JP5172615B2 - Temperature control device - Google Patents

Description

  The present invention relates to a temperature control device that controls a temperature of a control target as desired by circulating a fluid through a temperature control unit arranged in the vicinity of the control target.

  FIG. 12 shows this type of temperature control apparatus. As shown in the figure, the fluid in the storage tank 100 is sucked by the pump 102 and discharged to the heating unit 104 side. The heating unit 104 includes a heater or the like, and can heat the fluid output to the temperature control unit 106. The fluid that has passed through the temperature adjustment unit 106 is output to the cooling unit 108. The cooling unit 108 can cool the fluid output to the storage tank 100.

  In such a configuration, the temperature of the controlled object supported by the temperature adjustment unit 106 is controlled by adjusting the temperature of the fluid supplied to the temperature adjustment unit 106. Here, when it is desired to increase the temperature of the control target, the fluid is not cooled in the cooling unit 108 and the fluid is heated in the heating unit 104. On the other hand, when it is desired to lower the temperature of the controlled object, the cooling unit 108 cools the fluid and the heating unit 104 does not heat the fluid. Thereby, the temperature of a control object can be controlled as desired.

In addition, as a conventional temperature control apparatus, there exist some which are described in the following patent document 1, for example besides the thing shown in FIG.
JP 2000-89832 A

  By the way, in the said temperature control apparatus, it takes a long time to change the temperature of control object into desired temperature. That is, when it is desired to cool the temperature of the controlled object, it is necessary to stop the heating by the heating unit 104 and start the cooling by the cooling unit 108. However, even after the heating by the heating unit 104 is stopped, A high-temperature fluid is output from the heating unit 104 for a while. Even if the cooling by the cooling unit 108 is started, it takes time until the fluid is actually cooled, and it takes a longer time for the temperature of the fluid in the storage tank 100 to decrease. For this reason, the temperature in the temperature control unit 106 cannot be changed quickly, and as a result, the temperature to be controlled cannot be changed quickly.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to control the temperature of the control target as desired by circulating a fluid through a temperature control unit arranged in the vicinity of the control target. An object of the present invention is to provide a temperature control device capable of quickly following the temperature of the controlled object to a desired temperature.

  Hereinafter, means for solving the above-described problems and the operation and effects thereof will be described.

  According to the first aspect of the present invention, in the temperature control device for controlling the temperature of the control target as desired by circulating the fluid through the temperature control unit disposed in the vicinity of the control target, the temperature control unit A heating passage that circulates to the temperature, a cooling passage that cools the fluid and circulates to the temperature adjustment unit, and a bypass passage that circulates the fluid to the temperature adjustment unit without passing through the heating passage and the cooling passage; Adjusting means for adjusting a flow rate ratio of the fluid output from the heating passage, the cooling passage, and the bypass passage to the temperature control unit, and flow means for flowing the fluid to circulate the fluid, The heating passage is provided with a heating section for heating the fluid, and the flow means is provided downstream of the heating section in the circulation path of the fluid. To do.

  In the above invention, the temperature of the fluid output to the temperature control unit can be rapidly changed by adjusting the flow rate ratio of the fluid output to the temperature control unit via the heating passage, the cooling passage, and the bypass passage. it can. Furthermore, since the flow means is provided on the downstream side of the heating unit, it is possible to suppress an increase in the pressure of the portion heated by the heating unit in the heating passage due to the influence of the suction force of the fluid by the flow means. For this reason, the withstand pressure | voltage requested | required of the said part to be heated can also be reduced. The flow passage area of the joining portion where the heating passage, the cooling passage, and the bypass passage merge with each other may be equal to or less than the sum of the flow passage areas of the upstream passages, and less than the sum. It is good.

  The invention described in means 2 is the invention described in means 1, wherein the adjusting means comprises means for adjusting the flow rate of the fluid output from the heating passage to the temperature control section, and the means comprises the heating It is provided in the upstream from the part.

  In the above invention, the means for adjusting the flow rate of the fluid output from the heating passage to the temperature control section is provided on the upstream side of the heating section, so that the flow means is heated by the heating section in the heating passage. It can be suitably avoided that the effect of lowering the pressure is hindered by the adjusting means.

  The invention described in means 3 is characterized in that, in the invention described in means 1 or 2, the fluid circulation path is provided with a volume change absorbing means having a function of absorbing a volume change of the fluid due to temperature.

  When the volume of the fluid has temperature dependence, there is a possibility that the circulation of the fluid may be hindered by the volume changing due to the temperature change of the fluid. In this regard, in the above invention, since the volume change absorbing means is provided, the circulation of the fluid can be suitably maintained even when the volume of the fluid changes.

  The volume change absorbing means is preferably provided upstream of the flow means.

  The invention according to means 4 is the invention according to any one of means 1 to 3, wherein the fluid is caused to flow out from the upstream side to the downstream side of the heating passage and the cooling passage, bypassing the adjusting means. An outflow passage is provided.

  When the outflow of fluid from the heating passage or the cooling passage to the temperature control unit is prohibited, a temperature gradient is generated in these passages. For this reason, immediately after the prohibition is released, the temperature of the fluid flowing out to the temperature control unit is affected by the temperature gradient, and the time required for the temperature control unit to follow the desired temperature increases. There is a risk. In this regard, in the above invention, by providing the outflow passage, the temperature gradient in the heating passage and the cooling passage can be suitably suppressed, and as a result, the temperature of the temperature adjustment section can be made to quickly follow the desired temperature.

  In the invention according to means 4, the heating passage is provided with a heating side temperature detecting means for detecting the temperature thereof, and the cooling passage is provided with a cooling side temperature detecting means for detecting the temperature thereof. It is good also as a feature. In this case, by providing the outflow passage, it is preferable to suppress the detection means from being affected by the temperature gradient due to the prohibition of the outflow of fluid from the heating passage or the cooling passage to the temperature control unit. can do.

  The invention according to means 5 is the invention according to any one of means 1 to 4, wherein the bypass passage used when fluid is output from both the heating passage and the bypass passage to the temperature control section, and the The bypass passage used when the fluid is output from both the cooling passage and the bypass passage to the temperature control unit includes a common passage.

  In the above invention, a common bypass passage can be used when the fluid is output from the heating passage and the bypass passage to the temperature adjustment portion and when the fluid is output from the cooling passage and the bypass passage to the temperature adjustment portion. . For this reason, the structure of a temperature control apparatus can be simplified compared with the case where each separate bypass passage must be used.

  The invention described in means 6 further comprises operating means for operating the adjusting means in order to control the temperature of the fluid in the vicinity of the temperature control section to a target value in the invention described in any one of means 1-5. Features.

  In the said invention, the temperature of a temperature control part can be adjusted as desired by providing an operation means.

  The invention described in means 7 is the invention described in means 6, wherein the operating means feedback-controls the detected value by the output temperature detecting means for detecting the temperature of the fluid in the vicinity of the temperature control unit to the target value. It is characterized by.

  In the said invention, in order to perform feedback control, a detected value can be made to follow a target value with high precision.

  The invention described in the means 8 is the invention described in the means 7, wherein the adjusting means is means for adjusting a flow area on the downstream side of each of the heating passage, the cooling passage, and the bypass passage, and the operation means. Comprises a conversion means for converting an amount based on a degree of deviation of the detected value from the target value into an operation amount of each of the heating passage, the cooling passage, and the bypass passage. .

  In the above invention, by providing the conversion means, the degree of deviation of the detected value from the target value is only quantified as a single quantity, and based on this quantified quantity, the flow area of the three passages is determined. It can be adjusted (operated).

  When the detected value is larger than the target value, the conversion means changes the flow passage areas of the cooling passage and the bypass passage with respect to the change in the degree of deviation, and the detected value is smaller than the target value. When it is small, it is desirable to change the flow passage areas of the heating passage and the bypass passage with respect to the change in the degree of deviation.

  The invention described in means 9 is the invention described in means 7 or 8, wherein the operation means detects the temperature of the bypass passage instead of the feedback control over a predetermined period after the target value changes. The adjusting means is operated to open-loop control the temperature of the fluid in the vicinity of the temperature control unit based on the detection value of the bypass temperature detecting means.

  When the target value changes, in order to cause the temperature of the detected value to quickly follow the target value by feedback control, it is required to increase the gain of the control. When the control gain is increased, the amount of fluctuation in which the detected value fluctuates above and below the target value increases. Thus, in feedback control, improvement in responsiveness and suppression of fluctuation amount are in a trade-off relationship with each other. In this regard, in the above invention, in order to perform open loop control instead of feedback control over a predetermined period after the target value changes, feedback is performed so as to suppress the fluctuation amount of the detected value fluctuating above and below the target value. Even if the control is set, the responsiveness when the target value changes can be improved.

  The invention described in means 10 is the invention described in means 9, wherein the open loop control is configured such that when the temperature of the fluid in the bypass passage is higher than the target value, the bypass passage and the cooling over the predetermined period. When the temperature of the fluid in the bypass passage is lower than the target value, the bypass passage and the bypass passage and the temperature of the fluid output from the passage to the temperature control unit are controlled. This is performed by manipulating the flow rate ratio of the fluid output from the heating passage to the temperature control unit.

  In the above invention, when the temperature of the fluid in the bypass passage is higher than the target value, the flow passage areas of the bypass passage and the cooling passage are operated, so that the energy can be reduced compared with the case where the heating passage is also used. Consumption can be reduced. Further, when the temperature of the fluid in the bypass passage is lower than the target value, the amount of energy consumption can be reduced by operating the flow passage areas of the bypass passage and the heating passage as compared with the case where the cooling passage is also used. Can be reduced.

  The invention described in means 11 is the transient target value for changing the target value to be larger than the change in the demand when the demand relating to the temperature of the temperature control unit changes in the invention according to any one of the means 6 to 10. It further comprises setting means.

  In order to make the temperature of the temperature control section follow the target value after the target value has changed, it is necessary to change the temperature of the temperature control section with the temperature-controlled fluid. Occurs. Furthermore, in order to change the temperature of the controlled object, since the heat energy must be exchanged between the controlled object and the temperature adjusting unit after the temperature of the temperature controlled part changes, the temperature change of the controlled object The response delay becomes even more pronounced. Here, in the above invention, when the actual demand changes, the temperature of the temperature control unit or the controlled object is quickly changed to the required temperature side by making the change of the target value larger than the change of the demand. Can be.

  The invention according to means 12 is the invention according to any one of means 9 to 11, wherein at least one of the gain of the open loop control, the duration of the open loop control, and the setting of the target value during the open loop control. It further comprises an open loop control adaptation support means that urges the outside to select any one of a plurality of options for and performs the temperature control according to the selected value.

  In the open loop control, the optimum setting of the gain, duration, and target value depends on the control target. For this reason, there is a concern that the open loop control cannot be optimally performed depending on the control target if these parameters are fixedly given from the beginning in the temperature control device. In this regard, in the above invention, by providing the adaptation support means, it is possible to reduce the labor when the user of the temperature control apparatus adapts these parameters according to the control target.

  The invention according to means 13 is the invention according to any one of means 6 to 12, wherein when the temperature of the temperature control section is in a steady state, the operation means adjusts the heating passage and the cooling passage. The flow rate of the fluid adjusted by is prohibited from becoming zero.

  When the outflow of fluid from the heating passage or the cooling passage to the temperature adjustment unit is prohibited, a temperature gradient is generated on the downstream side of the adjusting means. For this reason, immediately after the prohibition is released, the temperature of the fluid flowing out to the temperature control unit is affected by the temperature gradient, so that it takes a long time to make the temperature of the temperature control unit follow the desired temperature. There is a risk of becoming. In this regard, in the above invention, when the temperature of the temperature control unit is in a steady state, the temperature gradient is preferably prevented by prohibiting the flow rate of the fluid adjusted by the adjusting means of the heating passage and the cooling passage from becoming zero. Therefore, the temperature of the temperature control unit can be made to follow quickly at a desired temperature.

  In the invention described in means 13, the heating passage is provided with heating side temperature detecting means for detecting its temperature, and the cooling passage is provided with cooling side temperature detecting means for detecting its temperature. It is good also as a feature. In this case, it is possible to suitably suppress the detection means from being affected by the temperature gradient by prohibiting the outflow of the fluid from the heating passage or the cooling passage to the temperature control unit.

  The invention described in means 14 is the temperature control device for controlling the temperature of the control object as desired by circulating the fluid through the temperature control part arranged in the vicinity of the control object. A heating passage that circulates to the temperature, a cooling passage that cools the fluid and circulates to the temperature adjustment unit, and a bypass passage that circulates the fluid to the temperature adjustment unit without passing through the heating passage and the cooling passage; And adjusting means for adjusting a flow rate ratio of the fluid output from the heating passage, the cooling passage, and the bypass passage to the temperature control unit.

  In the above invention, the temperature of the fluid output to the temperature control unit can be rapidly changed by adjusting the flow rate ratio of the fluid output to the temperature control unit via the heating passage, the cooling passage, and the bypass passage. it can. In addition, you may add at least 1 of the invention specific matter of the said means 2-13 to the invention of the means 14 described above. Further, the flow passage area of the joining portion where the heating passage, the cooling passage, and the bypass passage merge with each other may be less than or equal to the sum of the flow passage areas of the upstream passages, and less than the sum. It is good.

(First embodiment)
Hereinafter, a first embodiment of a temperature control device according to the present invention will be described with reference to the drawings.

  FIG. 1 shows the overall configuration of the temperature control apparatus according to the present embodiment.

  The illustrated temperature control device is used in, for example, processing / manufacturing processes in the fields of biotechnology and chemical industry, biological / chemical experiments, and manufacturing processes of precision equipment such as semiconductor devices. The temperature control device includes a temperature control plate 10. The temperature control plate 10 is a member that exchanges heat energy with the controlled object by placing and supporting the controlled object thereon. Specifically, a passage (temperature control unit 11) through which an incompressible fluid (preferably a liquid medium (liquid temperature medium) that mediates exchange of heat energy) flows is provided inside the temperature control plate 10. The temperature of the temperature control plate 10 is adjusted by the temperature of the fluid. Note that the control target includes, for example, a precision device to be manufactured.

  The fluid that has flowed through the temperature control plate 10 is output to the branch portion 18 via the return passage 16. A cooling passage 20, a bypass passage 30 and a heating passage 40 are connected to the branch portion 18.

  The cooling passage 20 is a passage for cooling the fluid flowing in from the branch portion 18 and flowing it out to the joining portion 12. A cooling part 22 is provided in the cooling passage 20 so as to cover a part thereof. The cooling unit 22 cools the fluid flowing in from the branching unit 18. Specifically, the cooling unit 22 is provided with a passage through which fluid (water, oil, refrigerant, etc.) cooled to a predetermined temperature flows, and the fluid in the cooling passage 20 is cooled by this fluid. It has become. The cooling passage 20 has a passage structure that is bent between the upstream end portion and the downstream end portion of the cooling portion 22, thereby expanding the volume of the cooling passage 20 in the cooling portion 22. Instead of this bending structure, for example, the volume in the cooling unit 22 may be increased by increasing the flow path area only in the cooling unit 22. In the above description, “upstream” and “downstream” are based on the flow direction of the fluid, and are the rear and front of the flow direction, respectively.

  A cooling valve 24 that continuously adjusts the flow passage area in the cooling passage 20 is provided on the upstream side of the cooling section 22 in the cooling passage 20. Further, on the downstream side of the cooling section 22 in the cooling passage 20, a cooling temperature sensor 26 that detects the temperature of the fluid in the cooling passage 20, and the mass flow rate or volume flow rate of the fluid in the cooling passage 20 are detected. A cooling flow meter 28 is provided.

  In addition, it is desirable that the flow passage area of the cooling passage 20 is substantially constant on the downstream side of the cooling unit 22.

  On the other hand, the bypass passage 30 is a passage for allowing the fluid flowing in from the branch portion 18 to flow out to the temperature control portion 11 through the junction portion 12 as it is. A bypass valve 34 for continuously adjusting the flow path area in the bypass passage 30 is provided on the upstream side of the bypass passage 30. A bypass temperature sensor 36 that detects the temperature of the fluid in the bypass passage 30 and a mass flow rate or volume flow rate of the fluid in the bypass passage 30 are detected on the downstream side of the bypass valve 34 in the bypass passage 30. And a bypass flow meter 38 is provided.

  The heating passage 40 is a passage for heating the fluid flowing in from the branching portion 18 to flow out to the joining portion 12. A heating section 42 is provided in the heating passage 40 so as to cover a part thereof. The heating unit 42 heats the fluid flowing in from the branching unit 18. Specifically, the heating section 42 is provided with a passage through which fluid (water, oil, heat medium, etc.) heated to a predetermined temperature flows, and the fluid in the heating passage 40 is heated by this fluid. It has become. The heating passage 40 has a flow path structure that is bent between the upstream end portion and the downstream end portion of the heating portion 42, thereby expanding the volume of the heating passage 40 in the heating portion 42. Instead of this bent structure, for example, the volume in the heating unit 42 may be increased by increasing the flow channel area only in the heating unit 42.

  A heating valve 44 that continuously adjusts the flow passage area in the heating passage 40 is provided on the upstream side of the heating section 42 in the heating passage 40. A heating temperature sensor 46 that detects the temperature of the fluid in the heating passage 40 and a mass flow rate or a volumetric flow rate of the fluid in the heating passage 40 are detected downstream of the heating valve 44 in the heating passage 40. A heating flow meter 48 is provided.

  In addition, as for the heating channel | path 40, it is desirable for the flow path area to be substantially constant in the downstream from the heating part 42. FIG.

  The cooling passage 20, the bypass passage 30, and the heating passage 40 are connected at the junction 12 located downstream thereof. Here, the flow area in the merging portion 12 and the flow area between the merging portion 12 and the temperature adjusting portion 11 are the flow passage areas of the cooling passage 20, the bypass passage 30, and the heating passage 40 within a range that does not reduce the flow velocity of the fluid. It is desirable not to expand as much as possible. That is, the flow path area between the merging portion 12, the merging portion 12, and the temperature adjusting portion 11 is caused by the volume so as not to reduce the flow velocity of the fluid flowing out from the cooling passage 20, the bypass passage 30, and the heating passage 40 as much as possible. It is desirable to set so that stagnation of the fluid to be suppressed can be suppressed. For example, the flow path area between the merging portion 12 and the merging portion 12 and the temperature adjusting portion 11 is “1.5” as the flow passage area of each of the cooling passage 20, the bypass passage 30 and the heating passage 40. It can be realized by setting it to be twice or less.

  A pump 14 is provided between the merging unit 12 and the temperature control unit 11 as a flow means for causing the fluid to flow in order to circulate the fluid. Here, the pump 14 includes, for example, a diaphragm pump, a vortex pump, a cascade pump, or the like. Furthermore, a damper 13 is connected to the passage between the junction 12 and the pump 14. The damper 13 includes a container filled with fluid. Although this container is filled with fluid, there is a gap in the upper part, and gas is injected. For this reason, even if the volume change of the fluid resulting from the temperature change occurs, this change is absorbed by the gas as the compressive fluid. This prevents the fluid flow from being hindered by the fluid volume change. Incidentally, the damper 13 releases the air to the atmosphere when the pressure of the gas in the container becomes equal to or higher than a predetermined pressure, and reduces the atmosphere by reducing the pressure of the gas in the container to a specified pressure lower than the predetermined pressure. A breathing valve 13a for inhalation is provided. In the figure, as the breathing valve 13a, a configuration schematically including a pair of check valves is illustrated, but actually, it is desirable to include a diaphragm valve body and the like. In addition, it is desirable that the flow direction of the fluid between the merging portion 12 and the temperature adjusting portion 11 and the traveling direction of the connection passage between the damper 13 and the fluid flowing in the direction from the merging portion 12 to the temperature adjusting portion 11 should be approximately orthogonal. . Further, it is desirable that the flow path area of the connection passage is approximately equal to or less than the flow path area of the fluid flow path between the merging section 12 and the temperature control section 11.

  An output temperature sensor 51 that detects the temperature of the fluid output to the temperature adjustment unit 11 is provided between the merging unit 12 and the temperature adjustment unit 11.

  On the other hand, the control device 50 operates the cooling valve 24, the bypass valve 34, and the heating valve 44 according to a request value (required temperature Tr) of the temperature to be controlled from the outside, thereby controlling the temperature adjustment unit 11. The temperature of the fluid inside is adjusted, and thereby the temperature of the controlled object on the temperature control plate 10 is indirectly controlled. At this time, the control device 50 includes the cooling temperature sensor 26, the bypass temperature sensor 36, the heating temperature sensor 46, the cooling flow meter 28, the bypass flow meter 38, the heating flow meter 48, the output temperature sensor 51, and the like. The detected value is referred to as appropriate.

  The control device 50 outputs an operation signal output from the driver unit based on detection values of the driver unit for driving the cooling valve 24, the bypass valve 34, and the heating valve 44, and the various detection means. And a calculation unit for calculation. This computing unit may be configured by dedicated hardware means, or may be configured with a microcomputer. Furthermore, you may comprise with a personal computer with versatility, and the program for making this operate.

  According to the temperature control device, the temperature in the temperature control unit 11 can be quickly changed according to the change in the required temperature Tr. That is, in the range where the required temperature Tr is equal to or higher than the temperature of the fluid in the cooling passage 20 and equal to or lower than the temperature of the fluid in the heating passage 40, the cooling passage 20, bypass By adjusting the flow rate of the fluid from the passage 30 and the heating passage 40, the temperature in the temperature control unit 11 can be quickly changed to a desired temperature.

  Further, the temperature control device includes the bypass passage 30, so that it is possible to reduce the energy consumption when maintaining the temperature in the temperature control unit 11 at a predetermined level. This will be described below.

  Now, the fluid circulating through the temperature adjustment unit 11 is water, the temperature in the cooling passage 20 is “10 ° C.”, the temperature in the heating passage 40 is “70 ° C.” Let the flow rate of the fluid flowing through "20L / min". Further, when the detection value Td of the output temperature sensor 51 is controlled to “40 ° C.” to realize a steady state, and the temperature of the fluid flowing out from the temperature control unit 11 has increased to “43 ° C.” To do. In this case, it is possible to control the temperature by allowing the fluid in the cooling passage 20 and the bypass passage 30 to flow out to the temperature adjustment unit 11 and not using the fluid in the heating passage 40. Consider the energy consumption at this time.

  Now, assuming that the flow rate of the fluid flowing out from the cooling passage 20 to the temperature control unit 11 is “Wa”, the following equation is established.

20 (L / min) x 40 (° C)
= 10 (° C) × Wa + 43 (° C) × (20−Wa)
From now on, Wa ≒ "1.8L / min"
For this reason, the energy consumption Qa consumed in the cooling unit 22 is as follows.

Qa = (43−10) × 1.8 × 60 (seconds) ÷ (860: conversion coefficient)
= 4.1kW
On the other hand, in the case where the bypass passage 30 is not provided, the energy consumption Qa of the cooling unit 22 and the energy consumption Qc of the heating unit 42 are as follows.

Qa = (43-10) × 10 (L / min) × 60 (seconds) ÷ 860≈23 kW
Qc = (70-43) × 10 (L / min) × 60 (seconds) ÷ 860≈19 kW
Therefore, the energy consumption amount Q is “42 kW”, which is approximately “10” times that when the bypass passage 30 is provided.

  Next, temperature control performed by the control device 50 according to the present embodiment will be described in detail. FIG. 2 shows a processing procedure of feedback control among the processing performed by the control device 50. This process is repeatedly executed by the control device 50 at a predetermined cycle, for example.

  In this series of processing, first, in step S10, it is determined whether or not it is during open loop control. This process is to determine whether or not an execution condition for feedback control is satisfied. Here, the open loop control is performed under conditions described later, and at this time, feedback control is not performed.

  If a negative determination is made in step S10, the detection value Td of the output temperature sensor 51 is acquired in step S12. In subsequent step S14, a basic operation amount MB for feedback control of the detection value Td to the target value Tt is calculated. Here, the target value Tt is a value determined based on the required temperature Tr, and is set as the required temperature Tr during feedback control. The basic operation amount MB is an amount calculated based on the degree of deviation of the detection value Td from the target value Tt. Specifically, in the present embodiment, the basic operation amount MB is calculated by PID (proportional integral differentiation) calculation of the difference Δ between the detected value Td and the target value Tt.

  In the subsequent step S16, the basic operation amount MB is converted into each operation amount (openings Va, Vb, Vc) of the cooling valve 24, the bypass valve 34, and the heating valve 44. Here, the relationship shown in FIG. 3 is used. Here, when the basic operation amount MB is less than zero, the opening degree Va of the cooling valve 24 monotonously decreases as the basic operation amount MB increases, and when the basic operation amount MB is greater than or equal to zero. Becomes “0”. This is a setting for not using the cooling passage 20 when the flow rate of the cooling passage 20 is increased as the detection value Td is higher than the target value Tt and the detection value Td is equal to or less than the target value Tt. When the basic operation amount MB is larger than zero, the opening Vc of the heating valve 44 monotonously increases as the basic operation amount MB increases, and when the basic operation amount MB is less than or equal to zero, “0”. This is a setting for not using the heating passage 40 when the flow rate of the heating passage 40 is increased as the detection value Td is lower than the target value Tt and the detection value Td is equal to or higher than the target value Tt. Further, the opening degree Vb of the bypass valve 34 decreases monotonously as the basic operation amount MB increases from zero. In FIG. 3, it is desirable to set each opening so that the total flow rate flowing out from the three passages does not change depending on the value of the basic operation amount MB.

  According to such a setting, the cooling valve 24, the bypass valve 34, and the heating valve 44 3 are based on the basic operation amount MB calculated by a single PID calculation of the difference Δ between the detection value Td and the target value Tt. The operating amount of one valve can be set.

  When the process of step S16 of FIG. 2 is completed, the three valves of the cooling valve 24, the bypass valve 34, and the heating valve 44 are operated in step S18. When a negative determination is made at step S10 or when the process at step S18 is completed, this series of processes is temporarily terminated.

  By using feedback control in this way, the detection value Td can be made to follow the target value Tt with high accuracy. However, in order to improve the responsiveness of the detection value Td to the change in the target value Tt by feedback control, a request to increase the feedback control gain occurs. On the other hand, when the gain is increased, the detection value Td increases or decreases above the target value Tt. The amount of fluctuation that fluctuates becomes larger. As described above, in the feedback control, the improvement in the responsiveness to the change in the target value Tt and the reduction in the fluctuation amount of the detection value Td are in a trade-off relationship. For this reason, responsiveness is sacrificed when the fluctuation amount is reduced. FIG. 4 shows changes in the detected value Td and the temperature of the controlled object when feedback control is used when the target value Tt changes.

  As shown in the figure, a response delay occurs until the detected value Td reaches the target value Tt, and a longer time is required until the temperature of the controlled object follows the target value Tt. This is because the temperature of the temperature control unit 11 changes in order for the temperature of the controlled object to change, and the temperature of the temperature control plate 10 changes through the exchange of thermal energy between the temperature control plate 10 and the temperature control unit 11. This is because heat energy must be exchanged between the temperature control plate 10 and the controlled object. For this reason, if the feedback control is set so as to reduce the fluctuation amount of the detection value Td, it becomes difficult to cause the temperature of the controlled object to quickly follow the target value Tt by the feedback control. Therefore, in the present embodiment, open loop control is used when the externally required temperature Tr changes. Further, at this time, the target value Tt is once changed to be larger than the change in the required temperature Tr.

  FIG. 5 shows a procedure for setting the target value Tt during the transition according to the present embodiment. This process is repeatedly executed by the control device 50 at a predetermined cycle, for example.

  In this series of processes, first, in step S20, it is determined whether or not a bias control execution flag, which is a flag for executing bias control for temporarily changing the target value Tt, is on. And when it is OFF, it transfers to step S22. In step S22, it is determined whether or not the absolute value of the change amount ΔTr of the required temperature Tr is greater than or equal to the threshold value α. This process is for determining whether or not the temperature of the control target cannot quickly follow the change in the request by the feedback control shown in FIG. If it is determined that the value is greater than or equal to the threshold value α, in step S24, the bias control flag is turned on and a time measuring operation for measuring the bias control time is started.

  When the process of step S24 is completed or when an affirmative determination is made in step S20, it is determined in step S26 whether or not the change amount ΔTr is larger than zero. This process is to determine whether or not a request for increasing the temperature has occurred. If it is determined that the change amount ΔTr is greater than zero, the process proceeds to step S28. In step S28, the target value Tt is set to a value obtained by subtracting a predetermined offset value β from the temperature of the fluid in the heating passage 40. Here, as the target value Tt is approximated to the temperature in the heating passage 40, the temperature of the controlled object can be quickly increased. However, when the target value Tt is higher than the temperature in the heating passage 40, control cannot be performed. The temperature in the heating passage 40 can be changed by circulating the fluid through the heating passage 40. For this reason, the target value Tt is set lower than the temperature in the heating passage 40 by the offset value β.

  On the other hand, if it is determined in step S26 that the variation ΔTr is less than or equal to zero, the target value Tt is set to a value that is higher than the temperature of the fluid in the cooling passage 20 by a predetermined offset value γ in step S30. To do. Here, the setting of the offset value γ has the same meaning as the setting of the offset value β.

  The setting of the target value Tt by the processes in steps S28 and S30 is continued over the bias duration time Tbi (step S32). When the bias duration time Tbi elapses, the target value Tt is set as the required temperature Tr in step S34. Further, the bias control flag is turned off and the timing operation for measuring the bias control time is ended. When the process of step S34 is completed or when a negative determination is made in steps S22 and S32, this series of processes is temporarily terminated.

  FIG. 6 shows a processing procedure of temperature control at the time of transition according to the present embodiment. This process is repeatedly executed by the control device 50 at a predetermined cycle, for example.

  In this series of processing, first, in step S40, it is determined whether or not an open loop control flag, which is a flag for performing open loop control, is turned on. If the open loop control flag is not on, the process proceeds to step S42. In step S42, it is determined whether or not the absolute value of the change amount ΔTt of the target value Tt is greater than or equal to the threshold value ε. If it is determined that the value is greater than or equal to the threshold value ε, in step S44, the open loop control flag, which is a flag for performing the open loop control, is turned on, and the time counting operation for measuring the open loop control time is started. To do.

  Then, when the process of step S44 is completed or when an affirmative determination is made in step S40, the process proceeds to step S46. In step S46, it is determined whether or not the target value Tt is higher than the temperature Tb of the fluid in the bypass passage 30 detected by the bypass temperature sensor 36. This process determines whether to perform open loop control using the bypass passage 30 and the heating passage 40 or to perform open loop control using the bypass passage 30 and the cooling passage 20.

  When it is determined that the target value Tt is higher than the temperature Tb of the fluid in the bypass passage 30, the process proceeds to step S48. In step S <b> 48, open loop control is performed using the bypass passage 30 and the heating passage 40. That is, if the target value Tt is higher than the temperature Tb of the fluid in the bypass passage 30, the use of the cooling passage 20 only wastes energy. Therefore, the open loop control is performed using the bypass passage 30 and the heating passage 40. . Specifically, the temperature Tc of the heating temperature sensor 46, the flow rate Fc of the heating flow meter 48, the temperature Tb of the bypass temperature sensor 36, and the flow rate Fb of the bypass flow meter 38 are used to reach the temperature control unit 11. The heating valve 44 and the bypass valve 34 are operated so that the temperature of the output fluid becomes the target value Tt. Specifically, the heating valve 44 and the bypass valve 34 are operated so that the following expression is established.

Tt × (Fc + Fb) = Tc × Fc + Tb × Fb
On the other hand, when it is determined in step S46 that the target value Tt is equal to or lower than the temperature Tb of the fluid in the bypass passage 30, the process proceeds to step S50. In step S <b> 50, open loop control is performed using the bypass passage 30 and the cooling passage 20. That is, if the target value Tt is equal to or lower than the temperature Tb of the fluid in the bypass passage 30, the use of the heating passage 40 only wastes energy, so the open loop control is performed using the bypass passage 30 and the cooling passage 20. Specifically, using the temperature Ta of the cooling temperature sensor 26 and the flow rate Fa of the cooling flow meter 28, the temperature Tb of the bypass temperature sensor 36 and the flow rate Fb of the bypass flow meter 38, the temperature adjustment unit 11 is reached. The cooling valve 24 and the bypass valve 34 are operated so that the temperature of the output fluid becomes the target value Tt. Specifically, the cooling valve 24 and the bypass valve 34 are operated so that the following expression is established.

Tt × (Fa + Fb) = Ta × Fa + Tb × Fb
When the processes of steps S48 and S50 are completed, the process proceeds to step S52. In step S52, it is determined whether or not a predetermined period Top has elapsed. Here, the predetermined period Top determines the time for which the open loop control is continued. In the present embodiment, the predetermined period Top is set to a time longer than the bias duration time Tbi so as not to shift to feedback control within the bias duration time Tbi set by the processing shown in FIG. ing. If it is determined that the predetermined period Top has elapsed, in step S54, the open loop control flag is turned off, and the timing operation for counting the open loop control time is ended.

  When the process of step S54 is completed or when a negative determination is made in steps S42 and S52, this series of processes is temporarily ended.

  FIG. 7 shows a temperature control mode when the processes of FIGS. 6 and 5 are used together. As shown in the figure, compared with the case shown in FIG. 4, the temperature of the controlled object can be made to quickly follow the target value Tt.

  According to the embodiment described in detail above, the following effects can be obtained.

  (1) A heating passage 40 that heats the fluid and circulates it to the temperature adjustment unit 11, a cooling passage 20 that cools the fluid and circulates it to the temperature adjustment unit 11, and a fluid without passing through the heating passage 40 and the cooling passage 20 A bypass passage 30 that circulates to the temperature control unit 11, and a heating valve 44, a cooling valve 24, and a bypass valve 34 that adjust the flow passage areas of the heating passage 40, the cooling passage 20, and the bypass passage 30. Prepared. Thereby, when controlling the temperature of a control object as desired, the temperature of the control object can be made to follow a desired temperature rapidly.

  (2) The pump 14 is provided on the downstream side of the heating section 42 for heating the fluid in the heating passage 40. Thereby, the rise in the pressure of the heating passage 40 located in the heating part 42 can be suppressed by the influence of the suction force of the fluid by the pump 14. For this reason, the pressure | voltage resistance requested | required of the heating channel 40 in the heating part 42 can be reduced.

  (3) The heating valve 44 is provided on the upstream side of the heating unit 42. Thereby, it can avoid suitably that the effect which the pump 14 reduces the pressure of the heating passage 40 located in the heating part 42 by the heating valve 44 is prevented.

  (4) The damper 13 as a volume change absorbing means having a function of absorbing a volume change of the fluid due to temperature is provided upstream of the pump 14. Thereby, even if the volume of the fluid changes, the circulation of the fluid can be suitably maintained.

  (5) A pump 14 is provided on the downstream side of the junction 12. Thereby, the fluid can be suitably circulated through the cooling passage 20, the bypass passage 30 and the heating passage 40 by the single pump 14.

  (6) Fluid is output from both the heating passage 40 and the bypass passage 30 to the temperature adjustment unit 11, and the fluid is output from both the cooling passage 20 and the bypass passage 30 to the temperature adjustment unit 11. And the bypass passage 30 used when the operation is performed. Thereby, when the fluid is output from the heating passage 40 and the bypass passage 30 to the temperature adjustment unit 11, and when the fluid is output from the cooling passage 20 and the bypass passage 30 to the temperature adjustment unit 11, the common bypass passage 30 can be used. For this reason, the structure of a temperature control apparatus can be simplified compared with the case where each separate bypass passage must be used.

  (7) The detection value Td by the output temperature sensor 51 that detects the temperature of the fluid near the temperature control unit 11 is feedback-controlled to the target value Tt. Thereby, the detection value Td can be made to follow the target value Tt with high accuracy.

  (8) In the above feedback control, the basic operation amount MB based on the degree of deviation of the detection value Td from the target value Tt is set to the flow path area operation amount (opening degree) of each of the heating passage 40, the cooling passage 20, and the bypass passage 30. (Va, Vb, Vc). Thereby, the flow passage areas of the three passages can be adjusted (operated) based on the single basic operation amount MB.

  (9) The temperature of the fluid in the vicinity of the temperature adjustment unit 11 based on the detection value of the bypass temperature sensor 36 that detects the temperature of the bypass passage 30 instead of feedback control over a predetermined period after the target value Tt changes. The open loop control. As a result, even when the feedback control is set so as to suppress the fluctuation amount in which the detection value Td fluctuates above and below the target value Tt, the responsiveness when the target value Tt changes can be improved.

  (10) When the temperature of the fluid in the bypass passage 30 is higher than the target value Tt, the open loop control is performed by manipulating the flow passage areas of the bypass passage 30 and the cooling passage 20. When the temperature was lower than the target value Tt, the flow passage areas of the bypass passage 30 and the heating passage 40 were operated. Thereby, open loop control can be performed while reducing energy consumption as much as possible.

  (11) When the request regarding the temperature of the temperature control unit 11 changes, the target value Tt is changed more greatly than the change in the request. Thereby, the temperature control part 11 and the temperature of a control object can change more rapidly to the required temperature side.

(Second Embodiment)
Hereinafter, the second embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  FIG. 8 shows the overall configuration of the temperature control apparatus according to the present embodiment. As shown in the drawing, in the present embodiment, an outflow passage 60 that bypasses the cooling valve 24 and flows the fluid is connected between the cooling passage 20 upstream and downstream of the cooling valve 24. In addition, an outflow passage 62 that bypasses the heating valve 44 and flows a fluid is connected between the heating passage 40 upstream and downstream of the heating valve 44.

  These outflow passages 60 and 62 are both sufficiently smaller than the flow passage areas of the cooling passage 20 and the heating passage 40. This is because the outflow passages 60 and 62 allow the fluid to flow out minutely from the upstream side to the downstream side of the cooling passage 20 and the heating passage 40 when the cooling valve 24 and the heating valve 44 are closed. It depends.

  That is, when the outflow of the fluid from the heating passage 40 or the cooling passage 20 to the temperature control unit 11 is prohibited, the heating portion 42 or the cooling portion 22 of the heating passage 40 or the cooling passage 20 and the vicinity of the merging portion 12. A temperature gradient occurs between them. For this reason, immediately after the prohibition is released, the temperature of the fluid flowing out to the temperature adjustment unit 11 is affected by the temperature gradient, and therefore the time required to cause the temperature of the temperature adjustment unit 11 to follow the desired temperature. There is a risk of prolonged time. In this case, since the temperature of the cooling temperature sensor 26 and the heating temperature sensor 46 is affected by this temperature gradient, the temperature in the cooling section 22 of the cooling passage 20 and the heating section of the heating passage 40 The temperature separated from the temperature in 42 is detected. For this reason, the controllability of the open loop control when the target value Tt changes may be reduced.

  On the other hand, in this embodiment, by providing the outflow passages 60 and 62, the temperature gradient on the downstream side of the heating passage 40 and the cooling passage 20 can be obtained when the heating valve 44 and the cooling valve 24 are closed. Therefore, the temperature of the temperature control unit 11 can be quickly followed by a desired temperature.

  According to this embodiment described above, in addition to the effects (1) to (11) of the first embodiment, the following effects can be obtained.

  (12) Outflow passages 60 and 62 that bypass the cooling valve 24 and the heating valve 44 are provided. Thereby, the temperature control when the target value Tt changes can be performed more appropriately.

(Third embodiment)
Hereinafter, the third embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  FIG. 9 shows the relationship between the basic operation amount MB according to the present embodiment and the opening degrees Va, Vb, and Vc of the cooling valve 24, the bypass valve 34, and the heating valve 44. As shown in the figure, in this embodiment, the opening degree Va of the cooling valve 24 and the opening degree Vc of the heating valve 44 are set so as not to be fully closed. That is, when the basic operation amount MB is less than zero, the opening degree Va of the cooling valve 24 monotonously decreases as the basic operation amount MB increases, and when the basic operation amount MB is greater than or equal to zero. The minimum opening (> 0). When the basic operation amount MB is larger than zero, the opening Vc of the heating valve 44 monotonously increases as the basic operation amount MB increases, and when the basic operation amount MB is less than or equal to zero, The minimum opening (> 0).

  Accordingly, the cooling when the temperature control in the temperature control unit 11 is stable mainly due to the outflow of the fluid from the bypass passage 30 without providing the outflow passages 60 and 62 shown in FIG. The temperature gradient on the upstream side of the valve 24 for heating and the valve 44 for heating can be suppressed.

  According to this embodiment described above, in addition to the effects (1) to (11) of the first embodiment, the following effects can be obtained.

  (13) The opening degree Va of the cooling valve 24 and the opening degree Vc of the heating valve 44 are set so as not to be fully closed. Thereby, the temperature gradient on the upstream side of the cooling valve 24 and the heating valve 44 can be suppressed, and as a result, the temperature of the temperature control unit 11 can be made to follow the desired temperature more quickly.

(Fourth embodiment)
Hereinafter, the fourth embodiment will be described with reference to the drawings with a focus on differences from the first embodiment.

  In the first embodiment, when the target value Tt changes, the temperature in the vicinity of the temperature adjustment unit 11 is controlled by open-loop control so that the temperature of the controlled object quickly follows the desired value. The control gain of the open loop control, the bias duration time Tbi, and the optimum value of the predetermined period Top for continuing the open loop control may vary depending on the temperature control plate 10 and the controlled object. On the other hand, if these parameters are manually changed every time the user changes the control target, the labor required for the adaptation becomes large. Therefore, in this embodiment, the adaptation support function is mounted on the control device 50. FIG. 10 shows a processing procedure of adaptation support according to the present embodiment. This process is repeatedly executed by the control device 50 at a predetermined cycle, for example.

  In this series of processes, first, in step S70, it is determined whether or not it is a mode (test mode) in which the open loop control is adapted. Here, for example, the presence or absence of the test mode may be determined by providing the operation unit of the control device 50 with a function for the user to instruct the test mode. If it is determined that the test mode is set, in step S72, the bias duration Tbi candidates are displayed on a display means that is visible to the user. Here, the candidates for the bias duration time Tbi are set in advance in a range that can be an appropriate value for the control target assumed in the temperature control device.

  In a succeeding step S74, it is determined whether or not the bias duration time Tbi has been input. This process determines whether or not the user has selected one of the candidates for the bias duration time Tbi. And when it is judged that the specific candidate was selected by the user (step S74: YES), temperature control is started using the selected candidate in step S76. When the temperature control is completed, in step S78, the user is inquired about whether or not to determine the bias duration time Tbi via the display means visible to the user. And when the intention display to the effect of not determining is input from a user (step S80: NO), the process of said step S72-S78 is performed again.

  On the other hand, when an instruction is input from the user to make any of the candidates selected so far as the final bias duration Tbi (step S80: YES), the bias duration Tbi is set in step S82. Remember. When the process of step S82 is completed or when a negative determination is made in step S70, this series of processes is temporarily ended.

  According to this embodiment described above, in addition to the effects (1) to (11) of the first embodiment, the following effects can be obtained.

  (14) An open loop control adaptation support function is provided that prompts the outside to select any one of a plurality of options for the bias duration time Tbi and performs temperature control according to the selected value. Thereby, the user at the time of a temperature control apparatus can reduce the effort at the time of adapting open loop control according to a control object.

(Other embodiments)
Each of the above embodiments may be modified as follows.

  -You may change the said 2nd, 3rd embodiment by the change from the said 1st Embodiment of the said 4th Embodiment.

  In the fourth embodiment, the adaptation parameter for performing adaptation support for open loop control is the bias duration Tbi, but is not limited thereto. For example, the duration of the open loop control (predetermined period Top) may be used as the adaptation parameter. Further, for example, the target value setting (offset values β, γ) in the bias control shown in FIG. Further, a plurality of these parameters may be used as the conforming parameters.

  In the fourth embodiment, the adaptation is supported so that the user can select an appropriate adaptation parameter according to the control target. However, the adaptation method is not limited to this. For example, when temperature control is performed by arbitrarily setting initial values for the bias duration time Tbi, the predetermined period Top, and the offset values β and γ, the temperature to be controlled (or the temperature of the temperature control plate 10) is set. Monitoring may be performed to automatically change at least one of the above parameters when the follow-up delay time to the target value is not within the allowable range. According to this, since the open loop control can be automatically adapted so that the follow-up delay time to the target value is within the allowable range, the user's labor can be further reduced.

  In each of the above embodiments, the fluid temperature detection value Td downstream of the merging unit 12 and upstream of the temperature control unit 11 is feedback-controlled to the target value Tt, but the present invention is not limited to this. For example, the detected value of the temperature of the fluid in the temperature control unit 11 may be feedback controlled to the target value Tt. For example, the detected value of the temperature of the fluid output from the temperature adjustment unit 11 may be feedback controlled to the target value Tt.

  In each of the above embodiments, the pump 14 and the damper 13 are provided downstream of the merging portion 12, but the present invention is not limited to this. For example, each of the cooling passage 20, the bypass passage 30 and the heating passage 40 may be provided with a separate pump and damper. In this case, for example, the bypass passage 30 may include a pump and a damper on the upstream side of the bypass valve 34. For example, the cooling passage 20 may be provided with a pump and a damper between the cooling unit 22 and the cooling valve 24. Further, the cooling passage 20 may be provided with a pump and a damper on the upstream side of the cooling valve 24. Even in such a case, by providing a pump downstream of the heating section 42 of the heating passage 40, an increase in the pressure of the heating passage 40 can be suppressed, and consequently the pressure resistance required for the heating passage 40 can be reduced. Can do.

  -In each above-mentioned embodiment, although cooling passage 20, bypass passage 30, and heating passage 40 were merged at one place, it is not restricted to this. For example, after the cooling passage 20 and the bypass passage 30 are merged, the heating passage 40 and these may be merged downstream thereof. Even in such a case, it is desirable that the flow path area of the merging portion be as small as possible so as not to reduce the flow velocity of the fluid flowing in via the heating passage 40, the cooling passage 20, and the bypass passage 30 as much as possible. Here, the flow rate of the fluid is the traveling speed of the fluid in the flow direction.

  The method of converting the basic operation amount MB into the operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 is not limited to those shown in FIGS. 3 and 9, any two of the cooling valve 24, the bypass valve 34, and the heating valve 44 are operated with respect to the change of the temperature difference Δ between the target value Tt and the detection value Td. Although the amount is changed, the present invention is not limited to this. For example, all the operation amounts may be changed. Further, in FIGS. 3 and 9, the operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 are set to be a 0th-order or first-order function of the temperature difference Δ. Not limited. In the case where the relationship between the change in the valve opening and the change in the flow rate is nonlinear, it is particularly desirable that each manipulated variable is a nonlinear function of the temperature difference Δ.

  In the third embodiment, the cooling valve 24 and the heating valve 44 are prohibited from being fully closed regardless of the value of the basic operation amount MB. However, the present invention is not limited to this. The cooling valve 24 and the heating valve 44 may be prohibited from being fully closed only when the basic operation amount MB is close to zero. That is, it is considered that the detected value Td follows the target value Tt and the detected value Td is in a steady state before the required temperature Tr changes. Therefore, only in this case, to prepare for the change of the target value Tt, The cooling valve 24 and the heating valve 44 may be prohibited from being fully closed only when the basic operation amount MB is near zero. At this time, if the basic operation amount MB is smaller than zero, the change amount of the operation amount of the cooling valve 24 is set larger than the change amount of the operation amount of the heating valve 44 and the basic operation amount is changed. When the amount MB is larger than zero, it is desirable that the change amount of the operation amount of the heating valve 44 is larger than the change amount of the operation amount of the cooling valve 24.

  In each of the above-described embodiments, the predetermined period Top for continuing the open loop control and the bias duration Tbi are set independently, but the present invention is not limited to this, and they may be matched.

  -Feedback control is not limited to PID control. For example, PI control or I control may be used. Here, for example, in the configuration in which the open loop control is performed at the time when the target value changes as in each of the above embodiments, the purpose of the feedback control coincides with the detected value Td with the target value Tt with high accuracy in the normal state. Or to reduce the fluctuation of the detection value Td as much as possible. For this reason, it is particularly effective to feedback-control the detected value Td to the target value Tt based on the cumulative value of the amount indicating the degree of deviation between the detected value Td and the target value Tt as in the integral control.

  -As open loop control, it is not restricted to what was illustrated by the said embodiment. For example, the flow rate is obtained by using the relationship shown in FIG. 3 for the operation amounts (openings Va, Vb, Vc) and the basic operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44. The open loop control may be performed while grasping the above. Specifically, when the temperature of the fluid in the bypass passage 30 is higher than the target value Tt, the opening ratios of the cooling valve 24 and the bypass valve 34 are referred to the opening ratio shown in FIG. When the temperature of the fluid in the bypass passage 30 is lower than the target value Tt, the opening degree of the heating valve 44 and the bypass valve 34 is referred to the opening ratio shown in FIG. May be set. Specifically, when the temperature of the fluid in the bypass passage 30 is lower than the target value Tt, the flow rate ratio required for the heating passage 40 and the bypass passage 30 to obtain the target value Tt is the temperature of the heating passage 40. Using Tc and the temperature Tb of the bypass passage 30, “(Tt−Tb) :( Tc−Tt)” is obtained. For this reason, in FIG. 3, the valve for heating at the point where the basic operation amount MB is divided into the point where the basic operation amount MB is “0” and the maximum point by the ratio of “(Tt−Tb) :( Tc−Tt)”. By using the opening degree Vc of 44 and the opening degree Vb of the bypass valve 34, open loop control can be easily performed. In particular, according to this method, even if there is no linearity between the valve opening and the flow rate, the relationship shown in FIG. 3 is created reflecting the non-linear relationship between the valve opening and the flow rate. If so, the opening degree of each valve can be set easily and with high accuracy. Furthermore, according to this method, it is possible to avoid using a flow meter. Since the flow meter is immersed in the fluid, it is difficult to maintain reliability over a long period of use in the entire temperature range between the temperature of the fluid in the heating passage 40 and the temperature of the fluid in the cooling passage 20. Therefore, it is desirable to perform open-loop control easily without using a flow meter.

  Note that without using the opening ratio shown in FIG. 3, for example, when the temperature of the fluid in the bypass passage 30 is higher than the target value Tt, the opening degrees of the cooling valve 24 and the bypass valve 34 are set to the target values. You may set according to the ratio of the difference of the fluid temperature in the bypass passage 30 with respect to the value Tt, and the difference of the target value Tt with respect to the fluid temperature in the cooling passage 20. Similarly, when the temperature of the fluid in the bypass passage 30 is lower than the target value Tt, the opening degree of the heating valve 44 and the bypass valve 34 is set to the difference between the target value Tt and the fluid temperature in the bypass passage 30. You may set according to the ratio with the difference of the fluid temperature in the heating channel 40 with respect to target value Tt. Thereby, the valve opening degree when linearity is assumed between the valve opening degree and the flow rate can be set.

  -It is not restricted to what performs feedback control, You may perform only the open loop control illustrated to step S48, S50 of previous FIG. Further, regardless of whether the target value has changed, the final basic operation amount MB is calculated by correcting the basic operation amount determined by the open loop control exemplified in steps S48 and S50 of FIG. 6 by feedback control. May be. Conversely, only feedback control may be performed regardless of whether the target value has changed. Even in this case, when the required temperature Tr changes, the above-described bias control for changing the target value Tt to be larger than the required temperature Tr is effective. In other words, in feedback control, there is a trade-off between reducing response delay and reducing variation in detected value Td with respect to target value Tt. However, by performing bias control, instead of gain in feedback control. Since the response delay can be reduced, the response delay can be reduced while reducing the fluctuation. Furthermore, when the target value changes greatly, processing for temporarily increasing the gain of feedback control may be performed. This also makes it possible to achieve both reduction in response delay and reduction in fluctuations in the detection value Td with respect to the target value Tt.

  The feedback control is not limited to that performed by converting the required amount of feedback control (basic operation amount MB) into the operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44. For example, the operation amounts of the cooling valve 24, the bypass valve 34, and the heating valve 44 may be set independently based on the degree of deviation between the target value Tt and the detection value Td. However, even in this case, when the target value Tt is higher than the detection value Td, only the operation amounts of the bypass valve 34 and the cooling valve 24 are changed, and the target value Tt is higher than the detection value Td. When it is low, it is desirable to change only the operation amounts of the bypass valve 34 and the heating valve 44.

  In each of the above-described embodiments, the temperature control unit 11 from both the bypass channel 30 and the cooling channel 20 and the bypass channel 30 that are used when fluid is output from both the heating channel 40 and the bypass channel 30 to the temperature control unit 11. However, the present invention is not limited to this. For example, the fluid is output to the temperature adjustment unit 11 from both the bypass passage 30 and the cooling passage 20 and the bypass passage 30 that are used when the fluid is output from both the heating passage 40 and the bypass passage 30 to the temperature adjustment unit 11. Only a part of the bypass passage 30 used in the process may be shared. Furthermore, these may be used as separate passages. Even in this case, the effects (1) to (5) and (7) to (11) of the first embodiment can be obtained.

  As the volume change absorbing means having a function of absorbing the volume change of the fluid due to the temperature, as exemplified in each of the above embodiments, the space filled with the gas is filled without filling the inside of the container in which the fluid is filled with the fluid. It is not restricted to what is comprised by setting so that it may have. For example, the container may be configured to be filled with fluid without a gap, and the volume of the container may be changed according to the force applied by the fluid to the inner wall of the container. For example, the same member as the tank 100 shown in FIG. 12 may be used.

  In each of the above embodiments, as the adjusting means for adjusting the flow rate ratio of the fluid output from the cooling passage 20, the bypass passage 30, and the heating passage 40 to the temperature control plate 10, the cooling valve 24, the bypass valve 34, and Although the heating valve 44 is used, the present invention is not limited to this. For example, the channel area may be adjustable in stages. Further, for example, a plurality of these passages may be provided, and valves that perform a binary operation of opening and closing may be provided for each of these passages, and the number of passages for outputting fluid to the temperature control plate 10 may be set as the operation amount. Further, a plurality of passages may be prepared and each of the passages may be operated to be connected to the cooling unit 22, the heating unit 42, or the downstream side of the return passage 16.

  Further, as shown in FIG. 11, the cooling passage 20, the bypass passage 30 and the heating passage 40 are provided with pumps 70, 72 and 74, respectively, and their discharge capacities are individually operated to adjust the flow rate ratio. May be. FIG. 11 shows an example in which a damper 76 is provided between the pump 70 and the cooling unit 22, a damper 78 is provided on the upstream side of the pump 72, and a damper 80 is provided between the pump 74 and the heating unit 42. Here, the pumps 70, 72, and 74 may be any pump capable of operating the discharge amount, such as a vortex type or a positive displacement type. However, when the pumps 70, 72, and 74 are stopped so that the discharge amount is zero, if the fluid does not leak from the upstream side to the downstream side, the discharge amount is changed from zero to a positive value. Can be suitably controlled. Alternatively, a discharge amount of zero may be realized by providing a check valve at the discharge port of the pump. Of course, if a pump is used in which a small amount of fluid leaks from the upstream side to the downstream side when the pump is stopped, the effect according to the third embodiment can be obtained.

  In addition, the shape of the temperature control plate 10 is not limited to the rectangular shape, and may be a disk shape, for example. Furthermore, the temperature control unit 11 is not limited to one provided in a plate-like member capable of supporting the control target from vertically below, and controls the temperature by contacting a plurality of side surfaces of the control target, for example. Also good.

The figure which shows the whole structure of the temperature control apparatus concerning 1st Embodiment. The flowchart which shows the process sequence of the feedback control concerning the embodiment. The figure which shows the setting method of the operation amount of the valve | bulb for cooling, the valve | bulb for bypass, and the valve | bulb for heating concerning the embodiment. 4 is a time chart showing a change in temperature of a controlled object or the like when temperature control is performed only by feedback control in the embodiment. The flowchart which shows the procedure of the setting process of the target value in the embodiment. The flowchart which shows the process sequence of the open loop control in the embodiment. The time chart which shows transition of the temperature of the control object etc. at the time of using together the said open loop control. The figure which shows the whole structure of the temperature control apparatus concerning 2nd Embodiment. The figure which shows the setting method of the operation amount of the valve for cooling concerning 3rd Embodiment, the valve for bypass, and the valve for heating. The flowchart which shows the procedure of the adaptation support process of the open loop control concerning 4th Embodiment. The figure which shows the whole structure of the temperature control apparatus concerning the modification of each said embodiment. The figure which shows the structure of the conventional temperature control apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Temperature control part, 20 ... Cooling passage, 22 ... Cooling part, 24 ... Cooling valve, 30 ... Bypass passage, 34 ... Bypass valve, 40 ... Heating passage, 42 ... Heating part, 44 ... Heating valve, 50 ... Control device (one embodiment of operation means).

Claims (12)

In a temperature control device for controlling the temperature of the control target as desired by circulating a fluid through a temperature control unit arranged near the control target,
A heating passage for heating the fluid and circulating it to the temperature control unit;
A cooling passage for cooling the fluid and circulating it to the temperature control unit;
A bypass passage for circulating the fluid to the temperature control unit without passing through the heating passage and the cooling passage;
Adjusting means for adjusting a flow rate ratio of the fluid output from the heating passage, the cooling passage, and the bypass passage to the temperature adjustment unit;
Flow means for flowing the fluid to circulate the fluid,
The heating passage is provided with a heating unit for heating the fluid,
It said flow means, Ri Na provided on the downstream side of the heating portion of the circulation path of the fluid,
The adjusting means includes means for adjusting the flow rate of the fluid output from the heating passage to the temperature control section, and the means is provided upstream of the heating section. Control device. The circulation path of the fluid, the temperature control apparatus according to claim 1 Symbol mounting, characterized in that it comprises a volume change absorption means having a function of absorbing the volume change of the fluid with temperature. 3. The temperature according to claim 1, wherein the heating passage and the cooling passage are provided with an outflow passage that bypasses the adjusting means and causes the fluid to flow out from the upstream side to the downstream side. Control device. Used when fluid is output from both the heating passage and the bypass passage to the temperature control unit, and when the fluid is output from both the cooling passage and the bypass passage to the temperature control unit. temperature control device according to any one of claims 1 to 3, and a bypass passage which is is characterized in that it comprises a common passageway. To control the temperature of the fluid in the vicinity of the temperature control unit to the target value, the temperature control device according to any one of claims 1 to 4, further comprising operating means for operating the adjustment means. 6. The temperature control apparatus according to claim 5 , wherein the operation means feedback-controls a detection value by an output temperature detection means for detecting the temperature of the fluid in the vicinity of the temperature adjustment unit to the target value. The adjusting means is means for adjusting the flow passage areas of the heating passage, the cooling passage, and the bypass passage,
The operation means includes conversion means for converting an amount based on a degree of deviation of the detected value from the target value into an operation amount of each of the heating passage, the cooling passage, and the bypass passage. The temperature control apparatus according to claim 6, characterized in that: The operating means is a fluid in the vicinity of the temperature adjustment unit based on a detected value of a bypass temperature detecting means for detecting the temperature of the bypass passage instead of the feedback control over a predetermined period after the target value changes. The temperature control apparatus according to claim 6 or 7 , wherein the adjusting means is operated so as to perform open-loop control of the temperature of the apparatus. In the open loop control, when the temperature of the fluid in the bypass passage is higher than the target value, the flow rate ratio of the fluid output from the bypass passage and the cooling passage to the temperature control unit over the predetermined period When the temperature of the fluid in the bypass passage is lower than the target value, the fluid output from the bypass passage and the heating passage to the temperature control unit over the predetermined period is performed. The temperature control device according to claim 8 , wherein the temperature control device is performed by manipulating a flow rate ratio. If the request relating to the temperature of the temperature adjustment portion is changed, according to any one of claims 5-9, characterized by further comprising a transient target value setting means for changing greater than the change in the target value the request Temperature control device. Prompting the outside to select any one of a plurality of options for at least one of the gain of the open loop control, the duration of the open loop control, and the setting of a target value during the open loop control; The temperature control apparatus according to any one of claims 8 to 10 , further comprising an open-loop control adaptation support unit that performs the temperature control according to a selected value. In a temperature control device for controlling the temperature of the control target as desired by circulating a fluid through a temperature control unit arranged near the control target,
A heating passage for heating the fluid and circulating it to the temperature control unit;
A cooling passage for cooling the fluid and circulating it to the temperature control unit;
A bypass passage for circulating the fluid to the temperature control unit without passing through the heating passage and the cooling passage;
Adjusting means for adjusting a flow rate ratio of the fluid output from the heating passage, the cooling passage, and the bypass passage to the temperature adjustment unit;
Flow means for flowing the fluid to circulate the fluid,
The heating passage is provided with a heating unit for heating the fluid,
The flow means is provided on the downstream side of the heating unit in the circulation path of the fluid,
In order to control the temperature of the fluid in the vicinity of the temperature control unit to a target value, it further comprises an operating means for operating the adjusting means,
The operating means prohibits the flow rate of the fluid adjusted by the adjusting means for the heating passage and the cooling passage from becoming zero when the temperature of the temperature adjustment unit is in a steady state. that temperature control device.

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