JP5437620B2 - measuring device - Google Patents

Description

  The present invention relates to a measuring apparatus. For example, the present invention relates to a guide mechanism that movably supports a Z spindle that is arranged in a horizontal posture and has a probe at the tip in a horizontal coordinate measuring machine.

A so-called horizontal three-dimensional measuring machine in which a Z spindle having a measuring element at the tip is arranged in a horizontal posture is known (see Patent Document 1).
This is provided with a base, an X slider provided on the upper surface of the base so as to be movable in the horizontal direction, a Y column erected substantially perpendicular to the X slider, and provided so as to be movable up and down along the Y column. A Y slider, a Z slider provided on the Y slider so as to be movable in a direction perpendicular to the moving direction of the X slider and the Y slider, a Z spindle coupled to the Z slider, and a tip of the Z spindle It is the structure provided with the measuring element provided in.

On the upper surface of the base, a pair of guide rails and a rack are arranged in parallel along the moving direction of the X slider, and the lower surface of the X slider meshes with an engagement block that slidably engages with the guide rail and the rack. A motor having a pinion is fixed. Thus, when the motor rotates, the pinion moves while meshing with the rack, so that the X slider is moved in the X direction along the upper surface of the base.
A pair of guide rails and a rack are arranged in parallel on the side of the Y column along the up-and-down direction of the Y slider. On the side of the Z slider, there are an engagement block and a rack that are slidably engaged with the guide rail. A motor having an intermeshing pinion is fixed. As a result, when the motor rotates, the pinion moves while meshing with the rack, so that the Y slider is raised and lowered in the Y direction along the side surface of the Y column.
On the side surface of the Y slider, a guide rail and a rack are arranged in parallel along the Z spindle forward and backward direction, and on the side surface of the Z spindle, an engagement block that slidably engages with the guide rail engages with the rack. A motor having a pinion is fixed. Thus, when the motor rotates, the pinion moves while meshing with the rack, so that the Z spindle is moved in the Z direction along the side surface of the Y slider.

Japanese Utility Model Publication No. 4-45911

  By the way, in the conventional horizontal coordinate measuring machine, the guide mechanism of the movable member includes a plurality of guide rails slidably engaged with the guide rail on the support member side and the guide rail on the movable member side over the moving stroke of the movable member. Since the structure is provided with the engagement block, if the moving stroke of the movable member is increased, it is necessary to increase the overall length of the support member.

For example, regarding the Z spindle, in a conventional horizontal CMM, the Y slider is formed to have a length corresponding to the Z spindle movement stroke, and a guide rail is arranged on the Y slider along the Z spindle movement direction. A Z slider having a plurality of engagement blocks slidably engaged with the guide rail is arranged so as to be movable in the Z direction, and a Z spindle is connected to the Z slider.
Therefore, as the moving stroke of the Z spindle is increased, the length of the Y slider has to be increased. Therefore, the weight of the Y slider increases, and the cost increases and the controllability decreases. Furthermore, if the entire length of the Z spindle is increased so that measurement can be performed up to the deep part of the workpiece, the dimension in the Z direction is remarkably increased, leading to an increase in the size of the apparatus.

  An object of the present invention is to provide a measuring apparatus capable of reducing cost and improving controllability and miniaturizing the whole.

The measuring apparatus of the present invention includes a base, an X slider provided on the upper surface of the base so as to be movable in the horizontal direction, a Y column erected substantially perpendicular to the X slider, and ascending / descending along the Y column. A Y slider that can be provided, a Z spindle, a probe provided at the tip of the Z spindle, and the Z spindle perpendicular to the moving direction of the X and Y sliders relative to the Y slider And a guide mechanism that supports the Z spindle so as to be movable in a direction, the guide mechanism having an axis of the Z spindle parallel to the Z spindle moving in parallel with the upper and lower surfaces facing each other. a pair of guide rails which are arranged symmetrically to the center, and a plurality of engagement blocks engage slidably disposed in the Y slider and the guide rail possess, the Y slide Is provided with a drive mechanism for moving the Z spindle in a direction perpendicular to the moving direction of the X slider and the Y slider. The drive mechanism is a rocker having one end supported by the Y slider so as to be swingable. A moving member, a driving roller rotatably supported on the other end of the swinging member, abutting against a side surface of the Z spindle, a rotational driving means for rotating the driving roller, and the swinging member It is characterized by including an urging means for urging toward the side surface of the Z spindle and an adjusting screw for adjusting the urging force of the urging means .

According to such a configuration, the pair of guide rails are arranged in parallel with the Z spindle in the movement direction of the Z spindle and symmetrically about the axis of the Z spindle, and are slidable on the guide rail. Since the plurality of engaging blocks to be engaged are arranged on the Y slider, the weight of the Y slider can be reduced. Therefore, the cost can be reduced and the controllability when the Y slider is raised and lowered can be improved.
In addition, even if the overall length of the Z spindle is increased, the guide rails need only be arranged corresponding to the entire length, and it is not necessary to increase the overall length of the Y slider. Can be shortened to reduce the size.
Further, according to such a configuration, when the rotation driving unit is driven to rotate, the driving roller is driven to rotate. Then, since the Z spindle on which the driving roller is pressed and biased is moved in the Z direction while being guided by the guide mechanism, the Z spindle can be moved with an extremely simple configuration.

In the measuring apparatus of the present invention, the Z spindle is a rectangular cylinder with a rectangular cross section having an upper surface, a lower surface, and a side surface, and is made of aluminum or an aluminum alloy mainly composed of aluminum, and the guide rail is provided on the upper surface and the lower surface. Is preferably arranged.
According to such a configuration, the Z spindle has a rectangular shape with a rectangular cross section and is made of an aluminum-based material, so that the weight can be further reduced. Further, since the guide rails are arranged on the upper surface and the lower surface of the square tube, that is, the guide rail is configured to be vertically symmetrical about the axis of the square tube, the guide rail is in relation to the engagement block of the Y slider. It is possible to eliminate thermal deformation due to self-heating generated when sliding.

<Description of overall configuration (see FIG. 1)>
FIG. 1 is a perspective view showing a measuring apparatus according to this embodiment.
The measuring apparatus according to the present embodiment controls the horizontal CMM main body 1, the dustproof case 2 that covers a part (drive unit) of the horizontal CMM main body 1, and the horizontal CMM main body 1. A control device 3 and a display device 4 are provided.

<Description of Horizontal CMM Main Body 1 (see FIGS. 2 to 8)>
As shown in FIG. 2, the horizontal coordinate measuring machine main body 1 includes an installation table 11, a base 12 mounted on the installation table 11, and a rotary table 13 mounted on the front surface of the base 12. An X slider 14 provided on the rear side of the upper surface of the base 12 so as to be movable in the horizontal direction (X direction), a Y column 15 erected substantially perpendicular to the X slider 14, and along the Y column 15. The Y slider 16 as a support member provided so as to be movable up and down in the vertical direction (Y direction), and the Y slider 16 moves in a direction (Z direction) perpendicular to the moving direction of the X slider 14 and the Y slider 16 A Z spindle 17 as a movable member provided in a possible manner and a probe (measuring element) 18 provided at the tip of the Z spindle 17 are provided.

The base 12 is mounted on the upper surface of the installation table 11 via a vibration absorbing member 21 such as rubber, and is connected to the installation table 11 via a vibration isolation mechanism 22.
As shown in FIG. 3, the vibration isolation mechanism 22 is fitted into an L-shaped bracket 23 fixed to a plurality of locations on the side surface of the base 12 and a hole 23 </ b> A drilled in the center of the horizontal piece of the bracket 23. The anti-vibration ring 24 has a bolt 25 inserted into the anti-vibration ring 24 and screwed into the installation base 11. The vibration isolation ring 24 has a structure in which the inside and outside of the cylindrical rubber 24A are sandwiched by a metal ring 24B, and has a characteristic that is strong against a force from the horizontal direction and flexible to a force from the vertical direction. With this structure, external vibration is suppressed, and shaking of the base 12 due to a reaction force of a movable member (for example, a movable member such as the X slider 14, the Y slider 16, and the Z spindle 17) is suppressed.

As shown in FIG. 2, an X-axis guide mechanism 30X and an X-axis drive mechanism 40X that move the X slider 14 in the X direction are provided between the base 12 and the X slider 14, respectively.
Between the Y column 15 and the Y slider 16, in addition to the Y axis guide mechanism 30Y for moving the Y slider 16 up and down in the Y direction and the Y axis drive mechanism 40Y, the weight of the Y slider 16 (Y slider 16, mounted on this) Y-axis balance mechanisms 50Y for canceling the Z spindle 17 and the probe 18) are provided.
A Z-axis guide mechanism 30Z and a Z-axis drive mechanism 40Z that move the Z spindle 17 in the Z direction are provided between the Y slider 16 and the Z spindle 17, respectively.

(X-axis guide mechanism 30X and X-axis drive mechanism 40X)
As shown in FIG. 2, the X-axis guide mechanism 30 </ b> X includes a pair of guide rails 31 </ b> X disposed in parallel with each other along the moving direction (X direction) of the X slider 14 on the rear side of the upper surface of the base 12. A plurality of (four in total, front and rear, left and right) engagement blocks 32X that are provided on the lower surface of the X slider 14 and are slidably engaged with the guide rails 31X are configured. The guide rail 31X is formed in a cross-sectional shape whose tip portion is wider than the root portion, and the engagement block 32X has a dovetail engagement groove 33 that is slidably engaged with the cross-sectional shape of the guide rail 31X.
In the following description, since the guide rail and the engagement block have the same structure as the guide rail 31X and the engagement block 32X, description of the shape is omitted.

  As shown in FIG. 2, the X-axis drive mechanism 40X includes a pair of timing gears 41X provided on both sides of the upper surface of the base 12 with the guide rail 31X interposed therebetween so as to be rotatable about an axis parallel to the Z direction. A timing drive belt 42X that is wound around the timing gear 41X and partially connected to the X slider 14 and a motor 43X that rotationally drives one of the timing gears 41X.

(Y-axis guide mechanism 30Y, Y-axis balance mechanism 50Y, and Y-axis drive mechanism 40Y)
The Y-axis guide mechanism 30Y includes a first Y-axis guide mechanism 301Y provided on one side of the Y column 15 for guiding the Y slider 16 in the Y direction, and the Y column 15 as shown in FIGS. A second Y-axis guide mechanism 302Y is provided on the other side surface (side surface opposite to the one side surface) and guides a counterweight 51 described later in the Y direction.
The first Y-axis guide mechanism 301Y includes a pair of guide rails 31Y provided on one side surface of the Y column 15 along the vertical direction, and a plurality of engagements slidably engaged with the guide rails 31Y by the Y slider 16. And a combined block 32Y.
The second Y-axis guide mechanism 302Y also includes a pair of guide rails 31Y provided on the other side surface of the Y column 15 along the vertical direction, and a plurality of engagements slidably engaged with the guide weights 31Y on the counterweight 51. And a combined block 32Y.

  Here, the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y have a symmetrical structure about the longitudinal direction of the Y column 15, and the guide rails 31Y of the Y column 15 and the guide mechanisms 301Y and 302Y. Are made of the same material. Specifically, the Y column 15 and the guide rails 31Y of the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y are made of aluminum or an aluminum alloy mainly composed of aluminum.

If these members (the Y column 15 and the guide rails 31Y of the first and second Y-axis guide mechanisms 301Y and 302Y) are made of an asymmetric structure or a different material, distortion (stress) occurs in the guide portion when the environmental temperature changes. Cause deterioration of accuracy. In this embodiment, since the Y column 15 and the guide rail 31Y are formed in a symmetrical structure and made of the same material, the influence of an external heat factor (environmental temperature change) can be eliminated. In addition, since it is made of aluminum or an aluminum alloy mainly composed of aluminum, a significant reduction in weight can be realized.
Further, the engagement blocks 32Y of the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y have the same configuration (shape, arrangement, and number). Thereby, even if there is self-heating during movement (self-heating when the engagement block 32Y moves along the guide rail 31Y), thermal deformation due to the self-heating can be eliminated as much as possible.

As shown in FIGS. 2, 4 and 5, the Y-axis balance mechanism 50Y is disposed on the side surface opposite to the Y slider 16 with the Y column 15 interposed therebetween, and a member (Z spindle 17) mounted thereon. Counter weight 51 having a weight that cancels the self-weight of the Y column 15, a pair of pulleys 52 provided at the upper and lower portions of the Y column 15, and the Y slider 16 and the counter weight 51 that are wound around these pulleys 52. And two loop-shaped balance wires 53 connected to each other.
As shown in FIG. 6, the counterweight 51 includes a weight mounting board 51A having a pair of engagement blocks 32Y and a plurality of weights 51B that are detachably attached to the weight mounting board 51A. Here, the weight mounting substrate 51A is made of aluminum or an aluminum alloy mainly composed of aluminum, and the weight 51B is made of an iron-based material.

  Generally, the counterweight is preferably an iron-based material as a material that can have a large mass in a small space. However, if it is an iron-based material, it is difficult to completely eliminate the stress that deforms the guide portion due to the influence of heat described above. When it is made of an aluminum-based material, the influence of heat can be eliminated, but it is a great disadvantage in terms of space / cost. In the present embodiment, since the weight 51B of iron-based material is attached to the weight-attaching substrate 51A of aluminum-based material, a small space / low cost can be realized.

As shown in FIGS. 4 and 5, the Y-axis drive mechanism 40Y includes pulleys 41Ya to 41Ye provided above and below the Y column 15 and between the pulleys 52, and these pulleys 41Ya to 41Ye are hung around the pulleys 41Ya to 41Ye. A loop-shaped drive belt 42Y connected to the slider 16 and the counterweight 51 and a motor 43Y as a rotational drive force supply means for applying a rotational drive force to any pulley are configured.
Among the pulleys 41Ya to 41Ye, the pulleys 41Ya and 41b are provided at the upper left and right ends of the Y column 15, and the pulleys 41Yc, d and e are provided at the lower portion of the Y column 15, respectively. The two upper pulleys 41Ya and 41b are inscribed in the drive belt 42Y. Of the lower three pulleys 41Yc, d, e, the pulley 41Yc is inscribed in the drive belt 42Y suspended from the Y slider 16 in parallel to the Y direction, and the pulley 41Yd is suspended from the counterweight 51 in parallel to the Y direction. The drive belt 42Y is circumscribed. The remaining pulley 41Ye is arranged so as to be shifted from the pulley 41Yd in the X direction so that a part of the drive belt 42Y that turns the pulleys 41Yc and d protrudes in the X direction from the Y column 15 to form a meandering portion. Yes.
The motor 43Y is connected to a pulley 41Ye located at the meandering portion of the drive belt 42Y, and rotates the pulley 41Ye.

(Z-axis guide mechanism 30Z and Z-axis drive mechanism 40Z)
As shown in FIG. 7, the Z-axis guide mechanism 30 </ b> Z includes a pair of guides arranged in parallel with the upper and lower surfaces facing the Z spindle 17 in parallel with the movement direction of the Z spindle 17 and symmetrically about the axis of the Z spindle 17. The rail 31Z has a plurality of engagement blocks 32Z that are disposed on the Y slider 16 and slidably engage with the guide rail 31Z.
The Z spindle 17 is a rectangular tube with a rectangular cross section having an upper surface, a lower surface, and side surfaces, and is made of aluminum or an aluminum alloy mainly composed of aluminum. Guide rails 31Z are disposed on the upper surface and the lower surface.

  As shown in FIGS. 7 and 8, the Z-axis drive mechanism 40 </ b> Z has a swing member 45 supported at one end so as to be swingable by the Y slider 16 and is rotatably supported at the other end of the swing member 45. The driving roller 46 that is in contact with the side surface of the Z spindle 17, the motor 47 as a rotational driving means for rotationally driving the driving roller 46, and the biasing member that biases the swing member 45 toward the side surface of the Z spindle 17. Means 48 and an adjusting screw 49 for adjusting the urging force of the urging means 48 are included.

<Dust-proof case (see FIGS. 1 and 9)>
As shown in FIG. 1, the dustproof case 2 is a box-shaped case having a front surface, left and right side surfaces, a back surface, and an upper surface, and an opening 61 is formed on the front surface.
The opening 61 includes a first bellows lid 62 that can be folded in the left-right direction (X direction) and a second bellows lid 63 that is provided in the middle of the first bellows lid 62 and can be folded in the vertical direction (Y direction). It is installed. From the middle of the second bellows lid 63, the tip (probe 18) of the Z spindle 17 of the horizontal coordinate measuring machine main body 1 is projected.

  As shown in FIG. 9, the first bellows lid 62 is provided with an intermediate plate 64 at predetermined intervals in the left-right direction (X direction). A square hole 65 is formed at a position corresponding to the center of gravity of the first bellows lid 62 when the first bellows lid 62 is suspended at the upper end portions of the intermediate plates 64, and both ends of the dustproof case 2 are formed in the square hole 65. A prismatic guide bar 66 fixed to the inner wall is inserted. In addition, a position regulating wire 67 for preventing meandering to the inside of the first bellows lid 62 is stretched in parallel with the left-right direction (X direction) at the inner vertical position of the first bellows lid 62. Thereby, the 1st bellows lid 62 can be smoothly folded in the left-right direction (X direction).

<Effect of embodiment>
(1) In the Y-axis balance mechanism 50Y, a counterweight 51 disposed on the side opposite to the Y slider 16 across the Y column 15, pulleys 52 provided on the upper and lower sides of the Y column 15, and these pulleys 52 Since the Y-slider 16 and the loop-like balance wire 53 connected to the counterweight 51 are connected to each other, loosening of the balance wire 53 when the Y-slider 16 is raised and lowered can be eliminated. In other words, since the balance wire 53 has a loop shape, the balance wire is always “tightened” even when the Y slider 16 is moved up and down, so that “loosening” does not occur. (Demerits such as adverse effects on controllability, deterioration of accuracy, and concerns about machine life) can be eliminated.

(2) The Y-axis drive mechanism 40Y also has pulleys 41Ya to 41Ye provided at the top and bottom of the Y column 15, and a loop shape that is wound around the pulleys 41Ya to 41Ye and connected to the Y slider 16 and the counterweight 51. The drive belt 42Y and the motor 43Y that gives rotational driving force to the pulley 41Ye are included, so that it is not necessary to mount a drive source or the like on the Y-slider 16 that moves up and down as in the prior art. Therefore, it can support high acceleration / deceleration specifications.

(3) The Y-axis guide mechanism 30Y includes a first Y-axis guide mechanism 301Y provided on one side surface of the Y column 15, and a second Y-axis guide mechanism 302Y provided on the other side surface of the Y column 15. Since the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y are configured in a symmetric structure with the longitudinal direction of the Y column 15 as the axis center, the Y column 15 and the first Y axis are also resistant to environmental temperature changes. The guide mechanism 301Y and the second Y-axis guide mechanism 302Y are unlikely to be distorted, and the cause of deterioration in accuracy can be eliminated. That is, external heat influence can be eliminated.

(4) The first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y include a pair of guide rails 31Y provided on the side surface of the Y column 15 along the vertical direction, and guide rails on the Y slider 16 and the counterweight 51. Since the Y column 15 and the guide rails 31Y of the respective guide mechanisms 301Y and 302Y are formed of the same material, the externally arranged externally has a plurality of engaging blocks 32Y slidably engaged with the 31Y. Thermal effects (thermal deformation due to environmental temperature changes) can be eliminated.
Also, since the engagement block 32Y has the same structure with respect to the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y, thermal deformation of the guide rail 31Y due to self-heating generated when the Y slider 16 and the counterweight 51 are raised and lowered. That is, internal heat effects can be eliminated.

(5) The Y column 15, the guide rail 31Y of the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y, and the weight mounting substrate 51A of the counterweight 51 are made of aluminum or an aluminum alloy mainly composed of aluminum. Therefore, it is possible to reduce the weight while eliminating the thermal influence.

(6) In the Z-axis guide mechanism 30Z, the pair of guide rails 31Z are arranged in parallel with the upper and lower surfaces facing the Z spindle 17 in parallel along the moving direction of the Z spindle 17 and symmetrically about the axis of the Z spindle 17, Since the plurality of engagement blocks 32Z that are slidably engaged with the guide rail 31Z are disposed on the Y slider 16, the weight of the Y slider 16 can be reduced. Therefore, the cost can be reduced and the controllability when the Y slider 16 is raised and lowered can be improved.
Moreover, even if the overall length of the Z spindle 17 is increased, the guide rail 31Z only needs to be arranged corresponding to the entire length, and it is not necessary to increase the overall length of the Y slider 16. Therefore, with respect to the Y slider 16, the Z spindle 17 The size in the moving direction can be shortened to reduce the size.

(8) Since the Z spindle 17 is a rectangular tube with a rectangular cross section and is made of an aluminum-based material, the weight can be further reduced. Further, since the guide rails 31Z are arranged on the upper and lower surfaces of the square tube, that is, the guide rails 31Z are engaged with the Y-slider 16 because of the vertically symmetrical structure around the axis of the square tube. Thermal deformation due to self-heating generated when sliding with respect to the block 32Z can also be eliminated.

(9) The Z-axis drive mechanism 40Z has a swing member 45 supported at one end by the Y slider 16 so as to be swingable, and rotatably supported at the other end of the swing member 45 on the side surface of the Z spindle 17. Since the driving roller 46 is brought into contact with the driving roller 46, the motor 47 is configured to rotate the driving roller 46, and the biasing means 48 is configured to bias the swinging member 45 toward the side surface of the Z spindle 17. When the motor 47 is driven to rotate, the drive roller 46 is driven to rotate. Then, since the Z spindle 17 to which the driving roller 46 is pressed and biased is moved in the Z direction while being guided by the Z axis guide mechanism 30Z, the Z spindle 17 can be moved with an extremely simple configuration.

(10) Since the base 12 is mounted on the upper surface of the installation table 11 via a vibration absorbing member 21 such as rubber, and is connected to the installation table 11 via a vibration isolation mechanism 22, external vibration is suppressed. In addition, the shaking of the base 12 due to the reaction force of the movable members (for example, movable members such as the X slider 14, the Y slider 16, and the Z spindle 17) can be suppressed.
In particular, the vibration isolation mechanism 22 includes an L-shaped bracket 23 fixed to the side surface of the base 12, a vibration isolation ring 24 fitted in a hole 23A formed in the center of the horizontal piece of the bracket 23, and the vibration isolation mechanism 24. Since it is composed of a set bolt 25 inserted into the vibration ring 24 and screwed to the installation base 11, it is strong against a force from the horizontal direction and flexible to a force from the vertical direction. Since it is provided, the vibration of the base 12 due to the reaction force of the movable member can be suppressed while suppressing external vibration.

(11) In the dustproof case 2, the first bellows lid 62 has an intermediate plate 64 at predetermined intervals in the left-right direction (X direction), and the first bellows lid 62 is suspended at the upper end of the intermediate plate 64. A square hole 65 is formed at a position corresponding to the center of gravity of the first bellows lid 62, and a prismatic guide bar 66 having both ends fixed to the inner wall of the dustproof case 2 is inserted into the square hole 65. Thus, the first bellows lid 62 can be smoothly folded in the left-right direction (X direction). Moreover, since the position regulating wire 67 for preventing meandering to the inside of the first bellows lid 62 is stretched in parallel with the left and right direction (X direction) at the upper and lower positions inside the first bellows lid 62, Can control the meandering of one bellows lid.

<Modification>
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

The X-axis drive mechanism 40X includes the timing gear 41X, the drive belt 42X, and the motor 43X, but is not limited thereto. For example, a feed screw mechanism having a feed screw shaft arranged along the X direction, a nut member screwed to the feed screw shaft and fixed to the X slider, and a motor for rotating the feed screw shaft may be used. Alternatively, a linear motor mechanism or the like may be used.
The X-axis guide mechanism 30X is not limited to the above embodiment. For example, a configuration in which a plurality of guide rods are arranged along the X direction on the upper surface of the base 12 and an engagement block that fits and slides on the guide rods may be arranged on the lower surface of the X slider.

  In the Y-axis drive mechanism 40Y and the Y-axis balance mechanism 50Y, the loop-shaped drive belt 42Y and the balance wire 53 are used in the above embodiment, but the loop-shaped drive belt 42Y and the balance wire 53 are not necessarily required. One or two pulleys are arranged at the upper end of the Y column, and one end of the endless drive belt and balance wire wound around the pulley are connected to the Y slider 16 and the other end is connected to the counterweight 51. Also good.

The Y-axis drive mechanism 40Y is configured to include the five pulleys 41Ya to 41e in the above-described embodiment. However, the Y-column drive mechanism 40Y has a configuration in which pulleys are arranged at the top and bottom of the Y column 15, that is, at least two pulleys are arranged. A configuration is also possible.
In the Y-axis guide mechanism 30Y, in the above-described embodiment, the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y have a symmetric structure with the Y column 15 as the center, but the symmetric structure is not necessarily required. Further, the material may not be the same material.
In the above embodiment, the Y-axis balance mechanism 50Y includes the counterweight 51, the pulley 52, and the two balance wires 53. However, the Y-axis balance mechanism 50Y may be configured to be connected by a single balance wire.

In the Z- axis drive mechanism 40Z, in the above-described embodiment, the drive roller 46 is pressed against the side surface of the Z spindle 17 and driven, but the present invention is not limited thereto. For example, a linear motor mechanism may be used.

  In the embodiment, the Y column 15, the guide rail 31Y of the first Y-axis guide mechanism 301Y and the second Y-axis guide mechanism 302Y, the weight mounting substrate 51A of the counterweight 51, the Z spindle 17, and the guide rail 31Z of the Z-axis guide mechanism 30Z are provided. Although it is made of aluminum or an aluminum alloy mainly composed of aluminum, it is not limited to this.

In the above embodiment, an example in which the horizontal coordinate measuring machine is applied to the guide mechanism of the Z spindle 17 has been described. However, the present invention is not limited to this.
For example, a three-dimensional measuring machine in which the Z spindle is supported in a vertical posture, that is, an X slider is movably supported along the horizontal beam of the portal column, and the Z spindle is moved vertically (Z direction) on the X slider. In the three-dimensional measuring machine supported so as to be able to move up and down, a pair of guide rails are arranged parallel to the Z spindle moving direction on the opposing surfaces of the Z spindle as a movable member and symmetrically about the Z spindle axis, A plurality of engagement blocks that slidably engage with the guide rail may be disposed on the X slider as the support member.
In addition to the three-dimensional measuring machine, any other measuring machine, for example, a two-dimensional measuring machine, may be used as long as the measuring apparatus has a moving mechanism in which the movable member is movably supported via a guide mechanism with respect to the support member. It can also be applied.

  The present invention can be used as a guide mechanism or drive mechanism for each axis of a coordinate measuring machine or the like.

The perspective view which shows one Embodiment of the measuring apparatus which concerns on this invention. The perspective view of the horizontal coordinate measuring machine main body of embodiment same as the above. Sectional drawing which shows the coupling | bond part of an installation stand and a base in embodiment same as the above. The figure which looked at Y column from the front in embodiment same as the above. The figure which looked at Y column from the upper surface in embodiment same as the above. The perspective view which shows a counterweight in embodiment same as the above. The figure which looked at the Y slider and Z spindle from the front in embodiment same as the above. The horizontal sectional view of a Z-axis drive mechanism in an embodiment same as the above. The perspective view which looked at the 1st bellows lid of the dustproof case from the inside in embodiment same as the above.

Explanation of symbols

1 ... Horizontal CMM body,
12 ... Base,
14 ... X slider,
15 ... Y column,
16 ... Y slider (support member),
17 ... Z spindle (movable member),
18 ... Probe (measuring element),
30Z ... Z-axis guide mechanism,
31Z ... guide rail,
32Z ... engaging block,
40Z ... Z-axis drive mechanism,
45. Swing member,
46: Drive motor (rotation drive means),
48 ... biasing means.

Claims (2)

A base, an X slider provided on the upper surface of the base so as to be movable in the horizontal direction, a Y column erected substantially perpendicular to the X slider, and a Y slider provided so as to be movable up and down along the Y column A Z spindle, a measuring element provided at the tip of the Z spindle, and the Y slider so that the Z spindle can move in a direction perpendicular to the moving direction of the X slider and the Y slider. A measuring device including a guide mechanism,
The guide mechanism is arranged on a pair of guide rails arranged in parallel with the Z spindle in the moving direction of the Z spindle and symmetrically about the axis of the Z spindle, and the Y slider. have a plurality of engagement blocks slidably engaged with the guide rail,
The Y slider is provided with a drive mechanism for moving the Z spindle in a direction orthogonal to the moving direction of the X slider and the Y slider,
The drive mechanism includes a swing member having one end swingably supported by the Y slider, a drive roller rotatably supported by the other end of the swing member, and abutting against a side surface of the Z spindle. A rotation driving means for rotating the driving roller; a biasing means for biasing the swinging member toward the side surface of the Z spindle; and an adjustment screw for adjusting a biasing force of the biasing means. It is configured,
A measuring device. The measuring apparatus according to claim 1,
The Z spindle is a rectangular tube with a rectangular cross section having an upper surface, a lower surface and side surfaces, and is made of aluminum or an aluminum alloy mainly composed of aluminum, and the guide rails are disposed on the upper surface and the lower surface. Measuring device characterized by.

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