JP4742004B2 - Plastic fluid valves and valve brackets - Google Patents

Description

  The present invention relates to a technique for suppressing cavitation that occurs during flow rate control by a flow rate adjusting mechanism and liquid feeding by a high pressure.

Many valves for controlling pure water or chemicals are used in semiconductor manufacturing apparatuses and liquid crystal panel manufacturing apparatuses.
Common problems with valves for controlling such fluids include cavitation caused by the pressure difference in the valve, generating bubbles in the liquid, and the fluid used contains a cohesive component such as slurry. In this case, there is a problem that the solidified product is generated in the staying part and the valve function is affected.
In semiconductor manufacturing equipment and liquid crystal panel manufacturing equipment, etc., there are cases in which a thin liquid film is generated on a wafer with a chemical solution, and when a chemical solution is applied onto the wafer in this way, bubbles are included in the chemical solution. If present, there is a risk that the process may be hindered and the yield may be deteriorated. In particular, in the technique used in an exposure process called immersion exposure, the problem of bubbles is important.

The immersion exposure technique is a technique for increasing the resolution as compared with dry exposure by filling ultrapure water between the wafer and the projection lens. This is based on the principle that the refractive index of water is higher than the refractive index of air, thereby producing a lens effect. However, in order to use water as a lens, it is required that impurities are not contained, and bubbles are liquid. If it gets mixed in, it will not be established as a lens.
In addition, in semiconductor manufacturing equipment and liquid crystal panel manufacturing equipment, there are cases where condensable components such as slurry are included in the fluid used to polish the wafer surface. It tends to accumulate in the liquid retention part inside the valve and may stick.
Once the slurry is fixed in the pipe, it may be a factor that hinders the operation of the valve depending on the location, and measures such as keeping the liquid in the pipe constantly flowing are taken.

The generation of bubbles due to the cavitation phenomenon and the sticking of the slurry in the pipe are easy to take measures if the inside of the valve passage is visible.
Patent Document 1 discloses a technique related to a substrate processing apparatus. By providing a transparent window made of quartz or hard vinyl chloride in the discharge flow path of the waste liquid switching valve, the operation of the valve body can be confirmed. Yes.
In Patent Document 2, for example, the body of a Y-type strainer is made transparent so that the inside can be visually recognized, and a coating liquid containing titanium oxide is applied to the outer surface, so that the surface can be used outdoors. Since it is hard to get dirt and dew condensation, it is possible to realize a Y-strainer with high internal visibility even outdoors.

JP 2000-133628 A Japanese Unexamined Patent Publication No. 2005-321028

However, the conventional techniques have the following problems.
(1) The entire flow path cannot be confirmed The provision of a viewing window in the flow path as in Patent Document 1 is used regardless of the valve, but in a viewing window as shown in Patent Document 1, A part where the part of the bulb is flat is necessary, and only the part with the observation window can be confirmed.
Moreover, since the shape on the inner diameter side of the flow path is changed by attaching a viewing window separately, there is a problem that turbulent flow is generated in the flow path.
In particular, in order to confirm the cavitation phenomenon, it is necessary to clearly confirm the flow path in the vicinity of the contact portion between the valve body and the valve seat. In addition, in order to confirm the position of the slurry, it is necessary to see the entire flow path, and it is not sufficient to attach the observation window.

(2) Visibility cannot be ensured simply by making the body transparent.
Patent Document 2 only introduces an example of a Y-type strainer, and does not show how to apply this to a valve. For example, if the body of the valve is simply made transparent, the cavitation phenomenon There is a problem that it is impossible to ensure the visibility necessary for confirming bubbles or the like generated in the case.
There are many chemical liquid valves using a transparent resin such as PFA, and whether or not the chemical liquid is flowing inside can be confirmed if the chemical liquid is colored. However, the transparency is insufficient to confirm the state of the slurry sticking or the generation of bubbles.

  The present invention has been made to solve the above problems, and provides a resin fluid valve and a valve bracket capable of visually confirming the entire flow path and confirming the adhesion of slurry and the generation of bubbles. For the purpose.

In order to solve the above problems, the resin fluid valve and the valve bracket have the following configurations.
(1) A valve having an input flow path and an output flow path, a first communication flow path communicating with the input flow path, and a valve seat formed in the center with a valve hole communicating with the first communication flow path A valve body portion including a seat forming portion, a second communication channel formed around the valve seat forming portion and communicating the valve hole and the output channel, and abuts on the valve seat In the resin fluid valve comprising: a valve body having a flexible film that is spaced apart; and a valve body driving unit that reciprocally moves the valve body having the flexible film, the valve body section includes the input flow path, The first communication channel, the second communication channel, and the output channel are formed of a transparent resin so that bubbles can be generated due to a cavitation phenomenon and the mixture can be observed. A connecting rib for connecting the valve body portion and the valve body driving portion, the connecting rib The valve body portion is provided on the joint surface side of the valve body portion and the valve body drive portion from the position where the valve seat is formed, and a through hole is formed in the connection rib, By passing a fixing screw through the through hole and fastening it to the female screw portion formed in the valve body driving portion, the presence of the fixing screw does not hinder the visual observation of the flow path, and is necessary. A resin fluid valve characterized by ensuring the visibility of a portion .

(2) In the resin fluid valve described in (1), the input flow path, the first communication flow path, the second communication flow path, and the output flow path of the valve body portion are provided. The wall surface to be formed is thinly formed with a certain thickness along the shape of the flow path .

(3 ) In the resin fluid valve described in (1) or ( 2), the valve body portion is formed of vinyl chloride .

( 4 ) In the valve bracket for attaching the resin fluid valve described in (1 ) to a separate body, the valve bracket is provided with a colored surface portion colored in a dark color, and the colored surface portion is disposed on a side surface of the valve body portion. Valve bracket characterized by
( 5 ) A valve having an input flow path and an output flow path, a first communication flow path communicating with the input flow path, and a valve seat formed in the center with a valve hole communicating with the first communication flow path A valve body portion including a seat forming portion, a second communication channel formed around the valve seat forming portion and communicating the valve hole and the output channel, and abuts on the valve seat And a valve bracket for attaching a resin fluid valve to a separate body, the valve body comprising: a valve body having a flexible film that is spaced apart; and a valve body drive unit that reciprocally moves the valve body having the flexible film. The portion is transparent so that the input flow channel, the first communication flow channel, the second communication flow channel, and the output flow channel can observe the generation of bubbles due to the cavitation phenomenon and the accumulation of the mixture. such that it is formed of a resin, comprising a mirror-finished surface that is mirror-finished, the Surface processed surface, the valve bracket, characterized in that the side surface of the valve body portion provided so as to be visible from the valve member driving portion side.

Next, operations and effects of the resin fluid valve having the above-described configuration and the valve bracket will be described.
First, the invention described in (1) includes an input flow channel and an output flow channel, and a first communication flow channel communicating with the input flow channel and a valve hole communicating with the first communication flow channel are formed in the center. A valve body portion comprising: a valve seat forming portion provided with the valve seat; and a second communication flow passage formed around the valve seat formation portion and communicating the valve hole and the output flow passage. A valve body having a flexible membrane that contacts and separates from the valve seat, and a valve body drive unit that reciprocally moves the valve body having the flexible membrane. The portion is transparent so that the input flow channel, the first communication flow channel, the second communication flow channel, and the output flow channel can observe the generation of bubbles due to the cavitation phenomenon and the accumulation of the mixture. A connecting resin for connecting the valve body part and the valve body driving part. The connecting rib is formed on the valve body portion, and is provided closer to a joint surface side of the valve body portion and the valve body driving portion than a position where the valve seat is formed, and the connecting rib A through hole is formed in the through hole, and a fixing screw is passed through the through hole, and is fastened to a female screw portion formed in the valve body driving portion, thereby preventing the presence of the fixing screw when visually recognizing the flow path. Since it is a resin fluid valve characterized by being able to ensure the visibility of the necessary part, it is excellent in visibility inside the flow path, and a cavitation phenomenon occurs in the flow path, It is possible to check whether bubbles are generated.

  As a result, the pressure on the primary side can be adjusted so that cavitation does not occur while visually observing, so that the cavitation phenomenon can be surely suppressed, and the state of the accumulation of the mixture in the valve body, for example, the slurry is fixed. Since it is possible to visually confirm whether or not the valve operation is adversely affected, it contributes to early detection of a defective portion.

Further, the invention is the resin fluid valve according to (1), an input channel of the valve body portion, the first connecting flow channel, the second communication flow channel, and the flow of the output channel according to (2) The wall that forms the channel is thin with a constant thickness along the channel shape, so the inside of the channel can be visually confirmed, and the occurrence of bubbles due to the cavitation phenomenon and the adhesion of the slurry can be confirmed visually. It becomes easy.
Even if the valve body is simply formed of a transparent resin, if the valve body is thick or there are parts where the thickness changes, it will be difficult to check the interior due to factors such as diffuse reflection of the light. . However, if the wall surface forming the flow path is thin and has a constant thickness, the factor can be eliminated as much as possible, so that it is easy to see.

The invention described in (3) is a resin fluid valve described in (1) or (2) , wherein the valve body portion is formed of vinyl chloride, and vinyl chloride has high corrosion resistance. It can correspond to.

Moreover, the invention described in (4) is a valve bracket for attaching the resin fluid valve described in (1) to a separate body. The bracket includes a flat surface that is colored in a dark color, and the colored surface is Since it is arrange | positioned at the side surface of a valve body part, when visualizing the valve | bulb for resin fluids, it becomes possible to raise visibility because the background is colored in dark color.
The invention described in (5) includes an input flow path and an output flow path, and a first communication flow path communicating with the input flow path and a valve hole communicating with the first communication flow path are formed in the center. A valve body portion comprising: a valve seat forming portion provided with the valve seat; and a second communication flow passage formed around the valve seat formation portion and communicating the valve hole and the output flow passage. And a valve body having a flexible membrane that contacts and separates from the valve seat, and a valve body drive unit that reciprocates the valve body having the flexible membrane, and is attached to a separate body In the valve bracket, the valve body portion includes the input flow path, the first communication flow path, the second communication flow path, and the output flow path, the generation of bubbles due to a cavitation phenomenon, and the mixture It is formed of a transparent resin so that the state of the deposit can be observed, and has been mirror-finished A mirror-finished surface is provided, and the mirror-finished surface is provided so that the side surface of the valve body portion can be visually recognized from the valve body drive portion side. Even when the valve cannot be confirmed, it can be viewed from the valve body drive unit side.

A resin fluid valve and a valve bracket according to an embodiment of the present invention will be described in detail with reference to the drawings.
First, the configuration of the first embodiment of the present invention will be described.
(First embodiment)
FIG. 1 shows a cross-sectional view of the fluid valve of the first embodiment.
The fluid valve 10 is composed of two parts, a valve body 11 and a valve body drive unit 20.
The valve body 11 is made of transparent vinyl chloride, and includes an input flow path 12a, a first communication flow path 12b communicating with the input flow path 12a, a valve seat forming portion 12c formed at the center of the valve body 11, The valve seat 14 is provided on the end face of the valve seat forming portion 12c and formed with the valve hole 13 communicating with the first communication channel 12b. The valve seat 14 is formed around the valve seat forming portion 12c. A second communication channel 12d that communicates with the output channel 12e is provided.
The input flow path 12a and the output flow path 12e are formed with tapered screw parts so that they can be connected to separately provided pipes.
It is preferable that the first communication flow path 12b, the valve seat forming portion 12c, and the second communication flow path 12d are formed smoothly without unnecessary irregularities on the inner surface as much as possible. Further, the thickness of the valve body 11 forming the first communication channel 12b, the valve seat forming portion 12c, and the second communication channel 12d is as thin as possible to ensure the fluid pressure necessary for the fluid valve 10, It is desirable to form with a constant thickness.

A flexible diaphragm valve body 30 is sandwiched between the valve body driving unit 20 and the valve body 11. The diaphragm valve body 30 is formed of a resin such as PTFE. The diaphragm portion has a so-called flexible property, so-called flexibility, but may be a valve body having flexibility such as a bellows instead of the diaphragm.
The diaphragm valve body 30 is connected to a shaft portion 22 a included in the piston 22. The piston 22 includes a shaft portion 22 a and a pressure receiving portion 22 b that slides on the inner wall surface of the drive portion body 21.
The drive unit body 21 is appropriately made of PPS, aluminum, or the like depending on the usage environment. In addition to this, vinyl chloride, polypropylene, or the like may be used as the material of the drive unit body 21, but the material may be appropriately selected based on the design concept.
Since the valve body drive unit 20 is a mechanism that operates by operating air, an operation air A port 21a and an operation air B port 21b are formed on the side surfaces thereof. In addition to the spring member 25 being provided on the drive unit body 21, an adjustment screw 23 that regulates the stroke of the piston 22 is provided. The adjustment screw 23 is provided with a lock nut 24.

2 is a front view of the fluid valve, FIG. 3 is a side view of the fluid valve 10 as viewed from the output flow path 12e side, and FIG. 4 is a view of the fluid valve 10 from the input flow path 12a side. FIG. 5 is a bottom view of the fluid valve 10.
The valve body 11 and the valve body drive unit 20 constituting the fluid valve 10 are fixed from the valve body 11 side by four fixing screws 16. The valve body 11 is formed with a connecting rib 15 and has a through hole through which the fixing screw 16 passes. As shown in FIG. 5, the connecting rib 15 is formed in the same area as the lower surface of the valve body drive unit 20, and a female screw portion (not shown) formed on the valve body drive unit 20 using the fixing screw 16 By passing through and fixing the through-hole formed in the connecting rib 15, the integrated fluid valve 10 is obtained.
In FIGS. 2 to 5, a countersink hole is formed in the connecting rib 15 and the fixing screw 16 is tightened. This is a corrosive chemical atmosphere in which the use environment is corrosive. In this case, it also means that the fixing screw 16 is not directly corroded. Of course, the connecting rib 15 may be formed without providing the countersink hole, the fixing screw 16 may be made of resin, resin-coated, or highly corrosion-resistant metal may be used. Should be changed.

Since the first embodiment is configured as described above, it exhibits the operations and effects described below.
The fluid valve 10 can block and communicate the input flow path 12a and the output flow path 12e by bringing the diaphragm valve element 30 into contact with and separating from the valve seat 14.
The input flow path 12a is provided with a taper screw, connected to a separately provided primary side pipe or the like, and supplied with a chemical solution. When the chemical liquid is supplied to the input flow path 12a, the chemical liquid passes through the first communication flow path 12b connected to the input flow path 12a and reaches the valve hole 13.
Since the valve body drive unit 20 is an NC type valve, the spring member 25 provided inside the valve body drive unit 20 biases the piston 22 in a state where the operation air is not supplied to the operation air A port 21a. Thus, a force in the direction of the valve body 11, that is, the lower side in FIG. For this reason, the diaphragm valve body 30 connected to the shaft portion 22a abuts on the valve seat 14 and blocks the chemical solution.
However, when operating air is supplied to the operating air A port 21a and an upward force in FIG. 1 is applied to the pressure receiving portion 22b, the diaphragm valve body 30 connected to the shaft portion 22a is separated from the valve seat 14, Since the valve hole 13 communicates with the second communication flow path 12d, the chemical solution flows from the valve hole 13 through the second communication flow path 12d to the output flow path 12e connected to the second communication flow path 12d for output. The chemical solution is supplied to the secondary side pipe connected to the flow path 12e.

In this way, the fluid valve 10 serves to communicate and block the chemical solution from the primary side to which the input flow path 12a is connected to the secondary side pipe to which the output flow path 12e is connected.
The opening degree of the diaphragm valve body 30 can be adjusted by adjusting the adjusting screw 23 and locking it with the lock nut 24. By adjusting the adjusting screw 23, the flow rate of the chemical solution flowing through the fluid valve 10 can be adjusted. Is possible. Therefore, the flow rate on the secondary side of the fluid valve 10 can be adjusted, and the flow rate can be easily adjusted without the need for individually adjusting the flow rate such as a regulator.

Since the valve body 11 of the fluid valve 10 is made of transparent vinyl chloride, the input channel 12a, the first communication channel 12b, and the second communication channel 12d, which are the channels of the fluid valve 10, are used. , And the output flow path 12e can be visually confirmed.
Therefore, the thickness of the wall surface forming the first communication flow path 12b, the valve seat forming portion 12c, and the second communication flow path 12d included in the valve body 11 is constant, and is smoothly formed without unnecessary unevenness. Is desirable. This is for the purpose of suppressing irregular reflection of light and for making the inside easier to visually recognize.
For example, if a glass plate is imagined, if there are fine irregularities on the surface, it will look like ground glass and will obscure the field of view, and the scenery seen through the glass plate will be distorted where there is a wave. That is, if there is a factor that obstructs the straight travel of visible light, such as irregularities and undulations, in the valve body 11, it becomes difficult to visually recognize the inside of the flow path of the fluid valve 10. It is. Therefore, it is not preferable to insert ribs for reinforcing the valve body 11 or stealing meat to reduce the weight.

The fluid valve 10 used in this way generates bubbles B inside the flow path provided in the valve body 11 of the fluid valve 10 due to a cavitation phenomenon depending on the use situation, or deposits of a mixture or a solidified substance, for example, adhesion of slurry. May cause malfunctions.
Here, the cavitation phenomenon will be described. Cavitation is a phenomenon in which the pressure drops below the saturated water vapor pressure due to the movement of the liquid and the like, and bubbles are generated in the liquid. These bubbles collapse and disappear when the pressure of the liquid recovers, but a strong impact force is generated at the time of the collapse, causing noise. Further, this impact force may cause damage (erosion) on the surface of the object.

In the fluid valve 10, when the fluid flows from the valve hole 13 through the valve seat 14 and the diaphragm valve body 30 to the second communication flow path 12 d, pressure changes and air bubbles are easily generated. This is shown in FIGS. 6 and 7. FIG.
FIG. 6 shows a difference in pressure between the first communication channel 12b and the second communication channel 12d when the fluid pressure supplied to the first communication channel 12b is high in the fluid valve 10 of the first embodiment. FIG. 3 is a cross-sectional view of the fluid valve 10 showing how air bubbles are generated and bubbles are generated.
FIG. 7 shows that, in the fluid valve 10 of the first embodiment, the gap between the diaphragm valve body 30 and the valve seat 14 is small, so that a pressure difference is generated between the first communication channel 12b and the second communication channel 12d. The sectional view of valve 10 for fluids showing signs that air bubbles are generated is shown.

When the fluid pressure F representing the pressure of the chemical solution flowing into the input flow path 12a included in the fluid valve 10 is large, the second communication flow path 12d is formed from the gap X between the valve hole 13 and the diaphragm valve body 30 as shown in FIG. When flowing into the air bubble, a bubble B is generated due to a pressure difference between the first communication channel 12b and the second communication channel 12d.
On the other hand, even when the fluid pressure F of the chemical solution supplied from the primary side is low, if the gap X between the valve hole 13 and the diaphragm valve body 30 is narrow as shown in FIG. When the chemical solution flows into the flow path 12d, bubbles B are generated due to the pressure difference between the first communication flow path 12b and the second communication flow path 12d.
That is, if the gap X corresponding to the fluid pressure F is not ensured, the bubbles B are generated due to the cavitation phenomenon.

In order to suppress this cavitation phenomenon, an appropriate gap X corresponding to the fluid pressure F may be provided. Therefore, while confirming the flow path of the transparent valve body 11 provided in the fluid valve 10, The adjustment screw 23 may be adjusted to adjust the opening, or the primary pressure fluid pressure F supplied to the input flow path 12a may be reduced.
Since the valve body 11 is formed of transparent vinyl chloride, it is possible to visually confirm the generation of the air bubbles B. The adjustment screw 23 is adjusted to narrow the gap X more than necessary, or the primary side pressure is reduced. It won't drop too much.
In addition, the place where the bubble B is generated due to the cavitation phenomenon as described above is often generated in a portion between the valve hole 13 and the diaphragm valve body 30 and the second communication flow path 12d. Therefore, when making the valve body 11 transparent, in particular, in order to increase the visibility of this part, a technique such as partially reducing the thickness or increasing the surface roughness by performing additional machining. By adopting, it can be expected to increase the effect.

In addition, a phenomenon called water hammer may occur in the pipe depending on conditions such as the length, size, and branching condition of the pipe when the fluid valve 10 is attached. When a water hammer occurs, a pressure amplitude is generated in the fluid in the pipe including the fluid valve 10, and cavitation may occur due to the pressure amplitude.
In order to suppress the cavitation caused by the water hammer, a device for controlling the exhaust speed, such as a speed controller, is attached to the operation air A port 21 a provided in the valve body drive unit 20, so that the operation air A is closed when the fluid valve 10 is closed. A means of restricting the flow rate of the operation air discharged from the port 21a can be considered. By slowing down the exhaust speed, the valve closing speed of the fluid valve 10 can be slowed down, and as a result, the occurrence of water hammer can be suppressed.
Regarding the adjustment of the speed controller provided in the operation air A port 21a, the state of the diaphragm valve body 30 is actually confirmed, and the bubble B generated in the valve body 11 due to the cavitation phenomenon caused by the water hammer is confirmed. Therefore, the optimum adjustment can be performed without delaying the valve closing time of the fluid valve 10 more than necessary.

Next, the sticking of the slurry will be described.
In some cases, a chemical solution mixed with slurry is used to polish the surface of a silicon wafer in a semiconductor manufacturing apparatus or the like. This slurry may be deposited and fixed in a place where the chemical solution stays, which may block the flow path of the fluid valve 10 or obstruct the operation of the diaphragm valve body 30.
Therefore, measures such as keeping the chemical solution flowing all the time or purging periodically may be taken.
However, even in such a case, if the valve body 11 of the fluid valve 10 is formed of transparent vinyl chloride, the work can be performed while checking the internal state, and therefore the place where the slurry is deposited and fixed Can be identified, and it is possible to immediately determine whether the measures being taken are effective.
For this reason, it becomes possible to discharge | emit the deposit of a mixture or a solidified material efficiently.

In order to visually confirm the generation of the bubbles B due to the cavitation phenomenon and the adhesion of the slurry as described above, the valve body 11 included in the fluid valve 10 is formed of transparent vinyl chloride, and the fluid passage is formed inside the flow path. 10 can be observed from outside.
As for the transparency of this transparent vinyl chloride, as a result of several tests, it was found that if the “total light transmittance” is 50% or more, the inside of the channel can be confirmed effectively. However, the higher the total light transmittance, the better the visibility. Therefore, it is desirable that the total light transmittance is designed to be high in order to ensure the visibility as much as possible.

Further, manufacturing the valve body 11 of the fluid valve 10 with transparent vinyl chloride has advantages other than improving visibility. That is, it is possible to sterilize the internal fluid by irradiating the valve body 11 with, for example, ultraviolet rays.
In the case where pure water is flowing through a pipe provided with the fluid valve 10, if a stagnant portion is formed, there is a possibility that bacteria and bacteria will propagate. In the valve body 11 provided in the fluid valve 10, since the retention portion is substantially formed when the valve is closed, measures are taken such as shortening the valve closing time or periodically cleaning the valve body 11. However, there are cases where such measures are not sufficient.
Therefore, the effect of suppressing the growth of bacteria and bacteria can be expected by directly irradiating the valve body 11 with ultraviolet rays and sterilizing the pure water remaining in the internal flow path.
In addition, it is not necessary to limit the light ray to irradiate to an ultraviolet-ray, and it does not prevent using what has a bactericidal action.

The configuration, operation, and effects of the first embodiment described above are summarized as follows.
(1) A valve seat that includes an input flow path 12a and an output flow path 12e, and a first communication flow path 12b that communicates with the input flow path 12a and a valve hole 13 that communicates with the first communication flow path 12b. A valve body 11 including a valve seat forming portion 12c provided with 14 and a second communication flow passage 12d formed around the valve seat forming portion 12c and communicating the valve hole 13 with the output flow passage 12e; In the fluid valve 10 comprising: a diaphragm valve body 30 that contacts and separates from the valve seat 14; and a valve body drive unit 20 that reciprocates the diaphragm valve body 30.
The valve body 11 has an input flow path 12a, a first communication flow path 12b, a second communication flow path 12d, and an output flow path 12e. Generation of bubbles due to a cavitation phenomenon and accumulation of a mixture or a coagulum Therefore, it is possible to confirm whether or not bubbles are generated by generating a cavitation phenomenon in the flow path.

  As a result, the pressure on the primary side can be adjusted so that cavitation does not occur while observing the flow path in the valve body 11, so that the cavitation phenomenon can be reliably suppressed, and the mixture and coagulation in the valve body 11 can be suppressed. Since it is possible to visually check the state of the accumulation of substances, for example, whether the slurry adheres and adversely affects the operation of the valve, it contributes to the early detection of a defective portion of the fluid valve 10.

(2) In the fluid valve 10 described in (1), along the flow path shapes of the input flow path 12a, the first communication flow path 12b, the second communication flow path 12d, and the output flow path 12e of the valve body 11. Therefore, the inside of the flow passage of the valve body 11 can be visually confirmed, and the generation of bubbles B due to the cavitation phenomenon, the sticking of the slurry, and the like can be easily confirmed visually.
Even if the valve body 11 is simply formed of a transparent resin, if the thickness is large or there is a portion where the thickness changes, it is difficult to confirm the inside due to factors such as irregular reflection of light on the formed surface. However, if the wall surface forming the flow path is thin and has a constant thickness, the factor can be eliminated as much as possible, so that it is easy to see.

(3) The fluid valve 10 described in (1) or (2) includes a connection rib 15 that connects the valve body 11 and the valve body drive unit 20, and the connection rib 15 includes the valve seat 14. Formed on the joint surface side of the valve body 11 part and the valve body drive part 20 from the position where the valve body is formed, a through hole is formed in the connecting rib 15, and the fixing screw 16 is passed through the through hole to drive the valve body Since it fastens to the internal thread part formed in the part 20, when presence of the fixing screw 16 visually recognizes a flow path, it does not become obstructive.
The valve body 11 and the valve body drive unit 20 are often fixed by a fixing screw 16, but the through hole of the fixing screw 16 causes light refraction even if the valve body 11 is formed of a transparent resin. Worsens visibility. Moreover, it is difficult to use a transparent material for the fixing screw 16. Furthermore, since the connecting rib 15 itself is formed in accordance with the size of the body of the valve body driving unit 20, a certain thickness is required. Therefore, it becomes a factor which deteriorates visibility.
The cavitation phenomenon occurs in the portion between the valve body drive unit 20 and the valve seat 14 where a pressure difference occurs. Therefore, the connecting rib 15 that causes the visibility to be deteriorated from the position where the valve seat 14 is formed. In addition, it is possible to ensure the visibility of a necessary portion by forming it on the joint surface side.

(4) In the fluid valve 10 described in any one of (1) to (3), the valve body drive unit 20 includes a flow rate adjustment unit that adjusts the distance that the diaphragm valve body 30 moves, so the flow rate is adjusted. By doing so, it becomes possible to suppress the cavitation phenomenon.
The flow rate adjusting unit including the adjusting screw 23 and the lock nut 24 has a function of adjusting the gap X between the diaphragm valve body 30 and the valve seat 14 when the fluid valve 10 is in the open state. The fluid pressure on the secondary side can be adjusted by adjusting the degree. Therefore, by adjusting the opening of the valve together with the fluid pressure F on the primary side, it becomes easier to adjust so as to suppress the cavitation phenomenon.

(5) In the resin fluid valve described in any one of (1) to (4), the valve body 11 part is made of vinyl chloride, and vinyl chloride has high corrosion resistance, so it is compatible with various chemical solutions. it can.
(6) In the resin fluid valve described in (1) to (5), it is possible to maintain good visibility by forming smoothly on the outer surface of the valve body 11 portion without providing a step. It becomes possible.

Next, a second embodiment of the present invention will be shown.
(Second embodiment)
FIG. 8 shows a front view of the fluid valve 10 and the coloring bracket 40 of the second embodiment. FIG. 9 shows a side view of the fluid valve 10 and the colored bracket 40 of the second embodiment.
The configuration of the fluid valve 10 in the second embodiment is the same as that of the first embodiment. However, the colored bracket 40 for holding the fluid valve 10 is provided in the fluid valve 10, and the colored bracket 40 is configured so that the flow path formed in the valve body 11 of the fluid valve 10 can be more easily seen. Devised.
The colored bracket 40 is an L-shaped bracket, the upper end of which is fixed to the fluid valve 10 by a bracket fixing bolt 42, the colored surface 40a is provided in a portion facing the fluid valve 10, and a bolt hole 40b is provided on another side. Prepare. The color to be colored on the colored surface 40a is not particularly limited as long as it is a dark color such as black or habit, but it is more preferable if it is a color scheme that improves visibility, such as matte black. . Further, if the color of the material as it is without being colored is a dark color system, it is not necessary to color it. The colored surface 40a may be made when it is difficult to color only one surface, or by painting the entire surface from the cost side.
The colored bracket 40 is provided with a female screw portion on the connecting rib 15 and fixed with a bracket fixing bolt 42, but may be provided with a female screw portion on the drive unit body 21 and fixed.

Since the second embodiment has the above configuration, the following operational effects are exhibited.
Since the colored bracket 40 has a colored surface 40a and is colored in a dark color, generation of bubbles B due to the cavitation phenomenon described in the first embodiment in the flow path in the valve body 11 and accumulation of slurry. Etc. are easier to see.
For example, when the liquid passing through the fluid valve 10 is pure water, the color of the pure water is transparent, and the bubbles B generated by the cavitation phenomenon are clouded. Therefore, confirmation is easy because the colored surface 40a is colored dark.
When the fluid valve 10 is attached to the facility, it is difficult to predict what will be installed on the back surface, and in some cases, it is difficult to confirm the generation of the bubbles B. If it confirms from the direction shown in FIG. 8 with the colored surface 40a with which it equips, it will become easier to visually recognize and workability | operativity will improve.
Depending on the color of the liquid flowing through the fluid valve 10, there may be an advantageous color for improving visibility. In such a case, the colored surface 40a may be colored with a color that is advantageous for improving visibility.

The configuration, operation, and effects of the second embodiment described above are summarized as follows.
(1) A valve seat that includes an input flow path 12a and an output flow path 12e, and a first communication flow path 12b that communicates with the input flow path 12a and a valve hole 13 that communicates with the first communication flow path 12b. A valve body 11 including a valve seat forming portion 12c provided with 14 and a second communication flow passage 12d formed around the valve seat forming portion 12c and communicating the valve hole 13 with the output flow passage 12e; In the fluid valve 10 comprising: a diaphragm valve body 30 that contacts and separates from the valve seat 14; and a valve body drive unit 20 that reciprocates the diaphragm valve body 30.
The valve body 11 has an input flow path 12a, a first communication flow path 12b, a second communication flow path 12d, and an output flow path 12e. Generation of bubbles due to a cavitation phenomenon and accumulation of a mixture or a coagulum Therefore, it is possible to confirm whether or not bubbles B are generated by generating a cavitation phenomenon in the flow path.

  As a result, the pressure on the primary side can be adjusted so that cavitation does not occur while observing the flow path in the valve body 11, so that the cavitation phenomenon can be reliably suppressed, and the mixture and coagulation in the valve body 11 can be suppressed. Since it is possible to visually check the state of the accumulation of substances, for example, whether the slurry adheres and adversely affects the operation of the valve, it contributes to the early detection of a defective portion of the fluid valve 10.

(2) The colored bracket 40 for attaching the fluid valve 10 described in any one of (1) to a separate body is provided with a colored surface 40a colored in a dark color, and the colored surface 40a is disposed on the side surface of the valve body 11. Therefore, when the fluid valve 10 is visually recognized, it is possible to improve visibility because the background is colored dark.

Next, a third embodiment of the present invention will be shown.
(Third embodiment)
FIG. 10 shows a side view of the fluid valve 10 and the valve bracket 50 of the third embodiment. FIG. 11 is a top view of the fluid valve 10 and the valve bracket 50 of the third embodiment.
The configuration of the fluid valve 10 in the third embodiment is the same as that of the first embodiment. However, the valve bracket 50 for holding the fluid valve 10 is provided in the fluid valve 10 so that the flow path formed in the valve body 11 of the fluid valve 10 can be more easily seen. The structure is devised.
The valve bracket 50 is an L-shaped bracket, and its upper end is fixed to the fluid valve 10 with bracket fixing bolts 42. The fixing position with the bracket fixing bolt 42 may be fixed to the drive unit body 21 instead of the connecting rib 15. The valve bracket 50 includes a visual recognition part 51, and the visual recognition part 51 has a mirror surface processing part 51a.
The visual recognition part 51 is formed by cutting a part of a valve bracket 50 formed by bending, for example, a stainless steel material and bending it outward. The visual recognition part 51 is provided with a mirror surface processing part 51a, so that the valve body 11 is bent from the upper surface of the fluid valve 10 shown in FIG. 11 at an angle that can be confirmed, and the mirror surface processing part 51a is buffed. It has a mirror finish.
In addition, this mirror surface processing part 51a may be a shape which can be made into a concave shape, for example so that the valve body 11 can be enlarged and visually confirmed.
A bolt hole 50a is provided on a side different from the side where the visual recognition part 51 of the valve bracket 50 is provided.

Since the third embodiment has the above configuration, the following operational effects are shown.
The valve bracket 50 includes a visual recognition part 51, and the visual recognition part 51 has a mirror-finishing part 51a. Therefore, the fluid valve 10 is a side surface shown in FIG. This is effective for ensuring visibility when it cannot be confirmed from the direction or when it is mounted at a low position. In other words, from the upper part of the fluid valve 10 in the state shown in FIG. 11, the inside of the flow path formed in the valve body 11 can be observed by providing the visual recognition part 51.
Semiconductor manufacturing lines and the like tend to be integrated with facilities as the process becomes finer. Residual chemicals in the piping may have an adverse effect, and it is often advantageous that the piping is short when purging. Therefore, a situation where the pipes are arranged at a narrow interval is also conceivable. By allowing the valve body 11 to be confirmed from above the fluid valve 10, it contributes to an improvement in the degree of freedom of design.
In addition, in order to raise visibility, you may provide the colored surface 40a as shown in the 2nd Example in the reverse side in which the visual recognition part 51 of the bracket 50 for valves is provided. In other words, the U-shaped bracket is provided with a colored surface portion on one side and a viewing portion 51 having a mirror finish on one side, thereby enabling observation without being influenced by the background.

Further, the bracket of the third embodiment is only required to have a mirror-finished surface so that it can be visually recognized from the upper surface, so another configuration as shown in FIG. 12 is also conceivable.
FIG. 12 shows a side view of the fluid valve 10 and the valve bracket 55.
The valve bracket 55 is provided with a bolt hole 55a so that the valve bracket 55 can be mounted on a different surface from the valve bracket 50. The attachment of the valve bracket 55 to the fluid valve 10 is fixed by being sandwiched between the valve body 11 and the valve body driving unit 20.
The valve bracket 55 is provided with a visual recognition part 56, and the visual recognition part 56 has a mirror surface processing part 56a.
Even if it is such a structure, the effect equivalent to the bracket 50 for valves is acquired.

The configuration, operation, and effects of the third embodiment described above are summarized as follows.
(1) A valve seat that includes an input flow path 12a and an output flow path 12e, and a first communication flow path 12b that communicates with the input flow path 12a and a valve hole 13 that communicates with the first communication flow path 12b. A valve body 11 including a valve seat forming portion 12c provided with 14 and a second communication flow passage 12d formed around the valve seat forming portion 12c and communicating the valve hole 13 with the output flow passage 12e; In the fluid valve 10 comprising: a diaphragm valve body 30 that contacts and separates from the valve seat 14; and a valve body drive unit 20 that reciprocates the diaphragm valve body 30.
The valve body 11 has an input flow path 12a, a first communication flow path 12b, a second communication flow path 12d, and an output flow path 12e. Generation of bubbles due to a cavitation phenomenon and accumulation of a mixture or a coagulum Therefore, it is possible to confirm whether or not bubbles are generated by generating a cavitation phenomenon in the flow path.

  As a result, the pressure on the primary side can be adjusted so that cavitation does not occur while observing the flow path in the valve body 11, so that the cavitation phenomenon can be reliably suppressed, and the mixture and coagulation in the valve body 11 can be suppressed. Since it is possible to visually check the state of the accumulation of substances, for example, whether the slurry adheres and adversely affects the operation of the valve, it contributes to the early detection of a defective portion of the fluid valve 10.

(2) The valve bracket 50 or the valve bracket 55 for attaching the fluid valve 10 described in (1) separately is provided with a mirror-finished mirror-finished portion 51a or a mirror-finished portion 56a, and the mirror-finished portion 51a. Alternatively, since the mirror-finished portion 56a is provided so that the side surface of the valve body 11 can be viewed from the valve body driving portion 20 side, the valve body 11 of the fluid valve 10 cannot be confirmed from the side surface because the piping is complicated. Visible from the body drive unit 20 side.
(3) In the valve bracket 50 or the valve bracket 55 described in (2), the mirror surface processing portion 51a or the mirror surface processing portion 56a and the side surface sandwiching the valve body portion are provided with colored surface portions. In the case where the valve body 11 of the fluid valve 10 cannot be confirmed from the side, it can be confirmed from the valve body drive unit 20 side by the mirror surface processing unit 51a or the mirror surface processing unit 56a, and further than the invention described in (2) Visibility can be improved.

Although the embodiments of the present invention have been described, the present invention is not limited to the above-described embodiments, and various applications are possible.
For example, it is explained that the input flow passage 12a and the output flow passage 12e provided in the valve body 11 of the fluid valve 10 shown in the first embodiment are provided with taper screws, and FIGS. Although it is shown that the screw portion is provided, it is not hindered to change the connection method, such as making this portion a flange connection. The same applies to the second and third embodiments.
Further, the shape of the colored bracket 40 shown in the second embodiment and the shapes of the valve bracket 50 and the valve bracket 55 shown in the third embodiment do not prevent the shape from being changed depending on the object to be attached.

The sectional view of the valve for fluids of the 1st example is shown. The front view of the valve | bulb for fluids of 1st Example is shown. The side view seen from the output channel side of the valve for fluids of the 1st example is shown. The side view seen from the input channel side of the valve for fluids of the 1st example is shown. The bottom view of the valve | bulb for fluids of 1st Example is shown. The 1st model of the cavitation phenomenon which occurs in the valve for fluids of the 1st example is shown. The 2nd model of the cavitation phenomenon which occurs in the valve for fluids of the 1st example is shown. The front view of the state which assembled | attached the valve | bulb for fluid and the bracket of 2nd Example is shown. The side view of the state which assembled | attached the valve | bulb for fluid and the bracket of 2nd Example is shown. The side view of the state which assembled | attached the valve | bulb for fluid and the bracket of 3rd Example is shown. The top view of the state which assembled | attached the valve | bulb for fluid and the bracket of 3rd Example is shown. The side view of the form different from FIG. 10 in the state which assembled | attached the valve | bulb for fluids and the bracket of 3rd Example is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Fluid valve | bulb 11 Valve body 12a Input flow path 12b 1st communication flow path 12c Valve seat formation part 12d 2nd communication flow path 12e Output flow path 13 Valve hole 14 Valve seat 15 Connection rib 16 Fixing screw 20 Valve body drive part 21 Drive part body 21a Operation air A port 21b Operation air B port 22 Piston 22a Shaft part 22b Pressure receiving part 23 Adjustment screw 24 Lock nut 25 Spring member

Claims (5)

It has an input channel and an output channel,
A valve seat forming portion including a first communication channel communicating with the input channel, and a valve seat having a valve hole communicating with the first communication channel formed in the center;
A second communication channel formed around the valve seat forming portion and communicating the valve hole and the output channel;
A valve body portion comprising:
A valve body having a flexible membrane that contacts and separates from the valve seat;
A valve body drive unit for reciprocating the valve body having the flexible membrane;
In a resin fluid valve comprising:
The valve body portion observes the generation of bubbles due to the cavitation phenomenon and the mixture accumulation in the input flow channel, the first communication flow channel, the second communication flow channel, and the output flow channel. Be made of transparent resin ,
A connecting rib for connecting the valve body part and the valve body drive part;
The connection rib is formed on the valve body portion, and is provided on the joint surface side of the valve body portion and the valve body drive portion from a position where the valve seat is formed,
A through-hole is formed in the connecting rib, and a fixing screw is passed through the through-hole, and is fastened to a female screw portion formed in the valve body driving unit, so that the presence of the fixing screw is visible in the flow path. To ensure the visibility of the necessary parts without hindering
Resin fluid valve characterized by The valve for resin fluid according to claim 1,
The wall surfaces forming the input flow channel, the first communication flow channel, the second communication flow channel, and the output flow channel of the valve body portion are thin with a constant thickness along the flow channel shape. A valve for resin fluid, which is formed. In the resin fluid valve according to claim 1 or 2 ,
A valve for resin fluid, wherein the valve body portion is made of vinyl chloride . In the valve bracket for attaching the resin fluid valve according to claim 1 to a separate body,
A valve bracket comprising a colored surface portion colored in a dark color, wherein the colored surface portion is disposed on a side surface of the valve body portion. It has an input channel and an output channel,
A valve seat forming portion including a first communication channel communicating with the input channel, and a valve seat having a valve hole communicating with the first communication channel formed in the center;
A second communication channel formed around the valve seat forming portion and communicating the valve hole and the output channel;
A valve body portion comprising:
A valve body having a flexible membrane that contacts and separates from the valve seat;
A valve body drive unit for reciprocating the valve body having the flexible membrane;
In the valve bracket to attach the resin fluid valve with a separate body,
The valve body portion observes the generation of bubbles due to the cavitation phenomenon and the mixture accumulation in the input flow channel, the first communication flow channel, the second communication flow channel, and the output flow channel. Be made of transparent resin,
With a mirror-finished mirror-finished surface,
The valve bracket, wherein the mirror-finished surface is provided so that a side surface of the valve body portion can be viewed from the valve body drive portion side.

Images