JP4545230B1 - Pattern forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pattern forming apparatus capable of performing pattern formation on a substrate quickly and accurately.
SOLUTION: A pattern forming apparatus 1 for forming a pattern on a substrate w, which is transported to a detection position D by a support plate 2, a drive unit 8 for rotating the support plate 2, and a rotation of the support plate 2. Substrate position detecting means 20 for detecting the position of the substrate w, and processing means 30 for forming a pattern on the substrate w transported to the processing position P by the rotation of the support plate 2. Each of the mounting portions 4 and 4 includes a position correcting unit 5 that corrects the position of the substrate w based on the detection by the substrate position detecting unit 20, and the driving unit 8 rotates the support plate 2 180 degrees in both forward and reverse directions. The mounting portions 4 and 4 are controlled to move so as to move between the detection position D and the processing position P.
[Selection] Figure 1

Description

  The present invention relates to a pattern forming apparatus that forms a pattern on a substrate by printing, laser processing, or the like.

  As an apparatus for forming a pattern on a substrate, for example, a screen printing apparatus disclosed in Patent Document 1 is known. As shown in FIG. 4, the printing apparatus 50 is provided with three position correction mechanisms 52 on the upper surface of a table 51 that rotates in one direction, and the workpiece w installed in the position correction mechanism 52 at the installation position is: When the table 51 is rotated by 120 °, the table 51 is moved below the camera 53. After the position is corrected based on the detection of the camera 53, the table 51 is rotated again by 120 ° and conveyed to the printing unit. The work w on which printing has been performed in the printing unit 54 is further rotated by 120 ° and returned to the installation position. In this way, it is possible to sequentially print the input workpiece w.

JP 11-129444 A

  However, the above-described conventional printing apparatus 50 needs to perform position correction and printing sequentially by stopping by the camera 53 and the printing unit 54 before the workpiece w put into the installation position returns to the installation position again. There was a problem that rapid pattern formation was impossible.

  SUMMARY An advantage of some aspects of the invention is that it provides a pattern forming apparatus capable of performing pattern formation on a substrate quickly and accurately.

The object of the present invention is a pattern forming apparatus for forming a pattern on a substrate, wherein the substrate is mounted on both sides of the rotating shaft supported rotatably around a rotating shaft that stands up. A support plate having a portion, a drive unit for rotating the support plate, a substrate position detection unit for detecting the position of the substrate conveyed to the detection position by the rotation of the support plate, and the rotation of the support plate Processing means for forming a pattern on the substrate transported to the processing position, and the driving means rotates the support plate 180 ° in both forward and reverse directions so that the mounting portions are located at the detection position and the processing position. The mounting unit includes a position correction device including an actuator driven via wiring, and a table that holds a substrate, and is based on detection by the substrate position detection unit. Actu Move the table by the operation of the motor is accomplished by Configured patterning device to perform the positional correction of the substrate held on said table.

  It is preferable that the pattern forming apparatus further includes a loading / unloading unit that loads and unloads the substrate with respect to the mounting portion at the detection position.

  ADVANTAGE OF THE INVENTION According to this invention, the pattern formation apparatus which can perform the pattern formation with respect to a board | substrate rapidly and correctly can be provided.

It is a top view of the pattern formation apparatus which concerns on one Embodiment of this invention. It is a principal part side view of FIG. It is a principal part top view of the pattern formation apparatus which concerns on other embodiment of this invention. It is a perspective view of the conventional pattern formation apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of a pattern forming apparatus according to an embodiment of the present invention. As shown in FIG. 1, the pattern forming apparatus 1 includes a support plate 2 having mounting portions 4 and 4 for the substrate w on both sides, a driving device 8 for rotating the support plate 2, and carrying out the substrate w to the mounting portion 4. A loading / unloading device 10 for loading / unloading, a substrate position detection device 20 for detecting the position of the substrate w attached to the mounting portion 4, and a processing device 30 for forming a pattern on the substrate w attached to the mounting portion 4 It has.

  As shown in a side view in FIG. 2, the support plate 2 is supported at the center by an upright rotating shaft 7, and around the rotating shaft 7 by a driving device 8 including a rotary actuator such as a swing motor ( It can be freely rotated in the direction of arrow A in FIG. The mounting portions 4 and 4 are respectively provided on the upper surfaces on both sides in the longitudinal direction of the support plate 2 with the rotation shaft 7 interposed therebetween.

  Each mounting portion 4 includes a position correcting device 5 including three actuators 5a, 5b, and 5c such as a servo motor, and a table 6 that holds a substrate w. The table 6 extends along the horizontal plane X in FIG. The position of the substrate w held on the table 6 can be corrected by moving in the direction, the Y direction, and the θ direction. A number of suction holes (not shown) are formed in the table 6, and the substrate w placed on the upper surface can be fixed.

  As shown in FIGS. 1 and 2, the carry-in / out device 10 is arranged in the vicinity of a conveyor 40 such as a belt conveyor for transferring the substrate w, and the carrying surface 41 of the conveyor 40 and the mounting portion 4 for the support plate 2. The substrate w can be exchanged between the two. The carry-in / out device 10 includes a support arm 12 extending in the horizontal direction, and a rotation shaft 14 extending in the vertical direction is provided at the center of the support arm 12. A motor 15 is connected to the upper end portion of the rotary shaft 14 so that the support arm 12 can rotate on a horizontal plane. The rotating shaft 14 is connected to a moving shaft 16 supported by the main body 11 so as to be movable in the vertical direction via a motor 15, whereby the support arm 12 is configured to be movable in the vertical direction. ing. Suction holders 13 and 13 such as a suction cup and a Bernoulli chuck are provided on the lower surfaces of both ends of the support arm 12, respectively, so that the substrate w can be sucked and held.

  The substrate position detection device 20 is configured to detect the position of the substrate w by reading a part of the substrate w mounted on the mounting unit 4 or the position of a registration mark printed in advance on the substrate w. An imaging device 22 such as a CCD camera or a microscope is provided. Although the number of the imaging devices 22 is not particularly limited, two are provided in the present embodiment.

  The processing apparatus 30 is an apparatus that forms a pattern by applying a conductive paste or the like on a substrate. For example, a screen printing machine can be exemplified. The processing apparatus 30 only needs to be able to form various patterns such as a printing pattern and a groove pattern on the substrate based on a preset pattern shape. For example, the processing device 30 applies a wiring pattern or marking on the substrate by laser processing. It may be a laser processing apparatus or an ink jet printing apparatus.

  The substrate position detection device 20 and the processing device 30 perform position detection and pattern formation on the substrate w mounted on the mounting portions 4 and 4 when the support plate 2 is at the position indicated by the broken line in FIG. Arranged so that each can be done. The driving device 8 includes the mounting portions 4 and 4 between a detection position D where the substrate position detection device 20 can detect the position of the substrate w and a processing position P where the processing device 30 can form a pattern on the substrate w. The support plate 2 is rotated 180 ° in both forward and reverse directions so that the

  The operations of the actuators 5a to 5c included in the driving device 8, the loading / unloading device 10, the substrate position detection device 20, the processing device 30, the conveyor 40, and the mounting unit 4 are controlled by a control device (not shown).

  Next, a method for forming a pattern on a substrate using the pattern forming apparatus 1 will be described. The control device intermittently drives the conveyor 40 to transfer the substrate w, stops the conveyor 40 when the unpatterned substrate w on the conveyor 40 reaches below the support arm 12, and The support plate 2 is stopped at a position where one is at the detection position D.

  Then, the support arm 12 is lowered, and the substrate w supported by the conveyor 40 and the mounting portion 4 is sucked and held by the suction holding portions 13 and 13, respectively. Thereafter, the substrate w is replaced by rotating 180 ° while raising the support arm 12 and lowered again, whereby the substrate is placed on the conveyor 40 and the mounting portion 4. Thus, the substrate w is carried from the conveyor 40 to the mounting unit 4 and the substrate w is carried from the mounting unit 4 to the conveyor 40.

  Next, position correction of the board | substrate w attached to the mounting part 4 is performed. That is, after the position of the substrate w on the mounting unit 4 is detected by the substrate position detection device 20, a deviation amount between the detected position of the substrate w and a predetermined position of the substrate w set in advance is calculated. Thereafter, based on the calculated deviation amount, the actuators 5a, 5b, 5c of the position correction device 5 are operated to move the table 6 in a direction to absorb the substrate deviation. Thereby, the position of the board | substrate w on the mounting part 4 can be correct | amended to the position set beforehand. While one of the mounting portions 4 is stopped at the detection position D, the other of the mounting portions 4 is stopped at the processing position P. The processing apparatus 30 forms a predetermined pattern on the substrate w mounted on the mounting unit 4 at the processing position P.

  When the control device receives both the position correction completion signal from the mounting portion 4 and the pattern formation completion signal from the processing device 30, the control device rotates the support plate 2 by 180 ° to find the position at the detection position D. The corrected substrate w is transported to the processing position P, and the substrate w after pattern formation at the processing position P is transported to the detection position D. Then, the substrate w transported to the detection position D is exchanged with the substrate w on the conveyor 40 by the operation of the carry-in / out device 10 to detect the position and correct the position of the new substrate w, while being transported to the processing position P. A pattern is formed on the substrate w. Thereafter, the support plate 2 can be rotated 180 ° in the direction opposite to the rotation direction so as to replace the substrate w, whereby pattern formation can be sequentially performed on the substrates w transferred by the conveyor 40. .

  According to the pattern forming apparatus 1 of the present embodiment, the support plate 2 is rotated 180 ° in both forward and reverse directions, so that when the one mounting portion 4 comes to the detection position D, the other of the mounting portions 4 is in the processing position. Since the mounting portions 4 and 4 move between the detection position D and the processing position P so as to come to P, the position detection and pattern formation of the substrate w can always be performed simultaneously. Therefore, pattern formation on the substrate w can be performed quickly.

  Further, since the support plate 2 is rotated in both forward and reverse directions, there is no possibility that the wiring connected to the actuators 5a to 5c of the position correction device 5 is wound around the rotation shaft 7 and the like, and accurate pattern formation is performed. Can be maintained.

  Further, as in the present embodiment, the mounting portion 4 stopped at the detection position D is configured to carry in and out the substrate w by the carry-in / out device 10, so that one mounting portion 4 While the pattern of the substrate w is being formed, not only the position detection of the substrate w but also the loading / unloading of the substrate w can be performed by the other mounting portion 4. Therefore, pattern formation on the substrate w can be performed more quickly. However, the carry-in / out position of the substrate w with respect to the mounting unit 4 is not limited to the detection position D, and may be any position during which the mounting unit 4 is transported from the processing position P to the detection position D.

  In this embodiment, the drive device 8 is controlled to rotate the support plate 2 after the correction of the position of the substrate w in the one mounting portion 4 is completed, but the substrate w of the other mounting portion 4 is controlled. When the pattern formation is completed, the rotation of the support plate 2 is started when the position of the substrate w in the one mounting portion 4 is detected, and the mounting portion 4 is rotated during the rotation of the support plate 2. The position of the substrate w may be corrected by the above. Thereby, even when it takes time to carry in / out the substrate w with respect to the one mounting portion 4, the time loss can be minimized and the productivity can be maintained satisfactorily.

  The support plate 2 in the present embodiment is configured to include a pair of mounting portions 4 and 4 disposed on both sides of the rectangular shape in the longitudinal direction, but the support plate 2 is formed in a disc shape as shown in FIG. And you may make it the structure provided with multiple pairs (for example, 3 pairs) mounting part 4a, 4a; 4b, 4b; 4c, 4c. Each pair of mounting portions is disposed to face each other with the rotation shaft 7 in between, and the size and shape of the mounting portions are preferably different depending on the pair. According to such a configuration, a pair of mounting portions (for example, mounting portions 4b and 4b) matching the size and shape of the substrate w is appropriately selected, and the selected mounting portions 4b and 4b are respectively detected and processed. The versatility of the pattern forming apparatus 1 can be enhanced by controlling the rotation of the support plate 2 (180 ° rotation in both forward and reverse directions) so that The support plate 2 can have various shapes such as an elliptical shape and a cross shape in addition to the rectangular shape and the disc shape.

  Further, the configuration of the carry-in / out apparatus 10 is not limited to the rotation type as in the present embodiment, and for example, the substrate w is exchanged by linearly conveying the substrate w by a belt driving method, a ball screw driving method, or the like. A well-known thing which can carry in and carry out the board | substrate w with respect to the mounting part 4, such as a structure can be employ | adopted. The loading and unloading of the substrate w is preferably performed with respect to the mounting portion at the detection position in the same manner as the present embodiment from the viewpoint of speeding up the pattern formation.

  Further, in the present embodiment, the position correction of the substrate w detected by the substrate position detection device 20 is performed by the position correction device 5 provided in each mounting portion 4, but the substrate position correcting means is not necessarily provided by each mounting portion. 4 need not be provided. The detected position correction means for the substrate w is not limited to the configuration in which the substrate w is physically moved, and the position correction function may be incorporated in the processing apparatus 30 that performs pattern formation. Good.

For example, when the processing apparatus 30 is a laser processing apparatus that can perform pattern formation on the substrate by scanning a laser spot on the XY plane based on the set processing target coordinates, the substrate position detection apparatus 20 The support plate 2 is set to be horizontally rotatable so that the detection reference surface of the laser beam and the processing reference surface of the laser processing apparatus are on the same plane, and the position of the substrate detected by the substrate position detection device 20 is set in the laser processing apparatus. By inputting, the processing target coordinates in the laser processing apparatus can be corrected based on the detection result. In other words, the processing target coordinates in the reference coordinate system in the laser processing apparatus are determined based on the deviation amounts in the x direction, the y direction, and the θ direction (see FIG. 1) calculated based on the detection by the substrate position detection apparatus 20. By converting to processing target coordinates in FIG. 5 and performing drive control of the laser spot in this virtual coordinate system, accurate pattern formation can be performed without moving the substrate itself attached to each mounting portion 4. According to this configuration, the position correcting device 5 of each mounting portion 4 is not required, so that not only the configuration can be simplified, but also the operation is performed more quickly because the alignment by the movement of the substrate is unnecessary. It becomes possible. The configuration in which the processing means incorporates the substrate position correcting means is not limited to the above, and for example, when the processing means is a screen printer, by adjusting the screen position based on the substrate detection position, The displacement of the substrate can be compensated without moving the substrate itself.

DESCRIPTION OF SYMBOLS 1 Pattern formation apparatus 2 Support plate 4 Mounting part 5 Position correction apparatus 7 Rotating shaft 8 Drive apparatus 10 Carrying in / out apparatus 20 Substrate position detection apparatus 30 Processing apparatus 40 Conveyor w Substrate

Claims (2)

A pattern forming apparatus for forming a pattern on a substrate,
A support plate having a mounting portion on which the substrate is mounted on both sides sandwiching the rotating shaft supported rotatably around the rotating shaft that stands;
Drive means for rotating the support plate;
Substrate position detecting means for detecting the position of the substrate conveyed to the detection position by the rotation of the support plate;
Processing means for forming a pattern on the substrate conveyed to the processing position by the rotation of the support plate;
The drive means is controlled so that the support plate is rotated 180 ° in both forward and reverse directions so that the mounting portions move between the detection position and the processing position.
The mounting portion includes a position correction device including an actuator driven via wiring, and a table for holding a substrate, and the table is moved by the operation of the actuator based on the detection of the substrate position detecting means. A pattern forming apparatus configured to correct the position of the substrate held on the table . The pattern forming apparatus according to claim 1, further comprising a loading / unloading unit that loads and unloads the substrate with respect to the mounting portion at the detection position.

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