JP4753757B2 - Substrate processing apparatus and substrate processing method - Google Patents

Description

  The present invention relates to a technique for processing a substrate by supplying a processing liquid to the substrate.

  Conventionally, in a manufacturing process of a semiconductor substrate (hereinafter simply referred to as “substrate”), various processes are performed by supplying a processing liquid to the substrate. For example, in the substrate cleaning process, particles attached to the surface of the substrate are removed by spraying a cleaning liquid such as pure water onto the substrate.

  By the way, in such a cleaning process, it is known that the whole surface of the substrate is charged by contact between the substrate having an insulating film formed on the surface and pure water. For example, the substrate is negatively charged when an oxide film is formed on the substrate surface, and positively charged when a resist film is formed on the substrate surface. Here, if the charge amount of the substrate becomes large, there is a risk of damage of the wiring due to reattachment of particles or discharge during or after cleaning. Thus, various techniques for suppressing the charging of the substrate have been proposed for the substrate processing apparatus.

For example, in Patent Document 1, in a cleaning apparatus that supplies a cleaning liquid to a rotating substrate and performs cleaning, cleaning is performed while ionized nitrogen gas is purged into a processing space on the substrate, thereby suppressing charging of the substrate surface. Techniques to do this are disclosed. Further, in Patent Document 2, in a cleaning apparatus that immerses and cleans a substrate in a processing tank in which a cleaning liquid is stored, a liquid that is sprayed onto the substrate when the cleaning liquid is replaced is a conductive CO in which carbon dioxide gas is dissolved in pure water. _A technique for suppressing charging of the substrate surface by using ₂ dissolved water is disclosed.

In Patent Document 3, pure water is ejected from a nozzle at a high speed to generate fine droplets of pure water charged by fluid friction with the nozzle, and the droplets are brought into contact with the charged substance. A static eliminator that removes static electricity is disclosed, and a charged semiconductor substrate after cleaning is cited as an application target of the static eliminator.
JP 2002-184660 A JP 2005-183791 A Japanese Patent Laid-Open No. 10-149893

By the way, in the cleaning process in the ionized gas atmosphere as in Patent Document 1, it is difficult to continuously and efficiently supply the ionized gas to the substrate surface, and there is a limit to the suppression of charging of the substrate. Further, when the injection of CO ₂ dissolved water in the substrate as in Patent Document 2, when the copper wiring is formed on a substrate, the copper wiring is deteriorated by contact with CO ₂ dissolved water acidic There is a fear. Furthermore, in such an apparatus, since a unit for dissolving CO ₂ in pure water before injection is required, the apparatus structure is inevitably complicated and enlarged. On the other hand, the static eliminator of Patent Document 3 cannot suppress charging of the substrate during cleaning.

  The present invention has been made in view of the above problems, and an object of the present invention is to suppress charging of a substrate during processing in a substrate processing apparatus that supplies a processing liquid to a substrate for processing.

The invention described in claim 1 is a substrate processing apparatus for processing a substrate by supplying a processing liquid to the substrate, and a discharge unit that discharges non-conductive liquid droplets toward the main surface of the substrate. A processing liquid supply unit that is provided outside the discharge unit and guides the processing liquid to the discharge unit, and is electrically insulated from the discharge unit and in the vicinity of the discharge port of the discharge unit or around the discharge port. is arranged, said substrate by a potential difference is applied between the pre-Symbol treatment liquid supply unit conductive liquid contact portion provided in, that the droplets of the treatment liquid in the discharge opening neighborhood, caused by treatment the potential and an induction electrode for inducing charges of opposite polarity, the conductive wire is connected to the liquid contact portion, the liquid contact portion is Ru is grounded via the conductive wire.

According to a second aspect of the invention, there is provided a substrate processing apparatus according to claim 1, said discharge unit, mixing the treatment liquid and a carrier gas at an internal or said discharge opening neighborhood of the discharge portion To produce the droplets of the treatment liquid.
A third aspect of the present invention is the substrate processing apparatus according to the second aspect, further comprising a gas supply section that guides the carrier gas to the discharge section, and the treatment liquid supply section is provided above the discharge section. A processing liquid pipe to be connected is provided inside the discharge section, and the droplets of the processing liquid are generated between the tip of the processing liquid pipe and the induction electrode.
Invention of Claim 4 is the substrate processing apparatus of Claim 3, Comprising: The said process liquid pipe | tube whole is formed with an insulator, and parts other than the said liquid-contact part of the said process liquid supply part are the following. It is formed of an insulator.

A fifth aspect of the present invention is the substrate processing apparatus according to any one of the first to fourth aspects, wherein the induction electrode has an annular shape surrounding a central axis of the discharge port.

A sixth aspect of the present invention is the substrate processing apparatus according to any one of the first to fifth aspects, wherein the induction electrode is provided integrally with the discharge portion.

A seventh aspect of the present invention is the substrate processing apparatus according to any one of the first to sixth aspects, wherein the liquid contact portion is formed of a conductive resin or conductive carbon.

The invention according to claim 8 is the substrate processing apparatus according to any one of claims 1 to 7 , wherein the surface potential meter measures the potential at the main surface of the substrate, and the processing from the discharge unit. A control unit that controls a potential difference between the liquid contact unit and the induction electrode based on an output from the surface electrometer in parallel with liquid discharge is further provided.

The invention described in claim 9 is a substrate processing method for processing a substrate by supplying a processing liquid to the substrate, and a) a substrate from a discharge unit connected to the processing liquid supply unit toward the main surface of the substrate. a step of ejecting droplets of the conductive processing fluid, b) an induction electrode disposed around the discharge portion and electrically the discharge portion while being insulated discharge opening neighborhood or the discharge port, pre Symbol treatment By applying a potential difference to the conductive liquid contact part provided in the liquid supply part , the liquid droplets of the processing liquid generated by processing in the vicinity of the discharge port in the vicinity of the step a) And a step of inducing a charge having a polarity opposite to the potential of the substrate, the treatment liquid supply section is provided outside the discharge section, a conductive wire is connected to the liquid contact section, and the liquid contact section is the conductive section. Ru is grounded through the line.

A tenth aspect of the present invention is the substrate processing method according to the ninth aspect , wherein c) a step of measuring a potential at the main surface of the substrate in parallel with the steps a) and b). And d) controlling a potential difference between the liquid contact portion and the induction electrode based on the potential measured in the step c).

The invention according to claim 11 is the substrate processing method according to claim 9 or 10 , wherein the step b) is continuously performed while the step a) is being performed.

In the present invention, charging of the substrate during processing can be suppressed. In the invention of claim 6 , the structure of the substrate processing apparatus can be simplified .

  FIG. 1 is a diagram showing a configuration of a substrate processing apparatus 1 according to a first embodiment of the present invention. The substrate processing apparatus 1 supplies particles with a cleaning liquid to a semiconductor substrate 9 (hereinafter simply referred to as “substrate 9”) having an insulating film formed on the surface thereof to perform cleaning processing. The substrate cleaning apparatus removes the foreign matter. In the substrate processing apparatus 1, a non-conductive liquid (in this embodiment, pure water) is used as the cleaning liquid. In the present embodiment, the substrate 9 having an oxide film formed on the surface is cleaned.

  As shown in FIG. 1, the substrate processing apparatus 1 is disposed above the substrate holding unit 2 that holds the substrate 9 from the lower side, and toward the upper main surface (hereinafter referred to as “upper surface”). A discharge unit 3 that discharges the cleaning liquid, a circular cleaning liquid supply unit (that is, a processing liquid supply unit) 4 that guides the cleaning liquid to the discharge unit 3, and a gas supply unit that introduces nitrogen gas to the discharge unit 3 separately from the cleaning liquid supply unit 4 5 and an induction electrode 6 disposed near the discharge port 31 of the discharge unit 3 between the discharge unit 3 and the substrate 9. In FIG. 1, for convenience of illustration, a part of the substrate holding unit 2 is drawn in cross section.

  The substrate holding unit 2 includes a chuck 21 that holds the substantially disk-shaped substrate 9 from the lower side and the outer peripheral side, a rotating mechanism 22 that rotates the substrate 9, and a processing cup 23 that covers the outer periphery of the chuck 21. The rotation mechanism 22 includes a shaft 221 connected to the lower side of the chuck 21 and a motor 222 that rotates the shaft 221, and the substrate 9 rotates together with the shaft 221 and the chuck 21 by driving the motor 222. The processing cup 23 is disposed on the outer periphery of the chuck 21 to prevent the cleaning liquid supplied on the substrate 9 from scattering to the periphery, and the processing cup 23 is provided below the processing cup 23 and supplied to the substrate 9. A discharge port 232 for discharging the cleaning liquid is provided.

FIG. 2 is a longitudinal sectional view showing the vicinity of the discharge unit 3. As shown in FIG. 2, the discharge unit 3 is an internal mixing type two-fluid nozzle, and includes a circular cleaning liquid pipe 32 centered on the central axis 30 of the discharge unit 3 (also the central axis of the discharge port 31). Prepare inside. The cleaning liquid pipe 32 is connected to the cleaning liquid supply section 4 at the upper part of the discharge section 3, and the space inside the cleaning liquid pipe 32 becomes a cleaning liquid flow path 321 through which the cleaning liquid supplied from the cleaning liquid supply section 4 flows. A space between the outer wall 34 of the discharge unit 3 and the cleaning liquid pipe 32 is a gas flow path 33 through which a carrier gas (for example, nitrogen (N ₂ ) gas or air) supplied from the gas supply unit 5 flows. The gas flow path 33 surrounds the periphery of the cleaning liquid flow path 321.

  In the discharge unit 3, the tip of the cleaning liquid pipe 32 is located inside the discharge port 31 (that is, the upper side in FIG. 2), and the cleaning liquid ejected from the cleaning liquid pipe 32 is separated from the carrier gas in the discharge part 3. By mixing, minute droplets of the cleaning liquid are generated and ejected together with the carrier gas from the discharge port 31 toward the substrate 9 (see FIG. 1). The inner diameter of the discharge port 31 is about 2 to 3 mm.

  The cleaning liquid pipe 32 of the discharge part 3 (that is, the part forming the cleaning liquid flow path 321 in the discharge part 3) and the cleaning liquid supply part 4 connected to the cleaning liquid pipe 32 are both conductive carbon (preferably amorphous carbon). Or glassy carbon such as glassy carbon) or a conductive resin (for example, conductive PEEK (polyether ether ketone) or conductive PTFE (polytetrafluoroethylene)). In the present embodiment, the cleaning liquid pipe 32 and the cleaning liquid supply unit 4 are formed of glassy conductive carbon. Glassy carbon is a hard carbon material having a homogeneous and dense structure, and is excellent in electrical conductivity, chemical resistance, heat resistance, and the like.

  In the substrate processing apparatus 1, the cleaning liquid pipe 32 and the cleaning liquid supply unit 4 serve as one cleaning liquid supply pipe that supplies the cleaning liquid to the substrate 9, and the entire cleaning liquid supply pipe is a conductive liquid contact part that contacts the cleaning liquid. . In the substrate processing apparatus 1, a conductive wire 82 is connected to the cleaning liquid supply unit 4, and as shown in FIG. 1, the cleaning liquid supply unit 4 and the cleaning liquid pipe 32 (see FIG. 2) are grounded via the conductive wire 82. .

  As shown in FIG. 2, the induction electrode 6 has an annular shape surrounding the central axis 30 of the discharge port 31, and has an outer diameter of about 15 mm and an inner diameter of about 8 mm. The distance between the induction electrode 6 and the discharge port 31 in the direction of the central axis 30 is about 3 to 4 mm, and the stainless steel induction electrode 6 and the discharge unit 3 are electrically insulated.

  In the substrate processing apparatus 1 shown in FIG. 1, the induction electrode 6 is electrically connected to a power supply 81 outside the substrate processing apparatus 1, whereby the cleaning liquid supply unit 4 and the cleaning liquid pipe 32 (see FIG. 2) and the induction electrode 6 are given a potential difference. As a result, a charge is induced in the cleaning liquid in the vicinity of the discharge port 31 of the discharge unit 3, and a droplet of the cleaning liquid having the charge is ejected from the discharge unit 3.

  Next, cleaning of the substrate 9 by the substrate processing apparatus 1 will be described. FIG. 3 is a diagram showing a flow of cleaning the substrate 9. In the substrate processing apparatus 1, first, after the substrate 9 is held by the chuck 21 of the substrate holding unit 2, the motor 222 of the rotation mechanism 22 is driven to start the rotation of the substrate 9 (steps S11 and S12).

  Subsequently, a potential difference is applied between the induction electrode 6 and the cleaning liquid tube 32 and the cleaning liquid supply unit 4 of the discharge unit 3, so that a portion in the vicinity of the discharge port 31 of the discharge unit 3 (that is, the tip of the cleaning liquid tube 32). ) Is induced (step S13). In the present embodiment, a positive charge is induced in the vicinity of the discharge port 31 of the discharge unit 3 by applying a potential of about −1000 V to the induction electrode 6.

  In this state, the cleaning liquid and the nitrogen gas are supplied to the discharge unit 3, so that a positive charge is induced in the cleaning liquid in the vicinity of the discharge port 31 and fine droplets of the cleaning liquid are generated. The droplet of the cleaning liquid in which the charge is induced is ejected (that is, discharged) toward the upper surface of the substrate 9 to clean the substrate 9 (step S14). In the substrate processing apparatus 1, the ejection unit 3 reciprocates relatively in the radial direction of the substrate 9 with respect to the rotating substrate 9, whereby a cleaning liquid droplet is ejected onto the entire upper surface of the substrate 9. Foreign matter such as particles adhering to the surface is removed. In the substrate processing apparatus 1, while the droplets of the cleaning liquid are ejected to the substrate 9, the induction of electric charges to the vicinity of the discharge port 31 by the induction electrode 6 is continuously performed in parallel.

  When the droplets are ejected onto the substrate 9 for a predetermined time, the discharge of the cleaning liquid from the discharge unit 3 is stopped, the electrical connection between the induction electrode 6 and the power source 81 is cut, and the charge to the vicinity of the discharge port 31 is reduced. Guidance is stopped. Thereafter, the rotation of the substrate 9 is continued to dry the substrate 9 and then the rotation of the substrate 9 is stopped (step S15). The substrate 9 is unloaded from the substrate processing apparatus 1 and the cleaning process for the substrate 9 is completed (step S15). S16).

In the substrate processing apparatus 1, fine droplets of the cleaning liquid collide with the upper surface of the substrate 9 at a high speed, so that the fine pattern formed on the upper surface is not damaged, and the minute matter such as organic matter adhering to the upper surface is damaged. Particles can be efficiently removed. In addition, since non-conductive pure water is used as the cleaning liquid, even if the substrate 9 is provided with a copper wiring or the like, these wirings are electrically conductive liquid (for example, a CO ₂ solution). Deterioration due to contact with an acidic solution). In the substrate processing apparatus 1, by using a two-fluid nozzle as the ejection unit 3, it is possible to easily generate droplets of the cleaning liquid, and it is possible to reduce the size of the mechanism related to the generation and ejection of the droplets.

  FIG. A is a diagram showing a potential distribution on the upper surface of the substrate 9 after the cleaning process by the substrate processing apparatus 1. FIG. B is a diagram showing, as a comparative example, the potential distribution on the upper surface of the substrate when the cleaning process is performed by a normal substrate processing apparatus that does not perform charge induction on the ejection unit 3. FIG. FIG. In B, the potential in the vicinity of the central portion of the substrate 9 having the largest charge amount (that is, the absolute value of the potential) is about −13 V, and FIG. In A, the potential in the region with the largest charge amount is about −4 to −5V. These substrates are hardly charged in the state before cleaning, and it is considered that the potential is generated during cleaning by the substrate processing apparatus.

  In the substrate processing apparatus 1 according to the present embodiment, the substrate 9 is cleaned with a droplet of the cleaning liquid in which charges having a polarity opposite to the substrate potential after cleaning by the substrate processing apparatus of the comparative example (that is, positive charges) are induced. As a result, FIG. A and FIG. As shown in B, charging of the substrate 9 during and after cleaning can be suppressed. In addition, the charge induction can be easily realized by simplifying the structure of the substrate processing apparatus 1 by the induction electrode 6 provided in the vicinity of the discharge port 31 of the discharge unit 3.

  In the substrate processing apparatus 1, charging of the substrate 9 can be further suppressed by continuously inducing charge to the ejection unit 3 while the substrate 9 is being cleaned. Furthermore, the induction electrode 6 is formed in an annular shape surrounding the central axis 30 of the discharge port 31, so that electric charges can be induced approximately evenly in the vicinity of the discharge port 31 without disturbing the discharge of the cleaning liquid from the discharge port 31. it can. As a result, it is possible to induce charges almost uniformly with respect to a large number of droplets of the cleaning liquid, and to suppress charging almost uniformly over the entire surface of the substrate 9.

  In the substrate processing apparatus 1, the conductive wire 82 is connected to the cleaning liquid supply unit 4 outside the discharge unit 3 and grounded, so that the conductive wire 82 is connected to the inside of the discharge unit 3. Electric charges can be induced in the vicinity of the discharge port 31 of the discharge unit 3 while simplifying the structure. In addition, since the conductive liquid contact portion (that is, the cleaning liquid pipe 32) and the induction electrode 6 are disposed close to each other, the charge can be efficiently induced in the cleaning liquid.

  Further, the cleaning liquid pipe 32 and the cleaning liquid supply part 4 are formed of conductive carbon or conductive resin, so that the conductivity in the wetted part is different from the case where the cleaning liquid pipe 32 and the cleaning liquid supply part 4 are formed of metal. While ensuring, contamination of the cleaning liquid due to the mixing of metal powder or the like into the cleaning liquid or the elution of the material of the wetted part can be prevented. Thereby, the adhesion of the metal powder to the substrate 9 during cleaning is prevented. In particular, since the cleaning liquid pipe 32 and the cleaning liquid supply unit 4 are formed of glassy carbon, it is possible to more reliably prevent the material of the liquid contact part from being eluted into the cleaning liquid.

  Next, a substrate processing apparatus according to a second embodiment of the present invention will be described. FIG. 5 is a cross-sectional view showing the vicinity of the discharge section 3a of the substrate processing apparatus according to the second embodiment. In the substrate processing apparatus according to the second embodiment, the entire cleaning liquid pipe 32 of the discharge section 3a is formed of an insulator (in this embodiment, Teflon (registered trademark)). Further, in the cleaning liquid supply unit 4, the portions excluding the cylindrical conductive wetted part 41 are formed of an insulator (in this embodiment, PFA (perfluoroalkoxy)). It is formed of glassy carbon and is grounded through a conductive wire 82. In FIG. 5, the cross section of the conductive liquid contact part 41 is surrounded by a thick line, and further, a parallel oblique line different from other parts of the cleaning liquid supply part 4 is shown. Other configurations are the same as those in FIGS. 1 and 2, and the same reference numerals are given in the following description. Further, the flow of cleaning the substrate 9 by the substrate processing apparatus according to the second embodiment is the same as that of the first embodiment.

  In the substrate processing apparatus according to the second embodiment, the induction electrode 6 is electrically connected to the power source 81 (see FIG. 1), so that the induction electrode 6 and the conductive liquid contact part 41 of the cleaning liquid supply part 4 As in the first embodiment, a positive charge is induced in the cleaning liquid in the vicinity of the discharge port 31 of the discharge unit 3a. Then, the substrate 9 is cleaned with the droplets of the cleaning liquid in which positive charges are induced, so that charging of the substrate 9 during and after cleaning can be suppressed. In addition, since the conductive liquid contact part 41 that is grounded via the conductive wire 82 is provided outside the discharge part 3a, the structure of the discharge part 3a can be simplified.

Next, a substrate processing apparatus according to a technique related to the present invention will be described. FIG. 6 is a cross-sectional view showing the vicinity of the discharge section 3b of the substrate processing apparatus according to the related art . In the substrate processing apparatus according to the related art , the entire cleaning liquid supply unit 4 is formed of an insulator (in this embodiment, PFA), and the portion excluding the tip 321 of the cleaning liquid pipe 32 of the discharge unit 3b is an insulator ( In this embodiment, it is made of Teflon (registered trademark). The tip portion 321 of the cleaning liquid pipe 32 is made of glassy carbon, and is grounded via a conductive wire 82 as a conductive liquid contact portion. Other configurations are the same as those in FIG. 1 and FIG.

In the substrate processing apparatus according to the related art , the induction electrode 6 is electrically connected to the power source 81 (see FIG. 1), whereby a potential difference is applied between the induction electrode 6 and the distal end portion 321 of the cleaning liquid pipe 32. As in the first embodiment, a positive charge is induced in the cleaning liquid in the vicinity of the discharge port 31 of the discharge unit 3b. Then, the substrate 9 is cleaned with the droplets of the cleaning liquid in which positive charges are induced, so that charging of the substrate 9 during and after cleaning can be suppressed. In addition, since the leading end portion 321 of the cleaning liquid pipe 32 that is a conductive liquid contact portion and the induction electrode 6 are disposed in proximity to each other, it is possible to efficiently induce charges with respect to the cleaning liquid.

Next, a substrate processing apparatus according to a third embodiment of the present invention will be described. FIG. 7 is a cross-sectional view showing the vicinity of the discharge section 3c of the substrate processing apparatus according to the third embodiment. As shown in FIG. 7, in the substrate processing apparatus according to the third embodiment, the annular induction electrode 6 is provided integrally with the outer wall portion 34 of the discharge portion 3c at the tip portion of the discharge portion 3c. The hole inside the electrode 6 forms the discharge port 31 of the discharge part 3c. In other words, the induction electrode 6 is provided at the position of the discharge port 31 of the discharge portion 3c. It can also be said that the induction electrode 6 is attached around the discharge port 31 of the discharge part 3c. Other configurations are the same as those in FIG. 1 and FIG.

In the substrate cleaning apparatus according to the third embodiment, similarly to the first embodiment, the cleaning liquid pipe 32 and the cleaning liquid supply unit 4 which are conductive liquid contact parts are electrically insulated from the liquid contact part. When a potential difference is applied between the induction electrode 6 and the discharge electrode 3, a positive charge is induced in the cleaning liquid in the vicinity of the discharge port 31 of the discharge unit 3 c, and the substrate 9 is cleaned with the droplet of the cleaning liquid. Thus, charging of the substrate 9 during and after cleaning can be suppressed. In the substrate cleaning apparatus according to the third embodiment, in particular, the structure of the substrate cleaning apparatus can be simplified by providing the induction electrode 6 integrally with the discharge part 3c.

Next, a substrate processing apparatus 1a according to a fourth embodiment of the present invention will be described. FIG. 8 is a diagram showing the substrate processing apparatus 1a. As shown in FIG. 8, in the substrate processing apparatus 1a, in addition to the configuration of the substrate processing apparatus 1 shown in FIG. 1, a surface potentiometer 71 that measures the potential at approximately the center of the upper surface of the substrate 9, and the induction electrode 6 Is further provided with a control unit 83 for controlling the potential applied to. Other configurations are the same as those in FIG. 1 and FIG.

  FIG. 9 is a diagram showing a part of the flow of cleaning the substrate 9 by the substrate processing apparatus 1a. In the substrate cleaning apparatus 1a, step S21 in FIG. 9 is performed instead of step S14 in FIG. 3, and the operations before and after step S21 are the same as steps S11 to S13 and steps S15 and S16 in FIG. It is the same.

  When the substrate 9 is cleaned by the substrate processing apparatus 1a, the rotation of the substrate 9 is started after the substrate 9 is held, as in the first embodiment (FIG. 3: steps S11 and S12). ). Subsequently, a potential difference is applied between the induction electrode 6, the cleaning liquid pipe 32, and the cleaning liquid supply unit 4 (step S13), and a positive charge is induced in the cleaning liquid in the vicinity of the discharge port 31 of the discharge unit 3, and the cleaning liquid is minute. Droplets are ejected toward the upper surface of the substrate 9.

  In the substrate processing apparatus 1 a, the potential on the upper surface of the substrate 9 is measured by the surface potential meter 71 in parallel with the application of the potential difference and the ejection (ie, discharge) of the cleaning liquid from the discharge unit 3, and the output from the surface potential meter 71. (In other words, the potential measured by the surface potential meter 71 and hereinafter referred to as “measurement potential”), the output from the power source 81 is controlled by the control unit 83, whereby the induction electrode 6 and the cleaning liquid tube 32 are controlled. And the electric potential difference between the cleaning liquid supply section 4 (that is, the conductive liquid contact section) is controlled to control the charge induced in the cleaning liquid droplets (step S21).

  For the control of the potential difference by the control unit 83, proportional control, PID control, or the like is used, and the potential difference is increased as the charge amount on the upper surface of the substrate 9 increases (that is, the absolute value of the measured potential increases). As a result, the charge induced in the cleaning liquid can be increased to suppress the charging of the substrate 9 more efficiently. It is also possible to prevent the substrate 9 from being charged to a reverse potential due to excessive charge induction. When the cleaning of the substrate 9 is completed, the rotation is stopped after the substrate 9 is dried, and the substrate 9 is unloaded from the substrate processing apparatus 1a (steps S15 and S16).

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  For example, in the substrate processing apparatus, the above-described cleaning process may be continuously performed on the plurality of substrates 9. In this case, when the substrate 9 is carried in and out, the electrical connection between the induction electrode 6 and the power source 81 may be maintained. In the substrate processing apparatus, only a voltage is applied to the induction electrode 6, and no current flows between the induction electrode 6 and the discharge unit 3, so that the current flowing out from the induction electrode 6 is limited. By providing the device, even if a person touches it, the risk of electric shock can be reduced.

In the substrate cleaning apparatus according to the first , second , and fourth embodiments, the entire ejection unit may be formed of a conductor. In addition, the distance between the induction electrode 6 and the discharge port 31 of the discharge unit in the direction of the central axis 30 is the above-described embodiment as long as charge induction is possible in the vicinity of the discharge port 31 using a realistic power source. It may be different from the distance shown in.

  In the substrate cleaning apparatus according to the above-described embodiment, the polarity of the potential of the substrate and the amount of charge generated by the cleaning are determined depending on the type of the substrate (for example, the type of insulating film on the upper surface of the semiconductor substrate, the type of wiring metal, and combinations thereof) Therefore, the potential difference applied between the induction electrode 6 and the discharge unit in the substrate processing apparatus is variously changed according to the type of the substrate. For example, when a resist film is formed on the substrate, the upper surface of the substrate is positively charged by the cleaning, so that a positive voltage is applied to the induction electrode 6 and a negative charge is induced in the cleaning liquid.

  The discharge unit is not necessarily limited to the internal mixing type two-fluid nozzle. For example, the cleaning liquid and the carrier gas are individually ejected to the outside of the discharge unit and mixed in the vicinity of the discharge port 31 to thereby form a droplet of the cleaning liquid. An external mixing type two-fluid nozzle that generates Further, in the substrate cleaning apparatus, droplets of the cleaning liquid generated by another apparatus may be supplied to the discharge unit, and the droplets may be ejected from the discharge unit together with the carrier gas, or only the cleaning liquid is supplied to the discharge unit. And may be ejected as droplets.

  In the substrate cleaning apparatus, a liquid other than pure water may be used as a non-conductive cleaning liquid. For example, ZEOLA (registered trademark) of ZEON CORPORATION, which is a fluorine-based cleaning liquid, or Novec (registered trademark) of 3M HFE may be used as a cleaning liquid.

  The substrate processing apparatus according to the above embodiment may be used for various processes other than the cleaning of the substrate. For example, the substrate processing apparatus may be used for a rinsing process of the substrate after the chemical solution cleaning. In this case, a rinsing liquid such as pure water is used as a processing liquid supplied to the substrate. Further, the substrate processing apparatus may be used for processing various substrates other than the semiconductor substrate such as a glass substrate used for a printed wiring board or a flat panel display device.

It is a figure which shows the substrate processing apparatus which concerns on 1st Embodiment. It is sectional drawing which shows the discharge part vicinity. It is a figure which shows the flow of cleaning of a board | substrate. It is a figure which shows the electric potential distribution in the upper surface of a board | substrate. It is a figure which shows the electric potential distribution in the upper surface of the board | substrate of a comparative example. It is sectional drawing which shows the discharge part vicinity of the substrate processing apparatus which concerns on 2nd Embodiment. It is sectional drawing which shows the discharge part vicinity of the substrate processing apparatus which concerns on related technology . It is sectional drawing which shows the discharge part vicinity of the substrate processing apparatus which concerns on 3rd Embodiment. It is a figure which shows the substrate processing apparatus which concerns on 4th Embodiment. It is a figure which shows a part of flow of the washing | cleaning of a board | substrate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,1a Substrate processing apparatus 3,3a-3c Discharge part 4 Cleaning liquid supply part 6 Induction electrode 9 Substrate 30 Center axis 31 Discharge port 32 Cleaning liquid pipe 41 Conductive liquid contact part 71 Surface potential meter 83 Control part 321 Tip part S11-S16 , S21 step

Claims (11)

A substrate processing apparatus for processing a substrate by supplying a processing liquid to the substrate,
A discharge unit that discharges non-conductive treatment liquid droplets toward the main surface of the substrate;
A treatment liquid supply unit that is provided outside the discharge unit and guides the treatment liquid to the discharge unit;
The discharge portion and electrically being insulated arranged around the discharge opening neighborhood or the discharge port of the discharge portion, a potential difference is applied between the pre-Symbol treatment liquid conductive liquid contact portion provided in the feed section by being, in the droplet of the processing liquid in the discharge opening neighborhood, the potential of the substrate caused by the processing and the induction electrode to induce charges of opposite polarity,
Equipped with a,
It said conductive wire is connected to the liquid contact portion, the substrate processing apparatus wherein the liquid contact portion, characterized in Rukoto is grounded via the conductive wire. The substrate processing apparatus according to claim 1 ,
The substrate processing apparatus, wherein the discharge unit generates the droplets of the processing liquid by mixing the processing liquid and a carrier gas in the discharge unit or in the vicinity of the discharge port.   The substrate processing apparatus according to claim 2,
  A gas supply unit for guiding the carrier gas to the discharge unit;
  A processing liquid pipe connected to the processing liquid supply unit at the upper part of the discharge unit is provided inside the discharge unit,
  The substrate processing apparatus, wherein the droplet of the processing liquid is generated between a tip of the processing liquid tube and the induction electrode.   The substrate processing apparatus according to claim 3, wherein
  The entire treatment liquid tube is formed of an insulator,
  A portion of the processing liquid supply unit other than the liquid contact part is formed of an insulator. The substrate processing apparatus according to any one of claims 1 to 4,
The substrate processing apparatus, wherein the induction electrode has an annular shape surrounding a central axis of the discharge port. A substrate processing apparatus according to any one of claims 1 to 5 ,
The substrate processing apparatus, wherein the induction electrode is provided integrally with the discharge unit. A substrate processing apparatus according to any one of claims 1 to 6 ,
The substrate processing apparatus, wherein the liquid contact part is formed of a conductive resin or conductive carbon. A substrate processing apparatus according to any one of claims 1 to 7 ,
A surface potentiometer for measuring the potential at the main surface of the substrate;
A control unit for controlling a potential difference between the liquid contact unit and the induction electrode based on an output from the surface potentiometer in parallel with the discharge of the treatment liquid from the discharge unit;
A substrate processing apparatus further comprising: A substrate processing method for processing a substrate by supplying a processing liquid to the substrate,
a) a step of discharging a non-conductive treatment liquid droplet from a discharge part connected to the treatment liquid supply part toward the main surface of the substrate;
b) said discharge portion and electrically insulated while induction electrode disposed around the discharge opening neighborhood or the discharge port of the discharge portion, a front Symbol treatment liquid conductive liquid contact portion provided in the feed section A step of inducing a charge having a polarity opposite to the potential of the substrate generated by processing in the droplet of the processing liquid in the vicinity of the discharge port in the vicinity of the discharge port in parallel with the step a). ,
Equipped with a,
Said processing liquid supply unit is provided outside of the discharge portion, the conductive wire is connected to the liquid contact portion, the substrate processing method the wetted part is characterized Rukoto is grounded via the conductive wire. The substrate processing method according to claim 9 , comprising:
In parallel with the step a) and the step b),
c) measuring a potential at the main surface of the substrate;
d) controlling a potential difference between the wetted part and the induction electrode based on the potential measured in the step c);
A substrate processing method, further comprising: The substrate processing method according to claim 9 or 10 , wherein
The substrate processing method, wherein the step b) is continuously performed while the step a) is performed.

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