JP5286676B2 - Detection device, sensor and electronic device - Google Patents

Description

  The present invention relates to a detection device, a sensor, and an electronic device.

  Electronic devices such as a digital camera, a video camera, a mobile phone, and a car navigation system incorporate a gyro sensor for detecting a physical quantity that changes due to an external factor. Such a gyro sensor detects a physical quantity such as an angular velocity and is used for so-called camera shake correction, attitude control, GPS autonomous navigation, and the like.

  In recent years, a piezoelectric vibration gyro sensor has attracted attention as one of the gyro sensors. Among them, a quartz piezoelectric vibration gyro sensor using quartz as a piezoelectric material is expected as an optimum sensor for incorporation into many devices.

  In the detection device of the vibration gyro sensor, the gyro detection signal is output as an AM modulation signal in which the frequency of the drive signal is the carrier frequency and the angular velocity level is the amplitude. In the conventional detection device, a detection circuit including a synchronous detection circuit and a low-pass filter detects a desired signal from the gyro detection signal and outputs an analog output voltage. Then, the system side A / D converts this output voltage to obtain digital data corresponding to the angular velocity level.

However, the conventional detection device has a problem that a separate clock is required for A / D conversion, and the detection range is narrowed because the saturation margin of the circuit on the previous stage of the synchronous detection circuit is small. In addition, since it is necessary to compensate for temperature fluctuations and power supply voltage fluctuations using an analog circuit, there is a problem that the circuit becomes larger and the variation becomes larger.
JP-A-3-226620

  The present invention has been made in view of the technical problems as described above, and an object of the present invention is to provide a detection device, a sensor, and an electronic apparatus that can realize a reduction in circuit scale, a reduction in noise, and the like. There is.

  The present invention includes a drive circuit that drives a physical quantity transducer, and a detection circuit that receives a detection signal from the physical quantity transducer and detects a desired signal from the detection signal. The detection circuit amplifies the detection signal from the physical quantity transducer. An amplification circuit that is provided on the rear stage side of the amplification circuit and that performs a filtering process on the detection signal after amplification, and is provided on the rear stage side of the filter part, and is obtained based on the drive signal from the drive circuit. An A / D conversion unit that performs sample hold of the detection signal after the filtering process and performs A / D conversion of the sampled and held signal based on the sample hold signal, and the filter unit includes the drive circuit The center frequency is used as the center frequency, the frequency component of the desired signal is passed and the frequency component of the desired signal is removed. It related to the detection device including a bandpass filter having a.

  In the present invention, filter processing is performed on the detection signal after amplification, sample hold of the detection signal after filter processing is performed, and A / D conversion of the sampled and held signal is performed. In the present invention, the sample hold is performed based on the sample hold signal obtained based on the drive signal from the drive circuit. Therefore, the detection signal can be stably sampled and held at a sampling point where a high S / N ratio can be realized, and A / D conversion can be performed. In the present invention, a filter unit having a bandpass filter is provided on the upstream side of the A / D conversion unit. Accordingly, since unnecessary signals can be removed at the stage before sample hold and A / D conversion, the S / N ratio can be improved.

  In the present invention, the physical quantity transducer is a vibrator, and the band-pass filter is a detuning frequency Δf = | fd−fs corresponding to the difference between the drive-side resonance frequency fd and the detection-side resonance frequency fs of the vibrator. It may have a frequency characteristic that removes the component of | and passes the frequency component of the desired signal.

  In this way, unnecessary signals due to the detuning frequency can be removed, and the S / N ratio can be further improved.

  In the present invention, the A / D converter samples the detection signal based on the synchronization signal obtained based on the drive signal from the drive circuit and the sampling point adjustment data for selecting a sampling point. A sample and hold signal generating circuit for generating a sample and hold signal for performing the processing may be included.

  In this way, it is possible to realize sample-holding at a sampling point that enables a high S / N ratio only by performing adjustment with the sampling point adjustment data.

  In the present invention, the sample hold signal generation circuit may generate a sample hold signal based on sampling point adjustment data for selecting a maximum amplitude point of a desired signal as a sampling point.

  In this way, the ratio of signal level to noise can be increased, and the S / N ratio can be optimally improved.

  In the present invention, the sample and hold signal generation circuit may generate a sample and hold signal based on sampling point adjustment data for selecting a sampling point at which the offset is minimized during offset adjustment.

  In this way, it is possible to easily select a sampling point that can increase the S / N ratio.

  According to the present invention, the A / D converter performs a sample hold of the detection signal based on a sample hold signal having a frequency of 1 / N (N is an integer of 2 or more) of the frequency of the drive signal from the drive circuit. You may go.

  In this way, the signal frequency can be lowered to reduce power consumption.

  Further, in the present invention, the A / D conversion unit has fsck = fd / N> 2 when the frequency of the drive signal is fd, the frequency of the sample and hold signal is fsck, and the frequency bandwidth of the desired signal is fa. The detection signal may be sampled and held based on a sample and hold signal having a frequency of × fa.

  In this way, it is possible to appropriately sample a desired signal according to the sampling theorem.

  Further, the present invention may include a digital processing unit that is provided on the rear stage side of the A / D conversion unit and performs digital signal processing based on an output value of the A / D conversion unit.

  In this way, the processing performed in the analog circuit can be realized by digital signal processing, and the circuit can be reduced in scale and performance can be improved.

  In the present invention, the digital processing unit may perform digital filter processing for limiting a frequency bandwidth of a desired signal.

  In this way, it is possible to flexibly respond to requests for various applications.

  In the present invention, the digital processing unit may limit the frequency bandwidth of a desired signal by performing digital low-pass filter processing with a cutoff frequency lower than the cutoff frequency of the band-pass filter.

  In this way, it is possible to achieve both improvement of the S / N ratio and flexible response to various applications.

  According to the present invention, the physical quantity transducer is a vibrator, and the digital processing unit has a detuning frequency Δf = | fd−fs corresponding to a difference between the drive-side resonance frequency fd and the detection-side resonance frequency fs of the vibrator. Digital low-pass filter processing for removing the | component may be performed.

  In this way, even when the detuning frequency Δf is sufficiently small with respect to the frequency fd, the unnecessary signal component of the detuning frequency Δf can be reliably and easily removed.

  In the present invention, the digital processing unit may perform at least one of offset adjustment and sensitivity adjustment for the output value of the A / D conversion unit.

  In this way, it is possible to realize offset adjustment and sensitivity adjustment by digital signal processing without using an analog circuit.

  In the present invention, the digital processing unit may perform compensation processing for at least one of temperature fluctuation and power supply voltage fluctuation based on at least one of given temperature information and power supply voltage information.

  In this way, even when the temperature and the power supply voltage fluctuate, it is possible to realize automatic adjustment that cancels the fluctuation by the processing of the digital processing unit.

  The present invention further includes a multiplier circuit that generates a multiplied signal obtained by multiplying the frequency of the drive signal of the drive circuit, and the A / D converter is configured to perform A / D conversion based on the multiplied signal from the multiplier circuit. May be performed.

  In this way, A / D conversion is performed by a high-frequency multiplied signal, so that high-speed and high-precision A / D conversion can be realized, and the S / N ratio and the like can be improved.

  The present invention also includes a drive circuit that drives the physical quantity transducer, and a detection circuit that receives a detection signal from the physical quantity transducer and detects a desired signal from the detection signal. The detection circuit receives the detection signal from the physical quantity transducer. An amplifying circuit for amplifying, and a sample hold signal obtained on the basis of a driving signal from the driving circuit, provided on the rear stage side of the amplifying circuit, performs detection holding of the detection signal, An A / D converter that performs A / D conversion; and a multiplier that generates a multiplied signal obtained by multiplying the frequency of the drive signal of the drive circuit, wherein the A / D converter is the multiplier from the multiplier The present invention relates to a detection device that performs A / D conversion based on a signal.

  In the present invention, the detection signal is sampled and held, and A / D conversion of the sampled and held signal is performed. In the present invention, the sample hold is performed based on the sample hold signal obtained based on the drive signal from the drive circuit. Therefore, the detection signal can be stably sampled and held at a sampling point where a high S / N ratio can be realized, and A / D conversion can be performed. In the present invention, since A / D conversion is performed by a high frequency multiplied signal, high-speed and highly accurate A / D conversion can be realized, and the S / N ratio and the like can be improved.

  The present invention further includes a digital processing unit that is provided on the rear side of the A / D conversion unit and performs digital signal processing based on an output value of the A / D conversion unit, and the digital processing unit includes the multiplication circuit. Digital signal processing may be performed on the basis of the multiplied signal from.

  In this way, digital signal processing is performed by a high frequency multiplied signal, so that more intelligent and complex digital signal processing can be realized, and the performance of the detection apparatus can be improved.

  The present invention also relates to a sensor including any one of the detection devices described above and the physical quantity transducer.

  The present invention also relates to an electronic device including the sensor described above and a processing unit that performs processing based on detection information of the sensor.

  Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Not necessarily. For example, a case where the physical quantity transducer is a piezoelectric vibrator (vibration gyro) and the sensor is a gyro sensor will be described below as an example, but the present invention is not limited to this.

1. Configuration of Detection Device FIG. 1 shows a configuration example of the detection device 30 of the present embodiment. The detection device 30 includes a drive circuit 40 and a detection circuit 60. The detection device 30 is not limited to the configuration of FIG. 1, and various modifications such as omitting some of the components or adding other components are possible.

  The vibrator 10 (vibration gyro), which is a physical quantity transducer, is a piezoelectric vibrator formed of a piezoelectric material such as quartz. FIG. 2A shows a tuning fork type piezoelectric vibrator as an example of the vibrator 10. The vibrator 10 includes drive vibrators 11 and 12 and detection vibrators 16 and 17. The drive vibrators 11 and 12 are provided with drive terminals 2 and 4, and the detection vibrators 16 and 17 are provided with detection terminals 6 and 8. FIG. 2A shows an example in which the vibrator 10 is a tuning fork type, but the vibrator 10 of the present embodiment is not limited to such a structure. For example, it may be T-shaped or double T-shaped. Further, the piezoelectric material of the vibrator 10 may be other than quartz, for example, piezoelectric ceramic. Further, the vibrator 10 that is a physical quantity transducer may be an electrostatic MEMS (Micro Electro Mechanical Systems) that similarly performs a drive / detection operation by electrostatic capacitance. A physical quantity transducer is an element for converting a physical quantity (a quantity representing the degree of the property of an object, the unit of which is defined) into another physical quantity. As physical quantities to be converted, in addition to Coriolis force, force such as gravity, acceleration, and mass can be considered. In addition to the current (charge), the physical quantity obtained by the conversion may be a voltage or the like.

  The drive circuit 40 outputs a drive signal VD (drive voltage, drive current) to drive the vibrator 10 (physical quantity transducer in a broad sense) and receives a feedback signal IFD (output current) from the vibrator 10. As a result, an oscillation loop is formed to excite the vibrator 10. The detection circuit 60 receives the detection signals (detection current, charge) ISP and ISM from the vibrator 10 driven by the drive signal VD, and detects (extracts) a desired signal (Coriolis force signal) from the detection signals ISP and ISM.

  Specifically, an alternating drive signal VD from the drive circuit 40 is applied to the drive terminal 2 of the drive vibrator 11 shown in FIG. Then, the driving vibrator 11 starts to vibrate due to the reverse voltage effect, and the driving vibrator 12 also starts to vibrate due to the tuning fork vibration. At this time, a current (charge) generated by the piezoelectric effect of the drive vibrator 12 is fed back from the drive terminal 4 to the drive circuit 40 as a feedback signal IFD. As a result, an oscillation loop including the vibrator 10 is formed.

  When the drive vibrators 11 and 12 vibrate, the detection vibrators 16 and 17 vibrate in the direction shown in FIG. Then, currents (charges) generated by the piezoelectric effect of the detection vibrators 16 and 17 are output from the detection terminals 6 and 8 as detection signals ISP and ISM. Then, the detection circuit 60 receives the detection signals ISP and ISM from the vibrator 10 and detects a desired signal (desired wave) that is a signal corresponding to the Coriolis force.

  That is, when the vibrator 10 (gyro sensor) rotates around the detection axis 19 in FIG. 2A, a Coriolis force Fc is generated in a direction orthogonal to the vibration direction of the vibration speed v. For example, FIG. 2B schematically shows a view of the detection shaft 19 of FIG. In FIG. 2B, when the angular velocity when rotating around the detection axis 19 is Ω, the mass (equivalent mass) of the vibrator is m, and the vibration speed of the vibrator is v, the Coriolis force is Fc = 2. It is expressed as × m × v × Ω. Therefore, when the detection circuit 60 detects (extracts) a desired signal that is a signal corresponding to the Coriolis force, the rotational angular velocity Ω of the gyro sensor (vibrator) can be obtained.

  The vibrator 10 has a drive side resonance frequency fd and a detection side resonance frequency fs. Specifically, the natural resonance frequency of drive vibrators 11 and 12 (the natural resonance frequency of drive vibration mode) is fd, and the natural resonance frequency of detection vibrators 16 and 17 (the natural resonance frequency of detection vibration mode). Is fs. In this case, the drive vibrators 11 and 12 and the detection vibrators 16 and 17 can perform the detection operation and have an appropriate inter-mode coupling that does not cause unnecessary resonance coupling. Has a certain frequency difference. The detuning frequency Δf = | fd−fs |, which is this frequency difference, is set to a frequency that is sufficiently smaller than fd and fs.

  The drive circuit (oscillation control circuit) 40 includes an amplifier circuit 42, a binarization circuit 46, and an AGC (Automatic Gain Control) circuit 50. Note that some of these components may be omitted, or other components (for example, a phase adjustment circuit) may be added.

  The driving side amplification circuit (I / V conversion circuit) 42 amplifies the feedback signal IFD from the vibrator 10. Specifically, the output current (charge) as the feedback signal IFD is amplified and converted into a voltage, and the amplified signal VD2 is output. The amplifier circuit 42 can be constituted by an I / V (current / voltage) conversion circuit as shown in FIG.

  The binarization circuit 46 binarizes the amplified signal VD2 that is a sine wave, and outputs a synchronization signal (reference signal) CLK obtained by the binarization process to the detection circuit 60. The binarization circuit 46 can be realized by a comparator or the like that receives a sine wave (alternating current) signal VD2 and outputs a rectangular wave synchronization signal CLK.

  An AGC (Automatic Gain Control) circuit 50 automatically adjusts the gain of the drive signal. Specifically, the amplified signal VD2 is monitored to control the gain of the oscillation loop. The AGC circuit 50 can include a drive amplitude detection circuit and a gain control circuit (not shown). Here, the drive amplitude detection circuit detects the drive amplitude of the vibrator 10 and outputs a control voltage corresponding to the detected drive amplitude. This drive amplitude detection circuit outputs a control voltage corresponding to the difference between the voltage of the DC signal from the full-wave rectifier circuit and the reference voltage, and a full-wave rectifier circuit (integrator) that converts the AC signal VD2 into a DC signal. This can be realized by a differential amplifier. The gain control circuit controls the gain of the drive signal based on the control voltage from the drive amplitude detection circuit. This gain control circuit can be realized by a gain control amplifier.

  In the drive circuit 40, in order to keep the sensitivity of the gyro sensor constant, it is necessary to keep the amplitude of the drive voltage supplied to the vibrator 10 (drive vibrator) constant. For this reason, an AGC circuit 50 for automatically adjusting the gain is provided in the oscillation loop of the drive vibration system. Specifically, the AGC circuit 50 automatically adjusts the gain variably so that the drive amplitude (vibration speed v of the vibrator) is constant. The phase is adjusted so that the phase shift in the oscillation loop is 0 degree (0 deg). At the time of oscillation startup, the gain of the oscillation loop is set to a gain larger than 1 in order to enable high-speed oscillation startup. Further, the signal VD for driving the vibrator 10 may be a sine wave or a rectangular wave.

  The detection circuit 60 includes an amplifier circuit 70, a filter unit 80, and an A / D conversion unit 100. Note that some of these components may be omitted, or other components may be added.

  The detection-side amplifier circuit 70 amplifies the detection signals ISP and ISM from the vibrator 10. Specifically, the current (charge) generated in the vibrator 10 is converted into a voltage and amplified. The amplifier circuit 70 receives the two I / V (Q / V) conversion circuits in FIG. 3A to which the signals ISP and ISM are input, and the outputs of these two I / V conversion circuits. The differential amplifier circuit shown in FIG. Note that a single-ended amplifier circuit as shown in FIG. In this case, the amplifier circuit 70 can be constituted by one I / V conversion circuit.

  The filter unit 80 is provided on the subsequent stage side of the amplifier circuit 70, and performs a filter process on the detection signal VS3 after amplification. The filter unit 80 may include a band pass filter BPF. This band pass filter BPF has a frequency characteristic in which the driving frequency (fd) in the driving circuit 40 is the center frequency, the frequency component of the unnecessary signal (frequency component other than fd) is removed, and the frequency component of the desired signal is passed. That is, the upper and lower cut-off frequencies (cut-off frequencies) are set to frequencies for removing frequency components of unnecessary signals. Further, the band pass filter BPF may have a frequency characteristic that removes the component of the detuning frequency Δf = | fd−fs | and passes the frequency component of the desired signal.

  The A / D converter 100 is provided on the rear stage side of the filter unit 80 (amplifier circuit 70), and performs A / D conversion of the detection signal. Specifically, based on the sample hold signal SCK obtained based on the drive signal of the drive circuit 40, the sample signal VS5 after the filter processing in the filter unit 80 is sampled and held, and the A of the sampled and held signal VS6 is obtained. / D conversion is performed.

  The A / D conversion unit 100 can include a sample hold signal generation circuit 110, a sample hold circuit 120, and an A / D converter 130.

  The sample hold signal generation circuit 110 generates a sample hold signal for sampling the detection signal VS5. Specifically, a synchronization signal CLK (including a signal obtained by multiplying CLK) obtained based on the drive signal VD2 (VD) from the drive circuit 40, sampling point adjustment data for selecting a sampling point to be described later, Based on the above, a sample hold signal SCK (sample hold clock) is generated. In this case, for example, based on sampling point adjustment data for selecting a point of maximum amplitude of a desired signal (Coriolis force signal) as a sampling point, or sampling point adjustment data for selecting a sampling point for minimizing an offset, the sample hold signal SCK. Is generated.

  The sample hold circuit 120 samples and holds the detection signal VS5 based on the sample hold signal SCK from the sample hold signal generation circuit 110. In this case, the sample signal may be sampled and held at the thinned sampling points by using the sample hold signal SCK having a frequency 1 / N (N is an integer of 2 or more) of the frequency of the drive signal.

  The A / D converter 130 performs A / D conversion on the signal sampled and held in the sample hold circuit 120 (hold signal), and outputs a digital output value ADQ. As this A / D converter 130, for example, a successive approximation A / D converter can be adopted. In this case, the A / D converter 130 can include a comparator, a successive approximation register, and a D / A converter (not shown). The comparator compares the analog signal after the D / A conversion from the D / A converter with the sample hold signal. The successive approximation register stores the output signal data of the comparator. The D / A converter D / A converts the digital data from the successive approximation register and outputs an analog signal. The A / D converter 130 is not limited to the successive approximation type, and various types of A / D converters such as a parallel comparison type and a tracking comparison type can be employed.

  FIG. 4 shows the configuration of a detection device 31 of a comparative example of the present embodiment, and FIGS. 6 and 7 show signal waveform examples for explaining the operation. FIG. 7 is an enlarged view of a part of the signal waveform of FIG. In this detection device 31, the synchronous detection circuit 150 performs synchronous detection on the detection signal VS5 based on the synchronous signal CLK from the drive circuit 40. Then, the low-pass filter LPF1 performs low-pass filter processing of the synchronous detection output that is the signal VS10 after synchronous detection. An offset adjustment circuit 152 formed of an analog circuit such as a D / A converter performs offset adjustment of the LPF output that is the signal VS11 after the low-pass filter processing. The output voltage VSQ is output via the output amplifier 154. The external A / D converter 200 performs A / D conversion of the output voltage VSQ and outputs a digital output value ADQ.

  As shown in FIG. 7, the detection signal (sensor signal) from the vibrator 10 includes a desired signal (desired wave, gyro signal) and an unnecessary signal (unnecessary wave). Since the amplitude of the unnecessary signal is generally much larger than the amplitude of the desired signal, the required performance for the detection device is increased. This unnecessary signal may be caused by mechanical vibration leakage or electrostatic coupling leakage as shown in FIG. Some are caused by detuning frequency Δf, 2fd (2ωd), DC offset, and the like. The unnecessary signal of mechanical vibration leakage is generated due to an imbalance of the shape of the vibrator 10 or the like. The unnecessary signal of the electrostatic coupling leakage is generated when the drive signal VD leaks to the input terminals of the ISP and ISM through the parasitic capacitors CP and CM. And since the unnecessary signal of mechanical vibration leakage is orthogonal to the desired signal, it can be removed by synchronous detection. On the other hand, an unnecessary signal for electrostatic coupling leakage is output as a DC offset.

  For example, in the detection signal before synchronous detection, there is a DC offset unnecessary signal in the DC frequency band. Further, an unnecessary signal and a desired signal of mechanical vibration leakage exist in the frequency band of fd. On the other hand, after synchronous detection, the desired signal in the fd frequency band appears in the DC and 2fd frequency bands. An unnecessary signal (DC offset) in the DC frequency band appears in the fd frequency band, and an unnecessary signal (mechanical vibration leakage) in the fd frequency band appears in the 2fd frequency band. Therefore, by smoothing the signal after synchronous detection with the low-pass filter LPF1, it is possible to remove frequency components of unnecessary signals in frequency bands such as fd and 2fd.

  However, the comparative example of FIG. 4 has the following problems.

  That is, in the comparative example, it is necessary to provide the synchronous detection circuit 150 and the low-pass filter LPF1 inside the detection device 31, and the A / D conversion unit 200 needs to be provided outside the detection device 30. Therefore, the scale of the vibration gyro sensor becomes large.

  In the comparative example, in order to operate the external A / D conversion unit 200, an A / D conversion clock ADCK is separately required, and a circuit for generating the A / D conversion clock ADC is required.

  If the frequency band of the desired signal is limited to a narrow band according to the application, the size of the resistors and capacitors constituting the low-pass filter LPF1 increases, and the circuit becomes larger. In addition, when an SCF (switched capacitor filter) is employed as the low-pass filter LPF1 in order to obtain a steep frequency characteristic, an operational amplifier, a switching element, and a capacitor are required, so that the circuit becomes large. Further, an analog circuit such as a D / A converter for realizing the offset adjustment circuit 152 is required, and an anti-aliasing low-pass filter LPF2 corresponding to the A / D conversion band is also required.

  In the comparative example, when the gain before synchronous detection is increased, the synchronous detection output is clamped by circuit saturation as shown by A1 in FIG. 8, and the waveform is distorted. When the waveform is distorted in this way, the sensitivity characteristic is not linear and is saturated in the upper and lower ranges, so that the detection range is narrowed.

  Further, in the comparative example, compensation for temperature variation or the like needs to be performed in an analog manner, so that the circuit scale becomes large and variation adjustment is also necessary.

  According to this embodiment, the problems of the comparative example as described above can be solved. For example, FIG. 9, FIG. 10, and FIG. 11 show signal waveform examples for explaining the operation of this embodiment.

  In this embodiment, as shown in FIG. 9, the sample hold signal generation circuit 110 receives the synchronization signal CLK generated by the drive signal, and generates the sample hold signal SCK based on the synchronization signal CLK. Then, as shown by B1 in FIG. 9, the sample hold circuit 120 performs sample hold of the detection signal (desired signal) based on the signal SCK, and outputs the sampled and held signal.

  In this case, as shown in FIG. 10, the detection signal includes a desired signal which is a gyro signal and an unnecessary signal such as mechanical vibration leakage or electrostatic coupling leakage. In the present embodiment, the signal in which the desired signal and the unnecessary signal are mixed is sampled and held as indicated by C1 in FIG. 10 using the sample hold signal SCK obtained from the synchronization signal CLK. Then, as shown at C2, the sampled and held signal (sample and hold output) is A / D converted to obtain a digital output value ADQ.

  In this case, as shown in C3 in FIG. 10, sample hold is performed using the maximum amplitude point of the desired signal as a sampling point. Since the desired signal and the unnecessary signal for mechanical vibration leakage are orthogonal, if sampling and holding is performed at such a sampling point, a sampling point is set near the zero cross point of the unnecessary signal for mechanical vibration leakage as shown at C4. Therefore, the unnecessary signal component of mechanical vibration leakage can be reduced to almost zero. Therefore, as in the case of synchronous detection, unnecessary signals of mechanical vibration leakage can be removed, and the S / N ratio can be improved. The unnecessary signal of electrostatic coupling leakage can be removed using the differential amplifier circuit of the amplifier circuit 70 described with reference to FIG.

  In this embodiment, the detection signal is an AM modulation signal, and a configuration unique to the gyro sensor is used in which a signal having a carrier frequency with an accurate frequency and phase exists as a drive signal. That is, since the detection signal is sampled and held by the sample hold signal obtained based on the drive signal, the detection signal is output at a sampling point that can realize a high S / N ratio as shown by C1, C3, and C4 in FIG. It becomes possible to hold the sample stably. In particular, when a crystal is used as the vibrator, the sample hold signal obtained from the drive signal is also a signal generated by high-accuracy crystal oscillation, so that the accuracy of sample hold and A / D conversion can be improved.

  In the comparative example of FIG. 4, an analog low-pass filter having a large circuit scale is required, and the A / D converter 200 is required outside in addition to the synchronous detection circuit 150, so that the scale of the gyro sensor is large. turn into.

  On the other hand, in the present embodiment, the A / D conversion unit 100 has both an A / D conversion function of the output value and a synchronous detection function of removing unnecessary signals such as mechanical vibration leakage, and therefore, compared with FIG. The gyro sensor can be made compact.

  In this embodiment, since the synchronization signal CLK is used as the A / D conversion clock ADCK, it is not necessary to prepare an A / D conversion clock separately, and the circuit can be reduced in scale.

  Further, according to the present embodiment, it is possible to improve the saturation margin in the circuit on the front stage side of the A / D conversion unit 100. For example, when the gain in the circuit on the front stage side of the A / D converter 100 is increased, not only the desired signal but also the amplitude of the unnecessary signal of mechanical vibration leakage increases, and the detection signal is detected by circuit saturation as indicated by D1 in FIG. The waveform may be distorted.

  Even in such a case, according to the present embodiment, since the sample hold is performed at the maximum amplitude point of the desired signal as indicated by D2, D3, and D4, the distorted waveform portion is sampled and held as indicated by D5. You don't have to. Therefore, the saturation margin in the circuit on the front stage side of the A / D conversion unit 100 is improved. As a result, it is possible to increase the gain of these front-side circuits and reduce the gain of the rear-side circuits, improve the S / N ratio, and reduce noise.

2. Band Pass Filter As shown in FIG. 1, in this embodiment, a band pass filter BPF is provided on the upstream side of the A / D conversion unit 100. As shown in FIG. 12A, the center frequency of the band pass filter BPF is set to the drive frequency fd, for example. And it has the frequency characteristic which removes the frequency component of the unnecessary signal in various bands, such as DC band. On the other hand, the frequency component of the desired signal that has been AM-modulated at the drive frequency fd has a frequency characteristic that allows it to pass.

  If such a bandpass filter BPF is provided, unnecessary signals (other than mechanical vibration leakage) can be removed at the stage before sample hold and A / D conversion. Therefore, it is possible to improve the S / N ratio and reduce the DC offset. Further, the band pass filter BPF can have both an unnecessary signal removal function and an A / D conversion anti-aliasing function, so that both the improvement of the S / N ratio and the reduction of the circuit scale can be achieved.

  As shown in FIG. 12B, the band pass filter BPF removes the component of the detuning frequency Δf = | fd−fs | corresponding to the difference between the drive side resonance frequency fd and the detection side resonance frequency fs. The frequency characteristic of allowing the frequency component of the desired signal to pass may be provided.

  That is, among the unnecessary signals, an unnecessary signal due to the detuning frequency Δf = | fd−fs | is generated when a signal having the detection-side resonance frequency fs is mixed with the detection signal. For example, in order to improve the response of the gyro sensor, the detection vibrator may be oscillated at a natural resonance frequency fs with a minute amplitude in an idling manner. Alternatively, an external vibration from outside the gyro sensor may be applied to the vibrator, so that the detection vibrator may vibrate at the natural resonance frequency fs. When the detection vibrator vibrates at the frequency fs as described above, a signal having the frequency fs is mixed into the signal input to the A / D conversion unit 100. Since the A / D converter 100 performs sample and hold based on the sample and hold signal having the frequency fd, an unnecessary signal having a detuning frequency Δf = | fd−fs | corresponding to the difference between the frequencies fd and fs is generated. .

  Even in such a case, as shown in FIG. 12B, if the bandpass filter BPF has a frequency characteristic for removing the detuning frequency, the adverse effect of the unnecessary signal of the detuning frequency can be reduced. The N ratio can be further improved.

  FIG. 13A shows a configuration example of the bandpass filter BPF. In FIG. 13A, a passive high-pass filter is configured by the front-stage capacitor CC1 and the resistor RC1, and an active low-pass filter is configured by the rear-stage capacitor CC2, the resistor RC2, and the operational amplifier OPC. Realized. The low-frequency cutoff frequency fcl (cut-off frequency) is set by the capacitor CC1 and the resistor RC1, and the high-frequency cutoff frequency fc2 is set by the capacitor CC2 and the resistor RC2.

  The configuration of the bandpass filter BPF is not limited to that shown in FIG. 13A, and various modifications can be made. For example, in FIG. 13B, an active high pass filter is configured by the capacitor CD1, the resistors RD1, RD2, and the operational amplifier OPD1 on the front stage side, and an active low pass filter is configured by the capacitor CD2, the resistor RD4, and the operational amplifier OPD2 on the rear stage side. Thereby, a band pass filter is realized.

  In FIG. 13C, a passive high-pass filter is configured by the front-stage capacitor CE1 and the resistor RE1, and a passive low-pass filter is configured by the rear-stage capacitor CE2 and the resistor RE2.

  Alternatively, the band pass filter BPF may be configured by an SCF (switched capacitor filter) which is a discrete time type filter as shown in FIG. The SCF includes switching elements SF1 to SF6, capacitors CF1 to CF6, and operational amplifiers OPF1 and OPF2. By adopting such an SCF band-pass filter BPF, it becomes easy to remove a detuning frequency that requires a steep attenuation characteristic as shown in FIG. Further, there is an advantage that a signal obtained from the drive signal can be used as a signal for controlling on / off of the switching elements SF1 to SF6 of the SCF.

3. Sample and Hold Signal Generation Circuit FIG. 14A shows a configuration example of the sample and hold signal generation circuit 110. The sample and hold signal generation circuit 110 includes a sampling point adjustment circuit 112 and a sampling point adjustment register 118. Based on the synchronization signal CLK (including a multiplication signal of the synchronization signal) and the sampling point adjustment information SPD, the sample and hold signal SCK is obtained. Generate and output.

  The sampling point adjustment register 118 receives the sampling point adjustment data SPD from the outside of the detection device 30 or a built-in nonvolatile memory, and stores it. Here, the sampling point adjustment data SPD is data for selecting the maximum amplitude point of the desired signal as the sampling point, as indicated by C3 in FIG. Specifically, this is data for selecting a sampling point at which the offset is minimized (minimum) during offset adjustment described later. Note that the sampling point set as the maximum amplitude point in the initial setting may be slightly shifted due to temperature fluctuations, power supply fluctuations, and the like.

  The sampling point adjustment circuit 112 generates a sample hold signal SCK based on the synchronization signal CLK and the sampling point adjustment data SPD and outputs the sample hold signal SCK to the sample hold circuit 120. Specifically, the sampling point adjustment circuit 112 adjusts the phase of the synchronization signal CLK based on the sampling point adjustment data SPD so that the sampling point is set at the maximum amplitude point of the desired signal, and serves as the sample hold signal SCK. Output. In other words, the phase of the synchronization signal CLK is adjusted so that the sampling point is set near the zero cross point of the unnecessary signal of mechanical vibration leakage. In this way, unnecessary signals of mechanical vibration leakage appearing in the fd frequency band can be removed in the same manner as the desired signal.

  FIG. 14B shows a configuration example of the sampling point adjustment circuit 112. The sampling point adjustment circuit 112 includes a delay circuit 114 and a selection circuit 116. The delay circuit 114 receives the synchronization signal CLK and outputs a plurality of output signals DS1 to DSj whose phases of CLK are shifted. The delay circuit 114 includes serially connected buffers (delay elements in a broad sense) BF1, BF2, BF3... BFj−1, BFj. Each of the buffers BF1 to BFj can be constituted by, for example, a two-stage inverter. The synchronization signal CLK is input to the first stage buffer BF1, and the output signals DS1 to DSj of the buffers BF1 to BFj are input to the selection circuit 116 via the output taps TP1 to TPj. Then, the selection circuit 116 selects any one of the output signals DS1 to DSj using the sampling point adjustment data SPD, and outputs a sample hold signal SCK. Note that the selection circuit 116 may have a function of adjusting the duty ratio of the sample hold signal SCK.

  14B, the sampling point adjustment data SPD is used to arbitrarily adjust the delay time of the sample hold signal SCK with respect to the synchronization signal CLK, thereby adjusting the phase difference between the synchronization signal CLK and the sample hold signal SCK. it can. This makes it possible to set the sampling point to the maximum amplitude point (peak point) of the desired signal as indicated by C3 in FIG.

  Note that the configuration of the sample and hold signal generation circuit 110 is not limited to that shown in FIGS. 14A and 14B, and various modifications such as the use of a delay element such as a resistor or a capacitor are possible.

4). Thinning sampling In B1 in FIG. 9, the detection signal is sampled and held at all sampling points corresponding to the rising edge of the synchronization signal. However, as shown in E1 and E2 in FIG. You may make it hold. That is, in FIG. 15, the A / D conversion unit 100 detects the detection signal based on the sample hold signal SCK having a frequency of, for example, 1/8 (1 / N in a broad sense, N is an integer of 2 or more) of the frequency fd of the drive signal. Sample hold is performed.

  In general, the frequency fd of the drive signal is sufficiently higher than the frequency of the desired signal (gyro signal). According to the Nyquist sampling theorem, it is sufficient if the sampling frequency is higher than twice the signal frequency.

  Therefore, in FIG. 15, thinning sampling is performed in which the detection signal is sampled with a sample hold signal having a frequency lower than that of the drive signal. In this way, the operating frequency of the sample and hold signal generation circuit 110 and the sample and hold circuit 120 can be lowered, and power consumption can be reduced.

  Also, if the frequency of the drive signal is set to the frequency fd without lowering the frequency of the A / D conversion clock ADCK, for example, the signal sampled and held at E1 in FIG. 15 can be A / D converted in the period indicated by E3. It becomes possible. That is, by performing thinning sampling, the A / D conversion period of E3 can be lengthened, and A / D conversion with a margin can be realized. Therefore, for example, it is possible to adopt an A / D conversion method such as a successive approximation with a low conversion speed but a high conversion accuracy, and it is possible to achieve both improvement of the S / N ratio and circuit miniaturization.

  If the frequency of the drive signal is fd, the frequency of the sample and hold signal is fsck, and the frequency bandwidth (bandwidth limit) of the desired signal is fa, a sample of a frequency of fsck = fd / N> 2 × fa It is desirable to sample and hold the detection signal based on the hold signal. For example, in FIG. 15, the relationship fsck = fd / N = fd / 8> 2 × fa is established. In this way, the desired signal can be properly sampled by the Nyquist sampling theorem. Then, digital signal processing for a desired signal described later is also possible.

5. First Modification FIG. 16 shows a first modification of this embodiment. In the first modification, a digital processing unit 150 is further provided, and the other configurations are the same as those in FIG.

  The digital processing unit 150 is provided on the rear stage side of the A / D conversion unit 100 and performs various digital signal processing based on the digital output value ADQ from the A / D conversion unit 100. The digital processing unit 150 can be realized by a digital logic circuit including logic gates such as NOR, NAND, and D flip-flops, a processor such as a CPU and DSP, and firmware that operates on the processor.

  The digital processing unit 150 includes a digital filter unit 152, an offset adjustment unit 154, a sensitivity adjustment unit 156, and a compensation unit 158. Note that some of these components may be omitted, or other components (for example, a moving average processing unit) may be added.

  The digital filter unit 152 performs digital filter processing for limiting the frequency band of the desired signal based on the output value ADQ of the A / D conversion unit 100. Specifically, a digital low-pass filter process with a cutoff frequency lower than the cutoff frequency of the bandpass filter BPF is performed to limit the frequency band of the desired signal. Alternatively, digital low-pass filter processing for removing the component of the detuning frequency Δf = | fd−fs | may be performed.

For example, FIG. 17A illustrates a configuration example of the digital filter unit 152. FIG. 17A shows an example of an FIR filter in which the impulse response becomes 0 within a finite time. The FIR digital filter includes a plurality of delay elements (Z ⁻¹ ) configured by a shift register and the like, a plurality of multipliers for multiplying output of the delay elements by filter coefficients h (0) to h (i), An adder for adding the outputs of the multiplier is included. A digital low-pass filter can be realized by setting the filter coefficients h (0) to h (i) to given coefficients. Specifically, for example, a low-pass filter can be realized by performing averaging processing using filter coefficients h (0) to h (i). Various modifications such as multiplying a filter coefficient by a window function or using an IIR filter instead of an FIR filter as a digital filter are possible.

  In an application using a gyro sensor, the frequency bandwidth of a desired signal may be limited. For example, by limiting the frequency bandwidth of the desired signal to the limited bandwidth required by the application, the S / N ratio can be improved accordingly. This limited bandwidth varies depending on applications such as a car navigation system and a digital still camera. For example, compared with the application A in FIG. 17B, the limited bandwidth is narrower in the application B in FIG. 17C.

  Accordingly, in FIGS. 17B and 17C, the digital filter unit 152 of the digital processing unit 150 performs digital filter processing for limiting the frequency bandwidth of the desired signal to the limited bandwidth according to the application. ing. For example, in FIGS. 17B and 17C, the limited bandwidth of application B is narrower than the limited bandwidth of application A. Therefore, the filter coefficients h (0) to h (i) in FIG. 17A are adjusted so that the cutoff frequency fcB for the application B is smaller than the cutoff frequency fcA of the low pass filter LPFA for the application A. . For example, when the gyro sensor is used for application A, the digital filter unit 152 sets filter coefficients h (0) to h (i) that realize the frequency characteristics (cutoff frequency fcA) of FIG. When the low-pass filter processing is performed and the gyro sensor is used for application B, filter coefficients h (0) to h (i) for realizing the frequency characteristics (cutoff frequency fcB) of FIG. To perform low-pass filter processing. These filter coefficients h (0) to h (i) can be set by software (firmware) processing.

  In FIG. 17B and FIG. 17C, the digital low-pass filter processing of cutoff frequencies fcA and fcB lower than the cutoff frequency fcBP of the bandpass filter BPF is performed to limit the frequency band of the desired signal. .

  That is, the band-pass filter BPF provided on the front side of the A / D conversion unit 100 performs a band-pass filter process with a high cutoff frequency fcBP (upper and lower cutoff frequencies) that does not depend on the type of application. The frequency components of unnecessary signals other than the signal frequency band are previously removed. Thereby, the S / N ratio can be improved. In this case, since the cutoff frequency fcBP does not depend on the type of application, it is not necessary to change the cutoff frequency by software processing. Therefore, the bandpass filter processing of the cutoff frequency fcBP can be realized by the analog bandpass filter BPF.

  On the other hand, the digital filter unit 152 provided in the digital processing unit 150 performs low-pass filter processing with different cutoff frequencies fcA and fcB depending on the type of application. That is, the cutoff frequency is changed by changing the filter coefficient by software processing or the like according to the type of application.

  In this way, by sharing the roles of the bandpass filter BPF and the digital filter unit 152, the S / N ratio can be improved, and a flexible system that can handle various applications (car navigation system, digital still camera, etc.) Can be realized.

  Note that the filter processing for removing the component of the detuning frequency Δf = | fd−fs | described with reference to FIG.

  That is, the detuning frequency Δf = | fd−fs | is sufficiently smaller than fd and fs, and a steep attenuation characteristic is required to remove the detuning frequency component. Therefore, if the removal of the detuning frequency component is to be realized by an analog filter circuit, the circuit scale may be increased.

  In this regard, according to the digital filter unit 152, even a steep attenuation characteristic can be easily realized. Specifically, for example, by increasing the number of delay elements (number of filter coefficients) in FIG. 17A, a steep frequency characteristic can be realized. Therefore, if the low-pass filter processing for removing the detuning frequency component is performed by the digital filter unit 152, the S / N ratio can be improved while minimizing the increase in circuit scale.

  The offset adjustment unit 154 and the sensitivity adjustment unit 156 in FIG. 16 perform offset adjustment and sensitivity adjustment (gain adjustment) on the output value ADQ (digital data after filter processing) of the A / D conversion unit 100, respectively.

  The compensation unit 158 performs compensation processing for at least one of temperature variation and power supply voltage variation based on at least one of given temperature information and power supply voltage information. Here, the temperature information and the power supply voltage information may be directly input from the outside, or a temperature and power supply voltage detection circuit is provided in the detection device 30 to perform A / D conversion on the detected temperature and power supply voltage information. Then, it may be input to the digital processing unit 150.

  As shown in FIGS. 18A and 18B, the offset adjustment unit 154 outputs the output value ADQ (digital) from the A / D conversion unit 100 when the temperature (environment temperature) is 25 ° C. (typical temperature). The offset adjustment is performed so that the output data) matches the reference output value VR (digital reference output data, for example, VDD / 2). This offset adjustment can be realized, for example, by adding or subtracting digital data. That is, the offset adjustment unit 154 performs offset adjustment by digital addition and subtraction so that | ADQ−VR |, which is an offset voltage (initial offset voltage), is removed and becomes zero.

  Specifically, the output value ADQ is monitored after the gyro sensor is manufactured. Then, initial offset adjustment data for making the output value ADQ coincide with the reference output value VR is written in a non-illustrated nonvolatile memory or the like. Then, the offset adjustment unit 154 performs offset adjustment based on the adjustment data so that the output value ADQ matches VR.

  Note that after the initial offset is adjusted, when the ambient environment changes and the ambient temperature and the power supply voltage vary, the offset voltage also varies as shown in FIG. The compensation unit 158 realizes compensation processing for removing such a variation in the offset voltage by digital signal processing. Specifically, compensation processing is performed to reduce the offset voltage variation to zero based on temperature information and power supply voltage information supplied from the outside or monitored by itself.

  In this way, even when the ambient environment such as temperature and power supply voltage fluctuates during the actual operation of the gyro sensor, automatic adjustment is performed so as to cancel this fluctuation by the digital signal processing of the compensation unit 158. Thus, it becomes possible to output an output value that does not depend on environmental changes.

  The sensitivity adjustment unit 156 performs sensitivity adjustment (gain adjustment) so that the sensitivity matches the reference sensitivity. As shown in FIG. 18C, this sensitivity (V / degree / sec) is the amount of change per unit angular velocity of the output value (output voltage), and corresponds to the slope of the straight line of the output value.

  Specifically, sensitivity adjustment is realized as follows. First, after the gyro sensor is manufactured and the offset adjustment is completed, the output value ADQ is monitored. Then, for example, the gyro sensor is rotated from a stationary state at a given rotational angular velocity, and the sensitivity that is the amount of change in the output value ADQ at that time (straight line in FIG. 18C) is obtained. Then, adjustment data for matching the obtained sensitivity with the reference sensitivity is written in a non-illustrated nonvolatile memory or the like. Then, the sensitivity adjustment unit 156 performs gain adjustment based on the adjustment data so that the sensitivity of the detection device 30 matches the reference sensitivity. Note that the compensation unit 158 may perform a compensation process for removing a sensitivity variation due to a temperature or power supply voltage variation.

  Next, specific processing examples such as offset adjustment and sensitivity adjustment will be described with reference to the flowchart of FIG. First, sampling point adjustment processing is performed (step S1). Specifically, the output value ADQ of the A / D conversion unit 100 is monitored (step S2). Then, the sampling point is adjusted by using the sampling point adjustment data SPD described with reference to FIGS. 14A and 14B so that the output value ADQ is minimized (minimum value) (step S3). Specifically, as shown in FIG. 20A, the adjustment data SPD sweeps the adjustment amount (delay amount) in the sampling point adjustment circuit 112 in FIGS. Change position. Then, a point where the output value ADQ is minimized is found. This makes it possible to substantially set the sampling point at the maximum amplitude point of the desired amplitude (zero cross point of the unnecessary signal) as indicated by C3 in FIG. That is, it is possible to select a sampling point at which the offset at the time of offset adjustment is minimized. Then, the final sampling point adjustment data is written in the nonvolatile memory (step S4), and the sampling point adjustment process is terminated.

  Next, an offset adjustment process is performed (step S5). Specifically, the output value ADQ of the A / D conversion unit 100 is monitored (step S6). Then, the offset adjustment data is adjusted so that the output value ADQ matches the reference output value VR (step S7). As a result, the offset voltage can be removed as shown in FIG. Then, the final offset adjustment data is written in the nonvolatile memory (step S8), and the offset adjustment process is terminated.

  Next, sensitivity adjustment processing is performed (step S9). Specifically, the output value ADQ of the A / D conversion unit 100 is monitored (step S10). Then, the sensitivity adjustment data is adjusted so that the sensitivity matches the reference value (step S11). Then, the final sensitivity adjustment data is written in the nonvolatile memory (step S12), and the sensitivity adjustment process is terminated.

6). Second Modified Example FIG. 21 shows a second modified example of the present embodiment. In the second modification, a multiplier circuit 58 is newly provided, and the other configurations are the same as those in FIG. 16 and FIG.

  The multiplier circuit 58 generates a multiplied signal CLKM obtained by multiplying the frequency of the drive signal of the drive circuit 40. Specifically, it receives the synchronization signal CLK from the drive circuit 40, generates a multiplied signal (multiplied clock) CLKM obtained by multiplying the frequency of the synchronized signal CLK, and outputs it to the detection circuit 60. The multiplication circuit 58 can be realized by a known PLL circuit or DLL circuit.

  The sample hold signal generation circuit 110 of the detection circuit 60 generates the sample hold signal SCK based on the multiplied signal CLKM. It is also possible to generate the sample hold signal SCK based on the synchronization signal CLK.

  The A / D converter 130 performs A / D conversion using the multiplied signal CLKM as the A / D conversion clock ADCK. Further, the digital processing unit 150 performs various digital processes such as a digital filter process, an offset adjustment, a sensitivity adjustment, and a compensation process using the multiplied signal CLKM as an operation clock.

  That is, since the frequency of the drive signal is the natural frequency of the vibrator 10, it is lower than the frequency of the clock used in a general digital circuit. In this regard, in FIG. 21, the multiplication circuit 58 is provided, and the A / D conversion unit 100 and the digital processing unit 150 are operated by the multiplication signal CLKM having a frequency higher than the drive frequency.

  For example, if the A / D conversion unit 100 is operated with the A / D conversion clock ADCK having a high frequency, A / D conversion can be performed at high speed with high accuracy, and the S / N ratio and the like can be improved. Further, if the digital processing unit 150 is operated with a high-frequency operation clock, more intelligent and complicated digital signal processing can be performed, and the performance of the detection device 30 can be improved.

  In this case, a method of providing another clock generation circuit and operating the A / D conversion unit 100 and the digital processing unit 150 with a high-frequency clock from the clock generation circuit is also conceivable.

  However, according to this method, since a clock generation circuit having a large-scale circuit configuration has to be provided separately, the circuit becomes large-scale. Further, since the clock generated by the clock generation circuit and the drive signal are not accurately synchronized, the timing control on the drive side and the detection side becomes difficult or complicated.

  In this regard, in FIG. 21, the A / D conversion unit 100 and the digital processing unit 150 operate using the multiplied signal CLKM obtained based on the driving signal on the driving side as a clock. Accordingly, the drive side and the detection side can be operated in synchronization with each other, and the timing control on the drive side and the detection side is facilitated, so that the circuit scale can be reduced and the processing can be simplified. Note that the sample hold signal generation circuit 110 may generate a sample hold signal based on the synchronization signal CLK. Further, it is possible to perform a modification by combining the thinning sampling method described in FIG. 15 and the method using the multiplied signal in FIG.

7). Electronic Device FIG. 22 shows a configuration example of a gyro sensor 510 (sensor in a broad sense) including the detection device 30 of the present embodiment and an electronic device 500 including the gyro sensor 510. Note that the electronic device 500 and the gyro sensor 510 are not limited to the configuration shown in FIG. 22, and various modifications such as omitting some of the components or adding other components are possible. In addition, as the electronic device 500 of the present embodiment, various devices such as a digital camera, a video camera, a mobile phone, a car navigation system, a robot, a game machine, and a portable information terminal can be considered.

  Electronic device 500 includes a gyro sensor 510 and a processing unit 520. Further, a memory 530, an operation unit 540, and a display unit 550 can be included. A processing unit (CPU, MPU, etc.) 520 performs control of the gyro sensor 510 and the like and overall control of the electronic device 500. The processing unit 520 performs processing based on angular velocity information (physical quantity) detected by the gyro sensor 510. For example, processing for camera shake correction, posture control, GPS autonomous navigation, and the like is performed based on the angular velocity information. A memory (ROM, RAM, etc.) 530 stores a control program and various data, and functions as a work area and a data storage area. The operation unit 540 is for the user to operate the electronic device 500, and the display unit 550 displays various information to the user. According to the detection device 30 of the present embodiment, a small sensor can be adopted as the gyro sensor 510 incorporated in the electronic apparatus 500. Thereby, the electronic device 500 can be reduced in size and cost.

  Although the present embodiment has been described in detail as described above, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention. For example, a term described at least once together with a different term having a broader meaning or the same meaning in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. All combinations of the present embodiment and the modified examples are also included in the scope of the present invention. Further, the structure of the vibrator and the configurations and operations of the detection device, the drive circuit, the detection circuit, the sensor, and the electronic device are not limited to those described in this embodiment, and various modifications can be made. For example, in the invention using the multiplication circuit described with reference to FIG. 21, it is possible not to employ the method using the band-pass filter having the frequency characteristics as described with reference to FIGS.

The structural example of the detection apparatus of this embodiment. 2A and 2B are explanatory diagrams of the vibrator. 3A to 3C are explanatory diagrams of a configuration of an amplifier circuit. The structural example of the comparative example of this embodiment. The signal waveform example for demonstrating the synchronous detection method of a comparative example. The signal waveform example for demonstrating the synchronous detection method of a comparative example. The signal waveform example for demonstrating the synchronous detection method of a comparative example. The signal waveform example for demonstrating the synchronous detection method of a comparative example. The signal waveform example for demonstrating the method of this embodiment. The signal waveform example for demonstrating the method of this embodiment. The signal waveform example for demonstrating the method of this embodiment. 12A and 12B are explanatory diagrams of the frequency characteristics of the band-pass filter. FIGS. 13A to 13D are configuration examples of bandpass filters. 14A and 14B are configuration examples of the sampling signal generation circuit. Explanatory drawing of a thinning sampling method. The structural example of the 1st modification of this embodiment. 17A to 17C are explanatory diagrams of digital filter processing. 18A to 18C are explanatory diagrams of offset adjustment and sensitivity adjustment. The flowchart for demonstrating specific processes, such as offset adjustment and sensitivity adjustment. 20A and 20B are explanatory diagrams of a sampling point adjustment method. The structural example of the 2nd modification of this embodiment. Configuration examples of electronic devices and gyro sensors.

Explanation of symbols

2, 4 drive terminals, 6, 8 detection terminals, 10 vibrators, 11, 12 drive side vibrators,
16, 17 Detection-side vibrator, 30 detection device, 40 drive circuit, 42 amplification circuit,
46 binarization circuit, 50 AGC circuit, 58 multiplication circuit,
60 detection circuit, 70 amplification circuit, 80 filter unit (bandpass filter),
100 AD converter, 110 sampling signal generation circuit,
120 sample hold circuit, 130 A / D converter,
150 digital processing unit, 152 digital filter unit, 154 offset adjustment unit, 156 sensitivity adjustment unit, 158 compensation unit,
500 electronic equipment, 510 gyro sensor, 520 processing unit, 530 memory,
540 operation unit, 550 display unit

Claims (12)

A drive circuit for driving the physical quantity transducer;
A detection circuit that receives a detection signal from the physical quantity transducer and detects a desired signal from the detection signal;
The detection circuit includes:
An amplification circuit for amplifying a detection signal from the physical quantity transducer;
A filter unit that is provided on a subsequent stage side of the amplifier circuit and performs a filtering process on the detection signal after amplification;
Based on the sample and hold signal provided on the rear side of the filter unit and obtained based on the drive signal from the drive circuit, the detection signal after filter processing is sampled and held, and the A / An A / D converter that performs D conversion;
A digital processing unit that is provided on the rear side of the A / D conversion unit and performs digital signal processing based on an output value of the A / D conversion unit;
Including
The filter unit is
Including a bandpass filter having a frequency characteristic in which a driving frequency in the driving circuit is a center frequency, a frequency component of an unnecessary signal is removed and a frequency component of a desired signal is passed,
When the frequency of the drive signal is fd and the frequency of the sample and hold signal is fsck, fsck = fd or fsck = fd / N (N is an integer of 2 or more),
The digital processing unit
A detection apparatus, wherein a digital low-pass filter process with a cutoff frequency lower than a higher cutoff frequency of the band-pass filter is performed to limit a frequency bandwidth of a desired signal. In claim 1,
The physical quantity transducer is a vibrator;
The bandpass filter is
It has a frequency characteristic that removes the component of the detuning frequency Δf = | fd−fs | corresponding to the difference between the drive-side resonance frequency fd and the detection-side resonance frequency fs of the vibrator and allows the frequency component of the desired signal to pass. A detection device characterized by. In claim 1 or 2,
The A / D converter is
Sample hold for generating the sample hold signal for sampling the detection signal based on the synchronization signal obtained based on the drive signal from the drive circuit and the sampling point adjustment data for selecting the sampling point A detection device including a signal generation circuit. In claim 3,
The sample hold signal generation circuit includes:
A detection apparatus that generates the sample hold signal based on sampling point adjustment data for selecting a maximum amplitude point of a desired signal as a sampling point. In claim 3,
The sample hold signal generation circuit includes:
A detection apparatus that generates the sample hold signal based on sampling point adjustment data for selecting a sampling point at which an offset is minimized during offset adjustment. In any one of Claims 1 thru | or 5,
The A / D converter is
Based on the sample hold signal having a frequency of fsck = fd / N> 2 × fa, where fd is the frequency of the drive signal, fsck is the frequency of the sample hold signal, and fa is the frequency bandwidth of the desired signal. And detecting and sampling the detection signal. In any one of Claims 1 thru | or 6.
The physical quantity transducer is a vibrator;
The digital processing unit
A detection apparatus that performs a digital low-pass filter process for removing a component of a detuning frequency Δf = | fd−fs | corresponding to a difference between a driving-side resonance frequency fd and a detection-side resonance frequency fs of the vibrator. . In any one of Claims 1 thru | or 7,
The digital processing unit
A detection apparatus that performs at least one of offset adjustment and sensitivity adjustment on an output value of the A / D conversion unit. In any one of Claims 1 thru | or 8.
The digital processing unit
A detection apparatus that performs compensation processing for at least one of temperature fluctuation and power supply voltage fluctuation based on at least one of given temperature information and power supply voltage information. In any one of Claims 1 thru | or 9,
A multiplication circuit for generating a multiplied signal obtained by multiplying the frequency of the drive signal of the drive circuit;
The A / D converter is
A detection apparatus that performs A / D conversion based on the multiplied signal from the multiplication circuit. The detection device according to any one of claims 1 to 10,
The physical quantity transducer;
A sensor comprising: A sensor according to claim 11;
A processing unit that performs processing based on detection information of the sensor;
An electronic device comprising:

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