JP4437194B2 - Cleaning brush attachment / detachment jig - Google Patents

Description

The present invention jig again and again relates for removable for attaching and detaching the cleaning brush, for example with respect to the cleaning apparatus for cleaning a substrate.

    For example, in a manufacturing process of a liquid crystal display device or a semiconductor device, there is a step that requires cleaning a glass substrate or a semiconductor wafer for a liquid crystal display device as a substrate with high cleanliness.

  As a method for cleaning such a substrate, there are a dip method in which a plurality of substrates are simultaneously immersed in a cleaning solution for cleaning, and a single wafer method in which the substrates are cleaned one by one while transporting the substrates, and recently high cleanliness has been obtained. In addition, a cost effective single wafer method is adopted.

  As one of the single wafer systems, a brush type cleaning apparatus using a cleaning brush is known. This cleaning apparatus has an apparatus main body, and a conveyance mechanism for conveying the substrate in a predetermined direction is provided in the apparatus main body. Further, the upper cleaning brush and the lower cleaning brush are rotated in contact with the upper and lower surfaces of the substrate transported by the transport mechanism in the apparatus main body, in a direction crossing the substrate transport direction. Are arranged along.

  Each of the cleaning brushes has a brush shaft having a support shaft portion supported by the apparatus main body at both ends, and a large number of brush hairs are provided on the outer peripheral surface of the brush shaft over the entire length in the axial direction. Therefore, if each cleaning brush is rotationally driven while supplying the cleaning liquid to the plate surface of the substrate and the substrate is sent between the pair of cleaning brushes, dirt such as fine particles adhering to the upper and lower surfaces of the substrate can be cleaned and removed. it can.

  In such a brush cleaning device, the brush bristles of the pair of cleaning brushes are worn with use, and therefore, the cleaning brush is periodically replaced or inspected. When each cleaning brush is exchanged or inspected, it is performed after removing the attached state of the support shaft attached to the apparatus main body.

  By the way, recently, a glass substrate for a liquid crystal display device tends to be enlarged. Therefore, the cleaning brush for cleaning a large substrate is lengthened. In order to remove the long cleaning brush from the apparatus main body, two workers work with the support shafts at both ends of the cleaning brush. Also, when the cleaning brush is attached to the apparatus main body, the two workers carry out the work with the support shafts at both ends as in the case of removal.

  For example, when an operator performs attachment and detachment of the cleaning brush alone, if the cleaning brush is long, one hand has one support shaft and the other hand has a brush hair portion. End up. For this reason, particularly when a new cleaning brush is attached to the apparatus main body, there is a possibility that the brush hair may become dirty or bend by touching the brush hair with a hand. In addition, the long cleaning brush is difficult to hold because it increases in weight, and it is unstable when holding one support shaft with one hand and holding the brush part with the other hand, so it takes an operator. The burden may become large.

SUMMARY OF THE INVENTION An object of the present invention is to provide a cleaning brush attaching / detaching jig that allows an operator to easily attach and detach a cleaning brush alone without having a bristle portion.

This invention is a jig for attaching and detaching the cleaning brush supported by the cleaning device by the support shafts provided at both ends with respect to the cleaning device,
A pair of jig bodies formed by opening engagement portions that engage with the support shafts at both ends of the cleaning brush on one end surface;
The jig is removably inserted and held in the mounting hole formed in the body by the engaging portion occluded the jig body and the support shaft as the engagement portion is not out from the support shaft portion of the open end of Retaining member to be held in the part ,
A gripping member having both ends connected to a pair of jig main bodies and preventing the engaging parts of these jig main bodies from being pulled out in the axial direction of the support shaft part;
A cleaning brush attaching / detaching jig, wherein the cleaning member is attached to and detached from the cleaning device by gripping the gripping member.

Said jig body, together are formed by bending a substantially U-shaped having a different pair of sides of length a piece of plate material relative to the vertical direction, the lower end in the vertical direction of the pair of sides be formed in the bent sides spaced opposed vertically bent substantially in an L-shape toward the inside, respectively, above the upper portion than the lower portion of the bent sides of the long one of the sides of length It is preferable that an engagement portion is formed, and the attachment holes are formed at positions facing the pair of bent sides.

  According to the present invention, since the pair of jig bodies provided at the support shafts at both ends of the cleaning brush are connected by the gripping member, the worker can hold and remove the cleaning brush by one person with the gripping member. Can be performed.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 shows a substrate cleaning apparatus used in a liquid crystal display device, which has an apparatus body 1. The apparatus main body 1 includes a chamber 2 and a pair of left and right support columns 3 provided on both outer sides in the width direction of the chamber 2. Each column portion 3 is erected on the base 1a . Although not shown in FIG. 1, the pair of support columns 3 are provided at predetermined intervals along the front-rear direction intersecting the width direction of the chamber 2.

Each support column 3 is provided with a pair of attachment portions 4 that are spaced apart at a predetermined interval in the vertical direction. Each pair of attachment portions 4 provided on the pair of support columns 3 is set to the same height. Each mounting portion 4 protrudes into the chamber 2 from an opening 5 formed on both side walls of the chamber 2. A pair of attachment portions 4 provided on one support column 3 is rotationally driven by a drive motor 6, and a pair of attachment portions 4 of the other support column 3 is provided rotatably on the support column 3. It has been. An upper cleaning brush 8 and a lower cleaning brush 9 are detachably attached to a pair of left and right mounting portions 4 at opposite heights.

  That is, as shown in FIG. 2, the mounting portion 3 is formed with a semi-cylindrical mounting portion 11 as shown in FIG. The mounting portion 11 is formed with a semi-cylindrical recess 12. A semi-cylindrical stopper 13 is detachably attached to the mounting portion 11 with a screw 14.

As shown in FIGS. 2 to 4, each of the cleaning brushes 8 and 9 has a brush shaft 16. Both ends of the brush shaft 16 are formed on a support shaft portion 17 having a smaller diameter than the brush shaft 16. A large number of brush hairs 18 are provided on the outer peripheral surface of the brush shaft 16 over almost the entire length in the axial direction. Each cleaning brush 8,9 as shown in Figure 2, engage placed in the recess 12 of the mounting portion 4 spindle portion 17 of its ends, is fixed to the mounting portion 4 by the stop 13. Therefore, when the drive motor 6 operates, the pair of upper and lower cleaning brushes 8 and 9 are driven to rotate. The upper and lower cleaning brushes 8 and 9 are usually driven to rotate in the opposite directions.

  The pair of upper and lower cleaning brushes 8 and 9 are attached at an interval where the brush bristles 18 come into contact with each other. Accordingly, if a substrate (not shown) is sent between the pair of upper and lower cleaning brushes 8 and 9 and a cleaning liquid is supplied to the plate surface of the substrate, the upper and lower surfaces of the substrate can be brush cleaned.

  When the upper and lower cleaning brushes 8 and 9 are removed from or attached to the apparatus main body 1, the attachment / detachment jig of the present invention is used. As shown in FIGS. 3 and 4, the attachment / detachment jig includes a pair of jig main bodies 20 and a holding member 21 that connects the jig main bodies 20 and is held by an operator.

  The jig body 20 is formed by bending a single plate material 22 shown in FIG. That is, the plate member 22 is bent in a U shape along the pair of first bending lines 23. Thus, a first side 24 having a different length and a second side 25 shorter than the first side are formed. Bending sides 24a and 25b are formed by bending the lower ends of the side sides 24 and 25 inwardly of the side sides 24 and 25 and in an L shape by the second folding line 26, respectively. Each bent side 24a, 25a is formed with a mounting hole 27 corresponding to the vertical direction.

An insertion hole 28 is formed at the corresponding position in the upper part of each of the first and second side edges 24 and 25 , and one end of the lower side of the first side edge 24 is the first side edge 24. An engaging portion 29 opened at the end face is formed.

  The pair of left and right jig bodies 20 are symmetrical. That is, the left and right jig bodies 20 are formed in a bilaterally symmetric shape by bending the sides 24 and 25 in the opposite direction with respect to the plate surface of the plate 22.

  The pair of jig bodies 20 are attached to the support shaft portions 17 provided at both ends of the cleaning brushes 8 and 9. That is, as shown in FIG. 6, the pair of jig main bodies 20 engages the support shaft portion 17 with an engaging portion 29 formed on the first side 24. At this time, the first side 24 is directed outward in the axial direction of the cleaning brushes 8 and 8. If one end in the radial direction of the support shaft portion 17 is applied to the end of the engaging portion 29, the other end in the radial direction of the support shaft portion 17 is a side side inward of the mounting holes 27 formed in the pair of bent sides 24a and 25a. 24 and 25 in the width direction. At that time, since the second side 25 is shorter than the first side 24, the engaging portion 29 can be engaged with the support shaft portion 17 without hitting the bristles 18.

  Next, the retaining member 31 is inserted into the pair of attachment holes 27. The retaining member 31 is formed by bending the end of the wire into an L shape. As a result, the open end of the engaging portion 29 is closed by the retaining member 31, so that the pair of jig bodies 20 does not come off in the radial direction with respect to the support shaft portion 17.

  In addition, as shown in FIG. 3, the retaining member 31 has a retaining ring 32 detachably attached to a lower end portion thereof. As a result, the retaining member 31 is held in such a manner that it cannot be lowered with its lower end part entering a predetermined dimension in the mounting hole 27 of the first side 24, and is bent into an L shape as shown in FIG. 6. The upper part is in a state of floating from the bent side 25a, and the removal preventing member 31 can be easily removed.

  If the pair of jig bodies 20 are held on the support shaft portion 17 by the retaining members 31, these jig bodies 20 are connected by the gripping members 21. As shown in FIGS. 3 and 4, the gripping member 21 has an axial shape that is substantially the same length as the cleaning brushes 8 and 9, and annular grooves 21a (shown in FIG. 3) along the circumferential direction at both ends thereof. ) Is formed.

  Both ends of the grip member 21 are inserted into the insertion holes 28 of the pair of jig bodies 20. A retaining ring 33 made of, for example, rubber or the like having an outer dimension larger than that of the insertion hole 28 is formed in the annular groove 21a at the end protruding from the first side 24 of each jig body 20. Installing. Accordingly, the gripping member 21 is attached to the pair of jig main bodies 20 so as not to slide in the axial direction. That is, each jig body 20 attached to the support shaft portion 17 of the cleaning brushes 8 and 9 is held so as not to be pulled out along the axial direction of the support shaft portion 17.

Therefore, out of the pair of upper and lower cleaning brushes 8 and 9 provided in the apparatus main body 1, first, if the stopper 13 that attaches and fixes the pair of support shaft portions 17 of the upper cleaning brush 8 to the attachment portion 4 is removed, The jig main body 20 is held by each supporting shaft portion 17 by a retaining member 31. Next, the pair of jig bodies 20 are connected by the gripping member 21.

Then, if the operator holds the center portion in the longitudinal direction of the gripping member 21 with both hands or one hand and lifts the upper cleaning brush 8 together with the gripping member 21, the upper cleaning brush 8 is attached to the pair of attachment portions 4 of the apparatus main body 1. Can be removed and transported to place. Similarly, the lower cleaning brush 9 can be detached from the apparatus main body 1.

  When the cleaning brushes 8 and 9 are detached from the apparatus main body 1 and inspected, or when a new cleaning brush is installed in the apparatus main body 1, the jig main body 20 is attached to the pair of support shafts 17 of the cleaning brush. The jig main body 20 is connected by the gripping member 21 so that one operator can easily incorporate the cleaning brush into the apparatus main body 1.

  As described above, when the attaching / detaching jig of the present invention is used, the operator can carry the cleaning brushes 8 and 9 by holding the gripping member 21, so that there is no possibility that the brush bristles 18 are touched and soiled. In addition, since the central portion of the gripping member 21 corresponding to the central portion in the longitudinal direction of the cleaning brushes 8 and 9 can be carried in a balanced manner, the cleaning brushes 8 and 9 are relatively heavy. However, work such as replacement and inspection can be easily performed by one worker.

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal cross-sectional view which shows schematic structure of the washing | cleaning apparatus of one Embodiment of this invention. The perspective view which shows the attachment structure of the spindle part of a washing brush. The perspective view which shows the jig | tool for attachment / detachment and the cleaning brush. The front view which shows the jig | tool for attachment / detachment and the cleaning brush. The developed view of the board | plate material which forms a jig | tool main body. The perspective view of the jig | tool main body attached to the spindle part of the washing brush.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 8 ... Upper washing brush, 9 ... Lower washing brush, 17 ... Support shaft part, 18 ... Brush hair, 20 ... Jig body, 21 ... Gripping member, 27 ... Mounting hole, 28 ... Insertion hole, 29 ... Engagement part, 31: A retaining member.

Claims (2)

The cleaning brush supported by the cleaning device by the support shafts provided at both ends is a jig for attaching to and detaching from the cleaning device,
A pair of jig bodies formed by opening engagement portions that engage with the support shafts at both ends of the cleaning brush on one end surface;
The jig is removably inserted and held in the mounting hole formed in the body by the engaging portion occluded the jig body and the support shaft as the engagement portion is not out from the support shaft portion of the open end of Retaining member to be held in the part ,
A gripping member having both ends connected to a pair of jig main bodies and preventing the engaging parts of these jig main bodies from being pulled out in the axial direction of the support shaft part;
A cleaning brush attaching / detaching jig, wherein the cleaning brush is attached to and detached from the cleaning device by holding the gripping member. Said jig body, together are formed by bending a substantially U-shaped having a different pair of sides of length a piece of plate material relative to the vertical direction, the lower end in the vertical direction of the pair of sides be formed in the bent sides spaced opposed vertically bent substantially in an L-shape toward the inside, respectively, above the upper portion than the lower portion of the bent sides of the long one of the sides of length 2. The jig for attaching and detaching a cleaning brush according to claim 1, wherein an engaging portion is formed, and the attachment hole is formed at a position facing the pair of bent sides.

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