JP4628153B2 - Nano-level structural composition observation apparatus and nano-level structural composition observation method - Google Patents

Description

  The present invention relates to a nano-level structural composition observation apparatus and a nano-level structural composition observation method, and in particular, a nano-level characteristic of a configuration for processing a nano-level structural composition observation sample in the nano-level structural composition observation apparatus. The present invention relates to a structural composition observation apparatus and a nano-level structural composition observation method.

In recent years, HDDs (hard disk drives) are rapidly becoming smaller and larger in capacity, and there is a need to develop heads and media for realizing high-density magnetic recording. From recording bits finely arranged on a medium In order to convert the generated magnetic signal into an electric signal with high efficiency by the reproducing head, it is required to make the MR head finer and thinner.

In such a miniaturized / thinned MR head, it is necessary to accurately form the thickness of each layer constituting the spin valve film and to maintain a good interface state between the layers.
For example, if the film thickness distribution is not uniform, the interface is curved, or if the constituent atoms are interdiffused at the interface and the interface is unclear, desired characteristics cannot be obtained.

  Therefore, in the past, the 2θ method using X-ray reflection at the interface was used to evaluate the film thickness and interface state of each layer such as the spin valve film and feed back the results to the manufacturing process. Improvement and production yield were improved.

  However, since the 2θ method is a method that uses the reflection intensity of X-rays at the interface, when the constituent atoms are interdiffused at the interface and the interface is unclear, a highly accurate analysis is difficult. In addition, even when an unexpected layer is present, it is difficult to perform highly accurate analysis.

  Therefore, as a technique for solving such a problem, a three-dimensional atom probe method is known as a technique for directly observing a three-dimensional structure at an atomic level (see, for example, Patent Document 1 or Patent Document 2). The method irradiates a needle-like sample with a sharp tip with a tip diameter of 1 μm or less with a pulsed high electric field or laser, and with this energy, the surface atoms or clusters are electrolytically evaporated, and the sample is obtained by a two-dimensional position detector. Therefore, the conventional atom probe method will be described with reference to FIG.

See FIG.
FIG. 13 is an explanatory diagram of the principle of the atom probe method described above, and is configured from the tip of the needle-like sample 61 by applying a pulse high voltage to the needle-like sample 61 having a tip radius of, for example, 100 nm (= 0.1 μm). The substances 62 and 63 are subjected to field evaporation, and the arrival time (TOF: Time of Flight) of the flying constituent substances 62 and 63 is measured by the measuring device 64, and the ion species of the constituent substances 62 and 63 are identified from the arrival time. is there.

Samples used in such an atom probe method are processed using an FIB (focused ion beam) method (for example, see Patent Document 3 or Patent Document 4), and the processed sample is brought into a three-dimensional atom probe apparatus for observation. I am doing.
JP 2002-042715 A JP 2001-208659 A JP 2003-042929 A Japanese Patent Laid-Open No. 03-280342

  However, in the conventional three-dimensional atom probe apparatus, the sample processing is performed by another apparatus such as an FIB apparatus as described above, and the processed sample is brought into the three-dimensional atom probe apparatus. And accurate alignment with the central axis of the three-dimensional atom probe apparatus is difficult, and there is a risk that precise electric field radiation (evaporation) may not be performed.

  Also, since the processed sample is transported in the air, contamination and oxidation in the air occur, and the result does not accurately reflect the original structure of the sample, or the contaminated layer or oxidized layer is not There is a problem of wasting time until electrolytic evaporation occurs.

  Therefore, an object of the present invention is to facilitate the alignment of the sample probe and to prevent contamination and oxidation in the atmosphere.

FIG. 1 is a diagram illustrating the basic configuration of the present invention. Means for solving the problems in the present invention will be described with reference to FIG.
Refer to FIG. 1 In order to solve the above-mentioned problem, the present invention removes from a surface of a needle-like sample 1 a cluster 1 group 1 group consisting of one or more atoms by an external energy or an internal energy to an external space. in the nano-level structure composition observation apparatus for observing the structural composition of the nano-level of the needle-like sample 1 by, the nano-level structural composition observation device, the needle-like sample 1 after the sample and processing before processing A sample probe 2 for fixing the sample, sample processing means 3 for processing the sample into the needle-like sample 1, and a detector 6 for detecting the atoms or clusters, and the center of the sample probe 2 The detector 6 is disposed so as to be movable with respect to the central axis of the sample probe portion 2 so as to face the central axis of the sample processing means 3. Toss The

Thus, by providing the sample processing means 3 such as a focused ion beam device so as to face the sample probe unit 2 in the nano-level structural composition observation device, the central axis of the sample probe unit 2 and the needle-shaped sample are arranged. It is possible to perform precise axis alignment with the one axis line, and it is possible to prevent the probe surface from being contaminated and oxidized by the atmosphere, so that highly accurate observation can be performed.
The internal energy in this case is typically a field evaporation by a pulsed high electric field, and the external energy is typically a pulsed electromagnetic wave such as a pulsed laser beam.

  In this case, by arranging the sample probe 2 and the sample processing means 3 in a straight line, it is possible to precisely align the center axis of the sample probe 2 and the axis of the needle-like sample 1.

Further, by providing the reflectron type particle orbit deflecting device 5 in the nano-level structural composition observation device, it is possible to avoid mechanical interference between the sample processing means 3 and the detector 6 for detecting atoms or clusters. Thus, the degree of freedom of arrangement of the detector 6 is increased.

  In this case, the reflectron type particle trajectory deflecting device 5 may be arranged so as to be movable with respect to the axis of the sample probe section 2, or may be arranged fixedly, and arranged so as to be movable. In this case, observation may be performed by moving the reflectron type particle trajectory deflecting device 5 to an observation position after processing the sample, and in the case of fixed arrangement, the energy beam 7 for processing from the sample processing means 3 is used. A passing opening may be provided.

Alternatively, when the reflectron type particle trajectory deflecting device 5 is not provided, the detector 6 for detecting atoms or clusters may be arranged so as to be movable with respect to the axis of the sample probe 2. After processing, the detector 6 may be moved to the observation position for observation.

Further, in each of the above-described apparatuses, it is desirable to arrange an extraction electrode in the vicinity of the needle-like sample 1, thereby enabling observation with higher accuracy.
This is particularly effective when the needle-like sample 1 is a multipoint measurement sample having a large number of needle-like projections.
The extraction electrode is moved and arranged in the vicinity of the needle sample 1 after the needle sample 1 is formed.

  In addition, a sample processing end point detection means comprising a mass analyzer for detecting a protective film component protecting the surface of the sample or an optical means for detecting light emission / absorption caused by the protective film component inside the nano-level structural composition observation device It is desirable to provide optimal sample processing.

  In the present invention, since sample processing and measurement are performed in the same sample chamber, it is possible to precisely align the center axis of the sample probe portion and the axis of the needle-shaped sample, and to move the surface in the atmosphere. Contamination and oxidation can be prevented, thereby enabling a highly accurate three-dimensional atom probe.

  In the present invention, a sample processing means such as a focused ion beam device is arranged facing the sample probe part in the nano-level structural composition observation apparatus, and is fixed by a holder (not shown) provided in the sample probe part. The processed sample is irradiated with a processing energy beam such as focused Ga ions from the sample processing means to be processed into a needle-like sample, and then external energy or internal energy is applied to the needle-like sample as it is without taking it out into the atmosphere. Particles such as atoms or clusters leaving the surface of the sample are detected by a detector, particularly a two-dimensional position sensitive detector, and the nano-level three-dimensional structural composition of the needle-like sample is observed.

Here, with reference to FIG. 2 thru | or FIG. 5, the nano level structure composition observation method of Example 1 of this invention is demonstrated.
See Figure 2
FIG. 2 is a conceptual configuration diagram of a nano-level structural composition observation apparatus used in the nano-level structural composition observation method according to the first embodiment of the present invention. The observation level 21 is provided in the observation chamber 21 and the observation chamber 21. The sample probe unit 22 to be fixed, the FIB apparatus 30 arranged so that the central axis of the sample probe unit 22 and the central axis of the Ga ion gun 31 overlap in a straight line, and the hollow reflectron previously arranged at the observation position 23, a basic configuration is constituted by a two-dimensional position detector 27 that detects charged particles 26 in which atoms or clusters or the like deflected by orbitals by the reflectron 23 are ionized.

See Figure 3
FIG. 3 is an explanatory diagram of the observation sample 10 before processing. After the sample to be measured is cut into a rod-shaped sample 11 having a length of 20 μm and a length of 200 μm with a precision cutter in advance, for example, the diameter is 0. A conductive adhesive 17 is attached to the tip of a W wire 16 that is mechanically sharpened at a tip of 3 mm (= 300 μm).

  In addition, as a structure of the rod-shaped sample 11 in this case, for example, a Co / Cu multilayer film 14 to be measured and an Au protective layer 15 are sequentially laminated on a silicon substrate 12 via a Ta underlayer 13. To do.

See Figure 4
FIG. 4 is an explanatory diagram showing a sample processing state. Ga ions 32 sufficiently converged from the Ga ion gun 31 are irradiated to the rod-shaped sample 11 through the hollow portion of the reflectron to be processed into the needle-shaped sample 18. To do.
At this time, irradiation with Ga ions 32 is performed until the Au protective layer 15 is completely removed in order to eliminate waste of observation time.
In addition, what is necessary is just to use the structure described in the above-mentioned patent document 3 or patent document 4 etc. about the structure of FIB apparatus 30 itself.

  In this case, since the central axis of the Ga ion gun 31 is arranged so as to overlap with the central axis of the sample probe unit 22, the axis of the processed needle-shaped sample 18 is the central axis of the sample probe unit 22. Therefore, the axial alignment at the time of attaching the needle-like sample 18 as in the prior art becomes unnecessary.

See Figure 5
FIG. 5 is an explanatory diagram of the observation state. After the needle sample 18 is formed, a voltage is applied to the needle sample 18 without opening the observation chamber 21 and without moving the reflectron 23. As a result, the charged particles 26 in which atoms or clusters or the like ionized from the tip of the needle sample 18 are ionized are deflected by the reflectron 23 and detected by the two-dimensional position detector 27.

The reflectron 23 is composed of a large number of electrode portions, and a reverse voltage is applied to the internal space in a staircase pattern. By applying a voltage between the needle-shaped sample 18 and the reflectron 23, a needle-like shape is obtained. When ionized charged particles 26 such as atoms or clusters evaporated from the tip of the sample 18 enter the ion incident / exited portion 24 of the reflectron 23, the charged particles 26 arrive at the innermost end 25 by the reverse applied voltage. Before, it is pulled back in the opposite direction, emitted from the ion incident / exiting portion 24 and detected by the two-dimensional position detector 27.
The ion incident / exit portion 24 of the reflectron is a space, and the innermost end 25 is also an open space.

  In the conventional measurement, after FIB processing, it was introduced into the 3D atom probe device after being exposed to the atmosphere. Therefore, an unstable signal area of 30 minutes from the ion count of the 3D atom probe was obtained even though stable data was obtained. In contrast, in Example 1 of the present invention, since the sample is not exposed to the atmosphere, the unstable signal region is as short as 5 minutes, and effective data can be acquired immediately.

  In the first embodiment of the present invention, since the reflectron 23 does not need to move, the reflectron 23 is set to the central axis of the sample probe portion 22 and the two-dimensional position detector 27 at the time of setting of the apparatus. Precise observation is possible by aligning with high accuracy.

Next, with reference to FIG. 6, the nano-level structural composition observation method according to the second embodiment of the present invention will be described. However, the processing procedure and the observation procedure are the same as those in the first embodiment except that the apparatus configuration is different. Only the device configuration will be described.
See FIG.
FIG. 6 is a conceptual configuration diagram of a nano-level structural composition observation apparatus used in the nano-level structural composition observation method according to the second embodiment of the present invention. The observation level 21 is provided in the observation room 21 and the observation room 21. The sample probe unit 22 to be fixed, the FIB apparatus 30 arranged so that the central axis of the sample probe unit 22 and the central axis of the Ga ion gun 31 overlap in a straight line, and the hollow reflectron previously arranged at the observation position 23, a two-dimensional position detector 27 that detects charged particles 26 in which atoms or clusters deflected by the reflectron 23 are ionized, and an opening having an inner diameter of, for example, 100 μm. A basic configuration is constituted by the extraction electrode 28 disposed immediately above the tip.

  The extraction electrode 28 has an opening with an inner diameter of, for example, 100 μm, and is moved to the position just above the tip of the needle-like sample 18 at the time of observation. By applying a voltage, the field electrode evaporates from the tip of the needle-like sample 18. The ionized charged particles 26 such as atoms or clusters are extracted.

  As described above, in the second embodiment of the present invention, since the extraction electrode 28 is provided, the detection efficiency of the charged particles 28 is increased, so that more accurate observation is possible.

Next, with reference to FIG. 7 and FIG. 8, the nano-level structural composition observation method of Example 3 of the present invention will be described. However, the processing procedure and observation procedure are the same as those of Example 1 described above except that the apparatus configuration is different. Therefore, only the device configuration will be described.
See FIG.
FIG. 7 is a conceptual configuration diagram of a nano-level structural composition observation apparatus used in the nano-level structural composition observation method according to the third embodiment of the present invention. The sample probe unit 22 to be fixed, the FIB apparatus 30 arranged so that the central axis of the sample probe unit 22 and the central axis of the Ga ion gun 31 overlap in a straight line, and the reflector installed so as to be movable to the observation position after sample processing A basic configuration is constituted by a two-dimensional position detector 27 that detects charged particles 26 in which atoms or clusters deflected by orbitals by the Ron 29 and the reflectron 29 are ionized.

  In this case, when the sample is processed, the rod-shaped sample 11 is irradiated with the sufficiently converged Ga ions 32 from the Ga ion gun 31 with the reflectron 29 retracted to the retracted position. To process.

FIG. 8 is an explanatory diagram of the observation state. After forming the needle-like sample 18, the reflectron 29 is moved to the observation position and observation is performed without opening the observation chamber 21. FIG.

  As described above, since the sample is not exposed to the atmosphere as in the first embodiment, the unstable signal region is shortened and effective data can be acquired immediately.

In addition, since the reflectron 29 is movably arranged, the sample constituent material scattered in the FIB processing step does not adhere to the electrode portion constituting the reflectron 29, and the characteristics of the reflectron 29 can be deteriorated. Absent.

Next, with reference to FIG.9 and FIG.10, the nano level structure composition observation method of Example 4 of this invention is demonstrated.
See FIG.
FIG. 9 is a conceptual configuration diagram of a nano-level structural composition observation apparatus used in the nano-level structural composition observation method according to the fourth embodiment of the present invention. The sample probe section 42 to be fixed, the FIB apparatus 30 arranged so that the central axis of the sample probe section 42 and the central axis of the Ga ion gun 31 overlap in a straight line, and can be moved to the observation position after processing the sample. The basic configuration is configured by the installed two-dimensional position detector 43 and the extraction electrode 44 which moves integrally with the two-dimensional position detector 43 and has an opening with an inner diameter of 100 μm, for example.

  In this case, at the time of sample processing, the rod-shaped sample 11 is irradiated with the sufficiently converged Ga ions 32 from the Ga ion gun 31 while the two-dimensional position detector 43 and the extraction electrode 44 are retracted to the retracted position. Sample 11 is processed into needle-like sample 18.

See FIG.
FIG. 10 is an explanatory diagram of the observation state. After forming the needle-shaped sample 18, the observation chamber 21 is not opened, and the two-dimensional position detector 43 and the extraction electrode 44 are moved to the observation position and observed. I do.

  Also in the fourth embodiment, as in the first embodiment, since the sample is not exposed to the atmosphere, the unstable signal region is shortened and effective data can be acquired immediately.

  In addition, since the two-dimensional position detector 43 and the extraction electrode 44 are movably arranged, the sample constituent material scattered in the FIB processing step does not adhere to the two-dimensional position detector 43 and the extraction electrode 44 and can be detected. Does not degrade performance.

Here, with reference to FIG.11 and FIG.12, the nano level structure composition observation method of Example 5 of this invention is demonstrated.
See FIG.
FIG. 11 is a conceptual configuration diagram of a nano-level structural composition observation device used in the nano-level structural composition observation method according to the fifth embodiment of the present invention. The quadrupole mass spectrometer 50 is incorporated in the observation chamber 21.

  That is, this nano-level structural composition observation device is provided in the observation chamber 21 and the observation chamber 21, the sample probe unit 22 for fixing the observation sample 10, the central axis of the sample probe unit 22, and the Ga ion gun 31. An FIB device 30 arranged so as to overlap with the central axis in a straight line, a hollow reflectron 23 arranged in advance at the observation position, and charged particles 26 in which atoms or clusters deflected by the reflectron 23 are ionized. The basic configuration is configured by the two-dimensional position detector 27 to be detected and the quadrupole mass analyzer 50 disposed in the vicinity of the sample probe unit 22.

See FIG.
FIG. 12 is an explanatory view showing a sample processing state. Ga ions 32 sufficiently converged from the Ga ion gun 31 are irradiated to the rod-shaped sample 11 through the hollow portion of the reflectron and processed into a needle-shaped sample 18. To do.

  At this time, the atoms or clusters constituting the rod-shaped sample 11 jump out along with the ion etching, and the atoms or clusters are detected by the quadrupole mass analyzer 50 arranged in the vicinity of the rod-shaped sample 11.

When Au atoms are no longer detected by the quadrupole mass analyzer 50, it is determined that the Au protective layer 15 has been completely removed, and the FIB processing is finished.
The subsequent observation procedure is exactly the same as that of the first embodiment.

  As described above, in Example 5 of the present invention, since the quadrupole mass analyzer 50 for detecting the processing end point is incorporated in the nano-level structural composition observation apparatus, excessive processing of the sample and remaining of the Au protective layer are prevented. Can be prevented.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the conditions and configurations described in the embodiments, and various modifications are possible. For example, an FIB apparatus for sample processing However, the present invention is not necessarily limited to the FIB apparatus, and an electron beam may be used depending on the material constituting the sample.

  In the above embodiment, only a voltage is applied at the time of field evaporation and ionization, but a pulsed electromagnetic wave such as a laser beam may be applied in synchronization with the pulse voltage. Field evaporation at the tip can be easily caused, and is particularly effective when the size of the tip is large.

  Furthermore, the evaporation and ionization may be performed using only external energy, for example, pulsed electromagnetic waves such as laser light, without applying an electric field.

  In the third embodiment, the extraction electrode is not provided. However, as in the second embodiment, the extraction electrode may be provided to move to the observation position integrally or separately from the reflectron. .

  In the fourth embodiment, the extraction electrode is moved integrally with the two-dimensional position detector. However, the extraction electrode may be moved separately from the two-dimensional position detector.

  In addition, when the extraction electrode is provided, the observation sample is not limited to a single needle-like sample, but is effective for a multi-point measurement sample having many needle-like projections on a flat sample. In this case, it is only necessary to move the extraction electrode and the two-dimensional position detector together and observe each needle-like projection sequentially.

In the fifth embodiment, a quadrupole mass spectrometer is used as the processing end point detection means. However, although the apparatus configuration is large, the mass of the sector magnetic field analyzer is not limited in order to enable more accurate detection. An analyzer may be used.
Further, the processing end point detection means is not limited to the mass spectrometer, and a known optical means such as an atomic absorption analysis method or an atomic emission analysis method may be used.

  In addition, Example 5 corresponds to Example 1, but the nano-level structural composition observation apparatus described in Examples 2 to 4 is provided with a processing end point detection means including a mass analyzer and optical means. It is good.

The detailed features of the present invention will be described again with reference to FIG. 1 again.
See FIG. 1 again. (Supplementary note 1) From the surface of the needle-shaped sample 1, the cluster-like group consisting of one or more atoms or one element is separated into the external space by external energy or internal energy, and the needle-shaped sample 1 In the nano-level structural composition observation apparatus for observing the nano-level structural composition of the sample 1, a sample probe for fixing the unprocessed sample and the processed needle-shaped sample 1 in the nano-level structural composition observation apparatus And a sample processing means 3 for processing the sample into the needle-shaped sample 1 and a detector 6 for detecting the atoms or clusters, and a central axis of the sample probe section 2 and the sample processing means equipped in the form of 3 and the central axis of the faces to coincide, the detector 6 is a nano-level structure set, characterized in that it is movably arranged with respect to the central axis of the sample probe portion 2 Observation device.
(Supplementary Note 2) The nano-level structural composition observation device, movably arranged or provided with a particle orbit deflection device 5 in reflectron as is fixedly arranged and with respect to the axis of the sample probe portion 2 The nano-level structural composition observation apparatus according to Supplementary Note 1, wherein:
(Supplementary Note 3) The particle trajectories deflector 5 of the reflectron, nano-level structural composition observed according possible to appendix 2, wherein being movably arranged with respect to the central axis of the sample probe portion 2 apparatus.
(Supplementary Note 4) The particle trajectories deflector 5 of the reflectron, with fixedly disposed with respect to the central axis of the sample probe portion 2, for passage of the working energy beam 7 from the sample processing unit 3 The nano-level structural composition observation apparatus according to appendix 2, which has an opening.
(Supplementary Note 5 ) The nano-level structural composition observation apparatus according to any one of Supplementary notes 1 to 4 , wherein the sample processing means 3 is a focused ion beam irradiation means.
(Supplementary note 6 ) The nano-level structural composition observation apparatus according to any one of supplementary notes 1 to 5 , wherein an extraction electrode is disposed in the vicinity of the needle-like sample 1.
(Supplementary note 7 ) The nano-level structural composition observation device according to any one of supplementary notes 1 to 6 , wherein a sample processing end point detection means is provided inside the nano-level structural composition observation device.
(Supplementary note 8 ) In the nanolevel structural composition observation method using the nanolevel structural composition observation device according to any one of supplementary notes 1 to 7 , after the needle-like sample 1 is processed and formed in the nanolevel structural composition observation device A nano-level structural composition observation method, wherein the nano-level structural composition of the needle-like sample 1 is observed without taking it out of the nano-level structural composition observation apparatus.
(Supplementary Note 9) In the nano-level structural composition observation method using the nano-level structural composition observation apparatus according to note 3, after the needle-shaped sample 1 was processed formed in the nano-structural composition observation device, the reflectron particles A nano-level structural composition observation method, wherein the orbital deflecting device 5 is moved to a nano-level structural composition observation position to observe the nano-level structural composition of the needle-like sample 1.
(Additional remark 10 ) In the nano level structural composition observation method using the nano level structural composition observation apparatus of Additional remark 1, after processing and forming the needle-shaped sample 1 in a nano level structural composition observation apparatus, the said atom or cluster is detected. The nano-level structural composition observation method, wherein the detector 6 is moved to a nano-level structural composition observation position to observe the nano-level structural composition of the needle-like sample 1.
In (Supplementary Note 11) nano-level structural composition observation method using the nano-level structural composition observation apparatus according to note 6, after the needle-shaped sample 1 was processed formed in the nano-structural composition observation device, the needle-like sample 1 A method for observing a nano-level structural composition, characterized by observing the nano-level structural composition of the needle-like sample 1 by moving an extraction electrode in the vicinity thereof.

  As an example of use of the present invention, a GMR element or a magnetic recording medium constituting a reproducing head is typical, but the present invention is not limited to the reproducing head or the like, and the composition structure near the interface of the gate insulating film in the MISFET It is also applied to the analysis method of the nano-level structure composition of a semiconductor device in which the interface state or the like becomes a problem, and further applied to the observation of the nano-level structure by general FIB processing. .

It is explanatory drawing of the fundamental structure of this invention. It is a notional block diagram of the nano level structural composition observation apparatus used for the nano level structural composition observation method of Example 1 of this invention. It is explanatory drawing of the sample for observation before a process. It is explanatory drawing which shows the sample processing state in Example 1 of this invention. It is explanatory drawing of the observation state in Example 1 of this invention. It is a notional block diagram of the nano level structural composition observation apparatus used for the nano level structural composition observation method of Example 2 of this invention. It is a notional block diagram of the nano level structural composition observation apparatus used for the nano level structural composition observation method of Example 3 of this invention. It is explanatory drawing of the observation state in Example 3 of this invention. It is a notional block diagram of the nano level structural composition observation apparatus used for the nano level structural composition observation method of Example 4 of this invention. It is explanatory drawing of the observation state in Example 4 of this invention. It is a notional block diagram of the nano level structural composition observation apparatus used for the nano level structural composition observation method of Example 5 of this invention. It is explanatory drawing which shows the sample processing state in Example 5 of this invention. It is explanatory drawing of the principle of an atom probe method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Needle-shaped sample 2 Sample probe part 3 Sample processing means 4 Particle 5 Particle orbit deflection device 6 Detector 7 Processing energy beam 10 Observation sample 11 Rod-shaped sample 12 Silicon substrate 13 Ta underlayer 14 Co / Cu multilayer film 15 Au Protective layer 16 W wire 17 Conductive adhesive 18 Needle-shaped sample 21 Observation chamber 22 Sample probe portion 23 Reflectron 24 Ion incidence / extraction portion 25 Deepest end portion 26 Charged particle 27 Two-dimensional position detector 28 Extraction electrode 29 Reflectron 30 FIB device 31 Ga ion gun 32 Ga ion 41 Observation chamber 42 Sample probe section 43 Two-dimensional position detector 44 Extraction electrode 50 Quadrupole mass analyzer 61 Needle-shaped sample 62 Constituent material 63 Constituent material 64 Measuring instrument

Claims (3)

From the surface of the needle-shaped sample,
In the nano-level structural composition observation apparatus for observing the nano-level structural composition of the needle-like sample by one cluster or one cluster composed of one or more elements by external energy or internal energy,
In the nano-level structural composition observation device ,
A sample probe portion for fixing the sample before processing and the needle-shaped sample after processing;
Sample processing means for processing the sample into the needle-shaped sample;
A detector for detecting the atom or cluster;
Have
It is provided in a shape facing the center axis of the sample probe portion and the center axis of the sample processing means so as to coincide with each other,
The nano-level structural composition observation apparatus, wherein the detector is arranged so as to be movable with respect to a central axis of the sample probe portion . The nano-level structural composition observation device,
The nano-level structural composition according to claim 1, further comprising a reflectron type particle orbit deflecting device so as to be movable or fixed with respect to the axis of the sample probe portion. Observation device. In the nano-level structural composition observation method using the nano-level structural composition observation apparatus according to any one of claims 1 and 2 ,
After processing and forming the needle-shaped sample in the nano-level structural composition observation device,
A nano-level structural composition observation method, wherein the nano-level structural composition of the needle-like sample is observed without taking it out of the nano-level structural composition observation apparatus.

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