JP4921229B2 - Cleaning device - Google Patents

Description

The present invention relates to a cleaning apparatus that immerses an object to be processed such as a machine part or a plated part, to which oil-based dirt or the like adheres, in a cleaning solvent and ultrasonically cleans it, and then cleans it with a cleaning solvent vapor.

Various types of dirt such as machining oil such as cutting oil, flux, dust, and the like adhere to various parts such as metal machine parts, plated parts, and electronic parts in the manufacturing process and assembly process. For cleaning such objects such as machine parts and electronic parts that are contaminated with dirt, conventionally, for example, a hydrocarbon-based or chlorine-based metal cleaning solvent is used, and the object to be processed is immersed in the cleaning solvent. An immersion cleaning process for cleaning by applying vibration by ultrasonic waves is performed, and then a steam cleaning process for cleaning by spraying a vapor of a cleaning solvent is performed. And the to-be-processed object after steam washing is dried by performing a vacuum drying process.
JP 11-57637 A

  By the way, the ultrasonic generator has a configuration in which a plurality of vibration elements are bonded to a stainless steel plate as a vibration plate. In the steam cleaning step, the steam temperature of the cleaning solvent is a high temperature of 110 to 120 ° C. or higher, and since this high temperature steam is supplied into the cleaning tank, the ultrasonic generator provided on the bottom surface of the cleaning tank is also 100 Exposed to high temperature above ℃. For this reason, the adhesive agent etc. which adhere | attach the vibration element may generate | occur | produce troubles, such as a high heat | fever and adhesive force falling and a vibration element removing.

  For this reason, it is also conceivable to increase the heat dissipation efficiency of the diaphragm or the vibration element whose temperature has increased by blowing compressed air or nitrogen gas to the ultrasonic generator. However, such means is a waste of compressed air and nitrogen gas, which is not preferable from the viewpoint of effective use of resources.

Therefore, an object of the present invention is to provide a cleaning apparatus capable of preventing the ultrasonic generator from being exposed to high temperature even when high-temperature steam is introduced into the cleaning tank in the steam cleaning step.

The present invention has been proposed in view of the above, a cleaning tank that accommodates an object to be processed , an ultrasonic generator mounted in a state facing the inner surface of the cleaning tank, and a cleaning solvent in the cleaning tank. A cleaning solvent supply system for supplying liquid, a cleaning solvent draining system for draining the cleaning solvent in the cleaning tank, and a cleaning solvent vapor introducing system for introducing the cleaning solvent vapor into the cleaning tank. Under control, an immersion cleaning process in which the object to be processed is immersed in a cleaning solvent supplied into the cleaning tank and subjected to ultrasonic vibration for cleaning, and a drain for discharging the cleaning solvent in the cleaning tank after the immersion cleaning process. A cleaning apparatus that performs a liquid process, and a steam cleaning process for introducing a cleaning solvent vapor into the cleaning tank after the draining process to steam-clean the workpiece.
The ultrasonic generator is disposed at the inclined bottom of the cleaning tank, the cleaning solvent supply system ejection nozzle is disposed at the bottom of the inclined upper end side of the ultrasonic generator, and the cleaning solvent drainage is provided at the inclined lower end of the bottom. The drainage port of the system is opened, the ultrasonic generator is cooled while the cleaning solvent ejected from the ejection nozzle flows through the bottom, and the cleaning solvent that has flowed down to the bottom inclined bottom is discharged out of the washing tank Like
In the vapor cleaning process, the control device operates the cleaning solvent vapor introduction system while operating the cleaning solvent supply system and supplying the cleaning solvent supplied into the cleaning tank to the ultrasonic generator for cooling. The cleaning apparatus is characterized in that the cleaning object is steam cleaned by introducing steam of the cleaning solvent.

Since the present invention adopts the configuration described above, the following effects can be obtained.
In other words , since the cleaning solvent is introduced into the cleaning tank by introducing the cleaning solvent into the ultrasonic generator and cooled, the object to be treated is steam cleaned, so the ultrasonic generator is cleaned with the cleaning solvent covered. Direct exposure to solvent vapor can be prevented. Therefore, it is possible to prevent the ultrasonic generator from becoming hot due to the vapor of the cleaning solvent, and it is possible to suppress inconveniences such as the adhesive of the ultrasonic vibrator being removed due to thermal damage. Further, since the ultrasonic vibrator can be protected from high heat without flowing down compressed air or nitrogen gas, waste of resources can be prevented.

The ultrasonic generator is disposed at the inclined bottom of the cleaning tank, the cleaning solvent supply system jet nozzle is disposed at the bottom of the inclined upper end of the ultrasonic generator, and the cleaning solvent is discharged at the inclined lower end of the bottom. Open the liquid drainage port, cool the ultrasonic generator while the cleaning solvent ejected from the ejection nozzle flows through the bottom, and wash the cleaning solvent that has flowed down to the bottom inclined bottom from the drainage port to the outside of the cleaning tank. Since it discharges | emits, the washing | cleaning solvent ejected from the ejection nozzle can be reliably flowed on an ultrasonic generator, and can be cooled efficiently.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a schematic diagram showing a system configuration of a cleaning device 1 according to the present invention, FIG. 2 is a schematic block diagram of a control device 50 for controlling the cleaning device 1, FIG. 3 is a perspective view showing the inside of a cleaning tank, and FIG. FIG. 2 is a schematic view of a cleaning solvent supply system to a cleaning tank.

  As shown in FIG. 1, cleaning and drying of workpieces 2 such as machine parts and electronic components to which dirt such as machine oils and fats adheres are performed by putting a plurality of workpieces 2 in a basket 4 in a cleaning tank 3. Accommodated in state. In this cleaning tank 3, for example, a cleaning solvent such as hydrocarbon is used to perform an immersion cleaning process in which the object to be processed 2 is immersed in the cleaning solvent and subjected to ultrasonic vibration for cleaning. A steam cleaning step for cleaning the workpiece 2 by introducing steam is performed, and the workpiece 2 after the steam cleaning is dried by performing a vacuum drying step.

  Cleaning solvents include hydrocarbon solvents (4th class 2nd petroleum and 4th class 3rd petroleums; paraffinic and naphthenic), chlorinated solvents (trichloroethylene, tetrachloroethylene), brominated solvents (normal propyl bromide) , Fluorinated solvents (HFC, HFE, HCFC) and the like, and hydrocarbons are preferred from the viewpoint of environmental protection.

The cleaning tank 3 is a pressure-resistant container having a hollow box shape whose upper part can be opened and closed, and an opening / closing lid 7 that seals and covers the opening via a sealing material 6 on a flange formed in the upper opening. Is provided. The open / close lid 7 is provided in an openable and closable manner at the upper opening of the cleaning tank 3 so that the ceiling surface (lower surface) 7a is inclined. The ceiling surface 7a of the opening / closing lid 7 is provided to be inclined so that when solvent gas is condensed on the ceiling surface 7a of the opening / closing lid 7, the solvent droplets flow down the inclination surface through the ceiling surface 7a. Therefore, the solvent droplets collected on the inclined side flow down from the side wall surface 3b of the cleaning tank 3 to the bottom surface 3a. Therefore, it is possible to prevent the condensed solvent droplets from adhering to the workpiece 2 and causing spots.
The open / close lid 7 is not limited to the type with the inclined ceiling surface, and may be a horizontal type.

  A drainage system 8, which will be described later, is connected to the lower end of the bottom 3 a of the cleaning tank 3 as a cleaning solvent drainage system according to the present invention. A liquid valve 9 is interposed.

  The above-described immersion cleaning process, steam cleaning process, and vacuum drying process are performed by reducing the pressure in the cleaning tank 3 containing the workpiece 2 to below the lower explosion limit of a flammable cleaning solvent such as hydrocarbon. An exhaust system 11 reaching the vacuum pump 10 is connected to the tank 3, and a cleaning tank vacuum valve 12 for opening and closing the exhaust system 11 is interposed in the exhaust system 11.

Further, the cleaning tank 3 is supplied with a cleaning solvent to immerse and clean the object 2 to be processed, and reaches the solvent tank 13 to supply a cleaning solvent for cooling an ultrasonic generator 3c described later. A cleaning solvent supply system 14 is connected, and a cleaning solvent supply valve (immersion cleaning valve) 15 is interposed in the middle of the cleaning solvent supply system 14. Then, the cleaning solvent supply system 14 is branched upstream of the cleaning solvent supply valve 15, and the tip of the branch-side flow path 14 a is connected to the ejection nozzle 5 provided at the inclined upper end of the bottom 3 a of the cleaning tank 3, A cooling valve 5a is interposed in the middle of the branch side flow path. The cleaning tank 3 is provided with a level switch 16 for detecting the level of the cleaning solvent that has flowed into the cleaning tank 3. The immersion cleaning process is a process in which the workpiece 2 is immersed in a cleaning solvent and cleaned by applying ultrasonic vibrations as described above, and therefore, the bottom 3a of the cleaning tank 3 of the present embodiment includes a plurality of cleaning processes. A panel-shaped ultrasonic generator 3c in which an ultrasonic vibrator is assembled to a stainless steel plate as a vibration plate is attached in a liquid-tight state so as to cover almost the entire bottom surface, and is inclined more than the ultrasonic generator 3c. An ejection nozzle 5 of the cleaning solvent supply system is disposed at the bottom on the upper end side over a length that can cover the left and right widths of the ultrasonic generator. Is open.
The solvent tank 13 is a sealed container with an upper part covered, and is depressurized by the vacuum pump 10 through a branch exhaust system described later.

  After completion of the immersion cleaning process, the cleaning solvent in the cleaning tank 3 is connected to the lowermost portion of the inclined bottom portion 3a of the cleaning tank 3 by opening the drain valve 9 and communicating the both as described above. Then, the liquid is drained to the solvent tank 13 through the drainage system 8.

  The inflow of the cleaning solvent from the solvent tank 13 to the cleaning tank 3 and the drainage from the cleaning tank 3 to the solvent tank 13 are performed by a pressure difference between the solvent tank 13 and the cleaning tank 3. Therefore, the exhaust system 11 reaching the vacuum pump 10 is connected to the cleaning tank 3 as described above. Further, the cleaning tank 3 is provided with a cleaning tank pressure sensor 51 for detecting the internal pressure of the cleaning tank 3 and a pressure gauge 17 in the cleaning tank for displaying the internal pressure, upstream of the cleaning tank vacuum valve 12 of the exhaust system 11. On the side (cleaning tank side), a cleaning tank air release valve 18 for branching and adjusting the internal pressure of the cleaning tank 3 by opening to the atmosphere is provided.

  Further, since it is necessary to adjust the internal pressure of the solvent tank 13 relative to the cleaning tank 3, the downstream side (vacuum pump side) of the cleaning tank vacuum valve 12 of the exhaust system 11 is branched to reach the solvent tank 13. A branch exhaust system 19 is connected, and a solvent tank pressure reducing valve 20 is interposed in the branch exhaust system 19. Further, the solvent tank 13 is provided with a solvent tank pressure sensor 52 for detecting the internal pressure and a solvent tank pressure gauge 21 for displaying the internal pressure, and adjusts the internal pressure by opening it to the atmosphere. A solvent tank atmosphere release valve 22 is provided. Further, a solvent tank temperature sensor 53 for detecting the temperature of the cleaning solvent in the solvent tank 13 and performing temperature management is provided, and the cleaning solvent has a temperature higher than a predetermined temperature by a signal from the solvent tank temperature sensor 53. When lowered, the control device 50 energizes the heater 13a to heat the cleaning solvent.

  After completion of the immersion cleaning process, the drainage valve 9 is opened to allow the two to communicate with each other, so that the used cleaning solvent in the cleaning tank 3 is drained to the solvent tank 13 through the drainage system 8. The used cleaning solvent is contaminated with various kinds of dirt adhering to the workpiece 2. These dirt components cannot be removed only by passing through a filter or the like provided in the cleaning tank 3 or the drainage system 8, and the cleaning solvent is regenerated and used from the viewpoint of resource saving and environmental protection. Accordingly, the solvent tank 13 is connected to a regeneration processing system 24 that reaches the reserve tank 23 that condenses the used solvent by distillation and stores it as a regeneration solvent. The regeneration processing system 24 includes a distiller 25 and a condenser. 26 are sequentially provided.

  The distiller 25 is, for example, a generally cylindrical bowl-shaped container having heat resistance and pressure resistance. In the present embodiment, a heating mechanism 25 a is provided in a state in which the lower part of the distiller 25 is accommodated. The heating mechanism 25a is, for example, an oil heating unit, and includes an electric heater as a heat source. The heat-resistant oil as a heating medium is heated by the heater, and the distiller 25 is heated through the heating oil. The cleaning solvent containing the dirt component flowing through the distiller 25 is heated and evaporated.

  In order to lower the boiling point, the inside of the still 25 is depressurized. Further, the inflow of the solvent containing the dirt component from the solvent tank 13 to the distiller 25 is performed by the pressure difference between the solvent tank 13 and the distiller 25, and the solvent containing the dirt component flows into the lower part of the distiller 25. The vaporized solvent vapor is taken out from the upper part of the distiller 25.

  A condenser 26 for condensing and liquefying the solvent vapor distilled by the distiller 25 is provided downstream of the distiller 25 of the regeneration processing system 24. The main body of the condenser 26 is, for example, a generally cylindrical bowl-shaped or horizontal container, and is a heat exchanger that houses a cooling thin tube 26a through which cooling water passes. The solvent vapor passing through the condenser 26 is condensed (liquefied) in contact with the cooling thin tube 26 a, and the liquefied regenerated solvent is stored in the reserve tank 23. In the regeneration processing system 24 between the condenser 26 and the reserve tank 23, the regeneration solvent is circulated by a circulation pump 27 a, passed through a moisture separator 27 b to separate moisture, and then supplied to the reserve tank 23. A water separation mechanism for sucking and regenerating the regenerated solvent from the recycle solvent into the circulation flow path by the ejector 27c is interposed, and the reserve tank 23 is provided with a level switch 28 for detecting the storage amount of the regenerated solvent. The ejector 27c increases the distillation efficiency by reducing the pressure in the distiller 25.

  Further, in the reserve tank 23, the solvent vapor is introduced into the cleaning tank 3, and the steam cleaning process reaching the cleaning tank 3 is performed in order to perform the steam cleaning process of the workpiece 2 accommodated in the cleaning tank 3. System 29 is connected as the cleaning solvent vapor introduction system of the present invention. The steam cleaning system 29 is provided with a heat exchanger 30 for vaporizing the regenerated solvent introduced from the reserve tank 23 as solvent vapor, and the regenerative solvent is introduced from the reserve tank 23 to the heat exchanger 30. The introduction of the solvent vapor from the heat exchanger 30 to the cleaning tank 3 is performed by the pressure difference between the reserve tank 23 and the cleaning tank 3, and the steam cleaning system 29 upstream of the heat exchanger 30 is opened and closed. A steam cleaning auxiliary valve 31 is provided for this purpose, and a steam cleaning valve 32 for opening and closing the steam cleaning system 29 is provided downstream of the heat exchanger 30.

  The main body of the heat exchanger 30 is, for example, a substantially cylindrical bowl-shaped or horizontal container, and stores therein a heating thin tube 30a through which a heating medium passes, and the regenerating solvent that passes through the heat exchanger 30 is The vaporized vapor comes into contact with the heating thin tube 30a and is introduced into the cleaning tank 3 from the vapor supply port at the downstream end of the vapor cleaning system 29 as solvent vapor. Examples of the heating medium passed through the heating thin tube 30a of the heat exchanger 30 include oil heated by heating means such as an electric heater. A spray nozzle 33 is provided at the inlet of the heat exchanger 30 for spraying the regenerated solvent into the heat exchanger 30 in the form of a mist. The regenerated solvent is sprayed into the heat exchanger 30. By doing so, the solvent vapor generated can be reliably gasified.

  Each of the above-described devices, that is, a vacuum pump, various valves, and various sensors are electrically connected to the control device 50, and operate according to preset procedures and conditions under the control of the control device 50.

  As shown in FIG. 2, the control device 50 in the present embodiment is configured by a computer including a CPU, a ROM, a RAM, and the like, and includes a timer 54. On the input side of the control device 50, a power switch 56, a start switch 57, a reduced pressure cleaning time setting switch 58, a return pressure cleaning time setting switch 59, a low pressure vacuum drying time setting switch 60 provided on the operation panel 55, In addition to the pressure vacuum drying time setting switch 61, a cleaning tank pressure sensor 51, a cleaning tank level switch 16, a solvent tank temperature sensor 53, a solvent tank pressure sensor 52, a reserve tank level switch 28, and the like are connected. In addition to the display 62 provided on the operation panel 55, the vacuum pump 10, the cleaning tank vacuum valve 12, the drain valve 9, the cleaning solvent supply valve 15, the solvent tank heater 13a, the cleaning tank air release valve 18, and the branch exhaust valve 19 , Solvent tank pressure reducing valve 20, solvent tank air release valve 22, steam cleaning auxiliary valve 31, steam cleaning valve 32, cooling valve 5a, heat-resistant oil Thermal heater is connected.

  The return pressure cleaning time setting switch 59 and the return pressure vacuum drying time setting switch 61 are used to set the return pressure time to a timer according to characteristics such as the weight, surface area, presence / absence and number of fine holes and fine gaps of the workpiece 2. 54 functions as an input means. Further, the reduced pressure cleaning time setting switch 58 and the low pressure vacuum drying time setting switch 60 function as input means for setting a desired time in the timer 54 according to the object to be processed.

  In the immersion cleaning process, the control device 50 in the present embodiment performs the vacuum cleaning by reducing the pressure in the cleaning tank to 200 Pa or less, and after performing the vacuum cleaning, the lower limit of explosion of the cleaning solvent exceeds 200 Pa. In the vacuum drying process, the pressure in the cleaning tank 3 is reduced to the limit value of the vacuum pump 10 and low-pressure vacuum drying is performed. After the low-pressure vacuum drying, the limit value of the vacuum pump 10 is opened, the pressure is returned to a pressure below the lower explosion limit of the cleaning solvent, and the control for performing the pressure-reduced vacuum drying in this recovered pressure state is executed.

  In addition, the control device 50 performs control for repeating the vacuum cleaning for a predetermined time, repeating the vacuum cleaning for a predetermined time, and then repeating the operation for performing the pressure recovery cleaning for a predetermined time a plurality of times during the cleaning process. The number of repetitions may be a fixed number set in advance, but may be set by operating an operation unit (external input means) (not shown) of the operation panel 55.

  Further, the control device 50 performs control for performing low-pressure vacuum drying for a predetermined time, repeating the low-pressure vacuum drying for a predetermined time, and then repeating the operation of performing vacuum decompression for a predetermined time a plurality of times during the drying process. The number of repetitions may be a fixed number set in advance, but may be set by operating the operation unit (external input means) of the operation panel 55.

Next, the operation of the cleaning apparatus 1 in this embodiment will be specifically described.
As a preparation stage, after opening the cleaning tank air release valve 18, the opening / closing lid 7 of the cleaning tank 3 is opened, and a basket 4 containing a plurality of objects 2 to be processed such as machine parts is placed on the placement unit. Then, the open / close lid 7 is closed in a sealed state via the seal member 6. When the start switch 57 is operated, the control device 50 closes the cleaning tank atmosphere release valve 18.

  When such preparation is completed, first, a cleaning solvent is supplied to the cleaning tank 3. In the liquid supply operation, the control device 50 opens the solvent tank atmospheric release valve 22 and returns the internal pressure of the solvent tank 13 to the atmospheric direction until the solvent tank pressure sensor 52 detects 500 Pa below the lower explosion limit. When it is detected that the internal pressure of the solvent tank 13 has reached 500 Pa, the control device 50 closes the solvent tank air release valve 22, the cleaning solvent supply valve 15 of the cleaning solvent supply system 14, and the exhaust system. 11 cleaning tank vacuum valve 12 is opened, and vacuum pump 10 is driven. Then, the cleaning solvent supply valve 15 communicates between the cleaning tank 3 and the solvent tank 13, and the cleaning solvent is supplied from the solvent tank 13 to the cleaning tank 3 due to the pressure difference between the cleaning tank 3 and the solvent tank 13. Is done. At this time, under the control of the control device 50, the solvent tank pressure reducing valve 20, the steam cleaning valve 32, the cooling valve 5a, the steam cleaning auxiliary valve 31, and the drainage valve 9 are closed. When the upper limit level switch of the level switch 16 of the cleaning tank 3 detects the upper limit level and sends a signal to the control device 50, the control device 50 closes the cleaning solvent supply valve 15 and the cleaning tank vacuum valve 12. At the same time, the vacuum pump 10 is stopped.

  Then, a vacuum immersion cleaning process is performed. In this immersion cleaning step, immersion cleaning (ultrasonic cleaning) is performed by applying ultrasonic vibration by the ultrasonic generator 3c while the workpiece 2 is immersed in the heating solvent. Specifically, as shown in FIG. 3, the inside of the washing tank 3 is decompressed by the vacuum pump 10 through the exhaust system 11 until the washing tank pressure sensor 51 detects 200 Pa or less, and the reduced pressure washing is performed. After that, the control device 50 opens the cleaning tank air release valve 18, and the pressure detected by the cleaning tank pressure sensor 51 exceeds 200 Pa, and the atmospheric pressure direction is indicated until a pressure of 500 Pa below the explosive lower limit of the cleaning solvent is indicated. After the predetermined time of the return pressure cleaning has elapsed, the cleaning tank atmosphere release valve 18 is closed, and the vacuum pump 10 again causes the cleaning tank to pass through the exhaust system 11. The reduced pressure cleaning and the return pressure cleaning are repeatedly performed, in which the inside of 3 is depressurized to 200 Pa or less and the reduced pressure cleaning is performed.

The reason why the cleaning tank 3 is depressurized to 200 Pa or less to perform the depressurized cleaning is to effectively perform the depressurized cleaning while ensuring a pressure difference with the lower explosion limit value of the cleaning solvent.
On the other hand, the reason why the pressure is returned to a pressure exceeding 200 Pa and below the lower limit of explosion is to ensure a pressure difference from the pressure of the vacuum cleaning and to prevent the cleaning solvent from igniting.

  The reason for performing the pressure-recovery in this way is that if the object to be processed 2 has a minute space, for example, a minute hole (especially a hole deeper than the diameter), it is fine even if immersed in the cleaning solvent. Air remains in the hole and is difficult to escape. That is, the cleaning solvent does not easily enter the hole, and the cleaning solvent does not penetrate into the hole even if ultrasonic cleaning is performed. Further, once the pressure is reduced, the air in the hole expands, and the cleaning solvent does not penetrate into the hole even if the expanded air is removed. Therefore, the air in the hole is depressurized and expanded to dilute, and the expanded portion is discharged, and the remaining air is contracted by the subsequent return pressure operation to infiltrate the cleaning solvent for this contraction. Repeating the return pressure makes it easier for air to escape from the hole, so that the cleaning solvent penetrates into the hole, and ultrasonic waves are propagated to the inner peripheral surface of the hole through the permeated cleaning solvent to perform ultrasonic cleaning. Is performed efficiently.

  After completion of the immersion cleaning, the solvent containing the dirt component in the cleaning tank 3 is drained. In the drain operation, the cleaning tank atmosphere release valve 18 is opened by a signal from the control device 50, and the internal pressure of the cleaning tank 3 is returned to the atmosphere until the cleaning tank pressure sensor 51 detects 500 Pa below the lower explosion limit. . When 500 Pa is detected, the cleaning tank air release valve 18 is closed, the drainage valve 9 of the drainage system 8 and the solvent tank pressure reducing valve 20 of the branch exhaust system 19 are opened, and the vacuum pump 10 is turned on. To drive. Then, the drainage valve 9 is opened so that the cleaning tank 3 and the solvent tank 13 communicate with each other. Due to the pressure difference between the cleaning tank 3 and the solvent tank 13, the solvent containing the dirt component from the cleaning tank 3 is removed from the solvent tank 13. The liquid is drained. The drain valve 9 and the solvent tank pressure reducing valve 20 are closed by detecting the lower limit level of the level switch 16 of the cleaning tank 3.

  After the drainage operation is completed, the process proceeds to the finishing steam cleaning process. In the steam cleaning process, the vacuum pump 10 is already in operation, and after the controller 50 opens the cleaning tank vacuum valve 12 of the exhaust system 11, the steam cleaning valve 32 and the steam cleaning auxiliary valve 31 of the steam cleaning system 29 are opened. To do. Further, the cooling valve 5a is opened, and the cleaning solvent supplied from the solvent tank 13 is ejected from the ejection nozzle 5 through the branch flow path 14a from the cleaning solvent supply system 14 as a liquid, and this solvent is emitted from the ultrasonic generator 3c. This is flowed upward and covered with a solvent film, thereby cooling the ultrasonic generator 3c and preventing the ultrasonic generator 3c from being directly exposed to solvent vapor, which will be described later, to raise the temperature.

  The opening timing of the steam cleaning valve 32 and the steam cleaning auxiliary valve 31 is when the solvent flows on the ultrasonic generator 3c and the cleaning tank pressure sensor 51 of the cleaning tank 3 detects a reduced pressure state of 100 Pa or less. Then, due to the pressure difference between the cleaning tank 3 and the reserve tank 23, the solvent is introduced from the reserve tank 23 to the solvent introduction port of the heat exchanger 30, and is regenerated from the nozzle port of the spray nozzle 33 provided at the solvent introduction port to the solvent capillary. When the solvent is ejected in the form of a mist, the mist-like solvent is gasified by heat exchange with the heating capillary 30a through which the heating medium passes while passing through the solvent capillary, and vaporized as a complete solvent gas with no solvent droplets mixed therein. It is introduced into the cleaning tank 3 from the introduction port 29a. Therefore, without increasing the size of the heat exchanger 30, solvent droplets are prevented from being mixed into the solvent vapor introduced into the cleaning tank 3, and stains are prevented from adhering to the workpiece 2 after vacuum drying described later. It is something that can be done.

  After performing the steam cleaning for a predetermined time, the control device 50 closes the steam cleaning valve 32, the steam cleaning auxiliary valve 31, and the cooling valve 5a to complete the steam cleaning process, and proceeds to the vacuum drying process. At the time of transition, the vacuum pump 10 is continuously driven, the cleaning tank vacuum valve 12 of the exhaust system 11 is kept open, and the pressure is reduced to the limit value of the vacuum pump 10. The vacuum pump 10 has a capability of reducing the pressure to about 7 Pa or less, which is an ideal pressure for vacuum drying. When the limit value is reached, this state is maintained for a predetermined time to perform low-pressure vacuum drying, and after the predetermined time has elapsed, the control device 50 opens the cleaning tank atmosphere release valve 18, that is, the limit of the vacuum pump 10. The value is released and returned to the atmosphere until the cleaning tank pressure sensor 51 detects 500 Pa below the lower explosion limit. That is, the pressure is restored. When 500 Pa is detected, the pressure-reducing state is maintained for a predetermined time to perform pressure-reducing vacuum drying, and then the cleaning tank atmosphere release valve 18 is closed again to reduce the pressure to the vacuum pump limit value.

  In this way, the pressure is restored during the drying process. When the vacuum drying is performed, when the solvent adhering to the object to be treated 2 is vaporized, the heat of vaporization is removed, and the surface temperature of the object to be treated 2 is lowered. Since the drying efficiency decreases due to the decrease, the internal pressure of the cleaning tank 3 is returned to the atmospheric pressure to 500 Pa below the lower explosion limit every predetermined time, and the evaporation is suppressed by the return pressure, that is, the heat of vaporization is taken away and cooled. Temporarily suppressing this, the core heat (internal heat) held by the workpiece 2 is recalled to the surface to increase the surface temperature, and after this surface temperature rises, the pressure is reduced again in the vacuum direction. Thus, the evaporation from the surface of the workpiece 2 is promoted, thereby improving the drying efficiency as a whole.

  When the vacuum drying process is completed, the control device 50 opens the cleaning tank atmosphere release valve 18 to release the internal pressure of the cleaning tank 3 to the atmosphere, and notifies the end of all processes. And if the opening-and-closing lid 7 of the washing tank 3 is opened, it is possible to take out a plurality of objects to be treated 2 that have been washed and dried together with the basket 4.

  In addition, liquid supply from the solvent tank 13 to the cleaning tank 3 by the cleaning solvent supply system 14, drainage from the cleaning tank 3 to the solvent tank 13 by the drainage system 8, and from the reserve tank 23 to the cleaning tank 3 by the vapor cleaning system 29. As for the introduction of the solvent vapor, the pressure difference is given to the washing tank 3 and the solvent tank 13 or the pressure difference is given to the washing tank 3 and the reserve tank 23 to transfer the washing solvent and the solvent vapor. Yes. Accordingly, it is possible to reduce the apparatus cost of the cleaning apparatus 1 as a whole by eliminating redundant use of the driving equipment.

  In the embodiment, the cleaning solvent is stored in the single solvent tank 13, but as shown in FIG. 4, the shower tank 13a storing the cleanest cleaning solvent and the next clean cleaning solvent are stored. A solvent tank 13 is provided that divides the finish washing tank 13b and the washing tank 13c that stores the dirty washing solvent. In the steam washing process, the washing solvent stored in the shower tank 13a is ejected from the ejection nozzle 5 to be super You may comprise so that the sound wave generator 3c may be cooled. The cleaning solvent recovered from the cleaning tank 3 may be stored in the cleaning tank 13c, and the cleaning solvent in the cleaning tank 13c may be regenerated. In this way, since the temperature of the recovered cleaning solvent is raised by cooling the ultrasonic generator 3c, heating energy can be saved during regeneration, energy saving can be achieved, and thermal efficiency can be improved.

It is the schematic which shows the system | strain structure of the washing | cleaning apparatus based on this invention. It is a schematic block diagram of a control apparatus. It is a perspective view which shows the inside of a washing tank. It is the schematic which shows the connection of the solvent tank provided with three tanks, and a washing tank.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 To-be-processed object 3 Cleaning tank 3a Bottom part 3c Ultrasonic generator 4 Basket 5 Ejection nozzle 5a Cooling valve 7 Opening and closing cover 8 Drainage system 9 Drainage valve 10 Vacuum pump 11 Exhaust system 12 Cleaning tank vacuum valve 13 Solvent tank 13a heater 14 immersion cleaning system 14a branched flow path 15 cleaning solvent supply valve 18 cleaning tank air release valve 19 branch exhaust system 20 solvent tank pressure reducing valve 21 solvent tank pressure gauge 22 solvent tank air release valve 23 reserve tank 24 regeneration processing system 25 Distiller 26 Condenser 30 Heat exchanger 30a Heating capillary 31 Steam cleaning auxiliary valve 32 Steam cleaning valve 50 Control device

Claims (1)

A cleaning tank for storing an object to be processed, an ultrasonic generator mounted in a state facing the inner surface of the cleaning tank, a cleaning solvent supply system for supplying a cleaning solvent into the cleaning tank, and a cleaning tank A cleaning solvent draining system for draining the cleaning solvent and a cleaning solvent vapor introducing system for introducing the cleaning solvent vapor into the cleaning tank, and the cleaning solvent supplied into the cleaning tank under the control of the control device An immersion cleaning process in which an object to be treated is immersed and cleaned by applying ultrasonic vibration; a draining process in which the cleaning solvent in the cleaning tank is drained after the immersion cleaning process; and a cleaning solvent vapor after the draining process. A cleaning apparatus for performing a steam cleaning process for steam cleaning the object to be processed by introducing the liquid into the cleaning tank,
  The ultrasonic generator is disposed at the inclined bottom of the cleaning tank, the cleaning solvent supply system ejection nozzle is disposed at the bottom of the inclined upper end side of the ultrasonic generator, and the cleaning solvent drainage is provided at the inclined lower end of the bottom. The drainage port of the system is opened, the ultrasonic generator is cooled while the cleaning solvent ejected from the ejection nozzle flows through the bottom, and the cleaning solvent that has flowed down to the bottom inclined bottom is discharged from the drainage port to the outside of the cleaning tank. Like
  In the vapor cleaning process, the control device operates the cleaning solvent vapor introduction system while operating the cleaning solvent supply system and supplying the cleaning solvent supplied into the cleaning tank to the ultrasonic generator for cooling. A cleaning apparatus characterized by introducing a cleaning solvent vapor to the object to be cleaned with steam.

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