JP4739819B2 - Light flux array density conversion method, light flux array density conversion member, and light source device - Google Patents

Description

  The present invention relates to a light beam array density conversion method, a light beam array density conversion member, and a light source device.

  Laser processing requires “laser light with light energy necessary for processing”, and in order to obtain such high-energy laser light, a plurality of semiconductor lasers are used as a light source, and the laser light can be obtained from these semiconductor lasers. The laser beams are individually collimated to obtain parallel laser beams, and the plurality of laser beams are collected and incident on the incident end face of the same optical fiber by the condensing means. A method of “combining the energy of the luminous flux” is contemplated.

  In such a case, if the “arrangement region” of the plurality of laser light beams input to the light converging means is large, the light converging means is also increased in size, which is not preferable in terms of cost and compactness. In order to solve such a problem, it is required to increase the light beam arrangement density of a plurality of light beams parallel to each other.

  In some cases, contrary to the above, there is a case where “the arrangement density of a plurality of light beams close to each other needs to be lowered and the interval between the light beams needs to be increased”.

  As a method for converting the arrangement density of a plurality of light beams parallel to each other, a method described in Patent Document 1 is known in relation to an input / output unit of an optical switch used in optical communication.

  The method described in Patent Document 1 is a method that uses a conversion of array density using a prism, and requires an expensive prism.

JP2003-262822

  An object of the present invention is to realize conversion of the light beam arrangement density of a plurality of light beams without using an expensive optical element such as a prism.

First, four types of conversion methods that are the basic principle of the light beam array density conversion will be described .
The first light beam array density conversion method is “a method of converting the array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beam”.
The N light beams are parallel to each other and are arranged “one-dimensional or two-dimensional” when viewed from the light beam direction. When arranged in one dimension, N beams are arranged in one row. When arranged in two dimensions, “N beams are arranged in a plurality of rows” or “array according to a radial pattern”. Etc.

In the first light flux array density conversion method, “array density in a predetermined conversion direction orthogonal to the light flux” is converted. For example, in the case where N light beams are arranged in a line, the arrangement density is converted by increasing or reducing the arrangement interval of the N light beams by setting the arrangement direction to a “predetermined conversion direction”.

  Alternatively, if the N light beams are arranged in a two-dimensional matrix, the array density in this conversion direction is converted by setting the row direction or column direction of the array matrix, and further the diagonal direction, etc. as the “predetermined conversion direction”. Is done.

The first light beam arrangement density conversion method has the following characteristics.
That is, one transparent plate member whose both surfaces are parallel to each other is arranged in a plane parallel to the direction of the light beam and the conversion direction and inclined with respect to the direction of the light beam, and M (1 ≦ M < N) Transmits the M light beams and transmits the M light beams and the transparent plate member by translating the M light beams in parallel in the conversion direction according to the thickness, refractive index, and tilt angle of the transparent plate member. The interval in the conversion direction with the N−M luminous fluxes not to be converted is converted.

  The transparent plate member is "inclined with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction". The normal line on both sides of the transparent plate member is the direction of the light beam and the conversion direction. It is arranged so as to be inclined with respect to the direction of the light beam in a plane parallel to.

For example, when the arrangement density is converted by the first method , N = 6, six parallel light beams are arranged in a line, and these six parallel light beams form a group of three. When three light fluxes in each group are arranged at an interval: d, and between the groups are opened at an interval: D (> d), one transparent plate member has “three in one group”. By transmitting the “light beam”, the transmitted three light beams can be displaced to the other group side, and the distance between the two groups can be d on the transmission side. In this way, the six light beams can be arranged at an interval d in one direction, and the arrangement density of the light beams increases from the state before conversion.

In the second light flux array density conversion method, the transparent plate member that transmits M light beams in the first method is used as the first transparent plate member, and the second transparent plate member whose both surfaces are parallel to each other is used as the light flux. In a plane parallel to the direction and the conversion direction, the first transparent plate member is tilted in the opposite direction.
Then, L (1 ≦ L ≦ N−M) light beams are transmitted through the second transparent plate member, and the L light beams are displaced according to the thickness and refractive index of the second transparent plate member. Thus, the interval between the L luminous fluxes and the NL luminous fluxes that do not pass through the second transparent plate member is converted.

  For example, in the example described above, the first transparent plate member transmits the three light beams of one group, and the second transparent plate member transmits the three light beams of the other group. By allowing the light beams of each group to approach each other, it is possible to arrange the six light beams at a distance d in one direction.

The second light flux array density conversion method uses the same first and second transparent plate members, and these first and second transparent plate members are “in a plane parallel to the light beam direction and the conversion direction, It can be arranged symmetrically with respect to the light beam direction "( third light beam arrangement density conversion method ).

In the second and third light flux array density conversion methods, the first and second transparent plate members are arranged with a predetermined interval in the conversion direction, and “one piece with respect to the conversion direction is provided in the predetermined interval portion”. It is possible to adopt a configuration that allows a light beam to pass ( fourth light beam arrangement density conversion method ).
“Passing one light beam with respect to the conversion direction” means that a plurality of light beams can pass in a direction orthogonal to the light beam direction and the conversion direction. For example, when N light beams are arranged in a two-dimensional matrix when viewed from the light beam direction, if the row direction is the conversion direction, the predetermined interval portion is “a plurality of light beams constituting one column in the column direction”. "Will pass.

The light beam array density conversion method according to claim 1 is a “method for converting the array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beam”, and has the following characteristics. .

That is, one “step transparent plate member” whose both surfaces are parallel to each other and different in thickness in a plurality of stages is inclined with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction, and the above thickness is It arrange | positions so that it may change in multiple steps.
M (1 ≦ M ≦ N) light beams are transmitted through the step transparent plate member, and the M light beams are displaced in parallel in the conversion direction according to the thickness, refractive index, and inclination angle of the step transparent plate member. At the same time, the arrangement density in the interval conversion direction of the M light beams is converted by changing the interval in the conversion direction of the light beams that pass through each thickness portion.

Since the transparent plate member used in the first to fourth light flux array density conversion methods has both surfaces parallel to each other and a uniform thickness, a plurality of light beams transmitted through the transparent plate member are not converted in the conversion direction. Although it moves in parallel, the interval between the light beams is the same as before the drop.

On the other hand, since the stepped transparent plate member used in the light beam array density conversion method according to claim 1 has different thicknesses in steps, the light beams transmitted through the portions having different thicknesses are displaced in parallel displacement in the conversion direction. The amount is different. Therefore, by utilizing this, the “interval between light beams” can be changed in the conversion direction before and after transmission through the stepped transparent plate member.

  Therefore, for example, when N light beams are arranged in one row direction, the light beam interval of the transmitted N light beams can be reduced by making the N light beams incident on one step transparent plate member with this arrangement direction as the conversion direction. It can be changed in the conversion direction, and the light beam arrangement density can be converted in this way.

The light beam array density conversion method according to claim 2 is a “method of converting the array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beam” and has the following characteristics.

  That is, two step transparent plate members whose both surfaces are parallel to each other and whose thickness is different in multiple steps are inclined in directions opposite to each other with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction. It is arranged so as to change in a plurality of steps in the plane, and K (2 ≦ K ≦ N) light beams are transmitted through these step transparent plate members, depending on the thickness, refractive index and inclination angle of the step transparent plate member. The distances in the conversion direction of the N light fluxes are converted by displacing the K light fluxes in the conversion direction and changing the distance in the conversion direction of the light fluxes transmitted through the respective thickness portions.

In the light beam array density conversion method according to claim 2 , the two step transparent plate members are made the same, and they are inclined symmetrically with respect to the light beam direction in a plane parallel to the light beam direction and the conversion direction. Can be arranged "( Claim 3 ).

4. The light flux array density conversion method according to claim 2 or 3 , wherein two step transparent plate members are arranged at a predetermined interval in the conversion direction, and one light beam is passed through the predetermined interval portion in the conversion direction. ( Claim 4 ). The meaning of “one light beam is allowed to pass through the predetermined interval portion in the conversion direction” is the same as described above in relation to the fourth light beam array density conversion method .

The light beam array density conversion method according to claim 5 is a “method for converting the array density of a plurality of light beams parallel to each other” and has the following characteristics.
That is, an arrangement density conversion member formed by combining transparent plate members whose both surfaces are parallel to each other in a pyramid shape is arranged so that the direction of the pyramid axis is a light beam direction to transmit a plurality of light beams. The transmitted light flux is displaced in parallel according to the thickness, the refractive index, and the tilt angle, and the arrangement density of the light flux is converted.

As array density converting member used for the optical flux arrangement density converting method according to claim 5 wherein "transparent plate member which is combined to the pyramidal shape, which thickness pyramid axis direction changes in a plurality of stages" can be used (according Item 6 ).

  The pyramid-shaped arrangement density conversion member according to claim 5 or 6 may be a “truncated pyramid shape”, and the truncated portion may be a “portion through which one light beam passes”. Further, the shape of the cross section of the pyramid perpendicular to the pyramid axis may or may not be a regular polygon. For example, in the case of forming in a quadrangular pyramid shape, the cross-sectional shape orthogonal to the pyramid axis may be a square shape, a rectangular shape or a rhombus shape.

The light beam array density conversion method according to claim 7 is a “method for converting the array density of a plurality of light beams parallel to each other” and has the following characteristics.
That is, a conical array density conversion member formed of a transparent material and having an outer peripheral surface and an inner peripheral surface parallel to each other is arranged so that the direction of the conical axis is the direction of the light beam, and transmits a plurality of light beams. Depending on the thickness, refractive index, and tilt angle of the density conversion member, the transmitted light beam is displaced in parallel to convert the arrangement density of the light beam. “Conical shape in which the outer peripheral surface and the inner peripheral surface are parallel to each other” means that the cone angle of the outer peripheral surface is equal to the cone angle of the inner peripheral surface.

As the arrangement density conversion member used in the light beam arrangement density conversion method according to claim 7 , “a member whose thickness changes in a plurality of stages in the direction of the cone axis” can be used ( claim 8 ).

The conical arrangement density conversion member according to claim 7 or 8 may be a “conical truncated cone”, and the truncated portion may be a “portion through which one light beam passes”. The cone or truncated elliptical cone includes “elliptical cone and truncated elliptical cone”. Therefore, the shape of the cross section perpendicular to the axis of the cone can be circular or elliptical.

In the light flux array density conversion method according to claims 7 and 8 , the entrance / exit surface of the array density conversion member has a curvature in a direction orthogonal to the axis. The cross-sectional shape can be changed.

The “light beam array density conversion member” according to claim 9 is a light beam array density conversion member used for carrying out the light beam array density conversion method according to claim 1, wherein the light beam is constituted by a single step transparent plate member. It is an array density conversion member. Further, the “light flux array density converting member” according to claim 10 is a light beam array density converting member used for carrying out the light beam array density converting method according to claim 2, 3 or 4, wherein two step transparent plate members Are integrated.

Light beam arrangement density conversion member according to claim 11 is a pyramidal array density conversion member used in the embodiment of the light beam arrangement density converting method according to claim 5 or 6, wherein the light beam array density conversion member according to claim 12, wherein the A conical arrangement density conversion member used for carrying out the light beam arrangement density conversion method according to claim 7 or 8 .
Further, the “light flux array density conversion member” according to claims 13 to 15 is a light beam array density conversion member used for carrying out the second, third, or fourth light beam array density conversion method. The second transparent plate member is integrated .

The light source device of the present invention includes a light source unit that emits a plurality of light beams parallel to each other, and a light beam array density conversion member that converts a light beam array density of the plurality of light beams from the light source unit. And any one of claims 9 to 15 .

  Note that the light beam arrangement density conversion member described above can arrange the same type or different types of light in the direction of the light beam whose arrangement density is to be converted, and can perform arrangement density conversion in a plurality of stages. For example, since the light beam array density conversion member according to claim 13 converts the array density in a predetermined conversion direction orthogonal to the light beam, the conversion of the array density is limited to one direction. When the members are arranged in two stages in the light beam direction and the conversion directions of the respective light beam arrangement density conversion members are orthogonal, the arrangement density of the light beams arranged in a two-dimensional matrix is converted in the row direction and the column direction. be able to.

  As described above, according to the light beam array density conversion method of the present invention, the light beam array density can be easily converted using an inexpensive light beam array density conversion member for an expensive optical element such as a prism.

Hereinafter, specific embodiments will be described.
FIG. 1 illustrates one form of the first light flux array density conversion method .

  In FIG. 1, reference numerals 10 and 11 denote light sources. The light sources 10 and 11 are semiconductor lasers in this embodiment. Reference numerals 20 and 21 denote condensing lenses. In this embodiment, the condensing lenses 20 and 21 have a collimating action, and collimate the light beams from the corresponding semiconductor lasers 10 and 11 into parallel light beams. Reference numeral 31 denotes a “transparent plate member”.

  As shown in FIG. 1, the semiconductor lasers 10 and 11 emit divergent light beams whose optical axis rays (shown by broken lines) are parallel to each other. The optical axis rays are separated by a distance D in the vertical direction of the figure. The light beam emitted from the semiconductor laser 10 is converted into a parallel light beam L0 by the condenser lens 20, and the light beam emitted from the semiconductor laser 11 is converted into a parallel light beam by the condenser lens 21 to become a parallel light beam L1.

In this way, two parallel light beams L0 and L1 that are parallel to each other are obtained. These two parallel light beams L0 and L1 are spaced apart from each other by a distance D (the distance between the optical axis rays) in the vertical direction in the figure.
The vertical direction in FIG. 1 is the “conversion direction”.
The parallel light beam L0 emitted from the condensing lens 20 goes straight as it is, whereas the parallel light beam L1 emitted from the condensing lens 21 enters the transparent plate member 31. The transparent plate member 31 is a transparent plate whose both surfaces (incident side surface and exit side surface) are parallel to each other, and is a surface parallel to the direction of light beams L0 and L1 (left and right direction in the figure) and the conversion direction (up and down direction in the figure). Are inclined with respect to the direction of the light beam L1.

  For this reason, the parallel light beam L1 is refracted on the incident surface of the transparent plate member 31, and further refracted on the exit surface, deviating in the conversion direction from the incident surface, and the parallel light beam L11 parallel to the parallel light beam L0 while maintaining the light beam diameter. It becomes. The “interval in the conversion direction” between the parallel light beam L11 and the parallel light beam L0 is reduced to an interval: d.

That is, in FIG. 1, a method of converting the arrangement density of N (= 2) light beams L0 and L1 parallel to each other in a predetermined conversion direction (vertical direction in the figure) orthogonal to the light beams, One transparent plate member 31 parallel to each other is disposed in a plane parallel to the direction of the light beam and the conversion direction, and is inclined with respect to the directions of the light beams L0 and L1, and M (= 1) pieces are provided on the transparent plate member 31. Of the transparent plate member 31 and parallel displacement of the single light beam L1 in the conversion direction according to the thickness, refractive index, and tilt angle of the transparent plate member 31, and thereby the single light beam L1 (L11) and the transparent plate A “first light beam array density conversion method” is performed in which the distance in the conversion direction with respect to one light beam L0 that does not pass through the member 31 is converted from D to d.

  In the above description, the case where the number of the semiconductor lasers 10 and 11 as the light source is one has been described. Of course, a plurality of portions corresponding to the semiconductor lasers 10 are arranged in a line in a direction orthogonal to the drawing. A plurality of portions corresponding to 11 may be arranged in a direction orthogonal to the drawing.

  For example, 10 semiconductor lasers corresponding to the semiconductor laser 10 are arranged in a row in a direction orthogonal to the drawing, 10 semiconductor lasers corresponding to the semiconductor laser 11 are arranged in a row in a direction orthogonal to the drawing, If the light flux from each semiconductor laser is converted into a parallel light flux by a condenser lens corresponding to each semiconductor laser, 20 parallel light fluxes parallel to each other can be obtained.

  These 20 parallel light beams may be arranged so as to overlap in the conversion direction when viewed from the light beam direction (left-right direction in FIG. 1), or may be arranged in a staggered manner. Then, 10 parallel light beams from 10 semiconductor lasers corresponding to the semiconductor laser 11 are displaced in parallel in the conversion direction by the transparent plate member 31, thereby arranging 10 parallel light beams that do not pass through the transparent plate member 31. The interval in the conversion direction with respect to can be converted from the interval D to the interval d.

Here, the parallel displacement amount of the light beam by the transparent plate member 30 will be described.
In FIG. 2, reference numeral 300 denotes a transparent material plate whose both surfaces are parallel and can be used as the transparent plate member 31. When a light beam enters the plate 300 at an incident angle: θ ₁ , it is refracted at the incident surface, proceeds in the direction of the refraction angle: θ ₂ , is refracted again at the exit surface, and proceeds as a light beam parallel to the incident light beam.

  At this time, the light beam emitted from the plate 300 is displaced in parallel by a distance: Δ with respect to the light beam incident on the plate 300.

When the refractive index of the plate 300 is n and the refractive index of air is 1 ,
n = sin θ ₁ / sin θ ₂
And the mechanical optical path length of the refracted light beam in the plate 300: X is
X cos θ ₂ = t
From
X = t / cos θ ₂
It is. Therefore, the parallel displacement amount Δ between the incident light beam and the outgoing light beam is
Δ = X · sin (θ ₁ −θ ₂ )
= T · sin {θ ₁ −sin ⁻¹ (sin θ ₁ / n)} / cos {sin ⁻¹ (sin θ ₁ / n)}
It becomes.

That is, the parallel displacement amount Δ is determined by the refractive index n of the plate 300, the thickness, and the tilt angle θ ₁ . Refractive index: n, thickness: t, tilt angle: The greater theta ₁ is parallel displacement: delta increases. In any case, the parallel displacement amount Δ can be adjusted by adjusting the thickness 300 of the plate 300, the refractive index n, and the tilt angle θ ₁ . That is, in FIG. 1, the parallel displacement amount (D−d) can be adjusted by “adjusting the thickness, refractive index, and inclination angle” of the transparent plate member 31.

  Needless to say, the tilt angle cannot be set beyond the total reflection angle, and in order to reduce the loss of light energy due to reflection, the tilt angle should be as small as possible and within a range of about 10 to 30 degrees. It is preferable to set the amount of parallel displacement by adjusting the refractive index and thickness of the member.

FIG. 3 is an explanatory diagram showing an embodiment of the invention described in claim 13 . In order to avoid confusion, the same reference numerals as those in FIG.

  In the embodiment of FIG. 3, a semiconductor laser 12 as a light source, a condensing lens 22 for collimating a light beam from the semiconductor laser 12, and a transparent plate member 32 are added to the embodiment of FIG. That is, the light beam L 2 from the semiconductor laser 12 is converted into a parallel light beam by the condenser lens 22. The parallel light beam L2 is parallel to the light beams L0 and L1, and is spaced from the light beam L0 by an interval D.

  The transparent plate member 32 has the same configuration as the transparent plate member 31, and is symmetrical with respect to the optical axis ray of the light beam L0 in the conversion direction (vertical direction in FIG. 3) with respect to the light beam direction of the light beam L0 ( That is, it is disposed (tilted in the opposite direction to the transparent plate member 31). Further, the transparent plate members 31 and 32 have a predetermined interval so as to “pass the parallel light beam L0”. A portion (a portion indicated by a broken line) through which the parallel light beam L0 passes may be a “simple space”, but the transparent plate member 31 serves as a connecting portion 30 made of a transparent material (may be the same material as the transparent plate members 31 and 32). , 32 may be integrated. That is, the transparent plate members 31 and 32 and the connecting portion 30 can be integrally formed.

  As shown in FIG. 3, the light beam L1 from the semiconductor laser 11 is parallel-displaced in the conversion direction by the transparent plate member 31, becomes the light beam L11, and the interval between the parallel light beam L0 is narrowed, and the light beam L2 from the semiconductor laser 12 is It is displaced in parallel in the conversion direction by the transparent plate member 32 and becomes a light beam L22 to narrow the distance from the parallel light beam L0.

  In this way, the three light beams L0, L1, and L2 arranged at a distance D from each other in the conversion direction are converted into three parallel light beams L0, L11, and L22 arranged at a distance d from each other. The light beam arrangement density can be converted to increase the light beam arrangement density in the conversion direction.

That is, in the embodiment of FIG. 3, the transparent plate member 31 that transmits M (= 1) light beams is the first transparent plate member, and the second transparent plate member 32 whose both surfaces are parallel to each other is the direction of the light beam. In the plane parallel to the conversion direction, the first transparent plate member 31 is tilted in the opposite direction, and L (= 1) light beams L2 are transmitted through the second transparent plate member 32. By displacing L (= 1) light beams L2 in accordance with the thickness and refractive index of the transparent plate member 32, L (= 1) light beams and a light beam that does not pass through the second transparent plate member 32. A “second light beam array density conversion method” is performed in which the distance D from the L0: D is converted into the distance d.

In the embodiment of FIG. 3 , the first and second transparent plate members 31 and 32 are the same, and are disposed symmetrically with respect to the light beam direction in a plane parallel to the light beam direction and the conversion direction. are, first and second transparent plate member 31 and 32, disposed intervals a predetermined interval in the transducing direction at a predetermined pitch area (indicated by a broken line), the light beam L0 of one with respect to the transducing direction It is designed to pass through .

  Further, the transparent plate members 31 and 32 integrated by the connecting portion 30 is an embodiment of the luminous flux array density conversion member according to claim 13.

  In the above description with reference to FIG. 3, the case where the number of the semiconductor lasers 10, 11, and 12 as the light source is one has been described. Of course, the portion corresponding to the semiconductor laser 10 is 1 in the direction orthogonal to the drawing. A plurality of rows may be arranged in a row, and a plurality of portions corresponding to the semiconductor lasers 11 and 12 may be arranged in a direction orthogonal to the drawing.

  For example, 10 semiconductor lasers corresponding to the semiconductor laser 10 are arranged in a row in a direction orthogonal to the drawing, 10 semiconductor lasers corresponding to the semiconductor laser 11 are arranged in a row in a direction orthogonal to the drawing, If ten semiconductor lasers corresponding to the semiconductor lasers 12 are arranged in a line in a direction orthogonal to the drawing, and the light beams from the respective semiconductor lasers are converted into parallel light beams by a condensing lens corresponding to each semiconductor laser, they are parallel to each other. 30 parallel light fluxes are obtained.

  These 30 parallel light beams may be arranged so as to overlap in the conversion direction when viewed from the light beam direction (left-right direction in FIG. 3), or may be arranged in a staggered manner. Then, 20 parallel light beams from 20 semiconductor lasers respectively corresponding to the semiconductor lasers 11 and 12 are displaced in parallel in the conversion direction by the transparent plate members 31 and 32 so as not to pass through the transparent plate members 31 and 32. The interval in the conversion direction with respect to the arrangement of 10 parallel light beams can be converted from the interval: D to the interval: d.

  3, the semiconductor laser 10, the condensing lens 20, and the connecting portion 30 are removed, and the semiconductor laser 11, the condensing lens 21, and the transparent plate member 31, the semiconductor laser 12, the condensing lens 22, and the transparent The transparent plate members 31 and 32 may be directly integrated by bringing the plate member 32 into close proximity. At this time, since the parallel displacement amount by the transparent plate member 31 is Dd and the parallel displacement amount by the transparent plate member 32 is also Dd, if the interval in the conversion direction of the light flux from the semiconductor lasers 11 and 21 is D1. The distance between the light beams L11 and L22 that have been displaced in parallel by the transparent plate members 31 and 32 is D1-2 (Dd).

FIG. 4 is an explanatory view showing one embodiment of the second to fourth aspects of the invention. In order to avoid confusion, the same reference numerals as those in FIG.

  Semiconductor lasers as light sources denoted by reference numerals 10 to 16 are arranged at a predetermined interval (interval: D) in the vertical direction of the drawing, which is a conversion direction, and emit divergent light beams in which optical axis rays are parallel to each other. These divergent light beams are collimated by condensing lenses 20 to 26 individually corresponding to the light sources, and become parallel light beams L0 to L6 parallel to each other.

Reference numerals 41 and 42 denote step transparent plate members.
In this embodiment, the two step transparent plate members 41 and 42 have the same configuration, and are in a plane parallel to the light beam direction (left-right direction in the figure) and the conversion direction (up-down direction in the figure). Are arranged symmetrically with respect to the light beam direction.

  A portion indicated by reference numeral 40 between the step transparent plate members 41 and 42 is a portion through which the light beam L0 from the semiconductor laser 10 passes. The step transparent plate members 41 and 42 are parallel to each other on both surfaces and have different thicknesses in a plurality of steps (three steps in the example in the figure). The parallel light beams L1, L3, and L5 are incident on portions of the step transparent plate member 41 having different thicknesses. The parallel light beams L2, L4, and L6 enter the portions of the step transparent plate member 42 having different thicknesses.

  Then, these light beams pass through the step transparent plate members 41 and 42, and are thus displaced in parallel in a direction approaching the light beam L0 in the conversion direction. At this time, the amount of parallel displacement of the parallel light beams L1, L3, and L5 increases in the order of the parallel light beams L1, L3, and L5 due to the “effect of different thickness” of the step transparent plate member 41. That is, the interval between the parallel light beams L11, L33, L55 transmitted through the step transparent plate member 41 (interval: d) is smaller than the interval (D) between the parallel light beams L1, L3, L5 before transmission.

  Similarly, the amount of parallel displacement of the parallel light beams L2, L4, and L6 increases in the order of the parallel light beams L2, L4, and L6 due to the “effect of different thicknesses” of the step transparent plate member 42. That is, the interval between the parallel light beams L22, L44 and L66 transmitted through the step transparent plate member 42 (interval: d) is smaller than the interval (D) between the parallel light beams L1, L3 and L5 before transmission.

  In this way, the arrangement density of parallel light beams L0 to L6 that are parallel to each other can be converted in the conversion direction to obtain an arrangement of parallel light beams L0 and L11 to L66 with higher arrangement density.

  By adjusting the relationship between the thicknesses of the portions having different thicknesses in the step transparent plate member, the “interval between light beams” of the converted light beams L11 to L66 can be adjusted to a desired interval.

  The portion through which the parallel light beam L0 passes (portion indicated by a broken line) may be a simple space, but as the connecting portion 40 made of a transparent material (which may be the same material as the transparent plate members 41 and 42), the transparent plate member 41, 42 may be integrated. That is, the transparent plate members 41 and 42 and the connecting portion 40 can be integrally formed.

  That is, the embodiment shown in FIG. 4 is a method for converting the arrangement density of N (= 7) light beams parallel to each other in a predetermined conversion direction (vertical direction in the figure) perpendicular to the light beam, The transparent plate members 41 and 42 having both surfaces parallel to each other and having different thicknesses are inclined in directions opposite to each other with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction. It arrange | positions so that it may change in multiple steps within a surface, K (= 6) light beams are permeate | transmitted to these level | step difference transparent plate members 41 and 42, "Thickness, refractive index, and inclination of level difference transparent plate members 41 and 42" Depending on the angle, K (= 6) light fluxes are displaced in the conversion direction, and N (= 7) light fluxes are changed by changing the distance in the conversion direction of the light fluxes transmitted through each thickness portion. A light beam array density conversion method for converting the interval in the conversion direction is implemented.

Further, the two step transparent plate members 41 and 42 are of the “same configuration” and are “arranged symmetrically with respect to the light beam direction” in a plane parallel to the light beam direction and the conversion direction ( claimed). Item 3 ) The two step transparent plate members 41 are arranged at a predetermined interval in the conversion direction (vertical direction in the figure), and one light beam L0 in the predetermined interval portion (a portion indicated by a broken line) with respect to the conversion direction. ( Claim 4 ). Further, the step transparent plate members 41 and 42 integrated with each other by the connecting portion 40 constitute one embodiment of the light flux array density conversion member according to claim 10 .

  The above description is for the case where each of the semiconductor lasers 10 to 16 as the light source is one, but of course, a plurality of portions corresponding to the semiconductor laser 10 are arranged in a line in a direction orthogonal to the drawing, and the semiconductor laser 11 A plurality of portions corresponding to ˜16 may be arranged in a direction orthogonal to the drawing.

  For example, ten semiconductor lasers corresponding to the semiconductor lasers 10 are arranged in one row in a direction orthogonal to the drawing, and ten semiconductor lasers corresponding to the semiconductor lasers 11 to 16 are arranged in one row in a direction orthogonal to the drawing. If the light beams from the respective semiconductor lasers are arranged and converted into parallel light beams by a condensing lens corresponding to each semiconductor laser, 70 parallel light beams parallel to each other can be obtained.

These 70 parallel light beams may be arranged so as to overlap in the conversion direction when viewed from the light beam direction (left-right direction in FIG. 1), or may be arranged in a staggered manner. Then, 30 parallel light beams from 30 semiconductor lasers corresponding to the semiconductor lasers 11, 13 and 15 are displaced in parallel in the conversion direction by the step transparent plate member 41, and 30 corresponding to the semiconductor lasers 12, 14 and 16. Thirty parallel light beams from the semiconductor lasers are displaced in parallel in the conversion direction by the step transparent plate member 42, and together with the ten parallel light beams passing through the connecting portion 30, the light beam arrangement interval in the conversion direction is spaced: The arrangement density in the conversion direction can be increased by converting from D to the interval: d.
Needless to say, the step transparent plate members 41 and 42 may be directly joined and integrated without using the connecting portion indicated by reference numeral 40 in FIG. Further, the step transparent plate members 41 and 42 may be configured as “members having different steps in material and thickness”, and in this way, the arrangement interval of the light fluxes after passing through the step transparent plate member is set to “ It can be defined as “different for each stepped transparent plate member”.

  Here, in FIG. 4, when the portions of the light sources 11, 13, 15, the condenser lenses 21, 23, 25 and the step transparent plate member 41 are viewed, the light flux L <b> 1 from the semiconductor lasers 11, 13, 15 is observed in this portion. , L3, and L5 are converted into “parallel luminous fluxes L11, L33, and L55 having higher arrangement density” by the step transparent plate member 41.

That is, in this part, a method of converting the arrangement density of N (= 3) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beams, both surfaces are parallel to each other and the thicknesses are different in a plurality of stages. One step transparent plate member 41 is arranged in a plane parallel to the direction of the light beam and the conversion direction so as to be inclined with respect to the direction of the light beam so that the thickness changes in a plurality of steps within the surface. M (= 3) light beams are transmitted through the plate member 41, and M (= 3) light beams are displaced in parallel in the conversion direction in accordance with the thickness, refractive index, and tilt angle of the step transparent plate member 41. Then, a light beam interval conversion method ( Claim 1 ) is performed in which the arrangement density in the interval conversion direction of M (= 3) light beams is changed by changing the interval in the conversion direction of the light beams transmitted through each thickness part. .
That is, each of the step transparent plate members 41 and 42 independently constitutes “a light beam arrangement density conversion member constituted by one step transparent plate member” ( claim 10 ).

FIG. 5 is a diagram showing a modification of the embodiment of FIG. In order to avoid confusion, the same symbols as in FIG.
The embodiment of FIG. 5 is characterized by the structure of the step transparent plate members 410 and 420. In the embodiment of FIG. 4, the step transparent plate members 41 and 42 are configured as “a single member whose thickness changes with steps”, but in the embodiment of FIG. 5, the step transparent plate members 410 (420) , Three transparent parallel plates 411, 412, 413 (423, 422, 423) of different sizes are stacked and integrated.

Thus, the step transparent plate member may be configured in a composite manner so that “different transparent parallel flat plates are stacked and integrated”. In this case, the transparent parallel plates stacked on each other may be made of different materials.
In the example of FIGS. 4 and 5, the “step due to thickness” of the step transparent plate member is formed on the incident side of the light beam, but may be formed on the exit side, A thickness difference may be formed in a stepwise manner.

FIG. 6 illustrates one embodiment of the fifth and eleventh embodiments in an explanatory manner.
6A shows a side view representation, and FIG. 6B shows the state of FIG. 6A viewed from the right side of the figure.

  In FIG. 6, reference numerals 101, 102, 103, 11, and 12 are semiconductor lasers as light sources, reference numerals 201, 202, 203, 21, and 22 are condensing lenses that individually correspond to the semiconductor lasers, and reference numeral 50 is an array density. The conversion member is shown.

  The semiconductor lasers 11, 102, and 12 are arranged in a line at equal intervals in the vertical direction of FIG. 6A, and the semiconductor lasers 101, 102, and 103 are in a direction orthogonal to the drawing of FIG. They are arranged in a line at equal intervals. The divergent light beams emitted from these semiconductor lasers are collimated by the corresponding condenser lenses, and converted into parallel light beams L01, L02, L03, L1, and L2. These parallel light beams L01, L02, L03, L1, and L2 are parallel to each other. As shown in FIG. 6B, the parallel light beams L01, L03, L1, and L2 are positioned so as to occupy each vertex of a square centering on the parallel light beam L02.

  As shown in FIGS. 6A and 6B, the array density conversion member 50 has a truncated quadrangular pyramid shape and is arranged by combining “transparent plate members whose both surfaces are parallel to each other” in a truncated quadrangular pyramid shape. And integrated.

  The parallel light beam L02 emitted from the semiconductor laser 102 and collimated by the condenser lens 202 passes through the truncated portion 500 of the array density conversion member 50 as it is. The parallel light beams L01, L03, L1, and L2 emitted from the semiconductor lasers 101, 103, 11, and 12 and collimated by the corresponding condensing lenses pass through the arrangement density conversion member 50 and the thickness of the transparent plate member. The parallel displacement is made according to the refractive index and the inclination angle, and the parallel light beams L011, L013, L11, and L12 are obtained. Together with the parallel light beam L02, the light beam array has an array density increased in the vertical and horizontal directions in FIG.

That is, the embodiment shown in FIG. 6 is a method for converting the arrangement density of a plurality of (five) light beams parallel to each other, in which transparent plate members whose both surfaces are parallel to each other are arranged in combination in a pyramid shape. The arrangement density conversion member 50 is arranged so that the direction of the pyramid axis is the light beam direction, and transmits the plurality of light beams L01, L02, L03, L1, and L2, and the thickness, refractive index, and inclination angle of the transparent plate member Accordingly, a light beam array density conversion method is performed in which the transmitted light beams L01, L03, L1, and L2 are displaced in parallel to convert the array density of the light beams.

  Therefore, the arrangement density conversion member 50 is an embodiment of the light beam arrangement density conversion member according to claim 16. In the above embodiment, an array density conversion member having a quadrangular pyramid shape has been described. However, the pyramid shape of the array density conversion member is not limited to this, and a triangular pyramid, a truncated triangular pyramid, a five pyramid, a truncated pyramid, Various shapes such as a hexagonal pyramid and a truncated hexagonal pyramid are possible.

Further, as the arrangement density conversion member, “a transparent plate member combined in a pyramid shape, whose thickness changes in a plurality of steps in the direction of the pyramid axis (the cross-sectional shape in this case is, for example, the cross section of the arrangement density conversion member of FIG. becomes similar to the shape.) "can also be used, such arrangement density conversion member is 1 embodiment of the light beam arrangement density conversion member according to claim 11, wherein.

FIG. 7 illustrates one embodiment of the seventh aspect in an explanatory manner.
FIG. 7A shows a side view, and FIG. 7B shows the state of FIG. 7A viewed from the right side of the figure.

  In FIG. 7, reference numerals 101, 102, 103, 11, and 12 are semiconductor lasers as light sources, reference numerals 201, 202, 203, 21, and 22 are condensing lenses that individually correspond to the semiconductor lasers, and reference numeral 60 is an array density. The conversion member is shown.

  The semiconductor lasers 11, 102, and 12 are arranged in a line at equal intervals in the vertical direction of FIG. 7A, and the semiconductor lasers 101, 102, and 103 are in a direction orthogonal to the drawing of FIG. They are arranged in a line at equal intervals. The divergent light beams emitted from these semiconductor lasers are collimated by the corresponding condenser lenses, and converted into parallel light beams L01, L02, L03, L1, and L2. These parallel light beams L01, L02, L03, L1, and L2 are parallel to each other. Then, as shown in FIG. 7B, the parallel light beams L01, L03, L1, and L2 are positioned so as to occupy each vertex of a square centering on the parallel light beam L02.

  As shown in FIGS. 7A and 7B, the array density conversion member 60 is formed of a transparent material and has a “conical truncated cone shape in which the outer peripheral surface and the inner peripheral surface are parallel to each other”. It arrange | positions so that a direction may turn into a light beam direction.

  The parallel light beam L02 emitted from the semiconductor laser 102 and collimated by the condenser lens 202 passes through the truncated portion 600 of the array density conversion member 60 as it is. The parallel light beams L01, L03, L1, and L2 emitted from the semiconductor lasers 101, 103, 11, and 12 and collimated by the corresponding condenser lenses pass through the arrangement density conversion member 60, and the thickness of the arrangement density conversion member. In parallel with the parallel light beam L011, L013, L11, and L12, the parallel light beam L02 and the light beam array with the array density increased in the vertical and horizontal directions in FIG. 7B are obtained.

That is, the embodiment shown in FIG. 7 is a method for converting the arrangement density of a plurality of (5) light beams parallel to each other, which is formed of a transparent material, and the outer peripheral surface and the inner peripheral surface are parallel to each other. The conical array density conversion member 60 is disposed so that the direction of the cone axis is the light beam direction, and allows the plurality of light beams L01, L02, L03, L1, and L2 to pass therethrough. In accordance with the angle of inclination and the tilt angle, a light beam arrangement density conversion method ( Claim 7 ) is performed in which the transmitted light beam is displaced in parallel to change the arrangement density of the light beam.

Therefore, the arrangement density conversion member 60 is an embodiment of the light beam arrangement density conversion member according to claim 12 . In the above embodiment, the truncated cone-shaped array density conversion member 60 has been described. However, the array density conversion member shape is not limited to this, and may be a cone shape without the truncated head 600.

Furthermore, as the arrangement density conversion member, “the one whose thickness changes in a plurality of stages in the direction of the cone axis (the cross-sectional shape in this case is the same as the cross-sectional shape of the arrangement density conversion member in FIG. 4, for example)” also can be used, such arrangement density conversion member is 1 embodiment of the light beam arrangement density conversion member according to claim 12, wherein.

  Here, to supplement a little explanation, when a conical array density conversion element is used, the conical surface has a curvature in a plane orthogonal to the conical axis, so that the light beam incident on the conical surface has the lens action due to the curvature. Will receive. For this reason, the cross-sectional shape of the light beam after the parallel displacement is different from the cross-sectional shape of the light beam before the parallel displacement.

  As a specific example, in the case of the embodiment shown in FIG. 7, the arrangement density conversion member 60 which is a light beam arrangement density conversion member is as follows.

Incident-side inner diameter (diameter of the truncated head 600): 4 mm
Injection side inner diameter: 11.16mm
Thickness: 3mm
Length in conical axis direction: 10mm
Refractive index: 1.52
The parallel light beams L1 and L2 in FIG. 7 were incident on such an array density conversion member with a mutual interval (interval: 2D in FIG. 7) being 14 mm. The wavelength of the light beam is 587.56 nm, and the cross-sectional shape of the light beam on the incident side is an elliptical shape in which the vertical direction in FIG. 7A is the short axis direction and the direction orthogonal to the drawing is the long axis direction. 1 mm, minor axis diameter: 0.8 mm. At this time, the cross-sectional shapes of the light beams L11 and L12 emitted from the arrangement density conversion member 60 were converted into a circular shape having a diameter of 0.8.

The semiconductor lasers 10 and 11 in each of the embodiments described above and the condensing lenses 20 and 21 corresponding thereto constitute a “light source unit that emits a plurality of light beams L0 and L1 parallel to each other” By using the light beam array density conversion member that converts the light beam array density of the plurality of light beams from the light source unit in the above embodiments, the array density of the plurality of light beams emitted from the light source unit is converted to a desired array density. multiple light beam can realize a light source device for emitting to the outside (claim 16).

  In the above, the case where a plurality of light beams whose array density is converted is a parallel light beam has been described. However, the light beams whose array density is converted need only be parallel to each other on the optical axis, and each light beam is limited to a parallel light beam. Instead, a convergent light beam or a divergent light beam may be used.

  Further, in each of the embodiments described above, “in the case of increasing the luminous flux array density” has been described. However, if the “incident direction of the luminous flux” to the luminous flux array density conversion member is reversed, the light beam is emitted from the luminous flux array density conversion member. It is clear that the array density conversion is performed so as to widen the light flux interval and lower the array density. The light beam array density conversion may be a conversion that increases or decreases the array density.

It is a figure for demonstrating one Embodiment of the light beam arrangement density conversion method. It is a figure for demonstrating the parallel displacement of the light beam by refraction. It is a figure for demonstrating another form of implementation of the light beam arrangement density conversion method. It is a figure for demonstrating the other form of implementation of the light beam arrangement density conversion method. It is a figure for demonstrating the other form of implementation of the light beam arrangement density conversion method. It is a figure for demonstrating the other form of implementation of the light beam arrangement density conversion method. It is a figure for demonstrating the other form of implementation of the light beam arrangement density conversion method.

Explanation of symbols

10, 11 Semiconductor laser (light source)
20, 21 Condensing lens 31 Transparent plate member L1, L2 Light flux

Claims (16)

A method of converting an array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beams,
  One step transparent plate member whose both surfaces are parallel to each other and different in thickness in a plurality of steps, in a plane parallel to the direction of the light beam and the conversion direction, and tilted with respect to the direction of the light beam, the thickness is within the surface Arranged to change in multiple stages,
  M (1 ≦ M ≦ N) light beams are transmitted through the step transparent plate member, and the M light beams are parallel to the conversion direction according to the thickness, refractive index, and tilt angle of the step transparent plate member. A light beam interval conversion method characterized in that the arrangement density of the M light beams in the interval conversion direction is converted by changing the distance in the conversion direction of the light beams that pass through each thickness portion. A method of converting an array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beams,
Two step transparent plate members having both sides parallel to each other and having a plurality of thicknesses are inclined in directions opposite to each other with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction. Arrange it to change in multiple steps in the plane,
K (2 ≦ K ≦ N) light beams are transmitted through these step transparent plate members, and the K light beams are displaced in the conversion direction in accordance with the thickness, refractive index, and tilt angle of the step transparent plate member. And changing the intervals in the conversion direction of the N light beams by changing the intervals in the conversion direction of the light beams transmitted through the respective thickness portions .   In the light beam array density conversion method according to claim 2,
  A light flux array density conversion method characterized in that the two step transparent plate members are the same, and are arranged symmetrically and inclined with respect to the light flux direction in a plane parallel to the light flux direction and the conversion direction. In the light beam arrangement density conversion method according to claim 2 or 3,
  A light flux interval conversion method comprising: arranging two step transparent plate members at a predetermined interval in the conversion direction, and allowing one light beam to pass through the predetermined interval portion in the conversion direction. A method for converting the arrangement density of a plurality of light beams parallel to each other,
An arrangement density conversion member formed by combining transparent plate members whose both surfaces are parallel to each other in a pyramid shape is arranged so that the direction of the pyramid axis is a light beam direction to transmit a plurality of light beams, and the thickness of the transparent plate member A method for converting the arrangement density of luminous flux, wherein the arrangement density of the luminous flux is converted by parallel displacement of the transmitted luminous flux in accordance with the refractive index and the inclination angle . In the light beam array density conversion method according to claim 5,
A light beam array density conversion method characterized in that, as the array density conversion member, a transparent plate member combined in a pyramid shape is used whose thickness changes in a plurality of stages in the pyramid axis direction . A method for converting the arrangement density of a plurality of light beams parallel to each other,
A conical array density conversion member formed of a transparent material and having an outer peripheral surface and an inner peripheral surface parallel to each other is arranged so that the direction of the cone axis is the direction of the light beam to transmit a plurality of light beams, thereby converting the array density. A light beam array density conversion method characterized by converting the array density of a light beam by parallelly displacing the transmitted light beam according to the thickness, refractive index, and tilt angle of the member . In the light beam array density conversion method according to claim 7,
A light beam array density conversion method characterized by using a conical array density conversion member whose thickness changes in a plurality of stages in the direction of the cone axis . A light beam arrangement density conversion member used for carrying out the light beam arrangement density conversion method according to claim 1,
A luminous flux density conversion member constituted by a single stepped transparent plate member . A light beam arrangement density conversion member used for carrying out the light beam arrangement density conversion method according to claim 2, 3 or 4,
A light flux density conversion member formed by integrating two stepped transparent plate members . A light beam array density conversion member, which is a pyramid-shaped array density conversion member used for carrying out the light beam array density conversion method according to claim 5 . 9. A light beam arrangement density conversion member which is a conical arrangement density conversion member used for carrying out the light beam arrangement density conversion method according to claim 7 or 8 . A light beam array density conversion member that converts the array density of N (≧ 2) light beams parallel to each other in a predetermined conversion direction orthogonal to the light beam,
  The transparent plate members whose both surfaces are parallel to each other are arranged to be inclined with respect to the direction of the light beam in a plane parallel to the direction of the light beam and the conversion direction, and transmit M (1 ≦ M <N) light beams. Depending on the thickness, refractive index, and tilt angle, the M light beams are displaced in parallel in the conversion direction, and the M light beams and NM light beams that do not pass through the transparent plate member. A first transparent plate member for converting the interval in the conversion direction;
  It is another transparent plate member whose both surfaces are parallel to each other, and is disposed so as to be inclined in the direction opposite to the first transparent plate member in a plane parallel to the direction of the light beam and the conversion direction, and L (1 ≦ L ≦ N− M) Transmits the light fluxes, translates the L light fluxes in parallel according to the thickness and the refractive index, and does not transmit the L light fluxes and the second transparent plate member. A light flux density conversion member formed by integrating a second transparent plate member that converts the distance between the light flux and the light flux. In the light beam arrangement density conversion member according to claim 13,
The first and second transparent plate members integrated with each other are the same, and are arranged so as to be inclined symmetrically with respect to the light beam direction in a plane parallel to the light beam direction and the conversion direction. To convert the luminous flux array density . In the light beam arrangement density conversion member according to claim 13 or 14,
The first and second transparent plate members integrated with each other are arranged at a predetermined interval in the conversion direction, and one light beam is passed through the predetermined interval portion with respect to the conversion direction. A luminous flux array density conversion member. A light source unit that emits a plurality of light beams parallel to each other, and a light beam array density conversion member that converts a light beam array density of the plurality of light beams from the light source unit,
The light source device, wherein the light flux density conversion member is any one of claims 9 to 15 .

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