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JP4919139B2 - Method for producing release film for producing ceramic capacitor - Google Patents

Method for producing release film for producing ceramic capacitor Download PDF

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Publication number
JP4919139B2
JP4919139B2 JP2001296257A JP2001296257A JP4919139B2 JP 4919139 B2 JP4919139 B2 JP 4919139B2 JP 2001296257 A JP2001296257 A JP 2001296257A JP 2001296257 A JP2001296257 A JP 2001296257A JP 4919139 B2 JP4919139 B2 JP 4919139B2
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Japan
Prior art keywords
film
producing
release
release film
ceramic capacitor
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JP2003093964A (en
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裕之 宮原
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TDK Corp
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TDK Corp
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Description

【0001】
【発明の属する技術分野】
本発明は剥離フィルムの製造方法に関し、詳しくは、セラミックコンデンサの製造に用いられる剥離フィルムの製造過程において混入するダストや異物を適切に排除することにより、不良の発生率が飛躍的に低減された剥離フィルムの製造方法に関する。
【0002】
【従来の技術】
セラミックコンデンサ等のセラミック電子部品は、例えば、可撓性支持体(剥離フィルム)上に、ドクターブレード法等によりセラミック粉、有機バインダー、可塑剤、溶剤等を含むセラミック塗料を塗布してグリーンシート(未焼成セラミック誘電体シート)を成形し、その上に、パラジウム、銀、ニッケル等の電極をスクリーン印刷により形成する工程により製造することができる。特に、積層構造を有するセラミックコンデンサを得る場合には、得られたグリーンシートを所望の積層構造になるように一枚ずつ積層し、プレス切断工程を経てセラミックグリーンチップを得る。このようにして得られたセラミックグリーンチップ中のバインダーをバーンアウトし、1000℃〜1400℃で焼成し、得られた焼成体に銀、銀−パラジウム、ニッケル、銅等の端子電極を形成して、セラミック電子部品を得る。
【0003】
また、セラミック電子部品を製造する別の技術として、グリーンシートを可撓性支持体が上になるように熱転写する方法や(特開昭63−188926号公報等)、可撓性支持体上で、グリーンシートを成形する工程と、グリーンシート上に電極を印刷する工程とを、必要な積層数だけ繰り返すことにより積層体を得る方法が提案されている。
【0004】
【発明が解決しようとする課題】
上記のように何工程もの積層工程を要するセラミック電子部品、特に、積層セラミックチップコンデンサの製造においては、ダストや異物等のコンタミの混入が大きな問題点の一つであり、かかるコンタミの混入防止が製造上の重要な注意点の一つとなる。積層チップコンデンサは、上述のように誘電体層と電極層とが交互に多層積層された積層構造を有し、また、縦・横共に数mm程度と非常に小さなサイズであることから、微小なダスト等が各層の間に混入した場合でも、不良品の発生率が非常に高くなってしまうためである。
【0005】
具体的には、剥離フィルム上にセラミック塗料を塗布して誘電体層を形成する工程や、その上に電極層を形成する工程において、剥離層上にダストや異物の付着が発生した場合に、それらが除去されないまま積層工程が繰り返されて得られたセラミックコンデンサでは、ショート不良の発生率が高くなってしまう。
【0006】
そこで本発明の目的は、上記問題を解消して、セラミックコンデンサの積層層間におけるダストや異物の混入を適切に防止することにより、不良の発生率を飛躍的に低減することができる剥離フィルムの製造方法を提供することにある。
【0007】
【課題を解決するための手段】
上記課題を解決するために、本発明のセラミックコンデンサを製造するための剥離フィルムの製造方法は、連続的に搬送されるポリエステルフィルムの少なくとも片面に剥離剤液を塗布した後、乾燥させ、ロール状に巻き取る工程を含む剥離フィルムの製造方法において、前記乾燥後、前記ロール状の巻き取り前に、前記ポリエステルフィルム剥離剤液塗布面を、不織布を用いてクリーニングすることを特徴とするものである。
【0008】
また、本発明の他のセラミックコンデンサを製造するための剥離フィルムの製造方法は、連続的に搬送されるポリエステルフィルムの少なくとも片面に剥離剤液を塗布した後、乾燥させ、ロール状に巻き取った後、所定幅に裁断する工程を含む剥離フィルムの製造方法において、前記所定幅の裁断後に、前記ポリエステルフィルムの剥離剤液塗布面をクリーニングすることを特徴とするものである。
【0009】
本発明のセラミックコンデンサを製造するための剥離フィルムの製造方法においては、前記ポリエステルフィルムの両面をクリーニングすることが好適である。
【0010】
本発明に従い、剥離層形成後に、少なくとも剥離剤液塗布面にクリーニングを施した剥離フィルムを使用して製造したセラミックコンデンサは、クリーニングなしの剥離フィルムを使用した場合と比較してコンデンサのショート不良の発生率を格段に低減することができる。
【0011】
【発明の実施の形態】
以下、本発明の具体的な実施の形態について詳細に説明する。
本発明においては、ポリエステルフィルム等の樹脂フィルム上にシリコーン樹脂等の剥離剤液を塗布、乾燥して剥離層を形成した後、ポリエステルフィルムの剥離剤液塗布面をクリーニングする。これにより、ショート不良の発生原因となり得る、製造時におけるセラミックコンデンサ内部へのダストや異物等の混入を確実に防止することができ、不良発生率を格段に低減することができる。
【0012】
クリーニングは、ポリエステルフィルムを連続的に搬送して、少なくとも片面に剥離層を形成し、ロール状に巻き取る剥離フィルムの製造工程において、剥離剤液を塗布し、乾燥、好適には乾燥・硬化させて剥離層を形成した後、ロール状に巻き取る前に行う。巻き取ったロールは、その後、別に設けられた工程に移されて、再度繰り出され、剥離層表面上に誘電体層および電極層を塗布および印刷により形成するセラミックコンデンサの製造工程に供される。従って、クリーニングは、剥離層形成後、巻き取る直前に行うことが最も好ましい。
【0013】
また、剥離フィルムを塗布する装置の幅が誘電体層を塗布する装置の幅よりも広い場合には、剥離フィルムを形成して巻き取った後に誘電体層の塗布幅に合うよう剥離フィルムを所定幅に裁断するスリット工程が行われるが、この場合には、スリット工程により所定幅に裁断した後にクリーニングを行う。ダストや異物の混入を確実に排除するためには、可能な限り誘電体層等の塗布工程の直前にクリーニングを行うことが好ましいからである。
【0014】
剥離層形成後のポリエステルフィルム(剥離フィルム)のクリーニングは、剥離剤液塗布側の面に対し行うことが必要であるが、好ましくは両面につき行う。即ち、両面に剥離層を形成する場合は当然に両面につきクリーニングを行う必要があるが、片面にしか剥離層を形成しない場合であっても両面をクリーニングすることが好ましい。片面の場合には剥離層を形成した面のみをクリーニングすればダスト等の混入は最低限防止できるが、剥離層を形成しない側にダストや異物等が付着していた場合には、巻き取り等の工程を経る間に再度剥離層上が汚染されるおそれがあるため、両面につき行うことが好適となる。
【0015】
セラミックコンデンサは、剥離フィルムの剥離層上に、セラミック塗料を塗布して誘電体層を形成し、この誘電体層上に電極層を印刷し、この二層の形成工程を少なくとも1回以上繰り返して、剥離フィルムの剥離層上に誘電体層および電極層を積層することにより製造するが、本発明においては、好ましくは前記のように、剥離層形成後、巻き取る直前に剥離層表面をクリーニングするため、効果的なクリーニングとなる。
【0016】
クリーニング方法としては、接触式、非接触式のいずれであってもよく、例えば、図1に示す接触式クリーニング法または図2に示す非接触式クリーニング法を用いることができる。図1および図2のいずれも上面側に剥離層が設けられたフィルムを搬送する様子を示している。図1に示すような接触式の場合、クリーニング材としては不織布が一般的であり、フィルムにキズが入らないよう注意して使用する。具体的には図示するように、不織布2をロール状に巻いた繰り出しロール3と、繰り出された不織布2を巻き取るための巻き取りロール4と、不織布2をフィルム1の表面に押し当てるためのガイドロール5とを有する装置を使用することが好ましい。この装置はフィルムの少なくとも剥離層形成側の面にのみ設置することが必要となるが、図1に示すように両面に設置することが好ましい。また、ガイドロール5はフィルム1に対する押し当て強さを調節可能なように位置を変えることができる構造であることが好ましく、位置を変えることにより、剥離層やポリエステルフィルム表面にキズが入らない範囲で、ダスト等を効率よく捕集することが容易となる。
【0017】
また、図2に示す非接触式の場合、図示するようにガイドロール6を介してフィルム1を搬送しつつ、例えば、ウェブクリーナー等のクリーニング装置7を用いてクリーニングを行う。図示するウェブクリーナーは高速エアー吹き付け機構とバキューム吸引機構とを備え、高速で空気を吹き付けてフィルム表面に付着した微粒子サイズのダストや異物を取り除き、これを吸引除去するタイプのクリーニング方法である。
【0018】
尚、図示するいずれのクリーニング方法も、積層チップコンデンサのように極めて小さいサイズで、しかも何層にも積層される製品の歩留まりの向上には極めて有効である。
【0019】
【実施例】
実施例1
〈剥離剤液の調製〉
以下に示す配合内容で、ビニル基を有するポリジメチルシロキサンとハイドロジェンシラン系化合物との混合物に白金系触媒を加えて付加反応させるタイプの硬化型シリコーン(信越化学工業(株)製・KS−847(H))をメチルエチルケトン(MEK)およびトルエンの混合溶剤中に溶解させ、全体の固形分濃度が3.0重量%の剥離剤液(シリコーン樹脂溶液)を調製した。
信越化学工業(株)製 商品名:KS−847H 300g
(固形分濃度30%、樹脂90g)
白金触媒CAT−PL−50T(信越化学工業(株)製) 3.0g
MEK/トルエン=50/50(重量比)溶液 2700g
【0020】
〈誘電体層塗料の調製〉
粒径0.1μm〜1.0μm程度のチタン酸バリウム、酸化クロム、酸化イットリウム、炭酸マンガン、炭酸バリウム、炭酸カルシウム、酸化硅素等の粉末を焼成した後、BaTiO3100モル%として、Cr23に換算して0.3モル%、MnOに換算して0.4モル%、BaOに換算して2.4モル%、CaOに換算して1.6モル%、SiO2に換算して4モル%、Y23に換算して0.1モル%の組成になるように混合し、ボールミルにより24時間混合して、乾燥後、誘電体原料を得た。この誘電体原料100重量部と、アクリル樹脂5重量部と、塩化メチレン40重量部と、アセトン25重量部と、ミネラルスピリット6重量部とを配合し、市販のφ10mmジルコニアビーズを用いてポット架台により24時間混合して、誘電体セラミック塗料(誘電体層塗料)を得た。
【0021】
〈剥離フィルムの作製〉
上記剥離剤液を、バーコーターにて、乾燥後の塗膜厚が0.15μmとなるように幅100mm、厚さ38μmの2軸延伸ポリエチレンテレフタレート(PET)フィルムに塗布し、加熱温度110℃で40秒間乾燥および硬化反応を行わせた。その後、図1に示す接触式クリーニング法にて不織布(富士紡績(株)製、POLYPAS)を使用してフィルムの両面のクリーニングを行ってから巻き取って、ロール状に巻回した剥離フィルムを得た。
【0022】
〈誘電体層の形成〉
次に、ドクターコート法を用いて、誘電体層塗料を、剥離フィルムの剥離剤液塗布面に乾燥後の誘電体層厚が8μmとなるように塗布し、70℃で20秒間乾燥した後ロール状に巻き取って、誘電体層(グリーンシート)を形成した。
【0023】
〈電極層の印刷〉
続いて、上記誘電体層上に、電極パターンを印刷した。電極には、ニッケル、銅を主成分とする材料を用いた。電極パターンは個々の電極が横方向及び縦方向に間隔を隔てて配列されているものとした。
【0024】
〈剥離・積層工程〉
以上の誘電体層形成工程および電極層印刷工程を実行した後、誘電体層および電極層を剥離フィルムから剥離した。このようにして得られた電極付きのグリーンシートを75枚作製して、これらを積層数75層にて積層した。
【0025】
〈積層セラミックチップ試料の作製〉
上述のようにして得られた積層グリーンシートを打ち抜き後プレスし、切断することにより、積層セラミックチップを得た。得られた積層セラミックチップを、280℃で12時間脱バインダし、還元雰囲気中で1300℃にて2時間焼成した。焼成後得られた積層体に端子電極を形成した。端子電極の材質は銅を主成分とした。これを窒素と水素の混合ガス雰囲気中で800℃にて30分間焼付けし、メッキを行って、積層セラミックチップ試料を得た。
【0026】
参考例1
接触式クリーニング法としての不織布の代わりに、図2に示す空気吹き付けタイプの非接触式クリーニング法(ウェブクリーナー)を用いた以外は実施例1と同様にして、積層セラミックチップ試料を作製した。
【0027】
実施例2
剥離層の形成工程において、1000mm幅のPETフィルムを用い、剥離層形成後一旦巻き取ったフィルムのロールをスリッターにて100mm幅に裁断した後、再度ロール状に巻き取る前に同様のクリーニングを行った以外は実施例1と同様にして、積層セラミックチップ試料を作製した。
【0028】
参考例2
剥離層の形成工程において、1000mm幅のPETフィルムを用い、剥離層形成後一旦巻き取ったフィルムのロールをスリッターにて100mm幅に裁断した後、再度ロール状に巻き取る前に同様のクリーニングを行った以外は参考例1と同様にして、積層セラミックチップ試料を作製した。
【0029】
比較例
クリーニングを全く行わなかった以外は実施例1と同様にして、積層セラミックチップ試料を作製した。
【0030】
ショート不良率
ヒューレットパッカード社製 高抵抗計HP−4329Aを用いて、20℃にて10V印加し、30秒後に抵抗値を測定した。絶縁抵抗が1000Ω以下のものをショート不良とし、各試料について、試験に供されたサンプル数に対するショート不良発生数の割合をショート不良率として表示した。この結果を下記の表1に示す。
【0031】
【表1】

Figure 0004919139
【0032】
【発明の効果】
以上説明してきたように、本発明の剥離フィルムの製造方法によれば、セラミックコンデンサの積層層間におけるダストや異物等の混入を適切に防止することにより、不良の発生率を飛躍的に低減することができる。
【図面の簡単な説明】
【図1】本発明に係る接触式クリーニング法の一実施例を示す概略図である。
【図2】本発明に係る非接触式クリーニング法の一実施例を示す概略図である。
【符号の説明】
1 フィルム
2 クリーニング材(不織布)
3 繰り出しロール
4 巻き取りロール
5,6 ガイドロール
7 クリーニング装置[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for producing a release film, and more specifically, the occurrence rate of defects has been drastically reduced by appropriately removing dust and foreign matters mixed in the production process of a release film used for producing a ceramic capacitor. The present invention relates to a method for producing a release film.
[0002]
[Prior art]
A ceramic electronic component such as a ceramic capacitor is obtained by applying a ceramic coating containing ceramic powder, an organic binder, a plasticizer, a solvent, etc. on a flexible support (release film) by a doctor blade method or the like. A green ceramic dielectric sheet) is formed, and an electrode made of palladium, silver, nickel or the like is formed thereon by screen printing. In particular, when obtaining a ceramic capacitor having a laminated structure, the obtained green sheets are laminated one by one so as to have a desired laminated structure, and a ceramic green chip is obtained through a press cutting process. The binder in the ceramic green chip thus obtained was burned out and fired at 1000 ° C. to 1400 ° C., and terminal electrodes such as silver, silver-palladium, nickel, copper were formed on the obtained fired body. Get ceramic electronic parts.
[0003]
As another technique for manufacturing ceramic electronic components, a method of thermally transferring a green sheet so that the flexible support is on top (Japanese Patent Laid-Open No. 63-188926) or the like, There has been proposed a method for obtaining a laminate by repeating a step of forming a green sheet and a step of printing an electrode on the green sheet by a necessary number of laminations.
[0004]
[Problems to be solved by the invention]
As described above, contamination of contaminants such as dust and foreign matters is one of the major problems in the production of ceramic electronic components that require many steps of lamination, especially multilayer ceramic chip capacitors. This is one of the important precautions in manufacturing. A multilayer chip capacitor has a multilayer structure in which dielectric layers and electrode layers are alternately laminated as described above, and has a very small size of about several millimeters both vertically and horizontally. This is because even when dust or the like is mixed between the layers, the incidence of defective products becomes very high.
[0005]
Specifically, in the process of applying a ceramic paint on the release film to form a dielectric layer, and in the process of forming an electrode layer thereon, when dust or foreign matter adheres to the release layer, In a ceramic capacitor obtained by repeating the lamination process without removing them, the occurrence rate of short-circuit defects is increased.
[0006]
Accordingly, an object of the present invention is to produce a release film that can dramatically reduce the incidence of defects by eliminating the above-mentioned problems and appropriately preventing dust and foreign matter from being mixed between the multilayer layers of the ceramic capacitor. It is to provide a method.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, a method for producing a release film for producing a ceramic capacitor according to the present invention comprises applying a release agent solution to at least one surface of a continuously conveyed polyester film, followed by drying and rolling. In the method for producing a release film including a step of winding the film, the polyester film release agent-coated surface is cleaned using a nonwoven fabric after the drying and before the roll-shaped winding. .
[0008]
Moreover, the manufacturing method of the peeling film for manufacturing the other ceramic capacitor | condenser of this invention applied the peeling agent liquid to at least one side of the polyester film conveyed continuously, it was made to dry, and it wound up in roll shape Then, in the manufacturing method of a peeling film including the process of cut | judging to predetermined width, after the said predetermined width | variety cutting, the release agent liquid application surface of the said polyester film is cleaned.
[0009]
In the method for producing a release film for producing the ceramic capacitor of the present invention, it is preferable to clean both surfaces of the polyester film.
[0010]
In accordance with the present invention, after the release layer is formed, the ceramic capacitor manufactured using a release film that has been cleaned at least on the surface to which the release agent solution is applied has a short circuit failure compared to the case of using the release film without cleaning. The occurrence rate can be significantly reduced.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, specific embodiments of the present invention will be described in detail.
In the present invention, a release agent solution such as a silicone resin is applied on a resin film such as a polyester film and dried to form a release layer, and then the release agent solution application surface of the polyester film is cleaned. As a result, it is possible to reliably prevent dust and foreign matter from entering the ceramic capacitor during manufacturing, which can cause a short-circuit defect, and to significantly reduce the defect occurrence rate.
[0012]
In the cleaning process, a polyester film is continuously conveyed, a release layer is formed on at least one side, and the release film is applied in a manufacturing process of a release film that is wound up in a roll, and is dried, preferably dried and cured. After forming the release layer, it is performed before winding into a roll. The wound roll is then transferred to a process provided separately, and is drawn out again, and used for a ceramic capacitor manufacturing process in which a dielectric layer and an electrode layer are formed on the release layer surface by coating and printing. Therefore, cleaning is most preferably performed immediately after winding after the release layer is formed.
[0013]
In addition, when the width of the device for applying the release film is wider than the width of the device for applying the dielectric layer, the release film is formed so as to match the application width of the dielectric layer after the release film is formed and wound. In this case, a slitting process for cutting to a width is performed. In this case, cleaning is performed after cutting to a predetermined width by the slitting process. This is because it is preferable to perform cleaning immediately before the coating process of the dielectric layer or the like as much as possible in order to surely eliminate the entry of dust and foreign matters.
[0014]
The polyester film (release film) after the release layer is formed needs to be cleaned on the surface on which the release agent solution is applied, but preferably on both sides. That is, when the release layer is formed on both sides, it is naturally necessary to clean both sides, but it is preferable to clean both sides even when the release layer is formed only on one side. In the case of one side, if only the surface on which the release layer is formed can be cleaned, dust and the like can be prevented to the minimum, but if dust or foreign matter adheres to the side where the release layer is not formed, take-up etc. Since the peeling layer may be contaminated again during the process, it is preferable to carry out both sides.
[0015]
A ceramic capacitor is formed by applying a ceramic coating on a release layer of a release film to form a dielectric layer, printing an electrode layer on the dielectric layer, and repeating this two-layer formation process at least once or more. The dielectric layer and the electrode layer are laminated on the release layer of the release film. In the present invention, preferably, as described above, after the release layer is formed, the surface of the release layer is cleaned immediately before winding. Therefore, it becomes effective cleaning.
[0016]
The cleaning method may be either a contact type or a non-contact type. For example, a contact type cleaning method shown in FIG. 1 or a non-contact type cleaning method shown in FIG. 2 can be used. Both FIG. 1 and FIG. 2 show how a film having a release layer provided on the upper surface side is conveyed. In the case of the contact type as shown in FIG. 1, a non-woven fabric is generally used as a cleaning material, and it is used with care so as not to scratch the film. Specifically, as shown in the figure, a feed roll 3 in which the nonwoven fabric 2 is wound in a roll shape, a take-up roll 4 for winding the fed nonwoven fabric 2, and the nonwoven fabric 2 against the surface of the film 1. It is preferable to use a device having a guide roll 5. Although it is necessary to install this apparatus only on the surface of the film at least on the side where the release layer is formed, it is preferable to install it on both surfaces as shown in FIG. Moreover, it is preferable that the guide roll 5 has a structure in which the position can be changed so that the pressing strength against the film 1 can be adjusted. By changing the position, a range in which the release layer or the polyester film surface is not scratched is preferable. Thus, it becomes easy to efficiently collect dust and the like.
[0017]
In the case of the non-contact type shown in FIG. 2, cleaning is performed using a cleaning device 7 such as a web cleaner, for example, while conveying the film 1 through the guide roll 6 as shown. The web cleaner shown in the figure is a type of cleaning method that includes a high-speed air blowing mechanism and a vacuum suction mechanism, blows air at a high speed to remove fine particle-sized dust and foreign matter adhering to the film surface, and sucks and removes this.
[0018]
Note that any of the cleaning methods shown in the figure is extremely effective for improving the yield of a product having a very small size, such as a multilayer chip capacitor, and being stacked in layers.
[0019]
【Example】
Example 1
<Preparation of release agent solution>
A curable silicone of the type shown below, in which a platinum-based catalyst is added to a mixture of polydimethylsiloxane having a vinyl group and a hydrogensilane-based compound to cause an addition reaction (manufactured by Shin-Etsu Chemical Co., Ltd., KS-847) (H)) was dissolved in a mixed solvent of methyl ethyl ketone (MEK) and toluene to prepare a release agent solution (silicone resin solution) having a total solid content concentration of 3.0% by weight.
Product name: KS-847H 300g manufactured by Shin-Etsu Chemical Co., Ltd.
(Solid content concentration 30%, resin 90g)
Platinum catalyst CAT-PL-50T (manufactured by Shin-Etsu Chemical Co., Ltd.) 3.0 g
MEK / toluene = 50/50 (weight ratio) solution 2700 g
[0020]
<Preparation of dielectric layer paint>
After firing powders of barium titanate, chromium oxide, yttrium oxide, manganese carbonate, barium carbonate, calcium carbonate, silicon oxide and the like having a particle size of about 0.1 μm to 1.0 μm, BaTiO 3 is added as 100 mol% and Cr 2 O 0.3 mol% converted to 3 , 0.4 mol% converted to MnO, 2.4 mol% converted to BaO, 1.6 mol% converted to CaO, converted to SiO 2 4 mol%, Y 2 O 3 was converted to a composition of 0.1 mol%, mixed by a ball mill for 24 hours, and dried to obtain a dielectric material. 100 parts by weight of this dielectric material, 5 parts by weight of acrylic resin, 40 parts by weight of methylene chloride, 25 parts by weight of acetone, and 6 parts by weight of mineral spirits are blended with a commercially available φ10 mm zirconia bead. By mixing for 24 hours, a dielectric ceramic paint (dielectric layer paint) was obtained.
[0021]
<Preparation of release film>
The release agent solution was applied to a biaxially stretched polyethylene terephthalate (PET) film having a width of 100 mm and a thickness of 38 μm with a bar coater so that the coating thickness after drying was 0.15 μm, and the heating temperature was 110 ° C. The drying and curing reaction was performed for 40 seconds. Thereafter, the contact film cleaning method shown in FIG. 1 is used to clean the both surfaces of the film using a nonwoven fabric (Fujibo Co., Ltd., POLYPAS), and then wound up to obtain a release film wound into a roll. It was.
[0022]
<Formation of dielectric layer>
Next, using a doctor coat method, the dielectric layer coating is applied to the surface of the release film on which the release agent liquid is applied so that the thickness of the dielectric layer after drying is 8 μm, dried at 70 ° C. for 20 seconds, and then rolled. A dielectric layer (green sheet) was formed.
[0023]
<Printing the electrode layer>
Subsequently, an electrode pattern was printed on the dielectric layer. A material mainly composed of nickel and copper was used for the electrode. In the electrode pattern, the individual electrodes are arranged at intervals in the horizontal and vertical directions.
[0024]
<Peeling / Lamination process>
After performing the above dielectric layer forming step and electrode layer printing step, the dielectric layer and electrode layer were peeled from the release film. 75 green sheets with electrodes thus obtained were prepared, and these were laminated in a lamination number of 75 layers.
[0025]
<Preparation of multilayer ceramic chip sample>
The laminated green sheet obtained as described above was punched, pressed, and cut to obtain a laminated ceramic chip. The obtained multilayer ceramic chip was debindered at 280 ° C. for 12 hours and fired at 1300 ° C. for 2 hours in a reducing atmosphere. Terminal electrodes were formed on the laminate obtained after firing. The material of the terminal electrode was mainly copper. This was baked at 800 ° C. for 30 minutes in a mixed gas atmosphere of nitrogen and hydrogen, and plated to obtain a multilayer ceramic chip sample.
[0026]
Reference example 1
A multilayer ceramic chip sample was produced in the same manner as in Example 1 except that an air blowing type non-contact cleaning method (web cleaner) shown in FIG. 2 was used instead of the nonwoven fabric as the contact cleaning method.
[0027]
Example 2
In the step of forming the release layer, a 1000 mm width PET film was used, and after the release layer was formed, the roll of the film once wound was cut into a width of 100 mm with a slitter, and then the same cleaning was performed before winding it into a roll again. A multilayer ceramic chip sample was produced in the same manner as in Example 1 except that.
[0028]
Reference example 2
In the step of forming the release layer, a 1000 mm width PET film was used, and after the release layer was formed, the roll of the film once wound was cut into a width of 100 mm with a slitter, and then the same cleaning was performed before winding it into a roll again. A multilayer ceramic chip sample was produced in the same manner as in Reference Example 1 except for the above.
[0029]
Comparative example A multilayer ceramic chip sample was produced in the same manner as in Example 1 except that no cleaning was performed.
[0030]
Short-circuit defect rate Using a high resistance meter HP-4329A manufactured by Hewlett-Packard Company, 10V was applied at 20C, and the resistance value was measured after 30 seconds. Those having an insulation resistance of 1000Ω or less were regarded as short defects, and the ratio of the number of short defects occurring to the number of samples subjected to the test was displayed as the short defect rate for each sample. The results are shown in Table 1 below.
[0031]
[Table 1]
Figure 0004919139
[0032]
【Effect of the invention】
As described above, according to the method for producing a release film of the present invention, the occurrence rate of defects can be drastically reduced by appropriately preventing dust and foreign matters from being mixed between the laminated layers of ceramic capacitors. Can do.
[Brief description of the drawings]
FIG. 1 is a schematic view showing an embodiment of a contact cleaning method according to the present invention.
FIG. 2 is a schematic view showing an embodiment of a non-contact cleaning method according to the present invention.
[Explanation of symbols]
1 Film 2 Cleaning material (nonwoven fabric)
3 Feeding roll 4 Take-up rolls 5 and 6 Guide roll 7 Cleaning device

Claims (3)

連続的に搬送されるポリエステルフィルムの少なくとも片面に剥離剤液を塗布した後、乾燥させ、ロール状に巻き取る工程を含む剥離フィルムの製造方法において、前記乾燥後、前記ロール状の巻き取り前に、前記ポリエステルフィルムの剥離剤液塗布面を、不織布を用いてクリーニングすることを特徴とするセラミックコンデンサを製造するための剥離フィルムの製造方法。In the method for producing a release film including a step of applying a release agent solution to at least one side of a polyester film that is continuously conveyed, and then drying and winding it into a roll, after the drying, before the roll-like winding A method for producing a release film for producing a ceramic capacitor , wherein the surface of the polyester film to which the release agent solution is applied is cleaned using a nonwoven fabric. 連続的に搬送されるポリエステルフィルムの少なくとも片面に剥離剤液を塗布した後、乾燥させ、ロール状に巻き取った後、所定幅に裁断する工程を含む剥離フィルムの製造方法において、前記所定幅の裁断後に、前記ポリエステルフィルムの剥離剤液塗布面をクリーニングすることを特徴とするセラミックコンデンサを製造するための剥離フィルムの製造方法。In the method for producing a release film, the method includes a step of applying a release agent solution on at least one side of a polyester film that is continuously conveyed, drying, winding up in a roll shape, and cutting to a predetermined width. A method for producing a release film for producing a ceramic capacitor , wherein the surface of the polyester film coated with a release agent solution is cleaned after cutting. 前記ポリエステルフィルムの両面をクリーニングする請求項1または2記載のセラミックコンデンサを製造するための剥離フィルムの製造方法。The method for producing a release film for producing a ceramic capacitor according to claim 1 or 2, wherein both sides of the polyester film are cleaned.
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