JP4948970B2 - Valve devices and fittings - Google Patents

Description

  The present invention relates to a valve device and a joint suitably used for connecting passages for fluids such as chemicals such as wafer cleaning liquid and substrate coating agent used in the semiconductor field, for example.

  As the above-described valve device, one shown in FIG. 8 is known (see, for example, Patent Document 1). This valve device is attached by being inserted into a through hole 102 provided in the flange 101 of the container 100, and a valve body 105 is slidably disposed in a hole 104 provided along the axial center of the valve frame 103. When the enlarged diameter upper end portion 106 of the valve body 105 comes into contact with the valve seat 107 provided above the hole 104, the valve device is closed, and when the enlarged diameter upper end portion 106 is separated from the valve seat 107, the valve device is opened. become. When the valve device is open, the fluid received from the receiving member 108 provided below the valve seat 107 in the hole 104 passes through the internal fluid passage 109 formed in the gap between the hole 104 and the valve body 105. Then, the feed member 110 provided above the valve seat 107 of the hole 104 is sent to the inside of the container 100.

The material of the valve device configured as described above is that all parts of the valve frame 103, the valve body 105, the receiving member 108, and the delivery member 110 that are in contact with the fluid are used in order to prevent metal ions from being mixed into the fluid. It is made of a resin material.
JP 2004-308740 A

  However, although the valve device described above is held around the circumferential direction of the valve frame body 103 by the flange 101, the axial direction of the valve frame body 103 is not held by metal. In order to ensure the strength in the axial direction and prevent deformation, it has to be lengthened, and downsizing is difficult.

  The present invention has been made to solve the above-described problems of the prior art, and can prevent the mixing of metal ions into the fluid flowing through the internal fluid passage, and the axial direction of the valve frame body. It is an object of the present invention to provide a valve device and a joint that can be reduced in size while preventing deformation in a direction orthogonal to the above.

The valve device according to the invention of claim 1 is a valve frame having an internal fluid passage that is bent halfway and has openings at both the bent portion and both ends, and a valve seat provided at one end of the internal fluid passage. Body, a shaft member provided on the valve frame body so as to be slidable in a direction connecting the bent portion of the internal fluid passage and the opening on the one end side, and an inner end of the shaft member from the opening of the bent portion. A valve body provided so as to be able to advance into the fluid passage, and the valve frame body is divided into a resin valve frame body having the internal fluid passage and at least two, and the valve frame body is A metal holding cover connected in a covering state, and in the state in which the holding cover is connected, both side portions of the valve frame body in the sliding direction of the shaft member and portions along the circumferential direction of the shaft member. The valve body is attached to the tip of the shaft member. A metal valve body base that, possess an outer covered and valve body film made of resin for closing the opening of the bent portion of the valve body base portion, the holding cover, the opening of one end of the internal fluid passageway A first through hole in a portion corresponding to the second fluid passage, a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage, and a valve body insertion hole in a portion corresponding to the opening of the bent portion of the internal fluid passage. Are formed, and includes a first holding cover that covers a portion of the valve frame body along the circumferential direction of the shaft member and has the second through hole, and the first holding cover for the valve frame body positioning means for determining the circumferential position characterized that you have provided.

A valve device according to a second aspect of the present invention includes a valve frame that includes an internal fluid passage that is bent halfway and has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage. Body, a shaft member provided on the valve frame body so as to be slidable in a direction connecting the bent portion of the internal fluid passage and the opening on the one end side, and an inner end of the shaft member from the opening of the bent portion. A valve body provided so as to be able to advance into the fluid passage, and the valve frame body is divided into a resin valve frame body having the internal fluid passage and at least two, and the valve frame body is A metal holding cover connected in a covering state, and in the state in which the holding cover is connected, both side portions of the valve frame body in the sliding direction of the shaft member and portions along the circumferential direction of the shaft member. The valve body is attached to the tip of the shaft member. A metal valve body base that, possess an outer covered and valve body film made of resin for closing the opening of the bent portion of the valve body base portion, the holding cover, the opening of one end of the internal fluid passageway A first through hole in a portion corresponding to the second fluid passage, a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage, and a valve body insertion hole in a portion corresponding to the opening of the bent portion of the internal fluid passage. Are formed on each side of the valve frame body in the sliding direction of the shaft member, the second holding cover having the first through hole, and the first through hole of the second holding cover. wherein O-ring between the edge and Benwaku body is the state in which edges from a preventing leakage by the projection which projects toward the center of the first through hole of the first through hole, that you have provided And

A valve device according to a third aspect of the present invention is the valve device according to the first or second aspect, further comprising an external pipe having an inner resin pipe and an outer metal pipe, the outer pipe being the resin pipe. The metal tube is attached to a peripheral edge portion of the second through hole in the holding cover so that is communicated with the opening on the other end side.

  A valve device according to a fourth aspect of the present invention is the valve device according to the third aspect, characterized in that a resin cage is welded to an end of the resin pipe on the valve frame body side. To do.

  The valve device according to a fifth aspect of the present invention is the valve device according to any one of the first to fourth aspects, wherein the valve body membrane is a valve head contacting and separating from the valve seat, and a tubular portion connected thereto. And the bottom part of the cylindrical part is fixed to the valve frame body.

  According to a sixth aspect of the present invention, there is provided the valve device according to the fifth aspect, wherein the bottom portion of the tubular portion is sandwiched between the valve frame body main body and the holding cover, The main body and the holding cover have a reduced diameter portion that decreases in diameter as the portion that sandwiches the skirt portion approaches the internal fluid passage.

A joint according to the invention of claim 7 is a joint using the valve device according to claim 2 , wherein the second holding cover is brought into contact with the mating joint and both joints are connected. Features.

In the valve device of the present invention, since the valve frame body and the valve body film exposed to the internal fluid passage are formed of resin, it is possible to prevent metal ions from being mixed into the fluid flowing through the internal fluid passage. Is possible. Also, not only the portion along the circumferential direction of the shaft member in the valve frame body that is easily made of resin, but also the both sides in the sliding direction of the shaft member in the valve frame body are held by a metal holding cover. Since the valve frame body is configured, deformation of the shaft member in the valve frame body in the sliding direction can be prevented, and thereby the length of the shaft member in the valve frame body in the sliding direction can be shortened. Furthermore, since the first and second through holes are respectively formed in the holding cover corresponding to the openings at both ends of the valve frame body, the resin valve is not obstructed by the fluid flow in the internal fluid passage. The deformation of the frame body can be reduced. Furthermore, the positioning means can match the positions of the other end side opening of the valve frame body and the second through hole of the first holding cover. In particular, when an external conduit communicating with the other end side opening is provided as in claim 3, it is effective in preventing fluid leakage from the joint. That is, when there is a deviation between the opening of the other end side and the second through hole, the resin pipe of the external pipe line is connected to the other end side opening, and the metal pipe of the external pipe line is connected to the second through hole, respectively. In some cases, there is a possibility that the external pipe line may be attached in a state where the resin valve frame body is deformed, the joint portion becomes poorly joined, and fluid leakage occurs. On the other hand, in the case of the configuration in which the positions of the other end side opening and the second through hole are made to coincide with each other as in the present invention device, the resin pipe of the outer pipe line is set to the other end side opening, and the metal pipe of the outer pipe line Can be made to coincide with the second through-holes, respectively, so that no joint failure occurs in the joint portion and the occurrence of fluid leakage can be prevented.

In the case of the apparatus according to the second aspect of the present invention, since the valve frame body and the valve body film exposed to the internal fluid passage are formed of resin, mixing of metal ions into the fluid flowing through the internal fluid passage is prevented. Is possible. Also, not only the portion along the circumferential direction of the shaft member in the valve frame body that is easily made of resin, but also the both sides in the sliding direction of the shaft member in the valve frame body are held by a metal holding cover. Since the valve frame body is configured, deformation of the shaft member in the valve frame body in the sliding direction can be prevented, and thereby the length of the shaft member in the valve frame body in the sliding direction can be shortened. Furthermore, since the first and second through holes are respectively formed in the holding cover corresponding to the openings at both ends of the valve frame body, the resin valve is not obstructed by the fluid flow in the internal fluid passage. The deformation of the frame body can be reduced. Furthermore, since the protrusion that prevents the O-ring from coming off is formed on the second holding cover made of metal, it is possible to reliably prevent the O-ring from coming off. In other words, if a protrusion for preventing removal is formed on the resin valve frame body, the protrusion easily deforms and cannot prevent the O-ring from being removed, but the protrusion is formed on the second holding cover side. By doing so, it is possible to reliably prevent the O-ring from coming off.

  In the case of the valve device according to the third aspect, since the metal pipe is fixed to the metal holding cover, the position of the resin pipe provided inside the metal pipe can be defined. Thereby, the position of the resin pipe and the peripheral edge of the opening on the other end side of the internal fluid passage becomes difficult to shift, and the connection state between them can be maintained for a long time. Further, by configuring the external conduit so as to be detachable, the replacement and maintenance can be easily performed.

  According to the fourth aspect of the present invention, since the soot separate from the resin tube is welded to the resin tube, the angle of the soot on the end face of the valve frame body side with respect to the axis of the external pipe line can be surely brought out at a right angle. It becomes possible, and it can prevent that a recessed part is formed in the connection part of the periphery of the other end side opening of a valve frame main body, and a collar. Thereby, it is possible to prevent the stagnation of the fluid from occurring in the connecting portion. Moreover, it becomes possible to widen the connection area with the other end side opening of the valve frame body by the scissors, and it is possible to arrange an O-ring at the connecting portion. It is possible to improve the water tightness of the connection part with the ridge.

  In the case of claim 5, since the bottom part of the cylindrical part connected to the valve head in the valve body membrane is fixed by the valve frame body, even if the valve body base, the shaft member and the bearing are made of metal, The metal portion and the internal fluid passage can be divided by a resin valve body membrane. Thereby, it can prevent that the metal powder etc. which generate | occur | produce with a shaft member and a bearing mix in an internal fluid channel | path.

  In the case of the sixth aspect, the portion of the valve frame body and the holding cover that sandwiches the skirt is reduced in diameter and curved (or bent), so that the contact area with the skirt of the sandwiched portion is reduced. Increase can be achieved, and even if the resin-made valve frame body deteriorates with aging, it is possible to maintain the clamping state of the skirt for a long period of time.

In the case of the joint according to the present invention of claim 7 , since the force at the time of connection is received by the metal holding cover, it is possible to prevent the force from being applied to the resin valve frame body and to prevent deformation. .

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.

  FIG. 1 is a longitudinal sectional view showing a joint to which the valve device of the present invention is applied. The right side of the center line (dashed line) shows the valve closed state, and the left side shows the valve open state. FIG. 2 is a bottom view of the joint.

  The joint 1 includes a valve frame body 3 having an internal fluid passage 2, a shaft member 4 provided inside the valve frame body 3, and a valve body 5 provided at a distal end portion (lower part in the drawing) of the shaft member 4. And a bearing 6 that slidably supports the middle of the shaft member 4 and a slide mechanism 7 that slides the shaft member 4.

  The valve frame body 3 is made of a resin valve frame body 10 having an internal fluid passage 2 therein, and metal holding covers 20 and 21 that are divided into three parts and connected to cover the valve frame body 10. , 22 and a cylindrical member 23 provided on the upper side of the holding covers 20-22.

  As shown in FIG. 3, the valve frame body 10 is formed in a substantially cylindrical shape with the vertical direction as the axial direction by integral molding using a synthetic resin, for example, a fluororesin such as polytetrafluoroethylene (PTFE). ing. The internal fluid passage 2 provided inside the valve frame body 10 has a first opening 11 disposed at the axial center of the lower surface of the valve frame body 10 as one end, and extends upward from the first opening 11. The second opening 12, which is the other end of the internal fluid passage 2, is arranged on the peripheral surface of the valve frame body 10, and is formed in an L shape from the bent portion 2 a provided in the middle in the vertical direction toward the peripheral surface. ing.

  Thus, the valve seat 13 is provided in the internal fluid channel | path 2 formed in the L-shape below the bending part 2a (the curvature center side of the bending part 2a) (refer FIG. 1). The valve seat 13 is formed in an annular shape having the same axial center as the first opening 11 and having an upper radius longer than a lower radius. The longitudinal cross-sectional shape of the valve seat 13 is linear in this illustrated example.

  The shape of the outer periphery of the valve frame body 10 is the same in the vertical direction, and in the horizontal direction, a portion near the second opening 12 is formed in a straight line, and the other portions are formed in a circular shape. That is, the vicinity of the second opening 12 is formed in a substantially planar shape. Further, a concave groove 10a for positioning which is long in the vertical direction (axial direction) is formed in a portion of the valve frame body 10 opposite to the second opening 12 (see FIGS. 1 and 3).

  As shown in FIG. 1, the upper surface 14 of the valve body 10 is opposite to the first opening 11 (upper side in the figure) and is above the bent portion 2 a (on the opposite side to the center of curvature of the bent portion 2 a). Is formed with a concave portion 14a recessed downward in the axial center portion, and an opening 15 through which the valve body 5 can be inserted is formed at the bottom of the concave portion 14a. The peripheral portion of the opening 15 in the concave portion 14a is a reduced diameter portion 16 that is reduced in diameter toward the internal fluid passage 2, and the shape along the axis of the outer peripheral surface portion of the reduced diameter portion 16 is bent. It is in a state (see FIG. 6). In addition, the shape along the axial center in the outer peripheral surface portion of the reduced diameter portion 16 may be a curved state.

  The holding covers 20 to 22 are provided so as to surround the outside of the resin-made valve frame body 10, and the first holding cover 20 has a portion along the circumferential direction of the shaft member 4 in the valve frame body 10. The second holding cover 21 covers the lower part of the valve frame body 10 in the sliding direction of the shaft member 4, and the third holding cover 22 covers the upper part of the valve frame body 10 in the sliding direction of the shaft member 4. .

These holding covers 20 to 22 are configured as shown in FIGS. 1 and 4.
The first holding cover 20 is formed with an inner cavity 20b having a circular shape in a plan view at the axial center of the rectangular block 20a, and has bolt insertion holes 20c at four corners of the rectangular block 20a. Further, on the peripheral surface of the first holding cover 20, a second through hole 20 d is provided at a position corresponding to the second opening 12, and a positioning pin 20 e that enters the concave groove 10 a is attached. The second through hole 20d is formed with an inner diameter larger than that of the second opening 12 in this embodiment.

  The second holding cover 21 is formed in the same shape and dimensions as the bottom surface of the first holding cover 20, and a first through hole 21 a is formed in the shaft center portion, and a bolt insertion hole 21 b is formed in the four corners. The first through hole 21 a is disposed at a position corresponding to the first opening 11, and has an inner diameter larger than that of the first opening 11 in the present embodiment.

  The third holding cover 22 is provided with a medium diameter portion 22a, a large diameter portion 22b, and a small diameter portion 22c concentrically and integrally from the upper side to the lower side in the height direction. The small diameter portion 22c is inserted into the internal cavity 20b of the first holding cover 20 in a state where the axial centers of the first holding cover 20 and the third holding cover 22 are aligned. The small-diameter portion 22c is provided with a valve element insertion hole 22e corresponding to the opening 15 with its axial direction aligned with the vertical direction. Further, four upward bolt mounting holes 22d are formed around the axis on the lower surface of the large diameter portion 22b and outside the small diameter portion 22c.

  As shown in FIGS. 1 and 4, these holding covers 20 to 22 sandwich the first holding cover 20 between the second holding cover 21 and the third holding cover 22, and from the lower side of the second holding cover 21. The four bolts 24 are attached so as to reach the bolt attachment holes 22d of the third holding cover 22 through the bolt insertion holes 21b and 20c.

  Inside the holding covers 20 to 22 thus connected, an internal space A having a size that allows the valve frame body 10 to enter just as shown in FIG. 1 is formed. A substantially cylindrical valve frame body 10 is disposed. In this arrangement, it is possible to adjust the angular direction of the valve frame body 10 with respect to the first holding cover 20 to a predetermined direction by inserting the positioning pin 20e into the concave groove 10a. The gap between the internal space A and the peripheral surface of the valve frame body 10 comes into contact with the inner peripheral surface of the first holding cover 20 as the valve frame body 10 is deformed, and the valve frame body 10 is deformed. It is set to a dimension that can reduce this. However, the deformation of the valve frame body 10 can be reduced by the external conduit 25 in the substantially planar portion in the vicinity of the second opening 12 in the valve frame body 10.

  The external conduit 25 is attached to the first holding cover 20 in a state of communicating with the second opening 12 of the valve frame body 10, and has an inner resin tube 26 and an outer metal tube 27. Flange 27a, 27b is provided at both ends of the metal tube 27, and flanges 26a, 26b are provided at both ends of the resin tube 26. The flange 27 a and the flange 26 a are on the side close to the first holding cover 20, and the flange 27 b and the flange 26 b are on the side far from the first holding cover 20.

  The flange 27b and the flange 26b corresponding to the flange 27b are formed to be flush with each other. One of the flanges 26a is separately formed in a ring shape having a constant thickness, and the inner peripheral portion of the flange 26a is welded to the end of the resin tube 26. The outer peripheral portion of the flange 26a protrudes outward from the outer peripheral surface of the resin tube 26, and the end surface of the flange 27a is in contact with the flange 26b side of the protruding portion of the flange 26a. The flange 26a makes it possible to reliably bring out an angle with respect to the axial center of the external conduit 25 on the second opening 12 side end surface of the flange 26a. The concave portion is prevented from being formed in the connecting portion with 26a, and fluid stagnation is prevented.

  The peripheral surface of the flange 27a is formed in a stepped shape, the inner small diameter portion 27c enters the second through hole 20a provided in the first holding cover 20, and the outer large diameter portion 27d is the second through hole. Removably fixed to the peripheral edge of the hole 20a. Due to the fixing, the resin pipe 26 is connected in communication with the second opening 12 being pressed, thereby reducing the deformation of the valve frame body 10. This fixing makes it possible to define the position of the resin pipe 26 because the metal pipe 27 is attached to the first holding cover 20 made of metal, thereby shifting the position of the resin pipe 26 and the second opening 12. It is difficult to maintain the connection state between the two for a long time. Moreover, since the external conduit 25 is detachable, it is possible to easily replace and maintain it.

  An O-ring 35 is provided in the vicinity of the second opening 12 of the valve frame body 10. The O-ring 35 is disposed at the connection portion in accordance with the fact that the connection area with the second opening 12 of the valve frame body 10 can be increased by the flange 26a. The O-ring 35 is pressed toward the axial center of the valve frame body 10 by the flange 26a, thereby improving the water tightness of the connection portion between the second opening 12 of the valve frame body 10 and the flange 26a.

  In the valve element insertion hole 22e provided in the third holding cover 22, the shaft member 4 is provided so as to be slidable in a direction (vertical direction in the drawing) in which the shaft member 4 is in contact with and away from the first opening 11. A valve body 5 is attached to the front end of 4 (lower part of the figure). The valve body 5 includes a metal valve body base 17 attached to the tip of the shaft member 4, and covers the outside of the valve body base 17 and contacts the valve seat 13 as the shaft member 4 slides. The valve body film 18 made of resin that closes the fluid passage 2 is provided, and can advance from the opening 15 to the inside of the internal fluid passage 2.

  The valve body film 18 constituting the valve body 5 has a valve head portion 18a that contacts the peripheral edge of the first opening 11 to close the internal fluid passage 2, and a tubular portion 18b connected to the valve head portion 18a. A skirt portion 18 c of the shape portion 18 b is sandwiched between the valve frame body main body 10 constituting the valve frame body 3 and the third holding cover 22. More specifically, as shown in FIG. 6, between the reduced diameter portion 16 of the valve frame body 10 and the pad 19 attached to the outer surface of the third holding cover 22 and capable of bending deformation, the bolt 24 It is clamped by receiving the fastening force. Since the bent (or curved) reduced diameter portion 16 is used to fix the skirt 18c, the contact area with the skirt 18c can be increased, and the resin valve frame body 10 can be increased. However, even if it deteriorates with aging, the holding state of the skirt portion 18c is maintained for a long time. The valve body film 18 is provided so as to close the opening 15, and is provided between the valve body base portion 17 and the internal fluid passage 2, between the shaft member 4 and the internal fluid passage 2, and the bearing 6. The internal fluid passage 2 is divided.

  The bearing 6 for slidably supporting the shaft member 4 is provided on the third holding cover 22 and the bearing member 23 a provided on the upper end of the cylindrical member 23. An annular member 29 fixed to the shaft member 4 is disposed between the third holding cover 22 and the bearing member 23a, and the annular member 29 is disposed between the annular member 29 and the bearing member 23a. A coil spring 30 is provided that presses and urges downward.

  In addition, an air passage 32 for supplying air to the sealed space 31 between the third holding cover 22 and the annular member 29 is provided inside the third holding cover 22, and the third holding cover 22, the shaft member 4, and the valve A space 33 that allows the valve body 5 to slide up and down is provided at a location surrounded by the body 5, and an air passage 34 that allows air to enter and exit from the space 33 is provided. The annular member 29, the air passages 32 and 34, and the coil spring 30 constitute the slide mechanism 7 that slides the shaft member 4.

  When air is supplied to the air passage 32, the sealed space 31 is widened, the annular member 29 is pushed upward against the pressing biasing force of the coil spring 30, and the shaft member 4 and the valve body 5 slide upward. The valve body 5 is separated from the valve seat 13 and the internal fluid passage 2 is opened. At this time, air is discharged to the gap 33 through the air passage 34. On the other hand, when the air is discharged from the air passage 32, the sealed space 31 is narrowed, the annular member 29 is pushed downward by the pressing biasing force of the coil spring 30, and the shaft member 4 and the valve body 5 slide downward. The valve body 5 comes into contact with the valve seat 13 and the internal fluid passage 2 is closed. At this time, air is sucked into the gap 33 through the air passage 34.

  When the internal fluid passage 2 is in an open state, a fluid composed of chemicals such as a wafer cleaning liquid and a substrate coating agent flows through the internal fluid passage 2. At this time, the second holding cover 21 has a first through hole 21 a in a portion corresponding to the first opening 11, and the first holding cover 20 has a second through hole 20 d in a portion corresponding to the second opening 12. Since it is formed, deformation of the resin valve frame body 10 is reduced without obstructing the flow of fluid in the internal fluid passage 2.

  An O-ring 36 is provided on the lower surface of the second holding cover 21. More specifically, as shown in FIG. 7, it protrudes from the edge of the first through hole 21a toward the center of the first through hole 21a between the edge of the first through hole 21a and the valve frame body 10. The protrusions 37 are provided in a state in which they are prevented from being pulled out. Unlike the case in which the easily deformable protrusion 37 is formed on the resin-made valve frame body 10, the protrusion 37 is formed on the metal second holding cover 21 in this manner. This is to prevent it.

  Further, the connection with the mating joint 1A is performed so as to abut on the metal second holding cover 21. Thereby, since the force at the time of connection is received by the metal holding covers 20, 21, and 22, the force is not applied to the resin valve frame body 10 to prevent deformation. As the mating joint 1A, a joint in which the O-ring 36 is omitted from the configuration of the joint 1 of the present embodiment can be used.

  In the case of the joint 1 of the present embodiment configured as described above, the valve frame body 10 and the valve body film 18 exposed to the internal fluid passage 2 are formed of resin, and therefore flow through the internal fluid passage 2. It is possible to prevent metal ions from being mixed into the fluid. In particular, by fixing the skirt portion 18c of the valve body film 18 to the valve frame body 3, between the valve body base portion 17 and the internal fluid passage 2, between the shaft member 4 and the internal fluid passage 2, and the bearing 6 The internal fluid passage 2 can be divided by a resin valve body film 18, and even if the valve body base 17, the shaft member 4, and the bearing 6 are made of metal, the internal fluid can be separated from these metal portions. By separating the passage 2, metal powder generated in the shaft member 4 and the bearing 6 that are in sliding contact with each other is prevented from being mixed into the internal fluid passage 2.

  Moreover, in this embodiment, not only the part along the circumferential direction of the shaft member 4 in the valve frame main body 10 which consists of resin and is easy to deform | transform, but both sides of the sliding direction of the shaft member 4 in the valve frame main body 10 Since the valve frame body 3 is configured by being held by the metal holding covers 20 to 22, the shaft member 4 in the valve frame body 3 can be prevented from being deformed in the sliding direction, whereby the shaft in the valve frame body 3 can be prevented. The length of the member 4 in the sliding direction can be shortened.

  Furthermore, in this embodiment, the first holding cover 20 and the valve frame body body 10 are provided with positioning means (concave groove 10a and positioning pin 20e) for determining the positions of both in the circumferential direction. The positions of the second opening 12 of the body body 10 and the second through hole 20d of the first holding cover 20 can be matched. In particular, when the external conduit 25 communicating with the second opening 12 is provided, it is effective in preventing fluid leakage from the joint. That is, when the positions of the second opening 12 and the second through hole 20d are misaligned, the resin pipe 26 of the outer conduit 25 is moved to the second opening 12, and the metal pipe 27 of the outer conduit 25 is passed through the second penetrating hole. When each of the holes 20d is connected, the external pipe 25 may be attached in a state where the resin valve frame body 10 is deformed, the joint becomes poorly joined, and fluid leakage occurs. On the other hand, in the case of the configuration in which the positions of the second opening 12 and the second through hole 20d coincide with each other as in the present embodiment, the resin pipe 26 of the external pipe 25 is connected to the second opening 12 and the external pipe The 25 metal pipes 27 can be made to coincide with the second through-holes 20d, respectively, so that no joint failure occurs in the joint portion, and the occurrence of fluid leakage can be prevented.

  In the above-described embodiment, the holding cover is divided into three, but the present invention is not limited to this. For example, the first holding cover and the second holding cover are integrated and connected to the third holding cover, or the first holding cover and the third holding cover are integrated, and this is used as the second holding cover. It is good also as a structure connected, ie, the structure divided | segmented into two, Furthermore, even if it is a type decomposed | disassembled into three, it may be set as the structure connected at another location, or it is good also as a structure divided | segmented into 4 or more.

  In the above-described embodiment, the air actuator and the spring are used as the slide mechanism. However, the present invention is not limited to this, and known means such as an electromagnet or a manual handle are used.

  Furthermore, the valve device and the joint of the present invention are not limited to chemicals such as wafer cleaning liquid and substrate coating agent used in the semiconductor field described above, but can be applied to fluids such as foods that require cleanliness. Of course.

FIG. 1 is a longitudinal sectional view showing a joint to which the valve device of the present invention is applied. It is a bottom view of the joint of FIG. It is an external appearance perspective view which shows a valve frame main body. It is a disassembled perspective view of a holding cover. It is explanatory drawing (plan view) of positioning with a valve-frame body and a 1st holding cover. It is a longitudinal cross-sectional view which shows the fixed state of the skirt part of a valve body film | membrane. It is a figure (front view) for demonstrating a connection state with the other party coupling. It is explanatory drawing (longitudinal sectional view) of patent document 1. FIG.

DESCRIPTION OF SYMBOLS 1 Joint 1A Opposite joint 2 Internal fluid passage 2a Bending part 3 Valve frame body 4 Shaft member 5 Valve body 6 Bearing 7 Slide mechanism 10 Valve frame body 10a Concave groove (positioning means)
11 1st opening (opening of one end side)
12 Second opening (opening at the other end)
13 Valve seat 16 Reduced diameter portion 17 Valve body base 18 Valve body membrane 18a Valve head portion 18b Tubular portion 18c Bottom portion 20, 21, 22 Holding cover 20d Second through hole 20e Positioning pin (positioning means)
21a First through hole 22e Valve element insertion hole 25 External pipe 26 Resin pipe 26a ２７ 27 Metal pipe 36 O-ring 37 Projection

Claims (7)

A valve frame body that has an internal fluid passage that is bent in the middle and that has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage;
A shaft member slidably provided in the valve frame body in a direction connecting the bent portion of the internal fluid passage and the one end side opening;
A valve body provided at the tip of the shaft member so as to be able to advance into the internal fluid passage from the opening of the bent portion;
The valve frame body includes a resin valve frame body body having the internal fluid passage, and a metal holding cover that is divided into at least two parts and connected to cover the valve frame body body, The holding cover is connected to cover both sides of the valve frame body in the sliding direction of the shaft member and the portion along the circumferential direction of the shaft member.
It said valve body, possess a metal valve body base attached to the distal end of the shaft member, covering the outside of the valve body base and a resin valve body film for closing the opening of the bent portion,
The holding cover has a first through hole in a portion corresponding to the opening on one end side of the internal fluid passage, and a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage. A valve body insertion hole is formed in a portion corresponding to the opening of the bent portion, and a first portion that covers a portion of the valve frame body along the circumferential direction of the shaft member and has the second through hole. a holding cover, the valve device characterized that you have positioning means are provided for determining the circumferential position of the first holding cover to the valve frame body. A valve frame body that has an internal fluid passage that is bent in the middle and that has openings at both the bent portion and both ends, and a valve seat that is provided at one end of the internal fluid passage;
A shaft member slidably provided in the valve frame body in a direction connecting the bent portion of the internal fluid passage and the one end side opening;
A valve body provided at the tip of the shaft member so as to be able to advance into the internal fluid passage from the opening of the bent portion;
The valve frame body includes a resin valve frame body body having the internal fluid passage, and a metal holding cover that is divided into at least two parts and connected to cover the valve frame body body, The holding cover is connected to cover both sides of the valve frame body in the sliding direction of the shaft member and the portion along the circumferential direction of the shaft member.
It said valve body, possess a metal valve body base attached to the distal end of the shaft member, covering the outside of the valve body base and a resin valve body film for closing the opening of the bent portion,
The holding cover has a first through hole in a portion corresponding to the opening on one end side of the internal fluid passage, and a second through hole in a portion corresponding to the opening on the other end side of the internal fluid passage. A valve body insertion hole is formed in a portion corresponding to the opening of the bent portion, and a second holding cover which is the one side portion in the sliding direction of the shaft member in the valve frame body and has the first through hole. And an O-ring between the edge of the first through hole of the second holding cover and the valve frame body body by a protrusion protruding from the edge of the first through hole toward the center of the first through hole. in a state of being strain relief, the valve characterized that you have provided apparatus. The valve device according to claim 1 or 2,
An external pipe having an inner resin pipe and an outer metal pipe is provided, and the outer pipe has a second pipe in the holding cover such that the resin pipe communicates with the opening on the other end side. A valve device, which is attached to a peripheral portion of a through hole. The valve device according to claim 3,
A valve device characterized in that a resin rod is welded to an end of the resin pipe on the valve frame body side. The valve device according to any one of claims 1 to 4,
The valve body membrane includes a valve head contacting and separating from the valve seat, and a tubular portion connected to the valve head, and a skirt portion of the tubular portion is fixed to the valve frame body. Valve device. The valve device according to claim 5,
The bottom portion of the tubular portion is sandwiched between the valve frame body and the holding cover, and the portion that sandwiches the bottom portion of the valve frame body and the holding cover is contracted to approach the internal fluid passage. A valve device characterized by having a reduced diameter portion. In the joint using the valve device according to claim 2 ,
A joint characterized in that the second holding cover is brought into contact with the mating joint and both joints are connected.

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