JP4483245B2 - ORGANIC LIGHT-EMITTING ELEMENT, ITS MANUFACTURING METHOD, AND DISPLAY DEVICE - Google Patents

Description

  The present invention relates to an organic light emitting device having an auxiliary wiring between pixels, a manufacturing method thereof, and a display device using the same.

  In recent years, an organic light emitting display using an organic light emitting element has attracted attention as one of flat panel displays. Organic light-emitting displays are self-luminous, have a wide viewing angle and low power consumption, and are considered to be sufficiently responsive to high-definition high-speed video signals. Development is underway for practical application.

  As an organic light emitting element, for example, as shown in FIG. 20, a substrate 110 in which a first electrode 111, an organic layer 112 including a light emitting layer, and a second electrode 113 are sequentially stacked is known. The second electrode 113 may be electrically connected to the low-resistance auxiliary wiring 113A in order to suppress voltage drop and prevent variation in luminance within the screen (see, for example, Patent Document 1). .

The material of the organic layer 112 includes a low molecular weight type and a high molecular weight type, and a vacuum evaporation method is generally used to form the low molecular weight organic layer 112. When the organic layer 112 is formed by the vacuum evaporation method, as shown in FIG. 21, the auxiliary wiring 113A is formed using the pixel coating mask 120 having the opening 121 corresponding to the position where the organic layer 112 is to be formed. The organic layer 111 is not covered. After that, by forming the second electrode 113 on almost the entire surface of the substrate 110, the auxiliary wiring 113A and the second electrode 113 are electrically connected.
JP 2001-195008 A JP 2002-226722 A

  However, when a high-definition organic light-emitting display is manufactured, it is difficult to form the organic layer 112 with high accuracy due to the thermal expansion of the pixel coating mask 120. Further, if particles adhering to the pixel coating mask 120 adhere to the organic layer 112 or the like, there is a possibility of causing a short circuit. For this reason, it is desirable to form the organic layer 112 without using the pixel coating mask 120. In this case, since the organic layer 112 is formed on almost the entire surface of the substrate 110, the auxiliary wiring 113A and the second layer There has been a problem that electrical connection of the two electrodes 113 becomes impossible.

  The present invention has been made in view of such problems, and an object of the present invention is to provide an organic light emitting device capable of electrically connecting the auxiliary wiring and the second electrode without using a pixel coating mask and a method for manufacturing the same. An object is to provide a display device.

A first organic light emitting device according to the present invention has a first electrode formed on a substrate and a protrusion structure including a plurality of weight-shaped or columnar protrusions on the upper surface. an auxiliary wiring formed in insulating, and to include a light-emitting layer et provided on the first electrode and auxiliary wires are co, organic layer exposed at least the tip portion of the impact force structure, the organic top covers the layers, at least example Bei at the tip to the auxiliary wiring and the second electrode electrically connected to the auxiliary wiring projection structure comprises a base layer having a plurality of pointed projections, covers the base layer And a laminated structure with a conductive layer having a protrusion structure corresponding to a plurality of protrusions of the base layer .
A second organic light emitting device according to the present invention has a first electrode formed on a substrate and a protrusion structure including a plurality of weight-shaped or plurality of columnar protrusions on the upper surface. Insulating auxiliary wiring, including a light emitting layer and provided on the first electrode and the auxiliary wiring, the organic layer exposing at least the tip of the protruding structure, and covering the organic layer, the protruding structure A second electrode electrically connected to the auxiliary wiring at least at the tip of the auxiliary wiring. The auxiliary wiring has a base layer and a conductive layer laminated in order from the substrate side, and a protrusion structure is provided on the upper surface of the conductive layer. It is what.

The manufacturing method of the first organic light emitting device according to the present invention, the first electrode and the first electrode over a substrate having a projection structure comprising a plurality of conical or columnar protrusion on the upper surface which is insulated and auxiliary A step of forming a wiring; a step of forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring; and a step of exposing at least a tip of the protruding structure from the organic layer; and a second step on the organic layer. and forming an electrode, electrically saw including the step of connecting the second electrode in at least the tip portion and the auxiliary wiring projection structure, after the underlayer and conductive layer is formed from the substrate side in this order as an auxiliary wiring, board The protrusion structure is formed by generating irregularities on the upper surface of the conductive layer by heat treatment for maintaining the temperature at a high temperature .
The second method for manufacturing an organic light-emitting device according to the present invention includes an auxiliary structure having a first electrode on a substrate and an insulating structure that is insulated from the first electrode and has a plurality of weight-shaped or columnar protrusions on the upper surface. A step of forming a wiring; a step of forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring; and a step of exposing at least a tip of the protruding structure from the organic layer; and a second step on the organic layer. Forming an electrode, and electrically connecting the second electrode and the auxiliary wiring at at least the tip of the protruding structure, and forming the base layer including a plurality of pointed protrusions as the auxiliary wiring, By covering with a conductive layer, a protrusion structure corresponding to a plurality of protrusions of the base layer is formed on the upper surface of the conductive layer.
The third method for manufacturing an organic light emitting device according to the present invention includes an auxiliary structure having a first electrode on a substrate and a projection structure which is insulated from the first electrode and has a plurality of spindle-shaped or columnar projections on the upper surface. A step of forming a wiring; a step of forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring; and a step of exposing at least a tip of the protruding structure from the organic layer; and a second step on the organic layer. Forming the electrode and electrically connecting the second electrode and the auxiliary wiring at least at the tip of the protruding structure. After forming the base layer and the conductive layer in order from the substrate side as the auxiliary wiring, etching is performed. The protrusion structure is formed by roughening the surface of the upper surface of the conductive layer to form irregularities.

A first display device according to the present invention has a plurality of organic light emitting elements on a substrate, and the organic light emitting elements have a first electrode formed on the substrate and a plurality of spindles or a plurality of columns on the upper surface. of having a protrusion structure consisting of protrusions, and the first electrode on the substrate and the auxiliary wiring formed by the insulating, Re et provided on the first electrode and auxiliary wires co to include light-emitting layer , an organic layer to expose the at least the tip portion of the impact force structure, covering the organic layer, Bei example and a second electrode electrically connected to the auxiliary wiring at least at the tip portion of the projection structure, auxiliary line And a laminated structure of a base layer having a plurality of pointed protrusions and a conductive layer covering the base layer and having a protrusion structure corresponding to the plurality of protrusions of the base layer on the upper surface .
The second display device according to the present invention has a plurality of organic light emitting elements on a substrate, and the organic light emitting elements have a first electrode formed on the substrate and a plurality of weights or a plurality of pillars on the upper surface. At least the tip of the protrusion structure, including an auxiliary wiring formed on the substrate and insulated from the first electrode, a light emitting layer and provided on the first electrode and the auxiliary wiring. And an organic layer that covers the organic layer, and a second electrode that is electrically connected to the auxiliary wiring at least at the tip of the protruding structure. The auxiliary wiring includes a base layer and a conductive layer as a substrate. The protrusions are provided on the upper surface of the conductive layer.

In the first or second organic light emitting device according to the present invention and the first or second display device according to the present invention, a protrusion structure comprising a plurality of weight-shaped or plurality of columnar protrusions is provided on the upper surface of the auxiliary wiring. Since at least the tip of the projection structure is exposed from the organic layer, the auxiliary wiring and the second electrode are electrically connected at least at the tip of the projection structure, and the sheet resistance of the second electrode is reduced. And the voltage drop in a 2nd electrode is suppressed. Therefore, variation in luminance between the peripheral portion and the central portion of the display screen is suppressed.

In the first, second, or third method for manufacturing an organic light emitting device according to the present invention, the first electrode on the substrate and the first electrode are insulated from the first electrode, and a plurality of weight-shaped or plurality of columnar protrusions are formed on the upper surface. An auxiliary wiring having a protruding structure is formed. Subsequently, an organic layer including a light emitting layer is formed on the first electrode and the auxiliary wiring. At this time, since the protrusion structure is provided on the upper surface of the auxiliary wiring, even if the organic layer is formed on almost the entire surface of the substrate, the upper surface of the auxiliary wiring is not completely covered with the organic layer. Is exposed from the organic layer. After that, the second electrode is formed on the organic layer, and the second electrode and the auxiliary wiring are electrically connected at least at the tip of the protruding structure.

According to the first or second organic light emitting device of the present invention and the first or second display device of the present invention, a protrusion structure comprising a plurality of weight-shaped or plurality of columnar protrusions is provided on the upper surface of the auxiliary wiring, Since at least the tip portion of the projection structure is exposed from the organic layer, the auxiliary wiring and the second electrode are electrically connected at least at the tip portion of the projection structure, and the voltage drop in the second electrode is reduced by the auxiliary wiring. It is possible to suppress the variation in luminance within the screen. Therefore, display quality can be improved.

According to the first, second, or third method for manufacturing an organic light emitting device of the present invention, after forming an auxiliary wiring having a protrusion structure composed of a plurality of weight-shaped or plurality of columnar protrusions on the upper surface, At least the tip portion is exposed from the organic layer, and the second electrode and the auxiliary wiring are electrically connected at least at the tip portion of the protrusion structure. Even if it is formed over the entire surface, the auxiliary wiring and the second electrode can be electrically connected. Therefore, it is possible to prevent film formation defects such as organic layer chipping due to the displacement of the pixel coating mask or the influence of thermal expansion, and to improve the yield, which is extremely advantageous for high definition. Further, it is possible to prevent dust or the like adhering to the pixel coating mask from adhering to the organic layer or the like and causing a short circuit. Furthermore, there is no need for special processing for electrically connecting the second electrode and the auxiliary wiring, and the number of steps can be reduced.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows a cross-sectional structure of a display device according to an embodiment of the present invention. This display device is used as an ultra-thin organic light-emitting display, in which a drive panel 10 and a sealing panel 20 are arranged to face each other, and are bonded together by an adhesive layer 30 made of, for example, a thermosetting resin. . The drive panel 10 generates green light and an organic light emitting element 10R that generates red light via a TFT 12 and a planarization layer 13 on a flat substrate 11 made of an insulating material such as glass. The organic light emitting element 10G and the organic light emitting element 10B that generates blue light are sequentially provided in a matrix as a whole.

  The TFT 12 is an active element corresponding to each of the organic light emitting elements 10R, 10G, and 10B, and the organic light emitting elements 10R, 10G, and 10B are driven by an active matrix method. The gate electrode (not shown) of the TFT 12 is connected to a scanning circuit (not shown), and the source and drain (both not shown) are made of an interlayer insulating film 12A made of, for example, silicon oxide or PSG (Phospho-Silicate Glass). Is connected to the wiring 12B. The wiring 12B is connected to the source and drain of the TFT 12 through a connection hole (not shown) provided in the interlayer insulating film 12A and used as a signal line. The wiring 12B is made of, for example, aluminum (Al) or an aluminum (Al) -copper (Cu) alloy. The configuration of the TFT 12 is not particularly limited, and may be, for example, a bottom gate type or a top gate type.

The planarization layer 13 is for planarizing the surface of the substrate 11 on which the TFT 12 is formed, so that the thickness of each layer of the organic light emitting elements 10R, 10G, and 10B is formed uniformly. The planarizing layer 13 is provided with a connection hole 13A that connects the first electrode 14 of the organic light emitting elements 10R, 10G, and 10B and the wiring 12B. The planarization layer 13 is preferably made of a material having a high pattern accuracy because fine connection holes 13A are formed. As the material of the planarizing layer 13, an organic material such as polyimide or an inorganic material such as silicon oxide (SiO ₂ ) can be used.

  The organic light emitting elements 10R, 10G, and 10B include, for example, a first electrode 14 as an anode, an insulating film 15, an organic layer 16 including a light emitting layer, and a cathode through the TFT 12 and the planarization layer 13 from the substrate 11 side. The second electrode 17 is stacked in this order. In addition, an auxiliary wiring 18 that is electrically insulated from the first electrode 14 is formed on the substrate 11, and the auxiliary wiring 18 and the second electrode 17 are electrically connected. A protective film 19 is formed on the second electrode 17 as necessary.

  The first electrode 14 also functions as a reflective layer, and it is desirable to increase the luminous efficiency to have as high a reflectance as possible. For example, the material constituting the first electrode 14 may be a simple substance or an alloy of a metal element such as platinum (Pt), gold (Au), silver (Ag), chromium (Cr) or tungsten (W). The thickness of the one electrode 14 in the stacking direction (hereinafter simply referred to as thickness) is preferably 100 nm or more and 300 nm or less. The first electrode 14 may have a single layer structure or a stacked structure of a plurality of layers.

  The insulating film 15 is for ensuring the insulation between the first electrode 14 and the second electrode 17 and for accurately setting the shape of the light emitting region in the organic light emitting elements 10R, 10G, and 10B to a desired shape. The insulating film 15 has a film thickness of about 600 nm, for example, and is made of an insulating material such as silicon oxide or polyimide. The insulating film 15 is provided with an opening 15A corresponding to the light emitting region in the organic light emitting elements 10R, 10G, and 10B, and an opening 15B corresponding to the auxiliary wiring 18.

  The organic layer 16 is formed on the first electrode 14, the insulating film 15, and the auxiliary wiring 18 on the substrate 11. The configuration and material of the organic layer 16 will be described later.

  The second electrode 17 includes, for example, a semi-transmissive electrode 17A that is semi-transmissive to light generated in the light-emitting layer and a transparent electrode 17B that is transparent to light generated in the light-emitting layer. It has the structure laminated | stacked in this order from this side. The semi-transmissive electrode 17A has a thickness of about 10 nm and is made of a metal or alloy such as silver (Ag), aluminum (Al), magnesium (Mg), calcium (Ca), or sodium (Na). In the present embodiment, for example, an alloy (MgAg alloy) of magnesium (Mg) and silver is used.

The transparent electrode 17B is for reducing the electrical resistance of the translucent electrode 17A and increasing the contact area between the second electrode 17 and the auxiliary wiring 18 to reduce the contact resistance between the two. It is comprised with the electroconductive material which has sufficient translucency with respect to the light generate | occur | produced in (1). The material constituting the transparent electrode 17B is preferably composed of at least one of indium oxide (InO _x ), tin oxide (SnO _x ), and zinc oxide (ZnO _x ), for example. Specifically, for example, a compound (IZO) containing indium, zinc (Zn), and oxygen is preferable. This is because good conductivity and high transmittance can be obtained even when film formation is performed at room temperature. The thickness of the transparent electrode 17B is preferably about 200 nm, for example.

The auxiliary wiring 18 suppresses a voltage drop in the second electrode 17 and has a protruding structure 18A on the upper surface. The protruding structure 18A is for electrically connecting the auxiliary wiring 18 and the second electrode 17 at the tip of the protruding structure 18A so that the upper surface of the auxiliary wiring 18 is not completely covered by the organic layer 16. is there. As the protruding structure 18A, for example, as shown in FIG. 2, an auxiliary wiring 18 is formed by laminating a base layer 181 and a conductive layer 182 in order from the substrate 11 side, and a protruding structure 18A is formed on the upper surface of the conductive layer 182. The ones made are preferred. Further, for example, as illustrated in FIG. 3, after forming a base layer 181 having an uneven structure including a plurality of protrusions, the base layer 181 may be covered with a conductive layer 182 . Accordingly , the protrusion structure 18A can be formed by reflecting the protrusion of the base layer 181 on the upper surface of the conductive layer 182 . In particular, the auxiliary line 18 shown in FIG. 2, it is possible to enhance the effect of reducing the sheet resistance of the second electrode 17 by adjusting the materials or thickness of the conductive layer 182 preferably.

  The material for the base layer 181 is not particularly limited, and may be made of a conductive material such as aluminum (Al), or may be made of an insulating material such as polyimide. When the base layer 181 is made of a conductive material, it is more preferable that the base layer 181 and the first electrode 14 have the same configuration and material. This is because the underlayer 181 and the first electrode 14 can be formed in the same process in the manufacturing process described later.

  The conductive layer 182 is preferably made of a conductive material having good adhesion to the base layer 181. For example, the conductive layer 182 is made of aluminum (Al), or a titanium (Ti) layer, an aluminum (Al) layer, and a titanium layer. Are preferably laminated in order from the base layer 181 side. In the manufacturing process to be described later, the protrusion structure 18A can be easily formed by making the upper surface of the conductive layer 182 uneven by a heat treatment accompanying the CVD method when forming the insulating film 15, and the protrusion structure 18A is formed. This is because there is no need to add a process.

  The maximum roughness Rmax on the upper surface of the auxiliary wiring 18 is not necessarily larger than the thickness of the organic layer 16. This is because the organic layer 16 is formed by a vacuum deposition method as will be described later, so that the coverage is not so high, and it is considered unlikely that the upper surface of the auxiliary wiring 18 is completely covered by the organic layer 16. However, the maximum roughness Rmax on the upper surface of the auxiliary wiring 18 is more preferably larger than the thickness of the organic layer 16. This is because it is possible to reliably prevent the protrusion structure 18A from being deeper than the organic layer 16 and completely covering the upper surface of the auxiliary wiring 18 with the organic layer 16. Further, if the maximum roughness Rmax on the upper surface of the auxiliary wiring 18 is equal, it is more preferable that the number of the protrusion structures 18A is as large as possible. This is because a good electrical connection between the auxiliary wiring 18 and the second electrode 17 can be obtained. In addition, the thickness of the organic layer 16 here means the total thickness of these several layers, when the organic layer 16 has the laminated structure of several layers.

The taper angle θ of the side surface of the protruding structure 18A with respect to the flat surface 11A of the substrate 11 is preferably an angle at which the upper surface of the auxiliary wiring 18 is not completely covered by the organic layer 16 in the step of forming the organic layer 16. Specifically, although it may vary depending on the material of the auxiliary wiring 18, for example, it is preferable that 70 ° <θ <90 ° is satisfied . For example, if the taper angle θ is about 70 °, the protrusion structure 18A becomes a cone-shaped protrusion as shown in FIG. 4, and if the taper angle θ is 90 °, the protrusion structure 18A is as shown in FIG. It becomes a long columnar projection. In particular, when the auxiliary wiring 18 has the configuration shown in FIG. 3, it is preferable that the plurality of protrusions in the concavo-convex structure of the base layer 181 are sharp. The taper angle θ of the side surface of the protrusion structure 18A corresponds to the plurality of pointed protrusions of the base layer 181 so that the upper surface of the auxiliary wiring 18 is not completely covered with the organic layer 16 in the step of forming the organic layer 16. Because it grows.

The protective film 19 is, for example, a passivation film made of a transparent dielectric having a thickness of 500 nm to 10,000 nm. The protective film 19 is made of, for example, silicon oxide (SiO ₂ ), silicon nitride (SiN), or the like.

  The sealing panel 20 is located on the second electrode 17 side of the drive panel 10 and includes a sealing substrate 21 that seals the organic light emitting elements 10R, 10G, and 10B together with the adhesive layer 30. The sealing substrate 21 is made of a material such as glass that is transparent to the light generated in the organic light emitting elements 10R, 10G, and 10B. The sealing substrate 21 is provided with, for example, a color filter 22 to extract light generated in the organic light emitting elements 10R, 10G, and 10B and to reflect the light in the organic light emitting elements 10R, 10G, and 10B and the wiring therebetween. It absorbs extraneous light and improves contrast.

  The color filter 22 may be provided on either side of the sealing substrate 21, but is preferably provided on the drive panel 10 side. This is because the color filter 22 is not exposed on the surface and can be protected by the adhesive layer 30. The color filter 22 includes a red filter 22R, a green filter 22G, and a blue filter 22B, and is sequentially arranged corresponding to the organic light emitting elements 10R, 10G, and 10B.

  Each of the red filter 22R, the green filter 22G, and the blue filter 22B is formed, for example, in a rectangular shape without a gap. Each of the red filter 22R, the green filter 22G, and the blue filter 22B is composed of a resin mixed with a pigment, and by selecting the pigment, the light transmittance in a target red, green, or blue wavelength region is high. The light transmittance in other wavelength ranges is adjusted to be low.

  6 (A) to 6 (C) show enlarged configurations of the organic light emitting elements 10R, 10G, and 10B, respectively. For example, the first electrode 14 is preferably formed by laminating an adhesion layer 14A, a reflective layer 14B, and a barrier layer 14C in this order from the substrate 11 side. The adhesion layer 14 </ b> A prevents the reflection layer 14 </ b> B from peeling from the planarization layer 13. The reflective layer 14B reflects light generated in the light emitting layer. The barrier layer 14C prevents the silver constituting the reflective layer 14B or an alloy containing silver from reacting with oxygen or sulfur components in the air, and the reflective layer 14B is also formed in the manufacturing process after the reflective layer 14B is formed. It has a function as a protective film that alleviates damage.

  The adhesion layer 14A has, for example, a thickness of 5 nm or more and 50 nm or less, for example, 20 nm in the present embodiment, and is made of a compound (ITO; Indium Tin Oxide) containing indium (In), tin (Sn), and oxygen (O). It is configured. The reflective layer 14B has, for example, a thickness of 50 nm or more and 200 nm or less, and in the present embodiment, for example, 200 nm. The reflective layer 14B is made of silver (Ag) or an alloy containing silver in order to reduce the light absorption loss and increase the reflectance. ing. For example, the barrier layer 14C has a thickness of 1 nm to 50 nm and is made of ITO. In the present embodiment, the thickness of the barrier layer 14C varies depending on the emission color of the organic light emitting elements 10R, 10G, and 10B because a resonator structure described later is introduced into the organic light emitting elements 10R, 10G, and 10B.

  The organic layer 16 has the same structure regardless of the emission color of the organic light emitting elements 10R, 10G, and 10B. For example, the hole transport layer 41, the light emitting layer 42, and the electron transport layer 43 are the first electrode 14's. They are stacked in this order from the side. The hole transport layer 41 is for increasing the efficiency of hole injection into the light emitting layer 42. In the present embodiment, the hole transport layer 41 also serves as a hole injection layer. The light emitting layer 42 generates light by recombination of electrons and holes when an electric field is applied, and emits light in a region corresponding to the opening 15 </ b> A of the insulating film 15. The electron transport layer 43 is for increasing the efficiency of electron injection into the light emitting layer 16B.

  The hole transport layer 41 has, for example, a thickness of about 40 nm and is 4,4 ′, 4 ″ -tris (3-methylphenylphenylamino) triphenylamine (m-MTDATA) or α-naphthylphenyldiamine (αNPD). It is comprised by.

  The light emitting layer 42 is a light emitting layer for white light emission. For example, a red light emitting layer 42R, a green light emitting layer 42G, and a blue light emitting layer 42B provided to be stacked between the first electrode 14 and the second electrode 17. have. The red light emitting layer 42R, the green light emitting layer 42G, and the blue light emitting layer 42B are stacked in this order from the first electrode 14 side that is an anode. The red light emitting layer 42 </ b> R is injected with a part of holes injected from the first electrode 14 through the hole transport layer 41 and from the second electrode 17 through the electron transport layer 43 by applying an electric field. Some of the electrons recombine to generate red light. The green light emitting layer 42G was injected through the hole transport layer 41 from the first electrode 14 and part of the holes injected from the first electrode 14 through the electron transport layer 43 by applying an electric field. Some of the electrons recombine to generate green light. The blue light emitting layer 42 </ b> B was injected with a part of holes injected from the first electrode 14 through the hole transport layer 41 and from the second electrode 17 through the electron transport layer 43 by applying an electric field. Some of the electrons recombine to generate blue light.

  The red light emitting layer 42R includes, for example, at least one of a red light emitting material, a hole transporting material, an electron transporting material, and a charge transporting material. The red light emitting material may be fluorescent or phosphorescent. In the present embodiment, the red light emitting layer 42R has a thickness of about 5 nm, for example, and 4,4-bis (2,2-diphenylbinine) biphenyl (DPVBi) is added with 2,6-bis [(4′- Methoxydiphenylamino) styryl] -1,5-dicyanonaphthalene (BSN) is mixed with 30% by weight.

  The green light emitting layer 42G includes, for example, at least one of a green light emitting material, a hole transporting material, an electron transporting material, and a charge transporting material. The green light emitting material may be fluorescent or phosphorescent. In the present embodiment, the green light emitting layer 42G has a thickness of about 10 nm, for example, and is composed of DPVBi mixed with 5% by weight of coumarin 6.

  The blue light emitting layer 42B includes, for example, at least one of a blue light emitting material, a hole transporting material, an electron transporting material, and a charge transporting material. The blue light emitting material may be fluorescent or phosphorescent. In the present embodiment, for example, the blue light emitting layer 42B has a thickness of about 30 nm, and 4,4′-bis [2- {4- (N, N-diphenylamino) phenyl} vinyl] biphenyl (DPAVBi) is added to DPVBi. ) Is mixed with 2.5% by weight.

The electron transport layer 43 has a thickness of, for example, about 20 nm and is made of 8-hydroxyquinoline aluminum (Alq ₃ ).

  The semi-transmissive electrode 17A also functions as a semi-transmissive reflective layer that reflects light generated in the light emitting layer 42 between the reflective layer 14B of the first electrode 14. That is, in the organic light emitting devices 10R, 10G, and 10B, the interface between the reflective layer 14B of the first electrode 14 and the barrier layer 14C is the first end P1, and the interface of the semi-transmissive electrode 17A on the light emitting layer 42 side is the second. The end portion P2 is used, and the organic layer 16 and the barrier layer 14C are used as the resonating portion. The resonator structure has a resonator structure that resonates light generated in the light emitting layer 42 and extracts the light from the second end portion P2.

  By having the resonator structure in this way, the light generated in the light emitting layer 42 causes multiple interference, and acts as a kind of narrow band filter, thereby reducing the half width of the spectrum of the extracted light. Since purity can be improved, it is preferable. Further, as described above, the optical distance L between the first end P1 and the second end P2 is varied by adjusting the thickness of the barrier layer 14C according to the emission color of the organic light emitting elements 10R, 10G, and 10B. By doing so, only the light to be extracted out of the red light generated in the red light emitting layer 42R, the green light generated in the green light emitting layer 42G, and the blue light generated in the blue light emitting layer 42B is resonated to resonate at the second end P2. Since it can take out from the side, it is preferable.

  Furthermore, the external light incident from the sealing panel 20 can also be attenuated by multiple interference, and the reflectance of the external light in the organic light emitting devices 10R, 10G, and 10B is extremely increased by the combination with the color filter 22 shown in FIG. Since it can be made small, it is preferable. That is, the light extracted from the external light incident from the sealing panel 20 by matching the wavelength range having a high transmittance in the color filter 22 with the peak wavelength λ of the spectrum of the light extracted from the resonator structure. Only those having a wavelength equal to the peak wavelength λ of the spectrum are transmitted through the color filter 22, and external light of other wavelengths is prevented from entering the organic light emitting devices 10R, 10G, and 10B.

  For this purpose, the optical distance L between the first end P1 and the second end P2 of the resonator is set to satisfy Equation 1, and the resonance wavelength of the resonator (the peak wavelength of the spectrum of the extracted light) and It is preferable to match the peak wavelength of the spectrum of light to be extracted. In practice, the optical distance L is preferably selected so as to be a positive minimum value satisfying Equation 1.

(Equation 1)
(2L) / λ + Φ / (2π) = m
(Where L is the optical distance between the first end P1 and the second end P2, and Φ is the phase shift Φ ₁ of the reflected light generated at the first end P1 and the reflection generated at the second end P2. The sum (Φ = Φ ₁ + Φ ₂ ) (rad) with the phase shift Φ _{2 of} light, λ is the peak wavelength of the spectrum of light to be extracted from the second end P2, and m is an integer for which L is positive. In addition, in Equation 1, L and λ may have the same unit, but for example, (nm) is the unit.)

  This display device can be manufactured, for example, as follows.

  7 to 14 show the manufacturing method of the display device in the order of steps, and show the case where the auxiliary wiring 18 having, for example, the structure shown in FIG. 2 is manufactured. First, as shown in FIG. 7A, the TFT 12, the interlayer insulating film 12A, and the wiring 12B are formed on the substrate 11 made of the above-described material.

  Next, as shown in FIG. 7B, a planarization layer 13 made of the above-described material is formed on the entire surface of the substrate 11 by, for example, spin coating, and the planarization layer 13 is formed into a predetermined shape by exposure and development. Then, the connection hole 13A is formed.

  Subsequently, as illustrated in FIG. 8A, the first electrode 14 made of, for example, the above-described thickness and material is formed on the planarization layer 13. At this time, the base layer 181 of the auxiliary wiring 18 is preferably formed in the same process as the first electrode 14.

The underlying layer 181 of the first electrode 14 and the auxiliary wiring 18 is formed, for example, by sequentially forming an adhesion layer 14A, a reflective layer 14B, and a barrier layer 14C (all of which are shown in FIG. 6), and then using the lithography technique, for example. The reflective layer 14B and the adhesion layer 14A can be formed by etching. The adhesion layer 14A and the barrier layer 14C are formed, for example, by a direct current sputtering method, using, for example, a mixed gas of argon (Ar) and oxygen (O ₂ ) as a sputtering gas, a pressure of 0.4 Pa, and an output of 300 W, for example. The reflective layer 14B is formed, for example, by direct current sputtering, using, for example, argon (Ar) gas as a sputtering gas, a pressure of, for example, 0.5 Pa, and an output of, for example, 300 W. At the time of etching, the thickness of the barrier layer 14C is made different depending on the emission color of the organic light emitting elements 10R, 10G, and 10B.

  After forming the base layer 181 of the first electrode 14 and the auxiliary wiring 18, as shown in FIG. 8B, for example, titanium (Ti) / aluminum (Al) over the entire surface of the substrate 11 by, for example, DC sputtering. A conductive layer 182 having a three-layer structure of / titanium (Ti) is formed, and the conductive layer 182 is selectively removed using, for example, a lithography technique. Thereby, the auxiliary wiring 18 in which the base layer 181 and the conductive layer 182 are sequentially laminated from the substrate 11 side is formed. The DC sputtering conditions are, for example, argon (Ar) as a sputtering gas, a pressure of 0.2 Pa, and an output of 300 W, for example.

  After that, as shown in FIG. 9A, the insulating film 15 is formed on the entire surface of the substrate 11 by the CVD (Chemical Vapor Deposition) method, for example, with the above-described film thickness. Using the technique, the portions corresponding to the light emitting region and the portions corresponding to the auxiliary wiring 18 in the insulating film 15 are selectively removed to form the openings 15A and 15B. At this time, since the substrate 11 is kept at a high temperature when the insulating film 15 is formed by the CVD method, unevenness is generated on the upper surface of the conductive layer 182 to form the protruding structure 18A.

  Next, as shown in FIG. 9B, on the first electrode 14, the insulating film 15, and the auxiliary wiring 18 on the substrate 11, the hole transport layer made of the above-described thickness and material, for example, by vapor deposition. 41, the light emitting layer 42, and the electron transport layer 43 (all refer to FIG. 6) are sequentially formed to form the organic layer 16. At this time, as shown in FIG. 10, a metallic area mask 51 having an opening 51A corresponding to the formation planned region is used, and the entire surface except for the periphery of the substrate 11 and a portion where a take-out electrode (not shown) is formed. An organic layer 16 is formed. At this time, the upper surface of the auxiliary wiring 18 is not completely covered with the organic layer 16, and the tip of the protruding structure 18 </ b> A is exposed from the organic layer 16.

  Subsequently, as shown in FIG. 11, the semi-transmissive electrode 17 </ b> A and the transparent electrode 17 </ b> B made of the above-described thickness and material are sequentially formed on the organic layer 16 to form the second electrode 17. As a result, the second electrode 17 is electrically connected to the auxiliary wiring 18 at the tip of the protruding structure 18A.

Specifically, first, the semi-transmissive electrode 17A is formed by, for example, a vapor deposition method. That is, for example, magnesium and silver for forming the semi-transmissive electrode 17A, for example, 0.1 g of magnesium and 0.4 g of silver are filled in separate resistance heating boats, respectively, and a predetermined vacuum deposition apparatus (not shown) is used. Attach to the electrode. Next, after reducing the atmosphere in a vacuum vapor deposition apparatus (not shown) to, for example, 1.0 × 10 ⁻⁴ Pa, a voltage is applied to each resistance heating boat and heated to co-evaporate magnesium and silver. The growth rate ratio between magnesium and silver is, for example, 9: 1.

Thereafter, a transparent electrode 17B is formed on the semi-transmissive electrode 17A. As a result, the contact area between the auxiliary wiring 18 and the second electrode 17 can be increased, and the contact resistance between them can be reduced. The transparent electrode 17B is preferably formed by a sputtering method such as a direct current sputtering method. This is because the sputtering method has higher coverage than the vacuum deposition method, and the transparent electrode 17B can be satisfactorily formed at the tip of the protruding structure 18A of the auxiliary wiring 18. As the sputtering gas, for example, a mixed gas of argon and oxygen (volume ratio Ar: O ₂ = 1000: 5) is used, the pressure is, for example, 0.3 Pa, and the output is, for example, 400 W.

  Thus, the organic light emitting devices 10R, 10G, and 10B shown in FIGS. 1 and 4 are formed.

  Next, as shown in FIG. 12, the protective film 19 made of the above-described thickness and material is formed on the second electrode 17. Thereby, the drive panel 10 shown in FIG. 1 is formed.

  Further, as shown in FIG. 13A, for example, the material of the red filter 22R is applied onto the sealing substrate 21 made of the above-described material by spin coating or the like, and patterned and baked by a photolithography technique. Thus, the red filter 22R is formed. Subsequently, as shown in FIG. 13B, the blue filter 22B and the green filter 22G are sequentially formed in the same manner as the red filter 22R. Thereby, the sealing panel 20 is formed.

  After forming the sealing panel 20 and the drive panel 10, as shown in FIG. 14, the adhesive layer 30 made of a thermosetting resin is applied and formed on the side of the substrate 11 where the organic light emitting elements 10R, 10G, and 10B are formed. To do. The application may be performed, for example, by discharging a resin from a slit nozzle type dispenser, or may be performed by roll coating or screen printing. Next, as shown in FIG. 1, the drive panel 10 and the sealing panel 20 are bonded to each other through the adhesive layer 30. In that case, it is preferable to arrange | position the surface of the sealing panel 20 in which the color filter 22 was formed facing the drive panel 10. FIG. Further, it is preferable that air bubbles and the like are not mixed into the adhesive layer 30. After that, after the relative positions of the color filter 22 of the sealing panel 20 and the organic light emitting elements 10R, 10G, and 10B of the driving panel 10 are aligned, heat treatment is performed at a predetermined temperature for a predetermined time, and the thermosetting of the adhesive layer 30 is performed. The resin is cured. Thus, the display device shown in FIGS. 1, 2, and 6 is completed.

  Moreover, this display device can also be manufactured as follows.

  FIG. 15 shows another manufacturing method of this display device in the order of steps, and shows an example of a method of manufacturing the auxiliary wiring 18 having, for example, the structure shown in FIG. First, as shown in FIGS. 7A and 7B, the TFT 12 and the planarizing layer 13 are formed on the substrate 11 made of the above-described material.

After that, as shown in FIG. 15A, a base layer 181 having a concavo-convex structure including a plurality of pointed protrusions is formed at a position where the auxiliary wiring 18 is to be formed on the planarization layer 13. As the underlayer 181, for example, a material made of an insulating material such as polyimide may be formed using a lithography technique, or a film made of a conductive material such as chromium (Cr) is formed by a direct current sputtering method. Patterning may be performed using a technique. As DC sputtering conditions, for example, argon (Ar) is used as the sputtering gas, the pressure can be 0.5 Pa, and the output can be 300 W.

Subsequently, as shown in FIG. 15B, the first electrode 14 made of the above-described thickness and material is formed on the planarizing layer 13 by the process shown in FIGS. 8A and 6, for example. Form. At this time, the conductive layer 182 of the auxiliary wiring 18 is formed in the same process as the first electrode 14, and the base layer 181 is covered with the conductive layer 182, thereby reflecting the plurality of protrusions of the base layer 181 on the upper surface of the conductive layer 182. The protrusion structure 18A is formed.

  After that, by the process shown in FIG. 9A, the insulating film 15 is formed over the entire surface of the substrate 11 with the above-described thickness, and the openings 15A and 15B are formed using, for example, a lithography technique.

  Subsequently, the organic layer 16, the semi-transmissive electrode 17A, and the transparent electrode 17B are formed on the first electrode 14, the insulating film 15, and the auxiliary wiring 18 by the steps shown in FIGS. As a result, the second electrode 17 is electrically connected to the auxiliary wiring 18 at the tip of the protruding structure 18A.

  After that, the driving panel 10 is formed by forming the protective film 19 made of the above-described thickness and material on the second electrode 17 by the steps shown in FIGS. The panel 20 is bonded to the panel 20 via the adhesive layer 30. Thus, the display device shown in FIGS. 1, 3, and 6 is completed.

  Furthermore, this display device can also be manufactured as follows.

  FIG. 16 shows still another manufacturing method of the display device in the order of steps, and shows another example of a method of manufacturing the auxiliary wiring 18 having, for example, the structure shown in FIG. First, as shown in FIGS. 7A and 7B, the TFT 12 and the planarizing layer 13 are formed on the substrate 11 made of the above-described material.

Subsequently, as shown in FIG. 16A, the first electrode 14 made of, for example, the above-described thickness and material is formed on the planarization layer 13. At this time, the base layer 181 having an uneven structure including a plurality of pointed protrusions is formed in the same process as the first electrode 14.

After that, as shown in FIG. 16B, a conductive layer 182 made of chromium (Cr) or the like is formed on the planarizing layer 13 by DC sputtering, for example, and then patterned using a lithography technique. Then, by covering the base layer 181 with the conductive layer 182, a plurality of protrusions of the base layer 181 are reflected on the upper surface of the conductive layer 182 to form the protrusion structure 18A. As DC sputtering conditions, for example, argon (Ar) is used as the sputtering gas, the pressure can be 0.5 Pa, and the output can be 300 W.

  After that, by the process shown in FIG. 9A, the insulating film 15 is formed over the entire surface of the substrate 11 with the above-described thickness, and the openings 15A and 15B are formed using, for example, a lithography technique.

  Subsequently, the organic layer 16, the semi-transmissive electrode 17A, and the transparent electrode 17B are formed on the first electrode 14, the insulating film 15, and the auxiliary wiring 18 by the steps shown in FIGS. As a result, the second electrode 17 is electrically connected to the auxiliary wiring 18 at the tip of the protruding structure 18A.

  After that, the driving panel 10 is formed by forming the protective film 19 made of the above-described thickness and material on the second electrode 17 by the steps shown in FIGS. The panel 20 is bonded to the panel 20 via the adhesive layer 30. Thus, the display device shown in FIGS. 1, 3, and 6 is completed.

In this display device, for example, when a predetermined voltage is applied between the first electrode 14 and the second electrode 17, current is supplied to the red light emitting layer 42 </ b> R, the green light emitting layer 42 </ b> G, and the blue light emitting layer 42 </ b> B of the organic layer 16. By being injected and recombining holes and electrons, red light is generated in the red light emitting layer 42R, green light is generated in the green light emitting layer 42G, and blue light is generated in the blue light emitting layer 42B. These red, green, and blue lights are red in the organic light emitting device 10R according to the optical distance L between the first end P1 and the second end P2 of the organic light emitting devices 10R, 10G, and 10B. Only the light h _R, only the green light h _G in the organic light emitting element 10G, and only the blue light h _{B in} the organic light emitting element 10B are multiple-reflected between the first end P1 and the second end P2, and the second It passes through the electrode 17 and is taken out. Here, the auxiliary wiring 18 has a protruding structure 18A on the upper surface, and the auxiliary wiring 18 and the second electrode 17 are electrically connected at the tip of the protruding structure 18A. Descent is suppressed. Therefore, variation in luminance between the peripheral portion and the central portion of the display screen is suppressed.

  Thus, in the present embodiment, the auxiliary wiring 18 has the protruding structure 18A on the upper surface, and the auxiliary wiring 18 and the second electrode 17 are electrically connected at the tip of the protruding structure 18A. A voltage drop of the second electrode 17 can be suppressed by the auxiliary wiring 18, and variations in luminance within the screen can be suppressed. Therefore, display quality can be improved.

  In the present embodiment, since the auxiliary wiring 18 having the protruding structure 18A is formed on the upper surface, the second electrode 17 and the auxiliary wiring 18 are electrically connected at the tip of the protruding structure 18A. The auxiliary wiring 18 and the second electrode 17 can be electrically connected even if the organic layer 16 is formed on almost the entire surface of the substrate 11 without using the pixel coating mask. Therefore, it is possible to prevent film formation defects such as chipping of the organic layer 16 due to the positional shift of the pixel coating mask or the influence of thermal expansion, and to improve the yield, which is extremely advantageous for high definition. Further, it is possible to prevent dust or the like adhering to the pixel coating mask from adhering to the organic layer 16 or the like and causing a short circuit. Further, special processing for electrically connecting the second electrode 17 and the auxiliary wiring 18 is not required, and the number of processes can be reduced.

  While the present invention has been described with reference to the embodiment, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above embodiment, the case where the second electrode 17 and the auxiliary wiring 18 are electrically connected to each other at the distal end portion of the protruding structure 18A has been described. What is necessary is just to be electrically connected at the front-end | tip part of the structure 18A. For example, when the organic layer 16 is not formed on the auxiliary wiring 18 due to the reason that the coverage of the organic layer 16 is not high, the second electrode 17 and the auxiliary wiring 18 are connected to the entire protrusion structure 18A. You may make it connect electrically.

  In the above-described embodiment, the case where the opening 15B of the insulating film 15 is formed so as to cover the side surfaces on both sides of the auxiliary wiring 18 has been described. For example, as shown in FIG. The portion 15B may be formed so as to expose at least a part of the side surface of the auxiliary wiring 18. Accordingly, when the organic layer 16 is formed, the organic layer 16 is interrupted on the side surface of the auxiliary wiring 18 and the side surface of the auxiliary wiring 18 is not covered with the organic layer 16. The second electrode 17 can be electrically connected. However, it is preferable to form the opening 15B so as to cover the side surfaces on both sides of the auxiliary wiring 18 as in the above embodiment because the width of the opening 15B can be reduced and the opening ratio can be increased. . Further, when the first electrode 14 or the reflective layer 14B is made of a highly active metal, the first electrode 14 or the reflective layer 14B is in the middle of the manufacturing process by covering the side surfaces on both sides of the auxiliary electrode 18 with the insulating film 15. It is preferable because it can be prevented from deteriorating.

  Further, for example, in the above-described embodiment, the case where the protrusion structure 18A is formed on the upper surface of the auxiliary wiring 18 by the heat treatment accompanying the CVD method when forming the insulating film 15 has been described. Alternatively, it may be formed by dry etching. In that case, the material of the conductive layer 182 is not particularly limited as long as it has good adhesion to the base layer 181 and can roughen the surface by wet etching or dry etching to form unevenness. Further, heat treatment and wet etching or dry etching may be used in combination.

  In addition, for example, in the above-described embodiment, the case where the auxiliary wiring 18 has a simple line-shaped planar shape has been described, but the shape of the auxiliary wiring 18 is not particularly limited. For example, for the purpose of increasing the area of the side surface of the auxiliary wiring 18 to increase the contact area with the second electrode 17, a hole 18B as shown in FIG. 18 is provided, or as shown in FIG. It is conceivable that the side surface is provided with a notch 18C. The shape, number, or position of the hole 18B or the notch 18C is not particularly limited. Moreover, you may use together the hole 18B and the notch 18C.

  Furthermore, for example, in the above embodiment, the case where the auxiliary wiring 18 is provided in the opening 15B of the insulating film 15 has been described. However, the auxiliary wiring 18 may be provided on the insulating film 15. . In that case, the auxiliary wiring 18 can be constituted by a single layer or a laminated structure of a low resistance conductive material such as aluminum (Al) or chromium (Cr). The width and thickness of the auxiliary wiring 18 vary depending on the dimensions of the screen or the material and thickness of the second electrode. When the auxiliary wiring 18 is thus provided on the insulating film 15, the base layer 181 of the auxiliary wiring 18 can be configured differently from the first electrode 14 and is not restricted by the material or thickness of the first electrode 14. Therefore, for example, it is possible to reduce the sheet resistance of the second electrode 17 by configuring the base layer 181 with a conductive material and making the thickness of the base layer 181 larger than that of the first electrode 14.

In addition, for example, the material and thickness of each layer described in the above embodiment, the film formation method and the film formation conditions are not limited, and other materials and thicknesses may be used. It is good also as a method and film-forming conditions. For example, the material of the adhesion layer 14A and the barrier layer 14C is not limited to the above-described ITO, and includes, for example, at least one element selected from the group consisting of indium (In), tin (Sn), and zinc (Zn). It may be at least one member selected from the group consisting of metal compounds or conductive oxides, specifically ITO, IZO, indium oxide (In ₂ O ₃ ), tin oxide (SnO ₂ ), and zinc oxide (ZnO). Further, the material of the adhesion layer 14A is not necessarily transparent.

  Furthermore, for example, in the above-described embodiment, the configurations of the organic light emitting element and the display device have been specifically described. However, it is not necessary to provide all the layers such as the protective film 19, and other layers are further provided. You may have. For example, in the second electrode 17, the transparent electrode 17B may be omitted and only the semi-transmissive electrode 17A may be used. Alternatively, the semi-transmissive electrode 17A may be omitted from the second electrode 17 and only the transparent electrode 17B may be used. Thus, when the 2nd electrode 17 is comprised only by the transparent electrode 17B, 14 C of barrier layers may be made into the same thickness by organic light emitting element 10R, 10G, 10B, and the resonator structure mentioned above may be abbreviate | omitted.

  In addition, in the above-described embodiment, the case where the first electrode 14 has a configuration in which the adhesion layer 14A, the reflection layer 14B, and the barrier layer 14C are formed in this order from the substrate 11 side has been described. Either one or both of the layers 14C may be omitted.

  Furthermore, in the above embodiment, a case has been described in which a light emitting layer for white light emission is formed as the light emitting layer 42 of the organic layer 16 and color display is performed using the resonator structure and the color filter 22 described above. Color display may be performed using only the color filter 22 without using the resonator structure. Further, color display may be performed using an optical filter or the like that transmits only light of a specific wavelength instead of the color filter 22.

  In addition, in the above-described embodiment, a case where a light emitting layer for white light emission including three layers of the red light emitting layer 42R, the green light emitting layer 42G, and the blue light emitting layer 42B is formed as the light emitting layer 42 of the organic layer 16 will be described. However, the configuration of the light emitting layer 42 for white light emission is not particularly limited, and two color light emitting layers having a complementary color relationship such as an orange light emitting layer and a blue light emitting layer, or a blue green light emitting layer and a red light emitting layer are laminated. It is good also as a structure.

  Furthermore, the light emitting layer 42 of the organic layer 16 is not necessarily a light emitting layer for white light emission, and the present invention can be applied to, for example, a monochromatic display device in which only the green light emitting layer 42G is formed.

  In addition, in the above embodiment, the case where the organic light emitting elements 10R, 10G, and 10B are sealed by bonding the drive panel 10 and the sealing panel 20 via the adhesive layer 30 has been described. The stopping method is not particularly limited, and for example, sealing may be performed by disposing a sealing can on the back surface of the drive panel 10.

  Furthermore, for example, in the above-described embodiment, the case where the first electrode 14 is an anode and the second electrode 17 is a cathode has been described. However, the anode and the cathode are reversed, and the first electrode 14 is the cathode and the second electrode. 17 may be an anode. In this case, the material of the second electrode 17 is preferably a simple substance or an alloy such as gold, silver, platinum, or copper, but a layer similar to the barrier layer 14C in the above embodiment is formed on the surface of the second electrode 17. Other materials can be used if provided. Further, when the first electrode 14 is a cathode and the second electrode 17 is an anode, in the light emitting layer 42, the red light emitting layer 42R, the green light emitting layer 42G, and the blue light emitting layer 42B are arranged in this order from the second electrode 17 side. It is preferable that they are laminated.

In addition, in the above-described embodiment, the case where the color filter 22 is provided on the sealing substrate 21 has been described. However, as necessary, the reflected light absorption film as a black matrix may be replaced with a red filter 22R, a green filter 22G, and You may make it provide along the boundary of the blue filter 22B. The reflected light absorption film can be constituted by, for example, a black resin film having an optical density of 1 or more mixed with a black colorant, or a thin film filter using thin film interference. Of these, a black resin film is preferable because it can be formed inexpensively and easily. The thin film filter is formed by, for example, laminating one or more thin films made of metal, metal nitride, or metal oxide, and attenuating light by utilizing interference of the thin film. Specific examples of the thin film filter include those in which chromium and chromium oxide (III) (Cr ₂ O ₃ ) are alternately laminated.

  Furthermore, in the above embodiment, the case where the organic layer 16 is formed on the first electrode 14, the insulating film 15, and the auxiliary wiring 18 on the substrate 11 has been described. However, the organic layer 16 is formed on the substrate 11. As long as it is formed on at least the first electrode 14.

It is sectional drawing showing the structure of the display apparatus which concerns on one embodiment of this invention. FIG. 2 is an enlarged cross-sectional view illustrating an example of a configuration of auxiliary wiring illustrated in FIG. 1. FIG. 4 is an enlarged cross-sectional view illustrating another example of the configuration of the auxiliary wiring illustrated in FIG. 1. It is an expanded sectional view showing an example of the projection structure shown in FIG. It is an expanded sectional view showing the other example of the protrusion structure shown in FIG. It is an expanded sectional view of the organic light emitting element shown in FIG. FIG. 3 is a cross-sectional view illustrating a method of manufacturing the display device illustrated in FIGS. 1 and 2 in order of steps. FIG. 8 is a cross-sectional diagram illustrating a process following the process in FIG. 7. FIG. 9 is a cross-sectional diagram illustrating a process following the process in FIG. 8. FIG. 10 is a cross-sectional diagram illustrating a process following the process in FIG. 9. FIG. 11 is a cross-sectional diagram illustrating a process following the process in FIG. 10. FIG. 12 is a cross-sectional diagram illustrating a process following the process in FIG. 11. FIG. 13 is a cross-sectional diagram illustrating a process following the process in FIG. 12. FIG. 14 is a cross-sectional diagram illustrating a process following the process in FIG. 13. FIG. 4 is a cross-sectional view illustrating an example of a manufacturing method of the display device illustrated in FIGS. 1 and 3 in order of processes. FIG. 4 is a cross-sectional view illustrating another example of the manufacturing method of the display device illustrated in FIGS. 1 and 3 in the order of steps. It is sectional drawing showing the modification of the display apparatus shown in FIG. It is a top view showing the modification of the auxiliary wiring shown in FIG. It is a top view showing the modification of the auxiliary wiring shown in FIG. It is a top view showing the structure of the conventional display apparatus. It is a top view showing the conventional mask for pixel coating.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Drive panel, 11 ... Board | substrate, 12 ... TFT, 13 ... Planarization film | membrane, 14 ... 1st electrode, 14A ... Adhesion layer, 14B ... Reflective layer, 14C ... Barrier layer, 15 ... Insulating film, 15A, 15B ... Opening Part, 16 ... organic layer, 17 ... second electrode, 17A ... translucent electrode, 17B ... transparent electrode, 18 ... auxiliary wiring, 18A ... projection structure, 181 ... underlayer, 182 ... conductive layer, 19 ... protective film, DESCRIPTION OF SYMBOLS 20 ... Sealing panel, 21 ... Substrate for sealing, 22 ... Color filter, 30 ... Adhesive layer, 41 ... Hole transport layer, 42 ... Light emitting layer, 42R ... Red light emitting layer, 42G ... Green light emitting layer, 42B ... Blue Light emitting layer, 43 ... electron transport layer, 51 ... area mask

Claims (14)

A first electrode formed on the substrate;
An auxiliary wiring having a protrusion structure formed of a plurality of spindle-shaped or plurality of columnar protrusions on the upper surface, and formed on the substrate so as to be insulated from the first electrode;
An organic layer including a light emitting layer and provided on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure;
A second electrode covering the organic layer and electrically connected to the auxiliary wiring at at least a tip of the protruding structure;
With
The auxiliary line, and the base layer having a plurality of sharp projections, that Do a laminated structure of a conductive layer having a protrusion structure corresponding to a plurality of protrusions of the base layer to the top surface covers the underlying layer
Organic light-emitting element. A first electrode formed on the substrate;
An auxiliary wiring having a protrusion structure formed of a plurality of spindle-shaped or plurality of columnar protrusions on the upper surface, and formed on the substrate so as to be insulated from the first electrode;
An organic layer including a light emitting layer and provided on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure;
A second electrode covering the organic layer and electrically connected to the auxiliary wiring at at least a tip of the protruding structure;
With
The auxiliary line, underlayer and conductive layer are laminated in this order from the side of the substrate, the protrusion structure that provided on the upper surface of the conductive layer
Organic light-emitting element. The light emitting layer comprises a red emission layer, an organic light-emitting device according to claim 1 or 2, wherein the green light emitting layer and blue light emitting layer is a white light emitting layer that are stacked. Maximum roughness, organic light-emitting device of large claim 1 or 2, wherein greater than the thickness of the organic layer the upper surface of the auxiliary line. When the taper angle theta with respect to the substrate side of the projection structure, 70 ° <θ <organic light emitting device according to claim 1 or 2, wherein satisfies the 90 °. Forming a first electrode on the substrate and an auxiliary wiring that is insulated from the first electrode and has a protrusion structure including a plurality of weight-shaped or plurality of columnar protrusions on the upper surface;
Forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure from the organic layer;
Forming a second electrode on the organic layer and electrically connecting the second electrode and the auxiliary wiring at least at a tip of the protruding structure;
Including
After the underlayer and conductive layer as the auxiliary wiring was formed sequentially from the substrate side, form the protrusion structure causing irregularities on the upper surface of the conductive layer by the heat treatment for holding said substrate to a high temperature
Method of manufacturing the organic light-emitting element. Forming a first electrode on the substrate and an auxiliary wiring that is insulated from the first electrode and has a protrusion structure including a plurality of weight-shaped or plurality of columnar protrusions on the upper surface;
Forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure from the organic layer;
Forming a second electrode on the organic layer and electrically connecting the second electrode and the auxiliary wiring at least at a tip of the protruding structure;
Including
Form the protrusion structure corresponding to a plurality of projections of the underlying layer on the upper surface of the conductive layer by covering the base layer after forming the underlying layer including a plurality of pointed projections as the auxiliary line with a conductive layer
Method of manufacturing the organic light-emitting element. Forming a first electrode on the substrate and an auxiliary wiring that is insulated from the first electrode and has a protrusion structure including a plurality of weight-shaped or plurality of columnar protrusions on the upper surface;
Forming an organic layer including a light emitting layer on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure from the organic layer;
Forming a second electrode on the organic layer and electrically connecting the second electrode and the auxiliary wiring at least at a tip of the protruding structure;
Including
After forming the undercoat layer and the conductive layer as the auxiliary line in order from the substrate side, form the protrusion structure by forming irregularities by roughening the surface of the upper surface of the conductive layer by etching
Method of manufacturing the organic light-emitting element. The method for manufacturing an organic light emitting element according to claim 6 , wherein a white light emitting layer in which a red light emitting layer, a green light emitting layer, and a blue light emitting layer are laminated is formed as the light emitting layer. The method for manufacturing an organic light-emitting element according to claim 6 , wherein the organic layer is formed on the entire surface excluding the periphery of the substrate and a portion where the extraction electrode is formed. A display device having a plurality of organic light emitting elements on a substrate,
The organic light emitting device is
A first electrode formed on the substrate;
An auxiliary wiring having a protrusion structure formed of a plurality of spindle-shaped or plurality of columnar protrusions on the upper surface, and formed on the substrate so as to be insulated from the first electrode;
An organic layer including a light emitting layer and provided on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure;
Covering the organic layer, the Bei example and a second electrode electrically connected to the auxiliary line at least the tip portion of the projection structure, the auxiliary line, and the base layer having a plurality of pointed projections, the Covering the base layer and having a laminated structure with a conductive layer having the protrusion structure corresponding to the plurality of protrusions of the base layer on the upper surface
Viewing equipment.   A display device having a plurality of organic light emitting elements on a substrate,
  The organic light emitting device is
  A first electrode formed on the substrate;
  An auxiliary wiring having a protrusion structure formed of a plurality of spindle-shaped or plurality of columnar protrusions on the upper surface, and formed on the substrate so as to be insulated from the first electrode;
  An organic layer including a light emitting layer and provided on the first electrode and the auxiliary wiring, and exposing at least a tip of the protruding structure;
  A second electrode covering the organic layer and electrically connected to the auxiliary wiring at at least a tip of the protruding structure;
  The auxiliary wiring has a base layer and a conductive layer laminated in order from the substrate side, and the protruding structure is provided on the upper surface of the conductive layer.
  Display device.   The light emitting layer is a white light emitting layer in which a red light emitting layer, a green light emitting layer, and a blue light emitting layer are laminated.
  The display device according to claim 11 or 12. The display device according to claim 11 , comprising an active element corresponding to each of the plurality of organic light emitting elements and driven by an active matrix method.

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