JP5242881B2 - Network analyzer, network analysis method, program, and recording medium - Google Patents

Description

  The present invention relates to a network analyzer that calculates and measures circuit parameters of a device under test.

Conventionally, DUT (Device)
Under test) circuit parameters (for example, S parameters) are measured. A method for measuring circuit parameters of a device under test (DUT) according to the prior art will be described with reference to FIG.

  A signal having a frequency f1 is transmitted from the signal source 110 to the receiving unit 120 via the DUT 200. This signal is received by the receiving unit 120. The frequency of the signal received by the receiving unit 120 is assumed to be f2. By measuring the signal received by the receiving unit 120, the S parameter and frequency characteristics of the DUT 200 can be acquired.

  At this time, a measurement system error occurs in measurement due to a mismatch between the measurement system such as the signal source 110 and the DUT 200. This measurement system error is, for example, Ed: an error caused by the directionality of the bridge, Er: an error caused by frequency tracking, and Es: an error caused by source matching. FIG. 26 shows a signal flow graph relating to the signal source 110 when the frequency f1 = f2. RF IN is a signal input from the signal source 110 to the DUT 200 or the like, S11m is an S parameter of the DUT 200 or the like obtained from a signal reflected from the DUT 200 or the like, and S11a is an S parameter of the true DUT 200 or the like having no measurement system error. is there.

  When the frequency f1 = f2, the error can be corrected as described in Patent Document 1, for example. Such correction is called calibration. Outline of calibration. A calibration kit is connected to the signal source 110 to realize three types of states: open (open), short (short circuit), and load (standard load Z0). Signals reflected from the calibration kit at this time are acquired by a bridge to obtain three types of S parameters (S11m) corresponding to the three types of states. Three types of variables Ed, Er, and Es are obtained from the three types of S parameters.

  However, the frequency f1 may not be equal to the frequency f2. For example, this is a case where the DUT 200 is a device having a frequency conversion function such as a mixer. FIG. 27 shows a signal flow graph relating to the signal source 110 when the frequency f1 is not equal to the frequency f2. Ed and Es are the same as when the frequency f1 is equal to the frequency f2, but Er is divided into Er1 and Er2. In the calibration as described in Patent Document 1, since only three types of S parameters (S11m) are obtained, only Ed, Es, Er1, and Er2 can be obtained. Therefore, Er1 and Er2 cannot be obtained.

  Furthermore, when the frequency f1 is not equal to the frequency f2, the measurement system error by the receiving unit 120 cannot be ignored. A signal flow graph when the signal source 110 and the receiving unit 120 are directly connected is shown in FIG. S21m is an S parameter of the DUT 200 or the like obtained from the signal received by the receiving unit 120. As shown in FIG. 28, measurement system errors such as Et and EL by the receiving unit 120 occur. This cannot be obtained by the calibration as described in Patent Document 1.

  Therefore, when the frequency f1 is not equal to the frequency f2, the error is corrected as described in Patent Document 2. First, connect three types of calibration kits (open, open, short, load (standard load Z0)) to the signal source. Since this is the same as the method described in Patent Document 1, Ed, Es, and Er1 · Er2 can be obtained. Next, the signal source is connected to a power meter. Based on the measurement result of the power meter, Er1 and Er2 can be obtained (see FIGS. 6 and 7 of Patent Document 2). Furthermore, Et and EL can be calculated | required from the measurement result at that time by connecting a signal source and a receiving part directly (refer FIG. 8, FIG. 9 of patent document 2).

  Transmission tracking is defined as Er1 · Et. According to the method described in Patent Document 2, since Er1 and Et can be measured, it is also possible to obtain transmission tracking Er1 · Et.

Japanese Patent Laid-Open No. 11-38054 International Publication No. 03/087856 Pamphlet

  However, when the transmission tracking Er1 · Et is obtained by the method described in Patent Document 2, it is necessary to use a power meter to measure Er1. Since a power meter is used, the phase of transmission tracking cannot be acquired.

  Therefore, an object of the present invention is to make it possible to acquire a transmission tracking phase and to correct an error in a measurement system.

  The present invention includes a measurement system error factor recording means for recording a measurement system error factor that occurs regardless of frequency conversion by a device under test, and a signal output from a certain terminal to a first coefficient in a signal input to the terminal. And the first coefficient and the second coefficient of the calibration frequency conversion element expressed as the sum of the signal input to the other terminal multiplied by the second coefficient and the ratio of the magnitude of the second coefficient is constant. Based on the calibration coefficient output means for outputting the measured coefficients, the measurement system error factor recorded in the measurement system error factor recording means, and the first coefficient and the second coefficient output by the calibration coefficient output means, Transmission tracking acquisition means for acquiring transmission tracking caused by frequency conversion.

  According to the invention configured as described above, the measurement system error factor recording means records the measurement system error factor generated regardless of the frequency conversion by the object to be measured. The coefficient output means for calibration is the sum of the signal output from a terminal multiplied by the first coefficient multiplied by the signal input to that terminal and the signal multiplied by the second coefficient multiplied by the signal input to the other terminal. The measured value of the first coefficient and the second coefficient of the calibration frequency conversion element with a constant ratio of the magnitudes of the second coefficients is output. The transmission tracking acquisition means acquires transmission tracking caused by frequency conversion based on the measurement system error factor recorded in the measurement system error factor recording means and the first coefficient and the second coefficient output from the calibration coefficient output means. .

The present invention further provides the first frequency coefficient M11 ′, M22 ′, the second coefficient M12 ′, M21 ′, and the signal input to the first terminal a1 from the first terminal. When the output signal is b1, the signal input to the second terminal is a2, the signal output from the second terminal is b2,
b1 = M11 ′ × a1 + M12 ′ × a2
b2 = M21 ′ × a1 + M22 ′ × a2
And
| M12 ′ | / | M21 ′ | is preferably constant.

  In the present invention, it is further preferable that the second coefficient has the same magnitude for any terminal.

  The present invention is further connected to an input signal measuring means for measuring an input signal parameter relating to an input signal to be input to the device under test before an error factor of the measurement system occurs, and a terminal of the device under test to output the input signal. It is preferable to include a plurality of ports and a device signal measuring unit for measuring a device signal parameter related to the device signal input to the port from the terminal of the device to be measured.

  According to the present invention, the calibration coefficient output means further measures the first coefficient and the second coefficient of the calibration frequency conversion element by the input signal parameter measured by the input signal measuring means and the measured signal signal measuring means. It is preferable to obtain the ratio by the ratio to the measured object signal parameter.

  In the present invention, the transmission tracking acquisition means may further include a ratio of error factors generated from when the DUT signal is output from the terminal of the DUT without frequency conversion until it is received by the DUT signal measurement means. Based on the above, it is preferable to obtain transmission tracking.

  According to the present invention, the measurement system error factor recording means records the measurement system error factor recording process that records the measurement system error factor generated regardless of the frequency conversion by the object to be measured, and the calibration coefficient output means is output from a certain terminal. Is expressed as the sum of the signal input to the terminal multiplied by the first coefficient and the signal input to the other terminal multiplied by the second coefficient, and the ratio of the magnitudes of the second coefficients is A calibration coefficient output step for outputting a measurement of the first coefficient and the second coefficient of the calibration frequency conversion element that is constant, and a transmission tracking acquisition means is a measurement system error factor recorded in the measurement system error factor recording means. And a transmission tracking acquisition step of acquiring transmission tracking caused by frequency conversion based on the first coefficient and the second coefficient output from the calibration coefficient output means.

  The present invention relates to a measurement system error factor recording process for recording a measurement system error factor that occurs regardless of frequency conversion by a device under test, and a signal output from a certain terminal to a first coefficient in a signal input to the terminal. And the first coefficient and the second coefficient of the calibration frequency conversion element expressed as the sum of the signal input to the other terminal multiplied by the second coefficient and the ratio of the magnitude of the second coefficient is constant. Based on the calibration coefficient output process that outputs the measured coefficient, the measurement system error factor recorded by the measurement system error factor recording process, and the first and second coefficients output by the calibration coefficient output process A program for causing a computer to execute transmission tracking acquisition processing for acquiring transmission tracking caused by frequency conversion.

  The present invention relates to a measurement system error factor recording process for recording a measurement system error factor that occurs regardless of frequency conversion by a device under test, and a signal output from a certain terminal to a first coefficient in a signal input to the terminal. And the first coefficient and the second coefficient of the calibration frequency conversion element expressed as the sum of the signal input to the other terminal multiplied by the second coefficient and the ratio of the magnitude of the second coefficient is constant. Based on the calibration coefficient output process that outputs the measured coefficient, the measurement system error factor recorded by the measurement system error factor recording process, and the first and second coefficients output by the calibration coefficient output process A computer-readable recording medium storing a program for causing a computer to execute transmission tracking acquisition processing for acquiring transmission tracking caused by frequency conversion That.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a block diagram showing a configuration of a network analyzer 1 according to an embodiment of the present invention. A DUT (Device Under Test) 2 is connected to the network analyzer 1. The network analyzer 1 measures a circuit parameter of the DUT 2, such as an S parameter. When a mixer (multiplier) is used as DUT 2, the S parameter is particularly referred to as an M parameter.

  FIG. 2A is a diagram illustrating a configuration of the DUT 2. DUT2 is a mixer (multiplier). The DUT 2 includes a first terminal 2a, a second terminal 2b, an RF signal processing unit 2R, an IF signal processing unit 2I, and a local signal processing unit 2L.

  When the signal a1 having the frequency f1 is input from the first terminal 2a, the signal a1 is given to the RF signal processing unit 2R. The local signal processing unit 2L is supplied with a local signal Lo (frequency fLo). The signal (frequency f1) given to the RF signal processing unit 2R and the signal (frequency fLo) given to the local signal processing unit 2L are mixed, and the frequency f2 (= f1-fLo) is output from the IF signal processing unit 2I. The signal b2 is output via the second terminal 2b. When the signal a1 having the frequency f1 is input from the first terminal 2a, the signal is reflected to some extent without being subjected to frequency conversion by the DUT 2, and output from the first terminal 2a as the signal b1 with the frequency f1.

  When the signal a2 having the frequency f2 is input from the second terminal 2b, the signal is supplied to the IF signal processing unit 2I. The local signal processing unit 2L is supplied with a local signal Lo (frequency fLo). A signal (frequency f1) given to the RF signal processing unit 2R and a signal (frequency fLo) given to the local signal processing unit 2L are mixed, and a signal having a frequency f1 (= f2 + fLo) is output from the RF signal processing unit 2R. b1 is output via the first terminal 2a. When a signal a2 having a frequency f2 is input from the second terminal 2b, the signal is reflected to some extent without being subjected to frequency conversion by the DUT 2, and is output from the second terminal 2b as the signal b2 with the frequency f2.

  Here, the signal a1 of the frequency f1 is expressed as a1 (f1), the signal a2 of the frequency f2 is expressed as a2 (f2), the signal b1 of the frequency f1 is expressed as b1 (f1), and the signal b2 of the frequency f2 is expressed as b2 (f2).

FIG. 2B shows the relationship between signals input to and output from the first terminal 2a and the second terminal 2b. That is,
b1 = M11 × a1 + M12 × a2
b2 = M21 × a1 + M22 × a2
Is established.

  M11 and M22 are referred to as a first coefficient, and M12 and M21 are referred to as a second coefficient.

  Returning to FIG. 1, the network analyzer 1 includes ports 4 a and 4 b, DUT local signal port 4 c, signal source 10, measurement units 20 and 30, DUT local signal oscillator 40, switches 52, 54 and 56, and forward path error. A factor acquisition unit 60, a reverse path error factor acquisition unit 70, a measurement system error factor recording unit 80, an error factor acquisition unit 90, and a circuit parameter measurement unit 98 are provided.

  The port 4a is connected to the measurement unit 20 and the first terminal 2a. The port 4a outputs an input signal (frequency f1) from the signal source 10 to the first terminal 2a.

  The port 4b is connected to the measurement unit 30 and the second terminal 2b. The port 4b outputs an input signal (frequency f2) from the signal source 10 to the second terminal 2b.

  The DUT local signal port 4 c is connected to the DUT local signal oscillator 40. The DUT local signal port 4c supplies the DUT local signal from the DUT local signal oscillator 40 to the DUT 2.

  The signal source 10 includes a signal output unit 12, a bridge 13, a switch 14, an internal mixer 16, and a receiver (Rch) 18 (input signal measuring means).

  The signal output unit 12 outputs an input signal having a frequency f1 or f2.

  The bridge 13 supplies the signal output from the signal output unit 12 to the internal mixer 16 and the switch 14. The signal supplied by the bridge 13 can be said to be a signal that is not affected by the measurement system error factor by the network analyzer 1.

  The switch 14 has terminals 14a, 14b, and 14c. The terminal 14 a is connected to the bridge 13 and receives a signal from the bridge 13. The terminal 14 b is connected to the measurement unit 20, and the terminal 14 c is connected to the measurement unit 30. The terminal 14a is connected to the terminal 14b or the terminal 14c. When the terminal 14a and the terminal 14b are connected, the input signal output from the signal output unit 12 (at this time, the frequency of the input signal is set to f1) is given to the measurement unit 20. When the terminal 14a and the terminal 14c are connected, the input signal output from the signal output unit 12 (at this time, the frequency of the input signal is set to f2) is given to the measurement unit 30.

  The internal mixer 16 mixes the signal supplied from the bridge 13 with the internal local signal and outputs the mixed signal.

  The receiver (Rch) 18 (input signal measuring means) measures the S parameter of the signal output from the internal mixer 16. Therefore, the receiver (Rch) 18 measures the S parameter regarding the input signal before the influence of the measurement system error factor by the network analyzer 1 occurs.

  The measuring unit 20 includes a bridge 23, an internal mixer 26, and a receiver (Ach) 28 (measurement object signal measuring means).

  The bridge 23 outputs the signal given from the signal source 10 toward the port 4a. Further, the signal reflected from the DUT 2 and returned through the DUT 2 are received via the port 4 a and supplied to the internal mixer 26. The signal reflected and returned from the DUT 2 and the signal that has passed through the DUT 2 are referred to as a device under test signal.

  The internal mixer 26 mixes the signal supplied from the bridge 23 with the internal local signal and outputs the mixed signal.

  The receiver (Ach) 28 (measurement object signal measuring means) measures the S parameter of the signal output from the internal mixer 26. Therefore, the receiver (Ach) 28 measures the S parameter related to the signal to be measured.

  The measuring unit 30 includes a bridge 33, an internal mixer 36, and a receiver (Bch) 38 (measurement object signal measuring means).

  The bridge 33 outputs the signal given from the signal source 10 toward the port 4b. Further, the signal reflected back from DUT 2 and the signal passing through DUT 2 are received via port 4 b and supplied to internal mixer 36. The signal reflected and returned from the DUT 2 and the signal that has passed through the DUT 2 are referred to as a device under test signal.

  The internal mixer 36 mixes the signal supplied from the bridge 33 with the internal local signal and outputs the mixed signal.

  The receiver (Bch) 38 (measurement object signal measuring means) measures the S parameter of the signal output from the internal mixer 36. Therefore, the receiver (Bch) 38 measures the S parameter related to the signal to be measured.

  The DUT local signal oscillator 40 gives a local signal Lo (frequency fLo) to the DUT 2.

  In addition, what represented the state shown in FIG. 1 with the signal flow graph is shown in FIG. M11, M21, M12, and M22 are true M parameters of the DUT 2 (excluding the influence of measurement system error factors).

  FIG. 3A shows a state (referred to as a forward path) in which an input signal (frequency f1) is given to the DUT 2 via the measurement unit 20 (the terminal 14a and the terminal 14b are connected), and FIG. A state in which a signal (frequency f2) is applied to the DUT 2 via the measurement unit 30 (referred to as a reverse path) is shown (the terminals 14a and 14c are connected).

  In the forward path (see FIG. 3A), the measurement system error factors are due to Ed1 (error due to the bridge directionality), Ei1, Eo1 (error due to frequency tracking), and Es1 (source matching). Error), Eg2, and EL2.

  In the reverse path (see FIG. 3B), the measurement system error factors are caused by Ed2 (error due to the direction of the bridge), Ei2, Eo2 (error due to frequency tracking), and Es2 (source matching). Error), Eg1, and EL1.

  The switch 52 supplies the measurement result of the receiver (Ach) 28 to any one of the forward path error factor acquisition unit 60, the error factor acquisition unit 90, and the circuit parameter measurement unit 98.

  The switch 54 gives the measurement result of the receiver (Bch) 38 to any one of the reverse path error factor acquisition unit 70, the error factor acquisition unit 90, and the circuit parameter measurement unit 98.

  The switch 56 supplies the measurement result of the receiver (Rch) 18 to any one of the forward path error factor acquisition unit 60, the reverse path error factor acquisition unit 70, the error factor acquisition unit 90, and the circuit parameter measurement unit 98.

  The forward path error factor acquisition unit 60 receives the measurement result of the receiver (Ach) 28 via the switch 52. Further, the forward path error factor acquisition unit 60 receives the measurement result of the receiver (Rch) 18 via the switch 56. Based on the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18, Ed1, Ei1, Eo1 (= Er1), Es1, and EL2 in the forward path (see FIG. 3A) are acquired. .

  FIG. 4 is a functional block diagram showing the configuration of the forward path error factor acquisition unit 60. The forward path error factor acquisition unit 60 includes a switch 62, a first forward path error factor acquisition unit 64, and a second forward path error factor acquisition unit 66.

  The switch 62 sends the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18 to the first forward path error factor acquisition unit 64 or the second forward path error factor acquisition unit 66. Specifically, when the calibration tool 6 (described later) is connected to the port 4a, the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18 are sent to the first forward path error factor acquisition unit 64. send. When the port 4b is connected to the port 4a, the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18 are sent to the second forward path error factor acquisition unit 66.

  The first forward path error factor acquisition unit 64 acquires Ed1, Ei1 · Eo1 (= Er1), and Es1. FIG. 5 shows a state in which the terminal 6a and the port 4a of the calibration tool 6 are connected. The calibration tool 6 is a well-known tool that realizes three types of states of open (open), short (short-circuit), and load (standard load Z0) as described in JP-A-11-38054 (Patent Document 1). is there.

  FIG. 6 shows a signal flow graph representing a state in which the calibration tool 6 is connected to the port 4a. Here, the measurement result of the receiver (Rch) 18 is R1 (f1), and the measurement result of the receiver (Ach) 28 is A1 (f1). The relationship between R1 (f1) and A1 (f1) is as follows:

ここで、校正用具６が三種類接続されるため、R1(f１)とA1(f1)との組み合わせは三種類求められる。よって、求められる変数もＥｄ１、Ｅｉ１・Ｅｏ１（＝Ｅｒ１）、Ｅｓ１という三種類の変数である。

Here, since three types of calibration tools 6 are connected, three types of combinations of R1 (f1) and A1 (f1) are required. Therefore, the obtained variables are also three types of variables, Ed1, Ei1 · Eo1 (= Er1), and Es1.

  The second forward path error factor acquisition unit 66 receives Ed1, Ei1 · Eo1 (= Er1), Es1 from the first forward path error factor acquisition unit 64, and the measurement result of the receiver (Ach) 28 via the switch 62. And the measurement result of the receiver (Rch) 18 is received. Then, the second forward path error factor acquisition unit 66 acquires EL2.

  FIG. 7 shows a state in which the port 4b is connected to the port 4a. FIG. 8 shows a state in which the port 4b is connected to the port 4a in a signal flow graph. Here, the measurement result of the receiver (Rch) 18 is R1 (f1), and the measurement result of the receiver (Ach) 28 is A1 (f1). Further, it is assumed that an input signal (frequency f1) is output from the port 4a via the measuring unit 20. The relationship between R1 (f1) and A1 (f1) is as follows:

ここで、Ｅｄ１、Ｅｒ１、Ｅｓ１は既知なので、ＥＬ２を求めることができる。第二順経路誤差要因取得部６６は、Ｅｄ１、Ｅｉ１・Ｅｏ１（＝Ｅｒ１）、Ｅｓ１、ＥＬ２を測定系誤差要因記録部８０に出力する。

Here, since Ed1, Er1, and Es1 are known, EL2 can be obtained. The second forward path error factor acquisition unit 66 outputs Ed1, Ei1 · Eo1 (= Er1), Es1, and EL2 to the measurement system error factor recording unit 80.

  The reverse path error factor acquisition unit 70 receives the measurement result of the receiver (Bch) 38 via the switch 54. Further, the reverse path error factor acquisition unit 70 receives the measurement result of the receiver (Rch) 18 via the switch 56. Then, based on the measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18, Ed2, Ei2 · Eo2 (= Er2), Es2, and EL1 in the reverse path (see FIG. 3B) are acquired. .

  FIG. 9 is a functional block diagram showing the configuration of the reverse path error factor acquisition unit 70. The reverse path error factor acquisition unit 70 includes a switch 72, a first reverse path error factor acquisition unit 74, and a second reverse path error factor acquisition unit 76.

  The switch 72 sends the measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18 to the first reverse path error factor acquisition unit 74 or the second reverse path error factor acquisition unit 76. Specifically, when the calibration tool 6 is connected to the port 4 b, the measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18 are sent to the first reverse path error factor acquisition unit 74. When the port 4b is connected to the port 4a, the measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18 are sent to the second reverse path error factor acquisition unit 76.

  The first reverse path error factor acquisition unit 74 acquires Ed2, Ei2 · Eo2 (= Er2), and Es2. The calibration tool 6 has been described above and will not be described. If the measurement result of the receiver (Rch) 18 is R2 (f2) and the measurement result of the receiver (Bch) 38 is B2 (f2), the relationship between R2 (f2) and B2 (f2) is It is as follows.

ここで、校正用具６が三種類接続されるため、R2(f2)とB2(f2)との組み合わせは三種類求められる。よって、求められる変数もＥｄ２、Ｅｉ２・Ｅｏ２（＝Ｅｒ２）、Ｅｓ２という三種類の変数である。

Here, since three types of calibration tools 6 are connected, three types of combinations of R2 (f2) and B2 (f2) are required. Therefore, the required variables are also three types of variables: Ed2, Ei2 · Eo2 (= Er2), and Es2.

  The second reverse path error factor acquisition unit 76 receives Ed2, Ei2 · Eo2 (= Er2), Es2 from the first reverse path error factor acquisition unit 74, and the measurement result of the receiver (Bch) 38 via the switch 72. And the measurement result of the receiver (Rch) 18 is received. Then, the second reverse path error factor acquisition unit 76 acquires EL1.

  Here, if the measurement result of the receiver (Rch) 18 is R2 (f2) and the measurement result of the receiver (Bch) 38 is B2 (f2), the relationship between R2 (f2) and B2 (f2) is as follows: It is as follows. It is assumed that an input signal (frequency f2) is output from the port 4b via the measurement unit 30.

ここで、Ｅｄ２、Ｅｒ２、Ｅｓ２は既知なので、ＥＬ１を求めることができる。第二逆経路誤差要因取得部７６は、Ｅｄ２、Ｅｉ２・Ｅｏ２（＝Ｅｒ２）、Ｅｓ２、ＥＬ１を測定系誤差要因記録部８０に出力する。

Here, since Ed2, Er2, and Es2 are known, EL1 can be obtained. The second reverse path error factor acquisition unit 76 outputs Ed2, Ei2 · Eo2 (= Er2), Es2, and EL1 to the measurement system error factor recording unit 80.

  The measurement system error factor recording unit 80 receives Ed1, Ei1 · Eo1 (= Er1), Es1, and EL2 from the forward path error factor acquisition unit 60, and Ed2, Ei2 · Eo2 (= Er2) from the reverse path error factor acquisition unit 70. , Es2 and EL1 are recorded. Ed 1, Er 1, Es 1, EL 2, Ed 2, Er 2, Es 2, and EL 1 are measurement system error factors that occur regardless of the frequency conversion of the device under test.

  The error factor acquisition unit 90 acquires transmission tracking caused by frequency conversion. The transmission tracking Et21 and Et12 are defined as Et21 = Ei1 · Eg2 and Et12 = Ei2 · Eg1, respectively. Transmission tracking is a measurement system error factor caused by frequency conversion of an object to be measured.

  When acquiring transmission tracking, the calibration mixer 8 is connected to the network analyzer 1 as shown in FIG. The calibration mixer 8 is substantially the same as the DUT 2. However, if the first coefficient is M11 ′ and M22 ′ and the second coefficient is M12 ′ and M21 ′, the ratio of | M12 ′ | and | M21 ′ | When a mixer is used, | M12 '| = | M21' |.

  An input signal (frequency f1) is applied to such a calibration mixer 8 via the measurement unit 20, and further an input signal (frequency f2) is applied via the measurement unit 30, and the receiver (Rch) 18 at that time Based on the measurement result, the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Bch) 38, transmission tracking is acquired.

  FIG. 10 is a functional block diagram showing the configuration of the error factor acquisition unit 90. The error factor acquisition unit 90 includes a measurement system error factor reading unit 910, a switch 922, a forward path measurement data acquisition unit 924, a reverse path measurement data acquisition unit 926, a circuit parameter acquisition unit (calibration coefficient output means) 928, transmission tracking. An acquisition unit 930 is included.

  The measurement system error factor reading unit 910 reads Ed1, Er1, Es1, EL2, Ed2, Er2, Es2, and EL1 from the measurement system error factor recording unit 80, and outputs them to the transmission tracking acquisition unit 930.

  The switch 922 sends the measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 to the forward path measurement data acquisition unit 924 or the reverse path measurement data acquisition unit 926. . Specifically, when an input signal (frequency f1) is given via the measurement unit 20 (terminal 14a and terminal 14b are connected), the measurement result is sent to the forward path measurement data acquisition unit 924. When an input signal (frequency f2) is given through the measurement unit 30 (terminal 14a and terminal 14c are connected), the measurement result is sent to the reverse path measurement data acquisition unit 926.

  The forward path measurement data acquisition unit 924 receives the measurement result of the receiver (Rch) 18 received from the switch 922 as R1 (f1), the measurement result of the receiver (Ach) 28 as A1 (f1), and the measurement of the receiver (Bch) 38. The result is output to the circuit parameter acquisition unit 928 as B1 (f2).

  The reverse path measurement data acquisition unit 926 receives the measurement result of the receiver (Rch) 18 received from the switch 922 as R2 (f2), the measurement result of the receiver (Ach) 28 as A2 (f1), and the measurement of the receiver (Bch) 38. The result is output to the circuit parameter acquisition unit 928 as B2 (f2).

  The circuit parameter acquisition unit (calibration coefficient output means) 928 receives R1 (f1), A1 (f1), B1 (f2) received from the forward path measurement data acquisition unit 924, and R2 received from the reverse path measurement data acquisition unit 926. Based on (f2), A2 (f1), and B2 (f2), the M parameter of the calibration mixer 8 is acquired.

When the M parameters acquired by the circuit parameter acquisition unit 928 are M11m ′, M12m ′, M21m ′, and M22m ′
M11m '= A1 (f1) / R1 (f1)
M12m '= A2 (f1) / R2 (f2)
M21m '= B1 (f2) / R1 (f1)
M22m '= B2 (f2) / R2 (f2)
It becomes.

  The transmission tracking acquisition unit 930 includes the M parameters M11m ′, M12m ′, M21m ′, and M22m ′ of the calibration mixer 8 acquired by the circuit parameter acquisition unit 928, Ed1 read by the measurement system error factor reading unit 910, In response to Er1, Es1, EL2, Ed2, Er2, Es2, and EL1, transmission tracking Et21 and Et12 are obtained.

  First, by analyzing the network analyzer 1 in detail, it can be seen that there is a relationship represented by the following formula 1. The proof will be described later. In addition, L of EL1 and EL2 is written as lowercase l.

よって、Ｘ＝Ｅｏ２／Ｅｏ１とおくと、伝送トラッキングＥｔ２１、Ｅｔ１２は下記の式２のように表される。また、ＥＬ１、ＥＬ２のＬを小文字のｌと表記する。

Therefore, if X = Eo2 / Eo1, transmission tracking Et21 and Et12 are expressed as in the following formula 2. In addition, L of EL1 and EL2 is written as lowercase l.

なお、Ｅｏ１は、被測定物信号がＤＵＴ２の第一端子２ａより周波数変換を伴わないで出力されてからレシーバ（Ａｃｈ）２８により受信されるまでに生じる誤差要因である。Ｅｏ２は、被測定物信号がＤＵＴ２の第二端子２ｂより周波数変換を伴わないで出力されてからレシーバ（Ｂｃｈ）３８により受信されるまでに生じる誤差要因である。

Note that Eo1 is an error factor that occurs after the DUT signal is output from the first terminal 2a of the DUT 2 without frequency conversion and is received by the receiver (Ach) 28. Eo2 is an error factor that occurs after the DUT signal is output from the second terminal 2b of the DUT 2 without frequency conversion and is received by the receiver (Bch) 38.

  As Ed1, Er1, Es1, EL1, Ed2, Er2, Es2, and EL2, those read by the measurement system error factor reading unit 910 may be used. Therefore, if X is known, transmission tracking Et21 and Et12 can be obtained.

  Here, M parameters M11 ′, M12 ′, M21 ′, M22 ′ of the calibration mixer 8 and M parameter measurement results M11m ′, M12m ′, M21m ′ of the calibration mixer 8 acquired by the circuit parameter acquisition unit 928. , M22m ′ has a relationship as shown in Equation 3 below. However, '(dash) such as M11' is omitted and expressed as M11 or the like. In addition, L of EL1 and EL2 is written as lowercase l.

式２を式３に適用し、M21’／M12’を求めると、下記の式４のようになる。ただし、M11’等の’（ダッシュ）を省略し、M11等と表記している。また、ＥＬ１、ＥＬ２のＬを小文字のｌと表記する。

When Formula 2 is applied to Formula 3 and M21 ′ / M12 ′ is obtained, Formula 4 below is obtained. However, '(dash) such as M11' is omitted and indicated as M11 etc. In addition, L of EL1 and EL2 is written as lowercase l.

ここで、|M12’|=|M21’|なので、M12’ = M21’×e^θである。ただし、θはローカル信号Ｌｏの位相により決まる定数である。式４をＸについて解き、下記の式５を得る。ただし、M11’等の’（ダッシュ）を省略し、M11等と表記している。また、ＥＬ１、ＥＬ２のＬを小文字のｌと表記する。

Here, | M12 '| = | M21 ' | So, is the ^{M12 '= M21' × e θ} . However, θ is a constant determined by the phase of the local signal Lo. Equation 4 is solved for X to obtain Equation 5 below. However, '(dash) such as M11' is omitted and indicated as M11 etc. In addition, L of EL1 and EL2 is written as lowercase l.

なお、順経路誤差要因取得部６０あるいは逆経路誤差要因取得部７０により測定系誤差要因を取得している間の任意の時点を基準とし、この基準時点におけるθを０とすれば、式５におけるθを定めることができる。

In addition, if an arbitrary time point during the measurement system error factor acquisition by the forward path error factor acquisition unit 60 or the reverse path error factor acquisition unit 70 is used as a reference, and θ at this reference time is 0, the equation 5 θ can be determined.

  Therefore, Ed1, Er1, Es1, EL1, Ed2, Er2, Es2, EL2 recorded in the measurement system error factor recording unit 80, and the calibration mixer 8 acquired by the circuit parameter acquisition unit (calibration coefficient output means) 928 are obtained. Based on the M parameters M11m ′, M12m ′, M21m ′, and M22m ′, X is obtained (Expression 5), and transmission tracking Et21 and Et12 can be acquired based on X (Expression 2).

  The circuit parameter measurement unit 98 acquires the true M parameter of the DUT 2. The true M parameter means that the influence of the error factor has been removed.

  When acquiring the true M parameter of the DUT 2, the DUT 2 is connected to the network analyzer 1 as shown in FIG. An input signal (frequency f1) is given to the DUT 2 via the measurement unit 20, and further, an input signal (frequency f2) is given via the measurement unit 30, and the measurement result of the receiver (Rch) 18 at that time, the receiver (Ach) ) Based on the measurement result of 28 and the measurement result of the receiver (Bch) 38, the true M parameter of the DUT 2 is acquired.

  FIG. 12 is a functional block diagram showing the configuration of the circuit parameter measurement unit 98. As shown in FIG. The circuit parameter measurement unit 98 includes a measurement system error factor reading unit 980, a switcher 982, a forward path measurement data acquisition unit 984, a reverse path measurement data acquisition unit 986, a circuit parameter acquisition unit 988, and a true value circuit parameter acquisition unit 989. .

  The measurement system error factor reading unit 980 reads Ed1, Er1, Es1, EL2, Ed2, Er2, Es2, EL1 from the measurement system error factor recording unit 80 and outputs them to the true value circuit parameter acquisition unit 989.

  The switcher 982 sends the measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 to the forward path measurement data acquisition unit 984 or the reverse path measurement data acquisition unit 986. . Specifically, when an input signal (frequency f1) is given through the measurement unit 20 (terminal 14a and terminal 14b are connected), the measurement result is sent to the forward path measurement data acquisition unit 984. When an input signal (frequency f2) is given through the measurement unit 30 (terminal 14a and terminal 14c are connected), the measurement result is sent to the reverse path measurement data acquisition unit 986.

  The forward path measurement data acquisition unit 984 receives the measurement result of the receiver (Rch) 18 received from the switcher 982 as R1 (f1), the measurement result of the receiver (Ach) 28 as A1 (f1), and the measurement of the receiver (Bch) 38. The result is output to the circuit parameter acquisition unit 988 as B1 (f2).

  The reverse path measurement data acquisition unit 986 receives the measurement result of the receiver (Rch) 18 received from the switch 982 as R2 (f2), the measurement result of the receiver (Ach) 28 as A2 (f1), and the measurement of the receiver (Bch) 38. The result is output to the circuit parameter acquisition unit 988 as B2 (f2).

  The circuit parameter acquisition unit 988 receives R1 (f1), A1 (f1), B1 (f2) received from the forward path measurement data acquisition unit 984, and R2 (f2), A2 (f1) received from the reverse path measurement data acquisition unit 986. ) And B2 (f2), the M parameter of DUT2 is acquired.

When the M parameter acquired by the circuit parameter acquisition unit 988 is M11m, M12m, M21m, and M22m
M11m = A1 (f1) / R1 (f1)
M12m = A2 (f1) / R2 (f2)
M21m = B1 (f2) / R1 (f1)
M22m = B2 (f2) / R2 (f2)
It becomes.

  The true value circuit parameter acquisition unit 989 includes the M parameters M11m, M12m, M21m, and M22m of the DUT 2 acquired by the circuit parameter acquisition unit 988, and Ed1, Er1, Es1, and EL2 read by the measurement system error factor reading unit 980. , Ed2, Er2, Es2, EL1, and transmission tracking Et21, Et12 acquired by the error factor acquisition unit 90, the true M parameters M11, M12, M21, M22 of DUT2 are acquired.

  The true M parameters M11, M12, M21, and M22 of DUT2 can be obtained from Equation 3.

  Next, the operation of the embodiment of the present invention will be described. FIG. 13 is a flowchart showing the operation of the embodiment of the present invention.

  First, the measurement system error factors (Ed, Er, Es, EL, Et) of the network analyzer 1 are acquired (S10). Note that Ed is Ed1 and Ed2, Er is Er1 and Er2, Es is Es1 and Es2, EL is EL1 and EL2, and Et is Et21 and Et12.

  Next, the DUT 2 is connected to the network analyzer 1 and the M parameter of the DUT 2 is measured (S20).

  FIG. 14 is a flowchart showing a procedure for acquiring measurement system error factors (Ed, Er, Es, EL, Et) of the network analyzer 1.

  First, Ed, Er, and Es are measured using the calibration tool 6 (S102).

  Specifically, first, three types of calibration tools 6 (open (open), short (short-circuit), load (standard load Z0)) are connected to the port 4a. At this time, the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18 are provided to the first forward path error factor acquisition unit 64 via the switch 62. The first forward path error factor acquisition unit 64 calculates Ed1, Er1, and Es1.

  Then, three types of calibration tools 6 (open (open), short (short-circuit), load (standard load Z0)) are connected to the port 4b. At this time, the measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18 are provided to the first reverse path error factor acquisition unit 74 via the switch 72. The first reverse path error factor acquisition unit 74 calculates Ed2, Er2, and Es2.

  Next, the port 4a and the port 4b are directly connected to measure EL (S104).

  Specifically, an input signal (frequency f1) is output from the port 4a via the measurement unit 20. At this time, the measurement result of the receiver (Ach) 28 and the measurement result of the receiver (Rch) 18 are provided to the second forward path error factor acquisition unit 66 via the switch 62. The second forward path error factor acquisition unit 66 obtains EL2. The second forward path error factor acquisition unit 66 outputs Ed1, Er1, Es1, and EL2 to the measurement system error factor recording unit 80.

  Then, the input signal (frequency f2) is output from the port 4b via the measuring unit 30. The measurement result of the receiver (Bch) 38 and the measurement result of the receiver (Rch) 18 at this time are provided to the second reverse path error factor acquisition unit 76 via the switch 72. The second reverse path error factor acquisition unit 76 obtains EL1. The second reverse path error factor acquisition unit 76 outputs Ed2, Er2, Es2, and EL1 to the measurement system error factor recording unit 80.

  Next, the calibration mixer 8 is connected to the network analyzer 1 to measure R, A, and B (S106). R is R1 (f1) and R2 (f2), A is A1 (f1) and A2 (f1), and B is B1 (f2) and B2 (f2).

  Specifically, an input signal (frequency f1) is given via the measurement unit 20. The measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 at that time are given to the forward path measurement data acquisition unit 924 via the switch 922. The forward path measurement data acquisition unit 924 outputs R1 (f1), A1 (f1), and B1 (f2) to the circuit parameter acquisition unit 928.

  Then, an input signal (frequency f2) is given through the measuring unit 30. The measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 at that time are given to the reverse path measurement data acquisition unit 926 via the switch 922. The reverse path measurement data acquisition unit 926 outputs R2 (f2), A2 (f1), and B2 (f2) to the circuit parameter acquisition unit 928.

  The circuit parameter acquisition unit 928 obtains M parameters M11m ′, M12m ′, M21m ′, and M22m ′ of the calibration mixer 8.

  Finally, the transmission tracking acquisition unit 930 reads the M parameters M11m ′, M12m ′, M21m ′, and M22m ′ of the calibration mixer 8 acquired by the circuit parameter acquisition unit 928 and the measurement system error factor reading unit 910. In response to Ed1, Er1, Es1, EL2, EL2, Ed2, Er2, Es2, and EL1, transmission tracking Et21 and Et12 are obtained (S108).

  Specifically, transmission tracking Et21 and Et12 can be acquired by obtaining X by Expression 5 and substituting it into Expression 2.

  FIG. 15 is a flowchart showing a procedure for acquiring the M parameter of the DUT 2.

  First, the DUT 2 is connected to the network analyzer 1 and R, A, and B are measured (S202).

  Specifically, an input signal (frequency f1) is given via the measurement unit 20. The measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 at that time are given to the forward path measurement data acquisition unit 984 via the switch 982. The forward path measurement data acquisition unit 984 outputs R1 (f1), A1 (f1), and B1 (f2) to the circuit parameter acquisition unit 988.

  An input signal (frequency f2) is given through the measurement unit 30. The measurement result of the receiver (Rch) 18, the measurement result of the receiver (Ach) 28, and the measurement result of the receiver (Bch) 38 at that time are provided to the reverse path measurement data acquisition unit 986 via the switch 982. The reverse path measurement data acquisition unit 986 outputs R2 (f2), A2 (f1), and B2 (f2) to the circuit parameter acquisition unit 988.

  Next, the circuit parameter acquisition unit 988 determines the M parameters M11m, M12m, M21m, and M22m of the DUT 2 (S204).

  Finally, the true value circuit parameter acquisition unit 989 includes the M parameters M11m, M12m, M21m, and M22m of the DUT 2 acquired by the circuit parameter acquisition unit 988, and Ed1, Er1 read by the measurement system error factor reading unit 980, In response to Es1, EL2, Ed2, Er2, Es2, and EL1, and transmission tracking Et21 and Et12 acquired by the error factor acquisition unit 90, true M parameters M11, M12, M21, and M22 of DUT2 are acquired (S206). .

  According to the embodiment of the present invention, in order to obtain the transmission tracking Et21, Et12, (1) the calibration tool 6 is connected to the port 4a, and the calibration tool 6 is connected to the port 4b. (2) the port 4a and the port 4b (3) Connecting the calibration mixer 8 to the port 4a and the port 4b is performed so that the phase can be acquired, so that the phase of the transmission tracking error can be acquired and the error of the measurement system can be reduced. It can be corrected.

  In the embodiment of the present invention, the network analyzer 1 outputs an input signal and has two ports (ports 4a and 4b) for receiving a device under test signal from the DUT 2. However, there may be more than two such ports.

  For example, as shown in FIG. 16, there may be ports 4d and 4e in addition to the ports 4a and 4b. A modification (part 1) shown in FIG. 16 includes ports 4d and 4e, terminals 14d and 14e of the switch 14, bridges 123 and 133, internal mixers 126 and 136, a receiver (Dch) 128 (device under test signal measuring means), A receiver (Cch) 138 (measurement object signal measuring means) is newly added to the network analyzer 1. Other parts are as described above. In FIG. 16, DUT local signal oscillator 40, switches 52, 54, and 56, forward path error factor acquisition unit 60, reverse path error factor acquisition unit 70, measurement system error factor recording unit 80, and error factor acquisition unit. 90, the circuit parameter measuring unit 98 is not shown for convenience of illustration.

  Terminals 14 d and 14 e of the switch 14 are connected to the bridges 133 and 123.

  The bridges 123 and 133 output the signals given from the signal source 10 toward the ports 4e and 4d. Further, the signal reflected and returned from the object to be measured and the signal passing through the object to be measured are received via the ports 4 e and 4 d and supplied to the internal mixers 126 and 136.

  The internal mixers 126 and 136 mix the signals given from the bridges 123 and 133 with the internal local signals and output them.

  The receiver (Dch) 128 and the receiver (Cch) 138 measure S parameters of the signals output from the internal mixers 126 and 136.

  For example, as shown in FIG. 17, there may be ports 4d and 4e in addition to the ports 4a and 4b. 17 removes the bridge 13, the internal mixer 16, and the receiver (Rch) 18 from the modification (part 1) shown in FIG. 16, and instead of the bridges 13 b, 13 c, 13 d, 13e, internal mixers 16b, 16c, 16d, and 16e, and receivers (Rch) 18b, 18c, 18d, and 18e. In FIG. 17, DUT local signal oscillator 40, switches 52, 54, and 56, forward path error factor acquisition unit 60, reverse path error factor acquisition unit 70, measurement system error factor recording unit 80, and error factor acquisition unit. 90, the circuit parameter measuring unit 98 is not shown for convenience of illustration.

  Terminals 14b, 14c, 14d and 14e of the switch 14 are connected to the bridges 13b, 13c, 13d and 13e.

  The bridges 13b, 13c, 13d, and 13e output the signal given from the signal source 10 to the ports 4a, 4b, 4d, and 4e via the bridges 23, 33, 133, and 123. Further, the signal reflected from the device under test and the signal passing through the device under test are received via the ports 4a, 4b, 4d and 4e and supplied to the internal mixers 16b, 16c, 16d and 16e.

  The internal mixers 16b, 16c, 16d, and 16e mix the signals supplied from the bridges 13b, 13c, 13d, and 13e with the internal local signals and output them.

  The receivers (Rch) 18b, 18c, 18d, and 18e measure S parameters of signals output from the internal mixers 16b, 16c, 16d, and 16e.

  According to the modified example (No. 2) shown in FIG. 17, Es1 = EL1, Es2 = EL2,.

Moreover, said embodiment is realizable as follows. A computer media reader having a CPU, hard disk, and media (floppy (registered trademark) disk, CD-ROM, etc.) reader has the above components (eg, forward path error factor acquisition unit 60, reverse path error factor acquisition unit). 70, reading the medium on which the program for realizing the measurement system error factor recording unit 80 and the error factor acquisition unit 90) is recorded, and installing it on the hard disk. The above embodiment can also be realized by such a method.
[Proof of Formula 1]
The route from SG1 to Port1 is divided into blocks A, B, and C as shown in FIG. When the SW is switched to 1: FWD side (when outputting a signal) and 2: REV side (when no signal is output), the state changes only in the C block.

here,
The reflection coefficient and transmission coefficient of the A block are Ax and Ay, respectively.
Set the B block S parameter to Bij (i, j = 1,2,3)
The reflection coefficient and transmission coefficient of the C block when SW is 1: FWD are Cx and Cy.
The reflection coefficient of the C block when SW is 2: REV is Cz
Then, the FWD system is represented by a signal flow graph as shown in FIG. 19, and the REV system is represented by a signal flow graph as shown in FIG.

Here, the detection value of the receiver and the signal of Port1, that is,
R1 (f1), A1 (f1), A2 (f1), a1 (f1), b1 (f1), a1 "(f1), b1" (f1)
When variables are aggregated so as to focus only on the dependency relationship, the signal flow graph as shown in FIG. 19 can be transformed as shown in FIG. 21, and the signal flow graph as shown in FIG. 20 can be transformed as shown in FIG.

  P11, P21, P12, P22, Qx, and Qy are functions of Bij (i, j = 1,2,3), Ax, and Ay, respectively, but the expression that wrote down the function is not used in the subsequent calculations. , Not specified.

  The signal flow graph shown in FIG. 21 corresponds to the error factor of the measurement system shown in FIG. The signal flow graph shown in FIG. 22 corresponds to the error factors of the measurement system shown in FIG.

  Therefore, the correspondence in the mathematical formula is as follows.

したがって、以下のように計算される。

Therefore, it is calculated as follows.

[式１の証明終わり]

[End of proof of Formula 1]

It is the block diagram which showed the structure of the network analyzer 1 which concerns on embodiment of this invention.

It is a figure (Drawing 2 (a)) showing the composition of DUT2 (Drawing 2 (a)), and the figure (Drawing 2 (b)) showing the relation of the signal inputted and outputted to the 1st terminal 2a and the 2nd terminal 2b.

A diagram (terminal 14a and terminal 14b are connected) showing a state (referred to as a forward path) that gives an input signal (frequency f1) to the DUT 2 via the measuring unit 20 (FIG. 3A), an input signal (frequency f2) ) Is a diagram (terminal 14a and terminal 14c are connected) (FIG. 3B) showing a state (referred to as a reverse path) given to the DUT 2 via the measurement unit 30.

4 is a functional block diagram illustrating a configuration of a forward path error factor acquisition unit 60. FIG.

It is a figure which shows the state in which the terminal 6a and the port 4a of the calibration tool 6 are connected.

It is a signal flow graph expressing the state where the calibration tool 6 is connected to the port 4a.

It is a figure which shows the state which connected the port 4b to the port 4a.

It is a signal flow graph expressing the state which connected port 4b to port 4a.

3 is a functional block diagram showing a configuration of a reverse path error factor acquisition unit 70. FIG.

3 is a functional block diagram showing a configuration of an error factor acquisition unit 90. FIG.

It is a figure which shows the mixer 8 for a calibration in the state connected to the network analyzer 1. FIG.

3 is a functional block diagram showing a configuration of a circuit parameter measurement unit 98. FIG.

It is a flowchart which shows operation | movement of embodiment of this invention.

3 is a flowchart showing a procedure for acquiring measurement system error factors (Ed, Er, Es, EL, Et) of the network analyzer 1;

It is a flowchart which shows the procedure of acquisition of M parameter of DUT2.

It is the block diagram which showed the structure of the network analyzer 1 which concerns on a modification (the 1).

It is the block diagram which showed the structure of the network analyzer 1 which concerns on a modification (the 2).

2 is a block diagram showing a configuration of a network analyzer 1 referred to in order to prove Formula 1. FIG.

FIG. 19 is a signal flow graph representing an FWD system in the network analyzer 1 shown in FIG. 18.

19 is a signal flow graph representing a REV system in the network analyzer 1 shown in FIG.

It is a modification of the signal flow graph as shown in FIG.

It is a modification of the signal flow graph as shown in FIG.

It is a figure which shows the error factor of the measurement system to which the signal flow graph shown in FIG. 21 respond | corresponds.

It is a figure which shows the error factor of the measurement system to which the signal flow graph shown in FIG. 22 respond | corresponds.

It is a figure for demonstrating the measuring method of the circuit parameter of the to-be-measured object (DUT) concerning a prior art.

It is a signal flow graph regarding the signal source 110 in the case of frequency f1 = f2 concerning a prior art.

It is a signal flow graph regarding the signal source 110 when the frequency f1 concerning a prior art is not equal to the frequency f2.

It is a signal flow graph at the time of connecting directly the signal source 110 and receiving part 120 concerning a prior art.

Explanation of symbols

1 network analyzer 4a, 4b port 4c local signal port for DUT 10 signal source 18 receiver (Rch) (input signal measuring means)
28 Receiver (Ach) (Measuring object signal measuring means)
38 Receiver (Bch) (Measuring object signal measuring means)
20, 30 Measurement unit 40 DUT local signal oscillator 52, 54, 56 Switch 60 Forward path error factor acquisition unit 70 Reverse path error factor acquisition unit 80 Measurement system error factor recording unit 90 Error factor acquisition unit 910 Measurement system error factor readout 922 switching unit 924 forward path measurement data acquisition unit 926 reverse path measurement data acquisition unit 928 circuit parameter acquisition unit (calibration coefficient output means)
930 Transmission tracking acquisition unit 98 Circuit parameter measurement unit 2 DUT
2a 1st terminal 2b 2nd terminal 2R RF signal processing part 2I IF signal processing part 2L Local signal processing part

Claims (8)

A measurement system error factor recording means for recording a measurement system error factor that occurs regardless of frequency conversion by the object to be measured by using a calibration tool that realizes open, short, and load;
Calibration coefficient output means for outputting measurement results obtained by measuring the first coefficient and the second coefficient of the calibration frequency conversion element , and the signal output from the first terminal of the calibration frequency conversion element is the first terminal Is expressed as the sum of a signal multiplied by the first coefficient and a signal input to the second terminal of the calibration frequency conversion element multiplied by the second coefficient, the magnitude of the second coefficient Calibration coefficient output means having a constant ratio;
By receiving the measurement system error factor recorded by the measurement system error factor recording means and the first coefficient and the second coefficient of the calibration frequency conversion element acquired by the calibration coefficient output means Transmission tracking acquisition means for acquiring transmission tracking;
With
In the calibration frequency conversion element,
The first coefficient is M11 ′, M22 ′,
The second coefficient is M12 ′, M21 ′,
A1 is a signal input to the first terminal, b1 is a signal output from the first terminal,
The signal input to the second terminal is a2, the signal output from the second terminal is b2,
If
b1 = M11 ′ × a1 + M12 ′ × a2
b2 = M21 ′ × a1 + M22 ′ × a2
And
| M12 '| / | M21' | is constant,
Network analyzer. The network analyzer according to claim 1, wherein
For any terminal, the magnitude of the second coefficient is the same.
Network analyzer. The network analyzer according to claim 1 or 2, wherein
An input signal measuring means for measuring an input signal parameter relating to an input signal input to the device under test before the measurement system error factor occurs;
A plurality of ports connected to the terminals of the device under test and outputting the input signals;
An object signal measuring means for measuring an object signal parameter relating to the object signal input from the terminal of the object to be measured to the port;
Network analyzer equipped with. The network analyzer according to claim 3, wherein
The calibration coefficient output means includes the input signal parameter measured by the input signal measurement means, the measurement signal of the object to be measured, the measurement results of the first coefficient and the second coefficient of the calibration frequency conversion element. Determined by a ratio to the measured signal parameter measured by the means,
Network analyzer. The network analyzer according to claim 3, wherein
The transmission tracking acquisition means is based on a ratio of error factors generated from when the measurement object signal is output from the terminal of the measurement object without frequency conversion until it is received by the measurement object signal measurement means. Obtaining the transmission tracking;
Network analyzer. A measurement system error factor recording means for recording a measurement system error factor that occurs regardless of frequency conversion by the object under measurement by using a calibration tool that realizes open, short and load; and
The calibration coefficient output means is a calibration coefficient output step for outputting a measurement result obtained by measuring the first coefficient and the second coefficient of the calibration frequency conversion element , and is output from the first terminal of the calibration frequency conversion element . The signal is represented as the sum of the signal input to the first terminal multiplied by the first coefficient and the signal input to the second terminal of the calibration frequency conversion element multiplied by the second coefficient, A calibration coefficient output step in which the ratio of the magnitudes of the second coefficients is constant;
The transmission tracking acquisition means includes the measurement system error factor recorded by the measurement system error factor recording means, and the first coefficient and the second coefficient of the calibration frequency conversion element acquired by the calibration coefficient output means. And a transmission tracking acquisition step of acquiring transmission tracking by receiving
With
In the calibration frequency conversion element,
The first coefficient is M11 ′, M22 ′,
The second coefficient is M12 ′, M21 ′,
A1 is a signal input to the first terminal, b1 is a signal output from the first terminal,
The signal input to the second terminal is a2, the signal output from the second terminal is b2,
If
b1 = M11 ′ × a1 + M12 ′ × a2
b2 = M21 ′ × a1 + M22 ′ × a2
And
| M12 '| / | M21' | is constant,
Network analysis method. A measurement system error factor recording process for recording a measurement system error factor that occurs regardless of frequency conversion by the object to be measured by using a calibration tool that realizes open, short and load,
Calibration coefficient output processing for outputting measurement results obtained by measuring the first coefficient and the second coefficient of the calibration frequency conversion element , and the signal output from the first terminal of the calibration frequency conversion element is the first terminal Is expressed as the sum of a signal multiplied by the first coefficient and a signal input to the second terminal of the calibration frequency conversion element multiplied by the second coefficient, the magnitude of the second coefficient Calibration coefficient output processing with a constant ratio;
By receiving the measurement system error factor recorded by the measurement system error factor recording process and the first coefficient and the second coefficient of the calibration frequency conversion element acquired by the calibration coefficient output process Transmission tracking acquisition processing for acquiring transmission tracking;
Is a program for causing a computer to execute
In the calibration frequency conversion element,
The first coefficient is M11 ′, M22 ′,
The second coefficient is M12 ′, M21 ′,
A1 is a signal input to the first terminal, b1 is a signal output from the first terminal,
The signal input to the second terminal is a2, the signal output from the second terminal is b2,
If
b1 = M11 ′ × a1 + M12 ′ × a2
b2 = M21 ′ × a1 + M22 ′ × a2
And
| M12 '| / | M21' | is constant,
program. A measurement system error factor recording process for recording a measurement system error factor that occurs regardless of frequency conversion by the object to be measured by using a calibration tool that realizes open, short and load,
Calibration coefficient output processing for outputting measurement results obtained by measuring the first coefficient and the second coefficient of the calibration frequency conversion element , and the signal output from the first terminal of the calibration frequency conversion element is the first terminal Is expressed as the sum of a signal multiplied by the first coefficient and a signal input to the second terminal of the calibration frequency conversion element multiplied by the second coefficient, the magnitude of the second coefficient Calibration coefficient output processing with a constant ratio;
By receiving the measurement system error factor recorded by the measurement system error factor recording process and the first coefficient and the second coefficient of the calibration frequency conversion element acquired by the calibration coefficient output process Transmission tracking acquisition processing for acquiring transmission tracking;
Is a program for causing a computer to execute
In the calibration frequency conversion element,
The first coefficient is M11 ′, M22 ′,
The second coefficient is M12 ′, M21 ′,
A1 is a signal input to the first terminal, b1 is a signal output from the first terminal,
The signal input to the second terminal is a2, the signal output from the second terminal is b2,
If
b1 = M11 ′ × a1 + M12 ′ × a2
b2 = M21 ′ × a1 + M22 ′ × a2
And
| M12 '| / | M21' | is constant,
A computer-readable recording medium on which a program is recorded.

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