JP5373691B2 - Dry vacuum pump device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dry vacuum pump device enabling miniaturization of the entire device by cooling with a high efficiency cooling means with a cooling liquid large current circuit component parts of a large self heat generation amount represented by an switching element constituting an inverter in a dry vacuum pump device driven by an inverter. <P>SOLUTION: The dry vacuum pump device converts an alternating current power from an alternating current power source 19 to a direct current power of a predetermined voltage via a rectifier 13 and a DC/DC conversion circuit 16, and converts the same to an alternating current power of a predetermined frequency with an inverter 17 for supplying the same to an electric motor 11 for driving a dry vacuum pump 12. It comprises an electric equipment enclosure 21 for storing the entire control electronic circuit including the inverter 17, a pump enclosure 22 for storing the dry vacuum pump 12 and operation monitoring sensors, and a liquid cooling partition wall 23 disposed betwen the electric equipment enclosure 21 and the pump enclosure 22 for circulation of a cooling liquid in the inside for providing an enclosure 24 integrally. <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a dry vacuum pump device, and more particularly to a dry vacuum pump device having a small size and a cooling structure.

  In recent years, dry vacuum pump devices that can operate from atmospheric pressure and can easily obtain a clean vacuum environment have been used in a wide range of fields such as semiconductor manufacturing facilities. In many cases, an inverter is used as a power supply device that supplies driving power to a driving motor that drives a pump of such a dry vacuum pump device. There are several reasons for this, and one of them is that the frequency of the drive power supplied to the drive motor is made higher than the commercial frequency with an inverter, so that the motor speed is increased and the exhaust performance of the vacuum pump. In order to obtain a vacuum with a predetermined degree of vacuum with a vacuum pump device using a smaller driving motor.

  In addition, when the desired vacuum level is reached by the operation of the vacuum pump and the load becomes very light, the output terminal voltage is controlled so that the drive motor can be operated with high efficiency, and the rotation speed This is because it is easy to control.

  The inverter device includes a semiconductor switching element inside and can output an output voltage having a frequency different from the frequency of the input voltage by an AC / DC / AC conversion circuit. Since the switching element itself generates heat due to the internal loss of the element itself, it is necessary to provide an appropriate cooling device.

  In a conventional dry vacuum pump device that uses an inverter as a power supply device for a driving motor, the internal switching element is cooled by an air cooling structure using natural or forced circulation of the inverter device. Moreover, as what conventionally employ | adopted the water cooling type for cooling of the dry vacuum pump, there exists what was disclosed by patent document 1, for example. Here, a water cooling pipe is provided below the fixed portion of the motor housing of the vacuum pump to circulate the cooling liquid so as to efficiently cool the pump internal substrate.

JP 2003-269369 A

  However, the air cooling structure for cooling the internal switching elements by the air cooling structure by natural atmospheric circulation or forced circulation of the inverter device has a large structure because the cooling efficiency is low, and the dry vacuum pump device as a whole can be downsized. It was an obstacle. In addition, the water-cooled type also only cools a part of the dry vacuum pump with a cooling liquid, and does not efficiently cool the vacuum pump device as a whole.

  The present invention has been made in view of the above points. In a dry vacuum pump apparatus having an inverter and supplying AC power from the inverter to an electric motor that drives the dry vacuum pump, the switching element that constitutes the inverter is provided. An object of the present invention is to provide a dry vacuum pump device capable of downsizing the entire device by cooling a representative large current circuit component having a large self-heating amount by a high-efficiency cooling means using a coolant such as cooling water. To do.

In order to solve the above problems, the present invention includes an inverter and a dry vacuum pump, converts AC power from an AC power source into AC power of a predetermined frequency by the inverter, and supplies the AC power to an electric motor that drives the dry vacuum pump. In the constructed dry vacuum pump apparatus, an electrical enclosure containing the entire control electronic circuit including the inverter, a dry vacuum pump comprising a pump part and a motor part, and a pump containing sensors for monitoring the operation of the dry vacuum pump A liquid-cooled partition wall in which the coolant circulates is interposed between the enclosure and the electrical enclosure and the pump enclosure to constitute an integral enclosure . The electrical enclosure is cooled by the coolant circulating in the liquid-cooled partition wall, and the pump enclosure The pump part and liquid cooling partition of the dry vacuum pump stored in the Characterized by being configured not to touch.

In the dry vacuum pump apparatus according to the present invention, the flow path of the cooling liquid supplied to the integral enclosure first supplies the cooling liquid to the liquid cooling partition wall, and the cooling liquid flowing out from the liquid cooling partition wall is supplied to the dry vacuum pump. The cooling liquid flow path is configured to supply in the order from the motor section to the pump section and to cool in the order in which the cooling liquid is supplied.

In the dry vacuum pump apparatus according to the present invention, the electrical enclosure is mounted on a liquid-cooled partition wall .

In the dry vacuum pump apparatus according to the present invention, the liquid cooling partition is fixedly installed on a frame constituting the outer peripheral partition of the pump portion of the dry vacuum pump housed in the pump enclosure.

The present invention relates to an electrical enclosure that houses the entire control electronic circuit including the inverter, a dry vacuum pump that includes a pump unit and a motor unit, and a pump enclosure that houses sensors for monitoring the operation of the dry vacuum pump, A liquid-cooled partition that circulates the coolant between the enclosure and the pump enclosure is interposed to form an integral enclosure . The electrical enclosure is cooled by the coolant circulating in the liquid-cooled partition and is stored in the pump enclosure. Since the pump part of the dry vacuum pump and the liquid-cooled partition are not in direct contact with each other , circulating the coolant in the liquid-cooled partition can provide an endothermic effect and can cool the interior of the electrical enclosure with high efficiency. The overall size of the dry vacuum pump device can be reduced.

Further, according to the present invention, the cooling liquid supplied to the enclosure is first supplied to the liquid cooling partition, and the cooling liquid exiting from the liquid cooling partition is supplied in order from the motor unit of the dry vacuum pump to the pump unit . Since the cooling flow path that cools in the order of supply is configured, by supplying the cooling liquid, the control electronic circuit including the inverter is first cooled, and then the motor unit and the pump unit of the dry vacuum pump are cooled. It is possible to provide a small dry vacuum pump device that can efficiently cool the whole.

Further, according to the present invention, since the electrical enclosure is mounted on the liquid-cooled partition wall, a heat generating electronic component including a switching element constituting the inverter housed in the electrical enclosure is obtained by circulating the coolant through the liquid-cooled partition wall. It can be cooled efficiently.

Further, according to the present invention, since the liquid cooling partition is fixed to the frame constituting the outer peripheral partition of the pump part of the dry vacuum pump housed in the pump enclosure, temperature absorption from the pump part of the dry vacuum pump is minimized. Therefore, it is possible to suppress the accumulation of deposits on the inner wall surface of the pump unit .

It is a figure which shows the system structural example of the dry vacuum pump which concerns on this invention. It is a figure which shows the conceptual structural example of the cooling structure of the dry vacuum pump which concerns on this invention. It is a figure which shows the cooling structure of the electronic component and apparatus accommodated in an electrical equipment enclosure.

  Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a block diagram showing a system configuration example of a dry vacuum pump apparatus according to the present invention. As shown in the figure, the dry vacuum pump apparatus includes a power supply unit 10 including a rectifier 13, a smoothing capacitor 14, a DC circuit 15, a DC / DC conversion circuit 16, and an inverter 17, a dry vacuum pump 12, an electric motor 11, and a control circuit. A portion 18 is provided. The AC power from the AC power source 19 is converted into DC power by the rectifier 13, and the DC power is converted into DC power of a predetermined voltage by the DC / DC conversion circuit 16 based on the control by the control circuit unit 18, and is supplied to the inverter 17. Supply. In the inverter 17, the DC power from the DC / DC conversion circuit 16 is converted into AC power having a predetermined frequency and supplied to the motor 11 that drives the dry vacuum pump 12, whereby the motor 11 rotates and drives the dry vacuum pump 12. drive.

  In the dry vacuum pump apparatus having the above system configuration, when the dry vacuum pump 12 is operated, the rectifier constituting the rectifier 13, the smoothing capacitor 14 constituting the DC circuit 15, the switching element constituting the DC / DC conversion circuit 16, and the inverter 17 When the driving power of the electric motor 11 is output, the switching elements and the like constituting the heat generation. Heat is also emitted from the dry vacuum pump 12 and the electric motor 11. This dry vacuum pump apparatus is a dry vacuum pump apparatus that includes a small cooling structure that can efficiently absorb and cool the heat generated from the switching elements, electronic components, and electronic equipment, and that can downsize the entire apparatus.

  FIG. 2 is a diagram showing a conceptual configuration example of the cooling structure of the dry vacuum pump. In FIG. 2, 21 is an electrical enclosure, and 22 is a pump enclosure. A liquid-cooled partition wall 23 is interposed between the electrical enclosure 21 and the pump enclosure 22 to constitute an integral enclosure 24.

In the electrical enclosure 21, a rectifying element constituting the rectifier 13, a smoothing capacitor 14 constituting the DC circuit 15, a switching element constituting the DC / DC conversion circuit 16, a switching element constituting the inverter 17, and a control circuit unit 18 are constituted. Components that generate heat, such as electronic components, are housed, and in the pump enclosure 22, two dry vacuum pumps 12-1 and 12-2 and operations of the dry vacuum pumps 12-1 and 12-2 are stored. Monitoring sensors (not shown) are accommodated. Since electronic parts and electronic devices generate heat, they are arranged above the dry vacuum pumps 12-1 and 12-2, and a liquid-cooled partition wall 23 is arranged between the electronic parts and electronic devices and the dry vacuum pumps 12-1 and 12-2. By doing so, the heat from the dry vacuum pumps 12-1 and 12-2 is shut off.

  The dry vacuum pump 12-1 includes a motor unit 12-1a, a pump unit 12-1b, and a gear unit 12-1c. Similarly, the dry vacuum pump 12-2 includes a motor unit 12-2a and a pump unit 12-2b. It is comprised from the gear part 12-2c. Each part generates heat.

  The liquid cooling partition wall 23 and the pump enclosure 22 are provided with a cooling water passage 25 through which cold water flows as a cooling liquid. The cooling water passage 25 first supplies the cooling water W to the liquid cooling partition wall 23, Cooling water W exiting from the liquid cooling partition wall 23 is supplied to the motor units 12-1a and 12-2a of the dry vacuum pumps 12-1 and 12-2, and then the pump units (dry vacuum pump bodies) 12-1b and 12- The coolant flow path 25 is configured to cool the electronic components and electronic devices that are supplied to 2b and generate heat in the order in which the coolant W flows.

  As described above, the liquid cooling partition wall 23 is interposed between the electrical enclosure 21 and the pump enclosure 22, and the cooling water flow path 25 starts with the cooling water W, then the liquid cooling partition wall 23, and then the dry vacuum pump 12-1. , 12-2 is supplied to the motor units 12-1a and 12-2a, and then supplied to the pump units 12-1b and 12-2b. Efficiently cools electronic parts and electronic devices that generate heat, and accommodates elements that generate heat, such as electronic components constituting the rectifier 13, the DC circuit 15, the DC / DC conversion circuit 16, the inverter 17, and the control circuit unit 18. Thus, it is possible to reliably realize heat shielding between the electrical enclosure, the motor unit of the dry vacuum pump, and the pump enclosure 22 in which the casing of the pump unit is accommodated. As a result, the entire volume of the dry vacuum pump device can be minimized, and downsizing of the device can be realized.

  FIG. 3 is a diagram showing a cooling body structure for cooling the rectifier 13, the smoothing capacitor 14, the DC / DC conversion circuit 16, and the switching elements and electronic components constituting the inverter 17 housed in the electrical enclosure 21. a) is a side view, and FIG. 5B is a plan view. As shown in the figure, electronic components and electronic devices with a large amount of heat that constitute the rectifier 13, the DC circuit 15, the DC / DC conversion circuit 16, the inverter 17, and the like are mounted on a liquid-cooled partition wall 23 in which the cooling water W circulates. Has been.

  A cooling water passage 25 through which cooling water flows as a cooling liquid is formed in the liquid cooling partition wall 23, and the cooling water is supplied. The liquid-cooled partition wall 23 is made of a material having good thermal conductivity such as metal (for example, aluminum). By setting the cooling structure as described above, the heat generated from the electronic components and electronic equipment housed in the electrical enclosure 21 is transmitted to the liquid cooling partition wall 23 and is efficiently absorbed by the cooling water flowing through the cooling water passage 25.

  In the above embodiment, the number of dry vacuum pumps accommodated in the pump enclosure 22 is two. However, the number of dry vacuum pumps accommodated in the pump enclosure 22 is not limited to two. Of course, two or more units may be used.

  The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Can be modified. In the above embodiment, the example in which the cooling water is used as the cooling liquid has been described. However, the cooling water is not limited to the water cooling water, and other cooling liquid may be used.

  The present invention provides an electrical enclosure containing the entire control electronic circuit including an inverter, a pump enclosure containing a dry vacuum pump and sensors for monitoring the operation of the dry vacuum pump, and an internal space between the electrical enclosure and the pump enclosure. A liquid-cooled partition that circulates the coolant is interposed to form an integral enclosure. By circulating the coolant in the liquid-cooled partition, an endothermic effect can be obtained and the interior of the electrical enclosure can be cooled with high efficiency. The structure is small, and the entire apparatus can be provided with a small dry vacuum pump apparatus.

DESCRIPTION OF SYMBOLS 10 Power supply part 11 Electric motor 12 Dry vacuum pump 13 Rectifier 14 Smoothing capacitor 15 DC circuit 16 DC / DC conversion circuit 17 Inverter 18 Control circuit part 19 AC power supply 21 Electrical equipment enclosure 22 Pump enclosure 23 Liquid cooling partition wall 24 Enclosure 25 Cooling water flow path

Claims (4)

In a dry vacuum pump apparatus comprising an inverter and a dry vacuum pump, wherein AC power from an AC power source is converted into AC power of a predetermined frequency by the inverter and supplied to an electric motor that drives the dry vacuum pump.
An electrical enclosure containing the entire control electronics including the inverter;
A pump enclosure containing the dry vacuum pump composed of a pump unit and a motor unit, and sensors for monitoring the operation of the dry vacuum pump;
A liquid-cooled partition wall in which a coolant circulates is interposed between the electrical enclosure and the pump enclosure to constitute an integral enclosure ,
The electrical enclosure is cooled with a coolant circulating through the liquid-cooled partition;
The dry vacuum pump device characterized in that the pump part of the dry vacuum pump housed in the pump enclosure and the liquid-cooled partition are not in direct contact . The dry vacuum pump device according to claim 1,
The flow path of the cooling liquid supplied to the integral enclosure first supplies the cooling liquid to the liquid cooling partition wall, and supplies the cooling liquid from the liquid cooling partition wall in order from the motor unit of the dry vacuum pump to the pump unit. The dry vacuum pump device is characterized in that the coolant flow path is configured to cool in the order of supply of the coolant. The dry vacuum pump device according to claim 1 or 2 ,
The dry vacuum pump apparatus, wherein the electrical enclosure is mounted on the liquid-cooled partition wall . In the dry vacuum pump device according to claim 1, 2 or 3 ,
The dry vacuum pump apparatus according to claim 1, wherein the liquid cooling partition wall is fixedly installed on a frame constituting an outer peripheral partition wall of a pump part of the dry vacuum pump housed in the pump enclosure.

Images