JP4513435B2 - Transport device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transport device capable of reducing the cost of the device and reducing the whole weight by decreasing the number of motors used as driving sources. <P>SOLUTION: A transport device for transporting a subject of processing W holding the subject comprises a rotation base 24 rotatably supported by a base; first and second arm mechanisms 26 and 28 constituted by connecting first arms 26A and 28A, second arms 26B and 28B, and picks 26C and 28C in a bendable and stretchable manner in this order; a drive link mechanism 30 which is connected to the first arms of the first and the second arm mechanisms, and which puts the first and the second arm mechanisms into a circling motion; a first drive source 32 for rotationally driving the rotation base; and a second drive source 34 for driving the drive link mechanism. <P>COPYRIGHT: (C)2005,JPO&amp;NCIPI

Description

The present invention is related to transport apparatus for holding and transporting the object to be processed such as a semiconductor wafer.

  In general, in a semiconductor processing system for manufacturing semiconductor devices and the like, in the manufacturing process, a semiconductor wafer as an object to be processed is transported in an atmospheric pressure atmosphere or a vacuum atmosphere in a clean state, and then transferred into a processing chamber. Or, conversely, it is taken out from the processing chamber and carried out to a predetermined place. In this case, in order to transfer the semiconductor wafer, for example, a transfer device as shown in Patent Document 1, Patent Document 2, Patent Document 3, and the like is used. FIG. 33 is a perspective view showing an example of a conventional transport device. This transport device 2 has an arm portion 8 formed by connecting the first arm 4 and the second arm 6 so as to be able to bend and extend. A pick arm 10 is attached to the tip of the arm portion 8 so as to be rotatable. Picks 10 </ b> A and 10 </ b> B are formed at both ends of the arm 10. The entire arm portion 8 can be rotated integrally, and when the arm portion 8 is bent and stretched, a driving force is transmitted by a pulley or a connecting belt incorporated in the arm portion 8 and the peak arm 10. Can move forward or backward in a predetermined direction.

The motor source 12 for driving the conveying device 2 is provided with two motors (not shown). As described above, the first motor rotates the entire arm portion 8 and directs it in a desired direction. And a second motor for bending and extending the arm portion 8 as described above.
When the semiconductor wafer W in the processing chamber is replaced using the transfer apparatus 2, first, one pick of the peak arm 10, for example, the pick 10A is emptied, and the unprocessed wafer W is placed on the other pick 10B. Keep it. Then, by bending and extending the arm portion 8, first, the empty pick 10A is advanced toward the processing chamber, the wafer W processed by the empty pick 10A is received, and the pick 10A is moved backward to process the wafer. Remove W from the processing chamber. Then, with the arm portion 8 folded as shown in FIG. 33, the entire arm portion is rotated 180 degrees to direct the pick 10B holding the unprocessed wafer W to the processing chamber. Then, by again bending and stretching the arm portion 8, the pick 10B is advanced to carry the unprocessed wafer held by the pick 10B into the processing chamber, and the empty pick 10B is retracted. To complete the transfer operation.

  Further, as other transport devices, for example, transport devices as disclosed in Patent Documents 2 and 4 are known. In this transfer apparatus, unlike a case of Patent Documents 1 and 3 described above, a pair of picks for holding a wafer are not arranged in the same horizontal plane but arranged so as to overlap each other so that they face the same direction. Is set. Then, using three motors as drive sources, the entire apparatus is swung and the picks are moved forward and backward.

Japanese National Patent Publication No. 8-506671 JP 2000-72248 A JP-A-7-142551 Japanese Patent Laid-Open No. 10-163296

  By the way, in the transfer apparatus as shown in FIG. 33 and Patent Documents 1 and 3 and the like, the pick arm 10 is used in order to perform an exchange operation between a processed wafer and an unprocessed wafer in the processing chamber. Although it has to turn 180 degrees, there is a problem that time is lost due to this large turning angle, and quick replacement work cannot be performed. In particular, since the wafer size increases from 200 mm to 300 mm in diameter and its weight increases, the turning speed cannot be increased. Further, in the case shown in FIG. 33, since the wafer is always held on one of the picks during the expansion / contraction operation of the arm portion 8, there has been a problem that the expansion / contraction operation speed cannot be increased more than necessary. In addition, in the transport apparatus as shown in Patent Documents 2 and 4, three motors are required as a drive source, and therefore, there is a problem that the cost of the apparatus increases accordingly.

The present invention has been devised to pay attention to the above problems and to effectively solve them. An object of the present invention is to provide a transport device that requires a small turning angle when replacing the objects to be processed.
Another object of the present invention is to provide a transport apparatus capable of reducing the cost of the apparatus and reducing the overall weight by reducing the number of motors as drive sources.
Still another object of the present invention is to provide a drive mechanism that can know the relative positional relationship of a plurality of drive shafts without using an encoder or the like that has a complicated structure and requires arithmetic processing. is there.

According to a first aspect of the present invention, there is provided a transport apparatus for holding and transporting an object to be processed, wherein the rotary base, the first arm portion, the second arm portion, and the pick portion that are rotatably supported by the base are provided. and first and second arm mechanisms Rutotomoni the first arm portion, such by bending coupled is rotatably supported on said rotary base in the sequence, the first arm of said first and second arm mechanisms comprising a drive linkage which is connected respectively to bend and stretch the first and second arm mechanism parts, a first drive source for rotationally driving the rotary base, and a second drive source for driving the drive linkage The drive link mechanism is rotatably supported by the rotary base and is driven to rotate by the second drive source, and one end is rotatably connected to the drive arm and the other end. Of the first arm mechanism A first driven arm portion connected to one arm portion, and a second driven one end rotatably connected to the drive arm portion and the other end connected to the first arm portion of the second arm mechanism An arm unit is provided .
As described above, the entire apparatus can be turned by the first drive source, and the first and second arm mechanisms can be extended and retracted by the second drive source via the drive link mechanism, so that a small number of drive sources can be used. Since it can be operated and the structure is simple, the apparatus cost can be greatly reduced.

Further, for example, as defined in claim 2, the two pick parts are arranged in different directions on the same plane, and an opening angle of the two pick parts is in a range of less than 60 to 180 degrees. Is set.
According to this, since the entire apparatus has only to be swung by a predetermined angle smaller than 180 degrees that is the opening angle of both pick parts during the replacement operation of the objects to be processed, the replacement operation of the objects to be processed is quickly performed. It becomes possible.

Also for example, as prescribed in請Motomeko 3, wherein the driving arm, the power is transfer Erareru of the second drive source via a power transmission mechanism comprising the connecting belt and pulley.

According to a related art of the present invention, in a transfer device for holding and transferring an object to be processed, a rotation base that is rotatably supported by a base, a first arm portion, a second arm portion, and a pick portion are arranged in this order. And the first arm portion is connected to the rotary base so as to be rotatable, and the first arm portions of the first and second arm mechanisms are connected to each other. A drive link mechanism that is connected to bend and extend the first and second arm mechanisms, a first drive source that rotates the rotation base, and a second drive source that drives the drive link mechanism, The drive link mechanism is pivotally driven by the second drive source, and is directly connected to a drive shaft that is rotatably supported coaxially with the rotation shaft of the rotary base, and the first and first drive arms. Each first arm of the 2-arm mechanism A conveying device being characterized in that a follower arm portion connected, respectively.
In this case, the drive arm portion is directly connected to the drive shaft of the second drive source that is rotatably supported coaxially with the rotation shaft of the rotation base, so that a pulley, a connection belt, etc. This eliminates the need for a power transmission mechanism and simplifies the structure of the apparatus, and further reduces the cost of the apparatus.

The addition, for example the drive movement arm portion, the power of the second drive source is transmitted through a power transmission mechanism comprising the connecting belt and pulley.
Also the two pick Invite example embodiment is directed to the same direction while being disposed one on top another.
According to a related art of the present invention, in a transfer apparatus for holding and transferring an object to be processed, a rotary base that is rotatably supported by a base, and a first arm unit and a second arm that are disposed in a transfer chamber A first and a second arm mechanism, wherein the first arm portion is rotatably supported by the rotary base, and the first arm portion and the pick portion are connected to be able to bend and extend in this order. A drive link mechanism coupled to each first arm portion of the first and second arm mechanisms to bend and extend the first and second arm mechanisms; a first drive source that rotationally drives the rotary base; and the drive A second drive source that drives the link mechanism; and a housing that is attached to the base and that hermetically accommodates the first drive source and the second drive source in the transfer chamber. It is a conveying device.
Further, for example, the two pick parts are arranged in different directions on the same plane, and the opening angle of the two pick parts is set in a range of 60 to less than 180 degrees.
For example, the power of the second drive source is transmitted to the drive arm portion via a power transmission mechanism including a pulley and a connecting belt.
Also the two pick Invite example embodiment is directed to the same direction while being disposed one on top another.
For example , as defined in claim 4, the base end portions of the two first arm portions are rotatably supported while being spaced apart from each other on the same plane.
Also, as prescribed in example請Motomeko 5, wherein the first and second arm mechanisms, the other arm mechanism is degenerated when one of the arm mechanism is extended by pivoting the swinging motion of the drive linkage To be operated.

The related art of the present invention includes a plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other, a plurality of drive sources coupled to each of the plurality of drive shafts, and a plurality of drive shafts. A light emitting unit that emits detection light along the axial direction in a central drive shaft disposed at the center of the light source, a light receiving unit that receives reflected light of the detection light, and the detection that is provided on the central drive shaft A reflecting member that reflects light in the radial direction of the central drive shaft, a light passage window portion that is provided on the central drive shaft and allows detection light reflected by the reflective member to pass therethrough, and disposed on the outer periphery of the central drive shaft A position identification pattern portion having a light reflection area for reflecting detection light that is provided on the drive shaft and passed through the light transmission window portion toward the reflection member and a light absorption area for absorbing the detection light, and an output of the light receiving portion Based on the direction of rotation of the plurality of drive shafts A shaft position detecting means for obtaining a positional relationship definitive, a drive mechanism characterized by comprising a.

Thus, the detection light is radiated from the light emitting portion along the central drive shaft among the plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other, and this detection light is provided on the central drive shaft. The light is reflected by the reflecting member and irradiated to the position identification pattern portion provided on the other drive shaft, and the reflected light is received by the light receiving portion through the optical path in the reverse direction. Based on this, it becomes possible to recognize the relative positional relationship between the plurality of drive shafts.
In this case, the light emitting unit and the light receiving unit are fixed to a housing side that houses the drive source.

The related art of the present invention includes a plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other, a plurality of drive sources coupled to each of the plurality of drive shafts, and a plurality of drive shafts. A position identification pattern portion provided on a drive shaft other than the central drive shaft disposed at the center of the light source, and a light passage window portion provided on the central drive shaft for taking in reflected light from the position identification pattern portion. Based on a reflection member that reflects light that has passed through the light passage window portion along the axial direction of the central drive shaft, an image sensor portion that receives light reflected by the reflection member, and an output of the image sensor portion And a shaft position detecting means for obtaining a positional relationship in the rotational direction of the plurality of drive shafts.
Thus, a position identification pattern portion is provided on a drive shaft other than the central drive shaft among a plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other, and reflected light from the position identification pattern portion is Since the reflecting member provided on the central drive shaft reflects the light along the axial direction, and the reflected light is received by the image sensor unit, the position identification pattern unit of the position identification pattern unit is based on the output from the image sensor unit. By recognizing the image, it is possible to recognize the relative relationship between the plurality of drive shafts.

In this case, for example, the image sensor unit is fixed to a housing side that houses the drive source.
Further, for example, an illuminating means for irradiating the position identification pattern portion with illumination light is provided.
Further, for example, the position identification pattern has different color regions arranged.
Further, for example, the position identification pattern has different figures arranged.
Further, for example, the position identification pattern has regions of different brightness.
The related art of the present invention is a drive mechanism characterized in that it is used as a drive mechanism for driving any one of the conveying devices described above.
Further, for example , as defined in claim 6, as the bearings of the first and second arm mechanisms of the transport mechanism, those obtained by subjecting the surface of an aluminum alloy housing to a hard sulfuric acid alumite treatment are used.

According to the transport apparatus of the present invention, the following excellent effects can be exhibited.
By the invention according to Claim cited claims 1 and this lever, the entire device is to be able to pivot in a first drive source, first and second arm mechanisms is a second drive source via the drive linkage Since it can be extended and retracted, it can be operated with a small number of drive sources, and since the structure is simple, the apparatus cost can be greatly reduced.
Particularly, according to the engagement Ru invention請Motomeko 2, since it is sufficient to pivot the entire device by a predetermined angle less than 180 degrees which is the opening angle between the two pick when the replacement operation of the object to be processed, the processed The body replacement operation can be performed quickly.

According to the related art of the present invention , the drive arm portion is directly connected to the drive shaft of the second drive source that is rotatably supported coaxially with the rotation shaft of the rotary base. In addition, a power transmission mechanism including a connecting belt or the like is not required, the structure of the apparatus can be simplified, and the apparatus cost can be reduced correspondingly.
According to the related art of the present invention, the detection light is radiated from the light emitting unit along the central drive shaft among a plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other. The light is reflected by the reflecting member provided on the drive shaft and applied to the position identification pattern portion provided on the other drive shaft, and the reflected light is received by the light receiving portion through the optical path in the reverse direction. The relative positional relationship among the plurality of drive shafts can be recognized based on the output from the unit.

According to the related technology of the present invention , a position identification pattern portion is provided on a drive shaft other than the central drive shaft among a plurality of hollow pipe-shaped drive shafts that are coaxially rotatable with each other. The reflected light is reflected along the axial direction by the reflecting member provided on the central drive shaft, and the reflected light is received by the image sensor unit. Based on the output from the image sensor unit, By recognizing the image of the position identification pattern portion, it is possible to recognize the relative relationship between the plurality of drive shafts.

Hereinafter, an embodiment of a transport device according to the present invention will be described in detail with reference to the accompanying drawings.
<First embodiment>
FIG. 1 is a plan view showing a first embodiment of the transfer apparatus of the present invention, FIG. 2 is a plan view showing a state where one arm mechanism of the transfer apparatus shown in FIG. 1 is extended, and FIG. 3 is a transfer apparatus shown in FIG. FIG. 4 is a sectional view showing the internal structure of the rotating base.
The transport device 20 includes a rotating base 24 that is rotatably supported by a base 22 (see FIG. 3), and a pair of arm mechanisms that are supported by the rotating base 24 so as to be capable of turning and bending, that is, a first arm mechanism. 26, the second arm mechanism 28, a drive link mechanism 30 that selectively bends and stretches the first and second arm mechanisms 26, 28, and a first drive source 32 that rotationally drives the rotary base 24 (see FIG. 3). ) And a second drive source 34 (see FIG. 3) for driving and swinging and turning the drive link mechanism 30 to bend and stretch it.

  First, the base 22 is, for example, a bottom plate of a transfer chamber of a cluster tool type processing system, and the transfer chamber is maintained in a vacuum state. A plurality of processing chambers (not shown) are connected around the transfer chamber. Drive shafts 38 and 40 that are coaxial with each other are inserted into a through hole 36 formed in the base 22. A motor box 44 made of a hollow housing is airtightly attached to the lower surface side of the base 22 via a sealing member 42 such as an O-ring, for example. Two drive sources 32 and 34 are accommodated.

  The first and second drive sources 32 and 34 are each composed of, for example, a step motor (pulse motor), and are configured by stators 32A and 34A and rotors 32B and 34B, respectively. The rotor 32B of the first drive source 32 is connected to a hollow (pipe-like) outer drive shaft 38, while the rotor 34B of the second drive source is connected to an inner drive shaft 40. A bearing 46 is interposed between the drive shafts 38 and 40 and is rotatably supported. Although not shown, the outer drive shaft 38 is rotatably supported on the base 22 side by a bearing using a magnetic fluid seal. Here, the first and second drive sources 32 and 34, both drive shafts 38 and 40, and the like are configured as a part of a drive mechanism described later.

  The rotating base 24 is provided at the upper ends of the rotating shafts 38 and 40. The rotation base 24 has a predetermined width, and here, the inside is made hollow and extends by a predetermined length in the radial direction (horizontal direction). The upper end of the outer drive shaft 38 is directly connected and fixed to the rotary base 24 so that both rotate together. On the other hand, the upper part of the inner drive shaft 40 passes through the rotary base 24 and is supported by the rotary base 24 via a bearing 48 so as to be rotatable with respect to each other. Therefore, this inner drive shaft 40 becomes the turning center C1 of the entire apparatus of the transport device. Then, two fixed shafts 50 and 52 are erected and fixed on the upper surface of the rotating base 24 on the base end side with a predetermined interval. The first and second arm mechanisms 26 and 28 are rotatably attached to the fixed shafts 50 and 52, respectively.

First, the first arm mechanism 26 is mainly configured by a hollow first arm portion 26A, a similarly hollow second arm portion 26B, and a pick portion 26C that actually places and holds the wafer W. ing. A base end portion of the first arm portion 26A is rotatably supported by the fixed shaft 50 via a bearing 50A, and a large pulley 54 is fixed to the fixed shaft 50 so as to be integrated with the fixed shaft 50. ing.
A rotating shaft 56 penetrating upward is provided at the tip of the first arm portion 26A via a bearing 56A. A small pulley 58 is fixed to the rotating shaft 56 and rotates together with the rotating shaft 56. A connecting belt 60 is stretched between the small pulley 58 and the large pulley 54 so that power can be transmitted. The diameter ratio of the small pulley 58 and the large pulley 54 is 1: 2, and the small pulley 58 rotates at a double rotation angle with respect to the large pulley 54.

  Further, the upper end portion of the rotating shaft 56 is provided so as to penetrate into the base end portion of the second arm portion 26B, and the upper end thereof is fixed to the upper surface of the second arm portion 26B. 26B rotates together with the rotary shaft 56. A small pulley 62 is rotatably supported on the rotary shaft 56 via a bearing 56B. Further, the small pulley 62 is fixed to the upper end of a hollow fixed shaft 64 having a coaxial structure through the rotary shaft 56, and the fixed shaft 64 has a predetermined length and is fixed to the same. The lower end penetrates the second arm portion 26B and extends downward, and is fixed and integrated with the upper surface of the first arm portion 26A. A bearing 56C is interposed between the rotary shaft 56 and the fixed shaft 64, and the fixed shaft 64 is rotatably supported by the second arm portion 26B via the bearing 64A.

  A rotating shaft 66 is rotatably supported at the tip of the second arm portion 26B via a bearing 66A. The upper end of the rotating shaft 66 projects upward and protrudes from the upper end. The base end portion of the pick portion 26C is fixedly provided. A large pulley 68 is fixed to the rotary shaft 66, and a connecting belt 70 is stretched between the large pulley 68 and the small pulley 62 so that power can be transmitted. . The diameter ratio of the small pulley 62 and the large pulley 68 is 1: 2, and the large pulley 68 rotates at a rotation angle that is 1/2 times that of the small pulley 62. As a result, when the first arm mechanism 26 is bent and extended using the drive link mechanism 30 with the rotation base 24 fixed, the pick portion 26C moves forward and backward in one direction. It has become.

  On the other hand, the second arm mechanism 28 is configured in the same manner as the first arm mechanism 26 although it is symmetrical. That is, the second arm mechanism 28 is mainly configured by a hollow first arm portion 28A, a similarly hollow second arm portion 28B, and a pick portion 28C that actually places and holds the wafer W. ing. The base end portion of the first arm portion 28A is rotatably supported by the fixed shaft 52 via a bearing 52A, and a large pulley 74 is fixed to the fixed shaft 52 so as to be integrated with the fixed shaft 52. ing.

  A rotating shaft 76 penetrating upward is provided at the tip of the first arm portion 28A via a bearing 76A. A small pulley 78 is fixed to the rotating shaft 76 and rotates together with the rotating shaft 76. A connecting belt 80 is stretched between the small pulley 78 and the large pulley 74 so that power can be transmitted. The diameter ratio of the small pulley 78 and the large pulley 74 is 1: 2, and the small pulley 78 is rotated at a double rotation angle with respect to the large pulley 74.

  Further, the upper end portion of the rotating shaft 76 is provided so as to penetrate the inside of the base end portion of the second arm portion 28B, and the upper end thereof is fixed to the upper surface of the second arm portion 28B. 28B rotates together with the rotary shaft 76. A small pulley 82 is rotatably supported on the rotary shaft 76 via a bearing 76B. Further, the small pulley 82 is fixed to the upper end of a hollow fixed shaft 84 having a coaxial structure through the rotary shaft 76, and the fixed shaft 84 has a predetermined length and is fixed to the same. The lower end penetrates the second arm portion 28B and extends downward, and is fixed to and integrated with the upper surface of the first arm portion 28A. A bearing 76C is interposed between the rotary shaft 76 and the fixed shaft 84, and the fixed shaft 84 is rotatably supported by the second arm portion 28B via the bearing 84A.

  Further, a rotary shaft 86 is rotatably supported at the front end portion of the second arm portion 28B via a bearing 86A, and the upper end portion of the rotary shaft 86 projects upward and protrudes. The base end portion of the pick portion 28C is fixedly provided. A large pulley 88 is fixed to the rotating shaft 86, and a connecting belt 90 is stretched between the large pulley 88 and the small pulley 82 so that power can be transmitted. . The diameter ratio of the small pulley 82 and the large pulley 88 is 1: 2, and the large pulley 88 rotates with respect to the small pulley 82 at a rotation angle of 1/2 times. As a result, when the second arm mechanism 28 is bent and extended using the drive link mechanism 30 as described later with the rotation base 24 fixed, the pick portion 28C moves forward and backward in one direction. It has become.

  Here, as is clear from FIG. 1, the two pick parts 26C, 28C are located on the same plane (horizontal plane), the traveling directions of the pick parts 26C, 28C are different, and the opening angle θ is For example, although it depends on the size of the wafer W, it is set to about 60 degrees. The opening angle θ is set within a range where the wafers do not interfere with each other, for example, within a range of 60 to less than 180 degrees.

Next, the drive link mechanism 30 that characterizes the present invention will be described.
As shown in FIG. 1, the drive link mechanism 30 includes a drive arm portion 92 that is pivotally driven by the second drive source 34 (see FIG. 3), and two driven arm portions 94A and 94B connected to the drive arm portion 92. And is mainly composed. Specifically, as shown in FIG. 4, a rotary shaft 96 is provided at the tip of the rotary base 24 so as to be rotatable via a bearing 96A. A driven pulley 98 is fixedly provided on the rotating shaft 96, and a driving pulley 100 is fixedly provided on the driving shaft 40 in the rotating base 24. The connecting belt 102 is stretched between the drive pulley 100 and the driven pulley 98 so that the power of the second drive source 34 can be transmitted. That is, here, the drive pulley 100, the driven pulley 98, and the connecting belt 102 form a power transmission mechanism.

The upper end portion of the rotating shaft 96 protrudes upward from the rotating base 24, and the base end portion of the drive arm portion 92 is connected to the upper end portion so that both can rotate together. It has become. Therefore, by rotating the drive shaft 40 forward and backward, the drive arm portion 92 also turns in the forward and reverse directions. The drive arm portion 92 has a predetermined length, and the base end portions of the two driven arm portions 94A and 94B having a predetermined length are respectively connected to the support pins 104A and 104B. It is rotatably provided in a juxtaposed state via a bearing (not shown).
The distal end of one driven arm 94A is rotatably connected to the upper surface of the central portion of the first arm portion 26A of the first arm mechanism 26 via a support pin 106A and a bearing 106B (FIG. 3). reference). Similarly, the distal end portion of the other driven arm 94B is rotatably connected to the upper surface of the central portion of the first arm portion 28A of the second arm mechanism 28 via a support pin 108A and a bearing 108B ( (See FIG. 3).

  As a result, when the drive arm portion 92 is rotated by a predetermined angle to one side, as shown in FIG. 2, one pick portion 26C moves forward greatly, and the other pick portion 28C moves backward by a slight distance. When 92 is rotated to the other side by a predetermined angle, each pick part 26C, 28C performs the operation opposite to the above. That is, the first and second arm mechanisms 26 and 28 can be selectively bent and stretched by rotating the drive link mechanism 30 forward and backward.

Next, the operation of the first embodiment configured as described above will be described.
First, when the transport device 20 is oriented in a predetermined direction, the first and second drive sources 32 and 34 shown in FIG. 3 are rotated in synchronization with each other. At the same time, the first and second arm mechanisms 26 and 28 are directed in a predetermined direction in a folded state (degenerated state).

Next, in order to extend and advance one pick part, for example, the pick part 26C as shown in FIG. 2, first, the second drive source 34 is moved in a predetermined direction with the first drive source 32 stopped. Is rotated by a predetermined angle or a predetermined number of rotations.
Then, this rotational driving force is transmitted to the rotating shaft 96 via the driving shaft 40, the driving pulley 100, the connecting belt 102, and the driven pulley 98 to rotate it. Then, the drive arm portion 92 of the drive link mechanism 30 that is integrally connected to the rotating shaft 96 rotates as indicated by an arrow A in FIG. 2, and then, the driven follower that is connected to the drive arm portion 92. Since the arm portion 94A is pushed in an oblique direction as indicated by an arrow B, the first arm portion 26A of the first arm mechanism 26 to which the distal end portion of the driven arm portion 94A is coupled is fixed to the fixed shaft 50 (see FIG. 3). Is rotated as shown by arrow C (see FIG. 2). Then, the large pulley 54 in the first arm portion 26A relatively rotates (actually, the first arm portion 26A rotates without rotating the large pulley 54), and this rotational driving force is applied to the connecting belt 60, the small pulley. This driving force is transmitted to the rotary shaft 66 through the small pulley 62, the connecting belt 70 and the large pulley 68. As a result, the first arm portion 26A, the second arm portion 26B, and the pick portion 26C are changed from the folded state to the extended state as shown in FIG. 2, and as a result, the pick portion 26C remains in the same direction, and the arrow D As shown in FIG. Thereby, the pick part 26C can be inserted into a predetermined processing chamber (not shown).

At this time, the other second arm mechanism 28 moves to a position retracted backward by a small distance, as is apparent from a comparison between FIG. 1 and FIG. When the second drive source 34 is rotated in the reverse direction, the first arm mechanism 26 is retracted along a path opposite to the above.
Further, in order to extend the other second arm mechanism 28 forward, an operation reverse to that described above may be performed. The pick portions 26C and 28C of the first and second arm mechanisms 26 and 28 move forward or backward along line segments L1 and L2 passing through the rotation center C1 of the entire apparatus.

As described above, for example, when replacing a wafer in the processing chamber, unlike the conventional transfer apparatus, after the processed wafer W is taken out, the entire transfer apparatus 20 is opened. If the other pick part holding the unprocessed wafer W can be directed to the processing chamber by turning by an angle θ, for example, 60 degrees, the wafer W can be exchanged quickly.
In addition, when the wafer W is held in one pick part and the other pick part is empty, the pick part on the side holding the wafer W is moved when the empty pick part is moved forward or backward. Therefore, even if the empty pick part is moved forward or backward at a high speed, the wafer W does not slip from the other pick part. Can be performed more quickly.

<Second embodiment>
Next, a second embodiment of the present invention will be described.
5 is a perspective view showing a second embodiment of the present invention, FIG. 6 is a plan view showing a state in which one arm mechanism is extended in the second embodiment, and FIG. 7 is a partial sectional view showing the second embodiment. 8 is a diagram schematically showing a series of operation states of the second embodiment. In the second embodiment, the same components as those described in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted.

  The differences between the second embodiment and the first embodiment are as follows. That is, in the first embodiment, the base end portions of the first and second arm mechanisms 26 and 28 are supported on the rotating base 24 by two different shafts, that is, the fixed shafts 50 and 52, respectively, so as to be rotatable. However, in the second embodiment, it is supported on the same fixed shaft so as to be rotatable. In the first embodiment, the pick parts 26C and 28C are arranged in different directions on the same plane. In the second embodiment, the pick parts 26C and 28C are arranged one above the other and are directed in the same direction. . The state in which the pick portions 26C and 28C are arranged one above the other in this way has the same structure in the other embodiments described below.

As shown in FIG. 7, one fixed shaft 110 is erected and fixedly provided on the rotary base 24. The fixed shaft 110 is set longer than the fixed shafts 50 and 52 (see FIG. 3) of the first embodiment. In practice, the fixed shaft 110 is provided so as to be displaced in the lateral direction with respect to the drive shaft 38 for turning the rotary base 24. This is the same as in the first embodiment.
The large pulley 54 of the first arm mechanism 26 and the large pulley 74 of the second arm mechanism 28 are fixedly attached to the one fixed shaft 110 so as to be aligned vertically. The first arm portion 26A of the first arm mechanism 26 and the first arm portion 28A of the second arm mechanism 28 are provided around the large pulleys 54 and 74. In this case, since the first and second arm mechanisms 26 and 28 overlap each other, a fixed shaft 64 that connects the first and second arm portions 26A and 26B and 28A and 28B to prevent mutual interference. The length of 84 is set a little longer.

  In the first embodiment, the tip ends of the two driven arm portions 94A and 94B of the drive link mechanism 30 are both rotatably supported on the upper surface side of the first arm portions 26A and 28A (FIG. 3). In this second embodiment, as shown in FIG. 7, the first arm portions 26A and 28A have different height levels, so that the tip of one driven arm portion 94A is the lower surface of the first arm portion 26A. The tip of the other driven arm portion 94B is rotatably supported on the upper surface side of the first arm portion 28A as in the first embodiment. Thereby, although both heights 26C and 28C differ, they can advance and retreat toward the same direction. In the embodiment, a Z-axis moving mechanism (not shown) for moving the entire apparatus in the vertical direction (Z direction) is provided in order to match the height levels of both pick parts 26C and 28C during operation.

  FIG. 8 schematically shows the operation of the transport apparatus of the second embodiment. FIG. 8A shows a state where the second arm mechanism 28 is extended and the first arm mechanism 26 is retracted. As a result, when the drive link mechanism 30 is turned in the opposite direction, the second arm mechanism 28 begins to retract and the first arm mechanism 26 extends as shown in FIG. 8B. Start. At this time, the pick portion 26C of the first arm mechanism 26 temporarily retracts slightly. When the drive link mechanism 30 is further turned in the opposite direction, the second arm mechanism 28 continues to further degenerate and the first arm mechanism 26 continues to extend as shown in FIG. 8C. At this time, both pick parts 26C and 28C are shown in a state where they overlap each other. When the drive link mechanism 30 is further turned in the opposite direction, as shown in FIG. 8D, the second arm mechanism 28 is most contracted, whereas the first arm mechanism 26 is most extended. Thus, both pick portions 26C and 28C are exchanged. In actual operation, the entire apparatus is slightly moved upward or downward in order to adjust the height levels of both pick portions 26C and 28C at the time shown in FIG. 8C.

  As described above, in the case of the second embodiment, only the two motors of the first and second drive sources 32 and 34 have the first pick portions 26C and 28C arranged so as to overlap each other in the vertical direction. In addition, the second two arm mechanisms 26 and 28 can be bent and extended, so that the device structure can be simplified and the cost can be reduced.

<Third embodiment>
Next, a third embodiment of the present invention will be described.
9 is a plan view showing a state where both arm mechanisms of the third embodiment of the present invention are retracted, FIG. 10 is a plan view showing a state where one arm mechanism of the third embodiment is extended, FIG. FIG. 4 is a partial cross-sectional view mainly showing a portion of a drive link mechanism. Note that the same components as those in the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.
Here, as in the case of the second embodiment, the pick portions 26C and 28C are superposed vertically, and the base end portions of the first and second arm mechanisms 26 and 28 are coaxially rotatable, but are greatly different. The point is that the drive arm portion 92 (see FIG. 1) of the drive link mechanism 30 is replaced with a small small link mechanism 112. That is, as apparent from comparison with FIG. 4, a small link mechanism 112 is provided here as shown in FIG. 11 instead of the drive arm portion 92 shown in FIG. 4.

The small link mechanism 112 includes a first small arm portion 114 and a second small arm portion 116, and both the arm portions 114 and 116 are connected to be able to bend and extend. Specifically, the first small arm portion 114 is in a hollow state, and the upper end portion of the rotation shaft 96 at the distal end portion of the rotation base 24 passes through the proximal end portion of the first small arm 114. The upper end of the rotating shaft 96 is fixedly attached to the inner side of the upper surface of the first small arm portion 114. As a result, the first small arm portion 114 rotates together with the rotation shaft 96.
A large pulley 120 is rotatably provided on the rotating shaft 96 in the first small arm portion 114 via a bearing 118. A hollow outer shaft 122 that is coaxial with the outer periphery of the rotating shaft 96 is provided on the outer periphery of the rotating shaft 96. The lower end of the outer shaft 122 is fixed to the upper surface of the rotating base 24 and the upper end is It is fixed to the large pulley 120.

  Then, bearings 124A and 124B are interposed between the rotating shaft 96 and the outer shaft 122 and between the outer shaft 122 and the penetrating portion of the first small arm portion 114, respectively. It is made freely. A rotary shaft 128 is rotatably provided at the tip of the first small arm portion 114 via a bearing 126, and a small pulley 130 is fixed to the rotary shaft 128. A connecting belt 132 is stretched between the small pulley 130 and the large pulley 120 to transmit a driving force. The diameter ratio between the small pulley 130 and the large pulley 120 is set to 1: 2. The upper end portion of the rotating shaft 128 protrudes upward, and the base end portion of the second small arm portion 116 is fixedly connected to this portion, and the rotating shaft 128 and the second small arm portion 116 are Are designed to rotate together.

  A fixed shaft 133 is provided upright at the distal end of the second small arm portion 116, and a base end portion of one driven arm portion 94A is attached to a bearing 134A at a lower portion of the fixed shaft 133. The first arm mechanism 26 can be bent and stretched. Further, the base end portion of the other driven arm portion 94B is rotatably attached to the upper portion of the fixed shaft 133 via a bearing 134B, so that the second arm mechanism 28 can be bent and stretched. Yes. In the case of the illustrated example, the distal end portions of both driven arm portions 94A and 94B are rotatably supported on the upper surface sides of the first arm portions 26A and 26B, respectively, but this is not particularly limited. You may make it support to the side so that rotation is possible, and you may make it support alternately.

In the case of the third embodiment, when the second drive source 34 (see FIG. 3) is driven to rotate forward and backward, the small link mechanism 112 bends and stretches. At this time, both driven arm portions of the drive link mechanism 30 are driven. The fulcrum P1 at the base end portions of 94A and 94B reciprocates on the straight line 140 in FIG. As a result, the first and second arm mechanisms 26 and 28 are alternately extended or bent and retracted.
Thus, in the case of the third embodiment, only the two motors of the first and second drive sources 32 and 34 have the first pick portions 26C and 28C that are arranged so as to overlap each other. In addition, the second two arm mechanisms 26 and 28 can be bent and extended, so that the device structure can be simplified and the cost can be reduced.

<Fourth embodiment>
Next, a fourth embodiment of the present invention will be described.
12 is a plan view showing a state in which both arm mechanisms of the fourth embodiment of the present invention are retracted, FIG. 13 is a side view showing the fourth embodiment of the present invention, and FIG. 14 is one side of the fourth embodiment. It is a top view which shows the state which the arm mechanism is extending | stretching. Note that the same components as those in the first, second, and third embodiments are denoted by the same reference numerals, and the description thereof is omitted.
Here, as in the case of the third embodiment, the pick portions 26C and 28C are vertically overlapped, and the drive link mechanism 30 is provided with the small link mechanism 112. The fourth embodiment differs from the third embodiment in that the base end portions of the first arm portions 26A, 28A of the first and second arm mechanisms 26, 28 are supported by the same fixed shaft. Rather, as in the case of the first embodiment, the two fixed shafts 50 and 52 provided in parallel are individually supported to be rotatable. In the fourth embodiment, both the pick parts 26C, 28C are arranged so as to overlap each other and prevent the first arm part 26A, the second arm part 26B, the pick part 26C from interfering with each other. The second arm mechanism including the first arm portion 28A, the second arm portion 28B, the pick portion 28C, and the base end portion 28D of the pick portion 28C above the first arm mechanism 26 including the base end portion 26D of the pick portion 26C. 28 is arranged.

  In the case of the fourth embodiment, the same operational effects as those of the third embodiment can be exhibited. That is, the first and second arm mechanisms 26 and 28 each having two pick parts 26C and 28C arranged so as to overlap each other by only two motors of the first and second drive sources 32 and 34 are provided. Therefore, the device structure can be simplified and the cost can be reduced.

<Fifth embodiment>
Next, a fifth embodiment of the present invention will be described.
FIG. 15 is a plan view showing a state where one arm mechanism of the fifth embodiment of the present invention is extended, and FIG. 16 is a view for explaining a connection state between the linear motor used as the second drive source and the drive link mechanism. FIG. Note that the same components as those in the first to fourth embodiments are denoted by the same reference numerals and description thereof is omitted.

  The fifth embodiment has substantially the same configuration as the previous third embodiment. The main difference in configuration is that the second embodiment has two driven arms of the drive link mechanism 30 as shown in FIG. The small link mechanism 112 is connected to the base end portions of the portions 94A and 94B, and the small link mechanism 112 is bent and stretched so that the base end portions of the driven arm portions 94A and 94B are reciprocated along the straight line 140. However, in the fifth embodiment, as shown in FIGS. 15 and 16, a linear motor 142 capable of precise position control is provided along the straight line 140. The linear motor 142 functions as the second drive source 34 shown in FIG.

A support rod 144 is attached and fixed to the moving body 142A of the linear motor 142, and a fixed shaft 133 is provided upright on the support rod 144. The bearings 134A and 134B are provided on the fixed shaft 133 in the same manner as described with reference to FIG. The base end portions of the driven arm portions 94A and 94B are attached and fixed so as to be rotatable.
In the case of the fifth embodiment, the linear motor 142 is used as the second drive source. Therefore, the second drive source 34 in the motor box 44 described in FIGS. The driving pulley 100, the driven pulley 98, and the connecting belt 102 can be eliminated. That is, since the base end side of the two driven arm portions 94A and 94B of the drive link mechanism 30 is directly and freely supported on the moving body 142A side of the linear motor 142, the linear movement thereof is performed. Thus, the driving pulley 100, the driven pulley 98, and the connecting belt 102 in the rotary base 24 are not necessary, and the configuration of the apparatus can be simplified correspondingly.

  In the case of the fifth embodiment, the base end portions of the two driven arm portions 94A and 94B can be reciprocated along the straight line 140 by reciprocating the moving body 142A of the linear motor 142. As in the case of the third embodiment (see FIG. 10), the first and second arm mechanisms 26, 28 can be bent and extended. As described above, in the case of the fifth embodiment, only the two motors of the first drive source 32 and the linear motor 142 serving as the second drive source are used, and the two pick parts 26C and 28C arranged so as to overlap each other in the vertical direction. Thus, the first and second arm mechanisms 26 and 28 having the above-described characteristics can be bent and extended, so that the structure of the apparatus can be simplified and the cost can be reduced.

<Sixth embodiment>
Next, a sixth embodiment of the present invention will be described.
17 is a plan view showing a sixth embodiment of the present invention, FIG. 18 is a plan view showing a state in which one arm mechanism of the sixth embodiment is extended, and FIG. 19 is a partial sectional view showing the sixth embodiment. FIG. 20 is a diagram schematically showing a series of operation states of the sixth embodiment. In addition, about the same component as the previous Examples 1-5, the same code | symbol is attached | subjected and the description is abbreviate | omitted.
The sixth embodiment has a configuration similar to that of the previous fourth embodiment. The main difference in the configuration is that in the fourth embodiment, the driving force of the second drive source 34 is used to drive the rotary base 24. The transmission is transmitted to both driven arm portions 94A and 94B via the pulley 100, the connecting belt 102, the driven pulley 98, and the small link mechanism 112. In this sixth embodiment, the base end portions of the both driven arm portions 94A and 94B are transmitted. And the drive shaft 40 of the second drive source 34 are connected by the drive arm portion 92 of the first embodiment shown in FIG.

  That is, in other words, the base end portion of the drive arm portion 92 is directly connected and fixed to the drive shaft 40 of the second drive source 34, so that the drive arm portion 92 is at the center of rotation of the rotary base 24. It will be rotatably supported by the part. Then, like the first embodiment shown in FIG. 1, support pins 104A and 104B (see FIG. 18) are erected and provided at the tip of the drive arm portion 92, and the support pins 104A and 104B are respectively provided The base end portions of the two driven arm portions 94A and 94B are rotatably supported via the bearing 150, respectively. In FIG. 19, only one driven arm portion 94A is shown.

Also in the case of the sixth embodiment, the base end portions of the first and second arm mechanisms 26 and 28 are rotated in a different axis in parallel with the rotation base 24 as in the case of the fourth embodiment. The pick parts 26C and 28C are also arranged so as to overlap each other so that they can bend and stretch in the same direction. Further, in the sixth embodiment, connecting projections 152, 154 extending in the horizontal direction are provided at substantially central portions of the first arm portions 26A, 28A, and the distal end portions of the follower arms 94A, 94B are provided. Are supported so as to be pivotable through bearings (not shown).
In the case of the sixth embodiment, the operation is substantially the same as in the case of the fourth embodiment. However, in the case of the sixth embodiment, since the drive arm portion 92 pivots about the drive shaft 40 of the second drive source 34, the base end portions of the two driven arm portions 94A and 94B are the same as the fourth embodiment. Unlike the case of the embodiment, an arcuate locus centering on the drive shaft 40 is reciprocated, whereby the first and second arm mechanisms 26 and 28 are bent and stretched in opposite directions. It will be.

  FIG. 20 schematically shows the operation of the transport apparatus of the sixth embodiment. FIG. 20A shows a state where the first arm mechanism 26 is extended and the second arm mechanism 28 is retracted. As a result, when the drive arm portion 92 is rotated and the drive link mechanism 30 is turned in the opposite direction, the first arm mechanism 26 starts to degenerate as shown in FIG. The second arm mechanism 28 hardly moves. When the drive arm portion 92 is further rotated and the drive link mechanism 30 is turned in the opposite direction, the first arm mechanism 26 continues to be further degenerated and the second arm mechanism 28 is moved as shown in FIG. Start stretching slightly. Then, when the drive arm portion 92 further rotates, at this time, the pick portions 26C and 28C overlap each other as shown in FIG. In this case, both the first and second arm mechanisms 26 and 28 are considerably degenerated. When the drive arm portion 92 is further rotated to turn the drive link mechanism 30 in the opposite direction, the first arm mechanism 26 maintains the contracted state as it is, as shown in FIGS. 20 (E) to 20 (G). On the other hand, the second arm mechanism 28 is gradually extended to be in the most extended state, whereby both the pick parts 26C and 28C are exchanged. In the actual operation, at the time shown in FIG. 20D, the entire apparatus is slightly moved upward or downward in order to adjust the height level of both pick portions 26C and 28C.

  Thus, in the case of the sixth embodiment, only the two motors of the first and second drive sources 32 and 34 have the first pick portions 26C and 28C that are arranged so as to overlap each other. In addition, the second two arm mechanisms 26 and 28 can be bent and extended, so that the device structure can be simplified and the cost can be reduced.

In addition, since the drive arm portion 92 is connected to the drive shaft 40 of the second drive source 34, a power transmission mechanism including a pulley and a connection belt becomes unnecessary, and the device configuration can be simplified correspondingly. it can.
Here, the case where the transfer device is provided in a vacuum atmosphere has been described as an example. However, the present invention is not limited to this, and the transfer device may be provided in an atmospheric pressure atmosphere. In addition, here, an example has been described in which a semiconductor wafer is taken in and out of the processing chamber by this transfer device and the wafer is replaced, but the processing chamber is not directly involved, and the transfer device is connected to the transfer device on the way of wafer transfer. You may make it provide.

<Seventh embodiment>
Next, a seventh embodiment of the present invention will be described.
FIG. 21 is a plan view showing a state in which both arm mechanisms are contracted in the transfer apparatus according to the seventh embodiment of the present invention. A connection mode in the vertical direction of the first and second drive sources, the rotation base, and the first and second arm mechanisms of this apparatus is as shown in FIG. Further, the connection in the vertical direction of the first and second drive sources, the rotation base, and the one arm mechanism of the apparatus is as shown in FIG.
The seventh embodiment is similar to the first embodiment, and the proximal arms 26A, 28A of the first and second arm mechanisms 26, 28 are flush with each other on the rotary base 24 (circular in FIG. 21). It is supported so as to be rotatable about axes that are spaced apart from each other. The picks 26C and 28C of the first and second arm mechanisms 26 and 28 are arranged in different directions on the same plane, and the opening angle of the picks 26C and 28C is set in a range of 60 to 180 degrees. However, the seventh embodiment is different from the first embodiment, and the rotation axis of the drive arm portion 92 of the drive link mechanism 30 is arranged coaxially with the rotation axis of the rotation base 24.

The operations of the first and second arm mechanisms 26 and 28 in the seventh embodiment are similar to the operations of the first embodiment and the sixth embodiment. That is, for example, it is assumed that the second arm mechanism 28 extends and moves the pick 28C forward from the initial state shown in FIG. 21 in which both the first and second arm mechanisms 26 and 28 contract. In this case, although the first arm mechanism 26 substantially maintains the contracted state, the angle between the base end arm 26A and the intermediate arm 26B increases with the rotation of the rotary base 24, so the pick 26C is retracted. This operation is similar to the operation shown in FIGS. 20 (D) to 20 (G). However, at this time, the pick 26C does not remain facing forward, but is directed obliquely as shown in FIG.
According to the seventh embodiment, there is an advantage that the overall structure becomes compact compared to the first embodiment. Further, according to the seventh embodiment, there is an advantage that it is not necessary to raise and lower the entire apparatus when switching the use of the first and second arm mechanisms 26 and 28 as compared with the sixth embodiment.

<Eighth embodiment>
Next, an eighth embodiment of the present invention will be described.
FIG. 22 is a plan view showing a state in which both arm mechanisms are contracted in the transfer apparatus according to the eighth embodiment of the present invention. FIG. 23 is a perspective view showing a state where one arm mechanism is extended in the transfer apparatus shown in FIG. A connection mode in the vertical direction of the first and second drive sources, the rotation base, and the first and second arm mechanisms of this apparatus is as shown in FIG. Further, the connection in the vertical direction of the first and second drive sources, the rotation base, and the one arm mechanism of the apparatus is as shown in FIG.

  The eighth embodiment is similar to the seventh embodiment, and the proximal arms 26A, 28A of the first and second arm mechanisms 26, 28 are spaced apart from each other on the same plane on the circular rotating base 24. Is supported so as to be rotatable around the center. The picks 26C and 28C of the first and second arm mechanisms 26 and 28 are arranged in different directions on the same plane, and the opening angle of the picks 26C and 28C is set in a range of 60 to 180 degrees. The rotation axis of the drive arm portion 92 of the drive link mechanism 30 is arranged coaxially with the rotation axis of the rotation base 24.

However, the eighth embodiment is different from the seventh embodiment, and the two driven arm portions 94A and 94B are U-shaped, arranged at different height levels, and arranged so as to cross each other. Specifically, as shown in FIG. 22, the driven arm portion 92A connected to the first arm mechanism 26 is closer to the second arm mechanism 28 than the drive arm portion 92 beyond the center line CL92. It is pivotally supported. Similarly, the driven arm portion 94B connected to the second arm mechanism 28 is pivotally supported by the drive arm portion 92 on the side closer to the first arm mechanism 26 beyond the center line CL92.
Here, the center line CL92 connects the centers CA and CB of the picks 26C and 28C of the first and second arm mechanisms 26 and 28 in the initial state in which both the first and second arm mechanisms 26 and 28 contract. It is a perpendicular bisector of line segment CA-CB.

  24A to 24E are diagrams schematically illustrating a series of operation states of the transport device illustrated in FIG. FIG. 24A shows an initial state in which both the first and second arm mechanisms 26 and 28 contract. When the rotary base 24 is rotated counterclockwise from this initial state, the second arm mechanism 28 extends to move the pick 28C forward, while the first arm mechanism 26 substantially maintains the contracted state ( 24B to 24E). At this time, since the driven arm portions 94A and 94B are arranged in the above-described manner, the movement acceleration generated in the pick 26C of the first arm mechanism 26 is reduced.

  In order to explain this reason, the pivot axis O of the drive arm portion 92, the connection point OA between the proximal end arm 26A and the second driven arm portion 94A, and the connection point between the proximal end arm 26B and the second driven arm portion 94B. Attention is paid to a line segment O-OA and a line segment O-OB that connect OB to each other. The transfer apparatus according to the eighth embodiment includes a line segment O-OA or a line segment O including the connection point OA or OB of the mechanism that is not extended (contraction side) of the first and second arm mechanisms 26 and 28. It can be configured so that the amount of change in -OB becomes small. For example, in the operation example shown in FIGS. 24A to 24E, when the rotary base 24 is rotated from the contracted state shown in FIG. 24A, the second arm mechanism 28 extends. The length of the line segment O-OB on the second arm mechanism 28 side increases. However, the length of the line segment O-OA on the first arm mechanism 26 side does not change so much until the extended state of the second arm mechanism 28 shown in FIG.

  As a result of such a configuration, the following operation is performed on the first arm mechanism 26 side on the contraction side as the rotation base 24 rotates. That is, first, as shown in FIGS. 24A to 24C, the angle between the base end arm 26A and the intermediate arm 26B gradually increases, and the pick 26C is slightly displaced rearward. However, next, as shown in FIGS. 24C to 24E, the angle between the proximal arm 26A and the intermediate arm 26B gradually decreases, and the pick 26C is slightly displaced forward. FIG. 24C shows the pivot axis O of the drive arm portion 92, the connection point OA between the base end arm 26A and the second driven arm portion 94A, and the connection point between the drive arm portion 92 and the driven arm portion 94A. A dead point state in which the three points O1 are aligned on a straight line is shown.

  As described above, in the eighth embodiment, the first arm mechanism 26 is in the dead center state while the second arm mechanism 28 is extended from the initial state in which both the first and second arm mechanisms 26 and 28 are contracted. It changes between the states sandwiching the three points O, OA, and O1 arranged in a straight line shown in FIG. Accordingly, the pick 26C of the first arm mechanism 26 on the contraction side performs a slow operation of retracting slightly first and then moving forward slightly. Also, the stroke of the pick 26C is small. Note that the pick 28C of the second arm mechanism 28 performs the same operation even when the first arm mechanism 26 extends from the initial state where both the first and second arm mechanisms 26, 28 contract.

  In order to confirm the above-mentioned effects, a comparative experiment was performed with the same specifications except for the device wheels and the link mechanism according to the seventh and eighth examples. In this experiment, the first arm mechanism 26 is extended from the initial state in which both the first and second arm mechanisms 26 and 28 contract, and the arm strokes of the first and second arm mechanisms 26 and 28 at this time are measured. did.

FIG. 25 is a graph showing the results of this comparison experiment. In FIG. 25, L71 and L81 indicate the arm strokes of the first arm mechanism 26 of the devices according to the seventh and eighth embodiments, respectively. L72 and L82 indicate the arm strokes of the second arm mechanism 28 of the devices according to the seventh and eighth embodiments, respectively. In FIG. 25, the horizontal axis indicates the rotation angle (°) of the rotary base 24, and the vertical axis indicates the arm stroke (mm).
As shown in FIG. 25, for example, when the arm stroke required for the first arm mechanism 26 is 600 mm, in the apparatuses according to the seventh and eighth embodiments, the rotation base 24 is rotated by about 70 degrees and about 80 degrees, respectively. It is necessary to make it. During this time, the arm stroke of the second arm mechanism 28 of the apparatus according to the seventh embodiment gradually increases to the maximum value of about 400 mm. On the other hand, the arm stroke of the second arm mechanism 28 of the apparatus according to the eighth embodiment takes a maximum value of about 100 mm when the rotary base 24 rotates about 40 degrees, and then decreases again.

  As described above, in the eighth embodiment, while one arm mechanism is extended, the pick of the other arm mechanism operates slowly, and the maximum value of the arm stroke is small. For this reason, the movement acceleration generated in the pick is reduced, and the wafer W on the pick is hardly displaced. Accordingly, the operation of the apparatus can be accelerated correspondingly, and the throughput can be increased.

<Description of drive mechanism>
In each of the above embodiments, the transport device that transports the object to be processed has been described. Next, a drive mechanism used in the transport device will be described in detail.
In a conventional drive mechanism that is generally used, for example, in the case of a coaxial biaxial structure, the drive source of each drive shaft is used to recognize the rotation speed, rotation angle, etc. of each drive shaft. An encoder (absolute or increment) or the like is provided, and a relative positional relationship between the drive shafts is obtained by calculating an output signal from the encoder. Since the encoder is provided in this way, the entire structure of the drive mechanism is complicated and the cost is increased, and the installation space for the encoders is also required, so that the size is inevitably increased. In addition, a wiring cord must be connected to the drive shaft in order to send a signal from the encoders. Therefore, the drive shaft itself has to have a finite rotation structure.

Therefore, in the drive mechanism of the present invention, the entire structure is simplified by using an optical sensor, and the relative positional relationship in the rotational direction between the drive shafts can be easily recognized. By knowing the relative positional relationship between the drive shafts, it is possible to determine the origin position, the state of the first and second arm mechanisms, for example, the state where both arm mechanisms are folded and retracted, and one of the arm mechanisms is the longest. Thus, it is possible to confirm a state in which the gate valve of the processing chamber is not interfered with the arm mechanism even when the gate valve of the processing chamber is closed.
FIG. 26 is an enlarged sectional view showing an example of the drive mechanism of the present invention, FIG. 27 is an explanatory diagram for explaining the positional relationship between the position identification pattern portion, which is the main part of the drive mechanism, and the reflecting member, and FIG. It is a top view which shows the state when an example of a pattern is expand | deployed linearly. The drive mechanism described here can be used in all the transport apparatuses of the first to eighth embodiments described above, but here, this drive mechanism is applied to the first embodiment shown in FIGS. Will be described as an example. Note that the same components as those shown in FIG. 3 are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 26, the drive mechanism 160 includes a plurality of hollow pipes that are coaxially rotatable with each other, two drive shafts 38 and 40 in the illustrated example, and each of these drive shafts 38 and 40. A plurality of coupled drive sources, in the illustrated example, two drive sources, that is, the first drive source 32 and the second drive source 34, and the axial direction of the central drive shaft 40 disposed in the central portion of the drive shafts 38 and 40 are arranged. A light emitting unit 162 that emits the detection light L1 along the light receiving unit 164 that receives the reflected light L2 of the detection light L1, a reflection member 166 that reflects the detection light L1 in a predetermined direction, and the reflected detection light A light passage window 168 that allows L1 to pass outward, and a drive shaft disposed on the outer periphery of the central drive shaft 40, here the other drive shaft 38, and a position identification that is irradiated with the detection light L1 A pattern unit 170; Based on the output of the light receiving unit 164 that receives the reflected light from the position identification pattern unit 170, the positional relationship in the rotational direction of the drive shafts 38, 40 is obtained by the shaft position detecting means 172 such as a microcomputer. It is configured. Note that the coupling of the drive shafts 38 and 40 includes not only the case of being coupled directly mechanically but also the case of non-contact coupling such as magnetic coupling.

Specifically, not only the outer drive shaft 38 but also the inner central drive shaft 40 has a hollow pipe shape, and the drive shafts 38 and 40 are rotatable with respect to each other by a bearing 46 interposed between the shafts. It is supported by. The central drive shaft 40 is connected to the second drive source 34 and thereby rotated forward and backward, and the outer drive shaft 38 is connected to the first drive source 32 and thereby rotated forward and reverse.
The light emitting unit 162 and the light receiving unit 164 are fixed side by side on the bottom side of the motor box 44 that is a housing for housing the first and second drive sources 32 and 34. As the light emitting unit 162 and the light receiving unit 164, an integrated reflection type optical sensor can be used. From the light receiving portion 164, detection light L1 is radiated along the axial direction of the hollow pipe-shaped central drive shaft 40. As the detection light L1, laser light having excellent straightness is preferable, but diffused light may be used. The wavelength of the detection light L1 can be set in all regions such as an infrared region, a visible light region, and an ultraviolet region.

  The reflecting member 166 is made of, for example, a reflecting mirror, and is attached and fixed to the inner wall side of the central drive shaft 40 so that the reflecting surface is inclined at an angle of, for example, 45 degrees, and the detection light L1 is centered. Reflecting at right angles toward the radial direction of the drive shaft 40 is possible. Then, for example, a circular opening is formed in the portion where the detection light L1 reflected by the reflecting member 166 hits the side wall of the central drive shaft 40 to form the light passage window 168. The light passage window 168 only needs to be able to pass the detection light L1 as described above. For example, when the center drive shaft 40 is formed of a transparent material such as a transparent plastic resin or quartz glass, Since the detection light L1 is transmitted through the side wall of the drive shaft 40, it is not necessary to provide the opening described above, and the entire side wall serves as a light passage window.

The position identification pattern 170 is provided along the circumferential direction of the inner wall of the outer drive shaft 38 where the detection light L1 that has passed through the light passage window 168 strikes. . FIG. 28 shows a development view of the position identification pattern unit 170. The position identification pattern unit 170 includes a light reflection area 170A that reflects the detection light L1 and a light absorption area 170B that absorbs the detection light L1. It becomes. Here, the two areas 170A and 170B each have a predetermined length.
As described in the first embodiment, the first and second arm mechanisms 26 and 28 (see FIGS. 1 to 3) are rotated by rotating the central drive shaft 40 in the forward and reverse directions by a predetermined rotation angle. For example, the length of the light reflection area 170A can be changed even if a gate valve (not shown) that can be opened and closed with the processing chamber arranged around the transfer chamber is closed. The gate valve and the first and second arm mechanisms 26 and 28 are set so as to be in a range (zone) where interference (collision) does not occur. On the other hand, the length of the light absorption area 170B is the same as that of the gate valve. A range (zone) that interferes with the second arm mechanisms 26 and 28 is set.

  Therefore, the shaft position detecting means 172 recognizes the relative position in the rotational direction of the drive shafts 38 and 40 based on the output of the light receiving unit 164 that receives the reflected light L2 from the position identifying pattern unit 170, and the gate. It is possible to determine whether or not the valve can be closed. This determination result is transmitted to a host computer or the like that controls the overall operation of the semiconductor manufacturing apparatus.

Next, the operation of the drive mechanism 160 configured as described above will be described.
First, as described in the first embodiment, when the center drive shaft 40 is rotated by a predetermined angle in the forward and reverse directions with the outer drive shaft 38 (rotation base 24: see FIG. 1) being fixed, The first and second arm mechanisms 26 and 28 can be selectively bent and extended, for example, so that the wafer can be carried in and out of the processing chamber. When the directions of the first and second arm mechanisms 26 and 28 are changed, both the drive shafts 38 and 40 may be rotated by a predetermined angle in synchronism. At this time, the first and second arm mechanisms 26 and 28 are rotated in a desired direction as a whole while maintaining the same bent posture.

In the transfer apparatus in which such a basic operation is performed, for example, when the gate valve that divides the transfer chamber and the processing chamber is closed or when the entire arm mechanisms 26 and 28 are rotated, the first and second arms It is necessary to always grasp what posture the mechanisms 26 and 28 are in.
Therefore, in order to recognize the positional relationship between the drive shafts 38 and 40 in the rotation direction, the detection light L1 is emitted from the light emitting unit 162. The detection light L1 passes through the center drive shaft 40 along the axial direction and is reflected by the reflecting member 166, so that the traveling direction is changed by approximately 90 degrees. The detection light L1 whose traveling direction has been changed passes through the light passage window portion 168 and irradiates the position identification pattern portion 170 provided along the circumferential direction on the inner wall of the outer drive shaft 38. When the detection light L1 is applied to the light reflection area 170A of the position identification pattern unit 170, the detection light L1 is reflected to become reflected light L2, and travels backward on the above-described optical path in the light receiving unit 164. Light will be received. Of course, when the detection light L1 is applied to the light absorption area 170B, the detection light L1 is absorbed, so that the reflected light L2 does not occur.

The shaft position detecting means 172 that receives the output of the light receiving unit 164 can recognize the positional relationship in the rotational direction between the drive shafts 38 and 40 based on the output. Here, the light emitting section 162 and the light receiving section 164 function as a zone identification sensor here. For example, when the light receiving section 164 does not receive the reflected light L2, the direction of the reflecting surface of the reflecting member 166 is as shown in FIG. This means that one of the two arm mechanisms 26 and 28 is extended by a predetermined length or more. In this case, if the gate valve is closed, there is a possibility of interference (collision). Therefore, it is prohibited to close the gate valve or rotate the entire arm mechanisms 26 and 28.
On the other hand, when the light receiving unit 164 receives the reflected light L2, the direction of the reflecting surface of the reflecting member 166 is directed to a part of the zone of the light reflecting area 170A in FIG. This means that both arm mechanisms 26 and 28 are both bent to a predetermined length or less, and in this case, there is no possibility of interference (collision). It is allowed to close the gate valve or rotate the entire arm mechanisms 26 and 28.

In this way, it is possible to recognize the relative positional relationship between the drive shafts 38 and 40, that is, the bending and extending states of the arm mechanisms 26 and 28. In this case, it is possible to eliminate the need for an expensive and large encoder required by the conventional apparatus, so that not only can the structure be simplified and the cost can be greatly reduced, but also contributes to miniaturization and space saving. can do.
In general, the first and second drive sources 32 and 34 are step motors or servo motors, but the determination result of the shaft position detection means 72 can be used as a determination criterion for the interlock function. According to this, for example, even if the host computer attempts to close the gate valve in accordance with software processing, the shaft position detecting means 172 outputs a signal indicating that the reflected light L2 is not received. In some cases, the arm mechanism and the gate valve interfere with each other, so that an interlock can be applied by an electric circuit configuration so as not to close the gate valve.

  In the above embodiment, the position identification pattern 170 is formed along the inner wall of the outer drive shaft 38. However, the present invention is not limited to this. The entirety may be formed as the position identification pattern 170. FIG. 29 shows a perspective view when the entire outer drive shaft 38 is formed as a position identification pattern 170. FIG. In FIG. 29, at least the inner wall surface of the light reflecting area 170A is polished so as to reflect light. On the other hand, at least the inner wall surface of the light absorbing area 170B is black anodized (the drive shaft 38 is Aluminium) to absorb light.

In the above embodiment, the case where the light emitting unit 162 and the light receiving unit 164 are used as a zone sensor for detecting a region having a certain width has been described as an example. However, the present invention is not limited to this, and a certain position (position) is detected. It may be used as a position sensor. In such a case, this fixed position can be set as the origin. FIG. 30 is a developed view showing a position identification pattern portion when used as such a position sensor. As shown in FIG. 30, a light absorption area 170 </ b> B is linearly provided at a predetermined position of the position identification pattern portion 170 with a slight width that can be recognized by the light receiving portion 164, and this position is the origin. Therefore, the other area is a light reflection area 170A. Note that the relationship between the light absorption area 170B and the light reflection area 170A may be reversed.
Thus, by using it as a position sensor, the origin of the relative positions of both drive shafts 38, 40, that is, the origin of both arm mechanisms 26, 28 can be obtained. As such an origin, for example, as shown in FIG. 1, it is possible to set a state in which both arm mechanisms 26 and 28 are bent and contracted equally.

In the case shown in FIG. 26, the case where the light receiving unit 164 is provided to detect the presence or absence of the reflected light L2 has been described as an example. However, instead of this, an image sensor unit is provided and the image of the position identification pattern unit 170 is provided. You may make it take in. FIG. 31 is an enlarged cross-sectional view showing a modified example of such a drive mechanism, and FIG. 32 is a plan view showing a state when an example of a position identification pattern corresponding to the modified example shown in FIG. 31 is developed linearly. The same components as those shown in FIGS. 26 to 30 are denoted by the same reference numerals, and the description thereof is omitted.
As shown in FIG. 26, instead of the light receiving unit 164 (see FIG. 26), an image sensor unit 180 made up of, for example, a CCD camera is provided so that the image of the position identification pattern unit 170 can be recognized. ing. In this case, when the portion of the position recognition pattern portion 170 is dark, it is preferable to provide illumination means for illuminating this portion. Therefore, in FIG. 31, instead of the light emitting unit 164 (see FIG. 26), an illumination unit 182 that can brighten a region having a certain area, such as an LED (light emitting diode), is provided. A part of the position identification pattern portion 170 can be illuminated by L3. In addition, when the position recognition pattern unit 170 is bright due to light from the outside, the illumination unit 182 is not necessary.

  When the image sensor unit 180 is provided as described above, the axial position detection unit 172 can recognize different brightness, recognize different colors, recognize different graphics, and the like. Here, if the position identification pattern portion 170 has a structure as shown in FIGS. 28 and 30, the light reflection area 170A and the light absorption area 170 can be recognized according to the difference in brightness. In addition, the position identification pattern unit 170 may be configured as shown in FIG.

  FIG. 32A shows the position identification pattern portion 170 divided into, for example, three areas of “black”, “gray”, and “white”, and these three areas are recognized by the difference in brightness. Can do. Each of the above regions may be formed in “gray” having different brightness. FIG. 32B shows the position identification pattern portion 170 divided into, for example, three regions having different colors of “red”, “blue”, and “yellow”, and these three regions are recognized by the difference in color. can do. 32 (C) and 32 (D) show patterns when used as position sensors, and three different figures are arranged. In the case of FIG. 32C, “★” mark, “●” mark, and “▲” mark are arranged, and in the case of FIG. 32D, “1” and “2” are arranged. Each character of “3” is arranged as a graphic, and the three positions can be recognized by the difference in the graphic. In the case of FIG. 32C and FIG. 32D, for example, the origin 1, origin 2, and origin 3 correspond to each other from the left, and the desired bending / extending states of the arm mechanisms 26, 28 are set as described above. It can be assigned corresponding to the origins 1 to 3.

  As the bearings of the first and second arm mechanisms 26, 28, those obtained by subjecting the surface of an aluminum alloy housing to a hard sulfuric acid alumite treatment can be applied. If the housing is made of an aluminum alloy, the arm mechanism can be prevented from falling due to its own weight, and the inertial force when operated can be reduced to improve the transport accuracy of the arm mechanism. Further, depending on the process, a magnetic field may be formed in the processing chamber. However, the aluminum alloy housing can prevent the arm mechanism from being shaken by the magnetic field. Furthermore, in a housing having an alumite treatment on the surface, the grease is sufficiently impregnated in the anodized film, so that the replenishment life of the grease can be extended.

  The drive mechanism has been described by taking a coaxial biaxial structure as an example, but the present invention can be applied to a case of three or more axes. In each of the above embodiments, a semiconductor wafer has been described as an example of an object to be processed. However, the present invention is not limited to this, and the transfer apparatus of the present invention can be applied to transfer a glass substrate, an LCD substrate, or the like. it can.

It is a top view which shows 1st Example of the conveying apparatus of this invention. It is a top view which shows the state which one arm mechanism of the conveying apparatus shown in FIG. 1 extended. It is sectional drawing which shows the conveying apparatus shown in FIG. It is sectional drawing which shows the internal structure of a rotation base. It is a perspective view which shows 2nd Example of this invention. It is a top view which shows the state which extended one arm mechanism in 2nd Example. It is a fragmentary sectional view showing the 2nd example. It is a figure which shows typically a series of operation states of 2nd Example. It is a top view which shows the state which the arm mechanism of 3rd Example of this invention has retracted. It is a top view which shows the state which one arm mechanism of 3rd Example is extending | stretching. It is a fragmentary sectional view which mainly shows the part of a drive link mechanism. It is a top view which shows the state which the arm mechanism of 4th Example of this invention has retracted. It is a side view which shows 4th Example of this invention. It is a top view showing the state where one arm mechanism of the 4th example is extended. It is a top view showing the state where one arm mechanism of the 5th example of the present invention is extended. It is a fragmentary sectional view for demonstrating the connection state of the linear motor used as a 2nd drive source, and a drive link mechanism. It is a top view which shows 6th Example of this invention. It is a top view showing the state where one arm mechanism of the 6th example is extended. It is a fragmentary sectional view showing the 6th example. It is a figure which shows typically a series of operation states of 6th Example. It is a top view which shows the state which both the arm mechanisms in the conveying apparatus which concerns on 7th Example of this invention are shrink | contracting. It is a top view which shows the state which both the arm mechanisms in the conveying apparatus which concerns on 8th Example of this invention are shrink | contracting. It is a perspective view which shows the state which one arm mechanism of the conveying apparatus shown in FIG. 22 expanded. It is a figure which shows typically a series of operation states of the conveying apparatus shown in FIG. It is a graph which shows the result of a comparative experiment. It is an expanded sectional view which shows an example of the drive mechanism of this invention. It is explanatory drawing for demonstrating the positional relationship of the position identification pattern part which is the principal part of a drive mechanism, and a reflective member. It is a top view which shows the state when an example of a position identification pattern is expand | deployed linearly. It is a perspective view when the whole outer drive shaft is formed as a position identification pattern. It is an expanded view which shows the position identification pattern part when using as a position sensor. It is an expanded sectional view which shows the modification of a drive mechanism. It is a top view which shows the state when an example of the position identification pattern corresponding to the modification shown in FIG. 31 is expand | deployed linearly. It is a perspective view which shows an example of the conventional conveying apparatus.

Explanation of symbols

20 transport device 22 base 24 rotating base 26 first arm mechanism 26A first arm portion 26B second arm portion 26C pick portion 28 second arm mechanism 28A first arm portion 28B second arm portion 28C pick portion 30 drive link mechanism 32 First drive source 34 Second drive source 38 Drive shaft (outer drive shaft)
40 Drive shaft (central drive shaft)
92 Drive arm portion 94A, 94B Follow arm portion 112 Small link mechanism 114 First small arm portion 116 Second small arm portion 142 Linear motor 160 Drive mechanism 162 Light emitting portion 164 Light receiving portion 166 Reflective member 168 Light passage window portion 170 Position identification pattern Part 170A Light reflection area 170B Light absorption area 180 Image sensor part 182 Illumination means C1 Rotation center L1 Detection light L2 Reflection light L3 Illumination light W Semiconductor wafer (object to be processed)

Claims (6)

In a transport device for holding and transporting a workpiece,
A rotating base supported rotatably on the base;
A first arm unit, a second arm unit, and a pick unit that are connected to be able to bend and extend in this order, and the first arm unit is rotatably supported by the rotating base;
A drive link mechanism coupled to each first arm portion of the first and second arm mechanisms to bend and extend the first and second arm mechanisms;
A first drive source for rotationally driving the rotary base;
A second drive source for driving the drive link mechanism,
The drive link mechanism is
A drive arm unit rotatably supported on the rotation base and driven to rotate by the second drive source;
A first driven arm portion having one end rotatably connected to the drive arm portion and the other end connected to the first arm portion of the first arm mechanism;
And a second driven arm portion having one end rotatably connected to the drive arm portion and the other end connected to the first arm portion of the second arm mechanism.   The two pick parts are arranged in different directions on the same plane, and an opening angle of the two pick parts is set in a range of 60 to less than 180 degrees. The transfer apparatus according to 1.   3. The transport device according to claim 1, wherein power of the second drive source is transmitted to the drive arm portion via a power transmission mechanism including a pulley and a connecting belt. The proximal end of the two first arm portions, the conveying apparatus according to claim 1 to 3 Neu deviation or claim, characterized by being rotatably supported by spaced coplanar. 2. The first and second arm mechanisms are operated such that when one of the arm mechanisms is extended by a swinging and swinging operation of the drive link mechanism, the other arm mechanism is retracted. conveying apparatus according to any one of乃Itaru 4. The bearing according to any one of claims 1 to 5, wherein a bearing of the aluminum alloy housing is subjected to a hard sulfuric acid alumite treatment as a bearing of the first and second arm mechanisms of the transport mechanism. The conveying apparatus as described.

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