JP4710389B2 - Fan filter unit - Google Patents

Description

The present invention relates to a fan filter unit used in a clean room requiring a clean space such as a semiconductor factory or a food factory.

  Conventionally, this type of fan filter unit is known in which a chamber for blowing air is attached to a HEPA or ULPA filter, and a fan and a motor are provided in the chamber (see, for example, Patent Document 1).

  The fan filter unit will be described below with reference to FIG.

  As shown in the figure, a filter 101 for cleaning air, an orifice 103 connected to the filter 101 with bolts 102 for supplying air, a turbo fan 105 for blowing air to the filter 101, and between the filter 101 and the turbo fan 105. The chamber 104 is provided, a drive motor 106 that drives the turbo fan 105, and a motor fixing plate 107 that holds the drive motor 106 on the top surface of the chamber 104.

  In the above configuration, the air that has passed through the filter 101 is purified and blown out by driving the drive motor 106 and rotating the turbo fan 105.

JP 2000-271419 A (FIG. 1)

  In such a conventional fan filter unit, most of the air sent from the fan flows toward the outer peripheral portion, but there is a problem that the wind speed distribution is bad because only a little air flows directly under the fan, and the blowout airflow There is a demand for uniform wind speed distribution.

  In addition, the motor at the bottom of the fan raises the temperature due to heat generation and raises the temperature of the surrounding air, and the surrounding air with high temperature passes through the filter directly under the motor, so there is a problem that the temperature distribution is bad. Therefore, it is required to make the temperature distribution of the blown air flow uniform.

  The present invention solves such a problem, and an object of the present invention is to provide a fan filter unit that blows air with a uniform wind speed distribution and temperature distribution.

In order to achieve the above object, the fan filter unit of the present invention includes a filter for cleaning air, a main fan for supplying air to the filter, a chamber provided between the main fan and the filter, and the main fan. a motor for driving the fan, substantially at the center of the chamber, a rotating body mounted on the rotation shaft of the motor is provided, but you stir the air in the chamber.

  By this means, the high-temperature air around the motor is forcibly mixed with the low-temperature air around the motor, so that a fan filter unit capable of blowing air with a uniform temperature distribution is obtained.

  Another means is that the rotating body has a flat plate shape orthogonal to the rotation axis.

  Another means is that the rotating body is made of a metal having high heat conductivity.

  The heat generated by the motor by this means is directly radiated to the outside of the motor through the motor shaft by the metal heat radiating plate, and is attached to the motor shaft for rotation. A fan filter unit is obtained in which the speed is increased and the heat transfer rate is improved.

  Another means is to form a slit or fin in the rotating body.

  Another means uses a propeller fan as the rotor.

  By this means, the air flow directly under the motor is forcibly supplied to the filter by the propeller fan below the motor, and a fan filter unit capable of uniforming the wind speed distribution and temperature distribution is obtained.

  Another means is to change the wind direction of the propeller fan from the filter side to the motor side.

  By this means, the air flow directly under the motor can be forced to flow backward from the filter to the motor side by the propeller fan under the motor, improving the wind speed distribution and lowering the motor temperature to make the temperature distribution of the air flow uniform. A fan filter unit is obtained.

  ADVANTAGE OF THE INVENTION According to this invention, the fan filter unit which has the effect which can stir the air in a chamber and can blow the air of uniform temperature can be provided.

  Further, it is possible to prevent discharge of high-temperature air blown from the vicinity of the center of the filter.

  Further, the air in the chamber can be stirred and blown at a uniform wind speed.

  In addition, direct motor cooling inside the motor and improved heat dissipation efficiency can keep the temperature rise of the motor small.

  Moreover, since the temperature of the air generated around the motor can be suppressed, the temperature distribution of the blown air can be made uniform.

  In addition, air can be collected at the center to improve the wind speed distribution, and the motor can be forcedly cooled by blowing wind.

1 is a side view of a fan filter unit according to a first embodiment of the present invention. Plan view of rotating body having the slit and fin Cross section of the main part showing the air flow Side view of fan filter unit of embodiment 2 Cross section of the main part showing the air flow Side view of a conventional fan filter unit

According to the first aspect of the present invention, a filter for purifying air, a main fan for supplying air to the filter, a chamber provided between the main fan and the filter, and the main fan are driven. has a motor, substantially at the center of the chamber, a rotating body mounted on the rotation shaft of the motor provided are those you stir the air in the chamber, a constant temperature by stirring the air in the chamber The air can be blown. In addition, no new drive source is required, and the main fan and the rotating body rotate in the same direction, and the air flow and the rotating direction coincide with each other, so that the friction can be reduced.

The invention according to claim 2 is such that the rotating body has a flat plate shape orthogonal to the rotating shaft, and has the effect of releasing heat generated by the motor from the surface of the rotating body via the rotating shaft.

The invention according to claim 3 is the one in which the rotating body is formed of a metal having high heat conductivity, and the heat generated by the motor is efficiently released from the surface of the rotating body, and the temperature of the motor is lowered, so that the periphery of the motor It has the effect | action that the temperature of the high temperature air generated from can be lowered | hung.

According to a fourth aspect of the present invention, slits or fins are formed in the rotating body, and the heat of the motor is efficiently discharged from the surface of the rotating body to lower the temperature of the motor, and the air around the rotating body It has the effect | action that it can cool efficiently by forcing to flow.

In the invention according to claim 5 , the rotating body is a propeller fan, and the air directly under the motor is blown to the filter so that the air can be blown at a constant wind speed in front of the filter. In addition to being uniform, the motor also has an effect of efficiently cooling and making the temperature distribution of the blown air constant.

Further, the invention according to claim 6 is such that the wind direction of the propeller fan is changed from the filter side to the motor side. The propeller fan collects air at the central portion to improve the wind speed distribution and forcibly blows the motor to blow. Has the effect of cooling.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIGS. 1 to 3, a chamber 104 that supplies air to a filter 101 that cleans air is connected to an upper portion of the filter 101 by a bolt 102. Inside the chamber 104, a motor 1 having shafts 2 of both axes in the vertical direction is provided at the center of the top surface of the chamber 104. The motor 1 is supported by a motor fixing plate 107, and the motor fixing plate 107 is fixed to the top surface of the chamber 104. A turbo fan 105 for blowing air is attached to the upper end of the shaft 2 of the motor 1, and an orifice 103 is fixed to the chamber 104 above the turbo fan 105 so that the turbo fan 105 can efficiently supply air into the chamber 104. ing. In addition, a flat metal rotating body 3 is fixed to the lower end of the shaft 2.

  In the above configuration, the external air 4 is sucked by the turbo fan 105, passes through the orifice 103, and the air flow 5 spreads outside the chamber 104 as in the air flow 5 shown in FIG. There are few, and it is difficult to cool the motor 1.

However, the metal rotating body 3 attached to the shaft 2 of the motor 1 functions as a radiator, and heat inside the motor 1 is radiated to the outside of the motor 1. That is, the heat inside the motor 1 is transferred from the shaft 2 to the rotating body 3, and heat h is released from the surface to the outside by the air flowing around the rotating body 3, and the rotating body 3 rotates in the air. The entire surface of the body 3 comes into contact with air and the heat transfer coefficient is improved, so that the heat is efficiently radiated. As a result, the temperature of the motor 1 can be lowered, and the temperature of the high-temperature air 7 generated from the periphery of the motor 1 can be lowered.

  Moreover, as shown in FIG. 3, by forming the slit 3a or the fin 3b in the rotating body 3, the air flow rate to the rotating body 3 can be increased and the heat radiation effect can be enhanced.

(Embodiment 2)
In this embodiment, the rotating body 3 shown in the first embodiment is a propeller fan 3C, and the same components as those in the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIGS. 4 and 5, the external air 4 is sucked by the turbo fan 105, passes through the orifice 103, and the air flow 5 spreads to the outer peripheral side of the chamber 104, but a part of the air is sucked by the propeller fan 3C. By flowing to the lower part of the turbo fan 105, the air 6 is supplied to the filter 101 substantially uniformly.

  Further, the high-temperature air 7 around the motor 1 is drawn in by the propeller fan 3C and mixed with other low-temperature ambient air to lower the temperature of the air.

  In this way, clean air with uniform wind speed distribution and temperature distribution can be blown from the filter 101.

  In this embodiment, the case where a propeller fan that flows from the motor 1 side to the filter 101 side is installed is described. However, a propeller fan that flows from the filter 101 side to the motor 1 side may be installed. In this case, the propeller fan collects air in the central portion to improve the wind speed distribution and forcibly blows the air to the motor 1 to enhance the cooling effect.

  The production of ultra-precise parts that can make the wind speed distribution and temperature distribution blown out of the fan filter unit uniform and are sensitive to slight wind speed changes and temperature changes, and food factories where subtle flavors are a problem It can be applied to other uses.

1 Motor 2 Shaft (Rotating shaft)
3 Rotating body 3a Slit 3b Fin 3C Propeller fan 101 Filter 104 Chamber 105 Turbo fan (main fan)

Claims (6)

A filter to clean the air,
A main fan that supplies air to this filter,
A chamber provided between the main fan and the filter;
A motor for driving the main fan;
Substantially in the center of the chamber, a rotating body mounted on the rotation shaft of the motor is provided, the air fan filter unit you stirring in the chamber. Fan filter unit according to claim 1, wherein the flat plate shape perpendicular to the rotating body to the rotational axis. The fan filter unit according to claim 2, wherein the rotating body is formed of a metal having high heat conductivity . The fan filter unit according to claim 2 or 3, wherein a slit or a fin is formed in the rotating body. Fan filter unit according to claim 1, wherein the said rotary member is a propeller fan. 6. The fan filter unit according to claim 5, wherein the wind direction of the propeller fan is changed from the filter side to the motor side.

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