JP5278763B2 - Probe unit, board inspection apparatus and board inspection system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a probe unit suitable for improving working efficiency when diagnosing a substrate inspection apparatus as compared with before. <P>SOLUTION: The probe unit 26 includes: a cylindrical barrel 26b; a pin-shaped plunger 26a housed in the barrel 26b partially and is urged by a first spring member 26d so that an edge at a +Z side is in contact with the substrate when inspecting the substrate; a socket 26c that holds the barrel 26b, and opposes the target substrate and is fixed to pin board for composing one portion of a substrate inspection machine; a screw hole with prescribed length extending in a +Z-direction while being formed on an end face at a -Z side of the plunger 26a; an opening formed on a cylindrical bottom face of the barrel 26b; a screw member 26e screwed to the screw hole of the plunger 26a via the opening when preventing the plunger 26a from abutting on the substrate; and a screw receiving part provided in the socket 26c and holding the screw member 26e at a position where the plunger 26e is not in contact with the target substrate. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a probe unit, a board inspection apparatus, and a board inspection system. More specifically, the present invention relates to a probe unit used in a board inspection apparatus, a board inspection apparatus that includes the probe unit and inspects a printed wiring board, and the board inspection. The present invention relates to a substrate inspection system including an apparatus.

  2. Description of the Related Art In recent years, with the miniaturization and high functionality of electrical / electronic devices, printed wiring boards mounted on electrical / electronic devices have been attempted to increase the density of mounted components and wiring, reduce the line width, and the like.

  Therefore, it is possible to efficiently inspect whether the components are correctly mounted on the printed wiring board, soldered correctly, whether the wiring is defective (disconnection or short circuit), and whether the mounted components are defective. Therefore, a board inspection apparatus has been devised for inspecting a specific position on a printed wiring board (inspection board) by applying a contact probe (see, for example, Patent Documents 1 to 5).

  Further, in Patent Document 6, a rod-shaped contact pin whose tip is pressed against an inspection board, a cylindrical contact pin receiver into which the contact pin is inserted, and a contact pin provided between the contact pin and the contact pin receiver. A contact probe is disclosed that includes a spring that urges the tip portion in the direction of the inspection substrate, and a fixing means that fixes the contact pin in a state of being pushed down in the direction opposite to the inspection substrate.

  As one of the methods for diagnosing whether or not the board inspection apparatus is operating normally, one of the plurality of contact probes is pulled out to cause a pseudo contact failure and the board inspection result is scheduled. There is a method of confirming that it becomes NG. In the inspection devices disclosed in Patent Documents 1 to 5, (1) One contact probe is removed from the substrate inspection device, (2) The inspection substrate is set in the substrate inspection device, (3) The pin board is raised. , (4) Perform the inspection, (5) Confirm that the inspection result is the planned NG, (6) Lower the pin board, (7) Remove the inspection substrate from the substrate inspection device, (8) Removed It was necessary to return the contact probe to the substrate inspection apparatus and (9) repeat the processes (1) to (8) for all the remaining contact probes.

  Diagnosis of the board inspection apparatus is performed regularly, (A) the time required for the diagnosis is long, (B) the contact probe and the socket may be damaged, and (C) the tip of the contact probe is worn quickly. There was an inconvenience.

  By the way, when the contact probe disclosed in Patent Document 6 is used in a substrate inspection apparatus, it is not necessary to insert and remove the contact probe, but it is necessary to repeatedly set and remove the inspection substrate, which eliminates the above inconvenience. It was difficult.

  From a first viewpoint, the present invention is a probe unit used for inspecting a substrate that is held on a pin board of a substrate inspection apparatus and is set to face the pin board, and includes: a first cylindrical member; A part of which is housed in the first cylindrical member, and a pin-like member biased by a spring member so that one end of the substrate comes into contact with the substrate during inspection of the substrate; A second cylindrical member accommodated in the first cylindrical member and fixed to the pin board; and the pin-shaped member at a position in contact with the substrate from the side opposite to the substrate in the pin board. And a fixing mechanism for temporarily fixing the probe unit.

  According to this, it becomes possible to improve the working efficiency when performing the diagnosis of the substrate inspection apparatus as compared with the conventional case.

  According to a second aspect of the present invention, there is provided a board inspection apparatus for inspecting a printed wiring board, comprising: a plurality of probe units of the present invention; input / output of electric signals to and from the plurality of probe units; And a control device for inspecting the substrate.

  According to this, since the probe unit of the present invention is provided, the work efficiency of diagnosis can be improved as compared with the prior art.

  According to a third aspect of the present invention, an input device for an operator to input information relating to a printed wiring board to be inspected; the substrate inspection device of the present invention; and an inspection result in the substrate inspection device are displayed. And a display device.

  According to this, since the substrate inspection apparatus of the present invention is provided, as a result, it is possible to perform highly reliable substrate inspection.

It is a figure for demonstrating schematic structure of the board | substrate inspection system which concerns on one Embodiment of this invention. 2A and 2B are external views of the board inspection machine in FIG. 3A and 3B are diagrams for explaining the structure of the housing of the board inspection machine. It is a figure for demonstrating each part accommodated in the housing | casing of a board | substrate inspection machine. It is a figure for demonstrating a board | substrate holding member. It is FIG. (1) for demonstrating a set base. It is FIG. (2) for demonstrating a set base. It is FIG. (1) for demonstrating the setting method of a target board | substrate. It is FIG. (2) for demonstrating the setting method of a target board | substrate. It is a figure for demonstrating a pin board. It is a figure for demonstrating the back surface of a pin board. It is FIG. (1) for demonstrating the effect | action of a lever. It is FIG. (2) for demonstrating the effect | action of a lever. It is a figure for demonstrating the structure of a probe unit. It is a figure for demonstrating the state which took out the contact probe from the socket in a probe unit. It is a figure for demonstrating the position of the plunger when it exists in a contact state with respect to the printed wiring board set. It is FIG. (1) for demonstrating operation | movement of an operator when making a contact probe into a non-contact state with respect to a printed wiring board. FIG. 8 is a diagram (part 2) for explaining the operation of the operator when the contact probe is brought into a non-contact state with respect to the printed wiring board. FIG. 10 is a diagram (No. 3) for explaining the operation of the operator when the contact probe is brought into a non-contact state with respect to the printed wiring board. 20A and 20B are diagrams for explaining a rotation prevention mechanism that prevents rotation of the plunger. FIG. 21A to FIG. 21C are diagrams for explaining the cross-sectional shapes of the plunger and the barrel each provided with a plunger rotation prevention mechanism. It is a flowchart for demonstrating the diagnostic process by CPU. It is FIG. (1) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is FIG. (2) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is FIG. (3) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is a figure for demonstrating the contact probe made into non-contact with respect to a printed wiring board. It is FIG. (4) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is FIG. (5) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is FIG. (6) for demonstrating the content displayed on the display part of a display apparatus in the case of a diagnostic process. It is a figure for demonstrating the modification 1 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 1 is contacting the object board | substrate. It is a figure for demonstrating a state when the probe unit of the modification 1 is made into non-contact with respect to a target board | substrate. It is a figure for demonstrating the modification 2 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 2 is contacting the object board | substrate. It is a figure for demonstrating a state when the probe unit of the modification 2 is made into non-contact with respect to the object board | substrate. It is a figure for demonstrating the modification 3 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 3 is contacting the object board | substrate. It is FIG. (1) for demonstrating operation | movement of an operator when the probe unit of the modification 3 is made non-contact with respect to a target board | substrate. It is FIG. (2) for demonstrating operation | movement of an operator when the probe unit of the modification 3 is made non-contact with respect to a target board | substrate. FIG. 11 is a diagram (No. 3) for explaining the operation of the operator when the probe unit according to Modification 3 is brought into non-contact with the target substrate. It is FIG. (4) for demonstrating operation | movement of an operator when the probe unit of the modification 3 is made non-contact with respect to a target board | substrate. It is FIG. (5) for demonstrating operation | movement of an operator when the probe unit of the modification 3 is made non-contact with respect to a target board | substrate. It is a figure for demonstrating the modification 4 of a probe unit. 44 (A) and 44 (B) are diagrams for explaining a rod-like member in the probe unit of Modification 4. FIG. It is a figure for demonstrating the state which the probe unit of the modification 4 is contacting the object board | substrate. It is FIG. (1) for demonstrating operation | movement of an operator when making the probe unit of the modification 4 non-contact with respect to a target board | substrate. It is FIG. (2) for demonstrating operation | movement of an operator when the probe unit of the modification 4 is made non-contact with respect to a target board | substrate. It is FIG. (3) for demonstrating operation | movement of an operator when the probe unit of the modification 4 is made non-contact with respect to a target board | substrate. It is a figure for demonstrating the modification 5 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 5 is contacting the object board | substrate. FIG. 51A and FIG. 51B are views (No. 1) for explaining the operation of the operator when the probe unit of Modification 5 is not in contact with the target substrate, respectively. FIGS. 52A and 52B are views (No. 2) for explaining the operation of the operator when the probe unit of Modification 5 is not in contact with the target substrate, respectively. It is a figure for demonstrating a state when the probe unit of the modification 5 is made into non-contact with respect to a target board | substrate. It is a figure for demonstrating the modification 6 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 6 is contacting the object board | substrate. It is FIG. (1) for demonstrating operation | movement of an operator when the probe unit of the modification 6 is made non-contact with respect to a target board | substrate. It is FIG. (2) for demonstrating operation | movement of an operator when the probe unit of the modification 6 is made non-contact with respect to a target board | substrate. It is FIG. (1) for demonstrating operation | movement of an operator when the probe unit of the modification 6 is made to contact an object board | substrate again. It is FIG. (2) for demonstrating operation | movement of an operator when the probe unit of the modification 6 is made to contact an object board | substrate again. It is a figure for demonstrating the modification 7 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 7 is contacting the object board | substrate. It is a figure for demonstrating a state when the probe unit of the modification 7 is made into non-contact with respect to a target board | substrate. FIGS. 63A and 63B are diagrams for explaining a rotation prevention mechanism for preventing rotation of the barrel. FIGS. 64A to 64C are views for explaining the cross-sectional shapes of a barrel and a socket each provided with a barrel rotation prevention mechanism. It is a figure for demonstrating the modification 8 of a probe unit. It is a figure for demonstrating the state which the probe unit of the modification 8 is contacting the object board | substrate. It is a figure for demonstrating a state when the probe unit of the modification 8 is made into non-contact with respect to a target board | substrate. It is a figure for demonstrating the example of a test | inspection when the printed wiring board to be examined is a CPU board.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows a schematic configuration of a substrate inspection system 1 according to an embodiment.

  The board inspection system 1 includes a personal computer (personal computer) 10 and a board inspection machine 20.

  The personal computer 10 includes a display device 11, an input device 12, a hard disk device (HDD) 13, a CPU 15, a RAM 16, a ROM 17, an interface 19, and the like.

  The display device 11 includes a display unit (not shown) using, for example, a CRT, a liquid crystal display (LCD), a plasma display panel (PDP), and the like, and displays various information instructed by the CPU 15.

  The input device 12 includes, for example, at least one input medium (not shown) of a keyboard, a mouse, a tablet, a light pen, a touch panel, and the like, and notifies the CPU 15 of various information input by an operator. Note that information from the input medium may be input in a wireless manner. Further, as an example in which the display device 11 and the input device 12 are integrated, there is an LCD with a touch panel, for example.

  The HDD 13 includes a hard disk and a drive device for driving the hard disk.

  The interface 19 is a bidirectional communication interface (for example, a USB interface, a PCI interface, etc.) with the board inspection machine 20.

  The ROM 17 stores a substrate inspection machine management program written in a code readable by the CPU 15, a plurality of programs including a diagnostic program and an inspection program, a plurality of data used for executing each program, and the like.

  The CPU 15 controls the overall operation of the personal computer 10 according to a program stored in the ROM 17.

  The RAM 16 is a working memory.

  The appearance of the board inspection machine 20 is shown in FIGS. 2A and 2B as an example. The housing of the substrate inspection machine 20 is composed of three parts (an upper lid 21A, an upper box 21B, and a lower box 21C). In the present specification, in the XYZ three-dimensional orthogonal coordinate system, the direction orthogonal to the floor surface on which the board inspection machine 20 is installed is described as the Z-axis direction.

  The upper lid 21A is fixed to the upper box 21B with a hinge on the + Y side end. Further, a handle is provided on the front surface (the surface on the -Y side) of the upper lid 21A. Therefore, the operator can separate the upper lid 21A and the upper box 21B by lifting the handle as shown in FIG. 3A as an example.

  The upper box 21B is fixed to the lower box 21C with a hinge on the + Y side end. A handle is provided on the front surface (the surface on the -Y side) of the upper box 21B. Therefore, the operator can separate the upper box 21B and the lower box 21C by lifting the handle as shown in FIG. 3B as an example.

  As shown in FIG. 4 as an example, in the housing of the substrate inspection machine 20, a substrate pressing member 22, a set base 23, a pin board 24, a jig substrate 25, a plurality of probe units 26, and two power supply devices (27A 27B) and the like are accommodated. In FIG. 4, the wiring members are not shown for convenience.

  The substrate pressing member 22 is a plate-like member and is fixed to the upper lid 21A. Therefore, when the upper lid 21A is lifted, the substrate pressing member 22 is also lifted simultaneously (see FIG. 5).

  The set base 23 is a plate-like member that supports a printed wiring board 31 to be inspected (hereinafter also referred to as “target board 31” for convenience), and is fixed to the upper box 21B.

  As shown in FIGS. 6 and 7 as an example, the set base 23 has a plurality of first protrusions 123A and a plurality of second protrusions 123B on the surface on the + Z side. The plurality of first protrusions 123 </ b> A correspond to the plurality of mounting holes provided in the target substrate 31 and guide the target substrate 31. The plurality of second protrusions 123 </ b> B support the target substrate 31.

  The set base 23 is provided with a plurality of through holes (not shown) through which the plurality of probe units 26 are passed.

  The target substrate 31 is set on the set base 23 in a state where the substrate pressing member 22 is lifted (see FIG. 8).

  The substrate pressing member 22 is provided with a plurality of protrusions at positions facing the plurality of second protrusions 123B of the set base 23 when the upper lid 21A is closed. Therefore, when the upper lid 21A is closed, the target substrate 31 is pressed against the plurality of second protrusions 123B by the plurality of protrusions of the substrate pressing member 22 (see FIG. 9).

  The plurality of probe units 26 are in contact with the target substrate 31 during substrate inspection, and input / output signals. Details of the probe unit 26 will be described later.

  As shown in FIG. 10 as an example, the pin board 24 is a plate-like member that holds a plurality of probe units 26, and is fixed to the upper box 21B. The pin board 24 has a plurality of through holes for holding the probe unit 26 respectively.

  As shown in FIG. 11 as an example, the back surface of the pin board 24 (the surface on the −Z side) has a corresponding connector name and pin in the target board 31 in the vicinity of the through hole in which the probe unit 26 is held. The number is written.

  One end of the wiring member 263 is connected to the −Z side end of each probe unit 26. This connection may be any of (1) solder connection, (2) lapping connection, (3) solder caulking connection, and (4) terminal connection.

  The other end of each wiring member 263 is grouped into one connector C1 every predetermined number. The connector C1 is connected to a connector C2 provided on the pin board 24.

  Returning to FIG. 2, a lever 28 is provided on the + X side of the upper box 21B. The lever 28 is coupled to the pin board 24 as shown in FIG. 12 as an example. When the lever 28 is tilted to the near side (−Y side), as shown in FIG. 13 as an example, the pin board 24 is raised (moved to the + Z side).

  The jig substrate 25 is a plate-like member, and is fixed to the lower box 21C. A plurality of connectors are mounted on the jig substrate 25. Here, a wiring member from the connector C <b> 2 provided on the pin board 24 is connected to one of the connectors of the jig substrate 25. The connector attaching / detaching work on the jig substrate 25 is performed in a state where the upper box 21B is lifted (see FIG. 3B).

  The jig substrate 25 has a plurality of board sockets, and a digital IO board, an AD conversion board, a buffer board, or the like is inserted into each board socket.

  The jig substrate 25 is connected to the interface 19 of the personal computer 10 with a cable.

  The power supply device 27A is a power supply device for supplying power to the jig substrate 25, and is turned on / off by a power switch provided in the lower box 21C.

  The power supply device 27B is a power supply device for supplying power to the target board 31, and is turned on / off by a signal from the CPU 15.

  Here, details of the probe unit 26 will be described.

  As shown in FIG. 14 as an example, each probe unit 26 includes a plunger 26a, a barrel 26b, a socket 26c, a first spring 26d, a screw member 26e, a second spring 26f, and the like.

  The plunger 26 a is a pin-shaped member whose tip on the + Z side contacts the target substrate 31. Note that the shape of the tip is not limited to the present embodiment. In the plunger 26a, the thickness in the vicinity of the -Z side is larger than the thickness in the central portion. The plunger 26a is formed with a screw hole having a predetermined length from the end on the −Z side toward the + Z direction.

  The barrel 26b is a container that holds the plunger 26a. Here, the barrel 26b is a cylindrical container having a bottom surface on the −Z side, and an opening into which the screw member 26e is inserted is formed on the bottom surface (surface on the −Z side).

  A first spring 26d is accommodated in the barrel 26b, and a plunger 26a is disposed on the + Z side of the first spring 26d. The plunger 26a is urged in the + Z direction by the first spring 26d. Further, the vicinity of the + Z side end of the barrel 26b is narrowed so that the plunger 26a does not come off.

  The plunger 26a sinks into the barrel 26b when a force in the -Z direction is applied to the end on the + Z side. The maximum sinking amount of the plunger 26a with respect to the barrel 26b with respect to the Z-axis direction is called a stroke.

  Note that a portion of the probe unit 26 including the plunger 26a, the barrel 26b, and the first spring 26d is called a contact probe. The contact probe can be pulled out from the socket 26c as shown in FIG. 15 as an example.

  In general, as shown in FIG. 16 as an example, the contact probe is designed so that the contact with the target substrate 31 is stabilized at a position where the plunger 26a is depressed by 2/3 stroke.

  Returning to FIG. 14, the screw member 26 e is a screw member having a head at the end on the −Z side, and a part on the + Z side is inserted into the barrel 26 b through the opening on the bottom surface of the barrel 26 b. ing. The screw member 26e can be screwed into the screw hole of the plunger 26a. Further, the head of the screw member 26e is provided with a groove for engaging the tip of the driver. In addition, the value of the code | symbol L1 in FIG. 14 is set so that it may become longer than 2/3 stroke.

  The socket 26c is a cylindrical member, has a container portion into which the barrel 26b is inserted on the + Z side, and has a screw receiving portion that restricts the movement of the screw member 26e in the −Z direction on the −Z side. . The space between the container portion and the screw receiving portion is narrowed to be slightly thicker than the outer diameter of the screw body in the screw member 26e. The socket 26c is driven into a through hole of the pin board 24 and fixed.

  A second spring 26f is accommodated in the screw receiving portion of the socket 26c. The head of the screw member 26e is biased in the −Z direction by the second spring 26f. The elastic force of the second spring 26f is set to be smaller than the elastic force of the first spring 26d. An opening for inserting a screwdriver, which is a tool for turning the screw member 26e, is formed on the surface of the screw receiving portion on the −Z side.

  Here, an operation performed by the operator when the contact probe is brought into non-contact with the target substrate 31 will be described. It is assumed that the target substrate 31 is already set on the substrate inspection machine 20 and supported by the set base 23.

(1) Lift the handle of the upper box 21B and separate the upper box 21B and the lower box 21C (see FIG. 3B).

(2) A driver is inserted into the opening formed in the screw receiving portion of the socket 26c of the probe unit 26 to be non-contacted, and the + Z side end (screw tip) of the screw member 26e is pressed against the plunger 26a (see FIG. 17).

(3) Turn the screwdriver in the direction in which the screw is tightened, and screw the + Z side end (screw tip) of the screw member 26e into the screw hole of the plunger 26a (see FIG. 18). As a result, the plunger 26a starts to sink into the barrel 26b.

(4) The driver is further turned, and when the amount of depression of the plunger 26a reaches a predetermined amount of depression, the rotation of the driver is stopped (see FIG. 19).

(5) Remove the driver from the screw receiving portion.

(6) Pull down the handle of the upper box 21B and return the upper box 21B onto the lower box 21C. The upper box 21B may remain separated from the lower box 21C.

  In this way, the contact probe can be brought out of contact with the target substrate 31 without pulling out the contact probe from the socket 26c. Further, since the operation of making the contact probe non-contact with the target substrate 31 can be performed only from the −Z side of the pin board 24, it is necessary to take out the target substrate 31 from the substrate inspection machine 20 at this time. There is no.

  Next, an operation performed by the operator when the non-contact probe unit 26 is brought into contact with the target substrate 31 will be described. Here, it is assumed that the upper box 21B is separated from the lower box 21C.

(1) A driver is inserted into the opening formed in the screw receiving portion of the socket 26c.

(2) The screwdriver is turned in the direction in which the screw is loosened, and the + Z side end (screw tip) of the screw member 26e is retracted from the screw hole of the plunger 26a. As a result, the plunger 26a starts to rise from the inside of the barrel 26b.

(3) The driver is further rotated, and when the + Z side end (screw tip) of the screw member 26e comes out of the screw hole of the plunger 26a, the rotation of the driver is stopped. At this time, the plunger 26 a rises at a stretch by the elastic force of the first spring 26 d and contacts the target substrate 31.

(4) Remove the driver from the screw receiving portion.

  Thereby, the contact probe can be brought into contact with the target substrate 31 again. Further, since the operation of bringing the contact probe into contact with the target substrate 31 again can be performed only from the −Z side of the pin board 24, it is necessary to take out the target substrate 31 from the substrate inspection machine 20 at this time. Absent.

  That is, an arbitrary contact probe can be brought into a non-contact state and a contact state with the target substrate 31 set in the substrate inspection machine 20.

  By the way, as shown in FIG. 20A, a rotation prevention mechanism for preventing rotation of the plunger 26a is provided in the plunger 26a and the barrel 26b. The rotation prevention mechanism is not limited to this, and may be a rotation prevention mechanism as shown in FIG. 20B as an example. As an example, as shown in FIGS. 21A to 21C, the plunger 26a and the barrel 26b may have a cross-sectional shape that is difficult to rotate.

  Next, the operation of the CPU 15 by the board inspection machine management program will be described with reference to FIGS.

  When the operator inputs a use request for the substrate inspection machine 20 via the input device 12, the start address of the substrate inspection machine management program stored in the ROM 17 is set in the program counter, and the management process starts.

(1) As shown in FIG. 23 as an example, a screen for allowing an operator to select one of substrate inspection and device diagnosis is displayed on the display unit of the display device 11. Here, as shown in FIG. 24 as an example, it is assumed that the apparatus diagnosis is selected by the operator.

(2) In FIG. 24, when the “OK” button is clicked by the operator, the start address of the diagnostic program stored in the ROM 17 is set in the program counter, and the diagnostic processing starts. When the board inspection is selected by the operator, the start address of the inspection program stored in the ROM 17 is set in the program counter and the inspection process starts.

  The flowchart in FIG. 22 corresponds to a series of processing algorithms executed by the CPU 15 in the diagnosis processing. Here, it is assumed that the contact probes in all the probe units 26 are in contact with the target substrate 31.

(3) In the first step S401, it is determined whether or not the target substrate 31 is set on the set base 23. For example, when the power supply from the power supply device 27B to the target board 31 is turned on, if a signal cannot be obtained from the predetermined probe unit 26, the determination here is denied and the process proceeds to step S403.

(4) In step S403, a message requesting to set the target substrate 31 is displayed on the display unit of the display device 11. Then, the process returns to step S401.

(5) If the target substrate 31 is set on the set base 23, the determination in step S401 is affirmed, and the process proceeds to step S405.

(6) In this step S405, an initial value 0 is set to a counter n indicating the number of probe units 26 for which the non-contact check has been completed.

(7) In the next step S407, as shown in FIG. 25 as an example, a message requesting to designate the probe unit 26 to be non-contact is displayed on the display unit of the display device 11.

  Here, the operator lifts the upper box 21B of the board inspection machine 20 (see FIG. 3B) and refers to the connector name and pin number written on the back surface (the surface on the −Z side) of the pin board 24. Then, the instructed probe unit 26 is specified, and the contact probe of the probe unit 26 is made non-contact as described above (see FIG. 26). At this time, if a contact probe other than the contact probe of the instructed probe unit 26 is in a non-contact state, the operator places the contact probe in a contact state as described above. That is, the contact probe of the designated probe unit 26 can be brought into non-contact without taking out the target substrate 31 from the substrate inspection machine 20. Then, when the work for making the contact probe of the instructed probe unit 26 non-contact is completed, the worker clicks the “non-contact work end” button.

(8) In the next step S409, it is determined whether or not the “non-contact work end” button has been clicked. If the “non-contact work end” button is not clicked, the determination here is denied, and the process waits until the “non-contact work end” button is clicked. On the other hand, if the “end non-contact work” button is clicked, the determination here is affirmed and the process proceeds to step S411.

(9) In step S411, diagnosis is executed. Here, input / output with respect to the target substrate 31 on the assumption that all contact probes are in contact is checked.

(10) In the next step S413, the diagnosis result is displayed on the display unit of the display device 11, as shown in FIG. Here, when an input / output error corresponding to only a contact probe that is not in contact is detected, the diagnosis result is “normal”. On the other hand, when an input / output error that is different from the input / output error corresponding to only the contact probe set to be non-contact is detected, the diagnosis result is “abnormal”.

(11) In the next step S415, it is determined whether or not the “re-diagnosis” button has been clicked. If the “re-diagnosis” button is clicked, the determination here is affirmed, and the process returns to step S411. On the other hand, if the “re-diagnosis” button has not been clicked, the determination here is denied, and the routine proceeds to step S417.

(12) In this step S417, it is determined whether or not the “OK” button has been clicked. If the “OK” button is not clicked, the determination here is denied and the processing returns to step S415. On the other hand, if the “OK” button is clicked, the determination here is affirmed, and the routine proceeds to step S419.

(13) In this step S419, 1 is added to the value of the counter n.

(14) In the next step S421, it is determined whether or not the value of the counter n is equal to or greater than the total number N of contact probes that are not contacted in the apparatus diagnosis. If the value of the counter n is not equal to or greater than N, the determination here is negative, and the n + 1-th contact probe is set as a non-contact target, and the process returns to step S407 (see FIG. 28).

(15) Thereafter, the processes in steps S407 to S421 are repeated until the determination in step S421 is affirmed.

(16) When the value of the counter n becomes equal to or greater than N, the determination in step S421 is affirmed, a message indicating the end of diagnosis is displayed on the display unit 11 (see FIG. 29), and the process proceeds to step S423. .

(17) In this step S423, it is determined whether or not the “program end” button has been clicked. If the “program end button” is clicked, the determination here is affirmed, and the diagnosis process is ended. On the other hand, if the “program end” button has not been clicked, the determination here is denied, and it waits for the “program end” button to be clicked.

  When the “print” button is clicked after the diagnosis is completed, the printing apparatus (not shown) is instructed to print the diagnosis result. When the “save” button is clicked after the diagnosis is completed, the diagnosis result is stored in the hard disk together with the diagnosis date and time.

  If the “stop” button is clicked before the diagnosis is completed, the diagnosis process is terminated at that point.

  Note that the operation of the CPU 15 by the inspection program when the substrate inspection is selected by the operator is not significantly different from the conventional operation, and thus description thereof is omitted here.

  As is clear from the above description, in the board inspection system 1 according to the present embodiment, the board inspection machine 20 and the CPU 15 constitute a board inspection apparatus.

  As described above, according to the board inspection machine 20 according to the present embodiment, each probe unit has the barrel 26b, a part of which is accommodated in the barrel 26b, and the first in the direction toward the set target board 31. The target board 31 in the pin board 24 in a state where the plunger 26a biased by the spring 26d, the barrel 26b is accommodated therein, the socket 26c fixed to the pin board 24, and the target board 31 are set. And a fixing mechanism for temporarily fixing the plunger 26a at a position where it does not contact the target substrate 31 from the opposite side.

  In this case, the contact probe can be brought out of contact with the target board 31 without pulling out the contact probe from the socket 26c and without taking out the target board 31 from the board inspection machine 20. Therefore, the time required for diagnosis can be drastically reduced as compared with the conventional case. Further, wear at the tip of the plunger 26a can be suppressed. Furthermore, damage to the contact probe and its socket 26c can be prevented. Therefore, the life of the contact probe can be extended.

  Further, since the contact probe can be brought into non-contact with the target substrate 31 when the target substrate 31 is being inspected, a new inspection that could not be performed by the conventional substrate inspection machine is newly added. Can be added to inspection items.

  And according to the board | substrate inspection system 1 which concerns on this embodiment, since the board | substrate inspection machine 20 is provided, a diagnostic process can be performed more frequently than before. Therefore, it becomes possible to perform highly reliable substrate inspection.

  In the above embodiment, the case where the probe unit 26 is used as the probe unit has been described. However, the present invention is not limited to this. Hereinafter, modifications 1 to 8 (probe unit 26A to probe unit 26H) of the probe unit will be described. In the following description, differences from the probe unit 26 will be mainly described, and the same reference numerals are used for the same or equivalent components as the probe unit 26, and the description thereof will be simplified or omitted.

<< Modification 1 >>
A probe unit 26A of Modification 1 is shown in FIG. The probe unit 26A includes a plunger 26a ₁ , a barrel 26b ₁ , a socket 26c ₁ , a spring 26d, a screw member 26e ₁ , and a nut 26g. The second spring 26f is not necessary.

The plunger 26a ₁ has the same external shape as the plunger 26a of the probe unit 26, but no screw hole is formed.

Barrel 26b ₁ has a slightly thicker inner diameter of the tubular portion is added shape than the outer diameter on the -Z side end portion of the screw member 26e ₁ of the barrel 26b of the probe unit 26.

The screw member 26e ₁ passes through the tubular portion of the barrel 26b ₁ and the spring 26d, and the + Z side end portion is fixed to the −Z side end portion of the plunger 26a ₁ . The end portion on the -Z side of the threaded member 26e ₁ is exposed from the socket 26c _1.

Socket 26c ₁ has a shape that eliminates the screw receiving portion of the socket 26c of the probe unit 26.

A state in which the contact probe of the probe unit 26A is in contact with the target substrate 31 is shown in FIG. Incidentally, at this time, the nut 26g is not screwed on the threaded member 26e _1.

In this case, when the plunger 26a ₁ is brought into non-contact with the target substrate 31, the operator screws the nut 26g from the −Z side end portion of the screw member 26e ₁ as shown in FIG. , it is sufficient to rotate the nut 26g to screw member 26e ₁ is moved in the -Z direction.

In the probe unit 26A, the nut 26g reaches the -Z side end portion of the tubular portion of the barrel 26b _1, further movement of the + Z direction of the nut 26g is the -Z side end portion of the tubular portion of the barrel 26b ₁ to be regulated, by further rotating the nut 26 g, the screw member 26e ₁ is moved in the -Z direction, the plunger 26a ₁ can be sunk inside the barrel 26b _1. That, -Z side end portion of the tubular portion of the barrel 26b ₁ is a nut holding portion.

<< Modification 2 >>
A probe unit 26B of Modification 2 is shown in FIG. The probe unit 26B includes a plunger 26a ₂ , a barrel 26b ₂ , a socket 26c ₂ , a spring 26d, a screw member 26e ₂ , a nut 26g, and the like.

The plunger 26a ₂ is the same as the plunger 26a _{1 of the} probe unit 26A.

Barrel 26b ₂ is the same as the barrel 26b of the probe unit 26.

The screw member 26e ₂ is the same as the screw member 26e ₁ of the probe unit 26A.

Socket 26c ₂ has a shape that eliminates the screw receiving portion of the socket 26c of the probe unit 26.

A state in which the contact probe of the probe unit 26B is in contact with the target substrate 31 is shown in FIG. Incidentally, at this time, the nut 26g is not screwed on the threaded member 26e _2.

In this case, when the plunger 26a ₂ is brought into non-contact with the target substrate 31, the operator screws the nut 26g from the −Z side end of the screw member 26e ₂ as shown in FIG. , it is sufficient to rotate the nut 26g to screw member 26e ₂ is moved in the -Z direction.

In the probe unit 26B, the nut 26g reaches the -Z side end portion of the socket 26c _2, any further movement in the + Z direction of the nut 26g, because it is regulated by the -Z side end portion of the socket 26c _2, further by rotating the nut 26 g, threaded member 26e ₂ is moved in the -Z direction, the plunger 26a ₂ can be sunk inside the barrel 26b _2. That, -Z side end portion of the socket 26c ₂ is the nut holding portion.

<< Modification 3 >>
A probe unit 26C of Modification 3 is shown in FIG. The probe unit 26C includes a plunger 26a ₃ , a barrel 26b ₃ , a socket 26c ₃ , a spring 26d, a screw member 26e ₃ and the like.

The plunger 26 a ₃ is the same as the plunger 26 a of the probe unit 26.

Barrel 26b ₃ is the same as the barrel 26b of the probe unit 26.

The screw member 26e ₃ is the same as the screw member 26e of the probe unit 26.

Socket 26c ₃ is in a shape without a portion undergoing screw of the socket 26c of the probe unit 26.

In the probe unit 26C, as shown in FIG. 37, when the plunger 26a ₃ is in contact with the target substrate 31, the screw member 26e ₃ is removed.

In this case, when the plunger 26a ₃ is brought into non-contact with the target substrate 31, the operator first attaches the screw member 26e ₃ to the −Z side end of the socket 26c ₃ as shown in FIG. It inserts from the opening and inserts into the barrel 26b ₃ through the opening at the −Z side end of the barrel 26b ₃ . Then, pressing the + Z side end portion of the threaded member 26e ₃ a (tip of the screw) to the plunger 26a ₃ (see FIG. 39). Next, as shown in FIG. 40, by turning the threaded member 26e ₃ in the direction in which the screw is tightened, screwed + Z-side end portion of the threaded member 26e ₃ a (tip of the screw) into the screw hole of the plunger 26a _3. As a result, as shown in FIG. 41, the plunger 26a ₃ starts to sink into the barrel 26b ₃ . Further, when the screw member 26e ₃ is turned and the amount of depression of the plunger 26a ₃ reaches a predetermined amount of depression, the rotation of the screw member 26e ₃ is stopped (see FIG. 42).

<< Modification 4 >>
A probe unit 26D of Modification 4 is shown in FIG. The probe unit 26D includes a plunger 26a ₄ , a barrel 26b ₄ , a socket 26c ₄ , a spring 26d, a rod-like member 26j, and the like.

The plunger 26a ₄ is has a plunger 26a similar outer shape of the probe unit 26, a cavity having a small hole on the -Z side end portion is formed.

The barrel 26b ₄ is the same as the barrel 26b of the probe unit 26.

Socket 26c ₄ has a shape that eliminates the part receiving the screw of the socket 26c of the probe unit 26.

Rod member 26j is the first nut e1, tip portion that can be one reversibly deformable possible shapes and can not pass through the shape passing through the small hole in the cavity formed its shape to the plunger 26a ₄ And a threaded portion into which the second nut e2 is screwed.

Here, when the first nut e1 is rotated in one direction, the + Z side end portion, which is the tip portion, can be expanded in the direction orthogonal to the Z axis (see FIG. 44A) and rotated in the other direction. If you do, you can shrink. Incidentally, the small hole of the cavity of the plunger 26a ₄ is, the + Z side end portion of the rod 26j of crimped state is able to pass through, the + Z side end portion of the rod 26j of spread was state a size which can not pass through.

  The second nut e2 can be moved in the Z-axis direction on the threaded portion by rotating (see FIG. 44B).

In the probe unit 26D, as shown in Figure 45, when the plunger 26a ₄ is in the contact state with the target substrate 31, the rod-like member 26j is removed.

In this case, when the non-contact plunger 26a ₄ for the target substrate 31, the worker, as shown in FIG. 46, first, the rod-shaped member 26j of contracted condition socket 26c ₄ -Z inserted from the opening side edge, the rod-like member + Z-side end portion of 26j is to be located within the cavity of the plunger 26a _4, the barrel 26b ₄ through the opening in the -Z side end of barrel 26b ₄ Insert into. Then, as shown in FIG. 47, the operator rotates the first nut e1 in the one direction, and expands the + Z side end of the rod-shaped member 26j in the direction orthogonal to the Z axis. Subsequently, the operator turns the second nut e2 in a direction in which the second nut e2 moves to the + Z side with respect to the thread portion. Here, movement in the + Z direction of the second nut e2 because it is regulated by the socket 26c _4, the screw portion by the rotation of the second nut e2 is moved in the -Z direction. When the sinking amount of the plunger 26a ₄ is sinking amount of predetermined, stopping the rotation of the second nut e2 (see FIG. 48).

<< Modification 5 >>
A probe unit 26E of Modification 5 is shown in FIG. The probe unit 26E includes a plunger 26a ₅ , a barrel 26b ₅ , a socket 26c ₅ , a spring 26d, a rod-like member 26e ₅ and the like.

The barrel 26b ₅ has the same outer shape as the barrel 26b of the probe unit 26, but a protrusion is formed on the inner wall of the cylindrical side surface.

Plunger 26a ₅ is formed with a groove having a shape obtained by rotating the alphabet “J” by 90 ° clockwise on the side surface. That is, a long groove (hereinafter referred to as “groove A” for convenience) and a short groove (hereinafter referred to as “groove B” for convenience) extending in the Z-axis direction, and the + Z side end of the groove A and the groove B are provided in the plunger 26a. A groove (hereinafter referred to as “groove C” for the sake of convenience) is formed to connect the + Z side end portions of the.

The −Z side end of the groove A is a first engagement portion with which the protrusion of the barrel 26b ₅ is engaged when the target substrate 31 is not set.

The socket 26c ₅ has a shape in which the screw receiving portion in the socket 26c of the probe unit 26 is eliminated.

The rod-shaped member 26e ₅ has an end portion on the + Z side fixed to an end surface on the −Z side of the plunger 26a ₅ and an end portion on the −Z side is exposed.

  FIG. 50 shows a state in which the contact probe of the probe unit 26E is in contact with the target substrate 31.

In this case, when the plunger 26a ₅ is brought into non-contact with the target substrate 31, the operator first moves the rod-shaped member 26e ₅ to − as shown in FIGS. 51 (A) and 51 (B). pulling in the Z direction, abut the projections of the barrel 26b ₅ the wall surface of the + Z side of the groove a. Next, the worker, in a state of pulling the rod-like member 26e _5, as shown in FIG. 52 (A), rotating the bar-like member 26e _5, abut against the wall surface of the groove B through the groove C. Then, the operator releases the hand from the rod-like member 26e _5. Thus, as shown in FIG. 52 (B), so that the projection of the barrel 26b ₅ is engaged with the wall surface on the -Z side of the groove B. In FIG. 51 (A) ~ FIG 52 (B), is omitted for convenience of socket 26c ₅ and the spring 26 d.

FIG. 53 shows a state in which the contact probe of the probe unit 26E is not in contact with the target substrate 31 in this way. That is, the −Z side end portion of the groove B is an engaging portion with which the protrusion of the barrel 26b ₅ is engaged when the plunger 26a ₅ is in a position where it does not contact the target substrate 31.

<< Modification 6 >>
A probe unit 26F of Modification 6 is shown in FIG. The probe unit 26F includes a plunger 26a ₆ , a barrel 26b ₆ , a socket 26c ₆ , a spring 26d, a rod-like member 26e ₆ , an elastic member 26h, an operation rod 26i, and the like.

The plunger 26a ₆ is the same as the plunger 26a _{1 of the} probe unit 26A.

The barrel 26b ₆ has a shape in which a cylinder portion with the + Z side as a bottom surface is added to the −Z side of the barrel 26b of the probe unit 26 via a throttle portion. Incidentally, the diaphragm portion is narrowed to an extent slightly thicker than the outer diameter of the rod 26e _6.

The socket 26c ₆ has a straight cylindrical shape without a bottom surface.

The rod-shaped member 26e ₆ has an end portion on the + Z side fixed to an end surface on the −Z side of the plunger 26a ₆ , and an end portion on the −Z side is located in a cylindrical portion of the barrel 26b ₆ .

Elastic member 26h is secured to the end of the -Z-side of the rod-like member 26e _6, it has a leaf spring that elastically deformed in the X-axis direction. When the probe unit 26F is in a contact state with the target substrate 31, as shown in FIG. 55, the resilient member 26h is positioned within the cylindrical portion of the barrel 26b _6.

  The operation rod 26i has an end on the + Z side engaged with the elastic member 26h, and an end on the −Z side is exposed. Therefore, when the operator pulls the −Z side end of the operation rod 26i, the elastic member 26h moves to the −Z side, and when the operator pushes the −Z side end of the operation rod 26i, the elastic member 26h becomes + Z. Move to the side.

In this case, when the plunger 26a ₆ is not in contact with the target substrate 31, as shown in FIG. 56, the operator pulls the operation rod 26i in the −Z direction, and the −Z side of the elastic member 26h. When the end portion is drawn to the −Z side from the −Z side end portion of the barrel 26b ₆ and expands in the direction perpendicular to the Z axis, the hand is released from the operation rod 26i. Thus, as shown in FIG. 57, the resilient member 26h is a be held by -Z side end of barrel 26b _6. In this case, the −Z side end portion of the barrel 26b ₆ becomes the engaging portion.

When the plunger 26a ₆ is brought into contact with the target substrate 31 again, as shown in FIGS. 58 and 59, the operator pushes the operation rod 26i in the + Z direction.

<< Modification 7 >>
A probe unit 26G of Modification 7 is shown in FIG. The probe unit 26G is a plunger 26a _7, the barrel 26b _7, socket 26c _7, the spring 26 d, and a like threaded member 26e _7, and a nut 26 g.

The plunger 26a ₇ has the same external shape as the plunger 26a of the probe unit 26, but is not formed with a screw hole.

The barrel 26b ₇ has the same external shape as the barrel 26b of the probe unit 26, but the opening at the −Z side end is not formed.

Socket 26c ₇ has a shape that eliminates the part receiving the screw of the socket 26c of the probe unit 26.

Screw member 26e ₇ is, + Z end of the side is fixed to the bottom surface of the barrel 26b _7, the end portion on the -Z side is exposed from the socket 26c _7. A nut 26g is screwed to the exposed portion.

  A state where the contact probe of the probe unit 26G is in contact with the target substrate 31 is shown in FIG.

In this case, when the plunger 26a ₇ is not in contact with the target substrate 31, the operator rotates the nut 26g so that the screw member 26e ₇ moves in the −Z direction as shown in FIG. You can do it.

In the probe unit 26G, movement in the + Z direction of the nut 26g is because it is regulated by the -Z side end portion of the socket 26c _7, by rotating the nut 26g, a screw member 26e ₇ is moved in the -Z direction, Plunger 26a ₇ can be sunk inside barrel 26b ₇ . That, -Z side end portion of the socket 26c ₇ is the nut holding portion.

Further, here, when the plunger 26a ₇ is in contact with the target substrate 31 with an appropriate sinking amount (2/3 stroke), the operator is placed on the portion of the screw member 26e ₇ on the −Z side with respect to the nut 26g. Is provided with a visible color mark. In addition, the part to which this color mark is given is also formed with a screw.

Therefore, the operator, when the plunger 26a ₇ against the target substrate 31 in contact with the non-contact state, the -Z-side portion than the nut 26g in threaded member 26e _7, the color mark is not attached by rotating the nut 26g so that there is no portion, it can be easily and amount with certainty the appropriate sink the sinking amount of the plunger 26a ₇ in contact with (2/3 stroke). That is, the contact pressure can be adjusted. Further, the operator, just by looking at portions exposed from the socket 26c ₇ in the screw member 26e _7, or plunger 26a ₇ is a non-contact state or a contact state can be known immediately.

Incidentally, the probe unit 26G, as shown in FIG. 63 (A), the rotation preventing mechanism for preventing rotation of the barrel 26b ₇ is provided in the barrel 26b ₇ and socket 26c _7. The rotation prevention mechanism is not limited to this, and may be a rotation prevention mechanism as shown in FIG. 63B as an example. Further, as shown in FIG. 64 (A) ~ FIG 64 (C) as an example, the barrel 26b ₇ and socket 26c ₇ may be a rotary difficult sectional shape.

<< Modification 8 >>
A probe unit 26H of Modification 8 is shown in FIG. The probe unit 26H includes a plunger 26a ₈ , a barrel 26b ₈ , a socket 26c ₈ , a spring 26d, a screw member 26e ₈ and the like.

The plunger 26a ₈ has the same external shape as the plunger 26a of the probe unit 26, but no screw hole is formed.

The barrel 26b ₈ has a shape in which an extension portion in which a screw hole having a predetermined length extending in the + Z direction is added to the −Z side end portion of the barrel 26b of the probe unit 26.

The socket 26c ₈ has a shape having a screw holding portion in which the head of the screw member 26e ₈ is held instead of the screw receiving portion in the socket 26c of the probe unit 26.

The screw member 26e ₈ has a screw portion that is screwed into the screw hole of the extension portion of the barrel 26b ₈ .

  A state where the contact probe of the probe unit 26H is in contact with the target substrate 31 is shown in FIG.

In this case, when the non-contact plunger 26a ₈ for the target substrate 31, the worker, as shown in FIG. 67, long threaded hole and screwed portions of the extension of the threaded member 26e ₈ What is necessary is just to rotate a head in the direction which becomes. Thus, it is possible to move the plunger 26a ₈ in the -Z direction.

The probe unit 26H is fixed to the extension of the barrel 26b _8, is accommodated in the socket 26c ₈ when the plunger 26a ₈ is in contact with the target substrate 31 in an amount (2/3 stroke) sink suitable , plunger 26a ₈ is further provided with a plate-like member 26k which is exposed from the socket 26c ₈ when the non-contact to the target substrate 31. Therefore, it is possible to plate-shaped member 26k is by whether visible, the plunger 26a ₈ is know for sure whether a or the non-contact is in contact with the target substrate 31. Furthermore, a color mark may be given to the plate-like member 26k in order to improve visual visibility.

  By the way, the display content and display layout of the display unit in the above embodiment are merely examples, and the present invention is not limited thereto.

  Moreover, in the said embodiment, LED for showing a test result may be provided in the board | substrate inspection machine 20. FIG. For example, an LED that emits green light when it passes and an LED that emits red light when it fails may be provided.

  Moreover, in the said embodiment, at least one part of the process according to the program by CPU15 may be performed by the board | substrate test | inspection machine 20 side. In this case, for example, a CPU and a ROM in which programs are stored may be mounted on the jig substrate 25.

  In the above-described embodiment, at least a part of various boards (digital IO board, AD conversion board, buffer board, etc.) on the board inspection machine 20 side may be provided on the personal computer 10 side.

  In the above embodiment, when the target board 31 is a so-called CPU board on which embedded software (firmware) is installed, the personal computer 10 and the target board 31 are serially connected, and the operation of the CPU board is checked. (See FIG. 68).

  Further, in the above embodiment, the personal computer 10 and the board inspection machine 20 may be integrated.

  As described above, the contact probe of the present invention is suitable for improving the working efficiency when diagnosing the substrate inspection apparatus as compared with the conventional case. Further, the substrate inspection apparatus of the present invention is suitable for improving the efficiency of the diagnostic work as compared with the prior art. The substrate inspection system of the present invention is suitable for performing highly reliable substrate inspection.

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate inspection system, 10 ... Personal computer, 11 ... Display apparatus, 12 ... Input device, 15 ... CPU (a part of board | substrate inspection apparatus), 20 ... Board inspection machine (a part of board | substrate inspection apparatus), 24 ... Pin board , 26 ... probe unit, 26A to 26H ... probe unit, 26a ... plunger (pin-shaped member), 26b ... barrel (first cylindrical member), 26c ... socket (second cylindrical member), 26e ... screw member , 26g, nut, 26j, rod-shaped member, 26k, plate-shaped member, 31 ... target substrate (printed wiring substrate, substrate).

JP 2000-171512 A JP 2006-138808 A JP 2006-292715 A JP 2008-224295 A JP 2008-226881 A Japanese Patent Laid-Open No. 11-23614

Claims (16)

A probe unit used for inspecting a substrate that is held on a pin board of a substrate inspection device and is set to face the pin board,
A first tubular member;
A part of the pin-shaped member housed in the first cylindrical member and biased by a spring member so that one end of the substrate is in contact with the substrate when the substrate is inspected;
A second cylindrical member housed therein and fixed to the pinboard;
A probe unit comprising: a fixing mechanism for temporarily fixing the pin-shaped member at a position that is not in contact with the substrate from the side opposite to the substrate in the pin board. The fixing mechanism is
A screw hole formed near the other end of the pin-shaped member and extending in a direction toward the substrate;
An opening formed in a bottom surface of the first tubular member;
A screw member screwed into a screw hole of the pin-like member through the opening of the first tubular member when the pin-like member is not in contact with the substrate;
The probe unit according to claim 1, further comprising: a screw holding portion that is provided on the second cylindrical member and holds the screw member at a position where the pin-shaped member is not in contact with the substrate. .   The probe unit according to claim 2, wherein the screw member is detachable from the second cylindrical member when the pin-shaped member is in contact with the substrate. The fixing mechanism is
An opening formed in a bottom surface of the first tubular member;
One end thereof is fixed to the other end of the pin-shaped member through the opening of the first cylindrical member, and the other end vicinity is the second cylindrical member. A screw member that is exposed from the nut and has a nut screwed into the exposed portion;
The probe unit according to claim 1, further comprising: a nut holding portion that is provided on the second cylindrical member and holds the nut at a position where the pin-shaped member is not in contact with the substrate. The fixing mechanism is
An opening formed in a bottom surface of the first tubular member;
One end thereof is fixed to the other end of the pin-shaped member through the opening of the first cylindrical member, and the other end in the vicinity thereof is the first cylindrical member. A screw member that is exposed from the nut and has a nut screwed into the exposed portion;
The probe unit according to claim 1, further comprising: a nut holding portion that is provided on the first cylindrical member and holds the nut at a position where the pin-shaped member is not in contact with the substrate.   The probe unit according to claim 2, further comprising a rotation prevention mechanism for preventing rotation of the pin-shaped member. The fixing mechanism is
An opening formed in a bottom surface of the first tubular member;
One end thereof is fixed to the other end of the pin-shaped member through the opening of the first cylindrical member, and the other end vicinity is the second cylindrical member. A rod-shaped member exposed from;
A protrusion formed on the inner wall of the cylindrical side surface of the first cylindrical member;
2. An engaging portion that is formed on a side surface of the pin-shaped member and that engages the protrusion when the pin-shaped member is in a position not in contact with the substrate. Probe unit. The fixing mechanism is
An opening formed in a bottom surface of the first tubular member;
A rod-like member whose one end is fixed to the other end of the pin-like member through the opening of the first tubular member;
A leaf spring fixed to the other end of the rod-shaped member and elastically deforming in a direction perpendicular to the longitudinal direction of the rod-shaped member;
2. An engaging portion provided on the first cylindrical member and engaged with the leaf spring when the pin-shaped member is in a position not in contact with the substrate. The probe unit described in 1. The fixing mechanism is
An opening formed in a bottom surface of the first tubular member;
A cavity formed near the end on the other side of the pin-shaped member and having a narrower inlet than the inside;
When the pin-shaped member is brought into non-contact with the substrate, the tip portion is inserted into the cavity through the opening of the first cylindrical member, and the shape of the tip portion passes through the entrance of the cavity. A rod-shaped member having a deformation mechanism that reversibly deforms into a shape that can be passed and a shape that cannot be passed; and a thread portion into which a nut is screwed;
The probe unit according to claim 1, further comprising: a nut holding portion that is provided on the second cylindrical member and holds the nut at a position where the pin-shaped member is not in contact with the substrate. The fixing mechanism is
An opening formed in the bottom surface of the second tubular member;
The one end portion is fixed to the bottom surface of the first cylindrical member through the opening of the second cylindrical member, and the other end portion vicinity is the second cylindrical member. A screw member that is exposed from the nut and has a nut screwed into the exposed portion;
The probe unit according to claim 1, further comprising: a nut holding portion that is provided on the second cylindrical member and holds the nut at a position where the pin-shaped member is not in contact with the substrate.   The color mark corresponding to an appropriate amount of sinking of the pin-shaped member into the first cylindrical member is given to the other end of the screw member. The probe unit described. The fixing mechanism is
An extension portion fixed to the bottom surface of the first tubular member and formed with a screw hole extending in a direction toward the substrate;
A screw member screwed into the screw hole of the extension when the pin-shaped member is not in contact with the substrate;
The probe unit according to claim 1, further comprising: a screw holding portion that is provided on the second cylindrical member and holds the screw member at a position where the pin-shaped member is not in contact with the substrate. .   The second cylindrical member is fixed to the extension and is accommodated in the second cylindrical member when the pin-shaped member is in contact with the substrate, and the second cylindrical member is not contacted with the substrate. The probe unit according to claim 12, further comprising a plate-like member exposed from the member.   The probe unit according to any one of claims 10 to 13, further comprising a rotation prevention mechanism for preventing rotation of the first cylindrical member. A board inspection apparatus for inspecting a printed wiring board,
A plurality of probe units according to any one of claims 1 to 14;
And a control device for inspecting a printed wiring board by inputting and outputting electrical signals to and from the plurality of probe units. An input device for an operator to input information about the printed wiring board to be inspected;
A substrate inspection apparatus according to claim 15;
A substrate inspection system comprising: a display device that displays an inspection result obtained by the substrate inspection device.

Images