate 2]
<Synthesis of didodecyl-quaterthiophene dibromo compound>
500mlフラスコに、合成例1にて合成したジドデシル−クウォータチオフェン 10.56g(15.83mmol)、N−ブロモスクシンイミド 5.635g(31.66mmol)、クロロホルム120mlを入れ、室温で撹拌しながら酢酸を50ml滴下した。その後、還流を1時間行ない反応終了とした。 A 500 ml flask was charged with 10.56 g (15.83 mmol) of didodecyl-quaterthiophene synthesized in Synthesis Example 1, 5.635 g (31.66 mmol) of N-bromosuccinimide, and 120 ml of chloroform, and 50 ml of acetic acid while stirring at room temperature. It was dripped. Thereafter, refluxing was performed for 1 hour to complete the reaction.
室温に戻した後、水を加え、クロロホルムで希釈してから分液ろうとに移し、有機層を1M水酸化カリウム水溶液、水、0.5%炭酸水素ナトリウム水溶液、水、飽和食塩水の順で洗浄し、有機層を無水硫酸マグネシウムで脱水した。
乾燥剤を濾別した後、溶媒を減圧留去した。
この粗生成物を、シリカゲルカラムクロマトグラフィー(ヘキサン/トルエン=95/5)により精製した後、エタノール/トルエンにて再結晶することにより、黄色針状晶のジドデシル−クウォータチオフェンのジブロモ体を得た。
収量12.3g、収率95%。融点は74.5−75.5℃であった。
After returning to room temperature, water is added, diluted with chloroform, transferred to a separatory funnel, and the organic layer is washed with 1M potassium hydroxide aqueous solution, water, 0.5% sodium bicarbonate aqueous solution, water, and saturated saline in this order. The organic layer was washed and dried over anhydrous magnesium sulfate.
After the desiccant was filtered off, the solvent was distilled off under reduced pressure.
The crude product was purified by silica gel column chromatography (hexane / toluene = 95/5) and then recrystallized from ethanol / toluene to obtain a dibromo form of didedecyl-quaterthiophene in the form of yellow needles. .
Yield 12.3 g, 95% yield. The melting point was 74.5-75.5 ° C.
以下、本発明について、実施例を挙げて説明する。 Hereinafter, the present invention will be described with reference to examples.
[化合物1の合成] [Synthesis of Compound 1]
100mlフラスコに、マグネシウム(フレーク状)0.757g(31.14mmol)を入れ、系内をアルゴンガス置換した後、乾燥THF5mlおよび少量のヨウ素を加えた。
この分散液に、2−ブロモ−3−n−ヘキシルチオフェン 5.21g(21.1mmol)と乾燥THF 19mlの混合溶液を滴下した後、6時間還流を行ない、室温まで冷却して、3−n−ヘキシルチオフェンのグリニャール試薬を調製した。
Magnesium (flaked) 0.757 g (31.14 mmol) was placed in a 100 ml flask, and the system was purged with argon gas. Then, 5 ml of dry THF and a small amount of iodine were added.
To this dispersion was added dropwise a mixed solution of 5.21 g (21.1 mmol) of 2-bromo-3-n-hexylthiophene and 19 ml of dry THF, followed by refluxing for 6 hours, cooling to room temperature, and 3-n -Grignard reagent of hexylthiophene was prepared.
アルゴンガス置換した200mlフラスコに、合成例2で合成したジドデシル−クウォータチオフェンのジブロモ体 7g(8.49mmol)、[1,2−ビス(ジフェニルホスフィノ)エタン]ジクロロニッケル(II)0.169g(0.320mmol)、乾燥THF 37mlを加え、この溶液に、上記で調製した3−n−ヘキシルチオフェンのグリニャール試薬をシリンジを用いて滴下ろうとに移して滴下し、滴下が終わった後、24時間還流を行なった。その後、THFを留去した後、トルエンを加えてから、塩酸水溶液を加えクエンチした。 In a 200 ml flask purged with argon gas, 7 g (8.49 mmol) of the dibromo form of didodecyl-quaterthiophene synthesized in Synthesis Example 2 and 0.169 g of [1,2-bis (diphenylphosphino) ethane] dichloronickel (II) ( 0.320 mmol) and 37 ml of dry THF were added, and to this solution, the Grignard reagent of 3-n-hexylthiophene prepared above was transferred to a dropping funnel using a syringe and dropped, and after the dropping was finished, the mixture was refluxed for 24 hours. Was done. Thereafter, THF was distilled off, and then toluene was added, followed by quenching with an aqueous hydrochloric acid solution.
この溶液を分液ろうとに移し、水、飽和食塩水の順で洗浄した後、有機層を無水硫酸マグネシウムで脱水した。乾燥剤を濾別した後、溶媒を減圧留去した。
この粗生成物を、シリカゲルカラムクロマトグラフィー(ヘキサン/トルエン=9/1)により精製した後、エタノール/トルエンにて再結晶することにより、オレンジ色針状晶の化合物を得た。
収量4.91g、収率58%。融点は57.0−58.0℃であった。
元素分析値(計算値);C:72.23%(72.09%)、H:8.50%(8.67%)、S:19.16%(19.24%)
赤外吸収スペクトル(KBr錠剤法)を図2に示した。
This solution was transferred to a separatory funnel, washed with water and saturated brine in this order, and then the organic layer was dehydrated with anhydrous magnesium sulfate. After the desiccant was filtered off, the solvent was distilled off under reduced pressure.
This crude product was purified by silica gel column chromatography (hexane / toluene = 9/1), and then recrystallized from ethanol / toluene to obtain orange needle-like compounds.
Yield 4.91 g, 58% yield. The melting point was 57.0-58.0 ° C.
Elemental analysis value (calculated value); C: 72.23% (72.09%), H: 8.50% (8.67%), S: 19.16% (19.24%)
The infrared absorption spectrum (KBr tablet method) is shown in FIG.
実施例1にて合成した化合物1を用いて汎用的な有機溶剤に対する溶解性および成膜性を調べた。
The
[比較例1]
同様に、下記に示す構造式の比較化合物1を用いて、汎用的な有機溶剤に対する溶解性および成膜性を調べた。この比較化合物1は、前記非特許文献3に記載されている。
[Comparative Example 1]
Similarly, the solubility and film-forming property with respect to a general purpose organic solvent were investigated using the
[比較例2]
同様に、下記に示す構造式の比較化合物2を用いて、汎用的な有機溶剤に対する溶解性および成膜性を調べた。この比較化合物2は、前記非特許文献4に記載されている。
[Comparative Example 2]
Similarly, the solubility and film-forming property with respect to a general purpose organic solvent were investigated using the comparative compound 2 of the structural formula shown below. This comparative compound 2 is described in
[比較例3]
同様に、下記に示す構造式の比較化合物3を用いて、汎用的な有機溶剤に対する溶解性および成膜性を調べた。この比較化合物3は、前記非特許文献5に記載のオリゴチオフエンの原料である。
[Comparative Example 3]
Similarly, the solubility and film-forming property with respect to a general purpose organic solvent were investigated using the comparative compound 3 of the structural formula shown below. This comparative compound 3 is a raw material for oligothiophene described in
(i)溶解性
溶解性を調べる方法としては、それぞれの溶剤に対して各化合物の濃度1mg/mlの溶液を調製し、以下に示す基準により判断を行なった。
○:室温(22℃)で溶解する。
△:室温では溶解しないが、50℃に加熱すると溶解し、室温で一晩静置しても溶質が析出しない。
×:室温および50℃に加熱しても溶解しない、または、50℃に加熱すると溶解するが、室温で一晩静置すると溶質が析出する。
(I) Solubility As a method for examining solubility, a solution having a concentration of 1 mg / ml of each compound was prepared for each solvent, and judgment was made based on the following criteria.
○: Dissolved at room temperature (22 ° C).
Δ: Insoluble at room temperature, but dissolves when heated to 50 ° C., and no solute precipitates when left at room temperature overnight.
X: It does not dissolve even when heated to room temperature and 50 ° C., or dissolves when heated to 50 ° C., but a solute precipitates when left at room temperature overnight.
(ii)成膜性
まず、成膜を行なう支持体の作製方法としては、膜厚300nmの熱酸化膜を有するn型のシリコン基板を、濃硫酸に24時間浸漬した後、純水にて充分に濯いでから乾燥することにより洗浄した。
この洗浄したシリコン基板を、シランカップリング剤であるフェニルトリクロロシランのトルエン溶液 (1mM,8mL)に30分浸漬した後、純水およびアセトンで充分に洗浄、乾燥することにより、シリコン酸化膜表面に単分子膜を構築した。
次に、この単分子膜を構築したシリコン基板上に、化合物1、比較化合物1、比較化合物2および比較化合物3のそれぞれのクロロホルム溶液を支持体上にスピンコートすることにより有機膜の成膜を行なった。なお、溶質が析出した比較化合物2の液体組成物に関しては、孔径0.1μmのPTFE(ポリテトラフルオロエチレン)製のフィルターを通してからスピンコートを行なった。
溶解性および成膜性試験の結果を表1に示す。
(Ii) Film-formability First, as a method for producing a support for film formation, an n-type silicon substrate having a thermal oxide film having a thickness of 300 nm is immersed in concentrated sulfuric acid for 24 hours, and then pure water is sufficient. Rinse and then dry to dry.
This cleaned silicon substrate is immersed in a toluene solution (1 mM, 8 mL) of phenyltrichlorosilane, which is a silane coupling agent, for 30 minutes, and then thoroughly washed with pure water and acetone to dry the silicon oxide film surface. A monolayer was constructed.
Next, an organic film is formed by spin-coating a chloroform solution of each of
Table 1 shows the results of the solubility and film-formability tests.
成膜したそれぞれの有機膜を目視により観察したところ、比較化合物1、比較化合物2および比較化合物3の有機膜はいずれも不連続な膜であったが、化合物1の有機膜は均一な連続膜が成膜されていることが確認された。
また、化合物1の有機膜を偏光顕微鏡にて観察した。この結果を図3に示す。
これより、化合物1の有機膜は支持体上に均一に成膜されており、かつ、比較的大きなドメインで配向していることが明らかとなった。
When the formed organic films were visually observed, the organic films of
Further, the organic film of
From this, it became clear that the organic film of
<有機薄膜トランジスタ素子の作製および静特性の評価>
実施例2にて得られたシリコン基板上に成膜した化合物1の有機膜に、チャネル長が50μm、チャネル幅が2000μmとなるようにメタルマスクを介してソース・ドレイン電極となるAuを100nm蒸着し、図1−(D)の構造の電界効果型トランジスタを作製した。
次いで、上記基板のソース・ドレイン電極とは異なる部位の有機半導体層およびシリコン酸化膜を削り取り、その部分に導電性ペースト(藤倉化成製)を付け溶媒を乾燥させた。この部分をゲート電極とし、シリコン基板に電圧を印加した。
こうして得られたFET素子の電気特性をAgilent社製 半導体パラメーターアナライザー4156Cを用いて評価した結果、p型のトランジスタ素子としての特性を示した。有機薄膜トランジスタの電流―電圧(I−V)特性を図4に示す。
この飽和領域から、電界効果移動度を求めた。
なお、有機薄膜トランジスタの電界効果移動度の算出には、以下の式を用いた。
Ids=μCinW(Vg−Vth)2/2L
(ただし、Cinはゲート絶縁膜の単位面積あたりのキャパシタンス、Wはチャネル幅、Lはチャネル長、Vgはゲート電圧、Idsはソース−ドレイン電流、μは移動度、Vthはチャネルが形成し始めるゲートの閾値電圧である。)
<Production of organic thin film transistor element and evaluation of static characteristics>
100 nm of Au serving as a source / drain electrode is deposited on the organic film of
Next, the organic semiconductor layer and the silicon oxide film at portions different from the source / drain electrodes of the substrate were scraped off, and a conductive paste (manufactured by Fujikura Kasei Co., Ltd.) was applied to the portions, and the solvent was dried. This portion was used as a gate electrode, and a voltage was applied to the silicon substrate.
As a result of evaluating the electrical characteristics of the FET element thus obtained using a semiconductor parameter analyzer 4156C manufactured by Agilent, the characteristics as a p-type transistor element were shown. FIG. 4 shows the current-voltage (IV) characteristics of the organic thin film transistor.
From this saturation region, field effect mobility was determined.
In addition, the following formula | equation was used for calculation of the field effect mobility of an organic thin-film transistor.
I ds = μC in W (V g −V th ) 2 / 2L
(Where C in is the capacitance per unit area of the gate insulating film, W is the channel width, L is the channel length, V g is the gate voltage, I ds is the source-drain current, μ is the mobility, and V th is the channel. (This is the threshold voltage of the gate that begins to form.)
作製した有機薄膜トランジスタ素子の移動度は4.4×10−2cm2/Vsecであった。
またオンオフ比(Vds=−20V、Vg=−40VにおけるIdsと、Vds=−20V、Vg=+20〜−40Vの範囲内で観測された最小のIdsの比)は2.9×107で、閾値電圧は−10.0Vであった。
The mobility of the produced organic thin film transistor element was 4.4 × 10 −2 cm 2 / Vsec.
The on-off ratio (V ds = -20V, and I ds in V g = -40V, V ds = -20V, the ratio of V g = + 20~-40V minimum I ds observed within the) 2. The threshold voltage was −10.0 V at 9 × 10 7 .
実施例3にて作製した有機薄膜トランジスタ素子をホットプレート上に置き、50℃で30分加熱した後、ホットプレートの電源を切り一晩放冷することにより、有機半導体膜にアニール処理を施した。その後、実施例3と同様の方法にて素子の移動度を評価したところ、移動度は6.8×10−2cm2/Vsecであり、またオンオフ比は1.1×106で、閾値電圧は−11.0Vであった。
作製した有機薄膜トランジスタ素子のアニール処理により有機半導体膜の配向密度が上昇し、素子の性能が上がったことがわかる。
The organic thin film transistor element produced in Example 3 was placed on a hot plate, heated at 50 ° C. for 30 minutes, and then the hot plate was turned off and allowed to cool overnight to anneal the organic semiconductor film. Thereafter, the mobility of the element was evaluated in the same manner as in Example 3. As a result, the mobility was 6.8 × 10 −2 cm 2 / Vsec, the on / off ratio was 1.1 × 10 6 , and the threshold value was The voltage was -11.0V.
It can be seen that the annealing density of the fabricated organic thin film transistor element increased the orientation density of the organic semiconductor film, and the performance of the element was improved.
1 有機半導体層
2 ソース電極
3 ドレイン電極
4 ゲート電極
5 ゲート絶縁膜
1 Organic Semiconductor Layer 2 Source Electrode 3
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