JP4687362B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus for performing fluoroscopic inspection or CT inspection of industrial products and the like.

In X-ray inspection equipment that performs fluoroscopic inspection of industrial products and the like, X-ray detection is performed by combining an image intensifier (hereinafter abbreviated as II) and a CCD camera so as to face the X-ray source of the X-ray generator. A vessel is arranged. Recently, an X-ray inspection apparatus using a flat panel X-ray detector is used instead of an X-ray detector composed of II and CCD cameras.
In these X-ray inspection apparatuses, a stage is arranged between an X-ray source and an X-ray detector, a measurement object is placed thereon, the position is adjusted, and a fluoroscopic X-ray image is taken. Further, in addition to the stage, the X-ray detector can be tilted (or the X-ray detector and the X-ray source can be tilted integrally), and a fluoroscopic X-ray image from an oblique direction is taken. It is also used.

  In the inspection by the X-ray inspection apparatus, the visual field is usually moved for alignment, measurement magnification adjustment, and measurement angle adjustment. The field of view is moved in a desired direction by giving a drive control signal to a drive unit composed of a stage moving mechanism and a tilting mechanism that tilts the optical axis of the X-ray measurement optical system by an input operation. At the same time, a fluoroscopic X-ray image of the object to be measured is taken, thereby finding the inspection position and inspection angle of the object to be measured. Then, when an appropriate inspection position and inspection angle are found, the visual field movement is stopped, and the fluoroscopic X-ray image displayed on the monitor screen is observed in that state.

  There are various possible input devices for performing visual field movement operations in an X-ray inspection apparatus, but when the operator moves the stage in the XYZ directions, the control signals for the movement direction and movement speed are simultaneously indicated. In addition, a joystick is generally used as an input device that allows an operator to intuitively grasp and input an operation amount according to a situation. For example, as shown in FIG. 4, the moving direction of the stage is controlled by the direction in which the stick 51 of the joystick 50 is tilted, and the moving speed of the stage is controlled by the size of the tilt angle of the stick 51. Further, a button 52 is provided around the stick so as to be able to give instructions for operations such as rotating and moving the stage.

On the other hand, a recent X-ray inspection apparatus is generally connected to a personal computer so that an operator who is accustomed to computer operation with a mouse can give instructions using the mouse. Yes (see, for example, Patent Document 1).
A device that can control the movement of the stage by clicking the mouse is also used. For example, as shown in FIG. 5, a mouse operation screen 55 is displayed on the monitor screen 53 together with the fluoroscopic X-ray image 54, and by clicking on a specific area (select button) on the mouse operation screen, The stage moving mechanism and the tilting mechanism are controlled by a control signal registered in advance corresponding to the position.
JP 2001-255286 A

  As described above, many recent X-ray inspection apparatuses are connected to a personal computer. Since a personal computer is often operated with a mouse, it is desirable that the input device be operated using the mouse as it is, instead of operating the input device from a mouse to a joystick when performing a stage movement operation. .

  In this case, when the control is performed by the method using the mouse operation screen as shown in FIG. 5, it is difficult to perform the operation by relating a plurality of control amounts, that is, the moving direction and the moving speed, like a joystick. is there. In this method, since only one type can be selected with the mouse at a time, the stage moving direction and the stage moving speed cannot be controlled simultaneously, and flexible operation is difficult.

Therefore, the present invention generates a complex control signal including a moving direction and a moving speed with a simple click operation using a mouse when operating a driving mechanism such as a stage driving mechanism or a tilting mechanism in an X-ray inspection apparatus. It is an object of the present invention to provide an X-ray inspection apparatus that can be used.
It is another object of the present invention to provide an X-ray inspection apparatus capable of instructing an appropriate operation amount intuitively in the same manner as when operating a stage drive mechanism and a tilt mechanism with a joystick.

An X-ray inspection apparatus according to the present invention, which has been made to solve the above problems, includes an X-ray source that irradiates X-rays for fluoroscopy toward an object to be measured and an X-ray detector that captures an X-ray image of the object to be measured. Adjusting the positional relationship between the X-ray measuring optical system, the stage on which the object to be measured is placed between the X-ray source and the X-ray detector, and the X-ray measuring optical system on the stage. Drive unit, a monitor screen, an X-ray image creation unit that creates a fluoroscopic X-ray image based on a video signal captured by an X-ray detector, and an X-ray that displays an image of the fluoroscopic X-ray image on the monitor screen An X-ray inspection apparatus including an image display control unit and a mouse that displays a pointer at an arbitrary position on a monitor screen and designates the position of the pointer by a click operation , and a drive unit in an XY direction that is a stage surface direction Translational movement mechanism and Z direction perpendicular to the stage surface A translational movement mechanism, a rotational movement mechanism with respect to the rotation axis in the Z direction, and a tilting movement mechanism that inclines the optical axis of the X-ray measurement optical system with respect to the stage surface. The mouse has a left click button and a middle click button, A right-click button, and the center of a rectangular fluoroscopic X-ray image displayed on the monitor screen is the origin, the horizontal line passing through the center is a reference line, and a diagonal line is set and the fluoroscopic X-ray displayed on the monitor screen When position designation is performed by left- clicking on the image on the image , driving including control information on the movement direction and movement speed of the translation mechanism in the XY directions according to the direction and distance of the designated position with respect to the origin Generates a signal and translates in the Z direction according to the position and distance of the specified position with respect to the reference line when the position is specified on the fluoroscopic X-ray image by middle mouse click. When a drive signal including control information related to the moving direction and moving speed of the moving mechanism is generated and the position is specified by right-clicking the mouse on the fluoroscopic X-ray image, the position of the specified position with respect to the diagonal line and the origin Drive that generates a drive signal including control information regarding the moving direction and moving speed of the rotational movement mechanism for the rotation axis in the Z direction or the tilt movement mechanism for inclining the optical axis of the X-ray measurement optical system with respect to the stage surface according to the distance And a signal generator.

According to the present invention, a fluoroscopic X-ray image of an object to be measured placed on a stage is taken by an X-ray measuring optical system, and the X-ray image creating unit performs fluoroscopic X based on a radiographing signal from an X-ray detector. Create a line image.
The X-ray image display control unit displays the created fluoroscopic X-ray image on the monitor screen. The mouse displays a pointer on the monitor screen, moves the pointer on the monitor screen by moving the position of the mouse, and designates the position of the pointer at the time of clicking by clicking the click operation button of the mouse. When a click operation is performed in a state where the pointer is displayed on the fluoroscopic X-ray image on the monitor screen, a drive signal corresponding to the designated position is generated. This drive signal can be a signal that simultaneously controls the type of drive content (drive axis), movement direction, and movement speed according to the position on the two-dimensional surface of the monitor screen, so it can be combined with a single click. Drive signals can be generated.

According to the present invention, when operating a drive mechanism such as a stage drive mechanism or a tilting mechanism, the type of drive (drive axis), the direction of movement (forward rotation, reverse rotation), The moving speed and the like can be combined and controlled simultaneously, and a flexible positioning operation can be executed.
In addition, since a click operation is performed on the fluoroscopic X-ray image, for example, when the fluoroscopic X-ray image is to be moved to the right, if the right side of the fluoroscopic X-ray image is clicked, the rightward movement is performed. If a drive signal suitable for the display image is generated, a desired movement can be performed by an intuitive operation.

(Means and effects for solving other problems)
In the above invention, the drive unit is a translational movement mechanism in the XY direction that is the stage surface direction, a translational movement mechanism in the Z direction perpendicular to the stage surface, a rotational movement mechanism with respect to the rotation axis in the Z direction, and an X-ray measurement with respect to the stage surface. You may make it have at least any one movement mechanism of the tilt movement mechanism which inclines the optical axis of an optical system.
According to this, even if the operation by the drive unit is any of XY direction translation drive, Z direction translation drive, rotation drive, and tilt drive, complex control can be performed by clicking with the mouse.

In the above invention, the drive signal generator may further generate a drive signal including control information related to the moving direction and moving speed of any of the moving mechanisms according to the designated position on the fluoroscopic X-ray image. .
According to this, since the moving direction and moving speed can be instructed by a single click operation, the same operability as a joystick can be provided.

In the above invention, the drive unit may have a plurality of movement mechanisms, the mouse may have a plurality of click operation buttons, and different click operation buttons may be assigned drive signals of different movement mechanisms.
According to this, the operation of a plurality of moving mechanisms can be instructed separately using the click operation buttons.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments described below, and it goes without saying that various aspects are included without departing from the spirit of the present invention.

  FIG. 1 is a block diagram showing a configuration of an X-ray inspection apparatus according to an embodiment of the present invention. The X-ray inspection apparatus 1 includes an X-ray measurement optical system 13 composed of an X-ray generator 11 and an X-ray detector 12, a stage 14 on which the object to be measured is placed, and a measurement visual field of the object to be measured. It comprises a drive mechanism 15 (drive unit) for adjustment and a control system 20 that controls the entire apparatus.

The control system 20 is constituted by a general-purpose computer device. The hardware of the control system 20 is further described. The display device 24 includes a CPU 21, a keyboard 22 as an input device, a mouse 23 as an input device, and a monitor screen 24a. Consists of.
Further, the functions processed by the CPU 21 will be described in blocks. The functions are divided into an X-ray image creation unit 31, an X-ray image display control unit 32, and a drive signal generation unit 33.

  The X-ray generator 11 constituting the X-ray measurement optical system 13 includes an X-ray tube for fluoroscopic X-ray irradiation. The X-ray detector 12 includes an image intensifier (hereinafter abbreviated as II) disposed so as to face the X-ray tube, and a CCD camera attached integrally to the rear side of the II. An image signal of a fluoroscopic X-ray image is output by photographing a fluorescent image formed by detecting fluoroscopic X-rays with a CCD camera.

The stage 14 has a two-dimensional plane serving as an XY plane, and the object to be measured S can be placed thereon.
The drive mechanism 15 includes an X-ray measurement optical system tilting mechanism 16 that tilts and moves the X-ray measurement optical system 13 (the X-ray detector 12 or the X-ray generator 11 and the X-ray detector 12), and the stage 14 in the XYZ directions. And a stage moving mechanism 17 for rotationally moving with respect to the Z-direction axis.
Then, as shown in FIG. 2, XY plane movement (translation in the X direction and translation in the Y direction), vertical movement (translation in the Z direction), Z axis rotation α, and Z axis tilt β are each driven. A motor for translation or rotation in the axial direction is mounted, the movement direction is determined based on the rotation direction (positive rotation, negative rotation) of the motor, and the movement speed is determined based on the rotation speed of the motor. become.

  Each functional block of the CPU 21 will be described. The X-ray image creation unit 31 sequentially converts the video signals of the fluoroscopic X-ray images sent from the X-ray detector 12 into digital images and displays them as a fluoroscopic X-ray image 24b on the monitor screen 24a of the display device 24. Control to create frame image data to be performed.

  The X-ray image display control unit 32 performs control to display the frame image data created by the X-ray image creation unit 31 on the monitor screen 24a one after another. Thereby, a fluoroscopic X-ray image 24b (moving image) of the object S to be measured is displayed on a part or the entire surface of the monitor screen 24a.

In the state where the fluoroscopic X-ray image 24b is displayed on the monitor screen 24a, the drive signal generator 33 moves the position of the mouse pointer 24c on the fluoroscopic X-ray image 24b and performs position designation by a click operation. Sometimes, the designated position is read, and control is performed to generate a drive control signal for the drive mechanism 15 set in advance according to the designated position coordinates.
In the present embodiment, the mouse 23 is provided with three click operation buttons, each of which generates a drive control signal for the movement direction and movement speed with respect to different drive axes.

FIG. 3 is a diagram illustrating the relationship between each click operation button of the mouse 23 and the click operation on the fluoroscopic X-ray image 24b. The mouse 23 is provided with a left click button 23a, a middle click button 23b, and a right click button 23c.
The fluoroscopic X-ray image 24b is assigned a different control mode depending on which click button is operated. That is, when the left click button 23a is operated, the mode A for controlling the drive axis for the XY plane movement is set, and when the middle click button 23b is operated, the mode B for generating the drive control signal for the vertical movement is set. When operated, the mode C for controlling the drive shaft of the rotational movement and the tilt movement is set.

Next, input operations in each mode will be described. In mode A, the center of the fluoroscopic X-ray image 24b is set as the origin, and the movement direction in the XY plane is instructed by the direction from the origin to the position designated by clicking, and the movement speed is instructed by the distance from the center. Thus, the user can click the image portion in the direction in which he wants to move while viewing the fluoroscopic X-ray image 24b, so that the direction of movement can be set intuitively.
In mode B, a horizontal line passing through the center of the fluoroscopic X-ray image 24b is used as a reference line, and the upper side is an area for instructing upward movement and the lower side is an area for instructing downward movement. Also, the moving speed is instructed according to the distance from the reference line. Thereby, it is possible to instruct intuitively by associating the vertical position of the screen with the vertical movement direction and the movement speed.
In mode C, the fluoroscopic X-ray image 24b is divided into four upper and lower and right and left by two diagonal lines, of which two upper and lower areas are tilt movement and two left and right areas are rotation movement operation areas. Since there are only two types of tilting and rotation, the forward direction and the reverse direction are the moving directions, so that the upper region and the right region are the forward direction, and the lower region and the left region are the reverse direction regions. The moving speed is indicated by the distance from the center as in the mode A.
Thus, the movement direction and movement speed can be set intuitively.

  Accordingly, when the operator moves the mouse and moves the pointer while the fluoroscopic X-ray image 24b is displayed on the monitor screen 24a, and clicks on the fluoroscopic X-ray image 24b, the type of click button and fluoroscopy Based on the designated position on the X-ray image 24b, the type of drive shaft to be driven, the moving direction of the driving shaft, and the moving speed can be set all at once.

  In the above embodiment, in the mode C, the tilt and rotation are instructed. However, when a mouse having four or more click buttons is used, the tilt and rotation are associated with different click buttons, and the separate click buttons are used. It is good also as a mode.

  The present invention can be used in an X-ray inspection apparatus that performs visual field adjustment using a mouse.

The block diagram which shows the structure of the X-ray inspection apparatus which is one Embodiment of this invention. The figure explaining the kind of moving direction by a drive shaft. The figure explaining the relationship between the click operation button of a mouse | mouth, and the click operation on a fluoroscopic X-ray image. The figure which shows the structure of the joystick which is one of the conventional input devices. The figure explaining the input operation by the conventional mouse | mouth.

Explanation of symbols

1, 2: X-ray inspection device 11: X-ray generator (X-ray source)
12: X-ray detector 13: X-ray measurement optical system 14: Stage 15: Drive mechanism (drive unit)
16: X-ray measurement optical system tilting mechanism 17: Stage moving mechanism 20: Control system 23: Mouse 24: Display device 24a: Monitor screen 24b: Perspective X-ray image 31: X-ray image creation unit 32: X-ray image display control unit 33: Drive signal generator

Claims (1)

An X-ray measurement optical system comprising an X-ray source that irradiates fluoroscopic X-rays toward the object to be measured and an X-ray detector that images a fluoroscopic X-ray image of the object to be measured;
A stage for placing an object to be measured between an X-ray source and an X-ray detector;
A drive unit for adjusting the positional relationship between an object to be measured on the stage and the X-ray measurement optical system;
A monitor screen;
An X-ray image creation unit that creates a fluoroscopic X-ray image based on a video signal imaged by the X-ray detector;
An X-ray image display control unit for displaying an image of a fluoroscopic X-ray image on a monitor screen;
An X-ray inspection apparatus comprising a mouse that displays a pointer at an arbitrary position on a monitor screen and designates the position of the pointer by a click operation,
The drive unit includes a translational movement mechanism in the XY direction that is the stage surface direction, a translational movement mechanism in the Z direction perpendicular to the stage surface, a rotational movement mechanism with respect to the rotation axis in the Z direction, and an X-ray measurement optical system for the stage surface. A tilt movement mechanism for tilting the optical axis of
The mouse has a left click button, a middle click button and a right click button,
The center of the rectangular fluoroscopic X-ray image displayed on the monitor screen is the origin, the horizontal line passing through the center is the reference line, and the diagonal line is set,
When a position is specified by a left- click operation of the mouse on the fluoroscopic X-ray image displayed on the monitor screen, the direction and movement of the translation mechanism in the XY directions according to the direction and distance of the specified position with respect to the origin Generate a drive signal containing control information about speed,
Control information on the moving direction and moving speed of the translation mechanism in the Z direction according to the position and distance of the specified position with respect to the reference line when the position is specified by the middle click operation of the mouse on the fluoroscopic X-ray image Drive signal containing
When the position is specified by right-clicking the mouse on the fluoroscopic X-ray image, the rotational movement mechanism with respect to the rotation axis in the Z direction or the X-ray with respect to the stage surface according to the position and distance of the specified position with respect to the diagonal line and the origin An X-ray inspection apparatus comprising: a drive signal generating unit that generates a drive signal including control information related to a moving direction and a moving speed of a tilt moving mechanism that tilts an optical axis of a measurement optical system .

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