JP4507964B2 - Display device and manufacturing method of display device - Google Patents

Description

  The present invention relates to a display device and a method for manufacturing the same, and more particularly to a surface-emitting display device in which light-emitting elements such as organic EL elements are arrayed on a substrate and a desired emission color can be selectively extracted. And a manufacturing method thereof.

  In recent years, research and development of a flat display device that is lightweight and consumes little power has been actively conducted as a display device that replaces a cathode ray tube (CRT). Among these, display devices using self-luminous display elements (so-called light-emitting elements) such as inorganic EL elements and organic EL elements are attracting attention as display devices that can be driven with low power consumption.

  For example, (1) a configuration in which light emitting elements that emit light in blue, green, and red are arranged, and (2) a configuration in which a color filter is combined with a white light emitting element. (3) A configuration in which a color conversion filter is combined with a white or blue light emitting element has been proposed.

  In the configuration according to the above (1), the functional layer including the light emitting layer is patterned, but the accuracy is limited, and it is difficult to make the light emitting element and the light emitting element between minute and large.

  On the other hand, in the configurations (2) and (3), it is only necessary to cause each light emitting element to emit light in the same wavelength region, and therefore it is not necessary to create a functional layer including a light emitting layer for each color. . For this reason, the manufacturing process including the design of each light emitting element is simpler than the configuration according to (1). However, in the configuration of (2), unnecessary light emitting components are absorbed by the color filter, so that the light emission efficiency is lowered and the load is large for power consumption and element life. Furthermore, the transmission characteristics of color filters that are generally mass-produced cannot filter white light emitted from light-emitting elements into blue, green, and red with high color purity, and the extracted light has poor color reproducibility with a wide wavelength distribution. Only a display device can be used.

  In the configuration (3), the conversion efficiency of the color conversion filter is low, the manufacture of the color conversion filter is difficult, the life of the color conversion filter, the color purity of the luminescent color after color conversion, and the like are practical. Is difficult.

  On the other hand, the conventional display device is not optimized for the number of light emitting units having self-light emitting elements of each color (red (R), green (G), blue (B)), and has a color with poor luminous efficiency. In order to obtain the necessary luminance from the display pixel, it is necessary to pass a larger current than other display pixels with good luminous efficiency. As a result, the lifetime of the display pixel having a color with low luminous efficiency is shortened, and the white balance is shifted due to the different deterioration rates of the respective colors.

  In order to solve this problem, the light emission area of one of the display pixels of each color is made different from the light emission area of the display pixel of the other color, so that the light emission efficiency and deterioration rate of each self-light emitting element are obtained. It has been proposed to reduce the deviation of white balance due to the difference between the two (Patent Document 1).

  In addition, a method has been proposed in which RGB light emitting units are stacked through a connection layer to form a tandem white element and a full color is obtained using a color filter. For example, Patent Document 2 proposes that subpixels having different colors are stacked one above the other to adjust and optimize the RGB emission area.

JP 2001-290441 A JP 2004-79538 A

  However, in a display device having a resonator structure that resonates light emitted from the light emitting unit between the anode and the cathode, it is difficult to accurately set the optical distance of the resonance part. In addition, when an RGB stacked tandem white element is applied, the final light extraction amount varies greatly depending on the position setting of each RGB color, and therefore, the stacking order of the light emitting units and the setting of the number of light emitting units are very important. In patent document 2, there is no description about the easiness of taking out light by the order of lamination.

The present invention has been made to solve such problems. That is, the present invention includes a light emitting element in which a functional layer is disposed between an upper electrode and a lower electrode, and the light emitted from the functional layer is resonated and extracted with a resonance portion between the upper electrode and the lower electrode. In the display device in which the pixel is configured by combining at least three light emitting elements corresponding to different wavelengths, the optical distance of the resonant part in the first light emitting element and the optical of the resonant part in the second light emitting element Provided such that the optical distance of the resonance part in the first light emitting element is different from the optical distance of the resonance part in the third light emitting element. The film thickness between the upper electrode and the lower electrode and the functional layer is set so as to be a resonance part that resonates the target wavelength . On the light extraction surface side of the first light emitting element, a color filter that transmits light in a wavelength region intended by the first light emitting element out of the wavelength region that is resonated and extracted by the resonance unit is provided. The second light-emitting element is provided with a color filter that transmits light in a wavelength region intended by the second light-emitting element, out of the wavelength region that is resonated and extracted by the resonance unit, on the light extraction surface side of the second light-emitting element And

  According to the present invention, in the display device having the resonator structure including the pixel including at least three light emitting elements, the optical distance of the resonance part in the first light emitting element and the resonance part in the second light emitting element. The optical distance is equal, and the optical distance of the resonance part in the first light emitting element is different from the optical distance of the resonance part in the third light emitting element. Since it is sufficient to set two types as follows, a display device having a resonator structure can be realized easily and accurately.

  Here, the light emitting unit is a component excluding the cathode and the anode among the components constituting the conventional organic EL element, that is, a single light emitting layer, an electron injection layer, an electron transport layer, and a hole injection in the light emitting layer. It is a plurality of layers including a layer, a hole transport layer, and the like, and is a unit of a layer that generates light corresponding to one color or multiple colors. In addition, the functional layer is a layer unit excluding the cathode and the anode in the organic EL element, regardless of the conventional type (form having a single light emitting unit) or the tandem type. A structure including this functional layer, an upper electrode, and a lower electrode (including a transparent film such as a transparent conductive film) is referred to as a light emitting element. Further, three or more light emitting elements are arranged on a substrate to constitute one pixel, and the pixels are arranged in, for example, a matrix to form a planar display device.

  The resonating part in the light emitting element has, for example, a structure in which at least a functional layer is sandwiched between a mirror made of a light reflecting material and a semi-transparent half mirror, and the light emitted from the light emitting unit of the functional layer is mirrored. And the half mirror to resonate and take out from the half mirror side. As the half mirror, an almost transparent film having a refractive index different from that of an inorganic film or an organic film having a predetermined reflectance and transmittance and an organic film used as a light emitting unit is used. In addition, the resonance in the resonance part includes not only the case where the relative intensity is increased but also an interference state where the relative intensity is not so high. The light emitting units of the respective colors are set at positions where light can be easily extracted in order of decreasing luminous efficiency.

  In the display device having such a configuration, a stacked organic layer having the same configuration is used as the light emitting unit, and light in a wavelength region corresponding to the optical distance of the resonance portion between the mirror and the half mirror set in each light emitting element is emitted. It is taken out in a state enhanced by resonance. Therefore, while using a light emitting element having a light emitting unit of the same configuration, the optical distance between the mirror and the half mirror in each light emitting element and the stacking order so that the extraction efficiency of a desired light emission wavelength is sufficiently large, In addition, by designing the position, light of different emission colors can be extracted from each light emitting element.

  Therefore, by arranging each light emitting element in which the optical distance between the mirror and the half mirror is adjusted so that blue, green, and red light can be extracted with sufficient intensity, a display device for full color display is provided. Become.

  Moreover, in each light emitting element, the light emitting unit of each color is configured in the same element, so that the entire functional layer including the light emitting unit can be made the same. For this reason, it is not necessary to create the entire functional layer for each light emitting color of the light emitting element, and it is not necessary to set the margin of alignment between the functional layers required when creating the functional layer between the light emitting elements. The pitch can be narrowed, and a high aperture ratio can be achieved.

  And when the whole functional layer containing a light emitting unit is comprised by the same layer, a mirror and a half mirror are comprised as an electrode, and a transparent conductive film (transparent layer) is sandwiched with a functional layer between these. This transparent conductive film is used as an adjustment layer for adjusting the optical distance between the mirror and the half mirror. As used herein, the term “transparent” means having sufficient transmittance for a specific wavelength. Since the transparent conductive film is patterned by etching using a resist pattern formed by lithography as a mask, the patterning accuracy is higher than that of a functional layer that requires pattern formation using a metal mask or inkjet pattern formation. It will be well formed.

In the method for manufacturing a display device of the present invention, a functional layer is formed on a lower electrode, an upper electrode is formed on the functional layer, and a light emitting element having a resonance part between the upper electrode and the lower electrode In forming a pixel by combining at least three light emitting elements corresponding to different wavelengths, the optical distance of the resonance part in the first light emitting element of the pixel and the resonance in the second light emitting element The optical distances of the resonance parts in the first light emitting element are different from the optical distances of the resonance parts in the third light emitting element, and the upper part of the three light emitting elements In this method, the thickness of the functional layer between the electrode and the lower electrode becomes a resonance part that resonates the target wavelength . In the manufacturing method according to claim 14, on the light extraction surface side of the first light-emitting element, the wavelength region targeted by the first light-emitting element among the wavelength areas extracted by resonance at the resonance unit is obtained. A color filter that transmits the light of the second light emitting element is provided, and on the light extraction surface side of the second light emitting element, the second light emitting element transmits light in the target wavelength area of the wavelength area that is extracted by resonance at the resonance unit. A color filter is provided.

  In the present invention, when manufacturing a display device having a resonator structure including a pixel including at least three light emitting elements as a set, the optical distance of the resonance portion in the first light emitting element and the second light emitting element Since the optical distance of the resonance part is equal and the optical distance of the resonance part in the first light emitting element is different from the optical distance of the resonance part in the third light emitting element, the two types of optical distances are different. Since setting is sufficient, a display device having a resonator structure can be realized accurately and easily.

  Here, for example, when a resonance part is configured by sandwiching at least a functional layer including a light emitting unit between a mirror made of a light reflecting material and a light semi-transmissive half mirror, each light emitting element forming region on the substrate After forming the mirror or the half mirror, the step of patterning transparent conductive films (transparent layers) having different optical distances and the step of forming the light emitting units at once are performed in this order or reverse order.

  In such a manufacturing method, a laminated body of a light emitting unit having the same structure by being collectively formed on a mirror or a half mirror of each light emitting element forming region and a transparent conductive film having a different optical distance is provided. In addition, a light emitting element in which the stacking order of the light emitting units of the respective colors is optimized is formed. And by making it the same layer which formed the functional layer collectively, the whole can also be formed collectively and reduction of the number of manufacturing processes including the design of a functional layer is achieved.

  Therefore, according to the display device of the present invention, it is possible to extract light of a desired light emission color from each light emitting element with sufficient intensity while sharing a light emitting unit in each light emitting element. Therefore, high-definition display is possible by realizing miniaturization between the light-emitting elements and the light-emitting elements through the common use of the light-emitting unit, and color reproduction is achieved by extracting light of the desired emission color with sufficient intensity. Full color display with excellent performance is possible.

  In addition, according to the method for manufacturing a display device of the present invention, there is provided a display device capable of taking out light of a desired emission color from each light emitting element with sufficient intensity while collectively forming light emitting units in each light emitting element. can get. Therefore, by making the light-emitting element finer by using a common light-emitting unit, high-definition display is possible, and excellent light reproducibility is achieved by extracting light with a desired emission color with sufficient intensity. A display device capable of display can be more easily manufactured.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<Outline of display device>
FIG. 1 is a schematic diagram illustrating a schematic configuration of a display device according to the present embodiment. That is, in the display device according to this embodiment, the functional layers 10-1, 10-2, and 10-3 are arranged between the upper electrode 3 and the lower electrode 2, and the space between the upper electrode 3 and the lower electrode 2 is arranged. The substrate 1 is provided with at least three light emitting elements (organic EL elements EL1, EL2, and EL3) that resonate and extract the light emitted from the functional layers 10-1, 10-2, and 10-3 as resonating portions. At least three organic EL elements EL1, EL2, and EL3 constitute one pixel. In the example shown in FIG. 1A, the first organic EL element EL1 corresponding to the first color, the second organic EL element EL2 corresponding to the second color, and the first organic EL element EL2 corresponding to the third color. One pixel is composed of three organic EL elements EL3.

  In such a display device, in this embodiment, the resonance distance corresponding to the first organic EL element EL1 is used as the optical distance between the resonance portions of at least three organic EL elements EL1, EL2, and EL3 constituting one pixel. And the optical distance of the resonance part corresponding to the second organic EL element EL2, the optical distance of the resonance part corresponding to the first organic EL element EL, and the third It is characterized in that it is provided so that the optical distance of the resonance part corresponding to the organic EL element EL3 is different.

  In order to set the optical distance having the above relationship, in the example shown in FIG. 1, the functional layer 10-1 corresponding to the first organic EL element EL 1 and the lower electrode 2, and the second organic A common transparent conductive film 20a is provided between the functional layer 10-2 corresponding to the EL element EL2 and the lower electrode 2, and between the functional layer 10-3 corresponding to the third organic EL element EL3 and the lower electrode 2. Further, another transparent conductive film 20b having a height different from that of the transparent conductive film 20a is provided.

  That is, in order to set the optical distance of the resonance part, a transparent conductive film is provided between the functional layer and the lower electrode. However, when one pixel is constituted by three light emitting elements, two transparent conductive films are used. The optical distance is set. In this way, when the optical distance is set by a smaller number of transparent conductive films than the number of light emitting elements constituting the pixel, a transparent conductive film having a different height is formed for each light emitting element. Compared to the above, the number of processes can be reduced.

  In the example shown in FIG. 1A, one pixel is constituted by three light emitting elements (organic EL elements EL1, EL2, and EL3). In this case, the first color, the second color, and the third color are used. As described above, a full-color display device can be configured by using R (red), B (blue), and G (green). Further, the present invention can be applied even when the light emitting element includes more than three colors. In addition to the above three colors, one or more of cyan, magenta, and yellow may be added. In particular, there are many colors expressed in cyan in the natural world, so the color expression can be enhanced by adding cyan. If you use high-purity RGB alone, you can achieve over 100%.

  As described above, in the case where the light emitting element is configured by more than three light emitting elements, for example, when one pixel is configured by four light emitting elements, a transparent conductive film common to the three light emitting elements and the remaining Two types of transparent conductive film corresponding to one light emitting element, two types of transparent conductive film common to two light emitting elements, and two types of transparent conductive film common to the remaining two, There are three types of transparent conductive films common to the light emitting elements and transparent conductive films provided corresponding to the remaining two.

  Similarly, it is possible to correspond to five, six... Light emitting elements. That is, in the case where one pixel is configured by n (n is an integer of 3 or more) light emitting elements, the number of types of transparent conductive films is two or more (n−1) types or less, which is a feature of the present invention. Can be realized.

  In the display device shown in FIG. 1A, the optical distance is set in the resonance portion of the organic EL element, which is a light emitting element, using a transparent conductive film, but the optical distance is set except for the transparent conductive film. May be. For example, the thickness may be adjusted according to the thickness of each layer constituting the functional layer, or the portion corresponding to the transparent conductive films 20a and 20b shown in FIG.

  The functional layers 10-1, 10-2, and 10-3 of the organic EL elements EL1, EL2, and EL3 that are the respective light emitting elements are configured by various light emitting units. FIGS. 1B to 1G are configuration examples of light emitting units of each functional layer. Here, R is red, G is green, and B is blue. The example shown in FIG. 1B is a tandem type in which two light emitting units are stacked. The lower light emitting unit emits R and G, and the upper light emitting unit emits B. In addition, the example shown in FIG. 1C is a tandem type using the same two light emitting units as in FIG. 1B, but the light emitting units for emitting B on the lower side and R and G on the upper side are stacked. . Further, in the example shown in FIG. 1 (d), the light emitting unit is composed of one light emitting unit and emits white light, and FIG. 1 (e) is composed of the same single light emitting unit. It emits a single color of wavelength. The example shown in FIG. 1F is a tandem type in which three light emitting units are stacked, and are stacked in the order of G, R, and B from the lower side. In addition, the example shown in FIG. 1G is a tandem type in which four light emitting units are stacked, and are stacked in the order of G, B, R, and B from the lower side.

  In addition, the structure of the functional layer shown to FIG.1 (b)-(g) is an example, Other structures may be sufficient. For example, it is possible to configure the light emitting unit with three or more colors. That is, in addition to the three colors of R, G, and B, one or more of cyan, magenta, and yellow may be added to configure four or more colors. In particular, there are many colors expressed in cyan in the natural world, so the color expression can be enhanced by adding cyan.

  Hereinafter, a specific configuration of the present embodiment will be described. Here, a light emitting device having a tandem type functional layer in which four light emitting units shown in FIG. 1G are stacked will be described as an example.

<Specific configuration of display device>
FIG. 2 is a cross-sectional view schematically showing a configuration example of the display device according to the present embodiment. The display device shown in this figure is a full-color display formed by arranging, on a substrate 1, organic EL elements from which light of each color of red (R), blue (B), and green (G) is extracted as light emitting elements. It is a display device. Here, an organic EL element corresponding to red (R) is EL-R, an organic EL element corresponding to blue (B) is EL-B, and an organic EL element corresponding to green (G) is EL-G.

  Each organic EL element EL-R, EL-B, EL-G includes a lower electrode 2, transparent conductive films (transparent layers) 20a, 20b, functional layers 10R, 10B, 10G and an upper electrode 3 in order from the substrate 1 side. It has a laminated structure, and is configured as a so-called top emission type in which the emission wavelength generated in the functional layers 10R, 10B, and 10G is extracted from the side of the upper electrode 3 opposite to the substrate 1. Hereinafter, the detailed configuration of each member will be described.

  The substrate 1 is made of glass, silicon, a plastic substrate, a TFT substrate on which a thin film transistor (TFT) is formed, or the like.

  And the lower electrode 2 provided on the board | substrate 1 is comprised as a mirror using the electroconductive material excellent in light reflectivity. Usually, the lower electrode 2 is used as an anode or a cathode. In this embodiment, the functional layers 10R, 10B, and 10G are provided on the lower electrode 2 via the transparent conductive films 20a and 20b. The films 20a and 20b become substantial anodes or cathodes. For this reason, in this embodiment, the lower electrode 2 should just be comprised with the material excellent in reflectivity.

  The lower electrode 2 is patterned into a suitable shape according to the driving method of the display device. For example, when the driving method is a simple matrix type, the lower electrode 2 is formed in a stripe shape, for example. When the driving method is an active matrix type in which a TFT is provided for each pixel, the lower electrode 2 is formed in a pattern corresponding to each of a plurality of pixels arranged in the same manner, and similarly to the TFT provided in each pixel. Each of these TFTs is formed in a state of being connected through a contact hole (not shown) formed in an interlayer insulating film covering the TFT.

  The transparent conductive films 20a and 20b provided on the lower electrode 2 are made of a transparent electrode material. In particular, in this embodiment, the transparent conductive films 20a and 20b are used as a substantial anode or cathode as described above. In addition, in FIG. 2, the case where the transparent conductive films 20a and 20b are used as anodes is shown as a representative. For example, indium tin oxide (ITO) is used to provide the transparent conductive films 20a and 20b serving as anodes. Suppose that

  The transparent conductive films 20a and 20b use the same transparent conductive film 20a for the three organic EL elements EL-R, EL-B, and EL-G. That is, the transparent conductive film 20a is patterned so that the optical distances corresponding to R and B are equal (for example, L = 310 nm). The transparent conductive film 20b corresponding to the organic EL element EL-G is patterned so as to have an optical distance corresponding to G (for example, L = 240 n). For this reason, if the transparent conductive films 20a and 20b provided in each organic EL element EL-R, EL-B, and EL-G have two types of thicknesses (optical distance Lt of the transparent conductive film). It will be good. The transparent conductive films 20a and 20b do not need to be made of the same material. The setting of the optical distance Lt between the transparent conductive films 20a and 20b will be described in detail later.

  Each of the functional layers 10R, 10B, and 10G is formed by stacking a plurality of light emitting units 11 to 14 that emit light having different wavelengths. In the present embodiment, the first light emitting unit 11 corresponding to green (G), the second light emitting unit 12 corresponding to blue (B), and the third light emitting unit corresponding to red (R) from the lower electrode 2 side. 13 and the fourth light emitting unit 14 corresponding to blue (B) are stacked in this order. Here, the light emitting unit corresponding to blue having the lowest light emission efficiency, which is generally represented by cd / A (luminance per unit current), is made into two layers more than the light emitting units of other wavelengths.

FIG. 3 is a schematic cross-sectional view illustrating details of a functional layer laminated on the transparent conductive film. The functional layer 10 (corresponding to each of the functional layers 10R, 10B, and 10G shown in FIG. 2) is a laminate of a plurality of light emitting units (shown only 11 and 12 in FIG. 2), and is mainly composed of an organic material. It consists of multiple layers. One light emitting unit (for example, the light emitting unit 11) includes, for example, in order from the lower electrode 2 side, a hole injection layer 61, a hole transport layer 62, a light emitting layer (organic layer) 11a, a charge transport layer 72, and a charge injection layer. The other light emitting units 12 and the other light emitting units 13 and 14 (see FIG. 2) are also configured by repeating through the connection layer . The connection layer is a layer for connecting each light emitting unit, and is a layer including only the charge generation layer 80 or including the charge generation layer 80 .

With such a configuration, holes injected from the lower electrode 2 and electrons generated in the charge generation layer 80 of the connection layer are combined in the organic layer, and at the same time, electrons injected from the cathode and the charge generation layer 80 of the connection layer are combined. When the generated holes are combined by the light emitting units 11, 12,..., Light having a predetermined wavelength is generated. The light emitting units of the functional layers 10R, 10B, and 10G shown in FIG. 2 are provided with the same configuration. In addition, the organic layers of the functional layers 10R, 10B, and 10G are provided with substantially equal thicknesses of the corresponding layers. That is, each corresponding layer is formed in the same process. In addition, the organic layers of the functional layers 10R, 10B, and 10G may be patterned for each pixel or may be formed in a solid film shape.

  The connection layer disposed between the light emitting units includes the charge injection layer 71, the charge generation layer 80, and the hole injection layer 61. The charge injection layer 71 may also serve as the charge generation layer 80. The injection layer 61 may not be provided, and there are cases where the injection layer 61 is constituted by two layers. The configuration of the charge generation layer 80 is appropriately selected depending on the characteristics of the electron transport layer 62 and the hole injection layer 61 composed of the organic layer of the organic electroluminescent element composed of the organic layer.

In general, the connection layer is often formed by using a material such as V ₂ O ₅ described in JP-A-2003-45676 and JP-A-2003-272860 as a charge generation layer. Other than the configuration, the configuration is not limited to this as long as it can generate electrons and holes in the thin film.

  Here, in order to obtain a full color display in the display device of the present embodiment, a plurality of pixels configured by the organic EL elements EL-R, EL-B, and EL-G are arranged, and emitted light generated in each pixel is It is necessary to have emission intensity in each of the red, blue, and green wavelength regions. In particular, the functional layers 10R, 10B, and 10G having a configuration that has a maximum emission intensity in a desired wavelength region recognized as red, blue, and green and a small emission intensity in an unnecessary wavelength region are preferable. By using such functional layers 10R, 10B, and 10G, a display device with high light extraction efficiency and high color purity can be obtained. Further, the maximum values of light extraction corresponding to red, blue, and green are appropriately determined in consideration of viewing angle characteristics and the like.

  The film thickness (optical distance Lf) of the functional layers 10R, 10B, and 10G is a resonance part that resonates the target wavelength between the lower electrode 2 and the upper electrode 3 combined with the transparent conductive film. Thus, it is important that the setting is made as described in detail later.

The upper electrode 3 provided above the functional layers 10R, 10B, and 10G is configured as a half mirror. When the lower electrode 2 (transparent conductive films 20a and 20b) described above is an anode, the upper electrode 3 is a cathode. When the lower electrode 2 (transparent conductive films 20a and 20b) is a cathode, it is used as an anode. When the upper electrode 3 is used as an anode, the materials constituting the upper electrode 2 include nickel, silver, gold, platinum, palladium, selenium, rhodium, ruthenium, iridium, rhenium, tungsten, molybdenum, chromium, tantalum, niobium, A conductive material having a high work function such as an alloy of these, or tin oxide (SnO ₂ ), indium tin oxide (ITO), zinc oxide, titanium oxide or the like is selected and used.

  When the upper electrode 3 is used as a cathode (in the case of FIG. 2), the material constituting the upper electrode 3 is, for example, an active metal such as Li, Mg, or Ca and a metal such as Ag, Al, or In. A conductive material having a small work function, such as an alloy, may be selected and used, and a structure in which these are laminated may be used. Further, for example, a structure in which a compound layer of an active metal such as Li, Mg, or Ca and a halogen such as fluorine or bromine, oxygen, or the like is thinly inserted between the functional layers 10R, 10B, and 10G may be employed. Since the upper electrode 3 is used as a half mirror on the side from which the light emitted from the functional layers 10R, 10B, and 10G is extracted, the light transmittance is adjusted by the film thickness and the like.

  In addition, when the display device is a simple matrix type, the upper electrode 3 is formed in a stripe shape that intersects with the stripe of the lower electrode 2, and a portion where these are intersected and laminated is an organic EL element. . When this display device is an active matrix type, the upper electrode 3 may be a solid film formed so as to cover one surface of the substrate 1 and be used as an electrode common to each pixel. And

  A driving power source for current injection is connected between the upper electrode 3 and the lower electrode 2 described above as shown in FIG.

  Next, the optical distance L of the resonance part between the lower electrode 2 and the upper electrode 3 in each organic EL element and the optical distance Lt of the transparent conductive films 20a and 20b will be described.

  That is, in each organic EL element, the optical distance L of the resonance part between the lower electrode 2 and the upper electrode 3 is such that light in a desired wavelength region set in each organic EL element resonates at both ends of the resonance part. Each is set to a value. For this reason, for example, the phase shift that occurs when the light emitted by the light emitting units 11 to 14 is reflected at both ends of the resonance unit is Φ radians, the optical distance of the resonance unit is L, and the light emission generated by the light emission units 11 to 14 When the peak wavelength of the spectrum of light to be extracted out of light is λ, the optical distance L of the resonance portion is configured in a range that substantially satisfies the following formula (1).

  (2L) / λ + Φ / (2π) = m (m is an integer) (1)

  At this time, for the functional layer 10B, the peak wavelength (for example, λ = 460 nm) is set in the blue region as the peak wavelength λ of the spectrum of light to be extracted, and the optical distance L of the resonance part is calculated. For the functional layer 10G, the peak wavelength (for example, λ = 530 nm) is set in the green region as the peak wavelength λ of the spectrum of light to be extracted, and the optical distance L of the resonance portion is calculated. Further, for the functional layer 10R, the peak wavelength (for example, λ = 630 nm) is set in the red region as the peak wavelength λ of the spectrum of light to be extracted, and the optical distance L of the resonance part is calculated.

  In addition, the optical distance L of each resonance part should just be a value which satisfy | fills said Formula (1).

  And since each functional layer 10R, 10B, 10G is comprised by the same layer containing the light emission units 11-14, the optical distance L of a resonance part is based on the optical distance Lt of each transparent conductive film 20a, 20b. It has been adjusted. Therefore, when the optical distance of the transparent conductive films 20a and 20b is Lt and the optical distance of the functional layers 10R, 10B, and 10G including the light emitting units 11 to 14 is Lf, each function is satisfied so as to satisfy the following formula (2). It is assumed that the optical distance Lt (film thickness) of the transparent conductive films 10a and 20b of the layers 10R, 10B, and 10G is installed.

L = Lt + Lf (2)
However, Lf is a constant value smaller than L.

  In the case where the color filter 4 is provided in combination in the display device having such a configuration, the color filters 4R, 4B, which transmit only light in the vicinity of the peak wavelength λ of the spectrum desired to be extracted from the functional layers 10R, 10B, 10G. 4G is provided on the light extraction surface side of each of the functional layers 10R, 10B, and 10G.

  According to the display device having the above-described configuration, each organic EL element having the functional layers 10R, 10B, and 10G formed of the same layer is configured as a resonator structure that resonates each wavelength of red, blue, and green. Has been. As a result, while using functional layers 10R, 10B, and 10G including repetitive light emitting units of the same configuration, it is possible to intensify and extract only light of each wavelength of red, blue, and green from each organic EL element by multiple interference. Therefore, a display device that performs full-color display is configured.

  And since the light extracted from each organic EL element EL-R, EL-B, EL-G is resonated and extracted by the resonance part of each organic EL element EL-R, EL-B, EL-G, Only light in a desired wavelength region corresponding to red, blue, and green is extracted with sufficient intensity. Therefore, full color display with excellent color reproducibility is possible.

  In addition, as described above, in each organic EL element, the functional layers 10R, 10B, and 10G including the light emitting units 11 to 14 are entirely formed of the same layer, so that a vapor deposition method or a transfer method using a metal mask, It is not necessary that the functional layers 10R, 10B, and 10G formed by the inkjet method or the like are separately made for each organic EL element EL-R, EL-B, and EL-G. For this reason, it is not necessary to set the alignment tolerance between the functional layers required when creating the functional layers 10R, 10B, and 10G separately, and the pitch between the pixels is narrowed.

  In addition, since the optical distance L in each functional layer 10R, 10B, 10G is adjusted by the optical distance Lt of the two transparent conductive films 20a, 20b, it is necessary to make a transparent conductive film 20a corresponding to R and B separately. Does not occur. Thereby, the process at the time of forming a transparent conductive film can be simplified.

  Here, since the transparent electrode films 20a and 20b are patterned by etching using a resist pattern formed by lithography as a mask, the functional layer 10R that requires pattern formation using a metal mask or ink jet pattern formation, Compared with 10B and 10G, the patterning accuracy is good.

  As described above, by realizing miniaturization between pixels, high-definition full-color display is possible.

  In addition, since the light emitting units 11 to 14 are made of the same layer, the driving voltage of the organic EL element of a specific color is not specifically increased as compared with other colors, and the driving of the organic EL element of each color is performed. There is no need to design a drive circuit considering different conditions.

<Manufacturing method of display device>
Next, a method for manufacturing the display device having the above-described configuration will be described.

  First, an electrode material film constituting the lower electrode 2 is formed on the substrate 1, and the optical distance Lt set for each organic EL element formed in each pixel portion is formed on the electrode material film. Each transparent conductive film 20a, 20b is patterned. The pattern forming method of each of the transparent conductive films 20a and 20b is not particularly limited. However, when the transparent conductive films 20a and 20b are made of the same material, for example, the following is performed.

  First, the first transparent conductive material film is formed with the same film thickness as the transparent conductive film 20b having the smallest optical distance Lt, and the first resist pattern is formed so as to cover only the pixels on which the functional layer 10G is disposed. Form. Next, a second transparent conductive material film is formed on the first transparent conductive material film so that the film thickness is the same as that of the transparent conductive film 20a, and only the pixels on which the functional layers 10R and 10B are disposed are covered. A second resist pattern is formed.

  Next, the second transparent conductive material film is etched using the second resist pattern as a mask. Subsequently, when the first resist pattern is exposed, the first transparent conductive material film is etched using the first resist pattern and the second resist pattern as a mask. Thereby, the transparent conductive film 20b made of the first transparent conductive film is patterned under the first resist pattern, and the transparent conductive film made of the first transparent conductive film and the second transparent conductive film is formed under the second resist pattern. The film 20a is patterned.

  In the manufacturing method according to the present embodiment, three organic EL elements corresponding to R, B, and G are used as pixels, but transparent conductive films for adjusting the optical distance have the same thickness corresponding to R and B. Therefore, the transparent conductive films 20a and 20b having two kinds of thicknesses may be formed together with the transparent conductive film 20b corresponding to G. That is, since it is not necessary to form transparent conductive films having different thicknesses in accordance with the organic EL elements EL-R, EL-B, and EL-G of the respective colors, the manufacturing process can be simplified and the thickness can be easily managed. It becomes possible to do.

  After patterning the transparent conductive films 20a and 20b as described above, the lower electrode 2 is patterned by further etching the electrode material film using the first and second resist patterns as a mask.

  Thereafter, light emitting units 11 to 14 including a hole transport layer, a light emitting layer, and an electron transport layer are sequentially stacked on the substrate 1 so as to cover the patterned transparent conductive films 20a and 20b and the lower electrode 2, Functional layers 10R, 10B, and 10G made of the same layer are collectively formed on the pixel. Each of these layers can be formed using the organic materials synthesized by a well-known method and by applying a well-known method such as vacuum deposition or spin coating to form each layer corresponding to each functional layer in the same process. it can. Finally, by stacking the upper electrode 3, it is possible to obtain a display device in which the organic EL elements EL-R, EL-B, and EL-G having the above-described configuration are formed.

  According to the manufacturing method described above, the functional layers 10R, 10B, and 10G corresponding to the organic EL elements EL-R, EL-B, and EL-G of the respective colors are collectively formed in the manufacture of the display device having the above-described configuration. Thus, the number of manufacturing steps including the design of the functional layers 10R, 10B, and 10G can be reduced. Accordingly, the use of the functional layers 10R, 10B, and 10G realizes miniaturization of the light-emitting element, thereby enabling high-definition display, and by extracting light with a desired emission color with sufficient intensity. A display device capable of displaying with excellent reproducibility can be more easily manufactured.

  In the embodiment described above, the configuration of a so-called top emission type display device that extracts emitted light from the side of the upper electrode 3 opposite to the substrate 1 and the manufacturing method thereof have been described with reference to FIG. However, the present invention is also applied to a so-called bottom emission type display device that extracts emitted light from the substrate 1 side. In this case, the lower electrode 2 provided on the substrate 1 is configured as a half mirror using a light reflective material, and the upper electrode 3 is configured as a mirror using a light reflective material. The configuration may be the same as that of the above-described embodiment, and the same effect can be obtained. However, when the active matrix type is adopted as the driving method of the display device, it is preferable to improve the aperture ratio of the element by using the top emission type shown in FIG.

  In the above-described embodiment, the transparent conductive films 20a and 20b are provided on the lower electrode 2, but the transparent conductive films 20a and 20b are provided between the functional layers 10R, 10B, and 10G and the upper electrode 3. It may be provided. In this case, the lower electrode 2 becomes a substantial anode or cathode, and instead of the upper electrode 3, the transparent electrodes 20a and 20b become substantial cathodes or anodes. In the above-described embodiment, the transparent conductive films 20a and 20b are patterned using lithography. However, the transparent conductive films 20a and 20b may be patterned using a method such as a vapor deposition mask or an inkjet.

  Furthermore, in the above-described embodiment, the example in which each organic EL element using the lower electrode 2 and the upper electrode 3 as a mirror and a half mirror and having a resonance part therebetween is described. However, the display device of the present invention is not limited to such a configuration. That is, the lower electrode 2 or the upper electrode 3 is used as a mirror, and any of the layers constituting the functional layers 10R, 10B, and 10G is used as a half mirror, and the light emitting units 11 to 11 formed of the same layer between these mirrors and the half mirror. 14 may be configured such that the optical distance of the resonance portion is adjusted by the film thickness of the functional layer other than the light emitting units 11 to 14 sandwiched between these mirrors and the half mirror. Further, the mirror or the half mirror may be configured to sandwich the light emitting units 11 to 14 from the outside of the upper electrode 3 or the lower electrode 2. Even in such a case, it is possible to simplify the manufacturing process by using the light emitting units 11 to 14 as the same layer. Moreover, although the transparent conductive films 20a and 20b are used for the setting of the optical distance in the resonance part of each organic EL element EL-R, EL-B, EL-G, the light emitting units 11-11 are used without using a transparent conductive film. For example, a configuration in which the thickness is adjusted according to the layer thickness of 14 or a configuration in which only the transparent conductive film 20a is used and 20b is not used may be used.

  Next, a specific example of the present invention and a manufacturing procedure of a display device of a comparative example with respect to the example will be described, and then the evaluation results will be described.

<Preparation of Display Device of Example>
In the example, the top emission type display device that performs the full color display described with reference to FIG. 2 was manufactured as follows.

  First, on a substrate 1 made of a glass plate, a lower electrode 2 made of APC (Ag—Pd—Cu) (film thickness of about 100 nm) as an anode to be a mirror, and transparent conductive films 20a, 20b made of ITO of each film thickness. The pattern was formed. Next, a cell for an organic EL element in which a region other than the light emitting region of 2 mm × 2 mm at the center of the surface of the transparent conductive films 20a and 20b was masked with an insulating film (not shown) was produced.

Next, a metal mask having an opening on the exposed portions of the transparent conductive films 20a and 20b serving as the light emitting regions is disposed close to the substrate 1, and vacuum deposition is performed under a vacuum of 10 ⁻⁴ Pa or less. The light emitting units 11 to 14 were laminated on the transparent conductive films 20a and 20b and the insulating film in the order of green, blue, red, and blue (hereinafter referred to as GBRB) to form functional layers 10R, 10B, and 10G. . Although the film thickness of each light emitting unit 11-14 should just select an appropriate value, it is desirable that the film thickness sufficient for light emission can be ensured. In this case, the film thicknesses of the light emitting units 11 to 14 were made almost uniform in the range of 50 nm to 70 nm.

  Thereafter, as a cathode to be a half mirror, a thin film with a co-evaporation ratio of 10: 1 of Mg and Ag is formed with a thickness of 9 nm, and ITO is further formed with a thickness of 150 nm to form the upper electrode 3. The display device of the example was obtained.

  In the display device of the example, red: wavelength λ = 630 nm, blue: wavelength λ = 460 nm, green: wavelength λ from the organic EL elements EL-R, EL-B, EL-G of R, B, G = The optical distance L that is the minimum value among the optical distances L of the resonating portion that satisfies the above-described formula (1) is set so that extraction of light of 530 nm is sufficiently large. Then, the thickness of the functional layers 10R, 10B, and 10G is set to 220 nm, and the optical distance Lt between the transparent conductive films 20a and 20b is set to Lt (red) = 80 nm and Lt ( Blue) = 80 nm and Lt (green) = 10 nm.

<Production of display device of comparative example>
In the comparative example, a functional layer using the same material as that of the example was used, and a plurality of light emitting units in each functional layer were laminated in a lamination order that was not optimized for the specific wavelength of each color. Except that the stacking order of the plurality of light emitting units was set to GRBB and BRBG, all the steps were the same as those of the examples, and the display devices of Comparative Example 1 and Comparative Example 2 were obtained.

<Evaluation results>
About the display apparatus of the Example and comparative example which were produced as mentioned above, the spectrum of the extraction light from each organic EL element was measured.

  4 and 5 are spectra of extracted light from each organic EL element of the display device of the example. FIG. 4 shows the case where L = 240 nm where the emission wavelength is extracted in the green region, and FIG. 5 shows the case where L = 310 nm where the emission wavelengths in the blue and red regions are extracted. The vertical axis of each figure shows the relative intensity from the light emission intensity when optical resonance is not performed. From these figures, the emission intensity of the spectrum is greatly different in the blue, green, and red wavelength regions, and light in the wavelength region desired to be extracted from each of the B, G, R organic EL elements is selectively extracted by the multiple interference effect. It was confirmed.

  In this case, since blue and red have the same optical distance, both colors are emitted. As can be seen from FIG. 5, in this example, although there is no great dependence on the emission intensity in the green region, it has been found that there is a large difference between the emission intensity of blue and red.

  That is, as in this embodiment, by setting the stacking order (light emitting position) of the light emitting units in the functional layer to GBRB, light can be selectively extracted in all of red, blue, and green. In addition, since the optical distance is the same between blue and red as described above, the emission intensity of red is smaller than other colors, but the relative intensity is 50% or more. Can be taken out selectively enough.

  6, 7, and 8, color filters for each color that transmit only the wavelengths of the respective colors are provided on the light emitting surface side of such a display device so as to correspond to the G, B, and R organic EL elements. The simulation result when provided is shown. As shown in each figure, by providing a combination of color filters, unnecessary wavelength region components of the spectrum of the embodiment are reduced, and blue, green, and red light extracted from the B, G, and R organic EL elements are reduced. It was confirmed that the color purity was improved. Further, since the optical distance is the same, it can be seen that a pixel emitting blue and red can be used as a blue or red pixel by a color filter.

On the other hand, FIG. 9, FIG. 10 is a figure showing the extraction light intensity | strength from each organic EL element in the display apparatus of an Example . From these figures, it can be seen that there is a large difference in the light extraction easiness with respect to the stacking order of the light emitting units in each wavelength region. The vertical axis of each figure shows the relative ease of extracting light when the optical resonance does not occur. FIG. 11 shows an index of relative ease of light extraction when the light extraction is maximized in each wavelength region. From this figure, it can be seen that the light extraction is satisfactorily performed for the three RGB colors necessary for the full color by setting the stacking order to GBRB.

  From the above, the display device according to the present invention is a device using a light emitting element having both sufficient luminous efficiency and color purity while using a simple and highly accurate manufacturing process.

It is a schematic diagram explaining schematic structure of the display apparatus which concerns on this embodiment. It is sectional drawing which shows typically the example of 1 structure of the display apparatus which concerns on this embodiment. It is a schematic cross section explaining the detail of the functional layer laminated | stacked on a transparent conductive film. It is a figure which shows the spectrum (L = 240nm) of the extraction light from each organic EL element of the display apparatus of an Example. It is a figure which shows the spectrum (L = 310nm) of the extraction light from each organic EL element of the display apparatus of an Example. It is FIG. (1) which shows the simulation result at the time of providing the color filter of each color. It is FIG. (2) which shows the simulation result at the time of providing the color filter of each color. FIG. 11 is a diagram (part 3) illustrating a simulation result when color filters for each color are provided; It is the figure (the 1) showing the extraction light intensity from each organic EL element. It is the figure (the 2) showing the extraction light intensity from each organic EL element. It is a figure which shows the parameter | index of the relative ease of light extraction when the case where light extraction becomes the maximum in each wavelength area is set to 1.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate, 2 ... Lower electrode, 3 ... Upper electrode, 4 ... Color filter, 10R, 10B, 10G ... Functional layer, 11 ... 1st light emission unit, 12 ... 2nd light emission unit, 13 ... 3rd light emission Unit, 14 ... fourth light emitting unit, 20a ... transparent conductive film, 20b ... transparent conductive film

Claims (18)

A functional layer is disposed between the upper electrode and the lower electrode, and includes a light emitting element that resonates and takes out light emitted from the functional layer as a resonance part between the upper electrode and the lower electrode,
In a display device that constitutes a pixel by combining at least three light emitting elements corresponding to different wavelengths,
The optical distance of the resonance part in the first light-emitting element constituting the pixel is equal to the optical distance of the resonance part in the second light-emitting element, and the optical of the resonance part in the first light-emitting element is provided. And the optical distance of the resonance part in the third light emitting element are different from each other,
Each of the three light emitting elements includes a transparent layer between the functional layer and the lower electrode in order to set an optical distance of the resonance unit,
The transparent layer in the first light emitting element and the transparent layer in the second light emitting element are provided with equal thickness,
The transparent layer in the first light emitting element and the transparent layer in the third light emitting element are provided with different thicknesses,
Thickness between and the functional layer between the upper electrode and the lower electrode combined the transparent layer in the three light emitting elements are set such that the resonance unit for resonating wavelengths of interest,
On the light extraction surface side of the first light emitting element, a color filter is provided that transmits light in a wavelength region intended by the first light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
On the light extraction surface side of the second light emitting element, a color filter is provided that transmits light in a wavelength region intended by the second light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. and it has a display device. A functional layer is disposed between the upper electrode and the lower electrode, and includes a light emitting element that resonates and takes out light emitted from the functional layer as a resonance part between the upper electrode and the lower electrode,
In a display device that constitutes a pixel by combining at least three light emitting elements corresponding to different wavelengths,
The optical distance of the resonance part in the first light-emitting element constituting the pixel is equal to the optical distance of the resonance part in the second light-emitting element, and the optical of the resonance part in the first light-emitting element is provided. And the optical distance of the resonance part in the third light emitting element are different from each other,
The thickness of the functional layer between the upper electrode and the lower electrode in the three light emitting elements is set to be a resonance part that resonates a target wavelength,
On the light extraction surface side of the first light emitting element, a color filter is provided that transmits light in a wavelength region intended by the first light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
On the light extraction surface side of the second light emitting element, a color filter is provided that transmits light in a wavelength region intended by the second light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
The functional layer has a plurality of light emitting units that emit light of different wavelengths, and the light emitting unit having the lowest light emission efficiency represented by cd / A (luminance per unit current) has the other wavelength. A display device that has multiple layers than the light emitting unit. A functional layer is disposed between the upper electrode and the lower electrode, and includes a light emitting element that resonates and takes out light emitted from the functional layer as a resonance part between the upper electrode and the lower electrode,
In a display device that constitutes a pixel by combining at least three light emitting elements corresponding to different wavelengths,
The optical distance of the resonance part in the first light-emitting element constituting the pixel is equal to the optical distance of the resonance part in the second light-emitting element, and the optical of the resonance part in the first light-emitting element is provided. And the optical distance of the resonance part in the third light emitting element are different from each other,
The thickness of the functional layer between the upper electrode and the lower electrode in the three light emitting elements is set to be a resonance part that resonates a target wavelength,
On the light extraction surface side of the first light emitting element, a color filter is provided that transmits light in a wavelength region intended by the first light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
On the light extraction surface side of the second light emitting element, a color filter is provided that transmits light in a wavelength region intended by the second light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
The functional layer includes a first light emitting unit corresponding to green from the lower electrode side, a second light emitting unit corresponding to blue, a third light emitting unit corresponding to red, and a fourth light emitting unit corresponding to blue. A display device composed of a plurality of light emitting units stacked in order. A functional layer is disposed between the upper electrode and the lower electrode, and includes a light emitting element that resonates and takes out light emitted from the functional layer as a resonance part between the upper electrode and the lower electrode,
In a display device that constitutes a pixel by combining at least three light emitting elements corresponding to different wavelengths,
The optical distance of the resonance part in the first light-emitting element constituting the pixel is equal to the optical distance of the resonance part in the second light-emitting element, and the optical of the resonance part in the first light-emitting element is provided. And the optical distance of the resonance part in the third light emitting element are different from each other,
The thickness of the functional layer between the upper electrode and the lower electrode in the three light emitting elements is set to be a resonance part that resonates a target wavelength,
On the light extraction surface side of the first light emitting element, a color filter that transmits light in a red wavelength region out of the wavelength region extracted by resonance in the resonance unit is provided,
On the light extraction surface side of the second light emitting element, a color filter that transmits light in a blue wavelength region out of the wavelength region extracted by resonance in the resonance unit is provided,
The display device according to claim 1, wherein the first light emitting element corresponds to a red wavelength, and the second light emitting element corresponds to a blue wavelength. A functional layer is disposed between the upper electrode and the lower electrode, and includes a light emitting element that resonates and takes out light emitted from the functional layer as a resonance part between the upper electrode and the lower electrode,
In a display device that constitutes a pixel by combining at least three light emitting elements corresponding to different wavelengths,
The optical distance of the resonance part in the first light-emitting element constituting the pixel is equal to the optical distance of the resonance part in the second light-emitting element, and the optical of the resonance part in the first light-emitting element is provided. And the optical distance of the resonance part in the third light emitting element are different from each other,
The thickness of the functional layer between the upper electrode and the lower electrode in the three light emitting elements is set to be a resonance part that resonates a target wavelength,
On the light extraction surface side of the first light emitting element, a color filter is provided that transmits light in a wavelength region intended by the first light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
On the light extraction surface side of the second light emitting element, a color filter is provided that transmits light in a wavelength region intended by the second light emitting element out of the wavelength region that is resonated and extracted by the resonance unit. And
The functional layer has a plurality of light emitting units that emit light of different wavelengths ,
The stacking order of the plurality of light emitting units is set so that the light emission intensity of the extracted light is 50% or more in terms of the relative intensity from the light emission intensity when optical resonance is not performed. The display device according to claim 1, wherein the pixel includes three light emitting elements corresponding to wavelengths of red, blue, and green. The display device according to any one of claims 1 to 6, wherein the functional layer includes a plurality of light emitting layers that emit light of different wavelengths. The display device according to any one of claims 1 to 6, wherein the functional layer includes a plurality of light emitting units that emit light having different wavelengths. The display device according to claim 8, wherein the functional layer has the same arrangement of the plurality of light emitting units in each functional layer of each light emitting element constituting the pixel. The display device according to claim 9, wherein the functional layer has substantially the same thickness of the light emitting unit corresponding to each functional layer. The phase shift that occurs when the light generated in the functional layer is reflected at both ends of the resonance unit is Φ radians, the optical distance of the resonance unit is L, and the peak wavelength of the spectrum of light that is desired to be extracted from the resonance unit is λ. if you did this,
(2L) / λ + Φ / (2π) = m (m is an integer)
The display device according to any one of claims 1 to 10, wherein the optical distance L is set in a range that satisfies the following conditions. When a transparent layer is provided between the functional layer and the lower electrode in order to set the optical distance L of the resonance part in the light emitting element,
When the optical distance of the transparent layer is Lt and the optical distance of the functional layer is Lf,
L = Lt + Lf
The display device according to any one of claims 1 to 10, wherein an optical distance Lt of the transparent layer is set so as to satisfy the following condition. The third on the light extraction surface side of the light-emitting element, among the wavelength regions to be extracted by resonating with the resonance portion, a color filter is provided to the third light emitting element transmits light in the wavelength region of interest The display device according to any one of claims 1 to 12. In a manufacturing method of a display device in which a functional layer is formed on a lower electrode, an upper electrode is formed on the functional layer, and a light emitting element having a resonance portion between the upper electrode and the lower electrode is formed. ,
In configuring a pixel by combining at least three light emitting elements corresponding to different wavelengths, a transparent layer is provided between the functional layer and the lower electrode for each of the three light emitting elements, and the first of the pixels The optical distance of the resonance part in the light emitting element is configured to be equal to the optical distance of the resonance part in the second light emitting element, and the optical distance of the resonance part in the first light emitting element is equal to the third optical distance. The optical distance of the resonance part in the light emitting element is different, and the transparent layer in the first light emitting element and the transparent layer in the second light emitting element are formed with the same thickness, and the three light emitting elements The film thickness of the functional layer between the upper electrode and the lower electrode combined with the transparent layer in the element is configured to be a resonance part that resonates the target wavelength,
Provided on the light extraction surface side of the first light emitting element is a color filter that transmits light in a wavelength region intended by the first light emitting element, out of the wavelength region that is resonated and extracted by the resonance unit,
A display provided on the light extraction surface side of the second light-emitting element is provided with a color filter that transmits light in a wavelength region intended by the second light-emitting element out of the wavelength region that is resonated and extracted by the resonance unit. Device manufacturing method. The method for manufacturing a display device according to claim 14, wherein functional layers of the respective light emitting elements in the pixel are collectively formed. In a manufacturing method of a display device in which pixels are formed by forming three resonant light emitting elements corresponding to red, blue, and green wavelengths,
Forming a lower electrode on the substrate;
Forming a transparent layer corresponding to red and a transparent layer corresponding to blue on the lower electrode with the same film thickness, and forming a transparent layer corresponding to green with a film thickness different from the transparent layer corresponding to red and blue When,
A step of sequentially laminating a plurality of light emitting units that emit light of different wavelengths on the transparent layers corresponding to each of red, blue, and green to form three functional layers;
Forming an upper electrode on the three functional layers,
The display device is configured such that the thickness of the functional layer between the upper electrode and the lower electrode including the transparent layers in the three light emitting elements is a resonance unit that resonates a target wavelength. Method. In a manufacturing method of a display device in which pixels are formed by forming three resonant light emitting elements corresponding to red, blue, and green wavelengths,
Forming a lower electrode on the substrate;
Forming a transparent layer corresponding to red and a transparent layer corresponding to blue on the lower electrode with the same film thickness, and forming a transparent layer corresponding to green with a film thickness different from the transparent layer corresponding to red and blue When,
A step of sequentially laminating a plurality of light emitting units that emit light of different wavelengths on the transparent layers corresponding to each of red, blue, and green to form three functional layers;
Forming an upper electrode on the three functional layers,
The thickness of the functional layer between the upper electrode and the lower electrode in the three light emitting elements is configured to be a resonance unit that resonates a target wavelength,
The plurality of light emitting units in the three functional layers correspond to the first light emitting unit corresponding to green, the second light emitting unit corresponding to blue, the third light emitting unit corresponding to red, and blue from the lower electrode side. A display device manufacturing method in which the fourth light emitting units are stacked in this order. The method for manufacturing a display device according to claim 16, wherein functional layers of the respective light emitting elements in the pixel are collectively formed.

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