JP5314613B2 - Replica collection device and replica collection method - Google Patents

Description

  The present invention relates to a replica collection apparatus and replica collection method for collecting a replica obtained by transferring and replicating a surface state of a subject to a film.

  It is known as a prior art that a replica obtained by transferring and replicating the surface state of a subject to a film is collected, and the surface state of the subject is evaluated by observing the replica.

A conventional replica collection method will be described with reference to FIG. 4A, and a conventional replica observation method will be described with reference to FIG.
As shown in FIG. 4A, the replica film 51 is grasped with tweezers 52 and the film 51 is inserted into the gap 53 a of the subject 53. After the methyl acetate 54 dissolving the film 51 is applied to the surface 53b (surface to be inspected) to be observed, the film 51 is placed, pressed from above with a spatula 55, and held until the dissolving surface of the film 51 is dried (about 2). Minutes). After drying, the film 51 is peeled from the surface 53b, and the collection of replicas is completed.

  Since the film 51 is very thin (about 50 μm), it curls at the time of peeling. Therefore, the peeled film 51 is fixed to a dedicated holder 56. At this time, as shown in FIG. 4B, a mirror 57 for reflecting the observation light is arranged on the back side of the film 51, and the back side of the mirror 57 is pressed by a pressing spring 58, whereby the film 51 is fixed to the holder 56. Thereafter, the film 51 fixed to the holder 56 is observed with a microscope 59.

JP-A 63-256837 Japanese Patent Laid-Open No. 03-100439

  In the conventional replica collection method, since air bubbles easily enter between the film 51 and the surface 53b of the subject 53, skill of the operator is required to hold the replica. For this reason, when the area that can be evaluated by bubbles is reduced in the collected replica, there is a problem in that the replica collection itself may be redone. In addition, the operator must keep holding the spatula 55 until the melted surface of the film 51 is dried. During this time, the next operation cannot be performed, and the efficiency is poor. Furthermore, in the conventional replica observation method, since it is necessary to fix the replica to the dedicated holder 56, there is a problem that it takes time to collect and observe the replica and the efficiency is further deteriorated.

  The present invention has been made in view of the above problems, and it is an object of the present invention to provide a replica collection apparatus and a replica collection method capable of collecting a replica from a subject surface easily and efficiently and evaluating the subject surface. And

The replica collection device according to the first invention for solving the above-mentioned problems is
A holder having two arms that can be opened and closed with one end as a fulcrum, and a biasing portion that applies a biasing force in a direction in which the arm opens;
An elastically deformable fixing plate, a reflecting portion that is provided on the surface of one surface of the fixing plate and reflects light, a replica film affixed to the surface of the reflecting portion, and the other of the fixing plate Provided with a replica jig having a mounting portion that can be attached to and detached from the tip of one of the arms,
The replica jig attached to the tip of one of the arms is placed on the surface to be examined of the subject to contact the film, and the tip of the other arm is placed on the surface facing the surface to be examined. The position of the replica jig is fixed by the urging force of the urging portion, and the surface state of the inspection object surface is transferred to the film.

A replica collection apparatus according to a second invention for solving the above-described problems is
In the replica collection device according to the first invention,
The fixing plate and the reflection portion are formed in a curved shape having a central portion as a vertex, and the film is attached to the surface of the curved reflection portion.

A replica collection method according to a third invention for solving the above-described problem is as follows.
A replica collection method using the replica collection device according to the first or second invention,
Apply a solvent to dissolve the film on the surface to be examined of the subject,
Placing the replica jig attached to the tip of one of the arms on the surface to be inspected, contacting the film, and placing the tip of the other arm on the surface facing the surface to be inspected;
Until the solvent is dried, the urging force of the urging portion fixes the arrangement position of the replica jig, and transfers the surface state of the inspection target surface to the film,
After the solvent is dried, the replica jig attached to the tip of one of the arms and the tip of the other arm are removed from the inspection target surface and the opposing surface.

  According to the present invention, a replica can be collected from the surface of a subject simply and efficiently. The holder may be selected in accordance with the condition of the subject (for example, the gap interval). For example, even if the examination target surface of the subject is in a narrow part, a replica holder can be used by using a small holder. Since the tool can be inserted into the narrow part and the arrangement position of the replica jig can be fixed, the replica can be sampled from the inspection target surface of the narrow part easily and efficiently.

  The replica jig can be detached from the arm of the holder and has a reflection part on the back side of the film. Therefore, if the replica jig is removed from the arm, the film of the replica jig can be left as it is. The surface to be examined can be evaluated easily and efficiently.

FIG. 1 shows an example of an embodiment of a replica picking apparatus according to the present invention, where (a) is a top view of a replica jig, (b) is a side view of the replica jig, and (c) is a replica jig. The side view from the other direction, (d) is a side view of the holder. (A) is a top view which shows the state which attached the replica jig | tool to the holder, (b) is the side view. It is a figure explaining an example of embodiment of the replica collection method concerning the present invention, (a) is a figure before replica collection, (b) is a figure at the time of replica collection, (c) is at the time of replica peeling FIG. 4D is a diagram at the time of replica observation. (A) is a figure explaining the conventional replica collection | recovery method, (b) is a figure explaining the conventional replica observation method.

  Embodiments of a replica collection apparatus and a replica collection method according to the present invention will be described with reference to FIGS.

Example 1
FIG. 1 shows an example of an embodiment of a replica collection device according to the present invention. FIG. 1 (a) is a top view of a replica jig, and FIG. 1 (b) is A in FIG. 1 (a). FIG. 1C is a side view of the replica jig viewed from the direction B in FIG. 1A, and FIG. 1D is a side view of the holder. . FIG. 2 shows a state in which the replica jig shown in FIGS. 1A to 1C is attached to the holder shown in FIG. 1D, and FIG. The top view and FIG. 2 (b) are side views thereof.

The replica collection device of the present embodiment includes a replica jig 10 and a holder 20.
The replica jig 10 is made of plastic, hard rubber, or the like, and has a fixing plate 11 having an appropriate strength (a degree that can be elastically deformed), and a reflecting plate 13 (reflection portion) that is provided on the surface of the fixing plate 11 and reflects light. ) And a replica film 14 is attached to the surface of the reflector 13. With such a structure, the surface of the film 14 (the surface opposite to the surface on which the reflecting plate 13 is provided) becomes a replica transfer surface, and the light transmitted through the film 14 is on the back side of the film 14 during replica observation. The replica transfer surface can be observed.

  The fixing plate 11 is preferably as thin as possible. However, since the collection of replicas is an on-site operation, the fixing plate 11 has a thickness having an appropriate strength (a degree that allows elastic deformation). As the reflecting plate 13, for example, a mirror-polished stainless steel or a vapor deposition mirror is desirable. Moreover, a vapor deposition mirror is vapor-deposited on the surface of the fixed plate 11, and the fixed plate 11 and the reflecting plate 13 may be integrated. The film 14 may be a commercially available acetyl resin, for example, acetyl cellulose.

  Further, an attachment portion 12 is provided on the upper surface of the fixing plate 11 (the surface opposite to the surface on which the reflection plate 13 and the film 14 are provided), and a holder to be described later is inserted into the insertion portion 12a provided in the attachment portion 12. By inserting the tip of 20 (specifically, the tip 21a of the first arm 21), the replica jig 10 and the holder 20 can be attached and detached. With such a structure, the replica jig 10 can be easily detached from the holder 20. If the replica jig 10 is removed after collecting the replica, the replica jig 10 can be set on the microscope as it is, and the speculum is immediately examined. It becomes possible to do.

  Further, as shown in FIG. 1C, in order to give the fixing plate 11 and the reflecting plate 13 a warp having the central portion as the apex, the fixing plate 11 and the reflecting plate 13 are formed in a curved shape having the central portion as the apex. Therefore, the film 14 is also curved with the central portion at the apex. With such a shape, when the replica jig 10 is pressed against the inspection target surface of the subject, the central portion of the film 14 first contacts the inspection target surface, and then the outer side of the film 14 along the inspection target surface. The film 14 will gradually come into contact with the head. For this reason, the film 14 and the inspection target surface are brought into contact with the film 14 and the inspection target surface so that air between the film 14 and the inspection target surface is discharged from the center side to the outside. Can be suppressed.

  The holder 20 has a tweezers shape, has a first arm 21 and a second arm 22, and joins them at an end 23. Therefore, the first arm 21 and the second arm 22 can be opened and closed with the end 23 as a fulcrum. Then, the distal end portion 21 a of the first arm 21 is inserted into the insertion portion 12 a of the attachment portion 12 of the replica jig 10. The state where the replica jig 10 is attached to the holder 20 is shown in FIGS.

  A rubber pad 24 is provided at the tip of the second arm 22, and a spring 25 (biasing portion) is provided between the first arm 21 and the second arm 22. When the space between the first arm 21 and the second arm 22 is narrowed, an urging force acts in a direction to open the space between the first arm 21 and the second arm 22 by the spring 25. Is brought into contact with the surface to be examined of the subject, and the rubber pad 24 is brought into contact with the surface facing the surface to be examined, whereby the arrangement position of the replica jig 10 on the surface to be examined can be fixed.

  By using the force of the spring 25, the holder 20 can be held in a gap with the inspection target surface, and the arrangement position of the replica jig 10 on the inspection target surface can be fixed. Until then, the worker does not need to hold it. Therefore, it is possible to start the next replica collection and to improve the work efficiency. In the case where a sufficient urging force can be applied only by the first arm 21 and the second arm 22 (for example, only by elastic deformation of the first arm 21 itself or the second arm 22 itself), the spring 25 is not provided. Also good.

  Next, an example of a replica collection method using the replica collection apparatus of the present embodiment will be described with reference to FIG. Here, FIG. 3 (a) is a diagram before replica collection, FIG. 3 (b) is a diagram at the time of replica collection, FIG. 3 (c) is a diagram at the time of replica peeling, and FIG. 3 (d) is a replica. It is a figure at the time of observation.

  First, the replica jig 10 on which the film 14 is set is attached to the distal end portion 21a of the first arm 21 of the holder 20 (see FIGS. 2A and 2B). And after apply | coating the solvent 31 (for example, methyl acetate, acetone) which can melt | dissolve the film 14 to the test object surface 30b of the test object 30, the holder 20 is grasped and it handles to the narrow part 30a of the test object 30 (FIG. 3). (See (a)).

  The film 14 of the replica jig 10 is brought into contact with the inspection target surface 30b of the subject 30, and the rubber pad 24 of the holder 20 is brought into contact with the surface 30c facing the inspection target surface 30b, and the contact position is set by the biasing force of the spring 25. It fixes (refer FIG.3 (b)). At this time, the film 14 is pressed against the inspection target surface 30b, and the film 31 is dissolved by the solvent 31 following the unevenness of the inspection target surface 30b, and the unevenness of the inspection target surface 30b is transferred to the film 14. .

  The film 14 is left to dry (about 2 minutes) until it has dried, and after drying, the holder 20 is grasped and the space between the first arm 21 and the second arm 22 is narrowed, so that the film 14 is removed from the inspection object surface 30b. Is peeled off (see FIG. 3C). This completes the collection of replicas.

  The replica jig 10 is removed from the tip 21a of the first arm 21 of the holder 20, and the replica jig 10 is set on the optical microscope 32 as it is, and the concavo-convex portion 14a transferred to the film 14 is observed to evaluate the replica ( (Refer FIG.3 (d)).

  Since there is a reflecting plate 13 on the back side of the film 14, the light 33 incident from the optical microscope 32 is reflected by the reflecting plate 13. At this time, light is irregularly reflected at the concavo-convex portion 14 a and appears dark from the optical microscope 32, thereby enabling evaluation of the replica, that is, evaluation of the inspection target surface 30 b of the subject 30.

  As described above, the replica jig 10 can be easily detached from the holder 20, and the replica jig 10 itself has the reflecting plate 13. Therefore, after the replica is collected, the replica is used as a holder as in the prior art. There is no need to fix or incorporate a mirror. Therefore, the replica can be easily observed with an optical microscope using the replica jig 10 itself.

  As an example of a suitable application target of the replica collection device and the collection method of the present embodiment, devices and members such as a prime mover can be considered.

  Equipment / members such as prime movers have many narrow portions, where, for example, metal may rub against each other to cause wear, impurities may accumulate, and corrosion may progress. So it is necessary to observe its surface. Since the narrow part is narrow and it is difficult to directly observe the surface thereof, the surface of the narrow part was evaluated by collecting and observing the replica. However, in the conventional replica collection method, since the inspection target surface is in a narrow part, it is not easy to collect the replica, and problems such as re-taking occur frequently.

  By applying the replica collection device of the present embodiment to such a narrow part, it is possible to collect and observe a replica from the narrow part surface simply and efficiently as described above.

  The present invention collects replicas from the surface of the subject, and is particularly suitable when the examination target surface of the subject is in a narrow part.

DESCRIPTION OF SYMBOLS 10 Replica jig | tool 11 Fixing plate 12 Mounting part 13 Reflecting plate 14 Film 20 Holder 21 1st arm 22 2nd arm 23 End part 24 Rubber pad 25 Spring 30 Test object 31 Solvent

Claims (3)

A holder having two arms that can be opened and closed with one end as a fulcrum, and a biasing portion that applies a biasing force in a direction in which the arm opens;
An elastically deformable fixing plate, a reflecting portion that is provided on the surface of one surface of the fixing plate and reflects light, a replica film affixed to the surface of the reflecting portion, and the other of the fixing plate Provided with a replica jig having a mounting portion that can be attached to and detached from the tip of one of the arms,
The replica jig attached to the tip of one of the arms is placed on the surface to be examined of the subject to contact the film, and the tip of the other arm is placed on the surface facing the surface to be examined. The replica collecting device, wherein the position of the replica jig is fixed by the urging force of the urging portion, and the surface state of the inspection target surface is transferred to the film. In the replica collection device according to claim 1,
The replica picking device, wherein the fixing plate and the reflecting portion are formed in a curved shape having a central portion as a vertex, and the film is attached to the curved surface of the reflecting portion. A replica collection method using the replica collection device according to claim 1 or 2,
Apply a solvent to dissolve the film on the surface to be examined of the subject,
Placing the replica jig attached to the tip of one of the arms on the surface to be inspected, contacting the film, and placing the tip of the other arm on the surface facing the surface to be inspected;
Until the solvent is dried, the urging force of the urging portion fixes the arrangement position of the replica jig, and transfers the surface state of the inspection target surface to the film,
After the solvent is dried, the replica picking method is characterized in that the replica jig attached to the tip of one of the arms and the tip of the other arm are removed from the inspection object surface and the opposing surface.

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