JP4850428B2 - Manufacturing method of slider - Google Patents

Description

  The present invention mainly relates to a slider used in a hard disk drive and a manufacturing method thereof.

  Hard disk drives are widely used for recording digital information as high-speed, large-capacity, high-reliability, low-cost recording media, and the recording density of hard disk drives has exceeded 100 gigabits per square inch due to many years of technological development. is there. A hard disk drive is provided with a plurality of head arm assemblies each having an arm and a head gimbal assembly provided at the tip of the arm in accordance with the number of magnetic disks as recording media. The head gimbal assembly has a magnetic head slider (hereinafter referred to as slider), and the slider is provided with at least one of a writing element for writing information to the recording medium and a reading element for reading information from the recording medium. The read / write portion is provided. The read / write part is provided at one end of the slider. The surface where the slider faces the recording medium is called the medium facing surface (ABS).

  When the slider records and reproduces information on the recording medium, an air flow flows between the slider and the recording medium rotating at high speed. The airflow flows from the end opposite to the end where the read / write portion is provided, and exits from the end where the read / write portion is provided to the outside of the slider. The slider floats slightly from the recording medium by this air flow. Thus, the distance between the ABS and the surface of the recording medium when flying by an air flow is called the flying height.

  Since the bit length of the recording medium is shortened when the flying height is reduced, reducing the flying height is effective for increasing the density of the recording medium. For this reason, it is required to further suppress the flying height in response to the recent demand for higher recording density of hard disk drives.

  By the way, an uneven portion for adjusting the air flow is formed on the medium facing surface of the slider in order to allow the air flow to appropriately flow between the slider and the recording medium. The convex part includes a read / write part and a rail part extending in the air flow inflow direction. However, if the read / write part and the concave part are connected at an angle close to 90 °, that is, at an edge part formed at a substantially right angle, eddy currents are generated near the wall surface of the edge part, and the air flow is unstable. In addition, the edge portion is easily lost, which is not preferable. Therefore, the read / write part and the recess may be connected by an inclined part. By providing the inclined portion, the airflow smoothly flows along the inclined portion into a minute space between the read / write portion and the recording medium. The inclined portion may be a curved stepped inclined structure (see FIG. 3D of Patent Document 1 and Patent Document 2).

In order to form such an inclined portion, ion milling is used. Ion milling is a method in which ions in plasma generated in an ion source chamber are extracted as an ion beam by an extraction electrode, and the surface of a workpiece such as a substrate is milled in a slider manufacturing process. By setting the angle between the traveling direction of the ion beam and the normal line of the workpiece surface to a value other than 90 degrees (that is, making the ion beam obliquely incident) and rotating the workpiece around the normal line, As a result, a shadowed portion of the resist is generated, and the inclined portion can be easily formed. Reactive ion etching (RIE) may be used to form the inclined portion (see Patent Document 3). In RIE, the etching rate can be increased by performing milling in a reactive gas (CF ₄ , CH ₂ , H _2, etc.) atmosphere.
JP 2001-229514 A JP 2002-312916 A JP 2003-323707 A

  As described above, suppressing the flying height of the slider is important in achieving high recording density of the hard disk drive. For that purpose, it is important to control the air flow more smoothly, and it is desirable that the inclined portion has a more optimized shape rather than a simple plane or curved surface.

  On the other hand, in order to suppress the flying height of the slider, it is also important to suppress variations in the flying height. For this purpose, it is important to suppress the variation in the length of the skirt of the inclined portion (that is, the length of the inclined surface) in which large buoyancy is generated, and it is desired to manufacture the inclined portion with high accuracy and no variation. In the prior art, from this point of view, an ion milling method that allows easy adjustment of the angle of the inclined portion and formation of the curved inclined portion has been used. However, in the ion milling method, the manufacturing variation in the length of the inclined portion may reach 2 to 5 times the target length, and the flying height variation is large. Further, when used for forming ceramics with high hardness, there is a problem that the etching rate is very slow and the productivity is lowered.

  In addition, unlike ion milling in which the etching direction can be determined by the incident direction of ions, RIE uses chemical etching with a reactive gas, so the etching direction cannot be controlled, and the angle of the inclined portion is not controlled. Adjustment and formation of specially shaped slope structures were difficult. In other words, in RIE, it takes several seconds for the plasma to stabilize after applying high-frequency power, and during that time, etching progresses by 10 nm or more, and etching during this unstable period causes variation, as described above. It was difficult to accurately form a simple slope structure.

  In view of the above situation, an object of the present invention is to provide a slider having an inclined portion structure with small variation in buoyancy, and a slider manufacturing method capable of efficiently manufacturing the inclined portion with high accuracy, suppressing variation. It is in.

The slider manufacturing method of the present invention includes a substrate, a writing element provided as a convex portion on the surface of the substrate facing the recording medium, and writing information to the recording medium, and reading information from the recording medium. A read / write unit provided with at least one of the reading elements to be performed, a recess on the medium facing surface located on the air flow inflow direction when the recording medium is driven to rotate , and a straight line connected to the surface of the read / write unit a first inclined portion of Jo, a method of manufacturing a slider having a second inclined portion straight connected to the first inclined portion and the concave surface, an inclined portion that have a, a. This manufacturing method includes the Luz step to form a resist read-write portion is formed partially on the substrate, the substrate on which the resist is formed by using a first reactive gas containing CF ₄ gas, reactive is etched by ion etching to form a first inclined portion in a portion adjacent to resist air stream inflow direction of the substrate, a first inclined portion forming step, a substrate first inclined portion is formed Etching by a reactive ion etching method using a second reactive gas containing CF ₄ gas and C ₂ H ₂ gas, and on the surface of the first inclined portion and adjacent to the first inclined portion. Then, a deposit made of carbon and diamond-like carbon generated by C ₂ H ₂ gas is deposited on the surface of the substrate extending in the opposite direction of the resist , and the substrate on which the deposit is deposited is used as a second reaction gas. Use reactive ion etch Etched with grayed method, the second inclined portion recess us good beauty, inclination angle .theta.2 with respect to the concave portion of the second inclined portion (although, .theta.2 is acute) angle of inclination .theta.1 (although the relative recess in the first inclined portion , .theta.1 has formed to be smaller than the acute angle or a right angle), a second inclined portion forming step.

As described above, by etching with the first reactive gas containing CF ₄ gas to form the first inclined portion, etching with the second reactive gas containing CF ₄ gas and C ₂ H ₂ gas is performed. , Carbon and DLC generated by the C ₂ H ₂ gas are deposited on the first inclined portion and the surrounding substrate. Since this deposit protects the first inclined portion and the substrate below the deposit in the subsequent second inclined portion forming step, the progress of etching is compared with the substrate not covered with the deposit. Become slow. For this reason, the inclined part having the shape as described above can be formed.

The first reaction gas may further comprise an Ar gas.

The first inclined portion forming step, the state where the first inclined portion forming step is completed, by changing the reaction gas to the second reaction gas, by performing the error etching, it is preferable to deposit a sediment .

The second inclined portion forming step, after the deposit has been deposited, by performing continue come et etching, it is preferable to form the second inclined portion, a second inclined portion forming step, the reaction It is preferable to form the second inclined portion by performing etching while keeping the gas as the second reaction gas.

You may have the step of removing a resist with an organic type solution after completion | finish of a 2nd inclination part formation step. Further, after the end of the second inclined portion forming step, a deposit may have the step of removing the O ₂ gas.

  As described above, according to the slider of the present invention, it is possible to provide a slider having an inclined portion structure in which variation in buoyancy is small by forming the inclined portion into a multistage inclined structure in which surfaces having two or more angles are combined. be able to. In addition, according to the slider manufacturing method of the present invention, such a multi-step slope structure can be accurately manufactured by the reactive ion etching method, so that manufacturing efficiency can be improved, such as shortening of manufacturing time.

  Hereinafter, a slider and a method for manufacturing the slider according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view of a head arm assembly having a slider at the tip. A plurality of head arm assemblies 1 are provided in the hard disk device (see FIG. 11) according to the number of disks. The head arm assembly 1 includes an arm 11 and a head gimbal assembly 2 provided at the tip of the arm 11, and the other end of the arm 11 is supported by a rotating shaft 12. The head gimbal assembly 2 includes a slider 21 having a thin film magnetic head portion 28 (see FIG. 2), a flexure 22 that supports the slider 21, and a load beam 23 that connects the flexure 22 to the arm 11. The head arm assembly 1 rotates about the shaft 12 and positions the slider 21 at a predetermined position with respect to the recording medium P. A combination of the load beam 23 and a base plate 23a for attaching the load beam 23 to the arm 11 may be referred to as a suspension. In FIG. 1, the slider 21 is provided below the recording medium P, but a similar head arm assembly is also provided above the recording medium P.

  FIG. 2 is a perspective view of the slider as seen from the medium facing surface ABS. The slider 21 is displayed in a direction looking down obliquely from the top as in FIG. 1, and a disk-shaped recording medium P that is rotationally driven is provided above the slider 21. The x direction in FIGS. 1 and 2 is the track transverse direction of the recording medium P, the z direction is the circumferential direction of the recording medium P, and the air flow inflow direction while the recording medium P is rotating.

  The slider 21 has a substrate 27 and a thin film magnetic head portion 28 made of a laminate. The slider 21 has a substantially hexahedron shape, and one surface of the six surfaces forms a medium facing surface ABS that faces the recording medium P. The medium facing surface ABS is provided with a read / write portion 24 provided with read / write elements of the thin film magnetic head portion 28 and rail portions 25a and 25b, which form a convex portion 29 of the medium facing surface ABS. ing. An inclined portion 6 connected to the read / write portion 24 is formed in the air flow inflow direction of the read / write portion 24. The remaining portion forms a concave portion 26 of the medium facing surface ABS, and the inclined portion 6 is connected to the air flow inflow direction side of the concave portion 26.

  When the recording medium P rotates, the air flow enters from the air flow inflow direction side of the slider 21 and escapes from the slider 21 from the downstream end in the recording medium traveling direction z where the thin film magnetic head portion 28 is provided. That is, the air flow enters a slight gap between the rail portion 25 b and the recording medium P, is rectified by the rail portions 25 a and 25 b and the inclined portion 6, and enters the gap between the read / write portion 24 and the recording medium P. enter. The air flow generates a downward lift in the y direction in FIGS. 1 and 2, and the slider 21 floats from the surface of the recording medium P.

  FIG. 3 shows a cross-sectional view of the slider shown in FIG. 2 along the line 3-3 in FIG. In FIG. 3, the recording medium P (not shown) extends in the direction perpendicular to the drawing above the medium facing surface ABS. The thin film magnetic head portion 28 has a magnetoresistive effect element that reads magnetic recording from the recording medium P and an inductive magnetic transducer element that writes magnetic recording on the recording medium P, but has only one of them. You can do it. The induction type magnetic conversion element may be either a horizontal recording system that performs recording in the in-plane direction of the recording medium P or a vertical recording system that performs recording in the out-of-plane direction of the recording medium P.

The thin film magnetic head portion 28 is configured by sequentially laminating from the substrate 27 made of a ceramic material such as AlTiC (Al ₂ O ₃ .TiC) on the right side in the drawing toward the left side in the drawing. A shield layer 31 made of, for example, permalloy (NiFe) is formed on the substrate 27 (left side in the figure; the same applies hereinafter) with an insulating layer interposed therebetween. An MR element 32 as a reading element is provided on the shield layer 31 so as to face the medium facing surface ABS. As the MR element 32, an element using a magnetosensitive film showing a magnetoresistance effect, such as an AMR (anisotropic magnetoresistance effect) element, a GMR (giant magnetoresistance effect) element, or a TMR (tunnel magnetoresistance effect) element, is used. Can be used. The MR element 32 is connected to a pair of lead layers (not shown) that send the read signals.

  On the MR element 32, a lower magnetic pole layer 33 made of a magnetic material such as permalloy or CoNiFe that can be formed by a plating method is formed. The lower magnetic pole layer 33 has both a function as a lower magnetic pole layer of the recording head and a function as an upper shield layer of the reproducing head (MR element 32).

  An upper magnetic pole layer 35 is provided on the lower magnetic pole layer 33 via a recording gap 34 for insulation. As the material of the recording gap 34, for example, a nonmagnetic metal material that can be formed by a plating method such as NiP is used. As the material of the upper magnetic pole layer 35, for example, a magnetic material that can be formed by a plating method such as permalloy or CoNiFe is used, and a high saturation magnetic flux density material is particularly preferable. The lower magnetic pole layer 33 and the upper magnetic pole layer 35 are connected by a connecting portion 36 to form a single U-shaped conductor as a whole.

  Between the medium facing surface ABS and the connection portion 36 between the upper magnetic pole layer 35 and the lower magnetic pole layer 33, two-stage coils 37a and 37b made of a conductive material such as copper are provided. The coils 37 a and 37 b are provided around the connection portion 36 and supply magnetic flux to the upper magnetic pole layer 35 and the lower magnetic pole layer 33. The coil 37a is surrounded by the insulating layer 38, and the coil 37b is surrounded by the insulating layers 39 and 40 and insulated from the surroundings. A lead layer (not shown) for receiving a current signal from the outside is connected to the coil 37b. An overcoat layer 41 is formed so as to cover the upper magnetic pole layer 35 and the lead layer. As the material of the overcoat layer 41, for example, an insulating material such as alumina is used.

  In the medium facing surface ABS, the rail portion 25a protrudes most with respect to the recording medium P, and the read / write portion 24 is drawn into the recording medium P by about 1 to 3 nm from the rail portion 25a. The steps of the rail portions 25a and 25b are not necessarily required. On the medium facing surface ABS, a protective film 42 having a thickness of about 1 to 4 nm made of a mixed film of Si and DLC (Diamond like carbon) is formed. The back surface 43 of the medium facing surface ABS of the slider 21 serves as a contact surface with the flexure 22 that supports the slider 21.

  FIG. 4A shows a partially enlarged cross-sectional view in a plane parallel to the yz plane (see FIG. 2) of the inclined portion shown in part A of FIG. The inclined portion 6 has an angle at which a straight line L connecting the read / write portion 24 and the concave portion 26 on the air flow inflow direction side when the recording medium is rotationally driven exceeds 90 ° with respect to the surface of the read / write portion 24. It is formed so as to form α. The inclined portion 6 includes a substantially straight first inclined portion 61 and a substantially straight second inclined portion 62. The first inclined portion 61 is connected to the surface of the read / write portion 24 at an intersection angle θ1, and the second inclined portion 62 is connected to the first inclined portion 61 at one side and the other is connected to the concave portion 26 at an intersection angle θ2. is doing. FIG. 4B shows a partially enlarged view of the inclined portion according to the prior art. In the slider of this embodiment, the crossing angle θ1 is larger than the crossing angle θ2. Further, the intersection angles θ1 and θ2, the step d between the read / write portion 24 and the recess 26, the step d1 between the read / write portion 24 and the intersection 63 of the first and second inclined portions 61 and 62, and the inclination shown in the figure. The part length s is preferably in the range shown in Table 1. The intersection angle θ1 is a complementary angle of the angle β1 formed by the first inclined portion 61 and the surface of the read / write portion 24, and the intersection angle θ2 is formed by the second inclined portion 62 and the surface of the recess 27. It is a complementary angle of the angle β2. In other words, the first inclination angle (equal to the intersection angle θ1) of the first inclined portion 61 with respect to the concave portion 26 or the extension line of the concave portion 26 is relative to the concave portion 26 of the second inclined portion 62 or the extension line of the concave portion 26. This is larger than the second inclination angle (equal to the crossing angle θ2).

これらの２ケースの形状をレール２５ａの設計にあわせて使い分けることで、より安定に浮上するスライダを製造することができる。

By properly using the shapes of these two cases in accordance with the design of the rail 25a, a slider that floats more stably can be manufactured.

  Further, the shape of the inclined portion is not limited to the above-described two-stage inclined structure, and a multi-stage inclined structure having three or more stages is also possible. In this case, the slider has at least one intermediate inclined portion between the first inclined portion and the second inclined portion, and each of the intermediate inclined portions has an inclination angle with respect to the concave portion 26. From the first to the second inclined portion, the first inclined angle is sequentially smaller and the second inclined angle is larger.

  Further, the shape of the read / write portion is not limited to the above-described structure, and may be a multistage structure having two or more stages.

  Next, a method for manufacturing the slider described above, particularly a method for forming the inclined portion, will be described with reference to the flowchart of FIG.

  (Step 51) First, as shown in FIG. 6A, a large number of thin film magnetic head portions 28 are stacked on a wafer 71 by a thin film process, and the wafer 71 is formed into a strip shape as shown in FIG. Cut into multiple bars 72. The wafer 71 and the cut bar 72 are provided with one measuring element 73 in advance for each of the plurality of thin film magnetic head units 28 in order to manage the polishing amount of the medium facing surface ABS in the next step 52. .

  (Step 52) Next, the back surface 43 of the bar 72 is polished. For example, the polishing operation is performed by fixing the bar 72 on the rotating polishing table and pressing the back surface 43 while supplying a water-soluble or oil-based lapping solution containing diamond abrasive grains. As a result, the back surface 43 is smoothed, and the completed slider 21 is securely fixed to the flexure 22.

  (Step 53) Next, the medium facing surface ABS is polished. In this polishing operation, as shown in FIG. 7, the MR height of the MR element 32 (the height of the MR element from the medium facing surface ABS to the opposite end) is formed beforehand with a margin, and the medium facing surface is formed. This is done to form a predetermined MR height by polishing the ABS. The polishing operation is performed, for example, by pressing the medium facing surface ABS of the bar 72 against the surface of a polishing plate formed by embedding diamond abrasive grains in the surface of a disk made of Sn (tin). As a result, the position of the medium facing surface ABS moves as a whole (on the side where the coil 37a and the like are present) as compared to before the start of this step.

  (Step 54) Next, as shown in FIG. 8, an uneven portion is formed on the medium facing surface ABS. Specifically, a part of the medium facing surface ABS is removed by RIE, and the concave portion 26, the rail portion 25b, and the inclined portion 6 are formed. Among these, the method of forming the inclined portion 6 will be described in detail with reference to FIG. 9 by taking as an example the case of forming the shape of the case 2 in Table 1.

  First, as shown in FIG. 9A, a resist 69 is formed on the substrate 27 to protect the rails 25a and the read / write portion 24 from etching.

Next, as shown in FIG. 9B, as a first step of RIE, the substrate 27 partially covered with the resist 69 is etched by RIE. The etching conditions are shown in the column of the first step in Table 2. Although CF ₄ is used as the reaction gas, a mixed gas obtained by adding an inert gas Ar to CF ₄ may be used. By this step, the first inclined portion 61 is formed. The angle of the first inclined portion 61 can be adjusted by each condition of the RIE apparatus (diffusion chamber pressure, CF ₄ gas flow rate, Ar gas flow rate, coil current, etc.) and the thickness of the resist 69. As the RIE in each step of the manufacturing method, a helicon wave plasma method, a parallel plate method, a magnetron method, a two-frequency excitation method, an ECR (Electron Cyclotron Resonance) method, an ICP (Inductively Coupled Plasma) method, or the like can be appropriately selected.

Next, as the second step of RIE, the RIE condition is changed to the condition of the second step in Table 2 with the first step completed. 10 to 45 seconds after the change, as shown in FIG. 9C, the deposit 68 is formed around the first inclined portion 61 formed in the first step. The deposit 68 is carbon and DLC generated by C ₂ H ₂ gas newly added under the conditions of the second step. The deposit 68 is generated and deposited on the entire surface of the substrate 27 and the resist 69, but it is divided into a place where it is easily deposited and a place where it is difficult to deposit due to the gas flow in the chamber, as shown in FIG. A large amount is deposited on the base portion of the resist 69 and its periphery, that is, the periphery of the first inclined portion 61 and the recess 76 extending from the first inclined portion 61.

  Thereafter, when the substrate 27 is etched by RIE for 1 to 10 minutes under the condition of the second step, the first inclined portion 61, the second inclined portion 62, as shown in FIG. A recess 26 is formed. At this time, the deposit 68 generated when switching to the condition of the second step protects the first inclined portion 61 and the concave portion 76 around it, and these portions are more than the unprotected concave portion 76. However, as shown in FIG. 9D, the etching amount is reduced, and the second inclined portion 62 is formed.

Thereafter, the slider is taken out from the RIE apparatus, and the resist 69 is peeled off with an organic solution as shown in FIG. At this time, if there is a deposit 69 that could not be removed by the etching of FIG. 9D, it may be removed by ashing with O ₂ .

（ステップ５５）次に、バー７２を１００〜２００℃で１〜２時間、プレヒートする。これは研磨時と製品としての使用時との温度差によって基板２７と薄膜磁気ヘッド部２８との間に生じる熱変形の差を補正するためである。

(Step 55) Next, the bar 72 is preheated at 100 to 200 ° C. for 1 to 2 hours. This is for correcting a difference in thermal deformation generated between the substrate 27 and the thin film magnetic head portion 28 due to a temperature difference between polishing and use as a product.

  (Step 56) Next, the medium facing surface ABS is re-polished at room temperature. As a result, the smoothness of the rails 25a, 25b and the read / write portion 24 is improved and the edges of the rail portions are rounded, so that the loss of the edge portions and the adhesion of foreign matter to the periphery of the rail portions can be suppressed.

(Step 57) Next, a protective film 42 having a thickness of about 1 to 4 nm is formed on the medium facing surface ABS. As the protective film 42, an inorganic material such as a DLC film or SiO ₂ can be used. The state at this time is as shown in FIG.

  (Step 58) Next, the bar 72 is washed.

  (Step 59) Next, the bar 72 is cut to create a slider piece for each piece.

  In the present invention, a bar can be cut in advance into individual slider pieces, and the above steps can be performed on each slider piece, or the slider pieces can be cut in the middle of the steps. . Further, by repeating the first step and the second step, a multi-stage inclined structure having three or more stages can be formed.

  The effects of the present invention are summarized as follows. First, by adopting a two-stage inclined shape formed by the present manufacturing method, variation in the length of the inclined portion can be drastically suppressed as compared with the prior art. In the conventional shape (FIG. 4B), the length of the inclined portion is 2 to 6 μm, and the maximum value / minimum value has reached 3 times. In one embodiment of the present invention, this ratio is Was 1.7 times at most (in the case of Case 1), and variation could be suppressed. In addition, according to this manufacturing method, it is possible to form a two-step inclined structure, which has been possible only by conventional ion milling, by reactive ion etching, and the processing time per batch processing is shortened. In one example, a process that took 28 minutes by ion milling became possible in 22 minutes. For this reason, the slider can be formed in a shorter time than in the case of the prior art using ion milling.

  In addition, RIE has an advantage that it is easy to suppress the surface roughness of the etched surface based on the principle as described above. In one example, the arithmetic average roughness Ra of the inclined portion is improved from 8.86 to 2.38. The arithmetic average roughness Ra is an index of surface roughness described in JIS B0601-1994. A predetermined reference length is extracted from the roughness curve, and the absolute value of the deviation between the average surface height and the actual height of the extracted portion. Is a numerical value averaged by the reference length of the extracted portion.

  Finally, a head stack assembly and a hard disk drive using the slider of the present invention will be described with reference to FIGS. FIG. 10 is an explanatory view showing a main part of the hard disk device, and FIG. 11 is a plan view of the hard disk device. The head stack assembly 250 has a carriage 251 having a plurality of arms 252. A plurality of head gimbal assemblies 220 are attached to the plurality of arms 252 so as to be arranged in the orthogonal direction at intervals. A coil 253 that is a part of the voice coil motor is attached to the carriage 251 on the opposite side of the arm 252. The head stack assembly 250 is incorporated in a hard disk device. The hard disk device has a plurality of hard disks 262 attached to a spindle motor 261. For each hard disk 262, two sliders 210 are arranged so as to face each other with the hard disk 262 interposed therebetween. Further, the voice coil motor has permanent magnets 263 arranged at positions facing each other with the coil 253 of the head stack assembly 250 interposed therebetween.

  The head stack assembly 250 and the actuator excluding the slider 210 correspond to the positioning device in the present invention, and support the slider 210 and position it relative to the hard disk 262.

  In the hard disk device, the slider 210 is moved with respect to the hard disk 262 by moving the slider 210 in the track crossing direction of the hard disk 262 by the actuator. The thin film magnetic head included in the slider 210 records information on the hard disk 262 by the recording head, and reproduces the information recorded on the hard disk 262.

It is a perspective view of the head arm assembly which has the slider used as the object of the slider manufacturing method of this invention in the front-end | tip. It is a perspective view of the slider shown in FIG. It is sectional drawing which shows the lamination | stacking state of the slider shown in FIG. FIG. 4 is a partial detail view of a part A of the slider shown in FIG. 3. It is a flowchart of the slider manufacturing method of this invention. It is a perspective view of the wafer and bar in which the thin film magnetic head part was formed. It is a figure explaining the condition of one step in manufacture in the slider manufacturing method of the present invention. It is a figure explaining the condition of one step in manufacture in the slider manufacturing method of the present invention. It is a step figure which shows the process sequence of the inclination part in the slider manufacturing method of this invention. It is explanatory drawing which shows the principal part of the hard-disk apparatus incorporating the slider of this invention. It is a top view of the hard disk drive incorporating the slider of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Head arm assembly 2 Head gimbal assembly 21 Slider 22 Flexure 23 Load beam 24 Read / write part 25a, 25 Rail part 26 Recessed part 27 Substrate 28 Thin film magnetic head part 31 Shield layer 32 MR element 33 Lower magnetic pole layer 34 Recording gap 35 Upper magnetic pole layer 36 connecting portion 37a, 37b coil 38, 39, 40 insulating layer 41 overcoat layer 42 protective film 43 back surface 45 temporary protective film 6 inclined portion 61 first inclined portion 62 second inclined portion 71 wafer 72 bar ABS medium facing surface

Claims (7)

A substrate,
Provided as protrusions on the medium facing surface that faces the recording medium of the substrate, a write element for writing information to the recording medium, at least one of the reading device for reading information from the recording medium is provided Read / write section,
The recording medium is positioned in the air flow inlet direction when it is rotated, and the recess of the bearing surface,
Inclination that Yusuke a first inclined portion straight connected to said read-write portion of the surface, and a second inclined portion straight to be connected to the first inclined portion and the concave surface, the and parts,
A method of manufacturing a slider having
And Luz step to form a resist on the part read-write portion is formed on said substrate,
The substrate on which the resist is formed by using a first reactive gas containing CF ₄ gas, is etched by reactive ion etching, a portion adjacent to the resist prior Symbol air flow inlet side of the substrate forming said first inclined portion, a first inclined portion forming step,
The first said substrate inclined portion is formed of, by using the second reactive gas containing CF ₄ gas and C ₂ H ₂ gas, is etched by reactive ion etching, the first inclined portion on the surface, and, on the surface of the substrate adjacent to the first inclined portion extending in the opposite direction of the resist, a deposit consisting of the C ₂ H carbon and diamond-like carbon produced by the _two gas depositing, the substrate on which the deposit has been deposited, with the second reaction gas, and etching by reactive ion etching, the concave portion Contact good beauty said second inclined portion, the second inclination angle .theta.2 (although, .theta.2 is an acute angle) with respect to the concave portion of the inclined portion of the inclined angle .theta.1 is with respect to the concave portion of the first inclined portion (although, .theta.1 is acute or right angle) formed to be smaller than, the Step for forming the second slope And,
A method for manufacturing a slider. Wherein the first reaction gas is further includes an Ar gas, a manufacturing method of the slider according to claim 1. The second inclined portion forming step, the state where the first inclined portion forming step is completed, the reaction gas was changed to the second reaction gas, by performing the error etching, depositing the deposit It contains thereby method of slider according to claim 1 or 2. The second inclined portion forming step, after the deposit has been deposited, by performing continue come et etching, the second includes forming an inclined portion, slider according to claim 3 Manufacturing method. 5. The slider according to claim 4 , wherein the second inclined portion forming step includes forming the second inclined portion by performing etching while the reactive gas remains the second reactive gas. Manufacturing method. 6. The method for manufacturing a slider according to claim 1, further comprising a step of removing the resist with an organic solution after the second inclined portion forming step. The method for manufacturing a slider according to claim 1, further comprising a step of removing the deposit with O ₂ gas after the second inclined portion forming step.

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