JP5425069B2

JP5425069B2 - Swirl flow forming body for gas levitation conveyance and gas levitation conveyance apparatus

Info

Publication number: JP5425069B2
Application number: JP2010519682A
Authority: JP
Inventors: 秀夫小澤; 耕一角田; 斉岩坂; 英幸徳永; 裕二河西
Original assignee: Oiles Corp; Harmotec Corp
Current assignee: Oiles Corp; Harmotec Corp
Priority date: 2008-07-10
Filing date: 2009-04-22
Publication date: 2014-02-26
Anticipated expiration: 2029-04-22
Also published as: JPWO2010004800A1; WO2010004800A1; KR101588440B1; KR20110031158A; CN102083720A; TW201002596A; CN102083720B

Description

【技術分野】
【０００１】
【背景技術】
本発明は、気体浮上搬送用旋回流形成体及び気体浮上搬送装置に関し、特に、大型ＦＰＤパネルや太陽電池パネル等の浮上搬送に用いる装置等に関する。
【０００２】
従来、ＦＰＤパネルや太陽電池パネルの生産に際し、一枚のパネルを大型化することで生産効率を上げる方法が採用されている。例えば、液晶ガラスの場合には、第１０世代で２８５０×３０５０×０．７ｍｍの大きさとなる。そのため、従来のように、複数個並べられたローラの上に液晶パネルを乗せて転がり搬送すると、シャフトの撓みやローラ高さのばらつきによりガラスに局部的に強い力が働き、ガラスを傷付ける虞がある。さらに、プロセス工程では、非接触であることが求められているため、空気浮上搬送が採用され始めている。
【０００３】
空気浮上搬送装置の一例として、液晶用のガラスを浮上させるにあたり、小径の孔を複数個設け、これらの小径の孔から空気が噴出する板状のレールを、ガラスの大きさに合わせて複数個繋ぎ合わせて搬送装置を構成することが行われている。また、多孔質カーボンをレール材に用い、その気孔から空気を噴出させる方法も存在する。
【０００４】
しかし、上記の方法においては、１０００×１０００ｍｍの面積あたりの空気流量として、多数孔タイプで２５０Ｌ／ｍｉｎ、カーボン多孔質タイプで１５０Ｌ／ｍｉｎを要し、極めて多くの空気流量が要求される。また、従来の非接触搬送装置は、真空吸着と空気の噴出の力のつりあい原理を利用して浮上高さの精度を保つが、その際、真空吸着用に常時ポンプを運転する必要があるため、多大なエネルギーを消費するという問題もある。
【０００５】
そこで、本出願人は、浮上高さ精度を高く維持しつつ、空気流量及びエネルギー消費量を低減するため、旋回流を利用した非接触搬送装置を提案した（特許文献１参照）。この非接触搬送装置は、図１０に示すように、表面から裏面に貫通する横断面円形の貫通孔６１と、貫通孔６１内に空気を噴出して旋回流を生じさせる流体噴出口６２と、流体噴出口６２に空気を供給する円環状の給気溝６３とを有する旋回流形成体６４を備える。そして、給気溝６３に空気を供給する空気供給路６５が設けられた基体（レール）６６の表面に、上記の旋回流形成体６４を配置して搬送装置を構成する。
【０００６】
上記非接触搬送装置によれば、旋回流形成体６４の表面側に上方へ向かう上昇旋回流を発生させることで被搬送物（ガラス）６７を浮上させ、それによって、従来の１／２程度の空気流量での搬送を可能とする。その一方で、貫通孔６１の開口部近傍に負圧による下方への空気流を生じさせ、浮上高さ精度を保つための真空吸着と同等の効果を発揮させる。これにより、真空吸着用のポンプを不要とし、エネルギー消費量を低減する。
【０００７】
【特許文献１】日本特願２００８−７５０６８号
【発明の開示】
【発明が解決しようとする課題】
【０００８】
上記非接触搬送装置を用いて、ＦＰＤパネルや太陽電池パネル等の大型パネルを搬送する場合、図１１に示すように、基体６６の表面上に被搬送物の搬送方向に沿って多数の旋回流形成体６４を並べて配置し、被搬送物６７を浮上させながら順次移動させていく。
【０００９】
しかし、この搬送装置では、被搬送物６７がレール６６上を移動する際、被搬送物６７の縁部が旋回流形成体６４の中央部近傍に位置する状態になると、被搬送物６７が旋回流形成体６４に接触する虞があった。すなわち、図１１の領域Ｍにおいては、被搬送物６７が旋回流形成体６４の一部のみと重なることになるため、上昇旋回流による浮上力が不足する一方で、貫通孔６１の中央部近傍では、負圧による下方への空気流が発生して吸着力が作用する。このため、剛性の小さい薄板状の被搬送物を搬送すると、図１２に示すように、縁部６７ａが貫通孔６１の内側に引き込まれて局部的な撓みが発生し、基体６６や貫通孔６１の開口端部に接触して傷付く危険性があった。
【００１０】
そこで、本発明は、上記の問題点に鑑みてなされたものであって、被浮上物が旋回流形成体と部分的に重なる状態であっても、被浮上物が旋回流形成体と接触するのを回避し、被浮上物に傷が付くのを防止できる気体浮上搬送用旋回流形成体を提供することを目的とする。また、本発明の他の目的は、被搬送物の搬送過程で被搬送物の縁部が旋回流形成体の一部と重なる状態になっても、被搬送物の縁部が基体や旋回流形成体と接触するのを回避し、被搬送物に傷が付くのを防止できる気体浮上搬送装置を提供することにある。
【課題を解決するための手段】
【００１１】
上記目的を達成するため、本発明は、気体浮上搬送用旋回流形成体であって、少なくとも表面側で開口する横断面円形の孔と、該孔の内周側面から気体を噴出して旋回流を生じさせる第１の気体噴出口と、前記表面から上方に向けて気体を噴出する第２の気体噴出口とを備えることを特徴とする。
【００１２】
そして、本発明によれば、第１の気体噴出口からの旋回流によって生じる浮力が不足する場合でも、第２の気体噴出口からの上昇流によって補助的な浮力を与えることができ、被浮上物を浮上させることができる。このため、被浮上物が旋回流形成体と部分的に重なる状態であっても、被浮上物が旋回流形成体と接触するのを回避し、被浮上物に傷が付くのを防止することが可能になる。
【００１３】
上記旋回流形成体において、前記第２の気体噴出口を前記孔の開口部周辺に複数設けることができ、好ましくは、孔を中心として十字状に配置することができる。
【００１４】
上記旋回流形成体において、前記第２の気体噴出口へ気体を搬送する気体通路に絞りを設けることができ、これによれば、第２の気体噴出口の数や気体流量を少なくしても高い浮力を得ることができる。
【００１５】
また、本発明は、気体浮上搬送装置であって、少なくとも表面側で開口する横断面円形の孔と、該孔の内周側面から気体を噴出して旋回流を生じさせる第１の気体噴出口と、前記表面から上方に向けて気体を噴出する第２の気体噴出口とを有する旋回流形成体を、基体の搬送面に備えることを特徴とする。
【００１６】
そして、本発明によれば、第１の気体噴出口からの旋回流によって生じる浮力が不足する場合でも、第２の気体噴出口からの上昇流によって補助的な浮力を与えることができ、被搬送物を浮上させることができる。このため、被搬送物の搬送過程で被搬送物の縁部が旋回流形成体の一部と重なる状態になっても、被搬送物の縁部が基体や旋回流形成体と接触するのを回避し、被搬送物に傷が付くのを防止することが可能になる。
【００１７】
上記気体浮上搬送装置において、前記旋回流形成体を、裏面に前記第１及び第２の気体噴出口に連通する平面視円形の溝部を備えるように、前記基体を、搬送面に前記溝部に連通する気体供給口を備え、該気体供給口を介して前記溝部に気体が供給されるように構成することができる。これにより、基体の搬送面には気体供給口を穿設するだけでよいため、
基体を簡単な構成とすることができる。
【００１８】
上記気体浮上搬送装置において、前記基体を、前記搬送面に平面視円形の溝部を備えるように、前記旋回流形成体を、前記溝部及び前記第１の気体噴出口に連通する第１の気体通路と、前記溝部及び前記第２の気体噴出口に連通する第２の気体通路とを備え、前記溝部を介して前記第１及び第２の気体通路に気体が供給されるように構成することができる。これにより、旋回流形成体の裏面には、気体噴出口及び気体通路を形成するだけでよいため、旋回流形成体を簡単な構成とすることができる。
【００１９】
上記気体浮上搬送装置において、前記旋回流形成体を前記基体の搬送面に形成した凹部に収容することができる。また、上記気体浮上搬送装置において、前記基体の搬送面に形成した凹部に前記旋回流形成体を収容し、該凹部の内周側面を変形させて前記旋回流形成体をかしめ接合することができる。これにより、接着剤を使用せず、旋回流形成体と基体との間の気密状態も維持しながら容易に旋回流形成体を基体に装着することができる。
【００２０】
上記気体浮上搬送装置において、前記旋回流形成体を前記基体に２列にわたって各列に複数個配置し、一方の列に属する旋回流形成体の各々の旋回流の向きと、他方の列に属する旋回流形成体の各々の旋回流の向きとが互いに異なるように構成することができる。この構成によって、隣接する列の隣り合う旋回流形成体からの旋回流が増強され、旋回流形成体から噴出する気体によって被搬送物を浮上させながら搬送することができる。
【発明の効果】
【００２１】
以上のように、本発明によれば、被搬送物の搬送過程で被搬送物が他の部材と接触するのを回避し、被搬送物に傷が付くのを防止することが可能になる。
【発明を実施するための最良の形態】
【００２２】
次に、本発明の実施の形態について図面を参照しながら説明する。尚、以下の説明においては、搬送用気体として空気を用い、被搬送物として液晶用のガラス３を搬送する場合を例にとって説明する。
【００２３】
図１は、本発明にかかる気体浮上搬送用旋回流形成体の第１の実施形態を示し、（ａ）は上面図、（ｂ）は（ａ）のＡ−Ａ線断面図、（ｃ）は下面図、（ｄ）は（ｃ）のＢ−Ｂ線断面図である。尚、図１（ｅ）に関する説明は後述する。
【００２４】
この旋回流形成体１は、表面から裏面に貫通する横断面円形の貫通孔１１と、裏面に設けられ、空気を受け入れる環状溝１２と、環状溝１２に溜まった空気を空気通路１３を介して貫通孔１１の内周側面から噴出し、貫通孔１１の内周方向に沿って旋回流を生じさせる第１の噴出口１４ａ、１４ｂと、環状溝１２に溜まった空気を空気通路１５を介して旋回流形成体１の表面から噴出し、上方に向かう上昇流を生じさせる第２の噴出口１６ａ〜１６ｄとで構成される。尚、旋回流形成体１の表面は面取り加工され、面取部１７ａ、１７ｂが形成される。
【００２５】
第２の噴出口１６ａ〜１６ｄは、図１（ａ）に示すように、例えば、４個設けられ、貫通孔１１を中心として十字状に配置される。これら第２の噴出口１６ａ〜１６ｄは、図１（ｂ）に示すように、空気通路１５に絞りが設けられ、自成絞りに加工される。尚、第２の噴出口１６の数は、必ずしも４個である必要はなく、例えば、第２の噴出口１６を５個設けて五角形状に配置してもよいし、３個を三角形状に配置してもよい。また、絞りについても、自成絞りに限られるものではなく、オリフィス絞りやスロット絞り等を用いることができる。
【００２６】
図２及び図３は、上記旋回流形成体１を用いた気体浮上搬送装置を示し、図３（ａ）は図２（ｂ）のＥ−Ｅ線断面図、（ｂ）は図３（ａ）のＧ−Ｇ線断面図である。この気体浮上搬送装置２０は、図２（ａ）に示すように、旋回流形成体１ａ、１ｂを、板状の基体２に２列にわたって、紙面上で上下左右に交互に複数個設けて構成される。ガラス３等の搬送にあたり、大型パネル等を対象とする場合には、気体浮上搬送装置２０を並列に複数基（例えば、３基）配置して搬送レーン１０を構成する。
【００２７】
ここで、旋回流形成体１ａ、１ｂは、いずれも、図１に示す旋回流形成体１と同様のものであるが、旋回流形成体１ｂは、旋回流形成体１ａと逆向きの旋回流を生じさせるように構成される。このため、図１（ｃ）、（ｅ）に示すように、旋回流形成体１ｂの第１の噴出口１４ａ、１４ｂは、旋回流形成体１ａのそれと位置が勝手違いとなるように配置される。尚、図２（ａ）においては、図を見易くするため、旋回流形成体１ｂを黒塗りで示している。
【００２８】
図３に示すように、基体２は、旋回流形成体１を収容する凹部２１と、基体２の長軸方向に延設され、ポンプ（不図示）から供給される空気を搬送する空気通路２２と、空気通路２２中を流れる空気を旋回流形成体１の環状溝１２に供給する貫通孔２３とを備える。尚、基体２と旋回流形成体１との接合は、接着剤等を用い、旋回流形成体１の底面を基体２の凹部２１に固定することで行われる。
【００２９】
次に、上記旋回流形成体及び気体浮上搬送装置の動作について、図１〜図４を参照しながら説明する。
【００３０】
図３に示すように、ポンプから基体２の空気通路２２に供給された空気は、貫通孔２３を介して旋回流形成体１の環状溝１２に供給され、空気通路１３（図１（ｃ）参照）を介して第１の噴出口１４ａ、１４ｂから噴出する。これにより、旋回流形成体１の表面側の平板部１８の上方において、上昇旋回流を発生させるとともに、貫通孔１１の開口部近傍において、負圧による裏面方向への空気流れを生じさせる。また、環状溝１２に供給された空気は、空気通路１５（図１（ｂ）参照）を介して第２の噴出口１６ａ〜１６ｄから噴出し、平板部１８から上方に向かう上昇流を生じさせる。
【００３１】
このとき、ガラス３と旋回流形成体１の全体とが重なる領域（図２の領域Ｃ）においては、平板部１８の上方に生成した上昇旋回流によって、被搬送物である液晶用のガラス３を浮上させると同時に、貫通孔１１の開口部近傍に生成した裏面方向への空気流れによって、ガラス３を基体２側に引き寄せ、ガラス３の浮上高さ精度を保つ。また、第２の噴出口１６ａ〜１６ｄからの上昇流も補助浮力として機能し、ガラス３を浮上させるように作用する。
【００３２】
また、旋回流形成体１ａ、１ｂの旋回流は互いに逆方向であり、図２（ａ）の紙面上で上下左右に旋回流形成体１ａ、１ｂを交互に配置したため、各々の旋回流形成体１ａ、１ｂが形成した旋回流の水平分力が相殺される。これにより、旋回流によってガラス３に付加される力は、浮上力及び吸引力の２つの鉛直成分の力のみとなり、ガラス３の回転を確実に防止することができる。
【００３３】
その一方で、ガラス３と旋回流形成体１の一部とが重なる領域（図２の領域Ｄ）においては、平板部１８の上方に生成した上昇旋回流による浮力が不足するが、図４に示すように、第２の噴出口１６ａ〜１６ｄからの上昇流がガラス３に補助的な浮力を与え、当該浮力の不足分を補う。これにより、ガラス３の縁部３ａ及び外縁３ｂを浮上させてガラス３の撓み（変形）を抑制し、ガラス３が基体２や貫通孔１１の開口端部に接触するのを回避する。尚、本領域においても、負圧による吸着力は作用しており、ガラス３を引き付けて安定浮上させる。
【００３４】
このようにして浮上したガラス３は、図示しないリニアモータ、摩擦コロ、ベルトなどにより搬送駆動力が与えられ、図２（ａ）に示す矢印方向に搬送される。
【００３５】
尚、上記実施の形態においては、気体として空気を用いる場合について説明したが、空気以外の窒素等のプロセスガスを使用することもできる。また、旋回流形成体１に貫通孔１１を設けたが、貫通孔１１に代えて、旋回流形成体１の表面側で開口する横断面円形の凹部を設けてもよい。さらに、第２の噴出口１６ａ〜１６ｄに連通する空気通路１５に絞りを設けたが、絞りは不可欠なものではなく、省略することもできる。
【００３６】
また、旋回流形成体１の底面を基体２の凹部２１に接着剤等で固定することにより、基体２と旋回流形成体１を接合するが、図５に示すように、基体２の凹部２１の周辺に環状凹部５１及び盛上部５２を設け、旋回流形成体１をかしめ接合してもよい。かしめ接合にあたっては、基体２の凹部２１に旋回流形成体１を載置した後、治具５３の先端部５３ａを基体２の環状凹部５１に挿入し、盛上部５２を旋回流形成体１側に押圧する。これにより、凹部２１の内周側面を旋回流形成体１の面取部１７ｂに沿って傾斜させ、旋回流形成体１を固定する。この方法によれば、基体２の表面加工が必要になるものの、接着剤等の塗布による旋回流形成体１の傾斜を考慮する必要がなくなるため、ガラス３の浮上高さ精度を向上させることができる。
【００３７】
さらに、図６は、基体２と旋回流形成体１をかしめ接合する他の方法を示すもので、この方法は、鋭利な環状刃５５ａを備えた治具５５を用いて、旋回流形成体１を基板２に固定するものである。この方法では、基体２の凹部２１に旋回流形成体１を載置した後、治具５５の環状刃５５ａを基板２に押し当てて凹部２１の周囲を押圧し、基体２の表面の一部を塑性変形させる。これにより、凹部２１の内周側面を旋回流形成体１の面取部１７ｂに沿って傾斜させ、旋回流形成体１を固定する。この方法によれば、図５に示す環状凹部５１や盛上部５２が不要になるため、安価なかしめ固定を行うことができる。
【００３８】
図７は、本発明にかかる旋回流形成体の第２の実施形態を示し、（ａ）は上面図、（ｂ）は（ａ）のＨ−Ｈ線断面図、（ｃ）は下面図、（ｄ）は（ｃ）のＪ−Ｊ線断面図、（ｅ）は、旋回流形成体の裏面を（ｃ）に示す旋回流形成体の裏面と勝手違いとなるように形成した場合を示す下面図である。
【００３９】
この旋回流形成体３０は、表面から裏面に貫通する横断面円形の貫通孔３１と、貫通孔３１の内周側面から空気を噴出し、貫通孔３１の内周方向に沿って旋回流を生じさせる第１の噴出口３２ａ、３２ｂと、旋回流形成体３０の表面から空気を噴出し、上方に向かう上昇流を生じさせる第２の噴出口３３ａ〜３３ｄとを備える。また、図７（ｃ）及び（ｄ）に示すように、旋回流形成体３０の裏面には、空気通路３４を介して第１の噴出口３２ａ、３２ｂに空気を供給する第１の凹部３５ａ、３５ｂと、空気通路３６を介して第２の噴出口３３ａ〜３３ｄに空気を供給する第２の凹部３７ａ〜３７ｄとが設けられる。
【００４０】
図８は、上記旋回流形成体３０を用いた気体浮上搬送装置を示し、（ａ）は図２（ｂ）のＥ−Ｅ線断面に相当する断面の断面図、（ｂ）は（ａ）のＫ−Ｋ線断面図である。基体４０は、旋回流形成体３０を収容する凹部４１と、基体４０の長軸方向に延設され、ポンプから供給される空気を搬送する空気通路４２と、旋回流形成体３０の裏面に設けられた第１及び第２の凹部３５ａ〜３７ｄ（図７（ｃ）参照）に空気を供給するための平面視円形の環状溝４３と、空気通路４２から環状溝４３に空気を搬送する貫通孔４４とを備える。
【００４１】
尚、図示は省略するが、旋回流形成体３０を用いる場合でも、図２に示す場合と同様、複数の旋回流形成体３０を基体４０に２列にわたって設けて気体浮上搬送装置を構成するとともに、その気体浮上搬送装置を並列に複数基配置して搬送レーンを構成する。また、旋回流形成体３０の配置方法についても、上下左右に隣り合う旋回流形成体３０が相反する向きの旋回流を生じさせるように配置する。
【００４２】
次に、上記旋回流形成体及び気体浮上搬送装置の動作について、図７〜図９を参照しながら説明する。
【００４３】
図８に示すように、ポンプから基体４０の空気通路４２に供給された空気は、貫通孔４４を介して環状溝４３に供給され、環状溝４３から旋回流形成体３０の第１の凹部３５ａ、３５ｂ（図７（ｃ）参照）に供給され、空気通路３４を介して第１の噴出口３２ａ、３２ｂから貫通孔３１に噴出する。これにより、旋回流形成体３０の表面側の平板部３８の上方において、上昇旋回流を発生させるとともに、貫通孔３１の開口部近傍において、負圧による裏面方向への空気流れを生じさせる。また、環状溝４３に供給された空気は、第２の凹部３７ａ〜３７ｄ及び空気通路３６（図７（ｃ）参照）を介して第２の噴出口３３ａ〜３３ｄから噴出し、平板部３８から上方に向かう上昇流を生じさせる。
【００４４】
図９に示すように、上記の場合でも、ガラス３の縁部が旋回流形成体３０の一部と重なる領域においては、第２の噴出口３３ａ〜３３ｄからの上昇流がガラス３に補助的な浮力を与え、ガラス３の縁部３ａ及び外縁３ｂを持ち上げるように作用する。従って、第１の実施形態と同様、ガラス３の縁部３ａが基体４０や貫通孔３１の開口端部に接触するのを回避し、ガラス３に傷が付くのを防止することが可能になる。
【００４５】
尚、本実施の形態においても、気体として空気以外の気体を用いることができ、また、貫通孔３１に代えて、旋回流形成体３０の表面側で開口する横断面円形の凹部を設けることができる。さらに、第２の噴出口３３ａ〜３３ｄに連通する空気通路３５の絞りを省略してもよいし、また、図５及び図６に示す場合と同様にして、旋回流形成体３０をかしめ接合することもできる。
【図面の簡単な説明】
【００４６】
【図１】本発明にかかる旋回流形成体の第１の実施形態を示す図であって、（ａ）は上面図、（ｂ）は（ａ）のＡ−Ａ線断面図、（ｃ）は下面図、（ｄ）は（ｃ）のＢ−Ｂ線断面図、（ｅ）は、旋回流形成体の裏面を（ｃ）に示す旋回流形成体の裏面と勝手違いとなるように形成した場合を示す下面図である。
【図２】本発明にかかる気体浮上搬送装置の第１の実施形態を示す図であって、（ａ）は上面図、（ｂ）は（ａ）の領域Ｃの拡大図、（ｃ）は（ａ）の領域Ｄの拡大図である。
【図３】（ａ）は図２（ｂ）のＥ−Ｅ線断面図、（ｂ）は（ａ）のＧ−Ｇ線断面図である。
【図４】図２（ｃ）のＦ−Ｆ線断面図であり、被搬送物の縁部が旋回流形成体の一部と重なる領域での断面図である。
【図５】図１の旋回流形成体を基体の凹部にかしめ接合する場合を示す断面図である。
【図６】かしめ接合の他の例を示す断面図である。
【図７】本発明にかかる気体浮上搬送装置の第２の実施形態を示す図であって、（ａ）は上面図、（ｂ）は（ａ）のＨ−Ｈ線断面図、（ｃ）は下面図、（ｄ）は（ｃ）のＪ−Ｊ線断面図、（ｅ）は、旋回流形成体の裏面を（ｃ）に示す旋回流形成体の裏面と勝手違いとなるように形成した場合を示す下面図である。
【図８】本発明にかかる気体浮上搬送装置の第２の実施形態を示す図であって、（ａ）は図２（ｂ）のＥ−Ｅ線断面に相当する断面の断面図、（ｂ）は（ａ）のＫ−Ｋ線断面図である。
【図９】図２（ｃ）のＦ−Ｆ線断面に相当する断面の断面図であり、被搬送物の縁部が旋回流形成体の一部と重なる領域での断面図である。
【図１０】従来の非接触搬送装置を示す断面図である。
【図１１】従来の非接触搬送装置を示す上面図である。
【図１２】被搬送物の縁部が旋回流形成体の一部と重なる領域での断面図である。
【符号の説明】
【００４７】
１（１ａ、１ｂ）旋回流形成体
２基体
３ガラス
３ａ縁部
３ｂ外縁
１０搬送レーン
１１貫通孔
１２環状溝
１３空気通路
１４（１４ａ、１４ｂ）第１の噴出口
１５空気通路
１６（１６ａ〜１６ｄ）第２の噴出口
１７（１７ａ、１７ｂ）面取部
１８平板部
２０気体浮上搬送装置
２１凹部
２２空気通路
２３貫通孔
３０旋回流形成体
３１貫通孔
３２（３２ａ、３２ｂ）第１の噴出口
３３（３３ａ〜３３ｄ）第２の噴出口
３４空気通路
３５（３５ａ、３５ｂ）第１の凹部
３６空気通路
３７（３７ａ〜３７ｄ）第２の凹部
３８平板部
４０基体
４１凹部
４２空気通路
４３環状溝
４４貫通孔
５１環状凹部
５２盛上部
５３治具
５３ａ先端部
５５治具
５５ａ環状刃【Technical field】
[0001]
[Background]
The present invention relates to a swirl flow forming body for gas levitation conveyance and a gas levitation conveyance apparatus, and more particularly to an apparatus used for levitation conveyance of a large FPD panel, a solar battery panel, and the like.
[0002]
Conventionally, in the production of FPD panels and solar cell panels, a method of increasing production efficiency by increasing the size of one panel has been adopted. For example, in the case of liquid crystal glass, the size is 2850 × 3050 × 0.7 mm in the tenth generation. Therefore, when a liquid crystal panel is placed on a plurality of rollers and rolled as in the past, a strong force acts locally on the glass due to the deflection of the shaft and variations in the roller height, which may damage the glass. is there. Furthermore, since the process steps are required to be non-contact, air floating conveyance is beginning to be adopted.
[0003]
As an example of an air levitation transport device, a plurality of small-diameter holes are provided to float glass for liquid crystal, and a plurality of plate-like rails through which air is ejected from these small-diameter holes are matched to the size of the glass. It is practiced to form a transport device by connecting them together. There is also a method in which porous carbon is used as a rail material and air is ejected from the pores.
[0004]
However, the above method requires 250 L / min for the multi-hole type and 150 L / min for the carbon porous type as the air flow rate per area of 1000 × 1000 mm, and a very large air flow rate is required. In addition, the conventional non-contact transfer device maintains the accuracy of the flying height using the balance principle of vacuum suction and air jet force, but at that time, it is necessary to always operate the pump for vacuum suction. There is also a problem of consuming a great deal of energy.
[0005]
In view of this, the present applicant has proposed a non-contact conveyance device using a swirling flow in order to reduce the air flow rate and energy consumption while maintaining high flying height accuracy (see Patent Document 1). As shown in FIG. 10, the non-contact transfer device includes a through hole 61 having a circular cross section penetrating from the front surface to the back surface, a fluid jet port 62 for generating a swirling flow by jetting air into the through hole 61, A swirling flow forming body 64 having an annular air supply groove 63 for supplying air to the fluid ejection port 62 is provided. Then, the above-described swirl flow forming body 64 is arranged on the surface of a base body (rail) 66 provided with an air supply path 65 for supplying air to the air supply groove 63 to constitute a transport device.
[0006]
According to the non-contact transfer device, the object to be transferred (glass) 67 is levitated by generating an upward swirl flow upward on the surface side of the swirl flow forming body 64, and thereby about 1/2 of the conventional one. Enables conveyance at an air flow rate. On the other hand, an air flow downward due to negative pressure is generated in the vicinity of the opening of the through hole 61, and the same effect as vacuum suction for maintaining the flying height accuracy is exhibited. This eliminates the need for a vacuum suction pump and reduces energy consumption.
[0007]
[Patent Document 1] Japanese Patent Application No. 2008-75068 [Disclosure of the Invention]
[Problems to be solved by the invention]
[0008]
When a large panel such as an FPD panel or a solar battery panel is transported using the non-contact transport device, as shown in FIG. 11, a large number of swirl flows along the transport direction of the object to be transported on the surface of the substrate 66. The formed bodies 64 are arranged side by side, and the transported object 67 is sequentially moved while being lifted.
[0009]
However, in this transport apparatus, when the transported object 67 moves on the rail 66, the transported object 67 is swung when the edge of the transported object 67 is positioned in the vicinity of the center of the swirl flow forming body 64. There was a risk of contact with the flow former 64. That is, in the region M of FIG. 11, the transported object 67 overlaps with only a part of the swirling flow forming body 64, so that the levitation force due to the rising swirling flow is insufficient, but in the vicinity of the central portion of the through hole 61. Then, a downward air flow is generated by a negative pressure, and an adsorption force acts. For this reason, when a thin plate-shaped object to be transported with low rigidity is conveyed, the edge portion 67a is drawn into the inside of the through hole 61 as shown in FIG. There was a risk of contact with the open end of the garment.
[0010]
Therefore, the present invention has been made in view of the above problems, and even if the levitated object partially overlaps the swirling flow forming body, the levitated object contacts the swirling flow forming body. It is an object of the present invention to provide a swirling flow forming body for gas levitation transport that can prevent the levitation object from being damaged. In addition, another object of the present invention is that the edge of the object to be conveyed is in a state where the edge of the object to be conveyed overlaps a part of the swirl flow forming body in the process of conveying the object to be conveyed. An object of the present invention is to provide a gas levitation conveyance device that can avoid contact with a formed body and prevent the object to be conveyed from being damaged.
[Means for Solving the Problems]
[0011]
To achieve the above object, the present invention provides a gas floating carrying swirl flow forming member, and the circular cross section of the holes opening at least on the surface side, and ejected air body from the inner circumferential surface of the hole turning a first air body spout causing the flow, characterized in that it comprises a second air body spout for spouting air body upward from the surface.
[0012]
Then, according to the present invention, even if the buoyancy caused by the swirling flow from the first air body spout is insufficient, it is possible to provide an auxiliary buoyancy by upward flow from the second air body spout, An object to be levitated can be levitated. For this reason, even when the levitated object partially overlaps the swirling flow forming body, the levitated object is prevented from coming into contact with the swirling flow forming body, and the levitated object is prevented from being damaged. Is possible.
[0013]
In the swirl flow forming member, wherein the second air body spout can be provided more on the periphery of an opening of the hole, preferably, it can be arranged in a cross shape around the hole.
[0014]
In the swirl flow forming member, the diaphragm care body passage for transporting the gas material can be provided to the second air body spout, according to this, the number and the vapor body flow rate of the second air body spout High buoyancy can be obtained even if the amount is reduced.
[0015]
Further, the present invention provides a gas levitation transportation device, at least a circular cross section holes opening on the surface side, a first air body to produce a swirling flow by jetting a gas body from the inner circumferential surface of the hole and spout, the swirl flow forming member and a second air body spout for spouting air body upward from the surface, characterized in that it comprises the conveying surface of the substrate.
[0016]
Then, according to the present invention, even if the buoyancy caused by the swirling flow from the first air body spout is insufficient, it is possible to provide an auxiliary buoyancy by upward flow from the second air body spout, A conveyed object can be levitated. For this reason, even if the edge of the transferred object overlaps with a part of the swirl flow forming body during the transfer process of the transferred object, the edge of the transferred object does not contact the substrate or the swirl flow forming body. It is possible to avoid this and prevent the conveyed object from being damaged.
[0017]
In the gas levitation transportation device, the swirl flow forming member, so comprises a circular shape in plan view of the groove in communication with the first and second air body spout on the back surface, said substrate, said groove on the transport surface comprises a gas-supplying port communicating, gas body to the groove through the air-supplying port can be configured to be supplied. Accordingly, since it is only necessary to bored air-supplying port to the conveying surface of the substrate,
The substrate can have a simple configuration.
[0018]
In the gas levitation transportation device, said substrate, to include a circular shape in plan view of the groove in the conveying surface, a first air communicating said swirl flow forming member, said groove and said first air body spout comprising a body passageway, and a second air body passage communicating with said groove and said second air body spout Pneumatic fluid is supplied to the first and second air fluid path through said groove It can be constituted as follows. Thus, the back surface of the swirl flow forming member, since it is only necessary to form the vapor body spout and air fluid path, it is possible to the swirl flow forming member and a simple structure.
[0019]
In the gas levitation transfer device, the swirl flow forming body can be accommodated in a recess formed on the transfer surface of the substrate. Further, in the gas levitation transfer apparatus, the swirl flow forming body can be accommodated in a recess formed on the transfer surface of the base, and the swirl flow forming body can be crimped and joined by deforming an inner peripheral side surface of the recess. . As a result, the swirl flow forming body can be easily attached to the substrate without using an adhesive and maintaining an airtight state between the swirl flow forming body and the substrate.
[0020]
In the gas levitation transfer apparatus, a plurality of the swirl flow forming bodies are arranged in each row in two rows on the substrate, and each swirl flow forming body belonging to one row belongs to the other swirl flow direction and the other row. It can comprise so that the direction of each swirling flow of a swirling flow formation body may mutually differ. This configuration allows the swirling flow from the swirling flow body adjacent the adjacent columns is enhanced, conveyed while floating the object to be conveyed by a vapor body ejected from the swirling flow thereof.
【Effect of the invention】
[0021]
As described above, according to the present invention, it is possible to prevent the conveyed object from coming into contact with other members during the conveying process of the conveyed object, and to prevent the conveyed object from being damaged.
BEST MODE FOR CARRYING OUT THE INVENTION
[0022]
Next, embodiments of the present invention will be described with reference to the drawings. In the following description, with air as the conveying gas body, it will be described as an example the case of transporting the glass 3 for a liquid crystal as an object to be conveyed.
[0023]
1A and 1B show a first embodiment of a swirl flow forming body for gas levitation conveyance according to the present invention, wherein FIG. 1A is a top view, FIG. 1B is a cross-sectional view along line AA in FIG. Is a bottom view, and (d) is a cross-sectional view taken along line BB of (c). The description regarding FIG. 1E will be described later.
[0024]
The swirl flow forming body 1 includes a through hole 11 having a circular cross section penetrating from the front surface to the back surface, an annular groove 12 that is provided on the back surface and receives air, and air accumulated in the annular groove 12 through the air passage 13. The first jet outlets 14 a and 14 b that are jetted from the inner peripheral side surface of the through hole 11 and generate a swirling flow along the inner peripheral direction of the through hole 11, and the air accumulated in the annular groove 12 through the air passage 15. It is comprised by the 2nd jet nozzles 16a-16d which eject from the surface of the swirl | vortex flow formation body 1, and produce the upward flow which goes upwards. The surface of the swirling flow forming body 1 is chamfered to form chamfered portions 17a and 17b.
[0025]
As shown in FIG. 1A, for example, four second ejection ports 16 a to 16 d are provided and arranged in a cross shape with the through hole 11 as the center. As shown in FIG. 1 (b), the second jet nozzles 16a to 16d are provided with a throttle in the air passage 15 and processed into a self-contained throttle. Note that the number of the second ejection ports 16 is not necessarily four. For example, five second ejection ports 16 may be provided and arranged in a pentagonal shape, or three may be triangular. You may arrange. Further, the diaphragm is not limited to a self-contained diaphragm, and an orifice diaphragm, a slot diaphragm, or the like can be used.
[0026]
2 and 3 show a gas levitation transport device using the swirl flow forming body 1, FIG. 3 (a) is a cross-sectional view taken along line EE of FIG. 2 (b), and FIG. 3 (b) is FIG. It is a GG line sectional view of). As shown in FIG. 2 (a), the gas levitation transfer device 20 is configured by providing a plurality of swirl flow forming bodies 1a, 1b alternately on the plate-like base 2 in two rows vertically and horizontally on the sheet. Is done. When transporting the glass 3 or the like, when targeting a large panel or the like, the transport lane 10 is configured by arranging a plurality of (for example, three) gas levitation transport devices 20 in parallel.
[0027]
Here, the swirling flow forming bodies 1a and 1b are both the same as the swirling flow forming body 1 shown in FIG. 1, but the swirling flow forming body 1b is a swirling flow opposite to the swirling flow forming body 1a. Is configured to produce For this reason, as shown in FIGS. 1C and 1E, the first jet outlets 14a and 14b of the swirling flow forming body 1b are arranged so that their positions are different from those of the swirling flow forming body 1a. The In FIG. 2A, the swirl flow forming body 1b is shown in black for the sake of easy understanding.
[0028]
As shown in FIG. 3, the base body 2 has a recess 21 that houses the swirling flow forming body 1, and an air passage 22 that extends in the major axis direction of the base body 2 and carries air supplied from a pump (not shown). And a through hole 23 for supplying the air flowing through the air passage 22 to the annular groove 12 of the swirl flow forming body 1. The base 2 and the swirling flow forming body 1 are joined by fixing the bottom surface of the swirling flow forming body 1 to the concave portion 21 of the base 2 using an adhesive or the like.
[0029]
Next, operations of the swirl flow forming body and the gas levitation transfer apparatus will be described with reference to FIGS.
[0030]
As shown in FIG. 3, the air supplied from the pump to the air passage 22 of the base 2 is supplied to the annular groove 12 of the swirl flow forming body 1 through the through hole 23, and the air passage 13 (FIG. 1C). From the first outlets 14a and 14b. As a result, an upward swirling flow is generated above the flat plate portion 18 on the surface side of the swirling flow forming body 1 and an air flow in the back surface direction due to negative pressure is generated near the opening of the through hole 11. Further, the air supplied to the annular groove 12 is ejected from the second ejection ports 16a to 16d via the air passage 15 (see FIG. 1B), and an upward flow is generated upward from the flat plate portion 18. .
[0031]
At this time, in the region where the glass 3 and the entire swirling flow forming body 1 overlap (region C in FIG. 2), the liquid crystal glass 3 that is the object to be transported by the upward swirling flow generated above the flat plate portion 18. At the same time, the glass 3 is drawn toward the base 2 by the air flow in the direction of the back surface generated in the vicinity of the opening of the through-hole 11, and the flying height accuracy of the glass 3 is maintained. Further, the upward flow from the second jet nozzles 16a to 16d also functions as auxiliary buoyancy and acts to float the glass 3.
[0032]
Further, the swirl flows of the swirl flow forming bodies 1a and 1b are opposite to each other, and the swirl flow forming bodies 1a and 1b are alternately arranged vertically and horizontally on the paper surface of FIG. The horizontal component of the swirling flow formed by 1a and 1b is canceled out. As a result, the force applied to the glass 3 by the swirl flow is only the force of two vertical components of the levitation force and the suction force, and the rotation of the glass 3 can be reliably prevented.
[0033]
On the other hand, in the region where the glass 3 and a part of the swirling flow forming body 1 overlap (region D in FIG. 2), the buoyancy due to the rising swirling flow generated above the flat plate portion 18 is insufficient. As shown, the upward flow from the second jet ports 16a to 16d gives auxiliary buoyancy to the glass 3 to compensate for the shortage of the buoyancy. Thereby, the edge part 3a and the outer edge 3b of the glass 3 are levitated, the bending (deformation) of the glass 3 is suppressed, and the glass 3 is prevented from coming into contact with the base 2 or the opening end of the through hole 11. Also in this region, the suction force due to the negative pressure acts, and the glass 3 is attracted and stably floated.
[0034]
The glass 3 that has floated in this manner is supplied with a driving force by a linear motor, a friction roller, a belt, or the like (not shown), and is transferred in the direction of the arrow shown in FIG.
[0035]
Incidentally, in the above embodiment has described the case of using air as the vapor-body, it is also possible to use a process gas such as nitrogen other than air. Moreover, although the through-hole 11 was provided in the swirl | flow flow formation body 1, it may replace with the through-hole 11 and you may provide the recessed part of the cross-sectional circular shape opened on the surface side of the swirl | flow-form formation body 1. Furthermore, although the throttle is provided in the air passage 15 communicating with the second jet nozzles 16a to 16d, the throttle is not indispensable and can be omitted.
[0036]
Further, the base 2 and the swirling flow forming body 1 are joined by fixing the bottom surface of the swirling flow forming body 1 to the concave portion 21 of the base 2 with an adhesive or the like. However, as shown in FIG. The swirling flow forming body 1 may be caulked and joined by providing an annular concave portion 51 and a raised portion 52 around the periphery of the inner surface. In caulking and joining, after the swirl flow forming body 1 is placed in the recess 21 of the base body 2, the tip 53 a of the jig 53 is inserted into the annular recess 51 of the base body 2, and the raised portion 52 is connected to the swirl flow forming body 1 side. Press on. Thereby, the inner peripheral side surface of the recess 21 is inclined along the chamfered portion 17b of the swirling flow forming body 1, and the swirling flow forming body 1 is fixed. According to this method, although the surface processing of the base 2 is required, it is not necessary to consider the inclination of the swirl flow forming body 1 due to the application of an adhesive or the like, so that the flying height accuracy of the glass 3 can be improved. it can.
[0037]
Further, FIG. 6 shows another method for caulking and joining the base body 2 and the swirling flow forming body 1, and this method uses a jig 55 having a sharp annular blade 55 a and uses the swirling flow forming body 1. Is fixed to the substrate 2. In this method, after the swirl flow forming body 1 is placed in the concave portion 21 of the base body 2, the annular blade 55 a of the jig 55 is pressed against the substrate 2 to press the periphery of the concave portion 21, and a part of the surface of the base body 2 is pressed. Is plastically deformed. Thereby, the inner peripheral side surface of the recess 21 is inclined along the chamfered portion 17b of the swirling flow forming body 1, and the swirling flow forming body 1 is fixed. According to this method, since the annular recess 51 and the raised portion 52 shown in FIG. 5 are not necessary, it is possible to perform caulking and fixing at low cost.
[0038]
7A and 7B show a second embodiment of the swirl flow forming body according to the present invention, in which FIG. 7A is a top view, FIG. 7B is a cross-sectional view taken along line H-H in FIG. (D) is a JJ line sectional view of (c), and (e) shows the case where the back surface of the swirl flow forming body is formed to be different from the back surface of the swirl flow forming body shown in (c). It is a bottom view.
[0039]
The swirling flow forming body 30 generates a swirling flow along the inner peripheral direction of the through hole 31 by ejecting air from the through hole 31 having a circular cross section penetrating from the front surface to the back surface and the inner peripheral side surface of the through hole 31. The first jet outlets 32a and 32b are provided, and the second jet outlets 33a to 33d are provided for jetting air from the surface of the swirl flow forming body 30 and generating upward flow upward. Further, as shown in FIGS. 7C and 7D, a first recess 35a that supplies air to the first jet ports 32a and 32b via the air passage 34 is provided on the back surface of the swirl flow forming body 30. , 35b and second recesses 37a to 37d for supplying air to the second jet outlets 33a to 33d via the air passage 36 are provided.
[0040]
FIG. 8 shows a gas levitation transfer device using the swirl flow forming body 30, wherein (a) is a cross-sectional view corresponding to the cross section taken along the line EE of FIG. 2 (b), and (b) is (a). It is the KK sectional view taken on the line. The base body 40 is provided on the back surface of the swirl flow forming body 30, a concave portion 41 that accommodates the swirling flow forming body 30, an air passage 42 that extends in the long axis direction of the base body 40 and conveys air supplied from a pump. An annular groove 43 having a circular shape in plan view for supplying air to the first and second recesses 35a to 37d (see FIG. 7C), and a through hole for conveying air from the air passage 42 to the annular groove 43 44.
[0041]
Although not illustrated, even when using a swirl flow forming member 30, similarly to the case shown in FIG. 2, a plurality of swirl flow forming member 30 with constituting a gas levitation transportation device is provided for two rows in the base body 40 A plurality of gas levitation transfer devices are arranged in parallel to constitute a transfer lane. Moreover, also about the arrangement | positioning method of the swirl | vortex flow formation body 30, it arrange | positions so that the swirl | vortex flow of the direction which the swirl | flow flow formation bodies 30 adjacent up and down and right and left may conflict may produce.
[0042]
Next, operations of the swirl flow forming body and the gas levitation transfer apparatus will be described with reference to FIGS.
[0043]
As shown in FIG. 8, the air supplied from the pump to the air passage 42 of the base body 40 is supplied to the annular groove 43 through the through hole 44, and the first recess 35 a of the swirling flow forming body 30 is transmitted from the annular groove 43. , 35b (see FIG. 7C), and is ejected from the first ejection ports 32a, 32b to the through hole 31 through the air passage 34. As a result, an upward swirling flow is generated above the flat plate portion 38 on the surface side of the swirling flow forming body 30 and an air flow in the back surface direction due to negative pressure is generated in the vicinity of the opening of the through hole 31. Further, the air supplied to the annular groove 43 is ejected from the second ejection ports 33a to 33d via the second recesses 37a to 37d and the air passage 36 (see FIG. 7C) and from the flat plate portion 38. An upward flow upward is generated.
[0044]
As shown in FIG. 9, even in the above case, in the region where the edge of the glass 3 overlaps with a part of the swirling flow forming body 30, the upward flow from the second ejection ports 33 a to 33 d is supplementary to the glass 3. The buoyancy is given, and the edge 3a and the outer edge 3b of the glass 3 are lifted. Therefore, as in the first embodiment, it is possible to avoid the edge 3a of the glass 3 from coming into contact with the base 40 or the opening end of the through hole 31, and to prevent the glass 3 from being damaged. .
[0045]
Incidentally, also in this embodiment, it is possible to use a gas-body other than air as a gas body, also, instead of the through hole 31, providing a circular cross section of the recess opening at the surface side of the swirling flow forming member 30 be able to. Further, the restriction of the air passage 35 communicating with the second ejection ports 33a to 33d may be omitted, and the swirl flow forming body 30 is caulked and joined in the same manner as shown in FIGS. You can also.
[Brief description of the drawings]
[0046]
1A and 1B are views showing a first embodiment of a swirling flow forming body according to the present invention, in which FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along line AA in FIG. Is a bottom view, (d) is a cross-sectional view taken along line BB of (c), and (e) is formed so that the back surface of the swirl flow forming body is different from the back surface of the swirl flow forming body shown in (c). It is a bottom view showing the case.
2A and 2B are views showing a first embodiment of a gas levitation transfer apparatus according to the present invention, in which FIG. 2A is a top view, FIG. 2B is an enlarged view of a region C in FIG. It is an enlarged view of the area | region D of (a).
3A is a cross-sectional view taken along line EE of FIG. 2B, and FIG. 3B is a cross-sectional view taken along line GG of FIG.
4 is a cross-sectional view taken along line FF in FIG. 2C, and is a cross-sectional view in a region where an edge portion of the conveyed object overlaps a part of a swirl flow forming body.
FIG. 5 is a cross-sectional view showing a case where the swirl flow forming body of FIG. 1 is caulked and joined to a recess of a base.
FIG. 6 is a cross-sectional view showing another example of caulking joining.
7A and 7B are diagrams showing a second embodiment of the gas levitation transfer apparatus according to the present invention, in which FIG. 7A is a top view, FIG. 7B is a cross-sectional view taken along the line H-H in FIG. Is a bottom view, (d) is a sectional view taken along line JJ of (c), and (e) is formed so that the back surface of the swirl flow forming body is different from the back surface of the swirl flow forming body shown in (c). It is a bottom view showing the case.
8A and 8B are views showing a second embodiment of the gas levitation transfer apparatus according to the present invention, in which FIG. 8A is a cross-sectional view corresponding to a cross section taken along line EE of FIG. ) Is a sectional view taken along line KK in FIG.
9 is a cross-sectional view corresponding to the cross section taken along line FF in FIG. 2 (c), and is a cross-sectional view in a region where the edge of the conveyed object overlaps a part of the swirl flow forming body.
FIG. 10 is a cross-sectional view showing a conventional non-contact conveyance device.
FIG. 11 is a top view showing a conventional non-contact conveyance device.
FIG. 12 is a cross-sectional view in a region where an edge of a conveyed object overlaps a part of a swirling flow forming body.
[Explanation of symbols]
[0047]
DESCRIPTION OF SYMBOLS 1 (1a, 1b) Swirling flow formation body 2 Base | substrate 3 Glass 3a Edge 3b Outer edge 10 Conveyance lane 11 Through-hole 12 Annular groove 13 Air passage 14 (14a, 14b) 1st jet port 15 Air passage 16 (16a-16d) ) Second jet port 17 (17a, 17b) Chamfered portion 18 Flat plate portion 20 Gas levitation transfer device 21 Recess 22 Air passage 23 Through hole 30 Swirl flow forming body 31 Through hole 32 (32a, 32b) First jet port 33 (33a to 33d) Second outlet 34 Air passage 35 (35a, 35b) First recess 36 Air passage 37 (37a to 37d) Second recess 38 Flat plate portion 40 Base body 41 Recess 42 Air passage 43 Annular groove 44 Through-hole 51 Annular recess 52 Embossed part 53 Jig 53a Tip part 55 Jig 55a Annular blade

Claims

A hole having a circular cross section that opens at least on the surface side;
A first air body spout causing a swirling flow by jetting a gas body from the inner circumferential surface of the hole,
Gas floating carrying swirl flow forming member, characterized in that it comprises a second air body spout for spouting air body upward from the surface.

Gas floating carrying swirl flow forming member according to claim 1, wherein providing a plurality of the second air body spout around the opening of the hole.

Gas floating carrying swirl flow forming member according to claim 1 or 2, characterized by providing the aperture care body passage for transporting the gas material to the second air body spout.

A circular cross section of the holes opening at least on the surface side, a first air body spout causing a swirling flow by jetting a gas body from the inner circumferential surface of the hole, the air body upward from the surface the swirl flow forming member and a second air body spout for ejecting gas levitation transportation device, characterized in that it comprises a conveying surface of the substrate.

The swirl flow forming member has a circular shape in plan view of the groove which communicates with the on the back first and second air body spout, the base is provided with a gas-supplying port communicating with the groove in the conveying surface, gas levitation transportation device according to claim 4, the gas body in the groove through the air-supplying port, characterized in that it is supplied.

Said substrate is provided with a groove of circular shape in plan view to the conveying surface, the swirl flow forming member includes a first air body passage communicating with said groove and said first air body spout, said groove and said second and a second air body passage communicating with the second air body spout to claim 4, characterized in that the air body is supplied to the first and second air fluid path through said groove The gas levitation conveyance apparatus described.

The gas levitation transport apparatus according to claim 4, 5 or 6, wherein the swirl flow forming body is accommodated in a recess formed on a transport surface of the base body.

7. The swirling flow forming body is housed in a recess formed on the transport surface of the base, and the swirling flow forming body is crimped and joined by deforming an inner peripheral side surface of the recess. The gas levitation conveyance apparatus as described in 2.

A plurality of the swirl flow forming bodies are arranged in each row in two rows on the base body, and each swirl flow forming body belonging to one row and each swirl flow forming body belonging to the other row are arranged. The gas levitation transport apparatus according to claim 4, wherein the directions of the swirl flows are different from each other.