JP4467208B2 - Robot apparatus and processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a robot device that can realize high cleanliness by reliably preventing cross contamination of a workpiece via a simple structure, and a handling system that is equipped with the robot. SOLUTION: The robot device comprises a first arm 8, a first finger 12 arranged near a tip of the first arm and provided with a first and a second workpiece holding surface 12A and 12B, and a first inverting mechanism 20 for inverting the first finger. The first inverting mechanism inverts the first finger to select either the first or the second workpiece holding surface, which can hold and transfer a workpiece W. The workpiece holding surfaces are selectively used, so that cross contamination of the workpiece can be effectively suppressed via a simple device structure.

Description

ロボット装置１の具体的な動作の一部を説明すると、例えば、アーム８に設けられたフィンガー面１２Ａを用いて、カセット１０２からブラシ洗浄モジュール１０４にワークを搬送した後に、アーム８をホームポジションに戻し、次に、アーム１０に設けられたフィンガー面１４Ａを用いて、ブラシ洗浄モジュール１０４からスピン洗浄モジュール１０６にワークを搬送する。その次に、フィンガー面１２Ｂを用いて、スピン洗浄モジュール１０６からホットプレート１０８にワークを搬送する。
【００４７】
ここで、フィンガー１２の反転は、アーム８がホームポジションに格納された状態で行うことができ、フィンガー１２を反転した後、走行軸２に沿って平行移動することにより、フィンガーの位置を調節する。但し、フィンガーの反転は、ホームポジション以外でも可能であり、アームが前方に展開した状態、あるいは展開動作の途中においても可能である。
【００４８】
これに対して、図３（ｂ）に表した従来の処理装置においては、２本のフィンガー２１２、２１４は、次のように使い分けられる。

つまり、従来のロボット装置を用いる場合には、洗浄前のドライな状態のワークと、洗浄後のドライな状態のワークとを同一のフィンガーで搬送することになり、クロス・コンタミネーションが生ずる虞がある。
【００４９】
これに対して、本発明によれば、洗浄前（経路Ａ）と洗浄後（経路Ｃ、Ｄ）のドライな状態のワークをそれぞれ別のフィンガー面で搬送することが可能となり、クロス・コンタミネーションを解消することができる。
【００５０】
さらに、当然のことながら、本発明によればドライな状態のワークとウエットな状態なワークとは別のアームにより搬送することにより、薬液や水分などによるクロス・コンタミネーションも解消できる。
【００５１】
また、図１３に例示したような従来のロボット装置を用いてフィンガーを使い分けるためには、「ダブルアーム型」のロボットを２台設置する必要があるために、装置コストが大幅に上昇し、装置寸法も大きくなり、維持管理の負担も増加する。
これに対して、本発明によれば、１台のダブルアーム型ロボットにより対処できるため、装置コストが安く、コンパクトで維持管理も容易となる。
【００５２】
次に、本発明のロボット装置の変型例について説明する。
【００５３】
図４は、本発明の第２の具体例にかかるロボット装置のアーム部を例示する概念図であり、同図（ａ）はその平面図、同図（ｂ）はその正面図である。同図については、図１乃至図３に関して前述したものと同様の要素には同一の符号を付して詳細な説明は省略する。
【００５４】
本具体例のロボット装置も、「ダブルアーム型」の構成を有し、そのアーム先端に設けられたフィンガー１２、１４が反転可能とされている。但し、本具体例においては、フィンガー反転の回転軸２１、２３は、フィンガーの中心線Ｃ付近に設けられている。つまり、フィンガー１２、１４は、その中心線Ｃの付近をセンターとして反転する。
【００５５】
このようにすれば、フィンガー１２、１４が反転してもその横方向の位置が変わらないので、走行軸２に沿った位置調節が不要となる。
【００５６】
なお、本具体例の場合には、図示したように、２本のフィンガーのいずれかを前方に展開させた状態でフィンガーを反転させることにより、反転時のフィンガー同士の干渉を防ぐことができる。
【００５７】
図５は、本発明の第３の具体例にかかるロボット装置のアーム部を例示する概念図であり、同図（ａ）はその平面図、同図（ｂ）はその正面図である。同図についても、図１乃至図４に関して前述したものと同様の要素には同一の符号を付して詳細な説明は省略する。
【００５８】
本具体例のロボット装置も、「ダブルアーム型」の構成を有し、そのアーム先端に設けられたフィンガー１２、１４は、その中心線Ｃの付近をセンターとして反転する。但し、本具体例においては、アーム８に昇降軸２６が付加されている。
【００５９】
そして、昇降軸２６によってアーム８が上方に持ち上げられた状態で、フィンガー１２、１４が反転される。このようにすれば、反転時のフィンガー同士の干渉を防ぐことができる。
【００６０】
本具体例によれば、フィンガーを反転させてもその横方向の位置調節が不要であり、且つ、フィンガーの反転に際してアームを前方に展開せずに上方に僅かに逃がすだけで良いので、所要時間を短縮して作業スループットを上げることができ、装置をさらにコンパクトにすることもできる。
【００６１】
なお、本具体例においては、アーム８が上方に逃げる代わりに、アーム１０に昇降軸を付加してフィンガー反転の際に下方に逃げるようにしても良い。あるいは、アーム８及び１０の両方に昇降軸を付加しても良い。
【００６２】
次に、本発明のロボット装置の反転機構の具体例について説明する。
【００６３】
アームの先端に設ける反転機構２０、２２は、できるだけコンパクトで、確実且つ迅速な動作をすることが望ましい。
【００６４】
まず、ロータリー・アクチュエータを用いた反転機構について説明する。
【００６５】
図６は、ロータリー・アクチュエータを用いた反転機構の要部を例示する概念図である。図６（ａ）に表した具体例の場合、圧力空気により回転動作するロータリー・アクチュエータ３１の回転軸が、フレキシブル・カップリング３３によって、フィンガーの反転軸２１（または２３）と結合されている。フィンガーの反転軸２１（または２３）は、軸受け３５により保持されている。
【００６６】
ロータリー・アクチュエータは、軽量コンパクトで迅速な動作が可能であり、回転角度を予め設定することができる点で有利である。
【００６７】
一方、図６（ｂ）に表した具体例の場合、ロータリー・アクチュエータ３１の回転軸とフィンガーの反転軸２１（または２３）とは、歯車式あるいはタイミングベルト式の伝達機構３４によって結合されている。このような伝達機構３４を設けることにより、ロータリー・アクチュエータ３１を反転軸２１（または２３）からずらして配置することができる。このため、アクチュエータ３１のサイズに左右されずに、上下のフィンガー１２、１４の間隔を狭くすることができる。
【００６８】
次に、電動モータを用いた反転機構について説明する。
【００６９】
図７は、電動モータを用いた反転機構の要部を例示する概念図である。すなわち、図７（ａ）に表した具体例の場合、モータ４１の出力が減速器４２により調節され、フレキシブル・カップリング３３を介してフィンガーの反転軸２１（または２３）と結合されている。そして、回転角度の調節は、メカストッパ４４Ａ、４４Ｂにより行われる。
【００７０】
図７（ｂ）は、メカストッパの作用を表す概念図である。フィンガーの反転軸２１（または２３）にフリップ４６を設け、両側に設けられたメカストッパ４４Ａ、４４Ｂにより、反転角度を調節することができる。
【００７１】
電動モータとして、ロータリー・アクチュエータよりもさらに小型のものを用いれば、反転機構をさらにコンパクトにまとめることが可能である。また、メカストッパの機構は、フィンガーに設けてもよい。
【００７２】
次に、リニア・アクチュエータを応用した反転機構について説明する。
【００７３】
図８は、リニア・アクチュエータを用いた反転機構の要部を例示する概念図である。すなわち、図８（ａ）に表した具体例の場合、圧力空気あるいはソレノイドなどによるリニア・アクチュエータ５１の駆動軸が直動ガイド５２、弾力剛体５３、リンク５５を介してフィンガーの反転軸２１（または２３）と結合されている。弾力剛体５３は、例えばピアノ線や板バネのような弾性を有する延伸体である。
【００７４】
フィンガーの反転軸２１（または２３）は、図８（ｂ）に表したように軸受け３５により保持され、その先端にリンク５５が設けられている。
【００７５】
図８（ｃ）は、リンク５５の要部を拡大した説明図である。すなわち、リンク５５は、円形のディスク５５Ａと、その円周上に設けられたリンク軸５５Ｂ、軸受け５５Ｃ、ボス５５Ｄを有する。ボス５５Ｄは、軸受け５５Ｃによってリンク軸５５Ｂの周りに回転自在に取り付けられている。
【００７６】
そして、ボス５５Ｄの動作端点は、メカストッパ５６Ａ及び５６Ｂにより決定される。
【００７７】
図８（ｄ）及び（ｅ）は、リンクの作用を説明する概念図である。
【００７８】
すなわち、図８（ｄ）に表したように、ボス５５Ｄがメカストッパ５６Ａに突き当てられた状態から、リニア・アクチュエータ５１の駆動軸が直動ガイド５２を引き戻すように動くと、弾力剛体５３がディスク５５Ａの上に突出した反転軸２１（または２３）に当たる。すると、反転軸２１は「てこ」の支点として作用し、弾力剛体５３を図中の上方に持ち上げる。その結果として、リンク５５は、右方向に反転を開始する。
【００７９】
一方、図８（ｅ）に表したように、ボス５５Ｄがメカストッパ５６Ｂに突き当てれた状態から、リニア・アクチュエータ５１の駆動軸が直動ガイド５２を押し出すように動くと、弾力剛体５３は、上方に弓なりに変形し、バネの作用によってボス５５Ｄを上方に跳ね上げる。その結果として、リンク５５は左方向に反転を開始する。
【００８０】
以上説明したようなリニア・アクチュエータ５１を用いる場合、反転機構の厚みをさらに薄くすることが可能となり、フィンガー１２と１４との間隔をさらに狭く設定することができる。
【００８１】
以上、本発明のロボット装置の要部について具体例を参照しつつ説明した。
【００８２】
次に、これらのロボット装置を搭載した本発明の処理装置の具体例について説明する。
【００８３】
図９（ａ）は、本発明の処理装置の第２の具体例を表す概念図である。
【００８４】
また、同図（ｂ）は、比較例として、図１３に例示したような２本のフィンガーを有する従来のロボット装置を搭載した処理装置を表す概念図である。
【００８５】
同図については、図１乃至図８に関して前述したものと同様の要素には同一の符号を付して詳細な説明は省略する。
【００８６】
図９（ａ）に表したように、本具体例の処理装置は、半導体ウェーハやガラス基板などのワークが収容された第１のカセット１０２、ワークの表裏を反転させる反転モジュール１２０、第１のスピン洗浄を行う処理モジュール１０６Ａ、第２のスピン洗浄を行う処理モジュール１０６Ｂ、ホットプレート乾燥を行う処理モジュール１０８、ワークが収容される第２のカセット１１０を有する。
【００８７】
図９（ａ）に表した本発明の処理装置においては、ワークはまず、カセット１０２から処理モジュール１０６Ａに搬送（経路Ａ）され、その表面側がスピン洗浄される。その次に、反転モジュール１２０に搬送（経路Ｂ）されて表裏が反転され、処理モジュール１０６Ｂに搬送（経路Ｃ）されて裏面側がスピン洗浄される。
【００８８】
第１のスピン洗浄と第２のスピン洗浄の内容は同一でもよく、異なるものでも良い。これらスピン洗浄を同一の内容とした場合には、スループットの向上が図れる。また、ワークは、通常のその表面側と裏面側の状態が異なる場合も多いので、それらに対応して第１のスピン洗浄と第２のスピン洗浄の内容を変えることもできる。
【００８９】
第２のスピン洗浄が終わると、ワークは処理モジュール１０８に搬送（経路Ｄ）されてホットプレート乾燥され、カセット１１０に戻される（経路Ｅ）。
【００９０】
本具体例の処理装置においては、以上説明した５つの搬送経路Ａ〜Ｅについて、次のようにフィンガー面を使い分けることができる。

つまり、２回のスピン洗浄の前後において、それぞれ異なるフィンガー面を用いることが可能であり、洗浄前の汚れや塵埃が洗浄後のワークやカセットなどに付着する問題を解消することができる。
【００９１】
これに対して、図９（ｂ）に表した従来の処理装置においては、２本のフィンガー２１２、２１４は、次のように使い分けられる。

つまり、従来のロボット装置を用いる場合には、第１及び第２のスピン洗浄の前後において、同一のフィンガーによりワークを搬送しなければならず、クロス・コンタミネーションが生ずる虞がある。
【００９２】
本発明によれば、このようなクロス・コンタミネーションの発生を防ぐことができる。なお、本具体例においては、ワークは全てドライな状態で搬送されるが、洗浄前のワークを下側のフィンガー１４により搬送し、洗浄後のワークを上側のフィンガー１２により搬送すれば、洗浄後のワーク表面にダストなどが落下して再汚染する心配もない。
【００９３】
次に、本発明の処理装置の第３の具体例について説明する。
【００９４】
図１０（ａ）は、本発明の処理装置の第３の具体例を表す概念図である。
【００９５】
また、同図（ｂ）は、比較例として、図１３に例示したような２本のフィンガーを有する従来のロボット装置を搭載した処理装置を表す概念図である。
【００９６】
同図についても、図１乃至図９に関して前述したものと同様の要素には同一の符号を付して詳細な説明は省略する。
【００９７】
図１０（ａ）に表したように、本具体例の処理装置は、半導体ウェーハやガラス基板などのワークが、ウエットローダ１２２によって水に浸された状態で供給される。
【００９８】
ウエットローダ１２２に収容されたワークは、まず、処理モジュール１０４に搬送（経路Ａ）されて両面がブラシ洗浄され、次に処理モジュール１０６に搬送（経路Ｂ）されてスピン洗浄され、次に処理モジュール１０８に搬送されてホットプレート乾燥され、最後にカセット１１０に搬送される（経路Ｄ）。
【００９９】
これらワークの搬送は、図１乃至図８に関して前述した本発明のロボット装置により行われる。
【０１００】
本具体例の処理装置においては、以上説明した４つの搬送経路Ａ〜Ｄについて、次のようにフィンガー面を使い分けることができる。

つまり、４つの搬送経路にそれぞれ専用のフィンガー面を使い分けることが可能となる。従って、各工程前後のクロス・コンタミネーションの発生を効果的に抑止することができる。また、この場合にも、下側のフィンガー１４によりウエットな状態のワークを搬送し、上側のフィンガー１２によりドライな状態のワークを搬送するようにすれば、ウエットな状態のワークあるいはフィンガーからの薬液や水滴の落下によるクロス・コンタミネーションの発生を防ぐことができる。
【０１０１】
これに対して、図１０（ｂ）に表した従来の処理装置においては、２本のフィンガー２１２、２１４は、次のように使い分けられる。

つまり、従来のロボット装置を用いる場合には、ブラシ洗浄の前後において、同一のフィンガーによりワークを搬送しなければならず、クロス・コンタミネーションが生ずる虞がある。
【０１０２】
本発明によれば、このようなクロス・コンタミネーションの発生を防ぐことができる。
【０１０３】
以上、具体例を参照しつつ本発明の実施の形態にかかるロボット装置及び処理装置について説明した。しかし、本発明は、これらの具体例に限定されるものではない。
【０１０４】
例えば、ロボット装置の走行軸、昇降軸、旋回軸などの配置関係や、アームのデザインなどについては、図示したものには限定されず、用途に応じて当業者が適宜設計変更して本発明の同様の効果を得ることができる限り本発明の範囲に含まれる。
【０１０５】
また、図２乃至図１０に例示した処理装置の構成は一例に過ぎず、カセットの数、ワークの種類や形状、処理モジュールの数やその処理の内容、あるいは、各ポイントの配置関係などは、当業者が適宜設計変更して本発明の同様の効果を得ることができる限り本発明の範囲に含まれる。
【０１０６】
例えば、図１１に例示したように、処理装置にワークを供給・排出する手段としては、カセット１０２、１１０やウエットローダ１２２以外にも、他のロボット装置などの搬送手段によってワークがワーク載置台１２６に供給されたワークを各モジュールに搬送する。同様に、処理済みのワークをワーク載置台１２６に搬送し、他の搬送手段が次の工程に搬送してもよい。
【０１０７】
また、処理モジュールとしては、ブラシ洗浄のモジュール１０４、スピン洗浄のモジュール１０６、ワーク反転のモジュール１２０の他にも、種々の処理モジュールを適宜組み合わせて前述のものと同様の効果が得られる。
【０１０８】
【発明の効果】
以上詳述したように、本発明によれば、従来よりも装置構成を大幅に簡略化しつつ、処理前後のワークの清浄度のレベルに応じて搬送するフィンガー面を使い分けることができる。その結果として、ワークやカセットなどのクロス・コンタミネーションの発生を効果的に抑止することができ、産業上のメリットは多大である。
【図面の簡単な説明】
【図１】本発明の実施の形態にかかるロボット装置のアーム部を例示する模式図である。
【図２】本発明のロボット装置を搭載した処理装置の全体構成を例示する平面図である。
【図３】（ａ）は本発明の処理装置におけるワークの搬送方法を表す概念図であり、（ｂ）は、比較例として、図１３に例示したような２本のフィンガーを有する従来のロボット装置を搭載した処理装置におけるワークの搬送方法を表す概念図である。
【図４】発明の第２の具体例にかかるロボット装置のアーム部を例示する概念図であり、同図（ａ）はその平面図、同図（ｂ）はその正面図である。
【図５】本発明の第３の具体例にかかるロボット装置のアーム部を例示する概念図であり、同図（ａ）はその平面図、同図（ｂ）はその正面図である。
【図６】ロータリー・アクチュエータを用いた反転機構の要部を例示する概念図である。
【図７】 電動モータを用いた反転機構の要部を例示する概念図である。
【図８】リニア・アクチュエータを用いた反転機構の要部を例示する概念図である。
【図９】（ａ）は、本発明の処理装置の第２の具体例を表す概念図であり、（ｂ）は、比較例として、図１３に例示したような２本のフィンガーを有する従来のロボット装置を搭載した処理装置を表す概念図である。
【図１０】（ａ）は、本発明の処理装置の第３の具体例を表す概念図であり、（ｂ）は、比較例として、図１３に例示したような２本のフィンガーを有する従来のロボット装置を搭載した処理装置を表す概念図である。
【図１１】本発明の処理装置の組み合わせ構成例を表す説明図である。
【図１２】洗浄を行う処理装置の全体構成を模式的に例示する概念図である。
【図１３】処理装置においてワークを搬送するために設けられている従来のロボット装置の全体構成を例示する斜視図である。
【符号の説明】
１、２００ ロボット装置
２、２０２ 走行軸
４、２０４ 昇降軸
６、２０６ 旋回軸
８、１０、２０８、２１０ アーム
１２、１４、２１２、２１４ フィンガー
１２Ａ、１２Ｂ、１４Ａ、１４Ｂ フィンガー面
２０ 反転機構
２１、２３ 反転軸
２６ 昇降軸
３１ ロータリー・アクチュエータ
３３ カップリング
３４ 伝達機構
３５ 軸受け
４１ モータ
４２ 減速器
４４Ａ、４４Ｂ メカストッパ
４６ フリップ
５１ リニア・アクチュエータ
５２ 直動ガイド
５３ 弾力剛体
５５ リンク
５５Ａ ディスク
５５Ｂ リンク軸
５５Ｃ 軸受け
５５Ｄ ボス
５６Ａ、５６Ｂ メカストッパ
１００ 洗浄装置
１０２、１１０ カセット
１０４ ブラシ洗浄モジュール
１０６ スピン洗浄モジュール
１０８ ホットプレート処理モジュール
１０８ 処理モジュール
１２０ 反転モジュール
１２２ ウエットローダ
１２６ ワーク載置台
Ｗ ワーク[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a robot apparatus and a processing apparatus. More specifically, the present invention relates to a robot apparatus for sequentially transporting workpieces such as semiconductor wafers and liquid crystal display substrates and performing processing such as cleaning, and using the robot apparatus. The present invention relates to a processing apparatus that performs predetermined processing on a workpiece.
[Prior art]
When manufacturing a semiconductor device or a liquid crystal display, it is often necessary to automatically convey a workpiece.
[0002]
For example, in the manufacturing process of forming a circuit pattern on a semiconductor wafer or glass substrate, it is necessary to perform various types of processing on these workpieces. There is.
[0003]
FIG. 12 is a conceptual diagram schematically illustrating the overall configuration of a processing apparatus that performs such cleaning. That is, the cleaning apparatus 100 includes a first cassette 102 in which a workpiece such as a semiconductor wafer or a glass substrate is accommodated, a first processing module 104 that performs brush cleaning, a second processing module 106 that performs spin cleaning, and hot plate drying. A third processing module 108 for performing the above-described processing, and a second cassette 110 for storing the workpiece. And the robot apparatus 200 which conveys a workpiece | work between these cassettes and modules is provided.
[0004]
The brush cleaning performed in the first processing module 104 is, for example, wiping and cleaning both surfaces of the workpiece with a brush while spraying a chemical solution or the like, and can remove organic substances and relatively large dust adhering to the workpiece.
[0005]
The spin cleaning performed in the second processing module 106 is performed by wiping and cleaning with a sponge brush or the like while the workpiece is rotated, or by ultrasonic cleaning by spraying a cleaning liquid to which ultrasonic vibration is applied. Fine dust that is difficult to remove by washing can be washed away. Further, the workpiece after cleaning can be spin-dried by rotating at high speed.
[0006]
In the third processing module 108, the spin-dried work is further heated and dried by a hot plate.
[0007]
As outlined above, the processing apparatus illustrated in FIG. 12 includes three processing modules, and the workpiece is transported between the modules in the flow illustrated in the transport paths A to D in FIG.
[0008]
FIG. 13 is a perspective view illustrating the overall configuration of a conventional robot apparatus provided for conveying a workpiece in such a processing apparatus. That is, the robot apparatus illustrated in the figure is a polar coordinate type robot apparatus in which the arm rotates, and so-called “double arm type” in which two arms are mounted on the rotation axis in order to improve productivity. It has the following structure.
[0009]
As publications disclosing such a robot apparatus, for example, Japanese Patent No. 2739413 and Japanese Patent Laid-Open No. 2000-1000089 can be cited.
[0010]
In the robot apparatus 200 illustrated in FIG. 13, two axes of a first arm 208 and a second arm 210 are provided on a travel axis 202, a lifting / lowering axis 204, and a turning axis 206. These five axes are all pulse-driven by a stepping motor or a pulse motor.
[0011]
FIG. 13A shows a state in which the first arm 208 of the two arms is deployed forward, and FIG. 13B shows a state in which both arms are stored in the home position.
[0012]
Fingers 212 and 214 are provided at the tips of the first and second arms 208 and 210, and a workpiece such as a wafer is conveyed while being held by any of these fingers.
[0013]
[Problems to be solved by the invention]
Now, returning to FIG. 12 and continuing the description, the states of the workpieces in the transport paths A to D are as follows.
Path A: Dry state before cleaning
Path B: wet state after brush cleaning
Path C: Dry state after spin cleaning and drying
Path D: Dry state after hot plate drying
That is, inside the processing apparatus, the state before cleaning (path A) where dirt and dust are attached, the wet state during a series of cleaning processes (path B), or the clean state after cleaning and drying (path B). It is necessary to transport workpieces in various states such as paths C and D).
[0014]
However, in the case of the robot apparatus illustrated in FIG. 13, only two arms for conveying the workpiece are provided. Therefore, it is necessary to hold and convey the workpieces in these various states by the fingers 212 and 214 of these two arms.
[0015]
Here, handling a wet workpiece and a dry workpiece with the same finger should be avoided. This is because there is a possibility that a dry work, a cassette or the like may be soiled by moisture or chemicals attached to the work. Therefore, it is necessary to use one of the two fingers 212 and 214 as a wet workpiece and the other as a dry workpiece. That is, in the case of the processing apparatus illustrated in FIG. 12, the paths A, C, and D are conveyed by the same finger.
[0016]
However, if the fingers are shared in this way, dirt or dust adhering to the workpiece before cleaning may adhere to the fingers and the workpiece after cleaning may be recontaminated. Such problems were not so serious in the manufacture of conventional semiconductor devices and liquid crystal displays, but in consideration of the further miniaturization of elements in the future, the required process cleanliness will become even higher. Then, it is a problem to be solved.
[0017]
As a method of solving this problem, it is conceivable to provide two double-arm robot devices as illustrated in FIG. However, if this is done, the apparatus cost is high, and the apparatus becomes large and complicated, so there is room for improvement in terms of installation space and maintenance.
[0018]
The same situation exists not only in the processing apparatus illustrated in FIG. 12 but also in the case of a processing apparatus that performs, for example, resist removal and development, or various etching processes. That is, if an attempt is made to transport a workpiece before processing, a workpiece in a wet state during processing, and a workpiece after processing with two fingers, problems such as cross contamination may occur.
[0019]
The present invention has been made on the basis of recognition of such a problem, and an object of the present invention is to mount a robot apparatus capable of realizing high cleanliness by reliably preventing cross contamination of a workpiece with a simple configuration and the same. It is to provide a processing apparatus.
[0020]
[Means for Solving the Problems]
In order to achieve the above object, a robot apparatus according to the present invention includes a first arm and a first arm. tip Provided with a first finger having first and second work holding surfaces, and a first reversing mechanism for reversing the first finger,
Reversing the first finger by the first reversing mechanism In Therefore, one of the first and second workpiece holding surfaces can be selected to hold and transfer the workpiece. A second arm, a second finger provided at a tip of the second arm and having third and fourth work holding surfaces, a second reversing mechanism for reversing the second finger, The second finger is reversed by the second reversing mechanism to select one of the third and fourth work holding surfaces to hold and transport the work, The finger is provided vertically below the first finger, and the first finger is reversed by the first reversing mechanism so that the first finger is decentered from the center line of the first finger. The reversal of the second finger by the second reversing mechanism is performed around the second reversal axis that is eccentric from the center line of the second finger. It is characterized by that.
[0021]
According to the above configuration, by using different workpiece holding surfaces, it is possible to effectively suppress the occurrence of workpiece cross-contamination with a simple device configuration.
[0022]
Here, the second arm and the second arm tip A second finger having third and fourth workpiece holding surfaces, and a second reversing mechanism for reversing the second finger,
If the second reversing mechanism is used to reverse the second finger to select one of the third and fourth work holding surfaces to hold and transfer the work, a so-called “double arm type” The four workpiece holding surfaces can be used properly according to the level of cleanliness of the workpiece and the wet / dry state.
[0023]
Further, by providing a fixing means such as a vacuum chuck for fixing the workpiece on the workpiece holding surface of the finger, the workpiece can be quickly conveyed while preventing the workpiece from dropping or being displaced.
[0024]
In addition, First By the reversing mechanism First The reversal of the finger First Eccentric from finger center line First Around the reversal axis The reversing of the second finger by the second reversing mechanism is performed around a second reversing axis that is eccentric from the center line of the second finger. If it is, it becomes easy to prevent interference at the time of inversion.
[0027]
Further, by further including traveling means for moving the arm in the horizontal direction and turning means for turning the arm, the operation as a so-called “polar coordinate type” robot can be freely performed.
[0028]
On the other hand, the processing apparatus of the present invention includes any one of the robot apparatuses described above and a processing module that performs processing on a workpiece.
The robot apparatus carries an unprocessed workpiece into the processing module while being held on one of the first and second workpiece holding surfaces, and holds the processed workpiece on the first and second workpieces. It is carried out from the processing module while being held on either one of the surfaces.
[0029]
According to the above configuration, the workpiece holding surface can be properly used according to the cleanliness of the workpiece with a simple configuration, and the occurrence of cross contamination can be effectively suppressed.
[0030]
Alternatively, the processing apparatus of the present invention performs any of the robot apparatuses having the second arm described above, a first processing module that performs a first process on the work, and a second process on the work. A second processing module to be applied,
The robot apparatus carries a workpiece into the first processing module in a state where the workpiece is held on one of the first and second workpiece holding surfaces, and either of the third and fourth workpiece holding surfaces. The workpiece is transported from the first processing module to the second processing module while holding the workpiece on either side.
[0031]
According to the above configuration, the work holding surface of the fingers provided on each of the two arms can be used properly, so that the work holding surface can be used properly according to the cleanliness of the work, etc., and the occurrence of cross contamination is effective. Can be deterred.
[0032]
Here, if the work carried out from the first processing module is in a wet state, the wet work and the dry work can be held by the work holding surfaces of different arms, Cross contamination due to water droplets can be prevented.
[0033]
In addition, the second Finger The first Finger If it is provided relatively vertically below, it is possible to easily prevent the occurrence of cross-contamination due to the drop of the chemical solution or water droplets.
[0034]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0035]
FIG. 1 is a schematic view illustrating an arm unit of a robot apparatus according to an embodiment of the invention. 1A is a plan view, FIG. 1B is a side view of the finger portion viewed from the A direction, and FIG. 1C is a front view of the finger portion viewed from the B direction.
[0036]
In the illustrated example, the present invention is applied to a “double arm type” robot apparatus, and two arms 8, 10 are provided on the traveling shaft 2, the lifting shaft 4 and the turning shaft 6. Yes. These arms 8 and 10 can be expanded up to a workpiece transfer place P. And the fingers 12 and 14 are provided in the front-end | tip of the arms 8 and 10, and it can convey in the state which hold | maintained the workpiece | work W on the workpiece | work holding surface.
[0037]
In the present invention, the fingers 12 and 14 can be reversed by the reversing mechanisms 20 and 22, respectively. The workpiece W can be held even in the inverted state. That is, as shown in FIG. 1C, the fingers 12 and 14 are the workpieces on both the surfaces (work holding surfaces) 12A and 14A before the reversing and the surfaces (work holding surfaces) 12B and 14B after the reversing. W can be held.
[0038]
In this way, an effect equivalent to that of a robot apparatus having four fingers can be obtained. In other words, depending on the cleanliness of the workpiece to be transported, the front and back sides of the two fingers can be used separately, and problems such as cross contamination of workpieces and cassettes can be solved. .
[0039]
Here, when a wet workpiece and a dry workpiece are transported, the finger surfaces 12A and 12B provided on the upper arm 8 are used for the dry workpiece, and the lower arm 10 is provided. The finger surfaces 14A and 14B may be used for wet workpieces. If it does in this way, a chemical | medical solution and a water drop will not fall from the wet workpiece | work and the finger holding it, and the workpiece | work and finger of a dry state will not be soiled.
[0040]
The workpiece holding surfaces 12A, 12B, 14A, and 14B may be provided with workpiece fixing means for fixing the workpiece such as a vacuum chuck. In this way, it is possible to quickly convey the workpiece while preventing the workpiece from dropping or “displacement”.
[0041]
Here, in the case of the specific example shown in FIG. 1, the rotating shafts 21 and 23 for reversal are provided at positions deviated from the center line C of the fingers 12 and 14. In this way, as shown in FIG. 1C, even when the upper and lower fingers overlap at the home position, the fingers can be reversed without interfering with each other.
[0042]
In this case, when the finger is reversed, the position of the center line C is shifted. However, if the traveling shaft 2 is provided in the robot apparatus, the position can be easily aligned by moving it in parallel after the reversal.
[0043]
FIG. 2 is a plan view illustrating the overall configuration of a processing apparatus equipped with the robot apparatus of this embodiment. That is, the processing apparatus illustrated in the figure has the same overall configuration as that shown in FIG. 12, and includes a first cassette 102 in which a workpiece such as a semiconductor wafer or a glass substrate is accommodated, a first brush that performs brush cleaning. The processing module 104 includes a second processing module 106 that performs spin cleaning, a third processing module 108 that performs hot plate drying, and a second cassette 110 that accommodates a workpiece.
[0044]
And the robot apparatus 1 of this invention is mounted and a workpiece | work is conveyed between these cassettes and modules.
[0045]
Fig.3 (a) is a conceptual diagram showing the conveyance method of the workpiece | work in the processing apparatus of this invention. Further, FIG. 6B is a conceptual diagram showing a workpiece transfer method in a processing apparatus equipped with a conventional robot apparatus having two fingers as illustrated in FIG. 13 as a comparative example.
[0046]
In the processing apparatus of the present invention shown in FIG. 3A, the finger surfaces can be properly used for the four transport paths A to D as follows.

A part of the specific operation of the robot apparatus 1 will be described. For example, after the workpiece is transferred from the cassette 102 to the brush cleaning module 104 using the finger surface 12A provided on the arm 8, the arm 8 is set to the home position. Next, the workpiece is transferred from the brush cleaning module 104 to the spin cleaning module 106 using the finger surface 14 </ b> A provided on the arm 10. Next, the workpiece is transferred from the spin cleaning module 106 to the hot plate 108 using the finger surface 12B.
[0047]
Here, the reversal of the finger 12 can be performed in a state in which the arm 8 is stored in the home position. After the finger 12 is reversed, the finger 12 is translated along the traveling axis 2 to adjust the position of the finger. . However, the reversal of the fingers is possible at a position other than the home position, and can be performed in a state where the arm is deployed forward or during the deployment operation.
[0048]
On the other hand, in the conventional processing apparatus shown in FIG. 3B, the two fingers 212 and 214 are properly used as follows.

In other words, when a conventional robot apparatus is used, a dry workpiece before cleaning and a dry workpiece after cleaning are transported by the same finger, which may cause cross contamination. is there.
[0049]
On the other hand, according to the present invention, it becomes possible to transport the workpieces in a dry state before cleaning (path A) and after cleaning (paths C and D) on different finger surfaces, and cross contamination. Can be eliminated.
[0050]
Furthermore, as a matter of course, according to the present invention, cross contamination due to chemicals or moisture can be eliminated by transporting a dry workpiece and a wet workpiece by different arms.
[0051]
Further, in order to use the fingers properly by using the conventional robot apparatus as illustrated in FIG. 13, it is necessary to install two “double arm type” robots. The dimensions will also increase and the maintenance burden will increase.
On the other hand, according to the present invention, since it can be handled by a single double-arm robot, the apparatus cost is low, and it is compact and easy to maintain.
[0052]
Next, a modified example of the robot apparatus of the present invention will be described.
[0053]
FIG. 4 is a conceptual diagram illustrating an arm portion of a robot apparatus according to a second specific example of the invention. FIG. 4A is a plan view and FIG. 4B is a front view thereof. In this figure, the same elements as those described above with reference to FIGS. 1 to 3 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0054]
The robot apparatus of this specific example also has a “double arm type” configuration, and the fingers 12 and 14 provided at the tip of the arm can be reversed. However, in this specific example, the rotating shafts 21 and 23 for reversing the fingers are provided in the vicinity of the center line C of the fingers. That is, the fingers 12 and 14 are inverted with the vicinity of the center line C as the center.
[0055]
In this way, even if the fingers 12 and 14 are inverted, their lateral positions do not change, so that position adjustment along the traveling axis 2 is not necessary.
[0056]
In the case of this specific example, as shown in the drawing, by reversing the fingers with one of the two fingers deployed forward, interference between the fingers during reversal can be prevented.
[0057]
FIG. 5 is a conceptual diagram illustrating an arm portion of a robot apparatus according to a third specific example of the present invention, where FIG. 5 (a) is a plan view and FIG. 5 (b) is a front view thereof. Also in this figure, the same elements as those described above with reference to FIGS. 1 to 4 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0058]
The robot apparatus of this specific example also has a “double arm type” configuration, and the fingers 12 and 14 provided at the tip of the arm are reversed with the vicinity of the center line C as the center. However, in this specific example, a lifting shaft 26 is added to the arm 8.
[0059]
The fingers 12 and 14 are reversed while the arm 8 is lifted upward by the lifting shaft 26. If it does in this way, interference between fingers at the time of inversion can be prevented.
[0060]
According to this specific example, even if the finger is reversed, it is not necessary to adjust its lateral position, and when the finger is reversed, it is only necessary to release the arm slightly upward without deploying the arm forward. Can be shortened to increase the work throughput, and the apparatus can be made more compact.
[0061]
In this specific example, instead of the arm 8 escaping upward, a lifting shaft may be added to the arm 10 so as to escape downward when the fingers are reversed. Alternatively, a lifting shaft may be added to both the arms 8 and 10.
[0062]
Next, a specific example of the reversing mechanism of the robot apparatus of the present invention will be described.
[0063]
It is desirable that the reversing mechanisms 20 and 22 provided at the tips of the arms are as compact as possible and operate reliably and quickly.
[0064]
First, a reversing mechanism using a rotary actuator will be described.
[0065]
FIG. 6 is a conceptual diagram illustrating the main part of a reversing mechanism using a rotary actuator. In the case of the specific example shown in FIG. 6A, the rotary shaft of the rotary actuator 31 that is rotated by pressure air is coupled to the finger reversal shaft 21 (or 23) by the flexible coupling 33. The reversing shaft 21 (or 23) of the finger is held by a bearing 35.
[0066]
The rotary actuator is advantageous in that it is lightweight and compact, can be operated quickly, and the rotation angle can be preset.
[0067]
On the other hand, in the case of the specific example shown in FIG. 6B, the rotary shaft of the rotary actuator 31 and the reverse shaft 21 (or 23) of the finger are coupled by a transmission mechanism 34 of a gear type or a timing belt type. . By providing such a transmission mechanism 34, the rotary actuator 31 can be arranged so as to be shifted from the reversing shaft 21 (or 23). For this reason, the interval between the upper and lower fingers 12 and 14 can be narrowed without being influenced by the size of the actuator 31.
[0068]
Next, a reversing mechanism using an electric motor will be described.
[0069]
FIG. 7 is a conceptual diagram illustrating the main part of a reversing mechanism using an electric motor. That is, in the case of the specific example shown in FIG. 7A, the output of the motor 41 is adjusted by the speed reducer 42 and is coupled to the finger reversal shaft 21 (or 23) via the flexible coupling 33. The rotation angle is adjusted by the mechanical stoppers 44A and 44B.
[0070]
FIG.7 (b) is a conceptual diagram showing the effect | action of a mechanical stopper. A flip 46 is provided on the reversing shaft 21 (or 23) of the finger, and the reversing angle can be adjusted by mechanical stoppers 44A and 44B provided on both sides.
[0071]
If the electric motor is smaller than the rotary actuator, the reversing mechanism can be further compacted. Further, the mechanism of the mechanical stopper may be provided on the finger.
[0072]
Next, a reversing mechanism using a linear actuator will be described.
[0073]
FIG. 8 is a conceptual diagram illustrating the main part of a reversing mechanism using a linear actuator. That is, in the case of the specific example shown in FIG. 8A, the drive shaft of the linear actuator 51 by pressure air or a solenoid is used as the reversing shaft 21 (or the finger reversal shaft 21 via the linear motion guide 52, the elastic rigid body 53, and the link 55. 23). The elastic rigid body 53 is an extended body having elasticity such as a piano wire or a leaf spring.
[0074]
The reverse shaft 21 (or 23) of the finger is held by a bearing 35 as shown in FIG. 8B, and a link 55 is provided at the tip thereof.
[0075]
FIG. 8C is an explanatory diagram in which a main part of the link 55 is enlarged. That is, the link 55 includes a circular disk 55A and a link shaft 55B, a bearing 55C, and a boss 55D provided on the circumference thereof. The boss 55D is rotatably mounted around the link shaft 55B by a bearing 55C.
[0076]
The operating end point of the boss 55D is determined by the mechanical stoppers 56A and 56B.
[0077]
FIGS. 8D and 8E are conceptual diagrams for explaining the operation of the link.
[0078]
That is, as shown in FIG. 8D, when the drive shaft of the linear actuator 51 moves from the state where the boss 55D is abutted against the mechanical stopper 56A so as to pull back the linear guide 52, the elastic rigid body 53 is moved to the disk. It hits the reversal shaft 21 (or 23) protruding above 55A. Then, the reversal shaft 21 acts as a fulcrum for the “lever” and lifts the elastic rigid body 53 upward in the drawing. As a result, the link 55 starts to reverse in the right direction.
[0079]
On the other hand, as shown in FIG. 8E, when the boss 55D is in contact with the mechanical stopper 56B and the drive shaft of the linear actuator 51 moves so as to push the linear motion guide 52, the elastic rigid body 53 is moved upward. The boss 55D is flipped upward by the action of a spring. As a result, the link 55 starts to reverse in the left direction.
[0080]
When the linear actuator 51 as described above is used, the thickness of the reversing mechanism can be further reduced, and the distance between the fingers 12 and 14 can be set further narrower.
[0081]
In the above, the main part of the robot apparatus of the present invention has been described with reference to specific examples.
[0082]
Next, specific examples of the processing apparatus of the present invention equipped with these robot apparatuses will be described.
[0083]
FIG. 9A is a conceptual diagram showing a second specific example of the processing apparatus of the present invention.
[0084]
FIG. 6B is a conceptual diagram showing a processing apparatus equipped with a conventional robot apparatus having two fingers as illustrated in FIG. 13 as a comparative example.
[0085]
In this figure, the same elements as those described above with reference to FIGS. 1 to 8 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0086]
As shown in FIG. 9A, the processing apparatus of this specific example includes a first cassette 102 in which a work such as a semiconductor wafer or a glass substrate is accommodated, a reversing module 120 for reversing the front and back of the work, a first It has a processing module 106A for performing spin cleaning, a processing module 106B for performing second spin cleaning, a processing module 108 for performing hot plate drying, and a second cassette 110 in which workpieces are accommodated.
[0087]
In the processing apparatus of the present invention shown in FIG. 9A, the work is first transported from the cassette 102 to the processing module 106A (path A), and the surface side thereof is spin cleaned. Next, it is conveyed to the reversing module 120 (path B) and the front and back are reversed, and is conveyed to the processing module 106B (path C), and the back side is spin cleaned.
[0088]
The contents of the first spin cleaning and the second spin cleaning may be the same or different. If these spin cleanings have the same content, throughput can be improved. In addition, since the work often has different states on the front side and the back side, the contents of the first spin cleaning and the second spin cleaning can be changed correspondingly.
[0089]
When the second spin cleaning is completed, the workpiece is transferred to the processing module 108 (path D), dried on the hot plate, and returned to the cassette 110 (path E).
[0090]
In the processing apparatus of this specific example, the finger surfaces can be properly used as follows for the five transport paths A to E described above.

That is, it is possible to use different finger surfaces before and after the two spin cleanings, and it is possible to solve the problem that dirt and dust before cleaning adhere to the workpieces and cassettes after cleaning.
[0091]
On the other hand, in the conventional processing apparatus shown in FIG. 9B, the two fingers 212 and 214 are properly used as follows.

That is, when a conventional robot apparatus is used, the workpiece must be transported by the same finger before and after the first and second spin cleaning, which may cause cross contamination.
[0092]
According to the present invention, it is possible to prevent the occurrence of such cross contamination. In this specific example, all the workpieces are conveyed in a dry state. However, if the workpiece before cleaning is conveyed by the lower finger 14 and the workpiece after cleaning is conveyed by the upper finger 12, the workpiece is cleaned. There is no worry of dust falling on the workpiece surface and recontamination.
[0093]
Next, a third specific example of the processing apparatus of the present invention will be described.
[0094]
FIG. 10A is a conceptual diagram showing a third specific example of the processing apparatus of the present invention.
[0095]
FIG. 6B is a conceptual diagram showing a processing apparatus equipped with a conventional robot apparatus having two fingers as illustrated in FIG. 13 as a comparative example.
[0096]
Also in this figure, the same elements as those described above with reference to FIGS. 1 to 9 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0097]
As shown in FIG. 10A, the processing apparatus of this specific example is supplied with a work such as a semiconductor wafer or a glass substrate immersed in water by a wet loader 122.
[0098]
The work accommodated in the wet loader 122 is first transported to the processing module 104 (path A) and both surfaces are brush cleaned, then transported to the processing module 106 (path B) and spin cleaned, and then the processing module. It is conveyed to 108 and hot plate dried, and finally conveyed to the cassette 110 (path D).
[0099]
These workpieces are conveyed by the robot apparatus of the present invention described above with reference to FIGS.
[0100]
In the processing apparatus of this specific example, the finger surfaces can be properly used as follows for the four transport paths A to D described above.

That is, it is possible to use dedicated finger surfaces for the four transport paths. Therefore, occurrence of cross contamination before and after each process can be effectively suppressed. Also in this case, if the wet workpiece is transported by the lower finger 14 and the dry workpiece is transported by the upper finger 12, the wet workpiece or the chemical solution from the finger is used. It is possible to prevent the occurrence of cross-contamination due to falling water drops.
[0101]
On the other hand, in the conventional processing apparatus shown in FIG. 10B, the two fingers 212 and 214 are properly used as follows.

That is, when a conventional robot apparatus is used, the workpiece must be transported by the same finger before and after brush cleaning, which may cause cross contamination.
[0102]
According to the present invention, it is possible to prevent the occurrence of such cross contamination.
[0103]
The robot apparatus and the processing apparatus according to the embodiment of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples.
[0104]
For example, the arrangement relationship of the traveling axis, the raising / lowering axis, the turning axis, etc. of the robot apparatus and the design of the arm are not limited to those shown in the drawings, and those skilled in the art can appropriately change the design according to the application. As long as the same effect can be obtained, it is included in the scope of the present invention.
[0105]
Further, the configuration of the processing apparatus illustrated in FIGS. 2 to 10 is merely an example, and the number of cassettes, the type and shape of the workpiece, the number of processing modules and the contents of the processing, or the arrangement relationship of each point, It is included in the scope of the present invention as long as a person skilled in the art can appropriately change the design to obtain the same effect of the present invention.
[0106]
For example, as illustrated in FIG. 11, as a means for supplying and discharging the work to and from the processing apparatus, in addition to the cassettes 102 and 110 and the wet loader 122, the work is placed on the work mounting table 126 by a transport means such as another robot apparatus. The workpiece supplied to is transported to each module. Similarly, the processed workpiece may be transferred to the workpiece mounting table 126, and another transfer means may transfer it to the next step.
[0107]
In addition to the brush cleaning module 104, the spin cleaning module 106, and the work reversing module 120, various processing modules can be combined as appropriate to obtain the same effects as those described above.
[0108]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to selectively use the finger surfaces to be conveyed in accordance with the level of cleanliness of the workpiece before and after processing while greatly simplifying the apparatus configuration as compared with the prior art. As a result, the occurrence of cross-contamination such as workpieces and cassettes can be effectively suppressed, and the industrial merit is great.
[Brief description of the drawings]
FIG. 1 is a schematic view illustrating an arm unit of a robot apparatus according to an embodiment of the invention.
FIG. 2 is a plan view illustrating the overall configuration of a processing apparatus equipped with the robot apparatus of the present invention.
3A is a conceptual diagram showing a workpiece transfer method in the processing apparatus of the present invention, and FIG. 3B is a conventional robot having two fingers as illustrated in FIG. 13 as a comparative example. It is a conceptual diagram showing the conveyance method of the workpiece | work in the processing apparatus carrying an apparatus.
FIGS. 4A and 4B are conceptual views illustrating an arm portion of a robot apparatus according to a second specific example of the invention, in which FIG. 4A is a plan view and FIG. 4B is a front view thereof.
FIGS. 5A and 5B are conceptual diagrams illustrating an arm portion of a robot apparatus according to a third specific example of the invention, in which FIG. 5A is a plan view and FIG. 5B is a front view thereof.
FIG. 6 is a conceptual diagram illustrating the main part of a reversing mechanism using a rotary actuator.
FIG. 7 is a conceptual diagram illustrating the main part of a reversing mechanism using an electric motor.
FIG. 8 is a conceptual diagram illustrating the main part of a reversing mechanism using a linear actuator.
9A is a conceptual diagram showing a second specific example of the processing apparatus of the present invention, and FIG. 9B is a conventional example having two fingers as illustrated in FIG. 13 as a comparative example. It is a conceptual diagram showing the processing apparatus carrying the robot apparatus.
10A is a conceptual diagram showing a third specific example of the processing apparatus of the present invention. FIG. 10B is a comparative example having two fingers as illustrated in FIG. 13 as a comparative example. It is a conceptual diagram showing the processing apparatus carrying the robot apparatus.
FIG. 11 is an explanatory diagram illustrating an example of a combined configuration of processing apparatuses according to the present invention.
FIG. 12 is a conceptual diagram schematically illustrating the overall configuration of a processing apparatus that performs cleaning.
FIG. 13 is a perspective view illustrating the overall configuration of a conventional robot apparatus provided for conveying a workpiece in the processing apparatus.
[Explanation of symbols]
1,200 Robotic device
2,202 Travel axis
4,204 Lifting shaft
6,206 Rotating axis
8, 10, 208, 210 arm
12, 14, 212, 214 fingers
12A, 12B, 14A, 14B Finger surface
20 Inversion mechanism
21, 23 Reverse axis
26 Lifting shaft
31 Rotary actuator
33 coupling
34 Transmission mechanism
35 bearings
41 motor
42 Reducer
44A, 44B Mechanical stopper
46 flip
51 Linear actuator
52 Linear motion guide
53 Elastic Rigid Body
55 links
55A disc
55B Link shaft
55C bearing
55D boss
56A, 56B Mechanical stopper
100 Cleaning device
102, 110 cassette
104 Brush cleaning module
106 Spin cleaning module
108 Hot plate processing module
108 processing module
120 Inversion module
122 wet loader
126 Workpiece mounting table
W Work

Claims (6)

A first arm;
A first finger provided at a tip of the first arm and having first and second work holding surfaces;
A first reversing mechanism for reversing the first finger;
With
The first by selecting one of the first result in reversing the finger the first and second workpiece holding surface to hold the workpiece and can be conveyed by the reversing mechanism,
A second arm;
A second finger provided at the tip of the second arm and having third and fourth work holding surfaces;
A second reversing mechanism for reversing the second finger;
Further comprising
By selecting one of the third and fourth work holding surfaces by reversing the second finger by the second reversing mechanism, the work can be held and transported,
The second finger is provided vertically lower than the first finger,
The reversal of the first finger by the first reversing mechanism is performed around a first reversal axis that is eccentric from the center line of the first finger,
The robot apparatus according to claim 1, wherein the second finger is reversed by the second reversing mechanism about a second reversing axis that is decentered from a center line of the second finger . The workpiece holding surface of the finger, the robot apparatus according to claim 1, wherein the fixing means for fixing is provided a workpiece. Traveling means for moving the arm in a horizontal direction;
Swivel means for swiveling the arm;
Robot device according to claim 1 or 2, further comprising a. The robot apparatus according to any one of claims 1 to 3 ,
A processing module for processing the workpiece;
With
The robot apparatus carries an unprocessed workpiece into the processing module while being held on one of the first and second workpiece holding surfaces, and holds the processed workpiece on the first and second workpieces. A processing apparatus, wherein the processing device is carried out from the processing module while being held on either one of the surfaces. The robot apparatus according to any one of claims 1 to 3 ,
A first processing module for performing a first process on the workpiece;
A second processing module for performing a second process on the workpiece;
With
The robot apparatus carries a workpiece into the first processing module in a state where the workpiece is held on one of the first and second workpiece holding surfaces, and either of the third and fourth workpiece holding surfaces. A processing apparatus for transporting a workpiece from the first processing module to the second processing module while holding the workpiece on either side. The processing apparatus according to claim 5, wherein the work carried out from the first processing module is in a wet state.

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