JP4324701B2 - Optical emission spectrometer - Google Patents

Description

  The present invention relates to various emission spectroscopic analyzers such as an inductively coupled plasma (ICP) emission spectroscopic analysis apparatus and a laser-excited emission spectroscopic analysis apparatus. It relates to technology for reducing the impact.

  In an ICP emission spectroscopic analyzer, a sample is introduced into a high-temperature plasma in an ICP torch to cause excitation light emission, and the emission light is wavelength-dispersed and detected by a detector to obtain an emission spectrum. A qualitative analysis of the element contained in the sample is performed from the wavelength of the appearing spectral line, and a quantitative analysis of the element is performed from the intensity of the spectral line (see Patent Document 1, etc.).

  In such an ICP emission spectroscopic analyzer, due to the difference in the configuration of the optical system, it is roughly divided into a sequential type configuration that sequentially detects spectral lines of different wavelengths by rotating a monochromator, and a detection in which a large number of micro light receiving elements are arranged, for example. There is a multi-channel configuration in which a number of spectral lines are detected simultaneously using a detector. The multi-channel type apparatus has an advantage that a large number of spectral lines can be acquired in a short time, but on the other hand, the wavelength accuracy is determined by the size of one light receiving element of the detector, etc. There is a problem that it is difficult to increase the wavelength accuracy compared to the above.

  By the way, in the ICP emission spectroscopic analysis, since the number of emission spectrum lines of the element is very large, for example, as shown in FIG. 5, the spectrum lines of the coexisting element having a wavelength close to the spectrum line of the target element overlap. In other words (in other words, affected by spectral interference), the spectral intensity of the target element may appear to be larger than actual. As described above, since the wavelength resolution is relatively high in the sequential type apparatus, it is easy to take measures such as improving the separation characteristics of adjacent spectral lines and making them less susceptible to spectral interference caused by coexisting elements. On the other hand, since it is difficult to increase the wavelength resolution in a multi-channel type apparatus, adjacent spectral lines cannot be sufficiently separated and are easily affected by spectral interference caused by coexisting elements.

  Normally, there are many spectral lines of one kind of element, not just one, so even if there is a problem of overlapping spectral lines of coexisting elements in a certain spectral line, there is no influence of overlapping spectral lines of coexisting elements. In some cases, the above problem can be avoided by selecting a spectral line having a wavelength of. However, spectral lines with low signal intensity have a problem in that the S / N ratio with respect to background noise is poor and the quantitative accuracy is lowered. In some cases, there are no other suitable spectral lines.

  Therefore, in order to reduce the influence of coexisting elements even if there are overlapping spectral lines and to improve the accuracy and quantitative sensitivity (detection limit) of the target element, correction processing for coexisting elements (between elements) has been performed. (Refer to patent document 2 etc.). This conventional inter-element correction method will be schematically described.

In general, the content (concentration) of a target element in an analysis sample is calculated based on a calibration curve created using a standard sample. Here, it is assumed that a calibration curve (concentration calculation formula) is represented by the following formula.
^{C0 = aI 3 + bI 2 +} cI + d ... (1)
Here, C0: concentration before correction of the target element, I: spectral intensity of the target element obtained by measurement, and a to d: coefficients of calibration curve (obtained experimentally). The concentration obtained here is the one before correction, and it is necessary to subtract the amount corresponding to the intensity of spectral interference due to the coexisting element, so the corrected concentration C is obtained by the following equation.
C = C0 + ΣLj · Cj (2)
Here, Lj is a correction coefficient of the coexisting element, and Cj is a concentration before correction of the coexisting element. That is, the concentrations of the target (corrected) element and the coexisting (corrected) element are measured separately, and the measurement result of the target element is C0 obtained by multiplying Cj, which is the measurement result of the coexisting element, by a predetermined correction coefficient Lj. Correction is achieved by adding to (however, subtracting because Lj is negative).

In order to perform correction according to equation (2), it is necessary to know the concentration of the coexisting elements and the correction coefficient. An example of how to obtain this correction coefficient is as follows. First, a calibration standard sample with a small influence of coexisting elements including the target element (low concentration of coexisting elements) is measured with this device, and the standard calibration curve of the following equation (3) is used using the measurement results at that time. Create
C ′ = a′I _DC ³ + b′I _DC ² + c′I _DC + d ′ (3)
Here, C ′ is the estimated reference concentration of the target element, I _{DC is} the signal intensity of the spectral line of the target element in the standard sample obtained by measurement, and a ′ to d ′ are the coefficients of the reference calibration curve. The concentration correction equation obtained from this reference calibration curve is expressed by equation (4).
Ci ′ = C ′ + ΣLj · Cj ′ (4)
Here, Ci ′ is the concentration of the target element, and Cj ′ is the concentration of the coexisting element.
Next, a calibration standard sample that is affected by coexisting elements (high concentration of coexisting elements) is measured, and the measurement results are applied to the standard calibration curve of equation (3) to obtain C ', and equation (4) In this case, a correction coefficient Lj that gives this C ′ may be obtained.

The conventional inter-element correction as described above has the following problems.
(1) Whether or not the inter-element correction as described above is necessary for the spectrum of the target element cannot be determined unless the correction coefficient Lj is obtained, but in order to obtain the correction coefficient, as described above It is necessary to measure a calibration standard sample and create a calibration curve, which is cumbersome and time-consuming. Further, when correction is unnecessary, the measurement of the calibration standard sample is wasted. Further, even if the necessity of inter-element correction is determined based on the correction coefficient, C0, Cj, etc., considerable knowledge and experience are required, and this can only be done by a skilled analysis engineer.

(2) As described above, as a method of avoiding or reducing the influence of the spectral interference of coexisting elements, a method of selecting another spectral line depending on the target element and a method of performing inter-element correction as described above can be adopted. Therefore, it is desirable to determine which of the above two methods is more appropriate in order to perform analysis with higher accuracy and higher sensitivity. However, in the method in which the analyst determines whether or not inter-element correction is necessary as described above, if it is attempted to select the spectral line as described above, the analysis takes too much time and is not practical.

(3) For the assumed coexisting elements, inter-element correction can be performed by the method described above. However, if there is spectral interference due to an unexpected coexisting element, the correction coefficient for the coexisting element is not obtained and correction is made. I cannot even evaluate the necessity of

Japanese Patent Laid-Open No. 10-253540 Japanese Patent Laid-Open No. 5-45287

  The present invention has been made to solve the above-mentioned problems, and its main purpose is not to rely on judgment based on the experience of a skilled person, and is troublesome and laborious as in the measurement of a calibration standard sample. An object of the present invention is to provide an emission spectroscopic analyzer capable of accurately evaluating whether or not to correct the influence of spectral interference caused by coexisting elements without performing such work.

The present invention, which has been made to solve the above problems, excites a sample to emit light having a wavelength specific to the element contained in the sample, and based on a spectrum obtained by spectroscopically measuring the light. In an emission spectroscopic analysis apparatus that performs quantitative analysis of an element, it has an evaluation means for evaluating the effectiveness of inter-element correction for reducing the influence of spectral interference caused by coexisting elements on the spectrum of the target element,
From the intensity value obtained by performing background correction on the spectral intensity of the coexisting element obtained by measuring the sample, and the interference correction coefficient reflecting the degree of spectral interference of the coexisting element at the measurement wavelength position of the target element, An interference amount calculating means for calculating the amount of interference superimposed on the spectral intensity of the target element at the measurement wavelength position;
Measurement that estimates the measurement accuracy when inter-element correction is performed based on the intensity value obtained by performing background correction on the spectral intensity of the target element at the measurement wavelength position obtained by measuring the sample and the interference amount. Accuracy estimation means;
Determination means for determining the effectiveness of the correction by comparing the measurement accuracy obtained by the estimation with a predetermined measurement accuracy desired value;
It is characterized by including.

  In the emission spectroscopic analysis apparatus according to the present invention, when evaluating the necessity of correcting the influence of spectral interference by the evaluation means, the spectral intensity of the target element and coexisting elements obtained by measuring the sample is corrected in the background. The peak height of a pure spectrum is calculated, and the amount of interference is calculated without converting each into a concentration (quantitative value) using the peak height (the above “intensity value subjected to background correction”). Therefore, according to the emission spectroscopic analysis apparatus according to the present invention, there is no need to convert the spectral intensity of the coexisting element into a concentration (quantitative value), and therefore a calibration curve for converting the spectral intensity into the concentration is unnecessary. Therefore, it is not necessary to measure a calibration standard sample for creating a calibration curve.

  Moreover, it is not necessary to intervene the judgment by the analyst in the judgment of necessity of correction, etc. as in the past, and it is possible to perform the evaluation automatically. Appropriate correction can be performed to obtain accurate analysis results.

  When the interference amount is estimated directly from the intensity value without using the calibration curve as in the present invention, the trend between the calibration curve of the spectrum intensity of the target element versus the concentration and the calibration curve of the spectrum intensity of the coexisting element versus the concentration. In some cases, the correction error may not be reflected in the amount of interference and the correction error may be large. Therefore, when actually performing inter-element correction, prepare a calibration standard sample and calculate the correction coefficient based on the measurement results. It is desirable to do.

In the emission spectroscopic analysis apparatus according to the present invention, preferably, for each of various elements, the measurement wavelength position for obtaining the spectrum of the target element, and the coexisting elements that can influence the spectral interference on the measurement wavelength position. A correction wavelength position for acquiring a spectrum and an interference correction coefficient at the measurement wavelength position due to the coexisting element are provided as a database, and the evaluation means is set from the database. It may be configured to read and use information on the measurement wavelength position, the correction wavelength position, and the interference correction coefficient for the target element.

  According to this configuration, when the analyst sets the target element to be analyzed, the coexisting elements that affect the spectrum of the target element are clarified from the database, and even if there are multiple coexisting elements, the calibration standard sample can be selected. The necessity of inter-element correction is evaluated for each coexisting element without measurement. Therefore, even when an unexpected coexisting element exists, it is possible to evaluate the necessity of inter-element correction regarding the coexisting element without any problem.

Furthermore, in the emission spectroscopic analysis apparatus according to the present invention, the measurement accuracy estimation means also estimates the measurement accuracy when inter-element correction is not performed, and the determination means determines that the measurement accuracy when correction is not performed is a measurement accuracy desired value. by determining it may not meet or can be be that the configuration determine the necessity of the element between the correction.

  According to this configuration, it is not necessary to perform troublesome correction when necessary measurement accuracy can be ensured without performing inter-element correction.

  Furthermore, in the emission spectroscopic analysis apparatus according to the present invention, the evaluation unit further includes a measurement wavelength selection unit that selects a measurement wavelength position according to a determination result by the determination unit when the target element has a plurality of measurement wavelength positions. It is good to have a configuration provided.

  As described above, in order to reduce the influence of spectral interference due to coexisting elements on the spectrum of the target element, in addition to performing inter-element correction, it is conceivable to search for other spectra that are not affected by spectral interference or are small. According to the above configuration, when sufficient measurement accuracy cannot be ensured for a certain spectrum of the target element, it is possible to select an appropriate one of inter-element correction or search for another spectrum. Thereby, analysis with high accuracy and high sensitivity becomes possible.

  Furthermore, in the emission spectroscopic analysis apparatus according to the present invention, the evaluation means, when it is determined that inter-element correction is effective, the elements contained in the calibration standard sample for performing the correction process, the necessary concentration, It is preferable to further include a correction information providing means for calculating and displaying.

  According to this configuration, the conditions for performing inter-element correction are presented by the correction information providing means, so even if not a skilled analyst, an appropriate standard sample for calibration is prepared to provide high accuracy between elements. Correction can be performed.

  Hereinafter, an ICP emission spectroscopic analyzer according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic configuration diagram of an ICP emission spectroscopic analyzer according to this embodiment. This ICP emission spectroscopic analyzer is a multi-channel type apparatus.

  In FIG. 1, the sample solution supplied from the autosampler 11 controlled by the control unit 21 is atomized by a nebulizer (not shown) and then introduced into the light emitting unit 10 and excited by a plasma flame. The light generated thereby is collected by the condenser lens 12, passes through the slit 13, and is sent to the diffraction grating 14. The light wavelength-dispersed by the diffraction grating 14 is detected almost simultaneously by a multi-channel detector 15 such as a linear CCD sensor. Specifically, here, the light between the wavelengths λ1 and λ2 reaching the both ends of the light receiving surface of the detector 15 is detected almost simultaneously, and the detection signal photoelectrically converted by each light receiving element is sent to the data processing unit 20. send.

  The data processing unit 20 converts the detection signal into digital data (spectral data) and performs arithmetic processing according to a predetermined algorithm, thereby executing qualitative analysis and quantitative analysis of the sample. For this purpose, the data processing unit 20 incorporates a spectrum data memory 201 for storing spectrum data and a wavelength database 202. The operations of the above-described units are comprehensively controlled by the control unit 21, and many of the functions of the control unit 21 and the data processing unit 20 are achieved by executing predetermined programs on a general-purpose personal computer 22. The personal computer 22 is connected to an input unit 23 including a keyboard for an operator to input analysis conditions and the like, and a display unit 24 including a display for displaying measurement results and the like.

  In the ICP emission spectroscopic analysis apparatus of the present embodiment having the above-described configuration, in order to perform inter-element correction for reducing the influence of spectral interference due to coexisting elements, or to select a measurement wavelength position that is not affected by such influence. As an auxiliary function, the data processing unit 20 has a measurement accuracy evaluation function. FIG. 3 is a flowchart showing a processing procedure relating to this measurement accuracy evaluation function. The operation of this evaluation function will be described with reference to FIG.

  Now, the ICP analysis is performed on the sample containing the target element, and as a result, the spectrum data memory 201 of the data processing unit 20 stores the data constituting the emission spectrum in the wavelength range of λ1 to λ2 as shown in FIG. It is assumed that As described above, this apparatus can acquire such a spectrum in a much shorter time than a sequential apparatus.

  Further, the wavelength database 202 measures, for each of various elements, the measurement wavelength position for measuring the spectrum line by the element, the type of coexisting (interference) element at the measurement wavelength position, and the spectrum line by the interference element. For correction, and an interference correction coefficient indicating the degree of spectral interference of the interfering element at the measurement wavelength position is stored in a database so as to be easily searched. Since this wavelength database 202 is unique to each model, it is created based on data measured using this ICP emission spectroscopic analyzer.

  The analyst instructs the start of evaluation after setting the type of target element, desired measurement accuracy (lower limit of quantification), and the like from the input unit 23 (step S1). In response to this instruction, the data processor 20 first reads the set measurement wavelength position λa of the target element A, correction wavelength position λb of the interference element B, and interference correction coefficient with reference to the wavelength database 202 ( Step S2). When there are a plurality of measurement wavelength positions corresponding to the target element A, the measurement wavelength positions may be selected one by one in a predetermined order, for example, in descending order of intensity or in ascending order of detection lower limit.

  Thereafter, the spectrum intensity Is at the measurement wavelength position λa is acquired from the data stored in the spectrum data memory 201 (step S3), and background correction is performed on the spectrum intensity Is, thereby removing the intensity value Is from the background noise. 'Is calculated (step S4). For example, as shown in FIG. 4A, when the spectrum of the intensity Is exists at the wavelength measurement position λa, the intensity value Is ′ = Is−Ib obtained by subtracting the background intensity Ib is obtained by performing the background correction.

  Note that when performing background correction, it is necessary to determine the background position, and it is necessary to set the same wavelength position as the background position for all elements measured in one analysis. In general, such a position is often manually set by an expert, but here, it is preferable to use a method already proposed by the present applicant in Japanese Patent Application No. 2005-76958. According to this method, since the background position common to all elements is automatically determined, it is suitable for automatic evaluation as in the present embodiment without bothering an analyst during the process.

  Next, the spectrum intensity Isj at the correction wavelength position λb is acquired from the data stored in the spectrum data memory 201 (step S5), and background correction is performed in the same manner as in step S4. By doing this, the intensity value Isj ′ is calculated by subtracting the background noise (step S6). For example, as shown in FIG. 4B, when a spectrum of intensity Isj exists at the wavelength position λb, an intensity value Isj ′ = Isj−Ibj obtained by subtracting the background intensity Ibj is obtained by performing background correction.

  Thereafter, the interference value included in the intensity value Is ′ of the target element A after background correction at the measurement wavelength λa is calculated by multiplying the intensity value Isj ′ of the coexisting element B after background correction by the interference correction coefficient ( Step S7). Then, the obtained interference amount is multiplied by a predetermined coefficient P1, and the measurement accuracy when inter-element correction is not performed is obtained from the value and the intensity value Is' of the target element A after background correction (step S8). Then, it is determined whether or not the necessary measurement accuracy is obtained (step S9). If it is determined that the required measurement accuracy has been obtained, it is not necessary to perform inter-element correction or search for another spectrum of the target element A. Therefore, the process proceeds to step S14 and no correction process is set and the process ends. To do.

  If it is determined in step S9 that the required measurement accuracy is not obtained, it is next determined whether or not the target element A has a measurement wavelength position other than the previous measurement wavelength position λa (step S10). If there are measurement wavelength positions other than those that have already been evaluated, there is a possibility that a measurement wavelength position where the influence of spectral interference due to interfering elements is small compared to performing inter-element correction may be found. The measurement wavelength position is changed, the process returns to step S3, and the processes of steps S3 to S9 are repeated.

  If it is determined in step S9 that there is no other measurement wavelength position, inter-element correction must be performed. Therefore, the obtained interference amount is usually multiplied by a predetermined coefficient P2 different from the previous coefficient P1, The measurement accuracy when inter-element correction is performed from the value and the intensity value Is ′ of the target element A after background correction is obtained (step S11). Then, it is determined whether or not the necessary measurement accuracy is obtained (step S12). If the required measurement accuracy is obtained, calculate the concentration of the coexisting element B, which is the correction target element, and the calibration standard sample necessary to create the calibration curve as inter-element correction information. It displays on the display part 24 (step S13). On the other hand, if the required accuracy cannot be obtained in step S12, the desired measurement accuracy cannot be obtained by either the selection of the measurement wavelength or the inter-element correction process. Step S15) The process is terminated.

  Here, the evaluation of the measurement accuracy in steps S8 and S11 will be described. For the analyst, measurement accuracy is the lower limit of quantification. The error factors that deteriorate the measurement accuracy in this apparatus are roughly divided into a variation error (reproducibility) that changes from measurement to measurement and a deviation from the true value that occurs almost constantly regardless of measurement. The influence of the spectral interference due to the coexisting elements as described above is the latter, and ideally, by performing inter-element correction, this shift is eliminated, but a variation error remains.

In order to accurately evaluate the measurement accuracy due to the variation error after correction of the target element and the effectiveness of the correction, it is preferable to perform evaluation at each stage of correction. That is, the intensity Is ′ of the target element after background correction, the background intensity Ib of the target element during background correction, the intensity Isj ′ of the coexisting element after background correction, and the background intensity of the coexisting element during background correction The five elements Ibj and interference correction coefficient Lj may be mutually evaluated as follows, for example.
(1) In order to evaluate the measurement accuracy of the target element, Is ′ / Ib is calculated, an evaluation coefficient K (K> 1) is set for this, and Is ′ / Ib> K, K ≧ Is ′ / It is determined whether the range is Ib> 1, 1 ≧ Is ′ / Ib> 1 / K, or 1 / K ≧ Is ′ / Ib.
(2) In order to evaluate the measurement accuracy of the coexisting elements, Isj ′ / Ibj is calculated, and using the evaluation coefficient K, Isj ′ / Ibj> K, K ≧ Isj ′ / Ibj> 1, 1 ≧ Isj ′ It is determined which of the ranges / Ibj> 1 / K and 1 / K ≧ Isj ′ / Ibj.
The above (1) and (2) are for evaluating the influence of errors caused by background intensity on the strength of the target element and coexisting elements.
(3) Further, in order to evaluate the correction amount, Is ′ / Lj · Isj ′ is calculated, and an evaluation coefficient M (M> 1) is set for this, Is ′ / Lj · Isj ′> M, It is determined whether M ≧ Is ′ / Lj · Isj ′> 1, 1 ≧ Is ′ / Lj · Isj ′> 1 / M, or 1 / M ≧ Is ′ / Lj · Isj ′.

  Moreover, since the deviation from the true value is dominant in the measurement accuracy when correction is not performed, this cannot be compared with the variation error after correction as it is, so the former is replaced with the latter. That is, Ib ′ = Lj · Isj × N (N is a predetermined coefficient) that gives a variation error with a width equivalent to the deviation from the true value. Then, by Is / (Ib + Ib ′), it is possible to evaluate the influence of the error caused by (Ib + Ib ′) on Is ′. For such evaluation, an evaluation criterion may be determined based on a required value of measurement accuracy input in advance by an analyst, and it may be determined whether or not the evaluation criterion is exceeded.

  As described above, in the ICP emission spectroscopic analyzer according to the present embodiment, it is not necessary to measure the calibration standard sample one by one in order to obtain the correction coefficient at the stage of evaluating the effectiveness of inter-element correction, and the operation is very simple. It becomes. If sufficient measurement accuracy cannot be obtained even if the measurement wavelength position of the target element is changed, and inter-element correction processing is required, measurement of a calibration standard sample is required to perform high-precision correction. However, since the apparatus instructs which standard sample for calibration should be prepared containing what elements and at what concentration, the work of the analyst becomes simple and even an unskilled person can handle it.

  In addition, the said Example is an example of this invention, and it is natural that even if it changes, corrects and adds suitably in the range of the meaning of this invention, it is included by this invention. For example, in the above embodiment, a multi-channel type emission spectroscopic analyzer is shown, but the present invention can also be applied to a sequential type spectrophotometer.

  Further, the present invention is not applied only to the ICP emission spectroscopic analyzer as described above, and other various laser excitation plasma emission spectroscopic analyzers, solid state emission spectroscopic analyzers, glow discharge emission spectroscopic analyzers, etc. It can be applied to an emission spectroscopic analyzer.

1 is a schematic configuration diagram of an ICP emission spectroscopic analyzer that is one embodiment of the present invention. The figure which shows an example of the emission spectrum acquired with an ICP emission-spectral-analysis apparatus. The flowchart which shows the process sequence of evaluation in the ICP emission-spectral-analysis apparatus of a present Example. The figure for demonstrating the evaluation processing method. The figure which shows the spectral interference by the overlap of a spectrum.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Light emission part 11 ... Autosampler 12 ... Condensing lens 13 ... Slit 14 ... Diffraction grating 15 ... Multichannel type detector 20 ... Data processing part 201 ... Spectral data memory 202 ... Wavelength database 21 ... Control part 22 ... Personal computer 23 ... Input unit 24 ... Display unit

Claims (5)

In an emission spectroscopic analyzer for performing quantitative analysis of an element based on a spectrum obtained by exciting a sample to emit light having a wavelength unique to the element contained in the sample and spectroscopically measuring the light. Evaluation means for evaluating the effectiveness of inter-element correction for reducing the influence of spectral interference due to coexisting elements on the spectrum of the
From the intensity value obtained by performing background correction on the spectral intensity of the coexisting element obtained by measuring the sample, and the interference correction coefficient reflecting the degree of spectral interference of the coexisting element at the measurement wavelength position of the target element, An interference amount calculating means for calculating the amount of interference superimposed on the spectral intensity of the target element at the measurement wavelength position;
Measurement that estimates the measurement accuracy when inter-element correction is performed based on the intensity value obtained by performing background correction on the spectral intensity of the target element at the measurement wavelength position obtained by measuring the sample and the interference amount. Accuracy estimation means;
Determination means for determining the effectiveness of the correction by comparing the measurement accuracy obtained by the estimation with a predetermined measurement accuracy desired value;
An emission spectroscopic analyzer comprising:   Measurement wavelength position for obtaining the spectrum of the target element for each of the various elements, correction wavelength position for obtaining the spectrum of the coexisting element that can affect spectral interference with the measurement wavelength position, and the coexistence A database for storing at least the interference correction coefficient at the measurement wavelength position due to the element as information; and the evaluation means, from the database, the measurement wavelength position for the set target element, the correction wavelength position, and the interference correction 2. The emission spectroscopic analysis apparatus according to claim 1, wherein coefficient information is read and used.   The measurement accuracy estimation means also estimates the measurement accuracy when the inter-element correction is not performed, and the determination means determines whether the measurement accuracy when the correction is not performed satisfies the measurement accuracy desired value, thereby determining the inter-element The emission spectroscopic analysis apparatus according to claim 1, wherein whether or not correction is necessary is determined.   The said evaluation means is further provided with the measurement wavelength selection means which selects a measurement wavelength position according to the determination result by the said determination means, when the target element has a several measurement wavelength position. Emission spectroscopic analyzer. The evaluation means further comprises correction information providing means for calculating and displaying the contained element and the necessary concentration of the calibration standard sample for performing the correction process when it is determined that the inter-element correction is effective. The emission spectroscopic analyzer according to claim 1, comprising:

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