JP4662587B2 - Contact unit and electrical connection device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a contact unit used for an electrical characteristic test of an object to be inspected such as an integrated circuit, and an electrical connection device using the contact unit.
[0002]
[Prior art]
As one of the electrical connection devices used for an energization test of an integrated circuit, a plurality of electrical wirings are formed on one surface of a film having electrical insulation and flexibility, and hemispherical protrusions (bump electrodes) are formed on each electrical wiring. There is a film-type probe card using a probe sheet on which is formed). In this electrical connection device, the bump electrode is pressed against a contacted portion such as a pad electrode of an integrated circuit.
[0003]
This electrical connection device forms protrusions on each electrical wiring, and uses a part of the electrical wiring and the corresponding part of the film as a probe element, so that a metal wire is not used as a probe. Has the advantage of being easy and inexpensive.
[0004]
However, in this type of conventional electrical connection device, since adjacent probe elements are not independent, the deformation amount of the probe elements when the bump electrode and the contacted portion of the integrated circuit are relatively pressed, is small. As a result, an effective rubbing action cannot be given to the contacted portion, and a good contact state cannot be obtained.
[0005]
An electrical connection device has been proposed in which slits are formed between adjacent probe elements to form finger-like probe elements. However, in this electrical connection device, since the probe element is only elastically deformed due to its own spring property, a target contact pressure cannot be obtained between the bump electrode and the contacted portion.
[0006]
[Problems to be solved]
Therefore, in this type of electrical connection device, it is important that the intended contact pressure is obtained even though an effective rubbing action occurs.
[0007]
[Solution, action, effect]
The contact unit of the present invention comprises a plate-like support body having first and second surfaces in the front and back direction and a third surface that is a side surface intersecting the both surfaces, and an electrical connection body disposed on the support body. Including.
[0008]
The electrical connection body includes a thin base member disposed over at least the first and third surfaces, and a plurality of wiring portions disposed at intervals on the base member, each of which is at least the first and the first And a contact portion that is provided at each wiring portion corresponding to the third surface and projects from the wiring portion to the opposite side of the base member.
[0009]
The support is a cutout portion that opens to one of the first and second surfaces and the third surface, and an elastic member that is disposed in the cutout portion, and the contact portion is a contacted portion. An elastic member that is elastically deformed so that either one of the first and second surfaces of the portion near the contact portion is deformed more greatly than the other portion. .
[0010]
The electrical connection device of the present invention includes a plurality of contact units as described above, a frame having openings arranged in parallel so that the contact units have the contact portions below, and the contact units individually. A plurality of pairs of mounting plates for correspondingly attaching corresponding contact units to the frame, wherein each of the contacts has a plurality of pairs of mounting plates disposed in the opening in a state of being opposed to each other via the corresponding contact unit. The unit projects the third surface side downward from the frame.
[0011]
Of the electrical connection body, the vicinity of each contact portion acts as a probe element. When the tip of the contact part is pressed against the contacted part such as the electrode part of the integrated circuit, the elastic member is elastically deformed together with the probe element, and a predetermined contact pressure is obtained between the contact part and the contacted part. .
[0012]
In addition, since each probe element is deformed by the contact portion so that one portion in the thickness direction of the support body is deformed more greatly than the other portion, the contact portion is inclined with respect to the contacted portion, and the contact portion and the covered portion are deformed. Effective rubbing action occurs between the contact points.
[0013]
As described above, according to the present invention, there is provided a notch portion that is open to one of the first and second surfaces and the third surface, and an elastic member that is disposed in the notch portion, and includes a contact portion. Is pressed against the contacted portion, and elastically deforms so that one of the first and second surfaces of the portion near the contact portion is deformed more greatly than the other portion. Since the elastic member is provided on the support, the target contact pressure can be obtained despite an effective rubbing action.
[0016]
The elastic member and the electrical connection body may have a slit between adjacent contact portions that opens at least in the third surface. In this way, since the movement (deformation) of the adjacent probe elements is independent, the rubbing action is more reliably generated and better contact can be obtained.
[0017]
The support is disposed on the side opposite to the third surface of the plate-like portion, the plate-like portion having the first, second, and third surfaces, the notch portion, and the elastic member . And an elastic body that forms a fourth surface opposite to the third surface, and the base member and each of the wiring portions extend from the portion corresponding to the first surface to the fourth surface, respectively. The contact unit may further include a protruding electrode provided at a portion corresponding to the extension portion of each wiring portion.
[0018]
The electrical connection device using the contact unit as described above further includes a plurality of connection substrates disposed on the frame so as to face the protruding electrodes of the corresponding contact unit corresponding to the contact unit individually. Each connection board includes a plurality of connection lands individually corresponding to the protruding electrodes and in contact with the corresponding protruding electrodes, and connected to the corresponding connecting lands individually corresponding to the connecting lands. A plurality of conductive through holes can be provided. If it does in this way, a projection electrode can be connected to a tester with a connector which has a pin inserted in a through hole, and a flat cable connected to this connector.
[0019]
Each mounting plate has a plurality of members that engage with the end face of the contact unit, and is assembled to the frame by a set screw, and a plurality of adjustments that are spaced with the set screw in between. The position of the contact unit can be adjusted by a screw. If it does in this way, the dispersion | variation in the height and parallelism of a contact unit can be corrected and adjusted with a set screw and an adjustment screw.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIGS. 1, 2, and 3, the contact unit 10 includes a support body 12 having a rectangular plate shape and a flexible thin electrical connection body 14 disposed on the outer peripheral surface of the support body 12. Including.
[0021]
The support body 12 is provided with an elastic member 18 at one end portion in the width direction of the elongated plate-like portion 16 so as to be displaced to one side in the thickness direction of the plate-like portion 16, and an elastic body at the other end portion in the width direction. 20 is arranged, and projecting portions 22 are formed on each end surface in the longitudinal direction of the plate-like portion 16.
[0022]
The plate-like portion 16 and the protruding portion 22 are integrally made of an electrically insulating material such as ceramic. In the illustrated example, the elastic deformation portion 18 and the elastic body 20 are formed of an elastic member that is elastically deformable in a three-dimensional direction, such as silicone rubber.
[0023]
The elastic member that forms the elastic deformation portion 18 is formed on one end portion side in the width direction of the plate-like portion 16, and at least one surface in the thickness direction of the plate-like portion 16 and the width direction of the plate-like portion 16. It arrange | positions at the notch part 23 open | released to an end surface, and is extended in the longitudinal direction of the plate-shaped part 16. FIG.
[0024]
The elastic body 20 extends in the longitudinal direction of the plate-like portion 16. Each projecting portion 22 extends in the width direction of the plate-like portion 16 and has hemispherical recesses 24 opened in the end face at a plurality of locations (two locations in the illustrated example) spaced in the longitudinal direction. .
[0025]
The electrical connection body 14 has a plurality of wiring portions 28 on the outer surface of a cylindrical film member 26 made of an electrically insulating resin such as polyimide, and has a contact portion 30 at one end of each wiring portion 28. A bump electrode 32 such as a bump electrode is provided at the other end of each wiring portion 28.
[0026]
The wiring portion 28 is a wiring pattern formed on the base member 26 by an appropriate method such as a printed wiring technique, and extends in the longitudinal direction of the support 12 so as not to contact each other. In the illustrated example, the wiring portion 28 is formed in a U shape, but may be formed in a ring shape extending around the support 12.
[0027]
In the electrical connection body 14, a plurality of wiring portions 28 are formed on one surface of a flat film member 26, contact portions 30 and protruding electrodes 32 are formed on each wiring portion 28, and the film member 26 is connected to the contact portion 30. And the protruding electrode 32 become the one end surface and the other end surface in the width direction of the support body 12 respectively, and an appropriate method such as bonding by winding the outer surface of the support body 12 in a cylindrical shape so that the wiring portion 28 extends in a U-shape. Can be attached to the support 12.
[0028]
Each contact part 30 and the protruding electrode 32 are made of a conductive metal material such as nickel, and protrude from the wiring part 28 to the opposite side of the support 12. Each contact portion 30 is a protruding electrode that is slightly longer than the protruding electrode 32 so as to act as a probe.
[0029]
The contact unit 10 also has a slit 34 formed in the electrical connection body 14 and the support body 12 between adjacent wiring sections 28 from one end in the width direction. The slit 34 extends from the one end surface in the width direction of the support 12 to the electrical connection body 14, the plate-like portion 16, and the elastic deformation portion 18. For this reason, a part of the adjacent wiring part 28 and a part in the vicinity thereof, in particular, a part in the vicinity of the contact part 30 acts independently as an elastically deformable probe element.
[0030]
In the illustrated example, the device under test 36 to be tested is an integrated circuit, and the contacted portion 38 is a pad electrode. Each contact unit 10 is manufactured and arranged so as to be the same pattern as the arrangement pattern of the contacted portion 38. The device under test, that is, the integrated circuit 36 has a plurality of electrode pads on one surface as contacted portions 38. One such integrated circuit 36 is an uncut IC on a semiconductor wafer.
[0031]
4 to 6, the electrical connection device 40 includes a plurality of contact units 10 as described above, a frame 42 formed in a disk shape from an electrically insulating material such as ceramic, and the contact units 10. A plurality of mounting plates 44 for attaching the corresponding contact unit 10 to the frame 42 individually and corresponding to the protruding electrodes 32 of the corresponding contact unit 10 corresponding to the contact unit 10 are arranged on the frame 42. And a plurality of elongated connection substrates 46.
[0032]
The contact unit 10 is arranged in parallel to the frame 42 by a pair of mounting plates 44 so that the protruding electrode 32 is on the upper side, the contact part 30 side is on the lower side, and the thickness direction is the same.
[0033]
The frame 42 has a rectangular opening 48 in the center for receiving the contact unit 10, a downwardly extending opening wall 50 around the opening 48, and a rectangular inward flange 52 projecting into the opening 48 at the top. Each contact unit 10 projects a part on the contact portion 30 side downward from the frame 42.
[0034]
Each mounting plate 44 is assembled to the opening wall 50 so as to face the end face of the corresponding contact unit 10 by a set screw 54 penetrating the opening wall 50 in the thickness direction. Each mounting plate 44 has a pair of ball plungers 56 spaced in the vertical direction.
[0035]
Although the ball plunger 56 does not show its specific structure, the ball and the compression coil spring are arranged in the cylindrical member, and one end of the cylindrical member is closed by an appropriate means such as a lid, This is a known locking tool having a structure in which a portion of the ball is urged by a compression coil spring so as to protrude from the other end of the cylindrical member.
[0036]
The ball plunger 56 is disposed at a position facing the recess 24 of the corresponding contact unit 10 with the ball side inward.
[0037]
Each contact unit 10 is inserted from below between a pair of opposing mounting plates 44 and is releasably engaged with the ball of the ball plunger 56 in the recess 24. As a result, each contact unit 10 is held by a pair of opposing mounting plates 44.
[0038]
Each mounting plate 44 is assembled to the flange 52 by a set screw 58 that penetrates the flange 52 of the frame 42 in the vertical direction, a pair of guide pins 60, and a pair of adjustment screws 62. The set screw 58 is arranged at the center position of the quadrangle, and the guide pin 60 and the adjustment screw 62 are arranged at intervals in the diagonal direction of the square with the set screw 58 therebetween.
[0039]
The set screw 58 passes through the flange 52 and is screwed to the mounting plate 44. The guide pin 60 is fixed to one of the mounting plate 44 and the flange 52 and penetrates the other. The adjusting screw 62 is screwed into the flange 52 and is in contact with the upper surface of the mounting plate 44. For this reason, since the posture of the contact unit 10 can be adjusted by adjusting the screwing amount of the adjustment screw 62 in a state where the set screw 58 is loosened, variations in the height and parallelism of the contact unit 10 can be achieved. Can be corrected and adjusted.
[0040]
Each connection board 46 is mounted on the mounting plate 44 at each end by a pair of set screws 64 spaced in the width direction and guide pins 66 provided between the set screws. Each set screw 64 passes through the connection substrate 46 and is screwed to the mounting plate 44. The guide pin 66 is provided on one of the mounting plate 44 and the connection board 46, and the other is fitted so as to be slidable.
[0041]
Each connection board 46 has a plurality of connection lands 68 corresponding to the protruding electrodes 32 of the contact unit 10 on one surface, and is connected to the corresponding connection lands individually corresponding to the connection lands 68. A conductive through hole 70 is provided. Each connection substrate 46 is attached to the attachment plate 44 with the connection land 68 in contact with the protruding electrode 32. Each set screw 66 is loosened when adjusting the posture of the contact unit 10.
[0042]
In the electrical connecting device 40, for example, each mounting plate 44 is loosely assembled to the opening wall 50 by the set screw 54 and loosely assembled to the flange 52 by the set screw 58, and each connection substrate 46 is loosened to the mounting plate 44 by the set screw 64. Assembling is then performed by inserting each contact unit 10 into the opening 48 from below, then adjusting the posture of each contact unit 10 to tighten the set screws 54 and 60 tightly, and then tighten the set screw 64 tightly.
[0043]
When assembled in the electrical connection device 40, each contact unit 10 can be slightly displaced against the frame 42 and the mounting plate 44 against the spring force of the ball plunger 56.
[0044]
A connection pin 74 of the connector 72 is inserted into each through hole 70. The connector 72 is provided at one end of a flat cable 76 that connects each contact unit 10 to a test head of the tester.
[0045]
The electrical connection device 40 is disposed at a tester inspection station, and each contact unit 10 is connected to a tester test head by a plurality of flat cables 76. The integrated circuit 36 is arranged on a test table of the tester.
[0046]
During the energization test, the contact portion 30 is pressed against the pad electrode 38 of the integrated circuit 36. As a result, the integrated circuit 36 is electrically connected to the test head of the tester by the contact portion 30, the wiring portion 28, the protruding electrode 32, the connection land 68, the through hole 70, the connector 72 and the flat cable 76.
[0047]
When the contact portion 30 is pressed against the pad electrode 38, the elastic deformation portion 18 is elastically deformed, and a predetermined contact pressure is obtained between the contact portion 18 and the pad electrode 38 of the integrated circuit 36. Further, since the elastic deformation portion 18 is displaced to one side in the thickness direction of the support 12, each probe element has a portion on one side in the thickness direction of the support 12 as shown in FIG. 3. As a result, the contact part 30 is inclined with respect to the pad electrode 38, and an effective rubbing action is generated between the contact part 30 and the pad electrode 38.
[0048]
In the electrical connection device 40, each contact unit 10 can be slightly displaced against the spring force of the ball plunger 56 with respect to the frame 42 and the mounting plate 44, so that it can be thermally expanded and contracted as a whole. There is no possibility that the positional relationship between the contact units 10 changes greatly.
[0049]
Further, when conducting an energization test of an object to be inspected having a different arrangement pattern of the contact location 38, the contact portion 30 may be replaced with another contact unit arranged in a state corresponding to the arrangement pattern of the contact location.
[0050]
Instead of the elastic deformation portion being an elastic deformation portion 18 using an elastic member such as rubber, the thickness direction of the support 12 is on one end side of the plate-like portion 16 as shown in FIG. A portion formed by the notch 80 opened to one surface of the plate may be used as the elastic deformation portion 82.
[0051]
In the embodiment shown in FIG. 7, the elastic deformation portion 82 is in the state shown in FIG. 7A when the contact portion 30 is not pressed against the pad electrode 38, but the contact portion 30 is pressed against the pad electrode 38. Then, as shown in FIG. 7B, the support body 12 is elastically deformed so that one side in the width direction of the support body 12 is largely deformed. Thereby, the contact part 30 gives an effective rubbing action to the electrode part.
[0052]
As shown in FIG. 2, an electrical insulating layer 84 that covers the wiring portion 28 may be provided on the electrical connection body 10. In this way, even if a plurality of contact units 10 are stacked, electrical contact between the wiring portions 28 of adjacent contact units 10 is prevented.
[0053]
Further, instead of previously forming the contact portion 30 in the wiring portion 28, all the contact portions of the electrical connection device 40 may be formed in the wiring portion after the electrical connection device 40 is assembled. If it does in this way, a contact part can be easily formed in the arrangement | positioning corresponding to the arrangement pattern of a to-be-contacted location correctly.
[0054]
The present invention is not limited to the above embodiments. For example, the present invention can be applied to an interface for connecting a probe card to a test head of a tester and a contact unit used therefor. Further, the present invention is not limited to a contact unit and an electrical connection device used for an energization test of an integrated circuit, but also to a contact unit and an electrical connection device used for an energization test of another flat object to be inspected such as a liquid crystal substrate. Can be applied. Therefore, the present invention can be variously modified without departing from the gist thereof.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a contact unit according to the present invention.
FIG. 2 is a left side view of the contact unit shown in FIG.
3 is a partially enlarged cross-sectional view for explaining the operation of the contact unit shown in FIG.
4 is a plan view showing an embodiment of an electrical connection device using the contact unit shown in FIG. 1, and is a plan view with a flat cable removed. FIG.
FIG. 5 is a cross-sectional view taken along line 5-5 of FIG.
6 is a cross-sectional view taken along line 6-6 of FIG.
FIGS. 7A and 7B are cross-sectional views showing another example of use of the contact unit, in which FIG. 7A shows a state where the contact portion is not pressed against the contacted portion, and FIG. 7B shows the contact portion pressed against the contacted portion. The state that has been done.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Contact unit 12 Support body 14 Electrical connection body 16 Plate-shaped part 18,82 Elastic deformation part 20 Elastic body 23,80 Notch part 26 Base member 28 Wiring part 30 Contact part 32 Projection electrode 34 Slit 36 Test object (integrated circuit)
38 Location of contact (pad electrode)
40 Electrical connection device 42 Frame 44 Mounting plate 46 Connection board 48 Opening 54, 58, 64 Set screw 56 Ball plunger 62 Adjustment screw 60, 66 Guide pin 68 Connection land 70 Through hole 72 Connector 74 Connection pin 76 Flat cable

Claims (6)

A plate-like support body having first and second surfaces in the front and back direction and a third surface of a side surface intersecting the both surfaces, and an electrical connection body disposed on the support body,
The electrical connection body includes a thin base member disposed over at least the first and third surfaces, and a plurality of wiring portions disposed at intervals on the base member, each of which is at least the first and the first A wiring portion extending over three surfaces, and a contact portion provided at each wiring portion corresponding to the third surface and projecting from the wiring portion to the opposite side of the base member,
The support is a cutout portion that opens to one of the first and second surfaces and the third surface, and an elastic member that is disposed in the cutout portion, and the contact portion is a contacted portion. An elastic member that elastically deforms so that one of the first and second surfaces of the portion near the contact portion is deformed to a greater extent than the other portion. Contact unit.   The contact unit according to claim 1, wherein the elastic member and the electrical connection body have a slit that opens at least in the third surface between adjacent contact portions.   The support is disposed on the side opposite to the third surface of the plate-like portion, the plate-like portion having the first, second, and third surfaces, the notch portion, and the elastic member. And an elastic body that forms a fourth surface opposite to the third surface, and the base member and each of the wiring portions extend from the portion corresponding to the first surface to the fourth surface, respectively. The contact unit according to claim 1, further comprising a protruding electrode provided at a portion corresponding to the extended portion of each wiring portion.   A plurality of contact units according to any one of claims 1 to 3, a frame having openings in which the contact units are arranged in parallel in a state where the contact portions are located below, and each of the contact units. A plurality of pairs of mounting plates that are attached to the frame corresponding contact units corresponding to the plurality of mounting plates disposed in the opening in a state of being opposed to each other via the corresponding contact units, The contact unit is an electrical connection device in which the third surface side protrudes downward from the frame.   Each mounting plate has a plurality of members that engage with the end face of the contact unit, and is assembled to the frame by a set screw, and a plurality of adjustments that are spaced with the set screw in between. The electrical connection device according to claim 4, wherein the posture of the contact unit can be adjusted by a screw.   The contact unit according to claim 3, wherein the contact unit is disposed on the frame so as to be opposed to the protruding electrode of an electrical connection device and the contact unit corresponding to the contact unit individually. A plurality of connection lands each having a plurality of connection lands individually corresponding to the protrusion electrodes and in contact with the corresponding protrusion electrodes, and individually corresponding to the connection lands. The electrical connection device according to claim 5, further comprising a plurality of conductive through holes connected to corresponding connection lands.

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