JP5062897B2 - Work bonding machine - Google Patents

Description

  The present invention relates to a workpiece laminating apparatus for laminating flat workpieces such as glass plates and plastic plates. The apparatus of the present invention is used in the process of manufacturing a liquid crystal substrate or a plasma display substrate, for example.

  In this kind of work laminating apparatus, it is disclosed in Patent Document 1 that the flat work pieces are pasted together using a metal diaphragm. In this case, the substrate holder holding the first substrate by suction is fixed on the XYθ table, and the second substrate is sucked and held by the suction head of the bonding head. A pressure chamber is formed on the lower surface of the bonding head, a ring-shaped metal diaphragm is arranged in the lower surface opening, and a suction head is fixed to the inner edge of the metal diaphragm. After the positions of both substrates are adjusted by the CCD camera, the suction head is pressed against the XYθ table side to bond the first substrate and the second substrate. At this time, the ring-shaped metal diaphragm tilts or deforms three-dimensionally to absorb non-uniform pressure applied to the bonding surfaces of both substrates. That is, the metal diaphragm in Patent Document 1 merely functions as a backup body for the suction head that sucks the second substrate, and the function is significantly different from that of the bonding diaphragm according to the present invention.

  In the workpiece bonding apparatus of the present invention, one substrate is pressed against the other substrate with a metal diaphragm, and bonding is performed from the center of both substrates toward the peripheral portion, but a liquid crystal panel adopting the same bonding form This manufacturing apparatus is known from Patent Document 2. In this case, a rubber air bag is provided on the upper bonding table, and the pair of substrates placed on the lower table is pressed and bonded by the previous air bag.

  In the workpiece bonding apparatus of the present invention, a pair of substrates are bonded in a vacuum chamber. As a similar technique, a sealing material provided between a pair of transparent electrodes is heated and cured in a reduced pressure environment. Is disclosed in Patent Document 3.

Japanese Patent Laying-Open No. 2004-238278 (paragraph number 0039, FIG. 4) JP 2001-255540 A (paragraph number 0015, FIG. 3) JP 59-57221 (page 3, lower left column, lines 13 to 20, line 4)

  As for the workpiece | work bonding apparatus of patent document 1, 2, all bond a pair of board | substrate in air | atmosphere. Therefore, it is inevitable that air exists between both substrates before bonding. Moreover, it is necessary to perform bonding while forcibly excluding air between both substrates at the time of bonding. However, it is difficult to completely eliminate the air between the substrates, and the incidence of defective products is high. In particular, when laminating a large area substrate, air is easily trapped locally, which is a great obstacle to improving the product yield.

  In this regard, according to the method for manufacturing a liquid crystal display element of Patent Document 3, the sealing material provided between the pair of transparent electrodes is heated and cured in a reduced pressure environment, so that air entrapment can be eliminated. However, since the pair of transparent electrodes is only bonded through a sealing material provided along the periphery of one transparent electrode, the workpiece bonding apparatus of the present invention for bonding the entire surface of the pair of substrates and The bonding structure is fundamentally different.

  The liquid crystal panel manufacturing apparatus of Patent Document 2 is similar to the workpiece bonding apparatus of the present invention in that the rubber air bag is pressed against a pair of substrates and bonded from the center to the peripheral portion of both substrates. To do. However, the rubber film itself constituting the airbag can be elastically deformed, and the airbag is inflated with compressed air having elasticity. Therefore, due to variations in flatness and parallelism of a pair of substrates temporarily bonded before bonding, it is difficult to bond them while applying a constant pressure to both substrates evenly, and the pair of substrates is parallel with high accuracy. It was difficult to paste.

  The objective of this invention is providing the workpiece | work bonding apparatus which can eliminate the biting of air, and can bond a pair of flat plate-shaped workpiece | work in parallel with high precision, and can improve the yield of a product.

The workpiece bonding apparatus of the present invention includes a vacuum chamber 2 and a vacuum source 3 that exhausts air in the vacuum chamber 2. Inside the vacuum chamber 2, a table 4 that supports the work holder 8, a bonding diaphragm 5, and an output unit 7 of a table drive structure 6 that presses the table 4 toward the bonding diaphragm 5 are provided. The work holder 8 includes a bonding table 22 on which the first work W1 is placed, and a plurality of work holding structures 23 that support the second work W2 with a predetermined facing gap from the first work W1. And. The work holding structure 23 includes a holding frame 24, a support 25 that is supported by the holding frame 24 so as to advance or retract, and a spring 26 that urges the support 25 to advance. The support 25 is in contact with the peripheral edges of the first work W1 and the second work W2 at the same time, and positions both the works W1 and W2. The holding frame 24 is supported by a holding base 21 fixed to the table 4 so as to be slidable up and down, and is urged by a spring 30. The bonding diaphragm 5 includes a metal diaphragm film 14 that can be expanded and deformed in a salient shape toward the bonding table 22. A pressure chamber 15 provided inside the diaphragm film 14 communicates with a pressure supply source 16. Thus, the air in the vacuum chamber 2 is exhausted by the vacuum source 3, the working fluid is supplied to the pressure chamber 15, and the diaphragm film 14 is inflated and deformed, and the table 4 is pressed by the table driving structure 6. The second workpiece W2 is bonded to the first workpiece W1 from the central portion toward the peripheral portion.

The support body 25 is formed of any one of a metal ball, a shaft body with one end rounded into a hemisphere, and a shaft body with one end formed in a conical shape.
The vacuum chamber 2 includes a fixed chamber body 10 and a movable chamber body 11 that can be opened and closed with respect to the fixed chamber body 10. The bonding diaphragm 5 is fixed inside the movable chamber body 11.

  The pressure supply source 16 includes a hydraulic cylinder 33 that supplies pressurized hydraulic oil to the pressure chamber 15, a piston operation mechanism 35 that reciprocally slides the piston rod 34 of the hydraulic cylinder 33, and a slide body 43 of the piston operation mechanism 35. Are configured by a stepping motor 36 that slides through an operation conversion mechanism, a control circuit 37 that controls the operating state of the stepping motor 36, and a pressure sensor 38 that detects the hydraulic pressure in the pressure chamber 15. Accordingly, the detection signal output from the pressure sensor 38 is fed back to the control circuit 37 to control the operation state of the stepping motor 36.

  Another pressure supply source 16 includes a hydraulic cylinder 33 that supplies pressurized hydraulic oil to the pressure chamber 15, an air cylinder 47 that reciprocates a piston rod 34 of the hydraulic cylinder 33, and a compression that is supplied to the air cylinder 47. An electropneumatic regulator 48 that controls the pressure of air, a control circuit 37 that controls the operating state of the electropneumatic regulator 48, and a pressure sensor 38 that detects the hydraulic pressure in the pressure chamber 15 are configured. Thus, the detection signal output from the pressure sensor 38 is fed back to the control circuit 37 to control the operating state of the electropneumatic regulator 48.

  The workpiece bonding apparatus of the present invention accommodates the table 4 supporting the workpiece holder 8 and the bonding diaphragm 5 in the vacuum chamber 2, and bonds both the first and second workpieces W1 and W2 in a vacuum environment. By combining, it was made possible to avoid as much as possible the presence of air on the bonding surfaces of the workpieces W1 and W2. Further, the second work W2 is supported by the work holding structure 23 of the work holder 8 with a predetermined facing gap from the first work W1, and the metal diaphragm film 14 is inflated and deformed into a projecting arc shape. The table 4 is driven in such a state that the second work W2 is elastically deformed along the projecting surface of the diaphragm film 14 so that both the works W1 and W2 can be bonded from the central portion toward the peripheral portion. .

  As described above, when both the workpieces W1 and W2 are bonded from the central portion toward the peripheral portion, even if a minute amount of air remains in the vacuum chamber 2, both the workpieces are forcibly excluded. W1 and W2 can be bonded. Since the diaphragm film 14 is made of metal, it is possible to eliminate the elastic deformation of the diaphragm film 14 itself, and both the works W1 and W2 are not affected by variations in flatness and parallelism of the works W1 and W2. -W2 can be pasted. Therefore, according to the workpiece | work bonding apparatus of this invention, the biting of air can be eliminated, and also a pair of plate-shaped workpiece | work can be bonded in parallel with high precision, and the yield of a product can be improved.

  According to the workpiece bonding apparatus in which the fixed chamber body 10 and the movable chamber body 11 that can be opened and closed with respect to the fixed chamber body 10 constitute the vacuum chamber 2 and the bonding diaphragm 5 is fixed inside the movable chamber body 11. The time required for a series of pasting operations can be shortened by reducing the trouble of opening and closing the vacuum chamber 2 when the workpieces W1 and W2 are taken in and out. Moreover, only by putting the movable chamber body 11 on the fixed chamber body 10 and fixing it, the bonding diaphragm 5 can be directly opposed to the state of positioning with the second workpiece W2, and the bonding preparation can be completed.

  The work holding structure 23 is constituted by the holding frame 24, the ball 25 incorporated in the frame 24 and the spring 26, and the balls 25 are brought into contact with the peripheral edges of both the works W1 and W2, thereby simultaneously positioning the works W1 and W2. According to the workpiece holder 8 to be positioned, the positioning can be completed by simply attaching the workpieces W1 and W2 to the workpiece holder 8, and the labor of positioning can be saved. Since there is no need to provide a separate positioning device, the overall structure of the workpiece bonding apparatus can be simplified and the manufacturing cost can be reduced. The holding frame 24 is supported by the holding base 21 fixed to the table 4 so as to be slidable up and down, and is pushed up and biased by the spring 30 when the diaphragm film 14 contacts the holding frame 24 in the work bonding process. This is because both the workpieces W1 and W2 are surely pressed to the peripheral edge by the diaphragm film 14 and the table 4 and are firmly bonded.

  According to the pressure supply source 16 that drives the hydraulic cylinder 33 via the piston operation mechanism 35 using the stepping motor 36 as a drive source, the control circuit 37 determines the operating state of the stepping motor 36 based on the detection signal from the pressure sensor 38. Thus, the diaphragm film 14 can be accurately expanded and deformed by a predetermined amount, or the degree of reduction of the diaphragm film 14 can be accurately set. Therefore, both the workpieces W1 and W2 are always accurately bonded under certain conditions, and a bonding result without variation is obtained. Since the diaphragm membrane 14 is inflated and deformed with incompressible hydraulic oil, the planes of both workpieces W1 and W2 are larger than those of a conventional laminating apparatus that performs laminating using a rubber air bag inflated with compressed air. Even when there is variation in the degree and parallelism, both the workpieces W1 and W2 can be evenly bonded without being affected by the variation.

  According to the pressure supply source 16 that drives the hydraulic cylinder 33 by using the air cylinder 47 as a drive source, the operation state of the electropneumatic regulator 48 is controlled by the control circuit 37 based on the detection signal from the pressure sensor 38, so that the stepping is performed. Similar to the pressure supply source 16 using the motor 36 as a drive source, the expansion deformation amount and the degree of reduction of the diaphragm film 14 can be set accurately. Therefore, both the workpieces W1 and W2 are always accurately bonded under certain conditions, and a bonding result without variation is obtained. Further, compared to the pressure supply source 16 having the piston operation mechanism 35 and the stepping motor 36 as components, the overall structure of the pressure supply source 16 can be simplified and the cost can be reduced.

(Example) FIGS. 1-8 shows the Example of the workpiece | work bonding apparatus which concerns on this invention. In FIG. 2, the workpiece bonding apparatus is disposed inside a vacuum chamber 2 provided on the upper portion of the base 1, a vacuum pump (vacuum source) 3 that exhausts air in the vacuum chamber 2, and the vacuum chamber 2. It consists of a table 4 and a bonding diaphragm 5 and the like. Below the vacuum chamber 2, there is provided a table driving structure 6 for pressing the table 4 toward the bonding diaphragm 5, and an output shaft (output unit) 7 of the structure 6 is fixed to the lower surface side of the table 4. It is. A work holder 8 for holding the first work W1 and the second work W2 is fixed to the upper surface of the table 4.

  The first workpiece W1 and the second workpiece W2 are made of a rectangular glass substrate, a plastic plate or the like typified by a liquid crystal substrate or a plasma display substrate. The workpiece bonding apparatus of the present invention is used when bonding another glass substrate to a glass substrate, when bonding a plastic plate to the glass substrate, or when bonding another plastic plate to the plastic plate. A transparent adhesive layer is formed over the entire surface of either one of the workpieces W1 and W2.

  The vacuum chamber 2 includes a box-shaped fixed chamber body 10 that opens upward and a box-shaped movable chamber body 11 that opens downward. The movable chamber body 11 is supported by a fixed chamber body 10 so as to be swingable and openable via a hinge (not shown), and is opened and closed by an air cylinder (not shown). A seal body 12 is disposed on the surface of the fixed chamber body 10 where the movable chamber body 11 is joined, and the inside of the vacuum chamber R can be sealed by the seal body 12. The pasting diaphragm 5 is fixed to the inner surface of the movable chamber body 11. The bonding diaphragm 5 includes a main body portion 13 that opens downward and a metal diaphragm film 14 that closes the lower surface opening of the main body portion 13, and a pressure chamber 15 provided inside the diaphragm film 14 supplies pressure. In communication with the source 16.

  The table drive structure 6 is configured using an air cylinder (not shown) as a drive source, and transmits the lifting / lowering operation of the piston of the air cylinder to the table 4 via the output shaft 7. The pair of left and right output shafts 7 are guided by a slide bush 18 provided in the fixed chamber body 10.

  In FIG. 3, the work holder 8 includes four holding bases 21 and a bonding table 22 fixed to the upper surface of the table 4, a work holding structure 23 supported by each holding base 21, and the like. The first work W <b> 1 is placed on the upper surface of the bonding table 22. The second workpiece W2 is supported by the workpiece holding structure 23 in a state where a predetermined facing gap E (see FIG. 4) is opened with respect to the first workpiece W1.

  In FIG. 4, the work holding structure 23 includes a holding frame 24, a ball (support) 25 that is supported by the holding frame 24 so as to advance or retreat, and a spring 26 that urges the ball 25 to advance. The ball 25 is made of a metal ball typified by a steel ball. As shown in FIG. 3, in the workpiece holding structure 23 facing left and right, balls 25 and springs 26 are incorporated in two front and rear portions of the holding frame 24, and in the workpiece holding structure 23 facing front and rear, The ball 25 and the spring 26 are incorporated only in the left and right. The ball 25 can be displaced between an advancing posture for supporting the second workpiece W2 and a posture for releasing the support of the second workpiece W2 by being retracted against the urging force of the spring 26.

  As shown in FIGS. 4 and 5, a slide shaft 27 is fixed with screws 28 on the lower surface side of the holding frame 24, and the slide shaft 27 is supported by a guide hole 29 provided in the holding base 21 so as to be slidable up and down. is doing. Further, the holding frame 24 is pushed up and biased by a spring 30 disposed between the holding frame 24 and the holding base 21. Reference numeral 31 is an adjustment screw for adjusting the urging force of the spring 26. By adjusting the biasing force of the spring 26 with the adjusting screw 31, the facing distance E between the workpieces W1 and W2 can be changed.

  The ball 25 in the normal state is advanced and biased by the spring 26 and is held in a state in which a part of the peripheral surface is exposed from the inner end surface of the holding frame 24. In a state where one ball 25 of the opposing workpiece holding structure 23 is retracted into the holding frame 24, the first workpiece W1 is placed on the bonding table 22, and the ball 25 is returned to the advanced posture, for a total of six. Each ball 25 is brought into contact with the peripheral edge of each side portion of the first work W1, so that the first work W1 can be positioned front and rear, and left and right (see FIG. 4).

  Furthermore, by placing the second workpiece W2 on the upper half circumferential surface of the six balls 25, the peripheral edge of each side portion can be received by the balls 25, and the second workpiece W2 can be positioned front and rear and left and right. The first workpiece W1 and the second workpiece W2 in this positioning state are opposed to each other with a predetermined facing gap E therebetween, and the upper surface of the second workpiece W2 is positioned above the upper surface of the holding frame 24. (See FIG. 4). The value of the facing gap E varies depending on the thickness and elastic modulus of both the workpieces W1 and W2, but in many cases it is preferable to select within a range of 1 to 5 mm. In this embodiment, the value is 1 mm.

  FIG. 6 shows a pressure supply source 16 that supplies hydraulic oil to the pressure chamber 15 of the bonding diaphragm 5. The pressure supply source 16 includes a hydraulic cylinder 33 that supplies pressurized hydraulic oil to the pressure chamber, a piston operation mechanism 35 that reciprocally slides the piston rod 34 of the hydraulic cylinder 33, and a stepping motor that drives the piston operation mechanism 35. 36, a control circuit 37 that controls the operating state of the stepping motor 36, and a pressure sensor 38 that detects the hydraulic pressure in the pressure chamber 16.

  The piston operating mechanism 35 slides the ball screw shaft (feed screw shaft) 42 rotatably supported by the opposed frame 41, the female screw body (slide body) 43 that meshes with the ball screw shaft 42, and the female screw body 43. The guide shaft 44 is a guide. The outer end of the piston rod 34 is fixed to the female screw body 43. By rotating and driving the ball screw shaft 42 by the stepping motor 36, the internal thread body 43 can be slid along the guide shaft 44 to displace the piston rod 34. In this embodiment, the ball screw shaft 42 and the female screw body 43 constitute an operation conversion mechanism.

  When the piston rod 34 is pushed into the cylinder barrel side, the hydraulic oil pressurized by the piston can be supplied to the pressure chamber 15, and in this state, the diaphragm film 14 of the bonding diaphragm 5 moves toward the bonding table 22. It expands and deforms into a salient arc. The peak of the salient arc at this time is located at the center of the diaphragm film 14. When the pressurization by the hydraulic oil is released, the diaphragm film 14 returns to a flat state as shown in FIG. Although the bulge amount of the diaphragm film 14 is very small, in FIG. 1, FIG. 7, and FIG. 8, the expansion deformation of the diaphragm film 14 is exaggerated for easy understanding.

  The workpiece | work bonding apparatus comprised as mentioned above bonds both workpiece | work W1 * W2 according to the following procedures. First, after the movable chamber 11 is opened, each workpiece W2 is attached to the workpiece holder 8 and positioned in the manner described above. The movable chamber 11 is joined to the fixed chamber body 10 to close the vacuum chamber R, and the movable chamber 11 is locked and fixed so as not to be opened by a lock tool (not shown). In this state, the air in the vacuum chamber R is exhausted by the vacuum pump 3. In parallel, the stamping motor 36 is driven forward to supply the working fluid until the pressure in the pressure chamber 15 of the bonding diaphragm 5 reaches a predetermined value. At this time, by feeding back the detection signal output from the pressure sensor 38 to the control circuit 37 and controlling the operating state of the stepping motor 36, the diaphragm film 14 can be accurately expanded and deformed by a predetermined amount. In a state where the inside of the vacuum chamber R is sufficiently depressurized (−96 KPa or less), the table 4 is pushed up by the table driving structure 6 as shown in FIG. 7 to bond the second work W2 and the first work W1. .

  As shown in FIG. 8, when the table 4 is pushed up to bring the second workpiece W2 into contact with the diaphragm film 14, the central portion of the plate surface is elastically deformed downward along the expansion shape of the diaphragm film 14. However, the periphery of the second workpiece W2 is still supported by the ball 25. Therefore, both work W1 * W2 is first bonded by the center part, and a bonding part expands toward a peripheral part from a center part. In this state, the stamping motor 36 is driven in reverse rotation several steps at a time to gradually reduce the expansion deformation amount of the diaphragm film 14 and press the table 4 against the diaphragm film 14 side, thereby bringing both the workpieces W1 and W2 to the peripheral edge. Can be pasted. As the bonding area expands to the peripheral side, a part of the diaphragm film 14 comes into contact with the holding frame 24, but thereafter the holding frame 24 sinks downward against the urging force of the spring 30, It is possible to reliably bond to the peripheral edge of both workpieces W1 and W2. The support of the second work W2 by the ball 25 is such that the ball 25 retreats into the ball hole of the holding frame 24 when the pressing force acting on the peripheral edge of the second work W2 overcomes the urging force of the spring 26. It is canceled by doing.

  As mentioned above, in the workpiece | work bonding apparatus of this invention, since both workpiece | work W1 * W2 is bonded within the vacuum chamber 2, there is basically no room which entraps air between both workpiece | work W1 * W2. Furthermore, since the second workpiece W2 is received by the diaphragm film 14 expanded in a projecting arc shape and the bonding portion is enlarged from the central portion toward the peripheral portion, even if a slight amount of air remains, the air is moved to the peripheral side. Both workpieces W1 and W2 can be properly bonded while being removed. In addition, the position of the piston of the hydraulic cylinder 33 can be strictly controlled by the stamping motor 36 so that the expansion state and the degree of contraction of the diaphragm film 14 can be set accurately, so that both the workpieces W1 and W2 can be accurately and constantly fixed. Can be pasted. Since the diaphragm film 14 is made of metal, it is possible to wipe out the local elastic deformation of the diaphragm film 14 itself, and as a whole, both the workpieces W1 and W2 are not affected by variations in flatness and parallelism. Work W1 and W2 can be bonded in parallel with high accuracy.

  FIG. 9 shows another embodiment of the pressure source 16. There, a hydraulic cylinder 33, an air cylinder 47 for reciprocating the piston rod 34 of the hydraulic cylinder 33, an electropneumatic regulator 48 for controlling the pressure of compressed air supplied to the air cylinder 47, and a compressor (compressed air source) 49, the control circuit 37 that controls the operating state of the electropneumatic regulator 48, and the pressure sensor 38 that detects the hydraulic pressure in the pressure chamber 15 constitute the pressure supply source 16. The diameter of the piston 51 of the air cylinder 47 is set larger than the diameter of the piston 50 of the hydraulic cylinder 33, and both cylinders 33 and 47 share the piston rod 34 and are configured as so-called parent-child cylinders. . In addition, the same code | symbol is attached | subjected to the same member as a previous Example, and the description is abbreviate | omitted.

  In the pressure supply source 16 configured as described above, the detection signal output from the pressure sensor 38 is fed back to the control circuit 37 to control the operation state of the electropneumatic regulator 48, thereby adjusting the position of the piston of the hydraulic cylinder 33. Since the expansion state and the reduction degree of the diaphragm film 14 can be accurately set by strictly controlling, both the workpieces W1 and W2 are always accurately bonded under certain conditions as in the workpiece bonding apparatus of the first embodiment. Can be bonded in parallel with high accuracy.

  In addition to the above-described embodiments, the motion conversion mechanism of the piston operation mechanism 35 can be configured with the worm and the rack as motion conversion elements, in addition to the feed screw shaft and the female screw body as motion conversion elements. The movable chamber body 11 of the vacuum chamber 2 can be opened and closed in addition to swinging and opening. The bonding diaphragm 5 can be composed of a cylindrical main body 13 and a circular diaphragm film 14, and in that case, the diaphragm film 14 is expanded and deformed into a partial spherical shell shape, and the second workpiece W2 is deformed. The pressing force can be equalized. The support body 25 of the work holding structure 23 does not need to be the ball 25, and can be constituted by a shaft body with one end rounded into a hemisphere, a shaft body with one end formed in a conical shape, or the like. The bonding diaphragm 5 can be provided on the fixed chamber 10 side, and the table 4 and the work holder 8 can be provided on the movable chamber 11 side. The second workpiece W2 in that case is held by the workpiece holding structure 23 so as not to drop.

It is a vertical front view which shows the workpiece bonding apparatus of a bonding state. It is a vertical front view which shows the workpiece | work bonding apparatus before bonding. It is a top view of a work holder. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is explanatory drawing which shows schematic structure of a pressure supply source. It is a vertical front view which shows the state of the bonding diaphragm at the time of workpiece | work bonding. It is explanatory drawing which shows the workpiece | work state at the time of bonding. It is explanatory drawing which shows schematic structure of the pressure supply source which concerns on another Example.

Explanation of symbols

2 Vacuum chamber 3 Vacuum source 4 Table 5 Bonding diaphragm 6 Table drive structure 14 Diaphragm film 15 Pressure chamber 16 Pressure supply source 22 Bonding table 23 Work holding structure W1 First work W2 Second work

Claims (5)

A vacuum chamber (2), and a vacuum source (3) for exhausting the air in the vacuum chamber (2),
A table (4) that supports the work holder (8), a bonding diaphragm (5), and a table drive that pushes the table (4) toward the bonding diaphragm (5) inside the vacuum chamber (2). An output (7) of structure (6) is provided;
The work holder (8) is in a state where a predetermined counter gap is provided between the bonding work (22) on which the first work (W1) is placed and the second work (W2) with respect to the first work (W1). A plurality of work holding structures (23) supported by
The work holding structure (23) includes a holding frame (24), a support (25) supported so as to be advanced or retracted by the holding frame (24), and a spring (26) for biasing the support (25). )
The support (25) is in contact with the peripheral edges of the first work (W1) and the second work (W2) at the same time to position both works (W1 and W2).
A holding frame (24) is supported by a holding base (21) fixed to the table (4) so as to be vertically slidable, and is pushed up and biased by a spring (30).
The bonding diaphragm (5) includes a metal diaphragm film (14) that can be expanded and deformed in a projecting arc shape toward the bonding table (22), and is a pressure chamber provided inside the diaphragm film (14). (15) communicates with the pressure supply source (16);
The air in the vacuum chamber (2) is exhausted by the vacuum source (3), the working fluid is supplied to the pressure chamber (15), and the diaphragm membrane (14) is expanded and deformed. A workpiece laminating apparatus, wherein the second workpiece (W2) is bonded to the first workpiece (W1) from the central portion toward the peripheral portion by pressing the drive structure (6). The support body (25) is formed of any one of a metal ball, a shaft body having one end rounded into a hemisphere, and a shaft body having one end formed in a conical shape. Work bonding machine. The vacuum chamber (2) is composed of a fixed chamber body (10) and a movable chamber body (11) that can be opened and closed with respect to the fixed chamber body (10).
The workpiece bonding apparatus according to claim 1 or 2, wherein a bonding diaphragm (5) is fixed inside the movable chamber body (11) . The pressure supply source (16) includes a hydraulic cylinder (33) for supplying pressurized hydraulic oil to the pressure chamber (15), and a piston operation mechanism (for reciprocating sliding operation of the piston rod (34) of the hydraulic cylinder (33)). 35), a stepping motor (36) for slidingly driving the slide body (43) of the piston operating mechanism (35) via the operation conversion mechanism, and a control circuit (37) for controlling the operating state of the stepping motor (36). And a pressure sensor (38) for detecting the hydraulic pressure in the pressure chamber (15),
The workpiece bonding apparatus according to any one of claims 1 to 3, wherein a detection signal output from the pressure sensor (38) is fed back to the control circuit (37) to control an operation state of the stepping motor (36). A pressure supply source (16) supplies the pressurized hydraulic oil to the pressure chamber (15), and an air cylinder (47) that reciprocates the piston rod (34) of the hydraulic cylinder (33). An electropneumatic regulator (48) for controlling the pressure of the compressed air supplied to the air cylinder (47), a control circuit (37) for controlling the operating state of the electropneumatic regulator (48), and a pressure chamber (15) And a pressure sensor (38) for detecting the hydraulic pressure of
The workpiece bonding apparatus according to any one of claims 1 to 3, wherein the detection signal output from the pressure sensor (38) is fed back to the control circuit (37) to control the operating state of the electropneumatic regulator (48).

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