JP4950535B2 - Vibrator and angular velocity sensor - Google Patents

Description

  The present invention relates to a vibrator and an angular velocity sensor applicable to a sensor for detecting a rotational angular velocity in a rotating system used for attitude control and position detection of an aircraft, a ship, an automobile, and the like.

  Although there are various types of angular velocity sensors, there is a vibration-type angular velocity sensor that satisfies the requirement of being thin, small and lightweight for incorporation. Conventional vibration-type angular velocity sensors detect a Coriolis force that works with rotation by vibrating a vibrator processed into a square pole.

  As such a conventional angular velocity sensor, there is one using a tuning fork type vibrator (see Patent Document 1). There has also been proposed a vibrator including a plurality of vibration systems extending in a plane intersecting the rotation axis and a plurality of flexural vibration pieces connected to the tips of the vibration systems (Patent Document 2). reference). According to the vibrator of Patent Document 2, the rotational speed of the in-plane rotation can be detected, and the gyroscope can be reduced in height.

  On the other hand, multi-axiality is required for the degree of freedom of motion to be detected, and an angular velocity sensor for detecting each component (angular velocity) of three orthogonal axes has been proposed. For example, when three axes are intended to be achieved by a vibrator, the element needs to have at least two orthogonal components as drive displacement speeds in order to generate the Coriolis force, which is an angular velocity detection principle, for all three axes. . As a technique for realizing this, a method has been proposed in which one inertial body element is circularly moved by two-phase driving that is orthogonal in time (see Non-Patent Document 1).

  By the way, when the above-described angular velocity sensor is used to detect each component of the three axes, the configuration of the angular velocity sensor becomes complicated because a plurality of vibrators are used in combination. In addition, in the method in which one inertial body element is circularly moved by two-phase driving that is orthogonal in terms of time, it is difficult to give a uniform circular motion to the plate (vibrator) of the piezoelectric vibration material. Is not easy to separate signals of different components.

  As a technique for solving these problems, there are three legs each extending in a direction forming an angle of 120 ° from the base in the same plane with the Z axis (optical axis) as a normal line, and legs in the plane. Using a vibrator having three beam portions laid between the portions, an excitation electrode is provided on a side surface orthogonal to the plane of each beam portion, and a detection electrode is provided on the upper surface parallel to the plane of each leg portion. An angular velocity sensor provided has been proposed (see Patent Document 3). According to this technique, it is possible to detect angular velocities in the three-axis directions in a state where signals of different components can be easily separated by one vibrator.

JP 2002-340559 A JP-A-11-281372 JP 2006-017538 A Hideki Tamura, Toshiya Ichimura, Yoshiro Tomikawa, “3-axis angular velocity detection gyro sensor by two-phase drive”, ultrasonic TECHNO, 2002.1-2, pp. 6-13, (2002-01)

  By the way, in the vibrator described above, for example, a vibration element (beam part) along the X axis and a vibration element (leg part) along the Y axis coexist. For this reason, when the vibration characteristics change due to a temperature change or the like, the amount of change differs between the beam portion and the leg portion. For this reason, the vibrator according to Patent Document 3 has a problem that stable vibration characteristics cannot be easily obtained.

  The present invention has been made to solve the above-described problems, and is more stable in a vibrator capable of detecting angular velocities in three axes in a state where signals of different components can be easily separated. An object is to obtain vibration characteristics.

A vibrator according to the present invention is a vibrator composed of a piezoelectric material having symmetry at least three times around a predetermined axis, and a base portion arranged at the center of the vibrator and the above-mentioned axis as a modulus. comprising at least three legs, each extending in three directions forming an angle to each other 120 ° from the base portion in a plane and a line, and three beam portions which are bridged between the legs in the plane The beam portion is formed by alternately connecting beam elements extending in the extending direction of the two leg portions. Accordingly, all the vibration elements constituting the beam part and the leg part are parallel to any one of the three directions, and all the vibration elements are parallel to the same crystal axis.

  In the vibrator described above, the leg portion is composed of a center leg and two side legs arranged in line symmetry so as to sandwich the center leg, and the beam portion is constructed between adjacent side legs. May be. Moreover, you may make it provide the weight part provided in the center part of each beam part. The piezoelectric material is quartz, the predetermined axis is the optical axis of the crystal, and the three directions may be the directions of the mechanical axis of the crystal.

The angular velocity sensor according to the present invention is an angular velocity sensor composed of a vibrator made of a piezoelectric material having symmetry at least three times around a predetermined axis, and a base portion disposed at a central portion of the vibrator. When the three legs, each extending in three directions forming an angle to each other 120 ° from the base portion in a plane of the axis as the normal line, three beams which are installed between the legs in the plane At least one excitation electrode provided on each beam portion and a detection electrode provided on each leg portion, and each beam portion extends in the extending direction of the two leg portions. Existing beam elements are connected alternately.

  The leg part is composed of a central leg and two side legs arranged in line symmetry so as to sandwich the central leg, the beam part is constructed between adjacent side legs, and the detection electrode is provided on the central leg. It may be provided. Moreover, you may make it provide the weight part provided in the center part of each beam part. The piezoelectric material is quartz, the predetermined axis is the optical axis of the crystal, and the three directions may be the directions of the mechanical axis of the crystal.

As described above, in the present invention, the beam portion of each bridging three legs each extending in three directions forming an angle of 120 ° from each other than the base portion, extending in the two legs are bridged The beam elements extending in the existing directions were alternately arranged and connected. As a result, all the vibration elements constituting the beam part and the leg part are parallel to any one of the above three directions, and all the vibration elements are parallel to the same crystal axis. An excellent effect of obtaining stable vibration characteristics can be obtained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a configuration example of a vibrator according to an embodiment of the present invention. The vibrator shown in FIG. 1 is made of, for example, quartz and first includes three legs 121, 122, and 123 that extend in directions different from the base 101 by 120 degrees. In the vibrator shown in FIG. 1, each leg portion extends along the mechanical axis (Y-axis) of the crystal.

  In addition, the vibrator shown in FIG. 1 includes three beam portions 131, 132, and 133 that are installed on the outer portion of each leg portion, and the beam portion 131 includes a beam element 131a and a beam element 131b. The beam portion 132 is composed of a beam element 132a and a beam element 132b, and the beam portion 133 is composed of a beam element 133a and a beam element 133b. For example, the beam element 131a and the beam element 132b extend along the y1 axis similarly to the leg portion 123, and the beam element 131b and the beam element 133a extend along the y3 axis similarly to the leg portion 122. The beam element 132a and the beam element 133b extend along the y2 axis in the same manner as the leg 121. The y1 axis, the y2 axis, and the y3 axis are the Y axes of quartz that form an angle of 120 ° with respect to each other. In this way, each beam portion is formed by alternately connecting beam elements extending in the extending direction of the two leg portions that are installed. In the vibrator illustrated in FIG. 1, one beam portion is composed of two beam elements. In addition, the length and area (volume) of the connection part are not 0, but have a certain length and area (volume).

  According to the vibrator shown in FIG. 1 configured as described above, in addition to each leg portion, each beam element constituting the beam portion is in a state of being three times symmetrical and parallel to the Y axis. In other words, all the vibration elements are in a state of being three-fold symmetric and parallel to the Y axis. In the configuration example shown in FIG. 1, a regular hexagon is configured by the beam element 131a, the beam element 131b, the beam element 132a, the beam element 132b, the beam element 133a, and the beam element 133b. In the vibrator illustrated in FIG. 1, the base portion 101 includes the overhang portions 141, 142, and 143, and the overhang portions 141, 142, and 143 can be fixed to a pedestal or the like provided inside a predetermined package. . The overhang portions 141, 142, and 143 are projecting portions that project from the base portion 101 in the direction of the Y-axis of the crystal, and are formed with three-fold symmetry.

  Here, as will be described later, detection electrodes are provided on the legs. When such legs are along the X axis, an electrode configuration that enables detection of vibration in a direction perpendicular to the XY plane is provided. It's not easy. In addition, it is difficult to avoid separation from a spurious mode in which part of the vibration is generated. For this reason, as described above, it is preferable to arrange the elements of the beam part and the leg part so as to extend in the direction of the Y axis that is three times symmetrical. By doing so, the leg portion is not in a state along the X axis, and thus the above problem can be avoided.

  The vibrator shown in FIG. 1 can be formed, for example, by processing a quartz plate (Z plate) having a plate thickness of 0.358 mm by wet etching using, for example, a buffered hydrofluoric acid aqueous solution or an ammonium fluoride aqueous solution. Moreover, each leg part and each beam part should just be formed in width 0.2-0.7 mm. Moreover, each leg part should just be formed in the space | interval of the base part 101 and the connection part of each beam part about 1.5-2 mm. The legs are all formed to have the same length.

  By the way, the vibrator shown in FIG. 1 has a vibration mode in which the beam portions 131, 132, and 133 are flexibly vibrated in the XY plane, a vibration mode in the direction of rotation about the Z axis, and a direction of rotation about the X axis. And a vibration mode in a direction of rotation about the Y axis. According to the vibrator shown in FIG. 1, each beam portion 131, 132, 133 is driven (excited) to bend and vibrate radially around the base 101 in the XY plane. The displacement velocity components of the angular velocities Ωz, Ωy, Ωx in the rotation direction can be obtained simultaneously. If the rotational angular velocities Ωz, Ωy, and Ωx are applied while the vibrator shown in FIG. 1 is driven, a Coriolis force (F = −2 mΩ × v) is generated in each beam portion, and each vibration displacement component is Since it is induced, the vibration displacement component can be obtained as an electric signal by the detection electrode provided on each leg. The vibration frequency of each vibration mode should be approximately equal. To make the modes close to each other, the thickness of the vibrator, the beam part (beam element), and the width and length of the leg part should be designed appropriately. That's fine.

  Since the vibrator shown in FIG. 1 is composed of quartz that is a crystal having three-fold symmetry, the three legs 121, 122, and 123 extending in directions different by 120 ° from the base 101 have vibration characteristics. Are equal. Therefore, excitation by single phase driving is possible. In addition, the three-fold symmetrical shape makes the detected vibration characteristics of each leg equal, which facilitates signal processing during detection. In addition, according to the vibrator shown in FIG. 1, since it is composed of only vibration knitting elements that are three-fold symmetric and parallel to the Y-axis, the fluctuation amount of vibration characteristics due to temperature change or the like is Each leg is equal, and more stable operation can be obtained.

  Next, an example of electrode arrangement for performing the above-described excitation and detection will be described. FIG. 2 is a perspective view (a), (b) and a partial sectional view (c) showing the arrangement of electrodes for constituting an angular velocity sensor using the vibrator shown in FIG. As shown in FIG. 2, first, excitation electrodes 211 and 212 are disposed on the beam element 131 a in the vicinity of the joint with the detection leg 122, and excitation electrodes 213 and 214 are disposed on the beam element 131 b in the vicinity of the joint with the detection leg 123. Is arranged. Excitation electrodes 221 and 222 are disposed on the beam element 132a in the vicinity of the joint with the detection leg 123, and excitation electrodes 223 and 224 are disposed on the beam element 132b in the vicinity of the joint with the detection leg 121. Excitation electrodes 231 and 232 are disposed on the beam element 133 a in the vicinity of the joint with the detection leg 121, and excitation electrodes 233 and 234 are disposed on the beam element 133 b in the vicinity of the joint with the detection leg 122.

  For example, as shown in the cross-sectional view of FIG. 2C, the excitation electrode 211 is provided on both surfaces parallel to the XY plane of the beam element 121a, and the excitation electrode 212 is perpendicular to the XY plane of the beam element 121a. It is provided on both sides. By applying an AC voltage (excitation signal) VD between the excitation electrode 211 and the excitation electrode 212 arranged in this way and between the excitation electrode 213 and the excitation electrode 214, the beam portion 131 is made to be in the XY plane. It can be bent and vibrated within. The same applies to the other beam portions 132 and 133. By causing flexural vibration in each of these beam portions, the angular velocity sensor shown in FIG. 2 is excited.

  Further, detection electrodes 241 and 242 are disposed on the leg 121, detection electrodes 251 and 252 are disposed on the leg 122, and detection electrodes 261 and 262 are disposed on the leg 123. In addition, a ground electrode 201 is provided at the center of the upper surface of each leg so as to extend radially from the base 101. For example, the voltage generated at each detection electrode is detected using the potential of the ground electrode 201 as a reference. Each detection electrode is provided on an upper surface parallel to a plane on which each leg portion and each beam portion is disposed. Note that the angular velocity sensor shown in FIG. 2 is supported by the support means at the overhang portions 141, 142, and 143 as described above.

  Next, detection of the angular velocity by the angular velocity sensor shown in FIG. Each detection electrode may be connected to a detection circuit as shown in FIG. For example, the detection electrodes 141 and 242 are connected to two input terminals of the differential amplifier circuit 301. The differential amplifier circuit 301 includes, for example, an operational amplifier, and a detection electrode 241 and a detection electrode 242 are connected to a non-inverting input terminal and an inverting input terminal of the operational amplifier, respectively. The differential amplifier circuit 301 detects an output difference between the detection electrode 241 and the detection electrode 242.

  The signal output from the differential amplifier circuit 301 is input to one input terminal of the synchronous detection circuit 311. A phase circuit 321 is connected to the other input terminal of the synchronous detection circuit 311. The synchronous detection circuit 311 detects the output of the differential amplifier circuit 301 in synchronization with the excitation signal output from the oscillation circuit 330 to excite the vibrator. In FIG. 3, a plurality of oscillation circuits 330 are shown for convenience, but these are all the same. Further, the signal output from the synchronous detection circuit 311 is rectified and amplified by the rectification amplifier circuit 341.

  The detection electrodes 251 and 252 are connected to two input terminals of the differential amplifier circuit 302, and the detection electrodes 261 and 262 are connected to two input terminals of the differential amplifier circuit 303. The signal output from the differential amplifier circuit 302 and the signal output from the differential amplifier circuit 303 are input to the differential amplifier circuit 304, and the signal output from the differential amplifier circuit 304 is output from the synchronous detection circuit 312. Input to one input terminal. A phase circuit 322 is connected to the other input terminal of the synchronous detection circuit 312. The synchronous detection circuit 312 detects the output of the differential amplifier circuit 304 in synchronization with the excitation signal output from the oscillation circuit 330 to excite the vibrator. Further, the signal output from the synchronous detection circuit 312 is rectified and amplified by the rectification amplifier circuit 342.

  The detection electrodes 241, 242, 251, 252, 261, and 262 are simply connected to the input of the adder 305, and the signal output from the adder 305 is input to one input terminal of the synchronous detection circuit 313. A phase circuit 323 is connected to the other input terminal of the synchronous detection circuit 313. The synchronous detection circuit 313 detects the output of the adder 305 in synchronization with the excitation signal output from the oscillation circuit 330 to excite the vibrator. Further, the signal output from the synchronous detection circuit 313 is rectified and amplified by the rectification amplification circuit 343.

  With the detection circuit described above, first, the angular velocity Ωx is obtained from the signal output from the rectifying amplifier circuit 341. Further, the angular velocity Ωy is obtained from the signal output from the rectifying amplifier circuit 342. Further, the angular velocity Ωz shown in FIG. 2B is obtained from the signal output from the rectifying amplifier circuit 343.

  Here, the support by the overhang portions 141, 142, and 143 will be described. In the angular velocity sensor illustrated in FIG. 2, the support method is important. Since this angular velocity sensor excites and uses the beam portions 131, 132, and 133, the angular velocity sensor is supported by the base portion 101. However, vibration generated by excitation vibration or Coriolis force leaks from the three legs to the portion of the base 101, and vibration leakage to the portion of the base 101 to which the three legs are connected is large. For this reason, the characteristics of the angular velocity sensor vary greatly depending on the state of support and fixation in the base portion. For this reason, the characteristics of the angular velocity sensor to be manufactured vary greatly due to manufacturing variations in support and fixing. On the other hand, by using the overhang portions 141, 142, and 143, the propagation of vibration to different leg portions and the propagation of vibration to the base 101 connected to the overhang portions 141, 142, and 143 are suppressed. Become. As a result, changes in characteristics due to support fixation are reduced, stable support is possible, temperature characteristics such as zero point drift and sensitivity drift are reduced, and the influence of other axis sensitivity can be suppressed.

  As a fixing method, for example, the vibrator shown in FIG. 1 may be supported and fixed by joining or bonding the projecting portions 141, 142, and 143 to a pedestal provided inside a predetermined package. Further, if the pedestal is made of crystal or glass, the pedestal and the overhang portions 141, 142, and 143 can be joined by direct joining. Further, when the overhanging portions 141, 142, and 143 are bonded to the pedestal using an adhesive such as an epoxy resin, a groove or a recess may be provided on the bonding surface of the pedestal so that excess adhesive can be easily discharged. Further, a terminal made of Au is provided on the joint surface of the pedestal, and a terminal provided on the overhanging portion 141, 142, 143 and a terminal made of Au of the corresponding pedestal are joined by an Au bump, and the overhanging portion 141, 142, 143 is formed. However, you may make it fix to a base.

  Next, another vibrator according to the embodiment of the present invention will be described. FIG. 4 is a plan view showing a configuration example of another vibrator according to the present embodiment of the invention. The vibrator shown in FIG. 4 is configured such that the beam portion of the vibrator shown in FIG. 1 is composed of four elements. First, three leg portions 121, 122, and 123 extending in directions different from the base portion 101 by 120 ° (Y-axis direction) are provided. These are the same as the vibrator shown in FIG.

  The vibrator shown in FIG. 4 includes three beam portions 431, 432, and 433 installed on the outer portion of each leg portion. The beam portion 431 includes a beam element 431a, a beam element 431b, a beam element 431c, and a beam. The beam portion 432 includes a beam element 432a, a beam element 432b, a beam element 432c, and a beam element 432d. The beam portion 433 includes the beam element 433a, the beam element 433b, the beam element 433c, and the beam. It consists of element 433d.

  For example, the beam portion 431 includes a beam element 431a parallel to the y1 axis, a beam element 431b parallel to the y3 axis, a beam element 431c parallel to the y1 axis, and a beam element 431d parallel to the y3 axis. Yes. Therefore, the beam portion 431 is composed of four beam elements arranged alternately and parallel to adjacent axes different from each other by 120 ° with respect to a three-fold symmetry axis (Y axis). As described above, in the vibrator shown in FIG. 4, the beam elements extending in the extending direction of the two leg portions in which each beam portion extends are alternately connected. In this vibrator, each beam portion is composed of four beam elements. Similar to the vibrator illustrated in FIG. 1, each beam portion is composed of an even number of beam elements.

  According to the beam portion configured in this way, bending vibration in the XY plane direction is likely to occur. As shown in FIG. 1, when a beam part is comprised from two beam elements, the rigidity of a beam part becomes high and it becomes difficult to generate | occur | produce the bending vibration of a XY plane direction. For this reason, when an excitation electrode is provided in the beam portion, the longitudinal stretching vibration of the leg portion also accompanies, and the frequency of the natural mode vibration increases. In this type of angular velocity sensor, a higher detection sensitivity is obtained as the resonance frequency is lower. Therefore, the configuration shown in FIG. 1 in which the frequency of the eigenmode is higher is in a state where it is difficult to obtain a high detection sensitivity. On the other hand, the configuration of the vibrator shown in FIG. 4 makes it easy for flexural vibration of the beam portion to occur and suppresses longitudinal stretching vibration of the leg portion, thereby suppressing the state in which the frequency of the natural mode vibration becomes high. As a result, high detection sensitivity can be obtained more easily.

  In the vibrator shown in FIG. 4, similarly to the vibrator shown in FIG. 1, the vibration mode in which the beam portions 431, 432, and 433 are flexibly vibrated in the XY plane, and the vibration mode in the direction of rotation about the Z axis , A vibration mode in a direction rotating around the X axis, and a vibration mode in a direction rotating around the Y axis. Therefore, similarly to the above, the vibrator of FIG. 4 is also driven (excited) by bending (vibrating) the beam portions 431, 432, and 433 radially around the base 101 in the XY plane. Displacement velocity components of angular velocities Ωz, Ωy, Ωx in the rotation direction about the axis can be obtained simultaneously.

  Further, in the vibrator shown in FIG. 4, the electrode arrangement for performing excitation and detection is the same as that of the angular velocity sensor shown in FIG. 2, as shown in FIGS. 5 (a) and 5 (b). First, the excitation electrodes 211 and 212 are disposed on the beam element 431 a near the joint with the detection leg 122, and the excitation electrodes 213 and 214 are disposed on the beam element 431 d near the joint with the detection leg 123. Excitation electrodes 221 and 222 are disposed on the beam element 432a near the joint with the detection leg 123, and excitation electrodes 223 and 224 are disposed on the beam element 432d near the joint with the detection leg 121. Excitation electrodes 231 and 232 are disposed on the beam element 433a in the vicinity of the joint with the detection leg 121, and excitation electrodes 233 and 234 are disposed on the beam element 433d in the vicinity of the joint with the detection leg 122.

  For example, the excitation electrode 211 is provided on both surfaces parallel to the XY plane of the beam element 421a, and the excitation electrode 212 is provided on both surfaces perpendicular to the XY plane of the beam element 421a. By applying an AC voltage (excitation signal) VD between the excitation electrode 211 and the excitation electrode 212 arranged in this way and between the excitation electrode 213 and the excitation electrode 214, the beam portion 431 can be placed in the XY plane. It can be bent and vibrated within. The same applies to the other beam portions 432 and 433. By causing flexural vibration in each of these beam portions, the angular velocity sensor shown in FIG. 5 is excited.

  Further, detection electrodes 241 and 242 are disposed on the leg 121, detection electrodes 251 and 252 are disposed on the leg 122, and detection electrodes 261 and 262 are disposed on the leg 123. In addition, a ground electrode 201 is provided at the center of the upper surface of each leg so as to extend radially from the base 101. For example, the voltage generated at each detection electrode is detected using the potential of the ground electrode 201 as a reference. Each detection electrode is provided on an upper surface parallel to a plane on which each leg portion and each beam portion is disposed. The angular velocity Ωx, the angular velocity Ωy, and the angular velocity Ωz are obtained by these detection electrodes and the detection circuit shown in FIG.

  Next, the vibrator and the angular velocity sensor in the embodiment of the present invention will be described. FIG. 6 is a perspective view showing a configuration example of another vibrator according to the embodiment of the present invention. The vibrator shown in FIG. 6 includes a weight part 601, a weight part 602, and a weight part 603 having the same mass at the center of the three beam parts 431, 432, and 433. is there. The weight portion 601 is provided at the connection portion between the beam element 431b and the beam element 431c, the weight portion 602 is provided at the connection portion between the beam element 432b and the beam element 432c, and the weight portion 603 is provided at the connection portion between the beam element 433b and the beam element. It is provided at a connection portion with the element 433c. Other configurations are the same as those of the vibrator shown in FIG. The vibrator shown in FIG. 6 can operate as an angular velocity sensor by disposing each electrode in the same manner as the angular velocity sensor shown in FIG.

  In the vibrator shown in FIG. 6, for example, the weight portion 601 is configured by making the width of the central portion of the beam portion 431, that is, the connecting portion of the beam element 431 b and the beam element 431 c wider than other regions. did. Similarly, the weight portion 602 is configured by making the width of the central portion of the beam portion 432 wider than the other region, and the weight portion 603 is formed by making the width of the central portion of the beam portion 433 wider than the other region. It is configured.

  As described above, by providing a weight on the beam portion serving as the excitation portion, the Coriolis force when rotating is increased, and the angular velocity detection sensitivity is increased. As described above, the Coriolis force F is represented by “F = −2 mΩ × v”, and the absolute value increases in proportion to the mass. This Coriolis force is applied in a direction orthogonal to the direction of the speed component of excitation and the rotational axis of the rotational angular velocity. Here, as shown in FIG. 6, if the central portion of the beam portion having the highest excitation vibration speed has a larger mass than the others, the Coriolis force increases from the Coriolis force equation.

  Further, by providing the weight portions 601, 602, 603, the vibration frequency of the beam portion due to excitation is lowered. The detection sensitivity of the angular velocity is larger when the frequency of the excitation vibration is small, and the difference between the frequency of the excitation mode and the frequency of each detection mode (degree of detuning from the detection mode) matches the frequency of the excitation mode. The angular velocity detection sensitivity can be increased by appropriately designing the width, length, and thickness of the portion (leg member). Moreover, you may make it suppress the dispersion | variation in the mass of a weight part by forming a metal film etc. in the upper surface back surface or side surface of a weight part, and adding mass. For example, after a metal film is attached by a vacuum deposition method, a sputtering method, or the like, adjustment by trimming by laser irradiation or the like may be performed.

  Next, other vibrators and angular velocity sensors in the embodiment of the present invention will be described. FIG. 7 is a plan view (a), perspective views (b), (c), and a cross-sectional view (d) showing a configuration example of another vibrator and an angular velocity sensor according to the embodiment of the present invention. In the vibrator shown in FIG. 7A, first, in the beam portion 431, a through hole 701a is provided in the beam element 431a, and a through hole 701b is provided in the beam element 431d. Further, as shown in FIGS. 7B and 7C, excitation electrodes 711, 712 and excitation electrodes 713, 714 are provided on the outer side surface and the inner side surface of these through-hole forming portions. FIG. 7D is a cross-sectional view of a portion of the through hole 701a where the excitation electrodes 711 and 712 are provided.

  Similarly, in the beam portion 432, a through hole 702a is provided in the beam element 432a, a through hole 702b is provided in the beam element 432d, and excitation electrodes 721, 722 and excitation electrodes are provided on the outer side surface and the inner side surface of these through hole forming portions. 723, 724. Further, in the beam portion 433, a through hole 703a is provided in the beam element 433a, and a through hole 703b is provided in the beam element 433d. Excitation electrodes 731 and 732 and an excitation electrode 733 are provided on the outer side surface and the inner side surface of these through hole forming portions. , 734. As shown in the figure, through-holes are provided in regions near the connecting portions between the beam elements and the leg portions. Other configurations are the same as those in FIGS. 4 and 5.

  In this way, by providing the opening and providing the excitation electrode, an electric field for excitation can be applied in parallel to the electric axis by the opposed excitation electrodes. Further, an electric field can be applied to the entire area where the excitation electrode is provided without waste, and the electric field efficiency is increased. As a result, R1 (series resistance) is reduced, and the Q value is increased. That is, the drive impedance can be reduced, and the gain of the drive circuit can be reduced. Further, by providing the opening, the rigidity of the base of the beam portion is reduced, and the beam is more easily vibrated, and the frequency of the excitation signal can be reduced. In addition, since the opening is provided in the strain concentration portion, the resonance frequency can be lowered, and an increase in sensitivity can be expected.

  Next, another angular velocity sensor in the embodiment of the present invention will be described. FIG. 8 is a perspective view (a), (b) and a partially enlarged plan view (c) showing a configuration example of another angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 8 is obtained by forming three through holes 801, through holes 802, and through holes 803 in the angular velocity sensor shown in FIG. The through holes 801, 802, and 803 are provided in the base 101 in the same three-fold symmetry state as the three beam portions. By providing the through hole in the base 101 in this way, the propagation of vibration to different leg portions and the propagation of vibration to the support portions connected to the overhang portions 141, 142, and 143 are suppressed. As a result, changes in characteristics due to support fixation are reduced, stable support is possible, temperature characteristics such as zero point drift and sensitivity drift are reduced, and the influence of other axis sensitivity can be suppressed.

  Further, in the angular velocity sensor shown in FIG. 8A, the wiring connected to the electrode provided on the opposite side shown in FIG. 8B is shown in FIG. 8 through the through holes 801, 802, and 803. It is pulled out to the surface side. Other configurations are the same as those of the vibrator and the angular velocity sensor shown in FIGS. Since wiring can be drawn out to one side via the through holes 801, 802, and 803, for example, as shown in the partial enlarged plan view of FIG. 8C, a terminal 811 connected to the ground electrode 201 is provided. , A terminal 812 connected to the detection electrode 251, a terminal 813 connected to the detection electrode 242, and a terminal 814 connected to the excitation electrodes 211, 213, 222, 224, 231, 234 connected by wiring on the opposite side , And can be disposed within the adhesive region 843 of the overhang portion 143.

  As described above, if all the terminals are arranged on the projecting portions 141, 142, and 143 on one surface, and the pedestal portion to be connected to the projecting portion is provided with a corresponding terminal connection portion, as described above, By connecting and connecting them with Au bumps, wiring (pads) can be connected and fixed to the pedestal at the same time. In addition, in joining using Au bumps, ultrasonic waves are applied to the vibrator. However, if electrode wiring or the like is formed on the surface to which the ultrasonic waves are applied, the electrode wiring may be peeled off by application of the ultrasonic waves. . On the other hand, as shown in FIG. 8B, in the case of this vibrator, the electrode wiring is not formed on the surface to which the ultrasonic waves of the projecting portions 141, 142, and 143 are applied, and thus the above problem occurs. It will be difficult.

  The configuration of the through holes provided in the base 101 is not limited to the above-described through holes 801, 802, and 803. For example, as shown in FIG. 9A, three through holes 901, 902, and 903 are provided. You may make it provide in the base 101 of the base of the leg parts 121,122,123. The through holes 901, 902, and 903 are also formed in a state having three times symmetry. In addition, as shown in FIG. 9B, a plurality of through holes 911 may be provided in the base 101. Even in this case, the plurality of through-holes 911 only need to be formed in a state having three-fold symmetry.

  By the way, as shown in FIG. 10, the base portion 101 may be provided with overhang portions 1041, 1042, and 1043, and these overhang portions may be bonded and fixed to a pedestal or the like provided inside a predetermined package. The overhanging portion only needs to be provided on the base 101 as long as the excitation vibration of each beam portion is not hindered.

Next, another vibrator according to the embodiment of the present invention will be described with reference to FIG. The vibrator shown in FIG. 11 first has a base 1101 disposed at the center of the vibrator and three Y-axis directions that form an angle of 120 ° with respect to the base 1101 in a plane with the Z axis as a normal line. comprising three legs 1121 extending. Here, the leg 1121 is composed of a central leg 1121a and two side legs 1121b and 1121c arranged in line symmetry so as to sandwich the leg 1121, and the leg 1122 is symmetrical in line with the center leg 1122a. The leg portion 1123 is composed of a central leg 1123a and two side legs 1123b and 1123c which are disposed in line symmetry so as to sandwich the leg 1123a.

  In addition, the vibrator shown in FIG. 11 includes at least three beam portions 1131, 1132, and 1133 that are provided between adjacent side legs in the XY plane. First, the beam part 1131 is constructed between the side leg 112b and the side leg 1123c. Moreover, the beam part 1132 is constructed between the side leg 1123b and the side leg 1121c. Similarly, the beam portion 1133 is provided between the side leg 1121b and the side leg 1122c.

  In addition, in each beam portion, beam elements extending in the extending direction of the two legs that are installed are alternately connected. First, the beam portion 1131 includes a beam element 1131a in the same direction as the side leg 1123c, a beam element 1131b in the same direction as the side leg 1122b, a beam element 1131c in the same direction as the side leg 1123c, and the same direction as the side leg 1122b. The beam element 1131d is connected in this order.

  The beam portion 1132 includes a beam element 1132a in the same direction as the side leg 1121c, a beam element 1132b in the same direction as the side leg 1123b, a beam element 1132c in the same direction as the side leg 1121c, and the same direction as the side leg 1123b. The beam element 1132d is connected in this order. Similarly, the beam portion 1133 includes a beam element 1133a in the same direction as the side leg 1122c, a beam element 1133b in the same direction as the side leg 1121b, a beam element 1133c in the same direction as the side leg 1122c, and the same direction as the side leg 1121b. These beam elements 1133d are connected in this order.

  In the vibrator illustrated in FIG. 11, similarly to the vibrator shown in FIG. 6, a weight portion 1151, a weight portion 1152, and a weight portion 1153 are provided at the center of each beam portion. The weight part 1151 is provided at the connection part between the beam element 1131b and the beam element 1131c, the weight part 1152 is provided at the connection part between the beam element 1132b and the beam element 1132c, and the weight part 1153 is provided at the connection part between the beam element 1133b and the beam element. It is provided at a connection portion with the element 1133c.

  Here, in the vibrator shown in FIG. 11, an excitation electrode is provided in each beam portion as in the angular velocity sensor shown in FIGS. 5A and 5B, and a detection electrode is provided in each central leg. By providing, it can be operated as an angular velocity sensor. According to the angular velocity sensor configured as described above, the leakage of vibration when the detection mode occurs is less likely to be transmitted to the central leg on which the detection electrode is provided, so that improvement in stability and accuracy in detecting Coriolis force can be expected. It becomes like this.

  In the above description, the vibrator is made of quartz, but the present invention is not limited to this. A piezoelectric crystal having symmetry of an integral multiple of 3 may be used. Moreover, you may make it use piezoelectric ceramics, such as PZT ceramics. The piezoelectric ceramic material is a material having infinite symmetry with respect to a predetermined axis (Z axis). Alternatively, a piezoelectric material thin film may be formed on a silicon substrate, and the piezoelectric thin film may be processed to form a vibrator composed of the beam portion composed of the plurality of beam elements described above.

It is a top view which shows the structural example of the vibrator | oscillator in embodiment of this invention. FIG. 2 is a perspective view (a), (b) and a partial cross-sectional view (c) showing an arrangement of electrodes for constituting an angular velocity sensor using the vibrator shown in FIG. 1. FIG. 3 is a schematic circuit diagram showing a connection relationship between each detection electrode and a detection circuit shown in FIG. 2. It is a top view which shows the structural example of the other vibrator | oscillator which concerns on this Embodiment of this invention. It is the perspective view which showed arrangement | positioning of the electrode for comprising an angular velocity sensor using the vibrator | oscillator shown in FIG. It is a perspective view which shows the structural example of the other vibrator | oscillator in embodiment of this invention. It is the top view (a), perspective view (b), (c), and sectional drawing (d) which show the example of a structure of the other vibrator | oscillator and angular velocity sensor in embodiment of this invention. It is the perspective views (a) and (b) which show the structural example of the other angular velocity sensor in embodiment of this invention, and a partial enlarged plan view (c). It is a top view which shows the structural example of the other vibrator | oscillator which concerns on this Embodiment of this invention. It is a top view which shows the structural example of the other vibrator | oscillator which concerns on this Embodiment of this invention. It is a top view which shows the structural example of the other vibrator | oscillator which concerns on this Embodiment of this invention.

Explanation of symbols

101 ... Base, 121, 122, 123 ... Leg, 131, 132, 133 ... Beam, 131a, 131b, 132a, 132b, 133a, 133b ... Beam element, 141, 142, 143 ... Overhang.

Claims (8)

A vibrator composed of a piezoelectric material having at least three-fold symmetry about a predetermined axis,
A base disposed in a central portion of the vibrator;
And three leg portions, each extending in three directions forming an angle to each other 120 ° from the base in a plane of said axis and normal line,
And at least three beam portions laid between the legs in the plane,
The beam portion is formed by alternately connecting beam elements extending in the extending direction of the two leg portions that are installed. The vibrator according to claim 1,
The leg portion is composed of a center leg and two side legs arranged in line symmetry so as to sandwich the center leg.
The vibrator is constructed between the side legs adjacent to each other. The vibrator according to claim 1 or 2,
A vibrator comprising a weight portion provided at a central portion of each of the beam portions. The vibrator according to any one of claims 1 to 3,
The piezoelectric material is quartz,
The predetermined axis is an optical axis of crystal;
The three directions are directions of a mechanical axis of the crystal. An angular velocity sensor composed of a vibrator made of a piezoelectric material having symmetry at least three times around a predetermined axis,
A base disposed in a central portion of the vibrator;
And three leg portions, each extending in three directions forming an angle to each other 120 ° from the base in a plane of said axis and normal line,
Three beam portions erected between the leg portions in the plane;
Excitation electrodes provided on each of the beam portions;
And at least a detection electrode provided on each of the legs,
The angular velocity sensor, wherein the beam portion is formed by alternately connecting beam elements extending in the extending direction of the two leg portions. The angular velocity sensor according to claim 5,
The leg portion is composed of a center leg and two side legs arranged in line symmetry so as to sandwich the center leg.
The beam portion is constructed between the adjacent side legs,
The angular velocity sensor, wherein the detection electrode is provided on the central leg. The angular velocity sensor according to claim 5 or 6,
An angular velocity sensor comprising a weight portion provided at a central portion of each beam portion. The angular velocity sensor according to any one of claims 5 to 7,
The piezoelectric material is quartz,
The predetermined axis is an optical axis of crystal;
The angular velocity sensor, wherein the three directions are directions of a mechanical axis of crystal.

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