JP5239954B2 - lamp - Google Patents

Description

  The present invention relates to a lamp that emits ultraviolet light emitted by forming excited iodine molecules using a discharge gas containing a rare gas selected from one or more of krypton gas and argon gas and iodine gas.

  In the manufacturing process of a liquid crystal display, when a liquid crystal pixel is constructed, a monomer is mixed into the liquid crystal, and the liquid crystal molecules are polymerized while the liquid crystal molecules are tilted to fix the tilt direction of the liquid crystal molecules (PSA: Polymer). Sustained Alignment) is used. According to Patent Document 1 that discloses PSA, as a light source for polymerizing a monomer, for example, the wavelength of the monomer is reduced in consideration of less damage to the liquid crystal, the sensitivity of the monomer, the transmittance of the glass for liquid crystal, and the like. It is considered preferable to irradiate ultraviolet light of 300 to 380 nm (paragraph 0237 of Patent Document 1).

  Various light sources are known as ultraviolet light sources that emit ultraviolet light having a wavelength of 300 to 380 nm, which are required for polymerizing monomers, but at present, studies are being made on light sources that are optimal for PSA applications. It is a stage. For example, mercury lamps that mainly emit ultraviolet light having a wavelength of 365 nm using mercury as a discharge medium, metal halide lamps that use metal halide as a discharge medium, and the like are candidates for light sources for PSA. However, the mercury lamp has a problem that the ultraviolet irradiation device is enlarged when it is configured to include a plurality of mercury lamps, and the load on the environment is increased because mercury is used as a discharge medium. There is a disadvantage that is large. The metal halide lamp has a problem in terms of energy efficiency that the output of ultraviolet rays radiated is lower than the input power, and the influence on the environment cannot be ignored because the metal halide is used as a discharge medium.

  On the other hand, a discharge vessel comprising a pair of wall portions made of a dielectric material arranged opposite to each other and a sealing wall portion connected to the end portions of the pair of wall portions is provided. A lamp that radiates ultraviolet rays to the outside of the discharge vessel by filling the formed discharge space with a rare gas, a halogen gas, or a mixed gas thereof and applying an AC voltage or a pulse voltage through the wall portion. Are known. This type of lamp can reduce the size of the ultraviolet irradiation device when a plurality of lamps are mounted to form the ultraviolet irradiation device, and the output of ultraviolet rays radiated in comparison with the input power. Because of its high energy efficiency, it is also promising as a light source for PSA because it has a great practical advantage in that it uses a rare gas such as xenon gas or krypton gas as a discharge medium, thus reducing the burden on the environment. Is being viewed.

  Such a lamp has been conventionally used as a light source for modifying the surface of an object to be processed by irradiating the surface of the object to be processed such as a liquid crystal substrate with vacuum ultraviolet rays. The output of ultraviolet light in the wavelength range of 300 to 380 nm required for polymerizing the monomer was insufficient.

JP 2003-149647 A

  From the above, the present invention aims to provide a lamp that efficiently radiates ultraviolet light in the wavelength range of 300 to 380 nm required for polymerizing monomers in order to provide an optimal light source for PSA applications. To do.

  The present invention includes (1) a discharge vessel in which a discharge gas containing at least one kind of rare gas selected from krypton gas and argon gas and iodine gas is sealed, and a discharge space formed inside the discharge vessel. A lamp that radiates ultraviolet light having a wavelength of 342 nm by forming excited iodine molecules, the discharge space including a pair of electrodes arranged so as to be opposed to each other. A lamp characterized in that both a diffused discharge in a state in which a mist is generated and a filament discharge having a strip-like shape that is spatially contracted compared to the diffused discharge are generated in a mixed manner.

The present invention includes (2) a discharge vessel filled with a discharge gas containing krypton gas and iodine gas, and a pair of electrodes arranged so as to face each other across a discharge space formed inside the discharge vessel. A lamp that emits ultraviolet light having a wavelength of 342 nm by forming excited iodine molecules, the concentration of iodine gas contained in the discharge gas being 0.04 to 0.9%, and the discharge space When the electric field strength applied to E is k (kV / cm), the partial pressure of the noble gas is p1 (kPa), and the partial pressure of the iodine gas is p2 (kPa), the following equation holds: Features a lamp.
E / p1 ≧ (6.6 × p2 + 124) × exp (−0.0093 × p1)

The present invention includes (3) a discharge vessel filled with a discharge gas containing argon gas and iodine gas, and a pair of electrodes arranged so as to face each other with a discharge space formed inside the discharge vessel. A lamp that emits ultraviolet light having a wavelength of 342 nm by forming excited iodine molecules, the concentration of iodine gas contained in the discharge gas being 0.04 to 0.9%, and the discharge space When the electric field strength applied to E is k (kV / cm), the partial pressure of the noble gas is p1 (kPa), and the partial pressure of the iodine gas is p2 (kPa), the following equation holds: Features.
E / p1 ≧ (236 × p2 + 1598) × ^p1−0.83

According to the present invention, (4) a discharge container filled with a discharge gas containing a mixed gas containing krypton gas and argon gas and iodine gas is opposed to the discharge space formed inside the discharge container. A lamp that emits ultraviolet light having a wavelength of 342 nm by forming excited iodine molecules, wherein the concentration of iodine gas contained in the discharge gas is 0.04 to 0.9%. When the electric field strength applied to the discharge space is E (kV / cm), the partial pressure of the rare gas is p1 (kPa), and the partial pressure of the iodine gas is p2 (kPa), The relationship is established.
E / p1 ≧ (1337 × p2 ^0.0177 ) × ^p1−0.74

  The present invention is characterized in that, in (1) to (4), the total pressure of the discharge gas is 100 kPa or more.

  In the present invention, in (1) to (4), the lighting frequency supplied to the lamp is 1 to 120 kHz.

According to the first to third aspects of the invention, the concentration of iodine gas contained in the discharge gas sealed in the discharge vessel and the electric field intensity applied to the discharge space are optimized so that a predetermined relationship is established. As a result, excited iodine molecules I ₂ ^* that emit iodine molecular luminescence with a wavelength of 342 nm are efficiently formed in the internal space of the discharge vessel, so that ultraviolet light in the wavelength region required for polymerizing monomers in PSA applications. Output can be improved.

According to the invention of claim 4 , since the total pressure of the discharge gas sealed in the discharge vessel is 100 kPa or more, the excited iodine molecule I ₂ ^* is easily formed in the discharge space, so that the peak wavelength is Emission of iodine molecules at 342 nm is efficiently radiated, so that the output of ultraviolet light in the wavelength region required for polymerizing monomers in PSA applications can be increased.

According to the invention of claim 5 , since the lighting frequency supplied to the lamp is 1 to 120 kHz, the excited iodine molecule I ₂ ^* is not decomposed and the number of times of light emission per unit time is extremely short. Therefore, iodine molecular light emission with a wavelength of 342 nm is efficiently emitted, and the output of ultraviolet light in the wavelength region required for polymerizing monomers in PSA applications can be made higher. it can.

It is a perspective view which shows the outline of a structure of the lamp | ramp of this invention. It is the sectional view on the AA line shown in FIG. FIG. 3 is a conceptual diagram showing an outline of a configuration of an experimental apparatus used for performing Experiment 1; It is a figure which shows the relationship between the density | concentration of iodine gas, and an iodine molecular luminescence intensity. It is a figure which shows the relationship between conversion electric field E / p1 and iodine molecular luminescence intensity. It is a figure explaining the approximation method for approximating the numerical value of critical conversion electric field strength E / p1 shown in Table 1 as a function of the partial pressure p1 of a noble gas. A state of a discharge space generated by mixing both diffusion discharge and filament discharge is schematically shown. A state of a discharge space where filament discharge is generated independently is schematically shown.

FIG. 1 is a perspective view showing an outline of the configuration of the lamp of the present invention. FIG. 2 is a cross-sectional view taken along line AA shown in FIG. The lamp 10 includes a discharge vessel 1 that is configured with a dielectric material such as quartz glass so that the cross section thereof is rectangular as shown in FIG. Inside the discharge vessel 1, a discharge gas mainly containing one or more kinds of krypton or argon and iodine gas is enclosed. In the discharge vessel 1, the sealing member 2 is disposed in the vicinity of both ends in the longitudinal direction of the discharge vessel, and the discharge vessel 1 and the sealing member 2 are welded so that the discharge gas does not leak to the outside. Hermetically sealed. Further, a pair of mesh-like electrodes 5 and 6 are formed on the outer surfaces of the upper and lower wall surfaces 3 and 4 of the discharge vessel 1 to form the discharge space S and the discharge vessel 1 formed inside the discharge vessel 1. It is provided so as to face each other with a dielectric material in between. The electrodes 5 and 6 are formed by, for example, vapor deposition so that a predetermined mesh pattern is formed. Further, an ultraviolet reflecting film 7 containing, for example, SiO ₂ as a main component is formed in the discharge vessel 1 on the wall surface 4 on the opposite side to the wall surface 3 on the light emitting direction side, and ultraviolet rays generated in the discharge space S are formed. Is reflected in the light emitting direction by the ultraviolet reflecting film 7 and is emitted from the wall surface 3 located on the light emitting direction side.

  In the lamp having such a configuration, by supplying an AC voltage or a pulse voltage of, for example, 1 to 120 kHz between the pair of electrodes 5 and 6, a discharge is generated over the entire discharge space on the inner wall surface facing the discharge space S. Both the diffused discharge in a state of being in a state and a filament discharge having a strip-like shape that is spatially contracted compared to the diffused discharge are generated in a mixed manner.

By such discharge, the positive ion I ⁺ and the negative ion I ⁻ of iodine I enclosed in the discharge vessel are expressed by the following formula with one or more kinds of atoms or molecules selected from argon and krypton other than iodine. In this way, excited iodine molecule I ₂ ^* is formed. M shown in the following chemical formula is an atom or molecule of iodine, krypton and argon.

[Chemical formula 1]
I ⁺ + I ⁻ + M → I ₂ ^* + M

Excited iodine molecules I ₂ ^* are formed in the discharge space when iodine ions I ⁺ and I ⁻ contained in the discharge gas repeatedly collide with iodine, krypton and argon atoms or molecules contained in the discharge gas, and have a peak wavelength. It emits iodine molecular emission at 342 nm.

  Iodine ions, which are groups that form excited iodine molecules, are generated mainly by a reaction called Penning effect in which iodine is ionized by the energy of metastable excited atoms. This Penning effect occurs when the energy of the metastable excited atoms of krypton and argon is slightly higher than the ionization energy of the iodine atom. For reference, the energy of metastable excited atoms is 10.5 eV for krypton, 11.5 and 11.7 eV for argon, and the ionization energy of iodine atoms is 10.4 eV. Therefore, if a discharge gas containing one or more kinds of rare gas selected from krypton and argon and iodine gas is sealed in the discharge vessel, more iodine ions are generated in the discharge space and a large number of excited iodine molecules are formed. Therefore, it is expected that the output of iodine molecular emission with a wavelength of 342 nm will be improved.

  The discharge gas may contain other rare gases other than krypton and argon, but if the partial pressure of the other rare gas such as krypton or argon becomes higher than the partial pressure of the above-mentioned penning. Careful attention should be paid so that the ratio of the partial pressures of the other rare gases does not become too high because the effect is weakened. For example, the partial pressure of other rare gases other than krypton and argon is preferably 10% or less of the partial pressure of krypton and argon.

Here, the present inventors examined the output of iodine molecular emission having a wavelength of 342 nm emitted from excited iodine molecules. (1) The concentration of iodine gas contained in the discharge gas and (2) applied to the discharge space. It was found to be particularly related to the strength of the electric field. The iodine concentration in (1) is calculated by dividing the partial pressure p2 of iodine gas by the total pressure of the discharge gas. The total pressure of the discharge gas is approximated to a partial pressure p1 of a rare gas selected from one or more of krypton and argon. The intensity of the electric field (2) depends on the partial pressure p1 of a rare gas selected from one or more of krypton and argon and the partial pressure p2 of iodine I. Hereinafter, an experiment conducted to determine the conditions of the concentration of iodine gas contained in the discharge gas and the electric field strength applied to the discharge space, which are necessary for increasing the emission intensity of the excited iodine molecule I ₂ ^{* having} a wavelength of 342 nm explain. In the experiment, lamps according to the following Examples 1 to 3 were used.

  The lamp of Example 1 is composed of quartz glass having a thickness of 2 mm so as to have a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of 10 mm, and includes an electrode formed of gold having a total length of 130 mm and a width of 32 mm. A discharge gas containing krypton gas and iodine gas was sealed in the discharge vessel.

  The lamp of Example 2 is composed of quartz glass having a thickness of 2 mm so as to have a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of 10 mm, and includes an electrode formed of gold having a total length of 130 mm and a width of 32 mm. A discharge gas containing argon gas and iodine gas was sealed in the discharge vessel.

  The lamp of Example 3 is made of quartz glass having a thickness of 2 mm so as to have a total length of 200 mm, a width of 42 mm, a height of 14 mm, and a discharge gap of 10 mm, and includes an electrode formed of gold having a total length of 130 mm and a width of 32 mm. The discharge vessel was filled with a rare gas mixed gas in which krypton gas and argon gas were mixed at a mixing ratio of 1: 1, and a discharge gas containing iodine gas.

(Experiment 1)
Experiment 1 was conducted to investigate the optimum range of the concentration of iodine gas contained in the discharge gas. Experiment 1 unifies the total pressure of the discharge gas at 120 kPa for each of the lamps according to Examples 1 to 3, and each of seven types of lamps different from each other within a concentration of iodine gas of 0.01 to 2%. Each of Examples 1 to 3 was prepared individually. In other words, Experiment 1 used 21 types of lamps, 7 types for each of Examples 1 to 3.

  FIG. 3 is a conceptual diagram showing an outline of the configuration of an experimental apparatus used for conducting Experiment 1. Reference numeral 22 denotes an aluminum lamp house, 23 denotes a ceramic support, and 24 denotes a light receiving portion. The light receiving unit 24 is connected to a spectrometer main body (not shown) by a fiber. The lamp 1 is fixed on a support base 23 disposed inside the lamp house 22, and the light receiving unit 24 is disposed at a position 5 mm away from the surface of the lamp 1 so as to face the lamp 1. Replace the internal atmosphere with nitrogen gas. For each of the lamps of Examples 1 to 3, a discharge is generated in the discharge space by applying an alternating voltage (rectangular wave) to the pair of electrodes 5 and 6, and the wavelength 342 nm emitted from the gap between the mesh-like electrodes 5 The emission intensity of iodine molecular luminescence is measured.

The result of Experiment 1 is shown in FIG. In FIG. 4, the vertical axis represents standard data of iodine molecular emission intensity, and the horizontal axis represents the concentration (%) of iodine gas contained in the discharge gas. As shown in the figure, in all of Examples 1, 2, and 3, the iodine concentration in the range of 0.04 to 0.9% is excited iodine as compared with the iodine concentration outside the range. The emission intensity of the molecule I ₂ ^* was significantly increased.

(Experiment 2)
Experiment 2 shows that the lower limit value of the converted electric field intensity required for increasing the emission intensity of the iodine molecule I ₂ ^* having a peak wavelength of 342 nm when the total pressure of the discharge gas and the partial pressure of the iodine gas are constant. (Hereinafter also referred to as critical conversion electric field strength). The converted electric field strength is a numerical value obtained by dividing the electric field strength E by the partial pressure p1 of the rare gas.

  In the lamps according to Examples 1 to 3, the total pressure of the discharge gas (total of the partial pressure p1 of the rare gas and the partial pressure p2 of the iodine gas) was 120 kPa, and the partial pressure p2 of the iodine gas was 0.14 kPa.

  About the lamp | ramp which concerns on Examples 1-3, it drive-lighted so that it might become seven different conversion electric field strengths, respectively, and the emission intensity | strength of the iodine molecular light emission of wavelength 342nm was measured like the experiment 1. FIG. That is, in Experiment 2, a total of 21 types of iodine molecular emission intensity data were measured for each of the lamps according to Examples 1 to 3, each including 7 types.

The electric field strength E applied to the discharge space is calculated as in Expressions 1-3. V is the applied voltage, C _gap is the capacitance of the discharge space per unit length, C _glass is the capacitance of the dielectric per unit length, d _gap is the discharge gap, d _glass is the thickness of the dielectric, ε _gap is the dielectric constant of the discharge space, ε _glass is the dielectric constant of the dielectric, and W is the electrode width. Note that ε _gap ≈ε ₀ and ε _glass ≈3.7 × ε ₀ . ε ₀ is the dielectric constant of vacuum: 8.85 × 10 ⁻¹² (F / m).

[Formula 1]
E = V / d _gap × 1 / C _gap / (2 / C _glass + 1 / C _gap )

[Formula 2]
C _gap = ε _gap × W / d _gap

[Formula 3]
C _glass = ε _glass × W / d _glass

  The result of Experiment 2 is shown in FIG. In FIG. 5, the vertical axis represents the standard data for the intensity of iodine molecular emission, and the horizontal axis represents the converted electric field strength. The converted electric field strength is basically expressed as E / (p1 + p2) obtained by dividing the electric field strength E by the discharge gas pressure (total of partial pressure p1 of rare gas and partial pressure p2 of iodine gas). Since the partial pressure p2 of the gas is much smaller than the partial pressure p1 of the rare gas, the electric field strength E was approximated to E / p1 obtained by dividing the partial pressure p1 of the rare gas.

  From the experimental results shown in FIG. In the lamp of Example 1, when the converted electric field intensity E / p1 at the time of lighting driving is set to 40.8 or more, the iodine molecular emission intensity is remarkably higher than when the converted electric field intensity E / p1 is less than 40.8. It was confirmed that it would be higher. In the lamp of Example 2, when the converted electric field strength E / p1 at the time of lighting driving is set to 30.7 or more, the iodine molecular emission intensity is markedly higher than when the converted electric field strength E / p1 is less than 30.7. It was confirmed that it would be high. The lamp of Example 3 has a remarkable iodine molecular emission intensity compared with the case where the converted electric field intensity E / p1 at the time of lighting driving is set to 37.5 or more to make the converted electric field intensity E / p1 less than 37.5. It was confirmed that it would be higher.

  According to Experiment 2, when the partial pressure p1 of the rare gas is 120 kPa and the partial pressure of the iodine gas is 0.14 kPa, the lamp of Example 1 is 40.8 and the lamp of Example 2 is the critical converted electric field strength. Was found to be 30.7 and the lamp of Example 3 was 37.5.

(Experiment 3)
Experiment 3 is required to increase the emission intensity of the excited iodine molecule I ₂ ^{* having} a peak wavelength of 342 nm as in Experiment 2 by changing the total pressure of the rare gas and the partial pressure of iodine gas contained in the discharge gas, respectively. The lower limit of the converted electric field strength E / p1 (that is, the critical converted electric field strength) was examined.

  In Experiment 3, a total of 60 lamps, each having 20 different lamps with different partial pressures p1 of rare gas and partial pressures p2 of iodine gas, were used for each of Examples 1 to 3. The partial pressure p1 of the rare gas is in the range of 40 to 133 kPa, and the partial pressure p2 of the iodine gas is in the range of 0.05 to 1.09 kPa.

  In Experiment 3, for each of the 60 types of lamps according to each of Examples 1 to 3, the value of the converted electric field strength E / p1 was changed and turned on as in Experiment 2, and the intensity of iodine molecule emission at a wavelength of 342 nm was increased. By measuring in the same manner as in Experiment 1, the critical conversion electric field strength E / p1 was examined. The results of Experiment 3 are shown in Table 1.

  Table 1 summarizes the numerical values of critical conversion electric field strengths E / p1 measured for each of a total of 60 types of lamps according to Examples 1 to 3. Table 2 summarizes approximate expressions that approximate the critical conversion electric field strengths E / p1 of the lamps according to Examples 1 to 3 shown in Table 1 as functions of the rare gas partial pressure p1 for each partial pressure p2 of iodine gas. It is a thing.

  For reference, a supplementary explanation will be given on how to obtain each approximate expression shown in Table 2. FIG. 6 is a diagram for explaining an approximation method for approximating the numerical value of the critical conversion electric field strength E / p1 shown in Table 1 as a function of the partial pressure p1 of the rare gas. In the figure, the vertical axis represents the critical conversion electric field strength E / p1, and the horizontal axis represents the partial pressure p1 of the rare gas. In the figure, for convenience, among the critical conversion electric field strengths shown in Table 1, only the column in which the partial pressure p2 of iodine is 0.14 kPa is plotted individually for each lamp according to each of Examples 1 to 3.

  The five rhombus plots shown in FIG. 6 indicate that the partial pressure p2 of iodine is 0.14 kPa and the partial pressure p1 of the rare gas is 40 kPa, 67 kPa, 93 kPa, 120 kPa, and 133 kPa, respectively, in the column of Example 1 in Table 1. The numerical data of five critical conversion electric field strengths. The curve connecting the rhombus plots shown in FIG. 6 is approximated as a function of the partial pressure p1 of the rare gas as shown in the second row from the top of the column of Example 1 in Table 2.

  The five square plots shown in FIG. 6 indicate that the partial pressure p2 of iodine is 0.14 kPa and the partial pressure p1 of the rare gas is 40 kPa, 67 kPa, 93 kPa, 120 kPa, and 133 kPa, respectively, in the column of Example 2 in Table 1. The numerical data of five critical conversion electric field strengths. A curve connecting the square plots shown in FIG. 6 is approximated as a function of the partial pressure p1 of the rare gas as shown in the second row from the top of the column of Example 2 in Table 2.

  The five triangular plots shown in FIG. 6 indicate that the partial pressure p2 of iodine is 0.14 kPa and the partial pressure p1 of the rare gas is 40 kPa, 67 kPa, 93 kPa, 120 kPa, and 133 kPa, respectively, in the column of Example 3 in Table 1. The numerical data of five critical conversion electric field strengths. A curve connecting the triangular plots shown in FIG. 6 is approximated as a function of the partial pressure p1 of the rare gas as shown in the second row from the top of the column of Example 3 in Table 2.

  As shown in FIG. 6, the curve graph showing the relationship between the critical conversion electric field strength E / p1 and the rare gas partial pressure p1 of the lamps according to the first to third embodiments is shown in FIG. 2, Example 3 and Example 1 are arranged in this order. The curve graph of Example 3 is located approximately in the middle of the curve graph of Example 1 and the curve graph of Example 2.

  Other approximate expressions shown in Table 2 are as described above for each lamp according to each of Examples 1 to 3 for iodine partial pressures of 0.05 kPa, 0.14 kPa, 0.57 kPa, and 1.09 kPa. It is a function of the partial pressure p1 of the rare gas obtained by performing approximation.

  Furthermore, the approximate expression of the critical conversion electric field strength E / p1 of the lamps according to the first to third embodiments shown in Table 2 is approximated as follows as a function of the partial pressure p1 of the rare gas and the partial pressure p2 of the iodine gas. can do.

<Example 1>
[Formula 4]
E / p1 = (6.6 × p2 + 124) × exp (−0.0093 × p1)

<Example 2>
[Formula 5]
E / p1 = (236 × p2 + 1598) × ^p1−0.83

<Example 3>
[Formula 6]
E / p1 = (1337 × p2 ^0.0177 ) × ^p1−0.74

As described above, the critical conversion electric field strength E / p1 shown in Equations 4 to 6 is the lower limit value required to increase the emission intensity of the excited iodine molecule I ₂ ^* . Therefore, the lamps according to the first to third embodiments have the critical conversion electric field strength E / p1, the partial pressure p1 of the rare gas included in the discharge gas, and the partial pressure p2 of the iodine gas so that the following relational expression is satisfied. By appropriately setting each, the emission intensity at a wavelength of 342 nm emitted from the excited iodine molecule I ₂ ^* can be remarkably increased.

<Example 1>
[Formula 7]
E / p1 ≧ (6.6 × p2 + 124) × exp (−0.0093 × p1)

<Example 2>
[Formula 8]
E / p1 ≧ (236 × p2 + 1598) × ^p1−0.83

<Example 3>
[Formula 9]
E / p1 ≧ (1337 × p2 ^0.0177 ) × ^p1−0.74

Thus, in the lamps according to the first to third embodiments of the present invention, (1) the concentration of iodine gas contained in the discharge gas is in the optimum range, and (2) the converted electric field strength E / p1 is Since the lighting operation is performed under the condition that the electric field intensity is equal to or higher than the critical conversion electric field intensity, the radiant intensity of ultraviolet light having a peak wavelength of 342 nm emitted from the iodine luminescent molecule I ₂ ^* can be significantly increased as compared with the conventional lamp. The reason for this is not clear, but can be considered as follows, for example.

In the lamps according to Examples 1 to 3 in which the concentration of iodine gas is in the range of 0.04 to 0.9% and the converted electric field strength E / p1 satisfies the relationships shown in Formulas 7 to 9, the discharge space Experiment 3 confirms that both a diffused discharge in a state in which a discharge occurs throughout and a filament discharge having a strip-like shape that is spatially contracted compared to the diffused discharge are mixed in the discharge space. It was done. FIG. 7 schematically shows the state of the discharge space generated by mixing both diffusion discharge and filament discharge. In the figure, K is diffusion discharge and F is filament discharge. When the filament discharge occurs, the current density is higher than that of the diffusion discharge because of the spatially contracted shape. Therefore, it is considered that a large number of iodine ions I ⁺ and I ⁻ exist in the discharge space. Therefore, excited iodine molecules I ₂ ^* are likely to be formed in the discharge space, and it is considered that the emission intensity of iodine molecule emission having a peak wavelength of 342 nm emitted from the excited iodine molecules I ₂ ^* increases.

On the other hand, in the lamps according to Examples 1 to 3 in which the concentration of iodine gas is outside the range of 0.04 to 0.9% and the converted electric field strength E / p1 does not satisfy the relationship of Equations 7 to 9. Experiment 3 confirmed that only filament discharge occurred in the discharge space. FIG. 8 schematically shows the state of the discharge space where the filament discharge is generated independently. F in the figure is filament discharge. In such a lamp, since the discharge is formed only locally in the discharge space, it is considered that the emission intensity of iodine molecular emission having a peak wavelength of 342 nm emitted from the excited iodine molecule I ₂ ^* decreases.

As described above, iodine molecular emission having a peak wavelength of 342 nm is emitted from excited iodine molecules I ₂ ^* formed by collision of iodine ions I ⁺ and I ⁻ with a rare gas such as krypton or argon. That is, the excited iodine molecule I ₂ ^* is easily formed by increasing the number of rare gas atoms or molecules contained in the discharge gas. Therefore, by increasing the total pressure of the discharge gas (the sum of the partial pressure p1 of the rare gas and the partial pressure p2 of the iodine gas), the atoms or molecules of the rare gas colliding with the iodine ions I ⁺ and I ⁻ are increased and excited. Since iodine molecules I ₂ ^* are easily formed, the intensity of iodine molecule emission with a peak wavelength of 342 nm can be increased. In the lamps according to the first to third embodiments of the present invention, the total pressure (p1 + p2) of the discharge gas is preferably set to 100 kPa or more.

In the lamps according to the first to third embodiments of the present invention, when the temperature of the discharge gas is too high, the excited iodine molecule I ₂ ^* that emits iodine molecular emission having a peak wavelength of 342 nm is decomposed and the original iodine ion I ^Since it has the characteristic of returning to ⁺ or I ⁻ , it is preferable to maintain the temperature of the discharge gas optimally. The lamps according to the first to third embodiments are preferably driven to be lit by supplying an AC voltage or a pulse voltage of 1 to 120 kHz in order to optimally maintain the temperature of the discharge gas. When the frequency of the alternating voltage or pulse voltage supplied to the lamp exceeds 120 kHz, the temperature of the discharge gas becomes too high and the excited iodine molecule I ₂ ^* is easily decomposed, so that the intensity of iodine molecule emission with a peak wavelength of 342 nm is increased. There is an adverse effect such as lowering. Further, when the frequency of the AC voltage or the pulse voltage is less than 1 kHz, the number of times of light emission per unit time is reduced, so that the intensity of iodine molecular light emission having a peak wavelength of 342 nm is lowered.

10 Lamp 1 Discharge vessel 2 Sealing member 3, 4 Wall surface 5, 6 Electrode 7 Ultraviolet reflective film

Claims (5)

A discharge vessel filled with a discharge gas containing krypton gas and iodine gas, and a pair of electrodes arranged to face each other with a discharge space formed inside the discharge vessel, and excited iodine molecules A lamp that emits ultraviolet light having a wavelength of 342 nm by forming,
The concentration of iodine gas contained in the discharge gas is 0.04 to 0.9%, the electric field strength applied to the discharge space is E (kV / cm), and the partial pressure of the rare gas is p1 (kPa). ), Wherein the relationship of the following equation is established when the partial pressure of the iodine gas is p2 (kPa).
E / p1 ≧ (6.6 × p2 + 124) × exp (−0.0093 × p1) A discharge vessel filled with a discharge gas containing argon gas and iodine gas, and a pair of electrodes arranged so as to face each other with a discharge space formed inside the discharge vessel, and excited iodine molecules A lamp that emits ultraviolet light having a wavelength of 342 nm by forming,
The concentration of iodine gas contained in the discharge gas is 0.04 to 0.9%, the electric field strength applied to the discharge space is E (kV / cm), and the partial pressure of the rare gas is p1 (kPa). ), Wherein the relationship of the following equation is established when the partial pressure of the iodine gas is p2 (kPa).
E / p1 ≧ (236 × p2 + 1598) × ^p1−0.83 A discharge vessel in which a discharge gas containing mixed gas and iodine gas mixed with krypton gas and argon gas is sealed, and a pair of electrodes arranged to face each other across a discharge space formed inside the discharge vessel; A lamp that emits ultraviolet light having a wavelength of 342 nm by forming excited iodine molecules,
The concentration of iodine gas contained in the discharge gas is 0.04 to 0.9%, the electric field strength applied to the discharge space is E (kV / cm), and the partial pressure of the rare gas is p1 (kPa). ), Wherein the relationship of the following equation is established when the partial pressure of the iodine gas is p2 (kPa).
E / p1 ≧ (1337 × p2 ^0.0177 ) × ^p1−0.74 It claims 1 to 3, wherein the lamp total pressure of the discharge gas, characterized in that at least 100 kPa. It claims 1 to 3, wherein the lamp operating frequency supplied to the lamp is characterized in that it is a 1～120KHz.

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