JP4455854B2 - Thin film forming method and thin film forming apparatus - Google Patents

Description

The present invention relates a thin film forming method, a thin film forming equipment.

  Some image forming apparatuses such as a printer, a facsimile machine, a copier, and a complex machine of these include a droplet discharge head that discharges droplets to an image forming unit. As a droplet discharge head, as a driving means for generating energy for pressurizing the liquid in the flow path, a diaphragm that forms the wall surface of the flow path is deformed by using a piezoelectric actuator including a piezoelectric element, and the volume in the flow path Pressure generated by generating bubbles by heating the liquid in the flow path using a so-called piezo-type device that changes the pressure and discharging a droplet, or a thermal actuator that includes a heating resistor (electrothermal transducer) A so-called thermal type that discharges liquid droplets with a liquid, or an electrostatic actuator that deforms the diaphragm that forms the wall surface of the flow path with electrostatic force, deforms the diaphragm and changes the volume in the flow path to change the liquid volume. An electrostatic type that discharges drops is known.

  In such a head, in order to achieve high density and high quality recording, various components such as a nozzle plate, a flow path plate, a vibration plate, a piezoelectric element, a substrate having a heating resistor, etc. are included in the head. It is necessary to assemble and assemble fine parts with an adhesive or the like with high accuracy. In order to realize these high-precision assemblies, various assembling apparatuses have been proposed.

For example, as an apparatus for assembling fine parts, a first station for supplying parts, a second station for applying an adhesive, a third station for joining two parts, and a fourth station for discharging the joined assembly. The stations are sequentially arranged, the second station is provided with a position detecting means and a positioning means for positioning at the adhesive application position, and the third station is provided with a holding means for holding the other fine parts and holding the holding means. A moving mechanism for reciprocally moving the means between the other parts supply side, a position detecting means capable of measuring the position of the two parts, and a position adjusting means for adjusting the position of one of the parts based on the result. Things are known.
Japanese Patent Laid-Open No. 10-277853

By the way, as an adhesive coating apparatus used in such an assembly apparatus for fine parts, a thin film forming apparatus for forming a thin film using a flexographic printing method that has been used for printing simple printed materials such as wrapping paper is applied. It is being done. Since this thin film forming apparatus is suitable for forming a very thin coating film (thin film) having a thickness of about 0.01 to 0.2 μm, a metal oxide serving as an insulating film for a semiconductor element, an alignment film for a liquid crystal display element, etc. It is also applied to the formation of thin films and polymer thin films.
JP 2001-277690 A JP-A-5-111996 JP-A-6-305152

  However, when a film having a film thickness of about 0.2 to 5.0 μm is formed on the surface of a member to be coated such as a glass substrate or a silicon substrate that is not permeable, the coating agent is applied to the peripheral portion of the coating pattern of the transfer member. It has been found that there is an inconvenience that the coating agent swells with a width of about 10 to 500 μm, and the flatness of the coating film is often impaired.

Therefore, in order to perform flexographic printing, there is known an apparatus that prevents the swelling of the coating agent by adjusting the wettability of the peripheral portion of the relief plate member as a transfer member that transfers the coating agent to the coated member. Yes.
Japanese Patent Laid-Open No. 10-217418

  However, in the thing of the patent document 5 mentioned above, in order to prevent the swelling of a coating agent with the property which is very difficult to manage, the water repellency of a letterpress member, it is hard to grasp | ascertain the replacement timing during continuous use. There are challenges. Further, the transfer member (letter plate member) needs to be frequently cleaned of the coating agent, but the life of the water-repellent treatment tends to be shortened by the cleaning, and there is a problem that the durability of the relief plate member is lowered.

  To cope with this problem, if the area of the transfer member is made larger than that of the member to be coated, the thickness of the coating agent stored on the surface of the transfer member becomes relatively thick at portions other than the transfer portion as the transfer is repeatedly performed. As a result, there arises a problem that an edge is formed.

  In addition, when there is a comb-like pattern on the surface of the member to be coated, there are naturally places where the transfer is performed and portions where the transfer is not performed. Therefore, the transfer site is slightly different from the film on the member to be coated. There is also a problem that the thickness is different.

  For these reasons, it is necessary to apply the coated part and the transfer part of the transfer member at the same relative position, and it is necessary to take measures such as maintaining high precision in repeat accuracy. It is necessary to perform adjustment several times and to fix the position of the member to be coated on the stage with high accuracy.

  However, in particular, positioning in the transfer direction is transfer while moving, and generally the transfer member has a roll shape, and the connection with the stage on which the member to be coated is placed is made by a gear. Since it is often affected by backlash or the like, it is difficult to maintain the repeatability according to each transfer site.

  In addition, for example, in the application of the adhesive in the assembly process of the droplet discharge head described above, each work is a small, thin and fragile material (deformable and easy to cleave), so it is difficult to position with strong contact. There is also a problem inherent in the head assembly that a positioning error of several tens of μm is likely to occur.

  In addition, in this case, if the device used for applications such as liquid crystal display manufacturing and wafer resist coating is applied to the adhesive coating for assembling the droplet discharge head, the size of the device is large and the adhesive is often wasted. Since each roll shaft support wall is provided on both sides and each roll cannot be easily removed, each roll is cleaned in a state where it is attached to the apparatus at the time of maintenance, resulting in a problem that throughput is reduced.

The present invention has been made in view of the above problems, an object of efficiently to be able to form a uniform coating film to be applied site of the application member.

In order to solve the above problems, a thin film forming method according to the present invention includes:
A coating agent supplying step of supplying the coating agent to the surface including the concave portion of the holding member having a uniform and fine concave portion on the surface for storing the coating agent;
A removal step of removing excess coating agent adhering to other than the concave portion of the holding member;
A transfer step of contacting the surface of the holding member and transferring the coating agent stored in the recess to the surface of the transfer member;
In the thin film forming method including a printing step of transferring the coating agent of the transfer member to the coated member by contacting the surface of the coated member,
The coated surface of the coated member is smaller than the surface of the transfer member to which the coating agent is applied, and after the printing step , the coating agent is transferred from the holding member to the transfer member at least twice. Thus, the film thickness of the coating agent on the surface of the transfer member at the portion where the coating agent is transferred to the member to be coated and the portion where the coating agent is not transferred is flattened, and then the next printing process is performed .

  Here, when transferring the coating agent from the holding member to the transfer member, it is preferable to sequentially move the transfer portion of the transfer member for each printing process. Further, when performing the transfer step, it is preferable to change the number of transfers based on the monitoring result of the transfer film thickness on the transfer member.

  Further, when the thin film forming method according to the present invention is applied to the assembly of the droplet discharge head, the coated member is a component of the droplet discharge head, the coating agent is an adhesive, the holding member is an anix roll, and the transfer member is a relief plate. The relief printing plate is preferably provided on the relief printing roll.

The thin film forming apparatus according to the present invention is
A holding member having a uniform and fine recess on the surface for storing the supplied coating agent; and
Removing means for removing excess coating agent adhering to other than the concave portion of the holding member;
The coating material stored in the recess in contact with the surface of the holding member is transferred to the surface, including thin film transfer means for transferring the object to be coated member by contacting the transferred coating material on the surface of the coating member In the forming device ,
The coated surface of the coated member is smaller than the surface of the transfer member coated with the coating agent,
After transfer to the applying member, have rows at least twice the transfer of the coating agent to the transfer member from said holding member, the transfer member surface and the portion coating agent to be coated member is not transferred and the transfer portion After the film thickness of the coating agent was flattened, transfer to the next member to be coated was performed .

The thin film forming apparatus according to the present invention is
A holding member having a uniform and fine recess on the surface for storing the supplied coating agent; and
Removing means for removing excess coating agent adhering to other than the concave portion of the holding member;
The coating material stored in the recess in contact with the surface of the holding member is transferred to the surface, including thin film transfer member to be transferred to the coated member by contacting the transferred coating material on the surface of the coating member In the forming device ,
The coated surface of the coated member is smaller than the surface of the transfer member coated with the coating agent,
At least two holding members are arranged around the transfer member,
After the transfer to the member to be coated, the coating material is transferred from a plurality of holding members to the transfer member at the same time. After the film thickness is flattened, transfer to the next member to be coated is performed .

In these thin film forming apparatus, the axial length of the transfer member is longer than the axial length of the applicator member, or circumferential length of the transfer member portion and the longer configuration of the transfer-direction length of the application member it can. Moreover, it is preferable to provide means for changing the position of the transfer site from the transfer member to the member to be coated. Furthermore, it is preferable to provide a means for monitoring the transfer film thickness of the transfer member.

  Further, when the thin film forming apparatus according to the present invention is applied to the assembly of the droplet discharge head, the coated member is a component of the droplet discharge head, the coating agent is an adhesive, the holding member is an anix roll, and the transfer member is A relief printing plate is preferably used, and this relief printing plate is preferably provided on the relief printing roll.

  In this case, it is preferable that the roll diameters and axial lengths of the anilox roll and the relief printing roll are in accordance with the size of the head. Moreover, it is preferable that the anilox roll, the relief plate member, and the stage have a cantilever structure. Furthermore, it is preferable that the roll-shaped member of an anilox roll and a relief printing roll and the journal part are separate bodies, and can be detachably fastened.

According to the thin film forming method according to the present invention and the thin film forming apparatus according to the present invention, the coated surface of the coated member is smaller than the surface of the transfer member to which the coating agent is applied, and after the printing process, the holding member By transferring the coating agent to the transfer member at least twice or by transferring from a plurality of holding members at the same time, transfer between the portion where the coating agent is transferred to the coating member and the portion where the coating agent is not transferred Since the film thickness of the coating agent on the surface of the member is flattened and then the next printing process is performed, a uniform coating film can be obtained.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. First, an example of a droplet discharge head according to the present invention assembled using a thin film forming apparatus according to the present invention will be described with reference to FIGS. 1 is a schematic configuration diagram of a main part head of the apparatus, FIG. 2 is a plan view of a flow path plate of the head, FIG. 3 is a plan view of a nozzle plate of the head, and FIG. It is plane explanatory drawing seen from the nozzle plate side when a chamber unit is joined.

  The droplet discharge head 1 includes a liquid chamber unit 2 and a drive unit 3. The liquid chamber unit 2 includes a nozzle plate 11 in which a plurality of nozzles 40 for discharging droplets are formed, a flow path plate 12 in which a liquid chamber (discharge chamber) 30 with which each nozzle 40 communicates, and a liquid chamber 30. It is comprised with the diaphragm 13 which forms a wall surface. The drive unit 3 alternately joins the other end portions of the plurality of piezoelectric elements (drive portions) 14a and the column portions 14b to the substrate 15 at a predetermined interval, and connects one end portion of the piezoelectric elements 14a to the liquid chamber 30. Correspondingly, it is joined to the outer surface side of the diaphragm 13, and one end portion side of the support column part 14 b is joined to the outer surface side of the diaphragm 13 corresponding to the liquid chamber interval wall 31.

  Here, the nozzle plate 11 and the flow channel plate 12, and the flow channel plate 12 and the vibration plate 13 constituting the liquid chamber unit 2 are applied and formed on the front and back surfaces of the flow channel plate 12 by the thin film forming apparatus according to the present invention, respectively. Are bonded with high precision through a thin film of adhesive 16. Further, each piezoelectric element 14a and the column portion 14b of the drive unit 3 are bonded and bonded to the diaphragm 13 of the liquid chamber unit 2 with high accuracy by a thin film of adhesive 16 similarly formed on the upper surface.

  In this droplet discharge head, a liquid, for example, ink is supplied to the liquid chamber 30 of the liquid chamber unit 2, and the droplet is discharged from the corresponding nozzle 40 by driving the required piezoelectric element 14 a.

  Here, with reference to FIGS. 2 to 4, the position adjustment at the time of joining the nozzle plate 11 and the flow path plate 12 will be briefly described. As shown in FIG. A detection reference mark 22a is formed. On the other hand, as shown in FIG. 3, position detection reference marks 21 made of through holes are also formed at both ends of the nozzle plate 11.

  Therefore, after detecting the mark 22a of the flow path plate 12 and the mark 21 of the nozzle plate 11 and calculating the center of gravity of each by image processing, the center of gravity of the flow path plate 12 is matched with the center of gravity of the nozzle plate 11. Then, the alignment (position correction) between the nozzle plate 11 and the flow path plate 12 is completed by correcting the position error amount XYθ of the flow path plate 12. Thereafter, the nozzle plate 11 and the flow path plate 12 are pressurized, and the adhesive 16 is pressed and joined. After the joining, as shown in FIG. 4, the position detection reference mark 22 a of the flow path plate 12 is aligned with high accuracy in the nozzle plate position detection reference mark 21.

  Since the flow path plate 12 and the vibration plate 13 are aligned in the same manner as the nozzle plate 11 and the flow path plate 12 described above, position detection reference marks 22b are formed at both ends of the flow path plate 12. Position detection reference marks 23 made of through holes are also formed at both ends of the diaphragm 13 and are joined by the same position adjustment method as described above.

Next, a first embodiment of a thin film forming apparatus according to the present invention to which the thin film forming method according to the present invention is applied will be described with reference to FIG. In addition, FIG. 5 is a principal part block diagram shown in the state immediately after performing thin film application | coating with the apparatus.
In this case, the thin film forming apparatus according to the present invention is used to join the components of the droplet discharge head using the flow path plate 13 constituting the droplet discharge head as described above and the coating agent as the adhesive 16. An example applied to an adhesive application device for forming an adhesive thin film will be described.

  This thin film forming apparatus (adhesive coating apparatus) includes an anilox roll 51 which is a holding member having a uniform and fine recess on the surface for storing the adhesive 16 supplied from an adhesive supply means (not shown), and an anilox roll. The doctor blade 52, which is a removing means for removing excess adhesive 16 attached to the portion other than the recess 51, and the adhesive 16 stored in the recess of the anix roll 51 in contact with the surface of the anilox roll 51 are transferred to the surface. A relief plate 55 having a relief plate (a relief plate member) 54 as a transfer member for transferring the adhesive 16 transferred onto the surface to the flow path plate 12 as a member to be coated is provided on the outer peripheral surface. The coating agent (adhesive) 16 on 54 is transferred in contact with the surface of the flow path plate 12 which is a member to be coated fed by the stage 57.

  Here, the anilox roll 51 is rotatable in the direction indicated by the arrow, and the adhesive 51 is dropped onto the surface and supplied. The doctor blade 52 is uniformly pressed against the anilox roll 51 and squeezes the surface of the anilox roll 51 while swinging left and right, so that only the minute cells (recesses) carved on the surface of the anilox roll 51 are squeezed. The excess adhesive 16 is removed so that the adhesive 16 is stored.

  The area of the relief plate 54 as a transfer member is configured to be larger than the area of the flow path plate 12 as a member to be coated. As a result, a coating film (adhesive thin film) having no residual coating can be obtained even if the relative position of the relief plate 54 as the transfer member and the flow path plate 12 as the member to be coated is slightly shifted. The relief roll 55 can rotate in the direction of the arrow.

  Further, the stage 57 on which the rolls 51 and 55 and the flow path plate 12 are fixedly mounted is connected by a gear (not shown), but the shaft and the gear of each roll 51 and 55 are connected and separated by a clutch (not shown). (Described in the third and fifth embodiments to be described later), and the transfer from the anilox roll 51 to the relief plate 54 and the transfer from the relief plate 54 to the flow path plate 12 are independent operation modes. Can be done.

  In the thin film forming apparatus configured as described above, an adhesive supply process is performed in which the adhesive 16 is dropped and supplied onto the surface of the anilox roll 51, and fine cells ( A removal step of removing excess adhesive 16 is performed so that the adhesive 16 is stored only in the recesses.

  Then, while the stage 57 on which the flow path plate 12 is fixedly mounted is stopped, a transfer process is performed in which the anilox roll 51 and the surface of the relief plate 54 are brought into contact with each other and the adhesive 16 on the surface of the anilox roll 51 is transferred to the surface of the relief plate 54. . In this transfer process, the transfer of the adhesive 16 from the anilox roll 51 to the relief plate 54 is performed a plurality of times (two or more times) determined in advance.

  Next, after the transfer of the adhesive 16 to the relief plate 54 is completed a plurality of times, the adhesive plate 16 transferred onto the relief plate 54 is subjected to the same relative flow speed, and the flow path plate 12 which is a member to be applied to the stage 57. A printing process for transferring to the surface is performed to form a thin film of adhesive 16 on the surface of the flow path plate 12.

  After this series of operations is performed, the flow path plate 12 returns to the original position, is replaced with an uncoated one, and continuously forms the adhesive thin film by applying the adhesive 16 by the same operation.

  Here, as shown in FIG. 5, the adhesive 16 of the relief plate 54 is transferred to the flow path plate 12 that is a member to be coated every time it is applied, so that a transfer mark 58 is generated on the film of the adhesive 16 of the relief plate 54. Step will occur. If the application to the flow path plate 12 as the member to be coated is performed after the transfer from the anilox roll 51 as the holding member to the relief plate 54 as the transfer member as it is, a step is formed on the coating surface when the positional deviation occurs. Will occur.

  Therefore, in the thin film forming apparatus according to the present invention, the transfer from the anilox roll 51 as the holding member to the relief plate 54 as the transfer member is performed a plurality of times. As a result, the step due to the transfer mark 58 is formed in the same film thickness as the other parts, and the transfer mark 58 disappears, and the entire surface of the relief plate 54 as a transfer member becomes uniform.

  In other words, the present inventors have repeated experiments to find out that when the coating agent on the transfer member (letter plate 54) reaches a certain film thickness, the transfer from the holding member is not performed and saturation occurs. . FIG. 6 shows the experimental results of the transition of the coating material thickness of the transfer member depending on the number of times of transfer from the holding member to the transfer member.

  As shown in FIG. 6, the transfer mark disappears because the film thickness of the coating material on the transfer member does not change even if the transfer is performed more than the number of times of saturation. Accordingly, by setting the required film thickness of the member to be coated in advance to a film thickness that is transferred with the film thickness of the transfer member, the coating member can be coated with a transfer member having no step.

  As described above, by performing the transfer from the holding member to the transfer member a plurality of times, the transfer mark formed after the transfer to the coated member is flattened by a plurality of transfer operations, so that the transfer mark is formed on the peripheral portion of the transfer site. A uniform coating film can be obtained even if there is a slight misalignment error, regardless of variations in film thickness at the transfer site due to the step formed or the pattern of the member to be coated.

  And, by configuring the thin film forming device as an adhesive coating device that forms an adhesive thin film on the components of the droplet discharge head, the step generated on the relief printing plate is flattened over the entire surface by performing multiple transfers, It is possible to form an adhesive thin film by uniformly applying an adhesive to a work that is difficult to position, such as a flow path plate, a vibration plate, a nozzle plate, etc. It becomes possible to perform application with no application residue on the parts and to perform bonding, and reliability such as bonding reliability is improved.

  In addition, by making the area of the transfer member wider than the area of the member to be coated, for example, by making the axial length of the transfer member longer than the axial length of the member to be coated, the transfer position between the member to be coated and the transfer member can be increased. A uniform coating agent thin film without a step can be formed even if it is slightly deviated.

  In this embodiment, the adhesive coating apparatus is described as a thin film forming apparatus that forms a thin film by applying an adhesive as a coating agent to the components of the droplet discharge head. The present invention is not limited to an agent, and is not limited to an apparatus that applies an application agent for components of a droplet discharge head. Furthermore, the configuration of the droplet discharge head is not limited to a head using a piezoelectric actuator, and can be applied to the application of an adhesive to components of a thermal head or an electrostatic head. Since these points are the same in the following embodiments, the description thereof is omitted in each embodiment.

Next, a second embodiment of the thin film forming apparatus according to the present invention to which the thin film forming method according to the present invention is applied will be described with reference to FIG. In addition, FIG. 7 is a principal part block diagram shown in the state immediately after performing the thin film application | coating of one transcription | transfer site | part with the same apparatus.
In this embodiment, the area of the relief plate 54 as a transfer member includes a transfer portion 61 to 64 having an area obtained by adding a necessary transfer area and a deviation to the flow path plate 12 as a member to be coated in the circumferential direction. It is said.

  The transfer parts 61 to 64 are programmed so that the transfer parts 61 → 62 → 63 → 64 → 61 are sequentially transferred at different positions. FIG. 7 shows a state immediately after the transfer site 61 is transferred, and a transfer mark 58 is formed after the transfer.

  Here, after the transfer portion 61 is transferred, when the transfer operation is continued to the flow path plate 12 which is the next member to be applied at the transfer portion 62, the transfer portion 61 is rotated once and moved to the home position. At this time, the relief roll 55 is brought into contact with the anilox roll 51 and is transferred once. In this way, each time the transfer parts 62 → 63 → 64 are sequentially transferred to the flow path plate 12 as the application member and printing is performed, the relief plate 54 as the transfer member is simultaneously transferred and supplemented from the anilox roll 51, The transfer has been completed three times when the transfer mark 58 is saturated when one round is completed, and the next transfer can be performed as it is.

  As described above, the level difference generated on the transfer member is flattened over the entire surface, and the transfer part is transferred to the application member by sequentially moving the transfer part for each transfer to the application member. Since the previous transfer marks can be flattened in the meantime, a uniform coating can be efficiently applied.

  In this embodiment, the number of times of transfer is set to three for simplicity. However, if the number of times of transfer is equal to or greater than the number of times of saturation from the holding member to the transfer member, the transferred portion after transfer can be sufficiently transferred to the coated member. Since the film thickness is supplemented, the transfer operation from the holding member to the transfer member is not performed separately, and the coating operation can be performed continuously.

  Of course, the transfer member is not necessarily required to have an area having the same magnification as the number of times of saturation. If the area is smaller than the number of times, the holding member has an insufficient amount that does not satisfy the required number of times of transfer (saturation number) of the next transfer site. The transfer operation for transferring from the transfer member to the transfer member may be performed.

Next, a third embodiment of the thin film forming apparatus according to the present invention to which the thin film forming method according to the present invention is applied will be described with reference to FIG. FIG. 8 is an explanatory perspective view of the main part of the apparatus.
In this embodiment, the area of the relief plate 54 that is a transfer member in the circumferential direction in the second embodiment is larger than the area of the flow path plate 12 that is a member to be coated, but is also larger in the axial direction. The transfer portions 71 to 73 arranged along the axial direction and the transfer portions 74 to 76 arranged along the axial direction at the same axial positions as the transfer portions 71 to 73 are shifted in the circumferential direction. .

  In addition, the flow path plate 12 which is a member to be coated is provided with a three-point positioning mechanism in the direction perpendicular to the transfer traveling direction on the stage 57, but the positioning mechanism corresponds to the position of each transfer site in the axial direction. is doing.

  On the other hand, the stage 57 on which the rolls 51 and 55 and the flow path plate 12 are placed is connected by gears 81, 82, 83, and the shafts of the respective rolls 51, 55 and the gears 81, 82 are connected by clutches 84, 85. The transfer from the anilox roll 51 to the relief plate 54 and the transfer from the relief plate 54 to the flow path plate 12 can be performed in independent operation modes. In this case, by changing the transfer portion in the circumferential direction of the relief roll 55, a transfer portion having a film thickness sufficient for transfer can be freely selected.

  In this embodiment, the required film thickness can be obtained uniformly by changing the transfer parts 71 to 76 for each successive printing, usually in the order of transfer parts 71 → 72 → 73 → 74 → 75 → 76 → 71. . Further, even if the specifications of the coating film are various, by changing the halftone dots of the transfer portions 71 to 76 of the transfer member 54, the transfer portions can be appropriately changed and applied in different patterns. .

  As described above, the level difference generated on the transfer member is flattened over the entire surface, and the transfer part is transferred to the application member by sequentially moving the transfer part for each transfer to the application member. Since the previous transfer marks can be flattened in the meantime, a uniform coating can be efficiently applied.

Next, a fourth embodiment of the thin film forming apparatus according to the present invention to which the thin film forming method according to the present invention is applied will be described with reference to FIG. In addition, FIG. 9 is a principal part block diagram shown in the state immediately after performing the thin film application | coating of the transfer site | part with the apparatus.
This apparatus includes a spectral intensity meter 90 that is means for continuously monitoring the transfer portion of the relief plate 54 that is a transfer member. Specifically, since the color density of the coating agent 16 can be seen and adjusted in advance so that it can be converted into a film thickness, the film thickness at the current transfer site can be detected.

  Then, the thickness of the transfer portion is monitored by the spectroscopic intensity meter 90 for each transfer, and the transfer from the anilox roll 51 to the relief plate 54 is repeated a plurality of times until a predetermined numerical value is obtained. At the detected stage, transfer printing from the relief plate 54 to the flow path plate 12 is performed.

  In this way, coating is performed at the required number of transfers while constantly monitoring the film thickness on the transfer member, so that the number of transfers can be adjusted to an appropriate number, the coating time can be shortened, and the transfer rate due to changes in the viscosity of the coating agent Even if there are fluctuations, it is possible to efficiently form a uniform coating film (coating agent thin film).

  Next, a fifth embodiment of the thin film forming apparatus according to the present invention to which the thin film forming method according to the present invention is applied will be described with reference to FIG. In addition, FIG. 10 is a principal part block diagram shown in the state immediately after performing the thin film application | coating of the transfer site | part with the same apparatus.

  In this apparatus, a plurality of, here four, anilox rolls 51A, 51B, 51C, 51D are arranged on a pitch circle 91 around the relief roll 55, and a doctor blade 42 is provided for each. . For example, it is assumed that in this combination, the film thickness on the transfer member (letter plate) 54 has a characteristic of being saturated by the transfer from the holding member four times.

  Therefore, when the application is finished and the stage 57 returns to the home position (right side in the figure), the transfer member (letter plate) 54 is made to make a round from the state shown in the figure in the direction of the arrow. Then, the anilox rolls 51B, 51C, and 51D and the transfer from the respective rolls to the relief plate 54 are repeated in order from the anilox roll 51A that is the holding member on the circumference, and the transfer mark 58 receives a total of four times of transfer. A sufficient film thickness is replenished immediately before being transferred to the member to be coated (channel plate) 12.

  Then, a new coated member is set on the stage 57, the next coating operation is started as it is, and the adhesive 16 is transferred to the coated member 3. Of course, the number of holding members does not have to be the same as the number of times of saturation, and the number of times of transfer can be reduced by that number, so the number is not particularly limited.

  As described above, since the plurality of holding members are arranged around the transfer member, a plurality of times of transfer can be performed by one rotation of the transfer member, and the transfer time can be shortened to form a uniform coating film. Can do.

Next, a sixth embodiment of the thin film forming apparatus according to the present invention will be described with reference to FIG. FIG. 11 is an explanatory plan view of the apparatus.
In order to apply the adhesive to the components of the droplet discharge head, the size of the relief roll 54 and the size of the anilox roll 51 are set to a minimum diameter that is necessary and sufficient. Thereby, the roll surface area can be reduced as much as possible, and the amount of adhesive can be reduced, so that the manufacturing cost of the head can be reduced. More specifically, the roll diameter φ66 of the relief roll 54 and the roll diameter φ40 of the anilox roll 51 are set.

  Needless to say, the diameter may be slightly increased or decreased, but if it changes drastically, cantilevering becomes difficult or the apparatus becomes large. Moreover, the load applied at the time of application | coating and transfer is about 5 kgf, and it has a cantilever structure while maintaining sufficient strength.

  Since it has a cantilever structure, the drive mechanism is also configured as a one-side drive mechanism. The squeegee by the doctor blade 52 and the squeegee by the cam 102 shake the coating agent (adhesive) 16 on the anilox roll 51 at a constant speed by the stirring motor 101. Stir in motion.

  Further, at the time of transfer, the transfer motor 103 is driven to drive the letterpress (transfer member) 54 and the anilox roll (holding member) 51 to perform transfer. At this time, since the clutch 104 is disengaged, the driving force is not transmitted to the stopped application motor 105, and the driving force is not transmitted to the stirring motor 101 by the one-way clutch 106.

  When the adhesive 16 is applied to the flow path plate 12 that is a member to be applied, the clutch 104 is connected and the application motor 105 is driven, whereby the whole is driven at a speed ratio determined by the gears 111 to 114. The At this time, the driving force is not transmitted to the other motors by the one-way clutch 106, and the driving can be controlled independently.

  The stage 57 of the member to be coated 3 is arranged on the drive side with a linear motion guaranteed by the linear motion guide 107, and performs the coating operation.

  The rolls 51 and 55 and the journal are separated from each other, and each roll 51 and 55 is accurately fastened to the shaft by the collet chuck 110. At the time of roll maintenance when a series of coating operations are completed, the roll can be removed and replaced with a cleaned roll, and the used roll can be cleaned while operating the apparatus.

  In this way, this device is cantilevered with an optimum configuration for the head, and since there are no obstacles on the entire surface and maintenance is easy, downtime is shortened and efficient. Head production is possible. Also, by designing the optimal size for the head and separating the journal and the roll, the roll maintenance that occurs in a certain period of time can be removed and cleaned, and only the replacement time is stopped. Thus, continuous operation is possible, and the throughput per hour of the thin film forming apparatus is improved.

It is a schematic block diagram which shows an example of the droplet discharge head assembled by forming and joining an adhesive thin film with the thin film forming apparatus which concerns on this invention. It is plane explanatory drawing of the flow-path board of the head. It is a plane explanatory view of the nozzle plate of the head. It is plane explanatory drawing seen from the nozzle plate side when the liquid chamber unit of the head is joined. It is a principal part block diagram which shows 1st Embodiment of the thin film forming apparatus which concerns on this invention. It is explanatory drawing with which it uses for description of the relationship between the frequency | count of transcription | transfer and a film thickness. It is a principal part block diagram which shows 2nd Embodiment of the thin film forming apparatus which concerns on this invention. It is a perspective block diagram which shows 3rd Embodiment of the thin film forming apparatus which concerns on this invention. It is a principal part block diagram which shows 4th Embodiment of the thin film forming apparatus which concerns on this invention. It is a principal part block diagram which shows 5th Embodiment of the thin film forming apparatus which concerns on this invention. It is plane explanatory drawing which shows 6th Embodiment of the thin film forming apparatus which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Droplet discharge head 2 ... Liquid chamber unit 3 ... Drive unit 11 ... Nozzle plate 12 ... Flow path plate 13 ... Vibration plate 14a ... Piezoelectric element 16 ... Adhesive 51 ... Anilox roll (holding member)
54. Letterpress (transfer member)
55 ... letterpress roll 57 ... stage

Claims (14)

A coating agent supplying step of supplying the coating agent to the surface including the concave portion of the holding member having a uniform and fine concave portion on the surface for storing the coating agent;
A removal step of removing excess coating agent adhering to other than the concave portion of the holding member;
A transfer step of contacting the surface of the holding member and transferring the coating agent stored in the recess to the surface of the transfer member;
In the thin film forming method including a printing step of transferring the coating agent of the transfer member to the coated member by contacting the surface of the coated member,
The coated surface of the coated member is smaller than the surface of the transfer member to which the coating agent is applied, and after the printing step, the coating agent is transferred from the holding member to the transfer member at least twice. By this, the film thickness of the coating agent on the surface of the transfer member between the portion where the coating agent is transferred to the member to be coated and the portion where the coating agent is not transferred is flattened, and then the next printing step is performed.   2. The thin film forming method according to claim 1, wherein when transferring the coating agent from the transfer member to the member to be coated, the transfer portion of the transfer member is sequentially moved for each printing step. Forming method.   The thin film forming method according to claim 1, wherein when performing the transfer step, the number of times of transfer is changed based on a monitoring result of a transfer film thickness on the transfer member. In the thin film forming method according to any one of claims 1 to 3, wherein the components to be coated member constituting the liquid droplet ejection head, the coating agent is adhesive, the holding member is Ani B Kkusuroru, the transfer member is located in letterpress A method for forming a thin film, wherein the relief plate is provided on a relief roll. A holding member having a uniform and fine recess on the surface for storing the supplied coating agent; and
Removing means for removing excess coating agent adhering to other than the concave portion of the holding member;
Forming a thin film including transfer means for transferring the coating agent stored in the concave portion in contact with the surface of the holding member to the surface and transferring the transferred coating agent to the surface of the coating member. In the device
The coated surface of the coated member is smaller than the surface of the transfer member coated with the coating agent,
After the transfer to the member to be coated, the coating agent is transferred from the holding member to the transfer member at least twice, and the surface of the transfer member is divided into a portion where the coating agent is transferred to the member to be coated and a portion where the coating agent is not transferred. A thin film forming apparatus, wherein the film thickness of the coating agent is flattened and then transferred to the next member to be coated. A holding member having a uniform and fine recess on the surface for storing the supplied coating agent; and
Removing means for removing excess coating agent adhering to other than the concave portion of the holding member;
Forming a thin film including a transfer member that contacts the surface of the holding member and transfers the coating agent stored in the recess to the surface, and transfers the transferred coating agent to the surface of the member to be coated. In the device
The coated surface of the coated member is smaller than the surface of the transfer member coated with the coating agent,
At least two holding members are arranged around the transfer member,
After the transfer to the member to be coated, the coating material is transferred from a plurality of holding members to the transfer member at the same time, and the coating agent on the surface of the transfer member is divided into a portion where the coating agent is transferred to the member to be coated and a portion where the coating agent is not transferred. A thin film forming apparatus, wherein the film thickness is flattened and then transferred to the next member to be coated.   7. The thin film forming apparatus according to claim 5, wherein an axial length of the transfer member is longer than an axial length of the coated member.   7. The thin film forming apparatus according to claim 5, wherein a circumferential length of the transfer member portion is longer than a length of the coated member in the transfer direction.   7. The thin film forming apparatus according to claim 5, further comprising means for changing a position of a transfer portion from the transfer member to the coated member. 7. The thin film forming apparatus according to claim 5, further comprising means for monitoring a transfer film thickness of the transfer member portion. In the thin film forming apparatus according to claim 5 or 6, wherein the components to be coated member constituting the liquid droplet ejection head, the coating agent is adhesive, the holding member is Ani B Kkusuroru, the transfer member is relief printing, letterpress is A thin film forming apparatus provided on a relief roll.   12. The thin film forming apparatus according to claim 11, wherein a roll diameter and an axial length of the anilox roll and the relief roll are in accordance with a size of the head.   13. The thin film forming apparatus according to claim 12, wherein the anilox roll, the relief roll, and the stage have a cantilever structure.   13. The thin film forming apparatus according to claim 12, wherein the anilox roll and the relief roll have a roll member and a journal part separately, and can be detachably fastened.

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