JP4681215B2 - Dry etching method for low dielectric constant interlayer insulating film - Google Patents
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- JP4681215B2 JP4681215B2 JP2003284346A JP2003284346A JP4681215B2 JP 4681215 B2 JP4681215 B2 JP 4681215B2 JP 2003284346 A JP2003284346 A JP 2003284346A JP 2003284346 A JP2003284346 A JP 2003284346A JP 4681215 B2 JP4681215 B2 JP 4681215B2
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- 239000011229 interlayer Substances 0.000 title claims description 40
- 238000000034 method Methods 0.000 title claims description 22
- 238000001312 dry etching Methods 0.000 title claims description 15
- 239000007789 gas Substances 0.000 claims description 49
- 238000005530 etching Methods 0.000 claims description 48
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 20
- 239000000758 substrate Substances 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000002305 electric material Substances 0.000 description 5
- 230000007935 neutral effect Effects 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007348 radical reaction Methods 0.000 description 2
- 244000132059 Carica parviflora Species 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 101100107923 Vitis labrusca AMAT gene Proteins 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
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Description
本発明は、層間絶縁膜をドライエッチングする方法に関し、特に、炭素を含有する低誘電率層間絶縁膜をドライエッチングする方法に関する。 The present invention relates to a method for dry etching an interlayer insulating film, and more particularly to a method for dry etching a low dielectric constant interlayer insulating film containing carbon.
一般に、ＳｉＯ２から構成される層間絶縁膜をプラズマ雰囲気中でドライエッチングして配線用のホール、トレンチを微細加工する場合、ＣＦ系（フッ化炭素系）ガスを含む混合ガスが使用される（例えば、特許文献１参照）。この場合、ＣＦ系ガスのみによってエッチングを行うと、エッチング処理中に分解生成したガス同士が再結合し、気相中でクラスタリングが生じてＣＦ系の膜堆積が発生する。このため、エッチングガスとして、アルゴンを主ガスとして用い、このアルゴンにフッ化炭素ガスを添加した混合ガスを使用し、クラスタリングの発生を防止することが考えられている（例えば、非特許文献１参照）。 In general, when an interlayer insulating film composed of SiO 2 is dry-etched in a plasma atmosphere to finely process wiring holes and trenches, a mixed gas containing a CF-based (fluorocarbon-based) gas is used ( For example, see Patent Document 1). In this case, when etching is performed using only the CF-based gas, the gases decomposed and generated during the etching process are recombined, and clustering occurs in the gas phase, thereby generating CF-based film deposition. For this reason, it is considered that argon is used as an etching gas as a main gas and a mixed gas obtained by adding a fluorocarbon gas to the argon is used to prevent clustering (for example, see Non-Patent Document 1). ).
ところで、近年の半導体装置の高集積化、微細化に伴い、層間絶縁膜として、例えば比誘電率（ｋ）が２．６以下のＳｉＯＣＨ系の低誘電率層間絶縁膜（多孔質材からなるものであってもよい）が開発されている。この場合、レジストマスクで覆われた低誘電率層間絶縁膜を、上記した化学反応性の少ないアルゴンを主ガスとする混合ガスを用いてエッチングすると、ＳｉＯＣＨ系膜の構成材に炭素が含まれているため、層間絶縁膜をエッチングしたときのイオン衝撃によって例えば膜中のＨがなくなり、ホール底部に−Ｃ−Ｃ−やＳｉ−Ｃ−結合を含む層が形成され、エッチングストップ現象が生じる。このことから、酸素やフッ素を多く添加させた混合ガスを使用してエッチングしたり、フッ素の発生を促進させる方法が提案されている。 By the way, with the recent high integration and miniaturization of semiconductor devices, as an interlayer insulating film, for example, a SiOCH-based low dielectric constant interlayer insulating film (made of a porous material) having a relative dielectric constant (k) of 2.6 or less. May be developed). In this case, when the low dielectric constant interlayer insulating film covered with the resist mask is etched using a mixed gas containing argon having a low chemical reactivity as a main gas, carbon is contained in the constituent material of the SiOCH-based film. Therefore, for example, H in the film disappears due to ion bombardment when the interlayer insulating film is etched, and a layer including —C—C— or Si—C— bond is formed at the bottom of the hole, and an etching stop phenomenon occurs. For this reason, a method of etching using a mixed gas to which a large amount of oxygen or fluorine is added or a method for promoting the generation of fluorine has been proposed.
しかしながら、上記方法のように、酸素を多く添加させた混合ガスを使用すると、膜中の炭素を効果的に除去できてエッチングレートを高めることがきるものの、酸素そのものの高い反応性によって層間絶縁膜中の炭素（ＣＨｘ基）が引抜かれて層間絶縁膜（特に、ホールのサイドウォール）がダメージを受けるという問題が生じる。 However, if a mixed gas to which a large amount of oxygen is added is used as in the above method, carbon in the film can be effectively removed and the etching rate can be increased. However, the interlayer insulating film is caused by the high reactivity of oxygen itself. There is a problem that the carbon (CHx group) inside is pulled out and the interlayer insulating film (particularly, the sidewall of the hole) is damaged.
そこで、本発明は、上記点に鑑み、例えば低誘電率の層間絶縁膜をドライエッチングする場合に、高いエッチングレートが得られ、かつ、膜にダメージを与えることがないようにした層間絶縁膜のドライエッチング方法を提供することを課題とするものである。 Therefore, in view of the above points, the present invention provides a high-etching rate obtained when, for example, dry etching an interlayer insulating film having a low dielectric constant, and an interlayer insulating film that does not damage the film. It is an object of the present invention to provide a dry etching method.
上記課題を解決するために、本発明の層間絶縁膜のドライエッチング方法は、ＳｉＯＣＨ或いはＳｉＯＣ系材料からなる低誘電率層間絶縁膜をエッチングし、配線用のホール、トレンチを微細加工する低誘電率層間絶縁膜のドライエッチング方法であって、フッ化炭素ガスにＮＨ３を添加し、酸素を含まない混合ガスを０．１Ｐａ以上１Ｐａ以下の作動圧力下で導入してエッチングするものにおいて、前記ＮＨ３を前記混合ガスの総流量に対し１０％以下の比率で添加することを特徴とする。 In order to solve the above problems, the dry etching method for an interlayer insulating film according to the present invention is a low dielectric constant in which a low dielectric constant interlayer insulating film made of a SiOCH or SiOC material is etched to finely process wiring holes and trenches. In the dry etching method of an interlayer insulating film, NH 3 is added to a fluorocarbon gas, and a mixed gas not containing oxygen is introduced under an operating pressure of 0.1 Pa to 1 Pa to perform etching. 3 is added at a ratio of 10% or less with respect to the total flow rate of the mixed gas.
本発明によれば、例えば膜中に炭素を含有する低誘電率層間絶縁膜（多孔質からなるものであってもよい）をエッチングする際に、エッチングガスにＮＨ３を添加したため、ＮＨｘ粒子の反応によってホールやトレンチの底部の反応が酸素同様に促進され、高いエッチングレートが得られる上に、エッチングストップ現象が生じることはない。また、ＮＨ３は、酸素原子と比較して反応性が低いため層間絶縁膜（特に、ホールやトレンチのサイドウォール）にダメージを与えることはない。 According to the present invention, for example, when etching a low dielectric constant interlayer insulating film (which may be made of a porous material) containing carbon in the film, NH 3 is added to the etching gas. The reaction promotes the reaction at the bottom of the holes and trenches in the same way as oxygen, and a high etching rate is obtained and an etching stop phenomenon does not occur. In addition, since NH 3 is less reactive than oxygen atoms, it does not damage the interlayer insulating film (especially, sidewalls of holes and trenches).
添加するＮＨ３の比率は、混合ガス総流量基準で１０％以下であることが好ましい。１０％を超えると、所望のエッチング形状が得られず、層間絶縁膜がダメージを受ける。
上記低誘電率層間絶縁膜は、塗布によって、またはＣＶＤによって成膜されたものであることが好ましい。
上記エッチングを１Ｐａ以下の作動圧力で行うことが好ましい。１Ｐａを超えると、ラジカル反応を抑制し難くなる。
The ratio of NH 3 to be added is preferably 10% or less based on the total mixed gas flow rate. If it exceeds 10%, a desired etching shape cannot be obtained, and the interlayer insulating film is damaged.
The low dielectric constant interlayer insulating film is preferably formed by coating or CVD.
The etching is preferably performed at an operating pressure of 1 Pa or less. When it exceeds 1 Pa, it becomes difficult to suppress the radical reaction.
本発明の低誘電率層間絶縁膜のエッチング方法によれば、エッチングガスとしてＮＨ３を添加したものを用いるため、例えば低誘電率層間絶縁膜をドライエッチングする際に、高いエッチングレートが得られ、かつ、層間絶縁膜にダメージを与えることがないという効果を奏する。 According to the etching method of the low dielectric constant interlayer insulating film of the present invention, since an etching gas added with NH 3 is used, for example, when dry etching the low dielectric constant interlayer insulating film, a high etching rate is obtained, In addition, there is an effect that the interlayer insulating film is not damaged.
図１を参照して、１は、本発明の層間絶縁膜をドライエッチングして配線用のホール、トレンチの微細加工を実行するエッチング装置を示す。このエッチング装置１は、低温、高密度プラズマによるエッチングが可能なものであり、ターボ分子ポンプなどの真空排気手段１１ａを備えた真空チャンバー１１を有する。その上部には、誘電体円筒状壁により形成されたプラズマ発生部１２が設けられ、その下部には、基板電極部１３が設けられている。プラズマ発生部１２を区画する壁（誘電体側壁）１４の外側には、三つの磁場コイル１５、１６、１７が設けられ、この磁場コイル１５，１６、１７によって、プラズマ発生部１２内に環状磁気中性線（図示せず）が形成される。中間の磁場コイル１６と誘電体側壁１４の外側との間にはプラズマ発生用高周波アンテナコイル１８が配置され、この高周波アンテナコイル１８は、高周波電源１９に接続され、三つの磁場コイル１５、１６、１７によって形成された磁気中性線に沿って交番電場を加えてこの磁気中性線に放電プラズマを発生するように構成されている。
Referring to FIG. 1,
磁気中性線の作る面と対向させて基板電極部１３内には、処理基板Ｓが載置される基板電極２０が絶縁体２０ａを介して設けられている。この基板電極２０は、コンデンサー２１を介して高周波電源２２に接続され、電位的に浮遊電極となって負のバイアス電位となる。また、プラズマ発生部１２の天板２３は、誘電体側壁１４の上部フランジに密封固着され、電位的に浮遊状態として対向電極を形成する。この天板２３の内面には、真空チャンバ１１内にエッチングガスを導入するガス導入ノズル２４が設けられ、このガス導入ノズル２４が、ガス流量制御手段（図示せず）を介してガス源に接続されている。
A
上記エッチング装置を用いて、処理基板Ｓ上に形成され、配線用のホール、トレンチが微細加工される低誘電率層間絶縁膜としては、比誘電率の低い材料（Ｌｏｗ−ｋ材料）からなる膜が好ましい。例えば、ＨＳＱやＭＳＱのようにスピンコートによって成膜され得るＳｉＯＣＨ系材料、或いはＣＶＤによって成膜され得るＳｉＯＣ系材料であって、比誘電率が２．０〜３．０程度のＬｏｗ−ｋ材料を用いることが好ましく、この材料は多孔質材料であってもよい。 As a low dielectric constant interlayer insulating film formed on the processing substrate S by using the etching apparatus and finely processing wiring holes and trenches, a film made of a material having a low relative dielectric constant (Low-k material) is used. Is preferred. For example, a SiOCH material that can be formed by spin coating, such as HSQ or MSQ, or a SiOC material that can be formed by CVD, and a low-k material having a relative dielectric constant of about 2.0 to 3.0 Is preferably used, and the material may be a porous material.
上記ＳｉＯＣＨ系材料としては、例えば、商品名NCS/触媒化成工業社製、商品名LKD5109r5/JSR社製、商品名HSG-7000/日立化成社製、商品名HOSP/Honeywell Electric Materials社製、商品名Nanoglass/Honeywell Electric Materials社製、商品名OCD T-12/東京応化社製、商品名OCD T-32/東京応化社製、商品名IPS2.4/触媒化成工業社製、商品名IPS2.2/触媒化成工業社製、商品名ALCAP-S5100／旭化成社製、商品名ISM/ULVAC社製がある。 Examples of the SiOCH-based material include, for example, trade name NCS / catalyst chemical industry, trade name LKD5109r5 / JSR, trade name HSG-7000 / Hitachi Chemical, trade name HOSP / Honeywell Electric Materials, trade name Nanoglass / Honeywell Electric Materials, trade name OCD T-12 / Tokyo Ohkasha, trade name OCD T-32 / Tokyo Ohkasha, trade name IPS2.4 / Catalyst Kasei Kogyo, trade name IPS2.2 / There are products made by Catalytic Chemical Industry, trade name ALCAP-S5100 / Asahi Kasei Corporation, trade name ISM / ULVAC.
上記ＳｉＯＣ系材料としては、例えば、商品名Aurola2.7/日本ASM社製、商品名Aurola2.4/日本ASM社製、商品名Orion2.7/TRIKON社製、商品名Coral/Novellus社製、商品名Black Diamond/AMAT社製がある。 Examples of the SiOC-based material include, for example, trade name Aurola 2.7 / manufactured by ASM Japan, trade name Aurola 2.4 / manufactured by ASM Japan, trade name Orion 2.7 / TRIKON, trade name Coral / Novellus, The name Black Diamond / AMAT is available.
また、本発明の低誘電率層間絶縁膜としては、商品名SiLK/Dow Chemical社製、商品名Porous-SiLK/Dow Chemical社製、商品名FLARE/Honeywell Electric Materials社製、商品名Porous FLARE/Honeywell Electric Materials社製、商品名GX-3P/Honeywell Electric Materials社製などの材料からなる有機系の低誘電率層間絶縁膜でもよい。 In addition, as the low dielectric constant interlayer insulating film of the present invention, trade name SiLK / Dow Chemical, trade name Porous-SiLK / Dow Chemical, trade name FLARE / Honeywell Electric Materials, trade name Porous FLARE / Honeywell It may be an organic low dielectric constant interlayer insulating film made of materials such as those manufactured by Electric Materials, trade name GX-3P / Honeywell Electric Materials.
上記層間絶縁膜上には、レジストを塗布した後、フォトリソグラフ法で所定のパターンが形成される。レジストとしては、公知のものを用いることができる。
本発明のドライエッチングプロセスに用いるエッチングガスとしては、フッ化炭素ガス（ＣｎＦｍ）を主エッチングガスとし、このフッ化炭素ガスに、総流量基準で１０％以下の比率でＮＨ３を添加した混合ガスを用いる。添加するＮＨ３の下限値は、ホールやトレンチの底部の反応が促進され、所望の安定なエッチングレートが得られる値であればよく、例えば、安定な流量を供給できる限界値である１％以上であることが好ましい。フッ化炭素ガスとしては、例えば、Ｃ２Ｆ６、Ｃ３Ｆ８、Ｃ４Ｆ８、及びＣ５Ｆ８などから選択すればよい。
A predetermined pattern is formed on the interlayer insulating film by photolithography after applying a resist. As the resist, a known resist can be used.
As an etching gas used in the dry etching process of the present invention, a fluorocarbon gas (C n F m ) is a main etching gas, and NH 3 is added to the fluorocarbon gas at a ratio of 10% or less based on the total flow rate. Use the mixed gas. The lower limit value of NH 3 to be added may be any value as long as the reaction at the bottom of the hole or trench is promoted and a desired stable etching rate can be obtained. For example, the lower limit value is 1% or more which is a limit value capable of supplying a stable flow rate. It is preferable that The fluorocarbon gas may be selected from, for example, C 2 F 6 , C 3 F 8 , C 4 F 8 , C 5 F 8 and the like.
この混合ガスを、ラジカル反応を抑制する１Ｐａ以下の作動圧力下、また、安定に放電できる圧力範囲の限界値である０．１Ｐａ以上の作動圧力下で導入してエッチングすれば、例えば、膜中に炭素を含有する多孔質の低誘電率層間絶縁膜をエッチングする場合に、ホールやトレンチの底部の反応が、ＮＨｘ粒子の反応によって、酸素を含有する混合ガスでエッチングする場合と同様に促進され、高いエッチングレートが得られる。この場合、エッチングストップ現象が生じることもない。また、ＮＨ３は、酸素原子と比較して反応性が低いため、層間絶縁膜、特に膜内のホールやトレンチのサイドウォールに対してダメージを与えることもない。 If this mixed gas is introduced and etched under an operating pressure of 1 Pa or less that suppresses radical reaction, or under an operating pressure of 0.1 Pa or more, which is a limit value of a pressure range in which stable discharge can be performed, for example, in the film When etching a porous low dielectric constant interlayer insulating film containing carbon, the reaction at the bottom of the hole or trench is promoted by the reaction of NHx particles in the same manner as when etching with a mixed gas containing oxygen. A high etching rate can be obtained. In this case, the etching stop phenomenon does not occur. Further, since NH 3 is less reactive than oxygen atoms, it does not damage the interlayer insulating film, particularly the holes in the film and the sidewalls of the trench.
本実施例では、ＳｉＯＣＨ系材料として比誘電率（ｋ）２．５のＭＳＱ(methylsilsesquioxane)を用い、スピンコータを使用して、基板上に５００ｎｍの膜厚で低誘電率層間絶縁膜を形成した。そして、この低誘電率層間絶縁膜上に、スピンコータによりレジストを塗布し、フォトリソグラフ法で所定のパターンを形成した。この場合、レジストとしては、ＵＶ−ＩＩを使用し、レジスト層の厚さを５００ｎｍとした。 In this example, MSQ (methylsilsesquioxane) having a relative dielectric constant (k) of 2.5 was used as the SiOCH-based material, and a low dielectric constant interlayer insulating film having a thickness of 500 nm was formed on the substrate using a spin coater. Then, a resist was applied on the low dielectric constant interlayer insulating film by a spin coater, and a predetermined pattern was formed by photolithography. In this case, UV-II was used as the resist, and the thickness of the resist layer was 500 nm.
次に、図１に示すエッチング装置１を用いて、Ｃ３Ｆ８を主エッチングガスとし、これにアルゴンとＮＨ３とを添加した混合ガスを、真空チャンバ１１内に導入して低誘電率層間絶縁膜をエッチングした。この場合、Ｃ３Ｆ８を２５ｓｃｃｍ、アルゴンを２２０ｓｃｃｍ、ＮＨ３を１０ｓｃｃｍ（約３．９％）とした。この場合、エッチング処理は、プラズマ発生用高周波アンテナコイル１８に接続した高周波電源１９の出力を２ｋＷ、基板電極２１に接続した高周波電源２２の出力を４００Ｗ、基板設定温度を１０℃、真空チャンバ１１の圧力を１Ｐａに設定して行った。
Next, using the
また、比較例として、ＮＨ３に換えて酸素を１０ｓｃｃｍ添加した混合ガス、及びＮＨ３や酸素のいずれも添加しない混合ガスを真空チャンバー１１内に導入して、上記と同様の条件で低誘電率層間絶縁膜をエッチングした。
As a comparative example, a mixed gas of oxygen was 10sccm added in place of the NH 3, and NH 3 or a gas mixture neither the addition of oxygen is introduced into the
上記条件で低誘電率層間絶縁膜及びレジストマスクをエッチングしたときの、ＳｉＯＣＨとレジスト(Resist)とのエッチングレート並びにレジスト選択比(SiOCH/Resist)を以下の表１に示す。 Table 1 below shows the etching rate between SiOCH and resist (Resist) and the resist selectivity (SiOCH / Resist) when the low dielectric constant interlayer insulating film and the resist mask are etched under the above conditions.
上記条件でエッチングしたときに得られたホールの状態を示すＳＥＭ写真を図２に示す。図２(ａ)はＣ３Ｆ８とアルゴンとの混合ガス、(ｂ)はＣ３Ｆ８とアルゴンと酸素との混合ガス、(ｃ)はＣ３Ｆ８とアルゴンとＮＨ３との混合ガスをそれぞれ用いてエッチングした場合のホールの状態を示すＳＥＭ写真である。 An SEM photograph showing the state of the holes obtained when etching is performed under the above conditions is shown in FIG. 2A is a mixed gas of C 3 F 8 and argon, FIG. 2B is a mixed gas of C 3 F 8 and argon and oxygen, and FIG. 2C is a mixed gas of C 3 F 8 and argon and NH 3. It is a SEM photograph which shows the state of the hole at the time of etching using each gas.
表１及び図２（ａ）から明らかなように、ＮＨ３や酸素を添加しない混合ガスでエッチングした場合、ＳｉＯＣＨもレジストも高いエッチングレートは得られず、特にレジストのエッチングレートが極めて低いことから対レジスト選択比は高くなる。また、表１及び図２（ｂ）から明らかなように、酸素を添加した混合ガスでエッチングした場合、ＳｉＯＣＨもレジストも高いエッチングレートが得られるが、酸素によって炭素が引き抜かれるため、ホールのサイドウォールの平滑性が失われており、層間絶縁膜がダメージを受けている。これに対して、表１及び図２（ｃ）から明らかなように、ＮＨ３を添加した混合ガスでエッチングした場合、酸素添加の混合ガスと同等のＳｉＯＣＨエッチングレートが得られるが、レジストのエッチングレートは酸素添加の場合と比べて低下しているため、対レジスト選択比は高くなっており、また、ホールのサイドウォールの平滑性が向上している。これは、酸素原子と比較して反応性が低いことに起因するものと考えられる。 As is apparent from Table 1 and FIG. 2A, when etching is performed with a mixed gas to which NH 3 and oxygen are not added, neither SiOCH nor resist can obtain a high etching rate, and the etching rate of the resist is particularly low. The selectivity to resist is high. As is clear from Table 1 and FIG. 2B, when etching is performed with a mixed gas to which oxygen is added, both SiOCH and the resist can obtain a high etching rate. However, since carbon is extracted by oxygen, The smoothness of the wall is lost, and the interlayer insulating film is damaged. On the other hand, as is clear from Table 1 and FIG. 2 (c), when etching is performed with a mixed gas to which NH 3 is added, a SiOCH etching rate equivalent to that of a mixed gas with oxygen addition can be obtained. Since the rate is lower than that in the case of oxygen addition, the selectivity to resist is high, and the smoothness of the sidewall of the hole is improved. This is considered due to the low reactivity compared to oxygen atoms.
ＮＨ３の添加比率を１％および１０％としたことを除いて実施例１のエッチング方法を繰り返した。その結果、実施例１と同様なエッチングレート及びホール状態が得られた。 The etching method of Example 1 was repeated except that the addition ratio of NH 3 was 1% and 10%. As a result, the same etching rate and hole state as in Example 1 were obtained.
１ エッチング装置 １１ 真空チャンバ
１２ プラズマ発生部 １３ 基板電極部
Ｓ 基板
DESCRIPTION OF
Claims (2)
前記ＮＨ３を前記混合ガスの総流量に対し１０％以下の比率で添加することを特徴とする低誘電率層間絶縁膜のドライエッチング方法。 A method of dry etching a low dielectric constant interlayer insulating film in which a low dielectric constant interlayer insulating film made of a SiOCH or SiOC material is etched to finely process wiring holes and trenches, and NH 3 is added to a fluorocarbon gas. In the case of introducing and etching a mixed gas not containing oxygen under an operating pressure of 0.1 Pa or more and 1 Pa or less ,
The dry etching method for a low dielectric constant interlayer insulating film, wherein the NH 3 is added at a ratio of 10% or less with respect to the total flow rate of the mixed gas.
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| JP2001210627A (en) * | 1999-11-16 | 2001-08-03 | Matsushita Electric Ind Co Ltd | Etching method, semiconductor device and manufacturing method therefor |
| JP2001338909A (en) * | 2000-05-26 | 2001-12-07 | Matsushita Electric Ind Co Ltd | Etching method of organic film, method of fabrication and pattern formation of semiconductor device |
| JP2002016050A (en) * | 2000-04-28 | 2002-01-18 | Daikin Ind Ltd | Dry etching gas and dry etching method |
| JP2002289577A (en) * | 2001-03-27 | 2002-10-04 | Ulvac Japan Ltd | Etching method of thin film of material containing organic silicon compound deposited on substrate |
| JP2003174084A (en) * | 2001-12-04 | 2003-06-20 | Hitachi Chem Co Ltd | Method for forming multilayer wiring and method for manufacturing semiconductor device |
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| JP2002016050A (en) * | 2000-04-28 | 2002-01-18 | Daikin Ind Ltd | Dry etching gas and dry etching method |
| JP2001338909A (en) * | 2000-05-26 | 2001-12-07 | Matsushita Electric Ind Co Ltd | Etching method of organic film, method of fabrication and pattern formation of semiconductor device |
| JP2002289577A (en) * | 2001-03-27 | 2002-10-04 | Ulvac Japan Ltd | Etching method of thin film of material containing organic silicon compound deposited on substrate |
| JP2003174084A (en) * | 2001-12-04 | 2003-06-20 | Hitachi Chem Co Ltd | Method for forming multilayer wiring and method for manufacturing semiconductor device |
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