JP5065530B2 - microscope - Google Patents

Description

  The present invention relates to a microscope provided with an objective lens having a function of correcting aberration caused by a thickness error of a cover glass or a bottom thickness error of a transparent container that accommodates a specimen, for example, a container such as a petri dish.

  In recent years, in the field of biology, the main focus is shifting from the conventional observation of cell morphology to examining the information transmission mechanism between cells. Along with this, the need for higher performance of microscopes and objective lenses is also expanding.

  In general, a microscope objective lens is designed on the assumption that the thickness of a plane parallel plate such as a cover glass is constant. Therefore, when the thickness of the cover glass or the like changes more than the design reference value, the imaging performance deteriorates. This tendency becomes more prominent with a high-performance objective lens having a large numerical aperture.

  Further, the bottom thickness error of a petri dish or the like often used for observation with an inverted microscope also causes the imaging performance of the objective lens to deteriorate.

  Therefore, as disclosed in JP-A-5-119263 and JP-A-8-114747, the lens interval in the objective lens is changed in accordance with the change in the thickness of the cover glass or the bottom of the container such as a petri dish. A so-called objective lens with a correction ring that corrects aberration fluctuations is known.

  In JP-A-5-119263 and JP-A-8-114747, the aberration correction lens group in the objective lens is moved along the optical axis, so that the aberration caused by the thickness error of the cover glass is reduced. It is corrected.

  When the aberration correction of the thickness error of the cover glass is performed in the microscope observation, the aberration correction is performed by turning the correction ring of the objective lens so that the resolution is improved after focusing on the sample. However, since the focus is shifted by performing this aberration correction, there is a problem that it is necessary to focus again and it takes time and effort.

  An object of the present invention is to provide a microscope in which the focus is maintained even when aberration correction in the objective lens is performed.

The microscope of the present invention includes a stage on which a specimen that is covered with a cover glass or held by a transparent specimen holding member is placed, and the cover glass or the specimen holding member An objective lens with an aberration correction function facing the stage, and an electric motor for moving and driving the aberration correction lens of the objective lens with an aberration correction function in the optical axis direction. A light detector having a light-receiving surface and detecting light incident on the light-receiving surface; and light from the sample that has passed through the objective lens with an aberration correction function on the light-receiving surface of the light detector. The distance between the stage and the objective lens with an aberration correction function is changed by driving one or both of the guiding detection optical system, the stage and the objective lens with an aberration correction function. From the light detected by the light detecting means, the observation optical system for forming the observation image of the specimen through the light from the specimen passing through the objective lens with the aberration correction function, The contrast of the image of the sample on the light receiving surface is acquired, the electric moving means and the electric focusing means are repeatedly controlled based on the contrast, the observation image is focused, and the observation image Processing means for correcting aberrations, and the processing means stops the control of the electric movement means and the control of the electric focusing means when the contrast reaches a maximum .

  ADVANTAGE OF THE INVENTION According to this invention, the microscope which a focus is maintained even if it corrects the aberration in an objective lens can be provided. As a result, the focus can be maintained even if the thickness error of the cover glass or the transparent container that accommodates the sample, for example, the bottom thickness error of the petri dish is corrected by the objective lens with an aberration correction function. Can be omitted.

(First embodiment)
FIG. 1 is a diagram showing a configuration of an upright microscope according to the first embodiment of the present invention. A specimen 103 with a cover glass is placed on a stage 102 that is moved in the optical axis direction by the electric focusing unit 101. The electric focusing unit 101 is attached to the mirror body 104, and its driving is controlled by a driver 105.

  An objective lens 106 with a correction ring is attached to the mirror body 104. In order to detect the rotation amount of the correction ring 106A provided in the objective lens 106 with the correction ring, an encoder 107 including a disk 107A and a sensor 107B is provided. The disk 107A is attached to the correction ring 106A, and the sensor 107B is attached to the mirror body 104.

  When the observer performs correction of aberration by rotating the correction ring 106A (manually), the arithmetic circuit 108 receives a signal corresponding to the rotation amount of the correction ring 106A from the encoder 107, and rotates the correction ring 106A indicated by this signal. The amount of focus (focus) deviation of the objective lens 106 with a correction ring is calculated from the amount, and a signal is sent to the driver 105. At this time, the arithmetic circuit 108 calculates the focus shift amount based on the correlation between the rotation amount of the correction ring 106 </ b> A and the focus shift amount of the objective lens 106 stored in advance from the input unit 110 in the memory 109. The stage 102 moves in the optical axis direction by driving the electric focusing unit 101 based on a signal indicating the amount of focus deviation sent from the arithmetic circuit 108 via the driver 105.

  FIG. 2 is a diagram illustrating a focusing procedure according to the first embodiment. As shown in FIG. 2A, the observer operates the stage 102 to focus on the specimen 103, and then, as shown in FIG. 2B, aberration due to the cover glass thickness error of the specimen 103. When the observer turns (manually) the correction ring 106A for correction, the arithmetic circuit 108 receives a signal corresponding to the rotation amount from the encoder 107 in correlation with the rotation amount, as shown in FIG. The arithmetic circuit 108 calculates the focus shift amount based on the correlation between the rotation amount of the correction ring 106A from the memory 109 and the focus shift amount of the objective lens 106, and drive control of the stage 102 according to the calculated focus shift amount. Is driven by the electric focusing unit 101 via the driver 105, and the stage 102 is driven in the in-focus direction. This eliminates the need for focusing after aberration correction.

(Second Embodiment)
FIG. 3 is a diagram showing a configuration of an inverted microscope according to the second embodiment of the present invention. An objective lens 203 with a correction ring is attached to an objective lens attachment portion 202 that is moved in the optical axis direction by the electric focusing portion 201. The electric focusing unit 201 is attached to the mirror body 204, and driving is controlled by a driver 205. On the stage 206 of the mirror body 204, a specimen 207 placed in a petri dish which is a specimen holding member having transparency is placed.

  In addition, in order to detect the rotation amount of the correction ring 203A provided in the objective lens 203 with the correction ring, an encoder 208 composed of a disk 208A and a sensor 208B is provided. The disk 208A is attached to the correction ring 203A, and the sensor 208B is attached to the mirror body 204.

  When the observer manually rotates the correction ring 203A to correct aberration, the arithmetic circuit 209 receives a signal corresponding to the rotation amount of the correction ring 203A from the encoder 208, and from the rotation amount of the correction ring 203A indicated by this signal. The focus shift amount of the objective lens 203 with a correction ring is calculated and a signal is sent to the driver 205. At this time, the arithmetic circuit 209 calculates the focus shift amount based on the correlation between the rotation amount of the correction ring 203A and the focus shift amount of the objective lens 203 stored in the memory 210 in advance from the input unit 211. Then, the electric focusing unit 201 is driven based on a signal indicating the amount of defocus sent from the arithmetic circuit 209 via the driver 205, so that the objective lens 203 with a correction ring moves in the optical axis direction.

  Therefore, in the second embodiment, after the observer focuses on the specimen 207, when the observer manually turns the correction ring 203A to correct aberration due to the cover glass thickness error of the specimen 207, the rotation is performed. The arithmetic circuit 209 receives a signal corresponding to the amount of rotation from the encoder 207 in correlation with the amount, and the arithmetic circuit 209 that receives the signal controls the electric focusing unit 201 via the driver 205 to provide an objective lens with a correction ring. Since 203 is driven in the in-focus direction, the focusing operation after aberration correction is not necessary.

(Third embodiment)
FIG. 4 is a diagram showing a configuration of an upright microscope according to the third embodiment of the present invention. A specimen 303 with a cover glass is placed on a stage 302 that is moved in the optical axis direction by the electric focusing unit 301. The electric focusing unit 301 is attached to the mirror body 304, and the driving is controlled by the FO driver 305.

  An objective lens 306 with a correction ring is attached to the mirror body 304. A pulley 307 is attached to a correction ring (not shown) provided in the objective lens 306 with a correction ring, and a pulley 309 is attached to the shaft of a stepping motor (moving means) 308 for rotating the correction ring. ing. The stepping motor 308 is attached to the mirror body 304, and its driving is controlled by the SM driver 310. A belt 311 is hung on the pulleys 307 and 309, and the observer gives an instruction to rotate the correction ring to the stepping motor 308 via the SM driver 310 from the operation unit 315 connected to the arithmetic circuit 312. The rotational force of the stepping motor 308 is transmitted to the correction ring via the pulleys 307 and 309 to rotate the correction ring.

  The arithmetic circuit 312 receives a signal from the operation unit 315 for correcting the aberration of the objective lens 306 with a correction ring, and calculates a defocus amount of the objective lens 306 with a correction ring based on the rotation of the stepping motor 308 based on this signal. Then, a signal is sent to the FO driver 305. At this time, the arithmetic circuit 312 calculates the focus shift amount based on the correlation between the rotation amount of the correction ring stored in advance in the memory 313 from the input unit 314 and the focus shift amount of the objective lens 306. Then, when the electric focusing unit 301 is driven based on a signal indicating the amount of focus deviation sent from the FO driver 305, the objective lens 306 with a correction ring moves in the optical axis direction.

Therefore, in the third embodiment, after focusing on the specimen 303,
When aberration correction is performed to correct the cover glass thickness error of the specimen 303, the objective lens 306 with a correction ring is focused in correlation with the adjustment amount at the same time, so that focusing work after aberration correction is not necessary.

  The means for rotating the correction ring is not limited to the stepping motor and the belt, and the same effect can be obtained as in the case where the correction ring can be electrically driven and the drive amount can be recognized, for example, a rotating gear or a rack and pinion mechanism. Anything can be used. The same result can be obtained even when the configuration of the third embodiment is used for the mirror body of an inverted microscope.

  The present invention is not limited only to the above-described embodiment, and can be appropriately modified without departing from the scope of the invention. For example, a piezoelectric element or the like may be used instead of the electric focusing unit.

(Fourth embodiment)
FIG. 5 is a diagram showing the configuration of an upright microscope according to the fourth embodiment of the present invention. The specimen 503 to be observed is placed on the stage 502. The specimen 503 is covered with a cover glass 503A. Note that the specimen 503 may be held by a transparent specimen holding member, such as a petri dish, instead of being covered with the cover glass 503A. Moreover, both the cover glass 503A and the specimen holding member having permeability may be used.

  An objective lens with an aberration correction function 506 is provided opposite to the stage 502. The objective lens with aberration correction function 506 has a mechanism for correcting a thickness error of the cover glass 503A. If a permeable container is used, the thickness error is corrected. When both the cover glass 503A and the permeable container are used, both thickness errors are corrected. An aberration correction lens is provided inside the objective lens 506. When the correction ring 506A provided in the objective lens 506 is rotated, the aberration correction lens moves along the optical axis, and the thickness error of the cover glass 503A is corrected.

  The stage 502 is provided with an electric focusing unit 501 that drives the stage 502 in the vertical direction so as to change the distance between the stage 502 and the objective lens 506. The electric focusing unit 501 is used as a focusing unit. The electric focusing unit 501 may drive the objective lens 506 instead of the stage 502, or may drive both the stage 502 and the objective lens 506.

  The microscope is provided with a stepping motor 509 that moves the aberration correction lens of the objective lens 506. A stepping motor 509 is used as a moving means. Similar to the third embodiment, the correction ring 506A of the objective lens 506 is rotated by a stepping motor 509 via a pulley and a belt (not shown). Any moving means may be used as long as the same effect can be obtained.

  In the optical system of the microscope, an epi-illumination light source 530 for an epi-illumination mirror that illuminates a specimen 503 on the stage 502 and a transmission light source 531 for a trans-illumination mirror are arranged. The epi-illumination light from the epi-illumination light source 530 is reflected to the sample 503 side by the half mirror 530A disposed on the observation optical axis 506B. During this time, the epi-illumination light passes through the two lenses 530B and 530C. The observation optical axis 506B is an optical axis extending from the objective lens 506 and reaching an observation optical system 533 described later. The reflected epi-illumination light is incident on the specimen 503 through the objective lens 506.

  On the other hand, the transmitted illumination light of the transmissive light source 531 is reflected to the sample 503 side by the mirror 531A installed below the stage 502, and illuminates the sample 503 from below through the optical path opening 502A provided in the stage 502. . Two lenses 531B and 531C are arranged on the optical path of the transmitted illumination light.

  Light from the specimen 503 obtained by any one of these light sources 530 and 531 passes through the objective lens 506, the half mirror 530A, and the imaging lens 532, and enters the optical path branching member 533A. The incident light is branched, and a part thereof is guided to the eyepiece lens 533B and the other part is guided to a detection optical system 534 described later. The optical path branching member 533A and the eyepiece lens 533B form an observation optical system 533. The observation optical system 533 passes the light from the sample 503 that has passed through the objective lens 506 and forms an observation image of the sample 503 for observation.

  The detection optical system 534 includes a mirror 534A that deflects light incident on the detection optical system 534, and a split prism 534B that divides the deflected light. A CCD sensor 535 is provided to face the split prism 534B. The CCD sensor 535 is used as light detection means. The CCD sensor 535 has two light receiving surfaces 535A and 535B, and detects light incident on these light receiving surfaces 535A and 535B. The light divided by the dividing prism 534B travels along two optical paths, and these optical paths enter the two light receiving surfaces 535A and 535B of the CCD sensor 535, respectively. Thus, the detection optical system 534 guides the light from the sample 503 that has passed through the objective lens 506 to the light receiving surfaces 535A and 535B of the CCD sensor 535.

  The split prism 534B uses the number of reflections in the split prism 534B to make the two optical path lengths from the imaging lens 532 to the two light receiving surfaces 535A and 535B different. The light receiving surfaces 535A and 535B of the CCD sensor 535 at this time are optically conjugate positions (front conjugate surfaces) before and after the planned imaging surface of the imaging optical system constituted by the imaging lens 532 and the detection optical system 534. And the rear conjugate plane). As a result, the image (the front pin image and the rear pin image) of the sample 503 is projected onto the light receiving surfaces 535A and 535B of the CCD sensor 535 at two conjugate positions from the planned imaging surface.

  FIG. 6 is a graph of the contrast of the front pin image and the rear pin image with respect to the position of the stage 502 in the vertical direction (Z direction). The contrast of these two images is equal when the specimen 503 is located at the focal point. A defocus amount (displacement of the stage 502 from the focal point) indicating the degree of focusing of the sample 503 is calculated by the arithmetic circuit 512 connected to the CCD sensor 535 from the difference between the two contrasts. The defocus signal is input to CPU 512A. When a defocus signal is given from the arithmetic circuit 512, the CPU 512A calculates a signal for the amount and direction of movement of the stage 502 for moving the sample 503 to the focal point. Based on this signal, the stage 502 is driven in the vertical direction by the electric focusing unit 501 via the stage drive circuit 505. The arithmetic circuit 512, the CPU 512A, and the stage driving circuit 505 are included in the processing means 540. As described above, the processing unit 540 controls the electric focusing unit 501 so that the observation image formed by the observation optical system 533 is in focus (optical axis direction focusing adjustment).

  The CPU 512A can output a signal to a correction ring driving circuit 510 interposed between the CPU 512A and the stepping motor 509, and the stepping motor 509 can rotate the correction ring 506A. The correction ring drive circuit 510 is included in the processing means 540. The correction ring 506A is provided with a sensor 506C that detects the rotational position of the correction ring 506A. As the sensor 506C, the encoder 107 described in the first embodiment may be used.

  A method of correcting the thickness error of the cover glass 503A due to the correction ring 506A of the objective lens 506 will be described. FIG. 7 is a flowchart of the correction method. First, the specimen 503 and the cover glass 503A are set on the stage 502 (S1).

  Next, the CPU 512A rotates the correction ring 506A to the initial position by the stepping motor 509 (S2).

  After the correction ring 506A reaches the initial position, the above-described focusing adjustment in the optical axis direction is performed (S3).

  Next, the CPU 512A rotates the correction ring 506A by a predetermined amount by the stepping motor 509 (correction ring adjustment (S4)). When the correction ring 506A rotates, the aberration correction lens in the objective lens 506 moves and defocusing occurs in the optical axis direction.

  Next, the optical axis direction focusing adjustment is performed again (S5). As a result, the defocus generated in (S4) is corrected.

  Thereafter, the correction ring adjustment and the optical axis direction focusing adjustment are repeated (S6, S7...). FIG. 8 is a graph of the contrast of the observation image obtained by the observation optical system 533. The horizontal axis is the same as that of FIG. The curve “Stage Up / Down” is a contrast curve obtained when the stage 502 is driven in the up / down direction without rotating the correction ring 506A from the initial position, and the curve “Stage Up / Down + Correction Ring Adjustment” is as described above. It is a contrast curve obtained when the stage 502 is driven in the vertical direction after the adjustment and the focusing adjustment in the optical axis direction are repeated.

  In both curves, the position in the stage Z direction corresponding to the peak value of the contrast is the focal point. When the correction ring adjustment and the optical axis direction focusing adjustment are repeated, the shape of the curve “stage up / down + correction ring adjustment” changes as the step proceeds, and the peak value of the contrast also changes. When the peak value of the contrast becomes maximum, the rotation of the correction ring and the vertical driving of the stage are stopped (S8).

  As described above, the processing unit 540 acquires the contrast of the image of the sample 503 on the light receiving surfaces 535A and 535B from the light detected by the CCD sensor 535, and based on this contrast, the electric focusing unit 501 and the stepping motor 509 are obtained. And control. As a result, the observation image is focused and the aberration of the observation image is corrected.

  Although an example of an upright microscope has been described in the fourth embodiment, the same effect can be obtained with an inverted microscope using a container such as a petri dish.

  Various variations and modifications are allowed in the flowchart shown in FIG. For example, in the fourth embodiment, the correction ring adjustment and the optical axis direction focus adjustment are repeated until (S7) and after, but the rotation of the correction ring is performed in any of the steps (S3) to (S7). The driving of the stage in the vertical direction may be stopped. Further, focusing adjustment in the optical axis direction may be performed between (S1) and (S2).

  The stage Z direction position z and the rotational position θ of the correction ring 506A change from the position (initial position) when (S3) is completed to the position (end position) when (S8). In the fourth embodiment, correction ring adjustment and optical axis direction focusing adjustment are repeated, and z and θ change alternately. However, how to change z and θ is not limited to this. For example, z and θ may be changed simultaneously. While changing, a defocus signal calculated from the contrast acquired using the CCD sensor 535 is input to the CPU 512A. The approach from the initial position to the end position is not limited.

  In the fourth embodiment, the CPU 512A controls the electric focusing unit 501 based on the defocus signal calculated by the arithmetic circuit 512 during the optical axis direction focusing adjustment, but the present invention is not limited to this. . For example, a memory similar to the memory 109 of the first embodiment may be provided in the CPU 512A. In this case, the CPU 512A controls the electric focusing unit 501 as in the first embodiment before controlling based on the defocus signal.

During the correction ring adjustment (S4, S6...), The correction ring 506A is rotated by a predetermined amount.
This rotation amount may be appropriately input by an observer by providing an input unit for inputting the rotation amount to the CPU 512A. The observer can correct the aberration by operating the input unit while looking through the eyepiece lens 533B.

(Fifth embodiment)
Most of the configuration of the fifth embodiment is basically the same as most of the configuration of the fourth embodiment. In the fifth embodiment, substantially the same constituent members as those described with reference to FIG. 5 of the fourth embodiment are the corresponding constituent members of the fourth embodiment. The same reference numerals as those instructed are attached and detailed description thereof is omitted. The configuration of the fifth embodiment is different from the configuration of the fourth embodiment in that the correction ring drive circuit 510 and the stepping motor 509 are not provided.

  A method for correcting the thickness error of the cover glass 503A will be described. First, the specimen 503 and the cover glass 503A are set on the stage 502. Next, the observer rotates the correction ring 506A while looking into the eyepiece lens 533B. During the rotation, the processing unit 540 controls the electric focusing unit 501 so that the observation image formed by the observation optical system 533 is focused. As a result, the aberration is corrected and the focus is adjusted.

  In the microscope according to the fifth embodiment of the present invention configured as described in detail above, the correction ring drive circuit 510 and the stepping motor 509 are omitted, so that a relatively inexpensive microscope can be achieved. .

(Sixth embodiment)
FIG. 9 is a diagram showing the configuration of an upright microscope according to the sixth embodiment of the present invention. Most of the configuration of the sixth embodiment is basically the same as most of the configuration of the fourth embodiment. In the sixth embodiment, substantially the same components as those described with reference to FIG. 5 of the fourth embodiment are the corresponding components of the fourth embodiment. The same reference numerals as those instructed are attached and detailed description thereof is omitted. The configuration of the sixth embodiment is different from the configuration of the fourth embodiment in that an aberration correction function non-objective lens 606 having no aberration correction function is also provided.

  The microscope according to the sixth embodiment includes objective lens selection means that can selectively position either one of the aberration correction function-free objective lens 606 or the aberration correction function-equipped objective lens 506 at the optical axis position of the observation optical path. It has more. The optical axis position of the observation optical path is a position on the observation optical axis 506B and facing the stage 502.

  In the sixth embodiment, the revolver 650 is used as the objective lens selection means. An objective lens 606 and an objective lens 506 are attached to the revolver 650, and one of the objective lenses 506 and 606, for example, the objective lens 506 can be positioned on the observation optical axis 506B. When the revolver 650 is rotated, the objective lens 506 can be moved away from the observation optical axis 506B, and the objective lens 606 can be positioned on the observation optical axis 506B instead of the objective lens 506.

  An external controller 653 is connected to the revolver 650 via a revolver drive unit 651 that rotates the revolver 650 and an objective lens drive circuit 652. By operating the external controller 653, the observer can rotate the revolver 650 and position one of the objective lenses 506 and 606 on the observation optical axis 506B.

  The CPU 512A determines whether any one of the objective lenses 506 and 606 is positioned on the observation optical axis 506B, and when the objective lens is positioned on the observation optical axis 506B, the objective lenses 506 and 606 are determined. A sensor 654 is connected to output a signal for determining which is located.

  The processing means 540 determines the signal from the sensor 654 and controls the electric focusing unit 501 and the stepping motor 509 corresponding to these two cases. That is, when the non-objective lens 606 with the aberration correction function is positioned on the observation optical axis 506B, the aberration is not corrected and the focus is achieved. When the objective lens with aberration correction function 506 is positioned on the observation optical axis 506B, the aberration is corrected and focused as in the fourth embodiment.

  With such a configuration, when the aberration correction function non-objective lens 606 having no aberration correction function is positioned on the observation optical axis 506B, the correction ring adjustment step can be omitted. Further, the same effect as in the fourth and fifth embodiments can be obtained.

  In the sixth embodiment, the revolver 650 is used as the objective lens selecting means, but the present invention is not limited to this. For example, a holder that holds the objective lens detachably facing the stage 502 may be provided, and one of the objective lenses 506 and 606, for example, the objective lens 506 may be attached. If the objective lens 506 is removed and the objective lens 606 is attached, the objective lens 606 can be opposed to the stage 502 instead of the objective lens 506.

  Further, in the sixth embodiment, two objective lenses are used, but three or more objective lenses may be used.

  The present invention is not limited only to the above-described embodiment, and can be appropriately modified without departing from the scope of the invention. For example, a piezoelectric element or the like may be used instead of the electric focusing unit.

  In the above-described embodiment, a container such as a petri dish is cited as an example of a transparent specimen holding member, but is not limited thereto, and may be, for example, a commonly used slide glass, It is considered that the present invention can be suitably used when the present invention is applied to an inverted microscope and the sample is observed from below with respect to a slide glass holding the sample.

The figure which shows the structure of the upright microscope which concerns on the 1st Embodiment of this invention. The figure which shows the focusing procedure by the 1st Embodiment of this invention. The figure which shows the structure of the inverted microscope which concerns on the 2nd Embodiment of this invention. The figure which shows the structure of the upright microscope which concerns on the 3rd Embodiment of this invention. The figure which shows the structure of the upright microscope concerning the 4th Embodiment of this invention. In the 4th Embodiment of this invention, the graph of the contrast of the front pin image and the back pin image with respect to the position of the up-down direction (Z direction) of a stage. The flowchart of the correction method by the 4th Embodiment of this invention. In the 4th Embodiment of this invention, the graph of the contrast of the observation image with respect to the position of the up-down direction (Z direction) of a stage. It is a figure which shows the structure of the upright microscope concerning the 6th Embodiment of this invention.

DESCRIPTION OF SYMBOLS 101 ... Electric focusing part 102 ... Stage 103 ... Sample 104 ... Mirror body 105 ... Driver 106 ... Objective lens 106A ... Correction ring 107 ... Encoder 107A ... Disk 107B ... Sensor 108 ... Arithmetic circuit 109 ... Memory 110 ... Input part DESCRIPTION OF SYMBOLS 201 ... Electric focusing part 202 ... Objective lens attaching part 203 ... Objective lens 203A ... Correction | amendment ring 204 ... Mirror body 205 ... Driver 206 ... Stage 207 ... Sample 208A ... Disk 208B ... Sensor 209 ... Arithmetic circuit 210 ... Memory 211 ... Input part DESCRIPTION OF SYMBOLS 301 ... Electric focusing part 302 ... Stage 303 ... Sample with cover glass 304 ... Mirror body 305 ... FO driver 306 ... Objective lens with correction ring 307 ... Pulley 308 ... Stepping motor 309 ... Pulley 310 ... SM driver 311 ... Belt 312 ... arithmetic circuit 313 ... memory 314 ... input unit 315 ... operation unit 501 ... electric focusing unit (focusing means)
502 ... Stage 503 ... Sample 503A ... Cover glass 505 ... Stage drive circuit 506 ... Objective lens with aberration correction function 506A ... Correction ring 506C ... Sensor 509 ... Stepping motor (moving means)
510 ... Correction ring drive circuit 512 ... Arithmetic circuit 512A ... CPU
533 ... Observation optical system 533A ... Optical path branching member 533B ... Eyepiece lens 534 ... Detection optical system 534A ... Mirror 534B ... Split prism 535 ... CCD sensor (light detection means)
535A, 535B ... light receiving surface 540 ... processing means 606 ... aberration correction function non-objective lens 650 ... revolver (objective lens selection means)
651 ... Revolver drive unit 652 ... Objective lens drive circuit 653 ... External controller 654 ... Sensor

Claims (4)

A stage on which a specimen that is covered by a cover glass or held by a specimen holding member having permeability is placed;
An aberration correction lens for correcting a thickness error of the cover glass or the specimen holding member;
An objective lens with an aberration correction function facing the stage;
Electric movement means for moving and driving the aberration correction lens of the objective lens with the aberration correction function in an optical axis direction;
A light detecting means having a light receiving surface and detecting light incident on the light receiving surface;
A detection optical system that guides light from the specimen that has passed through the objective lens with an aberration correction function to the light receiving surface of the light detection unit;
Electric focusing means for driving one or both of the stage and the objective lens with an aberration correction function to change an interval between the stage and the objective lens with an aberration correction function;
An observation optical system that passes light from the specimen that has passed through the objective lens with an aberration correction function and forms an observation image of the specimen; and
The contrast of the sample image on the light receiving surface is acquired from the light detected by the light detection means, and the electric moving means and the electric focusing means are repeatedly controlled based on the contrast, and the observation image And a processing means for correcting the aberration of the observation image ,
The microscope characterized in that the processing means stops the control of the electric moving means and the electric focusing means when the contrast reaches a maximum .  The microscope according to claim 1 holds at least two objective lenses with an aberration correction function and objective lenses without an aberration correction function, and selectively selects one of these objective lenses as an optical axis position of an observation optical path. It is further characterized by further comprising an objective lens selecting means that can be positioned in the position.  The microscope according to claim 1 is characterized in that the control of the electric moving means and the control of the electric focusing means are alternately performed.   The microscope according to claim 1 is characterized in that the control of the electric moving means and the control of the electric focusing means are performed simultaneously.

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