JP5401198B2 - Insertion light source device - Google Patents

Description

The present invention relates to insert the light source device, in particular, of a preferred insert light source device for applying such to a storage ring and synchrotron radiation ring.

  There is a technique for generating radiation light by applying acceleration to a charged particle beam such as an electron beam and a positron in a beam traveling direction and a direction perpendicular thereto. In order to apply periodic motion to the charged particle beam, an insertion light source device is installed on the beam trajectory of a beam duct (vacuum duct) through which the charged particle beam passes. A magnetic field is generated by a deflecting electromagnet device provided in the insertion light source device to deflect the charged particle beam passing through the beam duct and generate radiated light. There is a technique of generating a stronger magnetic field and generating short-wavelength radiation by using a wiggler as an insertion light source device.

  FIG. 1 is a conceptual diagram showing an example of a conventional wiggler used as an insertion light source device. The wiggler has a first deflection electromagnet device 2A, a second deflection electromagnet device 1 and a third deflection electromagnet device 2B along a straight portion of a beam duct (not shown). The first deflecting electromagnet apparatus 2A generates a magnetic field that deflects an incident charged particle beam. The second bending electromagnet apparatus 1 is provided for the purpose of generating radiated light, and generates a strong magnetic field. The third deflection electromagnet apparatus 2B generates a magnetic field in the same direction as the first deflection electromagnet apparatus 2A, deflects the charged particle beam, and returns the beam trajectory to the ring orbit.

  The charged particle beam incident on the wiggler is deflected by the magnetic field generated by the first deflecting electromagnet apparatus 2A, deflected in the reverse direction by a strong magnetic field when passing through the second deflecting electromagnet apparatus 1, and further the third deflection The light enters the electromagnet device 2B, is deflected in the opposite direction to the second deflection electromagnet device 1, and is emitted. As a result, the charged particle beam passing through the wiggler travels along the beam trajectory 3 shown in FIG. By strengthening the magnetic field generated by the second bending electromagnet apparatus 1, strong radiated light can be obtained. Japanese Patent Application Laid-Open No. 5-74594 discloses a technique that employs a C-shaped deflection electromagnet device as the second deflection electromagnet device 1.

JP-A-5-74594

  For example, it is conceivable to use a C-shaped bending electromagnet apparatus 1A as shown in FIGS. 2 and 3 as the second bending electromagnet apparatus 1 provided for the purpose of generating radiated light. FIG. 2 is a longitudinal sectional view including the support member center and the coil symmetry axis of the second bending electromagnet apparatus 1A. The deflection electromagnet apparatus 1A includes main poles 11A and 11B, coils 4A and 4B for generating a magnetic field, and a yoke 5 made of a magnetic material for attaching the main poles 11A and 11B. The main pole 11A is disposed above the main pole 11B. As shown in FIG. 2, the yoke 5 has a C-shape when viewed from the beam traveling direction. A magnetic field (line of magnetic force 6) is generated between the main pole 11A and the main pole 11B by the magnetomotive force generated by the coils 4A and 4B. This magnetic field forms a closed magnetic circuit via the yoke 5. FIG. 3 shows a conceptual diagram of the deflection electromagnet apparatus 11 viewed from a direction perpendicular to the deflected beam trajectory 3. 3 forms a closed-loop magnetic circuit that passes through the main poles 11A and 11B via the yoke 5. Since the deflection magnetic field generated between the main pole 11A and the main pole 11B is unidirectional, the magnetic field distribution in the deflected beam trajectory 3 direction has a wide distribution in the deflection trajectory direction.

  In such a deflection electromagnet apparatus 1A, when a charged particle beam is incident on a gap formed between the main pole 11A and the main pole 11B when emitting radiated light, the beam trajectory 3 is operated by the action of the main poles 11A and 11B. The beam trajectory of the charged particle beam is deflected by the magnetic field generated above. In this case, since the distribution of the deflection magnetic field generated by the main poles 11A and 11B in the deflection trajectory direction is wide, the deflection trajectory greatly deviates from the ring trajectory. On the other hand, when the radiant light is not emitted, the deflecting electromagnet apparatus 11 is not excited, and the charged particle beam passes through the ring orbit without being deflected. For this reason, it is necessary to configure the vacuum duct in consideration of the beam trajectory of the deflected charged particle beam and the beam trajectory when the charged particle beam is not deflected, and the vacuum duct may be increased in size.

An object of the present invention is to provide a insert light source device that can downsize.

A feature of the present invention that achieves the above-described object includes a first deflection electromagnet device, a second deflection electromagnet device, and a third deflection electromagnet device.
The first deflection electromagnet device, the second deflection electromagnet device, and the third deflection electromagnet device are arranged in this order in the traveling direction of the charged particle beam,
A first deflection electromagnet device and a third deflection electromagnet device are disposed adjacent to the second deflection electromagnet device;
The second bending magnet device is
A magnetic first yoke and a magnetic second yoke disposed below the first yoke and connected to the first yoke by a nonmagnetic support member;
The first yoke includes a first return pole, a first main pole, and a second return pole. The second yoke includes a third return pole, a second main pole, and a fourth return pole.
A first coil for generating a magnetic field is provided on the first main pole, a second coil for generating a magnetic field is provided on the second main pole,
The first return pole, the second return pole, the third return pole and the fourth return pole are not provided with a coil,
The first return pole and the third return pole face each other, the first main pole and the second main pole, and the second return pole and the fourth return pole face each other with a gap through which the charged particle beam passes. Arranged
It has a configuration .

The first return pole and the third return pole are the first main pole provided with the first coil, the second main pole provided with the second coil, and the second return pole and the fourth return pole are charged particles, respectively. Since they are arranged facing each other with a gap through which the beam passes, the deflection magnetic field region can be narrowed and the deviation of the deflection trajectory from the ring trajectory can be reduced. For this reason, the second bending electromagnet device can be reduced in size.

  Preferably, the first main pole is disposed between the first return pole and the second return pole in the traveling direction of the charged particle beam, and the second main pole is disposed in the third return pole in the traveling direction of the charged particle beam. And a fourth return pole. As a result, the magnet system is symmetric with respect to the first main pole, so that the manufacturability including the first and third deflection electromagnet devices is improved.

  According to the present invention, the deflection electromagnet device can be reduced in size.

It is the conceptual diagram which looked at the arrangement | positioning of the conventional wiggler which is a kind of insertion light source device and comprised from 3 poles from the upper direction. It is the block diagram seen from the deflection | deviation track | orbit direction of the 2nd conventional bending electromagnet apparatus. It is the block diagram seen from the direction perpendicular | vertical to the deflection | deviation track | orbit of the bending electromagnet apparatus shown in FIG. It is a perspective view of the insertion light source device which is one suitable Example of this invention. It is the block diagram seen from the direction perpendicular | vertical to the deflection | deviation track | orbit of the 2nd bending electromagnet apparatus shown in FIG. It is the block diagram seen from the deflection | deviation track | orbit direction of the 2nd bending electromagnet apparatus shown in FIG. It is a bird's-eye view of the 2nd bending electromagnet apparatus shown in FIG. It is a characteristic view which shows the change of the magnetic field intensity with respect to the distance from the magnetic field center of a 2nd bending magnet apparatus. FIG. 5 is a characteristic diagram showing a change in magnetic field strength with respect to a distance from the magnetic field center of the second deflection electromagnet apparatus when a third deflection electromagnet apparatus is provided together with the second deflection electromagnet apparatus shown in FIG. 4. FIG. 10 is an explanatory diagram showing a deviation of the deflection trajectory from the ring trajectory due to the magnetic field shown in FIG. 9 in the second deflection electromagnet apparatus shown in FIG. 4. It is a figure which shows the magnetic field analysis result of the magnetic field strength with respect to the distance from the magnetic field center of this 2nd deflection | deviation electromagnet apparatus in the case where the 3rd deflection | deviation electromagnet apparatus is also attached to the conventional 2nd deflection | deviation electromagnet apparatus shown in FIG. . It is explanatory drawing which shows the shift | offset | difference from the ring orbit of the beam orbit by the magnetic field shown in FIG. 11 in the 2nd conventional bending electromagnet apparatus shown in FIG.

  Embodiments of the present invention will be described below with reference to the drawings.

  An insertion light source device according to a preferred embodiment of the present invention will be described with reference to FIGS. 4, 5, 6 and 7. The insertion light source device of the present embodiment is provided, for example, in a synchrotron radiation light ring.

  As shown in FIG. 4, the insertion light source device 12 of this embodiment includes a first deflection electromagnet device 13, a second deflection electromagnet device 14, and a third deflection electromagnet device 15. A first deflecting electromagnet device 13, a second deflecting electromagnet device 14, and a third deflecting electromagnet in order from the upstream side in the traveling direction of the charged particle beam along a beam duct (not shown) through which the charged particle beam passes. A device 15 is arranged. The deflection electromagnet device 15 is installed on the beam trajectory and in the vicinity of the deflection electromagnet device 14 in order to return the charged particle beam bent by the deflection electromagnet device 14 to the ring orbit after passing through the deflection electromagnet device 14. The deflection electromagnet device 13 is also preferably installed in the vicinity of the deflection electromagnet device 14 on the beam trajectory on the upstream side. The deflection electromagnet device 14 is a deflection electromagnet device for an accelerator.

  The deflection electromagnet devices 13 and 15 have the same components. The deflection electromagnet device 13 includes a pair of annular coils 10 </ b> A and 10 </ b> B and a C-shaped yoke 16. The C-shaped yoke 16 has an upper yoke 16A and a lower yoke 16B disposed below the upper yoke 16A. A side pole 2A is provided at the end of the upper yoke 16A and extends downward. A side pole 2B is provided at the end of the lower yoke 16B and extends upward. A gap is formed between the lower end of the side pole 2A and the upper end of the side pole 2B. A coil 10A surrounds the side pole 2A and is installed on the side pole 2A. A coil 10B surrounds the side pole 2B and is installed on the side pole 2B.

  The deflection electromagnet device 15 has a pair of annular coils 10 </ b> C and 10 </ b> D and a C-shaped yoke 17. The C-shaped yoke 17 has an upper yoke 17A and a lower yoke 17B disposed below the upper yoke 17A. A side pole 2C is provided at the end of the upper yoke 17A and extends downward. A side pole 2D is provided at the end of the lower yoke 17B and extends upward. A gap is formed between the lower end of the side pole 2C and the upper end of the side pole 2D. A coil 10C surrounds the side pole 2C and is installed on the side pole 2C. A coil 10D surrounds the side pole 2D and is installed on the side pole 2D.

  The side poles 2A, 2B, 2C, 2D are made of a magnetic material. The coils 10 </ b> A and 10 </ b> B are coils for generating a magnetomotive force of the deflection electromagnet device 13, and the coils 10 </ b> C and 10 </ b> D are coils for generating a magnetomotive force of the deflection electromagnet device 15. The yokes 16 and 17 are made of a magnetic material in order to guide magnetic field lines generated by the corresponding coils.

  The deflection electromagnet device 14 will be specifically described with reference to FIGS. 5, 6, and 7. The deflection electromagnet device 14 includes main poles 11A, 11B, coils 4A, 4B, return poles 7A, 7B, 7C, 7D, a support member 8, and connecting members 9A, 9B. The main poles 11A, 11B, the return poles 7A, 7B, 7C, 7D and the connecting members 9A, 9B are magnetic bodies, and the support member 8 is a non-magnetic body. A connecting member 9A extending in the horizontal direction is provided at the upper end portion of the support member 8, and a connecting member 9B extending in the horizontal direction is disposed below the connecting member 9A and provided at the lower end portion of the supporting member 8.

  As shown in FIG. 5, the return pole 7A, the main pole 11A, and the return pole 7B are sequentially arranged in this order from the upstream side in the beam traveling direction (beam trajectory 3), and are fixed in contact with the connecting member 9A. The return pole 7A, the main pole 11A, and the return pole 7B extend downward from the connecting member 9A. Also, the return pole 7C, the main pole 1B, and the return pole 7D arranged below the return pole 7A, the main pole 11A, and the return pole 7B are arranged in this order from the upstream side in the beam traveling direction (beam trajectory 3). , Fixed in contact with the connecting member 9B. The return pole 7C, the main pole 1B, and the return pole 7D extend upward from the connecting member 9B.

  The lower end of the return pole 7A faces the upper end of the return pole 7C, and the lower end of the main pole 11A faces the upper end of the main pole 1B. The lower end of the return pole 7B faces the upper end of the return pole 7B. Gaps are formed between the return pole 7A and the return pole 7C, between the main pole 11A and the main pole 11B, and between the return pole 7B and the return pole 7D, respectively.

  The main pole 11A, the first return pole 7A, the second return pole 7B, and the connecting member 9A constitute one yoke (first yoke) of the deflection electromagnet device 14, and the main pole 11B, the first return pole 7C, and the second return The pole 7D and the connecting member 9B constitute another yoke (second yoke) of the bending electromagnet device 14. The first yoke and the second yoke each have three convex portions (one main pole and two return poles) across a gap through which the charged particle beam passes, and are arranged facing each other up and down through the gap. Has been. Since the deflection electromagnet device 14 includes the first yoke and the second yoke, the magnetic force generated by the coils 4A and 4B can be efficiently extracted (guided) in a desired direction.

  An annular coil 4A surrounds the main pole 11A and is installed on the main pole 11A. Similarly, an annular coil 4B surrounds the main pole 11B and is installed on the main pole 11B. The winding directions of the coils 4A and 4B are the same, and currents flow through the coils 4A and 4B in the same direction. By exciting these coils 4A and 4B, a magnetic field is generated in the deflection electromagnet device 14. As shown in FIG. 6, the deflection electromagnet apparatus 14 is C-shaped when viewed from the incident direction of the charged particle beam to the deflection electromagnet apparatus 14 (as viewed from the deflection electromagnet apparatus 13 arranged on the upstream side in the beam traveling direction). Has the shape of a mold. The deflecting electromagnet device 14 can be made C-shaped to reduce the installation space compared to the H-shaped deflecting electromagnet. Further, when moving the deflection electromagnet 14 for maintenance or the like, it is not necessary to remove the vacuum duct including the beam trajectory of the charged particle beam. As described above, the nonmagnetic support member 8 connects the connecting member 9A and the connecting member 9B. Since the support member 8 is a non-magnetic material, the magnetic resistance is larger than that of the magnetic material (main pole, return pole and connecting member). For this reason, as will be described later, a magnetic circuit passing from the main pole to the return pole can be formed.

  In this embodiment, the first yoke is constructed by assembling the main pole 11A, the return poles 7A and 7B, and the connecting member 9A, which are separate members, but the first yoke may be configured by integrally molding these members. Good. The second yoke may also be configured by integrally molding the main pole 11B, the return poles 7C and 7D, and the connecting member 9B.

  The dimensions of the return poles 7A, 7B, 7C, and 7D are the same as the main pole with respect to any of the vertical deflection magnetic field direction and the horizontal (left-right) deflection magnetic field direction shown in FIG. The dimensions are the same as those of 11A and 11B. Thereby, the distribution of the vertical deflection magnetic field and the horizontal (left / right) magnetic field in FIG. 6 is substantially uniform in the deflection trajectory direction (direction perpendicular to the paper surface of FIG. 6). The return poles 7A, 7B, 7C, and 7D are preferably the same in size. When the sizes of the return poles 7A, 7B, 7C, and 7D are different, a difference occurs in the magnetic resistance of each return pole, and the strength of the magnetic field generated between the return pole 7A and the return pole 7C and the return pole 7B The strength of the magnetic field generated between the return poles 7D is different. For this reason, in order to return the charged particle beam trajectory to the ring trajectory, it is necessary to change the specifications of the deflection electromagnet device 13 and the deflection electromagnet device 15. By making the sizes of the return poles 7A, 7B, 7C, and 7D the same, such a problem can be solved, and the specifications of the deflection electromagnet device 13 and the deflection electromagnet device 15 can be made the same.

  An annular beam duct (vacuum duct) (not shown) provided in the synchrotron radiation ring through which the charged particle beam passes is provided between the side pole 2A and the side pole 2B, and between the return pole 7A and the return pole 7C. Between the main pole 11A and the main pole 11B, between the return pole 7B and the return pole 7D, and between the side pole 2C and the side pole 2D.

  The operation of the bending electromagnet device 14 in the insertion light source device 12 of this embodiment will be described.

  A magnetomotive force is generated by applying a coil current to the coil 4A, and passes through the main pole 11A, the connecting member 9A, and the return pole 7A in this order (or in the reverse order) as described in FIGS. A magnetic field (line of magnetic force 6) and a magnetic field (line of magnetic force 6) that passes through the main pole 11A, the connecting member 9A, and the return pole 7B in this order (or vice versa) are generated. A magnetomotive force is generated by applying a coil current to the coil 4B, and a magnetic field (line of magnetic force 6) that passes through the return pole 7C, the connecting member 9B, and the main pole 11B in this order (or vice versa), and the return pole 7D, the connection Magnetic fields (lines of magnetic force 6) that pass through the member 9B and the main pole 11B in this order (or vice versa) are respectively generated. Since the supporting member 8 that connects the connecting member 9A and the connecting member 9B is made of a non-magnetic material, the magnetic resistance is a magnetic material (main poles 11A, 11B, return poles 7A, 7B, 7C, 7D and connecting member 9A). , 9B). The magnetic circuit is closed by a magnetic path with a small magnetic resistance. For this reason, the magnetic resistance of the magnetic path passing from the main pole to the return pole is smaller than that of the magnetic path passing from the main pole to the support member 8 which is a non-magnetic material. A circuit is formed.

  When a coil current is passed through the coils 4A and 4B, as shown in FIG. 5, a return magnetic field opposite to the deflection magnetic field generated in the main poles 11A and 11B is generated between the return pole 7A and the return pole 7C, and Each is generated between the return pole 7B and the return pole 7D. Since the main pole and the return pole are connected by a magnetic connecting member, a closed magnetic circuit that connects the main pole 11A, the return pole 7A, the return pole 7C, the main pole 11B, and the main pole 11A in this order, and Closed magnetic circuits that connect the main pole 11A, the return pole 7B, the return pole 7D, the main pole 11B, and the main pole 11A in this order are formed.

  In FIG. 6, among the magnetic force lines 6, 6A indicated by solid arrows pass through the main poles 11A and 11B, 6B indicated by dotted arrows pass through the return poles 7A and 7C, and return poles 7B and 7D. Magnetic field lines. Since the support member 8 that connects the first yoke and the second yoke is a non-magnetic material, it is difficult to form a magnetic path via the support member 8 as described above.

When the synchrotron radiation ring is activated, the charged particle beam accelerated by the synchrotron (accelerator) goes around in the annular beam duct. In inserting the light source device 12, when not emit emitted light does not pass the coil 10 A, 10 B, 4A, current to 4B, 10 C and 10 D. For this reason, the charged particle beam passes through the annular beam duct along the ring trajectory. When releasing radiation, coils 10 A, 10 B, 4A, are respectively energized 4B, 10 C and 10 D. When the coils 10 A and 10 B are energized, a magnetic field is generated in the deflection electromagnet apparatus 13, and the charged particle beam passing through the beam duct is deflected by the deflection electromagnet apparatus 13. A magnetic field is generated in the deflection electromagnet device 14 by the energized coils 4A and 4B, and the two magnetic circuits described above are formed. The charged particle beam deflected by the deflecting electromagnet device 13 and passing through the beam duct is deflected again by the formation of these magnetic circuits, and emitted light is emitted by the deflecting electromagnet device 14. A magnetic field is generated in the deflecting electromagnet apparatus 15 by the energized coils 10 C and 10 D. The deflection electromagnet device 15 deflects the charged particle beam that has passed through the deflection electromagnet device 14 and returns it to the ring orbit.

  A magnetic field analysis result for the second bending electromagnet apparatus is shown in FIG. The horizontal axis represents the distance on the deflection trajectory along the deflected beam trajectory 3 in the second deflection electromagnet apparatus with the magnet center O as a base point. In the magnetic field analysis, the magnetic field on the deflection trajectory is approximated by the one-dimensional magnetic field on the central axis of the deflection electromagnet apparatus 14. The vertical axis represents a vertical magnetic field that acts on charged particles by the second bending electromagnet apparatus. FIG. 8 also shows the magnetic field distribution in the conventional bending electromagnet apparatus 1A (see FIG. 2) that does not include a return pole, in addition to the magnetic field distribution in the bending electromagnet apparatus 14 used in this embodiment. . The magnetic field distribution in the deflection electromagnet apparatus 14 is represented as “with return pole”, and the magnetic field distribution in the deflection electromagnet apparatus 1A is represented as “without return pole”. In “with return pole”, the region in which the vertical magnetic field is positive is suppressed to a narrower region than in “without return pole”, and the region in which the vertical magnetic field is negative is expanded. To make the beam direction the same before and after the deflection of the beam trajectory, the magnetic field curve in the region where the vertical magnetic field is positive and the area surrounded by the vertical and horizontal axes and the magnetic field curve and the horizontal axis in the region where the vertical magnetic field is negative The areas surrounded by are required to coincide with each other, and the deficient negative vertical magnetic field region is generated and compensated by the third bending magnet.

  In order to show the deviation of the specific deflection trajectory from the ring trajectory, a magnetic field distribution obtained by applying a magnetic field (about 1 T assuming a normal conducting magnet) by a virtual third deflecting electromagnet apparatus is represented by the magnet center O. As a base point, it shows in FIG.9 and FIG.11. FIG. 9 shows the magnetic field distribution in the deflection electromagnet apparatus 14 provided with the return pole, and FIG. 11 shows the magnetic field distribution in the deflection electromagnet apparatus 1A not provided with the return pole. FIG. 10 shows the deviation of the deflection trajectory from the ring trajectory due to the magnetic field distribution shown in FIG. 9 occurring in the deflection electromagnet apparatus 14 with the magnet center O as a base point. FIG. 12 shows the deviation of the deflection trajectory from the ring trajectory due to the magnetic field distribution shown in FIG. 11 that occurs in the deflection electromagnet apparatus 1A, with the magnet center O as a base point.

  10 and 12, the deflection electromagnet apparatus 14 can reduce the deviation of the deflection trajectory from the ring orbit by about 30%, and further, the magnetic field generated by the third deflection electromagnet apparatus, that is, the deflection electromagnet apparatus 15. It has been found that the area can be reduced by about 30%. Reduction of the magnetic field region by the deflecting electromagnet device 15 leads to miniaturization of the deflecting electromagnet device 15 used in this embodiment. Here, the deflection electromagnet device 15 is considered, but the deflection electromagnet device 13 arranged symmetrically with the deflection electromagnet device 15 with respect to the magnet center O of the deflection electromagnet device 14 may be considered. When the deflection electromagnet device 13 is considered, the same effect as the deflection electromagnet device 15 is produced. In order to narrow the positive vertical magnetic field region, there is a method of reducing the thickness of the main poles 11A and 11B and the coils 4A and 4B of the second deflection circular magnet device in the beam trajectory direction, but the coil winding radius is small. In addition to manufacturing problems, the coil cross-sectional area is reduced, and the current density is increased.

  In this embodiment, a magnetic first yoke and a magnetic second yoke disposed below the first yoke are connected by a nonmagnetic support member, and the first yoke is a first return pole, a first return pole, and a first return pole. The main pole and the second return pole are included, the second yoke includes the third return pole, the second main pole and the fourth return pole, and the first return pole and the third return pole are the first main pole. Since the pole and the second main pole, and the second return pole and the fourth return pole are arranged to face each other, a magnetic field in the opposite direction is generated on the deflection trajectory of the charged particle beam. That is, the direction of the magnetic field generated in the gap formed between the main pole 11A and the main pole 11B (the region through which the charged particle beam passes) is between the return pole 7A and the return pole 7C as the first return pole. The direction of the magnetic field generated in the gap formed in (the region through which the charged particle beam passes) and the gap formed between the return pole 7B and the return pole 7D that are the second return poles (the charged particle beam passes) In a direction opposite to the direction of the magnetic field generated in the region). For this reason, the positive vertical magnetic field region for deflecting charged particles can be narrowed. Thereby, the difference (distance) between the deflection trajectory and the ring trajectory of the charged particle beam can be shortened, and the overall size of the deflection electromagnet device 14 can be reduced. Since the deflection electromagnet device 14 can reduce the deviation of the deflection trajectory of the charged particle beam from the ring trajectory, the vacuum duct including the ring trajectory can be reduced in size. In addition, the size of the deflection electromagnet devices 13 and 15 disposed adjacent to the deflection electromagnet device 14 can be reduced. As a result, the insertion light source device 12 having the deflection electromagnet devices 13, 14, and 15 is reduced in size.

  According to the present embodiment, the deflection electromagnet device 14 can be reduced in size, so that a necessary installation space for the electromagnet device can be suppressed. Also, the cooling system for the vacuum duct can be reduced in size.

  According to this embodiment, since the main poles 11A and 11B of the deflection electromagnet device 14 can be reduced, the capacity of the refrigerator required for the deflection electromagnet device 14 can be reduced, and the deflection electromagnet device 14 is started up and shut down. Can be shortened. For example, in the deflection electromagnet device 14 in which the coils 4A and 4B are superconducting coils, the main poles 11A and 11B can be made smaller so that a device to be cooled (for example, a superconducting coil) can be configured smaller than the conventional one. The capacity of the refrigerator that cools the cooling refrigerant (for example, helium) can be reduced. Moreover, in the deflection electromagnet apparatus 14 having a normal conducting magnet, a cooling system for cooling Joule heat generated by normal conduction can be simplified.

  When the coils 4A and 4B of the deflection electromagnet device 14 have a racetrack shape, the main poles 11A and 11B and the coils are arranged so that the longitudinal direction of the main poles 11A and 11B is parallel to the longitudinal direction of the linear portion of the racetrack shape. It is better to arrange 4A and 4B. With such a configuration, the magnetic field in the region through which the charged particle beam passes between the main pole 11A and the main pole 11B can be made more uniform. Thereby, the loss of a charged particle beam can also be suppressed low.

  The present invention can be applied to a bending electromagnet apparatus.

  2A, 2B, 2C, 2D ... side pole, 3 ... beam trajectory, 4A, 4B, 1A, 10B, 10C, 10D ... coil, 7A, 7B, 7C, 7D ... return pole, 8 ... support member, 9A, 9B ... 11A, 11B ... main pole, 12 ... insertion light source device, 13 ... first deflection electromagnet device, 14 ... second deflection electromagnet device, 15 ... third deflection electromagnet device, 16, 17 ... yoke.

Claims (4)

A first deflection electromagnet device, a second deflection electromagnet device, and a third deflection electromagnet device;
The first deflection electromagnet device, the second deflection electromagnet device, and the third deflection electromagnet device are arranged in this order in the traveling direction of the charged particle beam,
The first deflection electromagnet device and the third deflection electromagnet device are disposed adjacent to the second deflection electromagnet device;
The second bending magnet device is
A magnetic first yoke, and a magnetic second yoke disposed below the first yoke and connected to the first yoke by a nonmagnetic support member;
The first yoke includes a first return pole, a first main pole, and a second return pole; and the second yoke includes a third return pole, a second main pole, and a fourth return pole;
A first coil for generating a magnetic field is provided on the first main pole, and a second coil for generating a magnetic field is provided on the second main pole;
The first return pole, the second return pole, the third return pole, and the fourth return pole are not provided with a coil,
The first return pole and the third return pole, the first main pole and the second main pole, and the second return pole and the fourth return pole respectively have gaps through which the charged particle beam passes. It is arranged to face each other
An insertion light source device characterized by having a configuration . The first main pole is disposed between the first return pole and the second return pole in the traveling direction of the charged particle beam, and the second main pole is disposed in the traveling direction of the charged particle beam. The insertion light source device according to claim 1, wherein the insertion light source device is disposed between a third return pole and the fourth return pole. The first coil surrounds the first main pole, the second coil surrounds the second main pole, and the first coil and the second coil have the same direction of current flow. The insertion light source device according to claim 1 or 2. The first coil and the second coil are racetrack coils;
The straight part of the race track of the first coil is arranged so as to be parallel to the side surface in the horizontal direction of the first main pole,
4. The insertion light source device according to claim 3, wherein the straight portion of the race track of the second coil is disposed so as to be parallel to a side surface of the second main pole in the horizontal direction in the horizontal direction.

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