JP4591661B2 - Membrane treatment apparatus and membrane breakage detection method - Google Patents

Description

  The present invention relates to a membrane treatment apparatus such as a hollow fiber membrane separation apparatus equipped with a membrane for filtering water to be treated, and more particularly to a membrane treatment apparatus provided with means for detecting membrane breakage. The present invention also relates to a film breakage detection method in a film processing apparatus.

  As a technique for detecting the breakage of the film in the film processing apparatus, a technique has been proposed in which bubbles leaking from the broken portion in the air backwash process are detected by visual observation, an ultrasonic sensor, a particle meter, a turbidimeter, and a photoelectric sensor.

  For example, Japanese Patent Application Laid-Open No. 2001-269551 discloses a method for detecting a breakage of a hollow fiber membrane in a water purification apparatus using an ultrasonic current meter. In the membrane breakage detection method of the publication, the treated water chamber is filled with treated water, and pressurized gas is blown into the circulating water chamber. When the hollow fiber membrane is broken, the pressurized gas moves from the broken portion through the hollow fiber membrane to the treated water chamber, and further flows out from the treated water pipe connected to the treated water chamber. By detecting the gas passing through the treated water pipe using an ultrasonic current meter provided in the treated water pipe, the breakage of the hollow fiber membrane is detected.

  Japanese Patent Laid-Open No. 2000-126563 discloses that a housing is partitioned into a raw water chamber and a treated water chamber by a hollow fiber membrane, and an air reservoir is provided in a treated water discharge pipe connected to the treated water chamber of the housing. In the hollow fiber membrane filtration device, pressurized air is supplied into the raw water chamber, and the pressurized air accumulates in the air reservoir from the broken portion of the hollow fiber membrane through the treated water chamber and the treated water discharge pipe. A method for confirming breakage of a hollow fiber membrane by detecting accumulated air visually or with a water level gauge is disclosed.

Further, in JP-A-2003-144866, the hollow fiber membrane module is partitioned into a raw water chamber on the upper side and a treated water chamber on the lower side by a hollow fiber membrane, and a hollow fiber membrane breakage detection is provided above the raw water chamber. In a hollow fiber membrane module type filtration device to which a bubble evacuation pipe having a transparent tube is connected, air that has been press-fitted into the treated water chamber during backwashing of air bubbles from the treated water chamber through the broken portion of the hollow fiber membrane and the raw water chamber. A technology is disclosed in which a membrane breakage is determined by passing through a hollow tube for detecting breakage of a hollow fiber membrane provided in a tube pull-out and detecting the air passing through the transparent tube visually or with a photoelectric sensor.
JP 2001-269551 A JP 2000-126563 A JP 2003-144866 A

  Among the conventional methods for detecting film breakage of a film processing apparatus, when film breakage is detected visually as in JP 2000-126563 A and JP 2003-144866 A, detection is uncertain.

  When a film breakage is detected by an ultrasonic sensor, such as the ultrasonic current meter disclosed in Japanese Patent Laid-Open No. 2001-269551, the ultrasonic sensor is expensive. Also, when using a particle meter or a turbidimeter, these instruments are expensive.

  When a photoelectric sensor is used as in JP-A-2003-144866, a light-emitting unit, a light-receiving unit, a conversion unit for converting to an electric signal, and the like are necessary, and the number of components of the apparatus is high and the cost is high.

  An object of the present invention is to provide a film processing apparatus and a film breakage detection method capable of solving the above problems and reliably detecting the occurrence of film breakage at low cost.

The membrane treatment apparatus of the present invention (Claim 1) is a membrane treatment apparatus provided with a membrane for filtering the liquid to be treated, and means for circulating a gas or gas-liquid mixture on one side separated by the membrane; A membrane processing apparatus comprising a membrane breakage detecting means for detecting a membrane breakage based on a change in electrical resistance of the liquid on the other side separated by the membrane , wherein the membrane breakage detecting means comprises a pair of electrodes A power source that applies a voltage to the electrode, a measurement unit that measures the current, voltage, or conductivity of the electrode, and a determination unit that determines the generation of bubbles from a pattern of change over time of the current, voltage, or conductivity. And a conductive tubular member through which the liquid that has passed through the membrane is circulated is provided, one of the pair of electrodes being the tubular member, and the other being the tubular member characterized in that a needle electrode which are separated by an insulating member That.

  The film processing apparatus according to claim 2 is the film processing apparatus according to claim 1, wherein the film breakage detection unit includes a pair of electrodes, a power source that applies a constant voltage to the electrodes, and a measurement unit that measures a current flowing between the electrodes. And a determination unit for determining film breakage from the measured current value change pattern.

  A film processing apparatus according to a third aspect of the present invention is the film processing apparatus according to the first aspect, wherein the film breakage detection means measures a voltage generated between the pair of electrodes, a power source for applying a current between the electrodes, and the electrodes. And a determination unit for determining film rupture from the measured voltage value change pattern.

  According to a fourth aspect of the present invention, there is provided the film processing apparatus according to the first aspect, wherein the film breakage detecting means includes a means for measuring the conductivity of the liquid to be treated, and a determination unit for determining film breakage from the measured pattern of change in conductivity. It is characterized by having.

Film breaking detection method of the present invention (claim 5), meet method of detecting the film breaking in the film processing apparatus according to any one of claims 1 to 4, separated by a membrane A gas or gas-liquid mixed liquid is circulated on one side, and film breakage is detected based on a change in electric resistance of the liquid on the other side separated by the film.

The film breakage detection method according to claim 6 is the film breakage detection method according to claim 5 , wherein a pair of electrodes are arranged so as to be in contact with the liquid on the other side separated by the film, and a voltage is applied between the electrodes. It is characterized in that the occurrence of film breakage is detected from the pattern of change in voltage, current or conductivity in between.

According to a seventh aspect of the present invention, there is provided a film breakage detecting method according to the sixth aspect, wherein a gas or gas-liquid mixture is circulated through a film processing apparatus in which the film is broken to detect a change pattern of the voltage, current, or conductivity. The change pattern is stored in the storage unit, and the voltage, current, or conductivity pattern is detected by flowing a gas or gas-liquid mixed solution through a film processing apparatus in which membrane breakage has not been confirmed, and this pattern is stored in the storage unit. It is characterized in that the presence or absence of film breakage is determined in comparison with the stored change pattern.

The film breakage detection method according to claim 8 is the film breakage detection method according to any one of claims 5 to 7 , wherein the film breakage detection process is performed in the cleaning process of the film processing apparatus or during the transition from the cleaning process to the liquid passing process. It is characterized by.

  In the membrane treatment apparatus and the membrane breakage detection method of the present invention, when the membrane is broken, bubbles flow from one side across the membrane to the other side through the fractured portion, and the other side. Bubbles are mixed in the liquid. Then, the electric resistance of the liquid changes as the bubbles pass through the electric resistance detection unit. Therefore, film breakage can be detected from this change in electrical resistance.

  In the present invention, for example, a pair of electrodes are arranged on the other side of the membrane, and when the membrane breaks, bubbles are configured to flow between the electrodes. When bubbles flow in between the electrodes, the electrical resistance between the electrodes changes as compared with the case where only the liquid flows between the electrodes. Therefore, the occurrence of film breakage can be detected based on this change in electrical resistance.

  In the film processing apparatus of the present invention, since the change in the electrical resistance of the liquid can be detected with a simple apparatus, the equipment cost is low.

  In order to detect the change in the resistance of the liquid, a constant voltage may be applied between the pair of electrodes, and the current value between the electrodes may be detected.

  Alternatively, a constant current may be passed between the electrodes, and a change in voltage between the electrodes may be detected. Further, a change in conductivity between the electrodes may be detected, and the change in conductivity may be used as an index value for a change in the electrical resistance of the liquid.

  In order to determine the breakage of the film from the change in current value, voltage value, or conductivity, the gas, gas-liquid mixture is circulated through the film processing apparatus having the broken film, and the change pattern of the voltage, current, or conductivity. This change pattern is stored in the storage means, and the pattern of voltage, current, or conductivity is detected by circulating a gas or gas-liquid mixed solution through a film processing apparatus whose membrane breakage has not been confirmed. Is convenient to compare with the change pattern stored in the storage means.

  The membrane breakage detection step is preferably performed when the membrane treatment apparatus is moved from the washing step or the washing step to the liquid passing step (membrane filtration operation step). In this way, membrane breakage can be detected without interrupting the membrane filtration operation process.

In the present invention , the membrane breakage detecting means can be installed in a small space by using the conductive tubular member as an electrode. In addition, by making the electrode needle-like, fluctuations in current or voltage when bubbles are brought into contact with the electrode become significant, so that film breakage detection becomes sharp.

  Hereinafter, the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a schematic view of a film processing apparatus according to an embodiment of the present invention, and FIG. 2 is a block diagram of the film breakage detecting apparatus of FIG. In FIG. 1, four hollow fiber membranes are used for the sake of clarity, but in reality, a large number of hollow fiber membranes are arranged.

  A plurality of hollow fiber membranes 4 are bundled and arranged in the casing 2 of the internal pressure type hollow fiber membrane module 1. The lower and upper ends of the bundle of hollow fiber membranes 4 are bound by sealing materials 6 and 8 made of synthetic resin or the like, respectively. The sealing materials 6 and 8 are, for example, in a disk shape, and the outer peripheral surface or outer peripheral edge thereof is in watertight contact with the inner surface of the casing 2. A raw water chamber 10 is formed on the lower side of the lower sealing material 6, a circulating water chamber 14 is formed on the upper side of the upper sealing material 8, and the treated water chamber 12 is formed between both the sealing materials 6 and 8. Is formed.

  The upper end side of the hollow fiber membrane 4 penetrates the sealing material 8, and the opening 4 a at the upper end faces the circulating water chamber 14. Similarly, the lower end side of the hollow fiber membrane 4 penetrates the sealing material 6, and the opening 4 b at the lower end faces the raw water chamber 10.

On the side of the raw water chamber 10 of the casing 2, a raw water inlet nozzle 10a and a gas inlet nozzle 10b are provided. Raw water inlet nozzle 10a is raw water pipe 21, via the raw water valve V ₁ and the raw water pump P are connected to the raw water tank 20. From the point between the raw water nozzle 10a and the raw water valve V ₁ of the raw water pipe 21, discharge pipe 24 is branched with a drain valve V _2. Gas inlet nozzle 10b is connected to a compressor C via a gas pipe 27 having a valve V _3.

A circulating water outlet nozzle 14 a is provided on the circulating water chamber 14 side of the casing 2. The circulation water outlet nozzle 14a is connected to the raw water tank 20 through a circulating water pipe 31 having a circulating water valve V _4. From the point between the circulation water outlet nozzle 14a of the circulating water pipe 31 and the circulating water valve V _4, a vent pipe 33 provided with a vent valve V ₅ is branched.

  A treated water outlet nozzle 12 a is provided at the upper part of the casing 2 on the treated water chamber 12 side. The treated water outlet nozzle 12a is connected to the membrane breakage detecting device 50 via a treated water pipe 41, and the membrane breakage detecting device 50 is connected to the treated water tank 40 via a treated water pipe. Although FIG. 1 shows the case of the internal pressure type, the present invention is not limited to this and can also be implemented by an external pressure type.

  As shown in FIG. 2, the film breakage detecting device 50 includes a measuring unit 51 composed of a pair of electrodes 51a and 51b, a power source 52 that applies a voltage to the measuring unit 51, and the current, voltage, or conductivity of the measuring unit 51. It comprises a measuring unit 53 for measuring, a storage unit 55 for storing changes with time of current, voltage or conductivity, and a determination unit 56 for determining the generation of bubbles from a pattern of changes with time of current, voltage or conductivity.

  The electrodes 51 a and 51 b are in contact with the treated water discharged from the treated water chamber 12. The material of the electrodes 51a and 51b is preferably platinum or stainless steel so as not to be affected by the pH of the treated water.

  Next, the operation content when the film breakage detection apparatus 50 is a constant voltage method will be described. The power source 52 applies a constant voltage between the electrodes 51a and 51b of the measurement unit 51. With this applied voltage, a current corresponding to the electrical resistance of the treated water flows between the electrodes 51a and 51b. When bubbles exist in the treated water passing through the measurement unit 51, the current between the electrodes 51a and 51b changes when the bubbles pass between the electrodes 51a and 51b.

  The measuring unit 53 measures the current value between the electrodes 51a and 51b.

  Next, the current value change pattern stored in the storage unit 55 and the current value change pattern of the current value measured by the measurement unit 53 are compared with each other by the determiner 56 to determine the presence or absence of film breakage.

  When the film breakage detection device 50 is of a constant current method, the power source 52 applies a voltage so that a constant current flows between the electrodes 51 a and 51 b of the measurement unit 51. When bubbles exist in the treated water passing through the measurement unit 51, the voltage between the electrodes 51a and 51b changes when the bubbles pass between the electrodes 51a and 51b. The measuring unit 53 measures the voltage value between the electrodes 51a and 51b. Next, the change pattern of the voltage value stored in the storage unit 55 and the temporal change pattern of the voltage value measured by the measurement unit 53 are compared with each other by the determiner 56 to determine the presence or absence of film rupture.

  When the film breakage detection device 50 is of the conductivity detection method, the power source 52 applies a predetermined voltage between the electrodes 51a and 51b of the measurement unit 51, and supplies a current between the electrodes 51a and 51b. When bubbles exist in the treated water passing through the measurement unit 51, the conductivity between the electrodes 51a and 51b changes when the bubbles pass between the electrodes 51a and 51b. This change is measured by the measurement unit 53, and then the conductivity change pattern stored in the storage unit 55 is compared with the measured conductivity change pattern with time by the determiner 56 to determine the presence or absence of film breakage. Is done.

  The flow of water or gas during normal operation and cleaning operation of the membrane processing apparatus configured as described above is as follows.

[During normal operation]
During normal operation, the valves V ₁ and V ₄ are opened, the other valves (V ₂ , V ₃ , V ₅ ) are closed, and the raw water pump P is operated. Raw water raw water tank 20 is the raw water pipe 21, the raw water pump P, through the valve _{V 1,} and flows from the raw water inlet nozzle 10a to the raw water chamber 10. The raw water in the raw water chamber 10 flows into the hollow fiber membrane 4 from the opening 4b at the lower end of the hollow fiber membrane 4, and a part of this raw water passes through the hollow fiber membrane 4 and flows into the treated water chamber 12, The remainder flows into the circulating water chamber 14 from the opening 4 a at the upper end of the hollow fiber membrane 4.
The treated water in the treated water chamber 12 flows out from the treated water outlet nozzle 12 a and is sent to the treated water tank 40 through the treated water pipe 41, the membrane breakage detection device 50 and the pipe 42.
Circulating water in the circulation water chamber 14 flows out from the circulation water outlet nozzle 14a, the circulating water pipe 31, is water in the raw water tank 20 via a valve V _4.

[Washing with mixed water]
When washing the membrane treatment apparatus with gas-water mixing water, in the state of the normal operation, and the valve V ₃ is opened, to operate the compressor C. Thereby, the pressurized gas from the compressor C passes through the inside of the hollow fiber membrane 4 together with the raw water supplied by the raw water pump P, and the hollow fiber membrane 4 is washed.
The mixture of the gas and raw water that has passed through the inside of the hollow fiber membrane 4 flows into the circulating water chamber 14 and is discharged out of the system through the drain pipe 33.

[Cleaning with gas]
To perform cleaning with gas in the mixing cleaning operation of the water and gas, stop the raw water pump P, and the state of the valve V ₁ was closed. Thereby, the hollow fiber membrane 4 is washed with the mixed water of the raw water and the pressurized gas remaining in the hollow fiber membrane 4 and in the raw water chamber 10.

[Detection of film breaks]
In order to detect membrane breakage, prior to the detection operation, a membrane module whose membrane breakage has been confirmed is first installed as shown in FIG. 1, and the normal operation is performed to fill the membrane module with water. Perform “cleaning with mixed water”.
When the membrane module in which the membrane breakage is present is washed with the air / water mixed water, a part of the pressurized gas from the compressor C passes through the broken portion of the hollow fiber membrane 4 to become bubbles, and the treated water chamber 12. This bubble passes through the membrane breakage detection device 50 via the treated water pipe 41.
When the bubbles pass through the film breakage detection device 50, the conductivity between the electrodes 51a and 51b changes. That is, when air bubbles enter between the electrodes 51a and 51b, the electrical resistance between the electrodes 51a and 51b increases. Therefore, when a constant voltage is applied from the constant voltage power source between the electrodes 51a and 51b, the current value between the electrodes 51a and 51b decreases, and when a bubble passes between the electrodes 51a and 51b, between the electrodes 51a and 51b. The current value of is restored.

  FIG. 4 (b) shows an example of a waveform diagram obtained by converting the current change accompanying the bubble passage into the voltage change. The storage unit 55 stores this voltage change pattern. For example, the voltage change as shown in FIG. 4B is binarized and converted into a pulse waveform, and the average value of the frequency and period of the pulse is stored.

  In order to detect the membrane breakage of the membrane module incorporated in the actual water treatment apparatus, the membrane module is washed with mixed water and the voltage associated with the current change between the electrodes 51a and 51b by the membrane breakage detection device 50. Measure changes. If there is no film rupture, the voltage is normally constant as shown in FIG. 4 (a), and the determination unit 56 determines that there is no film rupture.

  When the change pattern is detected, the determination unit compares the detected change pattern with the stored change pattern to determine whether or not the film is broken. For example, if the period and frequency of the pulse pattern obtained by binarizing the voltage change are within a predetermined range determined based on the stored average value, it is determined that there is a film rupture. It is determined that there is no film breakage.

  In addition, since the determination of membrane breakage is made by comparing the change patterns in this way, even if there is a voltage change due to disturbance such as fluctuations in raw water quality, it is not judged that the membrane is broken, and the judgment accuracy is extremely high. Become.

  In this description, a change is measured by passing a current between the electrodes 51a and 51b with a constant voltage power supply. However, a change in the applied voltage accompanying the passage of a bubble is caused when a constant current is passed between the electrodes 51a and 51b with a constant current power supply. The film breakage may be determined from the change pattern.

  Alternatively, the electrical conductivity between the electrodes 51a and 51b may be measured, and film breakage may be determined based on the change pattern of the electrical conductivity.

  After the completion of the membrane rupture detection step, if there is a membrane rupture, the hollow fiber membrane 4 in the membrane module 1 is replaced, and then the normal operation is resumed.

  The above embodiment is an example of the present invention, and the present invention is not limited to the above embodiment. For example, in the above embodiment, the cleaning operation and the film breakage detection operation are separated from each other, but the film breakage detection device 50 may be turned ON during the cleaning operation to detect the presence or absence of the film breakage.

  In the above embodiment, the compressor C is connected to the raw water chamber 10 and gas is introduced into the hollow fiber membrane 4. However, the compressor C is connected to the treated water chamber 12 and is disposed outside the hollow fiber membrane 4. Gas back-flushing may be performed by introducing gas. In this case, by providing the membrane breakage detection device 50 in the circulating water pipe 31, for example, the membrane breakage can be detected.

  In the above embodiment, the membrane module 1 is an internal pressure type hollow fiber module, but may be an external pressure type hollow fiber module. Also in this case, the compressor may be provided on the raw water side and the membrane breakage detecting device may be provided on the treated water side. Conversely, the compressor may be provided on the treated water side, and the membrane breakage detecting device may be provided on the raw water side.

  In the above embodiment, there is one membrane module 1, but there may be two or more. When there are a plurality of membrane modules, one compressor C and one membrane breakage detection device 50 may be provided for each module, or they may be shared. The membrane break detection procedure for each membrane module when the compressor C and the membrane break detection device 50 are shared is, for example, as follows.

  The pressurized gas from the compressor C is introduced only into the first membrane module, and the presence or absence of membrane rupture is detected by the membrane rupture detection device. After the membrane rupture detection of the first membrane module is completed, the introduction of the pressurized gas to the first membrane module is stopped, and then the pressurized gas is introduced only into the second membrane module. The presence or absence of film breakage is detected. Similarly, the membrane breakage of the third membrane module to the last membrane module is sequentially detected.

  When the occurrence of film breakage is detected, for example, a warning lamp in the management room blinks, and the maintenance manager is notified of which film module has broken. Upon receiving the notification, the maintenance manager stops the operation of the membrane module in which the membrane breakage occurs, replaces the membrane module with a new one, and resumes normal operation. Repair the membrane module that has been broken and reuse it.

  In the above embodiment, the hollow fiber membrane is used as the membrane, but the membrane is not limited to this and may be, for example, a spiral membrane.

In the present invention, the electrode 51a, the electrodes such as 51b are installed by using a pipe member for passing water. In this way, the configuration of the film breakage detection device is simplified.

  FIG. 3 is a cross-sectional view of the vicinity of an elbow as a piping member having such a configuration. FIG. 3 shows a constant voltage type film breakage detection circuit diagram in which a dry battery is used as a constant voltage source and a change in the current flowing between the electrodes is amplified and detected by a transistor.

  In FIG. 3, a resin joint 64 is connected to a stainless steel elbow 63. A needle electrode 65 is inserted into a hole 66 provided in the resin joint 64, and the electrode 65 is fixed to the hole 66 by an adhesive 67. The tip of the electrode 65 protrudes from the inner wall of the resin joint 64.

A stainless elbow 63 is connected to the base of the NPN transistor T and used as an electrode. The collector of the transistor T is connected to the electrode 65 via the resistors R ₂ and R ₁ . The emitter of the transistor T is connected to the cathode of the dry battery 68. The anode of the battery 68 is connected to a point between said resistors R ₁ and R _2. Voltmeter V is provided to measure the voltage drop across the resistor R _2. A constant voltage is applied from the dry battery 68 between the elbow 63 and the electrode 65. When only water flows through the elbow 63, the current value between the elbow 63 and the electrode 65 is constant, but when the bubble passes through the elbow 63, the current value decreases. This current change is amplified by the transistor T, a collector current changes in the transistor T, the voltage across the resistor R ₂ that is detected by the voltmeter V varies. From the change in the detection voltage of the voltmeter V, the passage of bubbles in the elbow 63 is detected. In particular, in the detection mechanism shown in FIG. 3, since the value of the current flowing through the electrode 65 changes significantly when the bubble contacts the needle-like electrode 65, the bubble can be detected sensitively.

  Hereinafter, the present invention will be described more specifically with reference to examples.

[Example 1]
The presence or absence of film breakage was detected using the film processing apparatus of FIG.

The hollow fiber membrane 4 used had an inner diameter of 1150 μm, an outer diameter of 1900 μm, a length of 1000 mm, a molecular weight cut off of 13000, and an effective membrane area of 0.14 m ² . The conductivity meter shown in FIG. 3 was used. Resistor R ₁ is 1 kΩ, R ₂ is 22 kΩ, and the dry battery is 9V.

In the membrane processing apparatus having the above configuration, after performing the normal operation as described in the above embodiment for several minutes, the raw water pump P is stopped, the compressor C is operated, the gas cleaning operation is performed, and the resistance R ₂ is reduced. The resulting voltage was measured with a voltmeter V. FIG. 4 (a) is a graph showing the change with time of voltage in the membrane module in which it was confirmed that the hollow fiber membrane was not cut.

Then, after cutting the one previously hollow fiber, the same normal operation and membrane rupture detection operation as described above to a voltage generated in the resistor R ₂ was measured by a voltmeter V. The results are shown in FIG. 4 (b).

  As shown in FIGS. 4 (a) and 4 (b), when the film is broken, the detection voltage of the voltmeter V changes, and the film breakage is detected.

It is a schematic diagram of the film processing apparatus concerning an embodiment. It is a block diagram of the film | membrane fracture | rupture detection apparatus integrated in the film | membrane processing apparatus of FIG. It is sectional drawing which shows the film | membrane breakage detection apparatus used in an Example. (A) is a figure which shows the time-dependent change of the voltage when the hollow fiber membrane is not cut | disconnected, (b) is a figure which shows the time-dependent change of the voltage when one hollow fiber membrane is cut | disconnected.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Internal-pressure-type hollow fiber membrane module 2 Casing 4 Hollow fiber membrane 6,8 Sealing material 10 Raw water chamber 12 Treated water chamber 14 Circulating water chamber 20 Raw water tank 40 Treated water layer 50 Membrane breakage detector 51a, 51b Electrode 63 Stainless steel elbow 65 electrodes

Claims (8)

In a membrane processing apparatus provided with a membrane for filtering the liquid to be treated,
Means for circulating a gas or gas-liquid mixture on one side separated by the membrane;
A film processing apparatus comprising a film breakage detecting means for detecting a film breakage based on a change in electrical resistance of the liquid on the other side separated by the film,
This film breakage detecting means includes a pair of electrodes, a power source that applies a voltage to the electrodes, a measuring unit that measures the current, voltage, or conductivity of the electrodes, and a pattern of change over time of the current, voltage, or conductivity. And a determination unit for determining the generation of bubbles from
A conductive tubular member through which the liquid that has permeated the membrane is circulated is provided, and one of the pair of electrodes is the tubular member, and the other is interposed between the tubular member and the insulating member. A membrane processing apparatus, characterized by being needle-like electrodes separated from each other .   2. The pattern of change in measured current value according to claim 1, wherein the film breakage detecting means includes a pair of electrodes, a power source that applies a constant voltage to the electrodes, a measuring unit that measures a current flowing between the electrodes, and a measured current value change pattern. And a determination unit for determining film rupture from the film processing apparatus.   2. The film breakage detecting means according to claim 1, wherein the film breakage detecting means includes a pair of electrodes, a power source that supplies a constant current between the electrodes, a measuring unit that measures a voltage generated between the electrodes, and a change in the measured voltage value. And a determination unit for determining film breakage from the pattern of the film processing apparatus.   2. The film processing according to claim 1, wherein the film break detection means includes means for measuring the conductivity of the liquid to be treated, and a determination unit for determining film breakage from the measured pattern of change in conductivity. apparatus. Met method of detecting the membrane rupture of membrane treatment apparatus according to any one of claims 1 to 4,
Distribute a gas or gas-liquid mixture on one side separated by the membrane;
A film breakage detecting method in a film processing apparatus, wherein film breakage is detected based on a change in electrical resistance of a liquid on the other side separated by the film. In Claim 5 , a pair of electrodes are arranged so as to be in contact with the liquid on the other side separated by the membrane, a voltage is applied between the electrodes, and a change in voltage, current or conductivity between the electrodes is determined. A method for detecting film breakage in a film processing apparatus, wherein the occurrence of film breakage is detected from the pattern of the film. 7. The gas processing apparatus according to claim 6, wherein a gas or gas-liquid mixture is circulated through a film processing apparatus in which the film is broken to detect a change pattern of the voltage, current, or conductivity, and the change pattern is stored in a storage means. ,
A gas or gas-liquid mixture is circulated through a membrane processing apparatus whose membrane breakage has not been confirmed to detect the voltage, current, or conductivity pattern, and this pattern is compared with the change pattern stored in the storage means. A film breakage detecting method in a film processing apparatus, characterized by determining the presence or absence of a film. 8. The film breakage detection method according to any one of claims 5 to 7 , wherein the film breakage detection step is performed in the cleaning step of the film processing apparatus or during the transition from the cleaning step to the liquid passing step.

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