[go: up one dir, main page]

JP4506135B2 - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator Download PDF

Info

Publication number
JP4506135B2
JP4506135B2 JP2003325560A JP2003325560A JP4506135B2 JP 4506135 B2 JP4506135 B2 JP 4506135B2 JP 2003325560 A JP2003325560 A JP 2003325560A JP 2003325560 A JP2003325560 A JP 2003325560A JP 4506135 B2 JP4506135 B2 JP 4506135B2
Authority
JP
Japan
Prior art keywords
piezoelectric
electrode
piezoelectric vibrator
piezoelectric substrate
excitation electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003325560A
Other languages
Japanese (ja)
Other versions
JP2005094410A (en
JP2005094410A5 (en
Inventor
健二 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyazaki Epson Corp
Original Assignee
Miyazaki Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyazaki Epson Corp filed Critical Miyazaki Epson Corp
Priority to JP2003325560A priority Critical patent/JP4506135B2/en
Publication of JP2005094410A publication Critical patent/JP2005094410A/en
Publication of JP2005094410A5 publication Critical patent/JP2005094410A5/ja
Application granted granted Critical
Publication of JP4506135B2 publication Critical patent/JP4506135B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

本発明は圧電振動子の構造とその製造方法に関し、特にメサ構造を有する圧電振動子の電極構造とその製造方法の改良に関する。   The present invention relates to a structure of a piezoelectric vibrator and a manufacturing method thereof, and more particularly to an electrode structure of a piezoelectric vibrator having a mesa structure and an improvement of the manufacturing method thereof.

従来、厚み滑り振動子の振動エネルギーを閉じ込める方法として、特開昭５１−２４８９２号公報、特開平８−３３０８８３号公報に開示されているように、べべリング、コンベックス、或いは、メサ等のように圧電基板を所定の形状に加工する方法が知られており、これらの方法は、振動エネルギーを励振用電極下により多く集中させることが出来るため、機械的振動により発生した電荷をより多く励振用電極下に集中させることが出来、共振インピーダンスを小さくすることが可能で有る。   Conventionally, as a method for confining the vibration energy of a thickness-shear vibrator, as disclosed in Japanese Patent Laid-Open Nos. 51-24892 and 8-330883, beveling, convex or mesa is used. Methods for processing a piezoelectric substrate into a predetermined shape are known, and since these methods can concentrate vibration energy more under the excitation electrode, more charges generated by mechanical vibration are generated in the excitation electrode. The resonance impedance can be reduced because it can be concentrated downward.

図５は、べべリング、コンベックス、メサ構造の圧電基板の形状を示す外観例である。図５（ａ）はべべリングは構造を示し、図５（ｂ）はコンベックス構造を示し、図５（ｃ）はメサ構造を示す。夫々、所定の形状に加工した圧電基板１、３、５に対し、斜線で示した領域の表面に励振電極２、４、６が形成され、振動エネルギーは、各圧電基板の斜線部分に閉じ込められる。又、べべリング加工、或いはコンベックス加工は、加工する際に手間の掛かる作業が必要であり、コスト面からはメサ構造の圧電振動子が有利である。   FIG. 5 is an external view showing the shape of a piezoelectric substrate having a beveling, convex, or mesa structure. FIG. 5A shows the structure of beveling, FIG. 5B shows the convex structure, and FIG. 5C shows the mesa structure. Excitation electrodes 2, 4, 6 are formed on the surfaces of the hatched regions for the piezoelectric substrates 1, 3, 5 processed into predetermined shapes, respectively, and vibration energy is confined in the hatched portions of the respective piezoelectric substrates. . Further, the beveling process or the convex process requires time-consuming work, and a mesa-structured piezoelectric vibrator is advantageous in terms of cost.

そこで、以降、メサ構造、即ち凸部を有する圧電振動子について説明する。
図６は、従来の圧電振動子の第一の外観構造例であり、図６（ａ）は上面図を示し、図６（ｂ）はＡ方向からの側面図を示す。メサ構造を有する圧電振動子７は、圧電基板８の両主面のほぼ中央部に凸部９を形成した後、凸部９の表裏に励振電極１０を形成してリード電極１１を介してパッド電極１２に接続したものである。このようなメサ構造を有する圧電振動子を製造する際は、エッチングの手段により凸部を形成するが、エッチングの耐性膜として、Ｃｒ＋Ａｕ＋フォトレジスト等を組み合わせて使用することが多い。凸部に形成する励振電極は、耐性膜として使用したＣｒ＋Ａｕ膜をそのまま励振電極として使用する場合と、Ｃｒ＋Ａｕ膜を剥離した後Ｎｉ＋Ａｕ膜を形成する場合とが有る。 Therefore, hereinafter, a mesa structure, that is, a piezoelectric vibrator having a convex portion will be described.
FIG. 6 is a first external structural example of a conventional piezoelectric vibrator, FIG. 6A shows a top view, and FIG. 6B shows a side view from the A direction. The piezoelectric vibrator 7 having a mesa structure is formed by forming a convex portion 9 at substantially the center of both main surfaces of the piezoelectric substrate 8, and then forming excitation electrodes 10 on the front and back of the convex portion 9 and padding the lead electrode 11. It is connected to the electrode 12. When manufacturing a piezoelectric vibrator having such a mesa structure, a convex portion is formed by an etching means, but a combination of Cr + Au + photoresist and the like is often used as an etching resistant film. As the excitation electrode formed on the convex portion, there are a case where the Cr + Au film used as the resistance film is used as it is as an excitation electrode, and a case where the Ni + Au film is formed after the Cr + Au film is peeled off.

一方、近年、水晶振動子が小型化されるに従って、水晶基板の形状も小型化され、水晶基板に形成する励振電極の水晶基板に占める面積の割合が相対的に大きくなっている。
図７は、従来の圧電振動子の第二の外観構造例であり、図７（ａ）は上面図を示し、図７（ｂ）はＡ方向からの側面図を示す。図７は、図６と比べて水晶基板の形状が小型化され、水晶基板に形成する励振電極の水晶基板に占める面積の割合が相対的に大きくなった場合の圧電振動子の外観構造例を示す。図７においても図６と同様に、メサ構造を有する圧電振動子１３は、圧電基板１４の両主面に凸部１５を形成した後、凸部１５の表裏に励振電極１６を形成してリード電極１７を介してパッド電極１８に接続したものである。 On the other hand, in recent years, as the crystal resonator is miniaturized, the shape of the quartz substrate is also miniaturized, and the ratio of the area of the excitation electrode formed on the quartz substrate to the quartz substrate is relatively large.
7A and 7B show a second external structural example of a conventional piezoelectric vibrator. FIG. 7A shows a top view, and FIG. 7B shows a side view from the A direction. FIG. 7 shows an example of the external structure of a piezoelectric vibrator when the shape of the quartz substrate is reduced compared to FIG. 6 and the ratio of the area of the excitation electrode formed on the quartz substrate to the quartz substrate is relatively large. Show. Also in FIG. 7, as in FIG. 6, the piezoelectric vibrator 13 having a mesa structure is formed by forming convex portions 15 on both main surfaces of the piezoelectric substrate 14 and then forming excitation electrodes 16 on the front and back surfaces of the convex portions 15. This is connected to the pad electrode 18 through the electrode 17.

次に、従来のメサ構造を有した圧電基板の製造方法について説明する。
図８は、従来のメサ構造を形成した圧電基板母材の外観例であり、図８（ａ）は上面図を示し、図８（ｂ）はＡ方向からの側面図を示す。そこで、圧電基板を製造する際は、大型の圧電基板母材１９の凸部２０を形成する位置に、Ｃｒ＋Ａｕ＋フォトレジスト等を組み合わせてエッチングの耐性膜を生成し、エッチング加工によりメサ構造を形成する。その後、ワックス等で圧電基板母材をガラス基板等に固着させた上で、図８に示した点線の位置おいてダイシングを行い個片のメサ構造を有する圧電基板を製造している。
特開昭５１−２４８９２号公報 特開平８−３３０８８３号公報 Next, a method for manufacturing a piezoelectric substrate having a conventional mesa structure will be described.
8A and 8B are external views of a conventional piezoelectric substrate base material having a mesa structure. FIG. 8A shows a top view and FIG. 8B shows a side view from the A direction. Therefore, when manufacturing a piezoelectric substrate, an etching resistant film is formed by combining Cr + Au + photoresist or the like at a position where the convex portion 20 of the large piezoelectric substrate base material 19 is formed, and a mesa structure is formed by etching. . Thereafter, the piezoelectric substrate base material is fixed to a glass substrate or the like with wax or the like, and then dicing is performed at the position of the dotted line shown in FIG. 8 to manufacture a piezoelectric substrate having a single mesa structure.
Japanese Patent Laid-Open No. 51-24892 JP-A-8-330883

しかしながら、従来の圧電振動子とその製造方法は以下のような問題を抱えていた。
図６に示した従来の圧電振動子の問題点について説明すると、一般的に圧電振動子の構造をメサ構造とすると、べべリング、及コンベックス構造の圧電振動子と比べて容量比γが低下すると言う問題を生じる。圧電振動子の容量比γとは、電極寸法（大きさ）で決まる容量Ｃ０を、振動子の実質的な振動領域で決まる容量Ｃ１で除したものであり、例えば、べべリング構造であれば、図５（ａ）に示した如く構成され、一方、メサ構造であれば、図５（ｃ）に示した如く構成されており、べべリング構造は、励振電極の内側に振動領域が形成されているが、メサ構造の圧電振動子は、励振電極と振動領域はほぼ同一の位置にあり、電極寸法に係わるＣ０に対する振動領域に係わるＣ１の割合が大きくなり、従って、容量比γは低下する。 However, the conventional piezoelectric vibrator and the manufacturing method thereof have the following problems.
The problem of the conventional piezoelectric vibrator shown in FIG. 6 will be explained. Generally, if the structure of the piezoelectric vibrator is a mesa structure, the capacity ratio γ is lower than that of a piezoelectric vibrator having a beveling and convex structure. Cause a problem to say. The capacity ratio γ of the piezoelectric vibrator is obtained by dividing the capacity C0 determined by the electrode size (size) by the capacity C1 determined by the substantial vibration region of the vibrator. For example, in the case of a beveling structure, 5A, the mesa structure is configured as shown in FIG. 5C. In the beveling structure, a vibration region is formed inside the excitation electrode. However, in the piezoelectric vibrator having the mesa structure, the excitation electrode and the vibration region are substantially at the same position, and the ratio of C1 related to the vibration region to C0 related to the electrode size is increased, and thus the capacitance ratio γ is decreased.

又、メサ構造を有する圧電振動子を製造する際は、圧電基板にエッチングにより凸部を形成するが、エッチングのための耐性膜として、Ｃｒ＋Ａｕが使用されることが多い。そこで、この耐性膜をそのまま励振電極として用いる場合は問題とならないが、産業用の圧電振動子等に見られるような、Ｎｉ＋Ａｕを電極として用いる場合、前記耐性膜を剥離後、新にメサ形状と同一寸法の電極をＮｉ＋Ａｕを用いて形成する必要があり、メサ形状と同じ形状の電極を位置精度良く形成することは非常に困難であった。   Further, when manufacturing a piezoelectric vibrator having a mesa structure, a convex portion is formed on a piezoelectric substrate by etching, but Cr + Au is often used as a resistant film for etching. Therefore, when this resistant film is used as it is as an excitation electrode, there is no problem. However, when Ni + Au is used as an electrode, as found in an industrial piezoelectric vibrator, etc., after the resistant film is peeled off, a new mesa shape is obtained. It is necessary to form electrodes having the same dimensions using Ni + Au, and it is very difficult to form electrodes having the same shape as the mesa shape with high positional accuracy.

次に、図７に示した従来の圧電振動子の問題点について説明すると、圧電振動子を小型化すると、圧電基板に対する励振電極面積の割合が増加し、外部接続用のパッド電極と励振電極との距離Ｌが短くなり、振動部に近いところでパッド電極を接着剤等を用いて外部パッドに接着固定することになる。これにより、圧電基板の中心部で振動エネルギーを閉じ込めたとしても、微量に漏れる振動が接着剤の影響を受け、振動特性の劣化を生ずる。一方、外部接続用のパッド電極と励振電極との距離Ｌが短くなると、導電性接着剤を塗布した際に励振電極とパッド電極が電気的に短絡する危険性が高まる。   Next, the problem of the conventional piezoelectric vibrator shown in FIG. 7 will be described. When the piezoelectric vibrator is miniaturized, the ratio of the excitation electrode area to the piezoelectric substrate increases, and the pad electrode and the excitation electrode for external connection are increased. Thus, the pad electrode is bonded and fixed to the external pad using an adhesive or the like near the vibrating portion. As a result, even if the vibration energy is confined at the center of the piezoelectric substrate, vibration that leaks in a minute amount is affected by the adhesive, resulting in deterioration of vibration characteristics. On the other hand, when the distance L between the pad electrode for external connection and the excitation electrode is shortened, there is an increased risk that the excitation electrode and the pad electrode are electrically short-circuited when the conductive adhesive is applied.

次に、図８に示した従来の圧電振動子の製造方法の問題点について説明すると、従来、メサ構造を有する圧電振動子は、圧電基板母材にエッチングにより凸部分を形成した後、圧電基板母材をワックス等でガラス基板等に固着させた上でダイシングにより個片に切断していたが、切断後にワックスを溶解して洗浄し、個片となった圧電基板を回収して再度電極形成用のメタルマスクに詰めていた。そのため、製造コストが高く量産向きではなかった。   Next, the problems of the conventional method for manufacturing the piezoelectric vibrator shown in FIG. 8 will be described. Conventionally, a piezoelectric vibrator having a mesa structure is formed by forming a convex portion on a piezoelectric substrate base material by etching, and then forming a piezoelectric substrate. The base material was fixed to a glass substrate with wax etc. and then cut into individual pieces by dicing, but after cutting, the wax was dissolved and washed, and the piezoelectric substrate that had been cut into pieces was collected to form electrodes again It was packed in a metal mask. Therefore, the manufacturing cost is high and not suitable for mass production.

又、凸部分を形成した圧電基板母材は、凸部分による段差を有しているため、ダイシングを行うために圧電基板母材をガラス基板等へ固定した際に、凸部分以外の圧電基板母材は固定されずに浮いた状態となるので、切削時にチッピングが多く発生し、場合によっては圧電基板母材が割れるなどの多くの問題を抱えていた。更には、圧電基板の製造をバッチ処理化する上で、ダイシング工程が障害となっていた。
本発明は上述したような問題を解決するためになされたものであって、容量比の低下を防ぐと共に精度の良い電極の形成と、小型化に適した構造を有し、量産に適した圧電振動子とその製造方法を提供することを目的とする。 In addition, since the piezoelectric substrate base material formed with the convex portion has a step due to the convex portion, when the piezoelectric substrate base material is fixed to a glass substrate or the like for dicing, the piezoelectric substrate base material other than the convex portion is used. Since the material is in a floating state without being fixed, many chippings occur during cutting, and there are many problems such as cracking of the piezoelectric substrate base material in some cases. Furthermore, the dicing process has become an obstacle to batch production of piezoelectric substrates.
The present invention has been made to solve the above-described problems, and has a structure suitable for forming electrodes with high accuracy and miniaturization while preventing a decrease in capacitance ratio, and is suitable for mass production. It is an object of the present invention to provide a vibrator and a manufacturing method thereof.

上記目的を達成するために本発明に係わる圧電振動子は、以下の構成をとる。
第１の発明の圧電基板の両主面の相対向する位置に所定の形状の凸部を設け、該凸部上面に励振電極を形成すると共に、該励振電極と前記圧電基板端部に配置したパッド電極とを接続するためのリード電極を備えた圧電振動子において、前記励振電極を、圧電基板の端部に向って前記凸部の段差部より外側の領域まで拡大し、前記凸部の中心が前記圧電基板の中心より前記パッド電極から遠ざかる方向にずらすように構成する。

In order to achieve the above object, a piezoelectric vibrator according to the present invention has the following configuration.
Protrusions having a predetermined shape are provided at opposite positions of both main surfaces of the piezoelectric substrate of the first invention, and excitation electrodes are formed on the upper surfaces of the projections, and are arranged at the excitation electrodes and the ends of the piezoelectric substrate. In the piezoelectric vibrator having a lead electrode for connecting to the pad electrode, the excitation electrode is expanded toward a region outside the step portion of the convex portion toward the end of the piezoelectric substrate, and the center of the convex portion Is configured to be shifted in a direction away from the pad electrode from the center of the piezoelectric substrate .


第２の発明の圧電振動子は、第１の発明の圧電振動子において、前記凸部の中央部が、前記圧電基板の中央部より前記パッド電極から遠ざかる方向にずれ、前記パッド電極と前記励振電極との距離を広げているように構成する。
The piezoelectric vibrator according to a second aspect is the piezoelectric vibrator according to the first aspect, wherein a central portion of the convex portion is displaced in a direction away from the pad electrode from a central portion of the piezoelectric substrate, and the pad electrode and the excitation It is configured to increase the distance from the electrode .

第３の発明の圧電振動子は、第１の発明の圧電振動子において、外側の領域の面積によって、圧電振動子の並列容量を設定するように構成する。
According to a third aspect of the present invention, there is provided a piezoelectric vibrator according to the first aspect, wherein the parallel capacitance of the piezoelectric vibrator is set according to an area of an outer region .

本発明の圧電振動子の製造方法は、大型の圧電基板母材の所定の位置に複数の凸部を形成する工程と、該圧電基板母材に形成した凸部の周囲に、矩形状の個片の圧電基板に対応し分離できるよう３辺にスリット状の貫通孔をエッチングにより形成する工程と、圧電基板母材から複数の個片の圧電基板に分離するため、非貫通部を折り割る工程とを含むよう構成する。   The method for manufacturing a piezoelectric vibrator of the present invention includes a step of forming a plurality of convex portions at predetermined positions of a large-sized piezoelectric substrate base material, and a rectangular piece around the convex portions formed on the piezoelectric substrate base material. A process of forming slit-like through holes on three sides by etching so that they can be separated corresponding to a piece of piezoelectric substrate, and a step of breaking a non-penetrating part to separate the piezoelectric substrate base material into a plurality of pieces of piezoelectric substrates To include.

第１の発明の圧電振動子によれば、励振電極の形成面積を凸部より拡大したため、電極間容量が増加することから容量比が増加して、べべリング構造、或いはコンベックス構造、の圧電振動子と同等の特性が得られるようになる。励振電極を拡大したことから、励振電極を形成する際に多少の電極ずれが生じても問題とならないと共に、励振電極の凸部の段差部分の強度が増加し、信頼性の高いメサ構造を有する圧電振動子の提供が可能となり、圧電振動子を使用する上で著しい効果を発揮する。
第２の発明の圧電振動子によれば、凸部の形成位置を圧電基板の中央からパッド電極から遠ざかる方向に所定の位置まで移動させ、パッド電極と励振電極との距離を広げたため、パッド電極を接着固定する際の振動特性への影響を抑えることが可能となると共に、導電性接着剤を塗布した際にパッド電極と励振電極間の電気的短絡を防止することが出来、圧電振動子を使用する上で著しい効果を発揮する。
第３の発明の圧電振動子によれば、励振電極の拡大領域の電極量を調整することにより圧電振動子の容量比を任意に設定可能となる。
According to the first inventions of the piezoelectric vibrator, since the formation area of the excitation electrodes enlarged from protrusions, volume ratio since the inter-electrode capacitance is increased by increasing, beveling structure or convex structure, a piezoelectric of ing as transducer equivalent characteristics. From what has been enlarged excited vibration electrodes, with some electrodes misalignment when forming the excitation electrodes is not even a problem occurs, the strength of the stepped portion of the convex portion of the excitation electrode increases, a reliable mesa structure It is possible to provide a piezoelectric vibrator having the same, and a remarkable effect is exhibited when the piezoelectric vibrator is used.
According to the piezoelectric vibrator of the second invention, the formation position of the convex portion is moved to a predetermined position in the direction away from the pad electrode from the center of the piezoelectric substrate, and the distance between the pad electrode and the excitation electrode is widened. It is possible to suppress the influence on the vibration characteristics when the electrode is bonded and fixed, and it is possible to prevent an electrical short circuit between the pad electrode and the excitation electrode when the conductive adhesive is applied. Demonstrates a remarkable effect in using.
According to the piezoelectric vibrator of the third invention, the capacitance ratio of the piezoelectric vibrator can be arbitrarily set by adjusting the electrode amount in the enlarged region of the excitation electrode.

本発明の圧電振動子の製造方法によれば、圧電基板母材から複数の圧電基板に切断する際に、ダイシング工程ではなくエッチング手法を採用したため、バッチ処理が可能となり、ダイシング工程にかかっていたコストが大幅に削減出来、圧電振動子を低コスト化する上で著しい効果を発揮する。   According to the method for manufacturing a piezoelectric vibrator of the present invention, when a piezoelectric substrate base material is cut into a plurality of piezoelectric substrates, an etching technique is used instead of a dicing process, so that batch processing is possible and the dicing process is applied. The cost can be greatly reduced, and the effect of reducing the cost of the piezoelectric vibrator is remarkable.

以下、図示した実施例に基づいて本発明を詳細に説明する。
図１は、本発明に係る圧電振動子の第一の実施例を示す外観構造である。本実施例は、図６により説明した従来例の問題を解決するためになされたものであって、メサ構造を有する圧電振動子が、べべリング、コンベックス構造の圧電振動子と比べて容量比が低下すると言う問題と、Ｎｉ＋Ａｕを電極として用いる場合、メサ形状と同じ形状の励振電極を位置精度良く形成することは非常に困難であるという問題を解決するため、励振電極を凸部の段差部より圧電基板の端面に向かって所定の位置まで拡大させた。 Hereinafter, the present invention will be described in detail based on illustrated embodiments.
FIG. 1 is an external view showing a first embodiment of a piezoelectric vibrator according to the present invention. The present embodiment was made to solve the problem of the conventional example described with reference to FIG. 6, and the piezoelectric vibrator having a mesa structure has a capacitance ratio as compared with a piezoelectric vibrator having a beveling and convex structure. In order to solve the problem of lowering and the problem that it is very difficult to form an excitation electrode having the same shape as the mesa shape with high positional accuracy when Ni + Au is used as an electrode. It expanded to the predetermined position toward the end surface of a piezoelectric substrate.

図１を説明すると、図１（ａ）は上面図を示し、図１（ｂ）はＡ方向からの側面図を示しており、メサ構造を有する圧電振動子２１は、圧電基板２２の両主面に凸部２３を形成した後、凸部２３の表裏に励振電極２４を形成してリード電極２５を介してパッド電極２６に接続したものである。図１に示すように、本実施例によれば、励振電極２４は、圧電基板２２の凸部２３より拡大して形成しており、従って、電極寸法（大きさ）で決まる容量Ｃ０が増加して圧電振動子の容量比が増加した。   Referring to FIG. 1, FIG. 1A shows a top view, FIG. 1B shows a side view from the direction A, and the piezoelectric vibrator 21 having a mesa structure has both main piezoelectric substrates 22. After the convex portion 23 is formed on the surface, the excitation electrode 24 is formed on the front and back of the convex portion 23 and connected to the pad electrode 26 via the lead electrode 25. As shown in FIG. 1, according to the present embodiment, the excitation electrode 24 is formed to be larger than the convex portion 23 of the piezoelectric substrate 22, and therefore the capacitance C0 determined by the electrode dimension (size) increases. As a result, the capacitance ratio of the piezoelectric vibrator increased.

又、励振電極２４の、凸部２３より拡大した部分の面積（電極量）を可変することにより、圧電振動子の容量比を任意に設定することが可能となる。そこで、本実施例のような励振電極の構造とすることにより、べべリング、或いはコンベックスと言った構造の圧電振動子と同等の性能を有したメサ構造を有する圧電振動子が実現出来る。   Further, by changing the area (electrode amount) of the excitation electrode 24 that is enlarged from the convex portion 23, the capacitance ratio of the piezoelectric vibrator can be arbitrarily set. Therefore, by using the structure of the excitation electrode as in this embodiment, a piezoelectric vibrator having a mesa structure having performance equivalent to that of a piezoelectric vibrator having a structure called beveling or convex can be realized.

一方、励振電極２４を、圧電基板２２の凸部２３より拡大して形成したため、形成した励振電極２４が多少寸法ずれを起こしても、圧電振動子の特性に影響を与えることはない。
更に、励振電極２４を、圧電基板２２の凸部２３より拡大して形成したため、従来、励振電極より導出していたリード電極が、凸部分のエッジ部（段差部）で断線し易いと言った問題の解決が図られた。 On the other hand, since the excitation electrode 24 is formed so as to be larger than the convex portion 23 of the piezoelectric substrate 22, even if the formed excitation electrode 24 is slightly displaced, the characteristics of the piezoelectric vibrator are not affected.
Furthermore, since the excitation electrode 24 is formed so as to be enlarged from the convex portion 23 of the piezoelectric substrate 22, it has been said that the lead electrode that has been conventionally derived from the excitation electrode is likely to be disconnected at the edge portion (step portion) of the convex portion. The problem was solved.

図２は、本発明に係る圧電振動子の第二の実施例を示す外観構造である。本実施例は、図７により説明した従来例の問題を解決するためになされたものであって、圧電振動子を小型化した際に、圧電基板に対する励振電極面積の割合が増加し、外部接続用のパッド電極と励振電極との距離Ｌが短くなることにより生ずる振動特性の劣化や、励振電極とパッド電極とが短絡するという問題を解決するために、凸部の形成位置を圧電基板の中央部から図２紙面の向かって右方向に移動させたものである。べべリング、或いはコンベックス構造の圧電振動子は、その加工方法により圧電基板の中央部にエネルギーを閉じ込めているが、メサ構造の圧電振動子は凸部の形成位置を移動させてエネルギーの閉じ込め位置を可変することが可能である。   FIG. 2 is an external structure showing a second embodiment of the piezoelectric vibrator according to the present invention. The present embodiment was made to solve the problem of the conventional example described with reference to FIG. 7. When the piezoelectric vibrator was downsized, the ratio of the excitation electrode area to the piezoelectric substrate increased, and the external connection In order to solve the problem of the deterioration of the vibration characteristics caused by the distance L between the pad electrode and the excitation electrode for use and the short circuit between the excitation electrode and the pad electrode, the projecting portion is formed at the center of the piezoelectric substrate. 2 is moved rightward from the section toward the paper surface of FIG. In a beveling or convex structure piezoelectric vibrator, energy is confined in the center of the piezoelectric substrate by its processing method, but in the mesa structure piezoelectric vibrator, the formation position of the convex part is moved to adjust the energy confinement position. It is possible to vary.

図２を説明すると、図２（ａ）は上面図を示し、図２（ｂ）はＡ方向からの側面図を示しており、メサ構造を有する圧電振動子２７は、圧電基板２８の両主面に凸部２９を形成した後、凸部２９の表裏に励振電極３０を形成してリード電極３１を介してパッド電極３２に接続したものである。図２に示したように、本実施例においては、励振電極の中心線をＢからＢ’に移動させたものである。そのため、励振電極３０とパッド電極３２間の距離Ｌが広がり、励振電極部から微量に漏れる振動が接着剤の影響を受け、振動特性の劣化が生ずると言う問題を解決した。一方、外部接続用のパッド電極と励振電極との距離Ｌが広がり、導電性接着剤を塗布した際に励振電極とパッド電極とが電気的に短絡する可能性は低減した。   Referring to FIG. 2, FIG. 2A shows a top view, FIG. 2B shows a side view from the direction A, and the piezoelectric vibrator 27 having a mesa structure has both main piezoelectric substrates 28. After the convex portion 29 is formed on the surface, excitation electrodes 30 are formed on the front and back of the convex portion 29 and connected to the pad electrode 32 through the lead electrode 31. As shown in FIG. 2, in this embodiment, the center line of the excitation electrode is moved from B to B '. Therefore, the distance L between the excitation electrode 30 and the pad electrode 32 is widened, and the problem that the vibration leaking from the excitation electrode portion is affected by the adhesive and the vibration characteristics are degraded is solved. On the other hand, the distance L between the pad electrode for external connection and the excitation electrode is increased, and the possibility that the excitation electrode and the pad electrode are electrically short-circuited when the conductive adhesive is applied is reduced.

図３は、本発明に係る圧電振動子の第三の実施例を示す外観構造である。本実施例は、図１に示した実施例と図２に示した実施例とを兼ね備えた実施例であって、メサ構造を有する圧電振動子が、べべリング、コンベックス構造の振動子と比べて容量比が低下すると言う問題と、Ｎｉ＋Ａｕを電極として用いる場合、メサ形状と同じ形状の励振電極を位置
精度良く形成することは非常に困難であるという問題と、圧電振動子を小型化した際に、圧電基板に対する励振電極面積の割合が増加し、外部接続用のパッド電極と励振電極との距離Ｌが短くなることにより生ずる問題とを解決するために、励振電極を凸部の段差部より圧電基板の端面向かって所定の位置まで拡大させると共に、凸部の形成位置を圧電基板の中央部から図３紙面の向かって右方向に移動させたものである。 FIG. 3 is an external view showing a third embodiment of the piezoelectric vibrator according to the present invention. The present embodiment is an embodiment having both the embodiment shown in FIG. 1 and the embodiment shown in FIG. 2, and a piezoelectric vibrator having a mesa structure is compared with a vibrator having a beveling and convex structure. The problem is that the capacitance ratio decreases, and when Ni + Au is used as the electrode, the excitation electrode having the same shape as the mesa shape is positioned.
The problem that it is very difficult to form with high accuracy, and when the piezoelectric vibrator is miniaturized, the ratio of the excitation electrode area to the piezoelectric substrate increases, and the distance L between the pad electrode for external connection and the excitation electrode In order to solve the problem caused by the shortening, the excitation electrode is enlarged from the step portion of the convex portion to a predetermined position toward the end surface of the piezoelectric substrate, and the formation position of the convex portion is illustrated from the center portion of the piezoelectric substrate. It is moved rightward toward the three paper planes.

図３を説明すると、図３（ａ）は上面図を示し、図３（ｂ）はＡ方向からの側面図を示しており、メサ構造を有する圧電振動子３３は、圧電基板３４の両主面に凸部３５を形成した後、凸部３５の表裏に励振電極３６を形成してリード電極３７を介してパッド電極３８に接続したものである。
本実施例においては、励振電極３６は、圧電基板３４の凸部３５より拡大して形成すると共に、励振電極３６の中心線をＢからＢ’に移動させたものである。 3A is a top view, FIG. 3B is a side view from the direction A, and the piezoelectric vibrator 33 having a mesa structure has both main piezoelectric substrates 34. After the convex portion 35 is formed on the surface, the excitation electrode 36 is formed on the front and back of the convex portion 35 and connected to the pad electrode 38 via the lead electrode 37.
In this embodiment, the excitation electrode 36 is formed to be larger than the convex portion 35 of the piezoelectric substrate 34 and the center line of the excitation electrode 36 is moved from B to B ′.

従って、圧電振動子は、容量比が増加すると共に励振電極を形成する際に形状及び位置に誤差を生じても特性の劣化を防ぎ、又、外部接続用のパッド電極と励振電極との距離Ｌが広がるため、励振電極部から微量に漏れる振動が接着剤の影響を受けて振動特性が劣化するという問題を防止すると共に、導電性接着剤を塗布した際に励振電極とパッド電極が電気的に短絡する可能性を低減させた。   Accordingly, the piezoelectric vibrator prevents the deterioration of the characteristics even if the capacitance ratio increases and an error occurs in the shape and position when forming the excitation electrode, and the distance L between the pad electrode for external connection and the excitation electrode Therefore, vibration that leaks in a minute amount from the excitation electrode part is affected by the adhesive, and the vibration characteristics are deteriorated. In addition, when the conductive adhesive is applied, the excitation electrode and the pad electrode are electrically connected. Reduced the possibility of short circuit.

図４は、本発明に係わるメサ構造を形成した圧電基板母材の外観例であり、図４（ａ）は上面図を示し、図４（ｂ）はＡ方向からの側面図を示す。
本実施例は、圧電振動子を量産する際に障害となっていた圧電基板母材から圧電基板の個片に切り分けるダイシング工程の採用を止め、圧電基板母材に形成した凸部の周囲に、所望の矩形状の個片の圧電基板が得られるよう所定の寸法で３辺のスリット状の貫通孔をエッチングにより形成し、残された１方向には貫通孔を形成しないで個片の圧電基板を保持し、圧電基板母材から個片の圧電基板を分離する際は、非貫通部を折り割ることで個片に分離した。 4A and 4B are external views of a piezoelectric substrate base material having a mesa structure according to the present invention. FIG. 4A shows a top view and FIG. 4B shows a side view from the A direction.
In this example, the adoption of the dicing process of cutting the piezoelectric substrate base material, which was an obstacle when mass producing piezoelectric vibrators, into individual pieces of the piezoelectric substrate, was stopped, and around the protrusions formed on the piezoelectric substrate base material, A three-side slit-like through-hole is formed by etching so as to obtain a desired rectangular piece of piezoelectric substrate, and the piece of piezoelectric substrate is not formed in the remaining one direction. When the piezoelectric substrate is separated from the piezoelectric substrate base material, the non-penetrating portion is broken to separate the individual piezoelectric substrates.

図４は、圧電基板母材に夫々メサ構造（凸部）を形成した後、凸部の周囲の３辺にスリット状の貫通孔を設けた状態を示す。この様な圧電基板母材を形成する際は、先ず、大型の圧電基板母材３９の凸部４０を形成する位置に、Ｃｒ＋Ａｕ＋フォトレジスト等を組み合わせてエッチングの耐性膜を生成し、エッチング加工によりメサ構造を形成する。更に、エッチング加工により、凸部の周囲の所定の位置に、３辺に渡って貫通孔４１を形成し、残された１方向は非貫通部４２とする。次に、非貫通部４１を折り割り個片の圧電基板として電極膜の形成工程に移る。
従って、ダイシング工程をこのような新たな工程に変更したことにより、バッチ処理化が可能となると共に、ダイシング工程にかかる費用が大幅に削減することが出来る。 FIG. 4 shows a state where a mesa structure (convex portion) is formed on the piezoelectric substrate base material, and then slit-shaped through holes are provided on three sides around the convex portion. When forming such a piezoelectric substrate base material, first, an etching resistant film is formed by combining Cr + Au + photoresist or the like at the position where the convex portion 40 of the large piezoelectric substrate base material 39 is formed, and etching processing is performed. A mesa structure is formed. Furthermore, through holes 41 are formed over three sides at a predetermined position around the convex portion by etching, and the remaining one direction is a non-through portion 42. Next, the non-penetrating portion 41 is folded into individual pieces of piezoelectric substrates, and the process proceeds to the electrode film forming step.
Therefore, by changing the dicing process to such a new process, batch processing can be realized and the cost for the dicing process can be greatly reduced.

本発明に係る圧電振動子の第一の実施例を示す外観構造である。It is an external appearance structure which shows the 1st Example of the piezoelectric vibrator which concerns on this invention. 本発明に係る圧電振動子の第二の実施例を示す外観構造である。It is an external appearance structure which shows the 2nd Example of the piezoelectric vibrator which concerns on this invention. 本発明に係る圧電振動子の第三の実施例を示す外観構造である。It is an external appearance structure which shows the 3rd Example of the piezoelectric vibrator which concerns on this invention. 本発明に係わるメサ構造を形成した圧電基板母材の外観例を示す。The external appearance example of the piezoelectric substrate base material which formed the mesa structure concerning this invention is shown. べべリング、コンベックス、メサ構造の圧電基板の形状を示す外観例である。It is an example of an external appearance showing the shape of a piezoelectric substrate having a beveling, convex, or mesa structure. 従来の圧電振動子の第一の外観構造例である。It is the example of the 1st external appearance structure of the conventional piezoelectric vibrator. 従来の圧電振動子の第二の外観構造例である。It is a 2nd external appearance structural example of the conventional piezoelectric vibrator. 従来のメサ構造を形成した圧電基板母材の外観例を示す。An example of appearance of a piezoelectric substrate base material having a conventional mesa structure is shown.

符号の説明Explanation of symbols

１・・圧電基板
２・・励振電極
３・・圧電基板
４・・励振電極
５・・圧電基板
６・・励振電極
７・・圧電振動子
８・・圧電基板
９・・凸部
１０・・励振電極
１１・・リード電極
１２・・パッド電極
１３・・圧電振動子
１４・・圧電基板
１５・・凸部
１６・・励振電極
１７・・リード電極
１８・・パッド電極
１９・・圧電基板母材
２０・・凸部
２１・・圧電振動子
２２・・圧電基板
２３・・凸部
２４・・励振電極
２５・・リード電極
２６・・パッド電極
２７・・圧電振動子
２８・・圧電基板
２９・・凸部
３０・・励振電極
３１・・リード電極
３２・・パッド電極
３３・・圧電振動子
３４・・圧電基板
３５・・凸部
３６・・励振電極
３７・・リード電極
３８・・パッド電極
３９・・圧電基板母材
４０・・凸部
４１・・貫通孔
４２・・非貫通部 1..Piezoelectric substrate 2..Excitation electrode 3..Piezoelectric substrate 4..Excitation electrode 5..Piezoelectric substrate 6..Excitation electrode 7..Piezoelectric vibrator 8..Piezoelectric substrate 9..Convex part 10..Excitation Electrode 11, lead electrode 12, pad electrode 13, piezoelectric vibrator 14, piezoelectric substrate 15, convex portion 16, excitation electrode 17, lead electrode 18, pad electrode 19, piezoelectric substrate base material 20 ..Convex part 21..Piezoelectric vibrator 22..Piezoelectric substrate 23..Convex part 24..Excitation electrode 25..Lead electrode 26..Pad electrode 27..Piezoelectric vibrator 28..piezoelectric substrate 29..convex Part 30 ..excitation electrode 31 ..lead electrode 32 ..pad electrode 33 ..piezoelectric vibrator 34 ..piezoelectric substrate 35 ..convex part 36 ..excitation electrode 37 ..lead electrode 38. Piezoelectric substrate base material 40 ・ ・ Convex portion 41 ・ ・ Through hole 42 ・ ・ Non-through

Claims (2)

圧電基板の両主面の相対向する位置に所定の形状の凸部を設け、該凸部上面に励振電極を形成すると共に、該励振電極と前記圧電基板端部に配置したパッド電極とを接続するためのリード電極を備えた圧電振動子において、
前記励振電極を、圧電基板の端部に向って前記凸部の段差部より外側の領域まで拡大し、前記凸部の中心を前記圧電基板の中心より前記パッド電極から遠ざかる方向にずらすことを特徴とする圧電振動子。 Protrusions with a predetermined shape are provided at opposite positions on both main surfaces of the piezoelectric substrate, and an excitation electrode is formed on the upper surface of the projection, and the excitation electrode is connected to the pad electrode disposed at the end of the piezoelectric substrate. In a piezoelectric vibrator having a lead electrode for
The excitation electrode is expanded to a region outside the step portion of the convex portion toward the end portion of the piezoelectric substrate, and the center of the convex portion is shifted in a direction away from the pad electrode from the center of the piezoelectric substrate. Piezoelectric vibrator. 請求項１に記載の圧電振動子において、
前記外側の領域の面積によって、圧電振動子の並列容量を設定することを特徴とする圧電振動子。 The piezoelectric vibrator according to claim 1,
A piezoelectric vibrator, wherein a parallel capacitance of the piezoelectric vibrator is set according to an area of the outer region.
JP2003325560A 2003-09-18 2003-09-18 Piezoelectric vibrator Expired - Lifetime JP4506135B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003325560A JP4506135B2 (en) 2003-09-18 2003-09-18 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003325560A JP4506135B2 (en) 2003-09-18 2003-09-18 Piezoelectric vibrator

Publications (3)

Publication Number Publication Date
JP2005094410A JP2005094410A (en) 2005-04-07
JP2005094410A5 JP2005094410A5 (en) 2006-09-21
JP4506135B2 true JP4506135B2 (en) 2010-07-21

Family

ID=34455966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003325560A Expired - Lifetime JP4506135B2 (en) 2003-09-18 2003-09-18 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JP4506135B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8614607B2 (en) 2011-03-18 2013-12-24 Seiko Epson Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9431995B2 (en) 2014-07-31 2016-08-30 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
US9837982B2 (en) 2011-03-09 2017-12-05 Seiko Epson Corporation Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4558433B2 (en) * 2004-10-01 2010-10-06 日本電波工業株式会社 Crystal oscillator
JP4572807B2 (en) 2005-10-31 2010-11-04 エプソントヨコム株式会社 Mesa-type piezoelectric vibrating piece
JP4771070B2 (en) * 2006-01-12 2011-09-14 エプソントヨコム株式会社 Piezoelectric vibrating piece and piezoelectric device
JP4771069B2 (en) * 2006-01-12 2011-09-14 エプソントヨコム株式会社 Piezoelectric vibrating piece and piezoelectric device
JP4305542B2 (en) 2006-08-09 2009-07-29 エプソントヨコム株式会社 AT cut quartz crystal resonator element and manufacturing method thereof
JP2008263387A (en) * 2007-04-11 2008-10-30 Epson Toyocom Corp Mesa piezoelectric vibration chip
JP4936221B2 (en) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 Mesa-type piezoelectric vibrating piece, mesa-type piezoelectric vibrating device, oscillator, and electronic device
JP5151823B2 (en) * 2008-09-02 2013-02-27 セイコーエプソン株式会社 Piezoelectric vibrating piece, piezoelectric vibrator and oscillator
JP5625432B2 (en) * 2010-03-26 2014-11-19 セイコーエプソン株式会社 Piezoelectric vibration element and piezoelectric vibrator
JP5505647B2 (en) * 2010-11-19 2014-05-28 セイコーエプソン株式会社 Piezoelectric vibrating piece and piezoelectric vibrator
JP2012199861A (en) * 2011-03-23 2012-10-18 Nippon Dempa Kogyo Co Ltd Crystal device and method for inspecting the same
JP5756712B2 (en) * 2011-08-17 2015-07-29 日本電波工業株式会社 Crystal device
JP5930526B2 (en) 2012-02-20 2016-06-08 日本電波工業株式会社 Piezoelectric vibration element and piezoelectric device
JP6128868B2 (en) * 2012-02-23 2017-05-17 キヤノン株式会社 Vibration type driving device and imaging device
JP5293852B2 (en) * 2012-02-27 2013-09-18 セイコーエプソン株式会社 Mesa-type piezoelectric vibrating piece, mesa-type piezoelectric vibrating device, oscillator, and electronic device
JP5943186B2 (en) * 2012-03-19 2016-06-29 セイコーエプソン株式会社 Vibrating piece, vibrator, electronic device, and electronic equipment
JP6035808B2 (en) * 2012-03-27 2016-11-30 セイコーエプソン株式会社 Vibration element, vibrator, electronic device, and electronic apparatus
JP5459352B2 (en) * 2012-06-01 2014-04-02 セイコーエプソン株式会社 Vibrating piece
JP6175743B2 (en) 2012-06-06 2017-08-09 セイコーエプソン株式会社 Manufacturing method of vibration element
JP6083144B2 (en) * 2012-07-27 2017-02-22 セイコーエプソン株式会社 Vibrating piece, vibrating element, vibrator, electronic device, electronic apparatus, moving body, and method of manufacturing vibrating piece
JP6000724B2 (en) * 2012-07-31 2016-10-05 京セラクリスタルデバイス株式会社 Crystal oscillator
JP5918067B2 (en) * 2012-07-31 2016-05-18 京セラクリスタルデバイス株式会社 Crystal oscillator
JP6108708B2 (en) * 2012-07-31 2017-04-05 京セラクリスタルデバイス株式会社 Crystal oscillator
JP5949445B2 (en) * 2012-10-26 2016-07-06 株式会社大真空 Piezoelectric filter
JP5541377B2 (en) * 2013-01-31 2014-07-09 日本電波工業株式会社 Crystal resonator element, crystal resonator and electronic component
JP2014075848A (en) * 2014-01-14 2014-04-24 Seiko Epson Corp Vibration piece and oscillator
JP5871144B2 (en) * 2014-03-19 2016-03-01 セイコーエプソン株式会社 Piezoelectric vibrator
JP5741876B2 (en) * 2014-03-19 2015-07-01 セイコーエプソン株式会社 Piezoelectric vibrating piece and piezoelectric vibrator
JP5949882B2 (en) * 2014-11-20 2016-07-13 セイコーエプソン株式会社 Manufacturing method of vibrating piece
JP2016174301A (en) 2015-03-17 2016-09-29 セイコーエプソン株式会社 Vibration piece, vibrator, vibration device, oscillator, electronic apparatus, and mobile
JP2016187153A (en) 2015-03-27 2016-10-27 セイコーエプソン株式会社 Oscillator, electronic apparatus, and mobile body
JP6577791B2 (en) * 2015-08-24 2019-09-18 京セラ株式会社 Crystal element plate, crystal resonator element and crystal device
JP2017085386A (en) * 2015-10-29 2017-05-18 京セラクリスタルデバイス株式会社 Crystal device
JP6315115B2 (en) * 2017-01-20 2018-04-25 セイコーエプソン株式会社 Vibration element, vibrator, electronic device, electronic device, and moving object

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151023U (en) * 1981-03-16 1982-09-22
JPH02231808A (en) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd Electrode structure of crystal resonator
JPH0316310A (en) * 1988-12-12 1991-01-24 Nippon Dempa Kogyo Co Ltd Crystal oscillator
JPH04127709A (en) * 1990-09-19 1992-04-28 Seiko Epson Corp At cut crystal oscillator
JPH04175004A (en) * 1990-03-28 1992-06-23 Nippon Dempa Kogyo Co Ltd overtone piezoelectric oscillator
JPH0652230U (en) * 1992-12-11 1994-07-15 シチズン時計株式会社 Piezoelectric vibrator
JP2001223557A (en) * 2000-02-10 2001-08-17 Nippon Dempa Kogyo Co Ltd Electrode forming method of crystal resonator and crystal resonator
JP2001230655A (en) * 2000-02-18 2001-08-24 Toyo Commun Equip Co Ltd Piezoelectric vibrator
JP2001326554A (en) * 2000-05-16 2001-11-22 Toyo Commun Equip Co Ltd Piezoelectric vibrator

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151023U (en) * 1981-03-16 1982-09-22
JPH0316310A (en) * 1988-12-12 1991-01-24 Nippon Dempa Kogyo Co Ltd Crystal oscillator
JPH02231808A (en) * 1989-03-03 1990-09-13 Toyo Commun Equip Co Ltd Electrode structure of crystal resonator
JPH04175004A (en) * 1990-03-28 1992-06-23 Nippon Dempa Kogyo Co Ltd overtone piezoelectric oscillator
JPH04127709A (en) * 1990-09-19 1992-04-28 Seiko Epson Corp At cut crystal oscillator
JPH0652230U (en) * 1992-12-11 1994-07-15 シチズン時計株式会社 Piezoelectric vibrator
JP2001223557A (en) * 2000-02-10 2001-08-17 Nippon Dempa Kogyo Co Ltd Electrode forming method of crystal resonator and crystal resonator
JP2001230655A (en) * 2000-02-18 2001-08-24 Toyo Commun Equip Co Ltd Piezoelectric vibrator
JP2001326554A (en) * 2000-05-16 2001-11-22 Toyo Commun Equip Co Ltd Piezoelectric vibrator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9837982B2 (en) 2011-03-09 2017-12-05 Seiko Epson Corporation Vibrating element, vibrator, oscillator, and electronic device with stepped excitation section
US8614607B2 (en) 2011-03-18 2013-12-24 Seiko Epson Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9093634B2 (en) 2011-03-18 2015-07-28 Seiko Epson Corporation Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9948275B2 (en) 2011-03-18 2018-04-17 Seiko Epson Corporation Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
US9431995B2 (en) 2014-07-31 2016-08-30 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object
US9716484B2 (en) 2014-07-31 2017-07-25 Seiko Epson Corporation Resonator element, resonator, resonator device, oscillator, electronic device, and mobile object

Also Published As

Publication number Publication date
JP2005094410A (en) 2005-04-07

Similar Documents

Publication Publication Date Title
JP4506135B2 (en) Piezoelectric vibrator
JP2005094410A5 (en)
JP5880538B2 (en) Piezoelectric vibrating piece, piezoelectric vibrator, method for manufacturing piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrator
JP6017189B2 (en) Piezoelectric vibrating piece and piezoelectric device
JP2007251918A (en) Quartz vibrator
JP2016220118A (en) Manufacturing method of piezoelectric vibration piece, piezoelectric vibration piece, and piezoelectric transducer
JP2007214941A (en) Piezoelectric vibration chip and piezoelectric device
KR101532115B1 (en) Piezo vibrator and method for manufacturing the same
JP5929244B2 (en) Thickness-slip vibration type crystal piece, thickness-shear vibration type crystal piece with electrode, crystal diaphragm, crystal resonator and crystal oscillator
JP2007013910A (en) Piezoelectric resonator
JP4661383B2 (en) Method for manufacturing piezoelectric oscillator
JP2011045119A (en) Piezoelectric vibrating-reed and method of processing the same
WO2014208251A1 (en) Tuning fork-type piezoelectric vibrator part and tuning fork-type piezoelectric vibrator
JP2007318350A (en) Piezoelectric vibrating reed and manufacturing method thereof
JP6017250B2 (en) Piezoelectric device
JP5251369B2 (en) Method for manufacturing piezoelectric vibrating piece
KR20160032600A (en) Piezoelectric vibration piece, method of fabricating piezoelectric vibration piece, and piezoelectric device
JP6123217B2 (en) Piezoelectric vibrating piece
US20170070208A1 (en) Piezoelectric oscillator and method of making the same
JP2007006375A (en) Piezoelectric resonator and manufacturing method thereof
JP2013187735A (en) Crystal vibration piece and crystal device
JP5249561B2 (en) Piezoelectric vibrating piece and piezoelectric device
JP5599057B2 (en) Package and piezoelectric vibrator
JP2010062795A (en) Piezoelectric vibration piece, method of manufacturing piezoelectric vibration piece, piezoelectric device, and method of manufacturing piezoelectric device
JP2002335142A (en) Piezoelectric vibrating piece, method of manufacturing piezoelectric vibrating piece, piezoelectric vibrator using the same, and piezoelectric oscillator

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060809

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060809

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20060809

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20070402

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090417

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090512

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090709

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20091006

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100105

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20100125

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100406

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100419

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130514

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4506135

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130514

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130514

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130514

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130514

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140514

Year of fee payment: 4

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term