JP5233845B2 - Drive device - Google Patents

Description

  The present invention relates to a drive device.

  Conventionally, for example, in an optical device such as a laser module that emits laser light, a plurality of optical elements for coupling outgoing light emitted from a light source to an incident end face of a waveguide such as SHG or an optical fiber are arranged with their optical axes aligned. It is installed. These optical elements are provided with a driving means for accurately coupling the emitted light to the incident end face, and can cope with a change in optical performance due to a temperature change.

  In recent years, as a driving means for such an optical element, a driving device (hereinafter referred to as a SIDM device) provided with a smooth impact drive mechanism (hereinafter referred to as “SIDM”, where “SIDM” is a registered trademark of Konica Minolta Opto Corporation). Has been proposed.

  This SIDM device is a piezoelectric actuator that reciprocates a moving body in the order of nanometers by applying a voltage, a piezoelectric element that expands and contracts by applying a voltage, a drive shaft that displaces by expansion and contraction of the piezoelectric element, and a piezoelectric element or A support member that supports the drive shaft, a moving body that is frictionally engaged with the drive shaft and moves in the axial direction of the drive shaft, and the like. The moving body is moved in the axial direction of the drive shaft using the frictional force (see, for example, Patent Document 1).

JP 2007-325466 A

  However, in the conventional SIDM apparatus, the optical element on the moving body can only be moved linearly in the axial direction of the drive shaft. Therefore, the position of the optical element cannot be adjusted sufficiently, and the output stability of the laser beam may be impaired. In order to move the optical element in a plurality of directions, it may be possible to provide a plurality of SIDM devices in the laser module for each optical element, but the optical device becomes larger and the manufacturing cost increases, Not realistic.

  The subject of this invention is providing the drive device which can move a mobile body in multiple directions.

According to the first aspect of the present invention, in the drive device,
A piezoelectric element that expands and contracts by application of voltage;
A columnar drive shaft displaced by expansion and contraction of the piezoelectric element;
A movement restricting portion that supports the piezoelectric element so as to be stretchable while restricting movement of the piezoelectric element;
A movable body that is frictionally engaged with the drive shaft and is movable in an axial direction of the drive shaft and a direction different from the axial direction;
The piezoelectric element is
It has two or more piezoelectric bodies whose operation directions are different from each other when positive and negative voltages are applied.

In the drive device of the present invention,
The two or more piezoelectric bodies are:
It is preferable that the piezoelectric layers are stacked, and the stacking directions are the same.

In the driving device of the present invention,
The piezoelectric element is
A first piezoelectric body that expands and contracts in the axial direction;
A second piezoelectric body that expands and contracts in the cross direction of the axial direction,
The moving body is
It is preferably movable in the axial direction and the intersecting direction.

In the driving device of the present invention,
It is preferable that the driving frequency of the voltage applied to the piezoelectric body differs between when the moving body is moved in the axial direction of the drive shaft and when the moving body is moved in a direction different from the axial direction.

In the driving device of the present invention,
The piezoelectric element is
The operation direction by applying the same positive and negative voltage is opposite to each other along the axial direction, and has four or more piezoelectric bodies alternately arranged in the circumferential direction of the drive shaft,
The drive shaft is cylindrical,
The moving body is
It may be movable in the axial direction and the circumferential direction.

  According to the present invention, the movable body is frictionally engaged with the drive shaft and can move in the axial direction of the drive shaft and in a direction different from the axial direction, and the piezoelectric element applies the same positive and negative voltages. In this case, since the two or more piezoelectric bodies having different operation directions are provided, the movable body can be moved in the axial direction of the drive shaft and in a direction different from the axial direction. Therefore, the moving body can be moved in a plurality of directions.

It is a conceptual diagram which shows schematic structure of a light source unit. It is a figure which shows a SIDM apparatus. It is a figure which shows the mobile body and drive shaft of a SIDM apparatus. It is a figure for demonstrating a piezoelectric element. It is a conceptual diagram for demonstrating operation | movement of a SIDM apparatus. It is a conceptual diagram for demonstrating operation | movement of a SIDM apparatus. It is a figure which shows the SIDM apparatus in 2nd Embodiment. It is a figure which shows the piezoelectric element in 2nd Embodiment. It is a conceptual diagram for demonstrating operation | movement of the SIDM apparatus in 2nd Embodiment.

<First Embodiment>
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a conceptual diagram showing a schematic configuration of a light source unit 100 in the present embodiment.

  As shown in this figure, a light source unit 100 includes an infrared semiconductor laser 11 that irradiates laser light inside a package 10 and an optical element (collimator lens) that converts the laser light from the infrared semiconductor laser 11 into a parallel beam. 12, an optical element (condensing lens) 13 that condenses the light beam from the optical element 12, and a PPLN (Periodically Charged Lithium Niobate) waveguide 14 as a SHG (Second Harmonic Generation) element. Yes. Here, the shaded portion in the figure indicates the luminous flux.

  In the present embodiment, the light source unit 100 has a maximum length of 10 mm or less, and the optical elements 12 and 13 have a maximum diameter of 10 mm or less. The PPLN waveguide 14 is provided with a temperature control plate 16 for controlling the temperature of the PPLN waveguide 14. As these members in the light source unit 100, for example, those disclosed in the following documents 1 and 2 can be used.

  <Literature 1> IQEC / CLEO-PR 2005, Tokyo, Japan, July 11-15, 2005, post-deadline paper PDG-2 “107-mW low-noise green light emission double-bundled 10” "

  <Reference 2> 2006 Electronic Components and Technology Conference 1064-1065P "Wavelength Matching and Tuning in Green Laser Packaging using Second Harmonic Generation"

  In the light source unit 100 described above, the optical elements 12 and 13 are supported by the support member 17, and the SIDM apparatus 1 </ b> A that moves the optical elements 12 and 13 between the optical elements 12 and 13 and the support member 17. 1B and a bracket 18 for supporting these SIDM devices 1A and 1B are interposed.

  The SIDM devices 1A and 1B are ultra-small and high-precision actuators that use a piezoelectric element as a drive source, and move the optical element 12 mainly in the Z-axis direction in the figure and the optical element 13 mainly in the Y-axis direction in the figure. It is possible to make it. However, the SIDM apparatus 1A may move the optical element 12 mainly in the Y-axis direction, and the SIDM apparatus 1B may move the optical element 13 mainly in the Z-axis direction. Here, the SIDM devices 1A and 1B in the present embodiment can move the optical elements 12 and 13 also in the X-axis direction. Note that the amount of movement of the optical elements 12 and 13 by the SIDM devices 1A and 1B is, for example, several mm in the Z-axis direction and Y-axis direction, and 10 μm or less in the X-axis direction. Details of the SIDM devices 1A and 1B will be described later.

A control unit (not shown) is connected to the SIDM devices 1A and 1B. The control unit drives the SIDM devices 1A and 1B to move the optical elements 12 and 13, respectively, so that the optical axes of the optical elements 12 and 13 are set to the incident end faces of the infrared semiconductor laser 11 and the PPLN waveguide 14. It can be adjusted (aligned).
The light source unit 100 as described above can be used as a green light source in a conventionally known image projection apparatus, for example.

Next, the SIDM devices 1A and 1B will be described in detail.
FIG. 2 is a diagram showing a schematic configuration of SIDM apparatuses 1A and 1B (hereinafter referred to as SIDM apparatus 1) as drive apparatuses according to the present invention.

  As shown in this figure, the SIDM apparatus 1 includes a drive shaft 3, a collar member 4, a moving body 5, a piezoelectric element 2, and the like. However, for convenience of illustration, illustration of the movable body 5 and the like is omitted in FIG. 2A, and illustration of the color member 4 and the like is omitted in FIG. 2B and the illustration of the movable body 5 is simplified. ing.

  Among these, the drive shaft 3 is a columnar member, which is a quadrangular columnar member in the present embodiment, and is fixed to one end of the piezoelectric element 2 and is displaced by the expansion and contraction of the piezoelectric element 2. The drive shaft 3 is made of a carbon-containing material. In the present embodiment, the drive shaft 3 is made of a mixed material (carbon composite) of carbon fiber and resin.

  The collar member 4 is a movement restricting portion in the present invention, and is formed in a substantially U shape as shown in FIG. The collar member 4 is fixed to the bracket 18 on the side surface, and is fixed to the side peripheral surface of the drive shaft 3 on the inner side surface. As a result, the collar member 4 supports the piezoelectric element 2 so as to be expandable and contractable while restricting the movement of the piezoelectric element 2 via the drive shaft 3. Here, the bracket 18 has two holes 180 and 181 that are recessed in the Z-axis direction and the Y-axis direction, and the piezoelectric element 2 is accommodated in the holes 180 and 181.

  The movable body 5 slides relative to the drive shaft 3 mainly in the axial direction of the drive shaft 3 (the Z-axis direction in the SIDM apparatus 1A, the Y-axis direction in the SIDM apparatus 1B, hereinafter referred to as the axial direction J). And is frictionally engaged with the drive shaft 3. As shown in FIG. 3, the moving body 5 includes a moving body main body 50, a leaf spring 6, and a sliding plate 70.

  The movable body 50 is a substantially concave member provided with a groove 51 extending in the axial direction J of the drive shaft 3. Of the four side peripheral surfaces of the drive shaft 3 on the inner surface of the groove 51, It slides with respect to two adjacent side surfaces. The wall portions 51b and 51c of the groove portion 51 are opposed to each other along the X-axis direction. In addition, two engaging claws 52, 52 that engage with the leaf spring 6 are provided on the outer surface 53 of the groove 51 in the movable body 50. In the present embodiment, the mobile body 50 is formed by die-casting a zinc alloy or resin. In addition, the optical element 12 (or 13) is fixed to the movable body 50 via a lens barrel 55, and the optical axis direction of the optical element 12 (or 13) depends on which of the SIDM devices 1A and 1B. Is also in the X-axis direction.

  The leaf spring 6 is formed in a substantially U-shape and has two holes 60, 60 at both ends, and these two holes 60, 60 are two engagement claws in the movable body 50. By engaging with 52, 52, the groove 51 is fixed to the outer surface 53 of the groove 51. Accordingly, the leaf spring 6 biases the drive shaft 3 to the bottom surface 51 a of the groove portion 51. However, in the present embodiment, the drive shaft 3 urged to the bottom surface 51a of the groove 51 by the leaf spring 6 is directed to the bottom surface 51a along the cross direction of the axial direction J, in this embodiment the X-axis direction. On the other hand, it is slidable. Thereby, the movable body 5 in the present embodiment is slidable in the X-axis direction in addition to the axial direction J with respect to the drive shaft 3.

  The sliding plate 70 is a rectangular plate member interposed between the leaf spring 6 and the drive shaft 3, and slides with respect to the drive shaft 3. The sliding plate 70 is made of SUS.

The piezoelectric element 2 expands and contracts when a voltage is applied, and is a piezo element in the present embodiment.
As shown in FIGS. 4A and 4C, the piezoelectric element 2 is formed in a rectangular parallelepiped shape that is long in the axial direction J, and is connected to the drive shaft 3 so that the central axis coincides. Yes. The piezoelectric element 2 includes three rectangular parallelepiped piezoelectric bodies 20 to 22 between a pair of electrodes 29 and 29 (see FIG. 4C) extending in the axial direction J.

  The piezoelectric bodies 20 to 22 are arranged such that the piezoelectric body 21 and the piezoelectric body 22 are adjacent to each other in the X-axis direction, and the piezoelectric body 20 and the piezoelectric bodies 21 and 22 are adjacent to each other in the axial direction J, and are bonded to each other. The widths of the piezoelectric bodies 21 and 22 in the X-axis direction are each ½ of the width of the piezoelectric body 20.

  In addition, the piezoelectric bodies 20 to 22 are different in operation direction when the same positive and negative voltages are applied between the electrodes 29 and 29. Specifically, when a voltage is applied to the electrodes 29 and 29 so that the front surface in the drawing has a positive voltage, the piezoelectric body 20 extends in the axial direction J, and the piezoelectric body 21 extends in the X-axis direction. The piezoelectric body 22 contracts in the X-axis direction. However, in the present embodiment, the resonance frequency is different between the piezoelectric body 20 and the piezoelectric bodies 21 and 22.

  In the present embodiment, these piezoelectric bodies 20 to 22 are formed by laminating thin plate-like piezoelectric materials, and are so-called laminated piezoelectric bodies.

  Specifically, the piezoelectric body 20 is formed by laminating a plurality of rectangular plate-shaped piezoelectric members 200 in the axial direction J, as shown in FIG. Each piezoelectric member 200 is polarized so as to expand and contract in the thickness direction, that is, in the axial direction J by application of a voltage from the electrodes 29 and 29. Accordingly, the piezoelectric body 20 is configured to displace the drive shaft 3 in the axial direction J.

  On the other hand, the piezoelectric bodies 21 and 22 are integrally formed by stacking a plurality of rectangular plate-shaped piezoelectric members 201 in the axial direction J. As shown in FIG. 4B, each piezoelectric member 201 is formed by connecting the sides of two rectangular plate-like piezoelectric members 202 and 203 with a separator 204 in the X-axis direction. As the separator 204, a conventionally known one can be used.

  The piezoelectric members 202 and 203 are polarized so as to expand and contract in a direction adjacent to each other, that is, in the X-axis direction by application of a voltage from the electrodes 29 and 29. However, the operation directions of the piezoelectric members 202 and 203 are opposite to each other, and when a voltage is applied between the electrodes 29 and 29, the piezoelectric member 202 expands (or contracts) in the X-axis direction, and the piezoelectric member The member 203 contracts (or extends). As a result, when a voltage is applied to the electrodes 29, 29, the piezoelectric bodies 21, 22 bend in the X-axis direction in cooperation with each other to cause the drive shaft 3 to swing.

  Specifically, as shown in FIG. 5A, when a voltage is applied to the electrodes 29 and 29 so that the lower surface in the figure becomes a positive voltage, the piezoelectric body 21 expands in the X-axis direction. When the piezoelectric body 22 contracts, the piezoelectric bodies 21 and 22 are difficult to expand and contract at the fixed portions with respect to the drive shaft 3 and the piezoelectric body 20, respectively. Become. As a result, as shown in FIG. 5B, the piezoelectric bodies 21 and 22 are bent in the X-axis direction as a whole, and the drive shaft 3 is swung in the X-axis direction.

Further, as shown in FIG. 4 described above, the electrodes 29 and 29 are provided by attaching metal members for electrodes to the side surfaces of the piezoelectric bodies 20 to 22. However, the electrode 29 may be formed by being laminated together with the piezoelectric members 200 and 201. Specifically, as disclosed in, for example, Japanese Patent Application Laid-Open No. 2007-325466, a metal member having a shape protruding outward from the piezoelectric bodies 20 to 22 while being in contact with the laminated surface of the piezoelectric members 200 and 201 is provided for each piezoelectric member. The electrode 29 may be formed of these metal members by being interposed between 200 and 201.
A voltage is applied to the electrode 29 from a control device (not shown).

  In the piezoelectric element 2 described above, after the piezoelectric members 200 and 201 are laminated, the piezoelectric bodies 20 to 22 are formed by polarizing the piezoelectric members 20 to 22 and the electrodes 29 and 29 are formed on the piezoelectric bodies 20 to 22. It can manufacture by providing. More preferably, the piezoelectric bodies 20 to 22 are formed by laminating thin plate-like piezoelectric members having an integral multiple of the piezoelectric members 200 and 201, and cutting these laminated bodies according to the size of the piezoelectric members 200 and 201, respectively. A plurality of piezoelectric bodies 20 to 22 can be manufactured at a time by polarizing each of the formed portions. The piezoelectric bodies 20 to 22 may be a bulk type instead of a laminated type. In this case, the electrodes 29 and 29 are provided after the piezoelectric bodies 20 to 22 are polarized and bonded to each other. Thus, the piezoelectric element 2 is manufactured.

Next, the operation of the SIDM apparatus 1 when the moving body 5 is moved in the axial direction J or the X-axis direction will be described with reference to FIG.
First, as shown in FIG. 6A, when the moving body 5 is moved along the axial direction J to the tip end side (right side in the drawing), it gently rises with respect to the piezoelectric element 2. A sawtooth drive pulse that rises rapidly and falls is applied at the resonance frequency of the piezoelectric body 20.

  As a result, when the drive pulse gradually rises, the piezoelectric body 20 is gently expanded, and the drive shaft 3 is gradually displaced toward the distal end. As a result, the movable body 5 is driven by the friction engagement force with respect to the drive shaft 3. At the same time, move to the tip side.

  On the other hand, when the drive pulse falls rapidly, the piezoelectric body 20 rapidly contracts, and the drive shaft 3 is rapidly displaced toward the base end side (left side in the figure). It overcomes the binding force and remains substantially in that position.

  Then, by continuously applying the drive pulse to the piezoelectric element 2 at the resonance frequency of the piezoelectric body 20, reciprocal vibrations having different speeds are generated on the drive shaft 3, and the moving body 5 is continuously moved to the tip of the drive shaft 3. Can be moved to the side.

  In order to move the moving body 5 to the base end side of the drive shaft 3, the waveform of the sawtooth wave drive pulse applied to the piezoelectric element 2 may be a waveform that rises rapidly and falls gently. The applied drive waveform is not limited to the sawtooth drive pulse shown here, but a rectangular wave with a duty ratio suitable for driving and a waveform with rise / fall characteristics suitable for other driving are applied. It is also possible to do.

  Next, as shown in FIG. 6B, when the movable body 5 is moved to one side along the X-axis direction, for example, the upper side in the figure, the piezoelectric element 2 rises gently. Then, a sawtooth wave driving pulse that falls rapidly is applied at the resonance frequency of the piezoelectric bodies 21 and 22.

  As a result, when the drive pulse gradually rises, the piezoelectric body 21 is gently expanded and the piezoelectric body 22 is gradually contracted, and the drive shaft 3 is gradually tilted and displaced toward the piezoelectric body 22 (FIG. 5 ( b)), the moving body 5 moves to one side (upper side in the figure) in the X-axis direction together with the drive shaft 3 by the frictional engagement force with the drive shaft 3.

  On the other hand, at the time of the rapid fall of the drive pulse, the piezoelectric body 21 contracts rapidly, the piezoelectric body 22 expands rapidly, and the drive shaft 3 rapidly tilts and displaces toward the piezoelectric body 21 side. Overcomes the frictional coupling force by the inertial force and substantially remains in that position.

  Then, by continuously applying the driving pulse to the piezoelectric element 2 at the resonance frequency of the piezoelectric bodies 21 and 22, the driving shaft 3 is caused to oscillate at different speeds, and the moving body 5 is continuously moved along the X axis. It can be moved to one side of the direction (upper side in the figure).

  In order to move the moving body 5 to the other side in the X-axis direction (the lower side in the figure), the waveform of the sawtooth drive pulse applied to the piezoelectric element 2 rises rapidly and rises gently. The waveform can be lowered. The applied drive waveform is not limited to the sawtooth drive pulse shown here, but a rectangular wave with a duty ratio suitable for driving and a waveform with rise / fall characteristics suitable for other driving are applied. It is also possible to do.

  According to the above SIDM apparatus 1, the movable body 5 is frictionally engaged with the drive shaft 3 and is movable in the axial direction J of the drive shaft 3 and the X-axis direction orthogonal to the axial direction J. Since the piezoelectric element 2 has the piezoelectric bodies 20 to 22 whose operation directions are different between the electrodes 29 and 29 when the positive and negative voltages are applied, the movable body 5 is moved in two directions of the axial direction J and the X-axis direction. Can be moved to. Moreover, since the optical elements 12 and 13 can be moved in two directions together with the moving body 5 by one SIDM apparatus 1 in this way, each optical element 12 and 13 is moved in a plurality of directions by a plurality of SIDM apparatuses. In contrast, an increase in the size of the apparatus and an increase in manufacturing costs can be prevented.

  In addition, since the piezoelectric bodies 20 to 22 are of a stacked type and have the same stacking direction, a plurality of piezoelectric elements are formed by stacking large-sized plate-like piezoelectric members 200 and 201 and then cutting the stacked body. 2 can be formed together. Therefore, unlike the case where the piezoelectric bodies 20 to 22 are bulk type, the manufacturing can be facilitated.

  In addition, since the piezoelectric bodies 20 to 22 are stacked, the resonance frequency can be varied for each of the piezoelectric bodies 20 to 22. Therefore, since only the desired piezoelectric body 20 or the piezoelectric bodies 21 and 22 can be operated by controlling the driving frequency of the voltage to be applied, the electrodes can be shared by the plurality of piezoelectric bodies 20 to 22. The SIDM apparatus 1 can be reduced in size and weight.

<Second Embodiment>
Next, a second embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to the component similar to the said 1st Embodiment, and the description is abbreviate | omitted.

  As shown in FIG. 7, the SIDM apparatus 1C according to the second embodiment includes a driving shaft 3C, a moving body 5C, and a piezoelectric element 2C instead of the driving shaft 3, the moving body 5, and the piezoelectric element 2 described above. Yes.

The drive shaft 3C is formed in a columnar shape, and is connected to the piezoelectric element 2C so that the central axes thereof coincide with each other.
The moving body 5C is frictionally engaged with the drive shaft 3C so as to slide in the axial direction J and the circumferential direction S of the drive shaft 3C.

  As shown in FIG. 8, the piezoelectric element 2 </ b> C includes four piezoelectric bodies 23 to 26 instead of the above-described piezoelectric bodies 20 to 22. Each piezoelectric body 23 to 26 is provided with a pair of electrodes (not shown).

  The piezoelectric bodies 23 to 26 are formed in a rectangular parallelepiped shape having the same dimensions, and are arranged so that two each are arranged in two directions (vertical direction and depth direction in the drawing) orthogonal to the axial direction J and bonded to each other. It has become a state.

  Among these piezoelectric bodies 23 to 26, when a pair of piezoelectric bodies 23 and 25 arranged alternately in the circumferential direction S and a pair of piezoelectric bodies 24 and 26 are applied with the same positive and negative voltage between electrodes. The operating directions are opposite to each other. Specifically, for example, when a voltage is applied so that the electrode on one side becomes a positive voltage, the piezoelectric bodies 23 and 25 expand in the axial direction J, and the piezoelectric bodies 24 and 26 contract in the axial direction J. It has become. Thereby, the piezoelectric bodies 23 to 26 generate minute vibrations in the circumferential direction S on the side peripheral surface of the drive shaft 3 in cooperation with each other when a voltage having a waveform such as a sine wave is applied to the electrodes. It is like that. In the present embodiment, the piezoelectric bodies 23 to 26 are bulk type, but may be a laminated type.

  Next, the operation of the SIDM apparatus 1C when moving the moving body 5C in the axial direction J or the circumferential direction S will be described with reference to FIG.

  First, as shown in FIG. 9A, when the moving body 5C is moved along the axial direction J, it gently rises and rapidly rises with respect to the piezoelectric bodies 23 and 25 of the piezoelectric element 2C. The saw-tooth wave drive pulse is applied to the piezoelectric bodies 24 and 26 with a saw-tooth wave drive pulse that gently falls and rises rapidly.

  As a result, when the drive pulse gradually rises and falls, the piezoelectric bodies 23 to 26 are gently expanded, and the drive shaft 3C is gradually displaced toward the distal end side. It moves to the tip side together with the drive shaft 3C by the engaging force.

  On the other hand, when the drive pulse rapidly falls or rises, the piezoelectric bodies 23 to 26 rapidly contract, and the drive shaft 3C is rapidly displaced toward the base end side (left side in the figure). Overcomes the frictional coupling force by the inertial force and substantially remains in that position.

  Then, by continuously applying the drive pulse to the piezoelectric element 2C, reciprocating vibrations having different speeds are generated on the drive shaft 3C, and the moving body 5C can be continuously moved to the tip side of the drive shaft 3C. .

  In order to move the moving body 5C to the base end side of the driving shaft 3C, the waveform of the sawtooth drive pulse applied to the piezoelectric bodies 23 and 25 is changed to a waveform that rises rapidly and falls gently. The waveform of the sawtooth drive pulse applied to the bodies 24 and 26 may be a waveform that rises rapidly and rises gently. The applied drive waveform is not limited to the sawtooth drive pulse shown here, but a rectangular wave with a duty ratio suitable for driving and a waveform with rise / fall characteristics suitable for other driving are applied. It is also possible to do.

  Next, as shown in FIG. 9B, when the moving body 5C is moved (rotated) in the circumferential direction S, a sinusoidal voltage is applied to the piezoelectric element 2C.

  As a result, the set of piezoelectric bodies 23 and 25 and the set of piezoelectric bodies 24 and 26 repeat the expansion and contraction in the axial direction J alternately, and minute vibrations in the circumferential direction S cause the side peripheral surface of the drive shaft 3C. As a result, the moving body 5C moves in the circumferential direction S on the side peripheral surface of the drive shaft 3C.

  According to the above SIDM device 1C, the moving body 5C is frictionally engaged with the drive shaft 3C and can move in the axial direction J of the drive shaft 3 and the circumferential direction S. The piezoelectric element 2C is an electrode. Since the piezoelectric bodies 23 to 26 have different operation directions when a positive and negative voltage is applied between them, the moving body 5C can be moved in two directions, ie, the axial direction J and the circumferential direction S. In addition, since the optical elements 12 and 13 can be moved in two directions together with the moving body 5C by one SIDM apparatus 1C in this way, each optical element 12 and 13 is moved in a plurality of directions by a plurality of SIDM apparatuses. In contrast, an increase in the size of the apparatus and an increase in manufacturing costs can be prevented.

  It should be noted that the present invention should not be construed as being limited to the above-described embodiment, and of course can be modified or improved as appropriate.

  For example, in the first embodiment, the piezoelectric element 2 has been described as having the piezoelectric bodies 21 and 22, but it is also possible to have only one of the piezoelectric bodies 21 and 22. Even in this case, the movable body 5 can be moved in two directions, ie, the axial direction J and the X-axis direction.

  In addition, the piezoelectric body 20 and the piezoelectric bodies 21 and 22 have been described as being connected to the end face of the drive shaft 3 in the axial direction J, but at least one of them is connected to the side peripheral surface of the drive shaft 3. Also good. Even in this case, the movable body 5 can be moved in two directions, ie, the axial direction J and the X-axis direction.

  In the second embodiment, the piezoelectric element 2C has been described as moving the moving body 5C in the axial direction J by the piezoelectric bodies 23 to 26. However, as in the first embodiment, the piezoelectric element 2C The moving body 5C may be moved in the axial direction J.

  The piezoelectric bodies 23 to 26 have been described as being connected to the end face in the axial direction J of the drive shaft 3C, but are connected to the side peripheral surface of the drive shaft 3 with a predetermined interval along the circumferential direction S. It's also good.

1, 1A to 1C Driving device 2, 2C Piezoelectric element 3, 3C Driving shaft 4 Collar member (movement limiting part)
5,5C moving body 20 piezoelectric body (first piezoelectric body)
21, 22 Piezoelectric body (second piezoelectric body)
23-26 Piezoelectric body J Axial direction X X-axis direction (cross direction)
S Circumferential direction

Claims (5)

A piezoelectric element that expands and contracts by application of voltage;
A columnar drive shaft displaced by expansion and contraction of the piezoelectric element;
A movement restricting portion that supports the piezoelectric element so as to be stretchable while restricting movement of the piezoelectric element;
A movable body that is frictionally engaged with the drive shaft and is movable in an axial direction of the drive shaft and a direction different from the axial direction;
The piezoelectric element is
2. A drive device comprising two or more piezoelectric bodies having different operation directions when positive and negative voltages are applied. The drive device according to claim 1, wherein
The two or more piezoelectric bodies are:
A driving device characterized in that it is a laminated piezoelectric body and the direction of lamination is the same. The drive device according to claim 1 or 2,
The piezoelectric element is
A first piezoelectric body that expands and contracts in the axial direction;
A second piezoelectric body that expands and contracts in the cross direction of the axial direction,
The moving body is
A driving device that is movable in the axial direction and the crossing direction. In the drive device according to any one of claims 1 to 3,
The drive frequency of the voltage applied to the piezoelectric body is different between when the moving body is moved in the axial direction of the drive shaft and when moved in a direction different from the axial direction. Drive device. The drive device according to claim 1 or 2,
The piezoelectric element is
The operation direction by applying the same positive and negative voltage is opposite to each other along the axial direction, and has four or more piezoelectric bodies alternately arranged in the circumferential direction of the drive shaft,
The drive shaft is cylindrical,
The moving body is
A drive device that is movable in the axial direction and the circumferential direction.

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