JP5292849B2 - Piezoelectric actuator, camera device, and moving stage device - Google Patents

Description

  The present invention relates to a piezoelectric actuator using a displacement generated by applying a voltage to a piezoelectric body, a camera device equipped with the piezoelectric actuator, and a moving stage device.

  A piezoelectric actuator using a displacement due to voltage application due to the inverse piezoelectric effect of a piezoelectric body has an extremely small shape, and is therefore mounted on a precision device such as a camera device and applied to various drive mechanisms.

For example, in a camera device, this piezoelectric actuator is used as a camera shake correction drive mechanism (see, for example, Patent Document 1).
JP 2005-173372 A

  In the camera shake correction apparatus for an optical device disclosed in Patent Document 1, camera shake correction is performed by moving a lens and an image sensor together using a bimorph type or unimorph type actuator. As described above, the bimorph type and unimorph type actuators can incline the light receiving surface with respect to the optical axis by moving the lens and the image sensor together.

  However, in this bimorph type or unimorph type actuator, the lens or the image sensor cannot be moved in a plane perpendicular to the optical axis. Therefore, the optical axis is moved by moving the correction lens in a direction to cancel camera shake. There is a problem that optical camera shake correction to be corrected and image sensor shift type camera shake correction to correct the optical axis by moving the image sensor in accordance with camera shake cannot be handled.

  Accordingly, the present invention has been proposed in view of the above-described circumstances, and a piezoelectric actuator that can be rotated while having a simple configuration using a displacement by applying a voltage to a piezoelectric body, and its It is an object of the present invention to provide a camera device that performs camera shake correction by mounting a piezoelectric actuator, and a moving stage device that mounts the piezoelectric actuator and transports an object to be transported.

  The piezoelectric actuator of the present invention is a regular octagonal prism having two faces opposed to each other in the longitudinal direction as regular octagons, and has a rotating part made of a piezoelectric body with the direction of polarization being the longitudinal direction of the regular octagonal prism, Electrodes are provided on each of the eight rectangular surfaces, and one of the regular octagonal surfaces is fixed to a support portion, and the surfaces of four opposing rectangular surfaces provided with the rotating portion electrodes An AC voltage having the same frequency as the natural frequency in the inter-direction is applied to each of the electrodes with a period shifted by π / 4.

  In the piezoelectric actuator of the present invention, the shape of the other side of the regular octagon facing the one surface fixed to the support portion of the rotating portion is the shape of the one surface side fixed to the support portion. It is characterized by making it larger.

  In the piezoelectric actuator of the present invention, a plurality of the rotating parts are arranged on each of a pair of parallel side surfaces of the support part having a plate shape having a predetermined thickness, and the plurality of rotating parts are arranged on the side of the parallel set. An AC voltage having a period shifted by π is further applied from the plurality of arranged rotating parts to the electrodes provided in the rotating parts selected at least one or more on each side surface.

  Moreover, the piezoelectric actuator of the present invention includes a pair of parallel side surfaces of the support portion having a plate shape with a predetermined thickness and another parallel set orthogonal to the parallel pair of side surfaces. A plurality of the rotating parts are arranged on each of the side surfaces, and at least one or more rotating parts are provided on each side surface from the plurality of rotating parts arranged on the parallel set of side surfaces. An AC voltage having a period shifted by π is further applied to the electrode.

  The piezoelectric actuator of the present invention is a regular octagonal prism in which two surfaces facing each other in the longitudinal direction are regular octagons, each having a rotating part made of a metal material, and each of the eight rectangular surfaces of the rotating part being piezoelectric. By providing a piezoelectric element composed of a body and fixing one face of the regular octagon to the support part, the natural vibration in the inter-plane direction of the four opposing rectangular faces provided with the piezoelectric element of the rotating part An alternating voltage having the same frequency as the number is applied to each of the piezoelectric elements with a period shifted by π / 4.

  The piezoelectric actuator of the present invention is characterized in that the directions of polarization of the piezoelectric elements are the same in the piezoelectric elements provided on the opposing rectangular surfaces of the rotating part.

  In the piezoelectric actuator of the present invention, the shape of the other side of the regular octagon facing the one surface fixed to the support portion of the rotating portion is the shape of the one surface side fixed to the support portion. It is characterized by making it larger.

  In the piezoelectric actuator of the present invention, a plurality of the rotating parts are arranged on each of a pair of parallel side surfaces of the support part having a plate shape having a predetermined thickness, and the plurality of rotating parts are arranged on the side of the parallel set. An AC voltage having a period shifted by π is further applied from the plurality of arranged rotating parts to the piezoelectric elements provided in the rotating parts selected at least one on each side. .

  Moreover, the piezoelectric actuator of the present invention includes a pair of parallel side surfaces of the support portion having a plate shape with a predetermined thickness and another parallel set orthogonal to the parallel pair of side surfaces. A plurality of the rotating parts are arranged on each of the side surfaces, and at least one or more rotating parts are provided on each side surface from the plurality of rotating parts arranged on the parallel set of side surfaces. An AC voltage with a period shifted by π is further applied to the piezoelectric element.

The piezoelectric actuator of the present invention, one by one said rotating portion, each parallel pair of side surfaces of the support portion having a predetermined thickness of the plate, the symmetrical through the support portion It arrange | positions like this.

Moreover, the piezoelectric actuator of the present invention includes a pair of parallel side surfaces of the support portion having a plate shape with a predetermined thickness and another parallel set orthogonal to the parallel pair of side surfaces. one by one the rotary portion on each side, characterized in that it arranged to be symmetrical through the support portion.

The camera device of the present invention is equipped with the piezoelectric actuator according to claim 1 or 5 as a drive mechanism for driving the image sensor at the time of camera shake correction.

The camera device of the present invention is equipped with a camera shake correction lens, and in the camera device for imaging a subject, the piezoelectric actuator according to claim 1 or 5 is used as a drive mechanism for driving the camera shake correction lens during camera shake correction. Mount.

The moving stage device of the present invention is equipped with the piezoelectric actuator according to claim 1 or 5 as a driving mechanism for driving the stage in the moving stage device that moves the moving object by driving the stage. .

  According to the present invention, it is possible to rotationally move the distal end side of the rotating part with a very large displacement. In addition, since the electrode or the piezoelectric element is provided on the rectangular surface of the rotating part that is a piezoelectric body or a metal member, it can be easily manufactured.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
First, the piezoelectric actuator 1 shown as the first embodiment of the present invention will be described with reference to FIG. FIG. 1A is a diagram illustrating a state in which the piezoelectric actuator 1 is fixed to the support portion 5, and FIG. 1B is a diagram in which the piezoelectric actuator 1 is viewed from the direction of arrow A illustrated in FIG. FIG.

  As shown in FIG. 1A, the piezoelectric actuator 1 is formed by fixing one of rotating parts 10 made of a piezoelectric body to a support part 5. The rotating part 10 and the supporting part 5 may be formed separately and fixed with an adhesive or the like, or the rotating part 10 and the supporting part 5 may be integrally formed with a piezoelectric body. Good.

  As shown in FIGS. 1A and 1B, the rotating unit 10 is a rectangular parallelepiped in which two surfaces, surfaces 10 a and 10 b arranged opposite to each other in the longitudinal direction of the rotating unit 10 are square. Therefore, the other surfaces, the surfaces 10c, 10d, 10e, and 10f are naturally rectangular.

  Electrodes 11, 12, 13, and 14 are formed on the rectangular surfaces 10c, 10d, 10e, and 10f, for example, by plating a metal material. Although not shown, the electrodes 11 to 14 are wired so that an alternating voltage can be applied thereto.

  As shown in FIG. 1, the electrodes 11, 12, 13, and 14 are part of the surface 10 a side that is the tip of the rotating unit 10 on the rectangular surface of the rotating unit 10, the surfaces 10 c, 10 d, 10 e, and 10 f, respectively. It is formed so as to avoid the surface area. As a result, as will be described later, when the piezoelectric actuator 1 is used as a drive mechanism for transporting a transport target, any one of the surface regions where the electrodes 11, 12, 13, and 14 are not formed is mounted. Since it can be set as the area | region to set, possibility of the damage of the electrode by mounting of a conveyance target object can be avoided actively.

  Although not shown, when the insulation of the object to be transported is maintained, the electrodes 11, 12, 13, and 14 are rotated on the rectangular surfaces and the surfaces 10c, 10d, 10e, and 10f of the rotating unit 10. You may extend and extend to the surface 10a side which is the front-end | tip of the part 10. FIG.

  As shown in FIG. 1A, when the longitudinal direction of the rotating unit 10 is the z-axis direction, the piezoelectric body forming the rotating unit 10 is polarized in the z-axis direction. In general, when the polarization direction of the piezoelectric body is the z-axis direction, values such as the relative permittivity, elastic constant, and piezoelectric constant in the x-axis direction and the y-axis direction orthogonal to the z-axis are the same, and only the z-axis direction is different. Value.

  In addition, as described above, the rotating unit 10 has two surfaces facing each other in the longitudinal direction of the rotating unit 10 and the surfaces 10a and 10b are square. The inter-surface distances between the surfaces 10c and 10e, which are surfaces, and the surfaces 10d and 10f are the same. Therefore, as shown in FIG. 1B, when the horizontal direction of the square surface 10a is set to the x-axis direction and the vertical direction is set to the y-axis direction, the surfaces 10c that are two sets of rectangular surfaces facing the rotating unit 10 10e, surfaces 10d and 10f, the natural frequencies of the rotating unit 10 when oscillating in the y-axis direction and the x-axis direction, which are also the directions between the surfaces, coincide with each other.

  Thus, by applying an AC voltage having the same frequency as the natural frequency to each of the electrodes 11 to 14, the rotating unit 10 that is a piezoelectric body is caused to resonate and vibrate both in the x-axis direction and in the y-axis direction. Can do. At this time, the vibration has a very large amplitude due to resonance.

  The piezoelectric actuator 1 having the above properties controls the AC voltage applied to each of the electrodes 11 to 14 as follows, so that the side of the square surface 10a facing the surface 10b fixed to the support portion 5 is controlled. Can be rotated.

  FIG. 2 is a control circuit diagram for applying an alternating voltage for rotating the piezoelectric actuator 1. As shown in FIG. 2, the control circuit is executed by transistors 51 to 54, FETs (Field effect transistors) 61 to 64, a CPU (Central Processing Unit) 71 that centrally controls the control circuit, and the CPU 71. And a memory 72 that stores various programs and data. In the control circuit, the CPU 71 that reads the program and data stored in the memory 72 controls the transistors 51 to 54, and the transistors 51 to 54 control the FETs 61 to 64, respectively. To control.

  FIG. 3 is a diagram schematically showing an AC voltage applied to each of the electrodes 11 to 14 under the control of the CPU 71, transistors 51 to 54, and FETs 61 to 64. As shown in FIG. 3, an AC voltage having a frequency shifted by π / 2 is applied to each of the electrodes 11 to 14 while having the same frequency as the natural frequency described above.

  In general, a piezoelectric body has a property of extending when a positive charge is applied and contracting when a negative charge is applied.

  Therefore, when a voltage like the state of a of FIG. 3 is applied to each electrode 11-14, in FIG.1 (b), the rotation part 10 is downward toward the paper surface, ie, the negative direction of a y-axis. Bend.

  Similarly, when a voltage as in the state of b in FIG. 3 is applied to each of the electrodes 11 to 14, in FIG. 1B, in the right direction (the positive direction of the x axis) toward the paper surface, When a voltage such as the state is applied, the rotating unit 10 moves upward (in the positive direction of the y-axis), and when a voltage as in the state d is applied, the rotating unit 10 moves in the left direction (the negative direction of the x-axis). Bend. By repeating this, the surface 10a side of the rotating part 10 can be rotated. As described above, since the frequency of the AC voltage to be applied is matched with the natural frequency of the rotating unit 10 in the x-axis direction and the y-axis direction, the surface 10a side that is the tip of the rotating unit 10 is very large due to resonance. A rotational movement of the displacement will occur.

  In addition, as shown in FIG. 3, when the amplitudes of the AC voltages are all the same, the surface 10a side that is the tip of the rotating unit 10 performs a circular motion, but by changing this amplitude, other than the circular motion In addition, various rotational movements such as elliptical movement can be performed.

  As described above, the piezoelectric actuator 1 is a rectangular parallelepiped in which two surfaces opposed to each other in the longitudinal direction, that is, the surfaces 10a and 10b are square, and the rotating unit 10 made of a piezoelectric body whose polarization direction is the longitudinal direction of the rectangular parallelepiped. The electrodes 11 to 14 are provided on each of the four rectangular surfaces of the rotating unit 10, the surfaces 10 c, 10 d, 10 e, and 10 f, and the surface 10 b is fixed to the support unit 5. Then, an alternating voltage having the same frequency as the natural frequency in the inter-surface direction between the two opposing rectangular surfaces of the rotating unit 10, the surfaces 10 c and 10 e and the surfaces 10 d and 10 f, is cycled by π / 2. It applies to each electrode 11-14 by shifting.

  Thereby, the surface 10a side which is the front-end | tip of the rotation part 10 can be rotationally moved by a very big displacement. Moreover, since the piezoelectric actuator 1 has a simple configuration in which the electrodes 11 to 14 are provided on the rectangular surfaces and the surfaces 10c, 10d, 10e, and 10f of the rotating unit 10 that is a piezoelectric body, the piezoelectric actuator 1 can be easily manufactured.

(When the tip of the rotating part 10 is enlarged)
As described above, the rotating portion 10 of the piezoelectric actuator 1 is a rectangular parallelepiped, but the surface side facing the surface 10b fixed to the support portion 5, that is, the tip of the rotating portion 10 described above is shown in FIG. It can also be made into the shape which enlarged the surface 10a side.

  4A and 4B show the piezoelectric actuator 2 in which the shape of the tip of the rotating unit 10 is increased. 4A is a diagram illustrating a state in which the piezoelectric actuator 2 is fixed to the support portion 5, and FIG. 4B is a diagram in which the piezoelectric actuator 2 is visually recognized from the direction of arrow A illustrated in FIG. FIG. Note that the piezoelectric actuator 2 has only the shape of the tip of the piezoelectric actuator 1 increased, and therefore the other components are denoted by the same reference numerals as those of the piezoelectric actuator 1 and description thereof is omitted.

  As shown in FIGS. 4A and 4B, the rotating portion 10 of the piezoelectric actuator 2 has a shape that is slightly larger than the rectangular parallelepiped main body portion 10 </ b> A in which the electrodes 11 to 14 are formed at the tip of the rotating portion 10. A tip portion 10B is provided. The distal end portion 10B is made of a piezoelectric body, and may be integrally formed with the main body portion 10A, or may be processed separately and adhered to the main body portion 10A with an adhesive or the like later. Further, when the tip portion 10B and the main body portion 10A are separately processed and retrofitted, the tip portion 10B may be processed with a material other than the piezoelectric body. When the tip 10B is provided in the rotating unit 10 to have a large shape in this way, the tip of the rotating unit 10 becomes heavy, and when the AC voltage as described above is applied to the electrodes 11 to 14 and rotated, The displacement can be further increased.

  Further, as will be described later, when this piezoelectric actuator 2 is used as a drive mechanism for transporting a transport object, the contact portion with the transport object is a tip portion 10B, so that the electrode 11 is easily damaged. -14 and a conveyance target object can be avoided.

  Below, the case where this piezoelectric actuator 2 is used as a drive mechanism of the actuator for conveyance which conveys a conveyance target object is demonstrated.

(When the piezoelectric actuator 2 is used as a drive mechanism for a one-dimensional transport actuator)
First, the case where the piezoelectric actuator 2 is used as a drive mechanism for a one-dimensional transport actuator that transports a transport target in a one-dimensional direction will be described.

  FIG. 5 shows the one-dimensional transport actuator 20. FIG. 5A is a top view showing a state in which the one-dimensional transport actuator 20 is viewed from the top surface direction, and FIGS. 5B and 5C are arrows A and A shown in FIG. It is the figure which showed a mode that the actuator 20 for 1-dimensional conveyance was visually recognized from the B direction.

  As shown in FIG. 5 (a), the one-dimensional transport actuator 20 includes a pair of rotating portions 10 formed of a metal or a piezoelectric material in a plate shape having a predetermined thickness and parallel side surfaces. The side surfaces 6 a and 6 b are arranged so as to be the target via the support portion 6, that is, the two piezoelectric actuators 2 are arranged on the target around the support portion 6. In FIGS. 5A and 5B, the piezoelectric actuator 2 disposed on the right side of the drawing is referred to as a piezoelectric actuator 2R, and the piezoelectric actuator 2 disposed on the left side is referred to as a piezoelectric actuator 2L.

  As shown in FIGS. 5B and 5C, the thickness of the support portion 6 that fixes the rotating portion 10 is the same as the thickness of the tip portion 10B of the rotating portion 10, and an AC voltage is applied to each of the electrodes 11-14. In a state where no voltage is applied, the height of the support portion 6 and the tip portion 10B is the same, and the level is maintained.

  The conveyance object conveyed by such a one-dimensional conveyance actuator 20 is placed on the distal end portion 10 </ b> B at both ends so as to cover the support portion 6. The piezoelectric actuators 2R and 2L are rotated by applying the AC voltage as described above, so that the distal end portion 10B of the rotating portion 10 in the direction of the double-headed arrow y shown in FIG. The conveyance object placed on the can be conveyed.

  The AC voltage applied to the electrodes 11 to 14 of the piezoelectric actuators 2R and 2L is controlled by the control circuit shown in FIG. FIG. 6 is a diagram schematically showing an AC voltage applied to each of the electrodes 11 to 14 under the control of the CPU 71, transistors 51 to 54, and FETs 61 to 64. As shown in FIG. 6, an alternating voltage having a period shifted by π / 2 is applied to each of the electrodes 11 to 14 while having the same frequency as the natural frequency described above. At this time, as shown in FIG. 6, the electrodes 11 of the piezoelectric actuators 2R and 2L, the electrodes 12 of the piezoelectric actuator 2R and the electrodes 14 of the piezoelectric actuator 2L, the electrodes 13 of the piezoelectric actuators 2R and 2L, and the electrodes 14 of the piezoelectric actuator 2R. The same AC voltage is applied to the electrodes 12 of the piezoelectric actuator 2L.

  FIG. 7 is a diagram showing a state in which the one-dimensional transport actuator 20 is viewed from the direction of arrow B shown in FIG. 5A when an AC voltage is applied to each of the electrodes 11 to 14. The one-dimensional transport actuator 20 has a transport object OB placed thereon.

  For example, when a voltage like the state of a of FIG. 6 is applied to each electrode 11-14, as shown to Fig.7 (a), the rotation part 10 is bent below toward the paper surface. Similarly, when a voltage like the state of b of FIG. 6 is applied to each electrode 11-14, as shown in FIG.7 (b), the rotation part 10 will be bent rightward toward the paper surface. Next, when a voltage like the state of c of FIG. 6 is applied, as shown in FIG.7 (c), the rotation part 10 will be bent upward toward the paper surface, and the conveyance target OB will be lifted. Further, when a voltage as in the state of d in FIG. 6 is applied, as shown in FIG. 7D, the rotating unit 10 is bent leftward toward the paper surface, and the conveyance object OB is moved leftward. And carry. By repeating this, the distal end portion 10B side of the rotating unit 10 is rotated, and the transfer object OB placed on the one-dimensional transfer actuator 20 can be transferred leftward.

  In FIG. 7, only the rotational movement of the piezoelectric actuator 2R is shown, but the piezoelectric actuator 2L disposed on the target via the piezoelectric actuator 2R and the support portion 6 also performs exactly the same rotational movement as the piezoelectric actuator 2R.

  Further, the rotating direction of the rotating unit 10 is not limited to the counterclockwise rotational movement as shown in FIG. 7, but the electrode 12 of the piezoelectric actuator 2R, the electrode 14 of the piezoelectric actuator 2L, and the electrode 14 of the piezoelectric actuator 2R shown in FIG. By switching the AC voltage applied to the electrode 12 of the piezoelectric actuator 2L, the operations in FIG. 7B and FIG. 7D are interchanged, so that a clockwise rotational motion can also be achieved. Thereby, the conveyance target object OB can be conveyed also to the right direction.

  Further, the piezoelectric actuator 1 may be used instead of the piezoelectric actuator 2 of the one-dimensional transport actuator 20.

  As described above, the one-dimensional transport actuator 20 uses the piezoelectric actuator 1 or the piezoelectric actuator 2 as a drive mechanism for transporting the transport object OB. OB can be transported freely. Further, when the piezoelectric actuator 2 is used as a drive mechanism for transporting the transport object OB, the contact portion with the transport object OB can be the tip portion 10B, so that the easily damaged electrodes 11 to 14 and the transport object Contact with OB can be avoided.

  With respect to such a one-dimensional transport actuator 20, a one-dimensional transport actuator 21 in which the number of rotating units 10 is increased as shown in FIG. The transport distance can be doubled. FIG. 8A is a top view showing a state where the one-dimensional transport actuator 21 is viewed from the top direction, and FIG. 8B is a one-dimensional transport view from the direction of arrow A shown in FIG. It is the figure which showed a mode that the actuator 21 was visually recognized.

  As shown in FIG. 8 (a), the one-dimensional transport actuator 21 is configured such that the six rotating portions 10 are formed of a metal or a piezoelectric body in a plate shape having a predetermined thickness and are parallel side surfaces. The three side surfaces 7a and 7b are arranged on the target, that is, six piezoelectric actuators 2 are arranged one by one via the support portion 7 in one direction. In FIG. 8A, the piezoelectric actuators 2 arranged on the right side as viewed in the drawing are piezoelectric actuators 2R1, 2R2, and 2R3, respectively, and the piezoelectric actuators 2 arranged on the left side are piezoelectric actuators 2L1, 2L2, and 2L3, respectively. To do.

  Note that the number of the rotating units 10 is not limited to six, but may be a plurality of numbers that can realize stable conveyance of the object to be conveyed while performing rotational movement control described later. Good. Further, the rotating unit 10 does not need to be arranged on the target via the support unit 7, and can be arranged so that stable conveyance of the conveyance target can be realized while performing the rotational motion control described later. Good.

  As shown in FIG. 8B, the thickness d1 of the support portion 7 that fixes the rotating portion 10 is smaller than the thickness d2 of the tip portion 10B of the rotating portion 10, and an AC voltage is applied to support the rotating portion 10 to the supporting portion 7. Even if it is moved downward in the thickness direction, the tip portion 10B of the rotating portion 10 is higher than the support portion 7.

  The conveyance object conveyed by such a one-dimensional conveyance actuator 21 is placed on the distal end portion 10 </ b> B at both ends so as to cover the support portion 7. The piezoelectric actuators 2R1 to 2R3, 2L1 to 2L3 are rotated by applying the AC voltage as described above, so that the rotating unit 10 is moved in the direction of the double-headed arrow y shown in FIG. The conveyance target object placed on the tip portion 10B can be conveyed.

  The AC voltage applied to the electrodes 11 to 14 of the piezoelectric actuators 2R1 to 2R3 and 2L1 to 2L3 is controlled by the control circuit shown in FIG. At this time, the control circuit stably supports the loaded object to be transported, and for each of the two groups of the minimum number of piezoelectric actuators 2 that can be transported, the AC voltage shown in FIG. Control is performed so as to apply an AC voltage obtained by further shifting the period of the AC voltage shown in FIG.

  Specifically, in the one-dimensional transport actuator 21, the piezoelectric actuators 2R1 to 2R3, 2L1 to 2L3 are divided into a first group including the piezoelectric actuators 2R1, 2R3, and 2L2, and a second group including the piezoelectric actuators 2R2, 2L1, and 2L3. The AC voltage shown in FIG. 6 and the AC voltage obtained by further shifting the AC voltage cycle shown in FIG. 6 by π are applied to each of the electrodes 11 to 14 in each group.

  As a result, the first group of piezoelectric actuators 2R1, 2R3, and 2L2 is controlled to perform the same rotational movement, and is placed on each tip portion 10B as can be seen from the arrangement relationship shown in FIG. The placed transport object can be stably supported and transported at three locations. Similarly, the second group of piezoelectric actuators 2R2, 2L1, and 2L3 is also controlled to perform the same rotational movement, and is mounted on each tip portion 10B as can be seen from the arrangement relationship shown in FIG. The placed transport object can be stably supported and transported at three locations.

  FIG. 9 shows a state in which the object to be transported OB is transported by the rotational motion of the rotating portion 10 of the piezoelectric actuator 2 grouped into the first group and the second group of the transport actuator 21. FIG. 9 is a diagram illustrating a state in which the transfer actuator 21 is viewed from the direction of the arrow A illustrated in FIG.

  As shown in FIG. 9A, first, an AC voltage is applied to the electrodes 11 to 14 of the first group of piezoelectric actuators 2R1, 2L2, and 2R3 so as to bend the rotating portions 10 downward toward the paper surface. The At this time, an AC voltage having a period shifted by π from the AC voltage applied to the first group is applied to the electrodes 11 to 14 of the piezoelectric actuators 2R2, 2L1, and 2L3 of the second group. 10 is bent upward toward the page. Accordingly, the transport object OB is lifted upward by the distal end portion 10B of each rotating portion 10 of the second group of piezoelectric actuators 2R2, 2L1, 2L3.

  Subsequently, the electrodes 11 to 14 of the first group of piezoelectric actuators 2R1, 2L2, and 2R3 have the rotating parts 10 on the paper surface as the alternating voltage that causes the rotating parts 10 to bend downward toward the paper surface decreases. An alternating voltage that gradually bends in the right direction is continuously applied, and finally each rotating unit 10 is bent in the right direction as shown in FIG. 9B. At this time, an AC voltage having a period shifted by π from the AC voltage applied to the first group is applied to the electrodes 11 to 14 of the piezoelectric actuators 2R2, 2L1, and 2L3 of the second group. With the decrease in the AC voltage that bends 10 upward toward the paper surface, an AC voltage that gradually bends each rotating portion 10 toward the left surface continues to be applied, and finally FIG. 9B. As shown in FIG. 2, each rotating part 10 is bent leftward. Therefore, the object OB is conveyed leftward by the tip portion 10B of each rotating portion 10 of the second group of piezoelectric actuators 2R2, 2L1, 2R3.

  As shown in FIG. 9B, at this time, the transport object OB is supported by the tip portions 10 </ b> B of all the rotating units 10.

  Next, the electrodes 11 to 14 of the first group of piezoelectric actuators 2R1, 2L2, and 2R3 are arranged so that each rotating unit 10 is placed on the sheet as the AC voltage that causes each rotating unit 10 to bend rightward toward the sheet is decreased. An alternating voltage that gradually bends upward is continuously applied, and finally each rotating unit 10 is bent upward as shown in FIG. 9C. At this time, an AC voltage is applied to each of the electrodes 11 to 14 of the piezoelectric actuators 2R2, 2L1, and 2L3 of the second group with a period shifted by π from the AC voltage applied to the first group. As the AC voltage that bends 10 to the left toward the paper surface decreases, an AC voltage that gradually bends each rotating portion 10 downward toward the paper surface continues to be applied, and finally FIG. As shown, each rotating part 10 is bent downward. Accordingly, the transport object OB is lifted upward by the distal end portion 10B of each rotating portion 10 of the first group of piezoelectric actuators 2R1, 2L2, and 2R3.

  Next, the electrodes 11 to 14 of the first group of piezoelectric actuators 2R1, 2L2, and 2R3 have each rotating part 10 placed on the paper surface as the alternating voltage that causes each rotating part 10 to bend upward toward the paper surface decreases. An alternating voltage that gradually bends in the left direction is continuously applied, and finally, as shown in FIG. 9D, each rotating unit 10 is bent in the left direction. At this time, an AC voltage is applied to each of the electrodes 11 to 14 of the piezoelectric actuators 2R2, 2L1, and 2L3 of the second group with a period shifted by π from the AC voltage applied to the first group. With the decrease in the AC voltage that bends 10 downward toward the paper surface, an AC voltage that gradually bends each rotating portion 10 toward the right surface continues to be applied, and finally in FIG. 9D. As shown, each rotating part 10 is bent to the right. Accordingly, the object OB is conveyed leftward by the tip portion 10B of each rotating portion 10 of the first group of piezoelectric actuators 2R, 2L2, 2R3.

  As shown in FIG. 9D, at this time, the object OB is supported by the tip portions 10B of all the rotating portions 10.

  By repeating this, the distal end portion 10B side of each rotating unit 10 can be rotationally moved, and the transfer object OB placed on the one-dimensional transfer actuator 21 can be transferred leftward.

  Moreover, the rotation direction of the rotation part 10 can be rotated not only counterclockwise as shown in FIG. 9 but also clockwise by controlling the applied AC voltage. Thereby, the conveyance target object OB can be conveyed also to the right direction.

  Further, the piezoelectric actuator 1 may be used instead of the piezoelectric actuator 2 of the one-dimensional transport actuator 20.

  Thus, the one-dimensional transport actuator 21 repeats the rotational motion of the first group of rotating units 10 and the rotational motion of the second group of rotating units 10 with a period shifted by π. While the rotation unit 10 is rotated once by the transfer actuator 20, the transfer object OB can be transferred by the same distance as when the rotation unit 10 is rotated twice.

  Therefore, similarly to the one-dimensional transport actuator 20, the one-dimensional transport actuator 21 has a very simple configuration by using the piezoelectric actuator 1 or the piezoelectric actuator 2 as a drive mechanism for transporting the transport object OB. However, the conveyance object OB in the one-dimensional direction can be freely conveyed, and the conveyance object OB can be conveyed at high speed.

  Further, when the piezoelectric actuator 2 is used as a drive mechanism for transporting the transport object OB, the contact portion with the transport object OB can be the tip portion 10B, so that the easily damaged electrodes 11 to 14 and the transport object Contact with OB can be avoided.

(When the piezoelectric actuator 2 is used as a two-dimensional transfer actuator)
Next, the case where the piezoelectric actuator 2 is used as a two-dimensional transport actuator for transporting a transport target in a two-dimensional direction will be described. The two-dimensional transfer actuator can be realized by combining two of the two one-dimensional transfer actuators 20 and 21 described above.

  First, a two-dimensional transfer actuator 30 formed by using two one-dimensional transfer actuators 20 will be described with reference to FIG. FIG. 10 is a top view showing a state in which the two-dimensional transport actuator 30 is viewed from the top surface direction.

  As shown in FIG. 10, the two-dimensional transport actuator 30 includes side surfaces 8 a and 8 b which are parallel side surfaces of the support portion 8 formed of a metal or a piezoelectric body in a plate shape with a predetermined thickness, and the side surfaces. The rotating parts 10 are arranged on the side faces 8c and 8d, which are parallel side faces orthogonal to 8a and 8b. That is, as shown in FIG. 10, the two-dimensional transport actuator 30 is configured by disposing the one-dimensional transport actuator 20 shown in FIG. 5 in each of two directions orthogonal to each other. In FIG. 10, the piezoelectric actuators 2 arranged on the right side, the left side, the upper side, and the lower side of the paper surface are referred to as piezoelectric actuators 2R, 2L, 2U, and 2D, respectively.

  The object to be conveyed that is conveyed by the two-dimensional conveyance actuator 30 is placed on the tip portion 10 </ b> B that is located on the left, right, top, and bottom so as to cover the support portion 8. Each of the piezoelectric actuators 2R, 2L, 2U, and 2D rotates by the application of the AC voltage as described above, so that the rotary unit 10 is moved in the x-direction and y-direction shown in FIG. The conveyance target object placed on the tip portion 10B can be conveyed.

  Specifically, when the object to be transported is transported in the direction of the double-ended arrow x, a voltage is applied to the electrodes 11 to 14 so as to lower each rotating portion 10 of the piezoelectric actuators 2R and 2L downward, and the piezoelectric actuator An AC voltage is applied to the electrodes 11 to 14 so that the 2U and 2D rotating units 10 are rotated. Conversely, when the object to be transported is transported in the direction of the double-ended arrow y, a voltage is applied to the electrodes 11 to 14 so as to lower each rotating portion 10 of the piezoelectric actuators 2U and 2D downward, and the piezoelectric actuators 2R, 2R, An AC voltage is applied to the electrodes 11 to 14 so that each 2 L rotating part 10 is rotated.

  The AC voltage applied when the rotating unit 10 is rotated is exactly the same as the AC voltage applied to the one-dimensional transport actuator 20, and thus the description thereof is omitted.

  Further, the piezoelectric actuator 1 may be used in place of the piezoelectric actuator 2 of the two-dimensional transport actuator 30.

  As described above, the two-dimensional transport actuator 30 uses the piezoelectric actuator 1 or the piezoelectric actuator 2 as a drive mechanism for transporting the transport target object, so that the transport target object in the two-dimensional direction can be obtained while having a very simple configuration. Transport can be performed freely. In addition, when the piezoelectric actuator 2 is used as a drive mechanism for transporting a transport target, the contact portion with the transport target can be the tip portion 10B, so that the electrodes 11 to 14 that are easily damaged and the transport target Contact can be avoided.

  Next, a two-dimensional transport actuator 31 formed by using two one-dimensional transport actuators 21 will be described with reference to FIG. FIG. 11 is a top view illustrating a state in which the two-dimensional transport actuator 31 is viewed from the top surface direction.

  As shown in FIG. 11, the two-dimensional transport actuator 31 includes side surfaces 9 a and 9 b which are parallel side surfaces of a support portion 9 formed in a plate shape with a predetermined thickness using a metal or a piezoelectric body, and the side surfaces. By arranging three twelve rotating parts 10 on the side faces 9c and 9d, which are parallel side faces perpendicular to 9a and 9b, via the support part 9, three are arranged. That is, as shown in FIG. 11, the two-dimensional transport actuator 31 is provided with the one-dimensional transport actuator 21 shown in FIG. 8 in each of two directions orthogonal to each other. In FIG. 11, the piezoelectric actuators 2 arranged on the right side, the left side, the upper side, and the lower side as viewed in the drawing are piezoelectric actuators 2R1, 2R2, 2R3, 2L1, 2L2, 2L3, 2U1, 2U2, 2U3, respectively. 2D1, 2D2, and 2D3.

  Note that the number of rotating units 10 is not limited to twelve, and while performing the same rotary motion control as the one-dimensional transport actuator 21 described above, the transport object is stable in each orthogonal direction. What is necessary is just a some number which can implement | achieve conveyance. In addition, the rotating unit 10 does not need to be arranged on the target via the support unit 9, and performs the rotational motion control similar to the above-described one-dimensional transport actuator 21, while in the orthogonal directions, What is necessary is just to arrange | position so that the stable conveyance can be implement | achieved.

  The object to be conveyed that is conveyed by the two-dimensional conveyance actuator 31 is placed on the tip 10 </ b> B that is on the left, right, and up and down so as to cover the support unit 9. The piezoelectric actuators 2R1 to 2R3, 2L1 to 2L3, 2U1 to 2U3, 2D1 to 2D3 are rotated by applying the AC voltage as described above, whereby both end arrows x direction and y direction shown in FIG. The conveyance object placed on the tip portion 10B of the rotation unit 10 can be conveyed in the dimension direction.

  Specifically, when the object to be transported is transported in the direction of the double-ended arrow x, a voltage is applied to the electrodes 11 to 14 so as to lower the rotating parts 10 of the piezoelectric actuators 2R1 to 2R3 and 2L1 to 2L3 downward. Then, an AC voltage is applied to the electrodes 11 to 14 so as to rotate the rotating parts 10 of the piezoelectric actuators 2U1 to 2U3 and 2D1 to 2D3. Conversely, when conveying the object to be conveyed in the direction of the double-ended arrow y, a voltage is applied to the electrodes 11 to 14 so as to lower each rotating part 10 of the piezoelectric actuators 2U1 to 2U3 and 2D1 to 2D3, An AC voltage is applied to the electrodes 11 to 14 so that the rotating parts 10 of the piezoelectric actuators 2R1 to 2R3 and 2L1 to 2L3 are rotated.

  The AC voltage applied when the rotating unit 10 is rotated is exactly the same as the AC voltage applied to the one-dimensional transport actuator 21 and thus will not be described.

  Further, the piezoelectric actuator 1 may be used in place of the piezoelectric actuator 2 of the two-dimensional transport actuator 31.

  In this way, the two-dimensional transport actuator 31 repeats the rotational movement of the first group of rotation units 10 and the rotation of the second group of rotation units 10 with a period shifted by π. While the rotation unit 10 is rotated once in the transfer actuator 30, the transfer object can be transferred by the same distance as the rotation unit 10 is rotated twice.

  Accordingly, the two-dimensional transport actuator 31 has a very simple configuration by using the piezoelectric actuator 1 or the piezoelectric actuator 2 as a drive mechanism for transporting the object to be transported, like the two-dimensional transport actuator 30. While being able to freely transport the transport object in the two-dimensional direction, it is possible to transport the transport object at high speed.

  In addition, when the piezoelectric actuator 2 is used as a drive mechanism for transporting a transport target, the contact portion with the transport target can be the tip portion 10B, so that the electrodes 11 to 14 that are easily damaged and the transport target Contact can be avoided.

(When the two-dimensional transport actuator 31 is applied to camera shake correction of a camera device)
Since the two-dimensional transport actuator 31 described with reference to FIG. 11 can transport a transport target in two directions orthogonal to each other, that is, in a two-dimensional direction, it can be applied to camera shake correction of a camera device. .

  There are various camera shake correction methods in the camera device. For example, an image sensor shift type camera shake correction in which the optical axis is corrected by moving the image sensor in accordance with the camera shake, or the correction lens is moved in a direction to cancel the camera shake. Thus, in the optical camera shake correction for correcting the optical axis, the camera shake correction is performed by driving the imaging device and the correction lens in the two-dimensional direction, respectively, and thus the two-dimensional transport actuator 31 can be used.

  In the case of a camera device having an image sensor shift type camera shake correction function, as shown in FIG. 12, by using the substrate 33 on which the image sensor 32 is mounted as a transport object of the two-dimensional transport actuator 31, excellent camera shake correction is achieved. Can be realized.

  Further, in the case of a camera device having an optical camera shake correction function, a lens holding unit 35 that holds a correction lens 34 as shown in FIG. Camera shake correction can be realized. Since the correction lens 34 used in this optical camera shake correction is disposed between the imaging lens and the imaging device, the support portion 9 is formed of a transparent member or according to the movable range of the correction lens 34. Thus, an opening is provided in the support portion 9.

  Further, in place of the two-dimensional transport actuator 31, a two-dimensional transport actuator 30 in which the number of rotating units 10 is minimized may be used.

  Since such two-dimensional transport actuators 30 and 31 have a very small structure, in addition to digital still cameras and digital video cameras, smaller portable information terminal devices such as mobile phones and PDAs (Personal Digital Assistants). For example, the present invention can be easily applied to camera shake correction of a camera device mounted on the camera.

  Furthermore, by using the moving object as a moving stage that moves the moving object, the above-described one-dimensional conveying actuator 20, 21, and two-dimensional conveying actuators 30 and 31 are moved in the one-dimensional direction or two-dimensionally. The present invention can be applied to a moving stage device that freely moves in a direction.

[Second Embodiment]
Next, the piezoelectric actuator 3 shown as the second embodiment of the present invention will be described with reference to FIG. FIG. 14A is a diagram showing a state in which the piezoelectric actuator 3 is fixed to the support portion 45, and FIG. 14B is a diagram in which the piezoelectric actuator 3 is visually recognized from the direction of arrow A shown in FIG. FIG.

  As shown in FIG. 14A, the piezoelectric actuator 3 is configured such that one of rotating parts 40 made of a metal material such as brass or iron is fixed to a support part 45. The rotating part 40 and the supporting part 45 may be formed separately and fixed with an adhesive or the like, or the rotating part 40 and the supporting part 45 may be integrally formed of a metal material. Good.

  As shown in FIGS. 14A and 14B, the rotating unit 40 is a rectangular parallelepiped in which two surfaces, surfaces 40 a and 40 b arranged opposite to each other in the longitudinal direction of the rotating unit 40 are square. Therefore, the other surfaces, the surfaces 40c, 40d, 40e, and 40f are naturally rectangular.

  Piezoelectric elements 41, 42, 43, and 44 made of a piezoelectric material are attached to the rectangular surfaces 40c, 40d, 40e, and 40f, respectively, with an adhesive or the like. Although not shown, the piezoelectric elements 41 to 44 are wired so that an alternating voltage can be applied. Further, although not shown, a ground line is wired to the rotating unit 40.

  As shown in FIG. 14, the electrodes 41, 42, 43, and 44 are part of the surface 40 a side that is the tip of the rotating unit 40 on the rectangular surface and the surfaces 40 c, 40 d, 40 e, and 40 f of the rotating unit 40, respectively. It is formed so as to avoid the surface area. Thus, as will be described later, when the piezoelectric actuator 3 is used as a drive mechanism for transporting a transport target, any one of the surface areas where the electrodes 41, 42, 43, and 44 are not formed is mounted. Since it can be set as the area | region to set, possibility of the damage of the electrode by mounting of a conveyance target object can be avoided actively.

  Although not shown, when the insulation of the object to be transported is maintained, the electrodes 41, 42, 43, and 44 are rotated on the rectangular surfaces and the surfaces 40c, 40d, 40e, and 40f of the rotating unit 40. You may extend and extend to the surface 40a side which is the front-end | tip of the part 40. FIG.

  As indicated by the arrows in FIG. 15, the piezoelectric elements 41 to 44 are polarized in such a direction that the piezoelectric elements 41 and 43 provided at the opposing positions and the piezoelectric elements 42 and 44 face each other.

  Further, as shown in FIG. 14A, the rotating unit 40 is opposed to the rotating unit 40 because the two surfaces and the surfaces 40 a and 40 b arranged opposite to each other in the longitudinal direction of the rotating unit 40 are square. The distance between the surfaces 40c and 40e, which are two sets of rectangular surfaces, and the surfaces 40d and 40f are the same. Accordingly, as shown in FIG. 14B, when the horizontal direction of the square surface 40a is set to the x-axis direction and the vertical direction is set to the y-axis direction, the surfaces 40c that are two sets of rectangular surfaces facing each other of the rotating unit 40. , 40e, and surfaces 40d and 40f, the natural frequencies of the rotating unit 40 when vibrating in the y-axis direction and the x-axis direction, which are also the directions between the surfaces, coincide with each other.

  Thereby, by applying an AC voltage having the same frequency as this natural frequency to each of the piezoelectric elements 41 to 44, the rotating portion 40, which is a metal member, is caused to resonate and vibrate both in the x-axis direction and in the y-axis direction. be able to. At this time, the vibration has a very large amplitude due to resonance.

  The piezoelectric actuator 3 having the properties as described above includes electrodes 11, 12, 13, and 14 formed of a rotating part 10 that is a piezoelectric body of the piezoelectric actuator 1 shown as the first embodiment of the present invention and a metal material. Are merely replaced with the rotating portion 40 made of a metal material and the piezoelectric elements 41, 42, 43, and 44 made of a piezoelectric body, so that the control circuit shown in FIG. The same rotational motion as that of the piezoelectric actuator 1 can be achieved by applying an alternating voltage having the same frequency as the above-described natural frequency but having a period shifted by π / 2.

  As described above, the piezoelectric actuator 3 is a rectangular parallelepiped having two surfaces opposed to each other in the longitudinal direction, the surfaces 40a and 40b, and the four rectangular surfaces of the rotating unit 40, the surfaces 40c, 40d, 40e, The piezoelectric elements 41 to 44 are provided in the respective 40 f and the surface 40 b is fixed to the support portion 45. Then, the AC voltage having the same frequency as the natural frequency in the inter-surface direction between the two opposing rectangular surfaces of the rotating unit 40, the surfaces 40c and 40e, and the surfaces 40d and 40f, is cycled by π / 2. It applies to each piezoelectric element 41-44 by shifting.

  Thereby, the surface 40a side which is the front-end | tip of the rotation part 40 can be rotationally moved by a very big displacement. The piezoelectric actuator 3 has a simple configuration in which the piezoelectric elements 41 to 44 are provided on the rectangular surfaces and the surfaces 40c, 40d, 40e, and 40f of the rotating portion 40 made of a metal material, and thus can be easily manufactured. .

  Furthermore, when the rotating part 40 is formed of a metal material as described above, piezoelectric elements 46 to 49 can be provided instead of the piezoelectric elements 41 to 44 as shown in FIG. The piezoelectric elements 46 to 49 are polarized so that the piezoelectric elements provided on the opposing rectangular surfaces of the rotating unit 40 face the same direction. Specifically, as indicated by arrows in FIG. 16, the piezoelectric elements 46 to 49 are polarized in the same direction by the piezoelectric elements 46 and 48 and the piezoelectric elements 47 and 49 provided at the opposed positions. ing.

  In order to rotationally move the rotary unit 40 provided with the piezoelectric elements 41 to 44, as described above, the piezoelectric elements 41 and 43, and the piezoelectric elements 42 and 44 are supplied with AC voltages whose periods are shifted by π. Since it needs to be applied, transistors and FETs corresponding to the respective piezoelectric elements are required.

  On the other hand, in the rotating part 40 provided with the piezoelectric elements 46 to 49 in which the piezoelectric elements provided at the opposed positions are polarized in the same direction, the piezoelectric element 46 and the piezoelectric element 48, and the piezoelectric element 47 and the piezoelectric element. 49 can be made to rotate by applying the same alternating voltage. This eliminates the need for transistors and FETs corresponding to the respective piezoelectric elements, thereby reducing the number of components and providing an advantage that the cost can be greatly reduced and the circuit scale can be reduced.

  In such a piezoelectric actuator 3 shown as the second embodiment, like the piezoelectric actuator 1 shown as the first embodiment, the tip of the rotating portion 40 can be enlarged like the piezoelectric actuator 2. . Further, the piezoelectric actuator 3 can be used as a driving mechanism for a one-dimensional transport actuator for transporting a transport object as shown in FIGS. 5 and 8 in a one-dimensional direction, as shown in FIGS. 10 and 11. It can also be used as a drive mechanism for a two-dimensional transport actuator that transports a simple transport object in a two-dimensional direction. Therefore, a two-dimensional transport actuator using the piezoelectric actuator 3 as a drive mechanism can be applied to the camera shake correction function of the camera device as shown in FIGS.

  In addition, the one-dimensional transfer actuator using the piezoelectric actuator 3 as a drive mechanism can be applied to a moving stage device that freely moves a moving object in a one-dimensional direction or a two-dimensional direction. .

  The configuration and the control method when the piezoelectric actuator 3 shown as the second embodiment as described above is deformed or applied to a one-dimensional transport actuator or a two-dimensional transport actuator are the same as those in the first embodiment. Since it becomes completely the same as the case of the piezoelectric actuator 1 shown as a form, description is abbreviate | omitted.

[Third Embodiment]
Next, a piezoelectric actuator 1A shown as a third embodiment of the present invention will be described with reference to FIG. FIG. 17A is a diagram illustrating a state in which the piezoelectric actuator 1A is fixed to the support portion 89, and FIG. 17B is a diagram in which the piezoelectric actuator 1A is viewed from the direction of arrow A illustrated in FIG. FIG.

  As shown in FIG. 17A, the piezoelectric actuator 1 </ b> A has one rotating portion 80 made of a piezoelectric body fixed to a support portion 89. The rotating unit 80 and the support unit 89 may be formed separately and fixed with an adhesive or the like, or the rotating unit 80 and the support unit 89 may be integrally formed with a piezoelectric body. Good.

  As shown in FIGS. 17A and 17B, the rotating unit 80 is an octagonal prism having two surfaces, faces 80 a and 80 b that are arranged to face each other in the longitudinal direction of the rotating unit 80, as an octagon. Accordingly, the other eight surfaces, the surfaces 80c, 80d, 80e, 80f, 80g, 80h, 80i, and 80j, are naturally rectangular.

  Here, with reference to FIG. 18, the specific shapes of the two octagonal faces, faces 80 a and 80 b, facing each other in the longitudinal direction of the rotating unit 80 will be described.

  FIG. 18 shows a square S1 with one side A. As shown in FIG. 18, the square S1 has four angles R1, R2, R3, and R4 that are each a right angle. When four right isosceles triangles T1, T2, T3, and T4 having the same shape including the four angles R1, R2, R3, and R4 are removed from the square S1, eight sides a, b, c, d, and e are removed. , F, g, h, an octagon E1 will be formed.

  As shown in FIG. 18, four square isosceles triangles T1, T2, T3, and T4 having the same shape and including four corners R1, R2, R3, and R4 of the square are removed from the square S1. Since the square E1 is formed, the sides h, b, d, and f which are the hypotenuses of the right-angled isosceles triangles T1, T2, T3, and T4 have the same length, and the sides a, c, e, g Also have the same length. In a special case where the lengths of the sides h, b, d, and f which are also the hypotenuses of the right-angled isosceles triangles T1, T2, T3 and T4 are defined to be the same as the lengths of the sides a, c, e and g. The octagon E1 is a regular octagon in which all sides have the same length and all inner angles are 135 degrees.

  Of the four sides facing the octagon E1, sides a and e, sides b and f, sides c and g, and sides d and h, between sides a and e and between sides c and g The distance between the sides b and f and the distance between the sides d and h are the same. When the octagon E1 is a regular octagon, the distances between the four opposing sides, the sides a and e, the sides b and f, the sides c and g, and the sides d and h are all the same. It becomes.

  In this way, the two octagonal faces, the faces 80a and 80b, which are opposed to each other in the longitudinal direction of the rotating unit 80, have the shape of the octagon E1 described with reference to FIG.

  As shown in FIGS. 17A and 17B, the eight rectangular surfaces described above, the surfaces 80c, 80d, 80e, 80f, 80g, 80h, 80i, and 80j, have electrodes 81, 82, 83 and 84 are formed by, for example, plating a metal material.

  Specifically, in order to form the rotating unit 80, first, as in the rotating unit 10 of the piezoelectric actuator 1 shown as the first embodiment, a rectangular parallelepiped having two faces opposed to each other in the longitudinal direction. Electrodes are formed by vapor deposition, plating, etc. on the four rectangular surfaces of the piezoelectric body whose polarization direction is the longitudinal direction of the rectangular parallelepiped. Then, the octagonal column rotating portion 80 is formed by scraping off the four corners of the rectangular parallelepiped so that the two square surfaces opposed to each other in the longitudinal direction form an octagon as described with reference to FIG. . At this time, the shape of the four parts to be scraped off is the same right isosceles triangular prism.

  As a result, as shown in FIG. 17B, electrodes 81, 82, 83, and 84 that are electrically insulated from each other are formed on the surfaces 80c, 80e, 80g, and 80i. Although not shown, the electrodes 81 to 84 are wired so that an alternating voltage can be applied thereto.

  As shown in FIG. 17, the electrodes 81, 82, 83, and 84 are part of the surface 80 a side that is the tip of the rotating unit 80 on the rectangular surface and the surfaces 80 c, 80 e, 80 g, and 80 i of the rotating unit 80, respectively. It is formed so as to avoid the surface area. Thus, as will be described later, when the piezoelectric actuator 1A is used as a drive mechanism for transporting a transport target, any one of the surface areas where the electrodes 81, 82, 83, and 84 are not formed is mounted. Since it can be set as the area | region to set, possibility of the damage of the electrode by mounting of a conveyance target object can be avoided actively.

  Although not shown, when the insulation of the object to be transported is maintained, the electrodes 81, 82, 83, 84 are rotated on the rectangular surfaces, surfaces 80c, 80e, 80g, 80i of the rotating unit 80. You may extend and extend to the surface 80a side which is the front-end | tip of the part 80. FIG.

  As shown in FIG. 17A, when the longitudinal direction of the rotating unit 80 is the z-axis direction, the piezoelectric body forming the rotating unit 80 is polarized in the z-axis direction. In general, when the polarization direction of the piezoelectric body is the z-axis direction, values such as the relative permittivity, elastic constant, and piezoelectric constant in the x-axis direction and the y-axis direction orthogonal to the z-axis are the same, and only the z-axis direction is different. Value.

  Further, as described above, the rotating unit 80 is rotated because the two surfaces opposed to each other in the longitudinal direction of the rotating unit 80, the surfaces 80a and 80b, are octagons as described with reference to FIG. The face-to-face distances between the faces 80c and 80g, which are two sets of opposing rectangular faces of the portion 80, and the faces 80e and 80i are the same. Therefore, as shown in FIG. 17B, when the lateral direction of the octagonal surface 80a is the x-axis direction and the vertical direction is the y-axis direction, the surfaces that are two pairs of rectangular surfaces of the rotating unit 80 facing each other. The natural frequencies of the rotating unit 80 when vibrating in the y-axis direction and the x-axis direction, which are also the directions between the respective surfaces 80c and 10g, and the surfaces 80e and 80i, coincide with each other.

  Thus, by applying an AC voltage having the same frequency as this natural frequency to each of the electrodes 81 to 84, the rotating portion 80, which is a piezoelectric body, is caused to resonate and vibrate both in the x-axis direction and in the y-axis direction. Can do. At this time, the vibration has a very large amplitude due to resonance.

  The piezoelectric actuator 1A having the above-described properties is obtained by merely changing the shape of the rotating portion 10 of the piezoelectric actuator 1 shown as the first embodiment of the present invention from a rectangular parallelepiped to an octagonal prism. The same operation as that of the piezoelectric actuator 1 is applied to the electrodes 81 to 84 by the AC voltage having the same frequency as the above-described natural frequency but shifted by π / 2 by the cycle. According to the principle, the octagonal surface 80a side facing the surface 80b fixed to the support portion 89 can be rotated.

  Note that when the amplitudes of the AC voltages are all the same, the surface 80a side, which is the tip of the rotating unit 80, performs a circular motion. By changing this amplitude, various other operations such as an elliptical motion can be performed besides the circular motion. Can be rotated.

  As described above, the piezoelectric actuator 1A removes the two right-angled isosceles triangles having the same shape including the four corners of the square from the square, the two surfaces, the surfaces 80a and 80b, which are opposed to each other in the longitudinal direction. An octagonal prism formed in this manner, having a rotating portion 80 made of a piezoelectric body whose polarization direction is the longitudinal direction of the octagonal prism, and eight surfaces having a rectangular shape of the rotating portion 80, a surface 80c, For example, electrodes 81 to 84 are provided on the surfaces 80c, 80e, 80g, and 80i every other surface with respect to 80d, 80e, 80f, 80g, 80h, 80i, and 80j, and the surface 80b is fixed to the support portion 89. It will be. Then, an alternating voltage having the same frequency as the natural frequency in the inter-surface direction between the two opposing rectangular surfaces provided with the electrodes of the rotating unit 80, the surfaces 80c and 80g, and the surfaces 80e and 80i is expressed as π / The period is shifted by 2 and applied to each of the electrodes 81 to 84.

  Thereby, the surface 80a side which is the front-end | tip of the rotation part 80 can be rotationally moved by a very big displacement. In addition, the piezoelectric actuator 1A can be easily manufactured because it has a simple configuration in which the electrodes 81 to 84 are provided on the rectangular surfaces and the surfaces 80c, 80e, 10g, and 80i of the rotating unit 80 that is a piezoelectric body.

  Further, the rotating part 80 of the piezoelectric actuator 1A is an octagonal column from which the corners existing in the circular motion direction of the rotating part 10 of the piezoelectric actuator 1 shown as the first embodiment which is a rectangular parallelepiped are removed. Since the elements that hinder the rotational movement are reduced as compared with the portion 10, the rotational movement can be further performed with a large displacement.

  In such a piezoelectric actuator 1A shown as the third embodiment, like the piezoelectric actuator 1 shown as the first embodiment, the tip of the rotating portion 80 can be enlarged like the piezoelectric actuator 2. .

  FIGS. 19A and 19B show a piezoelectric actuator 2A in which the shape of the tip of the rotating unit 80 is increased. As shown in FIGS. 19 (a) and 19 (b), when the tip 80B is provided on the rotating unit 80 to have a large shape, the tip of the rotating unit 80 becomes heavy, and the electrodes 81 to 84 are connected to the alternating current as described above. The displacement when rotating by applying a voltage can be further increased.

  Moreover, when this piezoelectric actuator 2A is used as a drive mechanism for transporting a transport object, the contact portion with the transport object is the tip 80B, so that the electrodes 81 to 84 that are easily damaged and the transport object Contact can be avoided.

  Further, the piezoelectric actuators 1A and 2A can be used as a driving mechanism for a one-dimensional transport actuator for transporting a transport target as shown in FIGS. 5 and 8 in a one-dimensional direction, as shown in FIGS. Such a transport object can be used as a drive mechanism for a two-dimensional transport actuator that transports the transport target in a two-dimensional direction. Therefore, a two-dimensional transfer actuator using the piezoelectric actuators 1A and 2A as a drive mechanism can be applied to the camera shake correction function of the camera device as shown in FIGS.

  Further, the one-dimensional transfer actuator using the piezoelectric actuators 1A, 2A as a drive mechanism is applied to a moving stage device that freely moves a moving object in a one-dimensional direction or a two-dimensional direction. You can also.

  The configuration and the control method in the case where the piezoelectric actuators 1A and 2A shown as the third embodiment as described above are applied to the one-dimensional transport actuator and the two-dimensional transport actuator are the same as the first embodiment. Since it is exactly the same as the case of the piezoelectric actuator 1 shown, the description is omitted.

[Fourth Embodiment]
Next, a piezoelectric actuator 3A shown as a fourth embodiment of the present invention will be described with reference to FIG. FIG. 20A is a diagram illustrating a state in which the piezoelectric actuator 3A is fixed to the support portion 99, and FIG. 20B is a diagram in which the piezoelectric actuator 3A is viewed from the direction of the arrow A illustrated in FIG. FIG.

  As shown in FIG. 20A, the piezoelectric actuator 3 </ b> A has one rotating part 90 made of a piezoelectric body fixed to a support part 99. The rotating part 90 and the supporting part 99 may be formed separately and fixed with an adhesive or the like, or the rotating part 90 and the supporting part 99 may be integrally formed with a piezoelectric body. Good.

  As shown in FIGS. 20A and 20B, the rotating unit 90 is a regular octagonal prism having two surfaces, surfaces 90 a and 90 b that are arranged opposite to each other in the longitudinal direction of the rotating unit 90 and having a regular octagon. Accordingly, the other eight surfaces, the surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j, are naturally rectangular.

  As shown in FIGS. 20 (a) and 20 (b), electrodes 91 to 98 are insulated from each other on the above-described eight rectangular surfaces, surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j. For example, a metal material is formed by plating so as to maintain the properties. Although not shown, the electrodes 91 to 98 are wired so that an AC voltage can be applied thereto.

  As shown in FIG. 20, the electrodes 91 to 98 are respectively on the rectangular surface of the rotating unit 90, the surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j, on the surface 90a side that is the tip of the rotating unit 90. It is formed so as to avoid a part of the surface area. Thus, as will be described later, when this piezoelectric actuator 3A is used as a drive mechanism for transporting the transport target, any one of the surface regions where the electrodes 91 to 98 are not formed is a region on which the transport target is placed. Therefore, it is possible to actively avoid the possibility of the electrode being damaged due to the placement of the conveyance object.

  Although not shown, when the insulation of the object to be conveyed is maintained, the electrode 91 is placed on the rectangular surface of the rotating unit 90, the surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j. ˜98 may be extended to the surface 90a side which is the tip of the rotating portion 90.

  As shown in FIG. 20A, when the longitudinal direction of the rotating unit 90 is the z-axis direction, the piezoelectric body forming the rotating unit 90 is polarized in the z-axis direction. In general, when the polarization direction of the piezoelectric body is the z-axis direction, values such as a relative dielectric constant, an elastic constant, and a piezoelectric constant in the axial direction orthogonal to the z-axis are the same, and are different only in the z-axis direction.

  In addition, as described above, the rotating unit 90 includes the four surfaces facing each other in the longitudinal direction of the rotating unit 90, and the surfaces 90a and 90b are regular octagons. The distances between the surfaces 90c and 90g, the surfaces 90d and 90h, the surfaces 90e and 90i, and the surfaces 90f and 90j are all the same. Therefore, as shown in FIG. 20 (b), the surfaces 90c and 90g, the surfaces 90d and 90h, the surfaces 90e and 90i, and the surfaces 90f and 90j, which are four sets of opposing rectangular surfaces of the rotating unit 90, are between the respective surfaces. The natural frequency of the rotating unit 90 when vibrating in the axial direction orthogonal to the z axis, which is also the direction, coincides.

  Thus, by applying an AC voltage having the same frequency as the natural frequency to each of the electrodes 91 to 98, the rotating unit 90, which is a piezoelectric body, is formed in each of the four rectangular face-to-face directions of the rotating unit 90 facing each other. It can resonate and vibrate. At this time, the vibration has a very large amplitude due to resonance.

  The piezoelectric actuator 3A having the above-described properties is a regular octagonal surface facing the surface 90b fixed to the support portion 99 by controlling the AC voltage applied to each of the electrodes 91 to 98 as shown below. The 90a side can be rotated.

  FIG. 21 is a diagram schematically showing the state of the AC voltage applied to each of the electrodes 91-98. As shown in FIG. 21, an alternating voltage having a frequency shifted by π / 4 is applied to each of the electrodes 91 to 98 while having the same frequency as the natural frequency described above.

  As described above, in general, a piezoelectric body has a property of expanding when a positive charge is applied and contracting when a negative charge is applied.

  Therefore, when a voltage like the state of a of FIG. 21 is applied to each electrode 91-98, in FIG. Bend.

  Similarly, when a voltage as in the state of b in FIG. 21 is applied to each of the electrodes 91 to 98, in FIG. 20B, in the right direction (the positive direction of the x axis) toward the paper surface, When a voltage such as the state is applied, the rotating unit 90 is moved upward (positive direction of the y-axis), and when a voltage such as the state of d is applied, the rotating unit 90 is moved leftward (the negative direction of the x-axis). Bend. By repeating this, the surface 90a side of the rotating unit 90 can be rotated. As described above, the frequency of the AC voltage to be applied is matched with the natural frequencies of the four face-to-face directions of the four opposing rectangular surfaces of the rotating unit 90 that are orthogonal to the z-axis direction of the rotating unit 90. The surface 90a side which is the front-end | tip of the rotation part 90 will carry out the rotational motion of a very big displacement.

  In addition, as shown in FIG. 21, when the amplitudes of the AC voltages are all the same, the surface 90a side which is the tip of the rotating unit 90 performs a circular motion, but by changing this amplitude, other than the circular motion In addition, various rotational movements such as elliptical movement can be performed.

  Thus, the piezoelectric actuator 3A is a regular octagonal prism having two octagonal surfaces with two surfaces opposed to each other in the longitudinal direction, the surfaces 90a and 90b, and a rotation made of a piezoelectric body whose polarization direction is the longitudinal direction of the regular octagonal prism. The electrodes 90 to 98 are provided on the eight rectangular surfaces of the rotating unit 90, the surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j, and the surface 90b is fixed to the support unit 99. To do. The same frequency as the natural frequency in the inter-surface direction of each of the four opposing rectangular surfaces provided with the electrodes of the rotating unit 90, surfaces 90c and 90g, surfaces 90d and 90h, surfaces 90e and 90i, and surfaces 90f and 90j. Is applied to each of the electrodes 91 to 98 with a period shifted by π / 4.

  Thereby, the surface 90a side which is the front-end | tip of the rotation part 90 can be rotationally moved by a very big displacement. In addition, the piezoelectric actuator 3A has a simple configuration in which the electrodes 91 to 98 are provided on the rectangular surface of the rotating unit 90, which is a piezoelectric body, and the surfaces 90c, 90d, 90e, 90f, 90g, 90h, 90i, and 90j. It can be easily manufactured.

  Further, the rotating part 90 of the piezoelectric actuator 3A is a regular octagonal prism from which the corners existing in the circular motion direction of the rotating part 10 of the piezoelectric actuator 1 shown as the first embodiment which is a rectangular parallelepiped are removed. Since the elements that hinder the rotational movement are reduced as compared with the portion 10, the rotational movement can be further performed with a large displacement.

  Furthermore, the piezoelectric actuator 3A is provided with electrodes 91 to 98 on all of the eight side surfaces of the rotating portion 90, which is a regular octagonal prism, and is controlled to apply an AC voltage as described with reference to FIG. Since the component causing the expansion and contraction of the piezoelectric actuator 1A increases, the rotational portion 90 can be caused to perform a rotational movement with a larger displacement than the rotational portion 80 of the piezoelectric actuator 1A.

  In such a piezoelectric actuator 3A shown as the fourth embodiment, similarly to the piezoelectric actuator 1A shown as the third embodiment, the tip of the rotating portion 90 can be enlarged like the piezoelectric actuator 2A. . Further, the piezoelectric actuator 3A can be used as a drive mechanism for a one-dimensional transport actuator for transporting a transport target as shown in FIGS. 5 and 8 in a one-dimensional direction, as shown in FIGS. It can also be used as a drive mechanism for a two-dimensional transport actuator that transports a simple transport object in a two-dimensional direction. Therefore, a two-dimensional transport actuator having the piezoelectric actuator 3A as a drive mechanism can be applied to the camera shake correction function of the camera device as shown in FIGS.

  In addition, the one-dimensional transport actuator using the piezoelectric actuator 3A as a drive mechanism and the two-dimensional transport actuator may be applied to a moving stage device that freely moves a moving object in a one-dimensional direction or a two-dimensional direction. it can.

  The configuration and control method in the case where the piezoelectric actuator 3A shown as the fourth embodiment as described above is deformed or applied to a one-dimensional transport actuator or a two-dimensional transport actuator are the same as those in the first embodiment. Since it becomes completely the same as the case of the piezoelectric actuator 1 shown as a form, description is abbreviate | omitted.

[Fifth Embodiment]
Next, a piezoelectric actuator 4A shown as a fifth embodiment of the present invention will be described with reference to FIG. 22A is a diagram showing a state in which the piezoelectric actuator 4A is fixed to the support portion 109, and FIG. 22B is a diagram in which the piezoelectric actuator 4A is visually recognized from the direction of arrow A shown in FIG. 22A. FIG.

  As shown in FIG. 22A, the piezoelectric actuator 4A is formed by fixing one of rotating parts 100 made of a metal material such as brass or iron to a support part 109, for example. The rotating part 100 and the supporting part 109 may be formed separately and fixed with an adhesive or the like, or the rotating part 100 and the supporting part 109 may be integrally formed of a metal material. Good.

  As shown in FIGS. 22A and 22B, the rotating unit 100 includes two surfaces 100a and 100b that are opposed to each other in the longitudinal direction of the rotating unit 100 as described with reference to FIG. It is an octagonal prism. Accordingly, the other eight surfaces, the surfaces 100c, 100d, 100e, 100f, 100g, 100h, 100i, and 100j are naturally rectangular.

  As shown in FIGS. 22A and 22B, the eight rectangular surfaces 100c, 100d, 100e, 100f, 100g, 100h, 100i, and 100j described above have piezoelectric elements 101 made of a piezoelectric material every other surface. , 102, 103, 104 are attached with an adhesive or the like. Although not shown, the piezoelectric elements 101 to 104 are wired so that an alternating voltage can be applied thereto. Further, although not shown, a ground line is wired to the rotating unit 100.

  As shown in FIG. 22, the piezoelectric elements 101, 102, 103, and 104 are respectively provided on the rectangular surface and the surfaces 100 c, 100 e, 100 g, and 100 i of the rotating unit 100 on the surface 100 a side that is the tip of the rotating unit 100. It is formed so as to avoid the surface area of the part. As a result, as will be described later, when this piezoelectric actuator 4A is used as a drive mechanism for transporting a transport object, any one of the surface areas where the piezoelectric elements 101, 102, 103, 104 are not formed is transported. Since it can be set as the area | region to mount, possibility of the damage of the electrode by mounting of a conveyance target object can be avoided actively.

  Although not shown, when the insulation of the object to be transported is maintained, the piezoelectric elements 101, 102, 103, 104 are placed on the rectangular surfaces, surfaces 100c, 100e, 100g, 100i of the rotating unit 100. You may extend and extend to the surface 100a side which is the front-end | tip of the rotation part 100. FIG.

  As indicated by arrows in FIG. 23, the piezoelectric elements 101 to 104 are polarized in such a direction that the piezoelectric elements 101 and 103 and the piezoelectric elements 102 and 104 provided at the opposing positions face each other.

  Further, as shown in FIG. 22 (a), the rotating unit 100 has an octagonal shape in which two surfaces 100a and 100b arranged opposite to each other in the longitudinal direction of the rotating unit 100 are described with reference to FIG. For this reason, the distance between the surfaces 100c and 100g, which are two sets of opposing rectangular surfaces of the rotating unit 100, and the surfaces 100e and 100i are the same. Therefore, as shown in FIG. 22B, when the lateral direction of the octagonal surface 100a is the x-axis direction and the vertical direction is the y-axis direction, the surfaces that are two sets of rectangular surfaces of the rotating unit 100 that face each other. The natural frequencies of the rotating unit 100 when vibrating in the y-axis direction and the x-axis direction, which are also the directions between the surfaces 100c and 100g, and the surfaces 100e and 100i, coincide with each other.

  Thus, by applying an AC voltage having the same frequency as the natural frequency to each of the piezoelectric elements 101 to 104, the rotating unit 100, which is a metal member, is caused to resonate and vibrate in both the x-axis direction and the y-axis direction. be able to. At this time, the vibration has a very large amplitude due to resonance.

  The piezoelectric actuator 4A having the above-described properties is provided with electrodes 81, 82, 83, 84 formed of a rotating portion 80, which is a piezoelectric body of the piezoelectric actuator 1A shown as the third embodiment of the present invention, and a metal material. Is merely replaced with the rotating part 100 made of a metal material and the piezoelectric elements 101, 102, 103, and 104 made of a piezoelectric material, the control circuit shown in FIG. Although the frequency is the same as the natural frequency described above, the same rotational motion as that of the piezoelectric actuator 1A can be caused by applying an alternating voltage whose period is shifted by π / 2.

  In this way, the piezoelectric actuator 4A removes from the square four right-angled isosceles triangles each including the four corners of the square from the two surfaces, the surfaces 100a and 100b, which are opposed to each other in the longitudinal direction. The octagonal prism formed as an octagon is formed every other surface with respect to the eight rectangular surfaces of the rotating part 100, surfaces 100c, 100d, 100e, 100f, 100g, 100h, 100i, 100j, for example, The piezoelectric elements 101 to 104 are provided on the surfaces 100c, 100e, 100g, and 100i, and the surface 100b is fixed to the support portion 109. Then, an alternating voltage having the same frequency as the natural frequency in the inter-surface direction between the two opposing rectangular surfaces provided with the piezoelectric elements of the rotating unit 100, the surfaces 100c and 100g, and the surfaces 100e and 100i, is expressed as π Applied to each of the piezoelectric elements 101 to 104 with a period shifted by / 2.

  Thereby, the surface 100a side which is the front-end | tip of the rotation part 100 can be rotationally moved by a very big displacement. In addition, the piezoelectric actuator 4A has a simple configuration in which the piezoelectric elements 101 to 104 are provided on the rectangular surfaces, surfaces 100c, 100e, 100g, and 100i of the rotating unit 100 made of a metal material, and thus can be easily manufactured. .

  In addition, the rotating part 100 of the piezoelectric actuator 4A is an octagonal column from which the corners existing in the circular motion direction of the rotating part 40 of the piezoelectric actuator 3 shown as the second embodiment which is a rectangular parallelepiped are removed. Since the elements that hinder the rotational movement are reduced as compared with the portion 40, the rotational movement can be further performed with a large displacement.

  Furthermore, when the rotating part 100 is formed of a metal material in this way, the piezoelectric elements 105 to 108 can be provided as shown in FIG. 24 instead of the piezoelectric elements 101 to 104. The piezoelectric elements 105 to 108 are polarized so that the piezoelectric elements provided on the opposing rectangular surfaces of the rotating unit 100 face each other in the same direction. Specifically, as indicated by arrows in FIG. 24, the piezoelectric elements 105 to 108 are polarized in the same direction between the piezoelectric elements 105 and 107 provided at the opposing positions and between the piezoelectric elements 106 and 108, respectively. ing.

  In order to rotate the rotating unit 100 provided with the piezoelectric elements 101 to 104, as described above, the piezoelectric elements 101 and 103, and the piezoelectric elements 102 and 104 are supplied with AC voltages having periods shifted by π. Since it needs to be applied, transistors and FETs corresponding to the respective piezoelectric elements are required.

  On the other hand, in the rotating unit 100 provided with the piezoelectric elements 105 to 108 in which the piezoelectric elements provided at the opposed positions are polarized in the same direction, the piezoelectric element 105 and the piezoelectric element 107, and the piezoelectric element 106 and the piezoelectric element. Each 108 can be rotated by applying the same AC voltage. This eliminates the need for transistors and FETs corresponding to the respective piezoelectric elements, thereby reducing the number of components and providing an advantage that the cost can be greatly reduced and the circuit scale can be reduced.

  In such a piezoelectric actuator 4A shown as the fifth embodiment, similarly to the piezoelectric actuator 1A shown as the third embodiment, the tip of the rotating unit 100 can be enlarged like the piezoelectric actuator 2A. . Further, the piezoelectric actuator 4A can be used as a drive mechanism for a one-dimensional transport actuator for transporting a transport target as shown in FIGS. 5 and 8 in a one-dimensional direction, as shown in FIGS. It can also be used as a drive mechanism for a two-dimensional transport actuator that transports a simple transport object in a two-dimensional direction. Therefore, a two-dimensional transfer actuator using the piezoelectric actuator 4A as a drive mechanism can be applied to the camera shake correction function of the camera device as shown in FIGS.

  Further, a one-dimensional transport actuator using the piezoelectric actuator 4A as a drive mechanism, and a two-dimensional transport actuator may be applied to a moving stage device that freely moves a moving object in a one-dimensional direction or a two-dimensional direction. it can.

  The configuration and control method in the case where the piezoelectric actuator 4A shown as the fifth embodiment as described above is deformed or applied to a one-dimensional transport actuator or a two-dimensional transport actuator are the same as those in the first embodiment. Since it becomes completely the same as the case of the piezoelectric actuator 1 shown as a form, description is abbreviate | omitted.

[Sixth Embodiment]
Next, a piezoelectric actuator 5A shown as a sixth embodiment of the present invention will be described with reference to FIG. FIG. 25A is a diagram illustrating a state in which the piezoelectric actuator 5A is fixed to the support portion 119, and FIG. 25B is a diagram in which the piezoelectric actuator 5A is viewed from the direction of arrow A illustrated in FIG. FIG.

  As shown in FIG. 25A, the piezoelectric actuator 5 </ b> A has one rotating portion 110 made of a metal material fixed to a support portion 119. The rotating part 110 and the supporting part 119 may be formed separately and fixed with an adhesive or the like, or the rotating part 110 and the supporting part 119 may be integrally molded with a metal material. Good.

  As shown in FIGS. 25A and 25B, the rotating unit 110 is a regular octagonal prism having two surfaces, surfaces 110a and 110b, which are arranged opposite to each other in the longitudinal direction of the rotating unit 110, as a regular octagon. Therefore, the other eight surfaces, the surfaces 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j are naturally rectangular.

  As shown in FIGS. 25 (a) and 25 (b), the eight rectangular surfaces, surfaces 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j described above, have piezoelectric elements 111 to 118, respectively. It is affixed with an adhesive or the like so as to maintain insulation. Although not shown, the piezoelectric elements 111 to 118 are wired so that an alternating voltage can be applied thereto.

  As shown in FIG. 25, each of the piezoelectric elements 111 to 118 has a surface 110a that is the tip of the rotating unit 110 on the rectangular surface of the rotating unit 110, the surfaces 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j. It is formed so as to avoid a partial surface area on the side. Thus, as will be described later, when this piezoelectric actuator 5A is used as a drive mechanism for transporting a transport target, any one of the surface regions where the piezoelectric elements 111 to 118 are not formed is placed. Therefore, it is possible to positively avoid the possibility of the electrode being damaged due to the placement of the conveyance object.

  Although not shown, when the insulation of the object to be transported is maintained, the piezoelectric element is placed on the rectangular surface of the rotating unit 110, the surfaces 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j. 111 to 118 may be formed to extend to the surface 110a side which is the tip of the rotating unit 110.

  Although not shown, the piezoelectric elements 111 to 118 face each other between the piezoelectric elements 111 and 115, the piezoelectric elements 112 and 116, the piezoelectric elements 113 and 117, and the piezoelectric elements 114 and 118 that are provided at positions facing each other. It is polarized in such a direction.

  In addition, as described above, the rotating unit 110 includes four surfaces of the rotating unit 110 facing each other because the two surfaces, the surfaces 110a and 110b, which are opposed to each other in the longitudinal direction of the rotating unit 110, are regular octagons. The distances between the surfaces 110c and 110g, the surfaces 110d and 110h, the surfaces 110e and 110i, and the surfaces 110f and 110j are all the same. Accordingly, as shown in FIG. 25 (b), the inter-plane directions of the surfaces 110c and 110g, the surfaces 110d and 110h, the surfaces 110e and 110i, and the surfaces 110f and 110j, which are four opposing rectangular surfaces of the rotating unit 110, respectively. However, the natural frequency of the rotating unit 110 when it vibrates in an axial direction orthogonal to each z-axis is the same.

  Thus, by applying an alternating voltage having the same frequency as the natural frequency to each of the piezoelectric elements 111 to 118, the rotating unit 110 made of a metal material is provided in each of four opposing rectangular directions of the rotating unit 110. Can be made to resonate and vibrate. At this time, the vibration has a very large amplitude due to resonance.

  In the piezoelectric actuator 5A having the above properties, the AC voltage applied to each of the piezoelectric elements 111 to 118 is the same as the above-described natural frequency as shown in FIG. By controlling so as to apply a shifted AC voltage, the regular octagonal surface 110a side facing the surface 110b fixed to the support portion 119 is rotated in the same manner as the rotation portion 90 of the piezoelectric actuator 3A described above. Can do.

  As described above, the piezoelectric actuator 5A is a regular octagonal prism in which two surfaces and surfaces 110a and 110b arranged opposite to each other in the longitudinal direction are regular octagons, and eight surfaces and surfaces having a rectangular shape of the rotating part 110 made of a metal material. 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j are provided with piezoelectric elements 111 to 118, respectively, and the surface 110b is fixed to the support portion 119. And, the same frequency as the natural frequency in the inter-surface direction of each of the four opposing rectangular surfaces provided with the piezoelectric elements of the rotating unit 110, the surfaces 110c and 110g, the surfaces 110d and 110h, the surfaces 110e and 110i, and the surfaces 110f and 110j. An alternating voltage having a frequency is applied to each of the piezoelectric elements 111 to 118 with a period shifted by π / 4.

  Thereby, the surface 110a side which is the front-end | tip of the rotation part 110 can be rotationally moved by a very big displacement. In addition, the piezoelectric actuator 5A has a simple configuration in which the piezoelectric elements 111 to 118 are provided on the rectangular surface of the rotating unit 110, which is a metal material, and the surfaces 110c, 110d, 110e, 110f, 110g, 110h, 110i, and 110j. Can be easily manufactured.

  In addition, the rotating part 110 of the piezoelectric actuator 5A is a regular octagonal prism from which a corner existing in the circular motion direction of the rotating part 40 of the piezoelectric actuator 3 shown as the second embodiment which is a rectangular parallelepiped is removed. Since the elements that hinder the rotational movement are reduced as compared with the portion 40, the rotational movement can be further performed with a large displacement.

  Furthermore, the piezoelectric actuator 5A is provided with piezoelectric elements 111 to 118 on all of the eight side surfaces of the rotating unit 110, which is a regular octagonal prism, and is controlled to apply an AC voltage as described with reference to FIG. Since the components that cause the body to expand and contract are increased, the rotating part 110 can be caused to perform a rotational motion with a displacement that is larger than that of the rotating part 100 of the piezoelectric actuator 4A.

  Moreover, the piezoelectric element provided in the position which the rotation part 110 opposes is made into the piezoelectric element polarized in the same direction, and the same alternating voltage is respectively applied to the piezoelectric element provided in the position which opposes Can be rotated. This eliminates the need for transistors and FETs corresponding to the respective piezoelectric elements, thereby reducing the number of components and providing an advantage that the cost can be greatly reduced and the circuit scale can be reduced.

  In such a piezoelectric actuator 5A shown as the sixth embodiment, similarly to the piezoelectric actuator 1A shown as the third embodiment, the tip of the rotating unit 110 can be enlarged like the piezoelectric actuator 2A. . Further, the piezoelectric actuator 5A can be used as a drive mechanism for a one-dimensional transport actuator for transporting a transport target as shown in FIGS. 5 and 8 in a one-dimensional direction, as shown in FIGS. It can also be used as a drive mechanism for a two-dimensional transport actuator that transports a simple transport object in a two-dimensional direction. Therefore, a two-dimensional transport actuator using the piezoelectric actuator 5A as a drive mechanism can be applied to the camera shake correction function of the camera device as shown in FIGS.

  In addition, the one-dimensional transport actuator using the piezoelectric actuator 5A as a drive mechanism, and the two-dimensional transport actuator may be applied to a moving stage device that freely moves a moving object in a one-dimensional direction or a two-dimensional direction. it can.

  The configuration and control method in the case where the piezoelectric actuator 5A shown as the sixth embodiment as described above is deformed or applied to a one-dimensional transport actuator or a two-dimensional transport actuator are the same as those in the first embodiment. Since it becomes completely the same as the case of the piezoelectric actuator 1 shown as a form, description is abbreviate | omitted.

  The above-described embodiment is an example of the present invention. For this reason, the present invention is not limited to the above-described embodiment, and various modifications can be made depending on the design and the like as long as the technical idea according to the present invention is not deviated from this embodiment. Of course, it is possible to change.

It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 1st Embodiment of this invention. It is the block diagram which showed the control circuit for applying the alternating voltage which rotates the said piezoelectric actuator. It is the figure which showed typically the mode of the alternating voltage applied to the electrode provided in the said piezoelectric actuator. It is a figure for demonstrating the shape which enlarged the front-end | tip of the rotation part of the said piezoelectric actuator. It is a figure for demonstrating the one-dimensional conveyance actuator which used the said piezoelectric actuator as a drive mechanism. It is the figure which showed typically the mode of the alternating voltage applied to each piezoelectric actuator of the said one-dimensional conveyance actuator. It is a figure for demonstrating the operation | movement which conveys a conveyance target object by the said one-dimensional conveyance actuator. It is a figure for demonstrating another example of the actuator for one-dimensional conveyance which used the said piezoelectric actuator as a drive mechanism. It is a figure for demonstrating the operation | movement which conveys a conveyance target object by the said one-dimensional conveyance actuator. It is a figure for demonstrating the actuator for two-dimensional conveyance which used the said piezoelectric actuator as a drive mechanism. It is a figure for demonstrating another example of the actuator for two-dimensional conveyance which used the said piezoelectric actuator as a drive mechanism. It is the figure which showed a mode that the conveyance target object was used as the image pick-up element in the said two-dimensional conveyance actuator. It is the figure which showed a mode that the conveyance target object was used as the correction | amendment lens in the said two-dimensional conveyance actuator. It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 2nd Embodiment of this invention. It is the figure which showed the polarization direction of the piezoelectric element provided in the rotation part of the said piezoelectric actuator. It is the figure which showed the polarization direction of the piezoelectric element provided in the rotation part of the said piezoelectric actuator. It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 3rd Embodiment of this invention. It is a figure for demonstrating the specific shape of the octagon opposingly arranged by the longitudinal direction of the rotation part of the said piezoelectric actuator. It is a figure for demonstrating the shape which enlarged the front-end | tip of the rotation part of the said piezoelectric actuator. It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 4th Embodiment of this invention. It is the figure which showed typically the mode of the alternating voltage applied to the electrode provided in the said piezoelectric actuator. It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 5th Embodiment of this invention. It is the figure which showed the polarization direction of the piezoelectric element provided in the rotation part of the said piezoelectric actuator. It is the figure which showed the polarization direction of the piezoelectric element provided in the rotation part of the said piezoelectric actuator. It is a figure for demonstrating the structure of the piezoelectric actuator shown as the 6th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Piezoelectric actuator 2 Piezoelectric actuator 3 Piezoelectric actuator 5 Support part 6 Support part 7 Support part 8 Support part 9 Support part 10 Rotating part 10A Main body part 10B Tip part 11 Electrode 12 Electrode 13 Electrode 14 Electrode 20 One-dimensional transport actuator 21 One-dimensional Conveying actuator 30 Two-dimensional conveying actuator 31 Two-dimensional conveying actuator 32 Imaging element 34 Correction lens 40 Rotating part 41 Piezoelectric element 42 Piezoelectric element 43 Piezoelectric element 44 Piezoelectric element 45 Supporting part 46 Piezoelectric element 47 Piezoelectric element 48 Piezoelectric element 49 Piezoelectric element 1A ... Piezoelectric actuator 2A ... Piezoelectric actuator 3A ... Piezoelectric actuator 4A ... Piezoelectric actuator 5A ... Piezoelectric actuator 80 ... Rotating part 90 ... Rotating part 100 ... Rotating part 110 ... Rotating part

Claims (14)

It is a regular octagonal prism with two faces opposed to each other in the longitudinal direction as a regular octagon, and has a rotating part made of a piezoelectric body with the polarization direction as the longitudinal direction of the regular octagonal prism,
By providing an electrode on each of the eight rectangular surfaces of the rotating part and fixing one of the regular octagonal faces to the support part,
An alternating voltage having the same frequency as the natural frequency in the inter-plane direction of the four opposing rectangular surfaces provided with the electrodes of the rotating part is applied to each of the electrodes with a period shifted by π / 4. Piezoelectric actuator. The shape of the other surface side of the regular octagon facing the one surface fixed to the support portion of the rotating portion is made larger than the shape of the one surface side fixed to the support portion. Item 2. The piezoelectric actuator according to Item 1. A plurality of the rotating parts are arranged on each of a pair of parallel side surfaces of the supporting part formed into a plate shape of a predetermined thickness;
An alternating voltage with a period shifted by π is further applied to the electrodes provided in the rotating unit selected from at least one rotating unit on each side surface from the plurality of rotating units arranged on the parallel set of side surfaces. the piezoelectric actuator according to claim 1 or claim 2, characterized in that the applied. A plurality of rotating portions are provided on each of a pair of parallel side surfaces of the support portion having a plate shape of a predetermined thickness and another parallel side surface orthogonal to the parallel set of side surfaces. Place one by one,
An alternating voltage with a period shifted by π is further applied to the electrodes provided in the rotating unit selected from at least one rotating unit on each side surface from the plurality of rotating units arranged on the parallel set of side surfaces. the piezoelectric actuator according to claim 1 or claim 2, characterized in that the applied. It is a regular octagonal prism having two octagonal faces facing each other in the longitudinal direction, and has a rotating part made of a metal material,
By providing a piezoelectric element made of a piezoelectric material on each of the eight rectangular surfaces of the rotating part, and fixing one of the regular octagonal faces to the support part,
An AC voltage having the same frequency as the natural frequency in the inter-plane direction of the four opposing rectangular surfaces provided with the piezoelectric elements of the rotating portion is applied to each piezoelectric element with a period shifted by π / 4. A characteristic piezoelectric actuator. The piezoelectric actuator according to claim 5 , wherein the piezoelectric elements provided on the opposing rectangular surfaces of the rotating portion have the same direction of polarization. The shape of the other surface side of the regular octagon facing the one surface fixed to the support portion of the rotating portion is made larger than the shape of the one surface side fixed to the support portion. The piezoelectric actuator according to claim 5 or 6 . A plurality of the rotating parts are arranged on each of a pair of parallel side surfaces of the supporting part formed into a plate shape of a predetermined thickness;
An alternating voltage in which the cycle is further shifted by π from the plurality of rotating units arranged on the parallel set of side surfaces to the piezoelectric element provided in the rotating unit selected at least one or more on each side surface the piezoelectric actuator according to any one of claims 5 to 7, characterized in applying a. A plurality of rotating portions are provided on each of a pair of parallel side surfaces of the support portion having a plate shape of a predetermined thickness and another parallel side surface orthogonal to the parallel set of side surfaces. Place one by one,
An alternating voltage in which the cycle is further shifted by π from the plurality of rotating units arranged on the parallel set of side surfaces to the piezoelectric element provided in the rotating unit selected at least one or more on each side surface the piezoelectric actuator according to any one of claims 5 to 7, characterized in applying a. One by one the rotary part to each of the parallel pair of side surfaces of the support portion having a predetermined thickness of the plate, characterized in that it arranged to be symmetrical through the support portion The piezoelectric actuator according to claim 1 or 5. The rotating unit is placed on each of a pair of parallel side surfaces of the support portion having a plate shape with a predetermined thickness and another parallel side surface orthogonal to the parallel set of side surfaces. pieces each piezoelectric actuator according to claim 1 or claim 5, characterized in that arranged so as to be symmetrical through the support portion. In a camera device that mounts an image sensor and images a subject,
6. A camera device equipped with the piezoelectric actuator according to claim 1 or 5 as a drive mechanism for driving the image sensor during camera shake correction. In a camera device that is equipped with an image stabilization lens and images a subject,
6. A camera device equipped with the piezoelectric actuator according to claim 1 or 5 as a drive mechanism for driving the camera shake correction lens during camera shake correction. In the stage device for movement that moves the moving object by driving the stage,
A moving stage device equipped with the piezoelectric actuator according to claim 1 or 5 as a driving mechanism for driving the stage.

Images