JP5196495B2 - Structural member for sliding and manufacturing method thereof - Google Patents

Description

  The present invention relates to a structural member having a surface structure suitable for use in various industrial or household devices, for example, a sliding structural member used for a sliding portion of various devices and a method for manufacturing the structural member. .

Conventionally, the technique of a diamond-like carbon multilayer film is known as a film having low friction and wear resistance (hereinafter referred to as “conventional technique 1”, for example, see Patent Document 1). This diamond-like carbon multilayer film is formed by alternately stacking soft films and hard films on a substrate.
In addition, as a frictional sliding material having excellent wear resistance, the surface of the first material is provided with irregularities by sandblasting or the like, and the second material having a hardness different from that of the first material is coated on the irregularities. A layer formed is known (hereinafter referred to as “Prior Art 2”, for example, see Patent Document 2).

  In addition, as the engine sliding part, the surface of the base material that becomes the sliding surface is formed on the base material surface that has waviness and microdimple shape, and a hard thin film is provided on the base material surface to reduce the friction. In addition, there is known one having a sliding surface with good oil retention and excellent seizure resistance and wear resistance (hereinafter referred to as “Prior Art 3”, for example, see Patent Document 3).

JP 2004-269991 A Japanese Patent Laid-Open No. 2-170885 JP 2001-280494 A

The diamond-like carbon multilayer film of the prior art 1 is a film having excellent low friction and wear resistance, but has low adhesion to steel and can easily form a film on a wide area substrate. There are practical problems such as difficulty.
Moreover, although the thing of the prior art 2 is excellent in abrasion resistance, since it is what aimed at the high friction rather, it is not suitable for the sliding surface for which low friction is required.
Furthermore, the thing of the prior art 3 aims at obtaining the sliding component with low friction, oil retaining property, and excellent seizure resistance and wear resistance, but the base material and the hard thin film are hard. If the mating material is soft, it will be worn, and conversely if the mating material is sufficiently hard, the hard thin film will be worn. Once worn, the micro dimple will disappear and the initial performance cannot be maintained. There is.

  The present invention has been made in view of the above-described problems of the prior art, and an object of the present invention is to provide a sliding structural member capable of maintaining an uneven surface even when the surface is worn. Objective.

The above problem is solved by the following means.
(1) A sliding structural member comprising a multilayer film in which films of different materials are alternately laminated on irregular irregularities formed on a surface of a substrate.
(2) The sliding structural member according to (1), wherein the irregular irregularities and a part of the multilayer film are polished from the surface to form a flat surface.
(3) The sliding structural member according to (1) or (2), wherein the substrate is made of a resin, a ceramic, or a metal material.
(4) The sliding structural member according to any one of (1) to (3), wherein the multilayer film is made of a metal material or an inorganic material.
(5) The structural member for sliding according to any one of (1) to (4), wherein at least one of the multilayer films is made of a low friction material.
(6) A sliding structure including a step of preparing a substrate having irregular irregularities on the surface, and a step of alternately laminating films of constant thicknesses of different materials on the substrate to form a multilayer film Manufacturing method of member.
(7) The method for producing a sliding structural member according to (6), further comprising a step of polishing the irregular irregularities and a part of the multilayer film from the surface.
(8) The sliding structural member according to (6) or (7), wherein the substrate having irregular irregularities on the surface is formed by machining, chemical or physical etching Manufacturing method.
(9) The sliding structural member according to any one of (6) to (8), wherein the multilayer film is formed by a vacuum deposition method, a plating method, a dipping method, a spin coating method, or a spray coating method. Manufacturing method.

  According to the sliding structural member of the present invention, it is only necessary to provide a multilayer film in which films of different materials are alternately laminated on irregular irregularities formed on the surface of the substrate. Since new nanopattern grooves are formed one after another spontaneously by use, even if the thickness of one multilayer film is as small as nanometers, an uneven surface including the nanopattern grooves over a long period of time is formed. Can be maintained.

  Further, according to the sliding structural member of the present invention, by having the nanopattern groove obtained by polishing the surface of the multilayer film, even if the surface is worn away and the nanopattern groove near the surface disappears, it is newly added. Since the nanopattern grooves are formed one after another, even if the thickness of the multilayer film is as small as about nanometer, the uneven surface including the nanopattern grooves can be maintained for a long time. Therefore, a good lubricating state can be maintained by supplying the fluid lubricant to the surface of the sliding structural member.

  Furthermore, according to the sliding structural member of the present invention, it is possible to obtain a friction sliding material having a function of solid lubrication in addition to fluid lubrication by forming at least one of the multilayer films from a low friction material. it can.

It is a conceptual diagram explaining the structural member for sliding which concerns on embodiment of this invention. It is a conceptual diagram explaining the structural member for sliding which concerns on other embodiment of this invention.

  Hereinafter, the sliding structural member and the manufacturing method thereof according to the present invention will be described in detail with reference to the drawings. However, the present invention is not construed as being limited thereto and does not depart from the scope of the present invention. However, various changes, modifications, and improvements can be added based on the knowledge of those skilled in the art.

FIG. 1 is a conceptual diagram illustrating a sliding structural member of the present invention.
Irregular irregularities 2 are formed on the surface of the substrate 1.
The “base material” includes members having various shapes such as a block member, a flat plate member, a curved plate member, and a cylindrical member.
The material of the base material 1 is selected according to the purpose, such as iron, copper, aluminum, and resin.
Moreover, although the height of the irregular unevenness | corrugation 2 is not specifically limited, For example, the range of 0.1-100 micrometers is desirable.

On the surface of the base material 1 on which irregular irregularities 2 are formed, as shown in FIG. 1, a multilayer is formed by alternately laminating films made of two or more kinds of materials having a thickness of about 5 nm to 10 μm. A film 3 is formed.
The material of the film is selected according to the purpose from materials such as gold, platinum, silver, copper, aluminum, nickel, lead, iron, silicon, ceramics, diamond-like carbon, and resin.

When the sliding structural member is used as a low friction sliding member such as a bearing, at least one of the films constituting the multilayer film 3 is preferably formed of a low friction material.
The film can be formed using, for example, a known PVD (Physical Vapor Deposition) method or CVD (Chemical Vapor Deposition) method, plating method, dipping method, spin coating method, or spray coating method. The formed multilayer film 3 is in a state of being laminated following the irregular irregularities 2 formed on the substrate 1.

  As described above, when the structural member on which the multilayer film 3 is formed is used for a sliding portion of an automobile engine or the like, the sliding between the members removes more of the soft film than the hard film, and naturally slides. A surface having nano-pattern grooves of nanometer to micrometer scale in the moving part is obtained.

On the other hand, the surface on which the multilayer film 3 is formed is polished in a planar shape using a known polishing means so as to scrape a high portion as shown in FIG. Then, the softer film is removed more than the hard film due to the difference in the hardness of the film material constituting the multilayer film 3, and the nanometer to the micrometer over a wide range as shown in FIG. A surface with a nanopattern groove of scale is obtained.
In FIG. 2B, the hatched portion is a hard material film, and the white portion is a soft material film.

The sliding structural member of the present invention obtained in this way, even when the surface wears and the unevenness near the surface disappears, new unevenness is formed one after another by sliding between the members. Even when the thickness of one multilayer film is as small as about nanometers, it is possible to maintain an uneven surface including nanopattern grooves for a long time. Therefore, a good lubricating state can be maintained by supplying the fluid lubricant to the surface of the sliding structural member.
In addition, by forming at least one of the multilayer films from a low friction material, a sliding structural member having a function of solid lubrication in addition to fluid lubrication can be obtained.

1 Substrate 2 Irregular irregularities 3 Multilayer film

Claims (7)

A sliding structural member provided with a multilayer film in which films of different materials are alternately laminated on irregular irregularities formed on the surface of a substrate,
The irregular surface and the multilayer film are polished from the surface so as to scrape off a high part of the multilayer film to be a flat surface, and the flat surface has a hard surface made of a film material constituting the multilayer film. A sliding structural member characterized by having nano-pattern grooves of nanometer to micrometer scale by removing more soft films than hard films due to the difference in thickness . The sliding structural member according to claim 1, wherein the base material is made of a resin, a ceramic, or a metal material. The multilayer film is sliding structure according to claim 1 or 2, characterized in that it consists of a metal or inorganic material. The sliding structural member according to any one of claims 1 to 3 , wherein at least one of the multilayer films is made of a low friction material. A method for manufacturing a sliding structural member, comprising: preparing a base material having irregular irregularities on the surface; and forming a multilayer film by alternately laminating films of a certain thickness of different materials on the base material Because
Further, the irregular surface and a part of the multilayer film are polished from the surface so that a high part is scraped off to form a flat surface, and the flat surface has a hardness of the film material constituting the multilayer film. Forming a nano-pattern groove on the nanometer to micrometer scale by removing more soft films than hard films due to the difference . 6. The method for manufacturing a sliding structural member according to claim 5 , wherein the substrate having irregular irregularities on the surface is formed by machining, chemical or physical etching. The said multilayer film is formed by the vacuum evaporation method, the plating method, the dip method, the spin coating method, or the spray coating method, The manufacturing method of the structural member for sliding of Claim 5 or 6 characterized by the above-mentioned.

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