JP4742884B2 - Radiation sensitive resin composition - Google Patents

Description

The present invention relates to a radiation-sensitive resin composition having a copolymer having a predetermined terminal group as an acid-dissociable group-containing resin, and in particular, (extremely) far from KrF excimer laser, ArF excimer laser, F ₂ excimer laser, EUV and the like. The present invention relates to a radiation-sensitive resin composition used as a chemically amplified resist suitable for microfabrication by various types of radiation such as ultraviolet rays, synchrotron radiation and other X-rays and charged particle beams such as electron beams.

In the field of microfabrication represented by the manufacture of integrated circuit elements, in order to obtain a higher degree of integration, recently, a photolithography technique capable of microfabrication at a level of about 200 nm or less is required.
The use of short-wavelength radiation capable of microfabrication at a level of about 200 nm or less has been studied. Examples of such short-wavelength radiation include a far-ray ultraviolet ray such as an emission line spectrum of a mercury lamp, an excimer laser, and an X-ray. And electron beam. Of these, KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), F ₂ excimer laser (wavelength 157 nm), EUV (wavelength 13 nm, etc., extreme ultraviolet rays), electron beams, and the like are attracting attention.
As a radiation-sensitive resin composition suitable for short-wave radiation, the chemistry between a component having an acid-dissociable functional group and a radiation-sensitive acid generator that generates an acid upon irradiation (hereinafter referred to as “exposure”) Many radiation-sensitive compositions utilizing the amplification effect have been proposed.
As the chemically amplified radiation-sensitive composition, for example, a composition containing a resin having a t-butyl ester group of carboxylic acid or a t-butyl carbonate group of phenol and a radiation-sensitive acid generator has been proposed. (Patent Document 1). In this composition, a t-butyl ester group or t-butyl carbonate group existing in the resin is dissociated by the action of an acid generated by exposure, and the resin has an acidic group composed of a carboxyl group or a phenolic hydroxyl group. As a result, it utilizes the phenomenon that the exposed area of the resist film becomes readily soluble in an alkali developer.
Further, as a resist pattern forming method capable of reliably forming a fine resist pattern even when the PED is long while obtaining a high resolution, a hydroxystyrene repeating unit and 3 hydroxyl atoms of hydroxystyrene are added. A copolymer containing a repeating unit substituted with a secondary alkyl group is known (Patent Document 2).
Further, as a resist material excellent in light transmission and storage stability around 248.4 nm, a copolymer having a repeating unit of a hydroxystyrene derivative having an acetal or ketal group, a repeating unit of a hydroxystyrene, and a repeating unit of a styrene derivative Coalescence is known (Patent Document 3).

By the way, as the miniaturization of the photolithography process proceeds rapidly, the characteristic requirements required for the photoresist are becoming increasingly severe. In addition to conventional resolution performance improvement, sensitivity improvement, and depth of focus margin (process margin), there is a need to eliminate development residue when forming a resist pattern.
However, it is difficult to eliminate the development residue when forming a resist pattern with a conventional copolymer containing hydroxystyrene repeating units.
JP-B-2-27660 JP 10-319596 A JP-A-8-123032

The present invention has been made in order to cope with such problems. For example, as a chemically amplified resist sensitive to far ultraviolet rays typified by KrF excimer laser, ArF excimer laser, or F ₂ excimer laser, the resolution performance is improved. Providing a radiation-sensitive resin composition that can eliminate development residue when forming a resist pattern and give a pattern shape with few white edges, as well as improvement, sensitivity, and depth of focus margin (process margin) Objective.

（式（ｘ）において、Ｒ¹⁴およびＲ¹⁵は、炭素数１〜６の直鎖状あるいは分岐状の飽和炭化水素基を表す。）
また、上記酸解離性基含有樹脂（Ａ）がフェノール性水酸基を側鎖に有する繰り返し単位（Ａ１）と、酸解離性基を有する繰り返し単位（Ａ２）とを含む共重合体であって、かつ繰り返し単位（Ａ１）が、下記式（１）で表される単量体を共重合させた後、酸を用いて加水分解することにより得られる共重合体であることを特徴とする。

（式（１）において、Ｒ¹は水素原子あるいはメチル基を表し、Ｒ²およびＲ³は、炭素数１〜４の飽和炭化水素基を表し、あるいはＲ²とＲ³とが互いに連結して炭素数３〜７の環状エーテルを形成している。）
また、上記酸解離性基を有する繰り返し単位（Ａ２）が下記式（２）で表される単量体を共重合させて得られることを特徴とする。

（式（２）において、Ｒ^1'は水素原子あるいはメチル基を表し、Ｒ⁴、Ｒ⁵およびＲ⁶は、炭素数１〜４の飽和炭化水素基を表す。）
また、上記感放射線性酸発生剤（Ｂ）がスルホンイミド化合物、オニウム塩化合物、ジアゾメタン化合物から選ばれる少なくとも１つであることを特徴とする。 The radiation-sensitive resin composition of the present invention comprises an acid-dissociable group-containing resin (A) that is insoluble or hardly soluble in alkali and becomes alkali-soluble by the action of an acid, and a radiation-sensitive acid generator (B). A radiation-sensitive resin composition to be contained, wherein the acid-dissociable group-containing resin (A) is a copolymer obtained by anionic polymerization of a monomer containing styrene which may have a substituent. The terminal of the copolymer is represented by the following formula (x).

(In the formula (x), R ¹⁴ and R ¹⁵ represent a linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms.)
The acid-dissociable group-containing resin (A) is a copolymer comprising a repeating unit (A1) having a phenolic hydroxyl group in the side chain and a repeating unit (A2) having an acid-dissociable group, and The repeating unit (A1) is a copolymer obtained by copolymerizing a monomer represented by the following formula (1) and then hydrolyzing with an acid.

(In formula (1), R ¹ represents a hydrogen atom or a methyl group, R ² and R ³ represents a saturated hydrocarbon group having 1 to 4 carbon atoms, or R ² and R ³ are linked to each other (C3-C7 cyclic ether is formed.)
Further, the repeating unit (A2) having an acid dissociable group is obtained by copolymerizing a monomer represented by the following formula (2).

(In Formula (2), R ^{1 ′} represents a hydrogen atom or a methyl group, and R ⁴ , R ^5, and R ⁶ represent a saturated hydrocarbon group having 1 to 4 carbon atoms.)
The radiation sensitive acid generator (B) is at least one selected from a sulfonimide compound, an onium salt compound and a diazomethane compound.

The copolymer of the present invention is obtained by copolymerizing the monomer represented by the formula (1) with the repeating unit (A1) having a phenolic hydroxyl group in the side chain and then hydrolyzing the copolymer. The terminal of the union has a structure represented by the formula (x).
The hydrolysis reaction of the monomer represented by the formula (1) has a lower activation energy compared to the hydrolysis reaction of butoxystyrene or the like which is reacted with a strong acid such as hydrochloric acid or sulfuric acid. Easy to proceed. As a result, the repeating unit (A1) having a phenolic hydroxyl group obtained by hydrolysis in the side chain can be easily formed in the copolymer. Moreover, since the monomer represented by Formula (1) does not react with alkalis, a stable radiation-sensitive resin composition can be obtained.
Therefore, the radiation-sensitive resin composition of the present invention can improve the resolution performance, sensitivity, and depth of focus margin (process margin), can eliminate the development residue when forming a resist pattern, and has a pattern shape with few white edges. give.

（式（ｘ）において、Ｒ¹⁴およびＲ¹⁵は、炭素数１〜６の直鎖状あるいは分岐状の飽和炭化水素基を表す。）
上記式（ｘ）のＲ¹⁴、Ｒ¹⁵における炭素数１〜６の直鎖状あるいは分岐状の飽和炭化水素基としては、例えば、メチル基、エチル基、ｎ−プロピル基、ｉ−プロピル基、ｎ−ブチル基、２−メチルプロピル基、１−メチルプロピル基、ｔ−ブチル基、ｎ−ペンチル基、イソペンチル基、ｎ−ヘプチル基、イソヘプチル基、ｎ−ヘキシル基、イソヘキシル基等のアルキル基が挙げられる。 The acid dissociable group-containing resin (A) is a copolymer obtained by anionic polymerization of a monomer containing styrene which may have a substituent, and the terminal of the copolymer is represented by the following formula (x ).

(In the formula (x), R ¹⁴ and R ¹⁵ represent a linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms.)
Examples of the linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms in R ¹⁴ and R ¹⁵ in the above formula (x) include, for example, a methyl group, an ethyl group, an n-propyl group, an i-propyl group, Alkyl groups such as n-butyl group, 2-methylpropyl group, 1-methylpropyl group, t-butyl group, n-pentyl group, isopentyl group, n-heptyl group, isoheptyl group, n-hexyl group, isohexyl group Can be mentioned.

共重合体の末端への式（ｘ）は、共重合反応の終了時に式（ｘ）の末端がハロゲンで置換されているハロゲン化炭化水素を反応させることで導入できる。そのようなハロゲン化炭化水素は重合反応において重合停止剤として働くものであり、好ましい重合停止剤は下記式（ｘ−３）で表される。

（式（ｘ−３）において、Ｒ¹⁴およびＲ¹⁵は、炭素数１〜６の直鎖状あるいは分岐状の飽和炭化水素基を表し、Ｙはヨウ素原子または臭素原子を表す。）
重合停止剤の例としては、式（ｘ−１）または式（ｘ−２）の末端がヨウ素原子または臭素原子で置換されている化合物等が挙げられる。
重合停止剤の具体例としては、例えばエチルブロマイド、イソブチルアイオダイド、イソペンチルアイオダイド等が挙げられる。 The saturated hydrocarbon group is preferably a methyl group or an ethyl group. Preferred examples of the formula (x) are represented by the following formula (x-1) or the following formula (x-2).

Formula (x) at the end of the copolymer can be introduced by reacting a halogenated hydrocarbon in which the end of formula (x) is substituted with halogen at the end of the copolymerization reaction. Such a halogenated hydrocarbon serves as a polymerization terminator in the polymerization reaction, and a preferred polymerization terminator is represented by the following formula (x-3).

(In the formula (x-3), R ¹⁴ and R ¹⁵ represent a linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms, and Y represents an iodine atom or a bromine atom.)
Examples of the polymerization terminator include compounds in which the terminal of formula (x-1) or formula (x-2) is substituted with an iodine atom or a bromine atom.
Specific examples of the polymerization terminator include, for example, ethyl bromide, isobutyl iodide, isopentyl iodide and the like.

R ² and R ³ in the monomer represented by the formula (1) are each a saturated hydrocarbon group having 1 to 4 carbon atoms, or a cyclic ether having 3 to 7 carbon atoms in which R ² and R ³ are connected to each other. Form a group.
Examples of the saturated hydrocarbon group having 1 to 4 carbon atoms include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, 2-methylpropyl group, 1-methylpropyl group, t- Examples thereof include alkyl groups such as butyl group.
Examples of the cyclic ether having 3 to 7 carbon atoms include a tetrahydrofuranyl group and a tetrahydropyranyl group.

  Examples of suitable monomers represented by the formula (1) include p- (ethoxy) ethoxystyrene, tetrahydroxyfuranyloxystyrene, tetrahydropyranyloxystyrene and the like.

The repeating unit having an acid dissociable group includes a phenolic hydroxyl group or a carboxyl group in a repeating unit in which a polymerizable unsaturated bond of a repeating unit containing one or more acidic functional groups such as a phenolic hydroxyl group and a carboxyl group is cleaved. And a repeating unit in which the hydrogen atom is substituted with an acid dissociable group. Among these, a repeating unit obtained by substituting a hydrogen atom of a phenolic hydroxyl group with an acid dissociable group is preferable, and a repeating unit obtained by copolymerizing a monomer represented by the formula (2) is more preferable.
In the formula (2), R ⁴ , R ⁵ and R ⁶ represent a C 1-4 saturated hydrocarbon group. Examples of the saturated hydrocarbon group having 1 to 4 carbon atoms include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, 2-methylpropyl group, 1-methylpropyl group, t- Examples thereof include monovalent alkyl groups such as a butyl group.
Examples of suitable monomers represented by the formula (2) include pt-butoxystyrene, mt-butoxystyrene, pt-amyloxystyrene, p-1-methoxycyclohexyloxystyrene, p Examples include -1-ethylcyclohexyloxystyrene, p-1-methylcyclopentyloxystyrene, and p-1-ethylcyclopentyloxystyrene.

The said copolymer can further contain other monomers other than the monomer which produces | generates Formula (1) and a repeating unit (A2). Examples include styrene, α-methyl styrene, 4-methyl styrene, 2-methyl styrene, 3-methyl styrene, isobornyl acrylate, tricyclodecanyl (meth) acrylate, tetracyclododecenyl (meth). An acrylate etc. are mentioned. Of these, styrene, α-methylstyrene, 4-methylstyrene, 2-methylstyrene, 3-methylstyrene, and tricyclodecanyl acrylate are preferable.
The ratio of these other monomers is usually 20 mol% or less in consideration of the balance between resolution performance and dry etching resistance.

The method of copolymerizing the monomer containing the monomer represented by the formula (1) and the monomer that generates the repeating unit (A2) is preferably anionic polymerization that easily controls the copolymer structure.
Anionic polymerization can be carried out, for example, as follows. Implemented by maintaining each monomer under stirring in a suitable organic solvent in a nitrogen atmosphere in the presence of an anionic polymerization initiator, for example, at a temperature of −100 ° C. to 120 ° C. for 0.5 to 24 hours. Is done.
As the organic solvent, either a hydrocarbon solvent or a polar solvent may be used. For example, examples of the hydrocarbon solvent include pentane, hexane, heptane, octane, methylcyclopentane, cyclohexane, benzene, toluene, xylene and the like.
In addition, when polymerizing with a hydrocarbon solvent, diethyl ether, di-n-butyl ether, ethylene glycol diethyl ether, ethylene glycol dibutyl ether, ethylene glycol dimethyl ether, propylene glycol dimethyl ether, propylene glycol diethyl ether, propylene as necessary. Glycol dibutyl ether, tetrahydrofuran, 2,2- (bistetrahydrofurfuryl) propane, bistetrahydrofurfuryl formal, methyl ether of bistetrahydrofurfuryl alcohol, ethyl ether of bistetrahydrofurfuryl alcohol, butyl ether of bistetrahydrofurfuryl alcohol, Ether compounds such as α-methoxytetrahydrofuran, dimethoxybenzene, dimethoxyethane And / or triethylamine, pyridine, N, N, N ′, N′-tetramethylethylenediamine, dipiperidinoethane, methyl ether of N, N-diethylethanolamine, ethyl ether of N, N-diethylethanolamine, N A tertiary amine compound such as N-diethylethanolamine butyl ether may be added to the polymerization system.
Examples of the polar solvent include ether compounds such as diethyl ether, tetrahydrofuran, dioxane and trioxane, and tertiary amines such as tetramethylethylenediamine (TMEDA) and hexamethylphosphoric triamide (HMPA).
These hydrocarbon solvents and polar solvents can be used singly or as a mixed solvent of two or more.
Examples of the anionic polymerization initiator include n-butyl lithium, s-butyl lithium, t-butyl lithium, ethyl lithium, ethyl sodium, phenyl lithium, lithium naphthalene, sodium naphthalene, potassium naphthalene, stilbene lithium, and 1,1-diphenylhexyl. Organic alkali metals such as lithium and 1,1-diphenyl-3-methylpentyl lithium are used.

At the end of the copolymerization reaction, a halogenated hydrocarbon such as ethyl bromide, isobutyl iodide, isopentyl iodide or the like is reacted to introduce a group represented by the formula (x) at the molecular chain terminal.
After the copolymerization, the side chain of the monomer represented by the formula (1) is selectively hydrolyzed only by hydrolysis of the copolymer, and a phenolic hydroxyl group is used as a side chain. A copolymer containing the repeating unit (A1) having the repeating unit (A2) having the acid dissociable group is obtained.
The hydrolysis of the monomer represented by the formula (1) may be performed by hydrolyzing all the side chains, or 30 mol% or less of the monomer represented by the formula (1) may be hydrolyzed. It may be left as a chain. Preferably, there are no unhydrolyzed side chains remaining.
The conditions and method for selectively hydrolyzing the side chain of the monomer represented by the formula (1) will be described below.
The hydrolysis reaction is based on an acid catalyst. Examples of the acid catalyst used in the hydrolysis reaction include hydrochloric acid, sulfuric acid, p-toluenesulfonic acid and its hydrate, methanesulfonic acid, trifluoromethanesulfonic acid, malonic acid, oxalic acid, and 1,1,1-trifluoro. Organic acids such as acetic acid, acetic acid and pyridinium salt of p-toluenesulfonic acid can be mentioned.
Suitable organic solvents used for hydrolysis include ketones such as acetone, methyl ethyl ketone and methyl amyl ketone; ethers such as diethyl ether and tetrahydrofuran (THF); alcohols such as methanol, ethanol and propanol; hexane and heptane Aliphatic hydrocarbons such as benzene, toluene, xylene, etc .; Halogenated alkyls such as chloroform, bromoform, methylene chloride, methylene bromide, carbon tetrachloride; Ethyl acetate, butyl acetate, Esters such as ethyl lactate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate and cellosolves; aprotic polar solvents such as dimethylformamide, dimethyl sulfoxide and hexamethylphosphoramide And the like. Among these, particularly preferred are acetone, methyl amyl ketone, methyl ethyl ketone, tetrahydrofuran, methanol, ethanol, propanol, ethyl acetate, butyl acetate, ethyl lactate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, and the like. .
As hydrolysis conditions, the concentration is 1 to 50% by weight, preferably 3 to 40% by weight, more preferably 5 to 30% by weight, and the temperature is -20 to 80 ° C, preferably 0 to 60 ° C, more preferably 5 to 5%. Although it depends on the reaction temperature, the temperature is 10 minutes to 20 hours, preferably 30 minutes to 10 hours, more preferably 1 hour to 6 hours.
Examples of the hydrolysis method include a method of dissolving the copolymer in an organic solvent, adding an acid catalyst, and stirring.

In the copolymer, the proportion of the repeating unit (A1) having a phenolic hydroxyl group in the side chain is usually 40 to 90 mol%, preferably 50 to 85 mol%, more preferably 60 to 80 mol%.
Moreover, the ratio of the repeating unit (A2) which has an acid dissociable group is 5-50 mol% normally, Preferably it is 10-40 mol%, More preferably, it is 15-35 mol%. The proportion of the repeating unit (2) is usually 5 to 50 mol%, preferably 10 to 40 mol%, more preferably 15 to 35 mol%.
When the ratio of each repeating unit is within the above range, the resolution of the resulting radiation-sensitive resin composition is improved, the sensitivity is improved, the depth of focus margin (process margin) is improved, and a resist pattern is formed. The remaining development can be eliminated. And give a shape with few white edges.

  The copolymer has a polystyrene-reduced weight average molecular weight (hereinafter also referred to as “Mw”) measured by gel permeation chromatography (GPC), which is 1,000 to 150,000, preferably 3,000 to 30,000. More preferably, it is 3,500 to 20,000, particularly preferably 4,000 to 17,000, and the ratio (Mw) between Mw and the polystyrene-equivalent number average molecular weight (hereinafter also referred to as “Mn”) measured by GPC. / Mn) is usually 1-5.

上記式（３）において、Ｒ⁸は１価の有機基を表し、Ｒ⁷は２価の有機基を表す。
１価の有機基としては、置換もしくは非置換の直鎖または分岐アルキル基、置換もしくは非置換の環式アルキル基、置換もしくは非置換のアリール基、パーフルオロアルキル基等が、２価の有機基としては、置換もしくは非置換のアルキレン基、置換もしくは非置換のアルケニレン基、置換もしくは非置換のフェニレン基等が挙げられる。 Radiation-sensitive acid generators (hereinafter referred to as “acid generators”) that generate acids upon exposure include (1) sulfonimide compounds, (2) disulfonylmethane compounds, (3) onium salt compounds, (4) Examples include sulfone compounds, (5) sulfonic acid ester compounds, and (6) diazomethane compounds.
Examples of these acid generators are shown below.
(1) Sulfonimide compound As a sulfonimide compound, it represents with following formula (3), for example.

In the above formula (3), R ⁸ represents a monovalent organic group, and R ⁷ represents a divalent organic group.
Examples of the monovalent organic group include a divalent organic group such as a substituted or unsubstituted linear or branched alkyl group, a substituted or unsubstituted cyclic alkyl group, a substituted or unsubstituted aryl group, and a perfluoroalkyl group. Examples thereof include a substituted or unsubstituted alkylene group, a substituted or unsubstituted alkenylene group, a substituted or unsubstituted phenylene group, and the like.

  Specific examples of the sulfonimide compound include N- (trifluoromethylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide. N- (10-camphorsulfonyloxy) succinimide, N- (10-camphorsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (10-camphorsulfonyl) Oxy) -7-oxabicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (4-methylphenylsulfonyloxy) succinimide, N- (4-methylphenylsulfonyloxy) Bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (4-trifluoromethyl Ruphenylsulfonyloxy) succinimide, N- (4-trifluoromethylphenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (perfluorophenylsulfonyloxy) Succinimide, N- (perfluorophenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (nonafluorobutylsulfonyloxy) succinimide, N- (nonafluorobutyl) Sulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (perfluorooctylsulfonyloxy) succinimide, N- (perfluorooctylsulfonyloxy) bicyclo [2.2 .1] hept-5-ene-2,3-dicarboximide, N (Phenylsulfonyloxy) succinimide, N- (phenylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (phenylsulfonyloxy) -7-oxabicyclo [2 2.2.1] Hept-5-ene-2,3-dicarboximide, N-{(5-methyl-5-carboxymethylbicyclo [2.2.1] hept-2-yl) sulfonyloxy} succinimide, etc. Is mentioned.

  Among the sulfonamides, N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (10-camphorsulfonyloxy) succinimide, N -(4-methylphenylsulfonyloxy) succinimide, N- (nonafluorobutylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (phenylsulfonyloxy) bicyclo [2.2.1] Hept-5-ene-2,3-dicarboximide, N-{(5-methyl-5-carboxymethylbicyclo [2.2.1] hept-2-yl) sulfonyloxy} Succinimide is preferred.

式中、Ｒ⁹およびＲ¹⁰は相互に独立に直鎖状もしくは分岐状の１価の脂肪族炭化水素基、シクロアルキル基、アリール基、アラルキル基またはヘテロ原子を有する１価の他の有機基を表し、ＸおよびＹは相互に独立にアリール基、水素原子、直鎖状もしくは分岐状の１価の脂肪族炭化水素基またはヘテロ原子を有する１価の他の有機基を表し、かつＸおよびＹの少なくとも一方がアリール基であるか、もしくはＸとＹが相互に連結して少なくとも１個の不飽和結合を有する単環または多環を形成しているか、もしくはＸとＹが相互に連結して下記式（４−１）で表される基を形成している。

ただし、Ｘ'およびＹ'は相互に独立に水素原子、ハロゲン原子、直鎖状もしくは分岐状のアルキル基、シクロアルキル基、アリール基またはアラルキル基を表すか、もしくは同一のもしくは異なる炭素原子に結合したＸ'とＹ'が相互に連結して炭素単環構造を形成しており、複数存在するＸ'およびＹ'はそれぞれ相互に同一でも異なってもよく、ｒは２〜１０の整数である。 (2) As a disulfonylmethane compound, it represents with following formula (4), for example.

In the formula, R ⁹ and R ¹⁰ are each independently a linear or branched monovalent aliphatic hydrocarbon group, cycloalkyl group, aryl group, aralkyl group or other monovalent organic group having a hetero atom. X and Y each independently represent an aryl group, a hydrogen atom, a linear or branched monovalent aliphatic hydrocarbon group or another monovalent organic group having a hetero atom, and X and At least one of Y is an aryl group, or X and Y are connected to each other to form a monocyclic or polycyclic ring having at least one unsaturated bond, or X and Y are connected to each other; Thus, a group represented by the following formula (4-1) is formed.

X ′ and Y ′ each independently represent a hydrogen atom, a halogen atom, a linear or branched alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, or bonded to the same or different carbon atoms. X ′ and Y ′ are connected to each other to form a carbon monocyclic structure, and a plurality of X ′ and Y ′ may be the same or different from each other, and r is an integer of 2 to 10. .

(3) Onium salt compound Examples of the onium salt compound include iodonium salts, sulfonium salts, phosphonium salts, diazonium salts, ammonium salts, and pyridinium salts.
Specific examples of the onium salt compound include bis (4-t-butylphenyl) iodonium nonafluorobutanesulfonate, bis (4-t-butylphenyl) iodonium trifluoromethanesulfonate, and bis (4-t-butylphenyl) iodonium perfluoro. Octanesulfonate, bis (4-tert-butylphenyl) iodonium p-toluenesulfonate, bis (4-tert-butylphenyl) iodonium 10-camphorsulfonate, bis (4-tert-butylphenyl) iodonium 4-trifluoromethylbenzenesulfonate Bis (4-t-butylphenyl) iodonium perfluorobenzenesulfonate, diphenyliodonium nonafluorobutanesulfonate, diphenyliodonium trifluoromethanesulfonate Diphenyliodonium perfluorooctanesulfonate, diphenyliodonium p-toluenesulfonate, diphenyliodoniumbenzenesulfonate, diphenyliodonium10-camphorsulfonate, diphenyliodonium4-trifluoromethylbenzenesulfonate, diphenyliodonium perfluorobenzenesulfonate, triphenylsulfonium nonafluorobutanesulfonate , Triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium perfluorooctanesulfonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfoniumbenzenesulfonate, triphenylsulfonium 10-camphorsulfonate, triphenylsulfonium 4-trifluoromethylbenzenesulfonate, triphenylsulfonium perfluorobenzenesulfonate, 4-hydroxyphenyl diphenylsulfonium trifluoromethanesulfonate, tris (p-methoxyphenyl) sulfonium nonafluorobutanesulfonate, tris (p-methoxyphenyl) sulfonium trifluoromethane Sulfonate, Tris (p-methoxyphenyl) sulfonium perfluorooctane sulfonate, Tris (p-methoxyphenyl) sulfonium p-toluenesulfonate, Tris (p-methoxyphenyl) sulfonium benzene sulfonate, Tris (p-methoxyphenyl) sulfonium 10-camphor Sulfonate, bis (p-fluorophenyl) iodonium trifluoromethane Sulfonate, bis (p-fluorophenyl) iodonium nonafluoromethanesulfonate, bis (p-fluorophenyl) iodonium 10-camphorsulfonate, (p-fluorophenyl) (phenyl) iodonium trifluoromethanesulfonate, tris (p-fluorophenyl) sulfonium Trifluoromethanesulfonate, tris (p-fluorophenyl) sulfonium p-toluenesulfonate, (p-fluorophenyl) diphenylsulfonium trifluoromethanesulfonate, 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluoromethylbenzenesulfonate, 2, Examples include 4,6-trimethylphenyldiphenylsulfonium 4-trifluoromethylbenzenesulfonate.

(4) Sulfone Compound Examples of the sulfone compound include β-ketosulfone, β-sulfonylsulfone, and α-diazo compounds thereof.
Specific examples of the sulfone compound include phenacylphenylsulfone, mesitylphenacylsulfone, bis (phenylsulfonyl) methane, 4-trisphenacylsulfone, and the like.

(5) Sulfonic acid ester compound Examples of the sulfonic acid ester compound include alkyl sulfonic acid esters, haloalkyl sulfonic acid esters, aryl sulfonic acid esters, and imino sulfonates.
Specific examples of the sulfonate compound include benzoin tosylate, pyrogallol tris (trifluoromethanesulfonate), pyrogallol tris (nonafluoro-n-butanesulfonate), pyrogallol tris (methanesulfonate), nitrobenzyl-9,10-diethoxyanthracene. -2-sulfonate, α-methylol benzoin tosylate, α-methylol benzoin n-octane sulfonate, α-methylol benzoin trifluoromethane sulfonate, α-methylol benzoin n-dodecane sulfonate, and the like.

式中、Ｒ¹¹およびＲ¹²は相互に独立にアルキル基、アリール基、ハロゲン置換アルキル基、ハロゲン置換アリール基等の１価の基を表す。 (6) Diazomethane compound As a diazomethane compound, the compound represented by following formula (5) is mentioned, for example.

In the formula, R ¹¹ and R ¹² each independently represent a monovalent group such as an alkyl group, an aryl group, a halogen-substituted alkyl group, or a halogen-substituted aryl group.

  Specific examples of the diazomethane compound include bis (trifluoromethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, bis (phenylsulfonyl) diazomethane, bis (4-methylphenylsulfonyl) diazomethane, methylsulfonyl-4-methylphenylsulfonyldiazomethane. , Cyclohexylsulfonyl-1,1-dimethylethylsulfonyldiazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, bis (3,3-dimethyl-1,5-dioxaspiro [5.5] dodecane-8-sulfonyl) diazomethane Bis (1,4-dioxaspiro [4.5] decane-7-sulfonyl) diazomethane, bis (t-butylsulfonyl) diazomethane, and the like.

  Among the acid generators, preferable acid generators include at least one compound selected from sulfonimide compounds, onium salt compounds, and diazomethane compounds. A particularly preferable acid generator is a sulfonimide compound, and in the present invention, it is particularly preferable to include a sulfonimide compound as an essential component. The reason is that a better pattern shape can be obtained by combining with a sulfonimide compound which is a nonionic acid generator.

Specific examples of preferred acid generators are illustrated below.
N- (trifluoromethylsulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (10-camphorsulfonyloxy) ) Succinimide, N- (10-camphorsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N-{(5-methyl-5-carboxymethylbicyclo [2. 2.1] hept-2-yl) sulfonyloxy} succinimide, N- (nonafluorobutylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide, N- (4 -Methylphenylsulfonyloxy) succinimide, N- (phenylsulfonyloxy) bicyclo [2.2.1] hept Sulfonimide compounds such as 5-ene-2,3-dicarboximide;
Bis (4-t-butylphenyl) iodonium trifluoromethanesulfonate, bis (4-t-butylphenyl) iodonium perfluoro-n-butanesulfonate, bis (4-t-butylphenyl) iodonium p-toluenesulfonate, bis (4 -T-butylphenyl) iodonium 10-camphorsulfonate, bis (4-t-butylphenyl) iodonium 2-trifluoromethylbenzenesulfonate, bis (4-t-butylphenyl) iodonium 4-trifluoromethylbenzenesulfonate, bis ( 4-t-butylphenyl) iodonium 2,4-difluorobenzenesulfonate, triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium perfluoro-n-butanesulfonate, Li triphenylsulfonium p- toluenesulfonate, triphenylsulfonium 10-camphorsulfonate, triphenylsulfonium 2-trifluoromethylbenzenesulfonate, triphenylsulfonium 4-trifluoromethyl benzenesulfonate, triphenylsulfonium 2,4-difluoro-methylbenzenesulfonate,
Bis (4-t-butylphenyl) iodonium perfluorooctane sulfonate, diphenyliodonium nonafluorobutanesulfonate, diphenyliodonium trifluoromethanesulfonate, diphenyliodonium perfluorooctanesulfonate, diphenyliodonium 10-camphorsulfonate, triphenylsulfonium perfluorooctanesulfonate, Tris (p-methoxyphenyl) sulfonium trifluoromethanesulfonate, tris (p-methoxyphenyl) sulfonium 10-camphorsulfonate, bis (p-fluorophenyl) iodonium trifluoromethanesulfonate, bis (p-fluorophenyl) iodonium nonafluoromethanesulfonate, Bis (p-fluorophenyl Iodonium 10-camphorsulfonate, (p-fluorophenyl) (phenyl) iodonium trifluoromethanesulfonate, tris (p-fluorophenyl) sulfonium trifluoromethanesulfonate, tris (p-fluorophenyl) sulfonium p-toluenesulfonate, (p-fluorophenyl) ) Onium salts such as diphenylsulfonium trifluoromethanesulfonate, 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluorobenzenesulfonate, 2,4,6-trimethylphenyldiphenylsulfonium 4-trifluoromethylbenzenesulfonate;
Bis (cyclohexylsulfonyl) diazomethane, bis (3,3-dimethyl-1,5-dioxaspiro [5.5] dodecane-8-sulfonyl) diazomethane, bis (1,4-dioxaspiro [4.5] decane-7-sulfonyl And diazomethane compounds such as diazomethane and bis (t-butylsulfonyl) diazomethane.

  In this invention, the usage-amount of an acid generator becomes like this. Preferably it is 0.1-20 weight part with respect to 100 weight part of resin, More preferably, it is 0.5-15 weight part. In the present invention, two or more acid generators can be mixed and used.

The radiation-sensitive resin composition of the present invention can contain an alkali-soluble resin, an acid diffusion controller, and other additives.
Examples of the alkali-soluble resin include poly (p-hydroxystyrene), partially hydrogenated poly (p-hydroxystyrene), poly (m-hydroxystyrene), poly (m-hydroxystyrene), and (p-hydroxystyrene) ( m-hydroxystyrene) copolymer, (p-hydroxystyrene) (styrene) copolymer, novolac resin, polyvinyl alcohol, polyacrylic acid, and the like. The Mw of these resins is preferably 1,000 to 1,000,000, more preferably 2,000 to 100,000. These alkali-soluble resins can be used alone or in admixture of two or more.
The blending amount of the alkali-soluble resin is preferably 30 parts by weight or less per 100 parts by weight of the resin.

式中、Ｒ¹³は、相互に同一でも異なってもよく、水素原子、アルキル基、アリール基またはアラルキル基（アルキル基、アリール基、アラルキル基等の水素原子が、例えば、ヒドロキシ基など、官能基で置換されている場合）を含む。 The acid diffusion control agent controls the diffusion phenomenon in the resist film of the acid generated from the acid generator by exposure, and has an action of suppressing an undesirable chemical reaction in the non-exposed region. By using such an acid diffusion control agent, the storage stability of the composition is improved, the resolution of the resist is improved, and the change of the line width of the resist pattern due to the fluctuation of PED can be suppressed, thereby stabilizing the process. It is extremely excellent in properties.
As the acid diffusion controller, a nitrogen-containing organic compound whose basicity is not changed by exposure or heat treatment in the resist pattern forming step is preferable.
Examples of such a nitrogen-containing organic compound include a compound represented by the following formula (6) (hereinafter referred to as “nitrogen-containing compound (I)”), a diamino compound having two nitrogen atoms in the same molecule ( Hereinafter referred to as “nitrogen-containing compound (II)”, diamino polymer having 3 or more nitrogen atoms (hereinafter referred to as “nitrogen-containing compound (III)”), amide group-containing compound, urea compound, nitrogen-containing heterocyclic compound Etc.

In the formula, R ¹³ may be the same as or different from each other, and a hydrogen atom such as a hydrogen atom, an alkyl group, an aryl group, or an aralkyl group (an alkyl group, an aryl group, an aralkyl group, etc. is a functional group such as a hydroxy group). In the case of

  Examples of the nitrogen-containing compound (I) include monoalkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine; di-n-butylamine, di-n- Dialkylamines such as pentylamine, di-n-hexylamine, di-n-heptylamine, di-n-octylamine, di-n-nonylamine, di-n-decylamine; triethylamine, tri-n-propylamine, Trialkylamines such as tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine Aniline, N-methylaniline, N, N-dimethylaniline, 2-methylaniline, 3-methyl Examples thereof include aromatic amines such as ruaniline, 4-methylaniline, 4-nitroaniline, diphenylamine, triphenylamine, and 1-naphthylamine.

Examples of the nitrogen-containing compound (II) include ethylenediamine, N, N, N ′, N′-tetramethylethylenediamine, N, N, N ′, N′-tetrakis (2-hydroxypropyl) ethylenediamine, tetramethylenediamine, Hexamethylenediamine, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenyl ether, 4,4′-diaminobenzophenone, 4,4′-diaminodiphenylamine, 2,2′-bis (4-aminophenyl) propane, 2- (3-aminophenyl) -2- (4-aminophenyl) propane, 2- (4-aminophenyl) -2- (3-hydroxyphenyl) propane, 2- (4-aminophenyl) -2- ( 4-hydroxyphenyl) propane, 1,4-bis [1- (4-aminophenyl) -1-methylethyl] benzene, 1,3- The [1- (4-aminophenyl) -1-methylethyl] benzene, and the like.
Examples of the nitrogen-containing compound (III) include polymers of polyethyleneimine, polyallylamine, dimethylaminoethylacrylamide, and the like.

Examples of the amide group-containing compound include formamide, N-methylformamide, N, N-dimethylformamide, acetamide, N-methylacetamide, N, N-dimethylacetamide, propionamide, benzamide, pyrrolidone, N-methylpyrrolidone and the like. Can be mentioned.
Examples of urea compounds include urea, methylurea, 1,1-dimethylurea, 1,3-dimethylurea, 1,1,3,3-tetramethylurea, 1,3-diphenylurea, tributylthiourea and the like. .
Examples of the nitrogen-containing heterocyclic compound include imidazoles such as imidazole, benzimidazole, 4-methylimidazole, 4-methyl-2-phenylimidazole, 2-phenylbenzimidazole; pyridine, 2-methylpyridine, 4-methylpyridine. Pyridine such as 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, N-methyl-4-phenylpyridine, nicotine, nicotinic acid, nicotinamide, quinoline, 8-oxyquinoline, acridine In addition to the above, pyrazine, pyrazole, pyridazine, quinosaline, purine, pyrrolidine, piperidine, morpholine, 4-methylmorpholine, piperazine, 1,4-dimethylpiperazine, 1,4-diazabicyclo [2.2.2] octane, etc. It is done.

  A base precursor having an acid dissociable group can also be used as the acid diffusion controller. Specifically, N- (t-butoxycarbonyl) piperidine, N- (t-butoxycarbonyl) imidazole, N- (t-butoxycarbonyl) benzimidazole, N- (t-butoxycarbonyl) 2-phenylbenzimidazole, N- (T-Butoxycarbonyl) dioctylamine, N- (t-butoxycarbonyl) diethanolamine, N- (t-butoxycarbonyl) dicyclohexylamine, N- (t-butoxycarbonyl) diphenylamine and the like can be mentioned.

Of these nitrogen-containing organic compounds, nitrogen-containing compounds (I) and nitrogen-containing heterocyclic compounds are preferred. Further, among the nitrogen-containing compounds (I), trialkylamines are particularly preferable, and among the nitrogen-containing heterocyclic compounds, imidazoles are particularly preferable.
The acid diffusion control agents can be used alone or in admixture of two or more.
The compounding amount of the acid diffusion controller is 15 parts by weight or less, preferably 0.001 to 10 parts by weight, and more preferably 0.005 to 5 parts by weight with respect to 100 parts by weight of the resin. In this case, when the compounding amount of the acid diffusion controller exceeds 15 parts by weight, the sensitivity as a resist and the developability of the exposed part tend to be lowered. If the blending amount of the acid diffusion controller is less than 0.001 part by weight, the pattern shape and dimensional fidelity as a resist may be lowered depending on the process conditions.

In the radiation sensitive resin composition of the present invention, a surfactant exhibiting an effect of improving the coating property and striation of the composition, the developing property as a resist, and the like can be blended.
Examples of such surfactants include polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenol ether, polyoxyethylene nonylphenol ether, polyethylene glycol dilaurate, and polyethylene glycol distearate. Examples of commercially available products include F-top EF301, EF303, and EF352 (manufactured by Tochem Products), Megafax F171 and F173 (manufactured by Dainippon Ink and Chemicals), Florad FC430 and FC431 ( Manufactured by Sumitomo 3M Limited), Asahi Guard AG710, Surflon S-382, SC101, SC102, SC103, SC104, SC105, SC106 (Asahi Glass Co., Ltd.), KP341 (Shin-Etsu Chemical Co., Ltd.), Polyflow No. 75, No. 95 (Kyoeisha Chemical Co., Ltd.) and the like.
The compounding amount of the surfactant is preferably 2 parts by weight or less with respect to 100 parts by weight of the acid dissociable group-containing resin.
Further, other sensitizers can be blended. Examples of preferred sensitizers include carbazoles, benzophenones, rose bengals, anthracenes and the like.
The blending amount of the sensitizer is preferably 50 parts by weight or less with respect to 100 parts by weight of the resin.
In addition, by blending dyes and / or pigments, the latent image of the exposed area can be visualized, and the influence of halation during exposure can be mitigated. By blending an adhesion aid, adhesion to the substrate is further improved. can do.
Furthermore, as other additives, an antihalation agent such as 4-hydroxy-4′-methylchalcone, a shape improver, a storage stabilizer, an antifoaming agent, and the like can be blended.

When the radiation sensitive resin composition of the present invention is used, the resin or the like is uniformly used in a solvent so that the total solid concentration is, for example, 0.1 to 50% by weight, preferably 1 to 40% by weight. After dissolution, the composition solution is prepared by, for example, filtering with a filter having a pore size of about 200 nm.
Examples of the solvent used for the preparation of the composition solution include ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-propyl ether acetate, ethylene glycol mono-n-butyl ether acetate and the like. Glycol monoalkyl ether acetates; propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether; propylene glycol dimethyl ether, propylene glycol diethyl Ether, propylene glycol di-n-propyl ether, propylene Propylene glycol dialkyl ethers such as recall di-n-butyl ether; propylene glycol monoalkyl such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol mono-n-propyl ether acetate, propylene glycol mono-n-butyl ether acetate Ether acetates; lactate esters such as methyl lactate, ethyl lactate, n-propyl lactate, i-propyl lactate; n-amyl formate, i-amyl formate, ethyl acetate, n-propyl acetate, i-propyl acetate, Aliphatic carboxylates such as n-butyl acetate, i-butyl acetate, n-amyl acetate, i-amyl acetate, i-propyl propionate, n-butyl propionate and i-butyl propionate Ethyl hydroxyacetate, ethyl 2-hydroxy-2-methylpropionate, methyl 2-hydroxy-3-methylbutyrate, ethyl methoxyacetate, ethyl ethoxyacetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, Methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, 3-methyl-3-methoxybutyl Other esters such as butyrate, methyl acetoacetate, ethyl acetoacetate, methyl pyruvate, ethyl pyruvate; aromatic hydrocarbons such as toluene, xylene; methyl ethyl ketone, methyl propyl ketone, methyl butyl ketone, 2-heptanone, 3-heptanone, 4 Ketones such as heptanone and cyclohexanone; amides such as N-methylformamide, N, N-dimethylformamide, N-methylacetamide, N, N-dimethylacetamide and N-methylpyrrolidone; lactones such as γ-butyrolacun Can be mentioned.
These solvents can be used alone or in admixture of two or more.

When forming a resist pattern from the radiation-sensitive resin composition of the present invention, the composition solution prepared as described above is applied by appropriate coating means such as spin coating, cast coating, roll coating, etc. A resist film is formed by coating on a substrate such as a silicon wafer or a wafer coated with aluminum, and a heat treatment (hereinafter referred to as “PB”) is performed at a temperature of about 70 ° C. to 160 ° C. in some cases. After that, exposure is performed through a predetermined mask pattern. The radiation used in this case depends on the type of the acid generator, for example, far ultraviolet rays such as F ₂ excimer laser (wavelength 157 nm), ArF excimer laser (wavelength 193 nm), KrF excimer laser (wavelength 248 nm), and synchrotron. X-rays such as radiation, and charged particle beams such as electron beams are appropriately selected and used. Moreover, exposure conditions, such as exposure amount, are suitably selected according to the compounding composition of a radiation sensitive resin composition, the kind of each additive, etc. In the present invention, far ultraviolet rays such as KrF excimer laser (wavelength 248 nm) are preferably used.

In the present invention, in order to stably form a high-precision fine pattern, it is preferable to perform a heat treatment (hereinafter referred to as “PEB”) for 30 seconds or more at a temperature of 70 to 160 ° C. after exposure. In this case, if the post-exposure baking temperature is less than 70 ° C., there is a possibility that the variation in sensitivity depending on the type of the substrate is widened.
Thereafter, the resist is developed with an alkali developer at 10 to 50 ° C. for 10 to 200 seconds, preferably 15 to 30 ° C., 15 to 100 seconds, particularly preferably 20 to 25 ° C. and 15 to 90 seconds. A pattern is formed.
As an alkaline developer, for example, an alkaline compound such as a tetraalkylammonium hydroxide is usually dissolved in a concentration of 1 to 10% by weight, preferably 1 to 5% by weight, particularly preferably 1 to 3% by weight. Alkaline aqueous solution is used.
In addition, a water-soluble organic solvent such as methanol or ethanol or a surfactant can be appropriately added to the developer composed of the alkaline aqueous solution. In forming the resist pattern, a protective film can be provided on the resist film in order to prevent the influence of basic impurities contained in the environmental atmosphere.

Synthesis example 1
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 degrees, 5.92 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 1.96 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 12.0 g of isobutyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added, and the mixture was stirred at room temperature (23 to 25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 8,000 and Mw / Mn of 1.1. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (A-1)”.
Copolymer Measurement of (A-1) and the following each polymer obtained in Synthesis Example 2-6 of Mw and Mn, Tosoh Co., Ltd. GPC column (G2000H _XL 2 present, one G3000H _XL, G4000H _The measurement was performed by gel permeation chromatography (GPC) using monodisperse polystyrene as a standard under the analysis conditions of a flow rate of 1.0 ml / min, an elution solvent tetrahydrofuran, and a column temperature of 40 ° C.
The terminal structures of the copolymer (A-1) and the polymers obtained in Synthesis Examples 2 to 6 below were confirmed by ¹³ C-NMR analysis.

Synthesis example 2
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 degrees, 5.92 ml of sec-butyllithium (1.83 mol / l cyclohexane solution) was added in the order of 1.96 g of N, N, N ′, N′-tetramethylethylenediamine. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 12.5 g of isopentyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 0.5 g of 35% hydrochloric acid aqueous solution were added, and the mixture was stirred at room temperature (23-25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 8,000 and Mw / Mn of 1.2, and as a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (A-2)”.

Synthesis example 3
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 4.0 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont brand name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 ° C., 9.47 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 3.14 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 18.4 g of isobutyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added and stirred at room temperature (23-25 ° C.) for 3 hours, and p- (1-ethoxy) ethoxy was added. Styrene was partially hydrolyzed. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 5000 and Mw / Mn of 1.1. As a result of ¹³ C-NMR analysis, the copolymerization molar ratio of p-hydroxystyrene, styrene and pt-butoxystyrene was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (A-3)”.

Synthesis example 4
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 degrees, 5.92 ml of sec-butyllithium (1.83 mol / l cyclohexane solution) was added in the order of 1.96 g of N, N, N ′, N′-tetramethylethylenediamine. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 12.5 g of isopentyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid aqueous solution, 200 g of propylene glycol monomethyl ether and 0.5 g of 35% aqueous hydrochloric acid were added, and the mixture was stirred at 49-51 ° C. for 1 hour for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 8,000 and Mw / Mn of 1.2, and as a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 75: 5: 20. This copolymer is referred to as “acid-labile group-containing resin (A-4)”.

Synthesis example 5
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 degrees, 3.0 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 0.98 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 5.8 g of isobutyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added and the mixture was stirred at room temperature (23-25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to coagulate, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 16,000 and Mw / Mn of 1.2. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene, and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (A-5)”.

Synthesis Example 6
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling this pressure-resistant glass bottle to -20 degrees, 4.44 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 1.47 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 9.38 g of isopentyl iodide was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added, and the mixture was stirred at room temperature (23 to 25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 12,000 and Mw / Mn of 1.2. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (A-6)”.

Comparative Synthesis Example 1
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene, and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neopre (DuPont product name) packing. Sealed with a perforated crown. After cooling this pressure-resistant glass bottle to −20 degrees, n-butyllithium (1.83 mol / l cyclohexane solution) was added in the order of 2.96 ml and N, N, N ′, N′-tetramethylethylenediamine 0.98 g. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 1.0 g of methanol was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added, and the mixture was stirred at room temperature (23 to 25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 16,000 and Mw / Mn of 1.3. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (α-1)”.

Comparative Synthesis Example 2
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling this pressure-resistant glass bottle to −20 ° C., n-butyllithium (1.83 mol / l cyclohexane solution) was added in the order of 4.44 ml and N, N, N ′, N′-tetramethylethylenediamine 1.47 g. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 1.5 g of methanol was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added and the mixture was stirred at room temperature (23-25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 12,000 and Mw / Mn of 1.2. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (α-2)”.

Comparative Synthesis Example 3
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 1.4 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont product name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 degrees, 5.92 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 1.96 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 2.0 g of methanol was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added, and the mixture was stirred at room temperature (23 to 25 ° C.) for 3 hours for hydrolysis. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 8,000 and Mw / Mn of 1.1. As a result of ¹³ C-NMR analysis, copolymerization moles of p-hydroxystyrene, styrene and pt-butoxystyrene were obtained. The ratio was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (α-3)”.

Comparative Synthesis Example 4
The solvent was refluxed for 6 hours in the presence of sodium metal and then distilled under a nitrogen atmosphere before use. The monomer was bubbled with dry nitrogen for 1 hour and then distilled before use. 37.6 g of p- (1-ethoxy) ethoxystyrene, 11.0 g of pt-butoxystyrene and 4.0 g of styrene are dissolved in 200 g of cyclohexane and charged in a dry pressure-resistant glass bottle with neoprene (DuPont brand name) packing Sealed with a perforated crown. After cooling the pressure-resistant glass bottle to −20 ° C., 9.47 ml of n-butyllithium (1.83 mol / l cyclohexane solution) and 3.14 g of N, N, N ′, N′-tetramethylethylenediamine were added in this order. The mixture was added and reacted for 1 hour while maintaining the temperature at -20 ° C. Thereafter, 3.2 g of methanol was injected to stop the reaction. It was confirmed that the color of the solution changed from red to colorless. After washing with 200 g of 3% by weight oxalic acid solution, 200 g of propylene glycol monomethyl ether and 1.5 g of p-toluenesulfonic acid were added and stirred at room temperature (23-25 ° C.) for 3 hours, and p- (1-ethoxy) ethoxy was added. Styrene was partially hydrolyzed. The obtained copolymer solution was dropped into a large amount of water to be solidified, and the produced white powder was filtered and dried overnight at 50 ° C. under reduced pressure.
The obtained copolymer had Mw of 5000 and Mw / Mn of 1.1. As a result of ¹³ C-NMR analysis, the copolymerization molar ratio of p-hydroxystyrene, styrene and pt-butoxystyrene was 72: 5: 23. This copolymer is referred to as “acid-labile group-containing resin (α-4)”.

Examples 1-13, Comparative Examples 1-4
The components shown in Table 1 (where parts are based on weight) were mixed in the amounts shown in Table 1 to obtain a uniform solution, and then filtered through a membrane filter having a pore size of 200 nm to prepare a composition solution. Thereafter, DUV42 manufactured by Brewer Science Co., Ltd. was spin-coated to a film thickness of 60 nm, each composition solution was spin-coated on a silicon wafer baked at 205 ° C. for 60 seconds, and then PB was performed under the conditions shown in Table 1. A resist film having a thickness of 270 nm was formed.
Next, using Nikon Corporation stepper S203B (numerical aperture 0.68, σ0.75, 2/3 annular illumination), irradiation was performed under the conditions shown in Table 1, and then PEB was performed under the conditions shown in Table 1. Was done. Thereafter, a 2.38 wt% tetramethylammonium hydroxide aqueous solution was used and developed by the paddle method at 23 ° C. for 1 minute, and then washed with pure water and dried to form a resist pattern. Table 1 shows the evaluation results of each resist.

The acid generator (B), acid diffusion controller (C) and solvent (D) in Table 1 are as follows.
Acid generator (B):
B-1: N- (trifluoromethylsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboximide B-2: Triphenylsulfonium trifluoromethanesulfonate B-3: Diphenyliodonium Nonafluorobutanesulfonate B-4: N-{(5-methyl-5-carboxymethylbicyclo [2.2.1] hept-2-yl) sulfonyloxy} succinimide B-5: Bis (p-fluorophenyl) iodonium 10-camphorsulfonate B-6: 2,4,6-trimethylphenyldiphenylsulfonium 2,4-difluorobenzenesulfonate B-7: Bis (t-butylsulfonyl) diazomethane acid diffusion controller (C):
C-1: 2-Phenylbenzimidazole C-2: Trioctylamine solvent (D):
D-1: Ethyl lactate D-2: Ethyl 3-ethoxypropionate D-3: Propylene glycol monomethyl ether acetate

Here, each resist was evaluated in the following manner.
(1) Sensitivity:
The resist film formed on the silicon wafer is exposed to light, immediately subjected to PEB, then alkali developed, washed with water, and dried to form a resist pattern. In each example and each comparative example, a line having a line width of 120 nm is formed. The exposure amount for forming an AND space pattern (1L1S) with a line width of 1: 1 was set as the optimum exposure amount, and the sensitivity was evaluated based on the optimum exposure amount.
(2) Depth of focus margin (DOF):
A 120 nm line-and-space pattern (1L1S) is exposed with an optimal exposure amount and a focal depth of −1.0 μm to +1.0 μm in increments of 100 nm, and the line width ranges from 108 nm (−10%) to 132 nm (+ 10%). ) Range (nm) was defined as the depth of focus margin. (3) Pattern shape (white edge):
The rounded portion of the pattern top of the 120 nm 1L1S pattern at the optimum exposure dose was observed using a CD-SEM (S-9220, manufactured by Hitachi High-Technologies Corporation), and the width of the white portion was measured. A schematic diagram of the pattern shape is shown in FIG. 1A shows a cross-sectional view, and FIG. 1B shows a CD-SEM diagram. A pattern top portion 2a of the pattern 2 formed on the substrate 1 is rounded, and the portion looks white with a width d. The shorter the width d, the better the pattern shape.

  The radiation-sensitive resin composition of the present invention has high resolution, excellent focus depth margin, no development residue, no white-edge development, without impairing the basic physical properties of the resist such as pattern shape, dry etching resistance, and heat resistance. Since a small pattern shape is provided, it can be used very favorably in the field of microfabrication represented by the manufacture of integrated circuit elements that are expected to be increasingly miniaturized in the future.

It is a schematic diagram of a pattern shape.

Explanation of symbols

1 substrate 2 pattern

Claims (8)

A radiation-sensitive resin composition comprising an acid-dissociable group-containing resin (A) that is insoluble or hardly soluble in alkali and becomes alkali-soluble by the action of an acid, and a radiation-sensitive acid generator (B). The acid-dissociable group-containing resin (A) is a copolymer obtained by anionic polymerization of a monomer containing styrene which may have a substituent, and the terminal of the copolymer is represented by the following formula ( x) The radiation sensitive resin composition characterized by the above-mentioned.

(In the formula (x), R ¹⁴ and R ¹⁵ represent a linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms.) Linear or branched saturated hydrocarbon group claim 1 radiation-sensitive resin composition, wherein the at least one group selected from methyl and ethyl groups of the 1 to 6 carbon atoms. The radiation sensitive resin composition according to claim 1, wherein the formula (x) is represented by the following formula (x-1) or the following formula (x-2).

The radiation-sensitive resin composition according to claim 1, wherein the terminal of the copolymer represented by the formula (x) is obtained by using a polymerization terminator represented by the following formula (x-3). object.

(In the formula (x-3), R ¹⁴ and R ¹⁵ represent a linear or branched saturated hydrocarbon group having 1 to 6 carbon atoms, and Y represents an iodine atom or a bromine atom.) The acid-dissociable group-containing resin (A) is a copolymer comprising a repeating unit (A1) having a phenolic hydroxyl group in a side chain and a repeating unit (A2) having an acid-dissociable group, and the repeating unit The unit (A1) is a copolymer obtained by copolymerizing a monomer represented by the following formula (1) and then hydrolyzing with an acid. Radiation sensitive resin composition.

(In formula (1), R ¹ represents a hydrogen atom or a methyl group, R ² and R ³ represents a saturated hydrocarbon group having 1 to 4 carbon atoms, or R ² and R ³ are linked to each other (C3-C7 cyclic ether is formed.) 6. The radiation-sensitive resin composition according to claim 5, wherein the repeating unit (A2) having an acid dissociable group is obtained by copolymerizing a monomer represented by the following formula (2).

(In Formula (2), R ^{1 ′} represents a hydrogen atom or a methyl group, and R ⁴ , R ^5, and R ⁶ represent a saturated hydrocarbon group having 1 to 4 carbon atoms.)   The radiation sensitive resin composition according to claim 1, wherein the radiation sensitive acid generator (B) is at least one selected from a sulfonimide compound, an onium salt compound and a diazomethane compound. The radiation sensitive resin composition according to claim 7, wherein the radiation sensitive acid generator (B) contains a sulfonimide compound.

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