JP5105491B2 - パターン化した研磨工具 - Google Patents
パターン化した研磨工具 Download PDFInfo
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- JP5105491B2 JP5105491B2 JP2009198461A JP2009198461A JP5105491B2 JP 5105491 B2 JP5105491 B2 JP 5105491B2 JP 2009198461 A JP2009198461 A JP 2009198461A JP 2009198461 A JP2009198461 A JP 2009198461A JP 5105491 B2 JP5105491 B2 JP 5105491B2
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- brazing
- paste
- tool
- abrasive grains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
(A)所定形状の複数の穴(perforation) を有する型板を用意する工程、
(B)研磨工具上の切削表面を型板に接触させ、それにより穴が切削表面に隣接する空洞を規定する工程、
(C)金属ろう付け組成物と結合剤成分とを含むろう付けペーストを用意する工程、
(D)空洞をろう付けペーストで充填する工程、
(E)型板を取り除き、切削表面上にろう付けペーストの小塊部を形成する工程であって、各々の小塊部はペーストのない流路で隣り合う小塊部から離れたものとなっている工程、
(F)小塊部上に砥粒を配置する工程、及び
(G)研磨工具を熱処理することで、切削表面に砥粒をろう付けする工程
を含む研磨工具の作成方法を提供する。
(A)所定形状の複数の穴を有する型板を用意する工程、
(B)転写媒体を型板に接触させ、それにより穴が転写媒体に隣接する空洞を規定する工程、
(C)ろう付け組成物と結合剤成分とを含むろう付けペーストを用意する工程、
(D)空洞をろう付けペーストで満たす工程、
(E)型板を取り除き、転写媒体上にろう付けペーストの小塊部のパターン化した面を形成する工程であって、各々の小塊部はペーストのない流路で隣り合う小塊部から離れたものとなっている工程、
(F)パターン化した面を研磨工具の切削表面に押しつける工程、
(G)転写媒体を剥がすことで、小塊部を切削表面上に残す工程、
(H)小塊部上に砥粒を配置する工程、及び
(I)研磨工具を熱処理することで、切削表面に砥粒をろう付けする工程
を含む研磨工具を作成する方法を提供する。
この方法は、アルファアルミナの個々の結晶がサイズにおいて非常に均一で、かつ本質的に全てミクロン以下の直径である結晶組織を生成する。適当なシードは、アルファアルミナそれ自体だけでなく、そのようなシードが存在しない時に変態が通常起こる温度以下で、前駆物質からアルファアルミナを生成するのに有効な、アルファアルミナのものと十分類似した格子パラメータを有する、アルファ酸化第二鉄、亜酸化クロム、チタン酸ニッケル及び、多くの種類の他の化合物などの、他の化合物を含む。そのようなシード添加したゾルゲル法の実施例は、米国特許第4,623,364 号、第4,744,802 号、第4,788,167 号、第4,881,971 号、第4,954,462 号、第4,964,883 号、第5,192,339 号、第5,215,551 号、第5,219,806 号及び第5,453,104 号に開示され、その開示をここで参照し、他にも多くある。
実施例は図1を参照することでよく理解することができる。紫外線不可入性の被膜を有する長さ15インチ×幅15インチ×厚さ0.010インチのステンレス鋼板の表面をマスクする。マスク1は、各々の辺6が0.115 インチの長さで、中心間距離8が0.32インチの露出した正6角形の領域4を有する連続的な網状構造2である。隣接する6角形の間の間隔10は0.12インチである。薄板をフォトエッチングすることで、露出した領域に6角形の穴を開け、マスクを取り除く。穴を開けたステンレス鋼型板を丈夫で剛性のある矩形フレームに据え付けることで平坦度を維持する。切削表面を上に向けてテーブルに研磨円盤用の厚さ0.030 インチ、直径9.875 インチの平坦な円形の鋼予備形成品を置く。円盤上の中心に型板を整列し、円盤の面が型板の一方の面に接触するようにフレームを予備形成品に締め付ける。型板の露出した面を水平平面において上向きに維持する。
中心間距離5mmで60°の規則正しいパターン(isometric pattern) で直径2.0mm の円形穴を、厚さ0.2 インチ×幅12インチ×長さ12インチのステンレス鋼板を貫いて穴あけすることで、型板を形成した。型板を丈夫で剛性のあるフレームに据え付けることで型板の平坦度を維持する。厚み1インチ×幅12インチ×長さ12インチの円滑な表面のウレタンゴムのパッド上に型板を整列する。型板とゴムパッドを積層して接触するようにする。型板の露出面を水平平面において上向きに維持する。およそ直径0.5 インチ、長さ12インチの IncusilTM ABAろう付けペーストのビードを型板の1辺に沿って施す。長さ14インチの硬質ゴムスキージを使用することで、わずかに下方に圧力をかけて型板の露出面を横断して安定した速度のストロークでビードを引き延ばし、型板の露出面と同じ高さの深さまで、すなわち約0.2 インチまでろう付けペーストを円筒形空洞に押し込む。1回のパスのみを使用することで、穴の間の型板の下方でろう付けペーストが流れ出るのを防ぐ。
Claims (8)
- (A)所定形状の複数の穴を有する型板を用意する工程、
(B)研磨工具用の金属予備形成品上の切削表面を前記型板に接触させ、それにより前記穴が前記切削表面に隣接する空洞を規定する工程、
(C)金属ろう付け組成物と結合剤成分とを含むろう付けペーストを用意する工程、
(D)砥粒をろう付けペーストと前もって混合し、ここで前記砥粒の寸法は前記型板の厚みの75%未満である工程、
(E)前記空洞を前記ろう付けペーストおよび前記砥粒で充填する工程、
(F)前記型板を取り除き、前記切削表面上に前記ろう付けペーストおよび前記砥粒の小塊部を形成する工程であって、各々の小塊部は、ペーストの無い流路によって、隣り合う小塊部から分離されている工程、及び
(G)前記研磨工具を熱処理することによって、前記切削表面に前記砥粒をろう付けして、前記研磨工具を製造する工程
を含む研磨工具の製造方法。 - (A)所定形状の複数の穴を有する型板を用意する工程、
(B)転写媒体を前記型板に接触させ、それにより前記穴が前記転写媒体に隣接する空洞を規定する工程、
(C)ろう付け組成物と結合剤成分とを含むろう付けペーストを用意する工程、
(D)砥粒をろう付けペーストと前もって混合し、ここで前記砥粒の寸法は前記型板の厚みの75%未満である工程、
(E)前記空洞を前記ろう付けペーストおよび前記砥粒で充填する工程、
(F)前記型板を取り除き、前記転写媒体上に前記ろう付けペーストおよび前記砥粒の小塊部のパターン化した面を形成する工程であって、各々の小塊部は、ペーストの無い流路によって、隣り合う小塊部から分離されている工程、
(G)パターン化した面を前記研磨工具用の球、円錐形、円錐台形の形状の金属予備形成品の切削表面に押しつける工程、
(H)前記転写媒体を剥がすことで、前記小塊部を前記切削表面上に残す工程、及び
(I)前記研磨工具を熱処理することによって、前記金属予備形成品の前記切削表面に前記砥粒をろう付けして、前記研磨工具を製造する工程
を含む研磨工具の製造方法。 - 予備成形品が、研磨工具用の工具本体であって、球、円錐型、円錐台形の金属予備成形品からなる群から選択される、請求項1に記載の方法。
- 予備成形品が、研磨工具用の工具本体であって、球、円錐型、円錐台形の金属予備成形品からなる群から選択される、請求項2に記載の方法。
- 請求項1に記載の方法により製造される研磨工具。
- 請求項2に記載の方法により製造される研磨工具。
- 研磨工具が、隣り合う小塊部から分離された個々の小塊部に組み込まれた砥粒から形成される、請求項1に記載の方法により製造される研磨工具。
- 研磨工具が、隣り合う小塊部から分離された個々の小塊部に組み込まれた砥粒から形成される、請求項2に記載の方法により製造される研磨工具。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/856,501 US6537140B1 (en) | 1997-05-14 | 1997-05-14 | Patterned abrasive tools |
US08/856,501 | 1997-05-14 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003297853A Division JP2004001232A (ja) | 1997-05-14 | 2003-08-21 | パターン化した研磨工具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009285829A JP2009285829A (ja) | 2009-12-10 |
JP5105491B2 true JP5105491B2 (ja) | 2012-12-26 |
Family
ID=25323788
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54921598A Withdrawn JP2001507290A (ja) | 1997-05-14 | 1998-03-19 | パターン化した研磨工具 |
JP2003297853A Withdrawn JP2004001232A (ja) | 1997-05-14 | 2003-08-21 | パターン化した研磨工具 |
JP2009198461A Expired - Lifetime JP5105491B2 (ja) | 1997-05-14 | 2009-08-28 | パターン化した研磨工具 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54921598A Withdrawn JP2001507290A (ja) | 1997-05-14 | 1998-03-19 | パターン化した研磨工具 |
JP2003297853A Withdrawn JP2004001232A (ja) | 1997-05-14 | 2003-08-21 | パターン化した研磨工具 |
Country Status (11)
Country | Link |
---|---|
US (1) | US6537140B1 (ja) |
EP (1) | EP1009592B1 (ja) |
JP (3) | JP2001507290A (ja) |
AT (1) | ATE227624T1 (ja) |
AU (1) | AU717867B2 (ja) |
BR (1) | BR9809621A (ja) |
CA (1) | CA2287199C (ja) |
DE (1) | DE69809442T2 (ja) |
ES (1) | ES2187943T3 (ja) |
NZ (1) | NZ500076A (ja) |
WO (1) | WO1998051448A1 (ja) |
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-
1997
- 1997-05-14 US US08/856,501 patent/US6537140B1/en not_active Expired - Lifetime
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1998
- 1998-03-19 BR BR9809621-4A patent/BR9809621A/pt not_active IP Right Cessation
- 1998-03-19 WO PCT/US1998/005537 patent/WO1998051448A1/en active IP Right Grant
- 1998-03-19 AT AT98911896T patent/ATE227624T1/de active
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CA2287199A1 (en) | 1998-11-19 |
JP2009285829A (ja) | 2009-12-10 |
EP1009592A1 (en) | 2000-06-21 |
BR9809621A (pt) | 2000-07-04 |
DE69809442T2 (de) | 2003-08-28 |
ES2187943T3 (es) | 2003-06-16 |
WO1998051448A1 (en) | 1998-11-19 |
JP2001507290A (ja) | 2001-06-05 |
ATE227624T1 (de) | 2002-11-15 |
AU717867B2 (en) | 2000-04-06 |
CA2287199C (en) | 2004-03-16 |
NZ500076A (en) | 2000-06-23 |
EP1009592B1 (en) | 2002-11-13 |
JP2004001232A (ja) | 2004-01-08 |
AU6574598A (en) | 1998-12-08 |
US6537140B1 (en) | 2003-03-25 |
DE69809442D1 (de) | 2002-12-19 |
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