JP5169511B2 - Head inspection apparatus, head inspection method, and droplet discharge apparatus - Google Patents

Description

  The present invention relates to a head inspection device, a head inspection method, and a droplet discharge device that inspect droplet discharge from a nozzle of a head.

Conventionally, a method for inspecting a head mounted on an ink jet printer or the like and ejecting liquid droplets from a nozzle by an ink jet method is known. Specifically, droplets are ejected from the nozzles of the head attached to the head attachment portion of the inspection apparatus, and the ejection speed, ejection amount, ejection angle, and the like are inspected (for example, see Patent Document 1) .
JP 2005-15192 A

However, when the head is inspected, if the head mounting method is poor with respect to the head mounting portion, the ejection angle of the liquid droplets ejected from the same nozzle varies due to vibration when the head moves, resulting in an accurate There was a problem that the inspection was not possible.
In particular, in the case of a long head with a large number of nozzles, it takes time to inspect. Therefore, if the moving speed of the head is increased in order to shorten the inspection time, vibration is likely to occur and the influence of mounting on the inspection result. There was a problem that became larger.

  The present invention has been made in view of the above circumstances, and a head inspection apparatus and a head inspection method capable of appropriately performing a head inspection in consideration of the influence of head vibration, particularly the influence of vibration caused by movement of the head. And a droplet discharge device.

In order to solve the above problems, the head inspection apparatus according to the first aspect of the present invention provides:
A head moving means for attaching a head for discharging droplets from the nozzle and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
State information generating means for generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of each droplet before and after the movement of the head, based on an imaging result by the imaging means;
A state determination unit that determines a discharge state of a droplet based on the discharge state information before and after the movement of the head generated by the state information generation unit;
It is characterized by having.

According to a second aspect of the present invention, in the head inspection apparatus according to the first aspect,
The status information generating means, as the ejection state information, by the movement back and forth each of said head, generates variation information according to the variation of the discharge angles of the multiple discharged droplets from the nozzle,
The state determination unit determines a droplet discharge state based on the variation information before and after the movement of the head generated by the state information generation unit.

A head inspection device according to a third aspect of the present invention provides:
A head moving means for attaching a head for discharging droplets from the nozzle and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time after the head movement by the head moving means;
State information generating means for generating discharge state information related to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result by the imaging means;
Reference storage means for storing reference state information relating to the determination of the discharge state of the droplets;
A state determination unit that determines a discharge state of a droplet based on the reference state information stored in the reference storage unit and the discharge state information generated by the state information generation unit;
It is characterized by having.

According to a fourth aspect of the present invention, in the head inspection apparatus according to the third aspect,
The status information generating means, as the discharge state information, generates variation information according to the variation of the discharge angles of the multiple discharged droplets from the nozzle,
It said reference storing means, as the reference state information, and stores the variation reference information according to the allowable range of variation of the discharge angles of the multiple discharged droplets from the nozzle,
The state determination unit determines a droplet discharge state based on the variation reference information stored in the reference storage unit and the variation information generated by the state information generation unit. Yes.

The head inspection method of the invention according to claim 5 is:
Using a head inspection apparatus equipped with a head moving means for attaching a head for discharging droplets from a nozzle and moving the head in a predetermined direction,
A process of imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
Based on the imaging result, processing for generating ejection state information related to the ejection angle with respect to one direction orthogonal to the movement direction of the head of each droplet before and after the movement of the head;
A process of determining a droplet discharge state based on the generated discharge state information before and after the movement of the head;
It is characterized by performing.

A head inspection method according to a sixth aspect of the present invention includes:
A head inspection apparatus having a head for ejecting liquid droplets from a nozzle, and comprising a head moving means for moving the head in a predetermined direction, and a reference storage means for storing reference state information relating to determination of the discharge state of the liquid droplets make use of,
A process of imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time interval after the head is moved by the head moving means;
A process of generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result;
A process of determining a discharge state of a droplet based on the generated discharge state information and the reference state information stored in the reference storage unit;
It is characterized by performing.

The droplet discharge device of the invention according to claim 7 is,
A creation unit that has a head for ejecting liquid droplets from a nozzle, and makes a liquid droplet ejected from the nozzle land on a substrate to create a display device constituent member that constitutes a display device;
A head moving means attached to the head and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
State information generating means for generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of each droplet before and after the movement of the head, based on an imaging result by the imaging means;
A state determination unit that determines a discharge state of a droplet based on the discharge state information before and after the movement of the head generated by the state information generation unit;
It is characterized by having.

The droplet discharge device of the invention according to claim 8 is,
A creation unit that has a head for ejecting liquid droplets from a nozzle, and makes a liquid droplet ejected from the nozzle land on a substrate to create a display device constituent member that constitutes a display device;
A head moving means attached to the head and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time after the head movement by the head moving means;
State information generating means for generating discharge state information related to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result by the imaging means;
Reference storage means for storing reference state information relating to the determination of the discharge state of the droplets;
A state determination unit that determines a discharge state of a droplet based on the reference state information stored in the reference storage unit and the discharge state information generated by the state information generation unit;
It is characterized by having.

According to the present invention, it is possible to properly perform the head inspection in consideration of the influence of vibration of the head attached to the head moving means , particularly the influence of vibration caused by the movement of the head.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

[Embodiment 1]
FIG. 1 is a block diagram illustrating a schematic configuration of a head inspection apparatus 100 according to a first embodiment to which the present invention is applied. FIGS. 2A and 2B are diagrams illustrating an imaging unit 3 provided in the head inspection apparatus 100. It is a figure which shows typically arrangement | positioning of the light emission part. FIG. 3 is a diagram illustrating the configuration of the control unit 7 of the head inspection apparatus 100.
In the following description, the arrangement direction of the nozzles (not shown) of the inkjet head S is the left-right direction, one direction orthogonal to the left-right direction is the front-rear direction, and the direction orthogonal to both the front-rear direction and the left-right direction is the upper-lower direction. And

  The head inspection apparatus 100 according to the first embodiment includes a transport stage 1 to which an inkjet head S to be inspected is attached, a head drive unit 2 that drives the inkjet head S, and ink droplets (liquids) ejected from nozzles of the inkjet head S. An image pickup unit 3 that picks up an image of a drop), a light emitting unit 4 that emits light when an image of the ink droplet is picked up by the image pickup unit 3, an image processing unit 5 that processes an image of the ink droplet picked up by the image pickup unit 3, Is provided with a monitor 6 for displaying and a control unit 7 for controlling each unit.

The ink jet head S is not particularly limited. For example, although not shown in the drawing, a pressure is applied to the channel by contraction of the piezoelectric element, and an ink droplet (droplet) is ejected from a nozzle communicating with the outlet of the channel. The head chip which discharges is comprised.
In the head chip, a plurality of nozzles are formed side by side in a predetermined direction.

The transport stage 1 is for mounting the inkjet head S so that the nozzle row direction is the left-right direction. Moreover, the conveyance stage 1 moves the inkjet head S to the left-right direction by a guide member (not shown) as a head moving means under control of the control part 7.
That is, the conveyance stage 1 moves the inkjet head S in the left-right direction so that the ink droplets ejected from the nozzles to be inspected are within the angle of view of the imaging unit 3 during the head inspection. Let As a result, all of the plurality of nozzles can be inspected.

The head driving unit (driving unit) 2 drives the ink jet head S based on predetermined driving conditions to eject ink droplets from the nozzles under the control of the control unit 7 during head inspection.
That is, the head drive unit 2 outputs a predetermined drive signal to the drive electrode for driving the drive wall arranged in parallel with the channel of the head chip, and expands and contracts the drive wall according to the drive signal, Ink droplets are ejected from the nozzles.

  As shown in FIGS. 2A and 2B, the imaging unit 3 and the light emitting unit 4 are opposed to each other along the front-rear direction on the lower side of the inkjet head S attached to the transport stage 1. Has been placed.

The light emitting unit 4 emits light when the imaging unit 3 captures an ink droplet.
The light emitting unit 4 may be anything as long as it can irradiate ink droplets at the time of imaging. For example, a strobe or LED can be applied.

  The imaging unit (imaging means) 3 continuously captures the inside of the angle of view and generates image data under the control of the control unit 7. Specifically, the imaging unit 3 is not illustrated, but includes an imaging lens and a CCD (Charge Coupled Device) or CMOS (Complementary Metal-oxide Semiconductor) that converts a subject image that has passed through the imaging lens into a two-dimensional image signal. ) And the like, and shooting for controlling the execution of a process of causing the electronic imaging unit to image a subject with a predetermined exposure time and reading an image signal (image frame) from the imaging region of the electronic imaging unit at a predetermined frame rate A control unit and the like are provided.

  The imaging unit 3 captures the ink droplets ejected from the nozzles at the first timing when the light emitting unit 4 emits light (imaging 1; see FIG. 4), and then the light emitting unit 4 emits light again after a predetermined time has elapsed. (2) (image 2; see FIG. 4) to generate respective image data. That is, the imaging unit 3 images the ink droplets ejected from the nozzles a plurality of times with a predetermined time interval.

  Under the control of the control unit 7, the image processing unit 5 calculates the position of the center of gravity of the droplet and the variation in the discharge angle of the droplet based on the image data generated by the imaging by the imaging unit 3. Or whether the variation is smaller than the allowable value (details will be described later).

  The control unit 7 controls each unit of the head inspection apparatus 100, and includes, for example, a CPU 71, a RAM 72, a storage unit 73, and the like as shown in FIG.

  The CPU 71 comprehensively controls each unit of the head inspection apparatus 100 and performs various control operations according to various processing programs stored in the storage unit 73. At that time, the CPU 71 stores various processing results in a storage area in the RAM 72 and displays the processing results on the monitor 6 as necessary.

  The RAM 72 includes, for example, a program storage area for expanding a processing program executed by the CPU 71, a data storage area for storing input data, a processing result generated when the processing program is executed, and the like.

The storage unit 73 includes, for example, a hard disk drive and the like, a system program that can be executed by the head inspection apparatus 100, various processing programs that can be executed by the system program, data that is used when executing these various processing programs, and the like Remember.
Specifically, the storage unit 73 stores an imaging control program 73a, a gravity center calculation control program 73b, a first state information generation control program 73c, a first state determination control program 73d, and the like.

The imaging control program 73a is a program for causing the CPU 71 to realize a function related to the process of causing the imaging unit 3 to image the ink droplets ejected from the nozzles of the inkjet head S a plurality of times with a predetermined time interval.
Specifically, the CPU 71 executes the imaging control program 73a to cause the imaging unit 3 to image the ink droplets ejected from the nozzles at the first timing at which the light emitting unit 4 emits light (imaging 1; see FIG. 4). ) After the predetermined time elapses, the light emitting unit 4 is caused to pick up an image at a second timing at which the light is emitted again (image pickup 2; see FIG. 4).

The center-of-gravity calculation control program 73b is a program for causing the CPU 71 to realize a function related to the center-of-gravity calculation process that causes the image processing unit 5 to calculate the center of gravity position of the ink droplet imaged and generated by the imaging unit 3.
Specifically, when the CPU 71 executes the center-of-gravity calculation control program 73b, the image processing unit 5 is imaged at the center of gravity (Xa1, Ya1) of the ink droplet imaged at the first timing and at the second timing. The center of gravity (Xa2, Ya2) of the ink droplet is calculated (see FIG. 4).
The method for calculating the gravity center position of the ink droplet is not particularly limited. For example, the image image of the captured ink droplet is referred to a reference table in which a predetermined sample shape is associated with the gravity center position. There is a method of selecting a similar shape and determining the center of gravity.
The center of gravity of the ink droplet is calculated with a predetermined position (for example, the center) in the captured image as a reference (origin).

The first state information generation control program 73c displays the discharge state information relating to the discharge state of each ink droplet before and after the movement of the inkjet head S based on the result of ink droplet imaging by the imaging unit 3 as an image processing unit (state information generating unit). ) This is a program for causing the CPU 71 to realize the function related to the state information generation process to be generated by 5.
Specifically, when the CPU 71 executes the first state information generation control program 73c, the image processing unit 5 calculates the ink jet head S calculated based on the center of gravity of the ink droplet according to the calculation result of the center of gravity calculation processing. A standard deviation σ is generated as ejection state information (variation information) based on variations in ejection angles (θ) of ink droplets ejected from a predetermined nozzle a plurality of times before and after the movement.
Here, the standard deviation related to the variation in the discharge angle of the predetermined nozzle before the movement of the inkjet head S is σ (1), and the standard deviation related to the variation in the discharge angle of the predetermined nozzle after the movement of the inkjet head S is σ. (2).
The ink droplet ejection angle (θ) is an angle at which the ink droplet is displaced in the left-right direction with respect to a line segment extending almost directly from the nozzle, and θ = tan-1 {(Xa2-Xa1) / ( Ya2-Ya1)} is calculated.

The first state determination control program 73d determines the discharge state of the ink droplets to the image processing unit (state determination unit) 5 based on the discharge state information before and after the movement of the inkjet head S generated in the state information generation process. This is a program for causing the CPU 71 to realize the function related to the state determination process.
Specifically, when the CPU 71 executes the first state determination control program 73d, the image processing unit 5 varies the ejection angle of a predetermined nozzle before the movement of the inkjet head S generated in the state information generation process. The absolute value of the value obtained by subtracting the standard deviation σ (2) related to the variation in the discharge angle of the predetermined nozzle after the movement of the inkjet head S from the standard deviation σ (1) related to It is determined whether or not the ink droplet ejection state is normal depending on whether or not it is smaller than α1.

For example, when the allowable value α1 is set to 0.02, the standard deviation σ (2) related to the variation in the discharge angle of the predetermined nozzle after the movement of the inkjet head S is 0.035 (FIG. 5A). (See FIG. 5B), assuming that the standard deviation σ (1) relating to the variation in the ejection angle of the predetermined nozzle before the movement of the inkjet head S is 0.032 (see FIG. 5B). 2) becomes −0.003, and its absolute value becomes smaller than the allowable value α1 (= 0.02), and the image processing unit 5 determines that the ink droplet ejection state is normal.
On the other hand, the standard deviation σ (2) related to the variation in the discharge angle of the predetermined nozzle after the movement of the inkjet head S is 0.078 (see FIG. 6A). If the standard deviation σ (1) related to the variation in the discharge angle of a predetermined nozzle is 0.035 (see FIG. 6B), σ (1) −σ (2) is 0.043, which is absolute The value becomes the allowable value α1 (= 0.02) or more, and the image processing unit 5 determines that the ink droplet ejection state is abnormal.

Next, the head inspection process will be described with reference to FIGS.
FIG. 7 is a flowchart illustrating an example of an operation related to the head inspection process.
In the following head inspection process, it is assumed that the allowable value α1 for comparison in the state determination process is input and set based on a predetermined operation of a setting input unit (not shown) by the user.

  As shown in FIG. 7, first, after the inkjet head S is attached to a predetermined attachment portion of the transport stage 1 (step S1), a discharge angle variation measurement process before moving the head is performed (step S2).

Hereinafter, the discharge angle variation measurement process before moving the head will be described with reference to FIG.
FIG. 8 is a flowchart illustrating an example of an operation related to the discharge angle variation measurement process before the head movement.

As shown in FIG. 8, first, based on a predetermined operation of a setting input unit (not shown) by the user, the control unit 7 sets the number of times of measurement of the ejection angle of the ink droplets from each nozzle and sets the ink droplets. A strobe delay time related to the light emission timing of the light emitting unit 4 from the discharge is set (step S21).
The “strobody lay time” is a delay time from when the ink droplets are ejected from the nozzles of the inkjet head S until the light emitting unit 4 emits light and the imaging unit 3 captures an image. Specifically, the strobody lay time is set from the strobody lay time 1 for imaging ink droplets at the first timing and the strobody lay time 1 for imaging ink droplets at the second timing. Strobody lay time 2 for imaging after the delay time has elapsed is set.

Next, the head driving unit 2 drives the inkjet head S to eject ink droplets from the nozzles under the control of the control unit 7 (step S22).
Subsequently, the CPU 71 of the control unit 7 executes the imaging control program 73a of the storage unit 73 to cause the light emitting unit 4 to emit light at the first timing according to the set strobed lay time, and to eject ink droplets ejected from the nozzles. After the imaging unit 3 captures an image, the light emitting unit 4 is caused to emit light again at the second timing, and the same ink droplet is imaged again by the imaging unit 3 (step S23).

  Next, the CPU 71 of the control unit 7 executes the center-of-gravity calculation control program 73b of the storage unit 73, and the image processing unit 5 executes the center of gravity (Xa1, Ya1) of the ink droplet imaged at the first timing and the second. The center of gravity (Xa2, Ya2) of the ink droplet imaged at the timing is calculated (step S24: center of gravity calculation process). Subsequently, the CPU 71 of the control unit 7 calculates the ejection angle (θ) of the ink droplet ejected from a predetermined nozzle of the inkjet head S based on the center of gravity of the ink droplet calculated in the center of gravity calculation processing. (Step S25).

Then, under the control of the control unit 7, the image processing unit 5 determines whether or not the number of measurement of the ink droplet ejection angle has reached the set number of measurements (step S26).
If it is determined that the number of measurements has not been reached (step S26; NO), the process proceeds to step S22, and the subsequent processing is repeated until the number of measurements of the ink droplet ejection angle reaches the set number of measurements. (Step S26; YES) Repeat.

If it is determined in step S26 that the number of ink droplet ejection angles has reached the set number of measurements (step S26; YES), the CPU 71 of the control unit 7 controls the first state information generation in the storage unit 73. By executing the program 73c, the image processing unit 5 calculates the variation of the ejection angle (θ) of the ink droplet based on the ejection angle (θ) of the ink droplet ejected from the predetermined nozzle of the inkjet head S a plurality of times. Then, the standard deviation σ (1) is calculated based on the variation in the discharge angle (step S27: state information generation process).
Thus, the discharge angle variation measurement process before moving the head is completed.

  Thereafter, as shown in FIG. 7, the control unit 7 moves the inkjet head S along the left-right direction by the transport stage 1 (step S3), and then performs a discharge angle variation measurement process after the head movement (step S4). .

Hereinafter, the discharge angle variation measurement process after the head movement will be described with reference to FIG.
FIG. 9 is a flowchart illustrating an example of an operation related to the discharge angle variation measurement process after the head is moved.

The discharge angle variation measurement process after the head movement described below is performed after the inkjet head S is moved and the standard deviation σ (2) is calculated, and the discharge angle variation measurement process before the head movement (see FIG. 8). Is substantially the same.
That is, as shown in FIG. 9, first, the number of ink droplet ejection angles and the number of strobodilays are set (step S41).
Next, the head driving unit 2 drives the inkjet head S to eject ink droplets from the nozzles under the control of the control unit 7 (step S42), and then the imaging unit 3 is controlled by the control unit 7. Then, after imaging the ink droplets ejected from the nozzles at the first timing, the same ink droplets are imaged again at the second timing (step S43).

  Next, the image processing unit 5 controls the center of gravity (Xa1, Ya1) of the ink droplets captured at the first timing and the center of gravity (Xa2) of the ink droplets captured at the second timing under the control of the control unit 7. , Ya2) (step S44: center of gravity calculation processing), and then, based on the calculated center of gravity of the ink droplet, the ejection angle (θ) of the ink droplet ejected from a predetermined nozzle of the inkjet head S is calculated ( Step S45).

  If the image processing unit 5 determines that the number of measurement of the ink droplet ejection angle has not reached the set number of measurement under the control of the control unit 7 (step S46; NO), the process proceeds to step S42. The subsequent processing is repeated until the number of measurement of the ink droplet ejection angle reaches the set number of measurements (step S46; YES).

If it is determined in step S46 that the number of measurement of the ink droplet ejection angle has reached the set number of measurements (step S46; YES), the image processing unit 5 ejects a plurality of times from a predetermined nozzle of the inkjet head S. The variation of the ejection angle (θ) of the ink droplet is calculated based on the ejection angle (θ) of the ink droplet, and the standard deviation σ (2) is calculated based on the variation of the ejection angle (step S47). : Status information generation processing).
Thus, the discharge angle variation measurement process after the head movement is completed.

Thereafter, as shown in FIG. 7, the CPU 71 of the control unit 7 executes the first state determination control program 73 d of the storage unit 73, and the image processing unit 5 performs the inkjet head S generated by the state information generation process. The absolute value obtained by subtracting the standard deviation σ (2) related to the variation in the discharge angle of the predetermined nozzle after the movement of the inkjet head S from the standard deviation σ (1) related to the variation in the discharge angle of the predetermined nozzle before the movement It is determined whether or not the value is smaller than a preset allowable value α1 for comparison (step S5: state determination process).
If it is determined that | σ (1) −σ (2) | is smaller than the allowable value α1 (step S5; YES), the CPU 71 of the control unit 7 notifies that the ink droplet ejection state is normal. The display control signal concerning is transmitted, and the monitor 6 is displayed as normal (step S6).
On the other hand, if it is determined that | σ (1) −σ (2) | is equal to or greater than the allowable value α1 (step S5; NO), the CPU 71 of the control unit 7 notifies that the ink droplet ejection state is abnormal. Such a display control signal is transmitted to display an abnormality on the monitor 6 (step S7).

  And after performing said test | inspection about all the nozzles, the inkjet head S is removed from the conveyance stage 1, and the said head test | inspection process is complete | finished (step S8).

As described above, according to the head inspection apparatus 100 of the first embodiment, the ink droplet ejection state can be determined based on the ejection state information relating to the ink droplet ejection state before and after the movement of the inkjet head S. .
Specifically, before and after the movement of the inkjet head S, variation information (standard deviation σ) relating to variations in the ejection angle of ink droplets ejected from a predetermined nozzle a plurality of times is generated, and status information generation processing is performed. The standard deviation σ (2) related to the variation in the ejection angle of the predetermined nozzle after the movement of the inkjet head S from the standard deviation σ (1) related to the variation in the ejection angle of the predetermined nozzle before the movement of the generated inkjet head S Whether or not the ink droplet ejection state is normal can be determined according to whether or not the absolute value of the value obtained by subtracting is smaller than the allowable value α1.
Therefore, the head inspection can be appropriately performed in consideration of the influence of the vibration of the ink jet head S, particularly the influence of the vibration caused by the movement of the ink jet head S.

[Embodiment 2]
Hereinafter, the head inspection apparatus according to the second embodiment will be described with reference to FIGS. 10 and 11.
FIG. 10 is a diagram illustrating a configuration of the control unit 7 of the head inspection apparatus according to the second embodiment to which the present invention is applied.

As shown in FIGS. 10 and 11, the head inspection apparatus according to the second embodiment changes the discharge angle variation of a predetermined nozzle after moving the inkjet head S from the predetermined reference value σ (0) in the state determination process. The absolute value of the value obtained by subtracting the standard deviation σ (2) is compared with the allowable value α2, and it is determined whether or not the ink droplet ejection state is normal.
The head inspection apparatus according to the second embodiment has substantially the same configuration as that of the head inspection apparatus 100 according to the first embodiment except for the configuration of the control unit 7, and the description thereof is omitted.

  The storage unit 73 of the control unit 7 stores a second state information generation control program 73e, a second state determination control program 73f, and reference data d in addition to the imaging control program 73a and the gravity center calculation control program 73b.

The reference data d is a reference value σ (0) input based on a predetermined operation of the setting input unit by the user as reference state information relating to the determination of the ink droplet ejection state. The reference value σ (0) is information (variation reference information) for defining an allowable range of variation in the ejection angle of droplets ejected from the nozzle a plurality of times.
Here, the storage unit 73 constitutes a reference storage unit that stores reference state information.

The second state information generation control program 73e uses the image processing unit (state information generating unit) to display the discharge state information related to the discharge state of the ink droplets after the ink jet head S moves based on the ink droplet imaging result by the imaging unit 3. 5 is a program for causing the CPU 71 to realize the function related to the state information generation processing to be generated by the CPU 5.
Specifically, the CPU 71 executes the second state information generation control program 73e, so that the image processing unit 5 after the movement of the inkjet head S is based on the center of gravity of the ink droplet calculated in the center of gravity calculation process. The variation of the ejection angle θ of the ink droplet ejected from the predetermined nozzle a plurality of times is calculated, and the standard deviation σ (2) is generated as the ejection state information (variation information) based on the calculated variation of the ejection angle. .

The second state determination control program 73f determines the ink droplet ejection state based on the ejection state information after the movement of the inkjet head S generated in the state information generation process and the reference data d stored in the storage unit 73. This is a program for causing the CPU 71 to realize a function related to a state determination process to be determined by the image processing unit (state determination unit) 5.
Specifically, when the CPU 71 executes the second state determination control program 73f, the image processing unit 5 is generated by the state information generation process from the reference value σ (0) stored in the storage unit 73. Depending on whether or not the absolute value of the value obtained by subtracting the standard deviation σ (2) relating to the variation in the ejection angle of a predetermined nozzle after the movement of the inkjet head S is smaller than a preset allowable value α2 for comparison It is then determined whether the ink droplet ejection state is normal.

Next, the head inspection process will be described with reference to FIG.
FIG. 11 is a flowchart illustrating an example of an operation related to the head inspection process.
In the following head inspection process, it is assumed that an allowable value α2 for comparison in the state determination process is input and set based on a predetermined operation of a setting input unit (not shown) by the user.

  As shown in FIG. 11, first, after attaching the inkjet head S to a predetermined mounting portion of the transport stage 1 (step S <b> 1), the control unit 7 is based on a predetermined operation of a setting input unit (not shown) by the user. The input reference value σ (0) is set (step S102). The set reference value σ (0) is stored in a predetermined storage area of the storage unit 73.

Next, the control unit 7 moves the inkjet head S along the left-right direction by the transport stage 1 (step S3), and then performs a discharge angle variation measurement process after the head movement (step S4).
The discharge angle variation measurement process after the head movement is substantially the same as the process in the head inspection apparatus 100 of the first embodiment, and a description thereof will be omitted.

Thereafter, the CPU 71 of the control unit 7 executes the second state determination control program 73 f of the storage unit 73, and the image processing unit 5 determines the ink jet head S from the reference value σ (0) stored in the storage unit 73. It is determined whether or not the absolute value of the value obtained by subtracting the standard deviation σ (2) relating to the variation in the discharge angle of the predetermined nozzle after the movement is smaller than a preset allowable value α2 for comparison (step S105). : State determination processing).
If it is determined that | σ (0) −σ (2) | is smaller than the allowable value α2 (step S105; YES), the CPU 71 of the control unit 7 notifies that the ink droplet ejection state is normal. The display control signal concerning is transmitted, and the monitor 6 is displayed as normal (step S6).
On the other hand, if it is determined that | σ (0) −σ (2) | is equal to or larger than the allowable value α2 (step S105; NO), the CPU 71 of the control unit 7 notifies that the ink droplet ejection state is abnormal. Such a display control signal is transmitted to display an abnormality on the monitor 6 (step S7).

  And after performing said test | inspection about all the nozzles, the inkjet head S is removed from the conveyance stage 1, and the said head test | inspection process is complete | finished (step S8).

As described above, according to the head inspection apparatus of the second embodiment, the ink droplet ejection state is determined based on the reference data d relating to the determination of the ink droplet ejection state and the ejection state information relating to the ink droplet ejection state. Can be determined.
Specifically, the absolute value of the value obtained by subtracting the standard deviation σ (2) related to the variation in the ejection angle of a predetermined nozzle after the movement of the inkjet head S from the reference value σ (0) stored in the storage unit 73. It is possible to determine whether or not the ink droplet ejection state is normal depending on whether or not is smaller than the allowable value α2.
Therefore, the head inspection can be appropriately performed in consideration of the influence of the vibration of the ink jet head S, particularly the influence of the vibration caused by the movement of the ink jet head S.

The present invention is not limited to the above-described embodiment, and various improvements and design changes may be made without departing from the spirit of the present invention.
For example, the variation information (standard deviation) related to the variation in the ejection angle of the droplet is exemplified as the ejection state information. However, the present invention is not limited to this, but relates to the ejection state of the droplet. Any information may be used as long as the information fluctuates and is affected by the vibration.

  Furthermore, in the first and second embodiments, the inkjet head S that ejects ink droplets from the nozzles is exemplified as a head inspection target. However, the present invention is not limited to this, and any head that ejects droplets may be used. It can be anything.

In the first and second embodiments, the dedicated head inspection apparatus 100 for inspecting a head such as the ink jet head S is used. However, the present invention is not limited to this. For example, an organic EL display or a liquid crystal display is used. You may use the manufacturing apparatus (droplet discharge apparatus) which manufactures the display apparatus structural member which comprises display apparatuses, such as a display.
That is, some manufacturing apparatuses for applying an EL material for an organic EL display, a color filter material for a liquid crystal display, and the like include an imaging unit 3 and a transfer stage 1. You may make it test | inspect the discharge state of a head by measuring the discharge angle of a droplet.

  Furthermore, it is needless to say that other specific detailed structures can be appropriately changed.

  In addition, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a block diagram which shows schematic structure of the head test | inspection apparatus of Embodiment 1 to which this invention is applied. It is a figure which shows typically arrangement | positioning of the imaging part and light emission part of the head test | inspection apparatus of FIG. It is a figure which shows the structure of the control part of the head test | inspection apparatus of FIG. It is a figure for demonstrating the imaging timing of the droplet discharged from the inkjet head of the head test | inspection apparatus of FIG. It is a figure which shows an example of the result of the discharge angle dispersion | variation measurement process before and behind head movement. It is a figure which shows an example of the result of the discharge angle dispersion | variation measurement process before and behind head movement. 3 is a flowchart showing an example of an operation related to a head inspection process by the head inspection apparatus of FIG. 1. 8 is a flowchart illustrating an example of an operation related to a discharge angle variation measurement process before head movement in the head inspection process of FIG. 7. 8 is a flowchart illustrating an example of an operation related to a discharge angle variation measurement process after moving the head in the head inspection process of FIG. 7. It is a figure which shows the structure of the control part of the head test | inspection apparatus of Embodiment 2 to which this invention is applied. 11 is a flowchart illustrating an example of an operation related to a head inspection process performed by the head inspection apparatus of FIG. 10.

Explanation of symbols

100 Head inspection apparatus 1 Transport stage (head moving means)
3 Imaging unit (imaging means)
4 Light emitting unit 5 Image processing unit (state information generating unit, state determining unit)
7 control unit 73 storage unit (reference storage means)
S Inkjet head

Claims (8)

A head moving means for attaching a head for discharging droplets from the nozzle and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
State information generating means for generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of each droplet before and after the movement of the head, based on an imaging result by the imaging means;
A state determination unit that determines a discharge state of a droplet based on the discharge state information before and after the movement of the head generated by the state information generation unit;
A head inspection apparatus comprising: The status information generating means, as the ejection state information, by the movement back and forth each of said head, generates variation information according to the variation of the discharge angles of the multiple discharged droplets from the nozzle,
2. The head inspection according to claim 1, wherein the state determination unit determines a droplet discharge state based on the variation information before and after the movement of the head generated by the state information generation unit. apparatus. A head moving means for attaching a head for discharging droplets from the nozzle and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time after the head movement by the head moving means;
State information generating means for generating discharge state information related to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result by the imaging means;
Reference storage means for storing reference state information relating to the determination of the discharge state of the droplets;
A state determination unit that determines a discharge state of a droplet based on the reference state information stored in the reference storage unit and the discharge state information generated by the state information generation unit;
A head inspection apparatus comprising: The status information generating means, as the discharge state information, generates variation information according to the variation of the discharge angles of the multiple discharged droplets from the nozzle,
It said reference storing means, as the reference state information, and stores the variation reference information according to the allowable range of variation of the discharge angles of the multiple discharged droplets from the nozzle,
The state determination unit determines a droplet discharge state based on the variation reference information stored in the reference storage unit and the variation information generated by the state information generation unit. The head inspection apparatus according to claim 3. Using a head inspection apparatus equipped with a head moving means for attaching a head for discharging droplets from a nozzle and moving the head in a predetermined direction,
A process of imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
Based on the imaging result, processing for generating ejection state information related to the ejection angle with respect to one direction orthogonal to the movement direction of the head of each droplet before and after the movement of the head;
A process of determining a droplet discharge state based on the generated discharge state information before and after the movement of the head;
A head inspection method. A head inspection apparatus having a head for ejecting liquid droplets from a nozzle, and comprising a head moving means for moving the head in a predetermined direction, and a reference storage means for storing reference state information relating to determination of the discharge state of the liquid droplets make use of,
A process of imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time interval after the head is moved by the head moving means;
A process of generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result;
A process of determining a discharge state of a droplet based on the generated discharge state information and the reference state information stored in the reference storage unit;
A head inspection method. A creation unit that has a head for ejecting liquid droplets from a nozzle, and makes a liquid droplet ejected from the nozzle land on a substrate to create a display device constituent member that constitutes a display device;
A head moving means attached to the head and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time before and after each movement of the head by the head moving means;
State information generating means for generating discharge state information relating to a discharge angle based on one direction orthogonal to the moving direction of the head of each droplet before and after the movement of the head, based on an imaging result by the imaging means;
A state determination unit that determines a discharge state of a droplet based on the discharge state information before and after the movement of the head generated by the state information generation unit;
A droplet discharge apparatus comprising: A creation unit that has a head for ejecting liquid droplets from a nozzle, and makes a liquid droplet ejected from the nozzle land on a substrate to create a display device constituent member that constitutes a display device;
A head moving means attached to the head and moving the head in a predetermined direction;
Imaging means for imaging the liquid droplets ejected from the nozzle a plurality of times with a predetermined time after the head movement by the head moving means;
State information generating means for generating discharge state information related to a discharge angle based on one direction orthogonal to the moving direction of the head of the droplet based on the imaging result by the imaging means;
Reference storage means for storing reference state information relating to the determination of the discharge state of the droplets;
A state determination unit that determines a discharge state of a droplet based on the reference state information stored in the reference storage unit and the discharge state information generated by the state information generation unit;
A droplet discharge apparatus comprising:

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