JP4622916B2 - Vibration element, method for manufacturing vibration element, optical scanning apparatus, image forming apparatus, and image display apparatus - Google Patents

Description

  The present invention relates to a vibration element used for, for example, laser beam scanning, in particular, a vibration element that includes a coil and vibrates using electromagnetic force, a method for manufacturing the vibration element, an optical scanning device including the vibration element, and the optical scanning device The present invention relates to an image forming apparatus including the above, an optical scanning apparatus, and an image display apparatus including such an image forming apparatus.

  Conventionally, there is a galvanometer mirror used in an optical scanning device as one of electromagnetic actuators to which micromachining technology is applied (for example, Patent Document 1).

  As shown in FIG. 8A, the galvanometer mirror disclosed in Patent Document 1 has a mirror surface A2 on one surface (the back side in the figure) of the silicon substrate surface A that can be twisted and rotated by a torsion bar A1. In addition, an electromagnetic coil B portion subjected to film formation processing is provided on the other surface (the front side in the figure), and a permanent magnet (at a position perpendicular to the axial direction of the torsion bar A1 or near both sides is provided in the vicinity of the electromagnetic coil B. (Not shown) is provided.

  In this configuration, by switching the energization direction to the electromagnetic coil B, the electromagnetic force induced in the electromagnetic coil B is switched to a direction in which the electromagnetic force is attracted and repelled with the permanent magnet, and rotational vibration about the torsion bar A1. Is configured to obtain a vibration element.

  The electromagnetic coil B is pattern-printed on the surface of the silicon substrate, which is a flat surface. When this configuration is used, the normal state indicated by the reference symbol SP in FIG. 8B is indicated by the reference symbol SP1. As described above, it is known that there is a problem that the substrate is warped and the mirror surface cannot be maintained in a predetermined direction (Patent Document 2).

That is, as disclosed in Patent Document 2, it is known that the oxide film formed on the surface of the silicon substrate has a compressive stress, while the coil has a strong tensile stress. As a result, the substrate warps. This causes the mirror surface to tilt.
JP 7-218857 A JP 2004-264603 A

  In Patent Document 2, as a method for eliminating the warpage of the substrate used for the vibration element and the mirror surface, the thickness of the film is formed in order to cancel the generated stress of each print pattern formed on the substrate. A method of adjusting the thickness has been proposed.

  However, in adjusting the thickness of the film formation, not only is the process itself difficult to manage, but also the time required for the process is different, which may increase the cost required for film formation.

  On the other hand, the electromagnetic force is related to the magnitude of the deflection angle of the galvanometer mirror, and the stronger the electromagnetic force, the larger the deflection angle, which is effective for obtaining a large scanning angle. For this reason, it is conceivable to increase the number of turns of the coil or increase the thickness of the coil, but it is difficult to coexist with the mirror surface on the surface of the substrate within a limited area. The increase in the thickness and the increase in the thickness also increase the mass change as the galvanometer mirror, which also affects the resonance frequency, and may not be able to optimize the scanning frequency as the galvanometer mirror.

  In view of the above-described problems, the present invention provides a resonator element having a configuration capable of satisfying a necessary condition as a vibrating body while ensuring mechanical rigidity without causing an increase in cost, and an optical scanning using the resonator element An object of the present invention is to provide an apparatus, an image forming apparatus, and an image display apparatus.

  In order to achieve this object, the invention according to claim 1 includes a vibration part having a reflecting surface, and a coil that is provided in the vibration part and vibrates the vibration part. It has an inclined surface that is located on the opposite side of the reflecting surface and intersects the reflecting surface, and at least a part of the coil is provided on the inclined surface.

  The invention described in claim 2 is characterized in that the coil is a conductive thin film.

  The invention described in claim 3 is characterized in that the conductor thin film is formed by etching.

  The invention according to claim 4 is characterized in that the inclined surface is formed by one surface inclined from one end side to the other end side of the vibrating portion in the vibration central axis direction of the vibrating portion.

  The invention according to claim 5 is characterized in that the inclined surface is formed by an inclined surface of a convex portion having a mountain shape having a top portion in the middle of the vibrating portion in the vibration central axis direction of the vibrating portion.

  The invention described in claim 6 is characterized in that the convex portion has a truncated shape.

  The invention described in claim 7 is characterized in that a thin-walled portion for reducing the thickness of the convex portion is formed in the non-forming portion of the coil of the convex portion.

  According to an eighth aspect of the present invention, there is provided a vibrating portion having a reflecting surface and a coil provided on the vibrating portion for vibrating the vibrating portion, and the vibrating portion has a slope intersecting with the reflecting surface. A method of manufacturing a vibration element in which at least a part of the coil is provided on the inclined surface, wherein the inclined surface is formed by wet etching.

  The invention according to claim 9 is characterized in that the coil is a conductor thin film, and the conductor thin film is formed by etching.

  A tenth aspect of the invention is an optical scanning device that includes the resonator element according to any one of the first to seventh aspects of the present invention, and the vibrating portion performs scanning by reflecting a light beam by swinging the reflecting surface. It is characterized by being.

  An eleventh aspect of the invention is an image forming apparatus including the optical scanning device according to the tenth aspect, wherein the optical scanning device forms an image by scanning a light beam according to an image signal. .

  A twelfth aspect of the invention includes the optical scanning device according to the tenth aspect or the image forming device according to the eleventh aspect, and the optical scanning device forms an image by scanning a light beam according to an image signal. The optical scanning type image display device projects and displays the image.

  A thirteenth aspect of the present invention is a retinal scanning image display apparatus that projects and displays the image on the retina of the eye.

  The invention described in claim 14 is a head-mounted image display device mounted on an observer's head.

  According to the present invention, since at least a part of the coil is provided on the slope that is located on the opposite side of the reflecting surface and intersects the reflecting surface, it is also possible to increase the longitudinal elastic modulus on the reflecting surface. Thus, the mechanical rigidity against warping can be increased by setting the coil installation portion in a portion other than the reflecting surface.

  In addition, unlike the case where the coil is formed on the flat portion of the substrate on which the reflective surface is provided, the installation area can be expanded, so that the number of turns and thickness can be adapted to the desired conditions, and the optical by increasing the deflection angle and reducing distortion. It is possible to improve the characteristics.

  In the inventions according to claims 2, 3 and 9, since an existing semiconductor formation process can be used as a technique for forming the slope and the coil, instead of a special construction method, it is possible to suppress an increase in processing cost. Become.

  In the invention described in claim 4, the inclined surface is constituted by one surface inclined from one end portion of the vibrating portion toward the other end portion in the vibration central axis direction. In the invention described in claim 5, the inclined surface is in the middle. Since it has a mountain shape having a top portion, it is possible to form a special shape and a coil symmetrical to this shape by directly using the exposure / development process, which is one step in the semiconductor formation process.

  In particular, in the invention described in claim 6, since the top of the convex portion is not sharp, the volume can be reduced and the change in the resonance frequency can be suppressed.

  In the invention according to claim 7, since the thickness of the non-forming portion of the coil in the convex portion is reduced, the increase in mass due to the presence of the convex portion is suppressed, and the influence on the vibration frequency is reduced, and further the use material is reduced. Is possible.

  In the invention described in claim 8, by forming the slope by wet etching, which is one of the existing methods, the smoothness of the slope can be maintained in a state that does not adversely affect the film formation of the coil. It becomes possible to increase the film forming accuracy of the coil.

  The invention according to claim 10 is to obtain an optical scanning device with improved optical scanning accuracy by using a vibration element that can increase the deflection angle and can be manufactured by the existing construction method by preventing the warpage of the substrate having the reflecting surface. It becomes possible.

  According to the eleventh aspect of the present invention, it is possible to obtain an image forming apparatus that includes the optical scanning device that has the above-described effects and that has improved optical scanning accuracy, and that has improved image forming accuracy.

  In the inventions according to claims 12 to 14, it is possible to obtain an image display device that includes the optical scanning device and the image forming device and has improved image display accuracy.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[Configuration of image display device]
Hereinafter, an image display apparatus according to an embodiment of the present invention will be described with reference to the drawings. First, the configuration of a retinal scanning display 1 as a retinal scanning image display apparatus that is an example of an image display apparatus according to the present invention will be described with reference to FIG.

  As shown in FIG. 1, the retinal scanning display 1 is provided with a light source unit 2. The light source unit 2 is provided with a video signal supply circuit 3 that generates each signal as an element for synthesizing video based on an external video signal, and this video signal supply circuit 3 To output a video signal 4, a horizontal synchronizing signal 5, and a vertical synchronizing signal 6.

  The light source unit 2 receives laser light whose intensity is modulated based on the red (R), green (G), and blue (B) video signals transmitted as the video signal 4 from the video signal supply circuit 3. An R laser driver 10, a G laser driver 9, and a B laser driver 8 for driving the R laser 13, the G laser 12, and the B laser 11 as light sources are provided so as to emit light.

  The light source unit 2 is combined with a collimating optical system 14 provided so as to collimate the laser light emitted from each laser, and a dichroic mirror 15 that combines the collimated laser lights. A fiber coupling optical system 16 for guiding the laser light to the optical fiber 17 is provided. Here, when a semiconductor laser is used for each light source, the intensity is directly modulated, and when a solid-state laser is used, an intensity modulator using an acoustooptic effect is included.

  Note that a semiconductor laser such as a laser diode or a solid-state laser may be used as the R laser 13, the G laser 12, and the B laser 11. The light source unit 2 in the present embodiment corresponds to an example of a modulation unit that modulates the intensity of light beams emitted from the R laser 13, the G laser 12, and the B laser 11 as light sources according to an image signal.

  Further, the retinal scanning display 1 uses an optical system 18 that receives the emitted laser light propagated from the light source unit 2 and the laser light guided by the optical system 18 in the horizontal direction using the galvano mirror 19a. A horizontal scanning system 19 as a first scanning system for scanning, a first relay optical system 20 for guiding laser light scanned by the horizontal scanning system 19 to a vertical scanning system 21 as a second scanning system, and a horizontal scanning system The vertical scanning system 21 that scans the laser light that has been scanned 19 and entered through the first relay optical system 20 in the vertical direction using the galvano mirror 21a, and the laser light that has been scanned by the vertical scanning system 21 And a second relay optical system 22 that leads to the pupil 24 of the observer.

  The first relay optical system 20 has convex lenses 41 and 42, and the second relay optical system 22 has convex lenses 51 and 52. The convex lens 41 and the convex lens 42 have the same optical power. The convex lens 51 and the convex lens 52 have the same optical power.

  The first relay optical system 20 is conjugated with the galvano mirror 19a of the horizontal scanning system 19 and the galvano mirror 21a of the vertical scanning system 21, and the second relay optical system 22 is connected with the galvano mirror 21a. Each of them is provided so as to be conjugate with the pupil 24 of the person.

  The horizontal scanning system 19 is an optical system that performs horizontal scanning (an example of primary scanning) in which a laser beam is scanned in the horizontal direction for each frame of an image to be displayed. The horizontal scanning system 19 includes a galvano mirror 19a that performs horizontal scanning, and a horizontal scanning control circuit 19c that controls driving of the galvano mirror 19a.

  On the other hand, the vertical scanning system 21 is an optical system that performs vertical scanning (an example of secondary scanning) in which the laser beam horizontally scanned by the horizontal scanning system 19 is vertically scanned in the vertical direction. The vertical scanning system 21 includes a galvano mirror 21a that scans a laser beam in the vertical direction, and a vertical scanning control circuit 21c that controls driving of the galvano mirror 21a.

  Therefore, the horizontal scanning system 19 and the vertical scanning system 21 perform scanning in a direction crossing each other.

  The horizontal scanning system 19 and the vertical scanning system 21 are connected to the video signal supply circuit 3 and scan the laser beam in synchronization with the horizontal synchronization signal 5 and the vertical synchronization signal 6 output from the video signal supply circuit 3, respectively. It is configured to.

  The horizontal scanning system 19 and the vertical scanning system 21 in this embodiment are an example of an optical scanning device that scans an incident light beam in a primary direction and a secondary direction substantially perpendicular to the primary direction.

  Next, a process from when the retinal scanning display 1 according to the embodiment of the present invention receives an image signal from the outside to when an image is projected on the retina of the observer will be described with reference to FIG.

  As shown in FIG. 1, in the retinal scanning display 1 of the present embodiment, when the video signal supply circuit 3 provided in the light source unit 2 receives an external video signal, the video signal supply circuit 3 A video signal 4 including an R video signal, a G video signal, and a B video signal, a horizontal synchronizing signal 5 and a vertical synchronizing signal 6 for controlling the laser light output of each color of red, green, and blue are output. The R laser driver 10, the G laser driver 9, and the B laser driver 8 respectively drive the R laser 13, the G laser 12, and the B laser 11 based on the input R video signal, G video signal, and B video signal. Output a signal. Based on this drive signal, the R laser 13, the G laser 12, and the B laser 11 each generate intensity-modulated laser light and output each to the collimating optical system 14. The video signal supply circuit 3 controls the timing of generating laser light and outputting each to the collimating optical system 14 in accordance with a BD signal (not shown) indicating a driving state of a galvano mirror 19a described later. That is, such a retinal scanning display 1 (video signal supply circuit 3) controls the timing at which the galvano mirror 19a or the like emits a light beam. The generated laser light is collimated into parallel light by the collimating optical system 14, and further, is incident on the dichroic mirror 15 to be combined into one light beam. 17 to be incident.

  Laser light propagated by the optical fiber 17 is guided from the optical fiber 17 by the optical system 18 and emitted to the horizontal scanning system 19. The emitted laser light is incident on the deflection surface 19b of the galvanometer mirror 19a of the horizontal scanning system 19. The laser light incident on the deflection surface 19b of the galvanometer mirror 19a is scanned in the horizontal direction in synchronization with the horizontal synchronizing signal 5 and incident on the deflection surface 21b of the galvanometer mirror 21a of the vertical scanning system 21 via the first relay optical system 20. To do. In the first relay optical system 20, the deflection surface 19b of the galvanometer mirror 19a and the deflection surface 21b of the galvanometer mirror 21a are adjusted so as to have a conjugate relationship. The galvanometer mirror 21a is reciprocally oscillated so that the deflection angle 21b of the incident light changes the horizontal emission angle in synchronization with the vertical synchronization signal 6 in the same manner as the galvanometer mirror 19a synchronizes with the horizontal synchronization signal 5. The laser light is scanned in the vertical direction by the galvanometer mirror 21a. Laser light scanned in the horizontal direction and the vertical direction by the horizontal scanning system 19 and the vertical scanning system 21, that is, two-dimensionally, is such that the deflection surface 21b of the galvano mirror 21a and the pupil 24 of the observer have a conjugate relationship. Is incident on the pupil 24 of the observer by the second relay optical system 22 provided in the projector and projected onto the retina. The observer can thus recognize the image by the laser light that is two-dimensionally scanned and projected onto the retina. The names of the galvanometer mirror 19a of the horizontal scanning system 19 and the galvanometer mirror 21a of the vertical scanning system 21 have been described in the same way, but their reflecting surfaces change in angle so as to scan light (peristalsis, rotation, etc.). In the present embodiment, the electromagnetic drive method is used to define the deflection angle of the galvanometer mirrors 19a and 21a. However, the drive system for inducing oscillation (rotation) for scanning by the galvanometer mirrors 19a and 21a is not limited to this, and any drive system such as a resonance type, a non-resonance type, piezoelectric drive, electrostatic drive, or the like is used. Needless to say, it may be a thing.

The retinal scanning display 1 is a head-mounted image display device that is also referred to as a head-mounted display that is mounted on the observer's head. It is mounted on the observer's head.
[Configurations of various optical systems]
As described above, the configuration of various optical systems that guide the beam emitted from the optical fiber 17 to the pupil 24 of the observer while scanning two-dimensionally will be described.

  The galvanometer mirror 19a is driven to rotate about an axis extending in the vertical direction, and the beam light incident from the optical system 18 is reflected by the deflecting surface 19b to be scanned and emitted in the horizontal direction. It leads to the relay optical system 20.

  The galvanometer mirror 21a is rotated around an axis extending in the horizontal direction, and the beam light incident from the first relay optical system is reflected by the deflecting surface 21b to be scanned and emitted in the vertical direction. It will lead to the second relay optical system 22.

  Next, the drive structure of the galvanometer mirrors 19a and 21a used as the vibration part used in this embodiment will be described. In this embodiment, the horizontal scanning system 19 and the vertical scanning system 21 are optical scanning devices provided with galvanometer mirrors 19a and 21a, respectively. The retinal scanning display 1 includes an image forming apparatus that forms an image by scanning a beam corresponding to an image signal in a two-dimensional direction with the optical scanning device, and the image is placed on the retina of the eye. Projects and displays an image.

  The galvanometer mirrors 19a and 21a used in the present embodiment are integrated with a vibration element to which micromachining technology is applied.

  FIG. 2 is a diagram illustrating a configuration of the vibration element 105 including the galvanometer mirrors 19a and 21a illustrated in FIG. FIG. 2 is an external view of the vibration element 105 as viewed from the mirror surface 19b side. In the following description, for the sake of convenience, the galvanometer mirror denoted by reference numeral 19a in FIG. 1 will be described as an object. However, it is prefaced that the galvanometer mirror denoted by reference numeral 21a has the same configuration.

  The vibration element 105 includes a galvano mirror 19a as a vibration part having a mirror surface 19b as a reflection surface, a torsion beam 19d that supports the galvano mirror 19a so as to vibrate, and the galvano mirror 19a can vibrate via the torsion beam 19d. And a frame 19e supported on the frame.

  3A is an external view of the galvano mirror 19a viewed from the side opposite to the mirror surface 19b, and FIG. 3B is a cross-sectional view of the galvano mirror 19a.

  The galvanometer mirror 19a has a mirror surface 19b formed on one surface of the silicon substrate 100, and the mirror surface 19b is supported by a torsion beam 19d integrated on both sides of the galvanometer mirror 19a so as to be swingable (rotatable). Yes.

  On the surface of the silicon substrate 100 opposite to the mirror surface 19b, there is provided a drive unit 101 configured with convex portions having a rectangular shape in plan view and a truncated cross-sectional shape.

  The drive unit 101 is provided as an installation part of a coil 102 used in an electromagnetic drive method that is one of drive methods for swinging (rotating) a vibration element, and an outer peripheral wall extends from an end of the silicon substrate 100. The outer surface in the range up to the top of the drive unit 101 forming the convex portion is an inclined surface 19f that gradually decreases, and the inner peripheral wall extends from the central portion on the silicon substrate 100 side to the top of the drive unit 101 forming the convex portion. It is set as the inclined surface 19g from which the inner dimension of a range until it becomes large gradually. The inner peripheral wall forms a thin portion 106 that reduces the thickness of the drive portion 101.

  The inclined surface 19f constituting the outer peripheral wall is inclined in a direction intersecting the surface of the mirror surface 19b, and the inclination angle (θ) is 54.8 resulting from wet etching which is a method of forming the inclined surface 19f. Set to °. The inclined surface 19f may have some surface roughness when formed by wet etching, but in the present embodiment, unlike the mirror surface 19b, only the pattern portion of the coil 102 described later is configured. It is acceptable to have some roughness.

  Unlike the case where the inclined surface 19f is provided with a wall portion standing upright on the surface opposite to the mirror surface of the silicon substrate, for example, the installation area of the coil 102 can be increased. As a result, the number of turns of the coil 102 can be increased as compared with the case of the upright wall. And since it can be used as a part which raises the longitudinal elastic modulus in the silicon substrate 100, the bending rigidity of the silicon substrate 100 can be improved and curvature can be suppressed.

  The inclined surface 19f is formed with a pattern of the coil 102 used in the electromagnetic drive system, and the formation process is shown in FIGS.

  As shown by a two-dot chain line in FIG. 2, the coil 102 provided on the inclined surface 19 f is continuously formed in a spiral shape on the entire peripheral wall of the inclined surface 19 f in the drive unit 101.

  In FIG. 4, aluminum is deposited by sputtering as a conductive film forming material constituting the coil 102 on the inclined surface 19f (FIG. 4A) formed by wet etching (FIG. 4B), and thereafter A resist is applied (FIG. 4C), exposure (FIG. 4D) and development (FIG. 4E) are performed using a mask M corresponding to the coil pattern, and portions other than the coil pattern are etched. (FIG. 4F) and a coil pattern is formed by removing the resist (FIG. 4G).

  On the other hand, each end of the coil requires an electric circuit connected to the power supply terminal. For this reason, when the coil pattern shown in FIG. 4G is formed, a feed path pattern having a relationship located in an upper layer of these coil patterns is formed by the process shown in FIG.

  The coil pattern formed on the surface of the inclined surface 19f corresponds to the portion indicated by reference numeral 102 in FIG. 3A, and the electric circuit located in the upper layer of this coil pattern is indicated by reference numeral 102a in FIG. It corresponds to the part shown. As the other electric path in the coil pattern, a pattern formed simultaneously with the formation of the inclined surface 19f is used.

  In FIG. 5, when a coil pattern is formed on the surface of the inclined surface 19f by removing the resist (FIG. 5G), a polyimide layer as an insulating layer is provided thereon (FIG. 5H), and the polyimide layer A resist is applied on the upper surface (FIG. 5I). Subsequently, exposure is performed using a mask M corresponding to the electric path to be formed (FIG. 5 (J)), the resist is removed by development processing (FIG. 5 (K)), and the electric circuit corresponding to the power supply path is obtained by etching. Is formed at the end position of the coil pattern (FIG. 5L). After the resist removal (FIG. 5M), aluminum which is a conductive material is sputtered, and an electric circuit is connected between the ends of the coil pattern (FIG. 5N).

  When exposure on the inclined surface 19f is performed using the mask M as shown in FIGS. 4D and 5J, first, as shown in FIG. M is positioned and exposed. In this case, the conditions under which exposure can be performed in one exposure operation are determined according to the depth of focus of the projection lens used for exposure and the tilt angle (θ).

  First, the height of the inclined surface 19f that can be exposed in one exposure operation is determined by the focal depth of the projection lens to be used. For example, assuming that the depth of focus is 100 μm, the exposure operation is completed with one exposure when the height of the inclined surface 19 f is 10 μm or less. The length (L) of the exposure area that can be exposed by one exposure operation is 100 cos θ μm when the depth of focus is 100 μm.

  An area that can be exposed by one exposure operation is symmetric about the in-focus position. That is, regarding the height, if the depth of focus is 100 μm, the range of 50 μm above and below the center of the in-focus position is an area that can be exposed, and the length is the range of L / 2 on the left and right of the in-focus position. Becomes an area that can be exposed. When this condition is satisfied, the mask pattern is accurately transferred without causing blur or the like over the entire inclined surface 19f that is the exposure region.

  With the above-described method, the coil pattern can be formed using an existing method used in the semiconductor formation process. Therefore, it is possible to form an electromagnetic coil for the inclined surface 19f without using a special method. It becomes.

  The vibration element in which the electromagnetic coil is formed by such a construction method is induced between the permanent magnet and the permanent magnet by switching the energization direction with respect to the permanent magnet (not shown) arranged adjacent to the electromagnetic coil located on the inclined surface 19f. As shown in FIG. 6, the light from the light source can be scanned in a predetermined direction by reciprocally swinging (reciprocatingly rotating) the mirror surface 19 b by the suction force and the repulsive force.

  In addition, the inclined surface 19f is not limited to the form having the truncated convex portion as shown in FIG. 2, and for example, as shown in FIG. 7A, the vibration center axis of the galvanometer mirror 19a. Direction, that is, a wedge shape in which the mirror surface is formed by one surface inclined from one end side to the other end side of the galvano mirror 19a in the axial direction of the torsion beam 19d, or as described above as shown in FIG. A trapezoidal shape that does not have a thin-walled portion in the form, or as shown in FIGS. 7 (C) and 7 (D), the inside thereof so as not to have a flat surface at the top for the shape shown in FIG. 7 (B). It is also possible to make it a thin-walled shape.

  In the case of the configuration shown in FIG. 7A, the center of the inclined surface 19f coincides with the center axis of the swing (rotation) so that the balance during the swing (rotation) is obtained. In addition, in the case of the configuration shown in (C) and (D), stress concentration at the corners is obtained when the concave portions are round holes as in the shape shown in (D) so that there are no corners. The result which was excellent in the intensity | strength surface is obtained by preventing the tearing by the above.

  In either case, the form is set with reference to the mass that affects the resonance frequency. Moreover, in the case of a form having a recess inside, the coil can be provided not on the outer peripheral wall but on the inner peripheral wall, or on the outer peripheral wall and the inner peripheral wall. In the case of such a configuration, unlike the conventional configuration shown in FIG. 8, the electromagnetic coil can be provided in a space larger than the limited space, ie, the back surface of the mirror surface 19b. It is possible to make it difficult to be restricted by appropriately increasing the thickness or increasing the thickness. As a result, the scanning range can be increased and high-speed scanning can be achieved by increasing the electromagnetic induction effect and increasing the deflection angle.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Deformation / change is possible.

  In the above-described embodiment, the beam is scanned first in the horizontal direction by the horizontal scanning system 19 and then scanned in the vertical direction by the vertical scanning system 21. However, the present invention is not limited to this. The scanning may be performed in the vertical direction by the vertical scanning system, and then scanned in the horizontal direction by the horizontal scanning system.

  Further, in the above-described embodiment, the vibration element and the optical scanning device as described above are provided, and the light beam modulated according to the image signal is scanned in the primary direction and the secondary direction by the vibration element and the optical scanning device. In the above description, a retinal scanning display (an example of a retinal scanning image display apparatus) that includes an image forming apparatus that forms an image, projects the image onto the retina of the eye, and displays the image has been described. For example, even if an image is not directly projected onto the retina of the eye, the vibration element and the optical scanning device are provided with the vibration element and the optical scanning device as described above, and the light beam modulated according to the image signal Provided with an image forming apparatus that forms an image by scanning in a primary direction and a secondary direction, and an optical scanning type image display apparatus, a display, and the like that project and display the image on a screen or the like (of the image display apparatus) The present invention may be employed as an example).

  The vibration element and optical scanning apparatus to which the present invention is applied can also be applied to a vibration element and optical scanning apparatus that scan a laser beam in an image forming apparatus such as a laser printer.

  The effects described in the embodiments of the present invention are only the most preferable effects resulting from the present invention, and the effects of the present invention are limited to those described in the embodiments of the present invention. is not.

It is a schematic block diagram which shows the retinal scanning type image display apparatus as an image display apparatus in this embodiment. It is a figure for demonstrating the structure of the vibration element used for this embodiment, and its effect | action. It is a figure which shows the structure of the vibration element used for this embodiment, (A) is the external view seen from the mirror surface opposite side, (B) is a cross-sectional view. It is a schematic diagram for demonstrating the procedure of the coil formation process to the inclined surface in the vibration element used for this embodiment. It is a schematic diagram for demonstrating the procedure of the process of forming the electroconductive part in the upper layer for the coil formed by the process shown in FIG. It is a schematic diagram for demonstrating the focal depth of exposure and the effective range of exposure at the time of creating the inclined surface of the vibration element used for this embodiment. It is a figure which shows another example regarding the slope of the vibration element used for a present Example, respectively. It is a figure for demonstrating the conventional structure of a vibration element, (A) is an external view, (B) is a cross-sectional view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Image display device 19, 21 Optical scanning device 19a, 21a Vibration part, Galvano mirror 19b Slope 19d Torsion beam 19f Slope 24 Pupil 100 Silicon substrate 101 Drive part 102 Coil 105 Vibration element

Claims (14)

A vibrating part with a reflective surface;
A coil provided on the vibrating part for vibrating the vibrating part,
The vibrating portion has a slope located on the opposite side of the reflecting surface and intersecting the reflecting surface,
A vibration element in which at least a part of the coil is provided on the slope.   The vibrating element according to claim 1, wherein the coil is a conductive thin film.   The vibrating element according to claim 2, wherein the conductive thin film is formed by etching.   The said inclined surface is formed in one surface which inclines toward the other end side from the one end side of the said vibration part in the vibration center axis direction of the said vibration part. The vibrating element according to item.   The said slope is formed by the slope of the convex part which makes the peak shape which has a top part in the middle of the said vibration part in the vibration center axis direction of the said vibration part. The vibration element described in 1.   The vibrating element according to claim 5, wherein the convex portion has a truncated shape.   7. The vibration element according to claim 5, wherein a thin portion that reduces a thickness of the convex portion is formed in a non-forming portion of the coil of the convex portion. A vibrating part with a reflective surface;
A coil provided on the vibrating part for vibrating the vibrating part,
The vibrating portion has a slope that intersects the reflecting surface,
A method of manufacturing a vibration element in which at least a part of the coil is provided on the slope,
A method for manufacturing a vibration element, wherein the slope is formed by wet etching.   The method for manufacturing a vibration element according to claim 8, wherein the coil is a conductive thin film, and the conductive thin film is formed by etching.   An optical scanning device comprising the resonator element according to claim 1, wherein the vibrating unit performs scanning by reflecting a light beam by swinging the reflecting surface.   An image forming apparatus comprising the optical scanning device according to claim 10, wherein the optical scanning device forms an image by scanning a light beam according to an image signal.   An optical scanning device according to claim 10 or an image forming device according to claim 11, wherein the optical scanning device forms an image by scanning a light beam according to an image signal, and projects and displays the image. An image display device which is an optical scanning image display device.   13. The image display device according to claim 12, wherein the image display device is a retinal scanning image display device that projects and displays the image on the retina of the eye.   The image display device according to claim 12 or 13, wherein the image display device is a head-mounted image display device mounted on an observer's head.

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