JP5171743B2 - Finished surface inspection system and inspection method - Google Patents

Description

  The present invention relates to a method and an inspection system for a machined finished surface.

  On the machining finish surface of a member manufactured by machining, there may be a case where a scratch (battery mark) with surface irregularities is formed on the machining finish surface due to vibration of the machining tool or the member to be machined (chatting vibration). Various techniques for evaluating the roughness of the finished surface are known. For example, Japanese Patent Laid-Open No. 2005-326324 (Patent Document 1) discloses a distance between a light receiving sensor and a machining finished surface calculated from a measurement signal from the light receiving sensor by scanning the light receiving sensor at a measurement position on the machining finished surface. A technique for creating a shape image representing the surface shape of a finished surface is disclosed.

JP 2005-326324 A

  However, in the method of scanning the sensor as described in Patent Document 1, it may be difficult to install the measuring device depending on the shape of the member to be processed and the processed surface. For example, it is difficult to measure the chatter mark on the inner surface of the drill hole when the drill hole is provided with a rotating tool. In addition, accurate measurement may be difficult or may take a long time.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an inspection method and an inspection system for quickly inspecting a machined surface.

  A feature of the present invention for solving the above-described problem is a method for inspecting a machining finish surface of a member machined by a rotary tool, and measuring a width dimension of a chatter mark on the machining finish surface, and the measurement result is a threshold value. When the value is greater than or equal to the value, the depth of the chatter mark is determined to be greater than or equal to the allowable value. When the depth of the chatter mark is deeper than the allowable value, the surface is polished, and the finished surface is inspected again.

  According to the present invention, chatter marks on the finished surface can be quickly evaluated.

It is a figure showing the structure of the connection part of a turbine rotor blade. It is the schematic diagram (a) of the pin hole inner surface which has the chatter mark after a reamer process, and the uneven | corrugated cross-sectional schematic diagram (b) (c) of a chatter mark. It is a flowchart showing the procedure of the inspection method of a process finish surface. It is a schematic diagram which shows an example of the microscope for pin hole observation. It is a characteristic view which shows the relationship between the width | variety and depth of a chatter mark. It is a characteristic view which shows the relationship between the depth of a chatter mark, a width | variety, and fatigue strength. It is a schematic diagram which shows an example of the grinding | polishing apparatus for pin hole grinding | polishing. It is a schematic diagram which shows an example of the roughness meter for pin hole observation. It is a schematic diagram of the observation method of the pin hole which used the molding material for the transfer means. It is a schematic diagram of the observation method of the pin hole which used the adhesive tape for the transfer means. It is a schematic diagram of a polishing brush with pinhole polishing abrasive. It is a flowchart showing the procedure of the inspection method of a process finish surface. It is the schematic of the inspection system of a processing finish surface. It is a figure showing an example of the result of having measured vibration with a vibration analysis / display device.

  The connecting portion between the rotor blade and the rotor of the power generation turbine is configured by a pin connection for connecting the rotor blade and the rotor via a pin, a hook connection for fitting and connecting each other with a hook groove. A pin hole is formed in the turbine blade and the rotor, and the coupling force of the pin coupling acts on the inner surface of the pin hole as a tensile stress. For this reason, it is desirable in terms of strength to keep the surface roughness of the inner surface of the pin hole low.

  In general, the finishing of pin holes is ground with a rotating tool such as a rotating reamer bar. Usually, the surface roughness of the inner surface of the pin hole can be kept low. However, even in reamer processing, depending on the processing conditions, the tool may vibrate, and scratches (battery marks) with surface irregularities may be formed on the finished surface. The chatter mark is a scratch generated on the finished surface of the machine, and has an appearance that scales are arranged in the direction of rotation of the tool. Generation of chatter marks exceeding the allowable depth is not preferable in terms of strength.

  Therefore, there is a need for an inspection method and inspection system for a machined surface machined by a rotary tool of a machining machine, such as a machined surface of a pinhole inner surface of a turbine rotor blade connecting portion. However, it is difficult to install a measuring instrument to scan the sensor along the line of chatter marks formed in the circumferential direction on the inner surface of the pin hole. Therefore, measurement is difficult or takes a long time for measurement.

  Therefore, when the width dimension of the rotating tool of the chatter mark confirmed on the machining finish surface is measured and the measurement result is equal to or greater than the threshold value, the depth of the chatter mark is greater than the allowable value. By the method of judging, by inspecting the work finish surface machined by the rotary tool of the processing machine, it was decided to quickly inspect the chatter mark and measure the depth.

  The outline of the present invention is to determine the presence or absence of a chatter mark by observing the finished machining surface, and when the chatter mark is confirmed by observation, measure the width dimension in the rotation axis direction of the rotary tool and measure the measured chatter. When the mark width dimension is equal to or greater than the threshold value, the depth of the chatter mark remaining on the processed surface is determined to be unacceptable. As a result, the machining finish surface can be diagnosed quickly from the observation result of the image or the like. When the depth of the chatter mark is deeper than the allowable value, the surface is polished, and the finished surface is inspected again.

  Embodiments of the present invention will be described below with reference to the drawings.

  In the present embodiment, the observation means for observing the finished machining surface, the measurement means for measuring the width dimension of the chatter mark taken in the direction of the rotation axis when the occurrence of the chatter mark is confirmed, and the measurement result An example of a processing finish surface inspection system having a chatter depth determination unit that determines that the depth of a chatter mark is greater than or equal to a permissible value when the threshold value is greater than or equal to a threshold value, and an example of a method of machining finish using the same will be described. .

  FIG. 1 is a diagram illustrating a structure of a turbine rotor blade connecting portion. The turbine blade connecting portion 1 has a structure in which a turbine blade 2 and a turbine rotor 3 are combined. In FIG. 1 (a), a turbine rotor blade 2 is a blade for fitting and connecting with a blade portion 4 for converting the energy of a working fluid (steam flow, combustion gas, etc.) into rotational energy of the turbine, and the turbine rotor 3. And an implanted portion 5. The turbine rotor 3 is connected to the rotor disk 6 attached to the outer periphery of the turbine rotating shaft (not shown) and the blade implantation portion 5 to be connected to connect the rotor disk 6 and the turbine rotor blade 2. The rotor implantation portion 7 is provided. The blade implantation portion 5 and the rotor implantation portion 7 are formed with pin holes 8 communicating with each other in the turbine rotating shaft direction in a state of being fitted to each other. The blade 2 and the turbine rotor 3 are firmly coupled. When the turbine rotates, a centrifugal force acting radially outward (upward in FIG. 1A) acts on the turbine blade 2, but the centrifugal force is supported by the coupling pin 9 and the connected state of the turbine blade 2 is changed. Hold.

  The finishing of the pin hole 8 is performed by grinding with a processing machine on which a rotary tool is mounted. As such a processing machine, there is a reamer processing machine, which uses a reamer bar for grinding. Although the surface roughness of the inner surface of the pin hole 8 can be kept low by the surface finishing process, depending on the conditions, the tool may vibrate, and scratches (battery marks) with surface irregularities may be formed on the finished surface. In this embodiment, the machining finish surface (inner surface of the pin hole 8) machined by the rotary tool of the processing machine is used as an inspection object, the inner surface of the pin hole 8 is observed by the microscope 40, and the reamer rod 121 of the chatter mark 31 is observed. When the width dimension w taken in the direction of the rotation axis is measured and the measurement result of the width dimension w is equal to or greater than the threshold value W under the correlation between the width dimension w and the depth d of the chatter mark, the chatter mark 31 A method and system for inspecting a finished surface that determines that the depth d of the steel sheet is greater than or equal to an allowable value will be described.

  First, chatter marks generated in the pin hole 8 during reaming will be described. Depending on the state of discharge of the facet during reaming and the wear state of the cutting edge, the reamer bar vibrates due to an increase in cutting resistance, and a band-like chatter mark is formed on the inner surface of the pin hole 8 along the rotation direction of the reamer bar. There is a case. As shown in FIG. 2A, the chatter mark 31 is a form in which scaly patterns are arranged in a row in the circumferential direction of the pin hole 8. 2B is a cross-sectional view taken along the line IIb-IIb in FIG. 2A, and FIG. 2C is a cross-sectional view taken along the line IIc-IIc in FIG. As shown in FIGS. 2B and 2C, the cross-sectional shape (uneven shape 32) cut by a plane orthogonal to the rotation axis of the reamer rod is a sawtooth shape.

  FIG. 3 is a flowchart showing the procedure of the method for inspecting the finished surface of the working example. First, in step S1, the torque applied to the reamer bar during reamer processing is measured. For example, the load current correlated with the torque applied to the processing machine is measured and recorded by an ammeter (not shown). Note that mechanical vibration during machining may be measured instead of torque measurement or in combination with torque measurement (see Example 7).

  Next, the presence or absence of chattering is estimated in step S2. Since the occurrence of chatter vibration is caused by a sharp increase in cutting resistance, whether or not there is a sudden increase in load current suspected of generating chatter vibration is checked in this process based on the measurement record of the load current value. For example, if a threshold value is set in advance for the slope of the load current graph and the magnitude of vertical movement, and fluctuations in the load current exceeding the threshold value exceed the threshold value, chatter vibration may have occurred. Judge as high. The determination in step S2 can be made by the operator based on the measurement result of the load current. In addition, the load current measurement result (current value or slope) is compared with a threshold value, and a program for determining that there is a possibility of chattering when the value is equal to or greater than the threshold value is stored in the measuring instrument in advance. It may be automatically determined by the measuring instrument.

  In this case, in step S2, the presence / absence of the chatter mark 31 is estimated from the fluctuation of the torque (load current) of the machine tool being machined, and there is no torque fluctuation exceeding the threshold value and there is no suspicion of the occurrence of chatter vibration. If it can be determined that the chatter mark 31 has not occurred, the procedure of FIG. 3 is terminated. By omitting the steps (S3-S6) relating to the roughness inspection and repair of the pin hole 8 and finishing the finishing process of the pin hole 8, unnecessary work is omitted as much as possible, and the work is made efficient.

  When a sudden increase in torque is observed (when generation of chatter mark 31 is suspected), the procedure is moved to step S3. In step S3, the inner surface of the pin hole 8 is observed using a microscope.

  FIG. 4A is a schematic diagram showing a state in which a microscope is inserted into the pin hole 8, and FIG. 4B is a cross-sectional view taken along the line IVb-IVb in FIG. As shown in FIGS. 4A and 4B, the microscope 40 includes a rod-shaped scope main body 41 and an image processing / display device 45 that processes and displays photographing data acquired by the scope main body 41. ing. The scope main body 41 includes two cameras 42 on the outer peripheral surface, a light 43 that is a light source provided in the vicinity of each camera 42, and wheels (rubber tires or the like) 44 that travel on the inner surface of the pin hole 8. When photographing the inner surface of the pin hole 8 using this microscope 40, as shown in FIG. 4A, the scope main body 41 is inserted into the pin hole 8, and the camera is illuminated while illuminating the field of view of the camera 42 with the light 43. The inner surface of the pin hole 8 is photographed by 42. The image processing / display device 45 generates an observation image of the pinhole 8 based on the shooting data acquired by the camera 42 and displays it on its own monitor screen.

  As shown in FIG. 4B, the two cameras 42 are 180 ° in the circumferential direction at substantially the same position in the axial direction (left and right direction in FIG. 4A) with respect to the outer peripheral surface of the scope body 41. It is attached at the position where At this time, since the tensile stress acts mainly by the centrifugal force at the time of turbine rotation is a portion in contact with the pin on the inner surface of the pin hole 8, it is determined whether or not these stressed portions are scratched. In order to observe, the scope main body 41 is inserted so that the two cameras 42 face the contact portion 5a on the wing implantation portion 5 side and the contact portion 7a on the rotor implantation portion 7 side, respectively. The portion of the inner surface of the pin hole 8 that does not come into contact with the pin has a small tensile stress, so that it is generally not a problem if it is somewhat scratched. By moving the scope main body 41 through the pin hole 8 with the field of view of the camera 42 aligned with the contact portion of the inner surface of the pin hole 8 with the pin, the inner surface of the pin hole 8 can be simply inserted once. Can be observed quickly without damaging.

  The range captured by the two cameras 42 is a range of ± 45 ° on both sides when the centers of the contact portions 5a and 7a are set to 0 ° as shown in FIG. 4B. This range is a region where a large tensile load is repeatedly applied along the inner surface of the pin hole 8 when the turbine rotates, and the “stressed portion” described in the previous paragraph usually falls within this range. Therefore, once the scope main body 41 is passed through the pin hole 8, it is possible to observe a whole area where it is highly necessary to observe the presence or absence of scratches. Further, by running on the wheels 44, it is possible to take images while keeping the distance between the camera 42 and the inner surface of the pin hole 8 constant. Further, when the wheel 44 is made of rubber, the scope main body 41 can be smoothly put in and out of the pin hole 8 without damaging the inner surface of the pin hole 8.

  In step S3, the contact portions 5a and 7a may be observed with the turbine rotor blade 2 to be observed removed from the turbine rotor 3. In this case, there is no need to restrict the size of the scope main body 41 to the internal shape of the pin hole 8, and there is an advantage that the scope of selection of a usable microscope is widened.

  In step S <b> 4, it is determined whether or not chatter marks are confirmed on the inner surface of the pin hole 8 from the observation result of the pin hole 8. If the chatter mark 31 as shown in FIG. 2 is recognized in the observation image displayed on the monitor screen of the image processing / display device 45, the procedure proceeds to step S5. If the chatter mark 31 is not recognized, the pin hole 8 3 is determined to have no particular problem, the subsequent steps are omitted, and the series of steps in FIG. When the chatter mark 31 is not actually confirmed, unnecessary work can be omitted by omitting the subsequent steps.

  The determination in step S4 can be made by the operator based on the observation image displayed on the display screen of the image processing / display device 45. Alternatively, the presence / absence of the chatter mark 31 may be automatically determined by the image processing function of the image processing / display device 45. The presence or absence of the chatter mark 31 can be detected by, for example, a change in luminance of the observation image.

  In step S5, when the occurrence of chatter mark 31 is confirmed in observation steps S3 and S4, the width dimension (maximum width) w taken in the axial direction of the pin hole 8 of the chatter mark 31 (the rotational axis direction of the rotary tool). Measure. For example, measurement is performed using the scale function of the image processing / display device 45 of the microscope 40, and it is determined whether the value is within a threshold value (reference width). In FIG. 3, step S5 is illustrated as one step, but strictly speaking, the measurement step of the width dimension w of the chatter mark 31 and the chatter depth determination step 2 of comparing the width dimension w with the threshold value W are shown. It includes a process.

  The inventors of the present application have found that the depth d increases as the width dimension w increases between the width dimension w of the chatter mark 31 and the depth (maximum depth) d of the chatter mark 31. For example, in the two chatter marks 31 shown in FIG. 2, the depth d of the chatter mark 31 with the width dimension w = w1 (> w2) on the left side in FIG. 2A is deeper (d1> d2). . As a result of the examination, there is a linear relationship as shown in FIG.

  Further, FIG. 6 is a diagram showing the relationship between the depth d and the fatigue strength of the pin hole. As shown in FIG. 6, it was found that the fatigue strength decreases when the depth d of the chatter mark 31 exceeds a certain value. Therefore, when the reference depth D is set within a range that does not affect the fatigue strength and the reference depth of the chatter mark 31 is D (for example, 25 μm), the reference width (threshold value) W corresponding to the reference depth D is Since it is obtained from the relationship of FIG. 5, the maximum width w of the chatter mark 31 in the observation image of the pin hole 8 is compared with the reference width W.

  In this step S5, when the measurement result of the width dimension w of the chatter mark 31 is equal to or greater than the threshold value (reference width W) under the correlation between the width dimension w and the depth d of the chatter mark as described above, It is determined that the mark depth is greater than or equal to the allowable value. Since the depth d is measured by the width w of the chatter mark 31, the depth of the chatter mark 31 can be determined from the obtained observation image, and the roughness measurement is unnecessary, so the necessity of polishing repair of the chatter mark 31 is necessary. Can be evaluated quickly.

  If w <W, the chatter mark 31 does not affect the fatigue strength of the pin hole 8, and the series of procedures in FIG. Even if the chatter mark 31 is confirmed, when the chatter mark 31 is less than the threshold value (has little influence on strength), the subsequent steps are omitted, so that unnecessary work can be omitted. On the other hand, if w ≧ W, the chatter mark 31 may cause a decrease in fatigue strength of the pin hole 8, and the procedure proceeds to the repair polishing step S6.

  The determination in step S5 can be made by the operator based on the observation image displayed on the display screen of the image processing / display device 45. Alternatively, the measurement of the width dimension w of the chatter mark 31 (measurement of the depth d of the chatter mark 31) may be automatically performed by the image processing function and the scale function of the image processing / display device 45. Further, the measurement result of the width dimension w is compared with the threshold value W, and if it is equal to or greater than the threshold value W, a program for determining that the procedure needs to be transferred to the next process is stored in the image processing / display device 45 in advance. It may be stored and the determination in step S5 may be automatically performed by the image processing / display device 45.

  In step S6, the pin hole 8 is subjected to grinder polishing or the like to remove or shallow the unevenness of the chatter mark 31. 7A is a schematic view showing a state in which the polishing apparatus is inserted into the pin hole 8, and FIG. 7B is a cross-sectional view taken along a section VIIb-VIIb in FIG. 7A. The polishing apparatus 70 has a rotating shaft 71 attached to the tip of an air-driven rotation driving device (not shown), and a plurality of strip-shaped polishing paper (polishing cloth) 72 in a wheel shape at the tip of the rotating shaft 71. Use an instrument with an attached structure. By rotating the rotary shaft 71 by air drive and inserting it into the pin hole 8, the polishing paper 72 can polish the inner surface of the pin hole 8 and remove or make the irregularities of the chatter mark 31 shallow. After the polishing, the process returns to step S3 again to observe the inner surface of the pin hole 8, and the presence / absence and the depth of the chatter mark 31 are determined again.

  The polishing in step S6 may be performed in a state where the turbine rotor blade 2 disposed at the polishing target position is removed from the turbine rotor 3. In this case, there is no need to restrict the dimensions of the polishing apparatus 70 by the internal shape of the pin hole 8, and there is an advantage that the range of selection of usable polishing apparatuses is widened.

  As described above, since the width dimension w taken in the axial direction of the pin hole 8 of the chatter mark 31 is measured and converted into the depth d by using the inspection system that performs the above-described process, the measuring instrument (in this example) Since the measuring direction of the scope body 41) is the axial direction of the pin hole 8, the measuring instrument can be easily installed, the depth of the chatter mark 31 can be measured quickly, and the surface finishing process can be speeded up. Is possible. In addition, the strength reliability of the connecting portion of the turbine rotor blade can be reliably increased without imposing a burden on work man-hours.

  Note that the above inspection system can naturally be applied even to a turbine blade and turbine rotor of a pin coupling type different from those in FIG. For example, in a state where the blade fork 135 and the rotor fork 137 as shown in FIG. 1B are fitted together, a fork-pin coupling type pin hole 138 coupled by a coupling pin 139 communicating in the turbine rotation axis direction. Applicable to inspection of

  Moreover, it is applicable not only to the inner surface of the pin hole 8 of the pin connecting the turbine rotor blade and the turbine rotor, but also to inspection of chatter marks generated on other processed finish surfaces. When applied to a turbine, for example, it can be applied to a so-called hook coupling portion in which a blade root portion of a turbine rotor blade of a turbine connecting portion is fitted to a turbine rotor. At the hook coupling portion, a tensile load in the turbine radial direction acts on the constricted portion of the hook on the blade root side and the constricted portion of the hook groove on the turbine rotor side due to the centrifugal force applied to the turbine rotor blade. Therefore, it is desirable to keep the roughness of the constricted portion low in order to improve the strength. The hook and hook groove are finished by an end mill or the like, and chatter may occur depending on conditions. In this case, the present embodiment can be applied.

  Furthermore, the present embodiment is widely applied to cases where chatter marks are generated and the fatigue strength may be reduced due to the machined surfaces of other machine parts, such as the connection parts of turbine blades and other machine parts. Is possible.

  In this embodiment, instead of observing the processed finish surface by the microscope 40 and evaluating the depth of the chatter mark 31 in the steps S3-S5 of the first embodiment, a roughness meter (for example, a stylus) as shown in FIG. This is an example using the formula (80). 8A is a schematic view showing a state in which the roughness meter is inserted into the pin hole 8, FIG. 8B is a cross-sectional view taken along the section VIIIb-VIIIb in FIG. 8A, and FIG. 4 is a cross-sectional view of a chatter mark 31 cut along a plane orthogonal to the central axis of a hole 8. FIG. A roughness meter 80 is installed so that the arm moves in the axial direction of the pin hole 8. Using this roughness meter 80, the roughness of the finished surface in the rotational axis direction of the rotary tool (axial direction of the pin hole 8). Measure. When using a roughness meter, particularly a stylus type device that measures one point of the chatter mark, the measurement may be performed a plurality of times by changing the position to the same location or left and right.

  For example, when there is a chatter mark 31 having a width dimension w3 as shown in FIG. 8C, a local depression having a width dimension w3 appears in the roughness curve obtained by the roughness meter 80. Based on the curve, the presence / absence of the chatter mark 31 can be detected, and the width dimension w of the detected chatter mark 31 can be measured, and comparison with the reference width W is easy. Thus, also when using the inspection system which specified the roughness meter, the same effect as Example 1 is acquired. Further, the roughness meter 80 is generally used at a processing site and can be used as it is, so that an inspection system can be easily constructed.

  In addition, you may test | inspect in the state which removed the turbine rotor blade 2 of measurement object from the turbine rotor 3. FIG. In this case, it is not necessary for the dimensional relationship of the roughness meter 80 to be restricted by the internal shape of the pin hole 8, and the range of selection of usable roughness meters is widened.

  In this embodiment, instead of observing the finished work surface with the microscope 40 in steps S3-S5 of the first embodiment, the finished face is observed using a mold remover (transfer means) 90. FIG. 9A is a schematic view showing a state in which a mold taking agent is applied to the inner surface of the pin hole 8, FIG. 9B is a cross-sectional view taken along the section IXb-IXb in FIG. 9A, and FIG. FIG. 3 is a perspective view schematically showing a mold taking agent after transfer.

  As the mold taking agent 90, generally used mold taking agents such as liquid silicon which is solidified after application, clay-like mold taking material and the like can be used. For example, when liquid silicon is used, the mold taking material 90 is applied to a target location (area B of 50 ° to 130 °) on the inner surface of the pin hole 8, and when solidified, it is peeled and flattened, and transferred to the mold taking agent 90 The inner surface transfer image (surface pattern) of the pin hole 8 is observed. When the chatter mark 31 is confirmed on the inner surface transfer image of the mold taking agent 90, the width dimension w thereof is measured on the inner surface transfer image with a caliper, a measure, a ruler or the like, and the depth of the chatter mark 31 is measured from the width dimension w. . By detecting the occurrence of chattering or measuring the width dimension of the chattering mark based on the transfer pattern of the mold taking agent 90, the same effect can be obtained, and the construction of an inspection system is easy.

  The turbine rotor blade 2 to be inspected may be inspected with the turbine rotor 3 removed from the turbine rotor 3. In this case, since the inner surface of the pin hole 8 cylinder is opened, there is an advantage that the mold making operation is easy.

  The present embodiment is an example in which an adhesive tape (transfer means) 100 is used instead of observing the finished surface with the microscope 40 in steps S3-S5 of the first embodiment. 10A is a schematic diagram showing a state where an adhesive tape is applied to the inner surface of the pin hole 8, FIG. 10B is a cross-sectional view taken along the Xb-Xb section in FIG. 10A, and FIG. It is the perspective view which represented typically the adhesive tape after transcription | transfer.

  As the adhesive tape 100, a commonly used adhesive tape can be used. In the case of the present embodiment, the adhesive tape 100 is affixed to a desired location (50 ° to 130 ° region B) on the inner surface of the pin hole 8 and then peeled off and flattened, and the pin hole transferred to the surface of the adhesive tape 100 The inner surface transfer image (surface pattern) of No. 8 is observed. When the chatter mark 31 is confirmed on the inner surface transfer image of the adhesive tape 100, the width dimension w is measured on the inner surface transfer image with a caliper, a measure, a ruler, or the like, and the depth of the chatter mark 31 is measured from the width dimension w.

  As in the present embodiment, the same effect can be obtained by detecting the occurrence of chatter or measuring the width dimension of the chatter mark based on the transfer pattern of the adhesive tape 100, and construction of an inspection system. Is also easy. In addition, in the case of constructing with a single adhesive tape 100, there is also an advantage that there is less fear of leaving a residue when the adhesive tape 100 is peeled from the inner surface of the pin hole 8.

  The turbine rotor blade 2 to be inspected may be inspected with the turbine rotor 3 removed from the turbine rotor 3. In this case, since the inner surface of the pin hole 8 cylinder is opened, there is an advantage that the operation is easy.

  In this embodiment, instead of polishing the finished surface with the polishing paper 72 in step S6 of Embodiment 1, the polishing brush 110 with abrasive grains is used.

  FIG. 11A is a schematic diagram illustrating a state where the polishing apparatus used in the fifth embodiment is inserted into the pin hole 8, and FIG. 11B is a cross-sectional view taken along the line XIb-XIb in FIG. It is. The abrasive brush 110 with abrasive grains has a structure in which a large number of brushes 113 each having a grinding stone ball 112 attached to the tip are attached to the tip of a rotary shaft 111 substantially the same as the rotary shaft 71 of FIG. By using this polishing brush 110 with abrasive grains and rotating the rotating shaft 111 and inserting it into the pin hole 8, the inner surface of the pin hole 8 is polished by the grinding stone ball 112, and the irregularities of the chatter mark 31 are removed or made shallower. Can do. In this case, the same effect as that of the first embodiment can be obtained. In addition, both the polishing paper 72 and the polishing brush 110 with abrasive grains can be used for existing equipment, and an inspection system can be easily constructed.

  In step S6, polishing may be performed with the turbine rotor blade 2 at the polishing target position removed from the turbine rotor 3. In this case, there is no need to restrict the size of the polishing brush 110 with abrasive grains to the internal shape of the pin hole 8, and there is an advantage that the range of selection of a polishing apparatus that can be used is widened.

  In the present embodiment, an example will be described in which finishing processing means is provided in the inspection system having the observation means, measurement means, and determination means of the first embodiment.

  FIG. 12 is a flowchart showing the procedure of the method for inspecting the finished surface of the working example. Steps S11, S12, S13, S14, S15, and S16 shown in FIG. 12 are substantially the same as steps S1, S2, S6, S3, S4, and S5 of the first embodiment, respectively. The difference between this embodiment and the method of Embodiment 1 is that when a sudden increase in torque (suspected of chattering) during reamer processing is detected in step S12, the finish processing is determined to be unacceptable, The point is that the finished surface is polished in step S13 without observing or measuring the chatter mark.

  Thereafter, the finished surface is observed in step S14. If no chatter mark is recognized in step S15, the series of finishing steps is terminated. On the other hand, when the chatter mark is recognized, the procedure is shifted from step S15 to step S16, the width dimension of the chatter mark is measured, and compared with the threshold value W. Strictly speaking, the step S16 includes a step of measuring the width dimension of the chatter mark and a step of comparing the measurement result with the threshold value W. As a result, if it passes, the procedure ends, and if it fails, the procedure returns to step S13. Also according to the present embodiment, substantially the same effect as in Example 1 can be obtained.

  In this example, as compared with the procedure of the embodiment of Example 1 (FIG. 3), when the chatter mark suspected of being generated in S12 is a defective one requiring polishing, the first polishing is performed. The observation and inspection procedures up to the process are omitted. For example, when it is known from experience or that the chatter mark accompanying the sudden increase in torque during machining is often required to be repaired by an inspection method such as Example 1, the procedure of the present embodiment By adopting, the overall work can be made efficient. On the other hand, if there are many cases where the chatter marks accompanying the sudden increase in torque during machining are not repaired, the work efficiency is further improved by adopting the procedure of the first embodiment.

  In addition, the relationship between the torque during machining and the defect rate of chatter marks is examined in advance, and the process of estimating whether chatter occurs due to torque and then shifting to a polishing process (whether to execute the flow of FIG. 12) observation process It may be possible to flexibly select whether to shift to (execute the flow of FIG. 3). As a result, the working efficiency can be further improved.

  In this embodiment, instead of measuring and recording the torque during reamer processing in step S1 of embodiment 1 and step S11 of embodiment 6, a vibration sensor is attached to the processing machine to measure the vibration of the rotary tool (reamer bar). This is an example of recording. Since the vibration frequency of vibration is unique, the presence or absence of chatter marks can be estimated by measuring the vibration frequency of the rotating tool being processed. In this case, since vibration is directly observed, generation of chatter marks is more accurate than torque measurement.

  FIG. 13 is a schematic diagram showing a configuration example of the inspection system of this embodiment. A pin hole 8 is formed in the turbine implanted portion 5 and the rotor implanted portion 7 of the turbine rotor blade connecting portion 1 shown in FIG. The reamer processing machine 120 includes a reamer rod 121, a chuck portion 122 that fixes the reamer rod 121 to a rotation drive unit, a rotation shaft 123 of the chuck portion 122, a bearing 124 that supports the rotation shaft 123, and a rotation shaft 123 that is driven to rotate. An arm 127 for driving in the axial direction of the rotary shaft 123, and a stand 128 for supporting the arm 127, and finishing the inner surface of the pin hole 8 with the reamer rod 121. . In addition, the same code | symbol is attached | subjected to the part similar to previous drawing, and description is abbreviate | omitted.

  An acceleration detector 125 is attached to the bearing 124, and a detection signal of the acceleration detector 125 is input to the vibration analysis / display device 126. The vibration analysis / display device 126 measures and records the vibration of the reamer rod 121 during the inner surface finishing of the pin hole 8 based on the input signal from the acceleration detector 125, and displays it on its own monitor screen.

  FIG. 14 is a diagram illustrating an example of a result of vibration measurement by the vibration analysis / display device 126. In FIG. 14, the horizontal axis represents the vibration frequency (Hz) and the vertical axis represents the vibration intensity (dB). In FIG. 14, the vibration frequency region a is a frequency band specific to chatter vibration. As a result of measuring the vibration frequency of the reamer rod 121 during processing, when a peak is recognized in the vibration frequency region a as shown in the figure, occurrence of chatter vibration is estimated. It is determined in step S2 (FIG. 3) or step S12 (FIG. 12) whether or not there is vibration in the frequency region a, and when chatter vibration occurrence is estimated, step S3 (FIG. 3) or step S13. The procedure is moved to (FIG. 12).

  The determination of steps S2 and S12 can be made by the operator based on the measurement result displayed on the display screen of the vibration analysis / display device 126. Alternatively, when vibration in the vibration frequency region a is measured, the vibration intensity is compared with a threshold value, and a program for determining that there is a possibility of chattering when the vibration intensity is equal to or greater than the threshold value is a vibration analysis / display device 126 may be stored in advance and automatically determined by the vibration analysis / display device 126.

DESCRIPTION OF SYMBOLS 1 Turbine blade connection part 2 Turbine blade 3 Turbine rotor 4 Blade part 5 Blade implantation part 6 Rotor disk 7 Rotor implantation part 8 Pin hole 31 Bibili mark 40 Microscope 41 Scope main body 45 Image processing / display apparatus 70 Polishing apparatus 71, 111 Rotating shaft 72 Abrasive paper 80 Roughness meter 90 Mold remover 100 Adhesive tape 110 Polishing brush with abrasive grains 112 Grinding stone ball 113 Brush 120 Reaming machine 121 Reamer rod 123 Rotating shaft 125 Acceleration detector 126 Vibration analysis / display device d Mark depth w Chatter mark width W Threshold

Claims (22)

In the inspection system of the machined surface machined by a rotary tool,
Observation means for observing the processed finish surface, measurement means for measuring the width dimension of the chatter mark taken in the direction of the rotation axis of the rotating tool when occurrence of chatter marks is confirmed by the observation means, and measurement results An inspection system for a finished surface having chatter depth determining means for determining that the depth of the chatter mark is equal to or greater than an allowable value when the value of the chatter mark is equal to or greater than a threshold value. The processing finished surface inspection system according to claim 1,
A processing finish surface inspection system comprising polishing means for polishing a work finish surface when the chatter depth determination means determines that the depth of the chatter mark is greater than an allowable value.   3. The processing finished surface inspection system according to claim 2, wherein the polishing means is a polishing brush with abrasive grains or a polishing cloth wheel. The processing finished surface inspection system according to claim 1,
A machining finished surface inspection system comprising chatter vibration generation estimation means for measuring the torque or mechanical vibration of a rotating tool during machining and estimating the occurrence of chatter vibration. The processing finished surface inspection system according to claim 4,
A processing finish surface inspection system comprising polishing means for polishing a finish surface when occurrence of chatter vibration is estimated by the chatter vibration generation estimation means.   6. The processing finished surface inspection system according to claim 5, wherein the polishing means is a polishing brush with abrasive grains or a polishing cloth wheel.   2. The processing finish surface inspection system according to claim 1, wherein the observation means is a microscope, and the measurement means is a scale function of an observation image by the microscope. .   2. The processing finish surface inspection system according to claim 1, wherein at least one of the observation unit and the measurement unit is a roughness meter that measures the roughness of the processing finish surface. 3. Inspection system.   2. The processing finished surface inspection system according to claim 1, wherein at least one of the observation unit and the measuring unit is a transfer unit that transfers a surface pattern of the finishing surface. Inspection system. The processing finished surface inspection system according to claim 1,
An inspection system for a finished surface that is used for a finished surface of an inner surface of a pin hole of a connecting portion of a turbine rotor blade machined by a rotary tool. The processing finished surface inspection system according to claim 1,
An inspection system for a machined surface that is used for a machined surface of a member that has been reamed by a rotary tool. In the inspection method of the machined surface machined by a rotary tool,
An observation step of observing the processed finish surface and determining the presence or absence of chatter marks;
When the chatter mark is confirmed in the observation step, a measurement step of measuring the width dimension of the chatter mark in the rotation axis direction of the rotary tool;
And a chatter depth determination step of determining that the depth of the chatter mark is greater than or equal to an allowable value when the width dimension of the chatter mark measured in the measurement step is greater than or equal to a threshold value. Inspection method for finished surface to be processed. In the inspection method of the finished surface of the pin hole of the connecting part of the turbine rotor blade machined by a rotary tool,
An observation step of observing the finished surface of the pin hole and determining the presence or absence of a chatter mark;
When the chatter mark is confirmed in the observation step, a measurement step of measuring the width dimension of the chatter mark in the rotation axis direction of the rotary tool;
And a chatter depth determination step of determining that the depth of the chatter mark is greater than or equal to an allowable value when the width dimension of the chatter mark measured in the measurement step is greater than or equal to a threshold value. Inspection method for finished surface to be processed. In the method for inspecting a work finish surface according to claim 12 or 13,
When it is determined in the chatter depth determination step that the depth of the chatter mark is greater than or equal to an allowable value, there is a polishing step of polishing the finished surface where the chatter mark is generated,
A method for inspecting a finished surface, wherein the observation step, the measurement step, and the chatter depth determination step are repeated after the polishing step. The method for inspecting a work finish surface according to claim 14,
The polishing step is a step of polishing the finished surface with a polishing brush with abrasive grains or a polishing cloth wheel. In the method for inspecting a work finish surface according to claim 12 or 13,
When there is a chatter vibration generation estimation step of measuring the torque or mechanical vibration of the rotating tool during the machining and estimating the occurrence of chatter vibration, and when the occurrence of chatter vibration is estimated in the chatter vibration generation estimation step A method for inspecting a finished surface, wherein the observation step is performed. In the method for inspecting a work finish surface according to claim 12 or 13,
Measuring the torque or mechanical vibration of the rotating tool during the machining and estimating the occurrence of chatter vibration, and finishing when the occurrence of chatter vibration is estimated in the chatter vibration occurrence estimation step And a polishing step for polishing the surface, and the observation step is performed after the polishing step. The method for inspecting a work finish surface according to claim 17,
The polishing step is a step of polishing the finished surface with a polishing brush with abrasive grains or a polishing cloth wheel. In the method for inspecting a work finish surface according to claim 12 or 13,
The observation step is a step of observing the processed finish surface with a microscope,
The method for inspecting a finished surface, wherein the measuring step is a step of measuring a width dimension of a chatter mark by a scale function of an observation image by the microscope. In the method for inspecting a work finish surface according to claim 12 or 13,
The observation step has a step of measuring the roughness of the machining finish surface in the rotation axis direction of the rotary tool with a roughness meter,
The measuring step includes measuring a width dimension of a chatter mark based on the obtained roughness curve, and a method for inspecting a finished surface. In the method for inspecting a work finish surface according to claim 12 or 13,
The observing step includes a step of transferring the pattern of the finished surface to the transfer means,
The method for inspecting a finished surface, wherein the measuring step is a step of measuring a width dimension of a chatter mark based on a pattern transferred to the transfer means. In the method for inspecting a work finish surface according to claim 12 or 13,
A method for inspecting a finished surface, wherein the finished surface is reamer-holed.

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