JP4383840B2 - 3D shape measuring device - Google Patents

Description

  The present invention relates to a three-dimensional shape measuring apparatus that measures a three-dimensional shape of a measurement target object in a non-contact manner, and in particular, irradiates a target with a predetermined pattern light image and captures a pattern light image projected on the surface thereof. The present invention relates to a shape measuring apparatus that measures a three-dimensional shape of a surface of an object by performing image processing.

As an apparatus for measuring the surface shape of an object in a non-contact manner, an apparatus for measuring a shape by projecting an illumination pattern onto an object, capturing a projected image with a camera, and performing image processing is known. (For example, see Patent Documents 1 and 2.)
In the techniques of Patent Documents 1 and 2, in order to provide a three-dimensional shape measuring apparatus having a small minimum resolution and a large measurable maximum value, at least an illumination pattern projection optical system and an imaging optical system that images the projection pattern are provided. A plurality of measurement systems with different baseline lengths can be constructed by providing a plurality of ones and the distances between the projection optical system and the imaging optical system are different from each other, so that different image patterns can be obtained. It is described that it can be planned.
JP 2002-122416 A JP 2002-122417 A

  However, in the above technique, since a plurality of projection optical systems or imaging optical systems are arranged, the system becomes complicated and large. Further, since the amount of image processing increases dramatically, computer resources are required. In addition, it is specialized for the purpose of monitoring patient changes in hospital rooms, toilets, etc., and cannot be said to be suitable for general-purpose three-dimensional shape measurement.

  Therefore, an object of the present invention is to provide a three-dimensional shape measuring apparatus that is suitable for general-purpose three-dimensional shape measurement and can realize high resolution.

In order to solve the above problems, a three-dimensional shape measuring apparatus according to the present invention is a three-dimensional shape measuring apparatus that measures a three-dimensional shape of a measurement object in a non-contact manner, and (1) on a plane orthogonal to the optical axis. An irradiation light source unit that irradiates a measurement object with a pattern light image in which a large number of bright spots and / or bright lines are arranged at predetermined intervals, and projects it onto the surface; An imaging unit that captures a projection pattern light image projected onto the surface of the measurement object by the pattern light image; and (3) an image position calculation unit that obtains the position of the projection pattern light image in the image from the output image of the imaging unit; (4) a shape calculation unit for determining the shape of the target object based on the obtained positional information of the projection pattern light image and the positional relationship information between the imaging unit and the irradiation light source unit at the time of imaging; and (5) the shape calculation unit then irradiated by the irradiation light source unit according to the calculated results That bright spot in the pattern light in the optical image, characterized in that it comprises an illumination light control unit for adjusting the distance or thickness of the emission line, a.

The pattern light image projected on the surface of the measurement object is picked up by the irradiation light source unit, and the image position calculation unit calculates the position of the projection pattern light image in the image by image processing. The shape calculation unit obtains the shape of the target object by triangulation using this image position. At this time, according to the calculation result of the shape calculation unit, i.e., the shape of the measurement object, the irradiation light control unit calculates the bright spot, the interval or the thickness of the bright line in the light image of the pattern light irradiated by the irradiation light source adjust. By differentiating the patterns of the projected pattern light image, a plurality of different projection pattern light images are projected at different irradiation positions on the surface of the measurement object or from different directions, and the projection images are acquired. Projection position information, that is, shape information of the measurement object is obtained for each projection pattern light image.

  The pattern light irradiated by the irradiation light source unit is a bright spot pattern in which a plurality of bright spots are arranged, and the image position calculation unit (1) is based on the brightness data of the bright spot pattern in the projection pattern light image. A bright spot position calculation unit that calculates the center position of the bright spot, and (2) bright spot barycentric information calculation that calculates the barycentric information regarding the barycentric position of each bright spot based on the brightness data of the bright spot pattern in the projection pattern light image. And a portion.

  When the irradiation pattern light is a bright spot pattern in which a plurality of bright spots are arranged, the projected pattern light image projected on the object surface is also a bright spot pattern composed of a plurality of bright spots. Although each luminescent spot has a finite size, the luminescent spot position calculation unit calculates the center position of the luminescent spot based on the luminance data by assuming that the position having the maximum luminance = the center of the luminescent spot. The bright spot centroid information calculation unit obtains centroid information of an area centered on the bright spot.

  The calculation may be performed based on data in which the luminance exceeds a predetermined reference value in the luminance data of the bright spot pattern in the projection pattern light image. Filtering is performed by removing data whose luminance falls below a predetermined reference value.

  The center-of-gravity information output from the bright spot center-of-gravity information calculation unit may be moment information about a region centered on each bright spot. For example, moment information composed of the 0th and 1st moments of luminance at the center position of each bright spot is obtained.

  The irradiation light control unit includes (1) a translational movement mechanism that translates the irradiation position of the pattern light irradiated by the irradiation light source unit, (2) a rotational movement mechanism that rotates and moves the irradiation position, and (3) each brightness in the pattern light. Any one of the light control devices capable of independently adjusting the irradiation position of the point may be provided.

  According to the present invention, it is possible to acquire different projection pattern light images projected on the surface of the measurement object. Since the difference between the projection pattern light images can be feedback-controlled, appropriate shape recognition can be performed with a small number of projection pattern light images. For this reason, the system configuration is simplified and the processing can be simplified, so that the apparatus is not increased in size and complexity. Furthermore, since the pattern light to be irradiated can be optimized, it is possible to measure a target having a complicated shape or a target having a different size with high accuracy, and the versatility is improved.

  The pattern light can be a combination of slit light, spot light, and the like, but if it is a combination of bright spots that are extremely small spot lights, it is easy to calculate the projected position of the bright spots and thus the surface shape of the object.

  If the projection position (center of gravity position) of this bright spot is calculated using moment information, the calculation procedure can be simplified and the moment information calculator can be integrated into the imaging device in hardware. It is effective because it is possible to integrate from imaging to image processing at high speed, and it is not necessary to separately provide a high-speed processor for image processing.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings. In order to facilitate the understanding of the description, the same reference numerals are given to the same components in the drawings as much as possible, and duplicate descriptions are omitted.

  FIG. 1 is a block configuration diagram showing the overall configuration of a three-dimensional shape measuring apparatus according to the present invention. This three-dimensional shape measuring apparatus 9 measures the three-dimensional position data of the surface shape of the object 6 in a non-contact manner, and irradiates the object 6 placed on the support base 7 with a predetermined pattern light image. An irradiation light source unit 5 to project, an imaging unit 1 that captures a pattern light image projected on the surface of the object 6, and an image position calculation unit that obtains the position of the projection pattern light image in the output image of the imaging unit 1 2, the shape calculation unit 3 for obtaining the surface shape of the object 6 based on the positional relationship between the obtained image position and the irradiation light source unit 5 and the imaging unit 1, and the irradiation light source unit 5 based on the calculated shape data. An irradiation light control unit 4 for controlling the irradiation position and the like is provided.

  FIG. 2 is a configuration diagram showing an embodiment of the irradiation light source unit 5. In this embodiment, a light source 50, a collimating lens 51 disposed on the optical axis thereof, and a microlens array 52 composed of a number of fine convex lenses (microlenses) are provided. The light source 50 is a point light source using a laser diode or the like, the collimating lens 51 is a convex lens that adjusts the emitted light of the light source 50 to parallel light, and each microlens of the microlens array 52 receives incident parallel light. By condensing, a pattern light image composed of a large number of spot lights arranged two-dimensionally at a predetermined interval on a plane orthogonal to the optical axis is generated and projected.

  FIG. 3 is a block configuration diagram of the imaging unit 1. The imaging unit 1 is a high-speed visual sensor device capable of acquiring an image at a frame rate higher than that of a general-purpose video camera. The imaging unit 1 receives light from a large number of N1 × N2 two-dimensionally arranged light receiving elements 110. The element array 11, the parallel amplifier 12 composed of N2 charge amplifiers 120 for converting the electric charges output from the light receiving elements 110 corresponding to each column of the light receiving element array 11 into voltage signals, and the output from the charge amplifier 120 The A / D converter array 13 is composed of N2 A / D converters 130 for A / D converting the signals.

  FIG. 4 shows a detailed configuration of the imaging unit 1. The imaging unit 1 includes a light receiving unit (corresponding to the light receiving element array 11) for detecting light, a signal processing unit 16 corresponding to the parallel amplifier 12 and the A / D converter array 13, and an operation timing instruction signal thereto. A timing control unit 14 for notification is provided.

  First, the configuration of the light receiving element array 11 that corresponds to the light receiving portion will be described. Each light receiving element 110 is connected to a photoelectric conversion element 111 that generates an electric charge according to the input light intensity, and a signal output terminal of the photoelectric conversion element 111, and photoelectrical according to a vertical scanning signal V (i = 1 to N1). The switch elements 112 that output the charges accumulated in the conversion element 111 are configured as one set. N1 light receiving elements 110 are arranged along the vertical direction, and the switch element 112 of each light receiving element 110 is electrically connected to form a vertical light receiving unit 115. The light receiving element array 11 is configured by arranging N2 vertical light receiving portions 115 along a horizontal direction orthogonal to the vertical direction.

The signal processing unit 16 individually extracts the charges transferred from the corresponding vertical light receiving units 115 _j (j = 1 to N2), performs amplification processing, and outputs a digital signal corresponding to the charge intensity. N2 pieces are arranged. Each processing circuit 160 has a circuit configuration in which the charge amplifier 120 is built in the A / D converter 130. Specifically, the processing circuit 160 _j includes three circuits including an integration circuit 161 _j including a charge amplifier 120 _j , a comparison circuit 162 _j, and a capacity control mechanism 163 _j .

Among these, the integration circuit 161 _j receives the output signal from the vertical light receiving unit 115 _j as an input, a charge amplifier 120 _j that amplifies the charge of the input signal, and one end connected to the input terminal of the charge amplifier 120 _j. , a variable capacitance portion 164 _j which other end is connected to the output terminal, one end is connected to the input terminal of the charge amplifier 120 _j, and the other end connected to the output terminal, in response to a reset signal R The switch element 165 _{j is} turned on and off and switches between integration and non-integration operations of the integration circuit 161 _j .

FIG. 5 is a detailed configuration diagram of the integration circuit 161. This figure is an example of an integration circuit having an A / D conversion function having a resolution of 4 bits, that is, 16 gradations, and this circuit configuration will be described below. The variable capacitance unit 164 includes capacitive elements C1 to C4 having one terminal connected to an input terminal of an output signal from the vertical light receiving unit of the charge amplifier 120, the other terminals of the capacitive elements C1 to C4, and the output of the charge amplifier 120. is connected between the terminals, the switching elements SW11 to SW14 which opens and closes in accordance with the capacity command signal C ₁₁ -C _14, is one terminal connected between the capacitance element C1~C4 and switching elements SW11 to SW14, the other terminal connected to the GND level, and a switch element SW21~SW24 to open and close in accordance with the capacity command signal C ₂₁ -C _24. The electric capacitances C _{1 to} C ₄ of the capacitive elements C _{1 to} C ₄ are
C ₁ = 2C ₂ = 4C ₃ = 8C ₄
C ₀ = C ₁ + C ₂ + C ₃ + C ₄
Satisfy the relationship. Here, C ₀ is the maximum electric capacity required in the integration circuit 161, and when the saturation charge amount of the light receiving element 110 is Q ₀ and the reference voltage is V _REF ,
C ₀ = Q ₀ / V _REF
Satisfy the relationship.

Returning to FIG. 4 again, circuits other than the integration circuit 161 _j of the processing circuit 160 _j will be described. The comparison circuit 162 _j compares the value of the integration signal V _S output from the integration circuit 161 _j with the reference value V _REF and outputs a comparison result signal V _C. Capacity control mechanism 163 _j the comparison result with the value of the signal V _C and outputs a capacitance instruction signal C to notify the variable capacitance portion 164 _j of the integrating circuit 161 _j, outputs a digital signal D1 corresponding to the capacitance instruction signal C To do.

Next, the configuration of the timing control unit 14 shown in FIG. 4 will be described. The basic timing unit 141 for generating a basic timing for clock control of the entire circuit, in accordance with vertical scan instruction notified from the basic timing unit 141, a vertical shift register 142 for generating a vertical scanning signal V _i, the reset instruction signal R The generated control signal unit 143 is configured.

The image acquisition operation by the imaging unit 1 will be specifically described. First, the reset signal R is set to be significant, and all of SW11 to SW14 of the variable capacitor unit 164 shown in FIG. 5 are set to “ON” and all of SW21 to SW24 are set to “OFF”. Thereby, the capacitance value between the input terminals and the output terminals of all the charge amplifiers 120 is set to C ₀ . At the same time, all the switch elements 112 shown in FIG. 4 are set to the “OFF” state, and the vertical scanning signal Vi is set to a state in which no light receiving element 110 is selected. From this state, the reset instruction signal R is set to be insignificant, and the integration operation in each integration circuit 161 is started.

When the integration operation is started, a vertical scanning signal V ₁ for turning on only the switch element 112 of the _first light receiving elements 110 _{1 and j} in each of the N2 vertical light receiving portions 115 _j shown in FIG. 4 is output. Is done. When the switch element is turned “ON”, the charge Q ₁ accumulated in the photoelectric conversion element 111 by the light reception so far is output from the light receiving element array 11 as a current signal. That is, the signal of each photoelectric conversion element 111 can be read. The charge Q ₁ flows into the variable capacitance unit 164 set to the capacitance value C ₀ .

The capacity control mechanism 163 closes SW22-24 after opening SW12-SW14 shown in FIG. As a result, the integration signal V _S is
V _S = Q / C ₁
Is output as a voltage value indicated by. The output integration signal V _S is compared with the reference voltage value V _REF by the comparison circuit 162. Here, the difference between V _S and V _REF is in the range of sub-resolution, i.e. ± (C _4/2) when the following are deemed to have matched, a further capacity control is not performed, and ends the integration operation. If they do not match within the resolution range, the capacity is further controlled and the integration operation is continued.

For example, if V _S > V _REF , the capacity control mechanism 163 further closes SW 12 after opening SW 22. As a result, the integration signal V _S is
V _S = Q / (C ₁ + C ₂ )
It becomes a voltage value shown by. This integration signal V _S is sent to the subsequent comparison circuit 162 and compared with the reference voltage value V _REF .

If V _S <V _REF , the capacity control mechanism 163 closes SW12 and SW21 after opening SW11 and SW22. As a result, the integration signal V _S is
V _S = Q / C ₂
It becomes a voltage value shown by. This integration signal V _S is sent to the subsequent comparison circuit 162 and compared with the reference voltage value V _REF .

Thereafter, in the same manner, by the feedback loop connecting the integration circuit 161 → the comparison circuit 162 → the capacity control mechanism 163 → the integration circuit 161, the comparison and the capacity are compared until the integration signal V _S matches the reference voltage value V _REF within the resolution range. The setting (ON / OFF control of SW11 to SW14 and SW21 to SW24) is sequentially repeated. The value of the capacitance instruction signal C ₁₁ -C ₁₄ indicating the ON / OFF state of SW11~SW14 of time the integration operation is finished, a digital signal corresponding to the value of the charge Q _1, the value of the most significant bit (MSB) Is C ₁₁ and the value of the least significant bit (LSB) is C ₁₄ . In this way, A / D conversion is performed, and these values are output to the image position calculation unit 2 as digital signals D1. As described above, in this apparatus, each bit value of the digital signal D1 is sequentially determined bit by bit from the MSB side to the LSB side.

When the transmission of the digital signal corresponding to the photoelectric output of the _first light receiving element 110 _{1, j} is completed, the reset signal R is made significant and is made ineffective again, and the capacitance value of the variable capacitor unit 164 _j is changed. after initializing, only the switch element 112 of the second light receiving element 110 2, _j of each vertical light receiving section 115 _j outputs a vertical scanning signal V ₂ to "oN", the the same operation as described above, the The photoelectric output of the _second light receiving element 1102 _{, j} is read and a digital signal corresponding to this is sent out. Thereafter, the vertical scanning signals are switched, the photoelectric outputs of all the light receiving elements 110 are read, and corresponding digital signals are output to the image position calculation unit 2.

  Thereby, since the data of N1 × N2 pixels constituting the image is sent to the image position calculation unit 2 for each column, the data can be transferred at a higher speed than when data is transferred for each pixel. And an image can be acquired at a high frame rate.

  Next, the configuration of the image position calculation unit 2 will be described. FIG. 6 is a block configuration diagram of the image position calculation unit 2. The image position calculation unit 2 extracts a bright spot based on the smoothing processing unit 21 that performs a smoothing process for removing noise from the input image data and the data after the smoothing process, and obtains the pixel position thereof. A bright spot extracting section (corresponding to a bright spot position calculating section) 22, a bright spot area processing section 23 for finding the area of the bright spot, and a bright spot centroid information processing section 24 for finding the centroid information of the bright spot. .

  FIG. 7 is a diagram illustrating an example of a circuit configuration of the smoothing processing unit 21. The smoothing processing unit 21 removes noise by performing smoothing processing on the digital output signal representing the luminance of the pixel sent from the light receiving unit 1. The configuration includes a data buffer 211 for holding three pixels of luminance data d (x, y) sequentially transferred, and a SUM operation for summing up the data accumulated in the data buffer 211. And a divider 213 for normalizing by dividing the summed value by 3. When a luminance data string is input, luminance data for three pixels is stored in the data buffer 211, the sum is calculated by the SUM calculator 212, and the value is divided by 3, that is, an average of three pixels. Luminance data is output as luminance data. That is, the following calculation is performed.

ここで、ｄ(x,y)は画素位置(x,y)（x,yは、受光素子１１０の行列方向の配列i、jに対応する。）における輝度を表し、ｄ'(x,y)は平滑化処理後の同画素位置における輝度を表す。このような平滑化処理を複数回行うことにより、ノイズレベルに適応した平滑化の度合いを変更できる。

Here, d (x, y) represents the luminance at the pixel position (x, y) (x and y correspond to the arrays i and j in the matrix direction of the light receiving elements 110), and d ′ (x, y). ) Represents the luminance at the same pixel position after the smoothing process. By performing such a smoothing process a plurality of times, the degree of smoothing adapted to the noise level can be changed.

  Here, smoothing is performed on data for three pixels (two neighboring pixels on the left and right), but there is a method using four neighborhoods on the top, bottom, left, and right. The processing algorithm in this case is as follows.

この場合は、近傍４画素と中心画素の輝度の単純平均ではなく、加重平均であり、近傍４画素の平均輝度と中心画素の輝度との平均値をとることに等しい。

In this case, it is not a simple average of the luminance of the four neighboring pixels and the central pixel but a weighted average, which is equivalent to taking an average value of the average luminance of the four neighboring pixels and the luminance of the central pixel.

  FIG. 8 is a diagram illustrating an example of a circuit configuration of the bright spot extraction unit 22. The bright spot extracting unit 22 stores the luminance data d (x, y) of the sequentially transferred pixels for three rows (N1 × 3 pixels) and stored in the data buffer 221. Eight comparators 222 for comparing luminance data between the center pixel and each of the surrounding eight pixels with respect to the luminance data of the 3 × 3 pixel region read from the data, and an AND operation for calculating a logical product (AND) of the comparison results And a determination output unit 224 that outputs bright spot data based on the calculation result of the AND unit 223.

  The data string of the luminance data processed by the smoothing processing unit 21 is sent to the data buffer 221 and the luminance data for three rows is accumulated (hereinafter, the luminance data processed by the smoothing processing unit 21 is d ( x, y)). The eight comparators 222 use the luminance d (x, y) of the central pixel (pixel position (x, y)) as the luminance d (x−1, y−1) to d (x + 1) of each of the surrounding eight pixels. , y + 1), the comparison result is true only when the center pixel is larger than the surrounding pixels and the luminance exceeds a predetermined threshold value, and false otherwise. Is output. The AND operator 223 calculates a logical product of the comparison results. As a result, the output signal is true only when the luminance of the central pixel is higher than any of the surrounding eight pixels (that is, when the central pixel has the maximum luminance value), and false otherwise. When the output of the AND calculator 223 is true, the determination output unit 224 outputs the pixel position (x, y) of the center pixel and the luminance value d (x, y) as bright spot data. The calculation of the center of the bright spot may be performed only for pixels whose luminance value d (x, y) exceeds a predetermined value (or more than a predetermined value) as the target of the central pixel.

  FIG. 9 is a diagram illustrating an example of a circuit configuration of the bright spot area processing unit 23. The bright spot area processing unit 23 stores the luminance data d (x, y) of the sequentially transferred pixels for three rows (N1 × 3 pixels) and the data buffer 231. 9 comparators 232 for comparing each of the luminance data of the 3 × 3 pixel area read from the obtained data with a threshold value, and a SUM calculator 233 for calculating the sum of the comparison results.

  The data string of luminance data processed by the smoothing processing unit 21 is sent to the data buffer 231 and the luminance data for three rows is accumulated. The nine comparators 232 use the luminances d (x−1, y−1) to d (x + 1, y + 1) of the nine pixels with the pixel position (x, y) as the central pixel as threshold values. Compared with th, 1 is output when the luminance exceeds a predetermined threshold value, and 0 is output otherwise. Then, the SUM calculator 233 obtains the number of pixels having a luminance higher than the threshold th by taking the sum of the outputs of the comparator 232. This is output as the bright spot area s (x, y).

  This bright spot area determination process does not perform all the pixels as the central pixel, but reduces the number of bright spots to be processed by performing only the pixel determined as the bright spot by the bright spot extraction unit 22 as the central pixel. can do. In this case, the area of the bright spot having an area of any size (within N × M) can be calculated by further expanding the target region to the N × M region.

  FIG. 10 is a diagram illustrating an example of a circuit configuration of the bright spot centroid information processing unit 24. The bright spot centroid information processing unit 24 stores the luminance data d (x, y) of the sequentially transferred pixels in the data buffer 241 for holding three rows (N1 × 3 pixels) and the data buffer 241. Using the luminance data of the 3 × 3 pixel region read from the obtained data, the moment calculators 242 to 244 for obtaining the zeroth moment around the central pixel and the first moments in the X direction and the Y direction, respectively.

The data string of luminance data processed by the smoothing processing unit 21 is sent to the data buffer 231 and the luminance data for three rows is accumulated. From the accumulated data, luminance data d (x−1, y−1) to d (x + 1, y + 1) of nine pixels with a certain pixel position (x, y) as a central pixel are calculated as moments. 0-order moment M ₀ (x, y), X-direction primary moment M _1x (x, y), and Y-direction primary moment M _1y (x, y)) Are obtained based on the following equations.

このモーメント算出は、輝点面積判定処理で算出した輝点面積が所定のしきい値を超える輝点についてのみ行うことが好ましい。さらに、輝点面積に応じた領域を対象としてモーメント演算を行うとよい。所定よりも輝点面積が大きい輝点を対象にモーメント算出を行うことで、対象物６表面上に形成されているスポット光像を正確に検出することができ、ノイズの影響を減らすことができる。

This moment calculation is preferably performed only for the bright spot whose bright spot area calculated by the bright spot area determination process exceeds a predetermined threshold value. Furthermore, it is preferable to perform moment calculation for a region corresponding to the bright spot area. By calculating the moment for a bright spot having a bright spot area larger than a predetermined area, a spot light image formed on the surface of the object 6 can be accurately detected, and the influence of noise can be reduced. .

  In recent years, FPGAs (Field Programmable Gate Arrays) and the like have been put into practical use as devices that can easily develop and implement hardware for performing such image arithmetic processing, and efficiently perform the work of hardware processing according to the operation target. It is possible. Furthermore, by using HDL (Hardware Description Language), it is possible to design a circuit with a description of the processing contents of software, so that hardware for performing desired image processing can be easily performed. Can be created. By performing image processing using the hardware thus created, it is possible to perform image calculation at a higher speed than when image processing is performed by software using a general-purpose circuit.

  By outputting the bright spot centroid information only for the extracted bright spots, the amount of data to be output can be compressed and reduced compared to the case of directly outputting image information. For example, if the light receiving element array 11 has 128 × 128 pixels and each pixel has 8 gradations, when image data is output as it is, one screen becomes 16 kbytes of data. Since the above-mentioned barycentric information is about 8 bytes per bright spot, even when 100 bright spots exist in the screen, the communication data amount is 800 bytes, and the data amount can be reduced to about 1/20. This compression rate is significantly improved as the resolution of the sensor is improved with respect to the number of bright spots.

  Next, the configuration of the shape calculation unit 3 will be described. FIG. 11 is a block diagram illustrating the configuration of the shape calculation unit 3. The shape calculation unit 3 calculates the position of the center of gravity from the input center-of-gravity information, and calculates the position of the center of gravity, the optical axis (main axis) of the imaging unit 1, and the light of the spot light irradiated on the surface of the object 6 A height information calculation unit 31 is provided for calculating height information from a deviation angle θ which is an angle formed with the axis.

  The center-of-gravity position calculation unit 30 obtains the center-of-gravity position (Px, Py) of the bright spot based on the bright spot center-of-gravity information sent from the image position calculation unit 2 by the following equation.

このようにすれば、輝点の位置を受光素子１１０の配列より細かく、すなわちサブピクセルで求めることができる。高さ情報算出部３１は、得られた重心情報と偏角θとから三角測量法により物体表面位置を計算する。なお、重心位置演算部３０は、画像位置演算部２内に設けてもよい。

In this way, the position of the bright spot can be determined more finely than the arrangement of the light receiving elements 110, that is, by subpixels. The height information calculation unit 31 calculates the object surface position by the triangulation method from the obtained center of gravity information and the deviation angle θ. The gravity center position calculation unit 30 may be provided in the image position calculation unit 2.

  FIG. 12 is a diagram illustrating an example of a positional relationship among the imaging unit 1, the irradiation light source unit 5, and the target object 6 and a projection pattern light image acquired by the imaging unit 1. Here, it is assumed that the main axis of the imaging unit 1 is located in the same X plane together with the optical axis of each spot light.

As shown in FIG. 12, when a part of the surface of the object 6 is higher than the reference position P _x0 by the height Δh, the spot light image projected on the surface of the object 6 imaged by the imaging unit 1. In this case, the spot light image of the heightened portion moves to the right in the figure by Δx as compared with the case where the surface exists at the reference position. The relationship between the deviation amount Δx and Δh can be expressed by Δh = Δx / tan θ. Thereby, the surface position of the target object 6 at a position corresponding to the spot light position can be obtained.

  For example, if θ is 10 degrees, the image magnification is 1 ×, the field of view is 5 × 5 mm, the pixel size is 40 μm × 40 μm, and the calculation accuracy of the center of gravity is 1/100, the height accuracy is 0.4 / tan 10 ° = It becomes 2.3 μm, and sufficient height accuracy can be realized. When spot lights are arranged at a pitch of 250 μm, spots do not overlap as long as the difference in height from adjacent spots is within 2 mm.

  The irradiation light control unit 4 is based on the information sent from the shape calculation unit 3 and the spot light overlaps because the displacement of the bright spot (positional deviation from the reference position) is large and the height displacement is large. In this case, the irradiation light source unit 5 is instructed to greatly change the spot light interval. On the other hand, when the displacement of the bright spot is too small and the height displacement is small, an instruction is given to reduce the point interval in order to improve accuracy.

  Specifically, for example, the function of adjusting the distance between the lenses of the microlens array 52 is provided, or the position of the collimating lens 51 is adjusted to change the state of the light incident on the microlens array 52, thereby changing the spot light. Adjust the position. Moreover, you may change the position projected by changing the positional relationship of the irradiation light source part 5 and the target object 6. FIG. In particular, if the optical axes of the respective spot lights are not arranged in parallel but are arranged radially from a predetermined position or arranged so as to collect light toward the predetermined position, the irradiation light source unit 5 and the object 6 are arranged. The interval of the spotlights can be changed by changing the distance.

  Some specific examples of the pattern light image pattern changing method by the irradiation light source unit 5 will be described with reference to the drawings. FIG. 13 shows an irradiation light source unit 5a using a beam splitter. The light emitted from the light source 50 and adjusted to parallel light by the collimating lens 51 is split by the beam splitter 53 into a plurality of parallel light beams having different directions. The light lens 54 adjusts the spot light. The position of the pattern light can be adjusted by changing the angle with the optical axis of the beam splitter 53. Instead of the beam splitter, a combination of a phase plate and a birefringent crystal may be used.

  FIG. 14 shows an irradiation light source unit 5b using a DMD (Digital Mirror Device). The DMD has a fine movable mirror spread on a semiconductor substrate. The light emitted from the light source 5 is adjusted to parallel light by the collimator lens 51, passes through the half mirror 55, is reflected by the DMD 56, is further reflected by the half mirror 55, is guided to the microlens array 52, and is spot light Adjusted to The position of the spot light can be adjusted by adjusting the inclination of each mirror of the DMD 56.

  When an SLM (Spatial Light Modulator) is used instead of the DMD 56, the wavefront of the emitted light by modulating the phase of the incident light can be changed for each lens of the microlens array 52. Thus, the irradiation position can be moved by changing the wavefront of the emitted light.

  As described above, when DMD or SLM is used, the position of each spot light can be changed independently. Therefore, it is particularly effective for measuring the surface shape of the object 6 having a complicated surface shape. is there.

  FIG. 15 shows an irradiation light source unit 5c that uses a shift plate to change the position of the spot light. The shift plate 57 shifts incident light in a predetermined direction and outputs it, and is disposed obliquely with respect to the incident optical axis and is disposed so as to be rotatable about the incident optical axis. By rotating the shift plate 57 around the incident optical axis, the spot light irradiation position on the surface of the object 6 can be moved. By combining a plurality of such shift plates 57, the movement pattern of the good irradiation position can be made complicated.

In the above description, an example in which bright spots are two-dimensionally arranged has been described as the projection pattern, but a plurality of slit lights may be irradiated. When the slit light is irradiated, the height information can be detected as the positional deviation of the slit light as shown in FIG. FIG. 17 is a diagram illustrating a configuration of the image position calculation unit 2a when slit light is used. The image position calculation unit 2a has a baseline width processing unit 26 instead of the bright spot area processing unit 23 of the image position calculation unit 2 corresponding to the spot light shown in FIG. The baseline width processing unit 26 obtains the width w (x, y) of the bright line by the same method as the bright spot area processing unit 23. The center-of-gravity information processing unit 24 uses the same method as the bright-line center-of-gravity information processing unit 24, and the bright-line center-of-gravity information processing unit 24a performs zero-order moment M ₀ (x, y), which is center-of-line information on bright lines, Calculate _1x (x, y) respectively. The center-of-gravity position calculation unit 30 of the shape calculation unit 3 obtains the center-of-gravity position of the bright line based on the obtained moment.

  The pattern light image may be changed by changing the thickness of the bright line, the interval, and the like. Here, although it arrange | positions so that it may be planar and the direction of slit light may extend along ay direction, you may change the direction of slit light. In order to change the interval and direction, the same means as in the case of the spot light described above can be used.

  The outline of the processing after obtaining the position of the center of gravity is the same as that in the case of the above-described spot light. In the image processing, the slit light can be divided in the length direction and can be handled in the same manner as the spot light.

  The projection pattern is not limited to the bright spot pattern and the slit light, and various pattern light images such as a grid pattern and a concentric circle pattern can be adopted.

  As described above, according to the present invention, it is possible to accurately detect the shape of an object at high speed by changing a projection pattern light image composed of bright spots, slits, and the like according to the shape of the object. it can.

It is a block block diagram which shows the whole structure of the three-dimensional shape measuring apparatus which concerns on this invention. It is a block diagram which shows one Example of the irradiation light source part of the apparatus of FIG. It is a block block diagram of the imaging part of the apparatus of FIG. It is a detailed block diagram of the imaging part of FIG. FIG. 5 is a detailed configuration diagram illustrating an integration circuit of the imaging unit in FIG. 4. It is a block block diagram of the image position calculating part of the apparatus of FIG. It is a figure which shows an example of the circuit structure of the smooth process part of FIG. It is a figure which shows an example of the circuit structure of the bright spot part of FIG. It is a figure which shows an example of the circuit structure of the bright spot area process part of FIG. It is a figure which shows an example of the circuit structure of the bright spot gravity center information processing part of FIG. It is a block block diagram explaining the structure of the shape calculation part of the apparatus of FIG. It is a figure which shows the example of the positional relationship of an imaging part, an irradiation light source part, and a target object, and the projection pattern light image acquired by the imaging part. It is a figure which shows another embodiment of an irradiation light source part. It is a figure which shows another embodiment of an irradiation light source part. It is a figure which shows another embodiment of an irradiation light source part. It is a figure which shows an example of the projection pattern image acquired when slit light is irradiated. It is a figure which shows the structure of the image position calculating part in the case of using slit light.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Imaging part, 2 ... Image position calculating part, 3 ... Shape calculation part, 4 ... Irradiation light control part, 5 ... Irradiation light source part, 6 ... Target object, 7 ... Support stand, 9 ... Three-dimensional shape measuring apparatus, 11 DESCRIPTION OF SYMBOLS ... Light receiving element array, 12 ... Parallel amplifier, 13 ... Converter array, 14 ... Timing control part, 16 ... Signal processing part, 21 ... Smoothing processing part, 22 ... Bright spot extraction part, 23 ... Bright spot area processing part, 24 ... Bright spot (bright line) centroid information processing unit, 26 ... Baseline width processing unit, 30 ... Center of gravity position calculation unit, 31 ... Information calculation unit, 50 ... Light source, 51 ... Collimator lens, 52 ... Micro lens array, 53 ... Beam Splitter, 54 ... Condensing lens, 55 ... Half mirror, 57 ... Shift plate, 110 ... Light receiving element, 111 ... Photoelectric conversion element, 112, 165 ... Switch element, 115 ... Vertical light receiving unit, 120 ... Charge amplifier, 130 ... Conversion Vessel, 141 ... Timing unit 142... Vertical shift register 143 control signal unit 160 processing circuit 161 integration circuit 162 comparison circuit 163 capacity control mechanism 164 variable capacity unit 211, 221, 231, 241 ... data buffer, 212, 233 ... SUM calculator, 213 ... divider, 222, 232 ... comparator, 223 ... AND calculator, 224 ... judgment output unit.

Claims (7)

A three-dimensional shape measuring apparatus for measuring a three-dimensional shape of a measurement object in a non-contact manner,
An irradiation light source unit that irradiates a measurement object with a pattern light image in which a large number of bright spots and / or bright lines are arranged at predetermined intervals on a plane orthogonal to the optical axis, and projects it onto the surface;
An imaging unit that includes a plurality of light receiving elements, and that captures a projected pattern light image projected on the surface of the measurement object by the irradiated pattern light image;
An image position calculation unit for obtaining the position of the projection pattern light image in the image from the output image of the imaging unit;
A shape calculation unit for determining the shape of the target object based on the positional information of the obtained projection pattern light image and the positional relationship information between the imaging unit and the irradiation light source unit at the time of imaging;
An irradiation light control unit that adjusts the bright spot, the interval or the thickness of the bright line in the light image of the pattern light to be irradiated next by the irradiation light source unit according to the calculation result of the shape calculation unit,
A three-dimensional shape measuring apparatus comprising: The pattern light irradiated by the irradiation light source unit is a bright spot pattern in which a plurality of bright spots are arranged,
The image position calculator is
A bright spot position calculation unit that calculates the center position of each bright spot based on the brightness data of the bright spot pattern in the projected pattern light image;
A bright spot barycenter information calculation unit that calculates barycentric information related to the barycentric position of each bright spot based on the brightness data of the bright spot pattern in the projection pattern light image;
The three-dimensional shape measuring apparatus according to claim 1, comprising:   The bright spot position calculation unit and the bright spot centroid information calculation unit perform calculation based on data whose luminance exceeds a predetermined reference value in luminance data of the bright spot pattern in the projection pattern light image, The three-dimensional shape measuring apparatus according to claim 2.   4. The three-dimensional shape measuring apparatus according to claim 2, wherein the center-of-gravity information output by the bright-point center-of-gravity information calculation unit is moment information about a region centered on each bright spot.   The three-dimensional shape measurement apparatus according to claim 1, wherein the irradiation light control unit further includes a translational movement mechanism that translates the irradiation position of the pattern light irradiated by the irradiation light source unit.   The three-dimensional shape measurement apparatus according to claim 1, wherein the irradiation light control unit further includes a rotation moving mechanism that rotates and moves the irradiation position of the pattern light irradiated by the irradiation light source unit.   The three-dimensional device according to claim 2, wherein the irradiation light control unit further includes a light control device capable of independently adjusting the irradiation position of each bright spot in the pattern light irradiated by the irradiation light source unit. Shape measuring device.

Images