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JP5338146B2 - Drive device - Google Patents

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JP5338146B2
JP5338146B2 JP2008146807A JP2008146807A JP5338146B2 JP 5338146 B2 JP5338146 B2 JP 5338146B2 JP 2008146807 A JP2008146807 A JP 2008146807A JP 2008146807 A JP2008146807 A JP 2008146807A JP 5338146 B2 JP5338146 B2 JP 5338146B2
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voltage
frequency
drive
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driving
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JP2009296760A (en
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龍一 吉田
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Konica Minolta Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a drive device which requires small power consumption and has small operation sounds. <P>SOLUTION: The drive device includes an electro-mechanical conversion element that expands and contracts when voltage is applied, a vibration member that is reciprocatingly displaced by the expansion and contraction of a piezoelectric element with one end of the vibration member fixed to the electro-mechanical conversion element, a friction engaged member that is friction-engaged with the vibration member, and a drive circuit that applies a periodically fluctuating drive voltage to the piezoelectric element. The drive circuit changes the frequency of the drive voltage within a range higher than a predetermined lower limit frequency and higher than an audible frequency corresponding to the speed for displacing the friction-engaged member, and when the frequency of the drive voltage is the lower limit frequency, the waveform of the drive voltage is changed according to the speed for displacing the friction-engaged member. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、駆動装置、詳しくは、振動形アクチュエータを用いた駆動装置に関する。   The present invention relates to a drive device, and more particularly to a drive device using a vibration actuator.

振動部材の周期的な振動によって、振動部材に摩擦係合する摩擦係合部材をすべり変位させる振動形アクチュエータを用いた駆動装置において、摩擦係合部材の変位速度(駆動速度)を可変したい場合がある。例えば、撮像装置の手振れ補正や、オートフォーカスなど、レンズの位置を絶えず調整する場合、駆動速度を連続的に調整できることが望ましい。   In a drive device using a vibration type actuator that slides and displaces a friction engagement member that frictionally engages with a vibration member due to periodic vibration of the vibration member, there is a case where it is desired to change the displacement speed (drive speed) of the friction engagement member. is there. For example, when the lens position is constantly adjusted, such as camera shake correction or autofocusing of the imaging apparatus, it is desirable that the drive speed can be adjusted continuously.

特許文献1には、駆動装置の出力速度に応じて、駆動電圧の周波数が高くなる発明が記載されている。また、特許文献2には、アクチュエータを矩形波電圧で駆動し、矩形波電圧のデューティ比を変化させることで駆動速度を調整することが記載されている。特許文献3には、3つの電圧を所定の順序で出力し、中間電圧の出力時間を増減することで駆動速度を調整する発明が記載されている。特許文献4には、3つの電圧からなり、高電圧(低電圧)の前後の中間電圧の継続時間を相補的に変化させることで波形を変化させ、駆動速度を調整する駆動装置が記載されている。   Patent Document 1 describes an invention in which the frequency of the drive voltage is increased in accordance with the output speed of the drive device. Patent Document 2 describes that the actuator is driven with a rectangular wave voltage and the driving speed is adjusted by changing the duty ratio of the rectangular wave voltage. Patent Document 3 describes an invention in which the driving speed is adjusted by outputting three voltages in a predetermined order and increasing or decreasing the output time of the intermediate voltage. Patent Document 4 describes a driving device that is composed of three voltages, changes the waveform by complementarily changing the duration of the intermediate voltage before and after the high voltage (low voltage), and adjusts the driving speed. Yes.

このような駆動装置の消費電力は、駆動電圧の周波数に略比例する。駆動電圧の波形によって駆動速度を調整する場合、駆動速度が遅くても、消費電力は小さくならないので非効率である。一方、駆動電圧の周波数によって駆動速度を調整する場合、駆動周波数が20kHzより低くなると、可聴域の振動が発生し、動作音が大きくなる。
特開平11−103583号公報 特開2001−103772号公報 特開2004−80964号公報 特開2007−43843号公報
The power consumption of such a driving device is approximately proportional to the frequency of the driving voltage. When the driving speed is adjusted by the waveform of the driving voltage, even if the driving speed is low, the power consumption is not reduced, which is inefficient. On the other hand, when the driving speed is adjusted according to the frequency of the driving voltage, if the driving frequency is lower than 20 kHz, vibration in the audible range is generated and the operation sound is increased.
Japanese Patent Laid-Open No. 11-103583 JP 2001-103772 A JP 2004-80964 A JP 2007-43843 A

前記問題点に鑑みて、本発明は、消費電力が小さく、動作音が小さい駆動装置を提供することを課題とする。   In view of the above problems, it is an object of the present invention to provide a drive device that consumes less power and has less operation sound.

前記課題を解決するために、本発明による駆動装置は、電圧が印加されると伸縮する電気機械変換素子と、前記電気機械変換素子に一端が固定され、前記電気機械変換素子の伸縮によって往復変位する振動部材と、前記振動部材に摩擦係合する摩擦係合部材と、前記電気機械変換素子に周期的に変動する駆動電圧を印加する駆動回路とを有し、前記駆動回路は、前記摩擦係合部材を変位させる速度が、前記駆動電圧の周波数が可聴周波数より高い所定の下限周波数であるときの前記摩擦係合部材の変位速度以上である場合には、前記摩擦係合部材を変位させる速度に応じて、前記駆動電圧の周波数を前記下限周波数以上の範囲内で変化させ、前記摩擦係合部材を変位させる速度が、前記駆動電圧の周波数が前記下限周波数であるときの前記摩擦係合部材の変位速度よりも低い場合には、前記駆動電圧の周波数を前記下限周波数に維持しつつ、前記摩擦係合部材を変位させる速度に応じて、前記駆動電圧の波形を変化させるものとする。 In order to solve the above-mentioned problems, a driving device according to the present invention includes an electromechanical transducer that expands and contracts when a voltage is applied, and one end fixed to the electromechanical transducer, and is reciprocally displaced by the expansion and contraction of the electromechanical transducer. A vibration engagement member that frictionally engages the vibration member, and a drive circuit that applies a periodically varying drive voltage to the electromechanical conversion element, the drive circuit including the friction engagement member. When the speed at which the joint member is displaced is equal to or higher than the displacement speed of the friction engagement member when the frequency of the drive voltage is a predetermined lower limit frequency higher than the audible frequency, the speed at which the friction engagement member is displaced depending on the frequency of the drive voltage is varied within the range of above the lower limit frequency, the speed for displacing the frictional engagement member, the friction when the frequency of the drive voltage is the lower limit frequency It is lower than the displacement speed of the engagement member, while maintaining the frequency of the drive voltage to the lower limit frequency, depending on the speed for displacing the frictional engagement member, and one that changes the waveform of the driving voltage To do.

この構成によれば、高速域においては駆動電圧の周波数を変化させるので、アクチュエータの応答可能な周波数まで駆動電圧の周波数を高めることによって最大速度を得ることができる。また、消費電力は駆動周波数に略比例するので低速域では消費電力が小さくなり、駆動効率が高い。また、駆動周波数を可聴域より高い周波数とし、非常に低速の駆動に際しては、駆動周波数を可聴周波数以上の上限周波数に保持して波形を変化させるので、人間の耳に聞こえる振動を発生させず、且つ、消費電力を最小限に保持できる。   According to this configuration, since the frequency of the drive voltage is changed in the high speed region, the maximum speed can be obtained by increasing the frequency of the drive voltage to a frequency at which the actuator can respond. In addition, since the power consumption is substantially proportional to the drive frequency, the power consumption is reduced in the low speed range, and the drive efficiency is high. In addition, the driving frequency is higher than the audible range, and when driving at a very low speed, the driving frequency is kept at the upper limit frequency that is higher than the audible frequency and the waveform is changed. In addition, power consumption can be kept to a minimum.

また、本発明の駆動装置において、前記駆動電圧は、3つの所定電圧を所定の順序で出力するものであってもよい。   In the driving device of the present invention, the driving voltage may output three predetermined voltages in a predetermined order.

この構成によれば、駆動回路を公知のブリッジ回路で構成し、マイコン制御によって容易に駆動電圧を調整できる。   According to this structure, a drive circuit is comprised with a well-known bridge circuit, and a drive voltage can be easily adjusted by microcomputer control.

また、本発明の駆動装置において、前記駆動回路は、前記3つの所定電圧の内、中間の電圧を出力する時間を変化させることで、前記駆動電圧の周波数を変化させてもよい。   In the driving device of the present invention, the driving circuit may change the frequency of the driving voltage by changing a time for outputting an intermediate voltage among the three predetermined voltages.

この構成によれば、周波数の制御が容易である。   According to this configuration, frequency control is easy.

また、本発明の駆動装置において、前記駆動回路は、前記3つの所定電圧の内、最も高い電圧の前の中間の電圧の出力時間と、最も低い電圧の前の中間の電圧の出力時間とを、その合計時間を維持しながら相補的に変化させることで、前記駆動電圧の波形を変化させてもよい。   In the driving device of the present invention, the driving circuit may include an output time of an intermediate voltage before the highest voltage and an output time of an intermediate voltage before the lowest voltage among the three predetermined voltages. Further, the waveform of the drive voltage may be changed by changing it complementarily while maintaining the total time.

この構成によれば、低速域において、簡単で精度よく駆動速度を調整できる。   According to this configuration, the driving speed can be adjusted easily and accurately in the low speed range.

本発明によれば、高速域では、駆動電圧の周波数によって速度制御を行うので、消費電力を最低限に抑制できる。また、低速域では、駆動電圧の周波数を可聴域の上限以上に保つので、騒音を発生することがない。   According to the present invention, since speed control is performed according to the frequency of the drive voltage in the high speed range, power consumption can be minimized. In the low speed range, the frequency of the drive voltage is kept above the upper limit of the audible range, so that no noise is generated.

これより、本発明の実施形態について、図面を参照しながら説明する。
図1に、本発明の実施形態である駆動装置1の構成を示す。駆動装置1は、圧電アクチュエータ2と圧電アクチュエータ2に周期的な駆動電圧を印加する駆動回路3と、駆動回路3の動作を制御して駆動電圧の波形および周波数を決定する制御装置4とを有する。
Embodiments of the present invention will now be described with reference to the drawings.
In FIG. 1, the structure of the drive device 1 which is embodiment of this invention is shown. The drive device 1 includes a piezoelectric actuator 2, a drive circuit 3 that applies a periodic drive voltage to the piezoelectric actuator 2, and a control device 4 that controls the operation of the drive circuit 3 to determine the waveform and frequency of the drive voltage. .

圧電アクチュエータ2は、入力された駆動電圧に応じて伸縮する圧電素子(電気機械変換素子)5と、圧電素子5の一端に固定された錘6と、圧電素子5の他端に一端が固定された軸状の振動部材7と、振動部材7に摩擦力によって係合する摩擦係合部材8とを有する。振動部材7は、圧電素子5の伸縮によって軸方向に往復変位する。摩擦係合部材8は、振動部材7が緩慢に移動するときは、振動部材7と共に移動するが、振動部材7が急峻に移動するときは、慣性力によって振動部材7に対してすべり変位する。   The piezoelectric actuator 2 has a piezoelectric element (electromechanical conversion element) 5 that expands and contracts according to an input drive voltage, a weight 6 fixed to one end of the piezoelectric element 5, and one end fixed to the other end of the piezoelectric element 5. The shaft-shaped vibration member 7 and the friction engagement member 8 engaged with the vibration member 7 by a frictional force are included. The vibration member 7 is reciprocated in the axial direction by the expansion and contraction of the piezoelectric element 5. The friction engagement member 8 moves together with the vibration member 7 when the vibration member 7 moves slowly. However, when the vibration member 7 moves steeply, the friction engagement member 8 slides and displaces with respect to the vibration member 7 due to inertial force.

図2に、駆動回路3の詳細を示す。駆動回路3は、4つのスイッチング素子9,10,11,12を有する公知のブリッジ回路であり、圧電素子5の一対の電極をそれぞれ、電圧Vd(V)の電源13またはグランドに接続することで、圧電素子5に±Vd(V)の電圧を印加することができる。また、駆動回路3は、圧電素子5の両電極をショートさせることで、圧電素子5に0(V)を印加することもできる。つまり、駆動回路3は、圧電素子5に+Vd(V)、0(V)、−Vd(V)の3種類の電圧を印加することが可能である。   FIG. 2 shows details of the drive circuit 3. The drive circuit 3 is a known bridge circuit having four switching elements 9, 10, 11, and 12. By connecting the pair of electrodes of the piezoelectric element 5 to the power supply 13 of the voltage Vd (V) or the ground, respectively. A voltage of ± Vd (V) can be applied to the piezoelectric element 5. The drive circuit 3 can also apply 0 (V) to the piezoelectric element 5 by short-circuiting both electrodes of the piezoelectric element 5. That is, the drive circuit 3 can apply three types of voltages, + Vd (V), 0 (V), and −Vd (V), to the piezoelectric element 5.

図3に、駆動回路3が出力する駆動電圧の波形を示す。駆動装置1において、摩擦係合部材7を最も早く移動させる駆動波形は、波高2Vd(V)の矩形波であり、その周波数は、圧電アクチュエータ2の振動部材7の正弦波に対するゲインが最も大きくなる共振周波数(例えば500kHz)の約0.7倍(350kHz=周期1/350ms)であり、そのデューティ比は、0.3である。   FIG. 3 shows the waveform of the drive voltage output from the drive circuit 3. In the drive device 1, the drive waveform for moving the friction engagement member 7 earliest is a rectangular wave having a wave height of 2 Vd (V), and the frequency has the largest gain with respect to the sine wave of the vibration member 7 of the piezoelectric actuator 2. The resonance frequency (for example, 500 kHz) is about 0.7 times (350 kHz = period 1/350 ms), and the duty ratio is 0.3.

駆動装置1において、駆動速度(摩擦係合部材7の移動速度)を低下させる場合、最高速の駆動電圧波形において、圧電素子5に−Vd(V)が印加された状態から+Vd(V)を印加する前に0(V)を印加することで、駆動電圧の周波数を低くする。駆動電圧の周波数が低くなることにより、時間当たりに摩擦係合部材8が振動部材7に対してすべり変位する回数が少なくなり、結果として摩擦係合部材8の変位速度が低くなる。 In the driving device 1, when the driving speed (moving speed of the frictional engagement member 7) is decreased, + Vd (V) is changed from the state in which −Vd (V) is applied to the piezoelectric element 5 in the fastest driving voltage waveform. before applying by applying the 0 (V), to lower the frequency of the driving voltage. By reducing the frequency of the drive voltage, the number of times that the friction engagement member 8 slides relative to the vibration member 7 per time is reduced, and as a result, the displacement speed of the friction engagement member 8 decreases.

駆動回路3は、駆動速度の低下にともない、駆動電圧の周波数を人間の可聴域の上限より僅かに大きな所定の上限周波数(例えば22kHz)まで低下させる(図中の中速)が、これより駆動速度を低下させる場合は、駆動周波数を上限周波数に維持しながら、圧電素子5に+Vd(V)を印加してから−Vd(V)を印加する前にも0(V)の電圧を出力する。このとき、1周期当たりに0(V)を出力する時間の合計は一定に保たれ、+Vd(V)を出力する前の0(V)の電圧出力時間T1と、−Vd(V)を出力する前との0(V)の電圧出力時間T2とを相補的に変化させる。また、このとき、+Vd(V)を出力する時間と−Vd(V)を出力する時間とも相補的に変化する。   The drive circuit 3 reduces the frequency of the drive voltage to a predetermined upper limit frequency (for example, 22 kHz) slightly higher than the upper limit of the human audible range as the drive speed decreases (medium speed in the figure). When reducing the speed, a voltage of 0 (V) is output before applying −Vd (V) after applying + Vd (V) to the piezoelectric element 5 while maintaining the driving frequency at the upper limit frequency. . At this time, the total time for outputting 0 (V) per cycle is kept constant, and the voltage output time T1 of 0 (V) before outputting + Vd (V) and -Vd (V) are output. The voltage output time T2 of 0 (V) before the change is complementarily changed. At this time, the time for outputting + Vd (V) and the time for outputting -Vd (V) also change complementarily.

駆動電圧は、−Vd(V)を出力する前の0(V)の出力時間T1と、+Vd(V)を出力する前との0(V)の出力時間T2が等しくなったとき、+Vd(V)の出力時間と−Vd(V)の出力時間とも等しくなるように波形変化させられる。このとき、−Vd(V)から+Vd(V)への遷移波形と、+Vd(V)から−Vd(V)への遷移波形とが対称になるので、圧電素子5の伸長と収縮とが同じ速度になる。このため、摩擦係合部材8が振動部材7に対してすべり移動する量が圧電素子5に対する繰り出し方向と引き戻し方向とで同じになり、駆動装置1の駆動速度はゼロになる。   When the output time T1 of 0 (V) before outputting −Vd (V) is equal to the output time T2 of 0 (V) before outputting + Vd (V), the drive voltage becomes + Vd ( The waveform is changed so that both the output time of V) and the output time of -Vd (V) are equal. At this time, since the transition waveform from −Vd (V) to + Vd (V) and the transition waveform from + Vd (V) to −Vd (V) are symmetric, the expansion and contraction of the piezoelectric element 5 are the same. Become speed. For this reason, the amount by which the friction engagement member 8 slides relative to the vibration member 7 is the same in the extending direction and the retracting direction with respect to the piezoelectric element 5, and the driving speed of the driving device 1 becomes zero.

さらに、0(V)の出力時間T1,T2、および、±Vd(V)の出力時間をそれぞれ相補的に変化させると、−Vd(V)から+Vd(V)に変化するまでの時間T1と、+Vd(V)から−Vd(V)に変化するまでの時間T2との大小関係が入れ替わり、駆動装置1の駆動速度は、負方向(逆方向)に増大してゆく。   Further, when the output times T1 and T2 of 0 (V) and the output time of ± Vd (V) are changed complementarily, the time T1 until the change from −Vd (V) to + Vd (V) , + Vd (V) to −Vd (V), the magnitude relationship with time T2 is changed, and the driving speed of the driving device 1 increases in the negative direction (reverse direction).

負方向の駆動速度が増大し、+Vd(V)を出力する前の0(V)の出力時間T1がゼロになると(図において負方向の中速)、駆動回路3は、さらに駆動速度を増大させるために、0(V)の出力時間T2を短くして、駆動周波数を上限周波数(22kHZ)より高くしてゆく。0(V)の出力時間T2がゼロになると、駆動周波数は350kHzに達し、駆動装置1は、正方向の最高速と同じ速度で駆動方向が反対に、つまり、駆動速度が負の最高速となる。   When the driving speed in the negative direction increases and the output time T1 of 0 (V) before outputting + Vd (V) becomes zero (medium speed in the negative direction in the figure), the driving circuit 3 further increases the driving speed. Therefore, the output time T2 of 0 (V) is shortened, and the drive frequency is made higher than the upper limit frequency (22 kHz). When the output time T2 of 0 (V) becomes zero, the driving frequency reaches 350 kHz, and the driving device 1 has the same speed as the highest speed in the positive direction and the driving direction is opposite, that is, the driving speed is the highest speed that is negative. Become.

駆動装置1では、駆動電圧の周波数が可聴域より高い上限周波数(22kHz)より低くならないので、この駆動電圧による圧電アクチュエータ2の機械的運動は、可聴域より高い周波数成分のみを含む。このため、駆動装置1は、人間の耳に駆動音として聞こえる振動を発生させず、駆動音が小さい。   In the driving device 1, the frequency of the driving voltage does not become lower than the upper limit frequency (22 kHz) higher than the audible range. Therefore, the mechanical movement of the piezoelectric actuator 2 by this driving voltage includes only a frequency component higher than the audible range. For this reason, the driving device 1 does not generate vibration that can be heard as driving sound by human ears, and the driving sound is low.

また、駆動装置1は、高速域において、駆動速度に応じて駆動周波数を変化させるのでその消費電力が駆動速度に略比例して増減する。つまり、上限周波数より高い周波数域においては、駆動速度に応じて消費エネルギーを抑制することができる。   Further, since the driving device 1 changes the driving frequency in accordance with the driving speed in the high speed range, the power consumption thereof increases or decreases substantially in proportion to the driving speed. That is, in a frequency range higher than the upper limit frequency, energy consumption can be suppressed according to the driving speed.

以上の実施形態では、圧電素子5に3種類の電圧を所定の順序で印加する駆動回路3によって駆動されているが、本発明では、異なる波形の駆動電圧を出力できる駆動回路を用いてもよい。例えば、図4に示すように、+Vd(V)の電圧と、−Vd(V)の電圧とを直線的に遷移させ、この遷移時間を上記の0(V)の出力時間T1,T2と同様に変化させてもよい。   In the above embodiment, the piezoelectric element 5 is driven by the drive circuit 3 that applies three kinds of voltages in a predetermined order. However, in the present invention, a drive circuit that can output drive voltages having different waveforms may be used. . For example, as shown in FIG. 4, the voltage of + Vd (V) and the voltage of -Vd (V) are linearly transitioned, and this transition time is the same as the output time T1 and T2 of 0 (V) described above. It may be changed to.

本発明は、駆動速度が低いときは可聴域以上の所定周波数において駆動電圧の波形を変化させ、駆動速度が高いときは駆動周波数を変化させるものであればよく、駆動電圧を図示した波形のものに限らない。   In the present invention, the drive voltage waveform may be changed at a predetermined frequency above the audible range when the drive speed is low, and the drive frequency may be changed when the drive speed is high. Not limited to.

本発明の1つの実施形態の駆動装置の概略構成図。The schematic block diagram of the drive device of one Embodiment of this invention. 図1の駆動回路の回路図。The circuit diagram of the drive circuit of FIG. 図1の駆動装置の駆動電圧波形を示す図。The figure which shows the drive voltage waveform of the drive device of FIG. 図3の代案の駆動電圧波形を示す図。The figure which shows the drive voltage waveform of the alternative of FIG.

符号の説明Explanation of symbols

1…駆動装置
2…圧電アクチュエータ
3…駆動回路
4…制御装置
5…圧電素子(電気機械変換素子)
6…錘
7…振動部材
8…摩擦係合部材
DESCRIPTION OF SYMBOLS 1 ... Drive apparatus 2 ... Piezoelectric actuator 3 ... Drive circuit 4 ... Control apparatus 5 ... Piezoelectric element (electromechanical conversion element)
6 ... Weight 7 ... Vibration member 8 ... Friction engagement member

Claims (4)

電圧が印加されると伸縮する電気機械変換素子と、前記電気機械変換素子に一端が固定され、前記電気機械変換素子の伸縮によって往復変位する振動部材と、前記振動部材に摩擦係合する摩擦係合部材と、前記電気機械変換素子に周期的に変動する駆動電圧を印加する駆動回路とを有し、
前記駆動回路は、
前記摩擦係合部材を変位させる速度が、前記駆動電圧の周波数が可聴周波数より高い所定の下限周波数であるときの前記摩擦係合部材の変位速度以上である場合には、前記摩擦係合部材を変位させる速度に応じて、前記駆動電圧の周波数を前記下限周波数以上の範囲内で変化させ、
前記摩擦係合部材を変位させる速度が、前記駆動電圧の周波数が前記下限周波数であるときの前記摩擦係合部材の変位速度よりも低い場合には、前記駆動電圧の周波数を前記下限周波数に維持しつつ、前記摩擦係合部材を変位させる速度に応じて、前記駆動電圧の波形を変化させることを特徴とする駆動装置。
An electromechanical transducer that expands and contracts when a voltage is applied; a vibration member that has one end fixed to the electromechanical transducer and reciprocally displaces by the expansion and contraction of the electromechanical transducer; A combination member, and a drive circuit that applies a periodically varying drive voltage to the electromechanical transducer,
The drive circuit is
When the speed at which the friction engagement member is displaced is equal to or higher than the displacement speed of the friction engagement member when the frequency of the drive voltage is a predetermined lower limit frequency higher than the audible frequency, the friction engagement member is depending on the speed of displacing, by changing the frequency of the drive voltage in a range of more than the lower limit frequency,
When the speed of displacing the friction engagement member is lower than the displacement speed of the friction engagement member when the frequency of the drive voltage is the lower limit frequency, the frequency of the drive voltage is maintained at the lower limit frequency. and while, depending on the speed for displacing the frictional engagement member, the drive apparatus characterized by varying the waveform of the driving voltage.
前記駆動電圧は、3つの所定電圧を所定の順序で出力するものであることを特徴とする請求項1に記載の駆動装置。   2. The driving apparatus according to claim 1, wherein the driving voltage outputs three predetermined voltages in a predetermined order. 前記駆動回路は、前記3つの所定電圧の内、中間の電圧を出力する時間を変化させることで、前記駆動電圧の周波数を変化させることを特徴とする請求項2に記載の駆動装置。   The drive device according to claim 2, wherein the drive circuit changes a frequency of the drive voltage by changing a time for outputting an intermediate voltage among the three predetermined voltages. 前記駆動回路は、前記3つの所定電圧の内、最も高い電圧の前の中間の電圧の出力時間と、最も低い電圧の前の中間の電圧の出力時間とを、その合計時間を維持しながら相補的に変化させることで、前記駆動電圧の波形を変化させることを特徴とする請求項2または3に記載の駆動装置。   The drive circuit complements the output time of the intermediate voltage before the highest voltage and the output time of the intermediate voltage before the lowest voltage among the three predetermined voltages while maintaining the total time. 4. The driving apparatus according to claim 2, wherein the waveform of the driving voltage is changed by changing the driving voltage.
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