JP4856494B2 - Flat plate flow path and manufacturing method thereof - Google Patents

Description

  The present invention provides a two-dimensional flow path for supplying and discharging liquids such as tap water, pure water, alcohol, slurry, highly erodible chemicals or various fluids such as gas, gas such as hydrogen, nitrogen, etc. A flat plate made of thermoplastic resin that can be used suitably as a heat exchanger, microreactor, micromixer, etc. The present invention relates to a flow path and a manufacturing method thereof.

Conventionally, pipes for supplying and discharging various fluids in manufacturing equipment and experimental equipment for semiconductors, liquid crystals, pharmaceuticals, foods, cosmetics, etc. are tubular members such as a plurality of tubes using pipe joints such as cheese and elbows. Is connected.
However, connecting a tubular member such as a tube by screwing or the like through a pipe joint or the like increases the connecting portion and increases the assembly cost because the pipe joint is large and expensive, and further, there is a gap in the pipe joint. In addition, there is a problem in that it is liable to cause a difference in level and is liable to cause a stagnation of dust and the like, which hinders a smooth flow of fluid and lacks reliability.
Therefore, when the piping and piping distance in the operating part between the devices are not fixed, the tube is bent, and the one molded into a coil shape is transferred with chemicals, solvents, various gases, various experimental devices, analytical instruments, It has been proposed to be used for piping of semiconductor devices and the like.
In addition, it has been proposed to use a tube in which a tube is wound in a coiled shape or a meandered bundle in a tank in which a chemical solution or pure water is stored and used as a heat exchanger.

On the other hand, in response to the recent demands for reducing environmental burdens and increasing the speed and efficiency of chemical reactions, microchannels are formed on substrates such as silicon, glass, and plastic using micromachining technology, and various microspaces are created. Microreactors used for chemical reactions and analysis are attracting attention. In particular, a microfabrication is performed on a chip of several centimeters square to form a large number of the above-mentioned micro flow paths, and integrated such that each process such as pretreatment, separation, detection, and disposal is performed in parallel. It is called a channel chip and is expected as an analytical technique and a means for synthesizing new substances in various fields such as biotechnology, medical care, agriculture, and the environment.
A conventional microreactor (microchannel chip) forms a reaction channel by microfabrication on a substrate, an injection hole for injecting a sample solution into a position corresponding to the reaction channel of the cover plate, and a reaction after the reaction An extraction hole for extracting the solution is formed, and the substrate and the cover plate are integrated by electrostatic bonding, thermocompression bonding, or bonding by hydrofluoric acid.
In the reaction channel of the microreactor (microchannel chip), reaction with the solution, separation, extraction, analysis, etc. are performed. Therefore, when the substrate and the cover plate are joined, impurities such as impurities in the reaction channel are contaminated. To maintain a chemically stable state, and to firmly bond the substrate and the cover plate so that the sample solution and the reaction solution do not leak. For this reason, in joining the substrate and the cover plate, it is desired to join at a temperature as low as possible and without an electric field.

For example, in (Patent Document 1), “one reactor plate having therein a plurality of flow paths in which at least the first fluid and the second fluid can react, and a plane parallel relationship with the reactor plate are provided. A reservoir plate, wherein the reservoir plate has at least a first reservoir for the first fluid and a second reservoir for the second fluid therein, and the plurality of channels in the reactor plate are at least first and second A reactor in fluid communication with a reservoir is disclosed.
Further, (Patent Document 2) states that “a substrate and a cover plate are bonded via a bonding layer, and the bonding layer is formed by heat-treating a solution mainly containing a fluorine-based resin; A microchannel chip characterized in that it is a metal oxide layer formed by heat-treating a hydrolyzed / dehydrated condensation product of an organometallic compound. "
JP 2004-74339 A JP 2005-525229 A

However, the above conventional techniques have the following problems.
(1) Tubes wound in a coil and bundled or meandered and bundled have a problem that they are bulky and lack space saving, are difficult to carry and downsize, and are difficult to handle and versatile. It was.
(2) In (Patent Document 1), a gasket having a through slot for supplying fluid in communication with the microchannel is joined to the back surface of the reactor plate in which the slit-shaped microchannel is formed, and the reactor The surface of the plate must be sealed with an observation plate and further protected with a top plate, resulting in a complicated structure, a large number of parts, and lack of mass productivity.
In addition, since a plurality of plates are laminated and joined, misalignment is likely to occur, warpage is likely to occur due to differences in the pattern and material of each plate, and the sealing property of the flow path and the reliability of the joining strength are lacking. It had the problem that.
Furthermore, since the reservoir plate having at least two reservoirs is stacked on the reactor plate, the thickness of the entire reactor increases, and space saving and handling properties are lacking, and it is difficult to position the slot of the reservoir and the through slot of the gasket. There was a problem of lack of workability.
In (3) (Patent Document 2), since a flat substrate and a lid plate are simply bonded together via a bonding layer, it is difficult to ensure flatness, and the substrate and the lid plate are particularly warped. In such a case, there is a problem that the bonding strength is insufficient, leakage is likely to occur, and reliability is lacking.

  The present invention solves the above-described conventional problems, and the pipes for supplying, mixing, reacting, and discharging various fluids are integrated and integrated in a flat plate, so that they are thin and excellent in compactness and downsized. Easy to reduce weight, easy to handle, no gaps, steps, seams, etc. in the pipes, difficult to mix dust, etc., smooth fluid flow and prevent contamination such as impurities in the flow path, chemical Providing a highly reliable flat plate flow path that can reliably prevent fluid leakage, and integrating and integrally forming pipes for supplying, mixing, reacting, and discharging various fluids An object of the present invention is to provide a method for producing a flat plate flow channel that has a high degree of freedom in designing the flow channel and is excellent in versatility, and is excellent in reproducibility of dimensional accuracy, bonding strength, and sealing reliability.

In order to solve the above problems, the flat plate flow channel and the manufacturing method thereof according to the present invention have the following configurations.
The flat plate flow channel according to claim 1 of the present invention is a flat plate channel made of a thermoplastic resin having an internal flow channel and at least two open flow channels formed in communication with the internal flow channel. The internal flow path covers the concave channel groove formed on the surface of the lower substrate, the inclined portion formed on the upper end side of the peripheral wall of the concave channel groove, and the concave channel groove. And a closing member that is heat-sealed to the lower substrate at the inclined portion and integrated with the lower substrate.
This configuration has the following effects.
(1) Since the lower substrate made of a thermoplastic resin and the closing member can be directly heat-sealed, the bonding strength can be increased, and the lower substrate and the closing member are integrated to form bonding spots, pinholes, etc. Can be prevented, and leakage of fluid flowing through the internal flow path can be prevented.
(2) Since the internal flow passage communicating with two or more open flow passages is formed by being sandwiched between the lower substrate and the closing member, pipe joints such as cheese and elbows are unnecessary, and the piping is made compact and thin. In addition, there are no gaps, steps, joints, etc. in the piping, and it is difficult for dust to enter, and the flow of fluid is smooth. Contamination control of manufacturing equipment, etc., suppression of microbubble generation and flow rate management are easily performed. be able to.
(3) Since it has at least two or more open flow passages communicating with the internal flow passage, the open flow passage can be connected to a pipe joint such as cheese or elbow, a tubular member such as a tube, etc. Can be incorporated in the middle. Moreover, tubular members, such as various pipe joints and tubes, can be formed in the open channel.
(4) Since the lower substrate and the blocking member are integrated into a flat plate shape to form the internal flow path, it is lightweight, easy to handle, and excellent in assembly workability.
(5) Since the internal channel is formed by covering the groove channel groove formed on the lower substrate, the pattern of the internal channel can be freely formed, and versatility and design flexibility Excellent. In particular, the flow of fluid is smoothed and pressure loss is achieved by forming the connecting part of the straight line part of the flow path in a curved line with an arc etc. so that it does not bend or intersect at a steep angle And can prevent stress on the fluid and generation of bubbles.
(6) Since there are at least two open flow channels formed in communication with the internal flow channel, fluid can be circulated using one open flow channel as a supply port and the other open flow channel as a discharge port. Different types of fluids can be supplied from two or more open channels, mixed and reacted in the internal channels, and taken out from the remaining one open channel.
(7) Since the closing member covering the groove channel groove is integrated by heat fusion to the lower substrate at the inclined portion formed on the upper end side of the peripheral wall of the groove channel groove, the groove channel The groove and closing member can be easily aligned to prevent misalignment, and even if the lower substrate or closing member is warped, they can be brought into close contact with each other to prevent the occurrence of leaks, and the internal flow path shape is stable. Excellent in reliability, bonding strength and sealing reliability.

Here, as the thermoplastic resin forming the lower substrate and the closing member, those having excellent chemical resistance and heat resistance and high mechanical strength are preferable, such as tetrafluoroethylene (PTFE, PFA, FEP, ETFE), polyfluoride. Fluorine resins such as vinylidene (PVDF), polyether ether ketone, and the like are preferably used.
The cross-sectional shape of the internal channel is determined by the cross-sectional shape of the groove channel groove, and can be formed in various shapes such as a substantially rectangular shape, a substantially inverted triangular shape, and a substantially semicircular shape. The width of the internal channel does not need to be constant, and can be formed to be wide or narrow depending on the location. A buffer part and a mixing part (liquid reservoir part) can be provided simply by forming the middle of the internal flow path wide. Further, when a stepped or inclined unevenness is provided on the bottom or peripheral wall of the groove channel groove, the flow of fluid can be turbulent to prevent accumulation of heat and short circuit passage (short path) of the fluid. Thereby, when it uses as a heat exchanger, a circulation type chemical heater, etc., it can prevent that the one part inside flow path becomes extremely high temperature, or the efficiency of heat exchange falls.
The internal flow path is not limited to a single flow path, and can be branched into a plurality of flow paths in the middle, or conversely, a plurality of flow paths can be aggregated into one. The cross-sectional area may be uniform in one flow path, the cross-sectional area may be increased or decreased in stages, or flow paths having different cross-sectional areas may be connected.
Further, when a plurality of independent (not communicating) internal flow paths are formed in one flat flow path, a plurality of pipes through which different types of fluids flow can be integrated, resulting in excellent space saving.
The inclined portion can be formed by chamfering between the upper end side of the peripheral wall portion of the groove channel groove and the surface of the lower substrate.

An arbitrary number of open channels can be provided not only at the end of the internal channel but also at any position and direction. Moreover, the diameter of each opening flow path does not need to be the same, and may differ from each other. The opening diameter can be appropriately selected according to the physical properties of the fluid, the mixing ratio when mixing a plurality of fluids, and the like.
The open channel includes tubes, pipes and other tubular members, cheese and elbow pipe joints, pressure sensor pressure sensing parts, leak sensor sensing parts, temperature sensor sensor parts, flow meter transmitters and receivers, etc. Ends of various measuring instruments, valves, flanges, etc. can be connected. Ends of tubular members, pipe joints, measuring instruments and the like may be connected by screws or the like, or may be joined by welding. In the case of a flow meter, the transmitter and receiver of an existing flow meter may be connected to the open channel of the flat plate flow channel, or the portion corresponding to the measurement flow channel of the flow meter may be connected to the internal flow of the flat flow channel. It may be formed as a path and only the transmitter and receiver may be provided.
In addition, when fitting and connecting parts such as ridges and ridges are formed on the outer periphery of the opening channel, or when screw holes for fixing are drilled on the circumference, pipe joints, measuring instruments, etc. It can be connected easily and has excellent workability.

In addition, as a shape of a lower board | substrate, it can form in various shapes, such as a substantially L shape, a substantially T shape, and a substantially cross shape other than a substantially rectangular shape or a substantially circular shape.
Since this flat plate channel is sealed with an integrated lower substrate and a closing member, a metal plate with good thermal conductivity such as aluminum is attached to the surface, and a heater for heating is provided. By simply doing, it can be used as a thin and compact circulating chemical heater.
Moreover, it can use suitably as a heat exchanger by reducing the thickness of a wall and improving thermal conductivity.

Invention of Claim 2 is a flat plate flow path of Claim 1, Comprising: At least any one of the said lower board | substrate and the said closure member is Chemical formula (Chemical Formula 1), (Chemical Formula 2), (Chemical Formula 3) A structure formed by polymerizing PTFE polymerized by adding one or more perfluorinated ethers represented by the formula (hereinafter referred to as modified PTFE ) or a resin composition containing modified PTFE as a main component. have.
With this configuration, in addition to the operation of the first aspect, the following operation is provided.
(1) By forming at least one of the lower substrate and the closing member with a modified PTFE or a resin composition containing the modified PTFE as a main component, processing is easy and excellent in mass productivity, and reproducibility of dimensional accuracy. Excellent sealing reliability.
(2) By forming the lower substrate and the blocking member with modified PTFE or a resin composition containing modified PTFE as a main component, it is excellent in chemical stability and corrosion resistance, and is not only pure water but also erodible. Various fluids such as high chemicals and solvents can be used, and it has high added value and excellent versatility and durability.

具体的には、ダイキン工業（株）製の商品名モ−ルディングパウダ−（Ｍ−１１１、Ｍ−１１２、Ｍ−１３９），三井デュポン社製（７０Ｊ），住友３Ｍ（ＴＦＭ１６００）やヘキスト社製のもの等が好適に用いられる。
組成物として配合される他の合成樹脂としてはＰＦＡ（テトラフルオロエチレン−パーフルオロアルキルビニルエーテル重合体）、ＰＴＦＥ等があげられる。
ＰＦＡを加えることにより、熱融着時間の短縮化が図られ、コストを低減することができる。また、従来のＰＴＦＥを加えることにより熱融着時の保形性を向上できると共に、希釈剤として優れコストを低減できる。 Here, as the modified PTFE, at least one of the perfluorinated ethers represented by the following chemical formulas (Chemical Formula 1), (Chemical Formula 2), and (Chemical Formula 3) is used as a modifier during the suspension polymerization. PTFE (polytetrafluoroethylene) polymerized by adding as is used.

Specifically, Daikin Industries, Ltd. product name molding powder (M-111, M-112, M-139), Mitsui DuPont (70J), Sumitomo 3M (TFM1600), and Hoechst And the like are preferably used.
Examples of other synthetic resins blended as the composition include PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether polymer), PTFE, and the like.
By adding PFA, the heat fusion time can be shortened and the cost can be reduced. In addition, the addition of conventional PTFE can improve the shape retention at the time of heat-sealing, and can be excellent as a diluent and can reduce the cost.

The amount of PFA used is 1 wt% to 95 wt%, preferably 1 wt% to 80 wt%. As the content becomes less than 1 wt%, the effect of addition is less likely to be recognized, and as the content exceeds 80 wt%, the shape retention at the time of heat-sealing decreases, and the dimensional accuracy of the internal flow path tends to decrease. . In particular, as the amount exceeds 95 wt%, the tendency of the internal flow path to be easily deformed becomes remarkable, which is not preferable.
A conventional PTFE content is 1 wt% to 90 wt%, preferably 1 wt% to 70 wt%. As the content is less than 1 wt%, the effect of addition is less likely to be recognized, and as the content exceeds 70 wt%, the bonding strength tends to decrease. In particular, as the content exceeds 90 wt%, the tendency of the joining to become insufficient and leakage or the like is likely to occur becomes remarkable.

A third aspect of the present invention is the flat plate flow path according to the first or second aspect, wherein the flat flow path is formed or disposed in communication with the open flow path so as to protrude from a surface or a side surface of the lower substrate or the closing member. And having an external connection portion.
With this configuration, in addition to the operation of the first or second aspect, the following operation is provided.
(1) Since it has an external connection portion that communicates with the open flow path and is formed or disposed so as to protrude from the surface or side surface of the lower substrate or the blocking member, a pipe joint or measurement is provided in the open flow path via the external connection portion. Equipment and the like can be easily connected, and workability is excellent.

Here, the external connection portion may be formed integrally with the lower substrate or the closing member by cutting, or may be welded after fitting a PFA formed in a pipe shape or various joint shapes.
When a male thread part or a female thread part is formed in the external connection part, it is possible to easily connect a pipe joint, a measuring instrument, etc., and it is excellent in assembling workability and maintainability. In addition, a plurality of flat plate flow paths can be connected in series or in parallel via the external connection portion. In particular, when a plurality of flat plate flow paths are connected so as to be stacked, piping having a long flow path can be stored in a space-saving manner. In that case, the pattern of the internal flow path of each flat plate flow path can be arbitrarily selected, complicated piping can be easily realized, and the productivity and versatility are excellent.

According to a fourth aspect of the present invention, there is provided a flat plate channel manufacturing method comprising: a fitting groove having a trapezoidal cross section having a width on the upper surface side and a width on the lower surface side on the surface of the lower substrate made of thermoplastic resin. And a groove groove forming step for forming a groove groove continuously with the bottom surface of the fitting groove in the depth direction of the fitting groove. A fitting ridge forming step for forming a fitting ridge having a trapezoidal cross section fitted into the fitting groove on the surface of the upper substrate made of thermoplastic resin, and one end of the step An air hole drilling step for drilling an air hole that opens on the surface or side surface of the lower substrate and / or the upper substrate and communicates with the groove channel groove; and the fitting protrusion on the fitting groove A substrate laminating step of covering the lower substrate with the lower substrate so as to fit, and heating the lower substrate and the upper substrate to form the fitting groove An internal flow path forming step of heat-sealing the oblique sides of the fitting ridges and closing the openings of the concave channel grooves with the fitting ridges to form internal channels. It has the composition which is.
This configuration has the following effects.
(1) Since the groove channel groove is formed in the depth direction of the fitting groove groove continuously with the bottom surface portion of the fitting groove groove by the step of forming the groove channel groove, Even if the fitting ridges are fitted, the groove channel groove is not crushed, the inner channel can be formed reliably, and the reproducibility of dimensional accuracy is excellent.
(2) The fitting groove has a trapezoidal cross section in which the width on the upper surface side is wide and the width on the lower surface side is narrow, and the fitting protrusion is fitted to the fitting groove. By having a cross section, when the upper substrate is covered with the lower substrate in the substrate laminating process, the fitting protrusion can be easily fitted into the fitting groove, positioning is easy, and heat fusion is performed. Misalignment due to wearing hardly occurs, and the flow path shape is highly reliable.
(3) The fitting groove of the lower substrate and the fitting protrusion of the upper substrate can be integrated by heat fusion, and leakage of fluid flowing through the internal flow path can be reliably prevented. .
(4) Since the fitting groove has a trapezoidal cross section with a width on the upper surface side and a width on the lower surface side, the oblique sides of the fitting groove and the fitting protrusion are brought into close contact with each other. Since the area can be expanded, even if warpage or the like occurs in the lower substrate or the upper substrate itself that is the base material, the opening of the groove channel groove is reliably closed with the fitting protrusion. An internal flow path can be formed, and joint strength and sealing reliability can be improved.
(5) In the air hole drilling step, an air hole having one end opened on the surface or side surface of the lower substrate and communicating with the concave channel groove is formed, so that the lower substrate and the upper substrate are formed in the internal channel forming step in the subsequent step. When the substrate is heated, the air expanded inside the groove channel groove can escape from the air hole to the outside of the lower substrate, and the fitting protrusion on the upper substrate becomes the fitting groove on the lower substrate. The inner channel can be formed by tightly closing and closing the concave channel groove.
(6) Since the internal channel can be formed by closing the opening of the concave channel groove formed on the lower substrate with the fitting convex part, in the concave channel groove forming step, it is arbitrary in the plane of the lower substrate The flow path can be formed two-dimensionally with this pattern, and the flow path design is highly flexible and versatile.
(7) Since the fitting ridges are formed on the surface of the upper substrate in correspondence with the fitting grooves on the surface of the upper substrate, the fitting ridges formed in various patterns are placed on the top. It can be handled integrally with the substrate, the internal flow path can be formed by simply laminating the lower substrate and the upper substrate in the substrate laminating process, the number of parts is small, and the workability and mass productivity are excellent.

Here, the thermoplastic resin forming the lower substrate and the upper substrate is the same as that described in claims 1 and 2.
The heating temperature T in the internal flow path forming step varies depending on the type of the thermoplastic resin, but when using a modified PTFE or a resin composition mainly composed of the modified PTFE, 250 ° C. ≦ T ≦ 450 ° C. Preferably there is. As the heating temperature T becomes lower than 250 ° C., unjoined parts tend to occur, and as the heating temperature T becomes higher than 450 ° C., the synthetic resin tends to deteriorate and mechanical strength tends to decrease. Neither is preferred.
Either the fitting groove forming step or the groove groove forming step may be performed first, but after forming the fitting groove in the fitting groove forming step, the groove forming groove is formed. When the groove channel groove is formed in the process, the depth of the groove channel groove can be reduced, so that mass production is excellent and the upper end side of the groove channel groove is not crushed or deformed. Excellent shape stability.

  When the height of the mating ridge is equal to or greater than the depth of the mating groove, the entire hypotenuse (inclined part) of the mating groove is the hypotenuse (inclined part) of the mating ridge. It can be covered, the joining area is maximized, and the sealing reliability of the internal flow path is excellent. It is not always necessary to cover the entire hypotenuse (inclined portion) of the mating groove with the hypotenuse of the mating projection, and the height of the mating projection is shorter than the depth of the mating groove. Even in this case, there is no problem as long as at least a part of the oblique side (inclined portion) of the fitting groove is closed with the fitting protrusion to ensure the sealing of the internal flow path.

The position of the air hole to be drilled in the air hole drilling step can be provided at any position communicating with the internal flow path. The air hole drilling step may be performed at any time as long as it is before the internal flow path forming step.
In order to supply fluid to the internal channel and discharge fluid from the internal channel, at least two open channels formed in communication with the internal channel are required. By forming the air holes in accordance with the position of the opening flow path, the air holes can be used as they are as the opening flow path, and there is no need to separately perform the opening flow path forming step.
If the air hole cannot be drilled in accordance with the position of the opening channel due to design reasons or the like, it is necessary to perform the opening channel forming step. Also, when the hole diameter of the air hole is small and insufficient as the hole diameter of the opening flow path, or when the air hole is blocked by thermal expansion due to heating in the internal flow path forming process, the air hole is It is necessary to enlarge or to newly form an open channel.

The invention according to claim 5 is the method for manufacturing the flat plate flow channel according to claim 4, wherein two or more open flow channels communicating with the internal flow channel are formed in the lower substrate or the upper substrate. It has the structure provided with the opening flow path formation process.
With this configuration, in addition to the operation of the fourth aspect, the following operation is provided.
(1) Supplying fluid to the internal channel and fluid from the internal channel by forming two or more open channels communicating with the internal channel on the lower substrate or the upper substrate in the open channel forming step Therefore, it is possible to form a flat plate channel excellent in versatility that can perform operations such as fluid circulation, fluid mixing and reaction in the internal channel.

Here, the opening channel formed in the opening channel forming step can be provided at any position and direction communicating with the internal channel.
If the air hole cannot be formed in accordance with the position of the opening flow path due to design reasons, an air hole closing step is required. After the lid member formed in a columnar shape or the like is fitted in the air hole, it can be closed by welding. In addition, when the hole diameter of the air hole is relatively small or when the depth is shallow, it can be expected that the air hole is naturally clogged by thermal expansion due to heating in the internal flow path forming process, but from the viewpoint of reliability. It is desirable to perform the air hole closing step.
The opening of the opening channel may be formed on the surface of the lower substrate or the upper substrate, or may be formed on the side surface of the lower substrate or the upper substrate. When the opening channel is opened on the side surface of the lower substrate or the upper substrate, the connection portion between the flat plate channel and the tubular member or the pipe joint is disposed on the side surface of the lower substrate or the upper substrate. There is no protrusion on the surface, and the flat plate flow paths or the flat plate flow paths and other members can be arranged in close contact with or close to each other on the surface, which is excellent in space saving and arrangement flexibility.

Invention of Claim 6 is a manufacturing method of the flat plate flow path of Claim 4 or 5, Comprising: The structure provided with the board | substrate cutting process which cuts the unnecessary part of the said lower board | substrate and / or the said upper board | substrate. have.
With this configuration, in addition to the operation of the fourth or fifth aspect, the following operation is provided.
(1) By cutting unnecessary portions of the lower substrate and / or the upper substrate in the substrate cutting step, the thickness of the entire flat plate channel and the thickness of the upper and lower walls of the internal channel are arbitrarily selected. Therefore, thermal conductivity and heat insulation can be freely set according to the application, and it is excellent in design flexibility and versatility.

Here, when cutting an unnecessary part in the substrate cutting process, a fitting connection portion such as a concave line or a convex line is formed on the outer periphery of the opening channel, or the external connection unit is projected by communicating with the opening channel. Can be installed. Thereby, a pipe joint, measuring instruments, etc. can be connected simply. In addition, since unnecessary portions can be removed in the substrate cutting process, it is possible to reduce warpage and undulation by giving sufficient thickness to the initial lower substrate and upper substrate, and at the time of heating in the internal flow path forming step Thermal deformation can be effectively prevented and the shape stability is excellent.
The upper substrate that is heat-sealed to the lower substrate and integrated with the lower substrate is the closing member described in claim 1, but when the upper substrate is cut in the substrate cutting process, it remains without being cut. This part becomes the closing member. Therefore, when cutting is performed up to the surface of the lower substrate, at least a part of the fitting ridges fitted in the fitting grooves is a closing member.

Invention of Claim 7 is a manufacturing method of the flat plate flow path given in any 1 paragraph of Claims 4 thru / or 6, Comprising: The bottom of the above-mentioned fitting convex part on the perimeter of said fitting convex part It has the structure provided with the step part formation process which forms a deeper step part.
With this configuration, in addition to the operation of any one of claims 4 to 6, the following operation is provided.
(1) In the stepped portion forming step, by forming a stepped portion deeper than the bottom of the fitting projection on the outer periphery of the fitting projection, when the lower substrate and the upper substrate are laminated in the substrate lamination step, Only the mating groove groove and the mating ridge portion are in contact with and closely contacted with each other, and only the hypotenuse (inclined portion) of the mating groove groove and the mating ridge portion is heated in the internal flow path forming process. Since they are fused and integrated, the bonding area is small, the heating time can be shortened, the productivity is excellent, and the lower and upper substrates are not easily affected by heat, and the amount of warpage is reduced. Excellent dimensional accuracy reproducibility.
(2) The lower substrate and the upper substrate are not joined over the entire surface, and the outer periphery of the fitting ridge, which is the end of the joint surface between the fitting groove and the fitting ridge, can be visually observed. It is easy to check for leaks in the flow path, to reliably prevent the introduction of defective products, to facilitate quality control, and to improve product yield.

Invention of Claim 8 is a manufacturing method of the flat plate flow path of any one of Claim 4 thru | or 7, Comprising: The cross-sectional shape of the said fitting groove groove and the said fitting convex groove part is. It has a configuration that is an isosceles trapezoid.
With this configuration, in addition to the operation of any one of claims 4 to 7, the following operation is provided.
(1) The cross section of the fitting groove groove and the fitting ridge portion by making the angle of the inclined portion (slanted side) the same on the left and right (lateral symmetry) when processing the fitting groove groove and fitting ridge portion. The shape can be an isosceles trapezoid, which is easy to process and excellent in productivity.
(2) Since the shape (inclination angle) of the joint portion is bilaterally symmetric and the joint area is the same on the left and right sides of the groove channel groove, when the pressure is applied in the internal channel formation step, the joint portion is evenly pressurized. The fitting groove and the fitting ridge can be reliably brought into close contact with each other, and there is no joining spot and the joining strength can be improved.

Here, a common tool (blade) can be used for processing the fitting groove and the fitting protrusion, and the angles of the inclined portions (slanted sides) can be easily aligned. Moreover, since the angle of the inclined part (slanted side) is the same on the left and right for each of the fitting groove and the fitting protrusion, it can be processed in a short time using the same blade, and the productivity is excellent.
In addition, it is preferable to form an inclined part not only in the both sides of the width direction of a concave channel groove but in the both ends of a longitudinal direction. This is because the entire periphery of the internal flow path can be reliably sealed by forming the inclined portion over the entire periphery on the upper end side of the peripheral wall of the concave flow path groove.

Invention of Claim 9 is a manufacturing method of the flat flow path of any one of Claim 4 thru | or 8, Comprising: The width | variety of the lower end part of the said fitting groove groove, and the said groove flow The width of the upper end portion of the road groove is the same.
With this configuration, in addition to the operation of any one of claims 4 to 8, the following operation is provided.
(1) Since the width of the lower end portion of the fitting groove groove and the width of the upper end portion of the groove passage groove are the same, the alignment of the fitting groove groove and the groove passage groove is easy to produce. Excellent in properties.
(2) Concave groove is formed continuously at the lower end of the inclined part of the fitting groove, and a flat step is formed between the fitting groove and the groove. Therefore, the fitting groove and the fitting ridge can be securely adhered to each other at the inclined portion, and the bonding strength and the sealing reliability can be improved.

  Here, as described in claim 1, the cross-sectional shape of the groove channel groove can be formed in various shapes, but the cross-sectional shape of the groove channel groove is wide on the upper surface side and on the lower surface side. In the case of forming a narrow trapezoidal shape or a substantially inverted triangular shape, the fitting groove groove and the groove channel groove can be formed simultaneously. If a trapezoidal or inverted triangular groove with the depth of the fitting groove groove and the groove flow groove depth is formed, the height of the fitting protrusion will be the fitting groove groove This is because the remaining depth becomes the internal flow path.

Invention of Claim 10 is a manufacturing method of the flat plate flow path given in any 1 paragraph of Claims 4 thru / or 9, Comprising: The height of the above-mentioned fitting convex part is the above-mentioned fitting concave groove. It has the structure formed higher than the depth.
With this configuration, in addition to the operation of any one of claims 4 to 9, the following operation is provided.
(1) By forming the height of the mating ridges higher than the depth of the mating groove, the dimensional variation can be absorbed and the mating ridges can be securely fitted at the inclined part (slanted side). The concave groove can be closed, and the reliability of sealing can be improved.

Invention of Claim 11 is a manufacturing method of the flat flow path of any one of Claim 5 thru | or 10, Comprising: The position of the said open flow path formed in the said open flow path formation process is a position. It has the structure which is the position of the said air hole.
With this configuration, in addition to the operation of any one of claims 5 to 10, the following operation is provided.
(1) By opening the opening channel at the position of the air hole in the opening channel forming step, the completed flat plate channel has no opening other than the opening channel, and the step of closing the air hole is unnecessary. In addition to excellent productivity, fluid leakage does not occur and reliability is excellent.
Here, in the post-process opening channel forming step, the air hole is drilled in the pre-process air hole drilling step in accordance with the position where the open channel is drilled, thereby eliminating unnecessary processes. Excellent productivity and reliability.

As described above, according to the flat plate channel and the manufacturing method thereof of the present invention, the following advantageous effects can be obtained.
According to invention of Claim 1, it has the following effects.
(1) The lower substrate made of a thermoplastic resin and the closing member are directly heat-sealed and integrated, so that the bonding strength is high, the occurrence of bonding spots and pinholes can be prevented, and the internal flow path flows. It is possible to provide a flat plate channel excellent in reliability and durability of joining that can surely prevent fluid leakage and the like.
(2) Since the internal flow path can be formed without using a pipe joint such as cheese or elbow for the connection between the open flow path and the internal flow path, the piping can be made compact and the space saving performance is excellent. There are no gaps, steps, seams, etc., and it is difficult for dust to enter, and the flow of fluid is smooth. Contamination control of manufacturing equipment, etc., suppression of microbubbles generation, flow rate management, etc. are easy and reliable. A flat plate channel can be provided.
(3) Excellent flowability in the design of the internal flow path pattern, smooth flow of fluid to reduce pressure loss, and reliability and versatility that can prevent stress on the fluid and generation of bubbles. Can be provided.
(4) Among a plurality of open flow channels formed in communication with the internal flow channel, one is a supply port and the other is a discharge port to circulate fluid, or from each of two or more open flow channels. A reliable type that can be used as a heat exchanger, microreactor, micromixer, etc., by supplying different types of fluids, mixing and reacting in the internal flow path and taking out from the remaining one outlet The flat plate flow path excellent in property and versatility can be provided.
(5) The inclined portion formed on the upper end side of the peripheral wall of the groove channel groove makes it easy to align the groove channel groove with the closing member and prevents displacement, and warps the lower substrate and the blocking member. Even if it exists, both can be made to adhere | attach reliably and generation | occurrence | production of a leak can be prevented, and the flat plate flow path excellent in the shape stability of the internal flow path, joining strength, and sealing reliability can be provided.

According to invention of Claim 2, in addition to the effect of Claim 1, it has the following effects.
(1) By forming at least one of the lower substrate and the closing member with a modified PTFE or a resin composition containing a modified PTFE as a main component, processing is easy, excellent in mass productivity, and reproducibility of dimensional accuracy; Excellent sealing reliability, chemical stability and corrosion resistance, and not only pure water but also various fluids such as highly erodible chemicals and solvents can be used. The flat plate flow path excellent in durability can be provided.

According to invention of Claim 3, in addition to the effect of Claim 1 or 2, it has the following effects.
(1) Easily connect pipe joints, measuring instruments, and the like to the open flow path through external connections that are formed or disposed on the surface or side surfaces of the lower substrate or the blocking member in communication with the open flow path. It is possible to provide a flat plate channel excellent in workability.

According to invention of Claim 4, it has the following effects.
(1) The concave groove channel is formed in the depth direction of the concave groove groove so as to be continuous with the bottom surface of the concave groove groove, so that the concave groove is not crushed. It is possible to provide a method for manufacturing a flat plate channel excellent in reproducibility of dimensional accuracy, in which an internal channel can be formed by reliably fitting a fitting convex portion into a groove.
(2) The mating ridge and mating groove have a trapezoidal cross-section with a wide upper surface and a lower lower surface, so that they fit into the mating groove in the substrate lamination process. It is possible to provide a method for manufacturing a flat plate flow channel that can be easily fitted and positioned with a protruding portion, is less likely to be displaced due to heat fusion, and has excellent flow channel shape reliability.
(3) By fitting the oblique sides of the mating groove and the mating ridges together to increase the contact area, the mating ridges even when warping or the like occurs in the lower substrate or the upper substrate. Thus, it is possible to provide a method of manufacturing a flat plate channel excellent in bonding strength and sealing reliability that can reliably close the opening of the groove channel and form an internal channel.

According to invention of Claim 5, in addition to the effect of Claim 4, it has the following effects.
(1) Supplying fluid to the internal flow path in any location and direction by forming two or more open flow paths communicating with the internal flow path in the lower substrate or the upper substrate in the open flow path forming step In addition, it is possible to discharge fluid from the internal flow path, and to form a plate flow path with excellent versatility that can perform operations such as fluid circulation, fluid mixing in the internal flow path, and reaction. Therefore, it is possible to provide a method for manufacturing a flat plate channel having excellent design flexibility.

According to invention of Claim 6, in addition to the effect of Claim 4 or 5, it has the following effects.
(1) When cutting unnecessary portions of the lower substrate and / or the upper substrate in the substrate cutting step, the thickness of the entire flat plate channel and the thickness of the upper and lower side walls of the internal channel are arbitrarily selected. Therefore, it is possible to provide a method for producing a flat plate channel excellent in design flexibility and versatility in which thermal conductivity and heat insulation can be freely set according to applications.

According to invention of Claim 7, in addition to the effect of any one of Claims 4 thru | or 6, it has the following effects.
(1) By forming a stepped portion deeper than the bottom of the fitting ridge on the outer periphery of the fitting ridge, only the oblique sides of the fitting groove and the fitting ridge are heat-sealed. The substrate and the upper substrate can be integrated, the bonding area can be reduced, the heating time can be shortened and the productivity can be improved, and the lower substrate and the upper substrate are hardly affected by heat, warping, distortion, etc. It is possible to provide a method for manufacturing a flat plate channel that is excellent in reproducibility of dimensional accuracy that can reduce the amount of deformation of the plate.
(2) Since leakage from the internal channel can be observed and confirmed on the surface of the flat plate channel, it is excellent in mass productivity that can reliably detect defective bonding and prevent the introduction of defective products The manufacturing method of the flat plate flow path can be provided.

According to invention of Claim 8, in addition to the effect of any one of Claims 4 thru | or 7, it has the following effects.
(1) When machining the mating groove and mating ridge, the angle of the inclined part (slanted side) is the same on the left and right (left-right symmetric), and the cross-sectional shape is an isosceles trapezoid, making it easy to produce. The joint area is equal on the left and right sides of the groove channel, and when pressurized in the internal channel formation process, pressure can be applied evenly to the joint, and the fitting groove is fitted. It is possible to provide a method for producing a flat plate channel that can reliably adhere the joint ridges, has no joint spots, and is excellent in uniformity and reliability of joint strength.

According to invention of Claim 9, in addition to the effect of any one of Claims 4 thru | or 8, it has the following effects.
(1) Since the width of the lower end portion of the fitting groove groove and the width of the upper end portion of the groove passage groove are the same, the alignment of the fitting groove groove and the groove passage groove is easy to produce. In addition to being excellent in performance, a flat step portion is not formed between the fitting groove groove and the groove flow groove, and the fitting groove groove and the fitting protrusion are securely adhered to each other by the inclined portion. Therefore, it is possible to provide a method for manufacturing a flat plate channel having excellent bonding strength and sealing reliability.

According to the invention described in claim 10, in addition to the effect of any one of claims 4 to 9, the following effect is obtained.
(1) By forming the height of the fitting ridge part higher than the depth of the fitting groove groove, the slope part (slope side) of the fitting ridge part on the slope part (slope side) of the fitting groove groove It is possible to heat-seal with close contact without leakage, and to close the fitting groove groove to form an internal flow path. A manufacturing method can be provided.

According to the eleventh aspect of the present invention, in addition to the effect of any one of the fifth to tenth aspects, the following effect can be obtained.
(1) By opening the opening channel at the position of the air hole in the opening channel forming step, the completed flat plate channel has no opening other than the opening channel, and the step of closing the air hole is unnecessary. It is possible to provide a method for manufacturing a flat plate flow channel that is excellent in productivity and excellent in reliability capable of reliably preventing fluid leakage.

Hereinafter, a flat plate channel and a manufacturing method thereof according to an embodiment of the present invention will be described with reference to the drawings.
(Embodiment 1)
FIG. 1 (a) is a perspective view showing a flat plate flow channel according to the first embodiment of the present invention, and FIG. 1 (b) is a cross-sectional view taken along line AA in FIG. 1 (a).
In FIG. 1, 1 is a flat plate flow channel according to Embodiment 1 of the present invention, 1a is a bottom surface of a flat plate flow channel 1 and 1b is a flat plate flow formed of modified PTFE or a resin composition mainly composed of modified PTFE. The upper surface 2 of the path 1 is an internal flow path formed by meandering two-dimensionally inside the flat flow path 1, and 4 a and 4 b have open flow paths 3 a and 3 b communicating with the internal flow path 2. Two external connection portions formed so as to protrude on the lower surface 1 a side and the upper surface 1 b side of the path 1, 5 are two positioning holes drilled on a diagonal line of the flat plate channel 1, and 6 is a screw through the flat plate channel 1 These are four fixing holes drilled at arbitrary locations for fixing with a stopper or the like.

The manufacturing method of the flat plate flow path in Embodiment 1 of the present invention formed as described above will be described.
FIG. 2A is a perspective view showing a lower substrate used in the substrate stacking step of the flat plate channel manufacturing method according to Embodiment 1 of the present invention, and FIG. 2B is a cross-sectional view taken along the line B-B in FIG. FIG.
In FIG. 2, 10 is a lower substrate formed of modified PTFE or a resin composition mainly composed of modified PTFE, 10a is a lower surface of the lower substrate 10, 10b is an upper surface of the lower substrate 10, and 10c is an upper surface of the lower substrate 10. Two positioning holes 11 formed on the diagonal line are fitted on the surface of the lower substrate 10 (on the upper surface 10b side) with a cross section that is wide on the upper surface 10b side and narrow on the lower surface 10a side in the shape of an isosceles trapezoid. An indented groove, 11a is an inclined portion of the fitting groove 11, and 12 is a groove channel groove that is formed continuously with the fitting groove 11 in the depth direction of the fitting groove 11, 12a. Is a bottom portion of the groove channel groove 12, 12b is a peripheral wall portion of the groove channel groove 12, and one end is opened in the lower surface 10a of the lower substrate 10 and communicates with an end portion of the groove channel groove 12. Air holes.

FIG. 3 (a) is an enlarged cross-sectional view of a relevant part showing a fitting groove forming step of the flat plate channel manufacturing method according to Embodiment 1 of the present invention, and FIG. 3 (b) is an embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of a main part illustrating a step of forming a groove channel groove in the method for producing a flat plate channel in FIG.
In FIG. 3A, 11 b is a bottom surface portion of the fitting groove 11.
First, two positioning holes 10c serving as a reference for processing and assembly are formed on the diagonal line of the lower substrate 10 (see FIG. 2).
Next, in the fitting groove forming step, as shown in FIG. 3A, the fitting groove 11 having an isosceles trapezoidal cross section is formed on the upper surface 10b of the lower substrate 10 in an arbitrary pattern (FIG. 2). (See (a)).
Subsequently, in the groove channel groove forming step, as shown in FIG. 3B, the bottom surface portion 11b of the fitting groove groove 11 in the depth direction of the fitting groove groove 11 (see FIG. 3A). ) To form the concave channel groove 12. As a result, the shape between the upper end side of the peripheral wall portion 12 b of the concave channel groove 12 and the upper surface 10 b of the lower substrate 10 is chamfered by the inclined portion 11 a over the entire circumference of the concave channel groove 12. It becomes. The fitting groove forming step and the groove channel forming step may be carried out first, but after forming the fitting groove 11 in the fitting groove forming step, the groove channel groove is formed. When the groove channel 12 is formed in the forming process, the processing depth of the groove channel 12 can be made shallower than when the groove channel 12 is formed first, and the mass productivity is excellent. Moreover, crushing and deformation do not occur on the upper end side of the concave channel groove 12, and the shape stability is excellent.
Finally, in the air hole drilling step, as shown in FIG. 2, one end opens at the lower surface 10a of the lower substrate 10 at a position corresponding to the opening flow path 3a in FIG. An air hole 13 is formed.

FIG. 4A is a perspective view showing an upper substrate used in the substrate laminating process of the flat plate channel manufacturing method according to Embodiment 1 of the present invention, and FIG. 4B is a cross-sectional view taken along the line CC in FIG. FIG.
In FIG. 4, 15 is an upper substrate made of modified PTFE or a resin composition mainly composed of modified PTFE, 15a is a lower surface of the upper substrate 15, 15b is an upper surface of the upper substrate 15, and 15c is an upper substrate 15. Two positioning holes 16 formed on the diagonal line, 16 are wide on the surface of the upper substrate 15 (on the upper surface 15b side) so as to correspond to the fitting groove 11 on the lower substrate 10, and on the lower surface 15a side. The fitting ridge portion having a narrow cross section formed in an isosceles trapezoidal shape, 16 a is an inclined portion of the fitting ridge portion 16, and 17 is an outer periphery of the fitting ridge portion 16. A stepped portion 18 formed deeper than the bottom portion is an air hole that penetrates from the lower surface 15 a to the upper surface 15 b of the upper substrate 15.

Fig.5 (a) is a principal part expanded sectional view which shows the fitting convex part formation process of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention, FIG.5 (b) is Embodiment of this invention. FIG. 2 is an enlarged cross-sectional view of a main part showing a step portion forming step of the method for manufacturing a flat plate channel in FIG.
In FIG. 5 (a), 16 b is the bottom of the fitting ridge 16.
First, two positioning holes 15 c serving as a reference for processing and assembly are formed on the diagonal line of the upper substrate 15.
Next, in the fitting ridge forming step, as shown in FIG. 5A, the fitting ridge 16 having an isosceles trapezoidal cross section is formed on the upper surface 15b side of the upper substrate 15 as a fitting groove. 11 (see FIGS. 2A and 4A).
Subsequently, in the step portion forming step, as shown in FIG. 5B, a step portion 17 deeper than the bottom portion 16 b of the fitting ridge portion 16 is formed on the outer periphery of the fitting ridge portion 16.
Finally, in the air hole drilling step, as shown in FIG. 4, air holes 18 penetrating the upper substrate 15 are drilled at positions corresponding to the opening flow paths 3b in FIG.
In addition, the hole diameter of the air holes 13 and 18 should just be below the hole diameter of the open flow paths 3a and 3b (refer FIG. 1) by the magnitude | size which can fully circulate air. Moreover, since the air holes 13 and 18 should just be able to discharge | emit the air in the inside of the groove flow-path groove | channel 12 used as the internal flow path 2, you may provide only any one.

FIG. 6 is a perspective view showing a substrate laminating process of the flat plate flow path manufacturing method according to Embodiment 1 of the present invention, and FIG. 7A is an internal view of the flat plate flow path manufacturing method according to Embodiment 1 of the present invention. It is a perspective view which shows a flow-path formation process, FIG.7 (b) is DD sectional view taken on the line of FIG.
6, the lower surface 15a and the upper surface 15b of the upper substrate 15 shown in FIG. 4 are turned upside down, and the fitting protrusions of the upper substrate 15 are inserted into the fitting grooves 11 of the lower substrate 10 shown in FIG. The upper substrate 15 is covered with the lower substrate 10 so that the part 16 is fitted. At this time, a positioning pin (not shown) is inserted into the positioning hole 10c of the lower substrate 10 and the positioning hole 15c of the upper substrate 15, thereby positioning and fixing the lower substrate 10 and the upper substrate 15.
Thereby, as shown in FIG.7 (b), the inclination groove | channel (slanted side) 11a, 16a of the fitting concave groove 11 and the fitting convex strip part 16 closely_contact | adheres. As shown in FIGS. 2 (a) and 4 (a), the inclined portions 11a and 16a are arranged not only on both sides in the width direction of the fitting groove 11 and fitting protrusion 16, but also on both ends in the longitudinal direction. By forming also in this way, it is possible to reliably seal the entire circumference of the groove channel groove 12 serving as the internal channel 2.
In addition, a common tool (blade) can be used for the processing of the fitting groove 11 and the fitting protrusion 16, and the angles of the inclined portions (slope sides) 11a, 16a can be easily aligned. it can. In addition, since the angles of the inclined portions (slope sides) 11a and 16a are the same on the left and right for each of the fitting groove 11 and the fitting projection 16, production can be performed in a short time using the same blade. Excellent in properties.

Next, as shown in FIG. 7, in the internal flow path forming step, the lower substrate 10 and the upper substrate 15 stacked in the substrate stacking step are heated to tilt the fitting groove 11 and the fitting protrusion 16. The internal flow path 2 is formed by heat-sealing the portions (slanted sides) 11 a and 16 a and closing the opening of the fitting groove 11 with the fitting protrusion 16. By forming the height of the fitting ridge portion 16 to be equal to or greater than the depth of the fitting groove groove 11, the entire surface of the inclined portion (oblique side) 11 a of the fitting groove groove 11 is formed on the fitting protrusion 16. It can be covered with the inclined portion (slope side) 16a, the joining area is maximized, and the sealing reliability of the internal flow path 2 is excellent. In addition, it is not always necessary to cover the entire inclined portion (slanted side) 11a of the fitting groove 11 with the inclined portion (slanted side) 16a of the fitting convex portion 16, and the height of the fitting convex portion 16 is the fitting height. Even when it is shorter than the depth of the joint groove 11, the periphery of the inclined portion (slanted side) 11a of the fitting groove 11 on the side of the groove channel 12 is closed by the fitting protrusion 16 and the internal channel is closed. There is no problem as long as the sealing property of 2 can be secured.
In the heating in the internal flow path forming step, the air expanded in the internal flow path 2 from the air holes 13 and 18 drilled in the air hole drilling step is used as the lower substrate 10 and the upper substrate 15. Thus, the lower substrate 10 and the upper substrate 15 can be reliably adhered to each other.

Next, the opening channels 3a and 3b are formed by the opening channel forming step. As shown in FIG. 7B, the positions of the air holes 13 and 18 drilled in the air hole drilling step and the openings The positions of the opening channels 3a and 3b formed in the channel forming step can be matched in advance, and the hole diameters of the air holes 13 and 18 are equal to the hole diameters of the opening channels 3a and 3b, so that sufficient accuracy is maintained. If this is the case, this step can be omitted and the productivity is excellent.
In addition, when the hole diameter of the air holes 13 and 18 is smaller than the hole diameter of the opening flow paths 3a and 3b, when the air holes 13 and 18 are deformed, or due to a problem in design, the opening flow paths 3a and 3b If the air holes 13 and 18 cannot be drilled at the positions, it is necessary to form the opening channels 3a and 3b by the opening channel forming step.
If the air holes 13 and 18 cannot be drilled in accordance with the positions of the open channels 3a and 3b due to design reasons, an air hole closing step is required. After the lid members formed in a columnar shape or the like are fitted in the air holes 13 and 18, they can be closed by welding. In addition, when the hole diameter of the air holes 13 and 18 is comparatively small or when the depth is shallow, it can be expected that the air holes 13 and 18 are naturally clogged by thermal expansion due to heating in the internal flow path forming process. From the surface, it is desirable to perform the air hole closing step.

Next, in the substrate cutting process, unnecessary portions of the lower substrate 10 and the upper substrate 15 are cut from the state shown in FIG. 7 to obtain the flat plate channel 1 shown in FIG. At this time, a part on the upper surface 15b side of the fitting protrusion 16 that is heat-sealed to the lower substrate 10 and integrated with the lower substrate 10 serves as a closing member to close the opening of the groove channel groove 12. Will do. Since unnecessary portions can be removed in the substrate cutting process, the initial lower substrate 10 and the upper substrate 15 can have a sufficient thickness to reduce warpage and undulation, and at the time of heating in the internal flow path forming step. Thermal deformation can be effectively prevented and the shape stability is excellent. Further, since pipe-like external connection portions 4a and 4b can be formed on the outer circumferences of the open flow passages 3a and 3b, pipe joints and measuring instruments are connected to the open flow passages 3a and 3b via the external connection portions 4a and 4b. Or other flat plate channels or the like can be easily connected. In particular, when external threaded parts are formed on the outer periphery of the external connection parts 4a and 4b, or female threaded parts are formed on the inner periphery, pipe joints and measuring instruments can be easily connected and assembled. Excellent in maintainability and maintenance. Moreover, when the external connection parts 4a and 4b are formed in various joint shapes including a plurality of connection parts in addition to the cylindrical shape, it is possible to easily connect with complicated piping.
In addition to forming the external connection portions 4a and 4b integrally with the flat plate flow path 1 by the substrate cutting process, the external connection portion forming process includes the lower surface 1a and the upper surface of the flat flow path 1 communicating with the internal flow path 2. The pipe-like external connection portions 4a and 4b protruding to 1b can be arranged by welding.
When the external connection portions 4a and 4b are disposed by welding, the material of the external connection portions 4a and 4b is preferably PFA. Moreover, when a convex strip part or a concave strip part is formed in the welding surface with the edge part of the external connection part 4a, 4b of the lower surface 1a of the flat plate flow path 1b, and the upper surface 1b, the end surface of the external connection part 4a, 4b is ensured. It can be abutted and welded to the ridges or ridges and has excellent sealing reliability.

The flat plate channel 1 can circulate fluid by using one open channel 3a as a supply port and another open channel 3b as a discharge port, and can be used as a thin and light heat exchanger.
Further, the flat flow path 1 does not require sealing means such as packing because the internal flow path 2 is sealed by the integrated lower substrate 10 and the closing member. Moreover, it can be used as a circulating chemical heater by simply sticking a metal plate having good thermal conductivity such as aluminum to the lower surface 1a and the upper surface 1b of the flat plate channel 1 and disposing a heater for heating.
In addition, since the several flat plate flow path 1 can be connected via the external connection parts 4a and 4b, the piping of a long flow path is saved by arrange | positioning so that the several flat plate flow path 1 may be laminated | stacked. Can fit in. In that case, the pattern of the internal flow path 2 of each flat plate flow path 1 can be arbitrarily selected, complicated piping can be easily realized, and the productivity and versatility are excellent.
Also, when the number of open channels is increased to 3 or more, different types of fluids are supplied from two or more open channels (supply ports), mixed and reacted in the internal channel 2 It can be taken out from the remaining one open channel (discharge port) and can be used as a micromixer or a microreactor.

Next, a modified example of the internal flow path of the flat plate flow path according to Embodiment 1 of the present invention will be described.
FIG. 8A is a main part plan view showing a first modification of the internal flow path of the flat plate flow path in the first embodiment of the present invention, and FIG. 8B is the first embodiment of the present invention. It is a principal part top view which shows the 2nd modification of the internal flow path of a flat plate flow path.
In FIG. 8A, the internal flow path 2a in the first modified example is different from that of the first embodiment in that the buffer portion 20 formed wider than the concave flow path groove 12 in the middle of the internal flow path 2a. It is a point which has. Thereby, it is possible to prevent the accumulation of heat and the short circuit passage of the fluid (short path), and it can be suitably used particularly as a micromixer or a microreactor. In addition, about the buffer part 20, what is necessary is just to form the corresponding fitting groove groove and fitting protrusion part wide, and it is the same as that of Embodiment 1 about a board | substrate lamination process and an internal flow path formation process.
In FIG. 8 (b), the internal flow path 2b in the second modification is different from that of the first embodiment in that one wide concave channel groove 22a and two narrow concave channel grooves. 22b is connected and the internal flow path 2b is formed. By branching or joining in the middle of the internal flow path 2b, single or plural fluids can be separated and mixed, and can be suitably used particularly as a micromixer or a microreactor. In addition, the width | variety of each concave channel groove | channel 22a, 22b can be selected suitably. Further, the cross-sectional area may be uniform in each of the concave channel grooves 22a and 22b, or the cross-sectional area can be increased or decreased step by step.

  In the present embodiment, the substantially rectangular flat plate channel 1 is formed by the substantially rectangular lower substrate 10 and the upper substrate 15, but the shapes of the lower substrate 10, the upper substrate 15, and the finished flat plate channel 1 are substantially the same. In addition to the rectangular shape, it can be formed in various shapes such as a substantially circular shape, a substantially L shape, a substantially T shape, and a substantially cross shape. Instead of forming both the lower substrate 10 and the upper substrate 15 with modified PTFE or a resin composition containing modified PTFE as a main component, only one of them is modified PTFE or modified PTFE as a main component. You may form with a resin composition. Further, as the material of the lower substrate 10 and the upper substrate 15, a fluororesin such as ethylene tetrafluoride (PTFE, PFA, FEP, ETFE) or polyvinylidene fluoride (PVDF), or a thermoplastic resin such as polyether ether ketone may be used. Similarly, the flat plate channel 1 can be formed.

  The cross-sectional shape of the internal flow path 2 is determined by the cross-sectional shape of the concave flow path groove 12, and can be formed in various shapes such as a substantially inverted triangular shape and a substantially semicircular shape in addition to a substantially rectangular shape. When the cross-sectional shape of the groove channel 12 is formed in a trapezoidal shape or a substantially inverted triangular shape having a wide upper surface and a lower lower surface, the fitting groove 11 and the groove 12 are formed. Can be formed simultaneously. If a trapezoidal or inverted triangular groove having a depth obtained by combining the depth of the fitting groove 11 and the depth of the groove 12 is formed, the height of the fitting protrusion 16 is fitted. This is because the depth of the concave groove 11 is reached, and the remainder becomes the internal flow path 2. Further, when the bottom 12a and the peripheral wall 12b of the groove 12 are provided with stepped or inclined irregularities, the fluid flow can be turbulent to prevent heat accumulation and fluid short circuit passage (short path). . Thereby, when it uses as a heat exchanger, a circulation type chemical heater, etc., it can prevent that the one part inside flow path becomes extremely high temperature, or the efficiency of heat exchange falls.

The arrangement and number of the open channels 3a and 3b are not limited to the present embodiment, and an arbitrary number can be provided in any position and direction other than the end of the internal channel 2. Further, the diameters of the respective opening channels 3a and 3b do not have to be the same, and the respective opening diameters can be appropriately selected according to the physical properties of the fluid, the mixing ratio when mixing a plurality of fluids, and the like.
In addition, when a plurality of independent (not communicating) internal flow paths 2 are formed in one flat flow path 1, a plurality of internal flow paths 2 through which different types of fluids flow can be integrated to save space. Excellent.
Furthermore, the openings of the open channels 3a and 3b may be formed on the side surface of the flat plate channel 1 in addition to the lower surface 1a and the upper surface 1b of the flat plate channel 1. When the open flow channels 3a and 3b are opened on the side surface of the flat plate flow channel 1, the connecting portion between the flat plate flow channel 1 and the tubular member, the pipe joint or the like is disposed on the side surface of the flat plate flow channel 1. There is no protrusion on the lower surface 1a or the upper surface 1b, and the flat plate flow channels 1 or the flat plate flow channel 1 and other members can be arranged in close contact with or close to each other on the lower surface 1a or the upper surface 1b. Excellent flexibility.

As described above, since the flat plate flow path in the first embodiment is configured, it has the following effects.
(1) Since the fitting protrusion 16 of the lower substrate 10 made of a thermoplastic resin and the upper substrate 15 serving as a closing member can be directly heat-sealed, the bonding strength can be increased and the lower substrate 10 and the closing member can be integrated to prevent the occurrence of joint spots and pinholes, and the leakage of fluid flowing through the internal flow path 2 can be prevented.
(2) Since the internal flow path 2 communicating with the two or more open flow paths 3a and 3b is formed by being sandwiched between the lower substrate 10 and the upper substrate 15, a pipe joint such as cheese or elbow is not required and the piping is compact. In addition, the pipes have no gaps, steps, or seams, making it difficult for dust to enter, making the fluid flow smooth and controlling contamination of manufacturing equipment, controlling microbubbles, and controlling flow rate. Etc. can be easily performed.
(3) By having at least two or more open flow paths 3a and 3b communicating with the internal flow path 2, the open flow paths 3a and 3b are connected to pipe joints such as cheese and elbows and tubular members such as tubes. Can be easily incorporated in the middle of existing piping. Moreover, tubular members, such as various pipe joints and tubes, can be formed in the open channels 3a and 3b.
(4) Since the lower substrate 10 and the closing member are integrated into a flat plate shape to form the internal flow path 2, it is lightweight, easy to assemble, and excellent in handleability.
(5) Since the internal flow path 2 is formed by covering the concave flow path groove 12 formed in the lower substrate 10 with the closing member, the pattern of the internal flow path 2 can be freely formed, and is versatile. Excellent design flexibility. In particular, the flow of fluid is smoothed and pressure loss is achieved by forming the connecting part of the straight line part of the flow path in a curved line with an arc etc. so that it does not bend or intersect at a steep angle And can prevent stress on the fluid and generation of bubbles.
(6) By having two open flow passages 3a and 3b formed in communication with the internal flow passage 2, one open flow passage 3a serves as a supply port, and the other open flow passage 3b serves as a discharge port. Can be circulated. When there are three or more open channels, different types of fluids are supplied using two or more open channels as supply ports, mixed and reacted in the internal channel 2 to discharge the remaining open channels. It can be taken out as an exit.
(7) The closing member covered by the groove channel groove 12 is heat-fused and integrated with the lower substrate 10 at the inclined portion 11a formed on the upper end side of the peripheral wall portion 12b of the groove channel groove 12. Therefore, the groove channel 12 and the closing member can be easily aligned with each other to prevent displacement, and even if the lower substrate 10 or the closing member (upper substrate 15) is warped, both are securely adhered to each other to prevent leakage. Generation | occurrence | production can be prevented and it is excellent in the shape stability of the internal flow path 2, joint strength, and the reliability of sealing.
(8) By forming at least one of the lower substrate 10 and the closing member (upper substrate 15) with a modified PTFE or a resin composition containing the modified PTFE as a main component, the processing is easy and the mass productivity is excellent. Excellent reproducibility of dimensional accuracy and sealing reliability.
(9) By forming the lower substrate 10 and the blocking member (upper substrate 15) with a modified PTFE or a resin composition containing a modified PTFE as a main component, the chemical stability and corrosion resistance are excellent, and only pure water is used. In addition, various fluids such as highly erodible chemicals and solvents can be used, resulting in high added value, excellent versatility and durability.
(10) Since the external connection portions 4a and 4b that are communicated with the open flow channel 2 and are formed or disposed so as to protrude from the surface of the lower substrate 10 are provided, the open flow channels 3a and 4b are provided via the external connection portions 4a and 4b. Pipe joints, measuring instruments and the like can be easily connected to 3b and the workability is excellent.

Since the manufacturing method of the flat plate flow path in Embodiment 1 is comprised as mentioned above, it has the following effects.
(1) Since the groove channel groove 12 is formed in the depth direction of the fitting groove groove 11 by the groove channel groove forming step, the groove channel groove 12 is formed continuously with the bottom surface portion 11b of the fitting groove groove 11. Even if the fitting ridge 16 is fitted into the groove 11, the groove channel 12 is not crushed, the internal channel 2 can be formed reliably, and the dimensional accuracy is excellent in reproducibility.
(2) The fitting groove 11 has a trapezoidal cross section with a width on the upper surface side and a width on the lower surface side, and the fitting protrusion 16 is fitted in correspondence with the fitting groove 11. By having the trapezoidal cross section to be combined, when the upper substrate 15 is covered on the lower substrate 10 in the substrate lamination step, the fitting protrusion 16 can be easily fitted into the fitting groove 11. Therefore, positioning is easy, positional displacement due to heat fusion hardly occurs, and the flow path shape is highly reliable.
(3) The fitting groove 11 of the lower substrate 10 and the fitting protrusion 16 of the upper substrate 15 can be integrated by heat fusion, and leakage of fluid flowing through the internal flow path 2 can be ensured. Can be prevented.
(4) Since the fitting groove 11 has a trapezoidal cross section with a wide width on the upper surface 10b side and a narrow width on the lower surface 10a side, the inclined portion of the fitting groove 11 and the fitting protrusion 16 (Slant sides) 11a and 16a can be brought into close contact with each other to increase the contact area. Therefore, even when warpage or the like is generated in the lower substrate 10 or the upper substrate 15, the fitting ridge portion 16 causes the groove flow path. The internal flow path 2 can be formed by reliably closing the opening of the groove 12, and the bonding strength and the sealing reliability can be improved.
(5) In the air hole drilling step, by forming air holes 13 and 18 having one end opened on the surface of the lower substrate 10 and communicating with the concave channel groove 12, When the substrate 10 and the upper substrate 15 are heated, the air expanded inside the concave channel groove 12 can be released to the outside from the air holes 13, 18, and the fitting convex portion 16 of the upper substrate 15 is moved downward. The internal flow path 2 can be formed by tightly closing the concave flow path groove 12 by closely contacting the fitting concave groove 11 of the substrate 10.
(6) Since the internal channel 2 can be formed by closing the opening portion of the concave channel groove 12 formed in the lower substrate 10 with the fitting convex portion 16, the lower substrate 10 is formed in the concave channel groove forming step. It is possible to form a flow path two-dimensionally in an arbitrary pattern in the plane, and the flow path has a high degree of freedom and excellent versatility.
(7) Since the fitting protrusions 16 are formed on the surface of the upper substrate 10 in correspondence with the fitting grooves 11 by the fitting protrusion forming step, the fitting protrusions formed in various patterns. The portion 16 can be handled integrally with the upper substrate 15, the internal flow path 2 can be formed simply by laminating the lower substrate 10 and the upper substrate 15 in the substrate lamination process, the number of parts is small, and the workability and mass productivity are excellent. .
(8) Supplying fluid to the internal flow path 2 and the internal flow path by forming two or more open flow paths 3a and 3b communicating with the internal flow path 2 in the lower substrate 10 in the open flow path forming step It is possible to discharge the fluid from 2 and form a flat plate flow channel 1 having excellent versatility that can perform operations such as fluid circulation, fluid mixing in the internal flow channel 2, and reaction. it can.
(9) By cutting unnecessary portions of the lower substrate 10 and the upper substrate 15 in the substrate cutting step, the thickness of the entire plate channel 1 and the thickness of the wall on the upper surface 1b side and the lower surface 1a side of the internal channel 2 can be arbitrarily set. Therefore, it is possible to freely set the thermal conductivity and heat insulation properties according to the application, and it is excellent in design flexibility and versatility.
(10) In the step portion forming step, the lower substrate 10 and the upper substrate 15 are formed in the substrate stacking step by forming the step portion 17 deeper than the bottom portion 16b of the fitting ridge portion 16 on the outer periphery of the fitting ridge portion 16. When the two are stacked, they are brought into contact with and closely contact only with the fitting groove 11 and the fitting protrusion 16, and are heated in the internal flow path forming step, so that the fitting groove 11 and the fitting protrusion are heated. Since only the inclined portions (slope sides) 11a, 16a of the strip portion 16 are heat-sealed and integrated, the bonding area is small, the heating time can be shortened, the productivity is excellent, and the lower substrate 10 and the upper substrate 15 are provided. Is less susceptible to heat, and can reduce the amount of warpage and the like, and has excellent reproducibility of dimensional accuracy.
(11) The lower substrate 10 and the upper substrate 15 are not joined over the entire surface, and the outer periphery of the fitting ridge 16 that is the end of the joint surface between the fitting groove 11 and the fitting ridge 16 is visually observed. Therefore, it is easy to check for leaks in the internal flow path 2, and it is possible to reliably prevent the introduction of defective products, to facilitate quality control, and to improve product yield.
(12) When processing the fitting groove 11 and the fitting protrusion 16, the angles of the inclined portions (slanted sides) 11 a and 16 a are the same (symmetrical) on the left and right, thereby making the fitting groove 11 and fitting The cross-sectional shape of the joint ridge portion 16 can be an isosceles trapezoid, which is easy to process and excellent in productivity.
(13) Since the shape (inclination angle) of the joint portion is bilaterally symmetric and the joint area is equal on the left and right sides of the concave channel groove 12, when the pressure is applied in the internal channel formation step, the joint portion is evenly pressurized. Thus, the fitting groove 11 and the fitting protrusion 16 can be reliably brought into close contact with each other, and there is no joining spot and the joining strength can be improved.
(14) Since the width on the lower surface 10a side (bottom surface portion 11b) of the fitting groove 11 and the width on the upper end side of the groove channel 12 are the same, the fitting groove 11 and the groove flow. The positioning of the road groove 12 is easy and the productivity is excellent.
(15) A concave channel groove 12 is formed continuously at the lower end of the inclined portion 11 a of the fitting concave groove 11, and a flat step is formed between the fitting concave groove 11 and the concave channel groove 12. Since the portion is not formed, the fitting groove 11 and the fitting ridge 16 can be reliably brought into close contact with the inclined portions 11a and 16a, and the joint strength and the sealing reliability can be improved. it can.
(16) By forming the height of the fitting ridge 16 higher than the depth of the fitting groove 11, the variation in dimensions can be absorbed and the inclined portion (slanted side) 16a of the fitting ridge 16 can be obtained. The fitting groove 11 can be reliably closed, and the sealing reliability can be improved.
(17) Opening channels 3a and 3b are formed at the positions of the air holes 12 and 18 in the opening channel forming step, so that the completed flat plate channel 1 has no openings other than the opening channels 3a and 3b. Further, the process of closing the air holes 13 and 18 is unnecessary, and the productivity is excellent, and fluid leakage does not occur and the reliability is excellent.

(Embodiment 2)
FIG. 9 is a plan view showing an internal flow path of a flat plate flow path according to Embodiment 2 of the present invention.
The flat plate channel in the second embodiment is different from the first embodiment in that two independent (not communicating) internal channels 2c and 2d are formed in one flat plate channel.
One internal flow path 2c has an open flow path connection portion 12c formed at both ends of a concave flow path groove 12 formed in a meandering manner.
The other internal flow path 2d is connected by four narrow flow path grooves 32a between the four open flow path connection portions 12d to which the open flow path serving as the supply port is connected and the reaction portion (liquid reservoir) 20a. Then, the wide open groove channel 32b is connected between the open flow channel connecting portion 12e to which the open flow channel serving as the discharge port is connected and the reaction portion (liquid reservoir) 20a.
In addition, since the manufacturing method of the flat plate flow path in Embodiment 2 is the same as that of Embodiment 1, description is abbreviate | omitted.

In FIG. 9, by having two independent (not communicating) internal flow paths 2c, 2d in one flat flow path, each of the internal flow paths 2c, 2d can be used for different purposes. The internal flow path 2d can supply up to four types of chemical solutions from the open flow path connected to the open flow path connection portion 12d, and reacts them in the reaction section (liquid reservoir) 20a to connect the open flow path. It can take out from the opening flow path connected to the part 12e. At this time, the diameter of the open flow channel connected to the open flow channel connecting portions 12d and 12e can be appropriately selected according to the physical properties of the fluid, the mixing ratio when mixing a plurality of fluids, and the like.
In addition to using the internal flow paths 2c and 2d as independent pipes, the internal flow path 2c can also be used as a medium flow path for temperature control of the entire flat plate flow path, and a heater for heating is used. In addition, heating of the reaction liquid in the internal flow path 2d can be easily performed.

As described above, since the flat plate flow path in the second embodiment is configured, in addition to the first embodiment, the following operation is provided.
(1) By having a plurality of independent (not communicating) internal flow paths 2c and 2d in one flat flow path, a plurality of pipes through which different kinds of fluids flow can be integrated, and space saving is excellent. .
(2) It can be used for various purposes according to the configuration of each internal flow path 2c, 2d, the pattern of the flow path, etc. and is excellent in versatility.

  In the present invention, pipes for supplying, mixing, reacting, and discharging various fluids are two-dimensionally integrated and integrated in a flat plate, so that they are thin and excellent in compactness, and can be easily reduced in size and weight. It is easy to handle, has no gaps, steps, joints, etc., and is not easily contaminated with dust. The fluid flow is smooth, preventing contamination such as impurities in the flow path, and improving chemical stability. Providing a flat plate channel with excellent reliability that can reliably prevent fluid leaks, and two-dimensionally integrating and integrally forming piping for supplying, mixing, reacting, and discharging various fluids It is possible to provide a method for manufacturing a flat plate flow channel that has a high degree of freedom in flow channel design and excellent versatility, and is excellent in reproducibility of dimensional accuracy, bonding strength, and sealing reliability. Realize faster and more efficient chemical reactions It is possible.

(A) Perspective perspective view showing a flat plate channel in Embodiment 1 of the present invention (b) AA sectional view taken along line AA in FIG. (A) Perspective view showing a lower substrate used in the substrate laminating step of the flat plate channel manufacturing method according to Embodiment 1 of the present invention (b) Cross-sectional view taken along line BB in FIG. 2 (a) (A) Main part expanded sectional view which shows the fitting groove formation process of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention (b) Of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention Enlarged cross-sectional view of the main part showing the step of forming the groove channel (A) Perspective view showing an upper substrate used in the substrate laminating step of the flat plate channel manufacturing method according to the first embodiment of the present invention (b) Cross-sectional view taken along line CC in FIG. 4 (a) (A) Main part expanded sectional view which shows the fitting protrusion part formation process of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention (b) Of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention Enlarged sectional view of the main part showing the step forming process The perspective view which shows the board | substrate lamination process of the manufacturing method of the flat plate flow path in Embodiment 1 of this invention. (A) Perspective view showing an internal flow path forming step of the flat plate flow path manufacturing method according to Embodiment 1 of the present invention (b) Cross-sectional view taken along line DD in FIG. 7 (a) (A) The principal part top view which shows the 1st modification of the internal flow path of the flat plate flow path in Embodiment 1 of this invention (b) The 1st modification of the internal flow path of the flat flow path in Embodiment 1 of this invention. The principal part top view which shows the modification of 2 The top view which shows the internal flow path of the flat plate flow path in Embodiment 2 of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Flat plate flow path 1a, 10a, 15a Lower surface 1b, 10b, 15b Upper surface 2, 2a, 2b, 2c, 2d Internal flow path 3a, 3b Open flow path 4a, 4b External connection part 5, 10c, 15c Positioning hole 6 Fixing hole DESCRIPTION OF SYMBOLS 10 Lower board | substrate 11 Fitting groove groove | channel 11a, 16a Inclination part 11b Bottom surface part 12, 22a, 22b, 32a, 32b Groove channel groove | channel 12a, 16b Bottom part 12b Perimeter wall part 12c, 12d, 12e Opening channel connection part 13, 18 Air hole 15 Upper substrate 16 Fitting protrusion 17 Step part 20 Buffer part 20a Reaction part

Claims (11)

  A flat plate flow channel made of a thermoplastic resin having an internal flow channel and at least two open flow channels formed in communication with the internal flow channel, wherein the internal flow channel is formed on the surface of the lower substrate And the inclined portion formed on the upper end side of the peripheral wall of the concave channel groove, and is heat-sealed to the lower substrate at the inclined portion and covered with the inclined channel groove. And a blocking member integrated with the lower substrate. At least one of the lower substrate and the closing member is polymerized by adding one or more perfluorinated ethers represented by chemical formulas (Chemical Formula 1), (Chemical Formula 2), and (Chemical Formula 3) as a modifier. The flat plate flow path according to claim 1, wherein the flat plate channel is formed of a PTFE (hereinafter referred to as modified PTFE) or a resin composition mainly composed of modified PTFE.

  The flat plate flow path according to claim 1 or 2, further comprising an external connection portion that communicates with the open flow path and is formed or disposed so as to protrude from a surface or a side surface of the lower substrate or the blocking member.   A fitting groove forming step for forming a fitting groove having a trapezoidal cross section having a wide upper surface and a lower lower surface on the surface of the lower substrate made of thermoplastic resin; and the fitting groove A groove channel groove forming step of forming a groove channel groove continuously with the bottom surface of the fitting groove groove in a depth direction of the groove, and the fitting recess on the surface of the upper substrate made of thermoplastic resin. A fitting ridge forming step for forming a fitting ridge having a trapezoidal cross section to be fitted into the groove, and one end of which is open on the surface or side surface of the lower substrate and / or the upper substrate and the concave An air hole drilling step for drilling an air hole communicating with the strip channel groove, and covering the upper substrate on the lower substrate so that the fitting convex groove portion is fitted into the fitting concave groove. A step of laminating the substrate, and heating the lower substrate and the upper substrate to thermally bond the oblique sides of the fitting groove and the fitting protrusion to each other. Manufacturing method of the flat panel passage and having an internal passageway forming step of forming an internal passage opening of Michimizo and closed by the fitting convex strip portion. 5. The method of manufacturing a flat plate flow channel according to claim 4, further comprising an open flow channel forming step of forming two or more open flow channels communicating with the internal flow channel in the lower substrate or the upper substrate. 6. The flat plate flow path manufacturing method according to claim 4, further comprising a substrate cutting step of cutting unnecessary portions of the lower substrate and / or the upper substrate.   7. The method according to claim 4, further comprising a stepped portion forming step of forming a stepped portion deeper than a bottom portion of the fitting protruding ridge portion on an outer periphery of the fitting protruding ridge portion. A manufacturing method of a flat channel.   8. The method for manufacturing a flat plate channel according to claim 4, wherein cross-sectional shapes of the fitting groove and the fitting protrusion are isosceles trapezoids.   9. The flat plate channel according to claim 4, wherein a width of a lower end portion of the fitting groove groove and a width of an upper end portion of the groove channel groove are the same. Manufacturing method.   The method for manufacturing a flat plate channel according to any one of claims 4 to 9, wherein the height of the fitting protrusion is higher than the depth of the fitting groove. . The method for producing a flat plate flow path according to any one of claims 5 to 10, wherein the position of the open flow path formed in the open flow path forming step is the position of the air hole.

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